KAMATAKI KUNIHIRO 鎌滝晋礼

… Alternative Names

Kamataki Kunihiro 鎌滝晋礼

KAMATAKI Kunihiro 鎌滝晋礼

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Researcher Number	60582658
Other IDs
Affiliation (Current)	2025: 九州大学, システム情報科学研究院, 准教授
Affiliation (based on the past Project Information) *help	2023 – 2024: 九州大学, システム情報科学研究院, 准教授 2018 – 2022: 九州大学, システム情報科学研究院, 助教 2016 – 2017: 九州大学, 基幹教育院, 助教 2013: 九州大学, 学内共同利用施設等, 助教 2011 – 2013: 九州大学, 基幹教育院, 助教 2011: 九州大学, 基幹研究院, 助教 2010: 九州大学, 高等教育開発推進センター, 助教
Review Section/Research Field	Principal Investigator Basic Section 14030:Applied plasma science-related / Science education / Plasma science Except Principal Investigator Medium-sized Section 14:Plasma science and related fields / Plasma electronics / Science and Engineering
Keywords	Principal Investigator プラズマCVD / プラズマプロセス / ナノ粒子成長 / プラズマ / 放電手法制御 / プラズマ制御 / 任意波形電圧放電 / 変調放電 / 時空間揺動 / 反応性プラズマ … More / 反応生プラズマ / 電場揺動 / 機械学習 / PIC-MCC / AM変調放電 / ナノ粒子生業 / 電場 / 実験教材 / アクティブ・ラーニング / 教材開発 / 科学実験 / 演示実験授業 / アクティブラーニング / プラズマ科学 / 相互作用型演示実験講義 / 物理教育 / アクティブラーニング型授業 / 科学教育 / ナノ粒子のサイズ分布 / ナノ粒子密度の二次元分布 / ナノ粒子サイズの二次元分布 / ナノ界面 / 時空間解析 / プラズマ応用 / 高速度カメラ / 二次電池 / 構造解析 / 揺らぎ / 相互作用 / 時空間構造 … More Except Principal Investigator プラズマプロセス / ゆらぎ / ナノ粒子 / EDA / 一般則 / 膜形成 / シース電場揺らぎ / 光ピンセット / エッチング / 高アスペクト比 / 高感度電場計測 / 微粒子プラズマ / 高アスペクト比エッチング / シース電場ゆらぎ / 光捕捉 / 2体問題 / 微粒子トラップ / 帯電量導出 / 電場揺動計測 / 電場計測 / 光捕捉微粒子 / 帯電量 / 微粒子 / プラズマシース / 超高感度プラズマ電場計測 / 光ピンセット法 / ３Ｄプリンティング / 第３世代太陽電池 / 電子・電気材料 / ３Dプリンティング / 電気・電子材料 / プラズマ / 揺らぎ / ボトムアッププロセス / トップダウンプロセス / コンビナトリアル摂動解析 / ボンドエンジニアリング / 相互作用 / ナノ界面制御 / プラズマ局所反応場 Less

Integration Study of General Principles of Thin Film Formation by Plasma Processes.
- Principal Investigator
  
  白谷正治
- Project Period (FY)
  2024 – 2028
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 14:Plasma science and related fields
- Research Institution
  Kyushu University
放電手法制御によるプラズマプロセス精密制御機構の解明とその応用Principal Investigator
- Principal Investigator
  
  鎌滝晋礼
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Kyushu University
Mechanism elucidation of spatio-temporal structure formation of sheath fluctuation using optically trapped fine particles in plasmas
- Principal Investigator
  
  Shiratani Masaharu
- Project Period (FY)
  2020 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 14:Plasma science and related fields
- Research Institution
  Kyushu University
Study on growth of nanoparticle in spatio-temporal electric field fluctuationPrincipal Investigator
- Principal Investigator
  
  KAMATAKI Kunihiro
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Kyushu University
Development of new practical experimental teaching materials of plasma science which can connect basic and professional science educationPrincipal Investigator
- Principal Investigator
  
  Kamataki Kunihiro
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Science education
- Research Institution
  Kyushu University
Precise control of nanoparticle deposition using plasma
- Principal Investigator
  
  Shiratani Masaharu
- Project Period (FY)
  2014 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Plasma electronics
- Research Institution
  Kyushu University
Interaction dynamics of plasma fluctuations and nano interface propertiesPrincipal Investigator
- Principal Investigator
  
  KAMATAKI KUNIHIRO
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Plasma science
- Research Institution
  Kyushu University
Bond Engineering at Nano-Interfaces using Nanoparticle Plasmas
- Principal Investigator
  
  SHIRATANI Masaharu
- Project Period (FY)
  2009 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Kyushu University

All 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 Other

All Journal Article Presentation

[Journal Article] Prediction by a hybrid machine learning model for high-mobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method2023
- Author(s)
  Kamataki Kunihiro、Ohtomo Hirohi、Itagaki Naho、Lesly Chawarambawa Fadzai、Yamashita Daisuke、Okumura Takamasa、Yamashita Naoto、Koga Kazunori、Shiratani Masaharu
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 134 Issue: 16 Pages: 163301-163301
- DOI
  10.1063/5.0160228
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K17752, KAKENHI-PROJECT-22K03586, KAKENHI-PROJECT-21K18731, KAKENHI-PROJECT-20H00142, KAKENHI-PROJECT-23K20953
[Journal Article] Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition2023
- Author(s)
  Kamataki Kunihiro、Sasaki Yusuke、Nagao Iori、Yamashita Daisuke、Okumura Takamasa、Yamashita Naoto、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
- Journal Title
  
  Materials Science in Semiconductor Processing
  
  Volume: 164 Pages: 107613-107613
- DOI
  10.1016/j.mssp.2023.107613
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22K03586, KAKENHI-PROJECT-23K03368
[Journal Article] Ion Trajectory Control in Processing Plasmas for Nano-Fabrication2023
- Author(s)
  Otomo Hiroshi、Nagao Iori、Kamataki Kunihiro、Shiratani Masaharu
- Journal Title
  
  Key Engineering Materials
  
  Volume: 967 Pages: 51-56
- DOI
  10.4028/p-6v9abp
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00142
[Journal Article] Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma2022
- Author(s)
  Otaka Michihiro、Arima Toshiaki、Lai Jiansyun、Ikeda Kizuki、Kamataki Kunihiro、Yamashita Naoto、Okumura Takamasa、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
- Journal Title
  
  MRS Advances
  
  Volume: 7 Issue: 31 Pages: 918-922
- DOI
  10.1557/s43580-022-00306-2
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22K03586, KAKENHI-PROJECT-20H00142
[Journal Article] Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma2022
- Author(s)
  K.Kamataki, D.Nagamathu, T.Yang, K.Abe, A.Yamamoto, I.Nagao, T.Arima, M.Otaka, Y.Yamamoto, D.Yamashita, T.Okumura, N.Yamashita, N.Itagaki, K.Koga, and M.Shiratani
- Journal Title
  
  AIP Advances
  
  Volume: 12 Issue: 8 Pages: 085220-085220
- DOI
  10.1063/5.0097691
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H00142
[Journal Article] Raman spectral analysis of theas-deposited a-C:H films prepared by CH4+Ar plasma CVD2022
- Author(s)
  Shinjiro Ono, Sung Hwa Hwang,Takamasa Okumura, Kunihiro Kamataki, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi, Tatsuyuki Nakatani
- Journal Title
  
  MRS Advances
  
  Volume: 7 Issue: 30 Pages: 718-718
- DOI
  10.1557/s43580-022-00310-6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00142
[Journal Article] One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges2022
- Author(s)
  I.Nagao,K.Kamataki1,A.Yamamoto,M.Otaka,Y.Yamamoto,D.Yamashita,N.Yamashita,T.Okumura,N.Itagaki,K.Koga,M.Shiratani
- Journal Title
  
  MRS Advances
  
  Volume: 7 Issue: 31 Pages: 911-911
- DOI
  10.1557/s43580-022-00417-w
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H00142
[Journal Article] Comparison between Ar+CH4 cathode and anode coupling chemical vapor depositions of hydrogenated amorphous carbon films2021
- Author(s)
  Hwang Sung-Hwa、Iwamoto Ryosuke、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakatani Tatsuyuki、Shiratani Masaharu
- Journal Title
  
  Thin Solid Films
  
  Volume: 729 Pages: 138701-138701
- DOI
  10.1016/j.tsf.2021.138701
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142, KAKENHI-PROJECT-20J13122, KAKENHI-PROJECT-21K18731, KAKENHI-PROJECT-23K20953
[Journal Article] Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition2020
- Author(s)
  Hwang Sung-Hwa、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
- Journal Title
  
  Diamond and Related Materials
  
  Volume: 109 Pages: 108050-108050
- DOI
  10.1016/j.diamond.2020.108050
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142, KAKENHI-PROJECT-18H01206, KAKENHI-PROJECT-20J13122, KAKENHI-PROJECT-19K21978
[Journal Article] Low-stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition2020
- Author(s)
  Hwang Sung-Hwa、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakatani Tatsuyuki、Shiratani Masaharu
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 59 Issue: 10 Pages: 100906-100906
- DOI
  10.35848/1347-4065/abbb20
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142, KAKENHI-PROJECT-18H01206, KAKENHI-PROJECT-20J13122, KAKENHI-PROJECT-19K21978
[Journal Article] Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method2020
- Author(s)
  Hwang Sung Hwa、Koga Kazunori、Hao Yuan、Attri Pankaj、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Shiratani Masaharu、Oh Jun-Seok、Takabayashi Susumu、Nakatani Tatsuyuki
- Journal Title
  
