OHTSU Yasunori 大津康徳

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Yasunori Ohtsu 大津康徳

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Researcher Number	50233169
Other IDs	https://orcid.org/0000-0002-9501-547X
External Links
Affiliation (Current)	2024: 佐賀大学, 理工学部, 教授
Affiliation (based on the past Project Information) *help	2018 – 2024: 佐賀大学, 理工学部, 教授 2016 – 2017: 佐賀大学, 工学(系)研究科(研究院), 教授 2011 – 2013: 佐賀大学, 工学(系)研究科(研究院), 准教授 2007: 佐賀大学, 理工学部, 准教授 2002 – 2006: 佐賀大学, 理工学部, 助教授 2001: 佐賀大学, 理工学部, 講師 1994 – 1995: 佐賀大学, 理工学部, 助手
Review Section/Research Field	Principal Investigator Plasma science / Basic Section 14010:Fundamental plasma-related / Medium-sized Section 14:Plasma science and related fields / プラズマ理工学 Except Principal Investigator プラズマ理工学 / Humanities and Social Sciences / Science and Engineering
Keywords	Principal Investigator 負イオン / ２次電子放出係数 / 2次電子放出係数 / 高密度プラズマ / 容量結合型放電 / メッシュ電極 / レーザ光脱離法 / 高周波ハイブリッドプラズマ / 高出力負イオン源 / 新規ホロー磁化放電 … More / 高密度水素プラズマ / ホロー磁化放電 / 電子放出 / ナノウォール / 高周波磁化ホロー放電 / ナノ構造体 / ナノサイズ構造体 / クーロン力 / イオン・イオンプラズマ / ヘリウム / 低速電子放出 / 静電プローブ / 磁界閉じ込め効果 / ガス圧力 / 非アルカリ金属 / リングホロー磁化放電 / ネオリングホロー磁化放電 / PIC-MCC法 / イオン飽和電流 / スモラッコウスキー効果 / ネオリングホロ―磁化放電 / ホロー陰極放電 / 高密度プラズマ源 / プラズマ応用 / 低気圧高密度プラズマ / ネオ磁場構造 / ホロー効果 / リング状ホロー磁化放電 / 高密度均一プラズマ / スパッタリング / 高速アッシング / ネオ磁場配位リングホロー磁化放電 / ハイブリッドリングﾎﾛ-放電 / 粒子シミュレーション / 容量結合プラズマ / ガンマ作用 / 多重リング状ホロー電極 / 容量結合放電 / ホロー陰極効果 / ハイブリッドリングホロー放電 / ガス温度 / 商用周波数 / 誘電体 / 大気圧バリア放電 / プラズマ照射 / 撥水性 / 表面改質 / 生体模擬材料 / 低融点材料 / バリア放電 / 大気圧室温プラズマ / 高密度 / 容量結合型高周波放電 / 酸化物電極 / 二次電子放出係数 / 光源 / スパッタリングプラズマ源 / チタン酸ストロンチウム / 酸化マグネシウム / 酸化物 / レーザ光散乱法 / ラングミュアプローブ / 微粒子 / フィラメント / 電子ビーム発生器 / 凝集成長 / スパッタ法 / 電位構造 / レーザー光散乱法 / 浮遊微粒子 / 電子ビーム … More Except Principal Investigator Hole parameter / Ion energy distribution / Ion temperature / Simulated divertor plasma / High angular resolution analyzer / イオン2次元速度空間構造 / ホールパラメータ / イオンエネルギー分布 / イオン温度 / 模擬ダイバータプラズマ / 高角度分解能アナライザ / negative ion / annular slot antenna / ring-shaped permanent magnet / uniform plasma / high density plasma / large diameter plasma / 負イオン / リング状永久磁石 / 円環スロットアンテナ / 均一密度プラズマ / 高密度プラズマ / 大面積プラズマ / チタン酸ストロンチウム / 二酸化チタン / 酸化マグネシウム / オージェ中和理論 / 誘電体バリア放電 / 2次電子放出 / 撥水・親水性 / ポリマー表面処理 / プラズマテレビ / ペニング効果 / 放電開始電圧 / 強誘電体 / 高2次電子放出 / マイクロプラズマ / 通信 / 加熱 / 体験型理科教室 / 教材 / 創造性教育 / 電子レンジ / 創造性育成 / 事前調査 / 生徒目線の教材 / 科学教材 / 電気を通さないもの / 電気を通すもの / 電磁波 / 携帯電話 / 真空 / 磁石 / プラズマ / 独創性 / 創造性 / 生徒体験型 / 理科教材 / 科学的創造性 / 磁力線 / 太陽風 / 永久磁石 / 地磁気 / オーロラ Less

らせんステップ型低速電子高放出によるヘリウムのイオン・イオンプラズマ生成Principal Investigator
- Principal Investigator
  
  大津康徳
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 14:Plasma science and related fields
- Research Institution
  Saga University
Production of high-density hydrogen plasma by novel hollow magnetized discharge for performing high-power negative ion sourcePrincipal Investigator
- Principal Investigator
  
  大津康徳
- Project Period (FY)
  2022 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 14010:Fundamental plasma-related
- Research Institution
  Saga University
Development of Neo-ring-shaped hollow magnetized discharge by Smoluckowski effect and production of negative ionsPrincipal Investigator
- Principal Investigator
  
  Ohtsu Yasunori
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 14010:Fundamental plasma-related
- Research Institution
  Saga University
Novel development of ring-shaped hollow magnetized discharge under neo-magnetic field configuration for low-pressure high-density uniform plasma sourcePrincipal Investigator
- Principal Investigator
  
  Yasunori Ohtsu
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Saga University
Establishment of hybrid ring-shaped hollow discharge and application to large-diameter high-density plasma sourcePrincipal Investigator
- Principal Investigator
  
  OHTSU Yasunori
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Saga University
高2次電子放出・強誘電体酸化物電極による高圧気体マイクロプラズマ低エネルギー生成
- Principal Investigator
  
  藤田寛治
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Saga University
電子レンジ・携帯電話にみる電磁波体験型科学創造性育成法の開発
- Principal Investigator
  
  藤田寛治
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Humanities and Social Sciences
- Research Institution
  Saga University
新医療福祉機器を目指した大気圧室温プラズマ生成Principal Investigator
- Principal Investigator
  
