KIMURA Takashi 木村高志

Researcher Number	60225042
Other IDs
External Links
Affiliation (Current)	2025: 名古屋工業大学, 工学(系)研究科(研究院), 准教授
Affiliation (based on the past Project Information) *help	2011 – 2023: 名古屋工業大学, 工学(系)研究科(研究院), 准教授 2010: Nagoya Institute of Technology, 大学院・工学研究科, 准教授 2008 – 2009: Nagoya Institute of Technology, 工学研究科, 准教授 2003 – 2005: Nagoya Institute of Technology, Graduate school of Engineering, Associate Professor, 工学研究科, 助教授 2000 – 2002: 名古屋工業大学, 工学部, 助教授
Review Section/Research Field	Principal Investigator Power engineering/Power conversion/Electric machinery / Basic Section 21010:Power engineering-related / 電力工学・電気機器工学 / 電力工学・電気機器工学 Except Principal Investigator Electron device/Electronic equipment / 電子デバイス・機器工学
Keywords	Principal Investigator パルスプラズマ / ダイヤモンドライクカーボン / スパッタリング / プラズマ / ハードコーティング / 無声放電 / オゾン生成効率 / オゾン / 薄膜作製 / スパッタ … More / プラズマイオンプロセス / マグネトロンスパッタ / 薄膜 / 酸素 / ハ－ドコーティング / HiPIMS / 機能性薄膜 / ハ－ドコ－ティング / マルチレイヤ / 硬質薄膜 / 多層コーティング / 多層フィルム / 高出力パルススパッタ / 遷移金属窒化膜 / マルチレイヤー / パルススパッタ / ハードコーティング材料 / ハイパワ－パルススパッタ / 窒素イオン / プラズマイオン注入 / 対向タ－ゲット方式 / 窒素ドープ / ダイヤモンドライクカ－ボン / ペニング放電 / ハイパワーパルススパッタプラズマ / シリコンド－プ / 導電性 / ダイヤモンドライクカ―ボン / イオン注入 / プラズマ材料プロセス / ozone formation / oxygen / barrier discharge / capacitive discharge / atmospheric pressure / ヘリウム・酸素混合 / 酸素原子 / He希釈 / オゾン生成 / バリア放電 / 高周波放電 / 大気圧 / Simulation / Fluid Model / Barrier Discharge / Ozone production efficiency / Oxygen / Rare gas / Ozone / 希ガス・酸素混合 / シミュレーション / 流体モデル / 希ガス・酸素 / 対向タ-ゲット型スパッタ / ホロ-カソ-ド / 硬質薄膜作製 / 誘導性結合プラズマ / 化学反応性プラズマ / アモルファスカーボン / パルスパワー / 反応性プラズマ / アモルファスカ－ボン / フッ素 / 炭素 / プロセス応用 / フッ化ダイヤモンドライクカーボン / PTFE / 材料プロセス / アブレーション / アルゴン / グローバルモデル / 電気的負性放電 / プローブ計測 / プロセス用プラズマ / 誘導性結合高周波放電 / 容量性結合高周波放電 … More Except Principal Investigator oversized waveguide / Gunn diode / short millimeter wave / harmonic generation / special power combining / オーバーサイズ導波管 / ガンダイオード / 短ミリ波 / 周波数逓倍 / 空間電力合成 / 高周波伝送線路 / 光励起プラズマ / 半導体 / ドップラー効果 / 周波数変換 Less

Preparation of functional materials via highly efficient and sustainable sputtering system using multi pulse plasmaPrincipal Investigator
- Principal Investigator
  
  木村高志
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21010:Power engineering-related
- Research Institution
  Nagoya Institute of Technology
Preparation of functional hard coating films with multilayer structure via pulsed sputtering plasma with high-densityPrincipal Investigator
- Principal Investigator
  
  Kimura Takashi
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21010:Power engineering-related
- Research Institution
  Nagoya Institute of Technology
Preparation of functional hard coating materials by high density pulsed plasma ion implantationPrincipal Investigator
- Principal Investigator
  
