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HAMAGUCHI Satoshi  浜口 智志

Researcher Number 60301826
Other IDs
  • ORCIDhttps://orcid.org/0000-0001-6580-8797
External Links
Affiliation (based on the past Project Information) *help 2022 – 2024: 大阪大学, 大学院工学研究科, 教授
2021: 大阪大学, 工学研究科, 教授
2015 – 2019: 大阪大学, 工学研究科, 教授
2016: 大阪大学, 工学部, 教授
2012 – 2015: 大阪大学, 工学(系)研究科(研究院), 教授 … More
2013: 大阪大学, 工学系研究科, 教授
2011 – 2012: 大阪大学, 大学院・工学研究科, 教授
2009 – 2010: Osaka University, 工学研究科, 教授
2007 – 2009: Osaka University, 大学院・工学研究科, 教授
2006: Osaka University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授
2004 – 2005: 大阪大学, 大学院・工学研究科, 教授
2000 – 2002: Kyoto University, Graduate School of Energy Science, Associate Professor, エネルギー科学研究科, 助教授
1999: 京都大学, 大学院・エネルギー科学研究科, 助教授 Less
Review Section/Research Field
Principal Investigator
Plasma science / Science and Engineering / Medium-sized Section 14:Plasma science and related fields / Plasma electronics / プラズマ理工学 / Science and Engineering / Basic Section 14010:Fundamental plasma-related
Except Principal Investigator
Orthopaedic surgery / プラズマ理工学 / Plasma science
Keywords
Principal Investigator
プラズマ表面相互作用 / プラズマ / 分子動力学シミュレーション / イオンビーム / プラズマプロセス / 反応性プラズマ / 数値シミュレーション / プラズマ医療 / プラズマ・プロセス / PIC-MCC … More / 活性酸素 / 大気圧プラズマ / シミュレーション / 反応性イオンエッチング / 湯川系 / 強結合プラズマ / マイクロバブル / マイクロプラズマ / 低エネルギーイオン / ICPプラズマ / 単層グラフェン / 表面プロセス工学 / 原子層エッチング ALE / 原子層堆積 ALD / 原子層エッチング ALE / 半導体プロセス / 多階層シミュレーション / プロセス・インフォマティクス / プラズマ・インフォマティクス / 記述子 / 人工知能(AI) / ノンパラメトリック回帰 / スパースモデリング / 深層学習 / 機械学習 / プラズマ加工 / 第一原理シミュレーション / 原子層プロセス / ゲノムスケール / 数費シミュレーション / 代謝モデル / 大腸菌 / ゲノムスケール代謝モデル / 代謝流速均衡解析 / 代謝反応ネットワーク / 酸化ストレス / ion beam / Monte-Carlo simulation / molecular dynamics simulation / ultraviolet / reactive sputtering / etching / plasma / 紫外線照射 / モンテカルロシミュレーション / 紫外線 / 反応性スパッタリング / エッチング / dynamics correlation / transport coefficient / generalized hydrodynamics / particulate / Coulomb crystal / strongly coupled plasma / Yukawa system / dust plasma / 動的相関 / 輸送係数 / 一般化された流体力学 / 微粒子 / クーロン結晶 / ダストプラズマ / capacitively coupled discharge / dual frequency discharge / particle simulation / RF discharge / plasma processing / 容量結合型放電 / 2周波放電 / 粒子シミュレーション / RF放電 / RNS / ROS / 反応拡散移流方程式 / 反応拡散方程式 / プラズマ液体相互作用 / シュミレーション / 生理学的薬物動態モデル / PBPKモデル / PBPKモデル / 生理的薬物動態モデル / 反応性エッチング / ナノ界面 / PMMA / 細胞外マトリックス / 蛋白質 / バイオ関連機器 / たんぱく質 / 表面・界面物性 / ダイヤモンドライクカーボン / プラズマエッチング / プラズマCVD / 反応性ラジカル / 分子動力学 / 光物性 / 膜堆積 / ゼータポテンシャル / 遮蔽クーロン / ゼーターポテンシャル / 誘電誘導 / 電気泳動 / ナノバブル / プラズマジェット / 超臨界流体 / 液中放電 / 大気圧放電 / ストリーマー / タウンゼント理論 / バッシェン曲線 / 電子チャネリング / 電離 / クラスタ / 溶媒和 / 超臨界 … More
Except Principal Investigator
逆カスケード / 微細表面構造 / 破骨細胞 / 骨芽細胞 / 微細加工技術 / バイオマテリアル / 骨分化 / 骨 / 培養誘導 / 再生療法 / 軟骨 / 骨再生 / 大型骨欠損 / 無血清培地 / 間葉系前駆細胞 / 骨芽細胞分化 / 骨芽細胞系細胞 / iPS細胞 / 骨再生療法 / poloidal shear flow / Maxwell stress / Reynolds stress / electromagnetic turbulence / electrostatic turbulence / inverse cascade / Zonal flow / マスクウェル応力 / ポロイダルシアー流 / マクスウェル応力 / レイノルズ応力 / 電磁的乱流 / 静電的乱流 / ゾーナル流 / Kelvin-Helmholtz instability / negative shear / velocity shear / magnetic shear / instability / heliotron / stellarator / tokamak / 異常輸送 / 電子温度勾配ドリフト波 / 帯状流 / ケルビン・ヘルムホルツ不安定性 / 負磁気シアー / 速度シアー / 磁気シアー / 不安定性 / ヘリオトロン / ステラレータ / トカマク / フリーラジカル / テラヘルツ分光学 / プラズマ物理学 / 多国籍 / 国際情報交換 / THz分光 / プラズマ分光 / テラヘルツ分光 / フリーラジカル計測 / プラズマ計測 Less
  • Research Projects

    (23 results)
  • Research Products

    (651 results)
  • Co-Researchers

    (26 People)
  •  Plasma-surface interaction in plasma-enhanced atomic-layer deposition of two-dimensional materialsPrincipal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2023 – 2024
    • Research Category
      Grant-in-Aid for JSPS Fellows
    • Review Section
      Basic Section 14010:Fundamental plasma-related
    • Research Institution
      Osaka University
  •  Nonequilibrium surface reactions of plasma-assisted atomic layer processesPrincipal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2021 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Review Section
      Medium-sized Section 14:Plasma science and related fields
    • Research Institution
      Osaka University
  •  Establishment of Principles for Machine-Learning Assisted Analysis of Plasma Surface ReactionsPrincipal Investigator

    • Principal Investigator
      Hamaguchi Satoshi
    • Project Period (FY)
      2018 – 2019
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 14:Plasma science and related fields
    • Research Institution
      Osaka University
  •  Analysis of Cell Response Mechanisms for Plasma Irradiation by Metabolic Model SimulationPrincipal Investigator

    • Principal Investigator
      Hamaguchi Satoshi
    • Project Period (FY)
      2015 – 2016
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  Quantum Theoretical Analyses of Plasma Processing for Novel and Diverse Materials Using Multi-Scale Numerical SimulationsPrincipal Investigator

    • Principal Investigator
      Hamaguchi Satoshi
    • Project Period (FY)
      2015 – 2019
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Plasma electronics
    • Research Institution
      Osaka University
  •  大気圧プラズマによるバイオ表面制御機構の多階層シミュレーション解析Principal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Plasma electronics
    • Research Institution
      Osaka University
  •  Optimization of regeneration technique for bone and cartilage derived from iPS cells

    • Principal Investigator
      Yoshikawa Hideki
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Orthopaedic surgery
    • Research Institution
      Osaka University
  •  Regulation of bone-associated cells differentiation and function by micro configuration of material surface

    • Principal Investigator
      Myoui Akira
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Orthopaedic surgery
    • Research Institution
      Osaka University
  •  プラズマ照射による液中活性種生成とバイオ活性化の数値シミュレーション解析Principal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2013 – 2014
    • Research Category
      Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  プラズマ界面相互作用のナノスケール解析Principal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  Analyses of plasma-biosystem interaction by PBPK model simulationPrincipal Investigator

    • Principal Investigator
      SATOSHI Hamaguchi
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  Detection of free-radical in plasmas by terahertz frequency-domain spectroscopy

    • Principal Investigator
      KITAHARA Hideaki
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  プラズマによる原子スケール構造制御の理論・シミュレーション研究Principal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2010 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  Systematic Study Analyses of radical-surface interaction in plasma bio-processingPrincipal Investigator

    • Principal Investigator
      HAMAGUCHI Satoshi
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  Elementary processes of photon, radical, and electron irradiation and their synergetic effects for plasma-surface interactionPrincipal Investigator

    • Principal Investigator
      HAMAGUCHI Satoshi
    • Project Period (FY)
      2007 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  高密度媒体プラズマ生成機構のモデル化と数値シミュレーションPrincipal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  荷電ナノバブルの統計力学と輸送解析Principal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  Analyses of Photo-induced Surface Reaction Processes during Plasma SputteringPrincipal Investigator

    • Principal Investigator
      HAMAGUCHI Satoshi
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  数値シミュレーションによる超臨界マイクロプラズマ放電機構の解明Principal Investigator

    • Principal Investigator
      浜口 智志
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  Study of Statistical Dynamic properties of Strongly Coupled Dusty Plasmas using Molecular Dynamics SimulationsPrincipal Investigator

    • Principal Investigator
      HAMAGUCHI Satoshi
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      KYOTO UNIVERSITY
  •  Formation of Zonal flows and Kelvin-Helmholtz instabilities in magnetically confined plasmas

    • Principal Investigator
      WAKATANI Masahiro
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      KYOTO UNIVERSITY
  •  Synergetic effects between magnetic shear and velocity shear for stability in tokamak and stellarator

    • Principal Investigator
      WAKATANI Masahiro
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      KYOTO UNIVERSITY
  •  Analyses of Reactive Plasma Dynamics by Particle SimulationsPrincipal Investigator

    • Principal Investigator
      HAMAGUCHI Satoshi
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      KYOTO UNIVERSITY

All 2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 Other

All Journal Article Presentation Book Patent

  • [Book] 半導体製造におけるウェット/ドライエッチング技術2022

    • Author(s)
      服部 毅、浜口智志、唐橋一浩 他
    • Total Pages
      300
    • Publisher
      (株)R&D支援センター
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Book] 第29回プラズマエレクトロニクス講習会;プラズマプロセスの最前線.最先端プラズマプロセスのシミュレーション2018

    • Author(s)
      浜口智志
    • Total Pages
      21
    • Publisher
      応用物理学会プラズマエレクトロニクス分科会
    • ISBN
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Book] Plasma Medical Science, Chap. 6.62018

    • Author(s)
      Shoko Nishihara and Satoshi Hamaguchi
    • Total Pages
      7
    • Publisher
      Academic Press
    • ISBN
      0128150041
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Book] Plasma Medical Science2018

    • Author(s)
      Kazumasa Ikuse and Satoshi Hamaguchi (co-authors)
    • Publisher
      Academic Press, Elsevier
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Book] 第29回プラズマエレクトロニクス講習会;プラズマプロセスの最前線.最先端プラズマプロセスのシミュ レーション2018

    • Author(s)
      浜口智志
    • Total Pages
      21
    • Publisher
      応用物理学会プラズマエレクトロニクス分科会
    • ISBN
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Book] 高度物理刺激と生体応答2017

    • Author(s)
      浜口智志 (共著)
    • Total Pages
      197
    • Publisher
      養賢堂
    • ISBN
      9784842505626
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Book] 1542 Eighth International Conference on Atomic and Molecular Data and Their Applications ICAMDATA-2012(Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine)2013

    • Author(s)
      Satoshi Hamaguchi(ed. by John D. Gillaspy, Wolfgang L. Wiese, and Yuri A. Podpaly)
    • Publisher
      AIP Conf. Proc
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Book] ケミカルエンジニヤリングvol.58(プラズマ医療の最新動向)2013

    • Author(s)
      浜口智志
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Book] パリティ1月号(プラズマの医療応用)2013

    • Author(s)
      浜口智志
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Book] プラズマ原子分子過程ハンドブック2011

    • Author(s)
      浜口智志、村上泉、加藤太治
    • Total Pages
      394
    • Publisher
      大阪大学出版会
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Book] プラズマ原子分子過程ハンドブック2011

    • Author(s)
      浜口智志、村上 泉、加藤太治
    • Total Pages
      394
    • Publisher
      大阪大学出版会
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Book] プラズマ原子分子過程ハンドブック2011

    • Author(s)
      浜口智志、村上泉、加藤太治
    • Total Pages
      394
    • Publisher
      大阪大学出版会
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Book] ドライ・ウエットエッチング技術全集2009

    • Author(s)
      浜口智志
    • Publisher
      技術情報協会
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Book] 第13回プラズマエレクトロニクス サマースクールテキスト2007

    • Author(s)
      浜口智志
    • Publisher
      応用物理学会プラズマエレクトロニクス分科会(印刷中)
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Surface chemical reactions of etch stop prevention in plasma-enhanced atomic layer etching of silicon nitride2024

    • Author(s)
      Tercero Jomar U.、Hirata Akiko、Isobe Michiro、Karahashi Kazuhiro、Fukasawa Masanaga、Hamaguchi Satoshi
    • Journal Title

      Surface and Coatings Technology

      Volume: 477 Pages: 130365-130365

    • DOI

      10.1016/j.surfcoat.2023.130365

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Foundations of machine learning for low-temperature plasmas: methods and case studies2023

    • Author(s)
      Bonzanini Angelo D、Shao Ketong、Graves David B、Hamaguchi Satoshi、Mesbah Ali
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 32 Issue: 2 Pages: 024003-024003

    • DOI

      10.1088/1361-6595/acb28c

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] 2022 Review of Data-Driven Plasma Science2023

    • Author(s)
      Anirudh Rushil、Archibald Rick、Asif M. Salman、Becker Markus M.、Benkadda Sadruddin、Hamaguchi Satoshi、Yamada Hiroshi、Yokoyama Tatsuya et al.
    • Journal Title

      IEEE Transactions on Plasma Science

      Volume: 51 Issue: 7 Pages: 1750-1838

    • DOI

      10.1109/tps.2023.3268170

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K20426, KAKENHI-PROJECT-21H04453
  • [Journal Article] Inert-gas ion scattering at grazing incidence on smooth and rough Si and SiO2 surfaces2023

    • Author(s)
      Cagomoc Charisse Marie D.、Isobe Michiro、Hudson Eric A.、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 41 Issue: 2 Pages: 023003-023003

    • DOI

      10.1116/6.0002381

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453, KAKENHI-PROJECT-20J20961
  • [Journal Article] Spectroscopic analysis improvement using convolutional neural networks2023

    • Author(s)
      Saura N、Garrido D、Benkadda S、Ibano K、Ueda Y、Hamaguchi S
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 56 Issue: 35 Pages: 354001-354001

    • DOI

      10.1088/1361-6463/acd261

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] First-principles simulation of optical emission spectra for low-pressure argon plasmas and its experimental validation2023

    • Author(s)
      Jenina Arellano Fatima、Gyulai Morton、Donko Zoltan、Hartmann Peter、Tsankov Tsanko V、Czarnetzki Uwe、Hamaguchi Satoshi
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 32 Issue: 12 Pages: 125007-125007

    • DOI

      10.1088/1361-6595/ad0ede

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals2023

    • Author(s)
      Harumningtyas Anjar Anggraini、Ito Tomoko、Isobe Michiro、Zajickova Lenka、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 41 Issue: 6

    • DOI

      10.1116/6.0002978

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Monolayer Graphene, a perfect hub for the study of out-of-equilibrium phenomena in plasma-surface interactions2023

    • Author(s)
      P. Vinchon, S. Hamaguchi and L. Stafford
    • Journal Title

      Proceedings of International Symposium on Plasma Chemistry

      Volume: N

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23KF0049
  • [Journal Article] Molecular dynamics study of SiO2 nanohole etching by fluorocarbon ions2023

    • Author(s)
      Cagomoc Charisse Marie D.、Isobe Michiro、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 41 Issue: 2 Pages: 023001-023001

    • DOI

      10.1116/6.0002380

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453, KAKENHI-PROJECT-20J20961
  • [Journal Article] Global numerical simulation of chemical reactions in phosphate-buffered saline (PBS) exposed to atmospheric-pressure plasmas2023

    • Author(s)
      Alfianto Enggar、Ikuse Kazumasa、Hamaguchi Satoshi
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 32 Issue: 8 Pages: 085014-085014

    • DOI

      10.1088/1361-6595/aceeae

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] High-throughput SiN ALE: surface reaction and ion-induced damage generation mechanisms2023

    • Author(s)
      Hirata Akiko、Fukasawa Masanaga、Tercero Jomar Unico、Kugimiya Katsuhisa、Hagimoto Yoshiya、Karahashi Kazuhiro、Hamaguchi Satoshi、Iwamoto Hayato
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SI Pages: SI1015-SI1015

    • DOI

      10.35848/1347-4065/accde6

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Low-energy ion irradiation effects on chlorine desorption in plasma-enhanced atomic layer deposition (PEALD) for silicon nitride2022

    • Author(s)
      Ito Tomoko、Kita Hidekazu、Karahashi Kazuhiro、Hamaguchi Satoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SI Pages: SI1011-SI1011

    • DOI

      10.35848/1347-4065/ac629b

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions2022

    • Author(s)
      Tennyson Jonathan、Mohr Sebastian、Hanicinec M、Dzarasova Anna、Smith Carrick、Waddington Sarah、Liu Bingqing、Alves Luis L、Bartschat Klaus、Bogaerts Annemie、Engelmann Sebastian U、Gans Timo、Gibson Andrew R、Hamaguchi Satoshi、
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 31 Issue: 9 Pages: 095020-095020

    • DOI

      10.1088/1361-6595/ac907e

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Why are physical sputtering yields similar for incident ions with different masses??physical sputtering yields of the Lennard-Jones system2022

    • Author(s)
      Mauchamp Nicolas A、Hamaguchi Satoshi
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 55 Issue: 22 Pages: 225209-225209

    • DOI

      10.1088/1361-6463/ac57dc

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] The 2022 Plasma Roadmap: low temperature plasma science and technology2022

    • Author(s)
      Adamovich I,Agarwal S,Ahedo E,Alves LL,Baalrud S,Babaeva N,Bogaerts A,Bourdon A,Bruggeman PJ,Canal C,Choi E H,Coulombe S,Donko Z,Graves DB,Hamaguchi S,Hegemann D,Hori M et al
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 55 Issue: 37 Pages: 373001-373001

    • DOI

      10.1088/1361-6463/ac5e1c

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19H05462, KAKENHI-PROJECT-21H04453
  • [Journal Article] Roles of the reaction boundary layer and long diffusion of stable reactive nitrogen species (RNS) in plasma-irradiated water as an oxidizing media - numerical simulation study2022

    • Author(s)
      Ikuse Kazumasa、Hamaguchi Satoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: 7 Pages: 076002-076002

    • DOI

      10.35848/1347-4065/ac7371

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Foundations of atomic-level plasma processing in nanoelectronics2022

    • Author(s)
      Arts Karsten、Hamaguchi Satoshi、Ito Tomoko、Karahashi Kazuhiro、Knoops Harm C M、Mackus Adriaan J M、(Erwin) Kessels Wilhelmus M M
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 31 Issue: 10 Pages: 103002-103002

    • DOI

      10.1088/1361-6595/ac95bc

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Five-step plasma-enhanced atomic layer etching of silicon nitride with a stable etched amount per cycle2022

    • Author(s)
      Hirata Akiko、Fukasawa Masanaga、Tercero Jomar U.、Kugimiya Katsuhisa、Hagimoto Yoshiya、Karahashi Kazuhiro、Hamaguchi Satoshi、Iwamoto Hayato
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: 6 Pages: 066002-066002

    • DOI

      10.35848/1347-4065/ac61f6

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Molecular dynamics simulation of Si trench etching with SiO2 hard masks2022

    • Author(s)
      Mauchamp Nicolas A.、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 40 Issue: 5 Pages: 053004-053004

    • DOI

      10.1116/6.0002003

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Improving penalized semi supervised nonnegative matrix factorization result’s confidence using deep residual learning approach in spectrum analysis2022

    • Author(s)
      Saura Nathaniel、Mastumoto Koh、Benkadda Sadruddin、Ibano Kenzo、Lee Heun Tae、Ueda Yoshio、Hamaguchi Satoshi
    • Journal Title

      Proc. 2022 International Conference on Electrical, Computer and Energy Technologies (ICECET)

      Volume: 0 Pages: 1-6

    • DOI

      10.1109/icecet55527.2022.9873493

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Self-sputtering of the Lennard-Jones crystal2022

    • Author(s)
      Mauchamp Nicolas A.、Ikuse Kazumasa、Isobe Michiro、Hamaguchi Satoshi
    • Journal Title

      Physics of Plasmas

      Volume: 29 Issue: 2 Pages: 023507-023507

    • DOI

      10.1063/5.0077762

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Molecular dynamics simulation of oxide-nitride bilayer etching with energetic fluorocarbon ions2022

    • Author(s)
      Cagomoc Charisse Marie D.、Isobe Michiro、Hudson Eric A.、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 40 Issue: 6 Pages: 063006-063006

    • DOI

      10.1116/6.0002182

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453, KAKENHI-PROJECT-20J20961
  • [Journal Article] Structural and electrical characteristics of ion-induced Si damage during atomic layer etching2022

    • Author(s)
      Hirata Akiko、Fukasawa Masanaga、Kugimiya Katsuhisa、Karahashi Kazuhiro、Hamaguchi Satoshi、Hagimoto Yoshiya、Iwamoto Hayato
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SI Pages: SI1003-SI1003

    • DOI

      10.35848/1347-4065/ac6052

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies2022

    • Author(s)
      Kambara Makoto、Kawaguchi Satoru、Lee Hae June、Ikuse Kazumasa、Hamaguchi Satoshi、Ohmori Takeshi、Ishikawa Kenji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SA Pages: SA0803-SA0803

    • DOI

      10.35848/1347-4065/ac9189

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04451, KAKENHI-PROJECT-21H04453, KAKENHI-PROJECT-21H01073
  • [Journal Article] Monitoring of nonthermal plasma degradation of phthalates by ion mobility spectrometry2021

    • Author(s)
      Moravsky Ladislav、Michalczuk Bartosz、Hrda Jana、Hamaguchi Satoshi、Matejcik Stefan
    • Journal Title

      Plasma Processes and Polymers

      Volume: 18 Issue: 7 Pages: 2100032-2100032

    • DOI

      10.1002/ppap.202100032

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Surface damage formation during atomic layer etching of silicon with chlorine adsorption2021

    • Author(s)
      Tinacba Erin Joy Capdos、Isobe Michiro、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 39 Issue: 4 Pages: 042603-042603

    • DOI

      10.1116/6.0001117

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] エッチング表面反応の実験的理論的アプローチ2021

    • Author(s)
      唐橋 一浩, 伊藤 智子, 浜口 智志
    • Journal Title

      応用物理学会誌「応用物理」

      Volume: 91 Pages: 164-168

    • NAID

      130008165355

    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] 機械学習を利用したプラズマ材料プロセッシング2021

