Sakaue Hiroyuki 坂上弘之

… Alternative Names

Researcher Number	50221263
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Affiliation (Current)	2021: 広島大学, 先進理工系科学研究科(先), 助教
Affiliation (based on the past Project Information) *help	2001 – 2004: Hiroshima University, Graduate School of Advanced Science of Matter, Assistant, 大学院・先端物質科学研究科, 助手 2000: 広島大学, 工学部, 助手 1990 – 1998: 広島大学, 工学部, 助手
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / 表面界面物性 Except Principal Investigator Electronic materials/Electric materials / 表面界面物性 / Science and Engineering / 電子材料工学 / Microdevices/Nanodevices / Electronic materials/Electric materials
Keywords	Principal Investigator エッチング表面反応過程 / X線光電子分光 / 赤外反射吸収分光 / 水素終端シリコン表面 / ステップ / テラス構造 / 平坦化処理 / 溶存酸素濃度 / Al微細構造 / DMAlH … More Except Principal Investigator エレクトロマイグレーション / ULSI / SEM / 低エネルギエッチング / デジタルエッチング / 自己停止反応 / フッ素ラジカル / 表面反応 / 自己組織化 / 信頼性 / Al配線 / ボイド / 結晶粒界 / 抵抗振動 / エレクトロマイブレーション / SET / 量子ドット / XPS / デジタル・エッチング / 原子層 / 低温エッチング機構 / 側壁損傷評価 / F,Cl / Si表面反応 / inーsitu XPS / ディジタル・エッチング / Si微細ドット / フォトルミネッセンス測定 / 赤外反射吸収分光 / キャピラリ法 / フロロカーボンラジカル / 高選択比 / 出現電圧質量分析法 / 平坦化処理 / ステップ / テラス構造 / UHV-STM / 水素終端シリコン表面 / 微傾斜研磨表面 / 水素終端Si表面 / テラス / 平坦化 / メゾスコピックサイズ / シリコン / 水素終端 / 銅配線 / LSI / パルス電流 / 直流パルス電流 / Cu配線 / ジュール発熱 / サーモマイグレーション / 多層配線 / 走査サーマルプローブ顕微鏡 / 赤外線CCDカメラ / DNA / アルカンチオール / ナノ粒子 / 金 / 伝導特性 / 金電極 / 電子ビームリソグラフィー / SAM / 電子顕微鏡その場観察 / 高磁場ECRスパッタ / 自己維持スパッタ / 分子動力学シミュレーション / 析出合金 / ECRスパッタ / マグネトロンスパッタ / 分子動力学計算 / ボイド移動 / 結晶粒界拡散 / コンタクト埋め込み / STM / エレクトロマイグレ-ション / マイクロ波プラズマ / 金属薄膜 / CuAl合金 / 表面拡散 / アルミニウム / スパッタリング / elctromigration / void / molecular dynamics simulation / sustained self-sputtering / ECR sputtering / in-situ SEM observation / grain boundary / alloy precipitation / 極微細SiドットPN接合素子 / 擬一次元量子効果 / 原子層デジタルエッチング / イオン注入 / 結晶欠陥 / 二重ゲートMOS細線 / SOI細線 / Si細線 / 擬一次元系PN接合 / 磁気抵抗 / 擬一次元PN接合 / 極微細Siドット / 低次元伝導特性 / Fine Si dot PN junction / Pseudo-one dimensional quantum effect / Atomic layr digital etching / Double gate MOS wire / SOI wire / Crystal defect / Self-limitting reaction / Ion implantation / デジタルCVD / 高機能性薄膜 / 積層層間絶縁膜 / コンフォーマルCVD / 低誘電率膜 / 時間変調プラズマ / バイアススパッタ / デジタル法 / 誘導結合プラズマ / 高アスペクト比構造 / 高速成膜 / トリエチルシラン / 低誘電率薄膜 / Digital CVD / High quality thin film / Multi-layr Atacked Interlayr / Conformable CVD / Low dielectric constant film / Time-modulated plasma / Bias sputtering / ヒロック / 非線型 / 転位 / アルミニウム配線 / 振動 / 抵抗振動現象 / 局所性・非局所性評価 / ボイド生成消滅モデル / Electromigration / Resistance Oscillation / Void / Hillock / Nonlinear / Al Interconnect / Dislocation / 銅 / スパッタ / 自己スパッタ / 電子温度 / プラズマ / バリアメタル / Copper / electromigration / sputtering / self-sputtering / electron temperature / plasma / 単一電子トランジスタ / 半導体 / 絶縁体 / 超薄膜 / トンネルバリア / 多層薄膜 / トレネル酸化膜 / トンネル酸化膜 / Single Electron / semiconductor / insulator / ultra thin film / tunneling barrier / multi-layered film / オリゴシラン / 自己組織化膜 / σ超共役 / 光・電気特性 / コンフォメーション / 光デバイス / チオール / UV / 可視光スペクトル / PLスペクトル / HOMO-LUMOギャップ / チオール末端 / EL素子 / 金表面 / 電子物性 / 量子科学計算 / Oligosilane / Self-assembled film / σ hyper-conjugation / Optical and electrical properties / Conformation / Optical device / Thiol / ポーラスアルミナ / ナノ磁性体 / トンネル接合 / クーロン・ブロッケイド / スピントロニクス / ナノホール / 強磁性 / エピタキシャル成長 / 強磁性体 / トンネリング / 単一電子効果 / porous alumina / nano ferromagnetic materials / quantum dot / tunnel junction / Coulomb blockade / spintronics / アルミナナノホール / 高分子ナノ構造体 / 陽極酸化 / ポリアクリロニトリル / 耐炎化 / 炭化 / ラマン / 炭化構造 / aluminum nanohole / polymer nanostructure / anodic oxidation / polyacrylonoitrile / stabilization / carbonization / Raman Less