  Processes
  
  Volume: 9 Issue: 1 Pages: 2-2
- DOI
  10.3390/pr9010002
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142, KAKENHI-PROJECT-18H01206, KAKENHI-PROJECT-20J13122, KAKENHI-PROJECT-19K21978
[Journal Article] Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma2019
- Author(s)
  (1)Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunoni Koga and Masaharu Shiratani
- Journal Title
  
  Plasma and Fusion Research
  
  Volume: 14 Issue: 0 Pages: 4406120-4406120
- DOI
  10.1585/pfr.14.4406120
- NAID
  130007723651
- ISSN
  1880-6821
- Year and Date
  2019-09-09
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K03809
[Journal Article] Effects of Gas Pressure on Size Distribution and Structure of Carbon Nanoparticles Using Ar + CH4 Multi-Hollow Discharged Plasma Chemical Vapor Deposition2019
- Author(s)
  Sung Hwa Hwang, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga and Masaharu Shiratani
- Journal Title
  
  Plasma and Fusion Research
  
  Volume: -
- NAID
  130007723652
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26246036
[Journal Article] 初年次学生における電磁気学の理解を深めるプラズマ実験授業2017
- Author(s)
  鎌滝晋礼
- Journal Title
  
  第66回九州地区大学一般教育研究協議会議事録
  
  Volume: 66 Pages: 77-81
- NAID
  40021533900
- Data Source
  KAKENHI-PROJECT-16K16308
[Journal Article] 課題協学科目による初年次学生の動機づけと学習観への影響　1つの授業実践の事例から2017
- Author(s)
  鎌滝晋礼
- Journal Title
  
  基幹教育紀要
  
  Volume: 3 Pages: 33-46
- NAID
  120005981122
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K16308
[Journal Article] Deposition rate and etching rate due to neutral radicals and dust particles measured using QCMs together with a dust eliminating filter2015
- Author(s)
  R. Katayama, K. Koga, D. Yamashita, K. Kamataki, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, M. Tokitani, S. Masuzaki, K. Nishimura, A. Sagara, LHD Experimental Group
- Journal Title
  
  Proc. 68th GEC/9th ICRP/33rd SPP
  
  Volume: 60
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Journal Article] Effects of electrode structure on characteristics of multi-hollow discharges2015
- Author(s)
  Y. Torigoe, K. Keya, S. Toko, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani
- Journal Title
  
  Proc. 68th GEC/9th ICRP/33rd SPP
  
  Volume: 60
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Journal Article] Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas2014
- Author(s)
  M.Shiratani, K.Koga, K.Kamataki, S.Iwashita, G.Uchida, H.Seo, and N.Itagaki
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 53巻 Pages: 10201-10201
- NAID
  210000143213
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Spatial Profile of Flux of Dust Particles Generated Due to Interaction between Hydrogen Plasmas and Graphite Target2014
- Author(s)
  Mizuki Tateishi, Kazunori Koga, Daisuke Yamashita, Kunihiro Kamataki, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki, Masaharu Shiratani, Naoko Ashikawa, Suguru Masuzaki, Kiyohiko Nishimura, Akio Sagara
- Journal Title
  
  JPS Conf. Proc.
  
  Volume: 1 Pages: 15020-15020
- DOI
  10.7566/jpscp.1.015020
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Correlation between Nanoparticle Growth and Plasma Parameters in Low Pressure Reactive VHF Discharge Plasmas2014
- Author(s)
  Masaharu Shiratani, Yasuhiko Morita, Kunihiro Kamataki, Hyunwoong Seo, Giichiro Uchida, Naho Itagaki, Kazunori Koga
- Journal Title
  
  JPS Conf. Proc.
  
  Volume: 1 Pages: 15083-15083
- DOI
  10.7566/jpscp.1.015083
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas2014
- Author(s)
  M. Shiratani, K. Koga, K. Kamataki, S. Iwashita, G. Uchida, H. Seo, and N. Itagaki
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 53 Issue: 1 Pages: 10201-10201
- DOI
  10.7567/jjap.53.010201
- NAID
  210000143213
- Peer Reviewed
- Data Source
  KAKENHI-ORGANIZER-21110001, KAKENHI-PLANNED-21110005
[Journal Article] Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si and SiH2013
- Author(s)
  Y. Kim, K. Hatozaki, Y. Hashimoto, G. Uchida, K. Kamataki, N. Itagaki, H. Seo, K. Koga, and M. Shiratani
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 11S Pages: 11NA07-11NA07
- DOI
  10.7567/jjap.52.11na07
- NAID
  210000143093
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD2013
- Author(s)
  Y.Kim, T.Matsunaga, K.Nakahara, H.Seo, K.Kamataki, G.Uchida, N.Itagaki, K.Koga, M.Shiratani
- Journal Title
  
  Surf. Coat. Technol.
  
  Volume: Vol.228
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Correlation between Volume Fraction of Silicon Clusters in Amorphous Silicon Films and Optical Emission Properties of Si and SiH2013
- Author(s)
  Y.Kim, K.Hatozaki, Y.Hashimoto, G.Uchida, K.Kamataki, N.Itagaki, H.Seo, K.Koga, and M.Shiratani
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol.52
- NAID
  210000143093
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] The reduction of charge recombination and performance enhancement by the surface modification of Si quantum dot-sensitized solar cell2013
- Author(s)
  Hyunwoong Seo, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Journal Title
  
  Electrochimica Acta
  
  Volume: 87 Pages: 213-217
- DOI
  10.1016/j.electacta.2012.09.087
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD2013
- Author(s)
  Y. Kim, T. Matsunaga, K. Nakahara, H. Seo, K. Kamataki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani
- Journal Title
  
  Surf. Coat. Technol.
  
  Volume: 228 Pages: S550-S553
- DOI
  10.1016/j.surfcoat.2012.04.029
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005, KAKENHI-ORGANIZER-21110001
[Journal Article] Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates2013
- Author(s)
  K. Koga, M. Tateishi, K. Nishiyama, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Muzaki, K. Nishimura, Akiko Sagara, the LHD Experimental Group
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 11S Pages: 11NA08-11NA08
- DOI
  10.7567/jjap.52.11na08
- NAID
  210000143094
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Observation of nanoparticle growth process using a high speed camera2013
- Author(s)
  Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga, and M. Shiratani
- Journal Title
  
  ISPC 21 Proceedings
  
  Volume: - Pages: 264-264
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Coreshell nanoparticles generated by plasma CVD and their applications to Li ion batteries2013
- Author(s)
  M. Shiratani, Y. Morita, K. Kamataki, Y. Kanemitsu, D. Ichida, G. Uchida, H. Seo, N. Itagaki and K. Koga
- Journal Title
  
  ISPC 21 Proceedings
  
  Volume: - Pages: 212-212
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] the LHD Experimental Group, Flux Control of Carbon Nanoparticles Generated due to Interactions between Hydrogen Plasmas and Graphite Using DC-Biased Substrates2013
- Author(s)
  K.Koga, M.Tateishi, K.Nishiyama, G.Uchida, K.Kamataki, D.Yamashita, H.Seo, N.Itagaki, M.Shiratani, N.Ashikawa, S.Muzaki, K.Nishimura, Akiko Sagara
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol.52
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage2012
- Author(s)
  Kunihiro Kamataki, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Daisuke Yamashita, Hidefumi Matsuzaki, Masaharu Shiratani
- Journal Title
  
  Thin Solid Films
  
  Volume: Vol.523 Pages: 76-76
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] The Optical Analysis and Application of Size-controllable Si Quantum Dots Fabricated by Multi-hollow Discharge Plasma Chemical Vapor Deposition2012
- Author(s)
  Hyunwoong Seo, Yuting Wang, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Journal Title
  
  Materials Research Society Symposium Proceedings 2012 MRS Spring Meeting
  
  Volume: 426 Pages: 313-318
- DOI
  10.1557/opl.2012.890
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma CVD2012
- Author(s)
  Yeonwon Kim, Takeaki Matsunaga, Kenta Nakahara ,Giichiro Uchida, Kunihiro Kamataki , Naho Itagaki, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani
- Journal Title
  
  Thin Solid Films
  
  Volume: 523 Pages: 29-33
- DOI
  10.1016/j.tsf.2012.06.023
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances2012
- Author(s)
  Yeonwon Kim, Kosuke Hatozaki, Yuji Hashimoto, Hyunwoong Seo, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Journal Title
  
  Materials Research Society Symposium Proceedings 2012 MRS Spring Meeting
  
  Volume: 1426 Pages: 307-311
- DOI
  10.1557/opl.2012.839
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] In situ analysis of size dispersion of nano-particles in reactive plasmas using two dimensional laser light scattering method2012
- Author(s)
  K. Kamataki, Y. Morita, M. Shiratani, K. Koga, G. Uchida and N. Itagaki
- Journal Title
  
  Journal of Instrumentation (JINST)
  
  Volume: Vol. 7 Issue: 04 Pages: C04017-C04017
- DOI
  10.1088/1748-0221/7/04/c04017
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23740408, KAKENHI-ORGANIZER-21110001
[Journal Article] Impacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasmas2011
- Author(s)
  K.Kamataki, H.Miyata, K.Koga, G.Uchida, N.Itagaki, M.Shiratani
- Journal Title
  
  Applied Physics Express
  
  Volume: Vol.4 Pages: 100501-100501
- NAID
  10029790770
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD2011
- Author(s)
  K.Kamataki, K.Koga, G.Uchida, N.Itagaki, M.Shiratani
- Journal Title
  
