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MORITA Mizuho  森田 瑞穂

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Researcher Number 50157905
Other IDs
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Affiliation (based on the past Project Information) *help 2016: 大阪大学, 工学研究科, 教授
2011 – 2016: 大阪大学, 工学(系)研究科(研究院), 教授
2013: 大阪大学, 大学院工学研究科, 教授
2013: 大阪大学, 工学研究科, 教授
2007 – 2012: Osaka University, Graduate school of Engineering, Professor … More
2009 – 2010: Osaka University, 工学研究科, 教授
2006: 大阪大学, 大学院工学研究科, 教授
1997 – 2005: 大阪大学, 大学院・工学研究科, 教授
1998: 大阪大学, 大学院工学研究科, 教授
1997: 大阪大学, 工学部, 教授
1996: Tohoku Univ., Fac.of Eng., Associate Professor, 工学部, 助教授
1993 – 1995: Associate Professor, Graduate School of Information Sciences Tohoku University, 大学院・情報科学研究科, 助教授
1994: Associate Professor, Graduate School of Information Sciences Tohoku University, 大学院情報科学研究科, 助教授
1994: 東北大学大学院, 情報科学研究科, 助教授
1991 – 1992: Associate Professor, Dept. Electronic Engineering Tohoku University, 工学部, 助教授
1987 – 1990: 東北大学, 工学部, 助手
1986: Research Associate, Faculty of Engineering, Tohoku University, 工学部, 助手
1985: 広島大学, 工, 助手 Less
Review Section/Research Field
Principal Investigator
Electronic materials/Electric materials / 表面界面物性 / Electronic materials/Electric materials / 電子材料工学 / Production engineering/Processing studies / Science and Engineering
Except Principal Investigator
電子材料工学 / Electronic materials/Electric materials / Production engineering/Processing studies
Keywords
Principal Investigator
シリコン酸化膜 / シリコン / SILICON / 半導体表面 / 微小空隙 / トンネル分光 / 極薄シリコン酸化膜 / 半導体プロセス / プロセス / デバイス … More / SILICON DIOXIDE / SEMICONDUCTOR PROCESS / 量子井戸 / 発光デバイス / センシングデバイス / 電子応答 / シリコン酸化 / 半導体デバイス / Silicon Oxidation / Low Temperature Oxidation / 光酸化 / 弗素触媒 / 低温酸化 / CONDUCTANCE / CAPACITANCE / ULTRAPURE WATER / SENSING / NANO-GAP / ナノギャップ構造 / コンダクタンス / 静電容量 / 超純水 / センシング / ナノギャップ / LIGHT IRRADIATION / OXYGEN / WATER / HEATING / CLEANING / SILICON SURFACE / 光照射効果 / ウルトラクリーン洗浄 / シリコン表面反応制御 / 光照射 / 酸素 / 水 / 昇温 / 洗浄 / シリコン表面 / SURFACE REACTION / SEMICONDUCTOR SURFACE / 表面反応 / SILICON ON INSULATOR / SEMICONDUCTOR DEVICE / シリコン・オン・インシュレータ / Thin Film Growth / Oxidation / Semiconductor Surface / 半導体薄膜成長 / 薄膜成長 / 酸化 / トンネル効果 / ナノマイクロ加工 / 光エッチング / 三次元形状 / フッ素化剤 / トンネル現象 / 電荷分析 / ダブルバリア / マイクロセンサ構造 / 原子レベル制御 / 精密制御熱酸化 / 共鳴トンネル / 酸化膜 … More
Except Principal Investigator
低エネルギイオン照射 / 超高速LSI / 銅配線 / エッチング / 形状創成 / シリコン / 光エッチング / N-フルオロピリジニウム塩 / フッ素化剤 / スパッタリング / EEPROM / 超LSI / エピタキシャルシリコン / 低温エピタキシャル成長 / スパッタ成膜 / EEM / CMOS / ニューロンMOSトランジスタ / Neuron MOS Transistor / A / 超高密度LSI / 界面 / 塗布 / 半導体表面 / 3次元形状 / 光転写 / 多値メモリ / 半導体 / MOSFET / 低温プロセス / Ultralarge scale integration / Aluminum interconnect / Copper interconnect / Low energy ion bombardment / Silicon epitaxy / Low temperature processing / Sputtering / 薄膜形成 / 二周波励起 / RFバイアス / 静電チャック / Al配線 / Cu配線 / シリコンエピタキシャル成長 / hillock-free / pure aluminum metalization / low temperature epitaxy / thin film formation / bias-sputtering / アルミ薄膜 / ヒロックフリー / Al薄膜 / バイアススパッタ / SPUTTERING / COPPER METALLIZATION / ALUMINUM METALLIZATION / INTERCONNECTS / ULTRA HIGH SPEED LSI / ショットキダイオード / 金属薄膜のエピタキシャル成長 / エピタキシャル成長 / アルミニウム配線 / LSI用配線技術 / hydrophilic surface / hydrophobic surface / exposure / applying / fluorination agent / N-fluoropyridinium salt / silicon / photo-etching / 干渉計 / 近赤外光 / 固相反応 / 親水性 / 疎水性 / 露光 / Ultra clean technology / First-principles molecular dynamics simulation / Electrochemical machining in ultrapure water / Atmospheric pressure plasma CVD / Plasma CVM / Ultra precision machining / Perfect surfaces / STM / 第一原理分子動力学シュミレーション / 超純粋電解加工 / ウルトラクリーンテクノロジー / 第一原理分子動力学シミュレーション / 超純水電解加工 / 大気圧プラズマCVD / プラズマCVM / 超精密加工 / 完全表面 / Tantalum / Amorphous silicon / Interconnection / Antifuse / High speed programming / Current-Drive Silicidation / 超高速書き込み / タンタル / アモルファスシリコン / 配線接続 / アンチヒューズ / 超高速書込み / 電流駆動シリサイド化反応 / GENERALIZATION / BACK PROPAGATION / SYNAPSE / NEURON MOS TRANSISTOR / HARDWARE LEARNING / SELF LEARNING / NEURAL NETWORK / ハードウェア学習アルゴリズム / フローティングゲート / アナログニューラルネットワーク / 自己学習 / ヘブルール / 学習アルゴリズム / 汎化能力 / 自己学習機能 / バックプロパゲーション / シナプス / ニューラルネットワーク / threshold voltage / SOI MOSFET / copper interconnect / contact resistance / metal-substrate / high-permittivity gate-insulator / metal-gate / イオンビームミキシング / コンタクト / 高誘電体膜 / メタルゲートMOS / SOI / タンタルゲート / 低抵抗コンタクト / 高誘電率絶縁膜 / メタルゲート / SOIデバイス / 閾値 / SOIMOSEFT / コンタクト抵抗 / 金属基板 / 高誘電率ゲート絶縁膜 / メタルゲート電極 / Search Engine / Multi-Valued Memory / Data Matching / Multi-Valued Logic / Soft Hardware / Functional Device / MOSLSI / コンピュータアーキテクチャ / 加算器 / ソフトハードウェアロジック / 論理LSI / CMOS LSI / 連想メモリ / データマッチング / 多値情報処理 / ソフト・ハードウェア / 機能デバイス / Full adder / Floating gate / D converter / Soft Hard ware Logic / Binary Logic Circuits / Neuron / Neural Network / ニュ-ラルネットワ-ク / Aコンバ-タ / D / 可変閾値素子 / 可変閾値トランジスタ / フラッシュA / フロ-ティングゲ-ト / 信号空間加算 / 全加算器 / Dコンバ-タ / ニュ-ロンMOSトランジスタ / ニュ-ロン / ソフトハ-ドウェア論理回路 / Self-Aligne Metal-Gate Mosfet / Ion Implantation / H_2-Plasma Cleaning / Low-Energy Ion Bombardment / Ultra Clean Technology / Metal-Silicon Contact / Low Temperature Processing / Ultra-High Speed Integrated Circuit / アウトガスフリ-レジストプロセス / 低エネルギイオンエッチング / 金属・半導体接合 / 自己整合金属ゲ-トMOSFET / ウルトラクリ-ンイオン注入 / NON ALLOYING CONTACT / 低エネルギイオン照射プロセス / エレクトロマイグレ-ション / 超高速配線 / Cu配線技術 / イオン注入層低温アニ-ル / メタルゲ-ト自己整合MOSFET / 修正加工 / 創成加工 / フォトエッチング / N-フルオロピリジニウム塩 / 表面 / インクジェット / 高しきい値ニューロンMOS / MSB先行ビットフロー / データフローパスミニマム / フレックスウェア / 四端子デバイス / LCD / TFT / 原子状水素 / 低エネルギイオン / CVD / プラズマ / 多結晶シリコン / アナログベクトル / 連想記憶 / VERIFY動作 / WRITE / ニューロンMOS / Fowler-Nordheimトンネル / 特徴ベクトル / 知能システム / FN注入 / アナログメモリ / 不揮発性メモリ / 酸化 / 水素ラジカル / DRAMメモリセル / 超高真空技術 / プロセス装置技術 / 二周波励起プラズマ / 完全自動化ライン / ゲート酸化 / 静電気障害 / イオン注入 / 半導体製造装置 / ドライプロセス Less
  • Research Projects