  大津康徳
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Saga University
生徒体験型オーロラ実験に関する教材開発
- Principal Investigator
  
  FUJITA Hiroharu
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Humanities and Social Sciences
- Research Institution
  Saga University
酸化物電極容量結合型放電による高効率高密度プラズマ生成とその展開Principal Investigator
- Principal Investigator
  
  大津康徳
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Plasma science
- Research Institution
  Saga University
Analysis of Two Dimensional Velocity Space Structure of Ions in Simulated Divertor Plasma With High Angular
- Principal Investigator
  
  FUJITA Hiroharu
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Saga University
電子ビーム注入による浮遊微粒子の空間分布制御Principal Investigator
- Principal Investigator
  
  大津康徳
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Saga University
Development of generation method of microwave plasmas with an annular slot antenna for large diameter wafer etching
- Principal Investigator
  
  FUJITA Hiroharu
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Saga University

[Book] Characteristics of Novel Rotational Magnetron Sputtering Plasma Sources with Various Magnet Arrangements for Target Utilization Saving Resources2022
- Author(s)
  Y.Ohtsu, M. Amzad Hossain and J. Schulze
- Total Pages
  30
- Publisher
  Nova Science Publishers
- ISBN
  9798886973310
- Data Source
  KAKENHI-PROJECT-23K22467
[Book] 超撥水・超撥油・滑液性表面の技術（第2巻）2021
- Author(s)
  穂積、大津　他２４名
- Total Pages
  280
- Publisher
  サイエンス＆テクノロジー
- ISBN
  9784864282505
- Data Source
  KAKENHI-PROJECT-19K03784
[Book] ZnO Thin Films: Properties, Performance and Applications Chapter 6 Development of Novel RF Sputtering Plasma Source and Preparation of Al-Doped ZnO Thin Films for Transparent Conductive Oxide Applications2019
- Author(s)
  Yasunori Ohtsu and Takashi Sumiyama
- Total Pages
  16
- Publisher
  NOVA Science Publishers
- ISBN
  9781536160864
- Data Source
  KAKENHI-PROJECT-19K03784
[Book] 1.Physics of High-Density Radio Frequency Capacitively Coupled Plasma with Various Electrodes and Its Applications2019
- Author(s)
  Yasunori Ohtsu
- Total Pages
  16
- Publisher
  IntechOpen
- ISBN
- Data Source
  KAKENHI-PROJECT-16K05634
[Book] エレクトロニクス・エネルギー分野における超撥水・超親水化技術2012
- Author(s)
  矢嶋, 大津, 他
- Publisher
  (株)技術情報協会
- Data Source
  KAKENHI-PROJECT-23540577
[Book] Preparation of Zirconium Oxide Thin Film by Plasma Coating Method and its Hydrohobic Nature in Zirconium Characteristics, Technology and Performance2012
- Author(s)
  Y.Ohtsu
- Publisher
  Nova Science Publisher, Inc. New York
- Data Source
  KAKENHI-PROJECT-23540577
[Book] エレクトロニクス・エネルギー分野における超撥水・超親水化技術2012
- Author(s)
  矢嶋、大津、他39名
- Total Pages
  418
- Publisher
  株式会社技術情報協会
- Data Source
  KAKENHI-PROJECT-23540577
[Book] Preparation of Zirconium Oxide Thin Film by Plasma Coating Method and its Hydrophobic Nature in Zirconium -Charactertistics, Technology and Performance,2012
- Author(s)
  Y.Ohtsu, D.R.Mylinari, M.Nagai, J.Benavente, G.Maccauro et al
- Total Pages
  138
- Publisher
  Nova Science Publisher, Inc. New York
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Temporal evolution of the ion flux to the target in rotational RF multi-magnetron plasma2022
- Author(s)
  Yasunori Ohtsu, Koya Yasuda, and Julian Schulze
- Journal Title
  
  J. Vac. Sci. Technol.A
  
  Volume: 40 Issue: 5 Pages: 053006-053006
- DOI
  10.1116/6.0001994
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22467
[Journal Article] Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al<sub>2</sub>O<sub>3</sub> ? ZnO targets2022
- Author(s)
  Ohtsu Yasunori、Sakata Godai、Schulze Julian、Yasunaga Takeshi、Ikegami Yasuyuki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SI Pages: SI1005-SI1005
- DOI
  10.35848/1347-4065/ac4a01
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22467
[Journal Article] Properties of AZO thin films prepared by stationary and rotating RF magnetized plasma sputtering source2022
- Author(s)
  Hossain Md. Amzad、Patwary Md Abdul Majed、Rahman Md. Mustafizur、Ohtsu Yasunori
- Journal Title
  
  AIP Advances
  
  Volume: 12 Issue: 1 Pages: 015224-015224
- DOI
  10.1063/5.0064434
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Development of a cruciform radio-frequency closed magnetron sputtering source including four sectorial magnetron sputtering discharges for uniform target utilization2022
- Author(s)
  Koya Yasuda, Yasunori Ohtsu and Julian Schulze
- Journal Title
  
  Vacuum
  
  Volume: 202 Pages: 111184-111184
- DOI
  10.1016/j.vacuum.2022.111184
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22467
[Journal Article] Preparation of Water-Repellent Film on a Plastic Plate by Unbalanced Radio-Frequency Magnetron Plasma Sputtering Using PTFE Target for a Next-Generation Automobile Window2021
- Author(s)
  Ohtsu Yasunori、Ino Yuta、Fujio Yuki、Tabaru Tatsuo、Yasunaga Takeshi、Ikegami Yasuyuki
- Journal Title
  
  Plasma Chemistry and Plasma Processing
  
  Volume: 41 Issue: 6 Pages: 1631-1646
- DOI
  10.1007/s11090-021-10204-4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Characteristics of a radio frequency magnetized double-ring-shaped hollow cathode plasma source with permanent magnets for high-density hydrogen plasma generation2021
- Author(s)
  Ohtsu Yasunori、Imoto Shoma、Takemura Shunya、Schulze Julian
- Journal Title
  
  Vacuum
  
  Volume: 193 Pages: 110531-110531
- DOI
  10.1016/j.vacuum.2021.110531
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization2020
- Author(s)
  Ohtsu Yasunori、Nakashima Takahiro、Tanaka Rei、Schulze Julian
- Journal Title
  