  Proceedings of Plasma Conference 2011
- Data Source
  KAKENHI-PLANNED-21110005
[Journal Article] Effects of Amplitude Modulation of rf Discharge Voltage on Growth of Nano-Particles in Reactive Plasmas2010
- Author(s)
  K.Kamataki, H.Miyata, K.Koga, G.Uchida, N.Itagaki, D.Yamashita, H.Matsuzaki, M.Shiratani
- Journal Title
  
  Proc.of IEEE TENCON 2010
  
  Pages: 1943-1947
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Highly sensitive electric field vector measurements using an optically trapped fine particle2023
- Author(s)
  M. Shiratani, T. Sato, K. Kamataki, S. W. Fitriani，K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga
- Organizer
  Global Plasma Forum
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 放電電圧変調波形が高周波容量結合プラズマに与える影響：PIC-MCC シミュレーション2023
- Author(s)
  長尾伊織，山本祐馬，佐藤優志，鎌滝晋礼，山下尚人, 奥村賢直，木山治樹，板垣奈穂，古閑一憲，白谷正治
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] 任意電圧波形放電による容量結合プラズマにおける重畳周波数の効果：PIC-MCCモデル2023
- Author(s)
  頼建勳, 鎌滝晋礼, 山下大輔, 奥村賢直, 山下尚人, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  2023年(令和5年度)応用物理学会九州支部学術講演
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] Ion Trajectory Control in Processing Plasmas for Nano-Fabrication2023
- Author(s)
  M. Shiratani, H. Ohtomo, I. Nagao, K. Kamataki
- Organizer
  IWOPA4
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(4)2023
- Author(s)
  鎌滝晋礼, 佐藤斗真, 井口恒聖, 富田健太郎, P. Yiming, 山下大輔, 山下尚人, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Effects of lower discharge frequency on ion energy distribution function in dual frequency plasma studied by particle-in-cell/Monte Carlo method2023
- Author(s)
  J. Lai, T. Arima, M. Otaka, K. Ikeda, I. Nagao, K. Kamataki, D. Yamashita, N. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani
- Organizer
  ICPIG2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] 任意波形放電による水素化アモルファスカーボン成膜：イオンフラックスが膜質に与える影響2023
- Author(s)
  脇田大地，大高真寛，池田築，頼建勲，大友洋，鎌滝晋礼，山下直人，板垣奈穂，古閑一憲，白谷正治，進藤崇央，松土龍夫
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] Measurement of fluctuation of electric field in Ar plasmas using a fine particle trapped with laser tweezers2023
- Author(s)
  TomaSato,SakyoOkunaga,KunihiroKamataki,KentaroTomita,PanYiming,DaisukeYamashita,TakamasaOkumura,NahoItagaki,KazunoriKoga,MasaharuShiratani
- Organizer
  7thInternationalConferenceonAdvancesinFunctionalMaterials(AFM2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Effects of tailored voltage waveform discharges on deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma2023
- Author(s)
  M. Otaka, H. Otomo, K. Ikeda, J. Lai, K. Kamataki, T. Okumura, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo
- Organizer
  ICPIG2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering2023
- Author(s)
  K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani
- Organizer
  MRM2023/IUMRS-ICA2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] PECVD を用いた a-C:H 成膜における添加希ガス種における成膜機構の違い2023
- Author(s)
  池田築, 大高真寛，大友洋，脇田大地，頼建勲，鎌滝晋礼, 山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲, 白谷正治, 進藤崇央，松土龍夫
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] Investigation of particle charge and interparticle interaction in a plasma2023
- Author(s)
  K. Kamataki, T. Sato, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  ICPIG2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] プラズマ中帯電微粒子の相互作用に関する研究2023
- Author(s)
  井口恒聖、佐藤斗真、奥永冴京、鎌滝晋礼、富田健太郎、Pan Yiming、山下大輔、奥村賢直、板垣奈穂、古閑一憲、白谷正治
- Organizer
  2023年度日本表面真空学会　九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Control of ion trajectory in high aspect ratio trenches by using amplitude modulated rf discharges2023
- Author(s)
  Nagao, Y. Yamamoto, K. Kamataki, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  ICPIG2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] Optical tweezers technique for electric field strength and fluctuation measurements in plasma using a fine particle2023
- Author(s)
  T. Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  ICPIG2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] プラズマ中に浮遊する微粒子の帯電量の新評価法2023
- Author(s)
  井口恒聖, 佐藤斗真, 鎌滝晋礼, 富田健太郎, P. Yiming, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  2023年(令和5年度)応用物理学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 任意波形放電を用いた水素化アモルファスカーボン膜の膜質制御2023
- Author(s)
  大高真寛,大友洋, 池田築, 頼建勲, 脇田大地, 鎌滝晋礼, 山下直人, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(3)2023
- Author(s)
  鎌滝晋礼,佐藤斗真,富田健太郎,PanYiming,山下大輔,山下尚人,奥村賢直,板垣奈穂,古閑一憲,白谷正治
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Effects of Ne mixing on plasma enhanced chemical vapor deposition of a-C:H films using CH4/Ar/Ne capacitively coupled discharges2023
- Author(s)
  K. Ikeda, M. Otaka, H. Otomo, T. Arima, J. Lai, K. Kamataki, D. Yamashita, T. Okumura, N. Yamashita, H. Kiyama, N. Itagaki, K. Koga, M. Shiratani, T. Shindo, S. Tanaka, T. Matsudo
- Organizer
  ICPIG2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03368
[Presentation] Predictions for High Quality Amorphous ITO(In2O3:Sn) Film Formation via Hybrid Machine Learning Model2023
- Author(s)
  K. Kamataki, N. Itagaki, D. Yamashita, T. Okumura, N. Yamashita, K. Koga, M. Shiratani
- Organizer
  The 16th International NANO 4.0 Convergence Technology Symposium
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] プラズマスパッタによる高移動度アモルファスITO成膜におけるハイブリッド機械学習モデル2023
- Author(s)
  鎌滝晋礼, 板垣奈穂, 山下大輔, 奥村賢直, 山下尚人, 古閑一憲, 白谷正治
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Electric fields measurement using an optical trapped charged particle in Ar plasma2022
- Author(s)
  KunihiroKamataki,TomaSato,KentaroTomita,PanYiming,DaisukeYamashita,TakamasaOkumura,NahoItagaki,KazunoriKoga,MasaharuShiratani
- Organizer
  第32回日本MRS
- Invited
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers2022
- Author(s)
  KunihiroKamataki,TomaSato,KentaroTomita,PanYiming,DaisukeYamashita,TakamasaOkumura,NahoItagaki,KazunoriKoga,MasaharuShiratani
- Organizer
  23rdWorkshoponFineParticlePlasma
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Investigation of Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma2022
- Author(s)
  TomaSato,SakyoOkunaga,KunihiroKamataki,KentaroTomita,PanYiming,DaisukeYamashita,TakamasaOkumura,NahoItagaki,KazunoriKoga,MasaharuShiratani
- Organizer
  2022 MRS spring meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Measurement of the charge on single fine particle in plasma2022
- Author(s)
  KunihiroKamataki,TomaSato,KentaroTomita,PanYiming,DaisukeYamashita,TakamasaOkumura,NahoItagaki,KazunoriKoga,MasaharuShiratani
- Organizer
  第32回日本MRS
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測(2)2022
- Author(s)
  鎌滝晋礼,佐藤斗真,富田健太郎,PanYiming,山下大輔,山下尚人,奥村賢直,板垣奈穂,古閑一憲,白谷正治
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Development of measurement of two-dimensional distribution of strength of electrical field with high spatial resolution using optical trapped particle in plasma2022
- Author(s)
  KunihiroKamataki,SakyoOkunaga,TomaSato,KentaroTomita,PanYiming,DaisukeYamashita,TakamasaOkumura,NahoItagaki,KazunoriKoga,MasaharuShiratani
- Organizer
  2022 MRS spring meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Investigation of relationship between growth of nanoparticle and plasma generation due to amplitude modulated discharge voltage in TEOS plasma2022
- Author(s)
  Kunihiro Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Organizer
  The 39th Symposium on Plasma Processing/The 34th Symposium on Plasma Science for Materials (SPP-39/SPSM34)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] 光ピンセット技術を用いたプラズマ中微粒子への作用力の絶対値校正2022
- Author(s)
  佐藤斗真, 奥永冴京, 鎌滝晋礼, 富田健太郎, P. Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第24回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 光捕捉微粒子による超高感度電場計測2022
- Author(s)
  鎌滝晋礼
- Organizer
  令和３年度東北大学電気通信研究所共同プロジェクト研究会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 光ピンセットによる捕捉微粒子を用いたArプラズマ中の電場強度分布及び電場揺動計測2022
- Author(s)
  鎌滝晋礼, 奥永冴京, 佐藤斗真, 富田健太郎, P. Yiming, 山下大輔, 山下尚人,奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Optical tweezers technique for electric field measurements in Ar plasmas using a fine particle2022
- Author(s)
  TomaSato,KunihiroKamataki,KentaroTomita,PanYiming,DaisukeYamashita,TakamasaOkumura,NahoItagaki,KazunoriKoga,MasaharuShiratani
- Organizer
  6thAsia-PacificConferenceonPlasmaPhysics(AAPPS-DPP2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Measurements of strength and fluctuation of 2D electric fields in plasmas using a fine particle trapped with laser tweezers2022
- Author(s)
  KunihiroKAMATAKI,TomaSATO,KentaroTOMITA,PanYIMIN,DaisukeYAMASHITA,NaotoYAMASHITA,TakamasaOKUMURA,NahoITAGAKI,KazunoriKOGA,MasaharuSHIRATANI
- Organizer
  ICRP-11/GEC2022
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Effect of rf bias on properties of amorphous silicon oxide films deposited by plasma enhanced chemical vapor deposition2021
- Author(s)
  Akihiro Yamamoto, Kohei Abe, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga1, Masaharu Shiratani
- Organizer
  MRM2021, Materials Research Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Study of effect of amplitude modulated discharge on growth of nanoparticles in TEOS plasma2021
- Author(s)
  M.Shiratani, K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga
- Organizer
  DPS2021, 42nd International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] SiH4+N2 プラズマによる SiNx の低温高品質成膜2021
- Author(s)
  鎌滝晋礼 , 佐々木勇輔 , 奥村賢直，板垣奈穂，古閑一憲，白谷正治
- Organizer
  シリコンテクノロジー分科会第227回研究集会
- Invited
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model2021
- Author(s)
  Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Organizer
  MRM2021, Materials Research Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] PIC-MCCMを用いた平行平板容量結合プラズマに対する放電周波数依存性に関する研究2021
- Author(s)
  陶陽，阿部滉平，鎌滝晋礼，山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲，白谷正治
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第 25 回支部大会
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Arプラズマ中の光捕捉微粒子への作用力の研究2021
- Author(s)
  鎌滝晋礼,奥永冴京, 岩本亮介, 富田健太郎, P.Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] プラズマCVD中飛行時間によるカーボンナノ粒子サイズ制御2021
- Author(s)
  古閑一憲, S. H. Hwang, Y. Hao, P. Attir, 奥村賢直，鎌滝晋礼，板垣奈穂, 白谷正治
- Organizer
  日本物理学会第76回年次大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Better step coverage of TEOS-PECVD SiO2 films realized by amplitude modulation of RF discharge voltage2021
- Author(s)
