Hata Seiichi 秦誠一

… Alternative Names

HATA Seiichi 秦誠一

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Researcher Number	50293056
Other IDs
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Affiliation (Current)	2025: 名古屋大学, 工学研究科, 教授
Affiliation (based on the past Project Information) *help	2025: 名古屋大学, 工学研究科, 教授 2016 – 2022: 名古屋大学, 工学研究科, 教授 2014 – 2015: 名古屋大学, 工学(系)研究科(研究院), 教授 2012: 東京工業大学, 精密工学研究所, 客員教授 2007 – 2011: Tokyo Institute of Technology, 精密工学研究所, 准教授 … More 2008: 東工大, 准教授 2007: Tokyo Institute of Technology, マロンティア研究センター, 准教授 2005: Tokyo Institute of Technology, Frontier Collaborative Research Center, Associate Professor, フロンティア創造共同研究センター, 助教授 1998 – 2004: 東京工業大学, 精密工学研究所, 助手 1999: 東京工業大学, 精密工業研究所, 助手 Less
Review Section/Research Field	Principal Investigator Intelligent mechanics/Mechanical systems / Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Intelligent mechanics/Mechanical systems / Physical properties of metals / 機械工作・生産工学 Except Principal Investigator 機械工作・生産工学 / Production engineering/Processing studies / 設計工学・機械要素・トライボロジー / Intelligent mechanics/Mechanical systems
Keywords	Principal Investigator 金属ガラス / 薄膜 / MEMS / アモルファス / 微細加工 / コンビナトリアル技術 / ＭＥＭＳ / ナノ材料 / コンビナトリアル手法 / 精密部品加工 … More / 金型 / 物性 / マイクロアクチュエータ / マイクロマシン / アモルファス合金 / 薄膜金属ガラス / アニール / 内部応力 / 材料創成 / ナノマイクロメカトロニクス / optical pickup / information instruments / electrostatic actuator / metallic glass / amorphous / thin film / micromachining / 情報機 / 光磁気ディスク / 光ピックアップ / 情報機器 / 静電アクチュエータ / ドラッグデリバリーシステム / 先進機械デバイス / ソフトメカニクス / Ptフリー / 結晶化開始温度 / ナノ加工 / コンビナトリアル探索 / ガラス成形 / マイクロ加工 / ナノ / 材料評価 / 合金 / 集積化ライブラリ / アークプラズマ / 薄膜ライブラリ / コンビナトリアルマテリアル法 / 圧電薄膜 / TTT曲線 / 過冷却液体域 / レーザフォーミング / スパッタ / 変形 / 過冷却液体 … More Except Principal Investigator MEMS / 金属ガラス / アモルファス / 微細加工 / 薄膜 / 物性 / プローブ / Arc plasma / Physical properties / Micro actuator / Metallic glass / Amorphous / Thin film / Micro fabication / アークプラズマ / マイクロアクチュエータ / optical pickup / information instruments / electrostatic actuator / metallic glass / amorphous / thin film / micromachining / 抵抗率 / Runout / Repetitive Control / Precision Positioning / Rotational accuracy / Magnetic Bearing / ナノメートル / 真円度 / 位置決め精度 / 静電容量型変位計 / バイアス電流 / 繰り返し制御 / 回転精度 / 磁気軸受 / Sensorless control / Micro Dynamics / Robust Control / Redundant mechanism / Nano-meter positioning / Motion Dynamics / 波動歯車 / 空気ねじ / ファジイ制御 / ニューロ制御 / 電磁石 / 電磁アクチュエータ / 制御 / 冗長メカニズム / ダイナミクス / ナノモーション / プロセス / マイクロミラー / 薄膜金属ガラス / マイクロブロー成型 / マイクロ成型 / 光学 / ひずみ / 引張り / 半導体レーザ / 温度測定 / レーザフォーミング Less

表面活性化接合用高速原子ビーム源の微粒子排出メカニズムの解明とその長寿命化Principal Investigator
- Principal Investigator
  
  秦誠一
- Project Period (FY)
  2025 – 2028
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Nagoya University
Measurement and control of internal stress in thin film metallic glass using combinatorial technologyPrincipal Investigator
- Principal Investigator
  
  HATA SEIICHI
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Nagoya University
Ultra high-throughput evaluation technology for materials using integrated MEMSPrincipal Investigator
- Principal Investigator
  
  Hata Seiichi
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Nagoya University
Pad type drug delivery system using soft materialPrincipal Investigator
- Principal Investigator
  
  Hata Seiichi
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Nagoya University
Combinatorial Search and Nanoprocessing of Pt-free Amorphous Alloys for Glass Molding DiePrincipal Investigator
- Principal Investigator
  
  HATA Seiichi
- Project Period (FY)
  2008 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tokyo Institute of Technology
高機能金型材料の創成とそのナノ加工Principal Investigator
- Principal Investigator
  
  秦誠一
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tokyo Institute of Technology
集積化薄膜ライブラリによるコンビナトリアル材料評価Principal Investigator
- Principal Investigator
  
  秦誠一
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tokyo Institute of Technology
アークプラズマコンビ法による新しい薄膜金属ガラスの超効率的創成とその加工Principal Investigator
- Principal Investigator
  
  秦誠一
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tokyo Institute of Technology
Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methods
- Principal Investigator
  
  SHIMOKOHBE Akira
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tokyo Institute of Technology
薄膜ガラス材料を用いたOpt-MEMS
- Principal Investigator
  
  下河辺明
- Project Period (FY)
  2002
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tokyo Institute of Technology
2自由度高速マイクロアクチュエータの研究Principal Investigator
- Principal Investigator
  
  秦誠一
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tokyo Institute of Technology
バルク金属ガラスの高精度微細成形
- Principal Investigator
  
  下河辺明
- Project Period (FY)
  2001
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tokyo Institute of Technology
Study and prototype fabrication of out of plane microactuatorPrincipal Investigator
- Principal Investigator
  
  HATA Seiichi
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tokyo Institute of Technology
レーザマイクロフォーミングによる金属ガラス薄膜微小構造物の形状制御
- Principal Investigator
  
  SHIMOKOHBE Akira
- Project Period (FY)
  2000
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tokyo Institute of Technology
薄膜金属ガラスの研究Principal Investigator
- Principal Investigator
  
  秦誠一
- Project Period (FY)
  2000
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Physical properties of metals
- Research Institution
  Tokyo Institute of Technology
Three dimensional micro forming of thin film metallic glass cantilevers and its application for micro probes
- Principal Investigator
  
  SHIMOKOHBE Akira
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tokyo Institute of Technology
Precision Magnetic Bearing with Nanometer Rotational Accuracy
- Principal Investigator
  
  SHINSHI Tadahiko
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (B).
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  Tokyo Institute of Technology
微細構造物の自己成形に関する研究Principal Investigator
- Principal Investigator
  
  秦誠一
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tokyo Institute of Technology
Dynamics and Control of Nano-Motion Mechanisms
- Principal Investigator
  
  SHIMOKOHBE Akira
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (A).
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tokyo Institute of Technology

[Book] アクチュエータの新材料，駆動制御，最新応用技術2017
- Author(s)
  秦誠一，櫻井淳平（分担）
- Total Pages
  536
- Publisher
  情報技術協会
- Data Source
  KAKENHI-PROJECT-16H04300
[Book] アクチュエータの新材料，駆動制御，最新応用技術2017
- Author(s)
  櫻井淳平, 秦誠一（分担）
- Total Pages
  536
- Publisher
  （株）技術情報協会
- ISBN
  4861046491
- Data Source
  KAKENHI-PROJECT-16H04300
[Book] 異種機能デバイス集積化技術の基礎と応用-MEMS, NEMS,センサ,CMOSLSIの融合-2012
- Author(s)
  益一哉, 秦誠一, 他31名
- Total Pages
  279
- Publisher
  株式会社シーエムシー出版
- Data Source
  KAKENHI-PROJECT-20676002
[Book] 異種機能デバイス集積化技術の基礎と応用MEMS,NEMS,センサ,CMOSLSIの融合-2012
- Author(s)
  益一哉,秦誠一,他31名
- Total Pages
  279
- Publisher
  株式会社シーエムシー出版
- Data Source
  KAKENHI-PROJECT-20676002
[Book] 新機能材料金属ガラスの基礎と産業への応用2009
- Author(s)
  秦誠一(第2編,第2章,第4節.薄膜化,第2編,第3章,第5節.マイクロアクチュエータ分担)
- Total Pages
  630
- Publisher
  (株)テクノシステム
- Data Source
  KAKENHI-PROJECT-20676002
[Book] 新機能材料金属ガラスの基礎と産業への応用2009
- Author(s)
  秦誠一(基礎31. 薄膜化, 応用10. マイクロアクチュエータ分担)
- Total Pages
  630
- Publisher
  (株)テクノシステム
- Data Source
  KAKENHI-PROJECT-20676002
[Book] マイクロレンズ(アレイ)の超精密加工と量産化技術2004
- Author(s)
  秦誠一
- Total Pages
  414
- Publisher
  (株)技術情報協会, (第6章分担)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Book] ソフトアクチュエータ開発の最前線〜人工筋肉の実現をめざして2004
- Author(s)
  秦誠一
- Total Pages
  302
- Publisher
  (株)エヌ・ティー・エス
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Book] 新しい静電型MEMSアクチェエータ=円すいばねMEMSアクチュエータとその固着防止駆動法=2004
- Author(s)
  秦誠一, 福重孝志
- Total Pages
  65
- Publisher
  光アライアンス
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Book] ソフトアクチュエータ開発の最前線〜人工筋肉の実現をめざして〜2004
- Author(s)
  秦誠一
- Total Pages
  402
- Publisher
  (株)エヌ・ティー・エス
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Effect of structural relaxation at bellow crystallization temperature on internal stress of Ni-Nb-Zr thin-film amorphous alloys diaphragm for Micro electromechanical systems sensors2022
- Author(s)
  F. Haga, T. Yamazaki, C. Oka S. Hata Y. Hoshino, J. Sakurai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: - Issue: SD Pages: SD1027-SD1027
- DOI
  10.35848/1347-4065/ac5d12
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K14607, KAKENHI-PROJECT-19H02040, KAKENHI-PROJECT-19J02078
[Journal Article] Combinatorial search for Ti-Ni-Hf high formable shape memory alloys2022
- Author(s)
  S. Inoue, T. Yamazaki, C. Oka, S. Hata, J. Sakurai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: - Issue: 6 Pages: 065507-065507
- DOI
  10.35848/1347-4065/ac6a97
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K14607, KAKENHI-PROJECT-19H02040, KAKENHI-PROJECT-19J02078
[Journal Article] Examination of Mechanical Properties and Photoelastic Properties of Gel Material for Blood Vessel Mimics2021
- Author(s)
  D. Yamada, S. Hori, S. Abe, Y. Kumeno, T. Yamazaki, C. Oka, J. Sakurai, S. Hata
- Journal Title
  
