Inoue Shozo 井上尚三

… Alternative Names

Researcher Number	50193587
Other IDs
External Links
Affiliation (Current)	2022: 兵庫県立大学, 工学研究科, 教授
Affiliation (based on the past Project Information) *help	2019 – 2020: 兵庫県立大学, 工学研究科, 教授 2016 – 2017: 兵庫県立大学, 工学研究科, 教授 2015: 兵庫県立大学, 工学(系)研究科(研究院), 教授 2012 – 2013: 兵庫県立大学, 工学(系)研究科(研究院), 教授 2008 – 2011: University of Hyogo, 工学研究科, 教授 … More
Review Section/Research Field	Principal Investigator Materials/Mechanics of materials / Materials/Mechanics of materials / Nanomaterials engineering / Basic Section 18010:Mechanics of materials and materials-related Except Principal Investigator Materials/Mechanics of materials / 機械材料工学
Keywords	Principal Investigator スパッタリング / 薄膜 / TiC / 多層薄膜 / 窒化チタン / 反応性スパッタリング / プロセス制御 / 分光分析 / イオン照射 / 形状記憶合金 … More Except Principal Investigator 窒化物薄膜 / 高周波反応性スパッタリング法 / 窒化チタン / 高周波反応性スパッタリング / composition / 強磁性形状記憶合金 / 薄膜 / スパッタリング / magnetron sputtering / Fe-Pd alloy / 酸化挙動 / 窒化アルミニウム / グロ-放電発光分光分析 / Nitride Films / rf Reactive Sputtering / Oxidation Behavior / Titanium Nitride / Alminum Nitride / 傾斜機能薄膜 / 発光分光 / 質量分析 / オージェ電子分光法 / Al-AlN系傾斜機能薄膜 / X線回折 / rf reactive sputtering / functionally gradient films / optical emission spectra / mass spectroscopy / Auger Electron Spectroscopy / ピンホール欠陥 / 分極曲線 / Titanium nitride film / R.f.reactive sputtering / Pinhole defect / Anodic polarization curve / 二源スパッタリング / 反応性スパッタリング / 硬度 / プラズマ発光分光 / 組成 / プロセス制御 / 分光分析 / dual source sputtering / reactive sputtering / nitride films / hardness / plasma emission monitoring / 組成制御 / ferromagnetic shape memory / martensite transformation / Fe-Pd合金 / マルテンサイト変態 / ferromagnetic shape memory alloy / thin films / martensitic transformation Less

相変態を利用した２次元応力分布記録メディアとしてのステンレス薄膜Principal Investigator
- Principal Investigator
  
  井上尚三
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18010:Mechanics of materials and materials-related
- Research Institution
  University of Hyogo
Development of metal/oxide multilayer films showing self-propagating exothermic reaction with controllable heat generation performancePrincipal Investigator
- Principal Investigator
  
  Inoue Shozo
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nanomaterials engineering
- Research Institution
  University of Hyogo
Exploration of metallic glass films for MEMS applicationPrincipal Investigator
- Principal Investigator
  
  INOUE Shozo
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  University of Hyogo
Development of High Response Shape Memory Alloy Micro-Actuator MaterialPrincipal Investigator
- Principal Investigator
  
  INOUE Shozo
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  University of Hyogo
Development of magnetic field driven microactuators made by ferromagnetic shape memory alloy thin films
- Principal Investigator
  
  KOTERAZAWA Keiji
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  University of Hyogo
  Himeji Institute of Technology
High rate deposition of Mgh hardness carbide thin films using a dual source dc magnetron sputtering methodPrincipal Investigator
- Principal Investigator
  
  INOUE Shozo
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Himeji Institute of Technology
Deposition of ferromagnetic shape memory alloy thin films by dc unbalanced magnetron sputtering
- Principal Investigator
  
  KOTERAZAWA Keiji
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Himeji Institute of Technology
Compositional control of ultrahard ternary nitride films deposited by reactive sputtering
- Principal Investigator
  
