Tanaka Nozomi 田中のぞみ

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TANAKA Nozomi 田中のぞみ

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Researcher Number	60581296
Other IDs	https://orcid.org/0000-0002-8392-2224
Affiliation (Current)	2025: 大阪大学, レーザー科学研究所, 特任講師(常勤)
Affiliation (based on the past Project Information) *help	2025: 大阪大学, レーザー科学研究所, 特任講師(常勤) 2019 – 2022: 大阪大学, レーザー科学研究所, 特任助教(常勤) 2017 – 2018: 大阪大学, レーザー科学研究所, 特別研究員(RPD) 2015: 大阪大学, レーザーエネルギー学研究センタ, 特任研究員(常勤) 2015: 大阪大学, レーザーエネルギー学研究センタ, 研究員 … More 2013 – 2014: 大阪大学, レーザーエネルギー学研究センタ, 特任研究員 2013: 大阪大学, レーザーエネルギー学研究センタ, 研究員 2011 – 2012: 大阪大学, レーザーエネルギー学研究センター, 特任研究員 2010 – 2011: 東北大学, 大学院・工学研究科, 助教 Less
Review Section/Research Field	Principal Investigator Basic Section 14010:Fundamental plasma-related / Plasma science / Plasma science / Nuclear fusion studies Except Principal Investigator Nuclear fusion studies
Keywords	Principal Investigator 極端紫外光 / 極端紫外(EUV)光 / 物質アブレーション / 光電離 / プラズマ加熱 / EUV光モニタ / デブリ抑制 / EUV光源 / 界面制御 / x線光学素子 … More / 材料耐性試験 / 表面改質 / 軟X線分光 / アブレーションプラズマ / EUV分光 / 可視分光計測 / 分光計測 / 光電離プラズマ / 材料プロセシング / 成膜 / 反射粒子 / 粒子スパッタリング / X線光学 / x線光学 / アブレーション / EUV / 薄膜 / ワイドバンドギャップ材料 / 極端紫外光アブレーション / プラズマ診断 / 光量子ビーム応用 / 極端紫外(EUV)光アブレーション / 物質加熱 / 粒子計測 / プラズマ膨張 / Cavity-Ring-Down法 / 負イオン密度計測 / RF負イオン源 / 水素負イオン源 … More Except Principal Investigator ＣＲＤＳ法 / 長時間運転 / 負イオン表面生成 / 中性粒子入射 / セシウム添加 / プラズマ・核融合 / 負イオンビーム / 永久磁石 / ヘリコン波 / 高周波プラズマ / 水素負イオン源 / 高性能負イオン源 Less

真空紫外光による高密度水素ラジカル生成と半導体製造技術ボトルネック解消Principal Investigator
- Principal Investigator
  
  田中のぞみ
- Project Period (FY)
  2025 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 14010:Fundamental plasma-related
- Research Institution
  The University of Osaka
Study of dynamical extreme ultraviolet radiation driven material interactionsPrincipal Investigator
- Principal Investigator
  
  Tanaka Nozomi
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 14010:Fundamental plasma-related
- Research Institution
  Osaka University
Processing of wide-bandgap material with intense EUV lightPrincipal Investigator
- Principal Investigator
  
  Tanaka Nozomi
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
レーザー駆動極端紫外（ＥＵＶ）光源による対材料耐力試験の可能性の実証Principal Investigator
- Principal Investigator
  
  田中のぞみ
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for JSPS Fellows
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Study of plasma properties of EUV material ablation by particle diagnosticsPrincipal Investigator
- Principal Investigator
  
  Tanaka Nozomi
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
Performance enhancement of actively-controllable hydrogen/deuterium negative ion source
- Principal Investigator
  
  ANDO Akira
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nuclear fusion studies
- Research Institution
  Tohoku University
Characteristics of negative hydrogen ions near the low work function surface in a Radio Frequency negative ion sourcePrincipal Investigator
- Principal Investigator
  
  TANAKA Nozomi
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Research Activity Start-up
- Research Field
  
  Nuclear fusion studies
- Research Institution
  Tohoku University

[Journal Article] Time-resolved measurement of radical populations in extreme-ultraviolet-light-induced hydrogen plasma2022
- Author(s)
  Liu Chang、Tanaka Nozomi、Zhu Baojun、Nishihara Katsunobu、Fujioka Shinsuke、Sik Kang Kyung、Suh Youngduk、Kim Jeong-Gil、Ozawa Ken、Kubo Minoru
- Journal Title
  