    • Author(s)
      幾世和将、 浜口智志
    • Journal Title

      プラズマエレクトロニクス分科会会報

      Volume: 74 Pages: 3-7

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] 難エッチング材料に対する原子層エッチング反応解析2021

    • Author(s)
      伊藤智子,唐橋一浩,浜口智志
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 97 Pages: 522-527

    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Development of a DC-plasma source for surface functionalization by amino groups2021

    • Author(s)
      Harumningtyas Anjar Anggraini、Suprapto、Suprihatin Hari、Aziz Ihwanul、Andriyanti Wiwien、Sujitno Tjipto、Purwadi Agus、Hamaguchi Satoshi
    • Journal Title

      AIP Conference Proceedings

      Volume: 11 Pages: 020018-020018

    • DOI

      10.1063/5.0066318

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Erratum: “Formation and desorption of nickel hexafluoroacetylacetonate Ni(hfac)2 on a nickel oxide surface in atomic layer etching processes” [J. Vac. Sci. Technol. A 38, 052602 (2020)]2021

    • Author(s)
      Basher Abdulrahman H.、Krstic Marjan、Fink Karin、Ito Tomoko、Karahashi Kazuhiro、Wenzel Wolfgang、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 39 Issue: 5 Pages: 057001-057001

    • DOI

      10.1116/6.0001319

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453, KAKENHI-PROJECT-20J10393
  • [Journal Article] Molecular dynamics simulation for reactive ion etching of Si and SiO2 by SF5+ ions2021

    • Author(s)
      Tinacba Erin Joy Capdos、Ito Tomoko、Karahashi Kazuhiro、Isobe Michiro、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 39 Issue: 4 Pages: 043203-043203

    • DOI

      10.1116/6.0001230

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Evaluation of nickel self-sputtering yields by molecular-dynamics simulation2021

    • Author(s)
      Mauchamp Nicolas A.、Isobe Michiro、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 39 Issue: 4 Pages: 043005-043005

    • DOI

      10.1116/6.0000979

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Journal Article] Stability of hexafluoroacetylacetone molecules on metallic and oxidized nickel surfaces in atomic-layer-etching processes2020

    • Author(s)
      Basher Abdulrahman H.、Krstic Marjan、Takeuchi Takae、Isobe Michiro、Ito Tomoko、Kiuchi Masato、Karahashi Kazuhiro、Wenzel Wolfgang、Hamaguchi Satoshi
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 38 Issue: 2 Pages: 022610-022610

    • DOI

      10.1116/1.5127532

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18526, KAKENHI-PROJECT-15H05736, KAKENHI-PROJECT-18K18753, KAKENHI-PROJECT-20J10393
  • [Journal Article] Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes2020

    • Author(s)
      Li Hu、Ito Tomoko、Karahashi Kazuhiro、Kagaya Munehito、Moriya Tsuyoshi、Matsukuma Masaaki、Hamaguchi Satoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SJ Pages: SJJA01-SJJA01

    • DOI

      10.35848/1347-4065/ab8681

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05736, KAKENHI-PROJECT-18K18753
  • [Journal Article] On-wafer monitoring and control of ion energy distribution for damage minimization in atomic layer etching processes2020

    • Author(s)
      Hirata A.、Fukasawa M.、Kugimiya K.、Nagaoka K.、Karahashi K.、Hamaguchi S.、Iwamoto H.
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SJ Pages: SJJC01-SJJC01

    • DOI

      10.35848/1347-4065/ab7baa

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] 小特集 プラズマ・インフォマティクス:データ駆動科学のプラズマへの応用 6. まとめ2019

    • Author(s)
      浜口智志
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 95 Pages: 560-561

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Journal Article] Molybdenum Capping Layer Effect on Electromigration Failure of Plasma Etched Copper Lines2019

    • Author(s)
      Su Jia Quan、Li Mingqian、Kuo Yue、Hamaguchi Satoshi
    • Journal Title

      ECS Transactions

      Volume: 92 Issue: 5 Pages: 39-46

    • DOI

      10.1149/09205.0039ecst

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Effects of excitation voltage pulse shape on the characteristics of atmospheric-pressure nanosecond discharges2019

    • Author(s)
      Donko Zoltan、Hamaguchi Satoshi、Gans Timo
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 28 Issue: 7 Pages: 075004-075004

    • DOI

      10.1088/1361-6595/ab270e

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736, KAKENHI-PROJECT-18K18753
  • [Journal Article] プラズマ・インフォマティクス: プラズマ科学におけるデータ駆動科学の応用2019

    • Author(s)
      浜口智志
    • Journal Title

      静電気学会誌

      Volume: 43 Pages: 198-202

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Journal Article] プラズマ・インフォマティクス:プラズマ科学におけるデータ駆動科学の応用2019

    • Author(s)
      浜口智志
    • Journal Title

      静電気学会誌

      Volume: 43 Pages: 198-202

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Molecular dynamics simulation of Si and SiO2 reactive ion etching by fluorine-rich ion species2019

    • Author(s)
      Capdos Tinacba Erin Joy、Isobe Michiro、Karahashi Kazuhiro、Hamaguchi Satoshi
    • Journal Title

      Surface and Coatings Technology

      Volume: 380 Pages: 125032-125032

    • DOI

      10.1016/j.surfcoat.2019.125032

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05736, KAKENHI-PROJECT-18K18753
  • [Journal Article] 小特集 プラズマ・インフォマティクス:データ駆動科学のプラズマへの応用 1. はじめに2019

    • Author(s)
      浜口智志
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 95 Pages: 535-536

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Journal Article] 小特集 プラズマ・インフォマティクス:データ駆動科学のプラズマへの応用 3. 機械学習によるプラズマエッチング率予測2019

    • Author(s)
      木野日織、幾世和将、DAM Hieu Chi、浜口智志
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 95 Pages: 542-547

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Journal Article] 小特集 プラズマ・インフォマティクス : データ駆動科学のプラズマへの応用 3. 機械学習によるプラズマエッチング率予測2019

    • Author(s)
      木野日織、幾世和将、DAM Hieu Chi, 浜口智志
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 95 Pages: 542-547

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] 小特集 プラズマ・インフォマティクス: データ駆動科学のプラズマへの応用 6. まとめ2019

    • Author(s)
      浜口智志
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 95 Pages: 560-561

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Special issue: Plasmas for microfabrication2019

    • Author(s)
      Hamaguchi Satoshi、Agarwal Sumit、Zajickova Lenka、Wertheimer Michael R.
    • Journal Title

      Plasma Processes and Polymers

      Volume: 16 Issue: 9 Pages: 1990001-1990001

    • DOI

      10.1002/ppap.201990001

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Damage recovery and low‐damage etching of ITO in H2/CO plasma: Effects of hydrogen or oxygen2019

    • Author(s)
      Hirata Akiko、Fukasawa Masanaga、Kugimiya Katsuhisa、Karahashi Kazuhiro、Hamaguchi Satoshi、Nagaoka Kojiro
    • Journal Title

      Plasma Processes and Polymers

      Volume: 16 Issue: 9 Pages: 1900029-1900029

    • DOI

      10.1002/ppap.201900029

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] 小特集 プラズマ・インフォマティクス: データ駆動科学のプラズマへの応用 1. はじめに2019

    • Author(s)
      浜口智志
    • Journal Title

      プラズマ・核融合学会誌

      Volume: 95 Pages: 535-536

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] 数値シミュレーション技術の今後2019

    • Author(s)
      浜口智志
    • Journal Title

      静電気学会誌

      Volume: 43 Pages: 197-197

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Journal Article] プラズマ液体相互作用の理論・数値シミュレーション2018

    • Author(s)
      浜口智志、幾世和将
    • Journal Title

      静電気学会誌

      Volume: 42 Pages: 118-123

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Effects of Hydrogen on the Chemically Enhanced Etching of Tin-doped Indium Oxide (ITO),2018

    • Author(s)
      Hu Li, Kazuhiro Karahashi, Pascal Friederich, Karin Fink, Masanaga Fukasawa, Akiko Hirata, Kazunori Nagahata, Tetsuya Tatsumi, Wolfgang Wenzel, and Satoshi Hamaguchi,
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 印刷中

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] The effect of photoemission on nanosecond helium microdischarges at atmospheric pressure2018

    • Author(s)
      Zoltan Donko, Satoshi Hamaguchi, Timo Gans
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 印刷中

    • NAID

      120006955438

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms,2018

    • Author(s)
      Zoltan Donko, Aranka Derzsi, Mate Vass, Julian Schulze, Edmund Schuengel, and Satoshi Hamaguchi
    • Journal Title

      Plasma Sources Sci. Technol.

      Volume: 27 Issue: 10 Pages: 104008-104008

    • DOI

      10.1088/1361-6595/aae5c3

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753, KAKENHI-PROJECT-15H05736
  • [Journal Article] Impact of non-thermal plasma surface modification on porous calcium hydroxyapatite ceramics for bone regeneration2018

    • Author(s)
      Moriguchi Yu、Lee Dae-Sung、Chijimatsu Ryota、Thamina Khair、Masuda Kazuto、Itsuki Dai、Yoshikawa Hideki、Hamaguchi Satoshi、Myoui Akira
    • Journal Title

      PLOS ONE

      Volume: 13 Issue: 3 Pages: e0194303-e0194303

    • DOI

      10.1371/journal.pone.0194303

    • NAID

      120006955437

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] The future for plasma science and technology2018

    • Author(s)
      Klaus-Dieter Weltmann, Juergen F. Kolb, Marcin Holub, Dirk Uhrlandt, Milan Simek, Kostya (Ken) Ostrikov, Satoshi Hamaguchi, Uros Cvelbar, Mirko Cernak, Bruce Locke, Alexander Fridman, Pietro Favia, Kurt Becker
    • Journal Title

      Plasma Process Polym.

      Volume: 16 Issue: 1

    • DOI

      10.1002/ppap.201800118

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753, KAKENHI-PROJECT-15H05736
  • [Journal Article] Foundations of low-temperature plasma enhanced materials synthesis and etching2018

    • Author(s)
      Oehrlein Gottlieb S、Hamaguchi Satoshi
    • Journal Title

      Plasma Sources Science and Technology

      Volume: 27 Issue: 2 Pages: 023001-023001

    • DOI

      10.1088/1361-6595/aaa86c

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Cyclic etching of ITO using H-induced modified-layer,2018

    • Author(s)
      A. Hirata, M. Fukasawa, K. Nagahata, H. Li, K. Karahashi, S. Hamaguchi, and T. Tatsumi,
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 印刷中

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation2017

    • Author(s)
      Karahashi Kazuhiro、Li Hu、Yamada Kentaro、Ito Tomoko、Numazawa Satoshi、Machida Ken、Ishikawa Kiyoshi、Hamaguchi Satoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 6S2 Pages: 06HB09-06HB09

    • DOI

      10.7567/jjap.56.06hb09

    • NAID

      210000147956

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] The 2017 Plasma Roadmap: Low temperature plasma science and technology2017

    • Author(s)
      I. Adanivich, Masaru Hori, et al.
    • Journal Title

      J. Phys. D: Applied Physics

      Volume: 50 Issue: 32 Pages: 323001-323001

    • DOI

      10.1088/1361-6463/aa76f5

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-WRAPUP-17H06075, KAKENHI-PROJECT-15H05736, KAKENHI-PROJECT-26246035
  • [Journal Article] Effects of hydrogen-damaged layer on tin-doped indium oxide etching by H2/Ar plasma2017

    • Author(s)
      Hirata Akiko、Fukasawa Masanaga、Shigetoshi Takushi、Okamoto Masaki、Nagahata Kazunori、Li Hu、Karahashi Kazuhiro、Hamaguchi Satoshi、Tatsumi Tetsuya
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 6S2 Pages: 06HD02-06HD02

    • DOI

      10.7567/jjap.56.06hd02

    • NAID

      210000147961

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Effects of Hydrogen Ion Irradiation on Zinc Oxide Etch2017

    • Author(s)
      Hu Li, Kazuhiro Karahashi, Pascal Friederich, Karin Fink, Masanaga Fukasawa, Akiko Hirata, Kazunori Nagahata, Tetsuya Tatsumi, Wolfgang Wenzel, and Satoshi Hamaguchi
    • Journal Title

      J. Vac. Sci. Tech. A

      Volume: -

    • NAID

      120006955436

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Effects of hydrogen ion irradiation on zinc oxide etching2017

    • Author(s)
      Li Hu、Karahashi Kazuhiro、Friederich Pascal、Fink Karin、Fukasawa Masanaga、Hirata Akiko、Nagahata Kazunori、Tatsumi Tetsuya、Wenzel Wolfgang、Hamaguchi Satoshi
    • Journal Title

      J. Vac. Sci. Tech. A

      Volume: 35 Issue: 5

    • DOI

      10.1116/1.4982715

    • NAID

      120006955436

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736, KAKENHI-PROJECT-16J00613
  • [Journal Article] Etching yields and surface reactions of amorphous carbon by fluorocarbon ion irradiation2017

    • Author(s)
      Kazuhiro Karahashi, Hu Li, Kentaro Yamada, Tomoko Ito, Satoshi Numazawa, Ken Machida, Kiyoshi Ishikawa, and Satoshi Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: -

    • NAID

      210000147956

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] プラズマの医療応用と医療材料の表面処理技術2016

    • Author(s)
      浜口智志
    • Journal Title

      光技術コンタクト

      Volume: 54

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Journal Article] Mass-selected ion beam study on etching characteristics of ZnO by methane-based plasma2016

    • Author(s)
      Hu Li, Kazuhiro Karahashi, Masanaga Fukusawa, Kazunori Nagahata, Tetsuya Tatsumi, and Satoshi Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55

    • NAID

      210000146014

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] プラズマの医療応用と医療材料の表面処理技術2016

    • Author(s)
      浜口智志
    • Journal Title

      光技術コンタクト

      Volume: 54 Pages: 0-0

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Molecular dynamics study on fluorine radical multilayer adsorption mechanism during Si, SiO2, and Si3N4 etching processes2016

    • Author(s)
      Satoshi Numazawa, Ken Machida, Michiro Isobe, and Satoshi Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 11 Pages: 116204-116204

    • DOI

      10.7567/jjap.55.116204

    • NAID

      210000147248

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Plasma-Liquid Interactions: A Review and Roadmap2016

    • Author(s)
      P.J. Bruggeman, M.J. Kushner, S. Hamaguchi et al.
    • Journal Title

      Plasma Sources Sci. Technol.

      Volume: 25 Issue: 5 Pages: 053002-053002

    • DOI

      10.1088/0963-0252/25/5/053002

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Journal Article] Atmospheric-pressure plasma-irradiation inhibits mouse embryonic stem cell differentiation to mesoderm and endoderm but promotes ectoderm differentiation2016

    • Author(s)
      Taichi Miura, Satoshi Hamaguchi and Shoko Nishihara
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 49

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Journal Article] 高度物理刺激と生体反応(1) ― 第1章 高度物理刺激の生成法と計測・予測 ―2015

    • Author(s)
      佐藤岳彦、金澤誠司、浜口智志、小宮敦樹
    • Journal Title

      機械の研究

      Volume: 67 Pages: 673-683

    • NAID

      40020544576

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Journal Article] Correlation between dry Etching Resistance of Ta masks and the oxidation states of the surface oxide layers2015

    • Author(s)
      Makoto Satake, Masaki Yamada, Hu Li, Kazuhiro Karahashi, and Satoshi Hamaguchi,
    • Journal Title

      J. Vac. Sci. Tech.

      Volume: 33

    • NAID

      120006955433

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] 高度物理刺激と生体反応(1) ― 第1章 高度物理刺激の生成法と計測・予測 ―2015

    • Author(s)
      佐藤岳彦、金澤誠司、浜口智志、小宮敦樹
    • Journal Title

      機械の研究

      Volume: 67 Pages: 673-683

    • NAID

      40020544576

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] 高 度 物 理 刺 激 と 生 体 反 応2015

    • Author(s)
      佐藤岳彦,金澤誠司, 浜口智志, 小宮敦樹
    • Journal Title

      機械の研究

      Volume: 67 Pages: 1-1

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] 新規反応触媒開発を目指したゼオライトへのインジウム担持の試み2015

    • Author(s)
      吉村智, 木内正人, 西本能弘, 安田誠, 馬場章夫, 杢野由明, 杉本敏司, 浜口 智志
    • Journal Title

      スマートプロセス学会誌

      Volume: 4 Pages: 228-233

    • NAID

      130005263569

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Numerical simulation of atomic-layer oxidation of silicon by oxygen gas cluster beams2015

    • Author(s)
      Kohei Mizotani, Michiro Isobe, Kazuhiro Karahashi, and Satoshi Hamaguchi
    • Journal Title

      Plasma and Fusion Research

      Volume: 10

    • NAID

      130005286895

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] Sputtering yield and surface chemical modification of tin-doped indium oxide (ITO) in hydrocarbonbased plasma etching2015

    • Author(s)
      Hu Li, Kazuhiro Karahashi, Masanaga Fukusawa, Kazunori Nagahata, Tetsuya Tatsumi, and Satoshi Hamaguchi
    • Journal Title

      J. Vac. Sci. Tech. A

      Volume: 33

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Journal Article] 低温大気圧プラズマによる滅菌技術2014

    • Author(s)
      伊藤智子 浜口智志
    • Journal Title

      空気清浄

      Volume: 52 Pages: 295-304

    • NAID

      40020292349

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Characterization of polymer layer formation during SiO2/SiN etching by fluoro/hydrofluorocarbon plasmas,2014

    • Author(s)
      Keita Miyake, Tomoko Ito, Michiro Isobe, Kazuhiro Karahashi, Masanaga Fukasawa, Kazunori Nagahata, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 53

    • NAID

      210000143490

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Low energy indium or gallium ion implantations to SiO2 thin films for development of novel catalysts2014

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      e-J. Surf. Sci. Nanotech.

      Volume: 12 Pages: 197-202

    • NAID

      120006955429

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Ion beam experiments for the study on plasma-surface interactions2014

    • Author(s)
      Kazuhiro Karahashi and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 00

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Proliferation assay of mouse embryonic stem (ES) cells exposed to atmospheric pressure plasmas at room temperature2014

    • Author(s)
      Taichi Miura, Ayumi Ando, Kazumi Hirano, Chika Ogura, Tatsuya Kanazawa, Masamichi Ikeguchi, Atsushi Seki, Shoko Nishihara, and Satoshi Hamaguchi,
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 47 Issue: 44 Pages: 445402-445402

    • DOI

      10.1088/0022-3727/47/44/445402

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PUBLICLY-25108506, KAKENHI-PUBLICLY-25108514
  • [Journal Article] Low energy indium or gallium ion implantations to SiO2 thin films for development of novel catalysts2014

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      e-J. Surf. Sci. Nanotech.

      Volume: 12 Pages: 197-202

    • NAID

      120006955429

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Characterization of polymer layer formation during SiO2/SiN etching by fluoro/hydrofluorocarbon plasmas2014

    • Author(s)
      Keita Miyake, Tomoko Ito, Michiro Isobe, Kazuhiro Karahashi, Masanaga Fukasawa, Kazunori Nagahata, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 53

    • NAID

      210000143490

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] on beam experiments for the study on plasma-surface interactions2014

    • Author(s)
      Kazuhiro Karahashi and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 0

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2013

    • Author(s)
      Satoshi Hamaguchi,
    • Journal Title

      AIP Conf. Proc.

      Volume: 1542 Pages: 214-222

    • NAID

      120006957321

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Dependence of catalytic properties of indium implanted SiO2 thin films on the film-substrate temperature during indium ion implantation2013

    • Author(s)
      S. Yoshimura, K. Ikuse, K. Kiuchi, Y. Kishimoto, M. Yasuda, A. Baba, and S. Hamaguchi
    • Journal Title

      Nucl. Instrum. Meth. B

      Volume: 315 Pages: 222-226

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Dependence of catalytic properties of indium implanted SiO2 thin films on the film-substrate temperature during indium ion implantation2013

    • Author(s)
      S. Yoshimura, K. Ikuse, K. Kiuchi, Y. Kishimoto, M. Yasuda, A. Baba, and S. Hamaguchi
    • Journal Title

      Nucl. Instrum. Meth. B

      Volume: 315 Pages: 222-226

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Quantum Cascade Laser (QCL) Absorption Spectroscopy with the Amplitude-to-Time Conversion (ATTC) Technique for Atmospheric-Pressure Plasmas2013

    • Author(s)
      Takayoshi Yumii, Noriaki Kimura and Satoshi Hamaguchi
    • Journal Title

      J. Appl. Phys.

      Volume: 未定

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Urisu, and Satoshi Hamaguchi
    • Journal Title

      Appl. Surf. Sci

      Volume: 276 Pages: 1-6

    • DOI

      10.1016/j.apsusc.2013.02.001

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] プラズマの医療応用2013

    • Author(s)
      浜口智志
    • Journal Title

      パリティ

      Volume: 1月号 Pages: 16-17

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine,2013

    • Author(s)
      Satoshi Hamaguchi,
    • Journal Title

      AIP Conf. Proc.

      Volume: 1542 Pages: 214-222

    • NAID

      120006957321

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] プラズマの医療応用2013

    • Author(s)
      浜口智志
    • Journal Title

      パリティ

      Volume: 1月号 Pages: 16-17

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Oxidation of Nitric Oxide by Atmospheric Pressure Plasma in a Resonant Plasma Reactor2013

    • Author(s)
      Takayoshi Yumii, Takashi Yoshida,Kyoji Doi,Noriaki Kimura, and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 46

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] プラズマ医療の最新動向2013

    • Author(s)
      浜口智志
    • Journal Title

      ケミカルエンジニヤリング

      Volume: 58 Pages: 915-921

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Surface Modification of Poly(methyl methacrylate) by Hydrogen-Plasma Exposure and Its Sputtering Characteristics by Ultraviolet Light Irradiation2013

    • Author(s)
      Satoru Yoshimura, Kazumasa Ikuse, Satoshi Sugimoto, Kensuke Murai, Kuniaki Honjo, Masato Kiuchi, and Satoshi Hamaguchi,
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52

    • NAID

      210000142776

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Efficient modification of the surface properties of interconnected porous hydroxyapatite by low-pressure low-frequency plasma treatment to promote its biological performance2013

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Akira Myoui, Hideki Yoshikawa and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] プラズマ医療の最新動向2013

    • Author(s)
      浜口智志
    • Journal Title

      ケミカルエンジニヤリング

      Volume: 58 Pages: 915-921

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Quantum Cascade Laser (QCL) Absorption Spectroscopy with the Amplitude-to-Time Conversion (ATTC) Technique for Atmospheric-Pressure Plasmas2013

    • Author(s)
      Takayoshi Yumii, Noriaki Kimura and Satoshi Hamaguchi
    • Journal Title

      J. Appl. Phys.

      Volume: 未定

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Characteristics of silicon etching by silicon chloride ions2013

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi
    • Journal Title

      J. Vac. Sci. Technol. A.

      Volume: 31

    • NAID

      120006955427

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Uris, and Satoshi Hamaguchi
    • Journal Title

      Appl. Surf. Sci.