    (36 results)
  • Research Products

    (158 results)
  • Co-Researchers

    (17 People)
  •  FORMATION OF THREE-DIMENSIONAL SHAPES IN SEMICONDUCTOR SURFACES FOR FUNCTIONAL DEVICES THROUGH PHOTOCHEMICAL REACTION WITH ELECTROPHILIC FLUORINATION AGENTSPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  A STUDY OF TUNNEL ELECTRON INJECTION LIGHT-EMITTING DEVICES WITH A TWO-DIMENSIONAL QUANTUM STRUCTURE OF ULTRATHIN SILICON/SILICON DIOXIDEPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka University
  •  Shape formation in silicon surface by transfer photo-etching using chemical reaction at fluorinating agent-silicon interface

    • Principal Investigator
      UCHIKOSHI Junichi
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  A STUDY OF LIGHT-EMITTING DEVICES WITH AN ULTRATHIN SILICON/SILICON DIOXIDE TWO-DIMENSIONAL QUANTUM STRUCTUREPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2011 – 2012
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka University
  •  A STUDY ON ELECTRIC CHARGE/LEVEL CHARACTERIZATION DEVICES FOR BIOLOGICAL MATERIALS WITH METAL/MICRO-GAP/SEMICONDUCTOR ARRAYSPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2010 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka University
  •  Shape formation in silicon surface by transfer photo-etching using solid phase reaction at fluorination agent-silicon interface.

    • Principal Investigator
      UCHIKOSHI Junichi
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  横型ダブルバリア構造によるナノ材料・ナノ生体分子の共鳴トンネル分光法の研究Principal Investigator

    • Principal Investigator
      森田 瑞穂
    • Project Period (FY)
      2007 – 2009
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka University
  •  A STUDY ON ENERGY LEVEL CHARACTERIZATION DEVICES FOR BIOLOGICAL MATERIALS BY ELECTRON RESPONSE OF METAL/MICRO-GAP/SEMICONDUCTOR STRUCTURESPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2006 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka University
  •  Study on Shape Mchining of Silicon Surface with Solid Phase Reaction between Solid Fluorination Agent/Silicon Interface.

    • Principal Investigator
      UCHIKOSHI Junichi
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Osaka University
  •  A STUDY ON TUNNELING-SPECTROSCOPIC DEVICES WITH NANO-GAP STRUCTURE USING ULTRATHIN SILICON DIOXIDE FILM AS A SPACERPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2002 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka University
  •  仮想多層膜形成条件熱酸化による高機能極薄シリコン酸化膜の研究Principal Investigator

    • Principal Investigator
      森田 瑞穂
    • Project Period (FY)
      2001
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  シリコン/微小空隙/シリコン構造を用いたトンネル分光マイクロセンサの研究Principal Investigator

    • Principal Investigator
      森田 瑞穂
    • Project Period (FY)
      2001 – 2003
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      表面界面物性
    • Research Institution
      Osaka University
  •  A STUDY ON REACTION MECHANISM CONTROL UNDER LIGHT IRRADIATION IN ULTRACLEAN CLEANING OR HEATING PROCESSES OF SILICON SURFACESPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      2001 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      表面界面物性
    • Research Institution
      Osaka University
  •  シリコン/シリコン酸化膜系ダブルバリヤ構造を用いた共鳴トンネル分光法の研究Principal Investigator

    • Principal Investigator
      森田 瑞穂
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      表面界面物性
    • Research Institution
      Osaka University
  •  A STUDY ON SOI QUANTUM DEVICES WITH VARIABLE FUNCTION BY RESONANT/NON-RESONANT CONTROL IN VERTICAL RESONANT TUNNELING STRUCTURESPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka University
  •  A STUDY ON REACTION CONTROL BETWEEN SILICON SURFACES AND OXYGEN-FREE WATER/WATER-FREE OXYGEN IN COMPLETELY CLOSED SYSTEMSPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      表面界面物性
    • Research Institution
      Osaka University
  •  極限集積化デバイスのしきい値支配因子自己収束酸化プロセスの研究Principal Investigator

    • Principal Investigator
      森田 瑞穂
    • Project Period (FY)
      1997
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Osaka University
  •  ニューロンMOSを用いた任意演算・処理機能の実時間可変型ユニバーサルALU

    • Principal Investigator
      小谷 光司
    • Project Period (FY)
      1997
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      The University of Tokyo
  •  極限集積化デバイスのしきい値支配因子自己収束プロセスの研究Principal Investigator

    • Principal Investigator
      森田 瑞穂
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tohoku University
  •  過去の経験をコードで記憶する高精度 アナログ不揮発性メモリの研究

    • Principal Investigator
      柴田 直 (柴田 道)
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      The University of Tokyo
      Tohoku University
  •  超精密制御スパッタリング・CVD融合成膜を駆使した高品質多結晶SiTFTプロセス

    • Principal Investigator
      丁 剛洙
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Tohoku University
  •  Creation of Perfect Surfaces

    • Principal Investigator
      MORI Yuzo
    • Project Period (FY)
      1996 – 2002
    • Research Category
      Grant-in-Aid for COE Research
    • Research Institution
      Osaka University
  •  極限集積化デバイスのしきい値支配因子自己収束プロセスの研究Principal Investigator

    • Principal Investigator
      森田 瑞穂
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tohoku University
  •  High Speed Field Programmable LSI Using Current-Drive Silicidation

    • Principal Investigator
      OHMI Tadahiro
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Tohoku University
  •  超清浄金属表面の触媒作用による高効率水素ラジカル発生プロセスの研究

    • Principal Investigator
      大見 忠弘
    • Project Period (FY)
      1993
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tohoku University
  •  Research on Metal-Gate, High-Permittivity Gate-Insulator, Metal-Substrate SOI CMOS LSI

    • Principal Investigator
      OHMI Tadahiro
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Tohoku University
  •  A NEURON-MOS NEURAL NETWORK FEATURING ON-CHIP SELF-LEARNING CAPABILITY

    • Principal Investigator
      SHIBATA Tadashi
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      TOHOKU UNIVERSITY
  •  超LSIの完全ドライ・トータル低温製造ラインシステムの試作研究

    • Principal Investigator
      OHMI Tadahiro
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      Tohoku University
  •  NEW LOGIC LSI'S HAVING SOFT HARDWARE CONFIGURATION

    • Principal Investigator
      SHIBATA Tadashi
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  A STUDY OF ANALYSIS AND CONTROL OF SEMICONDUCTOR SURFACE REACTION BY SURFACE CARRIER CONDUCTION MODULATIONPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERITY
  •  Study on Ultra High Speed Integrated Circuit Employing Metals in the Heart of the Device Structure

    • Principal Investigator
      OHMI Tadahiro
    • Project Period (FY)
      1990 – 1991
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      Tohoku University
  •  A New Functional MOS Transistor Featuring Neuron Functions

    • Principal Investigator
      SHIBATA Tadashi
    • Project Period (FY)
      1990 – 1991
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      Tohoku University Grant-in-Aid for Scientic Research
  •  DEVELOPMENT OF DUAL-FREQUENCY EXCITATION, LOW-KINETIC-ENERGY PARTICLE PROCESS EQUIPMENT

    • Principal Investigator
      OHMI Tadahiro
    • Project Period (FY)
      1988 – 1989
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  STUDY OF INTERCONNECT STRUCTURES FOR ULTR-HIGH-SPEED LSI'S

    • Principal Investigator
      OHMI Tadahiro
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  RF-DC Coupled Mode Bias Sputtering System

    • Principal Investigator
      SHIBATA Tadashi
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
  •  A Development of Low-Temperature Silicon Oxidation Enhanced by Fluorine CatalysisPrincipal Investigator

    • Principal Investigator
      MORITA Mizuho
    • Project Period (FY)
      1985 – 1986
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電子材料工学
    • Research Institution
      TOHOKU UNIVERSITY
      Hiroshima University

