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OHTA Masato  大田 正人

ORCIDConnect your ORCID iD *help
Researcher Number 50052874
External Links
Affiliation (based on the past Project Information) *help 2006: 芝浦工業大学, 工学部応用化学科, 助教授
2006: SHIBAURA INSTITUTE OF TECHNOLOGY, PROFESSOR, 工学部応用化学科, 教授
1998 – 2005: 芝浦工業大学, 工学部, 助教授
Review Section/Research Field
Except Principal Investigator
Production engineering/Processing studies / 機械工作・生産工学
Keywords
Except Principal Investigator
CMP / Si / シリカ / スラリー / ガラス / 研磨 / pH / Siウエハー / 研磨剤 / SOLID CONTACT … More / SLURRY / GLASS / PHYSICAL ACTION / CHEMICAL ACTION / POLISHING PAD / ポリウレタン / 微小変形 / 表面トポグラフィ / 実接触面積 / 物理的作用 / 化学的作用 / 研磨パット / Slurry / Colloidal Silica / Sol-gel / Copper / Glass / Polishing / ウエハー / メタル / CPM / 研磨抵抗 / 作用点 / Prestonの定理 / パッド / 砥粒間隔 / 粒径 / スラリー濃度 / CNP / コロイダルシリカ / ゾル-ゲル法 / 銅 / SILICA / LAPPING SLURRY / LAPPING MACHINE / ROUNDNESS / CENTRIFUGAL FORCE / GLASS BALL / SMALL BALL / POLISHING / カップ研磨方式 / シリカ粒子 / 真球度 / 球研磨 / ゾルゲル法 / 研磨スラリー / 研磨加工 / ラップ盤 / 真円度 / 遠心力 / ガラス球 / 微小ボール / silica / pad / Si water / slurry / sol-gel method / planerization / 研磨布 / ゾル・ゲル法 / プラナリゼーション Less
  • Research Projects

    (4 results)
  • Research Products

    (3 results)
  • Co-Researchers

    (3 People)
  •  A STUDY ON CONTACT MECHANISM AND CMP ACTION OF POLISHING PAD

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  •  A BASIC STUDY ON METAL CMP MECHANISM AND A TRIAL FOR PRODUCING CMP SLURRY BY SOL-GEL METHOD

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  •  PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORS

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  •  A basic study on CMP mechanism and production of CMP slurry

    • Principal Investigator
      SHIBATA Junii
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY

All 2004

All Journal Article

  • [Journal Article] A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method2004

    • Author(s)
      J.SHIBATA, M.OHTA, A.Oda
    • Journal Title

      Advances in Abrasive Technology -7^<th> International Symposium in Abrasives

      Pages: 389-392

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560101
  • [Journal Article] ポリシングにおける研磨作用点に関する考察2004

    • Author(s)
      李鋼成, 柴田順二, 大田正人
    • Journal Title

      2004年度砥粒加工学会学術講演会講演論文集 2004年度

      Pages: 57-58

    • Data Source
      KAKENHI-PROJECT-15560101
  • [Journal Article] A Basic Study on CMP Mechanism and a Trial to produce CMP Slurry by Sol-gel Method2004

    • Author(s)
      J.SHIBATA, M.OHTA, A.Oda
    • Journal Title

      Advances in Abrasive Technology-7^<th> International Symposium in Abrasive

      Pages: 389-392

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560101
  • 1.  SHIBATA Junii (30052822)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 3 results
  • 2.  UEKI Tadahiro (50052890)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 3.  KIMURA Takayasu (90052711)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results

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