• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

HIRAI YOSHIHIKO  平井 義彦

ORCIDConnect your ORCID iD *help
… Alternative Names

平井 義彦  ヒライ ヨシヒコ

HIRAI Yoshihiko  平井 義彦

Less
Researcher Number 50285300
External Links
Affiliation (Current) 2025: 大阪公立大学, 大学院工学研究科 , 客員教授
Affiliation (based on the past Project Information) *help 2022 – 2023: 大阪公立大学, 大学院工学研究科, 客員研究員
2019 – 2021: 大阪府立大学, 工学(系)研究科(研究院), 教授
2017: 大阪府立大学, 工学研究科, 教授
2013: 大阪府立大学, 工学研究科, 教授
2011 – 2013: 大阪府立大学, 工学(系)研究科(研究院), 教授 … More
2008: 大阪府立大学, 大学院・工学研究科, 教授
2005 – 2008: 大阪府立大学, 工学研究科, 教授
2004: Osaka prefecture university, graduate school of engineering, professor, 大学院・工学研究科, 教授
2003: 大阪府立大学, 大学院・工学研究科, 助教授
2002 – 2003: 大阪府立大学, 工学研究科, 助教授
1998: 大阪府立大学, 工学部, 助教授 Less
Review Section/Research Field
Principal Investigator
Dynamics/Control
Except Principal Investigator
Electron device/Electronic equipment / Basic Section 28050:Nano/micro-systems-related / Basic Section 28010:Nanometer-scale chemistry-related / Microdevices/Nanodevices / Electronic materials/Electric materials / Nuclear engineering
Keywords
Principal Investigator
atomic force microscopy / living material / cell / visco-eleastic / 表面粘性 / 表面剛性 / フォースモジュレーション法 / カンチレバー / AFM / 生体 … More / 細胞 / 粘弾性 / リソグラフィ / 量子ドット / インプリンティング … More
Except Principal Investigator
分子動力学法 / 分子動力学 / カーボンナノチューブ / 照射効果 / モンテカルロ法 / carbon nanotube / 電子顕微鏡 / MEMS / 三次元 / 最適化 / デザインルール / シードパターン / 3次元リソグラフィ / 3次元構造 / フォトマスク / 位相振幅 / 3次元リソグラフィ / 一括露光 / 3次元結像 / ビルトインレンズマスク / 三次元結像 / 複素透過率 / マスク / 複素振幅 / 波面 / 3次元加工 / フォトリソグラフィ / 荷電粒子ビーム / 計算物理 / ナノプロセス / 荷電粒子 / 分子シミュレーション / 電子線照射 / イオン照射 / 加工プロセス / 表面物理 / 二次元材料 / 半導体リソグラフィ / マルチスケール解析 / 確率論的シミュレーション / レジスト分子 / スケール境界領域 / マルチスケールシミュレーション / ナノインプリント / 極端紫外線リソグラフィ / 電子線リソグラフィ / パターン形成 / electron irradiation damage / electron irradiation effect / Monte Carlo method / molecular dynamics / nanocarbon / electron beam fabrication / 照射損傷 / 電子ビーム / 電子線照射損傷 / 電子線照射効果 / ナノカーボン / 電子ビーム加工 / sliding / Transmission electron microscope / manipulator / motor / Carbon nanotube / モータ / 滑り / 透過電子顕微鏡 / マニピュレータ / NEMS / モーター / junction formation / plastic deformation / sublimation / molecular dynamics calculation / current induced process / electron microscope / manipulation / 分光 / ピンセット / 蒸発 / 過剰通電 / 接合 / 塑性変形 / 昇華 / 分子動力学計算 / 通電加工 / マニピュレーション / 効率 / ナノモールディング / 放射線 / 結晶化 / ナノ構造 / 測定 / X線 / 有機半導体 / 原子力計測・放射線物理 / 離型 / リソグラフィレス / 移植法 / 微小質量計測 / 薄膜カンチレバー / 微細プロセス技術 Less
  • Research Projects

    (10 results)
  • Research Products

    (75 results)
  • Co-Researchers

    (17 People)
  •  3-dimensional photolithography

    • Principal Investigator
      Sasago Masaru
    • Project Period (FY)
      2020 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 28050:Nano/micro-systems-related
    • Research Institution
      Osaka Metropolitan University
      Osaka Prefecture University
  •  Development of charged particles process simulator for two-dimensional materials in a chemical reaction field