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All Journal Article Presentation Book Patent

  • [Book] 赤外線加熱工学ハンドブック 極薄シリコン酸化膜形成への応用2003

    • Author(s)
      森田瑞穂
    • Publisher
      アグネ技術センター
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Book] 赤外線加熱工学ハンドブック 極薄シリコン酸化膜形成への応用2003

    • Author(s)
      森田瑞穂
    • Publisher
      アグネ技術センター
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Electroluminescence in metal-oxide-semiconductor tunnel diodes with a crystalline silicon/silicon dioxide quantum well2022

    • Author(s)
      Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Ayano Tsuchida, Miho Morita, Yasushi Oshikane, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Journal Title

      Micro and Nanostructures

      Volume: 166 Pages: 207228-207228

    • DOI

      10.1016/j.micrna.2022.207228

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-26630130
  • [Journal Article] Photoetching method that provides improved silicon-on-insulator layer thickness uniformity in a defined area2017

    • Author(s)
      Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Miho Morita, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Journal Title

      Microelectronic Engineering

      Volume: 印刷中

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Journal Article] Photoetching method that provides improved silicon-on-insulator layer thickness uniformity in a defined area2017

    • Author(s)
      Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Miho Morita, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Journal Title

      Microelectronic Engineering

      Volume: 印刷中

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26630130
  • [Journal Article] Effect of metal particles on the Si etching rate with N-fluoropyridinium salts2016

    • Author(s)
      Masaki Otani, Kentaro Kawai, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 10 Pages: 1080031-3

    • DOI

      10.7567/jjap.55.108003

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H03902, KAKENHI-PROJECT-26289017, KAKENHI-PROJECT-16K14133
  • [Journal Article] Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry2013

    • Author(s)
      Junichi Uchikoshi, Yoshinori Hayashi, Noritaka Ajari, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Journal Title

      Nanoscale Research Letters

      Volume: 8 Issue: 1 Pages: 2751-7

    • DOI

      10.1186/1556-276x-8-275

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560123, KAKENHI-PROJECT-24656101, KAKENHI-PROJECT-24686020
  • [Journal Article] Characterization of Si etching with N-fluoropyridinium salt2012

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Yutaka Ie, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Journal Title

      Current Applied Physics

      Volume: 12

    • URL

      http://www.sciencedirect.com/science/journal/15671739/12/supp/S4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Journal Article] Characterization of Si etching with N-fluoropyridinium salt2012

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Yutaka Ie, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Journal Title

      Current Applied Physics

      Volume: 12

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Journal Article] Photoetching of Silicon by N-Fluoro pyridinium Salt2010

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Shigeharu Goto, Tatsuya Kawase, Noritaka Ajari, Takabumi Nagai, Kenji Adachi, Kenta Arima, Mizuho Morita
    • Journal Title

      Electrochemical and Solid-State Letters 13

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Journal Article] Photoetching of Silicon by N-Fluoropyridinium Salt2010

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Shigeharu Goto, Tatsuya Kawase, Noritaka Ajari, Takabumi Nagai, Kenji Adachi, Kenta Arima, Mizuho Morita
    • Journal Title

      Electrochemical and Solid-State Letters

      Volume: 13

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Journal Article] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Sensing D e v i c e s2009

    • Author(s)
      Takaaki HIROKANE, Hideaki HASHIMOTO, Daisuke KANZAKI, Shinichi URABE, Kenta ARIMA, Junichi UCHIKOSHI, Mizuho MORITA
    • Journal Title

      ANALYTICAL SCIENCES 25(Peer-reviewed)

      Pages: 101-104

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Sensing Devices2009

    • Author(s)
      Takaaki HIROKANE, Hideaki HASHIMOTO, Daisuke KANZAKI, Shinichi URABE, Kenta ARIMA, Junichi UCHIKOSHI and Mizuho MORITA
    • Journal Title

      ANALYTICAL SCIENCES(Peer-reviewed) 25

      Pages: 101-104

    • NAID

      10025209631

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Pinhole in Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Transmission Microscopy2008

    • Author(s)
      Xing Wu, Junichi Uchikoshi, Takaaki Hirokane, Ryuta Yamada, Akihiro Takeuchi, Kenta Arima, Mizuho Morita
    • Journal Title

      Journal of The Electrochemical Society 155(11)(Peer-reviewed)

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Absolute Line Profile Measurements of Silicon Plane Mirrors by Near-Infrared Inte rferometry2008

    • Author(s)
      Junichi UCHIKOSHI, Amane TSUDA, Noritaka AJARI, Taichirou OKAMOTO, Kenta ARIMA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 8978-8981

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Journal Article] Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy2008

    • Author(s)
      Xing WU, Junichi UCHIKOSHI, Takaaki HIROKANE, Ryuta YAMADA, Akihiro TAKEUCHI, Kenta ARIMA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 47(4)(Peer-reviewed.)

      Pages: 2511-2514

    • NAID

      10022549248

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Pinhole in Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Transmission Microscopy2008

    • Author(s)
      Xing Wu, Junichi Uchikoshi, Takaaki Hirokane, Ryuta Yamada, Akihiro Takeuchi, Kenta Arima, Mizuho Morita
    • Journal Title

      Journal of The Electrochemical Society 155

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19656079
  • [Journal Article] Sensing of λDNA solutions by metal-gap-semiconductor devices2008

    • Author(s)
      Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi and Mizuho Morita
    • Journal Title

      Surface and Interface Analysis(Peer-reviewed) 40

      Pages: 1131-1133

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method2008

    • Author(s)
      Takaaki HIROKANE, Naoto YOSHII, Tatsuya OKAZAKI, Shinichi URABE, Kazuo NISHIMURA, Satoru MORITA, Kenta ARIMA, Junichi UCHIKOSHI, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 8317-8320

    • NAID

      40016346939

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy2008

    • Author(s)
      Xing Wu, Junichi Uchikoshi, Takaaki Hirokane, Ryuta Yamada, Akihiro Takeuchi, Kenta Arima, Mizuho Morita
    • Journal Title

      Japanese Journal of Applied Physics 47(inpress)

    • NAID

      10022549248

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18560104
  • [Journal Article] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Sensing Devices2008

    • Author(s)
      Takaaki HIROKANE, Hideaki HASHIMOTO Daisuke KANZAKI, Shinichi URABE Kenta ARIMA. Junichi UCHIKOSHI, Mizuho MORITA
    • Journal Title

      ANALYTICAL SCIENCES 25

      Pages: 101-104

    • NAID

      10025209631

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy2008

    • Author(s)
      Xing WU, Junichi UCHIKOSHI, Takaaki HIROKANE, Ryuta YAMADA, Akihiro TAKEUCHI, Kenta ARIMA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 3041-3045

    • NAID

      10022549248

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Journal Article] Sensing ofλDNA solutions by metal-gap-semiconductor devices2008

    • Author(s)
      Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      Surface and Interface Analysis 40(Peer-reviewed.)

      Pages: 1131-1133

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Biological Sensors2008

    • Author(s)
      Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe, and Mizuho Morita
    • Journal Title

      ECS Transactions 11(in press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Void in Bonded Silicon-on-Insulator Wafers by Controlling Coherence Length of Light Source using Near-Infrared Microscope2007

    • Author(s)
      Noritaka AJARI, Junichi UCHIKOSHI, Takaaki HIROKANE, Kenta ARIMA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 46(4B)(Peer-reviewed.)

