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SUN RONGYAN  孫 栄硯

ORCIDConnect your ORCID iD *help
Researcher Number 50963451
Other IDs
Affiliation (Current) 2025: 大阪大学, 大学院工学研究科, 助教
Affiliation (based on the past Project Information) *help 2022 – 2025: 大阪大学, 大学院工学研究科, 助教
Review Section/Research Field
Principal Investigator
Basic Section 18020:Manufacturing and production engineering-related / 0301:Mechanics of materials, production engineering, design engineering, fluid engineering, thermal engineering, mechanical dynamics, robotics, aerospace engineering, marine and maritime engineering, and related fields
Except Principal Investigator
Broad Section C
Keywords
Principal Investigator
窒化ガリウム(GaN) / プラズマ援用研磨 / 固定砥粒
Except Principal Investigator
パワー半導体 / スラリーレス研磨 / 難加工材料 / ワイドギャップ半導体 / 超精密加工 / プラズマ
  • Research Projects

    (4 results)
  • Research Products

    (41 results)
  • Co-Researchers

    (2 People)
  •  GaN基板向けスラリーレス高効率無歪加工プロセスの開発Principal Investigator

    • Principal Investigator
      孫 栄硯
    • Project Period (FY)
      2024 – 2027
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      The University of Osaka
  •  GaN基板に対するスラリーフリーな高能率無歪一貫加工プロセスの開発Principal Investigator

    • Principal Investigator
      孫 栄硯
    • Project Period (FY)
      2023 – 2024
    • Research Category
      Grant-in-Aid for Early-Career Scientists
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Osaka University
  •  Highly efficient damage-free polishing of GaN using plasma-assisted polishingPrincipal Investigator

    • Principal Investigator
      SUN RONGYAN
    • Project Period (FY)
      2022 – 2023
    • Research Category
      Grant-in-Aid for Research Activity Start-up
    • Review Section
      0301:Mechanics of materials, production engineering, design engineering, fluid engineering, thermal engineering, mechanical dynamics, robotics, aerospace engineering, marine and maritime engineering, and related fields
    • Research Institution
      Osaka University
  •  Realization of completely distortion-free processing by plasma nano-manufacturing process and exploration of its theory

    • Principal Investigator
      山村 和也
    • Project Period (FY)
      2021 – 2025
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Review Section
      Broad Section C
    • Research Institution
      Osaka University

All 2024 2023 2022 2021

All Journal Article Presentation

  • [Journal Article] Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing2023

    • Author(s)
      Liu Nian、Sugimoto Kentaro、Yoshitaka Naoya、Yamada Hideaki、Sun Rongyan、Arima Kenta、Yamamura Kazuya
    • Journal Title

      Ceramics International

      Volume: 49 Issue: 11 Pages: 19109-19123

    • DOI

      10.1016/j.ceramint.2023.03.038

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Journal Article] Effects of polishing pressure and sliding speed on the material removal mechanism of single crystal diamond in plasma-assisted polishing2022

    • Author(s)
      Liu Nian、Sugimoto Kentaro、Yoshitaka Naoya、Yamada Hideaki、Sun Rongyan、Kawai Kentaro、Arima Kenta、Yamamura Kazuya
    • Journal Title

      Diamond and Related Materials

      Volume: 124 Pages: 108899-108899

    • DOI

      10.1016/j.diamond.2022.108899

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H03754, KAKENHI-PROJECT-21J11028, KAKENHI-PROJECT-21H05005
  • [Presentation] 砥石定盤を用いたGaNウエハの高能率加工プロセスの開発(第2報)-AFMを用いた摩擦力の評価-2024

    • Author(s)
      大西雄也,孫栄硯,田口茉奈,髙梨慎也,永橋潤司,山村和也
    • Organizer
      2024年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-23K13233
  • [Presentation] ナノグラフェン上での長方形状構造を呈するSTM像の第一原理計算に基づく考察2023