  Applied Physics Express
  
  Volume: 15 Issue: 3 Pages: 036002-036002
- DOI
  10.35848/1882-0786/ac4faa
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03893
[Journal Article] Energy and charge distribution of Si ions in EUV ablation plasma2021
- Author(s)
  Tanaka Nozomi、Deguchi Ryo、Wada Nao、Nishimura Hiroaki
- Journal Title
  
  Proc. of SPIE Vol. 11886, International Conference on X-Ray Lasers 2020
  
  Volume: 11886 Pages: 26-26
- DOI
  10.1117/12.2591978
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K03893
[Journal Article] 高強度・高フルエンスパルスEUV光による材料プロセシング2020
- Author(s)
  田中のぞみ
- Journal Title
  
  光アライアンス
  
  Volume: 31 Pages: 5-9
- Data Source
  KAKENHI-PROJECT-17K05727
[Journal Article] Mitigation of debris from a laser plasma EUV source and from focusing optics for thin film deposition by intense EUV radiation2020
- Author(s)
  Tanaka Nozomi、Wada Nao、Kageyama Yasuyuki、Nishimura Hiroaki
- Journal Title
  
  High Energy Density Physics
  
  Volume: 37 Pages: 100865-100865
- DOI
  10.1016/j.hedp.2020.100865
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K03893
[Journal Article] Creation and Functional Control of Metal Nanoparticle-Polymer Interface by Laser Plasma EUV Light Excitation2018
- Author(s)
  K. Yasuda, N. Tanaka, N. Wada, and H. Nishimura
- Journal Title
  
  Proceedings of 2018 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC)
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16J40173
[Journal Article] Creation and Functional Control of Metal Nanoparticle-Polymer Interface by Laser Plasma EUV Light Excitation2018
- Author(s)
  K. Yasuda, N. Tanaka, N. Wada, and H. Nishimura,
- Journal Title
  
  IEEE Explore, ICEP-IAAC 2018 Proceedings
  
  Volume: － Pages: 535-538
- DOI
  10.23919/icep.2018.8374644
- Data Source
  KAKENHI-PROJECT-17K05727, KAKENHI-PROJECT-16J40173
[Journal Article] Surface Layer Modification of Metal Nanoparticle Supported Polymer by Irradiation of Laser-Driven Extreme Ultraviolet Light2018
- Author(s)
  N. Tanaka, R. Deguchi, N. Wada, K. Yasuda, A. Yogo, H. Nishimura
- Journal Title
  
  X-Ray Lasers 2016. ICXRL 2016. Springer Proceedings in Physics
  
  Volume: 202 Pages: 377-381
- DOI
  10.1007/978-3-319-73025-7_56
- ISBN
  9783319730240, 9783319730257
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16J40173
[Journal Article] 高フルエンス極端紫外(EUV)光照射による金属ナノ粒子担持ポリマーの表面改質2017
- Author(s)
  田中のぞみ, 安田清和, 和田直, 西村博明
- Journal Title
  
  電子機器トータルソリューション展2017 アカデミックプラザ研究成果発表論文集
  
  Volume: －
- Data Source
  KAKENHI-PROJECT-16J40173
[Journal Article] 高フルエンスEUV光による材料表面改質2016
- Author(s)
  田中のぞみ, 安田清和, 出口亮, 和田直, 余語覚文, 西村博明
- Journal Title
  
  レーザー学会第502回研究報告書
  
  Volume: 502
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16J40173
[Journal Article] Spectroscopic measurements of ablation plasma generated with laser-driven intense extreme ultraviolet (EUV) light2016
- Author(s)
  N. Tanaka, K. Hane, H. Shikata, M. Masuda, K. Nagatomi, A. Sunahara, M. Yoshida, S. Fujioka, and H. Nishimura
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 688 Pages: 012122-012122
- DOI
  10.1088/1742-6596/688/1/012122
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-25800303, KAKENHI-PROJECT-16J40173
[Journal Article] Spectroscopic observation of ablation plasma generated with a laser-driven extreme light source2015
- Author(s)
  M. Masuda, N. Tanaka, K. Hane, A. Sunahara, S. Fujioka, and H, Nishimura
- Journal Title
  