      Pages: 1994-1996

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Pinhole in Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy2007

    • Author(s)
      Xing Wu, Junichi Uchikoshi, Takaaki Hirokane, Ryuta Yamada, Kenta Arima, Mizuho Morita
    • Journal Title

      ECS Transactions 11

      Pages: 173-182

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19656079
  • [Journal Article] Liquid Sensing by Nano-Gap Device with Treated Surface2006

    • Author(s)
      Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Tatsuya Takegawa, Satoru Morita, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials

      Pages: 900-901

    • NAID

      10022547108

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Absolute line profile measurements of plane silicon mirrors with an anti-reflection film using near-infrared ray interferometry2006

    • Author(s)
      N.Ajari, J.Uchikoshi, A.Tsuda, T.Okamoto, T.Hirokane, A.Funamoto, K.Arima, M.Morita
    • Journal Title

      PROGRAM and ABSTRACTS, Second International Symposium on Standard Materials and Metrology for Nanotechnology. Tokyo, 2006

      Pages: 25-26

    • Data Source
      KAKENHI-PROJECT-18560104
  • [Journal Article] Absolute straightness measurements of plane silicon mirrors with wedge by near-infrared ray interferometry2006

    • Author(s)
      Noritaka Ajari, Junichi Uchikoshi, Amane Tsuda, Akihiro Funamoto, Kenta Arima, Mizuho Morita
    • Journal Title

      Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology

      Pages: 127-128

    • Data Source
      KAKENHI-PROJECT-18560104
  • [Journal Article] 近赤外干渉計によるシリコンミラーの絶対形状測定-ウェッジ付きシリコンミラーの絶対形状測定-2006

    • Author(s)
      阿砂利典孝, 打越純一, 津田周, 廣兼孝亮, 有馬健太, 森田瑞穂
    • Journal Title

      精密工学会2006年度関西地方定期学術講演会講演論文集

      Pages: 57-58

    • Data Source
      KAKENHI-PROJECT-18560104
  • [Journal Article] Characterization of Void in Bonded SOI Wafers by Controlling Coherence Length of Near-Infrared Microscope2006

    • Author(s)
      Noritaka Ajari, Junichi Uchikoshi, Takaaki Hirokane, Kenta Arima, Mizuho Morita
    • Journal Title

      Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials, Yokohama, 2006

      Pages: 486-487

    • NAID

      10022545814

    • Data Source
      KAKENHI-PROJECT-18560104
  • [Journal Article] Current-Voltage Characteristics of Gap Electrodes with λDNA Molecules on SiO_2/Si Substrate after Elongating Treatment2006

    • Author(s)
      Katsuhiro Hashimoto, Takamichi Hanada, Yasuhumi Ochi, Takaaki Hirokane, Shigeki Kawakami, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      Abstracts, 210th Meeting of The Electrochemical Society

      Pages: 2099-2099

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Characterization of Void in Bonded SOI Wafers by Controlling Coherence Length of Near-Infrared Microscope2006

    • Author(s)
      Noritaka Ajari, Junichi Uchikoshi, Takaaki Hirokane, Kenta Arima, Mizuho Morita
    • Journal Title

      Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials

      Pages: 486-487

    • NAID

      10022545814

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Metal-Gap-Semiconductor Sensing Devices for DNA Solutions2006

    • Author(s)
      Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
    • Journal Title

      Abstracts, 210th Meeting of The Electrochemical Society

      Pages: 1185-1185

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Photo current through SnO_2/SiC/p-Si(100) structures2006

    • Author(s)
      Syuhei Nishikawa, Hideaki Hashimoto, Motonori Chikamoto, Kosuke Horikoshi, Minoru Aoki, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      Thin Solid Films 508

      Pages: 385-388

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Photodetective Characteristics of Metal-Oxide-Semiconductor Tunneling Structure with Aluminum Grid Gate2006

    • Author(s)
      Hideaki Hashimoto, Ryuta Yamada, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials

      Pages: 860-861

    • NAID

      10022546987

    • Data Source
      KAKENHI-PROJECT-18360148
  • [Journal Article] Reaction of Hydrogen-Terminated Si(100) Surfaces with Oxygen at Very Low Pressures during Heating2005

    • Author(s)
      Shinichi URABE, Kazuo NISHIMURA, Syuhei NISHIKAWA, Satoru MORITA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 44・11

      Pages: 8091-8095

    • NAID

      10016871640

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Electrical Properties of SiC/p-Si(100) Structure2005

    • Author(s)
      Syuhei Nishikawa, Hideaki Hashimoto, Motonori Chikamoto, Minoru Aoki, Kenta Arima, Mizuho Morita
    • Journal Title

      Program and Abstracts, Fourth International Conference on Silicon Epitaxy and Heterostructures

      Pages: 148-149

    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Reaction of Hydrogen-Terminated Si(100) Surfaces with Oxygen at Very Low Pressures during Heating2005

    • Author(s)
      Shinichi URABE, Kazuo NISHIMURA, Syuhei NISHIKAWA, Satoru MORITA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 44(11)

      Pages: 8091-8095

    • NAID

      10016871640

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Development of Nano-Gap Device for Biosensor2005

    • Author(s)
      Satoru Morita, Takaaki Hirokane, Tatsuya Takegawa, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials

      Pages: 828-829

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] CHARACTERIZATIUN OF TUNNELING CURRENT THROUGH ULTRATHIN SILICON DIOXIDE FILMS BY DIFFERENT-METAL GATES MRTHOD2005

    • Author(s)
      Naoto Yoshii, Tatsuya Okazaki, Takaaki Hirokane, Shinichi Urabe, Kazuo Nishimura, Satoru Morita, Mizuho Morita
    • Journal Title

      The Physics and Chemistry of SiO_2 and the Si-SiO_2 Interface - 5, ECS Transactions, The Electrochemical Society 1・1

      Pages: 277-282

    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] PHOTODETECTION CHARACTERISTICS OF SnO_2-ULTRATHIN SiO_2-Si STRUCTURES2005

    • Author(s)
      Motonori Chikamoto, Hideaki Hashimoto, Kosuke Horikoshi, Akihito Shinozaki, Satoru Morita, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      The Physics and Chemistry of SiO_2 and the Si-SiO_2 Interface - 5, ECS Transactions, The Electrochemical Society 1・1

      Pages: 97-102

    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Photodetector Characteristics of Metal-Oxide-Semiconductor Tunneling Structures with Transparent Conductive Tin Oxide Gate2005

    • Author(s)
      Motonori Chikamoto, Hideaki Hashimoto, Kosuke Horikoshi, Akihito Shinozaki, Satoru Morita, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Journal Title

      Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials

      Pages: 734-735

    • NAID

      10022543080

    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Tunneling Current through Ultrathin Silicon Dioxide Films under Light Exposure2004

    • Author(s)
      Satoru MORITA, Akihito SHINOZAKI, Yuuki MORITA, Kazuo NISHIMURA, Tatsuya OKAZAKI, Shinichi URABE, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43・11B

      Pages: 7857-7860

    • NAID

      10014215132

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Tunneling Current through Ultrathin Silicon Dioxide Films under Light Exposure2004

    • Author(s)
      Satoru MORITA, Akihito SHINOZAKI, Yuuki MORITA, Kazuo NISHIMURA, Tasuya OKAZAKI, Shinichi URABE, Mizuho MORITA
    • Journal Title

      Extended Abstracts of 2004 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES-SCIENCE AND TECHNOLOGY

      Pages: 77-78

    • NAID

      10014215132

    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Reaction of Hydrogen-Desorbed Si(100) Surfaces with Water during Heating and Cooling2004

    • Author(s)
      Shinichi URABE, Kazuo NISHIMURA, Satoru MORITA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43(12)

      Pages: 8242-8247

    • NAID

      10014216654

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Reaction of Hydrogen-Desorbed Si(100) Surfaces with Water during Heating and Cooling2004

    • Author(s)
      Shinichi URABE, Kazuo NISHIMURA, Satoru MORITA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43・12

      Pages: 8242-8247

    • NAID

      10014216654

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Tunneling Current through Ultrathin Silicon Dioxide Films under Light Exposure2004

    • Author(s)
      Satoru MORITA, Akihito SHINOZAKI, Yuuki MORITA, Kazuo NISHIMURA, Tatsuya OKAZAKI, Shinichi URABE, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43(11B)

      Pages: 7857-7860

    • NAID

      10014215132

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Tunneling Current through Ultrathin Silicon Dioxide Films under Light Exposure2004

    • Author(s)
      Satoru MORITA, Akihito SHINOZAKI, Yuuki MORITA.Kazuo NISHIMURA, Tatsuya OKAZAKI, Shinichi URABE, Nizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43・11B

      Pages: 7857-7860

    • NAID

      10014215132

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Tunneling Current through Ultrathin Silicon Dioxide Films under Light Exposure2004

    • Author(s)
      Satoru MORITA, Akihito SHINOZAKI, Yuuki MORITA, Kazuo NISHIMURA, Tatsuya OKAZAKI, Shinichi URABE, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43・11B

      Pages: 7857-7860

    • NAID

      10014215132

    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Nano-Gap Device for Liquid Sensing2004

    • Author(s)
      Satoru, MORITA, Tatsuya, TAKEGAWA, Takaaki HIROKANE, Shinichi URABE, Kenta ARIMA, Junichi UCHIKOSHI, Mizuho MORITA
    • Journal Title

      Extended Abstract of the 2004 International Conference on Solid State Devices and Materials

      Pages: 704-705

    • NAID

      10022539806

    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Tunneling Current through Ultrathin Silicon Dioxide Films under Light Exposure2004

