Nakao Setsuo 中尾節男

… Alternative Names

中尾節男ナカオセツオ

NAKAO Setsuo 中尾節男

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Researcher Number	60357605
Affiliation (Current)	2025: 国立研究開発法人産業技術総合研究所, 材料・化学領域, 主任研究員
Affiliation (based on the past Project Information) *help	2018 – 2020: 国立研究開発法人産業技術総合研究所, 材料・化学領域, 主任研究員 2016: 産業技術総合研究所, サステナブルマテリアル研究部門, 主任研究員 2013: 産業技術総合研究所, サステナブルマテリアル研究部門, 主任研究員 2010: 独立行政法人産業技術総合研究所, サステナブルマテリアル研究部門, 主任研究員
Review Section/Research Field	Except Principal Investigator Design engineering/Machine functional elements/Tribology / Basic Section 18040:Machine elements and tribology-related
Keywords	Except Principal Investigator PBII / DLC膜 / 摩擦 / 非晶質炭素膜 / 高耐久性 / 高効率 / 発電効率 / 耐久性 / 摩擦発電 / 熱ＣＶＤ法 … More / イオン注入法 / 超潤滑 / 湿度 / バイポーライオン注入法 / 三次元イオン注入 / プラズマ利用イオン注入法 / グラフェン / friction / graphene / ナノインプリント / プラズマ / ナノコーティング / プラズマイオン注入法 / トレンチパターン / PIC-MCCM / 3次元成膜 / マイクロトレンチ / PIC-MCC / バイポーラPBII / ラマン分光分析 / プラズマシミュレーション / 3次元コーティング / バイポーラＰＢＩＩ / 移着層 / 酸素プラズマ / Si-DLC / 表面・界面物性 / 潤滑 / 固体薄膜 / トライボロジー Less

Development of highly durable and high efficient DLC-based triboelectric nanogenerators
- Principal Investigator
  
  Choi Junho
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18040:Machine elements and tribology-related
- Research Institution
  The University of Tokyo
Low friction properties of graphene films
- Principal Investigator
  
  Choi Junho
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  The University of Tokyo
DLC Coating on a Micro/Nano-Trench by Bipolar PBII&D and Analysis of Plasma Behavior
- Principal Investigator
  
  CHOI Junho
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  The University of Tokyo
Low Friction Properties of Si-Incorporated DLC Coatings Treated with Oxygen Plasma
- Principal Investigator
  
  CHOI Junho
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  The University of Tokyo

All 2015 2013 2012 2011 2010 2009 2008

All Journal Article Presentation

[Journal Article] Effects of Nitrogen Gas Ratio on Composition and Microstructure of BCN Films Prepared by RF Magnetron Sputtering2010
- Author(s)
  S Nakao, T Sonoda, K Tsugawa, J Choi, T Kato
- Journal Title
  
  Vacuum 84
  
  Pages: 642-647
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Effects of nitrogen gas ratio on composition and microstructure of BCN films prepared by RF magnetron sputtering2010
- Author(s)
  S Nakao, T Soonawa, K Tsugawa, J Choi, T Kato
- Journal Title
  
  Vacuum Vol.84
  
  Pages: 642-647
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Improvement of corrosion protection property of Mg-alloy by DLC and Si-DLC coatings with PBII technique and multi-target DC-RF magnetron sputtering2009
- Author(s)
  M Ikeyama, S Nakao, S Tsutomu, J Choi
- Journal Title
  
  Nuclear Instruments & Methods in Physics Research B Vol.267
  
  Pages: 1675-1679
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Effect of Deposition Pressure on theProperties of DLC Coatings Deposited byBipolar-Type PBII&D Surface and Interface2008
- Author(s)
  J Choi, S Nakao, M Ikeyama, T Kato
- Journal Title
  
  Analysis Vol.40
  
  Pages: 806-809
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Effect of Substrate Bias Voltages on Hardness of BCN Films Prepared by RF Magnetron Sputtering2008
- Author(s)
  S Nakao, J Choi, T Kato
- Journal Title
  