      Volume: 276

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Oxidation of Nitric Oxide by Atmospheric Pressure Plasma in a Resonant Plasma Reactor,2013

    • Author(s)
      Takayoshi Yumii, Takashi Yoshida,Kyoji Doi,Noriaki Kimura, and Satoshi Hamaguchi,
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 46 Pages: 1352021-7

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Oxidation of Nitric Oxide by Atmospheric Pressure Plasma in a Resonant Plasma Reactor2013

    • Author(s)
      Takayoshi Yumii, Takashi Yoshida,Kyoji Doi,Noriaki Kimura, and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 46

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2013

    • Author(s)
      Satoshi Hamaguchi
    • Journal Title

      AIP Conf. Proc.

      Volume: 未定

    • NAID

      120006957321

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Surface Modification of Poly(methyl methacrylate) by Hydrogen-Plasma Exposure and Its Sputtering Characteristics by Ultraviolet Light Irradiation2013

    • Author(s)
      Satoru Yoshimura, Kazumasa Ikuse, Satoshi Sugimoto, Kensuke Murai, Kuniaki Honjo, Masato Kiuchi, and Satoshi Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52 Pages: 0902011-4

    • NAID

      210000142776

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Quantum Cascade Laser (QCL) Absorption Spectroscopy with the Amplitude-to-Time Conversion (ATTC) Technique for Atmospheric-Pressure Plasmas2013

    • Author(s)
      Takayoshi Yumii, Noriaki Kimura, and Satoshi Hamaguchi
    • Journal Title

      J. Appl. Phys.

      Volume: 113 Pages: 2131011-10

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Uris, and Satoshi Hamaguchi
    • Journal Title

      Appl. Surf. Sci.

      Volume: 未定

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Uris, Satoshi Hamaguchi
    • Journal Title

      Appl. Surf. Sci.

      Volume: 276(1) Pages: 1-6

    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Quantum Cascade Laser (QCL) Absorption Spectroscopy with the Amplitude-to-Time Conversion (ATTC) Technique for Atmospheric-Pressure Plasmas2013

    • Author(s)
      Takayoshi Yumii, Noriaki Kimura, and Satoshi Hamaguchi
    • Journal Title

      J. Appl. Phys.

      Volume: 113

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] ポリメタクリル酸メチル樹脂の水素プラズマ暴露と低エネルギーアルゴンイオンビームによるエッチング2013

    • Author(s)
      吉村智, 幾世和将, 杉本敏司, 村井健介, 木内正人, 浜口智志
    • Journal Title

      J. Vac. Soc. Jpn.

      Volume: 56 Pages: 129-132

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2013

    • Author(s)
      Satoshi Hamaguchi
    • Journal Title

      AIP Conf. Proc.

      Volume: 未定

    • NAID

      120006957321

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] ポリメタクリル酸メチル樹脂の水素プラズマ暴露と低エネルギーアルゴンイオンビームによるエッチング2013

    • Author(s)
      吉村智, 幾世和将, 杉本敏司, 村井健介, 木内正人, 浜口智志
    • Journal Title

      J. Vac. Soc. Jpn.

      Volume: 56 Pages: 129-132

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Characteristics of silicon etching by silicon chloride ions2013

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi,
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 31

    • NAID

      120006955427

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Uris, and Satoshi Hamaguchi
    • Journal Title

      Appl. Surf. Sci.

      Volume: 未定

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Oxidation of Nitric Oxide by Atmospheric Pressure Plasma in a Resonant Plasma Reactor2013

    • Author(s)
      Takayoshi Yumii, Takashi Yoshida,Kyoji Doi,Noriaki Kimura, and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 46

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Characteristics of silicon etching by silicon chloride ions2013

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi,
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 31 Pages: 0313011-5

    • NAID

      120006955427

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Grid-pattern formation of extracellular matrix on silicon by low-temperature atmospheric-pressure plasma jets for neural network biochip fabrication2013

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Tsuneo Uris, and Satoshi Hamaguchi,
    • Journal Title

      Appl. Surf. Sci.

      Volume: 276 Pages: 1-6

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Journal Article] Characteristics of silicon etching by silicon chloride ions2013

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi
    • Journal Title

      J. Vac. Sci. Technol. A.

      Volume: 31

    • NAID

      120006955427

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Microcavity array plasma system for remote chemical processing at atmospheric pressure2012

    • Author(s)
      Dae-Sung Lee, Satoshi Hamaguchi, Osamu Sakai, Sung-Jin Park and J Gary Eden,
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi,
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51

    • NAID

      210000141076

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] プラズマの医療応用2012

    • Author(s)
      浜口智志
    • Journal Title

      パリティ

      Volume: 1月号 Pages: 16-17

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012

    • Author(s)
      S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      e-J.Surf.Sci.Nanotech.(2012)

      Volume: (掲載確定)

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Extracellular Matrix Patterning for Cell Alignment by Atmospheric Pressure Plasma Jets2012

    • Author(s)
      Ayumi Ando, Toshifumi Asano, Md.Abu Sayed, Ryugo Tero, Katsuhisa Kitano, Tsuneo Urisu, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 51

    • NAID

      40019199845

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      Thin Solid Films

      Volume: 520

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Sputtering yields of magnesium hydroxide [Mg(OH)2] by noble-gas ion bombardment2012

    • Author(s)
      Kazumasa Ikuse, Satoru Yoshimura, Masato Kiuchi, Masaharu Terauchi, Mikihiko Nishitani, and Satoshi Hamaguch
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      e-J. Surf. Sci. Nanotech.

      Volume: 10 Pages: 139-144

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation2012

    • Author(s)
      S. Yoshimura, Y. Tsukazaki, M. Kiuchi, S. Sugimoto, S. Hamaguchi,.
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Efficient modification of the surface properties of interconnected porous hydroxyapatite by low-pressure low-frequency plasma treatment to promote its biological performance2012

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: 45(37)

    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (掲載予定)

    • NAID

      210000072700

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (掲載確定)

    • NAID

      210000141076

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Sputtering yields of magnesium hydroxide [Mg(OH)2] by noble-gas ion bombardment2012

    • Author(s)
      Kazumasa Ikuse, Satoru Yoshimura, Masato Kiuchi, Masaharu Terauchi, Mikihiko Nishitani, and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Efficient modification of the surface properties of interconnected porous hydroxyapatite by low-pressure low-frequency plasma treatment to promote its biological performance2012

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Akira Myoui, Hideki Yoshikawa and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi,
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51

    • NAID

      210000141076

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Microcavity array plasma system for remote chemical processing at atmospheric pressure2012

    • Author(s)
      Dae-Sung Lee, Satoshi Hamaguchi, Osamu Sakai, Sung-Jin Park and J Gary Eden,
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012

    • Author(s)
      S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      e-J.Surf.Sci.Nanotech.(2012)

      Volume: (掲載予定)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (掲載確定)

    • NAID

      210000072700

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Low energy metal ion beam production with a modified Freeman-type ion source for development of novel catalysts2012

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      e-J. Surf. Sci. Nanotech.

      Volume: 10 Pages: 139-144

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Efficient modification of the surface properties of interconnected porous hydroxyapatite by low-pressure low-frequency plasma treatment to promote its biological performance2012

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Akira Myoui, Hideki Yoshikawa and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, and Satoshi Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51 Issue: 8S1 Pages: 08HB01-08HB01

    • DOI

      10.1143/jjap.51.08hb01

    • NAID

      210000141076

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012

    • Author(s)
      S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      Thin Solid Films

      Volume: (掲載確定)

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012

    • Author(s)
      S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi
    • Journal Title

      Thin Solid Films

      Volume: 520 Pages: 4894-4897

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Extracellular Matrix Patterning for Cell Alignment by Atmospheric Pressure Plasma Jets2012

    • Author(s)
      Ayumi Ando, Toshifumi Asano, Md.Abu Saved, Ryugo Tero, Katsuhisa Kitano, Tsuneo Urisu, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 51

    • NAID

      40019199845

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Microcavity array plasma system for remote chemical processing at atmospheric pressure2012

    • Author(s)
      Dae-Sung Lee, Satoshi Hamaguchi, Osamu Sakai, Sung-Jin Park and J Gary Eden
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy, Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation2012

    • Author(s)
      S. Yoshimura, Y. Tsukazaki, M. Kiuchi, S.Sugimoto, and S. Hamaguchi
    • Journal Title

      J. Phys. D; Appl. Phys

      Volume: 45 Issue: 50 Pages: 1-10

    • DOI

      10.1088/0022-3727/45/50/505201

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075, KAKENHI-PROJECT-22540506, KAKENHI-PROJECT-22612002
  • [Journal Article] Dependence of catalytic properties of Indium-implanted SiO2 thin films on the energy and dose of incident Indium ions2012

    • Author(s)
      S.Yoshimura, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      Thin Solid Films

      Volume: (掲載予定)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012

    • Author(s)
      S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M.Nishitani, and S. Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51

    • NAID

      210000072700

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Journal Article] Si damage due to oblique-angle ion impact relevant for vertical gate etching processes2012

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kane, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (掲載予定)

    • NAID

      210000141076

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Sputtering yields and surface modification of poly(methyl methacrylate) (PMMA) by low-energy Ar+/CF3+ ion bombardment with vacuum ultraviolet (VUV) photon irradiation2012

    • Author(s)
      S. Yoshimura, Y. Tsukazaki, M. Kiuchi, S. Sugimoto, S. Hamaguchi,.
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 45

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Sputtering yields of CaO, SrO, and BaO by monochromatic noble gas ion bombardment2012

    • Author(s)
      S. Yoshimura, K. Hine, M. Kiuchi, J. Hashimoto, M. Terauchi, Y. Honda, M.Nishitani, and S. Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51

    • NAID

      210000072700

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Plasma Microchannel and Jet Enhanced by an Array of Ellipsoidal Microcavities2011

    • Author(s)
      D.-S.Lee, O.Sakai, S.-J.Park, J.G.Eden, S.Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci.

      Volume: 39 Pages: 2690-2691

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] プラズマ医療におけるプラズマ生体相互作用2011

    • Author(s)
      浜口智志
    • Journal Title

      J.Plasma Fusion Res.

      Volume: 87 Pages: 696-703

    • NAID

      110008750649

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)2011

    • Author(s)
      Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
    • Journal Title

      J.Appl.Phys.

      Volume: 110

    • NAID

      120006955425

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] 講座原子分子データベースの構築と利用:はじめに:-原子分子データベースの概要とプラズマ研究への応用-2011

    • Author(s)
      村上泉, 長壁正樹, 池田勝則, 西浦正樹, 小田昭紀, 菅原広剛, 浜口智志
    • Journal Title

      J.Plasma Fusion Res

      Volume: 88 Pages: 35-47

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Plasma Microchannel and Jet Enhanced by an Array of Ellipsoidal Microcavities2011

    • Author(s)
      D.-S.Lee, O.Sakai, S.-J.Park, J.G.Eden, S.Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci.

      Volume: 39 Pages: 2690-2691

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure2011

    • Author(s)
      Chieh-Wen Lo and Satoshi Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys

      Volume: 44 Issue: 37 Pages: 375201-375201

    • DOI

      10.1088/0022-3727/44/37/375201

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Hydrogen effects in hydrofluorocarbon plasma etching of silicon nitride : Beam study with CF^+, CF2^+, CHF_2^+, and CH_2F^+ ions2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      J.Vac.Sci.Technol.A

      Volume: 29

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Experimental evaluation of CaO, SrO, and BaO sputtering yields by Ne or Xe ions2011

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys

      Volume: 44

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)2011

    • Author(s)
      Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
    • Journal Title

      J.Appl.Phys.

      Volume: 110

    • NAID

      120006955425

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] 講座原子分子データベースの構築と利用:はじめに:-原子分子データベースの概要とプラズマ研究への応用-2011

    • Author(s)
      村上泉, 長壁正樹, 池田勝則, 西浦正樹, 小田昭紀, 菅原広剛, 浜口智志
    • Journal Title

      J.Plasma Fusion Res

      Volume: 88 Pages: 35-47

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Si recess of Poly-Si Gate Etching : Damage Enhanced by Ion Assisted Oxygen Diffusion2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Dynamics of Near-Atmospheric Pressure Hydrogen Plasmas Driven by Pulsed High Voltages2011

    • Author(s)
      Chieh-Wen Lo, Satoshi Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci

      Volume: 39 Pages: 2100-2101

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Arrangement of PC12 cells on a silicon chip via extracellular matrix (ECM) layer patterning by atmospheric pressure plasmas2011

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Toshifumi Asano, Tsuneo Urisu, Satoshi Hamaguchi
    • Journal Title

      Plasma Fusion Res.

      Volume: 6

    • NAID

      130002059489

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure2011

    • Author(s)
      Chieh-Wen Lo, Satoshi Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys.

      Volume: 44

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Hydrogen effects in hydrofluorocarbon plasma etching of silicon nitride : Beam study with CF^+, CF2^+, CHF_2^+, and CH_2F^+ ions2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      J.Vac.Sci.Technol.A

      Volume: 29

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Rapid Breakdown-Mechanisms of Open Air Nanosecond Dielectric Barrier Discharges2011

    • Author(s)
      Tsuyohito Ito, Tatsuya Kanazawa, Satoshi Hamaguchi
    • Journal Title

      Phys.Rev.Lett.

      Volume: 107

    • NAID

      120006955423

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Improvement of Hydrophilicity of Interconnected Porous Hydroxyapatite by Dielectric Barrier Discharge Plasma Treatment2011

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Kiyoshi Okada, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci.

      Volume: 39 Pages: 2166-2167

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Improvement of Hydrophilicity of Interconnected Porous Hydroxyapatite by Dielectric Barrier Discharge Plasma Treatment2011

    • Author(s)
      Dae-Sung Lee, Yu Moriguchi, Kiyoshi Okada, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci.

      Volume: 39 Pages: 2166-2167

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Rapid Breakdown Mechanisms of Open Air Nanosecond Dielectric Barrier Discharges2011

    • Author(s)
      Tsuyohito Ito, Tatsuya Kanazawa, Satoshi Hamaguchi
    • Journal Title

      Phys.Rev.Lett.

      Volume: 107

    • NAID

      120006955423

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Experimental evaluation of CaO, SrO, and BaO sputtering yields by Ne or Xe ions2011

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, J.Hashimoto, M.Terauchi, Y.Honda, M.Nishitani, S.Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys

      Volume: 44

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Dynamics of Near-Atmospheric Pressure Hydrogen Plasmas Driven by Pulsed High Voltages2011

    • Author(s)
      Chieh-Wen Lo, Satoshi Hamaguchi
    • Journal Title

      IEEE Trans.Plasma Sci

      Volume: 39 Pages: 2100-2101

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Si recess of Poly-Si Gate Etching : Damage Enhanced by Ion Assisted Oxygen Diffusion2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Numerical analyses of hydrogen plasma generation by nanosecond pulsed high voltages at near-atmospheric pressure2011

    • Author(s)
      Chieh-Wen Lo, Satoshi Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys.

      Volume: 44

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Arrangement of PC12 cells on a silicon chip via extracellular matrix (ECM) layer patterning by atmospheric pressure plasmas2011

    • Author(s)
      Ayumi Ando, Hidetaka Uno, Toshifumi Asano, Tsuneo Urisu, Satoshi Hamaguchi
    • Journal Title

      Plasma Fusion Res.

      Volume: 6

    • NAID

      130002059489

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Micro pattern formation of extracellular-matrix (ECM) layers by atmospheric-pressure plasmas and cell culture on the patterned EGMs2011

    • Author(s)
      Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys.

      Volume: 44

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] プラズマ医療におけるプラズマ生体相互作用2011

    • Author(s)
      浜口智志
    • Journal Title

      J.Plasma Fusion Res.

      Volume: 87 Pages: 696-703

    • NAID

      110008750649

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Hydrogen effects in hydrofluorocarbon plasma etching of silicon nitride: Beam study with CF+, CF2+, CHF2+, and CH2F+ ions2011

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Masanaga Fukasawa, Tetsuya Tatsumi, and Satoshi Hamaguchi
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 29 Issue: 5

    • DOI

      10.1116/1.3610981

    • NAID

      120006955424

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Micro pattern formation of extracellular-matrix (ECM) layers by atmospheric-pressure plasmas and cell culture on the patterned ECMs2011

    • Author(s)
      Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takaao, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
    • Journal Title

      J.Phys.D : Appl.Phys.

      Volume: 44

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Effect of light irradiation from inductively coupled Ar plasma on etching yields of SiO_2 film by CF_3 ion beam injections2010

    • Author(s)
      S.Yoshimura, Y.Tsukazaki, K.Ikuse, M.Kiuchi, S.Hamaguchi
    • Journal Title

      J.Phys.: Conference Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Protein pattering by atmospheric-pressure plasmas2010

    • Author(s)
      A.Ando, A.Sayed, T.Asano, R.Tero, K.Kitano, T.Urisu, S.Hamaguchi
    • Journal Title

      J.Phys.: Conf.Series

      Volume: 227

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Novel catalysts : indium implanted SiO2 thin films2010

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      Appl.Surf.Sci.

      Volume: 257 Pages: 192-196

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Facile Creation of Biointerface on Commodity Plastic Surface by Combination of Atmospheric Plasma and Reactive Polymer Coating2010

    • Author(s)
      Naoki Kanayama, Swapan Kumar Saha, Naoki Nakayama, Jun Nakanishi, Katsuhisa Kitano, Satoshi Hamaguchi, Yukiko Nagasaki
    • Journal Title

      J.Photopolymer Sci.Tech.

      Volume: 23 Pages: 579-583

    • NAID

      130004833370

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Effects of Hydrogen Incorporation in the Formation of Hydrogenated Diamond-like Carbon Films2010

    • Author(s)
      Y.Murakami, K.Hosaka, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Particle-in-Cell Simulations of High-Pressure Hydrogen Plasmas Driven by Nano-second Pulsed High-Voltages2010

    • Author(s)
      C.W.Lo, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Reverse Propagation of Atmospheric Pressure Plasma Jets2010

    • Author(s)
      Tsuyohito Ito, Aurelien Raddenzati, Artabaze Shams, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      40017341196

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Electric field measurements in near-atmospheric pressure nitrogen and air based on a four-wave mixing scheme2010

    • Author(s)
      S.Mueller, T.Ito, K.Kobayashi, D.Luggenholscher, U.Czarnetzki, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 227

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Electron density measurement for plasmas by Terahertz time-domain spectroscopy2010

    • Author(s)
      A.Ando, H.Kitahara, T.Kurose, K.Kitano, K.Takano, M.Tani, M.Hangyo, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 227

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Evaluation of Si etching yields by Cl^+, Br^+, and HBr^+ ion irradiation2010

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, Satoshi Hamaguchi
    • Journal Title

      J.Phys.: Conf.Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Novel catalysts : indium implanted SiO2 thin films2010

    • Author(s)
      S.Yoshimura, K.Hine, M.Kiuchi, Y.Nishimoto, M.Yasuda, A.Baba, S.Hamaguchi
    • Journal Title

      Appl.Surf.Sci.

      Volume: 257 Pages: 192-196

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamond-like carbon deposition processes2010

    • Author(s)
      Y. Murakami, S. Horiguchi, and S. Hamaguchi
    • Journal Title

      Phys. Rev. E

      Volume: 81 Issue: 4

    • DOI

      10.1103/physreve.81.041602

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamond-like carbon deposition processes2010

    • Author(s)
      Y. Murakami, S. Horiguchi, S. Hamaguchi
    • Journal Title

      Phys. Rev. E. 81

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Effects of Hydrogen Incorporation in the Formation of Hydrogenated Diamond-like Carbon Films2010

    • Author(s)
      Y.Murakami, K.Hosaka, S.Hamaguchi
    • Journal Title

      J.Phys.: Conf.Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Electric field measurements in near-atmospheric pressure nitrogen and air based on a four-wave mixing scheme2010

    • Author(s)
      S.Mueller, T.Ito, K.Kobayashi, D.Luggenholscher, U.Czarnetzki, S.Hamaguchi
    • Journal Title

      J.Phys.: Conf.Series

      Volume: 227

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Electron density measurement for plasmas by Terahertz time-domain spectroscopy2010

    • Author(s)
      A.Ando, H.Kitahara, T.Kurose, K.Kitano, K.Takano, M.Tani, M.Hangyo, S.Hamaguchi
    • Journal Title

      J.Phys.: Conf.Series

      Volume: 227

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Evaluation of Si etching yields by Cl^+, Br^+, and HBr^+ ion irradiation2010

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Song-Yun Kang, Satoshi Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Protein pattering by atmospheric-pressure plasmas2010

    • Author(s)
      A.Ando, A.Sayed, T.Asano, R.Tero, K.Kitano, T.Urisu, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 227

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamond-like carbon deposition processes2010

    • Author(s)
      Y.Murakami, S.Horiguchi, S.Hamaguchi
    • Journal Title

      Phys.Rev.E.

      Volume: 81

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Plasma-surface Interactions in Material Processing2010

    • Author(s)
      S.Hamaguchi
    • Journal Title

      J.Phys.Conf.Series

      Volume: 257

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Effect of light irradiation from inductively coupled Ar plasma on etching yields of SiO_2 film by CF_3 ion beam injections2010

    • Author(s)
      S.Yoshimura, Y.Tsukazaki, K.Ikuse, M.Kiuchi, S.Hamaguchi
    • Journal Title

      J.Phys. : Conference Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Plasma-surface Interactions in Material Processing2010

    • Author(s)
      S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series

      Volume: 257

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Particle-in-Cell Simulations of High-Pressure Hydrogen Plasmas Driven by Nano-second Pulsed High-Voltages2010

    • Author(s)
      C.W.Lo, S.Hamaguchi
    • Journal Title

      J.Phys.: Conf.Series

      Volume: 232

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamond-like carbon deposition processes2010

    • Author(s)
      Y.Murakami, S.Horiguchi, S.Hamaguchi
    • Journal Title

      Phys.Rev.E.

      Volume: 81

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Journal Article] Reverse Propagation of Atmospheric Pressure Plasma Jets2010

    • Author(s)
      Tsuyohito Ito, Aurelien Raddenzati, Artabaze Shams, Satoshi Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      40017341196

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] Facile Creation of Biointerface on Commodity Plastic Surface by Combination of Atmospheric Plasma and Reactive Polymer Coating2010

    • Author(s)
      Naoki Kanayama, Swapan Kumar Saha, Naoki Nakayama, Jun Nakanishi, Katsuhisa Kitano, Satoshi Hamaguchi, Yukiko Nagasaki
    • Journal Title

      J.Photopolymer Sci.Tecb.