    • Author(s)
      Satoru MORITA, Akihito SHINOZAKI, Yuuki MORITA, Kazuo NISHIMURA, Tatsuya OKAZAKI, Shinichi URABE, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43(11B)

      Pages: 7857-7860

    • NAID

      10014215132

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Reaction of Hydrogen-Desorbed Si(100) Surfaces with Water during Heating and Cooling2004

    • Author(s)
      Shinichi URABE, Kazuo NISHIMURA, Satoru MORITA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43・12

      Pages: 8242-8247

    • NAID

      10014216654

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Nano-Gap Device for Liquid Sensing2004

    • Author(s)
      Satoru, MORITA, Tatsuya, TAKEGAWA, Takaaki HIROKANE, Shinichi URABE, Kenta ARIMA, Junichi UCHIKOSHI, Mizuho MORITA
    • Journal Title

      Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials

      Pages: 704-705

    • NAID

      10022539806

    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Reaction of Hydrogen-Desorbed Si(100) Surfaces with Water during Heating and Cooling2004

    • Author(s)
      Shinichi URABE, Kazuo NISHIMURA, Satoru MORITA, Mizuho MORITA
    • Journal Title

      Japanese Journal of Applied Physics 43(12)

      Pages: 8242-8247

    • NAID

      10014216654

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Nano-Gap Device for Liquid Sensing2004

    • Author(s)
      Satoru MORITA, Tatsuya TAKEGAWA, Takaaki HIROKANE, Shinichi URABE, Kenta ARIMA, Junichi UCHIKOSHI, Mizuho MORITA
    • Journal Title

      Extended Abstracts of the 2004 International Conference on Solid State Devices and Materials

      Pages: 704-705

    • NAID

      10022539806

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Tunneling Current through Ultrathin Silicon Dioxide Films under Light Exposure2004

    • Author(s)
      Satoru MORITA, Akihito SHINOZAKI, Yuuki MORITA, Kazuo NISHIMURA, Tatsuya OKAZAKI, Shinichi URABE, Mizuho MORITA
    • Journal Title

      Extended Abstracts of 2004 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES-SCIENCE AND TECHNOLOGY

      Pages: 77-78

    • NAID

      10014215132

    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] FTIR-ATR Evaluation of Organic Contaminant Cleaning Methods for SiO_2 Surfaces2003

    • Author(s)
      Akihito SHINOZAKI, Kenta ARIMA, Mizuho MORITA, Isao KOJIMA, Yasushi AZUMA
    • Journal Title

      ANALYTICAL SCIENCES 19

      Pages: 1557-1559

    • NAID

      10012534238

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Energy Barrier Heights of Ultra-thin Silicon Dioxide Films with Different Metal Gates2003

    • Author(s)
      Naoto Yoshii, Satoru Morita, Akihito Shinozaki, Minoru Aoki, Mizuho Morita
    • Journal Title

      Extended Abstracts of International Workshop on Gate Insulator 2003

      Pages: 96-97

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] FTIR-ATR Evaluation of Organic Contaminant Cleaning Methods for SiO_2 Surfaces2003

    • Author(s)
      Akihito SHINOZAKI, Kenta ARIMA, Mizuho MORITA, Isao KOJIMA, Yasushi AZUMA
    • Journal Title

      ANALYTICAL SCIENCES 19

      Pages: 1557-1559

    • NAID

      10012534238

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14350166
  • [Journal Article] Study on temperature calibration of a silicon substrate in a temperature programmed desorption analysis2001

    • Author(s)
      N.Hirashita, T.Jimbo, T.Matsunaga, M.Matsuura, M.Morita, I.Nishiyama, M.Nishizuka, H.Okumura, A.Shimazaki, N.Yabumoto
    • Journal Title

      Journal of Vacuum Science & Technology A 19(4)

      Pages: 1255-1260

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Study on temperature calibration of a silicon substrate in a temperature programmed desorption analysis2001

    • Author(s)
      N.Hirashita, T.Jimbo, T.Matsunaga, M.Matsuura, M.Morita, I.Nishiyama, M.Nishizuka, H.Okumura, A.Shimazaki, N.Yabumoto
    • Journal Title

      Journal of Vacuum Science & Technology A 19・4

      Pages: 1255-1260

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Journal Article] Tunneling Current through Ultra-Thin Silicon Dioxide Films Formed by Controlling Preoxide in Heating-up2001

    • Author(s)
      Satoru MORITA, Tatsuya OKAZAKI, Kazuo NISHIMURA, Shinichi URABE, Mizuho MORITA
    • Journal Title

      Extended Abstracts of International Workshop on Gate Insulator

      Pages: 110-113

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-13555007
  • [Patent] エッチング処理用組成物及びエッチング処理方法2016

    • Inventor(s)
      川合 健太郎、森田 瑞穂、足達 健二、永井 隆文
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-03-04
    • Overseas
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Patent] エッチング処理用組成物及びエッチング処理方法2015

    • Inventor(s)
      足達 健二、永井 隆文、森田 瑞穂、川合 健太郎
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-043031
    • Filing Date
      2015-03-04
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Patent] エッチング方法2012

    • Inventor(s)
      森田瑞穂、打越純一、塚本健太郎、大谷真輝、永井隆文、足達健二
    • Industrial Property Rights Holder
      国立大学法人大阪大学、ダイキン工業
    • Industrial Property Number
      2012-044861
    • Filing Date
      2012
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Patent] エッチング方法2012

    • Inventor(s)
      森田瑞穂、打越純一、塚本健太郎、 大谷真輝、永井孝文、足達健二
    • Industrial Property Rights Holder
      国立大学法人大阪大学、ダイキン工業
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-044861
    • Filing Date
      2012-02-29
    • Overseas
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Patent] エッチング方法2011

    • Inventor(s)
      森田瑞穂、打越純一、塚本健太郎、 永井孝文、足達健二
    • Industrial Property Rights Holder
      国立大学法人大阪大学、ダイキン工業
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2011-264131
    • Filing Date
      2011-12-01
    • Overseas
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Patent] エッチング方法2011

    • Inventor(s)
      森田瑞穂、打越純一、塚本健太郎、永井隆文、足達健二
    • Industrial Property Rights Holder
      国立大学法人大阪大学、ダイキン工業
    • Industrial Property Number
      2011-264131
    • Filing Date
      2011
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Patent] 少なくとも片面が粗面化された太陽電池用基板2009

    • Inventor(s)
      森田瑞穂、打越純一、足達健二、永井隆文
    • Industrial Property Rights Holder
      大阪大学、ダイキン工業
    • Industrial Property Number
      2009-273464
    • Filing Date
      2009-12-01
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Patent] 特許権2009

    • Inventor(s)
      森田瑞穂、打越純一、足達健二、永井隆文
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Number
      2008-085942
    • Filing Date
      2009-03-28
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Patent] エッチング方法2008

    • Inventor(s)
      森田瑞穂、打越純一、足達健二、永井隆文
    • Industrial Property Rights Holder
      大阪大学、ダイキン工業株式会社
    • Industrial Property Number
      2008-085942
    • Filing Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Overseas
    • Data Source
      KAKENHI-PROJECT-18560104
  • [Patent] 検出素子およびそれを用いた検出装置2007

    • Inventor(s)
      森田瑞穂, 廣兼孝亮
    • Industrial Property Rights Holder
      森田瑞穂
    • Industrial Property Number
      2007-248433
    • Filing Date
      2007-09-26
    • Acquisition Date
      2007-09-26
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Patent] 検出装置2007

    • Inventor(s)
      森田瑞穂
    • Industrial Property Rights Holder
      森田瑞穂
    • Acquisition Date
      2007-03-23
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Patent] 検出装置2007

    • Inventor(s)
      森田瑞穂
    • Industrial Property Rights Holder
      森田瑞穂
    • Filing Date
      2007-03-23
    • Acquisition Date
      2007-03-23
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるSi表面ランダムダブルテクスチャ形成2016

    • Author(s)
      熊田 竜也、川合 健太郎、永井 隆文、足達 健二、有馬 健太、森田 瑞穂
    • Organizer
      応用物理学会
    • Place of Presentation
      東京工業大学 大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] 光エッチングによる均一層厚を有する極薄SOIの形成2015

    • Author(s)
      宮田 優希、中向 保徳、Cassia Tiemi Azevedo、押鐘 寧、川合 健太郎、有馬 健太、森田 瑞穂
    • Organizer
      応用物理学会
    • Place of Presentation
      東海大学 湘南キャンパス(神奈川県平塚市)
    • Year and Date
      2015-03-14
    • Data Source
      KAKENHI-PROJECT-26630130
  • [Presentation] Photoluminescence in Si/SO2 Single Quantum Wells2015