  Transaction of the Materials Research Society of Japan 33
  
  Pages: 1047-1051
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Effect of Oxygen Plasma Treatment on the Tribological Properties of Si-DLC Coating2008
- Author(s)
  J Choi, S Nakao, M Ikeyama, T Kato
- Journal Title
  
  Physica Status Solidic 5
  
  Pages: 956-959
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Effect of Oxygen Plasma Treatment on theTribological Properties of Si-DLC Coatings2008
- Author(s)
  J Choi, S Nakao, M Ikeyama, T Kato
- Journal Title
  
  Physica Status Solidi c Vol.5, No.4
  
  Pages: 956-959
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Effect of Deposition Pressure on the Properties of DLC Coatings Deposited by Bipolar-Type PBII&D2008
- Author(s)
  J Choi, S Nakao, M Ikeyama, T Kato
- Journal Title
  
  Surface and Interface Analysis 201
  
  Pages: 806-809
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Microstructure of Diamond-Like Carbon Films Prepared Using Acetylene and Toluene by Bipolar-Type Plasma Based Ion Implantation2008
- Author(s)
  S Nakao, J Choi, T Kato
- Journal Title
  
  Physica Status Solidic 5
  
  Pages: 973-976
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Microstructure of Diamond-Like CarbonFilms Prepared Using Acetylene and Tolueneby Bipolar-Type Plasma Based Ion Implantation2008
- Author(s)
  S Nakao, J Choi, T Kato
- Journal Title
  
  Physica Status Solidi c Vol.5, No.4
  
  Pages: 973-976
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Thermal Stability of SiBCN Films2008
- Author(s)
  N Hayashi, J Choi, T Kumagai, T Kato, M Kawaguchi, S Nakao, M Ikevama
- Journal Title
  
  Tribology Online 3
  
  Pages: 254-258
- NAID
  130000067619
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Thermal Stability of SiBCN Films2008
- Author(s)
  N Hayashi, J Choi, T Kumagai, T Kato, M Kawaguchi, S Nakao, M Ikeyama
- Journal Title
  
  Tribology Online Vol.3, No.5
  
  Pages: 254-258
- NAID
  130000067619
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Journal Article] Effect of Substrate Bias Voltages on Hardness of BCN Films Prepared by RF Magnetron Sputtering2008
- Author(s)
  S Nakao, J Choi, T Kato
- Journal Title
  