  KOTERAZAWA Kenji
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Himeji Institute of Technology
磁場印加反応性スパッタリング法による高品位硬質窒化物薄膜の高速成長Principal Investigator
- Principal Investigator
  
  井上尚三
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Himeji Institute of Technology
Evaluation of Pinhole Defects and Corrosion Resistance of TiN-coated Stainless Steels
- Principal Investigator
  
  UCHIDA Hitoshi
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Himeji Institute of Technology
Surface modifications by metal-nitride functionally gradient films
- Principal Investigator
  
  KOTERAZAWA Keiji
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械材料工学
- Research Institution
  Himeji Institute of Technology
Surface Modification of Materials by Ultra-hard Nitride Multilayered Films
- Principal Investigator
  
  KOTERAZAWA Keiji
- Project Period (FY)
  1990 – 1991
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  機械材料工学
- Research Institution
  Himeji Institute of Technology

All 2020 2019 2017 2016 2015 2013 2012 2011 2010 2009 2008 2003

All Journal Article Presentation

[Journal Article] Effect of Cu content on the shapememory behavior of Ti-Ni-Cu alloy thinfilms prepared by triple-source dcmagnetron sputtering, Thin Solid2010
- Author(s)
  K. Hori, T.Namazu, S.Inoue
- Journal Title
  
  Films Vol.518
- Data Source
  KAKENHI-PROJECT-20560083
[Journal Article] Shape Memory Behavior of Ti-Ni-X (X=Pd,Cu) Ternary Alloy Thin Films Prepared by Triple-Source DC Magnetron Sputtering2010
- Author(s)
  S.Inoue
- Journal Title
  
  Materials Science Forum
  
  Volume: 638-642 Pages: 2068-2073
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560083
[Journal Article] Shape Memory Behavior of Ti-Ni-X (X= Pd, Cu) Ternary Alloy Thin Films Prepared by Triple-Source DC Magnetron Sputtering2010
- Author(s)
  S.Inoue, K. Hori, N. Sawada, N. Nakamoto, T.Namazu
- Journal Title
  
  Materials Science Forum Vol.638-642
  
  Pages: 2068-2073
- Data Source
  KAKENHI-PROJECT-20560083
[Journal Article] 非平衡スパッタリング法によるTi-Ni形状記憶合金薄膜の作製とその通電加熱に伴う形状記憶挙動2008
- Author(s)
  井上尚三
- Journal Title
  
  Journal of the Vacuum Society of Japan 51巻
  
  Pages: 312-315
- NAID
  10021157442
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560083
[Journal Article] 非平衡スパッタリング法によるTi-Ni 形状記憶合金薄膜の作製とその通電加熱に伴う形状記憶挙動2008
- Author(s)
  井上尚三, 生津資大, 小寺澤啓司
- Journal Title
  
  J.Vac.Soc.Jpn. Vol.51
  
  Pages: 312-315
- NAID
  10021157442
- Data Source
  KAKENHI-PROJECT-20560083
[Journal Article] Shape memory behavior of Fe-Pd alloy thin films prepared by dc magnetron sputtering2003
- Author(s)
  S.Inoue, K.Inoue, K.Koterazawa, K.Mizuuchi
- Journal Title
  
  Mater.Sci.Eag.A 339
  
  Pages: 29-34
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14350061
[Journal Article] Fe-Pd Ferromagnetic Shape Meomory Alloy Thin Films Made by Dual Source DC Magnetron Sputtering2003
- Author(s)
  S.Inoue, K.Inoue, S.Fujita, K.Koterazawa
- Journal Title
  
  Mater.Trans.JIM 44
  
  Pages: 298-304
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350061
[Journal Article] Shape memory behavior of Fe-Pd alloy thin films prepared by dc magnetron sputtering2003
- Author(s)
  S.Inoue, K.Inoue, K.Koterazawa, K.Mizuuchi
- Journal Title
  
  Mater.Sci.Eng.A 339
  
  Pages: 29-34
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350061
[Journal Article] Deposition of Fe-Pd Ferromagnetic Shape Memory Alloy Thin Films by Sputtering and Their Shape Memory Behavior2003
- Author(s)
  S.Inoue, T.Namazu, S.Fujita, K.Koterazawa, K.Inoue
- Journal Title
  