    • Author(s)
      李君寰,稲垣耕司,孫栄硯,山村和也,有馬健太
    • Organizer
      第70回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 固定砥粒を用いたGaNウエハの高能率一貫加工プロセスの構築-ラップ加工で導入された加工変質層のプラズマ表面改質-2023

    • Author(s)
      大西雄也,北出隼人,陶通,永橋潤司,孫栄硯,有馬健太,山村和也
    • Organizer
      精密工学会第30回学生会員卒業研究発表講演会
    • Data Source
      KAKENHI-PROJECT-22K20410
  • [Presentation] Highly-efficient plasma-assisted polishing technique with auto-dressing2023

    • Author(s)
      R. Sun, T. Tao, A. Nozoe, J. Nagahashi, K. Arima, K. Yamamura
    • Organizer
      23rd International Conference & Exhibition of the European Society for Precision Engineering and Nanotechnology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K13233
  • [Presentation] Nanotrench Formation along Step Edges of Vicinal Si(111) Surfaces by Wet-chemical Treatments2023

    • Author(s)
      K. Arima, Z. Ma, T. Takeuchi, R. Hashimoto, R. Sun, K. Yamamura
    • Organizer
      48th Conference on the Physics & Chemistry of Surfaces & Interfaces (PCSI-48)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Origin of Rectangular-like Lattice on Nanographene in STM Images Unveiled by First-Principles Calculations2023

    • Author(s)
      J. Li, K. Inagaki, R. Sun, K. Yamamura, K. Arima
    • Organizer
      48th Conference on the Physics & Chemistry of Surfaces & Interfaces (PCSI-48)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Investigation of Plasma Gas for Modifying Gallium Nitride in Plasma-assisted Polishing2023

    • Author(s)
      Y. Ohnishi, T. Tao, R. Sun, Y. Ohkubo, K. Yamamura
    • Organizer
      The 10th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2023)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K20410
  • [Presentation] 多結晶ダイヤモンド基板の低コスト・高能率平坦化に関する研究-プラズマ援用研磨における前加工としてのレーザトリミング-2023

    • Author(s)
      杉原聡太,杉本健太郎,董佳遠,孫栄硯,有馬健太,王俊沙,須賀唯知,山村和也
    • Organizer
      精密工学会第30回学生会員卒業研究発表講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] High-efficiency lapping of gallium nitride wafers using a fixed diamond lapping plate2023

    • Author(s)
      T. Tao, H. Kitade, Y. Ohnishi, J. Nagahashi, R. Sun, Y. Ohkubo, K. Yamamura
    • Organizer
      The 25th International Symposium on Advances in Abrasive Technology (ISAAT2023)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K13233
  • [Presentation] グラフェンナノシート上に現れる特異な電子状態の STM 観察-グラフェンナノリボンの第一原理計算に基づく起源の考察-2023

    • Author(s)
      李君寰,稲垣耕司,孫栄硯,山村和也,有馬健太
    • Organizer
      2023年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 数値制御PCVMによる反応焼結SiC材の高精度形状創成-非球面形状の加工精度評価-2023

    • Author(s)
      能登樹,須場健太,孫栄硯,有馬健太,山村和也
    • Organizer
      精密工学会第30回学生会員卒業研究発表講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 固定砥粒を用いたGaNウエハの高能率一貫加工プロセスの構築-ラップ加工で導入された加工変質層のプラズマ表面改質-2023

    • Author(s)
      大西雄也,北出隼人,陶通,永橋潤司,孫栄硯,有馬健太,山村和也
    • Organizer
      精密工学会第30回学生会員卒業研究発表講演会
    • Data Source
      KAKENHI-PROJECT-23K13233
  • [Presentation] プラズマ援用研磨による多結晶ダイヤモンド基板の高能率ダメージフリー平坦・平滑化に関する研究(第 2 報)-2 inch多結晶ダイヤモンド基板に対する研磨圧力が表面粗さにおよぼす影響について-2023