    • Principal Investigator
      TADA KAZUHIRO
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 28010:Nanometer-scale chemistry-related
    • Research Institution
      National Institute of Technology, Toyama College
  •  Computational study of pattern formation process in scale-boundary region

    • Principal Investigator
      YASUDA MASAAKI
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Osaka Prefecture University
  •  Development of a new radiation detector with organic semiconductor by fabricating nano structure and mono-crystallization

    • Principal Investigator
      TAKADA Eiji
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Nuclear engineering
    • Research Institution
      National Institute of Technology, Toyama College
  •  Development of fabrication process for disposable micromachine

    • Principal Investigator
      KAWATA Hiroaki
    • Project Period (FY)
      2007 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Osaka Prefecture University
  •  Dynamics of nanomaterials in electron beam processing

    • Principal Investigator
      YASUDA Masaaki
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Osaka Prefecture University
  •  Study on kT motor consisting of carbon nanotubes

    • Principal Investigator
      NAKAYAMA Yoshikazu
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Osaka University
      Osaka Prefecture University
  •  Fundamental of nanoengineering of carbon nanotubes and building of electronic devices

    • Principal Investigator
      NAKAYAMA Yoshikazu
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Osaka Prefecture University
  •  Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopyPrincipal Investigator

    • Principal Investigator
      HIRAI Yoshihiko
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Dynamics/Control
    • Research Institution
      Osaka Prefecture University
  •  ナノ・インプリンティングによる量子ドット形成に関する研究Principal Investigator

    • Principal Investigator
      平井 義彦
    • Project Period (FY)
      1998
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Osaka Prefecture University

All 2024 2023 2021 2018 2017 2016 2015 2013 2012 2009 2008 2007 2006 2005 2004 2003 Other

All Journal Article Presentation

  • [Journal Article] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023

    • Author(s)
      Hirai Yoshihiko、Osumi Tomoaki、Tanaka Toshiaki、Yasuda Masaaki、Sasago Masaru
    • Journal Title

      Proceedings of SPIE Advanced Lithography + Patterning

      Volume: 12497 Pages: 1-7

    • DOI

      10.1117/12.2658128

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Journal Article] Automatic design of the build-in lens mask for three-dimensional photo lithography2021

    • Author(s)
      Osumi Tomoaki、Sasago Masaru、Yasuda Masaaki、Hirai Yoshihiko
    • Journal Title

      Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology

      Volume: 11908 Pages: 1-5

    • DOI

      10.1117/12.2598156

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Journal Article] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021

    • Author(s)
      Osumi Tomoaki、Misaka Akio、Sato Kousuke、Yasuda Masaaki、Sasago Masaru、Hirai Yoshihiko
    • Journal Title

      J. Photopol. Sci. Technol.

      Volume: 34 Issue: 2 Pages: 123-126

    • DOI

      10.2494/photopolymer.34.123

    • NAID

      130008119664

    • ISSN
      0914-9244, 1349-6336
    • Year and Date
      2021-06-11
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Journal Article] Stochastic Simulation of the UV Curing Process in Nanoimprint Lithography: Pattern Size and Shape Effects in Sub-50 nm Lithography2017

    • Author(s)
      M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 35 Issue: 6

    • DOI

      10.1116/1.4997295

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Journal Article] Computational Study on UV Curing Characteristics in Nanoimprint Lithography: Stochastic Simulation2017

    • Author(s)
      M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 6S1 Pages: 06GL03-06GL03

    • DOI

      10.7567/jjap.56.06gl03

    • NAID

      210000147920

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Journal Article] Multiscale Simulation of the Development Process in Electron Beam Lithography2017

    • Author(s)
      M. Yasuda, S. Hitomi, H. Kawata and Y. Hirai
    • Journal Title

      J. Photopol. Sci. Technol.

      Volume: 30 Issue: 2 Pages: 205-209

    • DOI

      10.2494/photopolymer.30.205

    • NAID

      130005950259

    • ISSN
      0914-9244, 1349-6336
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Journal Article] Multiscale simulation of resist pattern shrinkage during scanning electron microscope observations2015

    • Author(s)
      M. Yasuda, Y. Furukawa, H. Kawata and Y. Hirai
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 33 Issue: 6