  Mater.Sci.Forum 426-432
  
  Pages: 2213-2218
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14350061
[Presentation] SUS304ステンレス鋼スパッタ薄膜の成長相におよぼす不純物元素の影響2020
- Author(s)
  髙田大路、倉本慎一、井上尚三
- Organizer
  2020年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19K04094
[Presentation] Effect of deposition condition on the crystal phase of 18-8 stainless steel films prepared by dc magnetron sputtering2019
- Author(s)
  S. Inoue, Y. Fujiwara, N. Zahira and N. Umada
- Organizer
  The 15th International Symposium on Sputtering and Plasma Processes, ISSP2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04094
[Presentation] Ti-SiOx多層薄膜の自己伝播発熱反応におよぼす酸素濃度の影響2017
- Author(s)
  水谷光克, 井上敬太, 吉木啓介, 生津資大, 井上尚三
- Organizer
  2017年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-15K04626
[Presentation] Self-propagating exothermic reaction behavior of Ti/SiOx multilayer films2017
- Author(s)
  S. Inoue, M. Mizutani, K. Inoue, K. Yoshiki and T. Namazu
- Organizer
  The 14th International Symposium on Sputtering and Plasma Processes, ISSP2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04626
[Presentation] 多源スパッタ法により作製したTi-SiOx多層薄膜の自己伝播発熱反応挙動2016
- Author(s)
  井上尚三，井上敬太，金築俊介，三宅修吾，生津資大
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学水戸キャンパス（茨城県）
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15K04626
[Presentation] Ti/SiOおよびTi/Siスパッタ多層膜の発熱性能比較2015
- Author(s)
  井上敬太，金築俊介，三宅修吾，井上尚三，生津資大
- Organizer
  日本機械学会2015年度年次大会
- Place of Presentation
  北海道大学札幌キャンパス（北海道札幌市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K04626
[Presentation] Self-propagating exothermic reaction behavior of Ti/Si multilayer films2015
- Author(s)
  S. Inoue, S. Minamibata, K. Yoshiki and T. Namazu
- Organizer
  The 13th International Symposium on Sputtering and Plasma Processes, ISSP2015
- Place of Presentation
  京都リサーチパーク（京都府京都市）
- Year and Date
  2015-07-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04626
[Presentation] ZrNiAl系金属ガラス薄膜の機械的性質の評価2013
- Author(s)
  清水実結,船越政伸,吉木啓介,生津資大,井上尚三
- Organizer
  精密工学会2013年度春季学術講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2013-03-13
- Data Source
  KAKENHI-PROJECT-23560095
[Presentation] 合金ターゲットのスパッタリングによって作製したZrCuNiAl金属ガラス薄膜の機械的性質の評価2013
- Author(s)
  船越政伸,西祐一,吉木啓介,生津資大,井上尚三
- Organizer
  精密工学会2013年度秋季学術講演会
- Place of Presentation
  関西大学
- Year and Date
  2013-09-12
- Data Source
  KAKENHI-PROJECT-23560095
[Presentation] 合金ターゲットを用いたスパッタ法によるZrCuNiAl金属ガラス薄膜の作製2012
- Author(s)
  船越政伸,吉木啓介,生津資大,井上尚三
- Organizer
  精密工学会2012年度秋季学術講演会
- Place of Presentation
  九州工業大学
- Year and Date
  2012-09-14
- Data Source
  KAKENHI-PROJECT-23560095
[Presentation] Ti-Ni-Cu 合金薄膜をアクチュエータとして用いたマイクロデバイスの作製とその動作評価2011
- Author(s)
  森野勝, 工藤史明, 陣内耕太, 吉木啓介, 生津資大, 井上尚三
- Organizer
  精密工学会2011年度春季学術講演会
- Place of Presentation
  東洋大学(ただし、東日本大震災のため中止)
- Year and Date
  2011-03-16
- Data Source
  KAKENHI-PROJECT-20560083
[Presentation] Effect of Substrate Temperature on the Shape Memory Behavior of Ti-Ni-Cu Ternary Alloy Sputtered Films2011
- Author(s)
  井上尚三, 森野勝, 吉木啓介, 生津資大
- Organizer
  Thermec '2011
- Place of Presentation
  Quebec, Canada(Invited)(Accepted)
- Year and Date
  2011-08-04
- Data Source
  KAKENHI-PROJECT-20560083
[Presentation] コンビナトリアルスパッタリング法によるZrNiAl金属ガラス薄膜の組成探索2011
- Author(s)
  清水実結,吉木啓介,生津資大,井上尚三
- Organizer
  精密工学会2011年度秋季学術講演会
- Place of Presentation
  金沢大学
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-23560095
[Presentation] Ti-Ni-Cu スパッタ薄膜の結晶性と形状記憶挙動におよぼす成膜時の基板温度の影響2010
- Author(s)
  森野勝也, 吉木啓介, 生津資大, 井上尚三
- Organizer
  精密工学会2010 年度秋季学術講演会
- Place of Presentation
  名古屋大学
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-20560083
[Presentation] Shape Memory Behavior of Ti-Ni-X(X=Pd, Cu)Ternary Alloy Thin Films Prepared by Triple-Source dc Magnetron Sputtering2009
- Author(s)
  S.Inoue(invited)
- Organizer
  Thermec '2009
- Place of Presentation
  Maritim Hotel, Berlin
- Year and Date
  2009-08-27
- Data Source
  KAKENHI-PROJECT-20560083
[Presentation] Ti-Ni 系形状記憶合金薄膜の抵抗加熱によるアクチュエータ特性の評価2009
- Author(s)
  中本直希, 澤田直樹, 堀晃輔, 生津資大,井上尚三
- Organizer
  精密工学会2009年度春季学術講演会
- Place of Presentation
  中央大学
- Year and Date
  2009-03-11
- Data Source
  KAKENHI-PROJECT-20560083
[Presentation] Ti-Ni-Cu合金スパッタ薄膜の形状記憶特性に及ぼすCu 組成の影響2008
- Author(s)
  堀晃輔, 生津資大, 井上尚三
- Organizer
  精密工学会2008年度秋季学術講演会
- Place of Presentation
  東北大学
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-20560083