  KIMURA Takashi
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Power engineering/Power conversion/Electric machinery
- Research Institution
  Nagoya Institute of Technology
Development of equipment for multi-purpose materials processing by ions produced in high-density pulsed discharge plasmasPrincipal Investigator
- Principal Investigator
  
  KIMURA Takashi
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Power engineering/Power conversion/Electric machinery
- Research Institution
  Nagoya Institute of Technology
Development of process equipment for deposition of amorphous carbon films by pulsed plasmas with high plasma densityPrincipal Investigator
- Principal Investigator
  
  KIMURA TAKASHI
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Power engineering/Power conversion/Electric machinery
- Research Institution
  Nagoya Institute of Technology
Development of plasma process equipment with pulsed plasma ablation techniquePrincipal Investigator
- Principal Investigator
  
  KIMURA Takashi
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Power engineering/Power conversion/Electric machinery
- Research Institution
  Nagoya Institute of Technology
Study on high frequency discharge containing oxygen at atmospheric pressurePrincipal Investigator
- Principal Investigator
  
  KIMURA Takashi
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Nagoya Institute of Technology
Study on a power combiner using an oversized-waveguide resonator at short millimeter wavelengths.
- Principal Investigator
  
  BAE Jongsuck
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Nagoya Institute of Technology
半導体中の光励起プラズマを利用した周波数アップコンバータの研究
- Principal Investigator
  
  BAE Jongsuck (ペイ鐘石)
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Nagoya Institute of Technology
  Tohoku University
Study on high concentration ozonizer using barrier discharges of rare gas -oxygen mixturePrincipal Investigator
- Principal Investigator
  
  KIMURA Takashi
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Nagoya Institute of Technology
高周波プラズマ源を用いた超微細加工処理装置の試作Principal Investigator
- Principal Investigator
  
  木村高志
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Nagoya Institute of Technology

[Journal Article] Properties of multilayered CrN/VN films prepared using a hybrid system of high-power impulse magnetron sputtering and pulsed magnetron sputtering2023
- Author(s)
  Takashi Kimura, Hiroki Maeda
- Journal Title
  
  IEEE Transactions on Plasma Science
  
  Volume: 51 Issue: 2 Pages: 320-326
- DOI
  10.1109/tps.2022.3175190
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04442
[Journal Article] Properties of CrN/TiN multilayer films with nanoscale layer thickness2023
- Author(s)
  Takashi Kimura, Hiroki Maeda
- Journal Title
  
  IEEE Transactions on Plasma Science
  
  Volume: 51 Issue: 2 Pages: 327-332
- DOI
  10.1109/tps.2022.3185148
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04442
[Journal Article] Preparation of silicon-doped diamond-like carbon films with electrical conductivity by reactive high-power impulse magnetron sputtering combined with a plasma-based ion implantation system2020
- Author(s)
  Y. Shibata, T. Kimura, S. Nakao, K. Azuma
- Journal Title
  
  Diamond and Related Materials
  
  Volume: 101 Pages: 107635-107635
- DOI
  10.1016/j.diamond.2019.107635
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K06298
[Journal Article] Plasma based nitrogen ion implantation to hydrogenated diamond-like carbon films2018
- Author(s)
  T. Kimura、H. Yanai、S. Nakao、K. Azuma
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: 433 Pages: 87-92
- DOI
  10.1016/j.nimb.2018.08.009
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K06298
[Journal Article] Preparation of TiN films by reactive high-power pulsed sputtering Penning discharges2018
- Author(s)
  T. Kimura, R. Yoshida, K.Azuma, S. Nakao
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 6S2 Pages: 06JE02-06JE02
- DOI
  10.7567/jjap.57.06je02
- NAID
  210000149203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K06298
[Journal Article] Preparation of titanium carbon nitride films by reactive high power pulsed sputtering Penning discharges2018
- Author(s)
  T. Kimura, R. Yoshida, K. Azuma, S. Nakao
- Journal Title
  