    • DOI

      10.1116/1.4935956

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13978, KAKENHI-PROJECT-25249052
  • [Journal Article] Ordered P3HT/PCBM Heterostructured Organic Photodiode for Radiation Detection using Direct Nanoimprint Lithography2013

    • Author(s)
      K. Tada, E. Takada, K. Fujii, K. Uemura, K. Tomohiro and Y. Hirai
    • Journal Title

      J. Photopol. Sci. Technol.

      Volume: 26 Issue: 1 Pages: 79-82

    • DOI

      10.2494/photopolymer.26.79

    • NAID

      130004464995

    • ISSN
      0914-9244, 1349-6336
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23561017
  • [Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics (掲載確定) 48(印刷中)

    • NAID

      210000066988

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics vol.48(掲載決定)

    • NAID

      210000066988

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 5248-5251

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
    • Journal Title

      Japanese Journal of Applied Physics vol.47

      Pages: 5248-5251

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Journal Article] Molecular dynamics study of electron-irradiation effects in single-walled carbon nanotubes2007

    • Author(s)
      M. Yasuda, Y. Kimoto, K. Tada, H. Mori, S. Akita, Y. Nakayama, and Y. Hirai
    • Journal Title

      Phys. Rev. B 75

    • Data Source
      KAKENHI-PROJECT-17310084
  • [Journal Article] 分子動力学法による単層カーボンナノチューブの電子線照射損傷の解析2006

    • Author(s)
      安田雅昭, 多田和広, 木元慶久, 秋田成司, 中山喜萬, 平井義彦
    • Journal Title

      第53回応用物理学会関係連合講演会予稿集(東京) 2

      Pages: 755-755

    • Data Source
      KAKENHI-PROJECT-17310084
  • [Journal Article] Molecular Dynamics Study on Double-walled Carbon Nanotube (DWNT) for Nano Mechanical Manipulation2005

    • Author(s)
      Y.Kimoto, H.Mori, T.Mikami, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
    • Journal Title

      Jpn.J.Appl.Phys. 44

      Pages: 1641-1647

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Molecular Dynamics Study on Double-walled Carbon Nanotube (DWNT) for Nano Mechanical Manipulation2005

    • Author(s)
      Y.Kimoto, H.Mori, T.Mikami, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
    • Journal Title

      Jpn.J.Appl.Phys. 44[4A]

      Pages: 1641-1647

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Chiral Dependence of Large Deformation in Carbon Nanotubes2005

    • Author(s)
      H.Mori, Y.Hirai, S.Akita, Y.Nakayama
    • Journal Title

      The 6th International Conference on the Science and Application of Nanotubes (Goteborg, July 2005) (発表予定)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Molecular Dynamics Study on Carbon Nano-Bearing2004

    • Author(s)
      Y.Kimoto, K.Okada, H.Mori, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
    • Journal Title

      Proc.of 2004 Int.Microprocesses and Nanotechnology Conf.

      Pages: 186-187

    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Molecular Dynamics Study on Carbon Nano-Bearing2004

    • Author(s)
      Y.Kimoto, K.Okada, H.Mori, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
    • Journal Title

      Proc.of 2004 International Microprocesses and Nanotechnology Conference (Osaka)

      Pages: 186-187

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Tensile Testing Simulation of Single-Walled Nanotubes2004

    • Author(s)
      H.Mori, S.Ogawa, Y.Hirai, S.Akita, Y.Nakayama
    • Journal Title

      Proc.of 2004 International Microprocesses and Nanotechnology Conference (Osaka)

      Pages: 188-189

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] 二層障壁カーボンナノチューブによるナノベアリングの分子動力学解析2004

    • Author(s)
      木元慶久, 森英喜, 岡田佳, 秋田成司, 中山喜萬, 平井義彦
    • Journal Title

      第51回応用物理学関係連合講演会講演予稿集 2

      Pages: 1042-1042

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] 二層障壁カーボンナノチューブによるナノベアリングの分子動力学解析2004

    • Author(s)
      木元慶久, 森英喜, 岡田佳, 秋田成司, 中山喜萬, 平井義彦
    • Journal Title

      第51回応用物理学関係連合講演会予稿集 2

      Pages: 1042-1042

    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] 多層カーボンナノチューブによる回転-直線運動変換機構の分子動力学解析2004