  Journal of Medical Devices
  
  Volume: 15 Issue: 3 Pages: 31011-31011
- DOI
  10.1115/1.4051516
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02040, KAKENHI-PROJECT-20K14607, KAKENHI-PROJECT-19J02078
[Journal Article] Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding2021
- Author(s)
  Ryo Morisaki , Takahiro Yamazaki , Chiemi Oka , Junpei Sakurai , Takami Hirai , Tomonori Takahashi , Hiroyuki Tsuji , Noriyasu Ohno , and Seiichi Hata
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 60 Issue: SC Pages: SCCB01-SCCB01
- DOI
  10.35848/1347-4065/abe683
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02040, KAKENHI-PROJECT-19J02078, KAKENHI-PROJECT-20K14607
[Journal Article] Fabrication and Evaluation of Actuators for Reaction Force Variable Passive-type Tactile Displays2021
- Author(s)
  南原圭汰，山崎貴大，岡智絵美，秦誠一，櫻井淳平
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 141 Issue: 9 Pages: 304-309
- DOI
  10.1541/ieejsmas.141.304
- NAID
  130008082227
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2021-09-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02040, KAKENHI-PROJECT-20K14607, KAKENHI-PROJECT-19J02078
[Journal Article] Development of a fast atom beam gun for surface-activated bonding2020
- Author(s)
  Ryo Morisaki, Yuuki Hirai, Chiemi Oka, Mizue Mizoshiri, Takahiro Yamazaki, Junpei Sakurai, Takami Hirai, Tomonori Takahashi, Hiroyuki Tsuji and Seiichi Hata
- Journal Title
  
  Precision Engineering
  
  Volume: 62 Pages: 106-112
- DOI
  10.1016/j.precisioneng.2019.11.006
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02040, KAKENHI-PROJECT-19J02078
[Journal Article] Fabrication of a Novel Nanoporous Film via Chemical Dealloying of a Cu-Cr Alloy for Sensing Moisture in Oil2019
- Author(s)
  Yusuke Yoshii, Junpei Sakurai, Mizue Mizoshiri, Seiichi Hata
- Journal Title
  
  Journal of Microelectromechanical Systems
  
  Volume: 28 Issue: 2 Pages: 279-289
- DOI
  10.1109/jmems.2019.2895164
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04300
[Journal Article] Fabrication of a Cr Nanoporous Thin Film via Sputter Deposition and Investigation of Its Applicability as a Water-oil Separation Electrode in a MEMS Moisture Sensor2017
- Author(s)
  Yusuke Yoshii, Yuuki Fukagawa, Mizue Mizoshiri, Junpei Sakurai, Seiichi Hata
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 137 Issue: 1 Pages: 15-22
- DOI
  10.1541/ieejsmas.137.15
- NAID
  130005188436
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04300
[Journal Article] Reverse Lift-Off Process and Application for Cu-Zr-Ti Metallic Glass Thick Film Structures2015
- Author(s)
  Shigetaka Watanebe, Junpei Sakurai, Mizue Mizoshiri, Seiichi Hata
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 9 Issue: 6 Pages: 646-654
- DOI
  10.20965/ijat.2015.p0646
- NAID
  130007673922
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2015-11-05
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26630095
[Journal Article] PVDF actuator for high-frequency fatigue test of thin-film metals2013
- Author(s)
  Nastaran Tamjidi, Kohei Sato, Junpei Sakurai, Seiichi Hata
- Journal Title
  
  IEEJ Transactions on Electrical and Electronic Engineering
  
  Volume: Vol.8,No2 Issue: 2 Pages: 199-205
- DOI
  10.1002/tee.21840
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization2012
- Author(s)
  Junpei Sakurai, , Seiichi Hata
- Journal Title
  
  Materials Science and Engineering : A
  
  Volume: Vol.541 Pages: 8-13
- DOI
  10.1016/j.msea.2012.01.075
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] High-frequency fatigue test of metallic thin films using PVDF microactuator2012
- Author(s)
  Nastaran Tamjidi, Kohei Sato, Ryo Suzaki, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata
- Journal Title
  
  IEICE Electron. Express
  
  Volume: 9 Issue: 5 Pages: 403-409
- DOI
  10.1587/elex.9.403
- NAID
  130001922362
- ISSN
  1349-2543
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Searching for Thin Film Amorphous Alloys using Combinatorial Deposition Process and High-Throughput Evaluation Method2011
- Author(s)
  秦誠一
- Journal Title
  
  Journal of the Vacuum Society of Japan
  
  Volume: 54 Issue: 11 Pages: 559-564
- DOI
  10.3131/jvsj2.54.559
- NAID
  130002116999
- ISSN
  1882-2398, 1882-4749
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Novel Thermographic Method for Characterizing Transformation Temperatures of Thin Film Shape Memory Alloys Aimed at Combinatorial Approach2011
- Author(s)
  Yuko Aono, Junpei Sakurai, Akira Shimokohbe, and Seiichi Hata
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: vol.50 Issue: 6R Pages: 066601-066601
- DOI
  10.1143/jjap.50.066601
- NAID
  210000070642
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002, KAKENHI-PROJECT-23860019
[Journal Article] High-throughput characterization method for crystallization temperature of integrated thin film amorphous alloys using thermography2011
- Author(s)
  Aono Y., Sakurai J., Shimokohbe A., Hata S.
- Journal Title
  
  Applied Physics Express
  
  Volume: 50 Issue: 5R Pages: 055601-055601
- DOI
  10.1143/jjap.50.055601
- NAID
  40018812643
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002, KAKENHI-PROJECT-23860019
[Journal Article] Searching for noble Ni-Nb-Zr thin film amorphous alloys for optical glass device molding die materials2011
- Author(s)
  Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Yuko Aono, Seiichi Hata
- Journal Title
  
  Precision Engineering
  
  Volume: vol.35No.4 Issue: 4 Pages: 537-546
- DOI
  10.1016/j.precisioneng.2011.05.004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002, KAKENHI-PROJECT-23860019
[Journal Article] High-throughput measurement method for time-temperature-transformation diagram of thin film amorphous alloys2011
- Author(s)
  Aono Y., Sakurai J., Ishida T., Shimokohbe A., Hata S.
- Journal Title
  
  Applied Physics Express
  
  Volume: 3 Issue: 12 Pages: 125601-125601
- DOI
  10.1143/apex.3.125601
- NAID
  10027618627
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] High-Throughput Measurement Method for Time-Temperature-Transformation Diagram of Thin Film Amorphous Alloys2010
- Author(s)
  Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe, Seiichi Hata
- Journal Title
  
  Applied Physics Express
  
  Volume: 3 Pages: 1256011-3
- NAID
  10027618627
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] High-Throughput Measurement Method for Time-Temperature-Trans-formation Diagram of Thin Film Amorphous Alloys2010
- Author(s)
  Y.Aono, J.Sakurai, T.Ishida, A.Shimokohbe, S.Hata
- Journal Title
  
  Applied Physics Express 3
  
  Pages: 125601-125601
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples2010
- Author(s)
  Yuko Aono, Junpei Sakurai, Akira Shimokohbe, Seiichi Hata
- Journal Title
  
  Materials Science Forum
  
  Volume: 654-656 Pages: 2426-2429
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials2010
- Author(s)
  J.Sakurai, M.Abe, M.Ando, Y.Aono, S.Jiang, A.Shimokohbe, S Hata
- Journal Title
  
  Journal Solid Mechanics and Materials Engineering 4
  
  Pages: 1742-1753
- NAID
  130000421002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials2010
- Author(s)
  Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Yuko Aono, Shengxian Jiang, Akira Shimokohbe, Seiichi Hata
- Journal Title
  
  Journal Solid Mechanics and Materials Engineering
  
  Volume: 4 Pages: 1742-1753
- NAID
  130000421002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Combinatorial searching for Ni-Nb-Zr amorphous alloys as glass lens molding die materials2010
- Author(s)
  Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Seiichi Hata
- Journal Title
  
  Key Eng.Mater.
  