      Volume: 23 Pages: 579-583

    • NAID

      130004833370

    • Peer Reviewed
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Journal Article] 分子動力学シミュレーションニよる硬質炭素膜形成メカニズムの解析2009

    • Author(s)
      村上泰夫、浜口智志
    • Journal Title

      J.Plasma Fusion Res. 85

      Pages: 674-679

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Sputtering yields of Au by low-energy noble gas ion bombard ment2009

    • Author(s)
      K.Ikuse, S.Yoshimura, K.Hine, M.Kiuchi, S.Hamaguchi,
    • Journal Title

      J.Phys.D : Appl.Phys. 42

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] CF_3^+イオンビームを用いたポリメタクリル酸メチル樹脂のエッチングにおける紫外光照射の効果2009

    • Author(s)
      幾世和将, 吉村智, 塚崎泰裕, 木内正人, 浜口智志
    • Journal Title

      Journal of the Vacuum Society of Japan (印刷中)

    • NAID

      10024897826

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] CF3+イオンビームを用いたポリメタクリル酸メチル樹脂のエッチングにおける紫外光照射の効果2009

    • Author(s)
      幾世和将, 吉村智, 塚崎泰裕, 木内正人, 浜口智志
    • Journal Title

      J. Vac. Soc. Jpn. 52

      Pages: 127-130

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] ドライエッチング表面解析 : 原子スケールアプローチ」浜口智志、小特集「ドライエッチングの科学と技術の新局面2009

    • Author(s)
      浜口智志
    • Journal Title

      プラズマ核融合学会誌 85

      Pages: 177-184

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Atomic-Scale Numerical Simulations of Structural Properties in Carbon-Based Thin Film Deposition Processes,2009

    • Author(s)
      Yasuo Murakami, Seishi Horiguchi, Satoshi Hamaguchi
    • Journal Title

      Proceedings of the 19th International Symposium on Plasma Chemistry, (ed.By A.von Keudell, J.Winter, M.Boke, V.Schlz-von der Gathen, July 26-31, 2009, Bochum, Germany) 1

    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 「ドライエッチング表面解析:原子スケールアプローチ」小特集:ドライエッチングの科学と技術の新局面2009

    • Author(s)
      浜口智志
    • Journal Title

      プラズマ核融合学会誌 85

      Pages: 177-184

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] "Atomic-Scale Numerical Simulations of Structural Properties in Carbon-Based Thin Film Deposition Processes, " Proceedings of the 19th International Symposium on Plasma Chemistry2009

    • Author(s)
      Y. Murakami, S. Horiguchi, S. Hamaguchi
    • Journal Title

      J. Winter, M. Boke, V. Schlz-von der Gathen

    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Effect of Ultraviolet Light Irradiation on Etching Process of Poly(methylmethacrylate)by Ion Beam Injections2009

    • Author(s)
      S.Yoshimura, K.Ikuse, Y.Tsukazaki, M.Kiuchi, S.Hamaguchi
    • Journal Title

      J.Phys. : Conf.Series 191

      Pages: 120301-5

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Sputtering yields of Au by low-energy noble gas ion bombardment2009

    • Author(s)
      K. Ikuse, S. Yoshimura, K. Hine, M. Kiuchi, S. Hamaguchi
    • Journal Title

      J. Phys. D: Appl. Phys. 42

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] ドライエッチング表面解析 : 原子スケールアプローチ2009

    • Author(s)
      浜口 智志
    • Journal Title

      プラズマ核融合学会誌 (印刷中)

    • NAID

      110007227634

    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 分子動力学シミュレーションによる硬質炭素膜形成メカニズムの解析2009

    • Author(s)
      村上泰夫、浜口智志
    • Journal Title

      J. Plasma Fusion Res. 85

      Pages: 674-679

    • NAID

      110007468378

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Effect of Ultraviolet Light Irradiation on Etching Process of Poly(methyl methacrylate) by Ion Beam Injections2009

    • Author(s)
      S. Yoshimura, K. Ikuse, Y. Tsukazaki, M. Kiuchi, S. Hamaguchi
    • Journal Title

      J. Phys. :Conf. Series 191

      Pages: 0120301-5

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article]2009

    • Author(s)
      浜口智志
    • Journal Title

      ドライ・ウエットエッチング技術全集(第3章第1節執筆担当)(技術情報協会)

      Pages: 221-237

    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] CF_3^+イオンビームを用いたポリメタクリル酸メチル樹脂のエッチングにおける紫外光照射の効果2009

    • Author(s)
      幾世和将, 吉村智, 塚崎泰裕, 木内正人, 浜口智志
    • Journal Title

      J.Vac.Soc.Jpn. 52

      Pages: 127-130

    • NAID

      10024897826

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 光照射を重畳したCF_3イオンビームによるSiO_2エッチング率の測2008

    • Author(s)
      幾世和将, 吉村智, 滝澤敏史, 唐橋一浩, 木内 正人, 浜口智志
    • Journal Title

      真空 (印刷中)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたSiO_2/Si基板へのインジウムイオン注入2008

    • Author(s)
      日根清裕, 吉村智, 唐橋一浩, 木内正人, 浜口智志
    • Journal Title

      真空 (印刷中)

    • NAID

      10021157088

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Experimental evaluation of MgO sputtering yields by monochromatic Ne, Kr, or Xe ion beam2008

    • Author(s)
      K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi
    • Journal Title

      Thin Solid Films 517

      Pages: 835-840

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Measurement of Au sputtering yields by Ar and He ions with a low-energy mass selected ion beam system2008

    • Author(s)
      K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi
    • Journal Title

      Journal of Physics: Conference Series 106

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 低周波大気圧マイクロプラズマジェット2008

    • Author(s)
      北野勝久、 浜口智志
    • Journal Title

      応用物理 77(印刷中)

    • NAID

      10021108982

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Journal Article] 光照射を重畳したCF3イオンビームによるSiO2エッチング率の測定2008

    • Author(s)
      幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
    • Journal Title

      Journal of the Vacuum Society of Japan 51

      Pages: 158-161

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Measurement of sticking probability and sputtering yield of Au by low-energy mass selected ion beams with a quartz crystal microbalance2008

    • Author(s)
      K. Ikuse, S. Yoshimura, M. Kiuchi, K. Hine, S. Hamaguchi
    • Journal Title

      Journal of Physics: Conference Series 106

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Measurement of Au sputtering yields by Ar and He ions with a low-energy mass selected ion beam system2008

    • Author(s)
      K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, S. Hamaguchi
    • Journal Title

      Journal of Physics : Conference Series 106

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたSiO_2/Si基板へのインジウムイオン注入2008

    • Author(s)
      幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
    • Journal Title

      Journal of the Vacuum Society of Japan 51

      Pages: 218-220

    • NAID

      10021157088

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたSiO2/Si基板へのインジウムイオン注入2008

    • Author(s)
      幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
    • Journal Title

      Journal of the Vacuum Society of Japan 51

      Pages: 218-220

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 光照射を重畳したCF_3イオンビームによるSiO_2エッチング率の測定2008

    • Author(s)
      幾世和将, 吉村智, 滝沢敏史, 唐橋一浩, 木内正人, 浜口智志
    • Journal Title

      Journal of the Vacuum Society of Japan 51

      Pages: 158-161

    • NAID

      10021156954

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Measurement of sticking probability and sputtering yield of Au by low-energy mass selected ion beams with a quartz crystal microbalance2008

    • Author(s)
      K. Ikuse, S. Yoshimura, M. Kiuchi, K. Hine, S. Hamaguchi
    • Journal Title

      Journal of Physics : Conference Series 106

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Energy Dependence of Crystalline Structure on Ion Beam Deposited Au Thin Films2007

    • Author(s)
      T.Takizawa, T.Maeda, M.Kiuchi, S.Yoshimura, S.Hamaguchi
    • Journal Title

      Phil.Mag. (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Temporal evolution of ion fragment production from dimethylsilane by a hot tungsten wire and compounds deposited on the tungsten surface2007

    • Author(s)
      S.Yoshimura, A.Toh, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys. (印刷中)

    • NAID

      10018901450

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics simulation analyses on injection angle dependence of SiO2 sputtering yields by fluorocarbon beams2007

    • Author(s)
      T.Kawase, S.Hamaguchi
    • Journal Title

      Thin Solid films (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Synthesis of uniformly distributed metal nanoparticles with dispersion stability by nonequilibrium atmospheric plasma jets2007

    • Author(s)
      H., Furusho・D., Miyamoto・Y., Nagasaki・K., Kitano・S., Hamaguchi
    • Journal Title

      J. Photopolymer Sci. Tech. 20

      Pages: 229-233

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Journal Article] Control of atomic layer degradation on Si substrate,2007

    • Author(s)
      Y.Nakamura, T.Tatsumi, S.Kobayashi, K.Kugimiya, T.Harano, A.Ando, T.Kawase, S.Hamaguchi, S.Iseda
    • Journal Title

      J. Vac. Sci. Tech. A (印刷中)

    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics simulations of organic polymer dry etching at high substrate temperatures2007

    • Author(s)
      M.Yamashiro, H.Yamada, S.Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys. (印刷中)

    • NAID

      10018901408

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Measurement of Au Sputtering Yields by Neon with Low-Energy Mass Analyzed Ion Beam System2007

    • Author(s)
      K.Hine, S.Yoshimura, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Shinku (in press) (in Japanese)

    • NAID

      10019928259

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System2007

    • Author(s)
      K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. T Terauchi, M. Nishitani, S. Hamaguchi
    • Journal Title

      Jpn. J. Applied Phys. 46

    • NAID

      210000063805

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Energy Dependence of Crystalline Structure on Ion Beam Deposited Au Thin Films2007

    • Author(s)
      T.Takizawa, T.Maeda, M.Kiuchi, S.Yoshimura, S.Hamaguchi
    • Journal Title

      Phil. Mag. (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Control of atomic layer degradation on Si substrate2007

    • Author(s)
      Y.Nakamura, T.Tatsumi, S.Kobayashi, K.Kugimiya, T.Harano, A.Ando, T.Kawase, S.Hamaguchi, S.Iseda
    • Journal Title

      J. Vac. Sci. Tech. A (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Time evolution of electrode voltage distribution in large-area capacitively coupled plasmas2007

    • Author(s)
      M.Matsukuma, S.Hamaguchi
    • Journal Title

      Thin Solid films (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Temporal evolution of ion fragment production from dimethylsilane by a hot tungsten wire and compounds deposited on the tungsten surface2007

    • Author(s)
      S.Yoshimura, A.Toh, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. (in press)

    • NAID

      10018901450

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いたネオンによる金のスパッタ率の測定2007

    • Author(s)
      日根清裕, 吉村智, 木内正人, 浜口智志
    • Journal Title

      真空 (印刷中)

    • NAID

      10019928259

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Atomic-level simulation of non-equilibrium surface chemical reactions under plasma-wall interaction2007

    • Author(s)
      S.Hamaguchi, M.Yamashiro, H.Yamada
    • Journal Title

      Comp.Phys.Comm. (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System2007

    • Author(s)
      K. Hine, S. Yoshimura, K. Ikuse, M. Kiuchi, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi
    • Journal Title

      Jpn. J. Applied Phys. 46

    • NAID

      210000063805

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] Molecular dynamics simulations of organic polymer dry etching at high substrate temperatures2007

    • Author(s)
      M.Yamashiro, H.Yamada, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. (in press)

    • NAID

      10018901408

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Textbook for the 13th Plasma Electronics Summer School2007

    • Author(s)
      S.Hamaguchi
    • Journal Title

      Plasma Electronics Division, Japan Society of Applied Physics (in press) (in Japanese)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Time evolution of electrode voltage distribution in large-area capacitively coupled plasmas2007

    • Author(s)
      M.Matsukuma, S.Hamaguchi
    • Journal Title

      Thin Solid films (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Atomic-level simulation of non-equilibrium surface chemical reactions under plasma-wall interaction2007

    • Author(s)
      S.Hamaguchi, M.Yamashiro, H.Yamada
    • Journal Title

      Comp. Phys. Comm. (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] ドライエッチング・プロセスシミュレーション2007

    • Author(s)
      浜口智志
    • Journal Title

      真空 (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics simulation analyses on injection angle dependence of SiO_2 sputtering yields by fluorocarbon beams2007

    • Author(s)
      T.Kawase, S.Hamaguchi
    • Journal Title

      Thin Solid films (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Dry Etching Process Simulation2007

    • Author(s)
      S.Hamaguchi
    • Journal Title

      Shinku (in press) (in Japanese)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Control of atomic layer degradation on Si substrate2007

    • Author(s)
      Y.Nakamura, T.Tatsumi, S.Kobayashi, K.Kugimiya, T.Harano, A.Ando, T.Kawase, S.Hamaguchi, S.Iseda
    • Journal Title

      J.Vac.Sci.Tech.A (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Numerical analysis of incident angle effects in reactive sputtering deposition of amorphous SiO_22006

    • Author(s)
      M.Taguchi, S.Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys. 45 (10B)

      Pages: 8163-8167

    • NAID

      10018339149

    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Fragment Ions of Dimethylsilane Produced by Hot Tungsten Wires2006

    • Author(s)
      S.Yoshimura, A.Toh, S.Sugimoto, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys. 45 (10B)

      Pages: 8204-8207

    • NAID

      10018339336

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics simulation study on substrate temperature dependence of sputtering yields for an organic polymer under ion bombardment2006

    • Author(s)
      M.Yamashiro, H.Yamada, S.Hamaguchi
    • Journal Title

      J.Appl.Phys. 101(4)

    • NAID

      120006955417

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics study on Ar ion bombardment effects in amorphous SiO_2 deposition processes2006

    • Author(s)
      M.Taguchi, S.Hamaguchi
    • Journal Title

      J. Appl. Phys. 100 (12)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Fragment ions of methylsilane produced by hot tungsten wires2006

    • Author(s)
      S.Yoshimura, A.Toh, T.Maeda, S.Sugimoto, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys. 45 (3A)

      Pages: 1813-1815

    • NAID

      40007177952

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Fragment Ions of Dimethylsilane Produced by Hot Tungsten Wires2006

    • Author(s)
      S.Yoshimura, A.Toh, S.Sugimoto, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 45 (10B)

      Pages: 8204-8207

    • NAID

      10018339336

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics study on Ar ion bombardment effects in amorphous SiO2 deposition processes2006

    • Author(s)
      M.Taguchi, S.Hamaguchi
    • Journal Title

      J.Appl.Phys. 100 (12)

    • NAID

      120006955416

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics study on Ar ion bombardment effects in amorphous SiO_2 deposition processes,2006

    • Author(s)
      M.Taguchi, S.Hamaguchi
    • Journal Title

      J. Appl. Phys. 100 (12)

    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] フリーマン型イオン源におけるメチルシランのフラグメントイオンとタングステンワイヤ表面状態2006

    • Author(s)
      藤章至, 吉村智, 杉本敏司, 木内正人, 浜口智志
    • Journal Title

      真空 49 (6)

      Pages: 383-385

    • NAID

      10017598622

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Temporal evolution of ion fragment production from methylsilane by a hot tungsten wire2006

    • Author(s)
      S.Yoshimura, A.Toh, T.Toyoshima, M.Kiuchi, S.Hamaguchi
    • Journal Title

      J.Appl.Phys. 100 (9)

    • NAID

      120006955415

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Radio-Frequency (RF)-driven atmospheric-pressure plasmas in contact with liquid2006

    • Author(s)
      K.Kitano, H.Aoki, S.Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys. 14(10B)

      Pages: 8294-8297

    • Data Source
      KAKENHI-PROJECT-18030009
  • [Journal Article] Numerical analysis of incident angle effects in reactive sputtering deposition of amorphous SiO22006

    • Author(s)
      M.Taguchi, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 45(10B)

      Pages: 8163-8167

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics simulation study on substrate temperature dependence of sputtering yields for an organic polymer underion bombardment2006

    • Author(s)
      M.Yamashiro, H.Yamada, S.Hamaguchi
    • Journal Title

      J. Appl. Phys. 101(4)

    • NAID

      120006955417

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Numerical analysis of incident angle effects in reactive sputtering deposition of amorphous SiO_22006

    • Author(s)
      M.Taguchi, S.Hamaguchi
    • Journal Title

      Jpn. J. Appl. Phys. 45(10B)

      Pages: 8163-8167

    • NAID

      10018339149

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Fragment Ions Produced from Methylsilane by Hot Tungsten and Compounds Deposited on Tungsten Surface2006

    • Author(s)
      A.Toh, S.Yoshimura, S.Sugimoto, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Shinku 49(6) (in Japanese)

      Pages: 383-385

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いた金の堆積率の測定2006

    • Author(s)
      日根清裕, 吉村智, 前田拓也, 木内正人, 浜口智志
    • Journal Title

      真空 49 (3)

      Pages: 55-57

    • NAID

      10018133603

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics simulation study on substrate temperature dependence of sputtering yields for an organic polymer under ion bombardment2006

    • Author(s)
      M.Yamashiro, H.Yamada, S.Hamaguchi
    • Journal Title

      J. Appl. Phys. 101 (4)

    • NAID

      120006955417

    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Temporal evolution of ion fragment production from methylsilane by a hot tungsten wire2006

    • Author(s)
      S.Yoshimura, A.Toh, T.Toyoshima, M.Kiuchi, S.Hamaguchi
    • Journal Title

      J. Appl. Phys. 100 (9)

    • NAID

      120006955415

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Fragment ions of methylsilane produced by hot tungsten wires2006

    • Author(s)
      S.Yoshimura, A.Toh, T.Maeda, S.Sugimoto, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 45

      Pages: 1813-1815

    • NAID

      40007177952

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Measurement of Au Deposition Rates with Low-Energy Mass Separated Ion Beam Deposition Apparatus2006

    • Author(s)
      K.Hine, S.Yoshimura, T.Maeda, M.Kiuchi, S.Hamaguchi
    • Journal Title

      Shinku 49(3) (in Japanese)

      Pages: 55-57

    • NAID

      10018133603

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Molecular dynamics simulation of the formation of sp3 hybridized bonds in hydrogenated diamond-like carbon deposition processes

    • Author(s)
      Y.Murakami, S.Horiguchi, S.Hamaguchi
    • Journal Title

      Phys.Rev.E (印刷中)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Journal Article] 低エネルギー質量分離イオンビーム照射装置を用いた金の堆積率の測定

    • Author(s)
      日根清裕, 吉村智, 前田拓也, 木内正人, 浜口智志
    • Journal Title

      真空 (印刷中)

    • NAID

      10018133603

    • Data Source
      KAKENHI-PROJECT-17340174
  • [Journal Article] Plasma generation inside externally supplied Ar bubbles in water

    • Author(s)
      H., Aoki・K., Kitano・S., Hamaguchi
    • Journal Title

      Plasma Sources Science and Technology 17(in press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Journal Article] Plasma generation inside externally supplied Ar bubbles in water

    • Author(s)
      H. Aoki, K. Kitano, and S. Hamaguchi
    • Journal Title

      Plasma Sources Science and Technology 17(in press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18654101
  • [Patent] Etching method for oxide semiconductor film2021

    • Inventor(s)
      Satoshi Hamaguchi et al.
    • Industrial Property Rights Holder
      Satoshi Hamaguchi et al.
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Acquisition Date
      2022
    • Overseas
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Patent] 人工骨、及び人工骨の製造方法2021

    • Inventor(s)
      浜口 智志、出口 智子、他
    • Industrial Property Rights Holder
      浜口 智志、出口 智子、他
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Acquisition Date
      2022
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Patent] 酸化物半導体膜のエッチング方法2019

    • Inventor(s)
      平田瑛子、辰巳哲也、深沢正永、浜口智志、唐橋一浩
    • Industrial Property Rights Holder
      ソニーセミコンダクタソリューションズ株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2019-003234
    • Filing Date
      2019
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Patent] 人工骨、及び人工骨の製造方法2019

    • Inventor(s)
      浜口智志、出口智子、杦本敏司、海渡貴司、吉川秀樹、朝森千永子
    • Industrial Property Rights Holder
      国立大学法人大阪大学、(株)Aimedic MMT
    • Industrial Property Rights Type
      特許
    • Filing Date
      2019
    • Overseas
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Patent] 人工骨、及び人工骨の製造方法2018

    • Inventor(s)
      浜口智志、出口智子、杦本敏司、吉川秀樹、海渡貴司、朝森千永子
    • Industrial Property Rights Holder
      大阪大学、株式会社Aimedic MMT
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-150717
    • Filing Date
      2018
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Patent] 特願2014-412402014

    • Inventor(s)
      唐橋一浩、浜口智志、瀬木利夫、松尾二郎、木下啓蔵、溝谷浩平
    • Industrial Property Rights Holder
      唐橋一浩、浜口智志、瀬木利夫、松尾二郎、木下啓蔵、溝谷浩平
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-041240
    • Filing Date
      2014-03-04
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Patent] エッチング方法および装置2014

    • Inventor(s)
      唐橋一浩、浜口智志、瀬木利夫、松尾二郎、木下啓蔵、溝谷浩平
    • Industrial Property Rights Holder
      唐橋一浩、浜口智志、瀬木利夫、松尾二郎、木下啓蔵、溝谷浩平
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-041240
    • Filing Date
      2014-03-04
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Patent] エッチング方法および装置2014

    • Inventor(s)
      唐橋一浩、浜口智志、瀬木利夫、松尾二郎、木下啓蔵、溝谷浩平
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-041240
    • Filing Date
      2014-03-04
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Patent] Plasma producing apparatus and method of plasma production2012

    • Inventor(s)
      K. Kitano, S. Hamaguchi, H. Aoki
    • Industrial Property Rights Holder
      K. Kitano, S. Hamaguchi, H. Aoki
    • Industrial Property Rights Type
      特許
    • Acquisition Date
      2012
    • Overseas
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Patent] バイオセラミックスを含む人工骨の改質方法と、その方法で改質された人工骨2012

    • Inventor(s)
      浜口智志 吉川秀樹 他
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Number
      2012-085854
    • Filing Date
      2012-04-04
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Patent] バイオセラミックスを含む人工骨の改質方法と、その方法で改質された人工骨」2012

    • Inventor(s)
      浜口智志、吉川秀樹 他
    • Industrial Property Rights Holder
      浜口智志、吉川秀樹 他
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-085854
    • Filing Date
      2012-04-04
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Patent] バイオセラミックスを含む人工骨の改質方法と、その方法で改質された人工骨2012

    • Inventor(s)
      浜口智志 吉川秀樹 他
    • Industrial Property Rights Holder
      浜口智志 吉川秀樹 他
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-085854
    • Filing Date
      2012-04-04
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Patent] バイオセラミックスを含む人工骨の改質方法と、その方法で改質された人工骨2012

    • Inventor(s)
      浜口智志、吉川秀樹、名井陽、森口 悠、増田一仁、小嶋保次、大野信男、小泉 剛、時政大造
    • Industrial Property Rights Holder
      国立大学法人大阪大学、株式会社電子技研
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-085854
    • Filing Date
      2012-04-04
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Patent] 人工骨、人工骨製造装置及び人工骨製造方法2011