  Vacuum
  
  Volume: 157 Pages: 192-201
- DOI
  10.1016/j.vacuum.2018.08.043
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K06298
[Journal Article] Preparation of diamond-like carbon films using reactive Ar/CH4 high power impulse magnetron sputtering system with negative pulse voltage source for substrate2016
- Author(s)
  Takashi Kimura, Hikaru Kamata
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 4 Pages: 046201-046201
- DOI
  10.7567/jjap.55.046201
- NAID
  210000146252
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26420230
[Journal Article] Properties of diamond-like carbon films prepared by high power pulsed sputtering with two facing targets2016
- Author(s)
  Takashi Kimura, Toshihiko Mishima, Kingo Azuma, Setsuo Nakao
- Journal Title
  
  Surface and Coatings Technology
  
  Volume: 307 Pages: 1953-1058
- DOI
  10.1016/j.surfcoat.2016.07.030
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26420230
[Journal Article] Preparation of hydrogenated diamond-like carbon films using high density pulsed plasmas of Ar/C2H2 and Ne/C2H2 mixture2016
- Author(s)
  Takashi Kimura, Hikaru Kamata
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26420230
[Journal Article] Properties of inductively coupled radio frequency CH4/H2 plasmas:experiments and global model2012
- Author(s)
  Takashi Kimura, Hiroki Kasugai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51 Issue: 4R Pages: 46202-46202
- DOI
  10.1143/jjap.51.046202
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560324
[Journal Article] Properties of inductively coupled rf CH_4/H_2 plasmas : experiments and global model2012
- Author(s)
  T. Kimura and H. Kasugai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51巻
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560324
[Journal Article] Deposition of fluorinated diamond-like-carbon films by exposure of electrothermal pulsed plasmas2011
- Author(s)
  T.Kimura, M.Iida
- Journal Title
  
  Japanese Journal of Applied Physics Special Issue 印刷中
- NAID
  210000071071
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560267
[Journal Article] Deposition of fluorinated diamond-like-carbon films by exposure of electrothermal pulsed plasmas2011
- Author(s)
  T.Kimura, M.Iida
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Special Issue(掲載確定)
- NAID
  210000071071
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560267
[Journal Article] Comparison of plasma parameters measured in inductively coupled Ar/C_4F_8/O_2 and Ar/CF_4/O_2 plasmas2009
- Author(s)
  T.Kimura, K.Hanaki
- Journal Title
  
  Japanese Journal of Applied Physics 48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560267
[Journal Article] Comparison of plasma parameters measured in inductively coupled Ar/C_4F_8/O_2 and Ar/CF_4/O_2 plasmas2009
- Author(s)
  T.Kimura, K.Hanaki
- Journal Title
  
  Japanese Journal of Applied Physics 48巻
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560267
[Journal Article] Experiments and global model analysis of inductively coupled CF_4/O_2/Ar plasmas2008
- Author(s)
  T. Kimura, K. Hanaki
- Journal Title
  
  Japanese Journal of Applied Physics 47
  
  Pages: 8537-8545
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560267
[Journal Article] Experimental study on atmospherlc pressure RF capacitive He/0_2 and He/CF_4/O_2 discharges2006
- Author(s)
  T.Hanai, T.Kimura
- Journal Title
  
  Proceedings of 6^<th> International Conference on Reactive Plasmas / 23rd Symposium on Plasma Processing 23
  
  Pages: 371-372
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Experimental study of capacitive He/O_2 discharges at atmospheric pressure2006
- Author(s)
  T.Kimura, T.Hanai
- Journal Title
  
  Japanese Journal of Applied Physics 45
  
  Pages: 4219-4221
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Experimental study on atmospheric pressure RF capacitive He/O_2 and He/CF_4/O_2 discharges2006
- Author(s)
  T.Hanai, T.Kimura
- Journal Title
  
  Proceedings of 6^<th> International Conference on Reactive Plasmas /23rd Symposium on Plasma Processing 23
  
  Pages: 371-372
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Experimental study of capacitive He/0_2 discharges at atmospheric pressure2006
- Author(s)
  T.Kimura, T.Hanai
- Journal Title
  
  Japanese Journal of Applied Physics 45
  
  Pages: 4219-4221
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Experimental study of capacitive He/O_2 discharges at atmospheric pressure2006
- Author(s)
  T.Kimura, T.Hanai
- Journal Title
  
  Japanese Journal of Applied Physics 45(To be published)
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Experimental study on atmospheric pressure RF capacitive He/O_2 and He/CF_4/O_2 discharges2006
- Author(s)
  T.Hanai, T.Kimura
- Journal Title
  
