YAMAMOTO Masashi 山本雅史

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Yamamoto Masashi 山本雅史

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Researcher Number	60733821
Other IDs
Affiliation (Current)	2025: 香川高等専門学校, 電気情報工学科, 准教授
Affiliation (based on the past Project Information) *help	2021 – 2023: 香川高等専門学校, 電気情報工学科, 准教授 2018 – 2020: 香川高等専門学校, 電気情報工学科, 講師 2014 – 2017: 香川高等専門学校, 電気情報工学科, 助教
Review Section/Research Field	Principal Investigator Basic Section 21060:Electron device and electronic equipment-related Except Principal Investigator Basic Section 62030:Learning support system-related / Science education / Energy engineering
Keywords	Principal Investigator ダブルラフネス構造 / ポリマーブレンド / バイオミメティクス / 大気圧低温プラズマ / ダブルラフネス / PVDF/PMMA / ポリマーブレンド / 除去速度 / 分解 / 酸素ラジカル … More / ノボラック樹脂 / 感光剤 / 触媒毒 / 架橋・硬化 / 分子軌道計算 / 深紫外線励起発光分光法 / ラマン分光法 / 微量フォースセンサーシステム / 酸素微量添加 / ポリマー分解 / 水素ラジカル / PAC介在架橋 / レジスト / 酸素添加 / ポリマー / ラジカル … More Except Principal Investigator デバイス / リソグラフィ / 熱拡散 / 微細化 / デバイスプロセス / フォトリソグラフィ / 半導体デバイス / 半導体 / 微細加工 / 電子デバイス・機器 / リソグラフィー / バイポーラトランジスタ / MOS FET / pn接合 / Sol Gel / 教育 / 簡素化 / 集積回路 / ｐｎ接合 / Sol-Geｌ / プロセス / 工学教育 / p-n接合 / Sol-Gel / グラファイト / コンピュータシミュレーション / NMR / リチウム拡散 / 中性子回折 / 磁化率 / リチウム / 平衡状態 / 拡散 / リートベルト解析 / X線回折 / 結晶構造 / 電極材料 / リチウムイオン二次電池 / 緩和解析 Less

Formation of double roughness structures on surface of polymer blend film using atmospheric pressure low temperature plasmaPrincipal Investigator
- Principal Investigator
  
  山本雅史
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Kagawa National College of Technology
Semiconductor device foundry achieved at a nanotech platform established on an average science lab.
- Principal Investigator
  
  長岡史郎
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 62030:Learning support system-related
- Research Institution
  Kagawa National College of Technology
Elucidation of the effect of a trace amount of oxygen addition on the decomposition and removal of polymer materials using hydrogen radicalsPrincipal Investigator
- Principal Investigator
  
  Yamamoto Masashi
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Kagawa National College of Technology
A nanotechnology platform established in average science laboratories
- Principal Investigator
  
  Nagaoka Shiro
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Science education
- Research Institution
  Kagawa National College of Technology
Relaxation Analysis of Electrode Materials for Secondary Lithium Ion Battery
- Principal Investigator
  
  YAO Takeshi
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Energy engineering
- Research Institution
  Kagawa National College of Technology

All 2024 2023 2022 2021 2020 2019 2018 2017 2016

All Journal Article Presentation Book

[Book] ノボラックレジスト材料とプロセスの最適化2020
- Author(s)
  堀邊英夫, 田中初幸, 花畑誠, 山本雅史, 関口淳, 虎谷秀一, 望月則宏, 萬尚樹
- Total Pages
  193
- Publisher
  S&T出版
- ISBN
  9784907002794
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2023
- Author(s)
  (1)K.Matsuda, M.Yamamoto, M.Mikawa, S.Nagaoka, N.Mori and K.Tsutui,
- Journal Title
  