  Applied Physics B: Lasers and Optics
  
  Volume: 119 Issue: 3 Pages: 421-425
- DOI
  10.1007/s00340-015-6041-0
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24540545, KAKENHI-PROJECT-25800303, KAKENHI-PROJECT-25400539
[Journal Article] Characterization of material ablation driven by laser generated intense extreme ultraviolet (EUV) light2015
- Author(s)
  N. Tanaka, M. Masuda, R. Deguchi, M. Murakami, A. Suahara, S. Fujioka, A. Yogo, and H. Nishimura
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 107 Issue: 11 Pages: 114101-114101
- DOI
  10.1063/1.4930958
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25400539, KAKENHI-PROJECT-25800303, KAKENHI-PROJECT-26287146
[Journal Article] Characteristics of Volume Produced Negative Hydrogen Ions in a Field-Effect-Transistor Based Ion Source2013
- Author(s)
  N. Tanaka, T. Funaoi, K. Oikawa, Y. Saito, H. Nakano, and A. Ando
- Journal Title
  
  AIP conference Proceedings
  
  Volume: vol. 1515 Pages: 263-269
- DOI
  10.1063/1.4792793
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360408, KAKENHI-PROJECT-24654187
[Journal Article] Laser measurement of H^-ions in a field-effect-transistor based radio frequency ion source2012
- Author(s)
  N. Tanaka, T. Matsuno, T. Funaoi, A. Ando, Y. Tauchi, H. Nakano, K. Tsumori, Y. Takeiri
- Journal Title
  
  Review of Scientific Instrument
  
  Volume: 83 Pages: 1-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22860009
[Journal Article] H^- beam extraction from a cesium seeded field effect transistor based radio frequency negative hydrogen ion source2012
- Author(s)
  A.Ando
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 83 Issue: 2
- DOI
  10.1063/1.3684720
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22860009, KAKENHI-PROJECT-23360408
[Journal Article] Laser measurement of H-ions in a field-effect-transistor based radio frequency ion source2012
- Author(s)
  N. Tanaka, T. Matsuno, T. Funaoi, A. Ando, Y. Tauchi, H. Nakano, K. Tsumori, Y. Takeiri
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 83 Issue: 2
- DOI
  10.1063/1.3680549
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21654083, KAKENHI-PROJECT-22860009, KAKENHI-PROJECT-23360408
[Journal Article] H^-beam extraction from a cesium seeded field effect transistor based radio frequency negative hydrogen ion source2012
- Author(s)
  A. Ando, T. Matsuno, T. Funaoi, N. Tanaka, K. Tsumori, Y. Takeiri
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 83 Pages: 1-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22860009
[Journal Article] Characteristics of Hydrogen Negative Ion Source with FET based RF system2011
- Author(s)
  A. Ando, T. Matsuno, T. Funaoi, N. Tanaka, Y. Takeiri, K. Tsumori
- Journal Title
  
