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SAKATA Isao  坂田 功

ORCIDConnect your ORCID iD *help
Researcher Number 60357100
Affiliation (based on the past Project Information) *help 2014: 産業技術総合研究所, 太陽光発電工学研究センター
Review Section/Research Field
Except Principal Investigator
Plasma science
Keywords
Except Principal Investigator
トラップキャリア / プラズマプロセス / 実時間観測 / その場測定 / 半導体薄膜 / PECVD / トラップ / キャリア輸送 / 光電流 / アモルファスシリコン … More / プラズマCVD / 欠陥 / 太陽電池 / 半導体 / プラズマ Less
  • Research Projects

    (1 results)
  • Research Products

    (10 results)
  • Co-Researchers

    (1 People)
  •  Transport properties and defect kinetics during silicon thin film growth

    • Principal Investigator
      NUNOMURA Shota
    • Project Period (FY)
      2012 – 2014
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      National Institute of Advanced Industrial Science and Technology

All 2014 2013 2012 Other

All Journal Article Presentation Patent

  • [Journal Article] In-situ characterization of trapped charges in amorphous semiconductor films during plasma-enhanced chemical vapor deposition2014

    • Author(s)
      S Nunomura, I Sakata
    • Journal Title

      AIP Advances

      Volume: 4 Issue: 9

    • DOI

      10.1063/1.4895345

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Journal Article] In situ Photocurrent Measurements of Thin-Film Semiconductors during Plasma-Enhanced Chemical Vapor Deposition2013

    • Author(s)
      Shota Nunomura, Isao Sakata, and Michio Kondo
    • Journal Title

      Appl. Phys. Express

      Volume: 6 Issue: 12 Pages: 126201-126201

    • DOI

      10.7567/apex.6.126201

    • NAID

      40019923411

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Patent] 太陽電池の製造工程における発電性能の予測方法、並びにそれを用いた製造工程における最適化方法及び異常検知方法2012

    • Inventor(s)
      布村 正太、坂田 功、吉田 郵司、近藤 道雄
    • Industrial Property Rights Holder
      布村 正太、坂田 功、吉田 郵司、近藤 道雄
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-141225
    • Filing Date
      2012-06-22
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Presentation] プラズマプロセス下の半導体薄膜の欠陥発生と修復の実時間モニタリング2014

    • Author(s)
      布村正太、坂田功
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-19
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Presentation] In-situ monitoring of carrier transport in semiconductor active layer under plasma processing2014

    • Author(s)
      S. Nunomura, I. Sakata, and M. Kondo
    • Organizer
      The 36th International Symposium on Dry Process
    • Place of Presentation
      パシフィコ横浜(神奈川県)
    • Year and Date
      2014-11-28
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Presentation] In-situ characterization of photoexcited carrier transport during a-Si:H film growth2014

    • Author(s)
      S. Nunomura, I. Sakata, M. Kondo
    • Organizer
      2014 MRS Spring Meeting & Exhibit
    • Place of Presentation
      Moscone West Convention Center, San Francisco, USA
    • Year and Date
      2014-04-22
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Presentation] 薄膜シリコン成長時のトラップ電荷とキャリア輸送のその場評価2014

    • Author(s)
      布村正太、坂田功
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-17
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Presentation] プラズマプロセス下における薄膜半導体材料のダメージとアニーリング

    • Author(s)
      布村 正太、坂田 功、吉田 郵司、近藤 道雄
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Presentation] In-situ characterization of photoexcited carrier transport during a-Si:H film growth

    • Author(s)
      Shota Nunomura, Isao Sakata, and Michio Kondoa,
    • Organizer
      2014 MRS Spring Meeting & Exhibit
    • Place of Presentation
      San Francisco
    • Data Source
      KAKENHI-PROJECT-24540546
  • [Presentation] 薄膜シリコン成長時におけるキャリア輸送特性の実時間観測

    • Author(s)
      布村 正太、坂田 功、吉田 郵司、近藤 道雄
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Data Source
      KAKENHI-PROJECT-24540546
  • 1.  NUNOMURA Shota (50415725)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 9 results

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