  Transaction of the Materials Research Society of Japan Vol.33
  
  Pages: 1047-1051
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] UV Raman Study of a-C:H Films Deposited on Trench Sidewall2015
- Author(s)
  J. Choi, H. Shimozono, Y. Hirata, S. Nakao, H. Yasui
- Organizer
  25th Annual Meeting of MRS-Japan
- Place of Presentation
  神奈川県横浜市産業貿易センタービル
- Year and Date
  2015-12-08
- Invited
- Data Source
  KAKENHI-PROJECT-26289024
[Presentation] UV Raman study of hydrogenated amorphous carbon films2015
- Author(s)
  J. Choi, H. Shimozono, S. Nakao, H. Yasui
- Organizer
  International Symposium on Sputtering and Plasma Processes (ISSP)
- Place of Presentation
  京都府京都市京都リサーチパーク
- Year and Date
  2015-07-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289024
[Presentation] Raman Evaluation on Structural Changes of DLC Films Prepared by Bipolar-T ype Plasma Based Ion Implantation and Deposition2013
- Author(s)
  S. Nakao, J. Choi, T. Sonoda, M. Ikeyama, T. Kato
- Organizer
  International Conference of Diamond and Carbon Materials
- Place of Presentation
  Riva del Garda, Italy
- Year and Date
  2013-09-04
- Data Source
  KAKENHI-PROJECT-23360072
[Presentation] Raman Evaluation on Structural Changes of DLC Films Prepared by Bipolar-Type Plasma Based Ion Implantation and Deposition2013
- Author(s)
  S. Nakao, J. Choi, T. Sonoda, M. Ikeyama, T. Kato
- Organizer
  International Conference of Diamond and Carbon Materials 2013
- Place of Presentation
  Riva del Garda, Italy
- Data Source
  KAKENHI-PROJECT-23360072
[Presentation] Improvement of Anti-Conrrosion Properties of Mg Alloy by Oxygen-Plasma Treatment and DLC Coatings2012
- Author(s)
  J.Choi, F.Aikawa, T.Kato, S.Nakao, T.Sonoda, M.Ikeyama
- Organizer
  Engineering Conferences International
- Place of Presentation
  Puntarenas, Costa Rica
- Year and Date
  2012-01-12
- Data Source
  KAKENHI-PROJECT-23360072
[Presentation] Laser-Assisted Imprinting of Nanostructured Glass2011
- Author(s)
  Toshimi Sato, Keisuke Nagato, Junho Choi, Tetsuya Hamaguchi, Masayuki Nakao
- Organizer
  11th International Conference on Nanotechnology
- Place of Presentation
  Portland, Oregon(招待講演)
- Year and Date
  2011-08-22
- Data Source
  KAKENHI-PROJECT-23360072
[Presentation] Deposition of SiBCN Films by Ion Beam Sputtering Using a Gas Mixture of Ar and CH42009
- Author(s)
  J Choi, N Takuda, T Kumagai, T Kato, M Kawaguchi, S Nakao, M Ikeyama
- Organizer
  16th International Conference on Surface Modification of Materials by Ion Beams
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2009-09-15
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] Microstructure of BCN films prepared by RF magnetron sputtering with bipolar-pulse substrate bias voltages2009
- Author(s)
  S Nakao, T Sonoda, J Choi, T Kato
- Organizer
  The 10th International Symposium on Sputtering & Plasma Processes(ISSP2009)
- Place of Presentation
  Kanazawa, Japan
- Year and Date
  2009-07-10
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] PBII法及び多元マグネトロンスパッタ法でのDLC及びSi含有DLC成膜によるマグネシウム合金の耐食性の向上2009
- Author(s)
  池山雅美, 園田勉, 中尾節男, 崔〓豪
- Organizer
  第23回ダイヤモンドシンポジウム
- Place of Presentation
  習志野, 千葉.
- Year and Date
  2009-11-19
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] Low Friction Mechanism of Si- Incorporated Diamond-Like Carbon Coatings2008
- Author(s)
  A Tsunoda, J Choi, T Kato, S Nakao, M Ikeyama
- Organizer
  63rd STLE Annual Meeting
- Place of Presentation
  Cleveland, OH
- Year and Date
  2008-05-19
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] Improvement of Corrosion Protection Property of Mg-Alloy by DLC and Si-DLC Coatings with PBII Technique2008
- Author(s)
  M Ikeyama, S Nakao, T Sonoda, J Choi
- Organizer
  16th International Conference on Ion Beam Modification of Material
- Place of Presentation
  Dresden, Germany
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] Improvement of Corrosion Protection Property of Mg-Alloy by DCL and Si-DLC Coatings2008
- Author(s)
  M Ikeyama, S Nakao, T Sonoda, J Choi
- Organizer
  IUMRS-ICA2008
- Place of Presentation
  Tokyo
- Year and Date
  2008-12-11
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] SiBCN膜の高温安定性2008
- Author(s)
  林尚宏,崔竣豪,熊谷知久,加藤孝久.川口雅弘,中尾節男,池山雅美
- Organizer
  日本トライボロジー学会トライボロジー会議予講集
- Place of Presentation
  東京
- Year and Date
  2008-05-13
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] Thermal Stability of SiBCN Films2008
- Author(s)
  J Choi, N Hayashi, T Kato, M Kawaguchi, S Nakao, M Ikeyama
- Organizer
  The 4th Vacuum and Surface Sciences Conference of Asia and Austra
- Place of Presentation
  Matsue
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] DLC膜の摩擦特性に対する酸素プラズマ処理の影響2008
- Author(s)
  角田篤史,崔竣豪,川口雅弘,熊谷知久,加藤孝久,中尾節男,池山雅美
- Organizer
  日本トライボロジー学会トライボロジー会議予講集
- Place of Presentation
  名古屋
- Year and Date
  2008-09-16
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] Si-DLC 膜の摩擦特性に対する酸素プラズマ処理の影響2008
- Author(s)
  角田篤史, 崔〓豪, 川口雅弘, 熊谷知久,加藤孝久, 中尾節男, 池山雅美
- Organizer
  日本トライボロジー学会トライボロジー会議予講集 pp.181-182
- Place of Presentation
  名古屋
- Year and Date
  2008-09-16
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] DLC膜のバリアー性におよぼす成膜圧力の影響2008
- Author(s)
  崔竣豪,加藤孝久,中尾節男,池山雅美
- Organizer
  日本トライボロジー学会トライボロジー会議予講集
- Place of Presentation
  名古屋
- Year and Date
  2008-09-16
- Data Source
  KAKENHI-PROJECT-20360073
[Presentation] Low Friction Mechanism of Si-Incorporated Diamond-Like CarbonCoatings2008
- Author(s)
  A Tsunoda, J Choi, T Kato,S Nakao, MIkeyama
- Organizer
  63rd STLE Annual Meeting pp.1-6 (CDROM)
- Place of Presentation
  Cleveland, OH
- Year and Date
  2008-05-19
- Data Source
  KAKENHI-PROJECT-20360073