  AIP conf. Proc
  
  Volume: 1390 Pages: 322-328
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22860009
[Patent] 露光装置及び汚染除去装置2022
- Inventor(s)
  田中のぞみ他7名
- Industrial Property Rights Holder
  田中のぞみ他7名
- Industrial Property Rights Type
  特許
- Filing Date
  2022
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] Spectroscopic diagnostics of H-radicals formed by an extreme ultraviolet light source generated with a laser produced plasma2023
- Author(s)
  James Edward Hernandez, Nozomi Tanaka, Yubo Wang, Katsunobu Nishihara, Shinsuke Fujioka, Atsushi Sunahara, Tomoyuki Johzaki, Kyung Sik Kang, Youngduk Suh, Jeong-Gil Kim, Shinji Ueyama, Ken Ozawa
- Organizer
  応用物理学会春期学術講演会
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] Comparison of focusing optics for extreme vacuum ultraviolet and vacuum ultraviolet emission from laser produced plasma2023
- Author(s)
  Nozomi Tanaka, Yubo Wang, Katsunobu Nishihara, Shinsuke Fujioka, Atsushi Sunahara, Tomoyuki Johzaki, Kyung Sik Kang, Youngduk Suh, Jeong-Gil Kim, Shinji Ueyama, Ken Ozawa
- Organizer
  応用物理学会春期学術講演会
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] A high-transmittance Schwarzschild objective (SO) to focus high-intensity EUV-VUV light from laser-plasma light source2022
- Author(s)
  Yubo Wang, Nozomi Tanaka, Katsunobu Nishihara, Shinsuke Fujioka, Atsushi Sunahara, Tomoyuki Johzaki, Kyung Sik Kang, Youngduk Suh, Jeong-Gil Kim, Shinji Ueyama, Ken Ozawa
- Organizer
  応用物理学会秋期学術講演会
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] Actively controlled radical production in a photo-ionized hydrogen plasma for tin contamination cleaning2022
- Author(s)
  N. Tanaka, Y. Wang, K. Nishihara, S. Fujioka, A. Sunahara, T. Johzaki, Kyung Sik Kang, Youngduk Suh, Jeong-Gil Kim, S. Ueyama, K. Ozawa
- Organizer
  6th Asia-Pacific Conference on Plasma Physics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] Characteristics of the extreme ultraviolet spectrum from a laser produced plasma2022
- Author(s)
  Nozomi Tanaka, Yubo Wang, James Edward Hernandez, Katsunobu Nishihara, Shinsuke Fujioka, Atsushi Sunahara, Tomoyuki Johzaki, Kyung Sik Kang, Youngduk Suh, Jeong-Gil Kim, Shinji Ueyama, Ken Ozawa
- Organizer
  応用物理学会秋期学術講演会
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] Energy and charge distribution of Si ions in EUV ablation plasma2021
- Author(s)
  Nozomi Tanaka, Ryo Deguchi, Nao Wada, Hiroaki Nishimura
- Organizer
  International Conference on X-ray Lasers (ICXRL) 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] Optical Emission Spectroscopy (OES) measurement of EUV-induced plasma parameters in hydrogen2021
- Author(s)
  Chang Liu, Nozomi Tanaka, Baojun Zhu, Katsunobu Nishihara, Shinsuke Fujioka, Kyung Sik Kang, Youngduk Suh, Jeong-Gil Kim, Ken Ozawa, Minoru Kubo
- Organizer
  The 68th Japan Society of Applied Physics spring meeting
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] Comprehensive measurements of hydrogen radicals in hydrogen plasma induced by intense extreme ultraviolet radiation2021
- Author(s)
  N. Tanaka, B. Zhu, C. Liu, Y. Wang, K. Nishihara, S. Fujioka, Kyung Sik Kang, Youngduk Suh, Jeong-Gil Kim, K. Ozawa, M. Kubo
- Organizer
  The 30th International Toki Conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03893
[Presentation] レーザープラズマX線による材料改質と材料加工2019
- Author(s)
  田中のぞみ, 高垣昂佑, 安田清和, 西村博明
- Organizer
  第74回年次大会, 2019年3月15日
- Invited
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] Laser Produced Plasma EUV source for Materials Testing2019
- Author(s)
  Nozomi Tanaka, Kosuke Takagaki, and Hiroaki Nishimura
- Organizer
  The 11th International Conference on Inertial Fusion Sciences and Applications (IFSA2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05727
[Presentation] レーザープラズマX線による材料改質と材料加工2019
- Author(s)
  田中のぞみ, 高垣昂佑, 安田清和, 西村博明
- Organizer
  第74回年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-17K05727
[Presentation] 高強度パルスEUV光による材料プロセシングに向けたレーザー駆動光源のデブリ抑制法開発2018
- Author(s)
  田中のぞみ, 和田直, 景山恭行, 西村博明
- Organizer
  応用物理学会春期学術講演会
- Data Source
  KAKENHI-PROJECT-17K05727
[Presentation] 高強度・高フルエンスパルスEUV光による材料プロセシング2018
- Author(s)
  田中のぞみ, 安田清和, 景山恭行, 西村博明
- Organizer
  第89回レーザー加工学会講演会
- Data Source
  KAKENHI-PROJECT-17K05727
[Presentation] Laser-plasma EUV source for advanced materials processing2018
- Author(s)
  N. Tanaka, N. Wada, Y. Kageyama, K. Yasuda, H. Nishimura
- Organizer
  The 16th International Conference on X-ray Lasers
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05727
[Presentation] 高強度・高フルエンスパルスEUV光による材料プロセシング2018
- Author(s)
  田中のぞみ, 安田清和, 景山恭行, 西村博明
- Organizer
  第89回レーザー加工学会講演会
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] Laser-plasma EUV source for advanced materials processing2018
- Author(s)
  N. Tanaka, N. Wada, Y. Kageyama, K. Yasuda, H. Nishimura
- Organizer
  The 16th International Conference on X-ray Lasers
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] 高強度パルスEUV光による材料プロセシングに向けたレーザー駆動光源のデブリ抑制法開発2018
- Author(s)
  田中のぞみ, 和田直, 景山恭行, 西村博明
- Organizer
  応用物理学会春期学術講演会
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] Creation and Functional Control of Metal Nanoparticle-Polymer Interface by Laser Plasma EUV Light Excitation2018
- Author(s)
  K. Yasuda, N. Tanaka, N. Wada, and H. Nishimura
- Organizer
  ICEP-IAAC2018
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] レーザー駆動EUV光を用いた材料プロセスのための不純物抑制2017
- Author(s)
  和田直, 田中のぞみ, 出口亮, 景山恭行, 余語覚文, 西村博明
- Organizer
  応用物理学会春期学術講演会
- Place of Presentation
  神奈川県横浜市(パシフィコ横浜)
- Year and Date
  2017-03-15
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] レーザー駆動 EUV光源による光学系の損傷とスパッタ粒子の抑制2017
- Author(s)
  和田直、田中のぞみ、景山恭行、余語覚文、西村博明
- Organizer
  Plasma Conference 2017
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] 高フルエンスレーザー駆動極端紫外(EUV)光による金属ナノ粒子担持高分子材料の表面改質2017
- Author(s)
  田中のぞみ, 安田清和, 出口亮, 和田直, 余語覚文, 西村博明
- Organizer
  応用物理学会春期学術講演会
- Place of Presentation
  神奈川県横浜市(パシフィコ横浜)
- Year and Date
  2017-03-15
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] レーザー駆動 EUV光源による光学系の損傷とスパッタ粒子の抑制2017
- Author(s)
  和田直、田中のぞみ、景山恭行、余語覚文、西村博明
- Organizer
  Plasma Conference 2017
- Data Source
  KAKENHI-PROJECT-17K05727
[Presentation] 高フルエンス極端紫外(EUV)光照射による金属ナノ粒子担持ポリマーの表面改質2017
- Author(s)
  田中のぞみ, 安田清和, 和田直, 西村博明
- Organizer
  電子機器トータルソリューション展2017 アカデミックプラザ
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] Surface layer modification of metal nanoparticle supported polymer by irradiation of laser driven extreme ultraviolet light2016
- Author(s)
  N. Tanaka, R. Deguchi , N. Wada, K. Yasuda, A. Yogo, and H. Nishimura
- Organizer
  The 15th International Conference on X-Ray Lasers
- Place of Presentation
  奈良県奈良市(奈良春日野国際フォーラム)
- Year and Date
  2016-05-24
- Data Source
  KAKENHI-PROJECT-16J40173
[Presentation] Characterization of ion plumes generated by laser-driven intense extreme ultraviolet (EUV) light2016
- Author(s)
  R. Deguchi, N. Tanaka, N. Wada, A. Sunahara, M. Murakami, A. Yogo, and H. Nishimura
- Organizer
  The 15th International Conference on X-Ray Lasers
- Place of Presentation
  奈良県奈良市
- Year and Date
  2016-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] レーザー駆動EUV光による物質アブレーションにおけるイオンエネルギーと価数診断2016
- Author(s)
  出口亮，田中のぞみ，増田将也，砂原淳, 余語覚文，西村博明
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス(東京都目黒区)
- Year and Date
  2016-03-20
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] レーザー駆動EUV光による物質アブレーションにおけるイオン膨張に関する研究2015
- Author(s)
  出口亮, 田中のぞみ, 増田将也, 砂原淳, 余語覚文, 西村博明
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県平塚市
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] PLASMA EXPANSION FROM MATERIAL ABLATION BY INTENSE LASER DRIVEN EXTREME ULTRAVIOLET (EUV) LIGHT2015
- Author(s)
  N. Tanaka, R. Deguchi, A. Sunahara, M. Murakami, A. Yogo, H. Nishimura
- Organizer
  The Ninth International Conference on Inertial Fusion Sciences and Applications
- Place of Presentation
  Bellevue, Washington, USA
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] Spectroscopic observation of ablation plasma generated with a laser-driven extreme ultraviolet (EUV) light source2014
- Author(s)
  M. Masuda, N. Tanaka, A. Sunahara, S. Fujioka, H. Nishimura
- Organizer
  9th International Conference on Photo-Excited Processes and Applications
- Place of Presentation
  Matsue, Japan
- Year and Date
  2014-09-30
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] Ion expansion from extreme ultraviolet (EUV) and laser ablation plasmas2014
- Author(s)
  N. Tanaka, M. Masuda, M. Murakami, A. Sunahara, S. Fujioka, H. Nishimura
- Organizer
  9th International Conference on Photo-Excited Processes and Applications
- Place of Presentation
  Matsue, Japan
- Year and Date
  2014-10-01
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] レーザー駆動集光EUV光による物質アブレーションとその応用2014
- Author(s)
  田中のぞみ, 増田将也, 出口亮, 砂原淳, 村上匡且, 余語覚文, 藤岡慎介, 西村博明
- Organizer
  Plasma Conference 2014
- Place of Presentation
  新潟県新潟市
- Year and Date
  2014-11-21
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] 高周波イオン源を用いた高密度プラズマ生成と水素負イオンビーム引き出し2012
- Author(s)
  船生拓矢、及川幸平、斎藤雄太、田中のぞみ、安藤　晃
- Organizer
  日本物理学会秋季大会
- Place of Presentation
  横浜国立大学 (神奈川県横浜市)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] 高周波イオン源におけるCRD法を用いた水素負イオン密度計測2012
- Author(s)
  田中のぞみ
- Organizer
  日本物理学会第67回年次大会
- Place of Presentation
  関西学院大学西宮上ケ原キャンパス(兵庫県西宮市)
- Year and Date
  2012-03-26
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] N. Tanaka, T. Funaoi, K. Oikawa, Y. Saito, H. Nakano, A. Ando2012
- Author(s)
  N. Tanaka, T. Funaoi, K. Oikawa, Y. Saito, H. Nakano, A. Ando
- Organizer
  3rd International Symposium on Negative Ions, Beams and Sources
- Place of Presentation
  Agora building (Jyvaskyla, Finland)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] FET高周波電源を用いた水素負イオン源の長時間運転2012
- Author(s)
  船生拓矢、及川幸平、斎藤雄太、田中のぞみ、安藤　晃
- Organizer
  第9回核融合エネルギー連合講演会
- Place of Presentation
  神戸国際会議場 (兵庫県神戸市)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] Plasma production and H- beam extraction from a FET-based RF ion source2012
- Author(s)
  A. Ando, T. Funaoi, K. Oikawa, Y. Saito, H. Nakano, N. Tanaka
- Organizer
  3rd International Symposium on Negative Ions, Beams and Sources
- Place of Presentation
  Jyvaskyla(Finland)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] セシウム添加型高密度負イオン源における水素負イオン特性評価2012
- Author(s)
  田中のぞみ、船生拓矢、及川幸平、斎藤雄太、中野治久、安藤　晃
- Organizer
  日本物理学会秋季大会
- Place of Presentation
  横浜国立大学 (神奈川県横浜市)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] 高周波イオン源におけるCRD法を用いた水素負イオン密度計測2012
- Author(s)
  田中のぞみ、松野哲郎、船生拓也、安藤晃、田内康、津守克嘉、竹入康彦
- Organizer
  日本物理学会第67回年次大会
- Place of Presentation
  兵庫県西宮市(関西学院大学西宮上ケ原キャンパス)
- Year and Date
  2012-03-26
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] FETインバータ型高周波電源を用いた高密度プラズマ生成2012
- Author(s)
  及川幸平、船生拓矢、斎藤雄太、田中のぞみ、安藤　晃
- Organizer
  電気学会A部門大会
- Place of Presentation
  秋田大学 (秋田県秋田市)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] Plasma production and H- beam extraction from a FET-based RF ion source2012
- Author(s)
  A. Ando, T. Funaoi, K. Oikawa, Y. Saito, N. Tanaka
- Organizer
  3rd International Symposium on Negative Ions, Beams and Sources
- Place of Presentation
  Agora building (Jyvaskyla, Finland)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] Characteristics of a plasma produced by a FET based RF ion source2012
- Author(s)
  及川幸平，斎藤雄太，船生拓矢，田中のぞみ，安藤　晃
- Organizer
  電気関係学会東北支部連合大会
- Place of Presentation
  秋田県立大学 (秋田県由利本荘市)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] CRD measurements in a FET-based H- ion source2012
- Author(s)
  N. Tanaka, T. Funaoi, K. Oikawa, Y. Saito, H. Nakano, and A. Ando
- Organizer
  3rd International Symposium on Negative Ions, Beams and Sources
- Place of Presentation
  Jyvaskyla(Finland)
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] 高周波イオン源におけるCRD法を用いた水素負イオン密度計測2012
- Author(s)
  田中のぞみ、中野治久、松野哲郎、船生拓矢、及川幸平、斎藤雄太、安藤　晃
- Organizer
  日本物理学会第67回年次大会
- Place of Presentation
  関西学院大学西宮上ケ原キャンパス
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] Production and Measurement of Negative Hydrogen Ions in a PET based RF Ion Source2011
- Author(s)
  N.Tanaka
- Organizer
  21st International Toki Conference
- Place of Presentation
  Ceratopia Toki (Gifu, Japan)
- Year and Date
  2011-11-28
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] Characteristics of a RF negative hydrogen ion source with a long pulse operation2011
- Author(s)