  Volume: 447-448 Pages: 661-665
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting Shape Memory Effect After Crystallization2010
- Author(s)
  Junpei Sakurai, Yuko Aono, Yui Ishida, Seiichi Hata
- Journal Title
  
  Materials Science Forum
  
  Volume: 654-656 Pages: 1066-1069
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Evaluation of the validity of crystallization temperature measurements using thermograpy with different sample configurations2010
- Author(s)
  Yuko Aono, Junpei Sakurai, Akira Shimokohbe, Seiichi Hata
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: 49 Pages: 0766011-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Characterization of the Pt-Hf-Zr-Ni Thin Film Amorphous Alloys for Precise Optical Glass Lens Mold2009
- Author(s)
  Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
- Journal Title
  
  Journal of Solid Mechanics and Materials Engineering 3
  
  Pages: 1022-1032
- NAID
  130000127309
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Measurement of Crystallization Temperature Using Thermography for Thin Film Amorphous Alloy Samples2009
- Author(s)
  Seiichi Hata, Yuko Aono, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Applied Physics Express 2(in press)
- NAID
  10025085461
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Optical Glass Lenses Molding Materials2009
- Author(s)
  Junpei Sakurai, Seiichi Hata, Ryusuke Yamuchi, Mitsuhiro Abe, Akira Shimokohbe
- Journal Title
  
  Precision Engineering (Available online)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Measurement of Crystallization Tem-perature Using Thermography for Thin Film Amorphous Alloy Samples2009
- Author(s)
  S.Hata, Y.Aono, J.Sakurai, A.Shimokohbe
- Journal Title
  
  Applied Physics Express 2
  
  Pages: 36501-36501
- NAID
  10025085461
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] 単一アークプラズマガンを用いたコンビナトリアル蒸着法2009
- Author(s)
  秦誠一, 藤田敏充, 桜井淳平, 下河辺明
- Journal Title
  
  材料 58
  
  Pages: 821-826
- NAID
  130000133210
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] マイクロ・ナノ加工技術の現状と将来展望2009
- Author(s)
  秦誠一
- Journal Title
  
  機械の研究 61
  
  Pages: 331-335
- NAID
  40016483276
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Junpei Sakurai and Akira Shimokohbe, Measurement of Crystallization Temperature Using Thermography for Thin Film Amorphous Alloy Samples2009
- Author(s)
  Seiichi Hata, Yuko Aono
- Journal Title
  
  Applied Physics Express
  
  Volume: vol.2 Pages: 036501-036501
- DOI
  10.1143/apex.2.036501
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated by a Carousel-Type Sputtering System2009
- Author(s)
  Junpei SAKURAI, Seiichi HATA, Akira SHIMOKOHBE
- Journal Title
  
  Jpn. J. Appl. Phys. 48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] ガラスレンズ成形金型用の新しいアモルファス合金のコンビナトリアル探索-結晶化開始温度,機械特性の評価-2008
- Author(s)
  山内隆介, 秦誠一, 桜井淳平, 下河辺明
- Journal Title
  
  精密工学会誌 74
  
  Pages: 252-263
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360063
[Journal Article] Behavior of Joining Interface between Thin Film Metallic Glass and Silicon Nitride at Heating2008
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Materials Science & Engineering B 148
  
  Pages: 149-153
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system2008
- Author(s)
  Yuji Matsumoto, Miki Hiraoka, Masao Katayama, Seiichi Hata, Mikio Fukuhara, Takeshi Wada, Hisamichi Kimura, Akihisa Inoue
- Journal Title
  
  Materials Science & Engineering B 148
  
  Pages: 179-182
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] コンビナトリアル技術を用いた新しいMEMS材料の探索2008
- Author(s)
  秦誠一
- Journal Title
  
  化学工業 59
  
  Pages: 73-77
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Behavior of Joining Interface between Thin Film Metallic Glass and Silicon Nitride at Heating2008
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe,
- Journal Title
  
  Materials Science & Engineering B 148
  
  Pages: 149-153
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19656066
[Journal Article] Laser Forming of Thin Film Metallic Glass2008
- Author(s)
  Masaaki OTSU, Yuki IDE, Junpei SAKURAI Seiichi HATA, Kazyaki TAKASHIMA
- Journal Title
  
  Journal of Solid Mechanics and Materials Engineering 3
  
  Pages: 387-395
- NAID
  130000667672
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] 新しいPt基アモルファス合金を用いたガラスレンズ成形用金型の試作2008
- Author(s)
  秦誠一, 桜井淳平, 下河辺明
- Journal Title
  
  日本機械学会論文集C編 74
  
  Pages: 1020-1025
- NAID
  110006655873
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20676002
[Journal Article] Combinatorial Arc Plasma Deposition Search for Ru-based Thin Film Metallic Glass2007
- Author(s)
  Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and AkiraShimokohbe
- Journal Title
  
  Applied Surface Science 254
  
  Pages: 720-724
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360063
[Journal Article] Searching for Novel Ru-Based TLin Film Metallic Glass by Colnbinatorial Arc Plasma Deposition2007
- Author(s)
  Junpei Sakurai Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe,
- Journal Title
  
  Jpn. J. Appl. Phys 46
  
  Pages: 1590-1595
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360063
[Journal Article] Search for Novel Amorphous Alloys with High Crystallization Temperature by Combinatorial Arc Plasma Deposition2007
- Author(s)
  Seiichi Hata, Junpei Sakurai, Ryusuke Yamauchi and Akira Shimokohbe
- Journal Title
  
  Applied Surface Science 254
  
  Pages: 738-742
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360063
[Journal Article] Combinatorial Arc Plasma Deposition of Thin Films2006
- Author(s)
  Seiichi HATA, Ryusuke YAMAUCHI, Junpei SAKURAI, Akira SHIMOKOHBE
- Journal Title
  
  Jpn.J.Appl.Phys. 45・4A
- NAID
  40007227498
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Arc Plasma Deposition of Thin Films2006
- Author(s)
  Seiichi HATA, Ryusuke YAMAUCHI, Junpei SAKURAI, Akira SHIMOKOHBE
- Journal Title
  
  Jpn.J.Appl.Phys. 45・4A
- NAID
  40007227498
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] Rotary Microactuator -Investigation of Shape and Driving Method-2006
- Author(s)
  Seiichi Hata, Hiroaki Akamatu, Takashi Fukushige, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2006 fall meeting of JSPE
  
  Pages: 925-926
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 回転型マイクロアクチュエータ-形状,駆動方法の検討-2006
- Author(s)
  秦誠一, 赤松宏明, 福重孝志, 下河辺明
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集
  
  Pages: 927-928
- NAID
  130005027682
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] ビルトインセンサによる静電マイクロアクチュエータの変位制御2006
- Author(s)
  林健彦, 福重孝志, 秦誠一, 下河辺明
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集
  
  Pages: 925-926
- NAID
  130005027681
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] MEMS complete blood count sensors designed to reduce noises from electolysis gas2006
- Author(s)
  Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Microelectronic Engineering 83,[4-9]
  
  Pages: 1646-1650
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] MEMS complete blood count sensors designed to recce noises from electolysis gas2006
- Author(s)
  Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Microelectronic Engineering 83, [4-9]
  
  Pages: 1646-1650
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 回転型マイクロアクチュエータ -形状、駆動方法の検討-2006
- Author(s)
  秦誠一, 赤松宏明, 福重孝志, 下河辺明
- Journal Title
  
  2006年度精密工学会春季大会学術講演会講演論文集
  
  Pages: 927-928
- NAID
  130005027682
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Displacement control of an elastic microactuator using a built-in sensor2006
- Author(s)
  Takehiko Hayashi, Takashi Fukushige, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2006 fall meeting of JSPE
  
  Pages: 927-928
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 薄膜金属ガラスを用いた多自由度流体マイクロアクチュエータの提案2005
- Author(s)
  吉田和弘, 堀井宣孝, 秦誠一, 横田眞一, 下河辺明
- Journal Title
  
  日本機械学会関東支部山梨ブロック山梨講演会講演論文集
  
  Pages: 213-214
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A complete blood count micro sensor designed to reduce noise from electrolysis gas2005
- Author(s)
  R.Tanabe, S.Hata, A.Shimokohbe
- Journal Title
  
  Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005)
  
  Pages: 622-623
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses2005
- Author(s)
  Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (CD-ROM)
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] A MEMS Conical Spring Actuator Array2005
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  IEEE/ASME Journal of Microelectromechanical Systems 14,[2]
  
  Pages: 243-253
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystalliztion Temperature2005
- Author(s)
  Junpei sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
- Journal Title
  
  Proc. of 2005 MRS Fall Meeting (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Thin Film Metallic Glasses as New MEMS Materials2005
- Author(s)
  Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Technical Digest of The 18th IEEE International Conference on MEMS 2005
  
  Pages: 479-482
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A MEMS complete blood count sensor with vanes2005
- Author(s)
  Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Proc. of 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems
  
  Pages: 357-361
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses2005
- Author(s)
  Ryusuki Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc. of 2005 MRS Fall Metting (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature2005
- Author(s)
  Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (CD-ROM)
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] Basic Research on an Out-of-plane Rotating Microactuator2005
- Author(s)
  Hiroaki Akamatu, Seiichi Hata, Takashi Fukushige, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2005 spring meeting of JSPE
  
  Pages: 955-956
- NAID
  130004657259
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Thin Film Metallic Glasses as New MEMS Materials2005
- Author(s)
  Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Technical Digest of The 18th IEEE International Conference on MEMS 2005
  
  Pages: 479-482
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成I2005
- Author(s)
  秦誠一, 山内隆介, 桜井淳平, 下河邉明
- Journal Title
  
  2005年秋季第66回応用物理学会学術講演会予稿集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] MEMS用材料としての薄膜金属ガラスとその微細加工2005
- Author(s)
  秦誠一, 桜井淳平, 下河辺明
- Journal Title
  
  日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集
  
  Pages: 18-19
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] Micro blow forming of thin film metallic glass2005
- Author(s)
  Keita Nishigaya, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2005 spring meeting of JSPE
  
  Pages: 477-478
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy2005
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (CD-ROM)
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] A MEMS Conical Spring Actuator Array2005
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  IEEE/ASME Journal of Microelectromechanical Systems 14・2
  
  Pages: 31-42
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成II2005
- Author(s)
  山内隆介, 秦誠一, 桜井淳平, 下河邉明
- Journal Title
  
  2005年秋季第66回応用物理学会学術講演会予稿集
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成II2005
- Author(s)
  山内隆介, 秦誠一, 桜井淳平, 下河邉明
- Journal Title
  