  Proceedings of 6^<th> International Conference on Reactive Plasmas / 23rd Symposium on Plasma Processing 23
  
  Pages: 371-372
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Modeling of atmospheric-pressure and radio-frequency discharge plasmas in helium -Influence of small admixture of oxygen on discharge properties-2005
- Author(s)
  T.Hasegawa, A.Oda, T.Kimura, Y.Oshikane
- Journal Title
  
  Plasma Science Symposium2005/ The 22th Symposium on Plasma Processing 22
  
  Pages: 113-114
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Ozone formation in atmospheric O_2/He discharge2005
- Author(s)
  Y.Hattori, T.Kimura
- Journal Title
  
  Plasma Science Symposium2005/The 22th Symposium on Plasma Processing 22
  
  Pages: 703-704
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Ozone Formation in Atmospheric O_2/He Discharge2005
- Author(s)
  Y.Hattori, T.Kimura
- Journal Title
  
  Plasma Science Symposium 2005/The 22th Symposium on Plasma Processing 22
  
  Pages: 703-704
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Modeling of atmospheric-pressure and radio-frequency discharge plasmas in Helium -Influence of small admixture of oxygen on discharge properties-2005
- Author(s)
  T.Hasegawa, A.Oda, T.Kimura, Y.Oshikane
- Journal Title
  
  Plasma Science Symposium2005/The 22th Symposium on Plasma Processing 22
  
  Pages: 113-114
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Modeling of Atmospheric-Pressure and Radio-Frequency Discharge Plasmas in Helium -Influence of small admixture of oxygen on discharge properties-2005
- Author(s)
  T.Hasegawa, A.Oda, T.Kimura, Y.Oshikane
- Journal Title
  
  Plasma Science Symposium 2005/The 22th Symposium on Plasma Processing 22
  
  Pages: 113-114
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Ozone formation in atmospheric 0_2/He discharge2005
- Author(s)
  Y.Hattori, T.Kimura
- Journal Title
  
  Plasma Science Symposium2005/ The 22th Symposium on Plasma Processing 22
  
  Pages: 703-704
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Ozone Production Efficiency of Atmospheric Dielectric Barrier Discharge of Oxygen Using Time-Modulated Power Supply2004
- Author(s)
  T.Kimura, Y.Hattori, A.Oda
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 7689-7692
- NAID
  10014030828
- Data Source
  KAKENHI-PROJECT-16560242
[Journal Article] Ozone production efficiency of atmospheric dielectric barrier discharge of oxygen using time-modulated power supply2004
- Author(s)
  T.Kimura, Y.Hattori, A.Oda
- Journal Title
  