    • Inventor(s)
      浜口智志 吉川秀樹 他、
    • Industrial Property Rights Holder
      大阪大学
    • Filing Date
      2011-09-16
    • Overseas
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Patent] 人工骨、人工骨製造装置及び人工骨製造方法2011

    • Inventor(s)
      浜口智志、森口悠、増田一仁、岡田潔、名井陽、吉川秀樹、李大成
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Filing Date
      2011-09-16
    • Overseas
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Patent] 人工骨、人工骨製造装置及び人工骨製造方法2011

    • Inventor(s)
      浜口智志、森口悠、増田一仁、岡田潔、名井陽、吉川秀樹、李大成
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Filing Date
      2011-09-16
    • Overseas
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Patent] 人工骨、人工骨製造装置及び人工骨製造方法2010

    • Inventor(s)
      浜口智志、森口悠、増田一仁、岡田潔、名井陽、吉川秀樹
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Industrial Property Number
      2010-207645
    • Filing Date
      2010-09-16
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Patent] 人工骨、人工骨製造装置及び人工骨製造方法2010

    • Inventor(s)
      浜口智志、森口悠、増田一仁、岡田潔、名井陽、吉川秀樹
    • Industrial Property Rights Holder
      国立大学法人大阪大学
    • Industrial Property Number
      2010-207645
    • Filing Date
      2010-09-16
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Patent] 炭素膜の製造法2008

    • Inventor(s)
      浜口智志、村上泰夫
    • Industrial Property Rights Holder
      大阪大学、キャノンアネルバ
    • Industrial Property Number
      2008-109129
    • Filing Date
      2008-04-18
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Patent] 炭素膜の製造法2008

    • Inventor(s)
      浜口智, 村上泰夫
    • Industrial Property Rights Holder
      大阪大学, キャノンアネルバ
    • Industrial Property Number
      2008-109129
    • Filing Date
      2008-04-18
    • Overseas
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Patent] プラズマ生成装置およびプラズマ生成方法2007

    • Inventor(s)
      北野勝久、青木裕紀、浜口智志
    • Industrial Property Rights Holder
      財団法人大阪産業振興機構、国立大学法人大阪大学
    • Filing Date
      2007-06-12
    • Overseas
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Patent] 殺菌方法および装置2007

    • Inventor(s)
      北野勝久、井川聡、浜口智志
    • Industrial Property Rights Holder
      北野勝久、井川聡、浜口智志
    • Filing Date
      2007-09-27
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Patent] プラズマ生成装置およびプラズマ発生方法2006

    • Inventor(s)
      北野勝久, 浜口智志
    • Industrial Property Rights Holder
      財団法人大阪産業振興機構, 国立大学法人大阪大学
    • Industrial Property Number
      2006-334800
    • Filing Date
      2006-12-12
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Patent] グロープラズマの発生装置及びグロープラズマ発生方法2006

    • Inventor(s)
      北野勝久, 青木裕紀, 浜口智志
    • Industrial Property Rights Holder
      財団法人大阪産業振興機構, 国立大学法人大阪大学
    • Filing Date
      2006-09-06
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Presentation] プラズマによる超微細加工:原子層プロセス2023

    • Author(s)
      浜口智志
    • Organizer
      兵庫県マテリアルズ・インフォマティクス講演会:放射光による微細加工(半導体)
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Role of Machine Learning2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      76th Annual Gaseous Electronics Conference
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Plasma-enhanced atomic layer processing for semiconductor processing2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Global Plasma Forum (GPF) in Aomori
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Machine learning application to plasma modelling2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      97th IUVSTA Workshop on Plasma-Assisted Conversion of Gases for a Sustainable Future
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] How Can Machine Learning Help Process Development?2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      AVS 69th International Symposium & Exhibition
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Atomic Layer Processing toward Sub-nm-node Semiconductor Device Manufacturing2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      21st International Nanotech Symposium and Exhibition
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Plasma-surface interactions of atomic-layer processing toward sub-nm node semiconductor devices2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      3rd Plasma Thin Film International Union Meeting (PLATHINIUM)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Surface Reaction Mechanisms of Thermal and Plasma-Enhanced Atomic Layer Etching (ALE) Processes2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      AVS 23rd International Conference on Atomic Layer Deposition
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Plasma surface interactions for atomic layer processes2023

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      44th International Symposium on Dry Process (DPS 2023),
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] サブナノメートル半導体デバイス製造にむけたプラズマプロセス技術2023

    • Author(s)
      浜口智志
    • Organizer
      VACUUM2023真空展
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Introduction to data science applied to plasma science and technologies2022

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Le Stiudium Conference, On-line Meeting on Artificial Intelligence for Plasma Science
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Plasma Processing; From Fundamentals to Atomic Layer Processes2022

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 22nd International Vacuum Congress (IVC-22)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Machine-learning based analyses of plasma processing2022

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      14th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2022)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Atomic-level control of plasma processing toward sub-nm node technologies2022

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Symposium on Semiconductor Manufacturing
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Dry Etching Processes; from Fundamentals to Latest Applications2022

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Advanced Metallization Conference 2022, 31st Asian Session (ADMETA Plus 2022)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Plasma process control with machine learning2022

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Symposium of the Vacuum Society of the Phillippines (ISVSP 2022)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] サブナノメータノード半導体デバイス製造をめざしたプラズマプロセスの理解2022

    • Author(s)
      浜口智志
    • Organizer
      第39回プラズマプロセシング研究会/第34回プラズマ材料科学シンポジウム
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] プラズマ表面相互作用研究の新たな展開2021

    • Author(s)
      浜口智志
    • Organizer
      第37回 九州・山口プラズマ研究会
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] サブnmノード時代のプロセス・イノベーションを支える基礎科学2021

    • Author(s)
      浜口智志
    • Organizer
      東京エレクトロン(株) セミナー
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Plasma-surface interactions of atomic layer etching2021

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Workshop on Multidisciplinary Research/ Taiwan Vacuum Society (TVS)-2021 Annual Symposium)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] データ駆動プラズマ科学と半導体プロセス2021

    • Author(s)
      浜口智志
    • Organizer
      (公社)日本表面真空学会SP部会 第167回定例研究報告会 (2021年6月24日(木) オンライン)
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] プラズマと表面の相互作用2021

    • Author(s)
      浜口智志
    • Organizer
      令和3年度日本表面真空学会九州支部学術講演会「新奇な薄膜・表面現象とその応用の最前線」
    • Invited
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Plasma processing challenges in the era of sub-nanometer-node semiconductor devices2021

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The International Union for Vacuum Science, Technique and Applications (IUVSTA) webinar series
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Amine formation on the surface of porous calcium-phosphate artificial bone by low-pressure pulsed plasma polymer deposition2021

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Plasma Medicine/10th International Symposium on Plasma Bioscience (August 3-6, 2021, Online Conference)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Understanding of plasma surface interaction - from the point of view of quantum chemistry and plasma physics2021

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      74th Annual Gaseous Electronics Conference (GEC) (October 4 - 8, 2021, online), Foundation Talk,
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21H04453
  • [Presentation] Challenges of Advanced Plasma Etching Technologies2020

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      3rd International Symposium of the Vacuum Society of the Philippines
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Challenges of Advanced Plasma Etching Technologies2020

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      3rd International Symposium of the Vacuum Society of the Philippines
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Computational study on the formation of nickel hexafluoro-acetylacetonate complexes Ni(hfac)2 on a rough NiO surface during plasma enhanced thermal atomic layer etching (ALE) processes2019

    • Author(s)
      Abdulrahman H. Basher, Marjan Krstic, Michiro Isobe, Tomoko Ito, Karin Fink, Masato Kiuchi, Kazuhiro Karahashi, Takae Takeuchi, Wolfgang Wenzel, and Satoshi Hamaguchi
    • Organizer
      the 72nd Annual Gaseous Electronics Conference GEC
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Molecular Dynamics Simulation of Etching, Deposition, and Surface Modification in Plasma Processing2019

    • Author(s)
      Satoshi Hamaguchi, Michiro Isobe, Tomoko Ito, Kazuhiro Karahashi
    • Organizer
      the 62nd Annual Technical Conference of Society of Vacuum Coaters
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Molecular Dynamics Simulation: Nanometer-scale Hole Etching of SiO2 with Carbon Mask2019

    • Author(s)
      Charisse Marie D. Cagomoc, Michiro Isobe, Satoshi Hamaguchi
    • Organizer
      24th International Symposium on Plasma Chemistry
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Atomic Layer Etching: its Science and Technology2019

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Mechanisms of thermal atomic layer etching (ALE) of metals by deprotonation and complex formation of hexafluoroacetylacetone (hfacH)2019

    • Author(s)
      Abdulrahman H. Basher, Ikutaro Hamada, Marjan Krstic, Michiro Isobe, Tomoko Ito, Karin Fink, Kazuhiro Karahashi, Yoshitada Morikawa, Wolfgang Wenzel, and Satoshi Hamaguchi
    • Organizer
      the AVS 66th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Analyses of Hexafluoroacetylacetone (Hfac) Adsorbed on Transition Metal Surfaces2019

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi
    • Organizer
      AVS 18th International Conference on Atomic Layer Deposition (ALD 2019) and the 5th International Atomic Layer Etching Workshop (ALE 2019)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] 原子層エッチングプロセスにおける表面反応解析2019

    • Author(s)
      伊藤智子, 唐橋一浩, 浜口智志
    • Organizer
      4th Atomic Layer Process (ALP) Workshop
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] 半導体デバイス製造用プラズマプロセスにおける表面反応機構2019

    • Author(s)
      浜口智志
    • Organizer
      日本表面真空学会学術講演会
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] 半導体デバイス製造用プラズマプロセスにおける表面反応機構2019

    • Author(s)
      浜口智志
    • Organizer
      日本表面真空学会学術講演会
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Numerical Simulation of Plasma-Liquid Interaction2019

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      9th International Symposium for Plasma Bioscience
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular dynamic simulation of F-based reactive ion etching of Si, SiO2 and Si3N4 substrates2019

    • Author(s)
      Erin Joy Capdos Tinacba, Michiro Isobe, Kazuhiro Karahashi, and Satoshi Hamaguchi
    • Organizer
      the 62nd Annual Technical Conference of Society of Vacuum Coaters
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Atomic Layer Etching: its Science and Technology2019

    • Author(s)
      Satoshi Hamaguchi, Michiro Isobe, Tomoko Ito, and Kazuhiro Karahashi
    • Organizer
      Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Prediction ability and importance of descriptors of single-element physical sputtering yields based on sparse modeling2019

    • Author(s)
      Hiori Kino, Kazumasa Ikuse, Hieu Chi Dam, and Satoshi Hamaguchi
    • Organizer
      2nd International Conference on Data Driven Plasma Science
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Sputtering Yield Prediction by Machine Learning2019

    • Author(s)
      Kazumasa Ikuse, Hiori Kino, and Satoshi Hamaguchi
    • Organizer
      2nd International Conference on Data Driven Plasma Science
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Molecular Dynamics Simulation of Etching, Deposition, and Surface Modification in Plasma Processing2019

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      62nd Annual Technical Conference of Society of Vacuum Coaters
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Surface reactions of atomic layer etching processes2019

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      22nd Symposium on Applications of Plasma Processes (SAPP XXII)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Sputtering of surfaces made of Lennard-Jones atoms: A Molecular Dynamics study2019

    • Author(s)
      Nicolas Mauchamp, Michiro Isobe, Satoshi Hamaguchi
    • Organizer
      Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Prediction of Etch Rates for New Materials by Machine Learning - Case Study for Physical Sputtering2019

    • Author(s)
      Kazumasa Ikuse, Hiori Kino, and Satoshi Hamaguchi
    • Organizer
      the AVS 66th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Numerical Simulation of Plasma Water Treatment with Chlorine2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2nd International Workshop On Plasma Agriculture (IWOPA2)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Current Status and Future Challenges in Modeling and Numerical Simulation for Plasma Medicine,2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Symposium of Plasma Biosciences (ISPB 2018)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] ヘキサフルオロアセチルアセトン吸着表面金属(Ni, Cu)におけるエッチング反応2018

    • Author(s)
      伊藤智子、唐橋一浩、浜口智志
    • Organizer
      第65回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Numerical and experimental analyses of atmospheric-pressure plasmas and plasma-liquid interaction2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2nd International Symposium of the Vacuum Society of the Philippines (ISVSP)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] アトミックレイヤーエッチング:その科学と技術2018

    • Author(s)
      浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Molecular dynamics simulation of SiO2 atomic-layer etching (ALE) by fluorocarbon and argon plasmas2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      AVS 18th International Conference on Atomic Layer Deposition (ALD 2018) and the 5th International Atomic Layer Etching Workshop (ALE 2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Numerical Simulation of Reactions and Transport of Chemical Species in Water Exposed to Atmospheric-Pressure Plasma2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      22nd International Conference on Gas Discharges and Their Applications
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Surface reactions mechanisms of atomic layer etching for SiO2, SiN, and metal films2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      RUB Japan Science Days 2018 : Society 5.0, Chance and Risks of Digital Transformation and the Responsibility of Universities
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Atomistic simulations of plasma-surface interaction for ALD and ALE processes,2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      High Performance Computing for Plasma Applications Workshop, 71st Annual Gaseous Electronics Conference (GEC)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] ナノデバイス作製のためのプラズマ制御2018

    • Author(s)
      浜口智志
    • Organizer
      日本学術振興会「先端ナノデバイス・材料テクノロジー第151委員会」平成30年度第5回研究会
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Plasma Surface Functionalization of Biocompatible Materials2018

    • Author(s)
      Tomoko Ito, Anjar Anggraini Harumningtyas, Satoshi Sugimoto, and Satoshi Hamaguchi
    • Organizer
      2nd International Workshop On Plasma Agriculture (IWOPA2)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] フルオロカーボン(Cx Fy+)イオンによるSiO2およびSiエッチング反応2018

    • Author(s)
      唐橋一浩、李虎、伊藤智子、浜口智志
    • Organizer
      第65回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Challenges for the development of plasma-based atomic layer processing - numerical and experimental analyses of plasma-exposed surface reactions at the atomic level,2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      45th Conference on Plasma Physics, European Physical Society (EPS)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular Dynamics Simulation for Physical Sputtering of Surfaces made of Lennard-Jones Atoms2018

    • Author(s)
      Nicolas Aini Mauchamp、Michiro Isobe、Satoshi Hamaguchi
    • Organizer
      第65回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Surface reactions mechanisms of atomic layer etching for SiO2, SiN, and metal films,2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      RUB Japan Science Days 2018 : Society 5.0, Chance and Risks of Digital Transformation and the Responsibility of Universities
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Surface Reaction Analysis by Molecular Dynamics (MD) Simulation for SiO2 Atomic Layer Etching (ALE)2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      AVS 65th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Atomistic simulations of plasma-surface interaction for ALD and ALE processes2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      High Performance Computing for Plasma Applications Workshop, 71st Annual Gaseous Electronics Conference
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Plasma Modeling and Simulation2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Summer School, 7th International Conference on Plasma Medicine (ICPM7)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Modeling and Numerical Simulation of Liquid Chemical Reactions, Surface Modification of Biomaterials, and Some Biological Reactions used in Plasma Medicine2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      7th International Conference on Plasma Medicine (ICPM7)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] 最先端プラズマプロセスのシミュレーション2018

    • Author(s)
      浜口智志
    • Organizer
      第29回プラズマエレクトロニクス講習会 プラズマプロセスの基礎と先端分野への応用
    • Invited
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] Challenges for the development of plasma-based atomic layer processing - numerical and experimental analyses of plasma-exposed surface reactions at the atomic level2018

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      45th Conference on Plasma Physics, European Physical Society (EPS)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18753
  • [Presentation] プラズマ医療:生体材料プロセスとプラズマ液体相互作用2017

    • Author(s)
      浜口智志
    • Organizer
      第2回「プラズマバイオサイエンス基盤研究促進」 勉強会
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Reactive Species Generated in Water Exposed to Atmospheric-pressure Plasmas or Water Discharge2017

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      10th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Evaluation of Nickel Self-Sputtering Yields by Molecular Dynamics Simulation2017

    • Author(s)
      Nicolas Aini Mauchamp、Michiro Isobe、Satoshi Hamaguchi
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Science of Plasma-Surface Interaction for Modern Semiconductor Process Technologies2017

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      AVS 64th International Symposium & Exhibition
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Etching mechanisms of ITO by low energy hydrocarbon ions2017

    • Author(s)
      Hu Li, Kazuhiro Karahashi, Masanaga Fukasawa, Akiko Hirata, Kazunori Nagahata, Tetsuya Tatsumi, Pascal Friederich, Karin Fink, Wolfgang Wenzel, and Satoshi Hamaguchi
    • Organizer
      39th International Symposium on Dry Process (DPS2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Amino Group Surface Modification of Cell Culture Polystyrene Dishes by an Inverter Plasma Process2017

    • Author(s)
      Satoshi Sugimoto, Tomoko Ito, Kai Kubota, Kazuma Nishiyama and Satoshi Hamaguchi
    • Organizer
      10th EU-Japan Joint Symposium on Plasma Processing
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Ni表面に対するヘキサフルオロアセチルアセトンによる表面反応の解明2017

    • Author(s)
      伊藤智子、唐橋一浩、浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] 大気圧プラズマによって気液界面に生成される次亜塩素酸の数値シミュレーション解析2017

    • Author(s)
      幾世和将、浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Effects of Ion induced Damages on Etching Characteristics of ITO Thin Films2017

    • Author(s)
      Hu Li, , K. Karahashi, M. Fukasawa, A. Hirata, K. Nagahata, T. Tatsumi, and S. Hamaguchi
    • Organizer
      AVS 64th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular dynamics simulations of atomic-layer etching (ALE) of SiO2,2017

    • Author(s)
      Yuki Okada, Michiro Isobe, and Satoshi Hamaguchi
    • Organizer
      82nd IUVSTA Workshop on Plasma-based Atomic Layer Processes
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Challenges of plasma etching: reactive ion etching of non-conventional materials2017

    • Author(s)
      浜口智志
    • Organizer
      The 21st Symposium on Application of Plasma Processes
    • Place of Presentation
      Strbske Pleso, Slovakia
    • Year and Date
      2017-01-13
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Surface reactions of metal surfaces with adsorbed organic compounds by Ar+ ion irradiation2017

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi and, Satoshi Hamaguchi
    • Organizer
      39th International Symposium on Dry Process (DPS2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Analyses of plasma surface interactions with atomic-level numerical simulations and ion/radical beam experiments2017

    • Author(s)
      浜口智志
    • Organizer
      SPEC Seminar
    • Place of Presentation
      Hwaseong, Gyeonggi, Korea
    • Year and Date
      2017-02-10
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Collision Cascade Dynamics for Self-Sputtering of Lennard-Jones Atoms2017

    • Author(s)
      Nicolas A. Mauchamp, Michiro Isobe, and Satoshi Hamaguchi
    • Organizer
      39th International Symposium on Dry Process (DPS2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Numerical Simulation of Plasma-induced Hypochlorous Acid Generation at the Plasma-liquid Interface2017

    • Author(s)
      Kazumasa Ikuse and Satoshi Hamaguchi
    • Organizer
      10th EU-Japan Joint Symposium on Plasma Processing
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] 金属表面におけるXeF2曝露によるフッ化物層のエッチング反応2017

    • Author(s)
      唐橋一浩、伊藤智子、浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] プラズマ医療: 医療における放電プラズマの活用2017

    • Author(s)
      浜口智志
    • Organizer
      メディカルジャパン 2017大阪 第3回日本医療総合展
    • Place of Presentation
      インテック大阪、大阪府大阪市住之江区
    • Year and Date
      2017-02-15
    • Invited
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] 気液界面プラズマにおける理論モデルおよびシミュレーション解析の現状と課題2017

    • Author(s)
      浜口智志
    • Organizer
      Plasma Conference 2017
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular dynamics simulations of high-density polyethylene etching by argon plasma2017

    • Author(s)
      Aubrey Faith Mella, Trung Phung, Magdaleno Vasquez Jr., and Satoshi Hamaguchi
    • Organizer
      10th EU-Japan Joint Symposium on Plasma Processing
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Cyclic etching of ITO using controlled modified-layer2017

    • Author(s)
      A. Hirata, M. Fukasawa, K. Nagahata, H. Li, K. Karahashi, S. Hamaguchi, and T. Tatsumi
    • Organizer
      39th International Symposium on Dry Process (DPS2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Plasma Etching of Unconventional Materials: Is There Any Systematic Approach?2017

    • Author(s)
      浜口智志
    • Organizer
      Semicon Korea
    • Place of Presentation
      COEX, Seoul, Korea
    • Year and Date
      2017-02-08
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Si, SiO2, and Si3N4 Etching Characteristics of Silicon Halide Ions (SiFx+, SiClx+, and SiBrx+)2017

    • Author(s)
      K. Karahashi, T. Ito, H. Li, Y. Muraki, M. Matsukuma, and S. Hamaguchi
    • Organizer
      AVS 64th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] XPS Analysis of Adsorbed Organic Compounds on Magnetic Materials Surfaces2017

    • Author(s)
      Tomoko Ito, Kazuhiro Karahashi and, Satoshi Hamaguchi
    • Organizer
      82nd IUVSTA Workshop on Plasma-based Atomic Layer Processes
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] SiN/SiO2積層深孔加工におけるパターン内壁の表面組成解析2017

    • Author(s)
      岩瀬拓、唐橋一浩、浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Hによる変質層を用いたITOエッチレートの高精度制御2017

    • Author(s)
      平田瑛子、深沢正永、長畑和典、李虎、伊藤智子、唐橋一浩、浜口智志、辰巳哲也
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] フルオロカーボンプラズマとアルゴンプラズマによるSiO2原子層エッチングの分子動力学シミュレーション2017

    • Author(s)
      岡田裕貴、磯部倫郎、浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] プラズマプロセスの最先端:半導体デバイスの原子層精度加工から医療応用まで2017

    • Author(s)
      浜口智志
    • Organizer
      工学研究科材料系/アトミックデザイン研究センター・産総研共同研究シンポジウム
    • Place of Presentation
      大阪府吹田市
    • Year and Date
      2017-03-03
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] 数学・情報科学的手法は未来の製造業にどう役立つか?-半導体産業の例2017

    • Author(s)
      浜口智志
    • Organizer
      大阪大学MMDSワークショップ “工学と数学の接点を求めて”
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular dynamics simulations of atomic-layer etching (ALE) of SiO22017

    • Author(s)
      Yuki Okada, Michiro Isobe, Tomoko Ito, Kazuhiro Karahashi, and Satoshi Hamaguchi
    • Organizer
      39th International Symposium on Dry Process (DPS2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] プラズマ技術が拓く新しい診断・治療・創薬の未来2017

    • Author(s)
      浜口智志
    • Organizer
      第9回プラズマ医療・健康産業シンポジウム
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular Dynamics Simulation of Ni Self-sputtering and Modeling of Interatomic Potential Functions2017