  Applied Physics Express,
  
  Volume: 16巻　5号 Issue: 4 Pages: 82-86
- DOI
  10.35848/1882-0786/acc8b4
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K12308, KAKENHI-PROJECT-19K04478
[Journal Article] Development of Bile Duct Stent with Antifouling Property Using Atmospheric Pressure and Low Temperature Plasma2022
- Author(s)
  Yamamoto Masashi、Hamasaki Tomoyuki、Sekiguchi Atsushi、Minami Hiroko、Aikawa Masayasu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 35 Issue: 3 Pages: 233-239
- DOI
  10.2494/photopolymer.35.233
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2022-12-16
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22K04251
[Journal Article] Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H<sub>2</sub>/O<sub>2</sub> Mixtures Activated on a Tungsten Hot-wire Catalyst2021
- Author(s)
  Akita Koki、Sogo Shota、Sogame Ryusei、Yamamoto Masashi、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 34 Issue: 5 Pages: 499-504
- DOI
  10.2494/photopolymer.34.499
- NAID
  130008119601
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2021-06-11
- Language
  English
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Evaluation of Decomposition Property of Photoresist by Oxygen Radicals Using Helium-Oxygen Mixtures2020
- Author(s)
  Yamamoto Masashi、Akita Koki、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 33 Issue: 4 Pages: 433-437
- DOI
  10.2494/photopolymer.33.433
- NAID
  130007867637
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2020-07-01
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Effects of Nitrogen Dilution on the Photoresist Removal Rate by Hydrogen Radicals2020
- Author(s)
  Yamamoto Masashi、Nishioka Hiroto、Akita Koki、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 33 Issue: 4 Pages: 427-431
- DOI
  10.2494/photopolymer.33.427
- NAID
  130007867636
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2020-07-01
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Relationship between Oxygen Additive Amount and Photoresist Removal Rate Using H Radicals Generated on an Iridium Hot-Wire Catalyst2019
- Author(s)
  Yamamoto Masashi、Shiroi Tomohiro、Shikama Tomokazu、Nagaoka Shiro、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 32 Issue: 4 Pages: 609-614
- DOI
  10.2494/photopolymer.32.609
- NAID
  130007744433
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2019-06-24
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Photoresist removal using hydrogen radicals produced by tantalum hot-wire catalyst2019
- Author(s)
  Yamamoto Masashi、Shiroi Tomohiro、Shikama Tomokazu、Nagaoka Shiro、Horibe Hideo
- Journal Title
  
  American Institute of Physics Conference Proceedings
  
  Volume: 2151 Pages: 020010-020010
- DOI
  10.1063/1.5124640
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Oxygen additive effects on decomposition rate of poly(vinyl phenol)-based polymers using hydrogen radicals produced by a tungsten hot-wire catalyst2019
- Author(s)
  Yamamoto Masashi、Nagaoka Shiro、Ohdaira Keisuke、Umemoto Hironobu、Horibe Hideo
- Journal Title
  
  Thin Solid Films
  
  Volume: 679 Pages: 22-26
- DOI
  10.1016/j.tsf.2019.03.035
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04543
[Journal Article] Removal of Polymers for KrF and ArF Photoresist Using Hydrogen Radicals Containing a Small Amount of Oxidizing Radicals2018
- Author(s)
  M. Yamamoto, T. Taki, T. Sunada, T. Shikama, S. Nagaoka, H. Umemoto　and H. Horibe
- Journal Title
  
  J. Photopolym. Sci. Technol.
  
  Volume: 31(3) Pages: 419-424
- NAID
  130007481491
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] Proposal for Reducing Pattern Position Alignment Error of A Simplified Photo Lithography Method for Education2018
- Author(s)
  S. Nagaoka, M. Yamamoto, T. Tsuji, K. Matsuda, T. Shimizu, R. W. Johnston, T. Shikama, F. Shimokawa and H. Horibe
- Journal Title
  
  The Proceedings of 12th Internationa Symposium on Advances in Technology Education
  
  Volume: 1 Pages: 512-517
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] Pressure Dependence of Photoresist Removal Rate Using Hydrogen Radicals2017
- Author(s)
  M. Yamamoto, T. Shiroi, S. Nagaoka, T. Shikama, H. Umemoto, K. Ohdaira, T. Nishiyama and H. Horibe
- Journal Title
  
  . Photopolym. Sci. Technol.
  