  Japanese Journal of Applied Physics 43
  
  Pages: 7689-7692
- NAID
  10014030828
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16560242
[Presentation] Hard diamond-like carbon thin film deposited by multi pulse HiPIMS2023
- Author(s)
  Kenta Ozeki, and Takashi Kimura
- Organizer
  日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K03817
[Presentation] Fabrication of zirconium oxide films by reactive HiPIMS combined with multi pulse magnetron sputtering2023
- Author(s)
  Shunsuke Ando, and Takashi Kimura
- Organizer
  日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K03817
[Presentation] Vanadium oxide films synthesized via reactive HiPIMS combined with multi pulse magnetron sputtering2023
- Author(s)
  Takashi Kimura, and Yoshinobu Takagi
- Organizer
  44th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03817
[Presentation] Synthesis of diamond-like carbon thin film via multi pulse high-power impulse magnetron sputtering2022
- Author(s)
  Takashi Kimura
- Organizer
  75th Annual Gaseous Electronics Conference/11th International Conference on Reactive Plasmas
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04442
[Presentation] Multilayered CrN/TiN and CrN/VN films prepared via hybrid system of HiPIMS and pulsed-DC magnetron sputtering2021
- Author(s)
  M. Maeda, T. Kimura
- Organizer
  The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04442
[Presentation] Properties of CrN/VN multilayer films prepared via a hybrid system of HiPIMS and pulsed-DC magnetron sputtering2021
- Author(s)
  M. Maeda, T. Kimura
- Organizer
  2021 International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04442
[Presentation] Deposition of Si-doped DLC films by reactive HiPIMS combined with PBII system2019
- Author(s)
  T. Kimura, Y. Shibata, S. Nakao, K. Azuma
- Organizer
  The 15th international symposium on sputtering & plasma processes
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06298
[Presentation] Properties of TiSiN films ｐrepared by ｈigh ｐower ｐulsed sputtering Penning discharge2019
- Author(s)
  T. Kimura, R. Yoshida, K. Azuma
- Organizer
  12th Asian-European international conference on plasma surface engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06298
[Presentation] Deposition and ion irradiation multi-process coating of diamond-like carbon films using bipolar type plasma-based ion implantation2018
- Author(s)
  S. Nakao, H. Yanai, T.Kimura, K. Azuma
- Organizer
  40th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06298
[Presentation] Preparation of TiSiN films by reactive high power pulsed sputter Penning discharges2018
- Author(s)
  R. Yoshida、T. Kimura
- Organizer
  40th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06298
[Presentation] Plasma Based Nitrogen Ion Implantation to Hydrogenated Diamond-like Carbon Films2017
- Author(s)
  T. Kimura, H.Yanai, S. Nakao, and K. Azuma
- Organizer
  11th Asian-European International Conference on Plasma Surface Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06298
[Presentation] Preparation of TiN films by reactive high power pulsed sputter Penning discharges2017
- Author(s)
  T. Mishima, T. Kimura, R. Yoshida, K. Azuma, and S. Nakao
- Organizer
  39th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K06298
[Presentation] ホロ－形状ターゲットを持つ高電力パルススパッタの電気特性2017
- Author(s)
  木村高志,三島俊彦
- Organizer
  第34回プラズマプロセッシング研究会
- Place of Presentation
  北海道大学
- Year and Date
  2017-01-16
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] バイポ－ラパルスバイアスシステムと組み合わせた反応性HPPMSによるSi含有DLCの成膜2016
- Author(s)
  鎌田光速、木村高志、中尾節男、東欣吾
- Organizer
  応用物理学会秋季講演会
- Place of Presentation
  朱鷺メッセ (新潟)
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] Formation of hydrogenated amorphous carbon films by reactive high power impulse magnetron sputtering containing C2H2 gas2015
- Author(s)
  Takashi Kimura,Hikaru Kamata
- Organizer
  68th Annual Gaseous Electronics Conference
- Place of Presentation
  Hawaii Convention Center,USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] Preparation of hydrogenated diamond-like carbon films by reactive Ar/CH4 high power impulse magnetron sputtering with negative pulse voltage2015
- Author(s)
  Takashi Kimura,Hikaru Kamata
- Organizer
  68th Annual Gaseous Electronics Conference
- Place of Presentation
  Hawaii Convention Center,USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] 対向ターゲット型ハイパワーパルススパッタの特性2015
- Author(s)
  三島俊彦、木村高志、東欣吾、中尾節男
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] Properties of amorphous carbon films prepared by high power pulsed sputtering with two facing targets2015
- Author(s)
  Takashi Kimura, Toshihiko Mishima, Kingo Azuma, Setsuo Nakao
- Organizer
  The 10th Asia-European International Conference on Plasma Surface Engineering
- Place of Presentation
  Ramada Plaza Jeju Hotel, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] Formation of amorphous CNx films by reactive Ar/N2 high power impulse magnetron sputtering2014
- Author(s)
  T. Kimura and R. Nishimura
- Organizer
  8th International Conference on Reactive Plasmas
- Place of Presentation
  福岡
- Year and Date
  2014-02-05
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Formation of amorphous CNx films by reactive Ar/N2 high power impulse magnetron sputtering2014
- Author(s)
  Takashi Kimura and Ryotaro Nishimura
- Organizer
  International Conference on Reactive Plasmas
- Place of Presentation
  福岡国際会議場
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Effects of hydrocarbon gas addition on properties of amorphous carbon films deposited by high power impulse magnetron sputtering2013
- Author(s)
  T. Kimura and R. Nishimura
- Organizer
  13th Asian-European International Symposium on Plasma Surface Engineering
- Place of Presentation
  Korea Jeju Island
