HIRAI YOSHIHIKO 平井義彦

… Alternative Names

平井義彦ヒライヨシヒコ

HIRAI Yoshihiko 平井義彦

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Researcher Number	50285300
External Links
Affiliation (Current)	2025: 大阪公立大学, 大学院工学研究科 , 客員教授
Affiliation (based on the past Project Information) *help	2022 – 2023: 大阪公立大学, 大学院工学研究科, 客員研究員 2019 – 2021: 大阪府立大学, 工学(系)研究科(研究院), 教授 2017: 大阪府立大学, 工学研究科, 教授 2013: 大阪府立大学, 工学研究科, 教授 2011 – 2013: 大阪府立大学, 工学(系)研究科(研究院), 教授 … More 2008: 大阪府立大学, 大学院・工学研究科, 教授 2005 – 2008: 大阪府立大学, 工学研究科, 教授 2004: Osaka prefecture university, graduate school of engineering, professor, 大学院・工学研究科, 教授 2003: 大阪府立大学, 大学院・工学研究科, 助教授 2002 – 2003: 大阪府立大学, 工学研究科, 助教授 1998: 大阪府立大学, 工学部, 助教授 Less
Review Section/Research Field	Principal Investigator Dynamics/Control Except Principal Investigator Electron device/Electronic equipment / Basic Section 28050:Nano/micro-systems-related / Basic Section 28010:Nanometer-scale chemistry-related / Microdevices/Nanodevices / Electronic materials/Electric materials / Nuclear engineering
Keywords	Principal Investigator atomic force microscopy / living material / cell / visco-eleastic / 表面粘性 / 表面剛性 / フォースモジュレーション法 / カンチレバー / AFM / 生体 … More / 細胞 / 粘弾性 / リソグラフィ / 量子ドット / インプリンティング … More Except Principal Investigator 分子動力学法 / 分子動力学 / カーボンナノチューブ / 照射効果 / モンテカルロ法 / carbon nanotube / 電子顕微鏡 / MEMS / 三次元 / 最適化 / デザインルール / シードパターン / 3次元リソグラフィ / ３次元構造 / フォトマスク / 位相振幅 / ３次元リソグラフィ / 一括露光 / ３次元結像 / ビルトインレンズマスク / 三次元結像 / 複素透過率 / マスク / 複素振幅 / 波面 / 3次元加工 / フォトリソグラフィ / 荷電粒子ビーム / 計算物理 / ナノプロセス / 荷電粒子 / 分子シミュレーション / 電子線照射 / イオン照射 / 加工プロセス / 表面物理 / 二次元材料 / 半導体リソグラフィ / マルチスケール解析 / 確率論的シミュレーション / レジスト分子 / スケール境界領域 / マルチスケールシミュレーション / ナノインプリント / 極端紫外線リソグラフィ / 電子線リソグラフィ / パターン形成 / electron irradiation damage / electron irradiation effect / Monte Carlo method / molecular dynamics / nanocarbon / electron beam fabrication / 照射損傷 / 電子ビーム / 電子線照射損傷 / 電子線照射効果 / ナノカーボン / 電子ビーム加工 / sliding / Transmission electron microscope / manipulator / motor / Carbon nanotube / モータ / 滑り / 透過電子顕微鏡 / マニピュレータ / NEMS / モーター / junction formation / plastic deformation / sublimation / molecular dynamics calculation / current induced process / electron microscope / manipulation / 分光 / ピンセット / 蒸発 / 過剰通電 / 接合 / 塑性変形 / 昇華 / 分子動力学計算 / 通電加工 / マニピュレーション / 効率 / ナノモールディング / 放射線 / 結晶化 / ナノ構造 / 測定 / X線 / 有機半導体 / 原子力計測・放射線物理 / 離型 / リソグラフィレス / 移植法 / 微小質量計測 / 薄膜カンチレバー / 微細プロセス技術 Less

3-dimensional photolithography
- Principal Investigator
  
  Sasago Masaru
- Project Period (FY)
  2020 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Osaka Metropolitan University
  Osaka Prefecture University
Development of charged particles process simulator for two-dimensional materials in a chemical reaction field
- Principal Investigator
  
