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Toyoda Hirotaka  豊田 浩孝

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TOYODA Hirotaka  豊田 浩孝

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Researcher Number 70207653
Other IDs
External Links
Affiliation (Current) 2025: 名古屋大学, 工学研究科, 教授
Affiliation (based on the past Project Information) *help 2022 – 2024: 名古屋大学, 工学研究科, 教授
2016 – 2018: 名古屋大学, 工学研究科, 教授
2012 – 2015: 名古屋大学, 工学(系)研究科(研究院), 教授
2009 – 2011: Nagoya University, 工学研究科, 教授
2007: Nagoya University, Graduate School of Engineering, Professor … More
2006: 名古屋大学, 大学院工学研究科, 助教授
2004 – 2005: Nagoya University, Dept.Electrical Eng.Computer Sci., Assoc.Prof., 大学院・工学研究科, 助教授
2000 – 2003: 名古屋大学, 工学研究科, 助教授
2001: Nagoya University, Department of Electrical Engineering, Associate Professor
2000: Nagoya University, Department of Electrical Engineering, Associate Professor, 大学院・工学研究科, 助教授
1997 – 1999: Nagoya University, Graduate School of Eng., Associate Prof., 工学研究科, 講師
1997: 名古屋大学, 大学院・工学研究科, 講師
1992 – 1996: 名古屋大学, 工学部, 講師
1988 – 1990: Faculty of Engineering, Nagoya University, 工学部, 助手 Less
Review Section/Research Field
Principal Investigator
Plasma science / プラズマ理工学 / Plasma electronics / Basic Section 14030:Applied plasma science-related
Except Principal Investigator
プラズマ理工学 / Plasma science
Keywords
Principal Investigator
マイクロ波プラズマ / 大気圧プラズマ / 廃棄物処理 / 低温形成 / 多結晶シリコン / 誘導結合プラズマ / 高密度プラズマ / マイクロ波 / 弱減圧プラズマ / プラズマ液体相互作用 … More / 液体プラズマ相互作用 / プラズマCVD / プラズマ加工 / damage-free film / flat surface film / multilaver film / mass spectrometry / high energy particle / magnetron sputter / ダメージフリー / 平坦膜 / 多層膜 / 質量分析 / 高エネルギー粒子 / マグネトロンスパッタ / beam experiment / silicon dioxide / selective etching / fluorocarbon / ビーム実験 / 酸化シリコン / 選択エッチング / フロロカーボン / large area deposition / high speed deposition / high-density plasma / lower temperature deposition / inductively-coupled plasma / poly-crystalline silicon / 大面積堆積 / 高速堆積 / low temperature deposition / ultraviolet transmission spectroscopy / radical diagnostics / polycrystalline silicon / appearance mass spectrometry / inductively coupled plasma / amorphus silicon / 水素化アモルファスシリコン / シランプラズマ / ラジカル計測 / 紫外透過分光法 / 出現質量分析法 / アモルファスシリコン / oxygen gettering / Hydrogen recycling / Lithium coating / Nuclear fusion / 酸素ゲッタリング / 水素リサイクリング / リチウムコーティング / 核融合 / 表面処理 / 長尺プラズマ / 均一プラズマ / 表面波 / スパッタ / 大気圧プラズ / 発光分光 / 電子密度計測 / 電界計測 / シュタルク効果 … More
Except Principal Investigator
プラズマプロセス / hydrogen recycling / 水素リサイクリング / エッチング / マイクロ波放電 / silicon oxidation / liquid crystal display / large area plasma / slot antenna / surface wave plasma / シリコン酸化 / スロットアンテナ / 表面波プラズマ / Plasma Process / 膜堆積 / XPS / イオンビーム / 中性ラジカル / CVD / プラズマ・壁相互作用 / 大口径プラズマ / oxygen gettering / decaborane / boron coating / 酸素ゲッタリング / デカボラン / ボロンコーティング / plasma CVD / surface magnetic field / plasma etching / 反応性プラズマ / 多極磁場 / 表面磁場 / プラズマCVD / プラズマエッチング / Double Plasma / Glow Discharge / Microwave Discharge / Electron Beam / Ion Beam / Thin Film / ダブルプラズマ / グブルプラズマ / グロー放電 / 電子ビーム / 機能性薄膜 / micro-crystalline silicon / solar cell / microwave discharge / 液晶デイスプレイ / 液晶ディスプレス / 微結晶シリコン / 液晶ディスプレイ / 太陽電池 / 大面積プラズマ / oxygen radical / poly-silicon / electron energy distribution function / 表面加熱 / 体積加熱 / 酸素ラジカル / ポリシリコン / 液晶 / 電子エネルギー分布関数 / Fluorocarbon plasma / Debye length / Dispersion relation / Sheath / Dielectric tube / Surface wave resonance / Plasma absorption probe / パワー吸収スペクトル / フロンプラズマ / シース / 表面波 / 分散関係 / プラズマ吸収プローブ / 堆積膜 / 電子密度 / Radical desorption / Wall control / Ion bombardment / RF bias / plasma-wall interaction / Silicon dioxide / Etching / ラジカル脱離 / 壁制御 / RFバイアス / シリコン酸化膜 / 経時変化 / クリーニング / イオン衝撃 / silicon / ion beam / neutral radical / surface reaction / etching / plaasma processing / プロズマプロセス / シリコン / 表面反応 / lithium hydroxide / lithium hydride / tritium / hydrogen desorption / wall pumping / low-Zmaterial coating / lithium / 水酸化リチウム / 水素化リチウム / 昇温脱離 / 水素脱離 / 壁排気 / 低Z材コーティング / リチウム / ECR plasma / impurity control / rithium coating / first wall conditioning / ECRプラズマ / 不純物制御 / リチウムコーティング / 第一壁コンディショニング / indium-tin-oxide film / Faraday shield / helicon plasma / inductively coupled plasma / high density plasma / plasma process / 電子ビーム不安定 / 電子密度測定 / 誘導型RF放電 / シリコン・エッチング / 高周波プラズマ / 誘導型RF / 永久磁石 / アンテナ電磁界 / ラジカル / ファラデシールド / ITO薄膜 / 選択ドライエッチング / ヘリコン波プラズマ / ITO膜 / ファラデーシールド / ヘリコンプラズマ / 誘導結合型プラズマ / 高密度プラズマ / nuclear fusion / diborane / boronization / 不純物 / シボラン / デガボラン / 核融合 / ジボラン / ボロニゼーション / plasma-surface interaction / fragmentation / radio frequency discharge / multi-dipole field / plasma processing / 電子ビ-ム / デポジション / プラズマ・表面相互作用 / フラグメンテ-ション / 高周波放電 Less
  • Research Projects