- Year and Date
  2013-08-26
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Deposition of amorphous carbon films by inductively coupled discharges containing hydrocarbon gases2013
- Author(s)
  木村高志, 西村亮太郎, 杉野幸也
- Organizer
  International Symposium on Advanced Plasma Science and its Applications
- Place of Presentation
  Nagoya University
- Year and Date
  2013-01-30
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] 高出力パルスマグネトロンスパッタリングによるカーボンイオンの高密度生成2013
- Author(s)
  木村高志
- Organizer
  応用物理学会
- Place of Presentation
  同志社大学
- Invited
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Properties of diamond-like carbon films deposited by high power impulse magnetron sputtering2013
- Author(s)
  T. Kimura and R. Nishimura
- Organizer
  13th Asian-European International Symposium on Plasma Surface Engineering
- Place of Presentation
  Korea Jeju Island
- Year and Date
  2013-08-26
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] 高出力パルスマグネトロンスパッタリングによるカーボンイオンの高密度生成2013
- Author(s)
  木村高志
- Organizer
  応用物理学会
- Place of Presentation
  同士社大学
- Year and Date
  2013-09-17
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Deposition of amorphous carbon films by inductively coupled CH_4 plasmas2012
- Author(s)
  Takashi Kimura
- Organizer
  11thAPCPST and 25th SPSM
- Place of Presentation
  Kyoto University
- Year and Date
  2012-10-04
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] High power pulsed magnetron sputtering for deposition of amorphous carbon films2012
- Author(s)
  Takashi Kimura and Ryotaro Nishimura
- Organizer
  65th Gaseous Electronics Conference
- Place of Presentation
  アメリカテキサス州オ-スチン
- Year and Date
  2012-10-24
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Deposition of diamond-like-carbon films by high power pulsed2011
- Author(s)
  T. Kimura and M. Iida
- Organizer
  International Symposium on Dry Process
- Place of Presentation
  Kyoto Garden Palace Hotel
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] DLC成膜向け高電力パルスマグネトロンスパッタリングプラズマの特性2011
- Author(s)
  木村高志, 西村亮太郎, 飯田将康
- Organizer
  Plasma Conference 2011
- Place of Presentation
  石川県立音楽堂
- Year and Date
  2011-11-24
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Deposition of diamond-like-carbon films by high power pulsed magnetron sputtering2011
- Author(s)
  T. Kimura and M. Iida
- Organizer
  International Symposium on Dry Process
- Place of Presentation
  Kyoto Garden Palace Hotel
- Year and Date
  2011-11-11
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] パルスプラズマスラスタを用いたDLC膜の堆積2010
- Author(s)
  飯田将康, 木村高志
- Organizer
  27th Symposium on Plasma Processing
- Place of Presentation
  横浜
- Year and Date
  2010-02-01
- Data Source
  KAKENHI-PROJECT-20560267
[Presentation] パルスプラズマスラスタを用いたDLC膜の堆積2010
- Author(s)
  飯田将康, 木村高志
- Organizer
  27th Symposium on Plasma Processing
- Place of Presentation
  横浜市開港記念会館
- Year and Date
  2010-02-01
- Data Source
  KAKENHI-PROJECT-20560267
[Presentation] Deposition of fluorinated diamond-like carbon films using pulsed plasma thruster2010
- Author(s)
  T.Kimura, M.Iida
- Organizer
  63th Gaseous Electronics Conference/International Conference on Reactive Plasmas
- Place of Presentation
  Paris, France
- Year and Date
  2010-10-05
- Data Source
  KAKENHI-PROJECT-20560267
[Presentation] Deposition of fluorinated diamond like carbonfilms using pulsed plasma thruster2010
- Author(s)
  木村高志, 飯田将康
- Organizer
  63th Gaseous Electronics Conference/International Conference on Reactive Plasmas
- Place of Presentation
  Paris
- Year and Date
  2010-10-05
- Data Source
  KAKENHI-PROJECT-20560267
[Presentation] アブレーション用パルスプラズマの基本特性2009
- Author(s)
  木村高志, 飯田将康
- Organizer
  平成20年度電気学会全国大会
- Place of Presentation
  北海道大学
- Year and Date
  2009-03-19
- Data Source
  KAKENHI-PROJECT-20560267
[Presentation] Application of pulsed plasma thruster to materials processing2009
- Author(s)
  T.Kimura, M.Iida, A.Oda
- Organizer
  62th Gaseous Electronics Conference
- Place of Presentation
  Saratoga Spring, NY, USA
- Year and Date
  2009-10-22
- Data Source
  KAKENHI-PROJECT-20560267
[Presentation] アプレーション用パルスプラズマの基本特性2009
- Author(s)
  木村高志, 飯田将康
- Organizer
  平成20年度電気学会全国大会
- Place of Presentation
  北海道大学
- Year and Date
  2009-03-19
- Data Source
  KAKENHI-PROJECT-20560267
[Presentation] High Power Pulsed Magnetron Sputtering for Deposition of Amorphous CarbonFilms
- Author(s)
  Takashi Kimura, Ryotaro Nishimura
- Organizer
  65th Gaseous Electronics Conference
- Place of Presentation
  Austin,Texas,USA
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Preparation of DLC films by high power pulsed magnetron sputtering with facing targets
- Author(s)
  三島俊彦、木村高志、東欣吾、中尾節男
- Organizer
  International Symposium on Advanced Plasma Science and its Applications
- Place of Presentation
  名古屋大学
- Year and Date
  2015-03-26 – 2015-03-31
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] 対向タ－ゲット型HPPSペニング放電によるDLC成膜
- Author(s)
  木村高志、東欣吾、中尾節男
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26420230
[Presentation] Deposition of amorphous carbon films by inductively coupled discharges containing hydrocarbon gases
- Author(s)
  木村高志、西村亮太郎、杉野幸也
- Organizer
  International Symposium on Advanced Plasma Science and its Applications
- Place of Presentation
  Nagoya University
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] Deposition of amorphous carbon films by inductively coupled CH4 plasmas
- Author(s)
  Takashi Kimura
- Organizer
  11thAPCPST and 25th SPSM
- Place of Presentation
  Kyoto University
- Data Source
  KAKENHI-PROJECT-23560324
[Presentation] ダイヤモンドライクカ－ボン形成向け高電力パルスマグネトロンスパッタ放電
- Author(s)
  木村高志、西村亮太郎
- Organizer
  第30回プラズマプロセシング研究会(SPP-30)
- Place of Presentation
  アクトシティ浜松
- Data Source
  KAKENHI-PROJECT-23560324