Formation of multiple tunneling junctions of quantum dots using self-organized nanoholes and its application to spintronics
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Kansai University
  Hiroshima University
Fabrication of Carbon Rod Arrays Structure Using Self-organized Nano-hole Template and Its Application for Emitter
- Principal Investigator
  
  TAKAHAGI Takayuki
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
量子ドット-DNA三次元結合体の自己組織形成による新機能素子の探索
- Principal Investigator
  
  新宮原正三
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Hiroshima University
極微細ハイブリッド多層配線の高信頼化に関する研究
- Principal Investigator
  
  新宮原正三
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Hiroshima University
Fabrication of Self-assembled Film of Silicon Atomic Thin Wires and Its Applications for Optical Devices
- Principal Investigator
  
  TAKAHAGI Takayuki
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
Fabrication study of multiply connected SETs by sequential depositions of semiconductor and insulator
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
水素終端Si表面のメゾスコピック周期構造の自己組織化と反応特異性の研究
- Principal Investigator
  
  TAKAHAGI Takayuki
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  表面界面物性
- Research Institution
  Hiroshima University
Research on the highly reliable Cu multilevel interconnects employing the sustained self-sputtering
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
Self-orgnization of Al nano-structure using selective reactivity of step/terrace structure on Si surfacePrincipal Investigator
- Principal Investigator
  
  SAKAUE Hiroyuki
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  表面界面物性
- Research Institution
  HIROSHIMA UNIVERSITY
水素及びハロゲンラジカルとシリコン表面の単原子反応の制御
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Toyo University
極表面その場分析による金属及び半導体エッチング表面の反応過程観察Principal Investigator
- Principal Investigator
  
  坂上弘之
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Hiroshima University
Investigation on Resistance Oscillation Induced by Direct Current Electromigration
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  HIROSHIMA UNIVERSITY
水素及びハロゲンラジカルとシリコン表面の単原子層反応の制御
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
Fabrication of Fine Si Dot PN Junction pn junction and its Pseudo-One Dimensional Quantum Effects
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
Fabrication of ULSI highly Functional Thin Film employing High Rate and High Uniformity Digital CVD
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Toyo University
  Hiroshima University
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究
- Principal Investigator
  
  堀池靖浩
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University
Investigation and control of a directional atomic flow induced by a high density electron current in an ultra fine metalic interconnection
- Principal Investigator
  
  SHINGUBARA Shoso
- Project Period (FY)
  1991 – 1993
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  電子材料工学
- Research Institution
  HIROSHIMA UNIVERSITY
電子波デバイス用基板のディジタル・エッチングによる無損傷加工に関する研究
- Principal Investigator
  
  HORIIKE Yasuhiro
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hiroshima University

All 2005

All Journal Article

[Journal Article] Contact Resistance Reduction Using Vacuum Loadlock System and Plasma Dry Cleaning2005
- Author(s)
  H.Miya, S.Shingubara, H.Sakaue, T.Takahagi
- Journal Title
  
  Japanese J.of Appl.Phys. 44-6A
  
  Pages: 3860-3863
- NAID
  10016441158
- Data Source
  KAKENHI-PROJECT-15201034
[Journal Article] Fabrication of Carbon Nanotube and Nanorod Arrays Using Nanoporous Template2005
- Author(s)
  S.Huang, T.Shimizu, H.Sakaue, S.Shingubara, T.Takahagi
- Journal Title
  
  Japanese Journal of Applied Physics 44-7A
  
  Pages: 5289-5291
- NAID
  10016610107
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15201034
[Journal Article] Fabrication of Carbon Nanotube and Nanorod Arrays Using Nanoporous Template2005
- Author(s)
  S.Huang, T.Shimizu, H.Sakaue, S.Shingubara, T.Takahagi
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44-7A
  
  Pages: 5289-5291
- NAID
  10016610107
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15201034

1. SHINGUBARA Shoso (10231367)

# of Collaborated Projects: 15 results

# of Collaborated Products: 3 results
2. TAKAHAGI Takayuki (40271069)

# of Collaborated Projects: 9 results

# of Collaborated Products: 3 results
3. HORIIKE Yasuhiro (20209274)

# of Collaborated Projects: 8 results

# of Collaborated Products: 0 results
4. IWABUCHI Shuichi (40294277)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. SHINDO Haruo (20034407)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. KIKKAWA Takamaro (60304458)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. WAKAYA Fujio (60240454)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KANEKO Hisashi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. KAWAMURA Kouhei

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 戸所義博

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Sakaue Hiroyuki 坂上 弘之

SAKAUE Hiroyuki 坂上 弘之

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Sakaue Hiroyuki 坂上弘之

SAKAUE Hiroyuki 坂上弘之