  K. Kamataki, K. Abe, A. Yamamoto, I. Nagao, M. Otaka, D. Yamashita, N. Itagaki, T. Okumura, K. Koga, M. Shiratani, S. Tahara, Y. Mizokami, Y. Miyata, K. Tabuchi, T. Tanikuni, S. Hiyama, K. Nagahata
- Organizer
  DPS2021, 42nd International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Predictive analytics in plasma process using machine learning tools and techniques2021
- Author(s)
  Kunhiro KAMATAKI, Chen Feiyu, Tao Yang, Sakyo Okunaga, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Organizer
  1st Workshop on Artificial Intelligence in Plasma Science - Satellite Workshop of EU-Japan Joint Symposium on Plasma Processing
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Calibration of force acting on an optically trapped particle in Ar plasma2021
- Author(s)
  S. Okunaga, T. Sato, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, T. Okumura, N.Itagaki, K. Koga, M. Shiratani
- Organizer
  Materials Research Meeting 2021 (MRM2021）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Investigation of growth suppression mechanism of nanoparticles through amplitude modulation discharge method in TEOS plasma2021
- Author(s)
  Kunihiro. Kamataki, Kohei Abe, Akihiro Yamamoto, Iori Nagao, Michihiro Otaka, Daisuke Yamashita, Naho Itagaki, Takamasa Okumura, Kazunori Koga, Masaharu Shiratani
- Organizer
  The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Investigation of 2D electric field measurements in Ar plasmas using a fine particle trapped with laser tweezers2021
- Author(s)
  K. Kamataki, S. Okunaga, T. Sato, K. Tomita, P. Yimin, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  Materials Research Meeting 2021 (MRM2022）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Electric Field Measurements in Ar plasmas using a Fine Particle Trapped with Optical Tweezers2021
- Author(s)
  S. Okunaga, K. Kamataki, K. Tomita, P. Yimin, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  ISPlasma2021/IC-PLANTS2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Study on growth of nanoparticle in TEOS plasma-CVD using amplitude modulation discharge method2021
- Author(s)
  K.Abe, A.Yamamoto, I.Nagao, M.Otaka, D.Yamashita, K.Kamataki, T.Okumura, N.Itagaki, K.Koga, M.Shiratani
- Organizer
  5th Asia-Pacific Conference on Plasma Physics(AAPPS-DPP2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] 2D electric field measurements in Ar plasmas using a fine particle trapped with optical tweezers2021
- Author(s)
  S. Okunaga, K. Kamataki, K. Tomita, Y. Pan, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  Plathinium 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Developing Prediction of Key Process Parameters of Plasma CVD for Fabricating a-Si:H Solar Cells through Boosting Technique2021
- Author(s)
  Chen Feiyu, Kunihiro Kamataki, Tao Yang, Sakyo Okunaga, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Organizer
  MRM2021, Materials Research Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Study on measurement of strength and fluctuation of electrical field using optical trapped particle in Ar plasma2021
- Author(s)
  K. Kamataki, S. Okunaga, T. Sato, K. Tomita, P. Yimin, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  5th Asia-Pacific Conference on Plasma Physics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] N2/SiH4 flow rate ratio dependence of nanoparticle incorporation in SiNx films deposited by plasma CVD2021
- Author(s)
  M. Shiratani, Y. Sasaki, K. Kamataki, N. Itagaki, K. Koga
- Organizer
  MRM2021, Materials Research Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] 平行平板容量結合高周波放電プラズマのAM変調周波数依存性に関するPIC-MCCシミュレーション2021
- Author(s)
  長尾伊織，阿部滉平，山本晃大，鎌滝晋礼，山下大輔，奥村賢直，山下尚人，板垣奈穂，古閑一憲，白谷正治
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第 25 回支部大会
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] 振幅変調放電プラズマ中の光捕捉微粒子の挙動に関する研究2021
- Author(s)
  鎌滝晋礼, 奥永冴京, 佐藤斗真, 富田健太郎, Pan Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 任意波形励起プラズマ CVD 法による a-C:H 膜質の制御2021
- Author(s)
  岩本亮介, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Measurement of Radial and Vertical Electric Field in Capacitively Coupled Plasma2021
- Author(s)
  Tao Yang, Daiki Nagamatsu, Kunihiro Kamataki, Daisuke Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Organizer
  MRM2021, Materials Research Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Particle-In-Cellモンテカルロ衝突モデルによる容量結合型Arプラズマにおける下部バイアス電圧印加シミュレーション2021
- Author(s)
  阿部滉平, 山本晃大, 長尾伊織, 大高真寛, 山下大輔, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  令和3年度日本表面真空学会　九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Study of Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma2021
- Author(s)
  T. Sato, S. Okunaga, K. Kamataki, K. Tomita, P. Yiming, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  Materials Research Meeting 2021 (MRM2021）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] ナノ粒子取り込みによる SiNx の低温プラズマ CVD 製膜2021
- Author(s)
  佐々木勇輔, 吉田知晃, 阿部滉平, 山本晃大, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Low temperature fabrication of SiO2 films using capacitively coupled TEOS plasma2020
- Author(s)
  Y. Sasaki, T. Yoshida, K. Abe, K. Yamamoto, K. Kamataki, T. Okumura, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  The 21st Workshop on Fine Particle Plasmas
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] PECVD における任意電圧波形を用いた a-C:H 成膜2020
- Author(s)
  永松大樹, 岩本亮介, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 進藤崇央, 田中諭志, 松土龍夫
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第31回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] PIC-MCCMを用いたCCPにおけるIEDに関する研究2020
- Author(s)
  阿部滉平, 陶陽, 岩本亮介, 佐々木勇輔, 吉田知晃, 山下大輔, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第28回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 低温環境下におけるプラズマCVDによる高品質保護膜の作製2020
- Author(s)
  鎌滝晋礼, 吉田知晃, 佐々木勇輔, 阿部滉平, 岩本亮介, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  日本物理学会 2020年秋季大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] アルゴンプラズマ中光捕捉微粒子への作用力の校正2020
- Author(s)
  奥永冴京, 鎌滝晋礼, 富田健太郎, Pan Yiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治,
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第24回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] TEOSプラズマCVDを用いたSiO2膜の形成:基板バイアス電圧依存性2020
- Author(s)
  山本晃大, 吉田智晃, 阿部滉平, 佐々木勇輔, 山下大輔, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第26回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] マルチホロー放電プラズマ CVDを用いて作製したカーボンナノ粒子輸送量に対する電極基板間距離の効果2020
- Author(s)
  古閑一憲,　S. H. Hwang,　奥村賢直,　Y. Hao,　山下大輔,　松尾かよ,　板垣奈穂,　鎌滝晋礼,　白谷正治
- Organizer
  2020年度(第73回)電気・情報関係学会九州支部連合大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 容量結合プラズマCVD法によるSiO2膜の低温製膜2020
- Author(s)
  佐々木勇輔, 吉田知晃, 阿部滉平, 山本晃大, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第25回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Future prospects of Plasma-nano interface (Invited)2020
- Author(s)
  K. Kamataki
- Organizer
  Satellite meeting of AAPPS-DPP2020：Workshop on cutting-edge of plasma applications
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] プラズマCVDにおけるナノ粒子成長とプラズマ生成の関係2020
- Author(s)
  白谷正治, 古閑一憲, 鎌滝晋礼, 吉田知晃, 佐々木勇輔, 阿部滉平
- Organizer
  第37回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Study on Film Deposition Process using Spatial Profiles of Plasma Parameters and Nanoparticles in Reactive Plasma2020
- Author(s)
  K. Kamataki, T. Yoshida, Y. Sasaki, K. Abe, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  The 22st Workshop on Fine Particle Plasmas
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 光ピンセットによる捕捉微粒子を用いたアルゴンプラズマの等電場面計測2020
- Author(s)
  奥永冴京, 岩本亮介, 鎌滝晋礼, 富田健太郎, PanYiming, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films2020
- Author(s)
  Kunihiro Kamataki, Tomoaki Yoshida, Yusuke Sasaki, Kohei Abe, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani
- Organizer
  AAPPS-DPP2020 e-conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] 光ピンセットによる捕捉微粒子の揺動解析2020
- Author(s)
  鎌滝晋礼, 奥永冴京, 岩本亮介, 富田健太郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Information on electric field deduced using a fine particle trapped with laser tweezers in Ar plasma2020
- Author(s)
  K. Kamataki, S. Okunaga, K. Tomita, D. Yamashita, T. Okumura, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  The 73rd Annual Gaseous Electronics Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Ar+CH4 マルチホロー放電プラズマCVDで作製したカーボンナノ粒子のフラックスに対する熱泳動力の効果2020
- Author(s)
  郭源, 吉川大智, 黄成和, 古閑一憲, 白谷正治, 鎌滝晋礼, 板垣奈穂, 奥村賢直
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第29回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] 反応性プラズマ中のナノ粒子制御によるSiNx膜の低温作製2020
- Author(s)
  鎌滝晋礼, 吉田知晃, 阿部滉平, 佐々木勇輔, 永石翔太, 岩本亮介, 山下大輔，板垣奈穂，古閑一憲，白谷正治
- Organizer
  日本物理学会第75回年次大会
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] プラズマCVDを用いたa-Si：H堆積薄膜中のSi-H/Si-H2結合形成の活性化エネルギー2020
- Author(s)
  古閑一憲, 鎌滝晋礼, 奥村賢直, 板垣奈穂, 白谷正治
- Organizer
  日本物理学会 2021年秋季大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] Relations among spatial profiles of plasma parameters, growth of nanoparticles in reactive plasma and properties of fabricated thin films2020
- Author(s)
  K. Kamataki
- Organizer
  4th Asia Pacific Conference on Plasma Physics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] CCPにおける径方向電場Eyの計測の試み2020
- Author(s)
  陶陽, 岩本亮介, 阿部滉平, 鎌滝晋礼, 山下大輔, 奥村賢直, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第30回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] プラズマ CVD におけるナノ粒子成長とプラズマ生成の関係2020
- Author(s)
  吉田知晃, 阿部滉平, 佐々木勇輔, 山本晃大, 山下大輔, 奥村賢直, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  令和2年度プラズマ・核融合学会　九州・沖縄・山口支部　第27回支部大会
- Data Source
  KAKENHI-PROJECT-20H00142
[Presentation] プラズマに関する学生実験が受講者の動機付けに与える影響2019
- Author(s)
  鎌滝晋礼，大友洋, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  2019年第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] Developing Prediction of Amorphization Condition Models from Sputter Deposition Experimental Results by Machine Learning Method2019
- Author(s)
  K. Kamataki, R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  Materials Research Meeting 2019 (MRM2019）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Low Temperature Fabrication of Low Hydrogen Content SiN films in a Multi-Hollow Discharge Plasma CVD2019
- Author(s)
  K. Kamataki, S. Nagaishi, Y. Sasaki, H. Hara, D. Yamashita, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  XXXIV ICPIG & ICRP-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Investigation of Impact of Plasma Fluctuation Driven by Amplitude Modulated VHF Discharge on Growth of Nanoparticles in Reactive Plasma2019
