Shimizu Hiroki 清水浩貴

… Alternative Names

SHIMIZU Hiroki 清水浩貴

清水浩喜シミズヒロキ

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Researcher Number	50323043
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Affiliation (Current)	2025: 九州工業大学, 大学院工学研究院, 准教授
Affiliation (based on the past Project Information) *help	2021 – 2024: 九州工業大学, 大学院工学研究院, 准教授 2017 – 2019: 九州工業大学, 大学院工学研究院, 准教授 2015: 九州工業大学, 大学院工学研究院, 准教授 2012 – 2014: 九州工業大学, 工学(系)研究科(研究院), 准教授 2010 – 2012: 九州工業大学, 大学院・工学研究院, 准教授 … More 2007 – 2008: 九州工業大学, 工学部, 准教授 2005 – 2006: 九州工業大学, 工学部, 助教授 2000 – 2004: 東北大学, 大学院・工学研究科, 助手 Less
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related Except Principal Investigator 機械工作・生産工学 / Production engineering/Processing studies / Intelligent mechanics/Mechanical systems / Aerospace engineering / Intelligent mechanics/Mechanical systems
Keywords	Principal Investigator MEMS / 多点法 / 走査形状測定 / 真直度測定 / 平面度測定 / 機械加工面 / 多点法形状計測 / 運動誤差計測 / 加工計測 / 精密位置決め … More / 結晶異方性エッチング / 単結晶シリコン / スクイーズ効果 / 直動ステージ / ソフトウェアデータム / 平面計測 / 誤差分離 / 機上計測 / カンチレバー式変位計 / MEMS変位計 / 平面形状測定 / 形状計測 / オンマシン測定 / 運動誤差測定 / 真直度 / 平面度 / 形状測定 / 法線角誤差 / 金型 / 光学素子 / 角度センサ / レーザーオートコリメーション / 精密形状測定 … More Except Principal Investigator accuracy / angle grid / sensor / 高速工具サーボ / 角度格子 / センサ / 角度情報 / 多自由度 / 位置姿勢検出 / 角度センサ / fast tool servo / Force sensor / Stiffness / measurement force / Three-dimensional / Micro-structured surface / Nanofabrication / Nanometrology / 力センサ / 誤差 / 剛性 / 測定力 / 3次元 / 微細形状 / ナノ加工 / ナノ計測 / closed-loop control / slope / multi-degee-of-freedom / surface motor / position measurement / 制御 / エンコーダ / 他自由度 / 高精度化 / クローズドループ制御 / サーフェスモータ / high-accuracy / optical sensor / profile / calibration / slope sensor / flatness / silicon wafer / metrology / 4分割PD / オートコリメーション / 感度 / 角度プローブ / 測定時間 / 高精度 / 光センサ / 形状 / 校正 / 平坦度 / シリコンウエハ / 測定 / self-calibration / scanning laser beam / angle information / multi degrees of freedom / position and attitude detection / 自律校正 / 精度 / 光走査 / 電熱加速型推進機 / ロケット推進機 / 電熱推進機 / ジメチルエーテル / ロケット / 航空宇宙工学 / 三次元形状 / AFM / アライメント / 光プローブ / 工具 / マイクロ / 計測 / 3次元形状 / エッジ / ピコメートル / ナノメートル / 変調 / 変位センサ / PZT / ナノチューブ / インデンテーション / マルチビーム / バルーン型プローブ / フォトダイオード / 硬さセンサ / マイクロセンサ / 生体内異物 / 触診 / 癌 Less

単結晶シリコンの多条微細V溝構造をかみ合わせた直動ステージPrincipal Investigator
- Principal Investigator
  
  清水浩貴
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Kyushu Institute of Technology
機上測定用3×3センサアレイの開発と冗長データを活用する平面形状測定法の提案Principal Investigator
- Principal Investigator
  
  清水浩貴
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Kyushu Institute of Technology
Development of a profiler device for on-machine measurement of machined planer surfacePrincipal Investigator
- Principal Investigator
  
  Shimizu Hiroki
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kyushu Institute of Technology
Development of a form measuring device for machined planar surface by multi point methodPrincipal Investigator
- Principal Investigator
  