    • Author(s)
      岡田佳, 木元慶久, 多田和広, 安田雅昭, 森英喜, 秋田成司, 中山喜萬, 平井義彦
    • Journal Title

      第65回応用物理学会学術講演会予稿集 2

      Pages: 849-849

    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] カーボンナノチューブの引っ張り解析2004

    • Author(s)
      森英喜, 緒方成信, 平井義彦, 秋田成司, 中山喜萬
    • Journal Title

      第65回応用物理学会学術講演会講演予稿集 2

      Pages: 848-848

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] 多層カーボンナノチューブによる回転-直線運動変換機構の分子動力学解析2004

    • Author(s)
      岡田佳, 木元慶久, 多田和広, 安田雅昭, 森英喜, 秋田成司, 中山喜萬, 平井義彦
    • Journal Title

      第65回応用物理学会学術講演会講演予稿集 2

      Pages: 849-849

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] カーボンナノチューブの引っ張り解析2004

    • Author(s)
      森英喜, 緒方成信, 平井義彦, 秋田成司, 中山喜萬
    • Journal Title

      第65回応用物理学会学術講演会予稿集 2

      Pages: 848-848

    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Tensile Testing Simulation of Single-Walled Nanotubes2004

    • Author(s)
      K.Mori, S.Ogawa, Y.Hirai, S.Akita, Y.Nakayama
    • Journal Title

      Proc.of 2004 Int.Microprocesses and Nanotechnology Conf.

      Pages: 188-189

    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Molecular Dynamics Studies on Mechanical Properties of Carbon Nano Tubes with Pinhole Defects2003

    • Author(s)
      Y.Hirai, S.Nishimaki, H.Mori, Y.Kimoto, S.Akita, Y.Nakayama, Y.Tanaka
    • Journal Title

      Jpn.J.Appl.Phys. 42[6B]

      Pages: 4120-4123

    • NAID

      10011257950

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] 欠陥のあるカーボンナノチューブの分子動力学法による強度計算2003

    • Author(s)
      平井義彦, 森英喜, 西牧悟, 木元慶久, 中山喜萬, 秋田成司, 田中芳雄
    • Journal Title

      第50回応用物理学関係連合関連会講演予稿集 3

      Pages: 1579-1579

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] 分子動力学法によるカーボンナノチューブのアニールによる構造変化の解析2003

    • Author(s)
      森英喜, 木元慶久, 秋田成司, 中山喜萬, 平井義彦
    • Journal Title

      第64回応用物理学会学術講演会講演予稿集 2

      Pages: 861-861

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] 分子動力学法による二重障壁カーボンナノチューブの引き抜き特性の解析2003

    • Author(s)
      木元慶久, 森英喜, 岡田佳, 成瀬直行, 秋田成司, 中山喜萬, 平井義彦
    • Journal Title

      第64回応用物理学会学術講演会講演予稿集 2

      Pages: 861-861

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Molecular Dynamics Studies on Mechanical Properties of Carbon Nano Tubes with Pinhole Defects2003

    • Author(s)
      Y.Hirai, S.Nishimaki, H.Mori, Y.Kimoto, S.Akita, Y.Nakayama, Y.Tanaka
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages: 4120-4123

    • NAID

      10011257950

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Journal Article] Chiral Dependence of Large Deformation in Carbon Nanotubes

    • Author(s)
      H.Mori, Y.Hirai, S.Akita, Y.Nakayama
    • Journal Title

      The 6th International Conference on the Science and Application of Nanotubes (Goteborg, July 2005) (to be presented)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205048
  • [Presentation] ビルトインレンズマスクを用いた三次元フォトリソグラフィによる パターン形成2024

    • Author(s)
      田中 敏章, 安田 雅昭,笹子 勝, 平井 義彦
    • Organizer
      第71回応用物理学会春季学術講演会(3月,2024,東京)
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] Novel 3-dimensional photo lithography using modulated complex index mask2024

    • Author(s)
      Yoshihiko Hirai
    • Organizer
      International workshop on micro-systems and matrials (March, 2024, XI'an)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023

    • Author(s)
      Hirai Yoshihiko、Osumi Tomoaki、Tanaka Toshiaki、Yasuda Masaaki、Sasago Masaru
    • Organizer
      SPIE Advanced Lithography + Patterning
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] Optimization of the Built-in Lens Mask for Three-Dimensional Photo Lithography2021