  TADA KAZUHIRO
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28010:Nanometer-scale chemistry-related
- Research Institution
  National Institute of Technology, Toyama College
Computational study of pattern formation process in scale-boundary region
- Principal Investigator
  
  YASUDA MASAAKI
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Development of a new radiation detector with organic semiconductor by fabricating nano structure and mono-crystallization
- Principal Investigator
  
  TAKADA Eiji
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nuclear engineering
- Research Institution
  National Institute of Technology, Toyama College
Development of fabrication process for disposable micromachine
- Principal Investigator
  
  KAWATA Hiroaki
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Dynamics of nanomaterials in electron beam processing
- Principal Investigator
  
  YASUDA Masaaki
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Study on kT motor consisting of carbon nanotubes
- Principal Investigator
  
  NAKAYAMA Yoshikazu
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Osaka University
  Osaka Prefecture University
Fundamental of nanoengineering of carbon nanotubes and building of electronic devices
- Principal Investigator
  
  NAKAYAMA Yoshikazu
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka Prefecture University
Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopyPrincipal Investigator
- Principal Investigator
  
  HIRAI Yoshihiko
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Dynamics/Control
- Research Institution
  Osaka Prefecture University
ナノ・インプリンティングによる量子ドット形成に関する研究Principal Investigator
- Principal Investigator
  
  平井義彦
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (A)
- Research Institution
  Osaka Prefecture University

[Journal Article] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023
- Author(s)
  Hirai Yoshihiko、Osumi Tomoaki、Tanaka Toshiaki、Yasuda Masaaki、Sasago Masaru
- Journal Title
  
  Proceedings of SPIE Advanced Lithography + Patterning
  
  Volume: 12497 Pages: 1-7
- DOI
  10.1117/12.2658128
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05289
[Journal Article] Automatic design of the build-in lens mask for three-dimensional photo lithography2021
- Author(s)
  Osumi Tomoaki、Sasago Masaru、Yasuda Masaaki、Hirai Yoshihiko
- Journal Title
  
  Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology
  
  Volume: 11908 Pages: 1-5
- DOI
  10.1117/12.2598156
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05289
[Journal Article] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021
- Author(s)
  Osumi Tomoaki、Misaka Akio、Sato Kousuke、Yasuda Masaaki、Sasago Masaru、Hirai Yoshihiko
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 34 Issue: 2 Pages: 123-126
- DOI
  10.2494/photopolymer.34.123
- NAID
  130008119664
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2021-06-11
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K05289
[Journal Article] Stochastic Simulation of the UV Curing Process in Nanoimprint Lithography: Pattern Size and Shape Effects in Sub-50 nm Lithography2017
- Author(s)
  M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 35 Issue: 6
- DOI
  10.1116/1.4997295
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13978
[Journal Article] Computational Study on UV Curing Characteristics in Nanoimprint Lithography: Stochastic Simulation2017
- Author(s)
  M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 6S1 Pages: 06GL03-06GL03
- DOI
  10.7567/jjap.56.06gl03
- NAID
  210000147920
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13978
[Journal Article] Multiscale Simulation of the Development Process in Electron Beam Lithography2017
- Author(s)
  M. Yasuda, S. Hitomi, H. Kawata and Y. Hirai
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 30 Issue: 2 Pages: 205-209
- DOI
  10.2494/photopolymer.30.205
- NAID
  130005950259
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13978
[Journal Article] Multiscale simulation of resist pattern shrinkage during scanning electron microscope observations2015
- Author(s)
  M. Yasuda, Y. Furukawa, H. Kawata and Y. Hirai
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 33 Issue: 6
- DOI
  10.1116/1.4935956
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13978, KAKENHI-PROJECT-25249052
[Journal Article] Ordered P3HT/PCBM Heterostructured Organic Photodiode for Radiation Detection using Direct Nanoimprint Lithography2013
- Author(s)
  K. Tada, E. Takada, K. Fujii, K. Uemura, K. Tomohiro and Y. Hirai
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 26 Issue: 1 Pages: 79-82
- DOI
  10.2494/photopolymer.26.79
- NAID
  130004464995
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23561017
[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics (掲載確定) 48(印刷中)
- NAID
  210000066988
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Fabrication of Cantilevers by Two-Step Transfer Process without Lithography2009
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics vol.48(掲載決定)
- NAID
  210000066988
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics 47
  