  Volume: 30(3) Pages: 297-301
- NAID
  130005950262
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] Fundamental Study of the Simplified Micro Diffusion Bipolar Transistor as the Educational Resource2017
- Author(s)
  S. Nagaoka, M. Yamamoto, T. Tsuji, T. Shimizu, R. W. Johnston, H. Horibe, F. Shimokawa,T. Shikama and M. Rusop
- Journal Title
  
  Transactions of ISATE 2017 The 11th International Symposium on Advances in Technology Education
  
  Volume: 1 Pages: 275-279
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A feasibility study of the selective and simultaneous thermal impurity diffusion process on the silicon substrate2016
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Journal Title
  
  The Proceeding of the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
  
  Volume: - Pages: 166-171
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A proposal of the Simplified IC Fab Establishied in the Average Science Laboratory for Cultivating Scientific Mind2016
- Author(s)
  長岡史郎，辻琢人，山本雅史，R.W.Johnston，清水共，鹿間共一
- Journal Title
  
  The Transactons of ISATE2016, The 10th International Symposium on Advances in Technology Education
  
  Volume: - Pages: 13-16
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A Study of the Simplified IC FAB for the Science and Technical Education2016
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Journal Title
  
  The Proceeding of the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
  
  Volume: - Pages: 161-165
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Study of Resolution Improvement of the Simplified Contact Photo Lithography Using Phase Shift Method for EE Education2024
- Author(s)
  S. Nagaoka*, T. Shimizu, M. Yamamoto, R. W. Johnston, K. Matsuda and H. Horibe
- Organizer
  5th Malaysia-Japan International Conference on Nanoscience, Nanotechnology and Nanoengineering 2024 (MJIC2024)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] 大気圧低温プラズマによる構造模倣技術への応用2024
- Author(s)
  山本雅史
- Organizer
  NCBIバイオミメティクス分科会（東京）
- Data Source
  KAKENHI-PROJECT-22K04251
[Presentation] 大気圧低温プラズマ処理したPVDF/PMMAブレンドフィルムの濡れ性の評価2023
- Author(s)
  高田歩夢，山本雅史，藤居虹帆，多田健太郎，鹿間共一，岡本治樹，堀邊英夫
- Organizer
  第72回高分子討論会（香川）
- Data Source
  KAKENHI-PROJECT-22K04251
[Presentation] A Study of Resolution an Overlay Accuracy of a Simplified Photo Lithography Process for EE Education Use2023
- Author(s)
  (4)T.Shimizu, M.Yamamoto, R.Johnston, K.Matsuda, H. Horibe and S.Nagaoka,
- Organizer
  4th MALAYSIA- JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Feasibility Study of a Simplified Nanotech Platform and Device Evaluation Procedure Established for Average Educational Science Laboratories2023
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Shimizu, R.Johnston, K.Matsuda and H.Horibe
- Organizer
  4th MALAYSIA-JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023),
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] 水蒸気プラズマによるポリスチレン系ポリマーの除去2023
- Author(s)
  山地恭平，山本雅史，Khant Nyar Paing，相澤洸，石島達夫，堀邊英夫
- Organizer
  第84回応用物理学会周期学術講演会（熊本）
- Data Source
  KAKENHI-PROJECT-22K04251
[Presentation] 教育用簡素化微細加工プロセスのレジストパタン解像度と重ね合せ精度改善に関する一考察2023
- Author(s)
  土井彩乃、清水共、川染勇人、山本雅史、ロバートジョンストン、松田和典、堀邊英夫、長岡史郎
- Organizer
  令和５年度電気・電子・情報関係学会四国支部連合大会、11ー5
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] 大気圧低温プラズマ処理による胆管ステント内壁への防汚機能付与2022
- Author(s)
  細谷宣佳，濱崎智行，山本雅史，鹿間共一，南紘子，関口淳，合川公康，堀邊英夫
- Organizer
  応用物理・物理系中国四国支部合同学術講演会（香川）
- Data Source
  KAKENHI-PROJECT-22K04251
[Presentation] Effects of Hydrogen Radicals Treatment of Piezoresistance Coefficients of Germanium2022
- Author(s)
  K.Matsuda, M.Yamamoto, M.Mikasa, S.Nagaoka, K.Tsutsui,
- Organizer
