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UEKI Tadahiro  植木 忠博

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… Alternative Names

植木 忠博  ウエキ タダヒロ

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Researcher Number 50052890
Affiliation (Current) 2025: 芝浦工業大学, 工学部, 准教授
Affiliation (based on the past Project Information) *help 2006: 芝浦工業大学, 工学部応用化学科, 講師
2006: SHIBAURA INSTITUTE OF TECHNOLOGY, LECTURER, 工学部機械工学科, 講師
2001 – 2005: 芝浦工業大学, 工学部, 講師
Review Section/Research Field
Except Principal Investigator
Production engineering/Processing studies / 機械工作・生産工学
Keywords
Except Principal Investigator
CMP / Si / スラリー / ガラス / シリカ / 研磨 / SOLID CONTACT / SLURRY / GLASS / PHYSICAL ACTION … More / CHEMICAL ACTION / POLISHING PAD / ポリウレタン / 微小変形 / 表面トポグラフィ / 実接触面積 / 物理的作用 / 化学的作用 / 研磨パット / Slurry / Colloidal Silica / Sol-gel / Copper / Glass / Polishing / ウエハー / メタル / CPM / 研磨抵抗 / 作用点 / Prestonの定理 / パッド / 砥粒間隔 / 粒径 / スラリー濃度 / CNP / コロイダルシリカ / ゾル-ゲル法 / 銅 / Siウエハー / SILICA / LAPPING SLURRY / LAPPING MACHINE / ROUNDNESS / CENTRIFUGAL FORCE / GLASS BALL / SMALL BALL / POLISHING / カップ研磨方式 / シリカ粒子 / 真球度 / 球研磨 / ゾルゲル法 / 研磨スラリー / 研磨加工 / 研磨剤 / ラップ盤 / 真円度 / 遠心力 / ガラス球 / 微小ボール Less
  • Research Projects

    (3 results)
  • Co-Researchers

    (3 People)
  •  A STUDY ON CONTACT MECHANISM AND CMP ACTION OF POLISHING PAD

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  •  A BASIC STUDY ON METAL CMP MECHANISM AND A TRIAL FOR PRODUCING CMP SLURRY BY SOL-GEL METHOD

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  •  PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORS

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  • 1.  SHIBATA Junji (30052822)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 2.  OHTA Masato (50052874)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 3.  KIMURA Takayasu (90052711)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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