  Shimizu Hiroki
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kyushu Institute of Technology
Application of dimethyl ether to arcjet thruster and realizing dual mode operation
- Principal Investigator
  
  TACHIBANA Takeshi
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Aerospace engineering
- Research Institution
  Kyushu Institute of Technology
Development of a micro probe unit for motion error measurement using three-point method and proof of an algorithm for reducing zero-adjustment errorPrincipal Investigator
- Principal Investigator
  
  SHIMIZU Hiroki
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kyushu Institute of Technology
High Speed and High Precision Measurement of Nanometric 3D Edge Profiles of Next Generation Diamond Micro-Tools
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
ナノチューブを用いた次世代3次元ピコインデンターチップに関する研究
- Principal Investigator
  
  高偉
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
法線方向照射型レーザーオートコリメーション法による複雑曲面形状測定装置の開発Principal Investigator
- Principal Investigator
  
  清水浩貴
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Kyushu Institute of Technology
  Tohoku University
High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement Function
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Tohoku University
マイクロ角度センサアレイを用いた微小癌触診用小型硬さ分布測定プローブの開発
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
Development of a surface encoder for next generation three-axis precision stages
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  2002 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  Tohoku University
An Ultra-precision Measurement System for Next Generation 400 mm Silicon Wafers
- Principal Investigator
  
  GAO Wei
- Project Period (FY)
  2000 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University
A new method of position and attitude detection based on an angle sensor
- Principal Investigator
  
  KIYONO Satoshi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  機械工作・生産工学
- Research Institution
  Tohoku University

All 2024 2023 2022 2021 2019 2018 2017 2015 2014 2012 2011 2005 2004 Other

All Journal Article Presentation Patent

[Journal Article] A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces2022
- Author(s)
  Shimizu Hiroki、Graduate School of Engineering, Kyushu Institute of Technology 1-1 Sensui-cho, Tobata-ku, Kitakyushu-shi, Fukuoka 804-8550, Japan、Tamiya Koichi、Mizukami Shoichiro、Tamaru Yuuma
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 16 Issue: 5 Pages: 582-587
- DOI
  10.20965/ijat.2022.p0582
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2022-09-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K03791
[Journal Article] Feasibility study of multi-point two-dimensional profile measurement by 3-2-1 and 3×3 sensor layout2021
- Author(s)
  Fujiwara Ryotaro、Shimizu Hiroki
- Journal Title
  
  Measurement: Sensors
  
  Volume: 18 Pages: 100358-100358
- DOI
  10.1016/j.measen.2021.100358
- NAID
  120007179334
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K03791
[Journal Article] Square Layout Four-Point Method for Two-Dimensional Profile Measurement and Self-Calibration Method of Zero-Adjustment Error2018
- Author(s)
  Shimizu H., Yamashita R., Hashiguchi T., Miyata T., Tamaru Y.
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 12 Issue: 5 Pages: 707-713
- DOI
  10.20965/ijat.2018.p0707
- NAID
  130007472276
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2018-09-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17K06082
[Journal Article] An Extended Auto-Collimation Method Combined with a Deflect Optical System for Non-Contact Profile Measurement2005
- Author(s)
  Hiroki SHIMIZU, Yoji WATANABE, Wei GAO, Satoshi KIYONO
- Journal Title
  
  Proc. of 4th International euspen Conference Vol.1
  
  Pages: 249-252
- Data Source
  KAKENHI-PROJECT-16760084
[Journal Article] 光干渉型サーフェスエンコーダに関する研究2005
- Author(s)
  渡辺陽司, 高偉, 清水浩貴, 清野慧
- Journal Title
  
  精密工学会誌 71・8
  
  Pages: 1051-1055
- NAID
  10016679183
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] An Extended Auto-Collimation Method Combined with a Deflect Optical System for Non-Contact Profile Measurement2005
- Author(s)
  Hiroki SHIMIZU, Yoji WATANABE, Wei GAO, Satoshi KIYONO
- Journal Title
  
  Proc.of 4th International euspen Conference (発表予定)
- Data Source
  KAKENHI-PROJECT-16760084
[Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005
- Author(s)
  Shuichi Dejima, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Yoshiyuki Tomita
- Journal Title
  