1. BAE Jongsuck (20165525)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
2. ODA Akinori (70335090)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. ISHIKAWA Ryo (30333892)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. 莅戸立夫 (00261149)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

KIMURA Takashi 木村 高志

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Preparation of functional materials via highly efficient and sustainable sputtering system using multi pulse plasmaPrincipal Investigator

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Preparation of functional hard coating films with multilayer structure via pulsed sputtering plasma with high-densityPrincipal Investigator

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Preparation of functional hard coating materials by high density pulsed plasma ion implantationPrincipal Investigator

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Development of equipment for multi-purpose materials processing by ions produced in high-density pulsed discharge plasmasPrincipal Investigator

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Development of process equipment for deposition of amorphous carbon films by pulsed plasmas with high plasma densityPrincipal Investigator

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Development of plasma process equipment with pulsed plasma ablation techniquePrincipal Investigator

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Study on high frequency discharge containing oxygen at atmospheric pressurePrincipal Investigator

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Study on a power combiner using an oversized-waveguide resonator at short millimeter wavelengths.

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半導体中の光励起プラズマを利用した周波数アップコンバータの研究

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Study on high concentration ozonizer using barrier discharges of rare gas -oxygen mixturePrincipal Investigator

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高周波プラズマ源を用いた超微細加工処理装置の試作Principal Investigator

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[Journal Article] Properties of multilayered CrN/VN films prepared using a hybrid system of high-power impulse magnetron sputtering and pulsed magnetron sputtering2023

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[Journal Article] Properties of CrN/TiN multilayer films with nanoscale layer thickness2023

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KIMURA Takashi 木村高志