    • Author(s)
      T. Osumi, M. Sasago, M. Yasuda, Y. Hirai
    • Organizer
      The 64th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2021),
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021

    • Author(s)
      T. Osumi, A. Misaka, K. Sato, M. Yasuda, M. Sasago, Y. Hirai,
    • Organizer
      The 38th International Conference of Photopolymer Science and Technology (ICPST-38)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ2021

    • Author(s)
      大住 知暉, 安田 雅昭,笹子 勝, 平井 義彦
    • Organizer
      応用物理学会
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ(マスクパターンの最適化検討)2021

    • Author(s)
      大住知暉、安田雅昭、笹子勝、平井義彦、
    • Organizer
      68回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] Automatic Design of the Built-in Lens Mask for ThreeDimensional Photo Lithography2021

    • Author(s)
      T. Osumi, M. Sasago, M. Yasuda, Y. Hirai
    • Organizer
      Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K05289
  • [Presentation] 電子線リソグラフィにおけるパターン形成の確率論的シミュレーション2018

    • Author(s)
      香山真範、白井正充、川田博昭、平井義彦、安田雅昭
    • Organizer
      第65回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Multiscale Simulation of Development Process in Electron Beam Lithography2017

    • Author(s)
      M. Yasuda, S. Hitomi, H. Kawata and Y. Hirai
    • Organizer
      34th International Conference of Photopolymer Science and Technology
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm2017

    • Author(s)
      M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
    • Organizer
      61st Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Computational study of pattern formation in electron beam lithography for negative type resists2017

    • Author(s)
      M. Yasuda, M. Koyama, M. Shirai, H. Kawata and Y. Hirai
    • Organizer
      43rd Int. Conf. on Micro- and Nano-Engineering 2017
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Impact of Mold Cavity Size on Resist Pattern Shape in Nanoimprint Lithography: Molecular Dynamics Study2017

    • Author(s)
      R. Sakata, H. Kawata, Y. Hirai and M. Yasuda
    • Organizer
      16th International Conference on Nanoimprint and Nanoprint Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] ナノインプリントにおけるレジスト分子挙動の理論解析2017

    • Author(s)
      安田雅昭,平井義彦
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-15
    • Invited
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] UVナノインプリントにおけるレジスト硬化の確率論的シミュレーション2017

    • Author(s)
      安田雅昭、香山真範、白井正充、川田博昭、平井義彦
    • Organizer
      次世代リソグラフィワークショップ 2017
    • Invited
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] EUVリソグラフィの分子シミュレーション2016

    • Author(s)
      岩井瑛規,川田博昭,平井義彦, 安田雅昭
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2016-03-20
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Multiscale Simulation of Pattern Formation in Electron Beam Lithography2016

    • Author(s)
      S. Hitomi, H. Kawata, Y. Hirai and M. Yasuda
    • Organizer
      23rd Symposium on Photomask and NGL Mask Technology
    • Place of Presentation
      Pachifico Yokohama, Yokohama, Japan
    • Year and Date
      2016-04-07
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Molecular Dynamics Study of Pattern Formation in Extreme Ultraviolet Lithography2016

    • Author(s)
      M. Yasuda, A. Iwai, H. Kawata and Y. Hirai
    • Organizer
      42nd Int. Conf. on Micro- and Nano-Engineering
    • Place of Presentation
      Reed Messe Wien, Wien, Austria
    • Year and Date
      2016-09-20
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Early Stages of Development Process in Electron-Exposed Resists: A Molecular Dynamics Study2016

    • Author(s)
      S. Hitomi, H. Kawata, Y. Hirai and M. Yasuda
    • Organizer
      2016 Int. Microprocesses and Nanotechnology Conf.
    • Place of Presentation
      ANA Crowne Plaza Kyoto, Kyoto, Japan
    • Year and Date
      2016-11-10
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] SEM観察における有機高分子レジスト収縮の理論解析2016

    • Author(s)
      香山真範, 古川雄基,川田博昭,平井義彦, 安田雅昭
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] 電子線リソグラフィにおけるパターン形成のマルチスケール解析2016