    • Author(s)
      Cassia Azevedo, Yuki Miyata, Yasunori Nakamukai, Yasushi Oshikane, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Organizer
      応用物理学会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-13
    • Data Source
      KAKENHI-PROJECT-26630130
  • [Presentation] Development of Silicon Photo-Etching with N-Fluoropyridinium Salts2014

    • Author(s)
      Kenji Adachi, Takabumi Nagai, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Kentaro Kawai, Mizuho Morita
    • Organizer
      INTERNATIONAL CONFERENCE ON FLUORINE CHEMISTRY
    • Place of Presentation
      Pacifico Yokohama(Kanagawa・Yokohama)
    • Year and Date
      2014-05-29
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Texturing Low Reflecting Surface of Random Double Inverted Pyramids Using N-fluoropyridinium Salt2014

    • Author(s)
      Tatsuya Kumada, Kentaro Kawai, Toshinori Hirano, Masaki Otani, Takabumi Nagai, Kenji Adachi, Kenta Arima, and Mizuho Morita
    • Organizer
      40th IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE
    • Place of Presentation
      Denver(USA)
    • Year and Date
      2014-06-11
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] Mask-less formation of anti-reflecting inverted-pyramids to single-crystal Si solar cell by N-fluoropyridinium salts2014

    • Author(s)
      Kentaro Kawai, Tatsuya Kumada, Takabumi Nagai, Kenji Adachi, Kenta Arima and Mizuho Morita
    • Organizer
      EMN Summer Meeting
    • Place of Presentation
      Cancun(Mexico)
    • Year and Date
      2014-06-10
    • Invited
    • Data Source
      KAKENHI-PROJECT-26289017
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成2013

    • Author(s)
      足達健二、永井隆文、平野利典、大谷真輝、川合健太郎、打越純一、森田瑞穂
    • Organizer
      第36回フッ素化学討論会
    • Place of Presentation
      つくば国際会議場(つくば市)
    • Year and Date
      2013-10-04
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成2013

    • Author(s)
      平野利典、打越純一、大谷真輝、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木市
    • Year and Date
      2013-03-28
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Efficient and Scalable Liquid Handling in Micro/Nano-fluidic System for biomedical applications2013

    • Author(s)
      Kentaro Kawai, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      PROGRAM AND ABSTRACT, Collaborative Conference on 3D & Materials Research
    • Place of Presentation
      Jeju, South Korea
    • Year and Date
      2013-06-24
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Efficient and Scalable Liquid Handling in Micro/Nano-fluidic System for biomedical applications2013

    • Author(s)
      Kentaro Kawai, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      PROGRAM AND ABSTRACT, Collaborative Conference on 3D & Materials Research
    • Place of Presentation
      Ramada Plaza Jeju Hotel, Jeju, South Korea
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] NOMALLY-CLOSED VALVE INTEGRATION FOR PNEUMATIC ACTUATORS2013

    • Author(s)
      Kentaro Kawai, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      TRANSDUCERS 2013 & EUROSENSORS XXVII
    • Place of Presentation
      Barcelona, Spain
    • Year and Date
      2013-06-17
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Development of Silicon Photo-Etching with N-Fluoropyridinium Salts2012

    • Author(s)
      Junichi Uchikoshi, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-24
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Formation of Three-Dimensional Shape in Silicon Surface by Photo-Etching with N-Fluoropyridinium Salts2012

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Toshinori Hirano, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるSi表面テクスチャの形成2012

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、平野利典、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      八王子市
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Electroluminescence in Metal-Oxide-Semiconductor Tunnel Diodes with an Ultrathin Silicon Layer2012

    • Author(s)
      A. Tsuchida, K. Matsumura, R. Yamada, Y. Oshikane, K. Kawai, J. Uchikoshi, K. Arima and M. Morita
    • Organizer
      Extended Abstracts of Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Not peer-reviewed,Osaka
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23656217
  • [Presentation] Non-FET electrochemical DNA detection using metal-gap-oxide-silicon structures2012

    • Author(s)
      Kentaro Kawai, Yuichi Doi, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      Abstract, PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
    • Place of Presentation
      Honolulu, USA
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Electroluminescence in Metal-Oxide-Semiconductor Tunnel Diodes with an Ultrathin Silicon Layer2012

    • Author(s)
      A. Tsuchida, K. Matsumura, R. Yamada, Y. Oshikane, K. Kawai, J. Uchikoshi, K. Arima and M. Morita
    • Organizer
      Extended Abstracts of Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Data Source
      KAKENHI-PROJECT-23656217
  • [Presentation] Absolute Flatness Measurements of Silicon Mirrors by A Three-Intersections Method Using Near-Infrared Interferometry2012

    • Author(s)
      Junichi Uchikoshi, Yoshinori Hayashi, Noritaka Ajari, Katsumi Oda, Taro Arai, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Electroluminescence in Metal-Oxide-Semiconductor Tunnel Diodes with Nanometer-Thick Silicon2012

    • Author(s)
      Mizuho Morita, Ayano Tsuchida, Kei Matsumura, Ryuta Yamada, Yasushi Oshikane, Kentaro Kawai, Junichi Uchikoshi, and Kenta Arima
    • Organizer
      ECS Transactions, 45(5), The Electrochemical Society
    • Place of Presentation
      Seattle
    • Invited
    • Data Source
      KAKENHI-PROJECT-23656217
  • [Presentation] Electroluminescence in Metal-Oxide-Semiconductor Tunnel Diodes with Nanometer-Thick Silicon2012

    • Author(s)
      Mizuho Morita, Ayano Tsuchida, Kei Matsumura, Ryuta Yamada, Yasushi Oshikane, Kentaro Kawai, Junichi Uchikoshi, and Kenta Arima
    • Organizer
      The Electrochemical Society
    • Place of Presentation
      Seattle, USA
    • Year and Date
      2012-05-09
    • Data Source
      KAKENHI-PROJECT-23656217
  • [Presentation] Label-Free Detection of DNA Using Metal-Gap-Metal-Insulator-Semiconductor Devices2012

    • Author(s)
      Takashi Furukawa, Yasunori Nakamukai, Yuichi Doi, Kentaro Kawai, Junichi Uchikoshi, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Label-Free Detection of DNA Hybridization Using Metal-Gap-Oxide-Silicon Structures2012

    • Author(s)
      Yuichi Doi, Sonoko Nishiue, Takashi Furukawa, Kentaro Kawai, Junichi Uchikoshi, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Optical property of random inverted-pyramid textures on Si surface by etching with Nfluoropyridinium salts2012

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Toshinori Hirano, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
    • Place of Presentation
      Honolulu, Hawaii, U.S.A.
    • Year and Date
      2012-10-10
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Metal-gap-oxide-silicon sensor for electrochemical DNA detection by flat band voltage shift2012

    • Author(s)
      Kentaro Kawai, Takuya Juro, Yuichi Doi, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      38th International Conference on Micro and Nano Engineering
    • Place of Presentation
      Toulouse, France
    • Year and Date
      2012-09-17
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Photo-etching of Silicon by N-Fluoropyridinium Salts2012

    • Author(s)
      Kenji Adachi, Takabumi Nagai, Junichi Uchikoshi, Kentaro Tsukamoto, Masaki Otani, and Mizuho Morita
    • Organizer
      20th INTERNATIONAL SYMPOSIUM ON FLUORINE CHEMISTRY 2012
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2012-07-24
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いたエッチングによるSiのランダム逆ピラミッドの形成2012

    • Author(s)
      平野利典、打越純一、大谷真輝、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北九州市
    • Year and Date
      2012-09-14
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Formation of Si Random Inverted-Pyramids by Etching with N-Fluoropyridinium Salts2012

    • Author(s)
      Toshinori Hirano, Junichi Uchikoshi, Masaki Otani, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Non-FET electrochemical DNA detection using metal-gap-oxide-silicon structures2012

    • Author(s)
      Kentaro Kawai, Yuichi Doi, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2012-10-09
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Nanogap electrochemical DNA sensor using flat band voltage shift2012

    • Author(s)
      Takuya Juro, Kentaro Kawai, Yuichi Doi, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      PROGRAM AND ABSTRACTS, 8th Handai Nanoscience and Nanotechnology International Symposium
    • Place of Presentation
      Osaka
    • Year and Date
      2012-11-11
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Metal-gap-oxide-silicon sensor for electrochemical DNA detection by flat band voltage shift2012