  Pages: 5248-5251
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Cantilever Fabrication by Force-Free Release Transfer2008
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda, Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics vol.47
  
  Pages: 5248-5251
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560349
[Journal Article] Molecular dynamics study of electron-irradiation effects in single-walled carbon nanotubes2007
- Author(s)
  M. Yasuda, Y. Kimoto, K. Tada, H. Mori, S. Akita, Y. Nakayama, and Y. Hirai
- Journal Title
  
  Phys. Rev. B 75
- Data Source
  KAKENHI-PROJECT-17310084
[Journal Article] 分子動力学法による単層カーボンナノチューブの電子線照射損傷の解析2006
- Author(s)
  安田雅昭, 多田和広, 木元慶久, 秋田成司, 中山喜萬, 平井義彦
- Journal Title
  
  第53回応用物理学会関係連合講演会予稿集(東京) 2
  
  Pages: 755-755
- Data Source
  KAKENHI-PROJECT-17310084
[Journal Article] Molecular Dynamics Study on Double-walled Carbon Nanotube (DWNT) for Nano Mechanical Manipulation2005
- Author(s)
  Y.Kimoto, H.Mori, T.Mikami, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
- Journal Title
  
  Jpn.J.Appl.Phys. 44
  
  Pages: 1641-1647
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Molecular Dynamics Study on Double-walled Carbon Nanotube (DWNT) for Nano Mechanical Manipulation2005
- Author(s)
  Y.Kimoto, H.Mori, T.Mikami, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
- Journal Title
  
  Jpn.J.Appl.Phys. 44[4A]
  
  Pages: 1641-1647
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Chiral Dependence of Large Deformation in Carbon Nanotubes2005
- Author(s)
  H.Mori, Y.Hirai, S.Akita, Y.Nakayama
- Journal Title
  
  The 6th International Conference on the Science and Application of Nanotubes (Goteborg, July 2005) (発表予定)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Molecular Dynamics Study on Carbon Nano-Bearing2004
- Author(s)
  Y.Kimoto, K.Okada, H.Mori, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
- Journal Title
  
  Proc.of 2004 Int.Microprocesses and Nanotechnology Conf.
  
  Pages: 186-187
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Molecular Dynamics Study on Carbon Nano-Bearing2004
- Author(s)
  Y.Kimoto, K.Okada, H.Mori, S.Akita, Y.Nakayama, K.Higashi, Y.Hirai
- Journal Title
  
  Proc.of 2004 International Microprocesses and Nanotechnology Conference (Osaka)
  
  Pages: 186-187
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Tensile Testing Simulation of Single-Walled Nanotubes2004
- Author(s)
  H.Mori, S.Ogawa, Y.Hirai, S.Akita, Y.Nakayama
- Journal Title
  
  Proc.of 2004 International Microprocesses and Nanotechnology Conference (Osaka)
  
  Pages: 188-189
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] 二層障壁カーボンナノチューブによるナノベアリングの分子動力学解析2004
- Author(s)
  木元慶久, 森英喜, 岡田佳, 秋田成司, 中山喜萬, 平井義彦
- Journal Title
  
  第51回応用物理学関係連合講演会講演予稿集 2
  
  Pages: 1042-1042
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] 二層障壁カーボンナノチューブによるナノベアリングの分子動力学解析2004
- Author(s)
  木元慶久, 森英喜, 岡田佳, 秋田成司, 中山喜萬, 平井義彦
- Journal Title
  
  第51回応用物理学関係連合講演会予稿集 2
  
  Pages: 1042-1042
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] 多層カーボンナノチューブによる回転-直線運動変換機構の分子動力学解析2004
- Author(s)
  岡田佳, 木元慶久, 多田和広, 安田雅昭, 森英喜, 秋田成司, 中山喜萬, 平井義彦
- Journal Title
  