    • Author(s)
      人見洋,川田博昭,平井義彦, 安田雅昭
    • Organizer
      マルチスケール材料力学シンポジウム
    • Place of Presentation
      富山大学(富山県富山市)
    • Year and Date
      2016-05-27
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Molecular Dynamics Study of Pattern Edge Structures in Extreme Ultraviolet Lithography2016

    • Author(s)
      A. Iwai, H. Kawata, Y. Hirai and M. Yasuda
    • Organizer
      2016 Int. Symp. on Extreme Ultraviolet Lithography
    • Place of Presentation
      International Conference Center Hiroshima, Hiroshima, Japan
    • Year and Date
      2016-10-24
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Molecular Dynamics Study of Line Edge Roughness in Nanoimprint Lithography2015

    • Author(s)
      N. Iwata, M. Yasuda, H. Kawata and Y. Hirai
    • Organizer
      13th International Conference on Nanoimprint and Nanoprint Technology
    • Place of Presentation
      Silverado Resort and Spa, Napa, USA
    • Year and Date
      2015-10-23
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Molecular Dynamics Study on Line Width Roughness and Critical Dimensional Error in Nanoimprint Lithography2015

    • Author(s)
      N. Iwata, M. Yasuda, H. Kawata and Y. Hirai
    • Organizer
      2015 Int. Microprocesses and Nanotechnology Conf.
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2015-11-12
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Computational study on template release process for peeling (rotating) release method2015

    • Author(s)
      T. Tochino, T. Iida, M. Yasuda, H. Kawata and Y. Hirai
    • Organizer
      41st Int. Conf. on Micro- and Nano-Engineering 2015
    • Place of Presentation
      World Forum, Hague, Netherlands
    • Year and Date
      2015-09-22
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Computational Study of Pattern Formation in Extreme Ultra Violet Lithography2015

    • Author(s)
      M. Yasuda, A. Iwai, S. Hitomi, H. Kawata and Y. Hirai
    • Organizer
      2015 Int. Microprocesses and Nanotechnology Conf.
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2015-11-13
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13978
  • [Presentation] Heterostructured Organic Photodiode for radiation detection with Nanoimprinted Structure2013

    • Author(s)
      K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
    • Organizer
      1th Int. Conf. on Nanoimprint and Nanoprint Technology
    • Place of Presentation
      Hotel Fira Palace (Barcelona)
    • Data Source
      KAKENHI-PROJECT-23561017
  • [Presentation] Sensitivity improvement of heterostructured organic photodiode for radiation detection using nanoimprint lithography2013

    • Author(s)
      K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
    • Organizer
      2013 Int. Microprocesses and Nanotechnology Conf.
    • Place of Presentation
      ロイトン札幌(札幌)
    • Data Source
      KAKENHI-PROJECT-23561017
  • [Presentation] Nanoimprinted organic photodiode for radiation detection2013

    • Author(s)
      K. Tada, E. Takada, K. Tomohiro, K. Fujii, Y. Masuyama and Y. Hirai
    • Organizer
      Int. Conf. on Materials for Advanced Technologies 2013
    • Place of Presentation
      Suntec Singapore International Convention & Exhibition Centre (Singapore)
    • Data Source
      KAKENHI-PROJECT-23561017
  • [Presentation] Heterostructured Organic Photodiode for radiation detection with Nanoimprinted Structure2013

    • Author(s)
      K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
    • Organizer
      Digest of Papers of 11th Int. Conf. on Nanoimprint and Nanoprint Technology
    • Place of Presentation
      Barcelona, Spain
    • Data Source
      KAKENHI-PROJECT-23561017
  • [Presentation] Sensitivity improvement of heterostructured organic photodiode for radiation detection using nanoimprint lithography2013

    • Author(s)
      K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
    • Organizer
      Digest of Papers of 2013 Int. Microprocesses and Nanotechnology
    • Place of Presentation
      Hokkaido, Japan
    • Data Source
      KAKENHI-PROJECT-23561017
  • [Presentation] Novel Organic Radiation Detector with Nanoimprinted Structure2012

    • Author(s)
      K. Tada, E. Takada, K. Tomohiro, K. Fujii, Y. Masuyama and Y. Hirai
    • Organizer
      Digest of Papers of 2012 Int. Microprocesses and Nanotechnology Conf
    • Place of Presentation
      Kobe, Japan
    • Data Source
      KAKENHI-PROJECT-23561017
  • [Presentation] Cantilever fabrication by use of two step transfer printing process2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Kubo, M. Yasuda, Y. Hirai
    • Organizer
      34th International Conference on Micro and Nano Engineering (NME2008)
    • Place of Presentation
      アテネ, ギリシャ
    • Year and Date
      2008-09-17
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 移植法によるリソグラフィレスマイクロマシン作製プロセスの開発2008