    • Author(s)
      N. Mauchamp, M. Isobe, and S. Hamaguchi
    • Organizer
      AVS 64th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] 分子動力学シミュレーションによるプラズマプロセス表面反応機構解析2017

    • Author(s)
      浜口智志
    • Organizer
      2017年度精密工学会秋季大会
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular dynamics simulation of Ni self-sputtering and modeling of interatomic potential functions2017

    • Author(s)
      Nicolas Mauchamp, Michiro Isobe and Satoshi Hamaguchi
    • Organizer
      82nd IUVSTA Workshop on Plasma-based Atomic Layer Processes
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] プラズマによって誘起された液中次亜塩素酸の反応輸送シミュレーション解析2017

    • Author(s)
      幾世和将、浜口智志
    • Organizer
      Plasma Conference 2017
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Surface reactions of nickel by carbon monoxide cluster beams2017

    • Author(s)
      Kazuhiro Karahashi, Toshio Seki, Keizo Kinoshita, Jiro Matsuo, and Satoshi Hamaguchi
    • Organizer
      82nd IUVSTA Workshop on Plasma-based Atomic Layer Processes
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Numerical Simulations of Atomic-Layer Etching (ALE) for SiO2 and SiN2017

    • Author(s)
      Y. Okada, R. Sugano, M. Isobe, T. Ito, H. Li, K. Karahashi, and S. Hamaguchi
    • Organizer
      AVS 64th International Symposium & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Customising ion flux-energy distributions in low-pressure capacitive RF discharges2017

    • Author(s)
      Z. Donko, J. Schulze, E. Schuengel, A. Derzsi, M. Vass, and S. Hamaguchi
    • Organizer
      82nd IUVSTA Workshop on Plasma-based Atomic Layer Processes
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Analyses of device manufacturing processes by molecular dynamics simulations2017

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2017 Workshop 1
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Numerical simulation for metabolic reactions of E. coli in water exposed to plasma irradiation2017

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2017 International Forum on Functional Materials (IFFM2017):7th International Symposium on Plasma Biosciences (ISPB2017-7)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] He+イオン照射により前処理されたZnOエッチング機構の解明2017

    • Author(s)
      李虎、伊藤智子、唐橋一浩、深沢正永、平田瑛子、長畑和典、辰巳哲也、浜口智志
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] プラズマプロセス制御のためのプラズマシミュレーション基礎~表面反応の理解を中心に~2017

    • Author(s)
      浜口智志
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜、神奈川県横浜市
    • Year and Date
      2017-03-14
    • Invited
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Molecular dynamics simulation of damage formation in Ni due to H+ ion bombardment2017

    • Author(s)
      Trung Phung, 礒部倫郎, 森川良忠, 稲垣耕司, 浜口智志
    • Organizer
      2017年度精密工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Aerospace & Automotive2016

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Future in Plasma Science II
    • Place of Presentation
      INP Greifswald, Germany
    • Year and Date
      2016-02-15
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Atomic-scale analyses of plasma etching for unconventional materials in microelectronics2016

    • Author(s)
      浜口智志
    • Organizer
      the AVS 63rd International Symposium & Exhibition
    • Place of Presentation
      Nashville, TN, USA
    • Year and Date
      2016-11-06
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Liquid-Phase Chemically Reactive Species generated by Water Discharges or Atmospheric-Pressure Discharges2016

    • Author(s)
      浜口智志
    • Organizer
      20th International Vacuum Congress (IVC)
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2016-08-21
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] 多能性幹細胞から分化誘導した骨芽細胞系細胞の特性2016

    • Author(s)
      宮本諭、濱本秀一、吉田清志、岡本美奈、奥崎大介、後藤直久、浜口智志、吉川秀樹、名井陽
    • Organizer
      日本再生医療学会
    • Place of Presentation
      大阪
    • Year and Date
      2016-03-17
    • Data Source
      KAKENHI-PROJECT-26293336
  • [Presentation] Analyses of surface reactions and damage formation in plasma etching processes: a study based on beam experiments and molecular dynamics simulation2016

    • Author(s)
      浜口智志
    • Organizer
      The 6th International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Dream Center, Gyeongju, Korea
    • Year and Date
      2016-09-26
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Plasma-based Functionalization of Polystyrene Surfaces of Cell Culture Plates2016

    • Author(s)
      1.Nishiyama K, Ito T, Sugimoto S, Gotoh K, Isobe M, Okamoto M, Myoui A, Yoshikawa H, and Hamaguchi S.
    • Organizer
      the AVS 63rd International Symposium & Exhibition
    • Place of Presentation
      Nashville, TN, USA
    • Year and Date
      2016-11-06
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26462263
  • [Presentation] Dynamics of reactive oxygen species generated in liquid exposed to gas discharges2016

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Conference on Electrical Discharges with Liquids (ICEDL 2016)
    • Place of Presentation
      Kocaeli University, Kocaeli,Turkey
    • Year and Date
      2016-03-13
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Plasma-based Functionalization of Polystyrene Surfaces of Cell Culture Plates2016

    • Author(s)
      浜口智志
    • Organizer
      the AVS 63rd International Symposium & Exhibition
    • Place of Presentation
      Nashville, TN, USA
    • Year and Date
      2016-11-06
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Generation and transport of liquid-phase reactive species due to plasma-liquid interaction2016

    • Author(s)
      浜口智志
    • Organizer
      43rd IEEE International Conference on Plasma Science (ICOPS2016)
    • Place of Presentation
      The Banff Center, Banff, Alberta, Canada
    • Year and Date
      2016-06-20
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Plasma-based Functionalization of Polystyrene Surfaces of Cell Culture Plates2016

    • Author(s)
      浜口智志
    • Organizer
      AVS 63rd International Symposium & Exhibition
    • Place of Presentation
      Nashville, TN, USA
    • Year and Date
      2016-11-06
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Atomic Scale Analyses of Plasma Surface Reactions using Molecular Dynamics Simulations and Ion/radical Beam Experiments2016

    • Author(s)
      浜口智志
    • Organizer
      the 2nd Pacific Rim Symposium on Surfaces, Coatings & Interfaces
    • Place of Presentation
      Kohala Coast, Hawaii,USA
    • Year and Date
      2016-12-11
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] プラズマ医療研究の現状と将来展望2016

    • Author(s)
      浜口智志
    • Organizer
      第8回プラズマ医療・健康産業シンポジウム
    • Place of Presentation
      産業技術総合研究所・臨海副都心センター 東京都江東区
    • Year and Date
      2016-12-22
    • Invited
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Numerical Simulations of Plasma-Generated Reactive Species in Water2016

    • Author(s)
      浜口智志
    • Organizer
      Gordon Research Conference (GRC) Plasma Processing Science
    • Place of Presentation
      Proctor Academy, Andover, NH, USA
    • Year and Date
      2016-07-24
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Atomic-scale Surface Reaction Mechanisms of Plasma Processing for Modern Semiconductor Devices2016

    • Author(s)
      浜口智志
    • Organizer
      International Workshop on Advanced Materials and Nanotechnology 2016
    • Place of Presentation
      Ha Noi, Vietnam
    • Year and Date
      2016-11-03
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Dynamics of reactive oxygen species generated in liquid exposed to gas discharges2016

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Conference on Electrical Discharges with Liquids (ICEDL 2016),
    • Place of Presentation
      Kocaeli (Turkey)
    • Year and Date
      2016-03-13
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Numerical simulation of the generation of reactive oxygen and nitrogen species (RONS) in water by atmospheric-pressure plasmas and their effects on Escherichia coli (E. coli)2016

    • Author(s)
      浜口智志
    • Organizer
      International Workshop on Advanced Materials and Nanotechnology 2016
    • Place of Presentation
      Ha Noi, Vietnam
    • Year and Date
      2016-11-03
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Plasma-Liquid Interaction2016

    • Author(s)
      浜口智志
    • Organizer
      43rd IEEE International Conference on Plasma Science (ICOPS2016)
    • Place of Presentation
      The Banff Center, Banff, Alberta, Canada
    • Year and Date
      2016-06-20
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Atomic-scale analyses of non-equilibrium surface chemical reactions in dry etching processes for modern semiconductor devices2016

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      1st International Symposium of the Vacuum Society of the Philippines (ISVSP2016)(
    • Place of Presentation
      Ateneo de Manila University, Quezon City, Philippines
    • Year and Date
      2016-01-14
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Analysis of Amino Group Formation on Polystyrene Surfaces by Nitrogen-Hydrogen-Based Plasma Irradiation2015

    • Author(s)
      Gotoh, K., Itsuki, D., Michiro Isobe1, Sugimoto, S., Miyamoto, S., Myoui, A., Yoshikawa, H., Hamaguchi, S.
    • Organizer
      American Vacuum Society 62nd International Syposium
    • Place of Presentation
      San Jose, U. S. A.
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26293336
  • [Presentation] Transporters of highly reactive species in water exposed to a low-temperature atmospheric pressure plasma2015

    • Author(s)
      浜口智志
    • Organizer
      5th International Symposium on Plasma Biosciences (ISPB2015-5)
    • Place of Presentation
      Jeju (Korea)
    • Year and Date
      2015-06-24
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Transport of highly reactive oxygen and nitrogen species (RONS) generated by plasma-liquid interaction in water2015

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      3rd International Symposium on New Plasma and Electrical Discharge Applications and on Dielectric Materials (ISNPEDADM)
    • Place of Presentation
      Saint Gilles Les Bains (France)
    • Year and Date
      2015-10-26
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13608
  • [Presentation] Optimization of culture conditions for directing osteogenesis differentiation of mouse induced pluripotent stem cells2015

    • Author(s)
      Miyamoto, S.,Myoui, A., Okuzaki, D., Goto, N., Hamaguchi, S., Yoshikawa, H.
    • Organizer
      International Society for Stem Cell Research 2015 Annual Meeting
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2015-06-24
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26293336
  • [Presentation] Transporters of highly reactive species in water exposed to a low-temperature atmospheric pressure plasma2015

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      5th International Symposium on Plasma Biosciences (ISPB2015-5)
    • Place of Presentation
      Ramada Plaza Jeju Hotel, Jeju, Korea
    • Year and Date
      2015-06-24
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Transport of highly reactive oxygen and nitrogen species (RONS) generated by plasma-liquid interaction in water2015

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      3rd International Symposium on New Plasma and Electrical Discharge Applications and on Dielectric Materials (ISNPEDADM)
    • Place of Presentation
      Saint Gilles Les Bains, Les Bains, Reunion Island, France
    • Year and Date
      2015-10-26
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Aerospace & Automotive2015

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Future in Plasma Science
    • Place of Presentation
      INP Greifswald, Germany
    • Year and Date
      2015-07-12
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05736
  • [Presentation] Numerical simulation of chemical reactions and diffusion of ROS/RNS in water exposed to an atmospheric-pressure plasma2014

    • Author(s)
      Kazumasa Ikuse, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of International Symposium on Non-equilibrium Plasma and Complex-System Sciences (IS-NPCS)
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] umerical simulation of dynamics of chemically reactive species in water generated by atmospheric pressure plasmas2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      COST (European Cooperation in Science and Technology) TD1208 Annual Meeting
    • Place of Presentation
      Lisbon, Portugal
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Reaction-diffusion simulation of ROS/RNS in liquid exposed to an atmospheric-pressure plasma2014

    • Author(s)
      Kazumasa Ikuse, Tatsuya Kanazawa, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of 8th International Conference on Reactive Plasmas / 31st Symposium on Plasma Processing (ICRP-8/SPP-31)
    • Place of Presentation
      Fukuoka International Congress Center, Fukuoka, Japan
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Improvement of biocompatibility of hydroxyapatite and polystyrene surface for cell culture by low-pressure plasmas2014

    • Author(s)
      Dai Itsuki, Tomoko Ito, Satoshi Sugimoto, Yu Moriguchi, Satoshi Miyamoto, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of International Symposium on Non-equilibrium Plasma and Complex-System Sciences (IS-NPCS)
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Ion and Radical Beam Studies on Plasma Etching Mechanisms2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      SEMICON Korea 2014
    • Place of Presentation
      COEX, Seoul, Korea
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] プラズマ先端材料プロセスとその医療応用2014

    • Author(s)
      浜口智志
    • Organizer
      第6回プラズマ医療・健康産業シンポジウム
    • Place of Presentation
      ( 独) 産業技術総合研究所・臨海副都心センター・東京都
    • Year and Date
      2014-12-22
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Computational and experimental atomic-scale analyses of surface damage formation in reactive ion etching (RIE) processes for Si based materials,2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Reactive Plasmas / 31st Symposium on Plasma Processing (ICRP-8/SPP-31)
    • Place of Presentation
      Fukuoka International Congress Center, Fukuoka, Japan
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Reactive species generated in water irradiated by low-temperature atmospheric-pressure plasma jets2014

    • Author(s)
      Kensaku Goto, Tomoko Ito, Kazumasa Ikuse, Dai Itsuki, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of International Symposium on Non-equilibrium Plasma and Complex-System Sciences (IS-NPCS)
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Nano-scale damage formation during plasma etching analysed by multi-beam experiments and molecular dynamics (MD) simulation,2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      he 9th EU-Japan Joint Symposium on Plasma Processing (JSPP2014)/ EU COST MP1101 Workshop on Atmospheric Plasma Processes and Sources
    • Place of Presentation
      Bohinjska Bistrica and Lake Bohinj, Slovenia
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Nano-scale damage formation during plasma etching analysed by multi-beam experiments and molecular dynamics (MD) simulation2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 9th EU-Japan Joint Symposium on Plasma Processing (JSPP2014)/ EU COST MP1101 Workshop on Atmospheric Plasma Processes and Sources
    • Place of Presentation
      Bohinjska Bistrica and Lake Bohinj, Slovenia
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Numerical simulation of dynamics of chemically reactive species in water generated by atmospheric pressure plasmas2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of COST (European Cooperation in Science and Technology) TD1208 Annual Meeting"Electrical discharges with liquids for future applications"
    • Place of Presentation
      Lisbon, Portugal
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Computational and experimental atomic-scale analyses of surface damage formation in reactive ion etching (RIE) processes for Si based materials2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Reactive Plasmas / 31st Symposium on Plasma Processing
    • Place of Presentation
      Fukuoka International Congress Center, Fukuoka, Japan
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Numerical simulation of dynamics of chemically reactive species in water generated by atmospheric pressure plasmas2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      COST (European Cooperation in Science and Technology) TD1208 Annual Meeting
    • Place of Presentation
      Lisbon, Portugal
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Ion and Radical Beam Studies on Plasma Etching Mechanisms2014

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      SEMICON Korea 2014
    • Place of Presentation
      COEX, Seoul, Korea
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Oxidation of Potassium Iodide in Aqueous Environment by Atmospheric Plasma Jets2014

    • Author(s)
      Masato Kiuchi, Kuniaki Honjo, Tomoko Ito, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of International Symposium on Non-equilibrium Plasma and Complex-System Sciences (IS-NPCS)
    • Place of Presentation
      Osaka, Japan
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Free radicals in liquid generated by atmospheric-pressure plasma application and their effects on biological systems2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      3rd International Symposium for Plasma Bioscience (ISPB2013-3),
    • Place of Presentation
      Ramada Plaza Jeju Hotel, Jeju, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Dynamical structures of reactive species distributions in plasmas and liquids for low-temperature plasma medical devices2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Proceedings of the 40th European Physical Society (EPS) Conference on Plasma Physics
    • Place of Presentation
      Espoo, Finland
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Recent progress of Molecular Dynamics (MD) simulation techniques for the analysis of plasma-surface interaction2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 8th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT 2013)
    • Place of Presentation
      National Chiao Tung University, Hsinchu, Taiwan
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Numerical simulation of ROS/RNS generation in liquid and their effects on biological systems2013

    • Author(s)
      Tatsuya Kanazawa, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of the 21st in International Symposium on Plasma Chemistry
    • Place of Presentation
      Cairns, Australia
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Needs for atomic and molecular database in modern plasma processing2013

    • Author(s)
      Satoshi Hamaguchi,
    • Organizer
      he Japan-Australia Commemorative Workshop (JAWS25)
    • Place of Presentation
      Australian National University, Canberra, Australia
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Generation of free radicals in liquid by atmospheric-pressure plasmas and its application to biology and medicine2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 12th Asia Pacific Physics Conference (APPC12) and Asia-Europe Physics Summit (ASEPS)
    • Place of Presentation
      International Conference Hall, Makuhari Messe, Chiba, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Free radicals in liquid generated by atmospheric-pressure plasma application and their effects on biological systems2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      a Book of Abstracts of 2013 International Forum on Functional Materials (IFFM2013) and 3rd International Symposium for Plasma Bioscience (ISPB2013-3), 2nd International Symposium on Chemical & Biological Detection (ISCBD-2), 2nd Internatinal Symposium on Medical Diagnosis Using Bionano Sensor
    • Place of Presentation
      Ramada Plaza Jeju Hotel, Jeju, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Effects of Reactive Species Generated by Low-Temperature Atmospheric -Pressure Plasmas on Mouse Embryonic Stem (ES) Cells2013

    • Author(s)
      Taichi Miura, Ayumi Ando, Kazumi Hirano, Chika Ogura, Tatsuya Kanazawa, Masamichi Ikeguchi, Shoko Nishihara, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of 2012 Japan Society of Applied Physics (JSAP)- Material Research Society (MRS) Joint Symposia
    • Place of Presentation
      Doshisha University Kyotanabe Campus, Kyoto
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] プラズマ科学技術の建築分野での活用2013

    • Author(s)
      浜口智志
    • Organizer
      建築研究開発コンソーシアム(CBRD) テクニカルフォーラム
    • Place of Presentation
      晴海トリトンスクエア、東京都中央区
    • Year and Date
      2013-04-19
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Plasma surface modification of porous hydroxyapatite artificial bones2013

    • Author(s)
      Yu Moriguchi, Dae-Sung Lee, Kazuto Masuda, Hideki Yoshikawa, Satoshi Hamaguchi, Myoui Akira
    • Organizer
      Book of Abstracts of Orthopaedic Research Society (ORS) 2013 Annual Meeting
    • Place of Presentation
      San Antonio, TX, USA
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Generation of ROS/RNS in liquid exposed to an atmospheric-pressure plasma2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of 2012 Japan Society of Applied Physics (JSAP)- Material Research Society (MRS) Joint Symposia
    • Place of Presentation
      Doshisha University Kyotanabe Campus, Kyoto
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] プラズマ・ラジカルの物理とその医療応用2013

    • Author(s)
      浜口智志
    • Organizer
      日本物理学会第68回年次大会
    • Place of Presentation
      広島大学東広島キャンパス 広島県東広島市
    • Year and Date
      2013-03-26
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Free radicals in liquid generated by atmospheric-pressure plasma application and their effects on biological systems,2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      3rd International Symposium for Plasma Bioscience (ISPB2013-3)
    • Place of Presentation
      Ramada Plaza Jeju Hotel, Jeju, Korea
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Generation of ROS/RNS in liquid exposed to an atmospheric-pressure plasma2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2012 Japan Society of Applied Physics (JSAP)- Material Research Society (MRS) Joint Symposia (Sept. 16-20, 2013
    • Place of Presentation
      Doshisha University Kyotanabe Campus, Kyoto
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Dynamical structures of reactive species distributions in plasmas and liquids for low-temperature plasma medical devices2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 40th European Physical Society (EPS) Conference on Plasma Physics
    • Place of Presentation
      Espoo, Finland
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] 高エネルギー水素イオン入射によるSi表面の増殖酸化2013

    • Author(s)
      浜口智志
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス、 京都府京田辺市
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] プラズマを用いた半導体および医療プロセス2013

    • Author(s)
      浜口智志
    • Organizer
      応用物理学会関西支部平成25年第一回講演会「関西のプラズマ・エレクトロニクス研究の現状と若手からの発信」
    • Place of Presentation
      、京都大学桂キャンパス ローム記念館および船井哲良記念講堂
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Needs for atomic and molecular database in modern plasma processing2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the Japan-Australia Commemorative Workshop (JAWS25)
    • Place of Presentation
      University House, Australian National University, Canberra, Australia
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Numerical simulation of ROS/RNS generation in liquid and their effects on biological systems2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 21st in International Symposium on Plasma Chemistry
    • Place of Presentation
      Cairns, Australia
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Dynamical structures of reactive species distributions in plasmas and liquids for low-temperature plasma medical devices2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 40th European Physical Society (EPS) Conference on Plasma Physics
    • Place of Presentation
      Espoo, Finland,
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Generation of free radicals in liquid by atmospheric-pressure plasmas and its application to biology and medicine2013

    • Author(s)
      Satoshi Hamaguchi,
    • Organizer
      the 12th Asia Pacific Physics Conference (APPC12) and Asia-Europe Physics Summit
    • Place of Presentation
      International Conference Hall, Makuhari Messe, Chiba, Japan,
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] 高エネルギー水素イオン入射によるSi表面の増殖酸化2013

    • Author(s)
      浜口智志
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス、 京都府京田辺市
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Generation of free radicals in liquid by atmospheric-pressure plasmas and its application to biology and medicine2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of the 12^<th> Asia Pacific Physics Conference (APPC12) and Asia-Europe Physics Summit (ASEPS)
    • Place of Presentation
      International Conference Hall, Makuhari Messe, Chiba, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Generation of ROS/RNS in liquid exposed to an atmospheric-pressure plasma2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2012 Japan Society of Applied Physics (JSAP)- Material Research Society (MRS) Joint Symposia
    • Place of Presentation
      Doshisha University Kyotanabe Campus, Kyoto
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Characterization of polymer layer formation during SiO2/SiN etching by fluoro/hydrofluorocarbon plasmas2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      35th International Symposium on Dry Process (DPP2013)
    • Place of Presentation
      Ramada Plaza Jeju Hotel, Korea
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Recent progress of Molecular Dynamics (MD) simulation techniques for the analysis of plasma-surface interaction2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT 2013)
    • Place of Presentation
      National Chiao Tung University, Hsinchu, Taiwan
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Needs for atomic and molecular database in modern plasma processing2013

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      apan-Australia Commemorative Workshop (JAWS25)
    • Place of Presentation
      Cairns, Australia
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Study on plasma-surface interaction in LIA3362012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      CNRS-LIA336 Workshop
    • Place of Presentation
      Kyushu University, Hakozaki Campus, Japan
    • Year and Date
      2012-09-21
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Ion beam studies on plasma-surface interactions SRC2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) NMS(Nanomanufacturing Sciences)Patterning Annual Review
    • Place of Presentation
      Chicago, Il, USA
    • Year and Date
      2012-09-25
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA-8)
    • Place of Presentation
      National Institute of Standards and Technology (NIST), Gaithersburg, MD,USA
    • Year and Date
      2012-09-30
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Ion beam studies on plasma-surface interactions2012