  第65回応用物理学会学術講演会予稿集 2
  
  Pages: 849-849
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] カーボンナノチューブの引っ張り解析2004
- Author(s)
  森英喜, 緒方成信, 平井義彦, 秋田成司, 中山喜萬
- Journal Title
  
  第65回応用物理学会学術講演会講演予稿集 2
  
  Pages: 848-848
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] 多層カーボンナノチューブによる回転-直線運動変換機構の分子動力学解析2004
- Author(s)
  岡田佳, 木元慶久, 多田和広, 安田雅昭, 森英喜, 秋田成司, 中山喜萬, 平井義彦
- Journal Title
  
  第65回応用物理学会学術講演会講演予稿集 2
  
  Pages: 849-849
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] カーボンナノチューブの引っ張り解析2004
- Author(s)
  森英喜, 緒方成信, 平井義彦, 秋田成司, 中山喜萬
- Journal Title
  
  第65回応用物理学会学術講演会予稿集 2
  
  Pages: 848-848
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Tensile Testing Simulation of Single-Walled Nanotubes2004
- Author(s)
  K.Mori, S.Ogawa, Y.Hirai, S.Akita, Y.Nakayama
- Journal Title
  
  Proc.of 2004 Int.Microprocesses and Nanotechnology Conf.
  
  Pages: 188-189
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Molecular Dynamics Studies on Mechanical Properties of Carbon Nano Tubes with Pinhole Defects2003
- Author(s)
  Y.Hirai, S.Nishimaki, H.Mori, Y.Kimoto, S.Akita, Y.Nakayama, Y.Tanaka
- Journal Title
  
  Jpn.J.Appl.Phys. 42[6B]
  
  Pages: 4120-4123
- NAID
  10011257950
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] 欠陥のあるカーボンナノチューブの分子動力学法による強度計算2003
- Author(s)
  平井義彦, 森英喜, 西牧悟, 木元慶久, 中山喜萬, 秋田成司, 田中芳雄
- Journal Title
  
  第50回応用物理学関係連合関連会講演予稿集 3
  
  Pages: 1579-1579
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] 分子動力学法によるカーボンナノチューブのアニールによる構造変化の解析2003
- Author(s)
  森英喜, 木元慶久, 秋田成司, 中山喜萬, 平井義彦
- Journal Title
  
  第64回応用物理学会学術講演会講演予稿集 2
  
  Pages: 861-861
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] 分子動力学法による二重障壁カーボンナノチューブの引き抜き特性の解析2003
- Author(s)
  木元慶久, 森英喜, 岡田佳, 成瀬直行, 秋田成司, 中山喜萬, 平井義彦
- Journal Title
  
  第64回応用物理学会学術講演会講演予稿集 2
  
  Pages: 861-861
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Molecular Dynamics Studies on Mechanical Properties of Carbon Nano Tubes with Pinhole Defects2003
- Author(s)
  Y.Hirai, S.Nishimaki, H.Mori, Y.Kimoto, S.Akita, Y.Nakayama, Y.Tanaka
- Journal Title
  
  Jpn.J.Appl.Phys. 42
  
  Pages: 4120-4123
- NAID
  10011257950
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Journal Article] Chiral Dependence of Large Deformation in Carbon Nanotubes
- Author(s)
  H.Mori, Y.Hirai, S.Akita, Y.Nakayama
- Journal Title
  