  International Conference on Physics of Semiconductors,2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] タングステンHot-Wireで活性化したH2/O2混合ガスによるノボラック系ポジ型レジストの除去速度低下の原因の検討2022
- Author(s)
  山本雅史、秋田航希，馬庭知宏，浅川万知，長岡史郎，堀邊英夫
- Organizer
  第20回Cat-CVD研究会(佐賀・オンライン)，pp.21-23
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] 大気圧低温プラズマを用いたダブルラフネス構造の形成方法の提案2022
- Author(s)
  山本雅史，三谷克己，谷野柊，鹿間共一，岡本治樹，堀邊英夫
- Organizer
  第71回高分子討論会
- Data Source
  KAKENHI-PROJECT-22K04251
[Presentation] タングステンHot-Wireで活性化したH2/O2混合ガスによるノボラック系ポジ型レジストの除去速度低下の原因の検討2022
- Author(s)
  山本雅史、秋田航希，馬庭知宏，浅川万知，長岡史郎，堀邊英夫
- Organizer
  第20回Cat-CVD研究会
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] Development of Bile Duct Stent with Antifouling Property Using Atmospheric Pressure Low-Temperature Plasma2022
- Author(s)
  M. Yamamoto, T. Hamasaki, A. Sekiguchi, H. Minami, M. Aikawa, and H. Horibe
- Organizer
  The 39th International Conference of Photopolymer Science and Technology (ICPST-39)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04251
[Presentation] タングステン Hot-Wire で活性化した H2/O2 混合ガスによるノボラックレジストの除去性の検討2021
- Author(s)
  山本雅史，秋田航希，十川翔太，十亀龍星，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第18回Cat-CVD研究会
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] タングステン加熱触媒体で活性化したH2/O2混合ガスを用いたPAC量の異なるノボラックレジストの除去2021
- Author(s)
  秋田航希，十川翔太，十亀龍星，山本雅史，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第38回国際フォトポリマーコンファレンス
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] He/O2混合ガス中で生成したOラジカルのレジストとの反応性評価2020
- Author(s)
  山本雅史，秋田航希，長岡史郎，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第81回応用物理学会秋季学術講演会（オンライン），9p-Z25-5
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] He/O2混合ガスを用いたOラジカルによるレジストの分解特性の評価2020
- Author(s)
  秋田航希，山本雅史，長岡史郎，鹿間共一，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第17回Cat-CVD研究会（オンライン），P-07
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 大気圧低温プラズマによるPMMA表面への超ナノ親水構造の形成2020
- Author(s)
  谷野柊，濱崎智行，山本雅史，鹿間共一，堀邊英夫，関口淳
- Organizer
  第17回Cat-CVD研究会（オンライン），P-06
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 理科室で構築する工学教育用半導体デバイス設計製作評価環境2020
- Author(s)
  長岡史郎，山本雅史，鹿間共一，清水共，ジョンストン・ロバート・ウェストン，松田和典，下川房男，堀邊英夫
- Organizer
  第67回応用物理学会春季学術講演会講演予稿集（2020上智大学四谷キャンパス） 14a-PA1-22
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 活性種とポリマーとの反応について2020
- Author(s)
  山本雅史，秋田航希，西岡寛人，谷野柊，濱崎智行，長岡史郎，鹿間共一，大平圭介，関口淳，梅本宏信，堀邊英夫
- Organizer
  第17回Cat-CVD研究会（オンライン），15
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 水素ラジカルを用いたレジスト除去速度における窒素希釈効果2020
- Author(s)
  西岡寛人，山本雅史，長岡史郎，鹿間共一，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第17回Cat-CVD研究会（オンライン），P-08
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] Hot-wire 法で生成した原子状水素によるネガ型レジストの還元分解2019
- Author(s)
  竹森有紀，神戸正雄，甲田優太，山本雅史，田村弘毅，大箭哲史，佐藤絵理子，堀邊英夫
- Organizer
  第16回Cat-CVD研究会（姫路），43-46（2019）
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] A study for reducing pattern position alignment error of a simplified photo lithography method for the nanotech platform established at the average science laboratory2019
- Author(s)
  H. Kunisawa, M. Yamamoto, T. Shimizu, R. W. Johnston, F. Shimokawa, H. Horibe, M. Rusop, and S. Nagaoka
- Organizer
  The 10th International Conference on Nanoscience and Nanotechnology 2019 (NANO-SciTech 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 電子線レジストの感度曲線を用いたレジスト解像度パタンのモンテカルロシミュレーション2019
- Author(s)
  宮﨑翔，山本雅史，河田純，堀邊英夫，長岡史郎
- Organizer
  第20回システムインテグレーション部門講演会（高松），3B1微細構造デバイス，2232-2235（2019）
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 水素ラジカルを用いたKrF/ArFレジスト用ベース樹脂の除去速度における酸素添加効果2019
- Author(s)
  山本雅史，城井智弘，長岡史郎，大平圭介，梅本宏信，堀邊英夫
- Organizer
  第16回Cat-CVD研究会（姫路），14-15（2019）