  2005年秋季第66回応用物理学会学術講演会予稿集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy2005
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy2005
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc. of 2005 MRS Fall Meeting (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass2005
- Author(s)
  Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira Shimokohbe
- Journal Title
  
  Proc. of 18th International Congress of Mechanical Engineering (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] MEMS用材料としての薄膜金属ガラスとその微細加工2005
- Author(s)
  秦誠一, 桜井淳平, 下河辺明
- Journal Title
  
  日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集
  
  Pages: 18-19
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 薄膜金属ガラスのマイクロブロー成形2005
- Author(s)
  西ヶ谷啓太, 秦誠一, 桜井淳平, 下河辺明
- Journal Title
  
  2005年度精密工学会春季大会学術講演会講演論文集
  
  Pages: 477-478
- NAID
  130004657459
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature2005
- Author(s)
  Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass2005
- Author(s)
  Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira Shimokohbe
- Journal Title
  
  Proc.of 18th International Congress of Mechanical Engineering (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] The proposal of a multi-flexibility fluid micro-actuator made of thin film metallic glass2005
- Author(s)
  Kazuhiro Yoshida, Yoshinobu Horii, Seiichi Hata, Shinichi Yokota, Akira Shimokohbe
- Journal Title
  
  Proceedings of the Japan Society of Mechanical Engineers Kanto branch Yamanashi block Yamanashi meeting
  
  Pages: 213-214
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A complete blood count micro sensor designed to reduce noise from electrolysis gas2005
- Author(s)
  R.Tanabe, S.Hata, A.Shimokohbe
- Journal Title
  
  Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)
  
  Pages: 622-623
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Thin film metallic glass as MEMS material and its micro fabrication2005
- Author(s)
  Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  The 11th young scientist forum of the Iron and Steel Institute of Japan
  
  Pages: 18-19
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A MEMS complete blood count sensor with vanes2005
- Author(s)
  Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Proc.of 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems
  
  Pages: 357-361
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range2005
- Author(s)
  T.Fukushige, S.Hata, Takehiko Hayashi, A.Shimokohbe
- Journal Title
  
  Proc. IPACK2005 (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 基板面外回転マイクロアクチュエータの基礎研究2005
- Author(s)
  赤松宏明, 秦誠一, 福重孝志, 下河辺明
- Journal Title
  
  2005年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 955-956
- NAID
  130004657259
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] MEMS用材料としての薄膜金属ガラスとその微細加工2005
- Author(s)
  秦誠一, 桜井淳平, 下河辺明
- Journal Title
  
  日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集
  
  Pages: 18-19
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass2005
- Author(s)
  Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa, Akira, Shimokohbe
- Journal Title
  
  Proc.of 18th International Congress of Mechanical Engineering (COBEM 2005) (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range2005
- Author(s)
  T.Fukushige, S.Hata, Takehiko Hayashi, A.Shimokohbe
- Journal Title
  
  Proc.IPACK2005 (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses2005
- Author(s)
  Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (CD-ROM)
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A MEMS Conical Spring Actuator Array, IEEE/ASME Journal of Microelectromechanical Systems2005
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  IEEE/ASME Journal of Microelectromechanical Systems 14, [2]
  
  Pages: 243-253
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Materials Synthesis using Cathodic Arc Plasma Deposition I2005
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2005 Autumn JSAP annual meeting
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成I2005
- Author(s)
  秦誠一, 山内隆介, 桜井淳平, 下河邉明
- Journal Title
  
  2005年秋季第66回応用物理学会学術講演会予稿集
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] Combinatorial Materials Synthesis using Cathodic Arc Plasma Deposition II2005
- Author(s)
  Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2005 Autumn JSAP annual meeting
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Integrated conical spring linear actuators for tilting-mirror applications2005
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)
  
  Pages: 12-13
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] アナログ的基板面外変位静電マイクロアクチュエータ2004
- Author(s)
  秦誠一, 林健彦, 福重孝志, 下河辺明
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 887-888
- NAID
  130004655810
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 薄膜金属ガラスを用いた微細中空構造の製作-窒化銅を発ガス材として用いたマイクロブロー成形-2004
- Author(s)
  西ヶ谷啓太, 秦誠一, 桜井淳平, 下河辺明
- Journal Title
  
  2004年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 555-556
- NAID
  130004655626
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Fabrication of micro hollow structure using thin film metallic glass - Micro blow molding using Cu_3N as outgas material -2004
- Author(s)
  Keita Nishigaya, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2004 fall meeting of JSPE
  
  Pages: 555-556
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking2004
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)
  
  Pages: 15-16
- NAID
  130004656508
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking2004
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  Proceedings of European Society for Precision Engineering and Nanotechnology
  
  Pages: 15-16
- NAID
  130004656508
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 2-DOF thin film metallic glss microactuator2004
- Author(s)
  S.Hata, H.W.JEONG, A.Shimokohbe
- Journal Title
  
  Proceedings of European Society for Precision Engineering and Nanotechnology
  
  Pages: 9-10
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 2-DOF thin film metallic glass microactuator2004
- Author(s)
  S.Hata, H.W.JEONG, A.Shimokohbe
- Journal Title
  
  Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)
  
  Pages: 9-10
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] An out-of-plane analog motion electrostatic microactuator2004
- Author(s)
  Seiichi Hata, Takehiko Hayashi, Takashi Fukushige, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2004 fall meeting of JSPE
  
  Pages: 877-888
- NAID
  130004655810
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Novel fabrication method of metallic glass thin film using carousel type sputtering system2004
- Author(s)
  J.Sakurai, S.Hata, A.Shimokohbe
- Journal Title
  
  Proc.Smart Materials, Nano- and Micro-Smart Systems CD-ROM
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Novel fabrication method of metallic glass thin film using carousel type sputtering system2004
- Author(s)
  J.Sakurai, S.Hata, A.Shimokohbe
- Journal Title
  
  Proc. of SPIE Micro- and Nanotechnology : Materials, Processes, Packaging, and Systems II
  
  Pages: 260-267
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Novel fabrication method of metallic glass thin film using carousel type sputtering system2004
- Author(s)
  J.Sakurai, S.Hata, A.Shimokohbe
- Journal Title
  
  Proc. Smart Materials, Nano- and Micro-Smart Systems (CD-ROM)
- Data Source
  KAKENHI-PROJECT-16686010
[Journal Article] 新しい静電型MEMSアクチュエータ=円すいばねMEMSアクチュエータとその固着防止駆動法=2004
- Author(s)
  秦誠一, 福重孝志
- Journal Title
  
  光アライアンス 15
  
  Pages: 19-26
- NAID
  40006431706
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A new driving method for electrostatic MEMS actuators to prevent sticking2004
- Author(s)
  Takashi Fukushige, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2004 spring meeting of JSPE
  
  Pages: 1129-1130
- NAID
  130004656508
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 静電型MEMSアクチュエータの新しい固着防止駆動方法2004
- Author(s)
  福重孝志, 秦誠一, 下河辺明
- Journal Title
  
  2004年度精密工学会春季大会学術講演会講演論文集
  
  Pages: 1129-1130
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] The Application of Thin Film Metallic Glasses to 3D Micro Actuators2003
- Author(s)
  Seiichi Hata
- Journal Title
  
  Proceedings of International Symposium on Smart Actuators and Sensors
  
  Pages: 1-8
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] On-Chip Variable Inductor Using Microelectromechanical Systems Technology2003
- Author(s)
  Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU, Akira SHIMOKOHBE
- Journal Title
  
  Jpn.J.Appl.Phys. 42
  
  Pages: 2190-2192
- NAID
  10010801393
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] CuTi合金スパッタ薄膜の機械的特性及び電気抵抗率に及ぼす時効の効果2003
- Author(s)
  桜井淳平, 秦誠一, 下河辺明
- Journal Title
  
  日本金属学会講演概要
  
  Pages: 541-541
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] On-Chip Variable Inductor Using Microelectromechanical Systems Technology2003
- Author(s)
  Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU, Akira SHIMOKOHBE
- Journal Title
  
  Jpn. J. Appl. Phys 42
  
  Pages: 2190-2192
- NAID
  10010801393
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] High output force and high integrated out-of-plane microactuator2003
- Author(s)
  Takashi Fukushige, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2003 fall meeting of JSPE
  
  Pages: 576-576
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Effect of prescription for mechanical property and electric resistivity of a CuTi alloy weld slag thin film.2003
- Author(s)
  Junpei Sakurai, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Proceedings of JMRS
  
  Pages: 541-541
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Fabrication of micro hollow structure using thin film metallic glass - Improvement of fabrication process and discussion of deformation mechanism -2003
- Author(s)
  Seiichi Hata, Takashi Yamanaka, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2003 fall meeting of JSPE
  
  Pages: 575-575
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 高出力・高集積基板面外駆動マイクロアクチュエータ2003
- Author(s)
  福重孝志, 秦誠一, 下河辺明
- Journal Title
  
  2003年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 576-576
- NAID
  130005026972
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 薄膜金属ガラスを用いた集積化マイクロプローブ(第2報) -薄膜金属ガラスの低電気抵抗化-2003
- Author(s)
  桜井淳平, 秦誠一, 下河辺明
- Journal Title
  
  2003年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 391-391
- NAID
  130005026769
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Reduction of electrical resistivity in PdCuSi thin film metallic glass2003
- Author(s)
  J.Sakurai, S.Hata, A.Shimokohbe
- Journal Title
  
  Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (CD-ROM)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Micro dome shape structures made of thin film metallic glass2003
- Author(s)
  Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Micro System Technology 2003
  
  Pages: 180-187
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Large-output-force out-of-plane MEMS actuator array2003
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology 5276
  
  Pages: 240-248
- NAID
  130005026972
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 薄膜金属ガラスを用いた微細中空構造の製作-プロセスの改良と変形に関する考察-2003
- Author(s)
  秦誠一, 山中崇, 桜井淳平, 下河辺明
- Journal Title
  