    • Author(s)
      Kentaro Kawai, Takuya Juro, Yuichi Doi, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Organizer
      Abstracts, 38th International Conference on Micro and Nano Engineering
    • Place of Presentation
      Toulouse, France
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコン表面の3次元形状の作製2011

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京都
    • Year and Date
      2011-03-14
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Metal Particulates on Si Etching with N-Fluoropyridinium Salts2011

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-10-10
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Electroluminescence in Ultrathin Silicon-on-Insulator Metal-Oxide-Semiconductor Tunnel Diodes2011

    • Author(s)
      A. Tsuchida, K. Matsumura, R. Yamada, Y. Oshikane, K. Kawai, J. Uchikoshi, K. Arima and M. Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2011-10-01
    • Data Source
      KAKENHI-PROJECT-23656217
  • [Presentation] Electrical Characteristics of Metal-Gap-Silicon and Metal-Gap-Oxide-Silicon Structures2011

    • Author(s)
      Takashi Furukawa, Yuuichi Doi, Kentaro Kawai, Junichi Uchikoshi, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2011-11-01
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Cu assisted etching with N-fluoropyridinium salts2011

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani,Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-10-10
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Metal Particulates on Si Etching with N-fluoropyridinium Salts2011

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi,Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Cu assisted etching of Si with N-fluoropyridinium salt2011

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikosh, Masaki Otani, Takabumi Nagai, Kenji Adachi,Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Continuous Generation of Femtoliter Droplets Using Multistage Dividing Microfluidic Channel2011

    • Author(s)
      Kentaro Kawai, Junichi Uchikoshi, Kenta Arima, Shuichi Shoji and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2011-11-01
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコン表面の精密位置合わせ3次元形状創成2011

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢市
    • Year and Date
      2011-09-22
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Electrical Characteristics of Metal-Gap-Oxide-Silicon Structures2011

    • Author(s)
      Yuichi Doi, Takashi Furukawa, Kentaro Kawai, Junichi Uchikoshi, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2011-11-01
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Electrical Sensing of DNA Solutions by Lateral Silicon-Oxide-Gap-Oxide-Silicon Structure on Silicon-on-Insulator Substrate2011

    • Author(s)
      Taiji Kamiya, Takashi Furukawa, Yuichi Doi, Ryuta Yamada, Kentarou Kawai, Junichi Uchikoshi, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Fourth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2011-11-01
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコン表面の3次元形状の作製2011

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学(東京都)(講演会は中止)
    • Year and Date
      2011-03-14
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコン表面の精密位置合わせ3次元形状創成2011

    • Author(s)
      大谷真輝、打越純一、塚本健太郎、永井隆文、足達健二、川合健太郎、有馬健太、森田瑞穂
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢市
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] シリコン-酸化膜-空隙-酸化膜-シリコン構造による液体センシング2010

    • Author(s)
      神谷泰次, 山田隆太, 打越純一, 有馬健太, 森田瑞穂
    • Organizer
      応用物理学関係連合講演会
    • Place of Presentation
      神奈川県平塚市
    • Year and Date
      2010-03-17
    • Data Source
      KAKENHI-PROJECT-19656079
  • [Presentation] N-フルオロピリジニウム塩を用いたシリコンの光エッチング機構の考察2010

    • Author(s)
      塚本健太郎、打越純一、後藤栄晴、大谷真輝、永井隆文、足達健二、有馬健太、森田瑞穂
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎市
    • Year and Date
      2010-09-14
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] N-フルオロピリジニウム塩を用いたシリコンの光エッチング2010

    • Author(s)
      足達健二、永井隆文、打越純一、塚本健太郎、大谷真輝、森田瑞穂
    • Organizer
      第34回フッ素化学討論会
    • Place of Presentation
      札幌サンプラザ(札幌市)
    • Year and Date
      2010-10-19
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Electrical Characterization of DNA Solutions Using Metal-Gap-Insulator-Semiconductor Devices2010

    • Author(s)
      Takaaki Hirokane, Yuichi Doi, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2010-11-24
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] Consideration of photo-etching mechanism of Si with N-fluoropyridinium salt2010

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani, Shigeharu Goto, Yutaka Ie, Takabumi Nagai, Kenji Adachi, Kenta Arima, Mizuho Morita
    • Organizer
      Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪大学中之島センター(大阪市)
    • Year and Date
      2010-11-24
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Photonic and Biosensing Devices Using Silicon Technologies2010

    • Author(s)
      Mizuho Morita, Junichi Uchikoshi and Kenta Arima
    • Organizer
      Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2010-11-26
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] N-フルオロピリジニウム塩を用いたシリコンの光エッチング2010

    • Author(s)
      足達健二、永井隆文、打越純一、塚本健太郎、大谷真輝、森田瑞穂
    • Organizer
      第34回フッ素化学討論会
    • Place of Presentation
      札幌市
    • Year and Date
      2010-10-19
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Consideration of photo-etching mechanism of Si with N-fluoropyridinium salt2010

    • Author(s)
      Kentaro Tsukamoto, Junichi Uchikoshi, Masaki Otani, Shigeharu Goto, Yutaka Ie, Takabumi Nagai, Kenji Adachi, Kenta Arima, Mizuho Morita
    • Organizer
      Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2010-11-24
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Sensing of DNA Solution by Silicon-Oxide-Gap-Oxide-Silicon Structure2010

    • Author(s)
      Taiji Kamiya, Ryuta Yamada, Junichi Uchikoshi, Kenta Arima and Mizuho Morita
    • Organizer
      Extended Abstracts of Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2010-11-24
    • Data Source
      KAKENHI-PROJECT-22360125
  • [Presentation] N-フルオロピリジニウム塩を用いたシリコンの光エッチング機構の考察2010

    • Author(s)
      塚本健太郎、打越純一、後藤栄晴、大谷真輝、永井隆文、足達健二、有馬健太、森田瑞穂
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎市)
    • Year and Date
      2010-09-14
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Formation of Three-Dimensional Shape in Silicon by Photo-etching with N-Fluoropyridinium Salts2009

    • Author(s)
      K.Tsukamoto, J.Uchikoshi, S.Goto1, T.Nagai, K.Adachi, K.Arima, M.Morita
    • Organizer
      Extended Abstracts of Second International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2009-11-25
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Electrical Detection of ExtendedλDNA Molecules with Gap Electrodes by Ultraviolet Radiation2009

    • Author(s)
      Takamichi Hanada, Yoshifumi Okamoto, Katsuhiro Hashimoto, Yasuhumi Ochi, Takaaki Hirokane, Shinichiro Kajiyama, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      Extended Abstracts of First International Symposium on Atomically Controlled Fabrication Technology- Surface and Thin Film Processing-
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2009-02-16
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Sensing of DNA solution with Metal-Gap-Insulator-Semiconductor Device, Extended Abstracts of First International Symposium on Atomically Controlled Fabrication Technology2009

    • Author(s)
      Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      - Surface and Thin Film Processing-
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2009-02-16
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Direct immobiliszation of DNA oligomers onto an aminosilane-attached SiO_2 surface2009

    • Author(s)
      Yoshifumi Okamoto, Takaaki Hirokane, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, Mizuho Morita
    • Organizer
      Extended Abstracts of Second International Symposium on Atomicalluy Controlled Fabrication Technology
    • Place of Presentation
      Suita, Osaka
    • Year and Date
      2009-11-25
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Sensing of DNA solution with Metal-Gap-Insulator-Semiconductor Device2009

    • Author(s)
      Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      First International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2009-02-16
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Direct immobilization of DNA oligomers onto an aminosilane-attached SiO2 surface2009

    • Author(s)
      Yoshifumi Okamoto, Takaaki Hirokane, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, Mizuho Morita
    • Organizer
      Extended Abstracts of Second International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2009-11-25
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] N-フルオロピリジニウム塩を用いたシリコンの3次元形状の作製2009

    • Author(s)
      塚本健太郎、後藤重晴、永井隆文、足達健二、打越純一、森田瑞穂
    • Organizer
      2009年度精密工学会秋季大会学術講演会
    • Place of Presentation
      神戸市、日本
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Formation of Three-Dimensional Shape in Silicon by Photo-etching withN-Fluoropyridinium Salts2009

    • Author(s)
      K.Tsukamoto, J.Uchikoshi, S.Goto, T.Nagai, K.Adachi, K.Arima, M.Morita
    • Organizer
      Extended Abstracts of Second International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2009-11-25
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Photo-etching of Silicon by N-Fluoropyridinium Salt2009

