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貴田 桂介  キダ ケイスケ

ORCIDConnect your ORCID iD *help
Researcher Number 70102770
External Links
Affiliation (based on the past Project Information) *help 1990: 中部大学, 工学部, 講師
Keywords
Except Principal Investigator
軸対称表面波によるプラズマ生成 / カスプ磁界配位による拡大 / 静磁界による安定化 / グリッドと平板の組合せ電極 / 多重リング電極構造 / 強磁界領域 / VHF帯 / 大直径ECRプラズマ
  • Research Projects

    (1 results)
  • Co-Researchers

    (2 People)
  •  静磁界を用いたCVD用高周波プラズマ源の開発

    • Principal Investigator
      池沢 俊治郎
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Chubu University
  • 1.  池沢 俊治郎 (60065282)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  林 洋司 (40097671)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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