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] ffect of Oxygen Addition on Rate of Photoresist Removal Using Hydrogen Radicals Produced by a Tungsten Hot-Wire Catalyst2019
- Author(s)
  M. Yamamoto, T. Shiroi, T. Shikama, S. Nagaoka, H.Umemoto, and H. Horibe
- Organizer
  The 10th International Conference on Nanoscience and Nanotechnology 2019 (NANO-SciTech 2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] イリジウム加熱触媒体で生成した水素ラジカルを用いたレジスト除去速度と酸素添加量との関係2019
- Author(s)
  山本雅史，城井智弘，鹿間共一，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第36回国際フォトポリマーコンファレンス（千葉），B4-03（2019）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] 理科室で構築するナノテクプラットフォーム　－設備等の限られた環境下における半導体デバイスの設計製作評価を可能にする環境の構築－2019
- Author(s)
  國澤悠，山本雅史，清水共，ジョンストン・ロバート・ウェストン，堀邊英夫，下川房男，長岡史郎
- Organizer
  第20回システムインテグレーション部門講演会（高松），3B1微細構造デバイス，2226-2231（2019）
- Data Source
  KAKENHI-PROJECT-19K04543
[Presentation] Photoresist Removal Using Hydrogen Radicals Produced by Tantalum Hot- Wire Catalyst2018
- Author(s)
  M. Yamamoto, T. Shiroi, T. Shikama, S. Nagaoka, and H. Horibe
- Organizer
  9th International Conference on Nanoscience and Nanotechnology 2018, (Nano-SciTech2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 酸素を微量添加した水素ラジカルを用いたKrF/ArFレジスト用ベースポリマーの除去2018
- Author(s)
  1)山本雅史，砂田拓人，滝智洋，鹿間共一，長岡史郎，梅本宏信，堀邊英夫
- Organizer
  第35回国際フォトポリマーコンファレンス（千葉）
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Oxygen Additive Effects on Decomposition Rate of Poly(vinyl phenol)-based Polymers Using Hydrogen Radicals Produced by a Tungsten Hot-wire Catalyst2018
- Author(s)
  M. Yamamoto, S. Nagaoka, K. Ohdaira, H. Umemoto, and H. Horibe
- Organizer
  10th International Conference on Hot Wire (Cat) & Initiated Chemical Vapor Deposition (HWCVD10)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Proposal of Totally Simplified Educational Semiconductor Device Fabrication Process under Normal Air Environment2018
- Author(s)
  S.Nagaoka,M.Yamamoto,T.Tsuji,T.Shimizu,R.W.Johnston, T. Shikama, and H.Horibe
- Organizer
  9th International Conference on Nanoscience and Nanotechnology 2018, (Nano-SciTech2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Product of the Decomposition in Photoresist Removal using Hydrogen Radicals2018
- Author(s)
  M. Yamamoto, H. Umemoto, S. Nagaoka, T. Shikama, and H. Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium (EMSES 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Products Of The Decomposition In Photoresist Removal Using Hydrogen Radicals2018
- Author(s)
  M.Yamamoto, H.Umemoto, S.Nagaoka, T.Shikama and H.Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Fundamental Study of Resist Pattern Resolution Control with a Resist Sensitivity Curve for Electron Beam Lithography2018
- Author(s)
  S. Nagaoka, J. Kawata, M.Yamamoto and H. Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium (EMSES 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Fundamental Study of Resist PatternResolution Control with a Resist Sensitivity Curve for Electron Beam Lithography2018
- Author(s)
  S.Nagaoka,J.Kawata,M.Yamamoto and H. Horibe
- Organizer
  The 14th Eco-Energy and Materials Science and Engineering Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Flow Rate Dependence of Resist Removal Rate Using Hydrogen Radicals2018
- Author(s)
  T. Shiroi, M. Yamamoto, T. Shikama, S. Nagaoka, and H. Horibe
- Organizer
  9th International Conference on Nanoscience and Nanotechnology 2018, (Nano-SciTech2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 水素ラジカルを用いたレジスト除去における除去速度の圧力依存性2017
- Author(s)
  城井智弘，山本雅史，長岡史郎，鹿間共一，梅本宏信，大平圭介，西山聖，堀邊英夫
- Organizer
  第64回応用物理学会春季学術講演会（東京）
- Place of Presentation
  パシフィコ横浜，神奈川県