    • Author(s)
      Dong Jiayuan,杉本健太郎,杉原聡太,孫栄硯,有馬健太,山村和也,須賀唯知,Wang Junsha
    • Organizer
      2023年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 水蒸気プラズマを用いたGaNウエハの表面改質2023

    • Author(s)
      大西雄也,陶通,孫栄硯,大久保雄司,山村和也
    • Organizer
      精密工学会2023年度関西地方定期学術講演会
    • Data Source
      KAKENHI-PROJECT-22K20410
  • [Presentation] 固定砥粒を用いたGaNウエハの高能率一貫加工プロセスの構築-ラップ加工で導入された加工変質層のプラズマ表面改質-2023

    • Author(s)
      大西雄也,北出隼人,陶通,永橋潤司,孫栄硯,有馬健太,山村和也
    • Organizer
      精密工学会第30回学生会員卒業研究発表講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Highly-efficient plasma-assisted polishing technique with auto-dressing2023

    • Author(s)
      R. Sun, T. Tao, A. Nozoe, J. Nagahashi, K. Arima, K. Yamamura
    • Organizer
      23rd International Conference & Exhibition of the European Society for Precision Engineering and Nanotechnology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K20410
  • [Presentation] Optimization of modification conditions used in plasma assisted polishing for improving the material removal rate of Gallium nitride2022

    • Author(s)
      T. Tao, R. Sun, K. Arima, K. Kawai, K. Yamamura
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K20410
  • [Presentation] 砥石定盤を用いたGaNウエハのラップ加工2022

    • Author(s)
      北出隼人, 永橋潤司, 孫栄硯, 山村和也
    • Organizer
      応用物理学会 先進パワー半導体分科会 第9回講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] プラズマ援用研磨法の開発(第24報)-CF4プラズマ照射前後におけるAlN基板とダイヤモンド砥粒との吸着力の変化-2022

    • Author(s)
      孫栄硯,陶通,川合健太郎,有馬健太,山村和也
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] プラズマ援用研磨法の開発(第25報)-RS-SiC材のSiC成分とSi成分の酸化レートの評価-2022

    • Author(s)
      陶通,孫栄硯,川合健太郎,有馬健太,山村和也
    • Organizer
      2022年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 中性子集光用高精度Wolterミラーマンドレルの作製(第14報)-PCVMにおける加工温度と表面粗さの相関-2022

    • Author(s)
      須場健太,山本有悟,孫栄硯,川合健太郎,有馬健太,山村和也,丸山龍治,曽山和彦,林田洋寿
    • Organizer
      2022年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Processing characteristics of quartz crystal in plasma chemical vaporization machining using argon or helium as the carrier gas2022

    • Author(s)
      T. Tao, R. Sun, K. Kawai, K. Arima, K. Yamamura
    • Organizer
      The 16th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2022) (2022.3.27@Virtual Conference) 91-95.
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] プラズマ援用研磨による多結晶ダイヤモンド基板の高能率ダメージフリー平坦・平滑化に関する研究(第1報)2022

    • Author(s)
      杉本健太郎,孫栄硯,川合健太郎,有馬健太,山村和也
    • Organizer
      2022年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 固定砥粒を用いたGaNウエハの高能率一貫加工プロセスの構築-ラップ加工で導入された加工変質層のプラズマ表面改質-2022

    • Author(s)
      大西雄也,北出隼人,陶通,永橋潤司,孫栄硯,有馬健太,山村和也
    • Organizer
      精密工学会第30回学生会員卒業研究発表講演会講演
    • Data Source
      KAKENHI-PROJECT-22K20410
  • [Presentation] Si 表面の溝底部に埋め込んだ金属原子からの光電子検出- 光電子検出量の脱出角依存性の検討-2022

    • Author(s)
      東知樹,孫栄硯,川合健太郎,山村和也,有馬健太
    • Organizer
      精密工学会2022年度関西地方定期学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Si 表面の溝底部に埋め込んだ金属原子からの光電子検出-光電子検出量の脱出角依存性の検討-2022