  The 6th International Conference on the Science and Application of Nanotubes (Goteborg, July 2005) (to be presented)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14205048
[Presentation] ビルトインレンズマスクを用いた三次元フォトリソグラフィによるパターン形成2024
- Author(s)
  田中敏章, 安田雅昭，笹子勝, 平井義彦
- Organizer
  第71回応用物理学会春季学術講演会(3月,2024,東京)
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Novel 3-dimensional photo lithography using modulated complex index mask2024
- Author(s)
  Yoshihiko Hirai
- Organizer
  International workshop on micro-systems and matrials (March, 2024, XI'an)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023
- Author(s)
  Hirai Yoshihiko、Osumi Tomoaki、Tanaka Toshiaki、Yasuda Masaaki、Sasago Masaru
- Organizer
  SPIE Advanced Lithography + Patterning
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Optimization of the Built-in Lens Mask for Three-Dimensional Photo Lithography2021
- Author(s)
  T. Osumi, M. Sasago, M. Yasuda, Y. Hirai
- Organizer
  The 64th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2021),
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021
- Author(s)
  T. Osumi, A. Misaka, K. Sato, M. Yasuda, M. Sasago, Y. Hirai,
- Organizer
  The 38th International Conference of Photopolymer Science and Technology (ICPST-38)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ2021
- Author(s)
  大住　知暉, 安田　雅昭，笹子　勝, 平井義彦
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ(マスクパターンの最適化検討)2021
- Author(s)
  大住知暉、安田雅昭、笹子勝、平井義彦、
- Organizer
  68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Automatic Design of the Built-in Lens Mask for ThreeDimensional Photo Lithography2021
- Author(s)
  T. Osumi, M. Sasago, M. Yasuda, Y. Hirai
- Organizer
  Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] 電子線リソグラフィにおけるパターン形成の確率論的シミュレーション2018
- Author(s)
  香山真範、白井正充、川田博昭、平井義彦、安田雅昭
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Multiscale Simulation of Development Process in Electron Beam Lithography2017
- Author(s)
  M. Yasuda, S. Hitomi, H. Kawata and Y. Hirai
- Organizer
  34th International Conference of Photopolymer Science and Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm2017
- Author(s)
  M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  61st Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Computational study of pattern formation in electron beam lithography for negative type resists2017
- Author(s)
  M. Yasuda, M. Koyama, M. Shirai, H. Kawata and Y. Hirai
- Organizer
  43rd Int. Conf. on Micro- and Nano-Engineering 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Impact of Mold Cavity Size on Resist Pattern Shape in Nanoimprint Lithography: Molecular Dynamics Study2017
- Author(s)
  R. Sakata, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  16th International Conference on Nanoimprint and Nanoprint Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] ナノインプリントにおけるレジスト分子挙動の理論解析2017
- Author(s)
  安田雅昭，平井義彦
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-15
- Invited
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] UVナノインプリントにおけるレジスト硬化の確率論的シミュレーション2017
- Author(s)
  安田雅昭、香山真範、白井正充、川田博昭、平井義彦
- Organizer
  次世代リソグラフィワークショップ 2017
- Invited
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] EUVリソグラフィの分子シミュレーション2016
- Author(s)
  岩井瑛規，川田博昭，平井義彦, 安田雅昭
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-20
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Multiscale Simulation of Pattern Formation in Electron Beam Lithography2016
- Author(s)
  S. Hitomi, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  23rd Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  Pachifico Yokohama, Yokohama, Japan
- Year and Date
  2016-04-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study of Pattern Formation in Extreme Ultraviolet Lithography2016
- Author(s)
  M. Yasuda, A. Iwai, H. Kawata and Y. Hirai
- Organizer
  42nd Int. Conf. on Micro- and Nano-Engineering
- Place of Presentation
  Reed Messe Wien, Wien, Austria
- Year and Date
  2016-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Early Stages of Development Process in Electron-Exposed Resists: A Molecular Dynamics Study2016
- Author(s)
  S. Hitomi, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  2016 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  ANA Crowne Plaza Kyoto, Kyoto, Japan
- Year and Date
  2016-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] SEM観察における有機高分子レジスト収縮の理論解析2016
- Author(s)
  香山真範, 古川雄基，川田博昭，平井義彦, 安田雅昭
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] 電子線リソグラフィにおけるパターン形成のマルチスケール解析2016
- Author(s)
  人見洋，川田博昭，平井義彦, 安田雅昭
- Organizer
  マルチスケール材料力学シンポジウム
- Place of Presentation
  富山大学（富山県富山市）
- Year and Date
  2016-05-27
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study of Pattern Edge Structures in Extreme Ultraviolet Lithography2016
- Author(s)
  A. Iwai, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  2016 Int. Symp. on Extreme Ultraviolet Lithography
- Place of Presentation
  International Conference Center Hiroshima, Hiroshima, Japan
- Year and Date
  2016-10-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study of Line Edge Roughness in Nanoimprint Lithography2015
- Author(s)
  N. Iwata, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  13th International Conference on Nanoimprint and Nanoprint Technology
- Place of Presentation
  Silverado Resort and Spa, Napa, USA
- Year and Date
  2015-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study on Line Width Roughness and Critical Dimensional Error in Nanoimprint Lithography2015