  2003年度精密工学会秋季大会学術講演会講演論文集
  
  Pages: 575-575
- NAID
  130005026971
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Integrated micro probe made of thin film metallic glass - low resistivity of thin film metallic glass -2003
- Author(s)
  Junpei Sakurai, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  Proceedings of 2003 fall meeting of JSPE
  
  Pages: 391-391
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Them Application of Thin Film Metallic Glasses to 3D Micro Actuators,2003
- Author(s)
  Seiichi Hata
- Journal Title
  
  Proceedings of International Symposium on Smart Actuators and Sensors
  
  Pages: 1-8
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Integrated conical spring linear actuators for tilting-mirror applications
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005) (2005.9 Vienna, Austria)
  
  Pages: 12-13
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators
- Author(s)
  Takashi Fukushige, Takehiko Hayashi, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines (in press)
- NAID
  10019289577
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Large-output-force out-of-plane MEMS actuator array
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology (2003.12.Perth, Australia) vol.5276
  
  Pages: 240-248
- NAID
  130005026972
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] 2-DOF thin film metallic glass microactuator
- Author(s)
  S.Hata, H.W.JEONG, A.Shimokohbe
- Journal Title
  
  Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) (2004.6.Glasgow, Scotland)
  
  Pages: 9-10
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking
- Author(s)
  T.Fukushige, S.Hata, A.Shimokohbe
- Journal Title
  
  Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) (2004.6.Glasgow, Scotland)
  
  Pages: 15-16
- NAID
  130004656508
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Micro dome shape structures made of thin film metallic glass
- Author(s)
  Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Micro System Technology 2003 (MST '03) (2003.10.7-8 Munich, Germany)
  
  Pages: 180-187
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A complete blood count micro sensor designed to reduce noise from electrolysis gas
- Author(s)
  R.Tanabe, S.Hata, A.Shimokohbe
- Journal Title
  
  Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005) (2005.9 Vienna, Austria)
  
  Pages: 622-623
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Thin Film Metallic Glasses as New MEMS Materials
- Author(s)
  Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Technical Digest of The 18th IEEE International Conference on MEMS 2005 (2005.1. Miami, USA)
  
  Pages: 479-482
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses
- Author(s)
  Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A MEMS complete blood count sensor with vanes for reduction in influence of electrolysis gas
- Author(s)
  Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines (in press)
- NAID
  10017600546
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Novel fabrication method of metallic glass thin film using carousel type sputtering system
- Author(s)
  J.Sakurai, S.Hata, A.Shimokohbe
- Journal Title
  
  Proc.of SPIE Micro- and Nanotechnology : Materials, Processes, Packaging, and Systems II (2004.12. Sydney, Australia)
  
  Pages: 260-267
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass
- Author(s)
  Ryusuke YAMAUCHI, Seiichi HATA, Junpei SAKURAI, Akira SHIMOKOHBE
- Journal Title
  
  Jpn. J. Appl. Phys. (in press)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature
- Author(s)
  Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi, Akira Shimokohbe
- Journal Title
  
  Proc.of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Reduction of electrical resistivity in PdCuSi thin film metallic glass
- Author(s)
  J.Sakurai, S.Hata, A.Shimokohbe
- Journal Title
  
  Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM'03) (2003.9.10-12 Nagoya, Japan) (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] A MEMS complete blood count sensor with vanes for reduction in influence of electrolysis gas
- Author(s)
  Rikiya Tanabe, Seiichi Hata, Akira Shimokhobe
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines. (in press)
- NAID
  10017600546
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass
- Author(s)
  Ryusuke YAMAUCHI, Seiichi HATA, Junpei SAKURAI, Akira SHIMOKOHBE
- Journal Title
  
  Jpn.J.Appl.Phys. (in press)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators
- Author(s)
  Takashi Fukushige, Takehiko Hayashi, Seiichi Hata, Akira Shimokohbe
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines. (in press)
- NAID
  10019289577
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Journal Article] Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range
- Author(s)
  T.Fukushige, S.Hata, Takehiko Hayashi, A.Shimokohbe
- Journal Title
  