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 二層フォトレジストのドライ現像と不純物の熱拡散プロセスへの応用2017
- Author(s)
  西園寺嶺、長岡史郎、辻琢人、山本雅史、ロバート・ジョンストン、堀邊英夫、清水共
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 水素ラジカルを用いたレジスト除去における酸素添加2017
- Author(s)
  城井智弘、山本雅史、長岡史郎、梅本弘信　、大平圭介、西山聖、堀邊英夫
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A p-n Junction Study for nMOS FET Fabrication using Alignment-less Lithography2017
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM),Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Boron Selective Thermal Impurity Diffusion Method that Support a Simplified pMOS FET Fabrication Process2017
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM),Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A p-n Junction for the Simplified nMOS FET Fabrication using Alignment-less Lithography2017
- Author(s)
  高垣信巨，長岡史郎、辻琢人，山本雅史，R.W.Jhonston,堀邊英夫，清水共
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Feasibility Study of Selective and Simultaneous Thermal Diffusions for Simplified MOS Devie Fabrication2017
- Author(s)
  長岡史郎，塩田幸輝，辻琢人，山本雅史，R.W.Johnsotn, 堀邊英夫，清水共
- Organizer
  International Conference on Nanoscience & Nanotechnology 2017（NANO-SciTech2017),
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM), Malaysia
- Year and Date
  2017-02-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Measurement of Rate of Photoresist Removal by Hydrogen Radicals using Thin Film Interference2017
- Author(s)
  山本雅史，長岡史郎，鹿間共一，堀邊英夫，清水共
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM), Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Boron Selective Thermal Diffusion for the Simplified pMOS FET Fabrication Process2017
- Author(s)
  西園寺嶺，長岡史郎、辻琢人，山本雅史，R.W.Jhonston,堀邊英夫，清水共
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 二層レジストを用いた酸素プラズマによるドライ現像2017
- Author(s)
  高垣信巨、長岡史郎、辻琢人、山本雅史、ロバート・ジョンストン、堀邊英夫、清水共
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 水素ラジカルを用いたレジスト除去における酸素添加の効果2016
- Author(s)
  山本雅史,梅本宏信,大平圭介,鹿間恭一,長岡史郎,西山聖,堀邊英夫
- Organizer
  2016年度応用物理学会中四国支部若手半導体研究会
- Place of Presentation
  加計学園前島研修所, 岡山県
- Year and Date
  2016-07-29
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Study of the Simplified IC FAB for the Science and Technical Education2016
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
- Place of Presentation
  Vocational College Universitas Gadjah MADA, Indonesia
- Year and Date
  2016-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Relaxation Analysis of Electrochemically Lithium Inserted γ-Fe2O3 By Using a Solid-State Li NMR2016
- Author(s)
  Masashi Yamamoto, Hiroshi Okano, Keisuke Yamada, Shigeomi Takai, Takeshi Yabutsuka, Takeshi Yao
- Organizer
  Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2016)
- Place of Presentation
  Honolulu, H.I., USA
- Year and Date
  2016-10-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289376
[Presentation] A feasibility study of the selective and simultaneous thermal impurity diffusion process on the silicon substrate2016
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  The 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
- Place of Presentation
  Vocational College Universitas Gadjah MADA, Indonesia
- Year and Date
  2016-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A proposal of the Simplified IC Fab Establishied in the Average Science Laboratory for Cultivating Scientific Mind2016
- Author(s)
  長岡史郎，辻琢人，鹿間共一，山本雅史，R.W.Johnsotn，清水共
- Organizer
  The 10th International Symposium on Advances in Technology Education
- Place of Presentation
  School of Engineering, TOHOKU University, Miyagi Japan
- Year and Date
  2016-09-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992