  Mechatronics 15・8
  
  Pages: 969-987
- Data Source
  KAKENHI-PROJECT-14102017
[Journal Article] Fabrication of a Multi-cell Photodiode for a MDOF Surface Encoder2004
- Author(s)
  Y.Watanabe, W.Gao, H.Shimizu, S.Kiyono
- Journal Title
  
  Proceedings of the 2nd International Symposium on Nanomanufacturing
  
  Pages: 591-595
- Data Source
  KAKENHI-PROJECT-14102017
[Patent] 検出装置2004
- Inventor(s)
  清野慧, 渡辺陽司, 高偉, 清水浩貴
- Industrial Property Rights Holder
  (株)東北テクノアーチ
- Filing Date
  2004-05-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14102017
[Presentation] 3×3 正方形配置センサユニットを用いた平面形状測定：第 2 報 ―形状測定用デバイスの設計―2024
- Author(s)
  野田樹生，中原洸太朗，田丸雄摩，清水浩貴
- Organizer
  2024 年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-21K03791
[Presentation] 3×3正方形配置センサユニットを用いた平面形状測定－測定データ接続法の比較－2023
- Author(s)
  時實拓紀，野田樹生，田丸雄摩，清水浩貴
- Organizer
  2023年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-21K03791
[Presentation] High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials2019
- Author(s)
  K. Murayama, Y. Tamaru, H. Shimizu
- Organizer
  8th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06082
[Presentation] Error Evaluation of Straightness Measurement Using a MEMS Device Integrating 10 Cantilever Displacement Sensors2019
- Author(s)
  Hiroki Shimizu, Shoichiro Mizukami, Makoto Manabe, Yuuma Tamaru
- Organizer
  The 14th International Symposium on Measurement Technology and Intelligent Instruments
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06082
[Presentation] A novel compensation method of zero-adjustment error in flatness measurement using serial four-point method2017
- Author(s)
  Hiroki SHIMIZU1, Ryousuke YAMASHITA, Takuya HASHIGUCHI, Tasuku MIYATA
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06082
[Presentation] Redesign of cantilever displacement sensor to improve sensitivity and channel separation2015
- Author(s)
  Hiroki Shimizu
- Organizer
  8th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第7報）―デバイス探針の摩耗評価装置の製作―2015
- Author(s)
  清水浩貴
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] Design of a MEMS device for scanning profile measurement with three cantilever displacement sensors2015
- Author(s)
  Hiroki Shimizu
- Organizer
  12th International Symposium on Measurement Technology and Intelligent Instruments
- Place of Presentation
  National Taiwan University, Taipei, Taiwan
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] 角度補正付き逐次多点法を用いた走査型平面形状測定（第1報）―測定原理の検討と基礎的検証―2014
- Author(s)
  藤田豊栄, 清水浩貴, 田丸雄摩
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発（第4報）―表面荒れを抑えた探針製作法―2014
- Author(s)
  殘華智仁, 清水浩貴, 田丸雄摩, 坂本憲児
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] 三点法を用いた機上測定用機械加工面形状計測装置2014
- Author(s)
  松本恵太, 清水浩貴, 田丸雄摩, 山下亮祐
- Organizer
  日本機械学会九州支部第67期総会・講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発(第3報ピエゾ抵抗体の試作と製作プロセスの統合)2012
- Author(s)
  水頭正一郎,清水浩貴,田丸雄摩
- Organizer
  2012年度精密工学会秋季大会
- Place of Presentation
  九州工業大学(福岡)
- Year and Date
  2012-09-10
- Data Source
  KAKENHI-PROJECT-22760099
[Presentation] MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発（第3報）―ピエゾ抵抗体の試作と製作プロセスの統合―2012
- Author(s)
  水頭正一郎・清水浩貴・田丸雄摩
- Organizer
  2012 年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学
- Data Source
  KAKENHI-PROJECT-22760099
[Presentation] MEMS 技術を応用した多点法走査形状測定用マルチカンチレバーの開発(第2 報マルチカンチレバーデバイスの基本設計と試作)2012
- Author(s)
  柳原慎也,水頭正一郎,清水浩貴,田丸雄摩,馬場昭好
- Organizer
  2012年度精密工学会春季大会学術講演会
- Place of Presentation
  首都大学東京(東京)
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-22760099
[Presentation] MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発-センサ間隔誤差の影響シミュレーションとマルチカンチレバーの基本設計-2011
- Author(s)
  秋好崇宏, 清水浩貴, 田丸雄摩
- Organizer
  2011年度精密工学会春季大会学術講演会
- Place of Presentation
  東洋大学(東京都)(震災により当日講演中止)
- Year and Date
  2011-03-14
- Data Source
  KAKENHI-PROJECT-22760099
[Presentation] MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発(第2報)-マルチカンチレバーデバイスの基本設計と試作-2011
- Author(s)
  柳原慎也, 水頭正一郎, 清水浩貴, 田丸雄摩, 馬場昭好
- Organizer
  2011年度精密工学会春季大会学術講演会
- Place of Presentation
  首都大学東京(東京都)
- Year and Date
  2011-03-15
- Data Source
  KAKENHI-PROJECT-22760099
[Presentation] MEMS 技術を応用した多点法走査形状測定用マルチカンチレバーの開発(センサ間隔誤差の影響シミュレーションとマルチカンチレバーの基本設計)2011
- Author(s)
  秋好崇宏,清水浩貴,田丸雄摩
- Organizer
  2011年度精密工学会春季大会学術講演会
- Place of Presentation
  東洋大学(東京)
- Year and Date
  2011-03-14
- Data Source
  KAKENHI-PROJECT-22760099
[Presentation] MEMS技術を応用した多点法走査型形状測定用センサデバイスの開発（第5報）―平面測定用デバイスの設計と構造解析―
- Author(s)
  菊地洋輝, 清水浩貴, 田丸雄摩, 坂本憲児
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学鳥取キャンパス
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] 角度補正付き逐次多点法を用いた走査型平面形状測定（第2報）-長ピッチ測定を援用した2次誤差軽減法の検討-
- Author(s)
  夘田将太, 清水浩貴, 田丸雄摩
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東洋大学白山キャンパス
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-25420057
[Presentation] MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第6報）-平面測定用デバイスの製作-
- Author(s)
  菊地洋輝, 清水浩貴, 田丸雄摩, 坂本憲児
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東洋大学白山キャンパス
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-25420057