1. KOTERAZAWA Keiji (50047594)

# of Collaborated Projects: 7 results

# of Collaborated Products: 4 results
2. UCHIDA Hitoshi (30047633)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
3. NAMAZU Takahiro (90347526)

# of Collaborated Projects: 2 results

# of Collaborated Products: 13 results

Inoue Shozo 井上 尚三

井上 尚三 イノウエ シヨウゾウ

INOUE Shozo 井上 尚三

Research Projects

Research Products

Co-Researchers

相変態を利用した２次元応力分布記録メディアとしてのステンレス薄膜Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of metal/oxide multilayer films showing self-propagating exothermic reaction with controllable heat generation performancePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Exploration of metallic glass films for MEMS applicationPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of High Response Shape Memory Alloy Micro-Actuator MaterialPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of magnetic field driven microactuators made by ferromagnetic shape memory alloy thin films

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

High rate deposition of Mgh hardness carbide thin films using a dual source dc magnetron sputtering methodPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Deposition of ferromagnetic shape memory alloy thin films by dc unbalanced magnetron sputtering

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Compositional control of ultrahard ternary nitride films deposited by reactive sputtering

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

磁場印加反応性スパッタリング法による高品位硬質窒化物薄膜の高速成長Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Evaluation of Pinhole Defects and Corrosion Resistance of TiN-coated Stainless Steels

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Surface modifications by metal-nitride functionally gradient films

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Surface Modification of Materials by Ultra-hard Nitride Multilayered Films

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Effect of Cu content on the shapememory behavior of Ti-Ni-Cu alloy thinfilms prepared by triple-source dcmagnetron sputtering, Thin Solid2010

Author(s)

Inoue Shozo 井上尚三

井上尚三イノウエシヨウゾウ

INOUE Shozo 井上尚三