  Proc.IPACK2005 (2005.6. San Francisco, USA) (CD-ROM)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Patent] コンビナトリアルマテリアル用評価基板2010
- Inventor(s)
  秦誠一, 山内隆介, 桜井淳平, 下河辺明
- Industrial Property Rights Holder
  東京工業大学
- Acquisition Date
  2010-08-06
- Data Source
  KAKENHI-PROJECT-20676002
[Patent] 相転移する試料の相転移条件の測定方法およびそのための測定装置2008
- Inventor(s)
  秦誠一, 桜井淳平, 青野祐子
- Industrial Property Rights Holder
  東京工業大学
- Patent Publication Number
  2010-048618
- Filing Date
  2008-08-20
- Data Source
  KAKENHI-PROJECT-20676002
[Patent] 相転移する試料の相転移条件の測定方法およびそのための測定装置2008
- Inventor(s)
  秦誠一, 桜井淳平, 青野祐子
- Industrial Property Rights Holder
  東京工業大学
- Industrial Property Number
  2008-107948
- Filing Date
  2008-04-17
- Data Source
  KAKENHI-PROJECT-20676002
[Patent] CORROSION-RESISTANT HEAT-RESISTANT ALL OY FOR MOLDING DIE AND DIE FOR MOLDING OPTICAL DEVICE2007
- Inventor(s)
  Hata Seiichi, Sakurai Junpei, Shimokohbe Akira, Hosoe Shigeru, Nabeta Hiroyuki
- Industrial Property Rights Holder
  東京工業大学, コニカミノルタオプト
- Filing Date
  2007-04-26
- Overseas
- Data Source
  KAKENHI-PROJECT-19360063
[Patent] 熱特性測定装置, 及び熱特性測定方法2005
- Inventor(s)
  秦誠一, 桜井淳平, 山内隆介, 下河辺明
- Industrial Property Rights Holder
  東京工業大学
- Industrial Property Number
  2005-157876
- Filing Date
  2005-05-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Patent] ガラス転移温度測定装置, 及びガラス転移温度測定方法2005
- Inventor(s)
  秦誠一, 桜井淳平, 下河辺明
- Industrial Property Rights Holder
  東京工業大学
- Industrial Property Number
  2005-157869
- Filing Date
  2005-05-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Patent] ガラス転移温度測定装置,及びガラス転移温度測定方法2005
- Inventor(s)
  秦誠一, 桜井淳平, 下河辺明
- Industrial Property Rights Holder
  理工学振興会
- Industrial Property Number
  2005-157869
- Filing Date
  2005-04-28
- Data Source
  KAKENHI-PROJECT-15206015
[Patent] マイクロ中空デバイス及びCBCセンサ並びにそれらの製造方法2005
- Inventor(s)
  田邊力也, 秦誠一, 下河辺明
- Industrial Property Rights Holder
  東京工業大学
- Industrial Property Number
  2005-238268
- Filing Date
  2005-08-19
- Data Source
  KAKENHI-PROJECT-15206015
[Patent] コンビナトリアルマテリアル用評価基板2005
- Inventor(s)
  秦誠一, 山内隆介, 桜井淳平, 下河辺明
- Industrial Property Rights Holder
  東京工業大学
- Industrial Property Number
  2005-131915
- Filing Date
  2005-04-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206015
[Patent] コンビナトリアルマテリアル用評価基板2005
- Inventor(s)
  秦誠一, 桜井淳平, 山内隆介, 下河辺明
- Industrial Property Rights Holder
  東京工大学
- Industrial Property Number
  2005-131915
- Filing Date
  2005-04-28
- Data Source
  KAKENHI-PROJECT-16686010
[Patent] 熱特性測定装置,及び熱特性測定方法2005
- Inventor(s)
  秦誠一, 桜井淳平, 山内隆介, 下河辺明
- Industrial Property Rights Holder
  理工学振興会
- Industrial Property Number
  2005-157876
- Filing Date
  2005-05-30
- Data Source
  KAKENHI-PROJECT-15206015
[Patent] ガラス転移温度測定装置,及びガラス転移温度測定方法2005
- Inventor(s)
  秦誠一, 桜井淳平, 山内隆介, 下河辺明
- Industrial Property Rights Holder
  理工学振興会
- Industrial Property Number
  2005-157869
- Filing Date
  2005-04-28
- Data Source
  KAKENHI-PROJECT-16686010
[Patent] 熱特性測定装置,及び熱特性測定方法2005
- Inventor(s)
  秦誠一, 桜井淳平, 山内隆介, 下河辺明
- Industrial Property Rights Holder
  理工学振興会
- Industrial Property Number
  2005-157876
- Filing Date
  2005-05-30
- Data Source
  KAKENHI-PROJECT-16686010
[Patent] コンビナトリアルマテリアル用評価基板2005
- Inventor(s)
  秦誠一, 山内隆介, 桜井淳平, 下河辺明
- Industrial Property Rights Holder
  東京工業大学
- Industrial Property Number
  2005-131915
- Filing Date
  2005-04-28
- Data Source
  KAKENHI-PROJECT-15206015
[Presentation] MEMSに向けたNi-Nb-Zr薄膜非晶質合金製ダイアフラムの内部応力制御2022
- Author(s)
  謝靖蘭，羽賀冬樹，山崎貴大，岡智絵美，秦誠一，櫻井淳平
- Organizer
  日本機械学会 2022年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Combinatorial search and evaluation for new Ti?Ni?Hf high formable shape memory alloys2022
- Author(s)
  Yishu Wang, Shin Inoue, Chiemi Oka, Seiichi Hata, Junpei Sakurai
- Organizer
  International Conference on Materials & Processing 2022 (ICM&P 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 熱処理による構造緩和を利用した薄膜金属ガラス製静電容量形圧力センサの評価2022
- Author(s)
  大塚穂高，二関隆史，岡智絵美，秦誠一，櫻井淳平
- Organizer
  応用物理学会第13回集積化MEMSワークショップ
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 反力可変触覚ディスプレイ用アクチュエータの駆動特性に及ぼす触知ピン形状の影響2022
- Author(s)
  村瀨正憲，南原圭汰，岡智絵美，秦誠一，櫻井淳平
- Organizer
  第14回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] The effect of alloy composition on beta-relaxation of Ni-Nb-Zr thin film amorphous alloys2022
- Author(s)
  Jinglan Xie, Fuyuki Haga, Chiemi Oka, Seiichi Hata, Junpei Sakurai
- Organizer
  International Symposium on Micro-Nano Mechatronics and Human Science (MHS 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Novel Measurement Method of Internal Stress in Thin Films Using Micro Spring Structure2022
- Author(s)
  Shun Takase, Takahiro Yamazaki, Chiemi Oka, Junpei Sakurai, Seiichi Hata
- Organizer
  International Conference on Materials & Processing 2022 (ICM&P 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Fabrication and evaluation of capacitive pressure sensor using thin film metallic glass2022
- Author(s)
  H. Osuka, T. Ninoseki, C. Oka, S. Hata, J. Sakurai
- Organizer
  35th International Microprocesses and Nanotechnology Conference (MNC2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 反力可変触覚ディスプレイ用アクチュエータの駆動特性2022
- Author(s)
  村瀨正憲，南原圭汰，岡智絵美，秦誠一，櫻井淳平
- Organizer
  応用物理学会第13回集積化MEMSワークショップ
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Combinatorial search and evaluation for new Ti- Ni?Hf high formable shape memory alloys2022
- Author(s)
  Yishu Wang, Shin Inoue, Chiemi Oka, Seiichi Hata, Junpei Sakurai
- Organizer
  The 7th International Symposium on Biomedical Engineering (ISBE 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] MEMS デバイスを利用したNi基薄膜金属ガラスの内部応力測定2022
- Author(s)
  高瀬駿，岡智絵美，櫻井淳平，秦誠一
- Organizer
  第14回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Controlling internal stress of Ni-Nb-Zr thin film amorphous alloy diaphragms by beta-relaxation annealing2022
- Author(s)
  Jinglan Xie, Fuyuki Haga, Chiemi Oka, Seiichi Hata, Junpei Sakurai
- Organizer
  International Conference on Materials & Processing 2022 (ICM&P 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 薄膜金属ガラス製静電容量形圧力センサの作製と評価2022
- Author(s)
  大塚穂高，二関隆史，岡智絵美，秦誠一，櫻井淳平
- Organizer
  2022年電気学会 E部門総合研究会マイクロマシン・センサシステム研究会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Effect of tactile pin height on driving characteristics using high formable shape-memory alloy for reaction force variable tactile displays2022
- Author(s)
  Masanori Murase, Keita Nambara, Chiemi Oka, Seiichi Hata, Junpei Sakurai
- Organizer
  International Conference on Materials & Processing 2022 (ICM&P 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Combinatorial Search for Chlorine Evolution Electrode Catalyst using Bayesian optimization2022
- Author(s)
  Junpei Sakurai, Kimihiko Sugiura, Chiemi Oka, Seiichi Hata
- Organizer
  11th International Workshop on Combinatorial Materials Science and Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] HFSMAを用いたナノ繊毛構造体の作製2021
- Author(s)
  佐藤寛太，山崎貴大，岡智絵美，秦誠一，櫻井淳平
- Organizer
  日本機械学会2021年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 高成形性形状記憶合金を用いたナノ繊毛構造体の作製に向けた基礎検討2021
- Author(s)
  佐藤寛太，山崎貴大，岡智絵美，秦誠一，櫻井淳平
- Organizer
  日本機械学会2021年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 反力可変受動形触覚ディスプレイ用新規アクチュエータの駆動特性2021
- Author(s)
  村瀬正憲，南原圭汰，山崎貴大，岡智絵美，秦誠一，櫻井淳平
- Organizer
  日本機械学会2021年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索2021
- Author(s)
  井上慎，岡智絵美，秦誠一，櫻井淳平
- Organizer
  形状記憶合金協会第11期定時総会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 微細加工を応用したAI時代の材料探索2021
- Author(s)
  秦誠一
- Organizer
  日本機械学会2021年度年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 薄膜金属ガラスを用いた自立微細構造体の基礎検討2021
- Author(s)
  大西拓也，永井伶於，山崎貴大，岡智絵美，櫻井淳平，秦誠一
- Organizer
  日本機械学会2021年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] AIとコンビナトリアル技術を用いた新機能性材料・新磁歪材料の探索2021
- Author(s)
  秦誠一
- Organizer
  第29回磁気応用技術シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] MEMS構造体を利用した薄膜内部応力の測定2021
- Author(s)
  高瀬駿，山崎貴大，岡智絵美，櫻井淳平，秦誠一
- Organizer
  日本機械学会2021年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Ti-Ni-Cu高成形性形状記憶合金を用いた，反力可変受動形触覚ディスプレイ用触知ピンの作製2020
- Author(s)
  南原圭汰, 伊木啓一郎, 岡智絵美, 秦誠一, 櫻井淳平
- Organizer
  日本機械学会2020年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 逆リフトオフ法を用いた MEMS ミラーデバイスの作製2020
- Author(s)
  高瀬駿，山田恭平，中川優希，山崎貴大，岡智絵美，櫻井淳平, 秦誠一
- Organizer
  第28回機械材料・材料加工技術講演会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Ti-Ni-Cu高成形性形状記憶合金を用いた，反力可変受動形触覚ディスプレイ用触知ピンの作製及び駆動評価2020
- Author(s)
  南原圭汰, 伊木啓一郎, 岡智絵美, 秦誠一, 櫻井淳平
- Organizer
  第28回機械材料・材料加工技術講演会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Ti-Ni-Cu高成形性形状記憶合金のソフトアクチュエータへの基礎検討2020
- Author(s)
  浅井泰平，青山椋佑，岡智絵美，櫻井淳平，秦誠一
- Organizer
  第28回機械材料・材料加工技術講演会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Plasma analysis of the FAB source for the SAB process by PIC-MCC simulation2020
- Author(s)
  Ryo Morisaki , Takahiro Yamazaki , Chiemi Oka , Junpei Sakurai , Takami Hirai , Tomonori Takahashi , Hiroyuki Tsuji , Noriyasu Ohno , and Seiichi Hata
- Organizer
  33rd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 薄膜金属ガラスの大気中結晶化評価法の基礎検討2019
- Author(s)
  鬼頭直希，櫻井淳平，岡智絵美，林裕美，山崎宏明，秦誠一
- Organizer
  精密工学会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 表面活性化接合用新規高速原子ビームガン2019
- Author(s)
  森崎諒，岡智絵美，櫻井淳平，平井隆巳，高橋知典，辻裕之，秦誠一
- Organizer
  精密工学会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] Development and evaluation of the novel FAB gun2019
- Author(s)
  Ryo Morisaki, Yuuki Hirai, Junpei Sakurai, Mizue Mizoshiri, Chiemi Oka, Takami Hirai, Tomonori Takahashi, Hiroyuki Tsuji and Seiichi Hata
- Organizer
  19th International Conference & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 逆リフトオフ法を用いたMEMSミラー構造体の作製2019
- Author(s)
  山田恭平，中川優希，岡智絵美，櫻井淳平，吉田沙織，清元智文，秦誠一
- Organizer
  日本機械学会2019年度年次大会
- Data Source
  KAKENHI-PROJECT-19H02040
[Presentation] 集積化MEMSデバイスを用いた磁歪材料のハイスループット評価（測定系の自動化と高精度化の検討）2018
- Author(s)
  橋本英明，前谷卓也，溝尻瑞枝，櫻井淳平，秦誠一
- Organizer
  日本機械学会東海支部第６７期総会・講演会
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] 磁歪材料ハイスループット評価用MEMS集積化ライブラリ製作(評価基板におけるめっき膜厚の均一化)2018
- Author(s)
  小林義典，本川侑季，前谷卓也，溝尻瑞枝，櫻井淳平，秦誠一
- Organizer
  日本機械学会東海支部第６７期総会・講演会
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] Internal stress control of diaphragm structure made of the thin film metallic glasses2018
- Author(s)
  Ryuji Ishiki, Chiemi Oka, Junpei Sakurai, Yu-Ching Lin, Seiichi Hata
- Organizer
  The 5th Asian Symposium on Material and Processing 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] A new method to solve the problem of surface activated bonding2018
- Author(s)
  Ryo Morisaki, Yuki Hirai, Junpei Sakurai, Seiichi Hata
- Organizer
  The 2nd Taiwan-Japan Joint Symposium in Taiwan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] Basic research on micro processing characteristics of reverse lift-off process2018
- Author(s)
  Yuki Nakagawa, Kyohei Yamada, Mizue Mizoshiri, Chiemi Oka, Junpei Sakurai, Seiichi Hata
- Organizer
  29th 2018 International Symposium on Micro-NanoMechatronics and Human Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] Processing characteristics of reverse lift-off process2018
- Author(s)
  Kyohei Yamada, Yuki Nakagawa, Chiemi Oka, Junpei Sakurai, Seiichi Hata
- Organizer
  The 2nd Taiwan-Japan Joint Symposium in Taiwan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] SOI-MEMSデバイスを用いた磁気特性のコンビナトリアル評価2017
- Author(s)
  前谷卓哉，本川侑季，溝尻瑞枝，秦誠一，櫻井淳平
- Organizer
  日本機械学会２０１７年度年次大会
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] FABRICATION OF A NOVEL NANOPOROUS FILM BY CHEMICAL DEALLOYING OF CU-CR AND ITS APPLICATION FOR A SENSOR2017
- Author(s)
  Yusuke Yoshii, Junpei Sakurai, Mizue Mizoshiri, Seiichi Hata
- Organizer
  IEEE MEMS2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] 磁性材料の磁化特性に関するハイスループット評価2017
- Author(s)
  前谷卓哉，本川侑季，小林義典，櫻井淳平，溝尻瑞枝，秦誠一
- Organizer
  iJSME2017
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] 磁歪材料のコンビナトリアル探索用SOI-MEMSデバイス製作2017
- Author(s)
  本川侑季，前谷卓哉，溝尻瑞枝，秦誠一，櫻井淳平
- Organizer
  日本機械学会２０１７年度年次大会
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] COMBINATORIAL SEARCH OF A CU-CR COMPOSITION CONDITION AND FABRICATION OF A NEW NANOPOROUS FILM BY DEALLOYING OF CU-CR2017
- Author(s)
  Yusuke Yoshii, Junpei Sakurai, Mizue Mizoshiri, Seiichi Hata
- Organizer
  2017 MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] 新奇金属系マイクロマシン・センサ材料とその微細加工2016
- Author(s)
  秦　誠一，溝尻瑞枝，櫻井淳平
- Organizer
  第33回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  平戸文化センター，平戸
- Year and Date
  2016-10-24
- Invited
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] 逆リフトオフプロセスの加工特性とマイクロミラーデバイスへの応用2016
- Author(s)
  秦誠一
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  九州大学
- Year and Date
  2016-09-13
- Invited
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] リアルメカトロニクスを目指すマルチマテリアル・マルチスケール３Ｄ造形技術2016
- Author(s)
  秦　誠一，溝尻瑞枝
- Organizer
  第65回高分子討論会
- Place of Presentation
  神奈川大学
- Year and Date
  2016-09-16
- Invited
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] SOI基板を用いたコンビナトリアル探索用カンチレバーデバイス製作2016
- Author(s)
  前谷卓哉，本川侑季，櫻井淳平，溝尻瑞枝，秦誠一
- Organizer
  第２回日本機械学会イノベーション講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2016-11-25