  Vacuum
  
  Volume: 181 Pages: 109593-109593
- DOI
  10.1016/j.vacuum.2020.109593
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Development of rotational maze-shaped RF magnetron plasma for successful target utilization and thin-film preparation2020
- Author(s)
  Ohtsu Yasunori、Tanaka Rei、Nakashima Takahiro
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 60 Issue: SA Pages: SAAB01-SAAB01
- DOI
  10.35848/1347-4065/abb758
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Spatial structure of radio-frequency capacitive discharge plasma with ring-shaped hollow electrode using Ar and O2 mixture gases2019
- Author(s)
  Yasunori Ohtsu, Masaya Takasaki and Julian Schulze
- Journal Title
  
  Journal of Physics D: Applied Physics
  
  Volume: 52 Issue: 35 Pages: 355202-355202
- DOI
  10.1088/1361-6463/ab2862
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Treatment of a polycarbonate plate for a next-generation vehicle window by radio frequency magnetron plasma sputtering using a PVDF target2019
- Author(s)
  Yasunori Ohtsu , Yusuke Takada, Kosei Sugawara, Yuki Fujio, and Tatsuo Tabaru
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: SE Pages: SEED03-SEED03
- DOI
  10.7567/1347-4065/ab0c72
- NAID
  210000156088
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Observation of ring-shaped pulsed DC discharge plasma source using single pole magnet setups for material processing2019
- Author(s)
  Md. Amzad Hossain, M. A. Majed Patwary, M. M. Rahman Bhuiyan, Yutaro Nakamura, Kosei Sugawara & Yasunori Ohtsu
- Journal Title
  
  Radiation Effects and Defects in Solids Incorporating Plasma Science and Plasma Technology
  
  Volume: 174 Issue: 5-6 Pages: 380-396
- DOI
  10.1080/10420150.2019.1596105
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Journal Article] Outer Ring-Shaped Radio Frequency Magnetized Plasma Source for Target Utilization in Specific Area2018
- Author(s)
  Md. Amzad Hossain and Yasunori Ohtsu
- Journal Title
  
  IEEE Trans. Plasma Sci.
  
  Volume: 46 Issue: 8 Pages: 2894-2900
- DOI
  10.1109/tps.2018.2850352
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] RF magnetized ring-shaped plasma for target utilization obtained with circular magnet monopole arrangement2018
- Author(s)
  Md. Amzad Hossain and Yasunori Ohtsu
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: 57 Issue: 1S Pages: 01AA05-01AA05
- DOI
  10.7567/jjap.57.01aa05
- NAID
  210000148531
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing2017
- Author(s)
  Md. Amzad Hossain, Yasunori Ohtsu and Tatsuo Tabaru
- Journal Title
  
  Plasma Chem Plasma Process
  
  Volume: 37 Issue: 6 Pages: 1663-1677
- DOI
  10.1007/s11090-017-9847-1
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] RF Magnetized Ring-Shaped Plasma for Uniform Cu Target Utilization by Circular Magnets Monopole Arrangement2017
- Author(s)
  Md. Amzad Hossain and Yasunori Ohtsu
- Journal Title
  
  Proc. ISPlasma 2017
  
  Volume: 9
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] Surface treatment of silicon wafer by atmospheric pressure plas ma jet with a tungsten rod coated by C22017
- Author(s)
  Yasunori Ohtsu and Kenta Nagamatsu
- Journal Title
  
  Proc. ISPlasma 2017
  
  Volume: 9
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] PRotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization2017
- Author(s)
  Tsubasa Ide, Md. Amzad Hossain, Yutaro Nakamura and Yasunori Ohtsu
- Journal Title
  
  Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  
  Volume: 35 Issue: 6
- DOI
  10.1116/1.4999221
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] Spatial structure of radio frequency ring-shaped magnetized discharge sputtering plasma using two facing ZnO/Al2O3 cylindrical targets for Al-doped ZnO thin film preparation2017
- Author(s)
  Takashi Sumiyama, Takaya Fukumoto, Yasunori Ohtsu, and Tatsuo Tabaru
- Journal Title
  
  AIP Advances
  
  Volume: 7 Issue: 5
- DOI
  10.1063/1.4983851
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] Electrical and Structural Properties of Copper Thin Films Deposited by Novel RF Magnetized Plasma Sputtering with Gyratory Square-Shaped Arrangement by Bar Permanent Magnets2016
- Author(s)
  Md. Amzad Hossain and Yasunori Ohtsu
- Journal Title
  
  Bulletin of the American Physical Society 69th Annual Gaseous Electronics Conference
  
  Volume: 61
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] High-density radio-frequency magnetized plasma sputtering source with rotational square-shaped arrangement of rod magnets for uniform target utilization2016
- Author(s)
  Md. Amzad Hossain, T. Ide, K. Ikari, Y. Ohtsu
- Journal Title
  
  Vacuum
  
  Volume: 128 Pages: 219225-219225
- DOI
  10.1016/j.vacuum.2016.03.035
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] Spatial structure of plasma density and electron temperature in capacitive RF discharges with a single ring-shaped narrow trench of various depths2016
- Author(s)
  J. Schulze, E. Schuengel, N. Matsumoto, Y. Ohtsu
- Journal Title
  
  Bulletin of the American Physical Society 69th Annual Gaseous Electronics Conference
  
  Volume: 61
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] Capacitive radio frequency discharges with a single ring-shaped narrow trench of various depths to enhance the plasma density and lateral uniformity2016
- Author(s)
  Y. Ohtsu, N. Matsumoto, J. Schulze and E. Schuengel
- Journal Title
  
  PHYSICS OF PLASMAS,
  
  Volume: 23 Issue: 3 Pages: 033510-033510
- DOI
  10.1063/1.4943964
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Journal Article] Production of radio frequency magnetron plasma by monopole arrangement of magnets for target uniform utilization2014
- Author(s)
  Y.Ohtsu, M.Shigyo, M.Akiyama, T.Tabaru
- Journal Title
  
  Vacuum
  
  Volume: 101 Pages: 403-407
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Radio-frequency magnetized ring-shaped hollow cathode discharge plasma for low-pressure plasma processing2014
- Author(s)
  Y.Ohtsu, J.Eguchi and Y.Yahata
- Journal Title
  