- Author(s)
  K. Kamataki, R. Iwamoto, H. Tanaka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  Materials Research Meeting 2019 (MRM2019）
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Low temperature fabrication of passivation films by plasma enhanced CVD2019
- Author(s)
  Kunihiro KAMATAKI
- Organizer
  7th Korea-Japan Joint Symposium on Advanced Solar Cells 2020& 4th International Symposium on Energy Research and Application
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Predictive insight based on grey box analysis of plasma process data2019
- Author(s)
  Kunihiro Kamataki, Masaharu Shiratani
- Organizer
  2nd International Conference on Data-Driven Plasma Science(ICDDPS2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Study on Relationship between Growth of Nanoparticles and Plasma Fluctuation due to Amplitude Modulated Discharge Voltage in Capacitively Coupled Reactive Plasma2019
- Author(s)
  K. Kamataki, R. Zhou, H. Ohtomo, R. Iwamoto, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  XXXIV ICPIG & ICRP-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Investigation of Spatiotemporal Structure of Fluctuation Related with Nanoparticle Growth in Amplitude-Modulated VHF Discharge Reactive Plasma2019
- Author(s)
  Kunihiro Kamataki, Ryosuke Iwamoto, Hayate Tanaka, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu Shiratani
- Organizer
  The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Developing Prediction of Key Plasma Processing Parameter from Small Data of Experimental Results by Machine Learning Method2019
- Author(s)
  K. Kamataki, R. Iwamoto, S. Okunaga, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  The 12th Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] Deposition Control of Carbon Nanoparticles Synthesized by Using Ar + CH4 Multi-Hollow Discharge Plasma CVD Method2019
- Author(s)
  S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] AM変調反応性プラズマにおけるナノ粒子成長揺動に関する時空間情報解析2019
- Author(s)
  鎌滝晋礼, 田中颯,山下大輔,板垣奈穂,古閑一憲,白谷正治
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] 反応性プラズマにおけるナノ粒子生成制御2019
- Author(s)
  鎌滝晋礼, 永石翔大, 佐々木勇輔, 原尚志, 岩本亮介, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第36回プラズマ・核融合学会年会
- Invited
- Data Source
  KAKENHI-PROJECT-19K03809
[Presentation] 反応性プラズマにおけるプラズマ揺らぎとナノ粒子揺らぎの関係2018
- Author(s)
  鎌滝晋礼
- Organizer
  第45回西日本放電懇談会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Effects of CH4 Concentration on Size of Carbon Nano-Particles Formed in Multi-hollow Discharge Plasma2018
- Author(s)
  H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  6th UK-Japan Engineering Education League Workshop 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] A deep insight of plasma-nanoparticle interaction2018
- Author(s)
  Kazunori Koga, Kunihiro Kamataki, Naho Itagaki and Masaharu Shiratani
- Organizer
  19th International Congress on Plasma Physics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] プラズマ科学を用いた教育2018
- Author(s)
  鎌滝晋礼
- Organizer
  第45回西日本放電懇談会
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] 知識伝達型授業における部分的AL導入の効果～初年次教育における物理授業を一例として～2018
- Author(s)
  鎌滝晋礼
- Organizer
  日本物理学会年会
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] Motion analysis of inter-particle interactions of three fine particles in Ar plasma2018
- Author(s)
  H.Ohtomo, R.Zhou, D.Yamashita, K.Kamataki, N.Itagaki, K.Koga, and M.Shiratani
- Organizer
  40th International Symposium on Dry Process (DPS2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Spatial-Structure of Density Fluctuation of Nanoparticles in Amplitude Modulated Capactively Coupled Plasma2018
- Author(s)
  Ren Zhou, Kunihiro Kamataki, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
- Organizer
  2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Size and Structure Control of Carbon Nano-particles Synthesized by Multi-hollow Discharge Plasma CVD Method2018
- Author(s)
  S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani
- Organizer
  28th Annual Meeting of MRS-Japan 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] 反応性プラズマ中のナノ粒子量揺らぎの構造解析2018
- Author(s)
  周靭,鎌滝晋礼,大友洋,山下大輔,板垣奈穂,古閑一憲,白谷正治
- Organizer
  第35回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Growth Kinetics of Carbon Nano Particles Generated in an Ar/CH4 Multi-Hollow Discharge Plasmas2018
- Author(s)
  H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  第35回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Effects of DC Bias Voltage on Deposition of Carbon Nano Particles Synthesized by Ar + CH4 Multi-Hollow Discharge Plasma2018
- Author(s)
  S. H Hwang, K. Kamataki, N. Itagaki, K. Koga and M. Shiratani
- Organizer
  The 3rd Asian Applied Physics Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Arプラズマ中微粒子の相互作用の評価2018
- Author(s)
  大友洋，周靭，山下大輔，鎌滝晋礼，板垣奈穂，古閑一憲，白谷正治
- Organizer
  第35回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] 反応性プラズマにおけるプラズマ揺らぎとラジカルとナノ粒子成長の関係2018
- Author(s)
  鎌滝晋礼, 周靭, 大友洋,山下大輔,板垣奈穂,古閑一憲,白谷正治
- Organizer
  第35回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Analysis of Inter-particle Interactions of Two Fine Particles in Ar Plasma2018
- Author(s)
  Hiroshi Ohtomo, Ren Zhou, Daisuke Yamashita, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, and Masaharu Shiratani
- Organizer
  JP-KO dust workshop 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] CH4+Arマルチホロー放電プラズマで生成したカーボンナノ粒子の基板堆積に対するガス流量の影響2018
- Author(s)
  H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] プラズマCVDによるSiN製膜時のクラスターの混入が膜物性へ与える影響2018
- Author(s)
  永石翔大, 佐々木勇輔, 田中和真, 原尚志, 山下大輔, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第35回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Effects of Gas Pressure on Size of Carbon Nanoparticles Prepared by Methane Plasma Process2018
- Author(s)
  H. Sung Hwa, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Impact of Amplitude Modulation of RF Discharge Voltage on the Spatial Profile of Nanoparticle Characteristics in Reactive Plasma2018
- Author(s)
  Kunihiro Kamataki, Ren Zhou, Hiroshi Ohtomo, Daisuke Yamashita, Naho Itagaki, Kazunori Koga and Masaharu ShirataniKazunori Koga, Masaharu Shiratani
- Organizer
  2st Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] アクティブラーニング型授業が学習者に与える効果~初年次物理学を通じた学習動機付け、学習観、理解度に注目して~2018
- Author(s)
  鎌滝晋礼, 安永和央, 矢山英樹
- Organizer
  教育心理学会第60回総会
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] 科学実験が文系学部学生の専門教育過程に与える影響2017
- Author(s)
  鎌滝晋礼
- Organizer
  大学教育学会第39回大会
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] 初年次学生における電磁気学の理解を深めるプラズマ実験授業2017
- Author(s)
  鎌滝晋礼
- Organizer
  第66回九州地区大学教育研究協議会
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] 初年次における文系学部学生への科学実験授業の影響2016
- Author(s)
  鎌滝晋礼
- Organizer
  第65回九州地区大学教育研究協議会
- Place of Presentation
  鹿児島県鹿児島市
- Year and Date
  2016-09-02
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] 科学的思考力育成のための文系学生に対する科学実験の展開2016
- Author(s)
  鎌滝晋礼
- Organizer
  日本科学教育学会第40回年会
- Place of Presentation
  大分県大分市
- Year and Date
  2016-08-19
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] Active Learning based on Science Experiments to Improve Scientific Literacy2016
- Author(s)
  K.Kamataki
- Organizer
  18th International Conference on Physics Education(ICPE2016)
- Place of Presentation
  Shingapore
- Year and Date
  2016-09-08
- Data Source
  KAKENHI-PROJECT-16K16308
[Presentation] Modulation frequency dependence of bispectrum of laser light scattering intensity from nanoparticles formed in reactive plasmas2014
- Author(s)
  T. Ito, D. Yamashita, H. Seo, K. KamatakiI, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  67th Annual Gaseous Electronics Conference
- Place of Presentation
  Raleigh Convention Center, North Carolina
- Year and Date
  2014-11-05
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Effects of amplitude modulated VHF discharge on coupling between plasmas and nanoparticles2014
- Author(s)
  K. Koga, T. Ito, K. Kamataki, H. Seo, N. Itagaki, and M. Shiratani
- Organizer
  24th International Toki Conference
- Place of Presentation
  Ceratopia Toki, Toki-city, Gifu
- Year and Date
  2014-11-05
- Data Source
  KAKENHI-PROJECT-26246036
[Presentation] Nanoparticle composite plasma CVD films Fundamental and applications2014
- Author(s)
  M.Shiratani, K.Koga, G.Uchida, N.Itagaki, H.Seo, K.Kamataki
- Organizer
  The 9th EU-Japan Joint Symposium on Plasma Processing
- Place of Presentation
  Bohinj Park ECO Hotel, Slovenia
- Year and Date
  2014-01-21
- Invited
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with amplitude modulation2014
- Author(s)
  K.Koga, Y.Morita, K.Kamataki, D.Yamashita, N.Itagaki, G.Uchida, and M.Shiratani
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka
- Year and Date
  2014-02-03
- Invited
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Fluctuation in Plasma Processes2013
- Author(s)
  Masaharu Shiratani, Kunihiro Kamataki, Yasuhiko Morita, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Hyunwoong Seo
- Organizer
  The 6th International Conference on Plasma Nanotechnology and Science (IC-PLANTS 2013)
- Place of Presentation
  Gero Synergy Center, Japan
- Year and Date
  2013-02-03
- Invited
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 振幅変調放電プラズマ中のナノ粒子成長初期におけるナノ粒子量の時空間分布2013
- Author(s)
  古閑一憲, 森田康彦, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 白谷正治
- Organizer
  2013年第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学，厚木市
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Spatio-Temporal Structure of Growth of Nano-Particles with/without Amplitude Modulation in Reactive Plasmas2013
- Author(s)
  KUNIHIRO KAMATAKI, YASUHIKO MORITA,KAZUNORI KOGA, GIICHIRO UCHIDA, NAHO ITAGAKI, HYUNWOONG SEO AND MASAHARU SHIRATANI
- Organizer
  ISPlasma2013
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Observation of growth of nano-particles using a high speed camera2012
- Author(s)
  Yasuhiko Morita, Kunihiro Kamataki, Kazunori Koga, Giichiro Uchida, Hyunwoong Seo, Daisuke Yamashita, Naho Itagaki, Masaharu Shiratani
- Organizer
  The 15th International Workshop on Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Sungkyunkwan University, Korea
- Year and Date
  2012-06-07
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] A simplified model of a relationship between plasma fluctuation and size distribution of nanoparticles formed in reactive plasmas2012
- Author(s)