- Author(s)
  N. Iwata, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  2015 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Toyama International Conference Center, Toyama, Japan
- Year and Date
  2015-11-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Computational study on template release process for peeling (rotating) release method2015
- Author(s)
  T. Tochino, T. Iida, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  41st Int. Conf. on Micro- and Nano-Engineering 2015
- Place of Presentation
  World Forum, Hague, Netherlands
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Computational Study of Pattern Formation in Extreme Ultra Violet Lithography2015
- Author(s)
  M. Yasuda, A. Iwai, S. Hitomi, H. Kawata and Y. Hirai
- Organizer
  2015 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Toyama International Conference Center, Toyama, Japan
- Year and Date
  2015-11-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Heterostructured Organic Photodiode for radiation detection with Nanoimprinted Structure2013
- Author(s)
  K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
- Organizer
  1th Int. Conf. on Nanoimprint and Nanoprint Technology
- Place of Presentation
  Hotel Fira Palace （Barcelona）
- Data Source
  KAKENHI-PROJECT-23561017
[Presentation] Sensitivity improvement of heterostructured organic photodiode for radiation detection using nanoimprint lithography2013
- Author(s)
  K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
- Organizer
  2013 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  ロイトン札幌（札幌）
- Data Source
  KAKENHI-PROJECT-23561017
[Presentation] Nanoimprinted organic photodiode for radiation detection2013
- Author(s)
  K. Tada, E. Takada, K. Tomohiro, K. Fujii, Y. Masuyama and Y. Hirai
- Organizer
  Int. Conf. on Materials for Advanced Technologies 2013
- Place of Presentation
  Suntec Singapore International Convention & Exhibition Centre （Singapore）
- Data Source
  KAKENHI-PROJECT-23561017
[Presentation] Heterostructured Organic Photodiode for radiation detection with Nanoimprinted Structure2013
- Author(s)
  K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
- Organizer
  Digest of Papers of 11th Int. Conf. on Nanoimprint and Nanoprint Technology
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-23561017
[Presentation] Sensitivity improvement of heterostructured organic photodiode for radiation detection using nanoimprint lithography2013
- Author(s)
  K. Tada, E. Takada, K. Uemura, K. Fujii, H. Noma, H. Kawata, Y. Hirai
- Organizer
  Digest of Papers of 2013 Int. Microprocesses and Nanotechnology
- Place of Presentation
  Hokkaido, Japan
- Data Source
  KAKENHI-PROJECT-23561017
[Presentation] Novel Organic Radiation Detector with Nanoimprinted Structure2012
- Author(s)
  K. Tada, E. Takada, K. Tomohiro, K. Fujii, Y. Masuyama and Y. Hirai
- Organizer
  Digest of Papers of 2012 Int. Microprocesses and Nanotechnology Conf
- Place of Presentation
  Kobe, Japan
- Data Source
  KAKENHI-PROJECT-23561017
[Presentation] Cantilever fabrication by use of two step transfer printing process2008
- Author(s)
  H. Kawata, K. Ryugou, S. Kubo, M. Yasuda, Y. Hirai
- Organizer
  34th International Conference on Micro and Nano Engineering (NME2008)
- Place of Presentation
  アテネ, ギリシャ
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 移植法によるリソグラフィレスマイクロマシン作製プロセスの開発2008
- Author(s)
  流郷謙一, 川田博昭, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  仙台
- Year and Date
  2008-06-13
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Fabrication of cantilevers by two step transfer process without Lithography2008
- Author(s)
  K. Ryugou, S. Kubo, H. Kawata, M. Yasuda and Y. Hirai
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf. (MNC2008)
- Place of Presentation
  Fukuoka(Japan)
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Fabrication of cantilevers by two step transfer process without lithography2008
- Author(s)
  K. Ryugou, S. Kubo, H. Kawata, M. Yasuda, Y. Hirai
- Organizer
  2008 Int. Microprocesses and Nanotechnology Conf, (MNC2008)
- Place of Presentation
  福岡
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever fabrication by use of two step transfer printing process2008
- Author(s)
  H. Kawata, K. Ryugou, S. Kubo, M. Yasuda and Y. Hirai
- Organizer
  34th International Conference on Micro and Nano Engineering (MNE2008)
- Place of Presentation
  Athens (Greece)
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 2段階移植法によるリソグラフィレスでのカンチレバー作製2008
- Author(s)
  川田博昭, 流郷謙一, 安田雅昭, 平井義彦
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  春日井
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 移植法によるリソグラフイレスマイクロマシン作製プロセスの開発2008
- Author(s)
  流郷謙一, 川田博昭, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  仙台
- Year and Date
  2008-06-13
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] リソグラフィを用いない新規なカンチレバー作製プロセス2007
- Author(s)
  川田博昭, 新甫純也, 安田雅昭, 平井義彦
- Organizer
  センサー・マイクロマシン準部門総合研究会
- Place of Presentation
  筑波
- Year and Date
  2007-07-02
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] 離型力を要しない移植法によるカンチレバー作製2007
- Author(s)
  川田博昭、安田雅昭、平井義彦
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-19560349
[Presentation] Cantilever Fabrication by Force Free Release Transfer Prooess2007
- Author(s)
  H. Kawata, K. Ryugou, S. Ohta, M. Yasuda and Y. Hirai
- Organizer
  2007 Int. Microprocesses and Nanotechnology Conf.(NMC2007)
- Place of Presentation
  京都
- Year and Date
  2007-11-08
- Data Source
  KAKENHI-PROJECT-19560349