  Vacuum
  
  Volume: 101 Pages: 46-52
- DOI
  10.1016/j.vacuum.2013.07.029
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] radio-frequency magnetized ring-shaped hollow cathode discharge plasma for low-pressure plasma processing2014
- Author(s)
  Y.Ohtsu, J.Eguchi, Y.Yahata
- Journal Title
  
  Vacuum
  
  Volume: 101 Pages: 46-52
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Production of High-Density Radio Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench-Shapes2013
- Author(s)
  Y.Ohtsu, Y.Yahata, J.Kagami, Y.Kawashimo and T.Takeuchi
- Journal Title
  
  IEEE Trans. Plasma Sci., Special Issue on Ion sources
  
  Volume: 41 Issue: 8 Pages: 1856-1862
- DOI
  10.1109/tps.2012.2222053
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Criteria of radio-frequency ring-shaped hollow cathode discharge using H2 and Ar gases for plasma processing2013
- Author(s)
  Y.Ohtsu and Y.Kawasaki
- Journal Title
  
  J.Appl.Phys
  
  Volume: 113 Issue: 3
- DOI
  10.1063/1.4776220
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Production of high-density radio frequency plasma source by ring-shaped hollow-cathode discharge at various trench-shapes, IEEE Trans2013
- Author(s)
  Y.Ohtsu, Y.Yahata, J.Kagami, Y.Kawashimo, T.Takeuchi
- Journal Title
  
  Plasma Sci., Special Issue on Ion sources
  
  Volume: 41 Pages: 1856-1862
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Production of low electron temperature plasma and coating of carbon-related water repellent films on plastic plate2012
- Author(s)
  Y.Ohtsu and K.Kihara
- Journal Title
  
  IEEE Trans. Plasma Sci., Special Issue on Carbon-Related Materials Processing by Plasma Technologies
  
  Volume: 40 Issue: 7 Pages: 1809-1814
- DOI
  10.1109/tps.2012.2194513
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Influence of trench shape of ring-shaped hollow electrode on high-density capacitive coupled plasma2011
- Author(s)
  Y.Ohtsu, Y.Yahata, J.Kagami, Y.Kawashimo, T.Takeuchi
- Journal Title
  
  Proc. Plasma Conference 2011
  
  Volume: 22P027-O
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Influence of trench shape of ring-shaped hollow electrode on high-density capacitive coupled plasma2011
- Author(s)
  Y.Ohtsu, Y.Yahata, J.Kagami, Y.Kawashimo, T.Takeuchi
- Journal Title
  
  Proc. Plasma Conference
  
  Volume: 22P027-O Pages: 1-2
- Data Source
  KAKENHI-PROJECT-23540577
[Journal Article] Production of dielectric barrier discharge microplasmas at various oxides with high secondary electron emission and high dielectric constanat2008
- Author(s)
  Y. Ohtsu and H. Fujita
- Journal Title
  
  Proc. of The 4th International Workshop on Microplasmas 無
  
  Pages: 57-58
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030012
[Journal Article] PLASMA TREATMENT OF POLYMER MATERIAL BY DIELECTRIC BARRIER DISCHARGE WITH MESH ELECTRODE2007
- Author(s)
  Y. Ohtsu, K. Kawaguchi and H. Fujita
- Journal Title
  
  Proc. of The 4th International Workshop on Microplasmas 無
  
  Pages: 112-113
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030012
[Journal Article] Plasma characteristics of atmospheric microplasma produced by high secondary electron-emission-material2007
- Author(s)
  Y. Ohtsu and H. Fujita
- Journal Title
  
  Proc. of 18th International Symposium on Plasma Chemistry (CD-ROM)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030012
[Journal Article] Influence of dielectric material on atmospheric barrier discharge plasma using noble gases2007
- Author(s)
  Y.Ohtsu, N.Yamasaki, H.Fujita
- Journal Title
  
  Proceedings of The 24 Symposium on Plasma Processing
  
  Pages: 191-192
- Data Source
  KAKENHI-PROJECT-18030012
[Journal Article] Microplasma generation beyond atmospheric pressure by dielectric barrier discharge with high secondary-electron-emission oxides2006
- Author(s)
  Y.Ohtsu, K.Eura, H.Fujita
- Journal Title
  
  Proceedings of 13^<th> Asian Conference on Electrical Discharge (CD-ROM)
  
  Pages: 1-4
- Data Source
  KAKENHI-PROJECT-18030012
[Journal Article] Breakdown characteristics of atmospheric pressure microplasma produced by dielectric barrier discharge with high-secondary-electron-emission oxides2006
- Author(s)
  Y.Ohtsu, K.Eura, H.Fujita
- Journal Title
  
  Proceedings of 3^<rd> International Workshop on Microplasma
  
  Pages: 68-68
- Data Source
  KAKENHI-PROJECT-18030012
[Journal Article] 電子レンジ・携帯電話にみる電磁波体験型科学創造性育成法の開発2006
- Author(s)
  藤田寛治, 大津康徳, 三沢達也
- Journal Title
  
  科学研究費補助金特定領域研究「新世紀型理数科系教育の展開研究」研究項目A02(論理的思考力や創造性・独創性を育むための教育内容や指導方法・教材等の研究」平成14-18年度研究成果報告書
  
  Pages: 359-368
- Data Source
  KAKENHI-PROJECT-17011057
[Journal Article] 身近な家電・情報機器による電磁波体験型創造性育成教材2006
- Author(s)
  藤田寛治, 大津康徳, 三沢達也, 馬原俊治, 馬原由美子
- Journal Title
  
  日本科学教育学会第30回年会論文集 30
  
  Pages: 438-438
- Data Source
  KAKENHI-PROJECT-17011057
[Journal Article] 2006リフレッシュ理科教室(九州支部佐賀会場)開催報告2006
- Author(s)
  藤田寛治, 大津康徳, 三沢達也, 藤崎寿一
- Journal Title
  
  応用物理教育 30・2
  
  Pages: 89-91
- Data Source
  KAKENHI-PROJECT-17011057
[Journal Article] Ar/0_2 gas pressure dependence of atomic concentration of zirconia prepared by zirconium pulse arc PBII&D2006
- Author(s)
  K.Yukimura, H.Yoshinaga, Y.Ohtsu, H.Fujita, K.Nakamura, X.Ma
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B : Beam Interactions with Materials and Atoms Vol.242
  
  Pages: 318-320
- Data Source
  KAKENHI-PROJECT-16654096
[Journal Article] Influences of oxide material on high density plasma production using capacitively coupled discharge2006
- Author(s)
  Y.Ohtsu, T.Shimazoe, T.Misawa, H.Fujita
- Journal Title
  
  Thin Solid Films 506-507
  
  Pages: 545-549
- Data Source
  KAKENHI-PROJECT-18030012
[Journal Article] 2005年度リフレッシュ理科教室(九州支部佐賀会場)開催報告:キミは未来の科学者だ!〜サイエンスマジック〜2005
- Author(s)
  藤田寛治, 大津康徳, 三沢達也, 藤崎寿一
- Journal Title
  
  応用物理教育 29・2
  
  Pages: 43-46
- NAID
  10016952524
- Data Source
  KAKENHI-PROJECT-17011057
[Journal Article] 2004年度リフレヅシュ理科教室報告:九州支部佐賀会場のリフレッシュ理科教室〜台所にひそむ科学〜2005
- Author(s)
  藤田寛治, 大津康徳, 三沢達也, 藤崎寿一
- Journal Title
  
  応用物理 74・5
  
  Pages: 640-641
- Data Source
  KAKENHI-PROJECT-17011057
[Journal Article] Preparation of zirconium oxide thin film using inductively coupled oxygen plasma sputtering2005
- Author(s)
  Y.Ohtsu, M.Egami, H.Fujita, K.Yukimura
- Journal Title
  
  Surf. Coat. Technol. Vol.196
  
  Pages: 81-84
- Data Source
  KAKENHI-PROJECT-16654096
[Journal Article] Influence of oxide material on high density plasma production using capacitively coupled discharge2004
- Author(s)
  Y.Ohtsu, T.Shimazoe, T.Misawa, H.Fujita
- Journal Title
  
  Abstract of 7^<th> Asia Pacific Conference on Plasma Science and Technology, 17^<th> Symposium on Plasma Science for Materials
  
  Pages: 432-432
- Data Source
  KAKENHI-PROJECT-16654096
[Journal Article] 2004年度リフレッシュ理科教室(九州支部佐賀会場)開催報告2004
- Author(s)
  藤田寛治, 大津康徳, 三沢達也
- Journal Title
  
  応用物理教育 28・2
  
  Pages: 33-35
- NAID
  10014063678
- Data Source
  KAKENHI-PROJECT-15020250
[Journal Article] Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide2004
- Author(s)
  Y.Ohtsu, H.Fujita
- Journal Title
  
  Applied Physic Letter 85・21
  
  Pages: 4875-4877
- Data Source
  KAKENHI-PROJECT-15020250
[Journal Article] Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide2004
- Author(s)
  Y.Ohtsu, H.Fujita
- Journal Title
  
  Applied Physic Letter 85・21
  
  Pages: 4875-4877
- Data Source
  KAKENHI-PROJECT-15684011
[Journal Article] High ozone generation with a high-dielectric constant material2004
- Author(s)
  M.Toyofuku, Y.Ohtsu, H.Fujita
- Journal Title
  
  Japanese Journal Applied Physics 43・7
  
  Pages: 4368-4372
- NAID
  10013317821
- Data Source
  KAKENHI-PROJECT-16654096
[Journal Article] Influence of substrate biasing on (Ba,Sr)TiO_3 films prepared by electron cyclotron resonance plasma sputtering2004
- Author(s)
  T.Matsumoto, A.Niino, Y.Ohtsu, T.Misawa, A.Yonesu, H.Fujita, S.Miyake
- Journal Title
  
  Japanese Journal Applied Physics 43・3
  
  Pages: 1144-1148
- NAID
  10012715477
- Data Source
  KAKENHI-PROJECT-15684011
[Journal Article] 2003年度リフレッシュ理科教室報告「佐賀でのリフレッシュ理科教室」-身忻なもので楽しもう-2004
- Author(s)
  藤田寛治, 大津康徳, 三沢達也
- Journal Title
  
  応用物理 73・5
  
  Pages: 654-655
- Data Source
  KAKENHI-PROJECT-15020250
[Journal Article] Measurement of ion temperature in magnetized inductively coupled plasma with external helical antenna2004
- Author(s)
  I.Mihaila, Y.Ohtsu, H.Fujita
- Journal Title
  
  Physic Letters A 327
  
  Pages: 327-331
- Data Source
  KAKENHI-PROJECT-16654096
[Journal Article] Measurement of ion temperature in magnetized inductively coupled plasma with external helical antenna2004
- Author(s)
  I.Mihaila, Y.Ohtsu, H.Fujita
- Journal Title
  
  Physic Letters A 327
  
  Pages: 327-331
- Data Source
  KAKENHI-PROJECT-15020250
[Journal Article] Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide2004
- Author(s)
  Y.Ohtsu, H.Fujita
- Journal Title
  
  Applied Physic Letter 85・21
  
  Pages: 4875-4877
- Data Source
  KAKENHI-PROJECT-16654096
[Journal Article] Influence of substrate biasing on (Ba,Sr)TiO_3 films prepared by electron cyclotron resonance plasma sputtering2004
- Author(s)
  T.Matsumoto, A.Niino, Y.Ohtsu, T.Misawa, A.Yonesu, H.Fujita, S.Miyake
- Journal Title
  
  Japanese Journal Applied Physics 43・3
  
  Pages: 1144-1148
- NAID
  10012715477
- Data Source
  KAKENHI-PROJECT-16654096
[Journal Article] Influence of oxide material on high density plasma production using capacitively coupled discharge2004
- Author(s)
  Y.Ohtsu, T.Shimazoe, T.Misawa, H.Fujita
- Journal Title
  
  Abstract of 7^<th> Asia Pacific Conference on Plasma Science and Technology, 17^<th> Symposium on Plasma Science for Materials
  
  Pages: 432-432
- Data Source
  KAKENHI-PROJECT-15684011
[Journal Article] High ozone generation with a high-dielectric constant material2004
- Author(s)
  M.Toyofuku, Y.Ohtsu, H.Fujita
- Journal Title
  
  Japanese Journal Applied Physics 43・7
  
  Pages: 4368-4372
- NAID
  10013317821
- Data Source
  KAKENHI-PROJECT-15684011
[Journal Article] Influence of substrate biasing on (Ba,Sr)TiO_3 films prepared by electron cyclotron resonance plasma sputtering2004
- Author(s)
  T.Matsumoto, A.Niino, Y.Ohtsu, T.Misawa, A.Yonesu.H.Fujita, S.Miyake
- Journal Title
  
  Japanese Journal Applied Physics 43・3
  
  Pages: 1144-1148
- NAID
  10012715477
- Data Source
  KAKENHI-PROJECT-15020250
[Journal Article] Measurement of ion temperature in magnetized inductively coupled plasma with external helical antenna2004
- Author(s)
  I.Mihaila, Y.Ohtsu, H.Fujita
- Journal Title
  
  Physic Letters A 327
  
  Pages: 327-331
- Data Source
  KAKENHI-PROJECT-15684011
[Journal Article] High ozone generation with a high-dielectric constant material2004
- Author(s)
  M.Toyofuku, Y.Ohtsu, H.Fujita
- Journal Title
  
  Japanese Journal Applied Physics 43・7
  
  Pages: 4368-4372
- NAID
  10013317821
- Data Source
  KAKENHI-PROJECT-15020250
[Patent] プラズマ処理装置2016
- Inventor(s)
  大津康徳
- Industrial Property Rights Holder
  佐賀大学、神港精機㈱
- Industrial Property Rights Type
  特許
- Filing Date
  2016-06-22
- Acquisition Date
  2016-10-28
- Data Source
  KAKENHI-PROJECT-16K05634
[Patent] プラズマ処理装置2012
- Inventor(s)
  大津康徳、加々見丈二、川下安司、竹内達也
- Industrial Property Rights Holder
  国立大学法人佐賀大学、神港精機㈱
- Industrial Property Rights Type
  特許
- Filing Date
  2012-06-22
- Data Source
  KAKENHI-PROJECT-23540577
[Patent] プラズマ処理装置2012
- Inventor(s)
  大津康徳, 加々見丈二, 川下安司, 竹内達也
- Industrial Property Rights Holder
  国立大学法人佐賀大学, 神港精機(株)
- Industrial Property Rights Type
  特許
- Filing Date
  2012-06-22
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] 円筒対向ターゲットを用いたリング状磁化スパッタ装置の開発とAZO薄膜合成2023
- Author(s)
  大津康徳
- Organizer
  日本表面真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第173回定例研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] 高周波ハイブリッド放電による高密度水素プラズマ生成2023
- Author(s)
  大津康徳、田原竜夫
- Organizer
  2022年度第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] ターゲット有効利用のための小型マグネトロンプラズマのアレー状配置型高周波マグネトロンスパッタ源の開発2022
- Author(s)
  升永龍之介、大津康徳
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] Spatial structures of rf ring-shaped magnetized sputtering plasma with two facing cylindrical ZnO/ Al2O3 targets2022
- Author(s)
  Y. Ohtsu, K. Hara, S. Imoto, J. Schulze, T. Yasunaga, Y. Ikegami
- Organizer
  Proc. of 43rd International Symposium on Dry process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] Spatial distributions of hydrogen RF discharge plasma using a hollow cathode with double toroidal grooves combined with magnets2022
- Author(s)
  Yasunori Ohtsu, Hokuto Hiwatashi and Julian Schulze
- Organizer
  Proc. 11th International Conference on Reactive Plasmas (ICRP-11)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] 対向円筒型AZOターゲットを用いた高周波リング状ホロー磁化プラズマの空間分布とAZO薄膜合成2022
- Author(s)
  井本将真、大津康徳
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] 佐賀大学プラズマエレクトロニクス研究室のご紹介2022
- Author(s)
  大津康徳、井本将真、内田武志、升永龍之介
- Organizer
  SEMICON JAPAN2022
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] 高密度水素プラズマ生成のための永久磁石を用いた高周波磁化ホロー陰極放電装置の開発2022
- Author(s)
  内田武志、大津康徳
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K22467
[Presentation] Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al2O3-ZnO targets2021
- Author(s)
  Y.Ohtsu, G. Sakata, J. Schulze, T. Yasunaga and Y. Ikegami
- Organizer
  42th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 対向円筒型 AZO ターゲットを用いた高周波リング状ホロー磁化プラズマの空間分布2021
- Author(s)
  井本将真 , 原光佑, 大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第 25 回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] ターゲット有効利用のための磁石回転型マグネトロンスパッタ装置の開発2021
- Author(s)
  安田洸也、大津康徳
- Organizer
  第８２回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 円筒対向ターゲットスパッタのための高周波リング状ホロー磁化プラズマの生成2021
- Author(s)
  井本将真、大津康徳
- Organizer
  第８２回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 小型マグネトロンプラズマを組み合わせた回転型アレー状高周波マグネトロンスパッタプラズマの開発2021
- Author(s)
  安田洸也, 大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第 25 回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] アンバランスマグネトロンスパッタ装置の構築とポリカーボネート板への PTFE 撥水性薄膜合成2020
- Author(s)
  井野雄太、大津康徳、安永健、池上康之
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 対向円筒型ターゲットを用いた高周波プラズマスパによる透明導電膜の合成とその空間分布2020
- Author(s)
  坂田豪大，大津康徳
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部　第２４回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] アンバランスマグネトロンスパッタによるポリカーボネート板へのPTFE撥水性膜合成及び評価2020
- Author(s)
  井野雄太、大津康徳、安永健、池上康之、田原竜夫、藤尾侑輝
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部　第２４回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] Development of rotational maze-shaped RF magnetron plasma for successful target utilization and the thin film preparation2020
- Author(s)
  Yasunori Ohtsu, Rei Tanaka and Takahiro Nakashima
- Organizer
  ISPlasma2020/IC-PLANTS2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 高周波マグネトロンスパッタにおける回転型新規磁石配置によるターゲット浸食分布の改善2020
- Author(s)
  安田洸也、大津康徳
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部　第２４回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] ターゲット有効利用のための新規磁石配置による回転型高周波マグネトロンスパッタリング装置の開発2020
- Author(s)
  安田洸也、大津康徳
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] ターゲット利用率向上を目的とした回転迷路型 RF マグネトロンスパッタ装置の開発とその評価2019
- Author(s)
  田中黎、大津康徳、中嶋崇博
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 高周波マグネトロンスパッタリングによる金属板表面へのPVDF薄膜合成2019
- Author(s)
  安田洸也，井野雄太，大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] アンバランスマグネトロンスパッタによる次世代自動車窓材プラスチック板への撥水性薄膜合成2019
- Author(s)
  井野雄太，安田洸也，大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] Production of double ring-shaped magnetized radio-frequency hydrogen high-density plasma2019
- Author(s)
  Y. Ohtsu, K. Kawabata, K. Aso and J. Schulze
- Organizer
  2019 International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 次世代自動車窓材プラスチック板への撥水性薄膜合成のための高周波マグネトロンスパッタ装置の開発2019
- Author(s)
  井野雄太、大津康徳、安田洸也
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] アルゴン・酸素混合ガスを用いた高周波ホロー陰極放電プラズマの生成と分光特性2019
- Author(s)
  本田進之介、大津康徳、井野雄太、福永悠人
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 回転迷路型高周波マグネトロンスパッタ装置の開発とその評価2019
- Author(s)
  田中黎，中嶋崇博，大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] アルゴン・酸素混合ガスを用いた高周波ホロー陰極放電プラズマアッシングの酸素濃度依存性と分光特性2019
- Author(s)
  本田進之介，井野雄太，福永悠人，大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会
- Data Source
  KAKENHI-PROJECT-19K03784
[Presentation] 3.低気圧水素ガスにおけるホロー陰極効果と磁場閉じ込めを用いた高密度水素プラズマの計測2018
- Author(s)
  麻生和希、大津康徳
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部第22回支部大会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 1.高周波ホロー陰極放電プラズマによるポリイミドフィルムの高速アッシング2018
- Author(s)
  本田進之介、井野雄太、大津康徳
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部第22回支部大会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 6.Treatment of polycarbonate plate for next-generation vehicle window by radio frequency magnetron plasma sputtering with an arrangement of cylindrical magnets2018
- Author(s)
  Y. Ohtsu, Y. Takada, K. Sugawara, Y. Fujio and T. Tabaru
- Organizer
  Proc. of 40th anniversary International Symposium on Dry Process (DPS2018), 40, 151-152
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 9.ホロー陰極効果と磁場閉じ込め効果を用いた低気圧高密度水素プラズマ源の生成2018
- Author(s)
  麻生和希、大津康徳
- Organizer
  2018年第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 8.アルゴン酸素混合ガスを用いた高周波ホロー陰極放電プラズマによるポリイミドアッシングの特性2018
- Author(s)
  本田進之介、大津康徳
- Organizer
  2018年第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] Ar-O2混合ガスを用いた高周波プラズマの空間構造2017
- Author(s)
  高崎雅也、大津康徳、Julian Schulze
- Organizer
  2017年第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 酸素ガスを用いた高周波ホロー陰極放電プラズマによるポリイミドアッシングの高速化2017
- Author(s)
  本田進之介、高崎雅也、大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部　第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 低気圧高密度プラズマ生成のための高周波磁化ホロー放電電極の開発2017
- Author(s)
  麻生和希、大津康徳
- Organizer
  2017年第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 高周波磁化ホロー放電電極を用いた低気圧高密度水素負イオンの生成2017
- Author(s)
  川端圭志、麻生和希、大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部　第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] ホロー電極を用いたAr-O2混合高周波プラズマの空間構造2017
- Author(s)
  高崎雅也、本田進之介、大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部　第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] Outer Circular Ring-Shaped RF Magnetized Plasma for Specific Area Target Utilization by Magnetic Monopole Arrangement2017
- Author(s)
  Md. Amzad Hossain and Yasunori Ohtsu
- Organizer
  44th International Conference on Plasma Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] ホロー電極と磁石を用いた低気圧高密度水素プラズマの生成2017
- Author(s)
  麻生和希、川端圭志、大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部　第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 円筒型AZO対向ターゲットを用いた高周波スパッタプラズマの空間構造2016
- Author(s)
  福元喬也、住山貴史、大津康徳
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会
- Place of Presentation
  州大学伊都キャンパス
- Year and Date
  2016-12-17
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 角形磁石を用いた回転型十字磁化プラズマスパッタリング装置の開発と銅ターゲット均一利用2016
- Author(s)
  井手　翼、中村優太朗、大津康徳、田原竜夫、本村大成
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  佐賀大学
- Year and Date
  2016-10-19
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 対向円筒型ターゲットを用いたリング状磁化放電スパッタによる低抵抗AZO薄膜合成2016
- Author(s)
  住山貴史、福元喬也、大津康徳、田原竜夫、本村大成
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2016-12-17
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] RFマグネトロンスパッタリングにより合成したPVDF薄膜の評価2016
- Author(s)
  高田祐輔、菅原光星、大津康徳
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  佐賀大学
- Year and Date
  2016-10-19
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] 対向円筒型ターゲットを用いたRF磁化放電スパッタによるAZO透明導電薄膜合成2016
- Author(s)
  住山貴史、福本喬也、大津康徳、田原竜夫、本村大成
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  佐賀大学
- Year and Date
  2016-10-19
- Data Source
  KAKENHI-PROJECT-16K05634
[Presentation] Characteristics of capacitively coupled collisional plasma with RF ring-shaped hollow cathode2014
- Author(s)
  N.Matsumoto, Y.Ohtsu
- Organizer
  ICRP-8/SPP-31
- Place of Presentation
  福岡国際会議場
- Year and Date
  2014-02-06
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] リング状ホロー電極を用いた容量結合型衝突プラズマの特性2013
- Author(s)
  松本直樹, 大津康徳
- Organizer
  2013年(平成25年度)応用物理学会九州支部学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2013-12-01
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] Production of High-Density RF Plasma Using Ring-Shaped Hollow Cathode for Material Processing2013
- Author(s)
  Y.Ohtsu
- Organizer
  5th International Workshop on Plasma Scientech for All Something (PLASAS-5)
- Place of Presentation
  東京工業大学
- Invited
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] Production of high-density RF plasma using ring-shaped hollow cathode for material processing2013
- Author(s)
  Y.Ohtsu
- Organizer
  5th International Workshop on Plasma Scientech for All Something (PLASA-5)
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] アルゴン・水素混合ガスを用いた高周波リング状ホロ－放電プラズマ特性2012
- Author(s)
  大津康徳、川﨑裕次郎、武田賢治
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  東京大学本郷キャンパス
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] 単極磁場配位型RFマグネトロンスパッタによるターゲット利用率改善2012
- Author(s)
  大津康徳、執行正和、三沢達也
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  豊橋科学技術大学
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] Numerical simulation of rf capacitive coupled plasma with ring-shaped hollow cathode2012
- Author(s)
  Y.Ohtsu
- Organizer
  2nd AISC International Symposium
- Place of Presentation
  神戸
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] ホロー効果を用いたプラズマプロセス装置におけるプラズマ密度のガス圧力依存性2012
- Author(s)
  松本直樹, 大津康徳
- Organizer
  IEEE 主催 2012年度第2回学生研究発表会
- Place of Presentation
  佐賀大学
- Year and Date
  2012-11-27
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] Wood surface treatment by atmospheric RF capacitively coupled plasma jet2012
- Author(s)
  Y.Ohtsu and M.Z.Hassan
- Organizer
  Proc. The 7th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology
- Place of Presentation
  Taiwan
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] アルゴン・水素混合ガスを用いた高周波リング状ホロー放電プラズマ特性2012
- Author(s)
  大津康徳, 川崎裕次郎, 武田賢治
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] Wood Surface Treatment by Atmospheric RF Capacitively Coupled Plasma Jet", Proc.2012
- Author(s)
  Y.Ohtsu and M.Z.Hassan
- Organizer
  The 7th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology
- Place of Presentation
  Taiwan
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] High-density RF plasma by hollow cathode for plasma processing2011
- Author(s)
  Y.Ohtsu
- Organizer
  4st International Workshop on Plasma Scientech for All Something(Plasas-4)(招待講演)
- Place of Presentation
  北京
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] High-density RF plasma by hollow cathode for plasma processing2011
- Author(s)
  Y.Ohtsu
- Organizer
  4st International Workshop on Plasma Scientech for All Something (Plasas-4)
- Place of Presentation
  中国北京
- Year and Date
  2011-10-09
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] Inactivation of bacillus subtilis by atmospheric barrier discharge plasma2008
- Author(s)
  Y. Ohtsu, Y. Misazaki, T. Misawa and H. Fujita
- Organizer
  The 25th Symposium on Plasma Processing
- Place of Presentation
  Yamaguchi
- Year and Date
  2008-01-23
- Data Source
  KAKENHI-PROJECT-18030012
[Presentation] リング状ホロー電極を用いた容量結合型衝突プラズマの特性
- Author(s)
  松本直樹、大津康徳
- Organizer
  2013年（平成25年度）応用物理学会九州支部学術講演会
- Place of Presentation
  長崎大学
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] Characteristics of capacitively coupled collisional plasma with RF ring-shaped hollow electrode
- Author(s)
  N.Matsumoto and Y.Ohtsu
- Organizer
  8th International Conference on Reactive Plasmas / 31st Symposium on Plasma Processing（ICRP-8/SPP-31)
- Place of Presentation
  福岡国際会議場
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] ホロー効果を用いたプラズマプロセス装置におけるプラズマ密度のガス圧依存性
- Author(s)
  松本直樹、大津康徳
- Organizer
  IEEE主催2012年度第2回学生研究発表会
- Place of Presentation
  佐賀大学
- Data Source
  KAKENHI-PROJECT-23540577
[Presentation] ホロー陰極効果による高速製膜用高密度容量結合型プラズマ装置の開発
- Author(s)
  松本直樹、大津康徳
- Organizer
  第21回電子情報通信学会九州支部学生講演会
- Place of Presentation
  熊本大学
- Data Source
  KAKENHI-PROJECT-23540577