    • Author(s)
      S.Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) & Tokyo Electron (TEL) Workshop on Future Materials and Processes for Nanotechnology
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2012-02-17
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Plasma treatment of artificial bones2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2nd International Symposium for Plasma Biosciences (SPB2012)
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2012-08-12
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Applications of non-equilibrium plasmas in medicine2012

    • Author(s)
      S.Hamaguchi
    • Organizer
      International Symposium for 25th Anniversary of H-mode Bifurcation Theory
    • Place of Presentation
      Fukuoka, Japan(招待講演)
    • Year and Date
      2012-01-24
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Applications of non-equilibrium plasmas in medicine2012

    • Author(s)
      S.Hamaguchi
    • Organizer
      International Symposium for 25th Anniversary of H-mode Bifurcation Theory
    • Place of Presentation
      Fukuoka, Japan(招待講演)
    • Year and Date
      2012-01-24
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Cell proliferation enhanced by atmospheric-pressure plasma application for cells of interest in orthopedics2012

    • Author(s)
      Kazuto Masuda, Satoshi Hamaguchi, Yu Moriguchi, Tatsuya Kanazawa, Ayumi Ando, Kiyoshi Okada, Akira Myoui, Hideki Yoshikawa
    • Organizer
      Book of Abstracts of 4th International Conference on Plasma Medicine
    • Place of Presentation
      Orléans, France
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Numerical Simulation of Reactive Species in Liquids in Contact with Atmospheric Pressure Plasmas2012

    • Author(s)
      Tatsuya Kanazawa, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of 4th International Conference on Plasma Medicine
    • Place of Presentation
      Orléans, France
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Ion-bombardment-induced diffusion and drift of impurity atomsin solids2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      IUMRS (International Union of Materials Research Societies)-International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2012-09-23
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Cell proliferation enhanced by atmospheric-pressure plasma application for cells of interest in orthopedics2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicin
    • Place of Presentation
      Orleacute;ans, France
    • Year and Date
      2012-06-17
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Numerical analysis of nano-second pulsed discharge near atmospheric pressure2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Workshop “Physics of Microplasmae
    • Place of Presentation
      Bochum, Germany
    • Year and Date
      2012-05-30
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Plasma Surface Modification of Artificial Bones for Bone Regeneration2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      Orleacute;ans, France
    • Year and Date
      2012-06-17
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Numerical analysis of nano-second pulsed discharge near atmospheric pressure2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Workshop "Physics of Microplasmas"
    • Place of Presentation
      Bochum, Germany
    • Year and Date
      2012-05-30
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of The 8th International Conference on Atomic and Molecular Data and Their Applications
    • Place of Presentation
      National Institute of Standards and Technology (NIST), Gaithersburg, MD, USA
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] 大気圧放電に接する液中に生成される活性酸素・活性窒素2012

    • Author(s)
      浜口智志
    • Organizer
      2012年度原子分子データ応用フォーラムセミナー:高Zプラズマの原子過程と、酸素分子が関係する原子分子過程とその応用
    • Place of Presentation
      核融合科学研究所岐阜県土岐市
    • Year and Date
      2012-12-11
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] プラズマ医療研究の最前線2012

    • Author(s)
      浜口智志
    • Organizer
      プラズマ・核融合学会第29回年会
    • Place of Presentation
      クローバープラザ 福岡県春日市
    • Year and Date
      2012-11-17
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Plasma Biomedicine in Orthopedics2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Workshop on Plasma Biomedicine, 65th Annual Gaseous Electronics Conference
    • Place of Presentation
      Austin, TX USA
    • Year and Date
      2012-10-22
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Plasma Surface Modification of Artificial Bones for Bone Regeneration2012

    • Author(s)
      Yu Moriguchi, Dae-Sung Lee, Kazuto Masuda, Myoui Akira, Hideki Yoshikawa, Satoshi Hamaguchi
    • Organizer
      Book of Abstracts of 4th International Conference on Plasma Medicine
    • Place of Presentation
      Orléans, France
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] 大気圧・液中プラズマ照射によるバイオ・ナノプロセス2012

    • Author(s)
      浜口智志
    • Organizer
      応用物理理学会励起ナノプロセス研究会主催第8回励起ナノプロセス研究会
    • Place of Presentation
      大阪大学中之島センター大阪市北区
    • Year and Date
      2012-12-17
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Analyses of elementary ion-surface interactions for low-damage plasma etching processes2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Korean Physical Society (KPS) 2012 Spring Meeting
    • Place of Presentation
      Daejeon Convention Center, Daejeon, Korea
    • Year and Date
      2012-04-25
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Analyses of plasma-surface interactions by numerical simulations and multi-beam experiments2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Microelectronics and Plasma Technology 2012 (ICMAP2012)
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2012-07-04
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Plasma Diagnosis by Terahertz Frequency-Domain Spectroscopy2012

    • Author(s)
      Hideaki Kitahara, Masahiko Tani, Katsuhisa Kitano, Satoshi Hamaguchi, and Masanori Hangyo
    • Organizer
      The 8th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Todaiji Culture Center, Todaiji Temple, Nara
    • Data Source
      KAKENHI-PROJECT-23540573
  • [Presentation] Roles of hydrogen for hydrofluorocarbon (HFC) plasma etchingof silicon nitride (SiN)2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      American Vacuum Society (AVS) 59th International Symposium Exhibition
    • Place of Presentation
      Tampa, FL USA
    • Year and Date
      2012-10-28
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] プラズマ技術の紹介と現況2012

    • Author(s)
      浜口智志
    • Organizer
      建築研究開発コンソーシアム(CBRD) プラズマの建築利用研究会第一回研究会
    • Place of Presentation
      晴海区民館、東京都中央区
    • Year and Date
      2012-08-26
    • Data Source
      KAKENHI-PUBLICLY-24110711
  • [Presentation] Numerical analysis of nano-second pulsed discharge near atmospheric pressure2012

    • Author(s)
      Satoshi Hamaguchi , Chieh-Wen Lo
    • Organizer
      International Workshop"Physics of Microplasmas"
    • Place of Presentation
      Bochum, Germany
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Ion beam studies on plasma-surface interactions2012

    • Author(s)
      S.Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) & Tokyo Electron (TEL) Workshop on Future Materials and Processes for Nanotechnology
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2012-02-17
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma Biomedicine in Orthopedics2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Bulletin of the American Physical Society 57 (8) (2012) (Workshop on Plasma Biomedicine, 65^<th> Annual Gaseous Electronics Conference)
    • Place of Presentation
      Austin, TX
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Plasma treatment of artificial bones2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Book of Abstract of the 2nd International Symposium for Plasma Biosciences (SPB2012)
    • Place of Presentation
      Seoul, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine2012

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA-8)
    • Place of Presentation
      Gaithersburg, MD, USA
    • Year and Date
      2012-09-30
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma medicine in orthopaedics2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 1st International Symposium for Plasma Biosciences
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2011-08-14
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Ionization-front propagation in nano-second pulsed plasmas near atmospheric pressure : analyses by particle-in-cell (PIC) simulation2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 22nd International Conference on Numerical Simulation of Plasmas
    • Place of Presentation
      Long Branch, NJ.USA(招待講演)
    • Year and Date
      2011-09-07
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Plasma Surface Treatment of Artificial Bones and its Application to Regenerative Medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      8th International Conference on Flow Dynamics
    • Place of Presentation
      Sendai, Japan(招待講演)
    • Year and Date
      2011-11-09
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] 整形外科分野におけるプラズマ技術応用の可能性2011

    • Author(s)
      浜口智志
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Interactions of Low-Temperature Atmospheric-Pressure Plasmas with Cells, Tissues, and Biomaterials for Orthopaedic Applications2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 40th Winter Annual Conference of the Korean Vacuum Society
    • Place of Presentation
      Gangwon-d, Korea(invited)
    • Year and Date
      2011-02-09
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Ionization-front propagation in nano-second pulsed plasmas near atmospheric pressure: analyses by particle-in-cell (PIC) simulation2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      the 22nd International Conference on Numerical Simulation of Plasmas
    • Place of Presentation
      Long Branch, NJ. USA
    • Year and Date
      2011-09-07
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] プラズマ医療の現状と課題2011

    • Author(s)
      浜口智志
    • Organizer
      第885回Technical Seminar
    • Place of Presentation
      総評会館(東京)(招待講演)
    • Year and Date
      2011-08-31
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Ionization-front propagation in nano-second pulsed plasmas near atmospheric pressure : analyses by particle-in-cell (PIC) simulation2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 22nd International Conference on Numerical Simulation of Plasmas
    • Place of Presentation
      Long Branch, NJ.USA(招待講演)
    • Year and Date
      2011-09-07
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Discharge Formation Mechanisms of Nano-Second High-Pressure Hydrogen Discharges2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 3rd International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Dalian, China
    • Year and Date
      2011-07-04
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Recent development of plasma medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      2011 Northeastern Asian Symposium on Plasma Fusion
    • Place of Presentation
      Daejeon, Korea(招待講演)
    • Year and Date
      2011-09-25
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Effects of Low-Temperature Atmospheric-Pressure Plasmas Application on Cell Proliferation and Biomaterial Surface Modification2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2011 Japan-Taiwan Symposium on Polyscale Technologies for Biomedical Engineering and Environmental Sciences/The 5th Polyscale Technology Workshop (PT-BMES 2011/PTW-5)
    • Place of Presentation
      Noda, Chiba, Japan
    • Year and Date
      2011-03-07
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Plasma medicine in orthopaedics2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 1st International Symposium for Plasma Biosciences
    • Place of Presentation
      Seul, Korea(招待講演)
    • Year and Date
      2011-08-14
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] 磁性体およびSi系材料反応性イオンエッチングの表面反応解析2011

    • Author(s)
      浜口智志
    • Organizer
      応用物理学会シリコンテクノロジー分科会第133会研究会「最先端プラズマプロセスにおけるダメージ/バラつき/異物制御」
    • Place of Presentation
      東京大学弥生キャンパス、東京都文京区(招待講演)
    • Year and Date
      2011-02-18
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 磁性体およびSi系材料反応性イオンエッチングの表面反応解析2011

    • Author(s)
      浜口智志
    • Organizer
      応用物理学会シリコンテクノロジー分科会第133会研究会「最先端プラズマプロセスにおけるダメージ/バラつき/異物制御」
    • Place of Presentation
      東京大学弥生キャンパス、東京都文京区(招待講演)
    • Year and Date
      2011-02-18
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Plasma-Tissue Interaction-Roles of Bio-interfaces in Plasma Medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      21st Material Research Society Japan
    • Place of Presentation
      Yokohama, Japan(招待講演)
    • Year and Date
      2011-12-19
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Ion beam studies on plasma-surface interactions2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) CEMPI Back End Processes Review
    • Place of Presentation
      Denton, TX, USA
    • Year and Date
      2011-11-07
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Interactions of Low-Temperature Atmospheric-Pressure Plasmas with Cells, Tissues, and Biomaterials for Orthopaedic Applications2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 40th Winter Annual Conference of the Korean Vacuum Society
    • Place of Presentation
      Gangwon-d, Korea(invited)
    • Year and Date
      2011-02-09
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Interactions of Low-Temperature Atmospheric-Pressure Plasmas with Cells, Tissues, and Biomaterials for Orthopaedic Applications2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 40th Winter AnnualConference of the Korean Vacuum Society
    • Place of Presentation
      Gangwon-do, Korea
    • Year and Date
      2011-02-09
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 最近のプラズマ医療研究の動向2011

    • Author(s)
      浜口智志
    • Organizer
      第1回プラズマ医療・健康産業シンポジウム/第5回光・プラズマプロセスのバイオ応用ワークショップ
    • Place of Presentation
      大阪大学中之島センター、大阪市
    • Year and Date
      2011-03-22
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Recent development of plasma medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      2011 Northeastern Asian Symposium on Plasma Fusion
    • Place of Presentation
      Daejeon, Korea(招待講演)
    • Year and Date
      2011-09-25
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] 最近のプラズマ医療研究の動向2011

    • Author(s)
      浜口智志
    • Organizer
      第1回プラズマ医療・健康産業シンポジウム/第5回光・プラズマプロセスのバイオ応用ワークショップ
    • Place of Presentation
      大阪大学中之島センター、大阪市
    • Year and Date
      2011-03-22
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma-Tissue Interaction-Roles of Bio-interfaces in Plasma Medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      21st Material Research Society Japan
    • Place of Presentation
      Yokohama, Japan(招待講演)
    • Year and Date
      2011-12-19
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Discharge Formation Mechanisms of Nano-Second High-Pressure Hydrogen Discharges2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 3rd International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Dalian, China
    • Year and Date
      2011-07-04
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] 整形外科分野におけるプラズマ技術応用の可能性2011

    • Author(s)
      浜口智志
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川県厚木市
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Particle-in-cell (PIC) simulation analysis of the ionization-front propagation in the formation phase of a nano-second pulsed atmospheric-pressure hydrogen plasma2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 20th International Symposium on Plasma Chemistry
    • Place of Presentation
      Philadelphia, USA
    • Year and Date
      2011-07-24
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Ion beam studies on plasma-surface interactions2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) CEMPI Back End Processes Review
    • Place of Presentation
      Denton, TX, USA
    • Year and Date
      2011-11-07
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Molecular dynamics (MD) simulation for semiconductor nanotechnology2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      Intemational Symposium on Renewable Energy & Materials Tailoring
    • Place of Presentation
      Kyoto, Japan(招待講演)
    • Year and Date
      2011-09-18
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Plasma medicine in orthopaedics2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 1st International Symposium for Plasma Biosciences
    • Place of Presentation
      Seul, Korea(招待講演)
    • Year and Date
      2011-08-14
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 新しいプラズマ科学技術:ライフイノベーションへの挑戦:イントロダクション2011

    • Author(s)
      浜口智志
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      石川県立音楽堂(金沢市)
    • Year and Date
      2011-11-22
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] プラズマ医療の現状と課題2011

    • Author(s)
      浜口智志
    • Organizer
      第885回Technical Seminar
    • Place of Presentation
      総評会館(東京)(招待講演)
    • Year and Date
      2011-08-31
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Molecular dynamics (MD) simulation for semiconductor nanotechnology2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      International Symposium on Renewable Energy & Materials Tailoring
    • Place of Presentation
      Kyoto, Japan(招待講演)
    • Year and Date
      2011-09-18
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma Surface Treatment of Artificial Bones and its Application to Regenerative Medicine2011

    • Author(s)
      S.Hamaguchi
    • Organizer
      8th International Conference on Flow Dynamics
    • Place of Presentation
      Sendai, Japan(招待講演)
    • Year and Date
      2011-11-09
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Effects of Low-Temperature Atmospheric-Pressure Plasmas Application on Cell Proliferation and Biomaterial Surface Modification2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2011 Japan-Taiwan Symposium on Polyscale Technologies for Biomedical Engineering and Environmental Sciences/The 5th Polyscale Technology Workshop (PT-BMES 2011/PTW-5)
    • Place of Presentation
      Noda, Chiba, Japan
    • Year and Date
      2011-03-07
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 新しいプラズマ科学技術:ライフイノベーションへの挑戦:イントロダクション2011

    • Author(s)
      浜口智志
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      石川県立音楽堂(金沢市)
    • Year and Date
      2011-11-22
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Particle-in-cell (PIC) simulation analysis of the ionization-front propagation in the formation phase of a nano-second pulsed atmospheric-pressure hydrogen plasma2011

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 20th International Symposium on Plasma Chemistry
    • Place of Presentation
      Philadelphia, USA
    • Year and Date
      2011-07-24
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Molecular dynamics simulation study on sputtering of graphite or amorphous carbon by low-energy hydrogen or its isotope ion beams2010

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 37th IEEE International Conference on Plasma Science (ICOPS2010)
    • Place of Presentation
      Norfolk, Virginia, USA
    • Year and Date
      2010-06-20
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Dynamics of near-atmospheric-pressure hydrogen plasmas driven by pulsed high voltages2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 37th IEEE International Conference on Plasma Science (ICOPS2010)
    • Place of Presentation
      Norfolk, Virginia, USA
    • Year and Date
      2010-06-20
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] PLASMA SURFACE INTERACTIONS IN MATERIAL PROCESSING2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 25th Summer School and International Symposium on the Physics of Ionized Gases (SPIG2010)
    • Place of Presentation
      Donji Milanovac, Serbia(invited)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 反応性イオンによるPt, CoおよびPtCoエッチング反応2010

    • Author(s)
      唐橋一浩, 伊藤智子, 浜口智志
    • Organizer
      2010年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス、平塚
    • Year and Date
      2010-03-17
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Plasma surface interactions in material processing2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 25th Summer School and International Symposium on the Physics of Ionized Gases (SPIG 2010)
    • Place of Presentation
      Donji Milanovac, Serbia
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Molecular dynamics simulation study on sputtering of graphite or amorphous carbon by low-energy hydrogen or its isotope ion beams2010

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 37th IEEE International Conference on Plasma Science (ICOPS2010)
    • Place of Presentation
      Norfolk, Virginia, USA
    • Year and Date
      2010-06-20
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma Stimulation for Cell Proliferation and Their Possible Applications in Orthopedics2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 3rd International Conference on Plasma Medicine (ICPM-3)
    • Place of Presentation
      Greifswald, Germany
    • Year and Date
      2010-09-19
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Dynamics of near-atmospheric-pressure hydrogen plasmas driven by pulsed high voltages2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 37th IEEE International Conference on Plasma Science (ICOPS2010)
    • Place of Presentation
      Norfolk, Virginia, USA
    • Year and Date
      2010-06-20
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] PLASMA SURFACE INTERACTIONS IN MATERIAL PROCESSING2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 25th Summer School and International Symposium on the Physics of Ionized Gases (SPIG2010)
    • Place of Presentation
      Donji Milanovac, Serbia(invited)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] Plasma Stimulation for Cell Proliferation and Their Possible Applications in Orthopedics2010

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      The 3rd International Conference on Plasma Medicine (ICPM-3)
    • Place of Presentation
      Greifswald, Germany
    • Year and Date
      2010-09-19
    • Data Source
      KAKENHI-PUBLICLY-22110508
  • [Presentation] MDシミュレーションによるプラズマ対向炭素材料のエッチング特性2009

    • Author(s)
      山城昌志、浜口智志
    • Organizer
      日本大学生産工学部第42回学術講演会
    • Place of Presentation
      日本大学生産工学部津田沼キャンパス、津田沼
    • Year and Date
      2009-12-05
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Effects of Hydorgen Incorporation in the Formation of Hydrogenated Diamond-like Carbon Films,2009

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 4th International Symposium on Atomic Technology
    • Place of Presentation
      Maiko Villa, Kobe
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] New trends in modeling and simulations for plasma technologies2009

    • Author(s)
      S. Hamaguchi
    • Organizer
      Memorial Symposium for the Retirement of Professor Tachibana, "Toward the Next Generation of Plasma Science and Technology, "
    • Place of Presentation
      Kyoto University, Kyoto
    • Year and Date
      2009-05-30
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Effects of Hydrogen Incorporation in the Formation of Hydrogenated Diamond-like Carbon Films2009

    • Author(s)
      Y. Murakami, S. Hamaguchi
    • Organizer
      the 4th International Symposium on Atomic Technology
    • Place of Presentation
      Maiko Villa, Kobe
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] 低エネルギーイオンビーム照射装置を用いたシリカ基板へのインジウムおよびガリウムの注入2009

    • Author(s)
      吉村智、塚崎泰裕、木内正人、浜口智志
    • Organizer
      第50回真空に関する連合講演会
    • Place of Presentation
      学習院目白キャンパス、東京
    • Year and Date
      2009-11-04
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] EFFECTS OF ULTRAVIOLET LIGHT IRRADIATION ON REACTIVE ION ETCING OF ORGANIC POLYMERS AND SiO22009

    • Author(s)
      K. Ikuse, S. Yoshimura, K. Hine, K. Karahashi, M. Kiuchi, S. Hamaguchi
    • Organizer
      International Congress on Plasma Physics (ICPP)2008
    • Place of Presentation
      Fukuoka International Congress Center
    • Year and Date
      2009-09-08
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Molecular dynamics simulation of plasma surface interaction for low-damage processing2009

    • Author(s)
      S. Hamaguchi
    • Organizer
      the 21st International Conference on Numerical Simulation of Plasmas 2009
    • Place of Presentation
      Lisbon, Portugal
    • Year and Date
      2009-10-08
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Etching mechanisms of FeCo magnetic films by chemically reactive energetic ion injections2009

    • Author(s)
      K. Karahashi, T. Ito, Y. Matsumoto, S. Hamaguchi
    • Organizer
      American Vacuum Society (AVS) 56th International Symposium & Exhibition
    • Place of Presentation
      San Jose, CA, USA
    • Year and Date
      2009-11-10
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Thermal desorption of hydrogen from H+ irradiated Si(100) surfaces2009

    • Author(s)
      C. Thomas, K. Karahashi, S. Hamaguchi
    • Organizer
      the 4th International Symposium on Atomic Technology
    • Place of Presentation
      Maiko Villa, Kobe
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Beam study of the plasma-surface reaction in reactive ion etching2009

    • Author(s)
      Kazuhiro Karahashi, Satoshi Hamaguchi
    • Organizer
      プラズマ科学シンポジウム2009/第26回プラズマプロせシング研究会
    • Place of Presentation
      名古屋大学豊田講堂・シンポシオン
    • Year and Date
      2009-02-02
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Si etching by Br+ and HBr+ ion irradiation2009

    • Author(s)
      Tomoko Ito, K. Karahashi, S. -Y. Kang, S. Hamaguchi
    • Organizer
      the 4th International Symposium on Atomic Technology
    • Place of Presentation
      Maiko Villa, Kobe
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Cl+, Br+イオン照射によるSiエッチング反応における水素の影響2009

    • Author(s)
      伊藤智子, 唐橋一浩, 康松潤, 浜口智志
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学、富山
    • Year and Date
      2009-09-08
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] 反応性イオンによるFe-Co合金エッチング反応2009

    • Author(s)
      唐橋一浩, 松本祥志, 高須庸一, 犬飼和明, 上原裕二, 浜口智志
    • Organizer
      第32回日本磁気学会学術講演会
    • Place of Presentation
      東北学院大学多賀城キャンパス
    • Year and Date
      2009-09-12
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Molecular dynamics simulation of plasma surface interaction for low-damage processing,"2009

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 21st International Conference on Numerical Simulati on of Plasmas 2009
    • Place of Presentation
      Lisbon, Portugal
    • Year and Date
      2009-10-08
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Molecular Dynamics Simulation on Plasma Surface Interaction-from Industrial Plasma Processing to Fusion Applications2009

    • Author(s)
      M. Yamashiro, A. Suzuki, M. Isobe, S. Hamaguchi
    • Organizer
      17th Symposium on Application of Plasma Processes
    • Place of Presentation
      Liptovsky Jan, Slovakia
    • Year and Date
      2009-01-19
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] New trends in modeling and simulations for plasma technologies,2009