    (22 results)
  • Research Products

    (203 results)
  • Co-Researchers

    (22 People)
  •  気体流および液体流を用いた弱減圧マイクロ波プラズマ生成と応用Principal Investigator

    • Principal Investigator
      豊田 浩孝
    • Project Period (FY)
      2022 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 14030:Applied plasma science-related
    • Research Institution
      Nagoya University
  •  Wide range radical production by atmospheric pressure microwave plasma with molecular gas and applicationsPrincipal Investigator

    • Principal Investigator
      Toyoda Hirotaka
    • Project Period (FY)
      2016 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Plasma electronics
    • Research Institution
      Nagoya University
  •  Development of Inovative Measurement Technique of Radical Lifetime in LiquidPrincipal Investigator

    • Principal Investigator
      Toyoda Hirotaka
    • Project Period (FY)
      2016 – 2017
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Plasma electronics
    • Research Institution
      Nagoya University
  •  Production of meter-scale high density microwave plasma and elucisation of its physical mechanismPrincipal Investigator

    • Principal Investigator
      Toyoda Hirotaka
    • Project Period (FY)
      2013 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Plasma electronics
    • Research Institution
      Nagoya University
  •  Magnet-free microwave sputter deposition with uniform target utilizationPrincipal Investigator

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  High Precision Measurement of Plasma Density in Atmospheric Pressure PlasmaPrincipal Investigator

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Development of New Magnetron Plasma Source with Particle Energy ControlPrincipal Investigator

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Development of Giant Plasma Processing Based on Large-Area Microwave Discharge

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      2003 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Surface Reaction Processes of Fluorocarbon Molecule and Fundamental Research on New Etching ProcessPrincipal Investigator

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Development of Large-area High-quality LCD Processing by Surface Wave Plasma

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  New Technique for measuring electron density under soiled conditions and its application for precise process control

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Chubu University
  •  Study on Surface Reaction Processes Using High Performance Beam Device

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1998 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Development of new wall control method and plasma-wall interaction in fluorocarbon plasmas