1. CHOI Junho (30392632)

# of Collaborated Projects: 4 results

# of Collaborated Products: 31 results
2. KATO Takahisa (60152716)

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results

Nakao Setsuo 中尾 節男

中尾 節男 ナカオ セツオ

NAKAO Setsuo 中尾 節男

Research Projects

Research Products

Co-Researchers

Development of highly durable and high efficient DLC-based triboelectric nanogenerators

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Low friction properties of graphene films

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

DLC Coating on a Micro/Nano-Trench by Bipolar PBII&D and Analysis of Plasma Behavior

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Low Friction Properties of Si-Incorporated DLC Coatings Treated with Oxygen Plasma

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Effects of Nitrogen Gas Ratio on Composition and Microstructure of BCN Films Prepared by RF Magnetron Sputtering2010

Author(s)

Journal Title

Data Source

[Journal Article] Effects of nitrogen gas ratio on composition and microstructure of BCN films prepared by RF magnetron sputtering2010

Author(s)

Journal Title

Data Source

[Journal Article] Improvement of corrosion protection property of Mg-alloy by DLC and Si-DLC coatings with PBII technique and multi-target DC-RF magnetron sputtering2009

Author(s)

Journal Title

Data Source

[Journal Article] Effect of Deposition Pressure on theProperties of DLC Coatings Deposited byBipolar-Type PBII&D Surface and Interface2008

Author(s)

Journal Title

Data Source

[Journal Article] Effect of Substrate Bias Voltages on Hardness of BCN Films Prepared by RF Magnetron Sputtering2008

Author(s)

Journal Title

Data Source

[Journal Article] Effect of Oxygen Plasma Treatment on the Tribological Properties of Si-DLC Coating2008

Author(s)

Journal Title

Data Source

[Journal Article] Effect of Oxygen Plasma Treatment on theTribological Properties of Si-DLC Coatings2008

Author(s)

Journal Title

Data Source

[Journal Article] Effect of Deposition Pressure on the Properties of DLC Coatings Deposited by Bipolar-Type PBII&D2008

Author(s)

Journal Title

Data Source

[Journal Article] Microstructure of Diamond-Like Carbon Films Prepared Using Acetylene and Toluene by Bipolar-Type Plasma Based Ion Implantation2008

Author(s)

Journal Title

Data Source

[Journal Article] Microstructure of Diamond-Like CarbonFilms Prepared Using Acetylene and Tolueneby Bipolar-Type Plasma Based Ion Implantation2008

Author(s)

Journal Title

Data Source

[Journal Article] Thermal Stability of SiBCN Films2008

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Thermal Stability of SiBCN Films2008

Author(s)

Journal Title

NAID

Data Source

Nakao Setsuo 中尾節男

中尾節男ナカオセツオ

NAKAO Setsuo 中尾節男