  Masaharu Shiratani, Yasuhiko Morita, Kunihiro Kamataki, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki, Kazunori Koga
- Organizer
  13th Workshop on Fine Particle Plasma
- Place of Presentation
  National Institute for Fusion Science, Japan
- Year and Date
  2012-12-08
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Control of size distribution of nanoparticles produced in reactive plasmas2012
- Author(s)
  Masaharu Shiratani, Kunihiro Kamataki, Yasuhiko Morita, Kazunori Koga, Giichiro Uchida, Hyunwoong Seo, Daisuke Yamashita, Naho Itagaki
- Organizer
  Asia-Pacific Conference on Plasma Science and Technology
- Place of Presentation
  Kyoto University ROHM Plaza, Japan
- Year and Date
  2012-10-03
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 放電電力変調反応性プラズマにおけるナノ粒子成長の時空間構造の観測2012
- Author(s)
  鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 白谷正治
- Organizer
  プラズマ・核融合学会　第29回年会
- Place of Presentation
  春日クローバープラザ，春日市
- Year and Date
  2012-11-27
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] A Theoretical Model of a Relationship between Plasma Fluctuation and Nanostructure Fluctuation2012
- Author(s)
  Masaharu Shiratani, Yasuhiko Morita, Kunihiro Kamataki, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki, Kazunori Koga
- Organizer
  International Union of Material Research Societies International Conference on Electronic Material 2012
- Place of Presentation
  PACIFICO YOKOHAMA, Japan
- Year and Date
  2012-09-24
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Optical Trapping of Single Fine Particle in Plasmas for study of interactions between a fine particle and plasmas2012
- Author(s)
  Kazunori Koga, Daisuke Yamashita, Satoshi Kitazaki, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani
- Organizer
  NANOSMAT 2012
- Place of Presentation
  AquaPalace Hotel in Prague, Czech Republic
- Year and Date
  2012-09-19
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] High Capacity Li Ion Battery Anodes Using Silicon Carbide Nanoparticles Produced by Double Multi-Hollow Discharge Plasma CVD2012
- Author(s)
  K. Kamataki, M. Shiratani, T. Ishihara, H. Nagano, Y. Morita, K. Kuwahara, G. Uchida, H. Seo, N. Itagaki and K. Koga
- Organizer
  IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Impacts of plasma fluctuation on nanostructure formation using plasmas2012
- Author(s)
  M.Shiratani, K.Kamataki, G.Uchida, H.Seo, N.Itagaki, K.Koga
- Organizer
  The Third International Symposium on Plasma Nanoscience
- Place of Presentation
  Johor, Malaysia and Nanyang Technological University,シンガポール
- Year and Date
  2012-02-29
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 反応性プラズマ中でのナノ粒子成長の時空間分布2012
- Author(s)
  森田康彦, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部第16回支部大会
- Place of Presentation
  九州大学筑紫地区総合研究棟，春日市
- Year and Date
  2012-12-22
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] プラズマプロセスにおける揺らぎのダイナミックス2012
- Author(s)
  鎌滝晋礼, 森田康彦, 古閑一憲, 内田儀一郎, 板垣奈穂, Hyunwoong Seo, 白谷正治
- Organizer
  第28回九州・山口プラズマ研究会
- Place of Presentation
  由布院倶楽部, 由布市
- Year and Date
  2012-11-10
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Interaction between amplitude modulated reactive plasmas and nanoparticles growth in the plasmas2012
- Author(s)
  K.Kamataki, K.Koga, G.Uchida, N.Itagaki, H.Seo, M.Shiratani
- Organizer
  The 4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012)
- Place of Presentation
  中部大学,春日井市
- Year and Date
  2012-03-07
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] プラズマプロセスにおける揺らぎのダイナミックス2012
- Author(s)
  鎌滝晋礼、森田康彦、古閑一憲、内田儀一郎、板垣菜穂、Hyunwoong Seo、白谷正治
- Organizer
  第28回九州・山口プラズマ研究会
- Place of Presentation
  大分, 日本
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Observation of Spatio-Temporal Structure of Growth of Nano-Particles in Reactive Plasmas with Discharge Power Modulation2012
- Author(s)
  KAMATAKI Kunihiro, MORITA Yasuhiko, KOGAKazunori, UCHIDA Giichiro, ITAGAKI Naho, YAMASHITA Daisuke and SHIRATANI Masaharu
- Organizer
  第29回プラズマ核融合学会年会
- Place of Presentation
  福岡, 日本
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] 高周波放電のAM変調によるナノ粒子サイズ分布の制御2011
- Author(s)
  白谷正治, 鎌滝晋礼, 西山雄士, 古閑一憲, 内田儀一郎, 板垣奈穂
- Organizer
  平成23年度(第64回)電気関係学会九州支部連合大会
- Place of Presentation
  佐賀大学本庄キャンパス,佐賀市
- Year and Date
  2011-09-27
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Two dimensional laser light scattering to deduce size and density of nanoparticles in plasmas2011
- Author(s)
  M.Shiratani, K.Kamataki, K.Koga, G.Uchida
- Organizer
  Laser Aided Plasma Diagnostic conference (LAPD15)
- Place of Presentation
  ShineVille Resort,済州島(韓国)
- Year and Date
  2011-10-10
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Multi-hollow discharge plasma CVD : Si deposition2011
- Author(s)
  M.Shiratani, K.Koga, G.Uchida, H.Seo, N.Itagaki, K.Kamataki
- Organizer
  the International Conference on Phenomena in Ionized Gases (ICPIG2011)
- Place of Presentation
  Queen's University Belfast, Belfast (英国)(プレナリー講演)
- Year and Date
  2011-08-29
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Impacts of Plasma Fluctuations in Reactive Plasmas2011
- Author(s)
  K. Kamataki
- Organizer
  BIT's 1st Annual World Congress of Nano-S & T
- Place of Presentation
  Dalian, China
- Invited
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Three growth modes of nanoparticles generated in reactive plasmas2011
- Author(s)
  K.Koga, K.Kamataki, S.Nunomura, S.Iwashita, G.Uchida, H.Seo, N.Itagaki, M.Shiratanil, U.Czarnetzki
- Organizer
  DPG Spring Meeting of the Section AMOP (SAMOP)
- Place of Presentation
  University of Stuttgart,シュトゥットガルト(ドイツ)
- Year and Date
  2011-03-15
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Control of size distribution of nanoparticles in reactive plasmas by using AM rf discharges2011
- Author(s)
  M.Shiratani, G.Uchida, N.Itagaki, K.Kamataki, K.Koga
- Organizer
  12th Workshop on Fine Particle Plasmas
- Place of Presentation
  核融合科学研究所,土岐市
- Year and Date
  2011-11-27
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Study of interaction between plasma fluctuation and nucleation of nanoparticle in plasma CVD2011
- Author(s)
  K.Kamataki, K.Koga, G.Uchida, N.Itagaki, M.Shiratani
- Organizer
  Plasma Conference 2011
- Place of Presentation
  石川県立音楽堂,金沢市
- Year and Date
  2011-11-24
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasmas2011
- Author(s)
  K. Kamataki , H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani
- Organizer
  the XXX International Conference on Phenomena in Ionized Gases(ICPIG) Conference
- Place of Presentation
  Belfast, England
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] プラズマCVD中におけるナノ粒子成長に対するプラズマ揺らぎの効果2011
- Author(s)
  鎌滝晋礼, 古閑一憲, 内田儀一郎, 板垣奈穂, 山下大輔, 松崎秀文, 白谷正治
- Organizer
  プラズマエレクトロニクス文科会20周年記念特別シンポジウム
- Place of Presentation
  名古屋大学野依記念学術交流会館,名古屋市
- Year and Date
  2011-10-22
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Impacts of Plasma Fluctuations on Growth of Nano-Particles in Reactive Plasmas2011
- Author(s)
  K. Kamataki , H. Miyata, K. Koga, G. Uchida, N. Itagaki, D. Yamashita, H. Matsuzaki, M. Shiratani
- Organizer
  the 図 : 気相プラズマ揺らぎによる、ナノ粒子成長の減衰とナノ粒子サイズと密度の変化 XXX International Conference on Phenomena in Ionized Gases (ICPIG) Conference
- Place of Presentation
  Belfast, England
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Control of radial density profile of nano-particle produced in reactive plasma by amplitude modulation of rf discharge voltage2011
- Author(s)
  K.Kamataki, K.Koga, G.Uchida, N.Itagaki, D.Yamashita, H.Matsuzaki, M.Shiratani
- Organizer
  第24回プラズマ材料科学シンポジウム(SPSM-24)
- Place of Presentation
  大阪大学銀杏会館,吹田市
- Year and Date
  2011-07-19
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Impacts of Plasma Fluctuations in Reactive Plasmas2011
- Author(s)
  K.Kamataki
- Organizer
  BIT's 1st Annual World Congress of Nano-S&T(招待講演)
- Place of Presentation
  Dalian, China
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Plasma Fluctuations in Pristine and Reactive Plasmas2010
- Author(s)
  K.Kamataki
- Organizer
  The 11th International Workshop on Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Jeju, Korea(Invited Talk)
- Year and Date
  2010-07-08
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Plasma Fluctuations2010
- Author(s)
  K.Kamataki
- Organizer
  2010 International Workshop on Plasma Applications
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2010-06-04
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 反応性プラズマ中のナノ粒子成長に対する電力摂動の効果2010
- Author(s)
  鎌滝晋礼、宮田大嗣、古閑一憲、内田儀一郎、板垣奈穂、山下大輔、松崎秀文、白谷正治
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎県長崎市
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Manipulation of Nano-objects Uusing Plasmas for a Plasma Nano-factory2010
- Author(s)
  M.Shiratani, K.Koga, G.Uchida, N.Itagaki, K.Kamataki
- Organizer
  The 11th Asia Pacific Physics Conference
- Place of Presentation
  Shanghai, China
- Year and Date
  2010-11-14
- Invited
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 基礎プラズマと反応性プラズマにおけるプラズマ揺動制御に関する研究2010
- Author(s)
  鎌滝晋礼
- Organizer
  第37回西日本放電懇談会
- Place of Presentation
  福岡県日田市
- Year and Date
  2010-08-09
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Infrared Laser Manipulation of Single Fine Particle Levitated at Plasma/Sheath Boundary
- Author(s)
  D. Yamashita, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, and M. Shiratani
- Organizer
  The 12th Asia Pacific Physics Conference (APPC12)
- Place of Presentation
  Makuhari, Chiba, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Observation of nanoparticle growth process using high speed camera
- Author(s)
  Y. Morita, K. Koga, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, D. Yamashita and M. Shiratani
- Organizer
  21st International Symposium on Plasma Chemistry (ISPC21)
- Place of Presentation
  Cairns, Australia
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] プラズマ中に光捕捉した単一微粒子を用いたプラズマと界面の相互作用評価
- Author(s)
  伊東鉄平, 森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Observation of Spatio-Temporal Structure of Growth of Nano-Particles in Reactive Plasmas with Discharge Power Modulation
- Author(s)
  KAMATAKI Kunihiro, MORITA Yasuhiko, KOGA Kazunori, UCHIDA Giichiro, ITAGAKI Naho YAMASHITA Daisuke and SHIRATANI Masaharu
- Organizer
  第29回プラズマ核融合学会年会
- Place of Presentation
  福岡、日本
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Coupling between radicals in plasmas and nanoparticle growth in initial growth phase in reactive plasmas with amplitude modulation