  T. Matsuno, T. Funaoi, N. Tanaka, A. Ando, K. Tsumori, Y. Takeiri
- Organizer
  Plasma Conference 2011
- Place of Presentation
  石川県立音楽堂
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] Laser measurement of H^- ions in a FET based RF ion source2011
- Author(s)
  N.Tanaka
- Organizer
  14th International Conference on Ion Sources
- Place of Presentation
  Giardini-Naxos, Italy
- Year and Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] Production and Measurement of Negative Hydrogen Ions in a FET based RF Ion Source2011
- Author(s)
  N. Tanaka, T. Matsuno, T. Funaoi, A. Ando, Y. Tauchi, H. Nakano, K. Tsumori, Y. Takeiri
- Organizer
  21st International Toki Conference
- Place of Presentation
  Toki, Gifu, Japan
- Year and Date
  2011-11-28
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] Production and beam extraction of H- ions in a RF negative ion source2011
- Author(s)
  T. Funaoi, T. Matsuno, N. Tanaka, A. Ando, K. Tsumori, Y. Takeiri
- Organizer
  Plasma Conference 2011
- Place of Presentation
  石川県立音楽堂
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] Production and Measurement of Negative Hydrogen Ions in a FET based RF Ion Source2011
- Author(s)
  N. Tanaka, T. Matsuno, T. Funaoi, A. Ando, Y. Tauchi, H. Nakano, K. Tsumori, Y. Takeiri
- Organizer
  21st International Toki Conference
- Place of Presentation
  Toki, Japan
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] 高周波負イオン源内における水素負イオンのレーザー計測2011
- Author(s)
  田中のぞみ
- Organizer
  Plasma Conference 2011
- Place of Presentation
  石川音楽堂(石川県金沢市)
- Year and Date
  2011-11-22
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] Diagnostics of Negative Hydrogen Ions in a RF Ion Source by Using YAG Laser2011
- Author(s)
  N. Tanaka, T. Matsuno, T. Funaoi, A. Ando, Y. Tauchi, H. Nakano, K. Tsumori, Y. Takeir
- Organizer
  Plasma Conference 2011
- Place of Presentation
  石川県立音楽堂
- Data Source
  KAKENHI-PROJECT-23360408
[Presentation] Laser measurement of H^-ions in a FET based RF ion source2011
- Author(s)
  N. Tanaka, T. Matsuno, T. Funaoi, A. Ando, Y. Tauchi, H. Nakano, K. Tsumori, Y. Takeiri
- Organizer
  14th International Conference on Ion Sources
- Place of Presentation
  Gairdini-Naxos, Italy
- Year and Date
  2011-09-13
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] 高周波負イオン源内における水素負イオンのレーザー計測-Diagnostics of Negative Hydrogen Ions in a RF Ion Source by Using YAG laser2011
- Author(s)
  田中のぞみ、松野哲郎、船生拓也、安藤晃、田内康、津守克嘉、竹入康彦
- Organizer
  Plasma Conference 2011
- Place of Presentation
  石川県金沢市(石川音楽堂)
- Year and Date
  2011-11-22
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] RFイオン源における水素負イオン生成2010
- Author(s)
  松野哲郎、船生拓也、田中のぞみ、安藤晃、田内康、津守克嘉、竹入康彦
- Organizer
  プラズマ・核融合学会第27回年会(30P18)
- Place of Presentation
  北海道札幌市(北海道大学学術交流会館)
- Year and Date
  2010-11-30
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] 高周波負イオン源から引き出されたH-ビームの基礎特性2010
- Author(s)
  田中のぞみ
- Organizer
  プラズマ・核融合学会第27回年会
- Place of Presentation
  北海道札幌市
- Year and Date
  2010-11-30
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] 高周波負イオン源から引き出されたH-ビームの基礎特性2010
- Author(s)
  田中のぞみ、松野哲郎、船生拓也、安藤晃、田内康、津守克嘉、竹入康彦
- Organizer
  プラズマ・核融合学会第27回年会(30pC02)
- Place of Presentation
  北海道札幌市(北海道大学学術交流会館)
- Year and Date
  2010-11-30
- Data Source
  KAKENHI-PROJECT-22860009
[Presentation] 光・粒子計測を用いたレーザー駆動EUV光源アブレーションプルームの診断
- Author(s)
  増田将也, 田中のぞみ, 永富健介, 吉田実, 砂原淳, 藤岡慎介, 西村博明
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県相模原市
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] 光・粒子計測を用いた集光EUV及びレーザーによるアブレーションの比較
- Author(s)
  田中のぞみ, 増田将也, 永富健介, 砂原淳, 吉田実, 藤岡慎介, 西村博明
- Organizer
  第74回応用物理学会秋期学術講演会
- Place of Presentation
  京都府京田辺市
- Data Source
  KAKENHI-PROJECT-25800303
[Presentation] Spectroscopic measurements of ablation plasma generated with laser-driven intense extreme ultraviolet (EUV) light
- Author(s)
  N. Tanaka, K. Hane, H. Shikata, M. Masuda, K. Nagatomi, A. Sunahara, M. Yoshida, S. Fujioka, and H. Nishimura
- Organizer
  The Eights International Conference on Inertial Fusion Sciences and Applications
- Place of Presentation
  奈良県奈良市
- Data Source
  KAKENHI-PROJECT-25800303