1. KAWATA Hiroaki (90186099)

# of Collaborated Projects: 3 results

# of Collaborated Products: 14 results
2. TADA Kazuhiro (90579731)

# of Collaborated Projects: 2 results

# of Collaborated Products: 6 results
3. TANAKA Yoshio (60081246)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. NAKAYAMA Yoshikazu (20128771)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. AKITA Seiji (60202529)

# of Collaborated Projects: 2 results

# of Collaborated Products: 21 results
6. YASUDA Masaaki (30264807)

# of Collaborated Projects: 2 results

# of Collaborated Products: 21 results
7. TAKADA Eiji (00270885)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
8. ASAI Keisuke (60231859)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. PAN Lujun (50326279)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. KIKUTA Hisao (10214743)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. HAGA Hisashi (00292045)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. KAWABATA Kazuhshige (20261274)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. Sasago Masaru (40727145)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
14. 村田顕二 (30029079)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 小寺正敏 (40170279)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 村田一夫

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. 中山喜万

# of Collaborated Projects: 0 results

# of Collaborated Products: 21 results

HIRAI YOSHIHIKO 平井 義彦

平井 義彦 ヒライ ヨシヒコ

HIRAI Yoshihiko 平井 義彦

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Quantitative evaluation of visco-elastic distribution of living cells using scanning probe microscopyPrincipal Investigator

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ナノ・インプリンティングによる量子ドット形成に関する研究Principal Investigator

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[Journal Article] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023

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[Journal Article] Automatic design of the build-in lens mask for three-dimensional photo lithography2021

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[Journal Article] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021

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[Journal Article] Stochastic Simulation of the UV Curing Process in Nanoimprint Lithography: Pattern Size and Shape Effects in Sub-50 nm Lithography2017

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HIRAI YOSHIHIKO 平井義彦

平井義彦ヒライヨシヒコ

HIRAI Yoshihiko 平井義彦