    • Author(s)
      流郷謙一, 川田博昭, 安田雅昭, 平井義彦
    • Organizer
      センサー・マイクロマシン準部門総合研究会
    • Place of Presentation
      仙台
    • Year and Date
      2008-06-13
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Fabrication of cantilevers by two step transfer process without Lithography2008

    • Author(s)
      K. Ryugou, S. Kubo, H. Kawata, M. Yasuda and Y. Hirai
    • Organizer
      2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka(Japan)
    • Year and Date
      2008-10-28
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Fabrication of cantilevers by two step transfer process without lithography2008

    • Author(s)
      K. Ryugou, S. Kubo, H. Kawata, M. Yasuda, Y. Hirai
    • Organizer
      2008 Int. Microprocesses and Nanotechnology Conf, (MNC2008)
    • Place of Presentation
      福岡
    • Year and Date
      2008-10-28
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Cantilever fabrication by use of two step transfer printing process2008

    • Author(s)
      H. Kawata, K. Ryugou, S. Kubo, M. Yasuda and Y. Hirai
    • Organizer
      34th International Conference on Micro and Nano Engineering (MNE2008)
    • Place of Presentation
      Athens (Greece)
    • Year and Date
      2008-09-17
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 2段階移植法によるリソグラフィレスでのカンチレバー作製2008

    • Author(s)
      川田博昭, 流郷謙一, 安田雅昭, 平井義彦
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      春日井
    • Year and Date
      2008-09-02
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 移植法によるリソグラフイレスマイクロマシン作製プロセスの開発2008

    • Author(s)
      流郷謙一, 川田博昭, 安田雅昭, 平井義彦
    • Organizer
      センサー・マイクロマシン準部門総合研究会
    • Place of Presentation
      仙台
    • Year and Date
      2008-06-13
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] リソグラフィを用いない新規なカンチレバー作製プロセス2007

    • Author(s)
      川田博昭, 新甫純也, 安田雅昭, 平井義彦
    • Organizer
      センサー・マイクロマシン準部門総合研究会
    • Place of Presentation
      筑波
    • Year and Date
      2007-07-02
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] 離型力を要しない移植法によるカンチレバー作製2007

    • Author(s)
      川田博昭、安田雅昭、平井義彦
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-05
    • Data Source
      KAKENHI-PROJECT-19560349
  • [Presentation] Cantilever Fabrication by Force Free Release Transfer Prooess2007

    • Author(s)
      H. Kawata, K. Ryugou, S. Ohta, M. Yasuda and Y. Hirai
    • Organizer
      2007 Int. Microprocesses and Nanotechnology Conf.(NMC2007)
    • Place of Presentation
      京都
    • Year and Date
      2007-11-08
    • Data Source
      KAKENHI-PROJECT-19560349
  • 1.  KAWATA Hiroaki (90186099)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 14 results
  • 2.  TADA Kazuhiro (90579731)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 6 results
  • 3.  TANAKA Yoshio (60081246)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  NAKAYAMA Yoshikazu (20128771)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 5.  AKITA Seiji (60202529)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 21 results
  • 6.  YASUDA Masaaki (30264807)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 21 results
  • 7.  TAKADA Eiji (00270885)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results
  • 8.  ASAI Keisuke (60231859)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  PAN Lujun (50326279)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  KIKUTA Hisao (10214743)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  HAGA Hisashi (00292045)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  KAWABATA Kazuhshige (20261274)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  Sasago Masaru (40727145)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 9 results
  • 14.  村田 顕二 (30029079)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  小寺 正敏 (40170279)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  村田 一夫
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  中山 喜万
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 21 results

URL: 

Are you sure that you want to link your ORCID iD to your KAKEN Researcher profile?
* This action can be performed only by the researcher himself/herself who is listed on the KAKEN Researcher’s page. Are you sure that this KAKEN Researcher’s page is your page?

この研究者とORCID iDの連携を行いますか?
※ この処理は、研究者本人だけが実行できます。

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi