MATSUDA Yoshinobu 松田良信

… Alternative Names

松田良信マツダヨシノブ

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Researcher Number	60199817
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2016 – 2022: 長崎大学, 工学研究科, 准教授 2014: 長崎大学, 工学研究科, 准教授 2013: 長崎大学, 大学院・工学研究科, 准教授 2007 – 2010: Nagasaki University, Faculty of Engineering, Associate Professor 2004 – 2006: 長崎大学, 工学部, 助教授 … More 1999 – 2001: 長崎大学, 工学部, 助教授 1993 – 1995: 長崎大学, 工学部, 助教授 1990: 長崎大学, 工学部, 助教授 1988 – 1989: 長崎大学, 工学部, 講師 1988: 九州大学, 総合理工学研究科, 助手 Less
Review Section/Research Field	Principal Investigator プラズマ理工学 / Plasma science / Basic Section 14030:Applied plasma science-related / Plasma electronics Except Principal Investigator Plasma science / Science and Engineering
Keywords	Principal Investigator 透明導電膜 / スパッタリング / マグネトロン / 誘導結合プラズマ / プレーナマグネトロン / ITO / 反応性スパッタリング / 負イオン / 金属添加酸化亜鉛 / イオンエネルギー分布 … More / マグネトロンスパッタリング / 反射電界型エネルギー分析器 / Inductively Coupled Plasma / アルミ添加酸化亜鉛 / 酸化亜鉛 / 酸素負イオン / レーザー光脱離 / インジウム原子 / レーザー誘起蛍光法 / エネルギー分布関数 / 磁気フィルタ / ZnO / プラズマ / 減速電界型エネルギー分析器 / Arcing / Planar Magnetron / Transparent Conductive Film / Aluminum doped Zinc Oxide / Sputtering / 透明誘電膜 / アーキング / Secondary Electron Emission Coefficient / Magnetron / Mode Transition / Hysteresis / Magnesium Oxide / Oxide Thin Films / Reactive Sputtering / 酸化物モード / 金属モード / 二次電子放出係数 / モード遷移 / ヒステリシス / MgO / 酸化物薄膜 / 熱流束 / 吸収分光 / 電気導電率 / レーリー散乱 … More Except Principal Investigator アモルファスシリコン / グロー放電 / 微粒子 / シランプラズマ / 反応過程 / 赤外吸収分光 / 小型化 / プラズマ加工 / マイクロマシン / マイクロ・ナノデバイス / 半導体超微細化 / プラズマ・核融合 / ミ-散乱 / 重粒子衝突 / ICCDカメラ / 走査プラズマ法 / プラズマCVD / plasma processing / micro machine / micro devices / micro plasma / plasma / 細管 / コーティング / スパッタリング / マイクロプラズマ / alpha-particle density / ion temperature / collective scattering / LIDAR / Thomson scattering / diagnostics / lasers / fusion burning plasmas / 電子密度 / 電子温度 / JET装置 / LIDARトムソン散乱 / レーザー計測 / アルファ粒子密度 / イオン温度 / 協同トムソン散乱 / ライダー / トムソン散乱 / 計測 / レーザー / 核反応プラズマ / プロセス制御 / クロスフィールド磁界 / 薄膜形成 / シュタルクミキシング / 光ガルバノ効果 / レーザ蛍光法 / 時分解測定 / 被膜汚染 / プローブ法 / 電界分布測定 / 反応性プラズマ / 堆積速度 / 赤外吸収分光法 / 原料分子 / ベンゼン環 / 炭素膜 / 高分子量 / プラズマ-固体表面相互作用 / 高次のラジカル・イオン / 付加反応 / 赤外分光 / 成膜 / 高分子量のラジカル・イオン / アモルファス炭素膜 / 炭化水素プラズマ / 反応 / 「その場・実時間」計測 / 多重内部反射赤外分光 / アミン基 / カーボン / 実時間 / その場 / 表面改質 / 炭素系膜 / 膜堆積 / 実時間計測 / バイオ応用 / 堆積物 / 溶液 / 多重内部反射 / 反応計測 / 液中プラズマ / SiOC薄膜 / 大気圧 / 医療応用 / 歯科治療 / プラズマ / ナノ加工 / 磁化プラズマ / プラズマ電位 / ラジカル / レーザー誘起螢光法 / レーザー誘起蛍光法 / ミー散乱 / γ電子励起発光 / 陰極シ-ス / 大面積均一薄膜 / クロスフィ-ルド磁界 / SiH_4プラズマ / プラズマCVDプロセス / 大面積薄膜 Less

Measurement of ion energy distribution incident on substrate by retarding field energy analyzerPrincipal Investigator
- Principal Investigator
  
  Matsuda Yoshinobu
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Nagasaki University
Development of retarding field energy analyzer that can measure energy distribution of negative ionsPrincipal Investigator
- Principal Investigator
  
  MATSUDA Yoshinobu
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma electronics
- Research Institution
  Nagasaki University
Study on the deposition of functionalized membrane with high-molecular-weight radicals and ions during hydroicarbon plasma
- Principal Investigator
  
  SHINOHARA Masanori
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
Establishment of a real time measurement method of carbon film deposition process and its surface modification process during plasma generated in liquid, and the clalification of these processes
- Principal Investigator
  
  SHINOHARA Masanori
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
Plasma-Assist Effect on the Sputter-Deposition Process of Transparent Conductive Metal-doped Zinc Oxide Thin FilmsPrincipal Investigator
- Principal Investigator
  
  MATSUDA Yoshinobu
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
歯科治療用プラズマプロセスの開発
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
Fabrication of Transparent Conductive Zinc Oxide Thin Film Using Inductively Coupled Plasma Assisted SputteringPrincipal Investigator
- Principal Investigator
  
  MATSUDA Yoshinobu
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
磁界中マイクロ波による低気圧マイクロプラズマの生成と診断
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Nagasaki University
Study on Narrow Tube Inner Coating Method by Harmonic ECR Plasma
- Principal Investigator
  
  FUJIYAMA Hiroshi
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
Studies on Reactive Sputtering Processes of Oxide Thin FilmsPrincipal Investigator
- Principal Investigator
  
  MATSUDA Yoshinobu
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagasaki University
磁化シランプラズマ中におけるラジカル生成と微粒子輸送
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagasaki University
レーザー分光による反応性スパッタリング過程の研究Principal Investigator
- Principal Investigator
  
  松田良信
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagasaki University
シランプラズマにおける陰極シース内のラジカル生成とその挙動
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagasaki University
レーザー分光による反応性スパッタリング過程の研究Principal Investigator
- Principal Investigator
  
  松田良信
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagasaki University
Developments of Laser-Aided Plasma Diagnostics for Fusion Plasmas
- Principal Investigator
  
  MURAOKA Katsunori
- Project Period (FY)
  1994 – 1996
- Research Category
  
  Grant-in-Aid for international Scientific Research
- Research Institution
  Kyushu University
シランプラズマにおける陰極シース内のラジカル生成とその挙動
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagasaki University
磁界によるイオン・ラジカルの生成・輸送・成膜制御
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagasaki University
磁界による反応性プラズマの制御
- Principal Investigator
  
  FUJIYAMA Hiroshi
- Project Period (FY)
  1989
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagasaki University
反応性プラズマ中の電界分布測定法の開発
- Principal Investigator
  
  堤井信力
- Project Period (FY)
  1988 – 1990
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Musashi Institute of Technology
磁界による反応性プラズマの制御
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Nagasaki University

[Book] 電気学会基礎・材料・共通部門技術報告、メタルスパッタリングプラズマの高度化とその最新動向No.11622009
- Author(s)
  松田良信, 他
- Data Source
  KAKENHI-PROJECT-20540485
[Journal Article] 反射電界型エネルギー分析器を用いたエネルギー分布関数測定におけるデータ収集システムの改良2021
- Author(s)
  安元秀, 小久江利光, 井川樹, 松田良信, 山下敬彦
- Journal Title
  
  Proceedings of 38th Symposium on Plasma Processing (SPP-38) /The 33rd Symposium on Plasma Science for Materials (SPSM33) January 27-29, 2021, online
  
  Volume: 1 Pages: 140-141
- Data Source
  KAKENHI-PROJECT-19K03810
[Journal Article] 磁気フィルタ付RFEAを用いたDCMS中のイオンエネルギー分布関数測定2020
- Author(s)
  安元秀，小久江利光，井川樹，松田良信，山下敬彦
- Journal Title
  
  プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会研究発表論文集
  
  Volume: 1 Pages: 37-38
- Data Source
  KAKENHI-PROJECT-19K03810
[Journal Article] Reduction and uniformization of the resistivity of Ga-doped ZnO by combining short-gap magnetron sputtering and buffer layer2019
- Author(s)
  Yoshinobu Matsuda, Naoki Matsuo, Kohei Sakamoto, Masanori Shinohara, Tomohiro Furusato, and Takahiko Yamashita
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 58 Issue: SE Pages: SEED04-SEED04
- DOI
  10.7567/1347-4065/ab09c7
- NAID
  210000156220
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K03810
[Journal Article] 軸外し傾斜基板を用いたAl添加ZnOのRFマグネトロンスパッタ成膜2016
- Author(s)
  坂本康平,佐藤貴紀,小山田俊介,松尾直樹,篠原正典,松田良信
- Journal Title
  
  電気学会研究会資料
  
  Volume: PST2016(75-88) Pages: 13-17
- Data Source
  KAKENHI-PROJECT-16K04995
[Journal Article] Infrared spectroscopic study on reactions of octadecyltrichlorosilane self-assembled monolayer with Plasmas2015
- Author(s)
  Masanori Shinohara, Naoki Maruno, Yuta Yoshida, Yujiro Taniguchi, Kazuki Ito, Yamato Nakano, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 1S Pages: 01AB04-01AB04
- DOI
  10.7567/jjap.54.01ab04
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] シリコン表面のSi-Hの結合の赤外分光解析2015
- Author(s)
  篠原正典，木村康男，庭野道夫，松田良信，藤山寛
- Journal Title
  
  プラズマ・核融合学会誌
  
  Volume: 91
- Open Access
- Data Source
  KAKENHI-PROJECT-24340144
[Journal Article] Infrared Absorption Spectroscopic Study on Reaction between Self-Assembled Monolayers and Atmospheric-Pressure Plasma2015
- Author(s)
  Masanori Shinohara, Katsuhiro Amano, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda and Hiroshi Fujiyama
- Journal Title
  
  Journal of Spectroscopy
  
  Volume: 2015 Pages: 1-7
- DOI
  10.1155/2015/417024
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Reactions of Plasma with Self-Assemble Monolayer for plasma-bio application2014
- Author(s)
  Naoki Maruno, Yuta Yoshida, Yujiro Taniguchi, Shohei Yagi, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Proceedings of 8th International conference on reactive plasmas
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Effects of carbon sources on deposition process of amorphous carbon film with plasma enhanced chemical vapor deposition, investigated with infrared spectroscopy: benzene and naphthalene2014
- Author(s)
  Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Proceedoings of 8th International conference on reactive plasmas
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24340144
[Journal Article] Reactions of Surface Hydrogen on Amorphous Carbon Films with Hydrogen Plasma2014
- Author(s)
  Masanori Shinohara, Taka-aki Kawakami, Ko-jiro Hara, Shohei Yagi, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 1 Pages: 10204-10204
- DOI
  10.7567/jjap.53.010204
- NAID
  210000143216
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Development of an in-situ infrared spectroscopic measurement of plasma-induced reactions in ethanol2014
- Author(s)
  M. Shinohara, A. Fuakae, K. Amano, Y. Yoshida, Y. Matsuda, H. Fujiyama
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol. 52, No.11 Issue: 11S Pages: 11NC06-11NC06
- DOI
  10.7567/jjap.52.11nc06
- NAID
  210000143109
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy2014
- Author(s)
  Masanori Shinohara, Yujiro Taniguchi, Yuya Takaki, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 9 Pages: 096202-096202
- DOI
  10.7567/jjap.53.096202
- NAID
  210000144458
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] 自己組織化膜と液中プラズマとの反応の赤外分光解析2013
- Author(s)
  吉田裕太，丸野尚紀，篠原正典，松田良信，藤山寛
- Journal Title
  
  電気学会プラズマ研究会資料
  
  Volume: PST-13-103 Pages: 91-94
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry2013
- Author(s)
  M. Shinohara, Y. Takami, S. Takabayashi, A. Oda, Y. Matsuda, H. Fujiyama
- Journal Title
  
  IEEE Trans. Plasma Sci.
  
  Volume: 41 Issue: 8 Pages: 1878-1883
- DOI
  10.1109/tps.2013.2263850
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560325, KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Investigation on Reactions of Hydrogen Plasma with Si surface, using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS)2012
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyama
- Journal Title
  
  Proceeding of IC－PLANTS2012
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析～気相プラズマから液中プラズマ～2012
- Author(s)
  篠原正典,松田良信,藤山寛
- Journal Title
  
  化学工業
  
  Volume: 63 Pages: 942-946
- Data Source
  KAKENHI-PROJECT-24340144
[Journal Article] Surface modification of DLC film due to oxygen plasma exposure, observed by IR absorption spectroscopy in multipleinternal- reflection geometry2012
- Author(s)
  M. Shinohara, Y. Takaki, Y. Takami, Y. Matuda, and H. Fujiyama
- Journal Title
  
  IEEE Trans. of Plasma Science
  
  Volume: Vo l . 40, No. 10 Issue: 10 Pages: 2756-2761
- DOI
  10.1109/tps.2012.2208766
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027, KAKENHI-PUBLICLY-22110511, KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144
[Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析～気相プラズマから液中プラズマ～2012
- Author(s)
  篠原正典，松田良信，藤山　寛
- Journal Title
  
  化学工業
  
  Volume: 63 Pages: 942-946
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Development of In-situ MIR-IRAS monitoring systm for reactions induced by so lution plasma generation2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Journal Title
  
  ICRERA 2012 Proceedings
  
  Volume: CD-ROM
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] プラズマプロセスの赤外分光診断2011
- Author(s)
  篠原正典，高木雄也，原幸治郎，高見佳生，天野勝裕，深江陽大，松田良信，藤山寛
- Journal Title
  
  電気学会プラズマ　パルスパワー　合同研究会資料
  
  Volume: PST-11-093, PPT-11-094 Pages: 11-14
- NAID
  10030330356
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
- Journal Title
  
  Proceeding of The 8th Asian-European Internationala Conference on Plasma Surface Engineering (AEPSE-2011)
  
  Volume: 1 Pages: 345-345
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] プラズマが誘起する表面反応の赤外分光解析2011
- Author(s)
  篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山　寛
- Journal Title
  
  電気学会プラズマ研究会資料
  
  Volume: PST-11-069, Pages: 31-34
- NAID
  10029502639
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Thermal Probe Measurements of Energy Flux onto a Substrate during ICP Assisted Sputter-Deposition2010
- Author(s)
  H.Kitagawa, Y.Matsuda
- Journal Title
  
  Proceedings of TENCON 2010 IEEE Region 10 Conference, Fukuoka Japan
  
  Pages: 2208-2212
- NAID
  120006985179
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540485
[Journal Article] Deposition of Transparent Conducting Al-Doped ZnO Thin Films by ICP-Assisted Sputtering2010
- Author(s)
  R.Shindo, Y.Matsuda
- Journal Title
  
  Proceedings of TENCON 2010 IEEE Region 10 Conference, Fukuoka Japan
  
  Pages: 1002-1006
- NAID
  120006985178
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540485
[Journal Article] Energy Flux onto a Substrate during ICP Assisted Sputter-Deposition2010
- Author(s)
  Y.Matsuda
- Journal Title
  
  Conference Proceedings CD of 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas, October 4-8, 2010, Paris, France
  
  Volume: 55
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540485
[Journal Article] Inductively Coupled Plasma Assisted Sputter-Deposition of Al-doped ZnO Thin Films2010
- Author(s)
  Y.Matsuda
- Journal Title
  
  Conference Proceedings CD of 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas, October 4-8, 2010, Paris, France
  
  Volume: 55
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540485
[Journal Article]2009
- Author(s)
  メタルスパッタプラズマの高度化調査専門委員会編(松田良信 : 分担)
- Journal Title
  
  メタルスパッタリングプラズマの高度化とその最新動向,基礎・材料・共通部門技術報告,No.1162(電気学会(電子図書館))
- Data Source
  KAKENHI-PROJECT-20540485
[Journal Article] Diagnostic Study of ICP Assisted Sputter-Deposition of Al-doped ZnO Thin Films2009
- Author(s)
  Y.Matsuda
- Journal Title
  
  Proceedings CD of the 19th International Symposium on Plasma Chemistry(ISPC19), edited by A.von Keudell, J.Winter, M.Boke, V.Schulz-von der Gathen, Bochum, Germany, July 26th-31st, 2009
  
  Pages: 4-4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540485
[Journal Article] Smoothing of resistivity distributions of sputtered AZO thin film by the assist of ICP2008
- Author(s)
  Y. Matsuda
- Journal Title
  
  Proc.of the 25th Symposium on Plasma Processing, Yamaguchi, Japan, January 23-25 2008
  
  Pages: 79-80
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Smoothing of resistivity distributions of sputtered AZO thin film by the assist of ICP2008
- Author(s)
  Yoshinobu, Matsuda, Shibasaki, Takashi, Shinohara, Masanori
- Journal Title
  
  Proc. of the 25th Symposium on Plasma Processing, Yamaguchi, Japan A5-01
  
  Pages: 79-80
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Smoothing of resistivity distributions of sputtered AZO thin film by the assist of ICP2008
- Author(s)
  Yoshinobu Matsuda
- Journal Title
  
  Proc.of the 25th Symposium on Plasma Processing, January 23-25, 2008, Yamaguchi, Japan
  
  Pages: 79-80
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Sputter-deposition of aluminum-doped zinc oxide thin films assisted by inductively coupled plasma2007
- Author(s)
  Shiro, Iwai, Yoshinobu, Matsuda, Masanori, Shinohara, Hiroshi, Fujiyama
- Journal Title
  
  Abstracts and Full-Papers CD of ISPC-18, Kyoto, Japan 27P-28
  
  Pages: 369-369
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Influence of RF power on the film properties of aluminum doped zinc oxide deposited by inductively coupled plasma assisted sputtering2007
- Author(s)
  Y. Matsuda
- Journal Title
  
  Proc.29th Int.Sympo.on Dry Process, Nov.13-14 2007, Tokyo, Japan
  
  Pages: 161-162
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Influence of RF power on the film properties of aluminum doped zinc oxide deposited by inductively coupled plasma assisted sputtering2007
- Author(s)
  Y., Matsuda, T., Shinbasaki, S., Iwai, M., Shinohara
- Journal Title
  
  Proc. 29th Int. Sympo. on Dry Process, Tokyo, Japan 13-14, P2-02
  
  Pages: 161-162
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Deposition of AZO Thin Films by ICP Assisted Magnetron Sputtering2007
- Author(s)
  Shiro, Iwai, Yoshinobu, Matsuda, Masanori, Shinohara, Hiroshi, Fujiyama
- Journal Title
  
  Proc. of the 24th Symposium on Plasma Processing, Senri Life Science Center, Osaka, Japan B2-01
  
  Pages: 27-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Sputter-Deposition of Aluminum-Doped Zinc Oxide Thin Films by Inductively Coupled Plasma Assisted Magnetron Sputtering2007
- Author(s)
  Yoshinobu Matsuda
- Journal Title
  
  Proc.29th Int.Sympo.on Dry Process, Nov.13-14 2007, Tokyo, Japan
  
  Pages: 161-162
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Discharge characteristics of inductively-coupled-plasma assisted dc planar magnetron for the deposition of aluminum-doped zinc oxide thin films2006
- Author(s)
  Y.Matsuda
- Journal Title
  
  Abstract book of 8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials, 2-5th July 2006, Cairns, Australia
  
  Pages: 108-108
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Reactive Deposition of Aluminum Doped Zinc Oxide Films by Inductively Coupled Plasma Assisted Sputtering2006
- Author(s)
  Y., Matsuda, Y., Nagano, S., Iwai, M., Shinohara, H. Fujiyama
- Journal Title
  
  Proc. of the 6th Int. Conf. on Plasmas and 23rd Symposium on Plasma Processing ICRP-6/SPP-23 Matsushima/Sendai P-2A-21
  
  Pages: 433-434
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Deposition of aluminum doped zinc oxide films by inductively coupled plasma assisted sputtering2006
- Author(s)
  Y.Matsuda
- Journal Title
  
  Proc. of the 6th Int. Conf. on Reactive Plasmas and 23rd Symposium on Plasma Processing, Matsushima/Sendai, Japan, January 24-27, 2006, P-2A-21
  
  Pages: 433-434
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Deposition of transparent conducting thin films using inductively-coupled-plasma assisted dc magnetron sputtering of aluminum-doped zinc oxide target2006
- Author(s)
  Y.Matsuda
- Journal Title
  
  Abstract book of 8th Asia-Pacific Conference on plasma Science and 19th Symposium on Plasma Science for Materials, 2-5th July 2006, Cairns, Australia
  
  Pages: 107-107
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Deposition of Aluminum Doped Zinc Oxide Films by Inductively Coupled Plasma Assisted Sputtering2006
- Author(s)
  Y. Matsuda
- Journal Title
  
  Proc.of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing(ICRP-6/SPP-23), Matsushima/Sendai, January 24-27 2006
  
  Pages: 433-434
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Characteristics of the 2nd Harmonic ECR Micro Plasma by using PIC-MC Simulation2005
- Author(s)
  D.Kurogil, Y.Matsuda, H.Fujiyama, S.J.Kim, J.K.Lee
- Journal Title
  
  Proc.5th Asian-European Int.Conf.on Plasma Surface Engineering
  
  Pages: 344-344
- Data Source
  KAKENHI-PROJECT-16040214
[Journal Article] Aluminum Doped Zinc Oxide Films Deposition Using Inductively Coupled Plasma Assisted Magnetron Sputtering2005
- Author(s)
  Y., Nagano, S., Iwai, M., Shinohara, Y., Matsuda, H., Fujiyama
- Journal Title
  
  Proc. International Symposium on Dry Process, Juju Korea 28-30
  
  Pages: 141-142
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Narrow Tube Inner Coating by Low Pressure Micro Plasma Sputtering,2005
- Author(s)
  H.Uchida, M.Kumamoto, H.Fujiyama, M.Shinohara, Y.Matsuda
- Journal Title
  
  Proc.of the 17^<th> International Symposium on Plasma Chemistry (ISPC-17)
  
  Pages: 581-582
- Data Source
  KAKENHI-PROJECT-16340184
[Journal Article] Optical emission studies of atomic and ionic species in the ionized sputter-deposition process of magnesium oxide thin films2005
- Author(s)
  Y., Matsuda, Y., Koyama, M., Iwaya, M., Shinohara, H., Fujiyama
- Journal Title
  
  Thin Solid Films vol.475/1-2
  
  Pages: 113-117
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Optical emission studies of atomic and ionic species in the ionized sputter-deposition process of magnesium oxide thin films2005
- Author(s)
  Y. Matsuda
- Journal Title
  
  Thin Solid Films 475/1-2
  
  Pages: 113-117
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17540472
[Journal Article] Pulsed Sputter-Coating of Inside Wall of Narrow Tube by the 2nd Harmonic ECR Plasmas2005
- Author(s)
  H.Fujiyama, H.Uchida, M.Kumamoto, Y.Nitta, T.Nakatani, M.Shinohara, Y.Matsuda
- Journal Title
  
  Proc.5th Asian-European Int.Conf.on Plasma Surface Engineering
- Data Source
  KAKENHI-PROJECT-16340184
[Journal Article] The 2^<nd> Harmonic ECR Low Pressure Micro Plasmas"2005
- Author(s)
  H.Fujiyama, H.Inoue, D.Kurogi, Y.Furue, M.Shinohara, Y.Matsuda
- Journal Title
  
  Proc.of the 17th International Symposium on Plasma Chemistry proceeding,
  
  Pages: 453-454
- Data Source
  KAKENHI-PROJECT-16340184
[Presentation] Energy distribution function of substrate incident negative ions in DC magnetron sputtering of metal-doped ZnO target measured by magnetized retarding field energy analyzer2022
- Author(s)
  Yoshinobu Matsuda, Shoma Uzunoe, Koki Watanabe
- Organizer
  Proc. of the 11th International Conference on Reactive Plasmas (ICRP-11) / 2022 Gaseous Electronics Conference (GEC 2022)
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Production and operational performance test of the second retarding field energy analyzer to use for measuring ion distribution function2022
- Author(s)
  Tatsuki Igawa, Toshinitsu Ogue, Kouki Watanabe, Shoma Uzunoe, Yoshinobu Matsuda
- Organizer
  The 39th Symposium on Plasma Processing/ The 34th Symposium on Plasma Science for Materials (SPP39/SPSM34) January 24, 2022, virtual conference online
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 磁化反射電界型エネルギー分析器を用いた負イオンエネルギー分布関数測定における磁界強度の影響2022
- Author(s)
  渡辺航希, 埋ノ江翔真, 金堀洋輔, 早川誠一, 松田良信
- Organizer
  2022 年（令和４年度）応用物理学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] スパッタリング基板入射イオンエネルギー分布関数に及ぼすターゲット材料の影響2022
- Author(s)
  埋ノ江翔真, 渡辺航希, 早川誠一, 金堀洋輔, 松田良信
- Organizer
  2022 年（令和４年度）応用物理学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 磁化反射電界型エネルギー分析器を用いたイオンエネルギー分布関数測定に及ぼす磁界強度の影響2022
- Author(s)
  渡辺航希，埋ノ江翔真，金堀洋輔，早川誠一，松田良信
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] ZnO ターゲットと Cu ターゲットにおける基板入射イオンエネルギー分布関数の比較2022
- Author(s)
  埋ノ江翔真，渡辺航希，早川誠一，金堀洋輔，松田良信
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 反射電界型エネルギー分析器を用いたエネルギー分布関数測定におけるデータ収集システムの改良2021
- Author(s)
  安元秀，小久江利光，井川樹，松田良信，山下敬彦
- Organizer
  第38 回プラズマプロセシング研究会/第33回プラズマ材料科学シンポジウム
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] イオンエネルギー分布関数測定用改良型RFEAの動作性能試験2021
- Author(s)
  井川樹, 小久江利光, 渡辺航希, 埋ノ江翔真, 松田良信
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第25回支部大会オンライン開催
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 反射電界型エネルギー分析器による基板入射イオンエネルギー分布計測におけるSN比の改善2021
- Author(s)
  小久江利光, 井川樹, 埋ノ江翔真, 渡辺航希, 古里友宏, 松田良信
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第25回支部大会オンライン開催
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 反射電界型エネルギー分析器を用いたDCマグネトロンスパッタリングにおけるエネルギー分布関数測定2021
- Author(s)
  小久江利光、井川樹、埋ノ江翔真、渡辺航希、古里友宏、松田良信
- Organizer
  2021年（令和3年度）応用物理学会九州支部学術講演会オンライン開催
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 磁気フィルタ付RFEAを用いたDCMS中のイオンエネルギー分布関数測定2020
- Author(s)
  安元秀，小久江利光，井川樹，松田良信，山下敬彦
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Measurement of energy distribution function of charged particles incident on substrate in RF magnetron sputtering by retarding field energy analyzer2019
- Author(s)
  Yoshinobu Matsuda, Masaki Ishiba, Shu Yasumoto, Tomohiro Furusato, and Takahiko Yamashita
- Organizer
  Int. Symp. on Dry Process (DPS2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 酸化物ターゲットを用いたDC マグネトロンスパッタリングにおけるエネルギー分布関数測定の磁気フィルタ効果2019
- Author(s)
  安元秀, 石場将希, 松田良信, 喜納淳, 山下敬彦
- Organizer
  2019年（令和1年度）応用物理学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 磁気フィルタ付反射電界型エネルギー分析器による負イオン計測2019
- Author(s)
  松田良信，石場将希，安元　秀，古里友宏，山下敬彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 酸化物ターゲットを用いたRFマグネトロンスパッタリングにおけるエネルギー分布関数の磁気フィルタ効果2019
- Author(s)
  安元　秀、石場　将希、喜納　淳、松田良信、山下　敬彦
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第23回支部大会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Measurement of energy distribution function of negatively charged particles incident on a substrate using retarding field energy analyzer in DC magnetron sputtering2019
- Author(s)
  Masaki Ishiba, Yoshinobu Matsuda, Shu Yasumoto, Atsushi Kina, Tomohiro Furusato, Takahiko Yamashita
- Organizer
  XXXIV ICPIG & ICRP-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Measurement of ion energy distribution incident on a magnetron sputter deposition substrate by retarding field energy analyzer2019
- Author(s)
  Yoshinobu Matsuda, Masaki Ishiba, Shu Yasumoto, Tomohiro Furusato, and Takahiko Yamashita
- Organizer
  The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Energy distribution measurement of substrate incident charged particles in DC magnetron discharge of oxide target2019
- Author(s)
  Masaki Ishiba, Shu Yasumoto, Yoshinobu Matsuda, Atsushi Kina, Takahiko Yamashita
- Organizer
  MRM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Measurement of energy distribution function of negative ions incident on substrate by using retarding field energy analyzer attached with magnetic filter2019
- Author(s)
  松田良信，石場将希，安元　秀，古里友宏，山下敬彦
- Organizer
  第35回九州・山口プラズマ研究会
- Invited
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 反射電界型エネルギー分析器を用いたRF マグネトロンスパッタリングにおけるエネルギー分布関数測定2019
- Author(s)
  石場将希, 安元秀, 松田良信, 喜納淳, 山下敬彦
- Organizer
  2019年（令和1年度）応用物理学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Measurement of energy distribution function of negative ions incident on substrate by using retarding field energy analyzer attached with magnetic filter2019
- Author(s)
  Yoshinobu Matsuda, Masaki Ishiba, Shu Yasumoto, Atsushi Kina, Tomohiro Furusato, Takahiko Yamashita
- Organizer
  XXXIV ICPIG & ICRP-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] Measurement of Energy Distribution Functions of Positive and Negative Species by using Retarding Field Energy Analyzer2019
- Author(s)
  Yoshinobu Matsuda, Masaki Ishiba, Shu Yasumoto, Tomohiro Furusato, and Takahiko Yamashita
- Organizer
  APSPT-11
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03810
[Presentation] 基板入射イオンのエネルギー分布測定用反射電界型エネルギー分析器の開発2018
- Author(s)
  松田良信，石場将希，古里友宏，山下敬彦
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] 反射電界型エネルギー分析器によるイオンエネルギー分布測定2018
- Author(s)
  石場将希，喜納淳，松田良信，古里友宏，山下敬彦
- Organizer
  （平成30年度）応用物理学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] バッファ層付ガラス基板へのGa添加ZnO膜の短ギャップRFマグネトロンスパッタリング成膜2018
- Author(s)
  松田良信, 松尾直樹, 石場将希, 古里友宏, 山下敬彦
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] マグネトロンスパッタリングにおける基板入射イオンエネルギー分布関数の測定2018
- Author(s)
  石場将希，喜納淳，松田良信，古里友宏，山下敬彦
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第22回支部大会
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] 短ギャップRFマグネトロンスパッタ堆積Ga添加ZnOの膜特性2017
- Author(s)
  松尾直樹, 古里友宏，山下敬彦, 松田良信
- Organizer
  2017年（平成29年度）応用物理学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] Narrow gap RF magnetron sputtering deposition of gallium doped ZnO thin films2017
- Author(s)
  Yoshinobu Matsuda, Naoki Matsuo, Kohei Sakamoto, Masanori Shinohara, Tomohiro Furusato, and Takahiko Yamashita
- Organizer
  The 11th Asian-European International Conference on Plasma Surface Engineering (AEPSE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] RFマグネトロンスパッタGa添加ZnO膜に及ぼすバッファ層の効果2017
- Author(s)
  松尾直樹, 古里友宏，山下敬彦, 松田良信
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] 短ギャップRFマグネトロンスパッタを用いたGa添加ZnOの成膜2017
- Author(s)
  松田良信，坂本康平，松尾直樹，古里友宏，山下敬彦
- Organizer
  2017年第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] Uniform deposition of Al-doped ZnO films by RF magnetron sputtering using off-axis inclined substrates2017
- Author(s)
  Y. Matsuda, K. Sakamoto, T. Sato, S. Oyamada, N. Matsuo and M. Shinohara
- Organizer
  4th Japan-Korea Joint Symposium on Advance Solar Cells 2017 / International Symposium on Energy Research and Application 2017
- Place of Presentation
  Kyushu Univ. (Fukuoka)
- Year and Date
  2017-02-09
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] Diagnostic Research on Magnetron Sputter-Deposition of Metal-Doped ZnO Films2017
- Author(s)
  Yoshinobu Matsuda, Kohei Sakamoto, Takaki Sato, Naoki Matsuo, and Masanori Shinohara
- Organizer
  IUMRS-ICAM 2017 (International Union of Materials Research Societies, International Conference on Advanced Materials)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] マグネトロンプラズマ中のイオンエネルギー分布測定用RFEAの製作2016
- Author(s)
  佐藤貴紀, 坂本康平, 松尾直樹, 篠原正典, 松田良信
- Organizer
  平成28年度応用物理学会九州支部学術講演会
- Place of Presentation
  対馬市交流センター（対馬市）
- Year and Date
  2016-12-03
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] イオンエネルギー分布測定用遅延電界型エネルギーアナライザーの製作2016
- Author(s)
  佐藤貴紀，坂本康平，松尾直樹，篠原正典，松田良信
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会
- Place of Presentation
  九州大学（福岡市）
- Year and Date
  2016-12-17
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] RFマグネトロンスパッタにおけるGZO膜形成条件の最適化2016
- Author(s)
  坂本康平, 佐藤貴紀, 松尾直樹, 篠原正典, 松田良信
- Organizer
  平成28年度応用物理学会九州支部学術講演会
- Place of Presentation
  対馬市交流センター（対馬市）
- Year and Date
  2016-12-03
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] RFマグネトロンスパッタGa添加ZnO膜の導電性に及ぼすバッファ層の効果2016
- Author(s)
  松尾直樹, 坂本康平, 佐藤貴紀, 小山田俊介, 篠原正典, 松田良信
- Organizer
  平成28年度応用物理学会九州支部学術講演会
- Place of Presentation
  対馬市交流センター（対馬市）
- Year and Date
  2016-12-03
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] Uniform deposition of Al-doped ZnO films on off-axis inclined substrates by using RF magnetron sputtering2016
- Author(s)
  Yoshinobu Matsuda, Hironobu Yokoyama, Shunsuke Oyamada and Masanori Shinohara
- Organizer
  38th International Symposium on Dry Process (DPS2016)
- Place of Presentation
  Hokkaido Univ.(Sapporo)
- Year and Date
  2016-11-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] RFマグネトロンスパッタにおけるGZO膜形成最適条件の探索2016
- Author(s)
  坂本康平，佐藤貴紀，松尾直樹，篠原正典，松田良信
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第20回支部大会
- Place of Presentation
  九州大学（福岡市）
- Year and Date
  2016-12-17
- Data Source
  KAKENHI-PROJECT-16K04995
[Presentation] プラズマ－シリコン表面相互作用で誘起される欠陥生成メカニズムの解明,Ⅳ族元素を基盤とした膜とプラズマとの反応解析によるプラズマ応用プロセスの最適化2014
- Author(s)
  篠原正典，丸野　尚紀，吉田　裕太，堺　廣治，谷口　雄二郎，伊東和樹，中野　大和，松田　良信
- Organizer
  第18回応用物理学会プラズマエレクトロニクス分科会プラズマ新領域研究会
- Place of Presentation
  名古屋大学東山キャンパス (名古屋市)
- Year and Date
  2014-06-14
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] An infrared spectroscopic study on deposition process　of amorphous carbon films using Benzene as a source molecule2013
- Author(s)
  Y. Taniguchi, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  The 12th Asia Pacific Physics Conference
- Place of Presentation
  幕張メッセ (千葉県千葉市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared　spectroscopy of reactions induced by plasma2013
- Author(s)
  Masanori Shinohara, Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda, Hiroshi Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所 (岐阜県土岐市)
- Invited
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Development of MIR-IRAS monitoring system for solution plasmas2013
- Author(s)
  A. Fukae, K. Amano, Y. Takaki, Y. Takami, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  ISPLASMA2013
- Place of Presentation
  Nagoya-Japan
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Carbon-related particle formation with plasma generated in liquid phas2013
- Author(s)
  Musab Timan , M. Shinohara, Y. Yoshida, Y. Matsuda and H. Fujiyama
- Organizer
  Symposium of MTS-Japan
- Place of Presentation
  横浜市開港記念会館，神奈川県横浜市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Infrared Spectroscopic Study on Reaction Process during Plasma Enhanced Chemical Vapor Deposition with Hydrocarbon Molecules as Source Gases2013
- Author(s)
  S. Yagi, Y. Takaki, Y. Taniguchi, M. Shinohara, Y.Matsuda and H. Fujiyama
- Organizer
  the 12th Joint Symposium of Jeju National University and Nagasaki University on Science and Technology
- Place of Presentation
  ラマダホテル済州 (韓国済州市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared spectroscopic study of the reaction between bio related molecules and air-pressureplasma2013
- Author(s)
  Naoki Maruno, Yuta Yoshida, Masanori Shinohara, Yoshinobu Matsuda,and Hiroshi Fujiyama
- Organizer
  The 26th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS
- Place of Presentation
  九州大学医学部百年講堂，福岡県福岡市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Infrared　spectroscopy of reactions induced by plasma2013
- Author(s)
  Masanori Shinohara, Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda, Hiroshi Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所，岐阜県土岐市
- Invited
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Diagnostics for Plasma-Induced Surface Reactions with Infrared Spectroscopy2013
- Author(s)
  Masanori Shinohara, Yoshinobu Matsuda, and Hiroshi Fujiyama
- Organizer
  5rd International Workshop on Plasma Scientech for All Something (June 21-22, 2013, )
- Place of Presentation
  東京工業大学 (東京都目黒区))
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared spectroscopic study of the reaction between NH-terminated self-assembled monomerand solution plasma2013
- Author(s)
  Yuta Yoshida, Naoki Maruno, Masanori Shinohara, Yoshinobu Matsuda,and Hiroshi Fujiyama
- Organizer
  The 26th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS
- Place of Presentation
  九州大学医学部百年講堂，福岡県福岡市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] ベンゼンを原料としたアモルファス状炭素膜の成膜反応の赤外分光解析2013
- Author(s)
  高木雄也,高見佳生,津村高成,八木翔平,谷口雄二郎,丸野尚紀,篠原正典,松田良信,藤山寛
- Organizer
  応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared spectroscopy of reactions induced by plasma2013
- Author(s)
  M. Shinohara, S. Yagi, Y. Taniguchi, N. Maruno, Y. Yoshida, Y. Matsuda, H. Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所
- Invited
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Deposition and surface modification process of amorphous carbon film, investigated with infrared spectroscopy2013
- Author(s)
  Yujiro Taniguchi, Naoki Maruno, Shouhei Yagi, Masanori Shinohara, Yoshinobu Matsuda and Hiroshi Fujiyama
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering
- Place of Presentation
  ラマダホテル済州 (韓国済州市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] ベンゼンを原料として用いたアモルファス炭素膜の堆積過程の赤外分光解析2013
- Author(s)
  谷口　雄二郎，八木翔平，篠原正典，松田良信，藤山寛(
- Organizer
  電気学会プラズマ研究会　　9月5－7日
- Place of Presentation
  長崎大学 (長崎県長崎市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 自己組織化膜と液中プラズマとの反応の赤外分光解析2013
- Author(s)
  吉田裕太，丸野尚紀，篠原正典，松田良信，藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  長崎大学，長崎県長崎市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] エチレンを原料としたプラズマ化学気相堆積の反応計測2012
- Author(s)
  高木雄也、高見佳生、篠原正典、松田良信、藤山寛
- Organizer
  表面科学会全国大会
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 多重内部反射赤外分光法を用いた液中プラズマの反応計測法の開発2012
- Author(s)
  深江陽大、天野勝裕、篠原正典、松田良信、藤山　寛
- Organizer
  九州表面・真空研究会2012(第17回九州薄膜表面研究会)
- Place of Presentation
  佐賀放射光センター
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Development of IR monitoring system of solution plasma2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asia Pacific Conference on Plasma Science and Technology 2012
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Development of In-situ MIR-IRAS monitoring system for reactions induced by solution plasma generation2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  International Conference on Renewable Energy Researches and Applications 2012
- Place of Presentation
  長崎
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Plasma exposure effects on the behavior of hydrogen on amorphous carbon film2012
- Author(s)
  Y. Takaki, S. Yagi, Y. Takami, T. Tsumura, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asia Pacific Conference on Plasma Science and Technology
- Place of Presentation
  京都大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマの「その場」「実時間」反応計測法の開発2012
- Author(s)
  深江陽大・天野勝裕・篠原正典・松田良信・藤山　寛
- Organizer
  電気関係学会九州支部学術講演会
- Place of Presentation
  長崎大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 赤外吸収分光法を用いた液中プラズマの反応解析2012
- Author(s)
  深江陽大，天野勝裕，高木雄也，篠原正典，松田良信，藤山　寛
- Organizer
  プラズマ・核融合学会山口九州沖縄支部　第16回支部会
- Place of Presentation
  九州大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] エチレンプラズマを使ったアモルファス炭素膜堆積反応の赤外分光解析2012
- Author(s)
  高木雄也,高見佳生,八木翔平,津村高成,篠原正典,松田良信,藤山寛
- Organizer
  応用物理学会秋季学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマ誘起反応の計測2012
- Author(s)
  深江陽大、天野勝裕、高木雄也、篠原正典、松田良信、藤山　寛
- Organizer
  表面科学会全国大会
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Investigation on Reactions of Hydrogen Plasma with Si surface, using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS)2012
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyam
- Organizer
  IC－PLANTS2012
- Place of Presentation
  愛知県犬山市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 多重内部反射赤外吸収分光法を用いたプラズマプロセスの計測2012
- Author(s)
  篠原正典, 深江陽大, 天野勝裕, 高見佳生, 高木雄也, 八木翔平, 津村高成, 松田良信, 藤山寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  岩手大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 赤外吸収分光法計測を用いたプラズマが誘起する表面反応の解析・解明2012
- Author(s)
  篠原正典, 高木雄也, 高見佳生, 深江陽大, 天野勝裕, 八木翔平, 津村高成, 松田良信, 藤山寛
- Organizer
  九州山口プラズマ研究会
- Place of Presentation
  由布院倶楽部
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Development of IR monitoring system of solution plasm2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asia Pacific Conference on Plasma Science and Technology
- Place of Presentation
  Kyoto-Japan
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 赤外吸収分光法計測を用いたプラズマが誘起する表面反応の解析・解明2012
- Author(s)
  原正典,高木雄也,高見佳生,深江陽大,天野勝裕,八木翔平,津村高成,松田良信,藤山寛
- Organizer
  九州山口プラズマ研究会
- Place of Presentation
  由布院倶楽部
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Development of In-situ MIR-IRAS monitoring systm for reactions induced by solution plasma generation2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  nternational Conference on Renewable Energy Research and Applications (ICRERA) 2012
- Place of Presentation
  Nagasaki-Japan
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマの診断法の開発2012
- Author(s)
  深江陽大，天野勝裕，篠原正典，松田良信，藤山　寛
- Organizer
  応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 炭化水素を原料としたプラズマ化学気相堆積の赤外分光解析2012
- Author(s)
  高木雄也,高見佳生,八木翔平,津村高成,篠原正典,松田良信,藤山寛
- Organizer
  プラズマ・核融合学会山口九州沖縄支部第16回支部会
- Place of Presentation
  九州大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 紫外LEDを用いたスパッタAl原子密度の吸収計測(II)2011
- Author(s)
  松田良信
- Organizer
  2011年春季第58回応用物理学会関係連合講演会
- Place of Presentation
  厚木市
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama,
- Organizer
  The 8th Asian-European Internationala Conference on Plasma Surface Engineering (AEPSE-2011)(招待講演)
- Place of Presentation
  Dlian- China
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
- Organizer
  The 8th Asian-European International Conference on Plasma Surface Engineering
- Place of Presentation
  大連・中国
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 誘導結合プラズマ支援スパッタ過程における基板入射熱流束測定2011
- Author(s)
  松田良信
- Organizer
  2011年春季第58回応用物理学会関係連合講演会
- Place of Presentation
  厚木市
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] 誘導結合プラズマ支援スパッタ過程における基板入射熱流束測定2011
- Author(s)
  松田良信
- Organizer
  2011年春季第58回応用物理学会関係連合講演会
- Place of Presentation
  神奈川工科大学(厚木市)
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] プラズマプロセスの赤外分光診断2011
- Author(s)
  篠原正典，高木雄也，原幸治郎，高見佳生，天野勝裕，深江陽大，松田良信，藤山寛
- Organizer
  電気学会プラズマ　パルスパワー　合同研究会
- Place of Presentation
  神奈川県長津田市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] プラズマが誘起する表面反応の赤外分光解析2011
- Author(s)
  篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山　寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  大阪府大阪市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 紫外LEDを用いたスパッタAl原子密度の吸収計測(II)2011
- Author(s)
  松田良信
- Organizer
  2011年春季第58回応用物理学会関係連合講演会
- Place of Presentation
  神奈川工科大学(厚木市)
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Heat Influx to a Substrate during ICP Assisted Sputter-Deposition2010
- Author(s)
  Yoshinobu Matsuda
- Organizer
  The 27th Symposium on Plasma Processing(SPP27)
- Place of Presentation
  横浜市開港記念会館(横浜市)
- Year and Date
  2010-02-01
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Energy influx to a substrate during inductively-coupled-plasma assisted sputtering2010
- Author(s)
  Yoshinobu Matsuda
- Organizer
  10th APCPST & 23rd SPSM
- Place of Presentation
  Jeju, Korea
- Year and Date
  2010-07-06
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Energy Flux onto a Substrate during ICP Assisted Sputter-Deposition2010
- Author(s)
  Yoshinobu Matsuda
- Organizer
  63rd Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
- Place of Presentation
  Paris, France
- Year and Date
  2010-10-05
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Deposition of Transparent Conducting Al-Doped ZnO Thin Films by ICP-Assisted Sputtering2010
- Author(s)
  Yoshinobu Matsuda
- Organizer
  TENCON 2010 IEEE Region 10 Conference
- Place of Presentation
  Fukuoka, Japan(invited)
- Year and Date
  2010-11-23
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] 紫外LEDを用いたスパッタAl原子密度の吸収計測2010
- Author(s)
  松田良信
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学(長崎市)
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Inductively Coupled Plasma Assisted Sputter-Deposition of Al-doped ZnO Thin Films2010
- Author(s)
  Yoshinobu Matsuda
- Organizer
  63rd Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
- Place of Presentation
  Paris, France
- Year and Date
  2010-10-05
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Measurement of Gas Phase Metal Atom Densities during ICP Assisted Sputter-Deposition Process of Al-Doped ZnO Thin Films2010
- Author(s)
  Yoshinobu Matsuda
- Organizer
  The 27th Symposium on Plasma Processing(SPP27)
- Place of Presentation
  横浜市開港記念会館(横浜市)
- Year and Date
  2010-02-01
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] 誘導結合プラズマ支援スパッタ過程における基板入射熱流束2010
- Author(s)
  松田良信
- Organizer
  2010年春季第57回応用物理学会関係連合講演会
- Place of Presentation
  東海大学湘南キャンパス(平塚市)
- Year and Date
  2010-03-17
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Al添加ZnO薄膜のICP支援スパッタ過程における金属原子の挙動2010
- Author(s)
  松田良信
- Organizer
  2010年春季第57回応用物理学会関係連合講演会
- Place of Presentation
  東海大学湘南キャンパス(平塚市)
- Year and Date
  2010-03-17
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Inductively-Coupled-Plasma Assisted Sputter-Deposition of Aluminum-doped Zinc Oxide Thin Films2009
- Author(s)
  Y.Matsuda
- Organizer
  The 5th DAE-BRNS National Symposium on Pulsed Laser Deposition of Thin Films and Nanostructured Materials(PLD-2009), December 2-4, 2009, IIT Madras, Chennai India
- Place of Presentation
  IIT Madras, Chennai India
- Year and Date
  2009-12-03
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] 誘導結合プラズマ支援スパッタによるアルミ添加酸化亜鉛薄膜の作成2009
- Author(s)
  松田良信
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  佐賀大学(佐賀市)
- Year and Date
  2009-06-13
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Al添加ZnO薄膜のICP支援スパッタ成膜過程における気相金属原子密度測定2009
- Author(s)
  松田良信
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山大学(富山)
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Diagnostic Study of ICP Assisted Sputter-Deposition of Al-doped ZnO Thin Films2009
- Author(s)
  Y.Matsuda
- Organizer
  The 19th International Symposium on Plasma Chemistry(ISPC19)
- Place of Presentation
  Bochum, Germany
- Year and Date
  2009-07-28
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Absorption Measurement of Metal Atom Density in ICP Assisted Sputter-Deposition of Al-doped ZnO Thin Films2009
- Author(s)
  Y.Matsuda
- Organizer
  31st Int. Symposium on Dry Process, Busan Exhibition & Convention Center, Busan, Korea, September 24 to 25, 2009
- Place of Presentation
  Busan Exhibition & Convention Center, Busan, Korea
- Year and Date
  2009-09-24
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] Al添加ZnOターゲットを用いたマグネトロンスパッタにおけるアーキング現象の観察2008
- Author(s)
  松田良信
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学(愛知)
- Year and Date
  2008-09-04
- Data Source
  KAKENHI-PROJECT-20540485
[Presentation] 誘導結合プラズマ支援によるAl添加ZnOスパッタ薄膜の導電性向上2007
- Author(s)
  松田良信
- Organizer
  2007年秋季第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学(札幌)
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-17540472
[Presentation] Sputter-Deposition of Aluminum-Doped Zinc Oxide Thin Films by Inductively Coupled Plasma Assisted Magnetron Sputtering2007
- Author(s)
  Y. Matsuda
- Organizer
  6th Asian-European Int.Conf.on Plasma Surface Engineering
- Place of Presentation
  Nagasaki
- Year and Date
  2007-09-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Presentation] Influence of RF power on the film properties of aluminum doped zinc oxide deposited by inductively coupled plasma assisted sputtering2007
- Author(s)
  Y., Matsuda, T., Shinbasaki, S., Iwai, M., Shinohara
- Organizer
  29th Int. Symposium on Dry Process
- Place of Presentation
  Tokyo Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Presentation] Discharge characteristics of inductively-coupled-plasma assisted dc planar magnetron for the deposition of aluminum-doped zinc oxide thin films2006
- Author(s)
  Y., Matsuda, Y., Nagano, S., Iwai, M., Shinohara, H., Fujiyama
- Organizer
  8th APCPST&SPSM19
- Place of Presentation
  Cairns Australia
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Presentation] Influence of Rf Power and Substrate Bias Voltage on The Properties of Magneisium Oxide Thin Films Produced by ICP-Assisted Reactive Sputtering2005
- Author(s)
  Y., Matsuda, M., Iwaya, M., Shinohara, H., Fujiyama
- Organizer
  Asian and Europe international Conference on Plasma Surface Engineering
- Place of Presentation
  Qingdao China
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Presentation] Aluminum Doped Zinc Oxide Films Deposition Using Inductively Coupled Plasma Assisted Magnetron Sputtering2005
- Author(s)
  Y., Nagano, S., Iwai, M., Shinohara, Y., Matsuda, H., Fujiyama
- Organizer
  International Symposium on Dry Process
- Place of Presentation
  Juju Korea
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17540472
[Presentation] 炭化水素プラズマによる膜堆積過程の赤外分光反応解析
- Author(s)
  篠原正典，高木雄也，谷口雄二郎，伊東和樹，丸野尚紀，吉田裕太，中野大和，松田良信，藤山寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  大阪府立大学 (羽曳野市)
- Year and Date
  2014-09-08 – 2014-09-10
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared Absorption Spectroscopic Study on Deposition Process Induced by Benzene Plasma Exposure
- Author(s)
  Masanori Shinohara, Yujiro Taniguchi, Kazuki Ito, Naoki Maruno, Yoshinobu Matsuda, and Hiroshi Fujiyama
- Organizer
  International Conference on Microelectronics and Plasma Technology 2014
- Place of Presentation
  Gunsan, Korea
- Year and Date
  2014-07-08 – 2014-07-11
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] アミノ基を有する自己組織化単分子膜とプラズマの反応の赤外分光
- Author(s)
  丸野尚紀, 谷口雄二郎, 吉田裕太, 中野大和, 伊東和樹, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] アモルファス炭素膜とプラズマの反応の赤外分光解析
- Author(s)
  篠原　正典，谷口　雄二郎，丸野　尚紀，松田　良信，藤山　寛
- Organizer
  電気学会A部門大会
- Place of Presentation
  信州大学 (長野市)
- Year and Date
  2014-08-21 – 2014-08-22
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Hydrogen Plasma Induced Hydrogen Insertion into Si Subsurface, Investigated with Infrared Absorption Spectroscopy
- Author(s)
  Masanori Shinohara, Naoki Maruno, Yoshinobu Matsuda, and Hiroshi Fujiyama
- Organizer
  International Conference on Microelectronics and Plasma Technology
- Place of Presentation
  Gunsan, Korea
- Year and Date
  2014-07-08 – 2014-07-11
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] チオール基を有する自己組織化単分子膜とプラズマの反応の赤外分光解析
- Author(s)
  中野大和, 丸野尚紀, 谷口雄二郎, 吉田裕太, 伊東和樹, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] ベンゼンを用いたプラズマ化学的気相堆積過程の赤外吸収分光解析
- Author(s)
  伊東和樹, 谷口雄二郎, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared Spectroscopic study on interaction between plasma and solid surface
- Author(s)
  Masanori Shinohara, Yuta Yoshida, Naoki Maruno, Yujiro Taniguchi, Kazuki Ito, Yamato Nakano, Yoshinobu Matsuda and Hiroshi Fujiyama
- Organizer
  Plasma Conference
- Place of Presentation
  Toki Messe, Niigata, Japan
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 炭化水素プラズマによる膜形成初期過程の赤外分光解析
- Author(s)
  篠原正典，谷口雄二郎，伊東和樹，丸野尚紀，中野大和，吉田裕太，松田良信，藤山寛
- Organizer
  表面科学学術講演会
- Place of Presentation
  くにびきメッセ，(松江市)
- Year and Date
  2014-11-06 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Consideration of Adsorption Process of Benzene Plasma with Isotope Effect
- Author(s)
  M. Shinohara, K. Ito, Y. Taniguchi, Y. Matsuda and H. Fujiyam
- Organizer
  The 7th International Symposium on Surface Science
- Place of Presentation
  Kunibiki Messe, Matsue, Shimane, Japan
- Year and Date
  2014-11-02 – 2014-11-06
- Data Source
  KAKENHI-PROJECT-24340144

1. FUJIYAMA Hiroshi (20112310)

# of Collaborated Projects: 9 results

# of Collaborated Products: 4 results
2. SHINOHARA Masanori (80346931)

# of Collaborated Projects: 5 results

# of Collaborated Products: 65 results
3. 大野哲靖 (60203890)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. MURAOKA Katsunori (80038546)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. 梶原寿了 (00185779)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. TANAKA Kenji (50260047)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. MITARAI Osamu (00181925)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. UCHINO Kiichiro (10160285)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 桑原清 (30264203)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. 堤井信力 (70061512)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 小野茂 (80097170)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 松村昭作 (00061549)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 山下敬彦 (50182499)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. ダグラスボーデンマー (10260720)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 平川靖之 (80238344)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. HORTON L

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. MORGAN P.D

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. SUMMERS D.D.R

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. GOWERS C

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. NIELSEN P

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. STOTT P.E

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. BOWDEN M

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. MORGAN P.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. COSTLEY A.E.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
25. STOTY P.E.

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
26. 小田昭紀

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

MATSUDA Yoshinobu 松田 良信

松田 良信 マツダ ヨシノブ

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Measurement of ion energy distribution incident on substrate by retarding field energy analyzerPrincipal Investigator

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Development of retarding field energy analyzer that can measure energy distribution of negative ionsPrincipal Investigator

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Plasma-Assist Effect on the Sputter-Deposition Process of Transparent Conductive Metal-doped Zinc Oxide Thin FilmsPrincipal Investigator

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Fabrication of Transparent Conductive Zinc Oxide Thin Film Using Inductively Coupled Plasma Assisted SputteringPrincipal Investigator

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Studies on Reactive Sputtering Processes of Oxide Thin FilmsPrincipal Investigator

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レーザー分光による反応性スパッタリング過程の研究Principal Investigator

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レーザー分光による反応性スパッタリング過程の研究Principal Investigator

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MATSUDA Yoshinobu 松田良信

松田良信マツダヨシノブ