- Author(s)
  K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida and M. Shiratani
- Organizer
  18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  NISHIJIN PLAZA, Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Combinatorial evaluation of optical properties of crystalline Si nanoparticle embedded Si films deposited by a multi-hollow discharge plasma CVD method
- Author(s)
  Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka International Congress Center, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Spatio-Temporal Structure of Growth of Nano-Particles with/without Amplitude Modulation in Reactive Plasmas
- Author(s)
  KUNIHIRO KAMATAKI, YASUHIKO MORITA,　KAZUNORI KOGA, GIICHIRO UCHIDA, NAHO ITAGAKI, HYUNWOONG SEO AND MASAHARU SHIRATANI
- Organizer
  ISPlasma2013
- Place of Presentation
  Nagoya,Japan
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Time evolution of spatial profile of nanoparticle amount in reactive plasmas
- Author(s)
  Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, N. Itagaki, K. Koga and M. Shiratani
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering　(AEPSE2013)
- Place of Presentation
  Ramada Plaza Jeju Hotel, Korea
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] プラズマプロセスにおける揺らぎのダイナミックス
- Author(s)
  鎌滝晋礼、森田康彦、古閑一憲、内田儀一郎、板垣菜穂、Hyunwoong Seo、白谷正治
- Organizer
  第28回九州・山口プラズマ研究会
- Place of Presentation
  大分、日本
- Data Source
  KAKENHI-PROJECT-23740408
[Presentation] Coreshell nanoparticles generated by plasma CVD and their applications to Li ion batteries
- Author(s)
  M. Shiratani, Y. Morita, K. Kamataki, G. Uchida, H. Seo, N. Itagaki, and K. Koga
- Organizer
  21st International Symposium on Plasma Chemistry (ISPC21)
- Place of Presentation
  Cairns, Australia
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 反応性プラズマにおけるナノ粒子成長のバイスペクトル解析
- Author(s)
  森田康彦, 伊東鉄平, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲 , 白谷正治
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 反応性プラズマにおけるナノ粒子量空間分布の変調周波数依存性
- Author(s)
  森田康彦, 岩下伸也, 山下大輔, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Plasma Etching of Single Fine Particle Trapped By Optical Tweezers
- Author(s)
  M. Shiratani, D. Yamashita, K. Koga, K. Kamataki, N. Itagaki, G. Uchida
- Organizer
  The 26th Symposium on Plasma Science for Materials (SPSM-26)
- Place of Presentation
  Centennial Hall Kyushu University School of Medicine, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] マルチホロー放電プラズマCVDにおけるa-Si:H膜中クラスター混入量に対する振幅変調放電の効果
- Author(s)
  都甲将, 橋本優史, 金光善徳, 鳥越祥宏, 徐鉉雄, 内田儀一郎, 鎌滝晋礼, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部第17回支部大会
- Place of Presentation
  佐世保工業高等専門学校
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Effects of plasma incident angle of dust production due to interactions between hydrogen plasmas and carbon wall
- Author(s)
  M. Tateishi, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, N. Ashikawa, S. Masuzaki, K. Nishimura, A. Sagara, the LHD Experimental Group d, S. Bornholdte, H. Kersten
- Organizer
  The 12th Asia Pacific Physics Conference (APPC12)
- Place of Presentation
  Makuhari, Chiba, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Analysis of fluctuation of Ar metastable density and nanoparticle amount in capacitively coupled discharges with amplitude modulation
- Author(s)
  Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka International Congress Center, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] 反応性プラズマ中のナノ粒子成長とプラズマ揺らぎ
- Author(s)
  白谷正治, 古閑一憲, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Correlation between Plasma Fluctuation and Nanoparticle Amount in Initial Growth Phase in Reactive Plasmas with Amplitude Modulation
- Author(s)
  K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani
- Organizer
  14th Workshop on Fine Particle Plasmas
- Place of Presentation
  National Institute for Fusion Science, Toki, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Band gap control of nc-Si thin films deposited multi-hollow discharge plasma CVD
- Author(s)
  Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  NISHIJIN PLAZA, Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Evaluation of Interactions between Plasmas and Interface using Optically Trapped Single Fine Particle
- Author(s)
  T. Ito, Y. Morita, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki, and M. Shiratani
- Organizer
  18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  NISHIJIN PLAZA, Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Raman spectroscopy of a fine particle optically trapped in plasma
- Author(s)
  D. Yamashita, K. Koga, G. Uchida, K. Kamataki, N. Itagaki, M. Shiratani
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka International Congress Center, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Nanoparticle composite plasma CVD films Fundamental and applications
- Author(s)
  M. Shiratani, K. Koga, G. Uchida, N. Itagaki, H. Seo, K. Kamataki
- Organizer
  The 9th EU-Japan Joint Symposium on Plasma Processing
- Place of Presentation
  Bohinj Park ECO Hotel, Slovenia
- Invited
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] High Pressure Nonthermal Methane Plasmas for Nanoparticle Production
- Author(s)
  K. Koga, S. Iwashita, G. Uchida, D. Yamashita, N. Itagaki, K. Kamataki, M. Shiratani, U. Czarnetzki
- Organizer
  The 12th Asia Pacific Physics Conference (APPC12)
- Place of Presentation
  Makuhari, Chiba, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] ナノ粒子含有振幅変調放電プラズマ中のAr準安定原子密度
- Author(s)
  白谷正治, 古閑一憲, 森田康彦, 伊東鉄平, 内田儀一郎, 鎌滝晋礼, 徐鉉雄, 板垣奈穂
- Organizer
  日本物理学会　第69回年次大会
- Place of Presentation
  東海大学
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Combinatorial plasma CVD of Si nanoparticle composite films for band gap control
- Author(s)
  Y. Kanemitsu, G. Uchida, D. Ichida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  The 12th Asia Pacific Physics Conference (APPC12)
- Place of Presentation
  Makuhari, Chiba, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Transport of nanoparticles produced in reactive plasmas using a positively-biased collector
- Author(s)
  Y. Morita, K. Koga, G. Uchida, K. Kamataki, D. Yamashita, H. Seo, N. Itagaki, and M. Shiratani
- Organizer
  The 12th Asia Pacific Physics Conference (APPC12)
- Place of Presentation
  Makuhari, Chiba, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Control of plasma CVD films containing group IV nanoparticles
- Author(s)
  M. Shiratani, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga
- Organizer
  International Conference on Surface Engineering
- Place of Presentation
  Haeundae Grand Hotel, Korea
- Invited
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Selective removal of clusters in silane plasmas by cluster eliminating filter
- Author(s)
  Y. Hashimoto, Y. Torigoe, S. Toko, D. Yamashita, H. Seo, N. Itagaki, K. Kamataki, K. Koga, M. Shiratani
- Organizer
  18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  NISHIJIN PLAZA, Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Bispectrum analysis of nanoparticle growth in reactive dusty plasmas
- Author(s)
  Y. Morita, T. Ito, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, and M. Shiratani
- Organizer
  18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics
- Place of Presentation
  NISHIJIN PLAZA, Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Effects of Amplitude Modulation on Stability of Hydrogenated Amorphous Silicon Films Deposited using Multi-Hollow Discharge Plasma CVD Method
- Author(s)
  Y. Torigoe,Y. Hashimoto, S. Toko, D. Yamashita, N. Itagaki, H. Seo, K. Kamataki, K. Koga, M. Shiratani
- Organizer
  2014 Japan-Korea Joint Symposium on Advanced Solar Cells
- Place of Presentation
  NISHIJIN PLAZA, Fukuoka, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Coupling between radicals and nanoparticles in initial growth phase in reactive plasmas with amplitude modulation
- Author(s)
  K. Koga, Y. Morita, K. Kamataki, D. Yamashita, N. Itagaki, G. Uchida, M. Shiratani
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka International Congress Center, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Nanoparticle amount in reactive plasmas with amplitude modulation detected by twodimensional laser light scattering method
- Author(s)
  T. Ito, Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka International Congress Center, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Production of SiC nanoparticles for Li-ion battery applications by using a high pressuremulti-hollow discharge plasma CVD
- Author(s)
  G. Uchida, D. Ichida, Y. Kanemitsu, H. Seo, K. Kamataki, N. Itagaki, K. Koga, T. Ishihara, M. Shiratani
- Organizer
  The 26th Symposium on Plasma Science for Materials (SPSM-26)
- Place of Presentation
  Centennial Hall Kyushu University School of Medicine, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] ハイスピードカメラを用いたナノ粒子成長プロセスの観測
- Author(s)
  伊東鉄平, 森田康彦, 鎌滝晋礼, 内田儀一郎, 徐鉉雄, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
- Organizer
  第7回プラズマエレクトロニクスインキュベーションホール
- Place of Presentation
  国立中央青少年交流の家, 静岡
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Carbon Nanostructure formed by high pressure methane plasmas
- Author(s)
  K. Koga, S. Iwashita, G. Uchida, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, M. Shiratani, U. Czarnetzki
- Organizer
  The 26th Symposium on Plasma Science for Materials (SPSM-26)
- Place of Presentation
  Centennial Hall Kyushu University School of Medicine, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Amplitude modulation frequency dependence of nanoparticle amount in plasmas
- Author(s)
  Y. Morita, S. Iwashita, D. Yamashita, G. Uchida, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani
- Organizer
  The 26th Symposium on Plasma Science for Materials (SPSM-26)
- Place of Presentation
  Centennial Hall Kyushu University School of Medicine, Japan
- Data Source
  KAKENHI-PLANNED-21110005
[Presentation] Time evolution of spatial profile of nanoparticle amount in amplitude modulated　capacitively coupled reactive plasmas
- Author(s)
  M. Shiratani, K. Koga, Y. Morita, S. Iwashita, H. Seo, K. Kamataki, N. Itagaki, G. Uchida
- Organizer
  23rd Annual Meeting of MRS-JAPAN 2013
- Place of Presentation
  Yokohama Port Opening Plaza, Japan
- Data Source
  KAKENHI-PLANNED-21110005