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] 薄膜金属ガラスを用いたマイクロ構造体の内部応力制御2016
- Author(s)
  安部修平，前谷卓哉, 溝尻瑞枝, 櫻井淳平, 秦　誠一
- Organizer
  日本機械学会2016年度年次大会
- Place of Presentation
  九州大学
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16H04300
[Presentation] バイオレジストを用いたマイクロバルブの流量特性2015
- Author(s)
  高桑暁，伊藤啓太郎，溝尻瑞枝，櫻井淳平，新井史人，秦　誠一
- Organizer
  日本機械学会　2015年度年次大会
- Place of Presentation
  北海道大学
- Year and Date
  2015-09-16
- Data Source
  KAKENHI-PROJECT-26630095
[Presentation] 金属系材料と新発想プロセスによるＭＥＭＳ，マイクロデバイスの実現2015
- Author(s)
  秦　誠一
- Organizer
  第83回レーザ加工学会講演会
- Place of Presentation
  大阪大学
- Year and Date
  2015-06-12
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26630095
[Presentation] 新規ドラッグデリバリーシステムに用いるマイクロバルブの流量評価2015
- Author(s)
  高桑暁，伊藤啓太郎，溝尻瑞枝，櫻井淳平，新井史人，秦　誠一
- Organizer
  第1回日本機械学会イノベーション講演会
- Place of Presentation
  広島大学
- Year and Date
  2015-11-15
- Data Source
  KAKENHI-PROJECT-26630095
[Presentation] Integration of combinatorial evaluation and MEMS technology for material search2012
- Author(s)
  Seiichi Hata
- Organizer
  2012International Symposium on Micro-NanoMechatronics and Human Science (MHS 2012)
- Place of Presentation
  Nagoya Univ., Nagoya, Japan (Invited)
- Year and Date
  2012-11-06
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] マイクロ・ナノ材料開発最前線-MEMSでマイクロ・ナノ材料を開発する-2012
- Author(s)
  秦誠一
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢大学,金沢(Invited)
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Fabrication Method of Cu-Zr-Ti Thick Film Structure of Metallic Glass2012
- Author(s)
  Shigetaka Watanabe, Junpei Sakurai, Yutaka Nakamistu, Seiichi Hata
- Organizer
  3rd Asian Symposium on Materials and Processing
- Place of Presentation
  Indian Institute of Technology Madras, Chennai, India
- Year and Date
  2012-08-31
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] 薄膜金属ガラスCu-Zr-Ti超厚膜構造体の製作2012
- Author(s)
  渡辺茂高, 桜井淳平, 中光豊, 秦誠一
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢大学,金沢
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] ガラス成形金型コーティング材料のコンビナトリアル探索2012
- Author(s)
  高橋直也, 桜井淳平, 中光豊, 秦誠一
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢大学,金沢
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Combinatorial New Facing Targets Sputtering2012
- Author(s)
  Takuya Maetania, Naoya Moria, Yutaka Nakamitsua, Seiichi Hata
- Organizer
  2012 MRS Spring Meeting
- Place of Presentation
  San Francisco, USA
- Year and Date
  2012-04-10
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] マイクロ・ナノ材料開発最前線-MEMSでマイクロ・ナノ材料を開発する-2012
- Author(s)
  秦誠一
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢大学,金沢
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] 電鋳リフトオフプロセスによる厚膜パターニング2012
- Author(s)
  萩山拓也, Tso-Fu Mark Chang, 曽根正人, 秦誠一
- Organizer
  第4回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  北九州国際会議場,福岡
- Year and Date
  2012-10-22
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] 金属ガラス厚膜微細構造体の新しい微細加工法2012
- Author(s)
  秦誠一
- Organizer
  平成24年度粉体粉末冶金協会秋季大会
- Place of Presentation
  立命館大学,滋賀
- Year and Date
  2012-11-20
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Combinatorial Search In Thin Film Alloys For Coating Materials Of Optical Glass Lenses Molding2012
- Author(s)
  Naoya Takahashi, Junpei Sakurai, Yutaka Nakamitsu, Seiichi Hata
- Organizer
  3rd Asian Symposium on Materials and Processing
- Place of Presentation
  Indian Institute of Technology Madras, Chennai, India
- Year and Date
  2012-08-31
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] New Facing Targets Sputter - etching for MEMS Materials2012
- Author(s)
  Yutaka Nakamitsu, Sadao. Kadokura, Seiichi. Hata
- Organizer
  2012 MRS Spring Meeting
- Place of Presentation
  San Francisco, USA
- Year and Date
  2012-04-10
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] 新対向ターゲット式スパッタ法を用いた磁性薄膜のコンビナトリアル成膜2012
- Author(s)
  前谷卓哉, 中光豊, 桜井淳平, 秦誠一
- Organizer
  日本機械学会2012年度年次大会
- Place of Presentation
  金沢大学,金沢
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Combinatorial Sputtering And Evaluation Of Fe-Ni-Cr For Sensors2012
- Author(s)
  Takuya Maetani, Yutaka Nakamitsu, Junpei Sakurai, Sigeki Nakagawa, Seiichi Hata
- Organizer
  3rd Asian Symposium on Materials and Processing
- Place of Presentation
  Indian Institute of Technology Madras, Chennai, India
- Year and Date
  2012-08-30
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Integration of combinatorial evaluation and MEMS technology for material search2012
- Author(s)
  Seiichi Hata
- Organizer
  2012 International Symposium on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  Nagoya Univ., Nagoya, Japan
- Year and Date
  2012-11-06
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Search for Ni-Nb-Zr-X amorphous alloys for glass lens molding die materials2011
- Author(s)
  Jiang S., Abe M., Ando M., Aono Y., Sakurai J., Hata S.
- Organizer
  SME/ASME 2011 International Conference on Materials and Processing (ICM&P 2011)
- Place of Presentation
  Corvallis, OR
- Year and Date
  2011-06-15
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples2010
- Author(s)
  Yuko Aono, Junpei Sakurai, Akira Shimokohbe, Seiichi Hata
- Organizer
  Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing
- Place of Presentation
  Cairns, Australia
- Year and Date
  2010-08-15
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] サーモグラフィによる結晶化開始温度のコンビナトリアル評価のための新薄膜ライブラリの検討2010
- Author(s)
  青野祐子, 桜井淳平, 下河辺明, 秦誠一
- Organizer
  2010年春期第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学
- Year and Date
  2010-03-20
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Combinatorial Technology on Searching for Novel Amorphous Alloys2010
- Author(s)
  Seiichi Hata, Junpei Sakurai, Y. Aono, N. Tamujidi, Y. Matsumoto and A. Shimokohbe
- Organizer
  The 6th International Workshop on Combinatorial Materials Science and Technology
- Place of Presentation
  Hokkaido, Japan (Invited)
- Year and Date
  2010-10-21
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Combinatorial searching for Ni-Nb-Zr amorphous alloys as glass lens molding die materials2010
- Author(s)
  J.Sakurai, M.Abe, M.Ando, S.Hata
- Organizer
  Abstracts International Conference on Precision Engineering, 62
- Place of Presentation
  Singapore
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Temperature gradient heating system for high-throughput method for determining time-temperature-transformation diagram using thin film samples2010
- Author(s)
  Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe, Seiichi Hata
- Organizer
  The 6th International Workshop on Combinatorial Materials Science and Technology
- Place of Presentation
  Hokkaido, Japan
- Year and Date
  2010-10-21
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Combinatorial searching for Ni-Nb-Zr amorphous alloys as glass lens molding die materials2010
- Author(s)
  Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Seiichi Hata
- Organizer
  Program & Abstracts International Conference on Precision Engineering
- Place of Presentation
  Singapore, Singapore
- Year and Date
  2010-07-08
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Combinatorial Technology on Searching for Novel Amorphous Alloys2010
- Author(s)
  Seiichi Hata, Junpei Sakurai, Y.Aono, N.Tamujidi, Y.Matsumoto, A.Shimokohbe
- Organizer
  The 6th International Workshop on Combinatorial Materials Science and Technology
- Place of Presentation
  Hokkaido, Japan
- Year and Date
  2010-10-21
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] サーモグラフィを用いた薄膜アモルファス合金の結晶化開始温度のコンビナトリアル評価法2009
- Author(s)
  青野祐子, 桜井淳平, 秦誠一, 下河辺明
- Organizer
  2009年春季第56回応用物理学関連連合講演会講演予稿集No.2
- Place of Presentation
  筑波大学
- Year and Date
  2009-04-02
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] サーモグラフィによる薄膜アモルファス合金ライブラリの結晶化開始温度測定法2009
- Author(s)
  青野祐子, 秦誠一, 桜井淳平, 下河辺明
- Organizer
  第17回機械材料・材料加工技術講演会論文集
- Place of Presentation
  富山
- Year and Date
  2009-11-07
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] ガラス成形金型用Ptフリー非晶質合金のコンビナトリアル探索2009
- Author(s)
  秦誠一, 桜井淳平, 阿部充博, 安藤正将, 青野祐子, 下河辺明
- Organizer
  第17回機械材料・材料加工技術講演会論文集
- Place of Presentation
  富山
- Year and Date
  2009-11-07
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] 高機能ガラスレンズ金型材料の探索III2009
- Author(s)
  桜井淳平, 秦誠一, 阿部充博, 青野祐子, 下河辺明.
- Organizer
  2009年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  神戸大学
- Year and Date
  2009-09-11
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Novel Crystallization Temperature Measurement Method for Combinatorial Evaluation using Infrared Thermography2009
- Author(s)
  Yuko Aono, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Organizer
  Proc.of 2009 MRS Spring Meeting
- Place of Presentation
  San Francisco, USA
- Year and Date
  2009-04-15
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] 高機能ガラスレンズ金型用Pt基非晶質合金の探索2009
- Author(s)
  桜井淳平, 秦誠一, 山内隆介, 青野祐子, 下河辺明
- Organizer
  第17回機械材料・材料加工技術講演会論文集
- Place of Presentation
  富山
- Year and Date
  2009-11-07
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] 赤外線カメラを用いたアモルファス合金の結晶化開始温度測定2008
- Author(s)
  青野祐子・桜井淳平・秦誠一
- Organizer
  2008年春季第55回応用物理学関連連合講演会
- Place of Presentation
  東京
- Year and Date
  2008-03-17
- Data Source
  KAKENHI-PROJECT-19656066
[Presentation] Search for Novel MEMS Materials using a Combinatorial Method2008
- Author(s)
  Seiichi Hata, Ryusuke Yamauchi, Taiyo Ueshima, Junpei Sakurai, Akira Shimokohbe
- Organizer
  3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008)
- Place of Presentation
  Northwestern, Evanston, USA
- Year and Date
  2008-10-09
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] New Measurement Method for Crystallization Temperature of Thin Film Amorphous Alloy2008
- Author(s)
  Yuko Aono, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
- Organizer
  JUNIOR EUROMAT 2008
- Place of Presentation
  Lausanne, Switzerland
- Year and Date
  2008-06-15
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] Need-based development of materials for micro and nano scale stractures using combinatorial technology2008
- Author(s)
  Seiichi Hata, Yuko Aono, Junpei Sakurai, Akira Shimokohbe
- Organizer
  25th Sensor Symposium, IEEJ SMS Symposium on Sensors, Micromachines & Applied Systems
- Place of Presentation
  Okinawa, Japan
- Year and Date
  2008-10-22
- Data Source
  KAKENHI-PROJECT-20676002
[Presentation] コンビナトリアル手法によるMEMS用新材料の探索2008
- Author(s)
  秦誠一・桜井淳平・青野祐子下河辺明
- Organizer
  日本機械学会IIP2008情報・知能・精密機器部門講演会
- Place of Presentation
  東京
- Year and Date
  2008-03-17
- Data Source
  KAKENHI-PROJECT-19360063
[Presentation] Behavior of joining interface between thin film metallic glass and silicon nitride at heating2007
- Author(s)
  eiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
- Organizer
  Abstracts inlst International Conference on STAC and 2nd International Conference on JTMC
- Place of Presentation
  神奈川
- Year and Date
  2007-05-23
- Data Source
  KAKENHI-PROJECT-19656066
[Presentation] Combinatorial Searching for Nobel Metal-based Amorphous Alloy Thin Films for Glass Lens Mold2007
- Author(s)
  J. Sakurai, S. Hata, R. Yamauchi, H. Tachikawa and A. Shimokohbe
- Organizer
  Proc. of 2007 MRS Fall Meeting
- Place of Presentation
  Boston, MA, USA
- Year and Date
  2007-11-27
- Data Source
  KAKENHI-PROJECT-19360063
[Presentation] 高機能ガラスレンズ金型材料の探索I-日金族基非晶質合金の探索-2007
- Author(s)
  桜井淳平・秦誠一・山内隆介・下河辺明
- Organizer
  2007年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  旭川
- Year and Date
  2007-09-12
- Data Source
  KAKENHI-PROJECT-19360063
[Presentation] Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion2007
- Author(s)
  Y. Aono, S. Hata, J. Sakurai, R. Yamauchi, H. Tachikawa and A. Shimokohbe
- Organizer
  Proc. of 2007 MRS Fall Meeting
- Place of Presentation
  Boston, MA, USA
- Year and Date
  2007-11-27
- Data Source
  KAKENHI-PROJECT-19656066
[Presentation] Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold2007
- Author(s)
  M. Abe, S. Hata, R. Yamauchi, J. Sakurai and A. Shimokohbe
- Organizer
  Proc. of 2007 MRS Fall Meeting
- Place of Presentation
  Boston, MA, USA
- Year and Date
  2007-11-27
- Data Source
  KAKENHI-PROJECT-19360063
[Presentation] MEMS材料のコンビナトリアル評価-線膨張係数と縦弾性係数の同時評価法-2007
- Author(s)
  青野祐子・秦誠一・桜井淳平・山内隆介・下河辺明
- Organizer
  2007年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  旭川
- Year and Date
  2007-09-12
- Data Source
  KAKENHI-PROJECT-19656066
[Presentation] 高機能ガラスレンズ金型材料の探索II-一機械的特性,切削特性の改善-2007
- Author(s)
  山内隆介・秦誠一・桜井淳平・下河辺明
- Organizer
  2007年度精密工学会秋季大会学術講演会講演論文集
- Place of Presentation
  旭川
- Year and Date
  2007-09-12
- Data Source
  KAKENHI-PROJECT-19360063
[Presentation] バイオレジストを用いたマイクロバルブの流量特性
- Author(s)
  高桑　暁，伊藤　啓太郎，溝尻　瑞枝，桜井　淳平，新井　史人，秦　誠一
- Organizer
  2015年度機械学会年次大会
- Place of Presentation
  北海道大学工学部
- Year and Date
  2015-09-13 – 2015-09-16
- Data Source
  KAKENHI-PROJECT-26630095
[Presentation] 金属系材料と高分子系材料融合を可能とする新しい積層加工技術
- Author(s)
  秦　誠一
- Organizer
  2014年度機械学会年次大会
- Place of Presentation
  東京電機大学
- Year and Date
  2014-09-07 – 2014-09-10
- Invited
- Data Source
  KAKENHI-PROJECT-26630095