1. GAO Wei (70270816)

# of Collaborated Projects: 7 results

# of Collaborated Products: 3 results
2. TAMARU Yuuma (30284590)

# of Collaborated Projects: 5 results

# of Collaborated Products: 16 results
3. KIYONO Satoshi (40005468)

# of Collaborated Projects: 4 results

# of Collaborated Products: 3 results
4. KURIYAGAWA Tsunemoto (90170092)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. ONO Takahito (90282095)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. JU Bingfeng (10431529)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. YAMANAKA Masashi (20292229)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. TAKEUCHI Shuuzou

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. TACHIBANA Takeshi (50179719)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. KAKAMI Akira (80415653)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. BABA Akiyoshi (80304872)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
12. SAKAMOTO KENJI (10379290)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
13. 松本健郎 (30209639)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 荒井義和 (20455801)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 張世宙 (30282099)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 青木純 (40374954)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. OKAZAKI Yuichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. OHISHI Hiroshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Shimizu Hiroki 清水 浩貴

SHIMIZU Hiroki 清水 浩貴

清水 浩喜 シミズ ヒロキ

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単結晶シリコンの多条微細V溝構造をかみ合わせた直動ステージPrincipal Investigator

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機上測定用3×3センサアレイの開発と冗長データを活用する平面形状測定法の提案Principal Investigator

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Development of a profiler device for on-machine measurement of machined planer surfacePrincipal Investigator

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Development of a form measuring device for machined planar surface by multi point methodPrincipal Investigator

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Development of a micro probe unit for motion error measurement using three-point method and proof of an algorithm for reducing zero-adjustment errorPrincipal Investigator

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法線方向照射型レーザーオートコリメーション法による複雑曲面形状測定装置の開発Principal Investigator

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Shimizu Hiroki 清水浩貴

SHIMIZU Hiroki 清水浩貴

清水浩喜シミズヒロキ