1. ANDO Akira (90182998)

# of Collaborated Projects: 1 results

# of Collaborated Products: 16 results
2. TSUMORI Katsuyoshi (50236949)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
3. TOBARI Hiroyuki (70361128)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. TAKEIRI Yasuhiko (60179603)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
5. NISHIMURA Hiroaki (60135754)

# of Collaborated Projects: 1 results

# of Collaborated Products: 11 results
6. MURAKAMI Masakatsu (80192772)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
7. SUNAHARA Atsushi (00370213)

# of Collaborated Projects: 1 results

# of Collaborated Products: 12 results
8. MASUDA Masaya

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
9. NAGATOMI Kensuke

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
10. DEGUCHI Ryo

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
11. WADA Nao

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results

Tanaka Nozomi 田中 のぞみ

TANAKA Nozomi 田中 のぞみ

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真空紫外光による高密度水素ラジカル生成と半導体製造技術ボトルネック解消Principal Investigator

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Study of dynamical extreme ultraviolet radiation driven material interactionsPrincipal Investigator

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Processing of wide-bandgap material with intense EUV lightPrincipal Investigator

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レーザー駆動極端紫外（ＥＵＶ）光源による対材料耐力試験の可能性の実証Principal Investigator

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Study of plasma properties of EUV material ablation by particle diagnosticsPrincipal Investigator

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Performance enhancement of actively-controllable hydrogen/deuterium negative ion source

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Characteristics of negative hydrogen ions near the low work function surface in a Radio Frequency negative ion sourcePrincipal Investigator

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[Journal Article] Time-resolved measurement of radical populations in extreme-ultraviolet-light-induced hydrogen plasma2022

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[Journal Article] Energy and charge distribution of Si ions in EUV ablation plasma2021

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[Journal Article] 高強度・高フルエンスパルスEUV光による材料プロセシング2020

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[Journal Article] Mitigation of debris from a laser plasma EUV source and from focusing optics for thin film deposition by intense EUV radiation2020

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[Journal Article] Creation and Functional Control of Metal Nanoparticle-Polymer Interface by Laser Plasma EUV Light Excitation2018

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[Journal Article] Creation and Functional Control of Metal Nanoparticle-Polymer Interface by Laser Plasma EUV Light Excitation2018

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[Journal Article] Surface Layer Modification of Metal Nanoparticle Supported Polymer by Irradiation of Laser-Driven Extreme Ultraviolet Light2018

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Tanaka Nozomi 田中のぞみ

TANAKA Nozomi 田中のぞみ