1. SHIMOKOHBE Akira (40016796)

# of Collaborated Projects: 9 results

# of Collaborated Products: 84 results
2. SATO Kaiji (00215766)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
3. SAKURAI Junpei (40345385)

# of Collaborated Projects: 4 results

# of Collaborated Products: 125 results
4. SHINSHI Tadahiko (60272720)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
5. YASUNORI Saotome (90143198)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. MIZOSHIRI Mizue (70586594)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
7. ARAI Fumito (90221051)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
8. SHIKIDA Mituhiro (80273291)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 岡智絵美 (70823285)

# of Collaborated Projects: 1 results

# of Collaborated Products: 32 results
10. 山崎貴大 (40847240)

# of Collaborated Projects: 1 results

# of Collaborated Products: 15 results
11. KATAGIRI Sohichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. WADA Kohichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. ICHIHARA Jun-ichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Hata Seiichi 秦 誠一

HATA Seiichi 秦 誠一

Research Projects

Research Products

Co-Researchers

表面活性化接合用高速原子ビーム源の微粒子排出メカニズムの解明とその長寿命化Principal Investigator

Principal Investigator

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Review Section

Research Institution

Measurement and control of internal stress in thin film metallic glass using combinatorial technologyPrincipal Investigator

Principal Investigator

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Review Section

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Ultra high-throughput evaluation technology for materials using integrated MEMSPrincipal Investigator

Principal Investigator

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Research Field

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Pad type drug delivery system using soft materialPrincipal Investigator

Principal Investigator

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Research Category

Research Field

Research Institution

Combinatorial Search and Nanoprocessing of Pt-free Amorphous Alloys for Glass Molding DiePrincipal Investigator

Principal Investigator

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高機能金型材料の創成とそのナノ加工Principal Investigator

Principal Investigator

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Research Field

Research Institution

集積化薄膜ライブラリによるコンビナトリアル材料評価Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

アークプラズマコンビ法による新しい薄膜金属ガラスの超効率的創成とその加工Principal Investigator

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Research on thin film metallic glasses as MEMS material and those three dimensional fabrication methods

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薄膜ガラス材料を用いたOpt-MEMS

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2自由度高速マイクロアクチュエータの研究Principal Investigator

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バルク金属ガラスの高精度微細成形

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Study and prototype fabrication of out of plane microactuatorPrincipal Investigator

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Hata Seiichi 秦誠一

HATA Seiichi 秦誠一

[Book] 新機能材料金属ガラスの基礎と産業への応用2009