1. SHIRATANI Masaharu (90206293)

# of Collaborated Projects: 4 results

# of Collaborated Products: 156 results
2. KOGA Kazunori (90315127)

# of Collaborated Projects: 3 results

# of Collaborated Products: 99 results
3. UCHIDA Giichiro (90422435)

# of Collaborated Projects: 2 results

# of Collaborated Products: 75 results
4. 布村正太 (50415725)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. SEO Hyunwoong (00618499)

# of Collaborated Projects: 1 results

# of Collaborated Products: 55 results
6. ITAGAKI Naho (60579100)

# of Collaborated Projects: 1 results

# of Collaborated Products: 77 results
7. 小林達哉 (30733703)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 石川健治 (60417384)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 富田健太郎 (70452729)

# of Collaborated Projects: 1 results

# of Collaborated Products: 29 results
10. 奥村賢直

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
11. 内田諭

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

KAMATAKI KUNIHIRO 鎌滝 晋礼

Kamataki Kunihiro 鎌滝 晋礼

KAMATAKI Kunihiro 鎌滝 晋礼

Research Projects

Research Products

Co-Researchers

Integration Study of General Principles of Thin Film Formation by Plasma Processes.

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放電手法制御によるプラズマプロセス精密制御機構の解明とその応用Principal Investigator

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Mechanism elucidation of spatio-temporal structure formation of sheath fluctuation using optically trapped fine particles in plasmas

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Study on growth of nanoparticle in spatio-temporal electric field fluctuationPrincipal Investigator

Principal Investigator

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Development of new practical experimental teaching materials of plasma science which can connect basic and professional science educationPrincipal Investigator

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Precise control of nanoparticle deposition using plasma

Principal Investigator

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Interaction dynamics of plasma fluctuations and nano interface propertiesPrincipal Investigator

Principal Investigator

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Bond Engineering at Nano-Interfaces using Nanoparticle Plasmas

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[Journal Article] Prediction by a hybrid machine learning model for high-mobility amorphous In2O3: Sn films fabricated by RF plasma sputtering deposition using a nitrogen-mediated amorphization method2023

Author(s)

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DOI

Data Source

[Journal Article] Low-temperature fabrication of silicon nitride thin films from a SiH4+N2 gas mixture by controlling SiNx nanoparticle growth in multi-hollow remote plasma chemical vapor deposition2023

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[Journal Article] Ion Trajectory Control in Processing Plasmas for Nano-Fabrication2023

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[Journal Article] Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma2022

Author(s)

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[Journal Article] Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma2022

Author(s)

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Data Source

[Journal Article] Raman spectral analysis of theas-deposited a-C:H films prepared by CH4+Ar plasma CVD2022

KAMATAKI KUNIHIRO 鎌滝晋礼

Kamataki Kunihiro 鎌滝晋礼

KAMATAKI Kunihiro 鎌滝晋礼

[Journal Article] 課題協学科目による初年次学生の動機づけと学習観への影響　1つの授業実践の事例から2017