1. 堀邊英夫 (00372243)

# of Collaborated Projects: 4 results

# of Collaborated Products: 51 results
2. Nagaoka Shiro (30300635)

# of Collaborated Projects: 3 results

# of Collaborated Products: 53 results
3. 清水共 (40455168)

# of Collaborated Projects: 2 results

# of Collaborated Products: 18 results
4. JOHNSTON ROBERT (60743698)

# of Collaborated Projects: 2 results

# of Collaborated Products: 17 results
5. 鹿間共一 (70206069)

# of Collaborated Projects: 2 results

# of Collaborated Products: 44 results
6. YAO Takeshi (50115953)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
7. 高井茂臣 (10260655)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
8. 薮塚武史 (20574015)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
9. 岡野寛 (60342565)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
10. 遠藤友樹 (60448024)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 相馬岳 (60508266)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 下川房男 (90580598)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
13. 松田和典 (10192337)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results

YAMAMOTO Masashi 山本 雅史

Yamamoto Masashi 山本 雅史

Research Projects

Research Products

Co-Researchers

Formation of double roughness structures on surface of polymer blend film using atmospheric pressure low temperature plasmaPrincipal Investigator

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Semiconductor device foundry achieved at a nanotech platform established on an average science lab.

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Elucidation of the effect of a trace amount of oxygen addition on the decomposition and removal of polymer materials using hydrogen radicalsPrincipal Investigator

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A nanotechnology platform established in average science laboratories

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Relaxation Analysis of Electrode Materials for Secondary Lithium Ion Battery

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[Book] ノボラックレジスト 材料とプロセスの最適化2020

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[Journal Article] Effects of Hydrogen Radical Treatment on Piezoresistance Coefficients of Germanium2023

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[Journal Article] Development of Bile Duct Stent with Antifouling Property Using Atmospheric Pressure and Low Temperature Plasma2022

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[Journal Article] Removal of Novolac Photoresist with Various Concentrations of Photo-active Compound Using H<sub>2</sub>/O<sub>2</sub> Mixtures Activated on a Tungsten Hot-wire Catalyst2021

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[Journal Article] Evaluation of Decomposition Property of Photoresist by Oxygen Radicals Using Helium-Oxygen Mixtures2020

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[Journal Article] Effects of Nitrogen Dilution on the Photoresist Removal Rate by Hydrogen Radicals2020

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YAMAMOTO Masashi 山本雅史

Yamamoto Masashi 山本雅史

[Book] ノボラックレジスト材料とプロセスの最適化2020