    • Author(s)
      Shigeharu Goto, Kentaro Tsukamoto, Tatsuya Kawase, Noritaka Ajari, Takabumi Nagai, Kenji Adachi, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      Abstracts of 216th Meeting of The Electrochemical Society
    • Place of Presentation
      Vienna, Austria
    • Year and Date
      2009-10-06
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Characterization of Pinhole in Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy2009

    • Author(s)
      Xing Wu, Junichi Uchikoshi, Takaaki Hirokane, Ryuta Yamada, Kenta Arima, Mizuho Morita
    • Organizer
      212th Meeting of The Electrochemical Society
    • Place of Presentation
      Washington, DC
    • Year and Date
      2009-10-09
    • Data Source
      KAKENHI-PROJECT-19656079
  • [Presentation] Surface Shape Measurements of Silicon Photo-etched with N-fluoropyridinium salts by Near-infrared Transmission Interferometry2009

    • Author(s)
      Junichi Uchikoshi, Noritaka Ajari, Kentaro Tsukamoto, Shigeharu Goto, Takabumi Nagai, Kenji Adachi, Kenta Arima, Mizuho Morita
    • Organizer
      Extended Abstracts of International Workshop on X-ray Mirror Design, Fabrication, and Metrology
    • Place of Presentation
      Suita, Osaka, Japan
    • Year and Date
      2009-09-22
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] N-フルオロピリジニウム塩を用いたシリコンの光エッチング2009

    • Author(s)
      後藤栄晴、塚本健太郎、川瀬達也、阿砂利典孝、永井隆文、足達健二、打越純一、森田瑞穂
    • Organizer
      応用物理学会2009年度春季関係連合講演会
    • Place of Presentation
      つくば市
    • Year and Date
      2009-04-01
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] N-フルオロピリジニウム塩を用いたシリコンの3次元形状の作製2009

    • Author(s)
      塚本健太郎、後藤重晴、永井隆文、足達健二、打越純一、森田瑞穂
    • Organizer
      2009年度精密工学会秋季大会学術講演会
    • Place of Presentation
      神戸市
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-20560107
  • [Presentation] Metal-Insulator-Gap-Insulator-Semicondu ctor Device for Biosensors2007

    • Author(s)
      Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2007-10-15
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulat or Wafers by Near-Infrared Scattering Topography and Microscopy2007

    • Author(s)
      Xing Wu, Junichi Uchikoshi, Takaaki Hirokane, Ryuta Yamada, Kenta Arima, Mizuho Morita
    • Organizer
      The 2007 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba International Congress Center, Ibaraki, Japan
    • Year and Date
      2007-09-20
    • Data Source
      KAKENHI-PROJECT-18560104
  • [Presentation] Electrical Detection of Damage of ExtendedλDNA Molecules by Ultraviolet Radiation2007

    • Author(s)
      Takamichi Hanada, Katsuhiro Hashimoto, Yasuhumi Ochi, Takaaki Hirokane, Shinichiro Kajiyama, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2007-10-15
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] 近赤外光トポグラフィと赤外顕微鏡による貼り合わせSOIウエハのパターン付埋め込み酸化膜の評価2007

    • Author(s)
      打越純一呉幸、廣兼孝亮、山田隆太、有馬健太、森田瑞穂
    • Organizer
      精密工学会2007年度関西地方定期学術講演会
    • Place of Presentation
      大阪府大東市、大阪産業大学
    • Year and Date
      2007-08-10
    • Data Source
      KAKENHI-PROJECT-18560104
  • [Presentation] Sensing Device with Metal-Insulator-Gap-Insulator-Semiconductor for Biological Sensors, Abstracts2007

    • Author(s)
      Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe and Mizuho Morita
    • Organizer
      212th Meeting of The Electrochemical Society
    • Place of Presentation
      Washington, DC(Not peer-reviewed)
    • Year and Date
      2007-10-10
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Sensing ofλDNA Solutions by Metal-Gap-Semiconductor Device2007

    • Author(s)
      Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Mizuho Morita
    • Organizer
      Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2007-10-15
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Sensing Device with Metal-Insulator-Gap-Insulator- Semiconductor for Biological Sensors, Abstracts2007

    • Author(s)
      Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
    • Organizer
      212th Meeting of The Electrochemical Society
    • Place of Presentation
      Washington, DC(Not peer-reviewed.)
    • Year and Date
      2007-10-10
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Sensing Device with Metal-Insulator-Gap-Insulator-Semiconductor for Biological Sensors2007

    • Author(s)
      Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe, and Mizuho Morita
    • Organizer
      212th Meeting of The Electrochemical Society
    • Place of Presentation
      Washington, DC
    • Year and Date
      2007-11-10
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Liquid Sensing by Nano-Gap Device with Treated Surface2006

    • Author(s)
      Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Tatsuya Takegawa, Satoru Morita, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Yokohama(Not peer-reviewed.)
    • Year and Date
      2006-09-15
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Metal-Gap-Semiconductor Device for Biosensors2006

    • Author(s)
      Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
    • Organizer
      Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2006-10-19
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Metal-Gap-Semiconductor Sensing Devices for DNA Solutions, Abstracts2006

    • Author(s)
      Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
    • Organizer
      210th Meeting of The Electrochemical Society
    • Place of Presentation
      Not peer-reviewed.
    • Year and Date
      2006-10-31
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Current-Voltage Characteristics of Gap Electrodes with ExtendedλDNA Molecules2006

    • Author(s)
      Katsuhiro Hashimoto, Takamichi Hanada, Yasuhumi Ochi, Takaaki Hirokane, Shigeki Kawakami, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
    • Place of Presentation
      Osaka(Not peer-reviewed.)
    • Year and Date
      2006-10-19
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] Current-Voltage Characteristics of Gap Electrodes withλDNA Molecules on SiO2/Si Substrate after Elongating Treatment, Abstracts2006

    • Author(s)
      Katsuhiro Hashimoto, Takamichi Hanada, Yasuhumi Ochi, Takaaki Hirokane, Shigeki Kawakami, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
    • Organizer
      210th Meeting of The Electrochemical Society
    • Place of Presentation
      Cancun(Not peer-reviewed.)
    • Year and Date
      2006-11-01
    • Data Source
      KAKENHI-PROJECT-18360148
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成

    • Author(s)
      足達健二、永井隆文、平野利典、大谷真輝、川合健太郎、打越純一、森田瑞穂
    • Organizer
      第36回フッ素化学討論会
    • Place of Presentation
      つくば国際会議場(茨城県)
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いたエッチングによるSiのランダム逆ピラミッドの形成

    • Author(s)
      平野利典,打越純一,大谷真輝,塚本健太郎,永井隆文,足達健二,川合健太郎,有馬健太,森田瑞穂
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北九州市
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] Optical property of random inverted-pyramid textures on Si surface by etching with N-fluoropyridinium salts

    • Author(s)
      Masaki Otani, Junichi Uchikoshi, Kentaro Tsukamoto, Toshinori Hirano, Takabumi Nagai, Kenji Adachi, Kentaro Kawai, Kenta Arima, and Mizuho Morita
    • Organizer
      PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
    • Place of Presentation
      Honolulu, Hawaii, U.S.A.
    • Data Source
      KAKENHI-PROJECT-23560123
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるシリコンのランダム逆ピラミッドの形成

    • Author(s)
      平野利典,打越純一,大谷真輝,永井隆文,足達健二,川合健太郎,有馬健太,森田瑞穂
    • Organizer
      第60 回応用物理学会春季学術講演会
    • Place of Presentation
      厚木市
    • Data Source
      KAKENHI-PROJECT-23560123
  • 1.  SHIBATA Tadashi (00187402)
    # of Collaborated Projects: 14 results
    # of Collaborated Products: 0 results
  • 2.  OHMI Tadahiro (20016463)
    # of Collaborated Projects: 12 results
    # of Collaborated Products: 0 results
  • 3.  KOTANI Koji (20250699)
    # of Collaborated Projects: 7 results
    # of Collaborated Products: 0 results
  • 4.  ARIMA Kenta (10324807)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 41 results
  • 5.  UCHIKOSHI Junichi (90273581)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 48 results
  • 6.  KAWAI Kentaro (90514464)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 27 results
  • 7.  FUKUI Kiichi (00311770)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 5 results
  • 8.  MITSUBAYASHI Kohji (40307236)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  ADACHI Kenji (60521739)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 4 results
  • 10.  MORI Yuzo (00029125)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  HIROSE Kikuji (10073892)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  KATAOKA Toshihiko (50029328)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  YOSHII Kumayasu (30029152)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  ENDO Katsuyoshi (90152008)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  丁 剛洙 (60250700)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  青野 正和 (10184053)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  安武 潔 (80166503)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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