1. FUJITA Hiroharu (10038086)

# of Collaborated Projects: 5 results

# of Collaborated Products: 19 results
2. 三沢達也 (70346873)

# of Collaborated Projects: 3 results

# of Collaborated Products: 10 results
3. TOCHITANI Gen (00264143)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. 田原竜夫 (10357478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
5. IKUSHIMA Takayuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. Tabaru Tatsuo

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
7. Schulze J

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
8. Hossain Md. Amzad

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
9. Sumiyama Takashi

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
10. Ide Tsubasa

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
11. Nakamura Yutaro

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results

OHTSU Yasunori 大津 康徳

Yasunori Ohtsu 大津 康徳

Research Projects

Research Products

Co-Researchers

らせんステップ型低速電子高放出によるヘリウムのイオン・イオンプラズマ生成Principal Investigator

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Production of high-density hydrogen plasma by novel hollow magnetized discharge for performing high-power negative ion sourcePrincipal Investigator

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Development of Neo-ring-shaped hollow magnetized discharge by Smoluckowski effect and production of negative ionsPrincipal Investigator

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Novel development of ring-shaped hollow magnetized discharge under neo-magnetic field configuration for low-pressure high-density uniform plasma sourcePrincipal Investigator

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Establishment of hybrid ring-shaped hollow discharge and application to large-diameter high-density plasma sourcePrincipal Investigator

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高2次電子放出・強誘電体酸化物電極による高圧気体マイクロプラズマ低エネルギー生成

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電子レンジ・携帯電話にみる電磁波体験型科学創造性育成法の開発

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新医療福祉機器を目指した大気圧室温プラズマ生成Principal Investigator

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生徒体験型オーロラ実験に関する教材開発

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酸化物電極容量結合型放電による高効率高密度プラズマ生成とその展開Principal Investigator

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Analysis of Two Dimensional Velocity Space Structure of Ions in Simulated Divertor Plasma With High Angular

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電子ビーム注入による浮遊微粒子の空間分布制御Principal Investigator

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Development of generation method of microwave plasmas with an annular slot antenna for large diameter wafer etching

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OHTSU Yasunori 大津康徳

Yasunori Ohtsu 大津康徳