    • Author(s)
      東知樹,孫栄硯,山村和也,有馬健太
    • Organizer
      2022年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Elucidation of plasma-assisted polishing mechanism through evaluating the adhesion force between diamond abrasive and AlN wafer2022

    • Author(s)
      R. Sun, T. Tao, K. Kawai, K. Arima, K. Yamamura
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Optimization of modification conditions used in plasma assisted polishing for improving the material removal rate of Gallium nitride2022

    • Author(s)
      T. Tao, R. Sun, K. Arima, K. Kawai, K. Yamamura
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] ダイヤモンド砥粒を用いたプラズマ援用研磨による窒化ガリウム基板の高能率研磨2022

    • Author(s)
      陶通,孫栄硯,川合健太郎,有馬健太,山村和也
    • Organizer
      2022年度砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 数値制御プラズマCVMによるWolterミラーマンドレルの高精度加工2022

    • Author(s)
      須場健太,山本有悟,孫栄硯,川合健太郎,有馬健太,山村和也,丸山龍治,曽山和彦,林田洋寿
    • Organizer
      精密工学会2022年度関西地方定期学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] プラズマ援用研磨による単結晶ダイヤモンド基板の高能率ダメージフリー加工-研磨レートおよび表面性状の研磨圧力依存性および摺動速度依存性に関する検討 -2022

    • Author(s)
      杉本健太郎,劉念,吉鷹直也,孫栄硯,川合健太郎,有馬健太,山村和也
    • Organizer
      精密工学会2022年度関西地方定期学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Polishing characteristics of AlN ceramics in plasma-assisted polishing using diamond grinding stone with different abrasive particle sizes2022

    • Author(s)
      R. Sun, T. Tao, K. Kawai, K. Arima, K. Yamamura
    • Organizer
      The 16th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2022) (2022.3.27@Virtual Conference) 91-95.
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] プラズマ援用研磨による多結晶ダイヤモンド基板の高能率ダメージフリー平坦・平滑化に関する研究(第1報)2022

    • Author(s)
      杉本健太郎,孫栄硯,川合健太郎,有馬健太,山村和也
    • Organizer
      2022年度砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] 窒化アルミニウムセラミックス材のプラズマ援用研磨に関する研究-異なる粒径のビトリファイドボンドダイヤモンド砥石を用いたAlN基板の研磨特性-2021

    • Author(s)
      陶通,孫栄硯,川合健太郎,有馬健太,山村和也
    • Organizer
      2021年度砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] ビトリファイドボンド砥石とフッ素系プラズマを用いたドレスフリー研磨法の開発2021

    • Author(s)
      孫栄硯,陶通,川合健太郎,有馬健太,山村和也
    • Organizer
      2021年度砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Study on the oxidation characteristics of reaction-sintered silicon carbide using vacuum Ar-based O2 plasma for plasma-assisted polishing2021

    • Author(s)
      T. Tao, R. Sun, K. Kawai, K. Arima, K. Yamamura
    • Organizer
      The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] プラズマ援用研磨法の開発(第22報)-フッ素系ガスを用いたプラズマ援用研磨における砥石成分の付着抑制-2021

    • Author(s)
      孫栄硯,陶通,川合健太郎,有馬健太,山村和也
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] Consideration on suppression of grinding stone components adhesion in dry polishing with the aid of surface modification by fluorine-based plasma2021

    • Author(s)
      R. Sun, T. Tao, K. Kawai, K. Arima, K. Yamamura
    • Organizer
      The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H05005
  • [Presentation] プラズマ援用研磨法の開発(第23報)-AlN基板の研磨における砥粒材質と研磨特性の相関-2021

    • Author(s)
      陶通,孫栄硯,川合健太郎,有馬健太,山村和也
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-21H05005
  • 1.  山村 和也 (60240074)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 31 results
  • 2.  有馬 健太 (10324807)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 29 results

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