    • Author(s)
      S.Hamaguchi
    • Organizer
      Memorial Symposium for the Retirement of Professor Tachibana, "Toward the Next Generation of Plasma Science and Technology,"
    • Place of Presentation
      Kyoto University, Kyoto
    • Year and Date
      2009-05-30
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Effects of hydrogen bombardment during polysilicon gate etching by HBr/O2 plasmas2009

    • Author(s)
      T. Ito, K. Karahashi, M. Fukasawa, S. Kobayashi, N. Kuboi, T. Tatsumi, S. Hamaguchi
    • Organizer
      American Vacuum Society (AVS) 56th International Symposium & Exhibition
    • Place of Presentation
      San Jose, CA, USA
    • Year and Date
      2009-11-10
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Atmospheric Pressure Plasmas and Their Biological Applications2009

    • Author(s)
      S. Hamaguchi, S. Ikawa, T. Ito, K. Kitano, A. Tani
    • Organizer
      the 7th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Chateau Liblice, Liblice, Czech Republic
    • Year and Date
      2009-04-24
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Atmospheric Pressure Plasmas and Their Biological Applications,2009

    • Author(s)
      S.Hamaguchi
    • Organizer
      the 7th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Chateau Liblice, Liblice, Czech Republic
    • Year and Date
      2009-04-24
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] 大気圧・高気圧プラズマ研究の新しい展開2009

    • Author(s)
      浜口 智志
    • Organizer
      日本物理学会
    • Place of Presentation
      岩手大学
    • Year and Date
      2009-09-21
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] 分子動力学シミュレーションを用いた低誘電率SiOCHエッチング特性の解明2009

    • Author(s)
      鈴木歩太、礒部倫朗、浜口智志
    • Organizer
      第9回関西コロキアム電子デバイスワークショップ
    • Place of Presentation
      関西大学、大阪
    • Year and Date
      2009-10-22
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Atomic-Scale Numerical Simulations of Structural Properties in Carbon-Based Thin Film Deposition Processes2009

    • Author(s)
      Y. Murakami, O. Watabe, S. Horiguchi, S. Hamaguchi
    • Organizer
      the 19th International Symposium on Plasma Chemistry
    • Place of Presentation
      Ruhr University Bochum
    • Year and Date
      2009-07-30
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Measurement of sputtering/etching yields by CF3 ion beam injection with UV light irradiation2009

    • Author(s)
      Y. Tsukazaki, K. Ikuse, S. Yoshimura, M. Kiuchi, S. Hamaguchi
    • Organizer
      the 4th International Symposium on Atomic Technology
    • Place of Presentation
      Maiko Villa, Kobe
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] C1^+, Br^+イオン照射によるSiエッチング反応の評価2009

    • Author(s)
      伊藤 智子, 松本 祥志, 唐橋 一浩, 康 松潤, 浜口 智志
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] NeおよびXeイオンの照射によるMgO, CaO, SrO, BaOのスパッタ率測定2009

    • Author(s)
      吉村 智, 日根清裕, 木内正人, 橋本 潤, 寺内正治, 本多洋介, 坂井全弘, 西谷幹彦, 浜口智志
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Generation of Dust Seeds by Sputtering of Carbon-based Plasma Facing Materials under Low-energy H/D/T Ion Bombardment2008

    • Author(s)
      Masashi Yamashiro, Satoshi Hamaguchi
    • Organizer
      22nd IAEA Fusion Energy Conference
    • Place of Presentation
      Geneva, Switzerland
    • Year and Date
      2008-10-13
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Molecular dynamics simulation of carbon thin film deposition processes2008

    • Author(s)
      Y. Murakami, S. Horiguchi, S. Hamaguchi
    • Organizer
      The 6th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Okinawa
    • Year and Date
      2008-04-21
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] イオン・分子ビーム装置を用いたプラズマ表面相互作用の研究2008

    • Author(s)
      伊藤智子, 松本祥志, 唐橋一浩, 浜口智志
    • Organizer
      第2回三大学(東京理科大学・筑波大学・大阪大学)連携学生研究会「アトミック/ポリスケールテクノロジー連携研究会」
    • Place of Presentation
      東京理科大学長万部キャンパス
    • Year and Date
      2008-08-22
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] テラヘルツ時間領域分光法によるCH4/Arプラズマの電子密度計測2008

    • Author(s)
      安藤あゆみ, 黒瀬智子, 北野 勝久北原 英明, 高野恵介, 谷正彦, 萩行正憲, 浜口智志
    • Organizer
      第2回三大学(東京理科大学・筑波大学・大阪大学)連携学生研究会「アトミック/ポリスケールテクノロジー連携研究会」
    • Place of Presentation
      東京理科大学長万部キャンパス
    • Year and Date
      2008-08-22
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Molecular dynamics simulation of carbon thin film deposition processes2008

    • Author(s)
      Yasuo Murakami, Seishi Horiguchi, Satoshi Hamaguchi
    • Organizer
      The 6th EU-Japan Joint Symposium on Plasma Processing (JSPP2008)
    • Place of Presentation
      Okinawa
    • Year and Date
      2008-04-21
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Atomic-scale numerical simulations of SiOCH film etching processes by energetic CF3 beams2008

    • Author(s)
      A. Suzuki, T. Takizawa, M. Isobe, S. Hamaguchi
    • Organizer
      The 6th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      Okinawa
    • Year and Date
      2008-04-21
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Etching characteristics of Low-k SiOCH films by fluorocarbon beams : molecular dynamics study2008

    • Author(s)
      Ayuta Suzuki, Michiro Isobe, Shoji Kobayashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Organizer
      AVS 55th International Symposium and Exhibition
    • Place of Presentation
      Hynes Convention Center, Boston
    • Year and Date
      2008-10-20
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] プラズマ表面相互作用研究の最近の動向 : プロセスから核融合まで2008

    • Author(s)
      浜口智志,山城昌志,鈴木歩太,礒部倫郎,唐橋一浩
    • Organizer
      プラズマ・核融合学会 九州・沖縄・山口支部第12回 支部大会
    • Place of Presentation
      九州大学筑紫地区総合研究棟筑紫ホール
    • Year and Date
      2008-12-22
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Atomic-scale numerical simulations of SiOCH film etching processes by energetic CF_3 beams2008

    • Author(s)
      Ayuta Suzuki, Toshifumi Takizawa, Michiro Isobe, Satoshi Hamaguchi
    • Organizer
      The 6th EU-Japan Joint Symposium on Plasma Processing (JSPP2008)
    • Place of Presentation
      Okinawa
    • Year and Date
      2008-04-21
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] MgO sputtering yields by noble gas ions at relatively low injection energies2008

    • Author(s)
      S. Yoshimura, K. Hine, M. Matsukuma, K. Ikuse, M. Kiuchi, T. Nakao, J. Hashimoto, M. Terauchi, M. Nishitani, S. Hamaguchi
    • Organizer
      15^<th> International Display Workshops
    • Place of Presentation
      Toki Messe Niigata Convention Center, Niigata, Japan
    • Year and Date
      2008-12-03
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Molecular Dynamics Simulations of Low-k SiOCH film etching by fluorocarbon plasmas2008

    • Author(s)
      Ayuta Suzuki, Michiro Isobe, Shoji Kobayashi, Masanaga Fukasawa, Tetsuya Tatsumi, Satoshi Hamaguchi
    • Organizer
      2008 International Conference on Solid State Devices and Materials (SSDM)
    • Place of Presentation
      Tsukuba, EPOCAL
    • Year and Date
      2008-09-25
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] CF_3^+ ion induced etching reactions of SiO_2 and Si2008

    • Author(s)
      Kazuhiro Karahashi Satoshi Hamaguchi
    • Organizer
      AVS 55th International Symposium and Exhibition
    • Place of Presentation
      Hynes Convention Center, Boston
    • Year and Date
      2008-10-22
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] CF3イオンビームを用いたPMMAエッチングにおける光照射重畳効果2008

    • Author(s)
      幾世和将, 吉村智, 木内正人, 浜口智志
    • Organizer
      第49回真空に関する連合講演会
    • Place of Presentation
      松江市くにびきメッセ
    • Year and Date
      2008-10-28
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Sputtering characteristics of carbon-based materials exposed to H/D/T plasmas …molecular dynamics simulation study2008

    • Author(s)
      Masashi Yamashiro, Satoshi Hamaguchi
    • Organizer
      50th Annual Meeting of the Division of Plasma Physics
    • Place of Presentation
      Hyatt Regency Hotel Dallas, Texas
    • Year and Date
      2008-11-19
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Atomic-scale numerical simulations of surface reactions in carbon-based thin film deposition processes2008

    • Author(s)
      Yasuo Murakami, Seishi Horiguchi, Satoshi Hamaguchi
    • Organizer
      AVS 55th International Symposium and Exhibition
    • Place of Presentation
      Hynes Convention Center, Boston
    • Year and Date
      2008-10-23
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Estimation of electron densities of plasmas by terahertz time-domain spectroscopy2008

    • Author(s)
      K., Kitano・T., Kurose・A., Ando・H., Kitahara・K., Takano・M., Tani・M., Hangyo・S., Hamaguchi
    • Organizer
      2nd International Symposium of Atomic Technologies
    • Place of Presentation
      兵庫県淡路夢舞台
    • Year and Date
      2008-10-01
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Presentation] Chemical reaction induced by glow plasmas inside bubbles in water2007

    • Author(s)
      H. Aoki, K. Kitano, and S. Hamaguchi
    • Organizer
      第2回アトミック/ポリスケールテクノロジー連携研究会
    • Place of Presentation
      東京理科大学長万部キャンパス
    • Year and Date
      2007-08-24
    • Data Source
      KAKENHI-PROJECT-18654101
  • [Presentation] テラヘルッ時間領域分光法を用いたArプラズマの電子密度測定2007

    • Author(s)
      黒瀬智子, 北野勝久, 安藤あゆみ, 北原英明, 谷正彦, 萩行正憲, 浜口智志
    • Organizer
      第2回アトミック/ポリスケールテクノロジー連携研究会
    • Place of Presentation
      東京理科大学長万部キャンパス
    • Year and Date
      2007-08-24
    • Data Source
      KAKENHI-PROJECT-18030009
  • [Presentation] 低エネルギー領域における酸化マグネシウム薄膜のスパッタ率測定2007

    • Author(s)
      日根清裕, 吉村智, 幾世和将, 木内正人, 橋本潤, 寺内正治, 西谷幹彦, 浜口智志
    • Organizer
      第2回アトミック/ポリスケールテクノロジー連携研究会
    • Place of Presentation
      東京理科大学長万部キャンパス
    • Year and Date
      2007-08-24
    • Data Source
      KAKENHI-PROJECT-19204056
  • [Presentation] Chemical reactions induced by glow plasmas generated in bubbles in water2007

    • Author(s)
      H. Aoki, K. Kitano, and S. Hamaguchi
    • Organizer
      The 18th International Symposium on Plasma Chemistry
    • Place of Presentation
      京都大学吉田キャンパス
    • Year and Date
      2007-08-28
    • Data Source
      KAKENHI-PROJECT-18654101
  • [Presentation] 大気圧・液中プラズマ照射によるバイオ・ナノプロセス

    • Author(s)
      浜口智志
    • Organizer
      応用物理理学会励起ナノプロセス研究会主催第8回励起ナノプロセス研究会
    • Place of Presentation
      大阪大学中之島センター 大阪市北区
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Study on plasma-surface interaction in LIA336

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      CNRS-LIA336 Workshop
    • Place of Presentation
      Kyushu University, Hakozaki Campus, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Analyses of elementary ion-surface interactions for low-damage plasma etching processes

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Korean Physical Society (KPS) 2012 Spring Meeting
    • Place of Presentation
      Daejeon Convention Center, Daejeon, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] プラズマの医療応用研究最先端

    • Author(s)
      浜口智志
    • Organizer
      Plasma 2014
    • Place of Presentation
      朱鷺メッセ 新潟コンベンションセンター、新潟市
    • Year and Date
      2014-11-18 – 2014-11-21
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Plasma Biomedicine in Orthopedics

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Workshop on Plasma Biomedicine, 65th Annual Gaseous Electronics Conference
    • Place of Presentation
      Austin, TX, USA
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] One dimensional reaction diffusion simulation of ROS/RNS in liquid generated by plasma irradiation

    • Author(s)
      浜口智志
    • Organizer
      The 4th International Symposium for Plasma Biosciences (SPB2014) and The 3rd International Symposium on Chemical & Biological Detection (ISCBD-3)
    • Place of Presentation
      Delpino Resort, Sokcho, Gangwon-do, Korea
    • Year and Date
      2014-08-17 – 2014-08-20
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Formation of a reaction boundary layer in liquid exposed to low-temperature atmospheric-pressure plasma in ambient air

    • Author(s)
      浜口智志
    • Organizer
      the 48th Annual Conference of the Korean Vacuum Society
    • Place of Presentation
      Welli Hilli Park, Gangwon-do, Korea
    • Year and Date
      2015-01-09 – 2015-01-11
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] Numerical analysis of nano-second pulsed discharge near atmospheric pressure

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      International Workshop “Physics of Microplasmas”
    • Place of Presentation
      Bochum, Germany
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA-8)
    • Place of Presentation
      National Institute of Standards and Technology (NIST), Gaithersburg, MD, USA
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Roles of hydrogen for hydrofluorocarbon (HFC) plasma etching of silicon nitride (SiN)

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      American Vacuum Society (AVS) 59th International Symposium & Exhibition
    • Place of Presentation
      Tampa, Fl, USA
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Analyses of plasma-surface interactions by numerical simulations and multi-beam experiments

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Microelectronics and Plasma Technology 2012 (ICMAP2012)
    • Place of Presentation
      Jeju, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma induced liquid chemistry: modelling

    • Author(s)
      浜口智志
    • Organizer
      Lorenz Center Workshop: Gas/Plasma-Liquid Interface: Transport, Chemistry and Fundamental Data
    • Place of Presentation
      Lorentz Center, Leiden, Netherlands
    • Year and Date
      2014-08-04 – 2014-08-08
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] プラズマ技術の紹介と現況

    • Author(s)
      浜口智志
    • Organizer
      建築研究開発コンソーシアム(CBRD) プラズマの建築利用研究会第一回研究会
    • Place of Presentation
      晴海区民館、東京都中央区
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 大気圧放電に接する液中に生成される活性酸素・活性窒素

    • Author(s)
      浜口智志
    • Organizer
      2012年度原子分子データ応用フォーラムセミナー:高Zプラズマの原子過程と、酸素分子が関係する原子分子過程とその応用
    • Place of Presentation
      核融合科学研究所 岐阜県土岐市
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 細胞培養プレートのプラズマ表面処理

    • Author(s)
      斉宮大,杉本敏司,宮本諭, 名井陽, 吉川秀樹, 浜口 智志
    • Organizer
      応用物理学会秋季学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2014-09-17 – 2014-09-20
    • Data Source
      KAKENHI-PROJECT-26293336
  • [Presentation] Modification of hydroxyapatite and polystyrene surface for cell culture by low-pressure plasmas

    • Author(s)
      Dai Itsuki, Tomoko Ito, Satoshi Sugimoto, Yu Moriguchi, Satoshi Miyamoto, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi
    • Organizer
      International Conference on Plasma Medicine
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2014-05-18 – 2014-05-23
    • Data Source
      KAKENHI-PROJECT-26293336
  • [Presentation] Cell proliferation enhanced by atmospheric-pressure plasma application for cells of interest in orthopedics

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      Orlean, France
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Cell proliferation enhanced by atmospheric-pressure plasma application for cells of interest in orthopedics

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      Oreleans, France
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma Surface Modification of Artificial Bones for Bone Regeneration

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      Orlean, France
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Optimization of culture conditions for directing osteogenesis differentiation of mouse induced pluripotent stem cells

    • Author(s)
      Satoshi Miyamoto, Akira Myoui, Daisuke Okuzaki, Naohisa Goto, Satoshi Hamaguchi, Hideki Yoshikawa
    • Organizer
      International Society for Stem Cell Research, 2015 Annual Meeting
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2015-06-24 – 2015-06-26
    • Data Source
      KAKENHI-PROJECT-26293336
  • [Presentation] GENERATION AND TRANSPORT OF REACTIVE OXYGEN SPECIES IN PLASMA IRRADIATED LIQUID

    • Author(s)
      浜口智志
    • Organizer
      Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014)
    • Place of Presentation
      Hapuna Beach Prince Hotel, Kohala Coast, Hawaii, USA
    • Year and Date
      2014-12-07 – 2014-12-11
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] 大気圧・液中プラズマ照射によるバイオ・ナノプロセス

    • Author(s)
      浜口智志
    • Organizer
      応用物理理学会励起ナノプロセス研究会主催第8回励起ナノプロセス研究会
    • Place of Presentation
      大阪大学中之島センター 大阪市北区
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Plasma Surface Modification of Artificial Bones for Bone Regeneration

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      4th International Conference on Plasma Medicine
    • Place of Presentation
      Oreleans, France
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma treatment of artificial bones

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2nd International Symposium for Plasma Biosciences (SPB2012)
    • Place of Presentation
      Seoul, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] 浜口智志 プラズマ・ラジカルの物理とその医療応用

    • Author(s)
      浜口智志
    • Organizer
      日本物理学会第68回年次大会
    • Place of Presentation
      広島大学東広島キャンパス 広島県東広島市
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] プラズマ医療研究の最前線」

    • Author(s)
      浜口智志
    • Organizer
      プラズマ・核融合学会第29回年会
    • Place of Presentation
      クローバープラザ 福岡県春日市
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      8th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA-8)
    • Place of Presentation
      National Institute of Standards and Technology (NIST), Gaithersburg, MD, USA
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] New Challenges for Plasma Processing

    • Author(s)
      浜口智志
    • Organizer
      2nd International Symposium on Non-equilibrium Plasma and Complex-System Sciences (2nd IS-NPCS)
    • Place of Presentation
      Ruhr University, Bochum (RUB), Bochum, Germany
    • Year and Date
      2014-09-30 – 2014-10-02
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] 「はじめに」「まとめ」シンポジウムXIII. プラズマ医療:その素過程の物理・化学

    • Author(s)
      浜口智志
    • Organizer
      Plasma 2014
    • Place of Presentation
      朱鷺メッセ 新潟コンベンションセンター、新潟市
    • Year and Date
      2014-11-18 – 2014-11-21
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] REACTION AND TRANSPORT OF PLASMA-GENERATED REACTIVE SPECIES IN LIQUID

    • Author(s)
      浜口智志
    • Organizer
      The 20th Symposium on Application of Plasma Processes (SAPP2014)
    • Place of Presentation
      Tatranska; Lomnica, Slovakia
    • Year and Date
      2015-01-17 – 2015-01-22
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] プラズマ科学技術の建築分野での活用

    • Author(s)
      浜口智志
    • Organizer
      建築研究開発コンソーシアム(CBRD) テクニカルフォーラム
    • Place of Presentation
      晴海トリトンスクエア、東京都中央区
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Ion-bombardment-induced diffusion and drift of impurity atoms in solids

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      IUMRS (International Union of Materials Research Societies)-International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      Yokohama, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Plasma Surface Modification of Cell Culture Plates

    • Author(s)
      Dai Itsuki, Satoshi Sugimoto, Satoshi Miyamoto, Akira Myoui, Hideki Yoshikawa, Satoshi Hamaguchi
    • Organizer
      International symposium on non-equilibrium plasma and complex-system sciences
    • Place of Presentation
      Bochum, Germany
    • Year and Date
      2014-09-30 – 2014-10-02
    • Data Source
      KAKENHI-PROJECT-26293336
  • [Presentation] Plasma Biomedicine in Orthopedics

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Workshop on Plasma Biomedicine, 65th Annual Gaseous Electronics Conference
    • Place of Presentation
      Austin, TX, USA
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Liquid-phase chemical reactions induced by low-temperature atmospheric-pressure plasmas relevant to plasma medicine

    • Author(s)
      浜口智志
    • Organizer
      the 17th International Congress on Plasma Physics (ICPP2014)
    • Place of Presentation
      Instituto Superior Technico, Lisbon
    • Year and Date
      2014-09-15 – 2014-09-19
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • [Presentation] 大気圧放電に接する液中に生成される活性酸素・活性窒素

    • Author(s)
      浜口智志
    • Organizer
      2012年度原子分子データ応用フォーラムセミナー:高Zプラズマの原子過程と、酸素分子が関係する原子分子過程とその応用
    • Place of Presentation
      核融合科学研究所 岐阜県土岐市
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] Plasma treatment of artificial bones

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      2nd International Symposium for Plasma Biosciences (SPB2012)
    • Place of Presentation
      Seoul, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] プラズマ医療研究の最前線」

    • Author(s)
      浜口智志
    • Organizer
      プラズマ・核融合学会第29回年会
    • Place of Presentation
      クローバープラザ 福岡県春日市
    • Invited
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] Ion beam studies on plasma-surface interactions SRC

    • Author(s)
      Satoshi Hamaguchi
    • Organizer
      Semiconductor Research Corporation (SRC) NMS (Nanomanufacturing Sciences) Patterning Annual Review
    • Place of Presentation
      Chicago, Il, USA
    • Data Source
      KAKENHI-PROJECT-22244075
  • [Presentation] プラズマ・ラジカルの物理とその医療応用」

    • Author(s)
      浜口智志
    • Organizer
      日本物理学会第68回年次大会
    • Place of Presentation
      広島大学東広島キャンパス 広島県東広島市
    • Invited
    • Data Source
      KAKENHI-PROJECT-24654195
  • [Presentation] 「まとめ」シンポジウムV. 非平衡極限プラズマ研究の展開と普遍性

    • Author(s)
      浜口智志
    • Organizer
      Plasma 2014
    • Place of Presentation
      朱鷺メッセ 新潟コンベンションセンター、新潟市
    • Year and Date
      2014-11-18 – 2014-11-21
    • Invited
    • Data Source
      KAKENHI-PUBLICLY-25108506
  • 1.  WAKATANI Masahiro (00109357)
    # of Collaborated Projects: 4 results
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  • 2.  KITANO Katsuhisa (20379118)
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    # of Collaborated Projects: 3 results
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  • 4.  SHIKATA Shinichi (00415689)
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  • 5.  YAMADA Hideaki (90443233)
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  • 6.  Yoshikawa Hideki (60191558)
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  • 7.  Myoui Akira (10263261)
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  • 8.  KITAHARA Hideaki (20397649)
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  • 11.  KIUCHI Masato (50356862)
    # of Collaborated Projects: 1 results
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  • 12.  SAMUKAWA Seiji (30323108)
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  • 13.  IKUSE Kazumasa (20795778)
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  • 14.  Goto Naohisa (60448157)
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  • 15.  笠井 秀明 (00177354)
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  • 17.  中田 研 (00283747)
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  • 19.  梅澤 明弘 (70213486)
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  • 20.  福田 寛二 (50201744)
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  • 23.  ISHIKAWA Kenji
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  • 24.  堀 勝
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  • 25.  山田 弘司
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