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Chubu University
      Nagoya University
  •  Lower-Temperature Deposition of Poly-crystalline Silicon Film by High-Density PlasmaPrincipal Investigator

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Development of Selective Hydrogen Pumping Method Using Lithium Films

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Diagnostic and Control of Silane Plasmas by Newlv Developed Radical Measurement TechniquePrincipal Investigator

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Novel First-Wall Conditioning in Stationary Reactor Studies

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Basic study on lithium coating and plasma-surface processesPrincipal Investigator

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Optimization of Particle Control by Boronization

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Development of large-diameter RF plasmas under surface magnetic field

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Development of Low-Energy Particle-Beam Sources for Super-fine Plasma Processing

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B).
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Formation of Functional Thin Films by a Double Plasma Device

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University

All 2024 2023 2022 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 Other

All Journal Article Presentation Patent

  • [Journal Article] 大気圧マイクロ波放電による高密度長尺ラインプラズマ2019

    • Author(s)
      豊田浩孝、鈴木陽香
    • Journal Title

      応用物理

      Volume: Vol.88No.2 Pages: 101-104

    • NAID

      130007709464

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Journal Article] 液体処理用マイクロ波励起プラズマの生成2018

    • Author(s)
      豊田浩孝
    • Journal Title

      表面と真空

      Volume: 61(3) Pages: 113-118

    • NAID

      130006476138

    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Journal Article] Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment2018

    • Author(s)
      Kensuke Sasai, Kazuki Keyamura, Haruka Suzuki, and Hirotaka Toyoda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.57No.6

    • NAID

      210000149131

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Journal Article] Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow2018

    • Author(s)
      Hikaru Senba, Haruka Suzuki and Hirotaka Toyoda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.58No.SA

    • NAID

      210000135214

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Journal Article] Enhancement of Liquid Treatment Efficiency by Microwave Plasma under Flow-Induced Reduced Pressure2017

    • Author(s)
      Michiko Ito, Tomohiro Takahashi, Sho Takitou, Seigo Takashima, Norio Nomura, Tominori Kitagawa, Hirotaka Toyoda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56

    • NAID

      210000147442

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Journal Article] An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge2017

    • Author(s)
      Haruka Suzuki1and Hirotaka Toyoda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 2 Pages: 026201-026201

    • DOI

      10.7567/jjap.56.026201

    • NAID

      210000148431

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Journal Article] Desorption behavior of zinc atoms from zinc-sulfate solution irradiated with pulsed DC plasma2016

    • Author(s)
      Takafumi Takaba, Haruka Suzuki and Hirotaka Toyoda
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 49 Pages: 295202-295202

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Journal Article] Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave2015

    • Author(s)
      Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 1S Pages: 01AH09-01AH09

    • DOI

      10.7567/jjap.55.01ah09

    • NAID

      210000146006

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Journal Article] New line plasma source excited by 2.45 GHz microwave at atmospheric pressure2015

    • Author(s)
      Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
    • Journal Title

      Appl. Phys. Express

      Volume: 8

    • NAID

      210000137441

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Journal Article] 酸化物ターゲットを用いたRFマグネトロンプラズマにおける高エネルギー粒子の挙動2014

    • Author(s)
      豊田浩孝
    • Journal Title

      Journal of Vacuum Society of Japan

      Volume: Vol. 57No.3 Pages: 80-83

    • NAID

      130003394506

    • Data Source
      KAKENHI-PROJECT-24654189
  • [Journal Article] 酸化物ターゲットを用いたRFマグネトロンプラズマにおける高エネルギー粒子の挙動2014

    • Author(s)
      豊田 浩孝
    • Journal Title

      Journal of the Vacuum Society of Japan

      Volume: 57, No.3 Pages: 80-83

    • NAID

      130003394506

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Journal Article] A Development of Atmospheric Pressure Plasma Equipment and Its Applications for Treatment of Ag Films Formed from Nano-Particle Ink2013

    • Author(s)
      H. Itoh, Y. Kubota, Y. Kashiwagi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, H. Toyoda and M. Hori
    • Journal Title

      Journal of Physics : ConferenceSeries

      Volume: 441 Pages: 12019-12019

    • DOI

      10.1088/1742-6596/441/1/012019

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Journal Article] スパッタプラズマ中の高エネルギー粒子計測と制御2008

    • Author(s)
      豊田浩孝
    • Journal Title

      真空 51(4)(印刷中)

    • NAID

      10021157266

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Suppression of High-Energy Backscattered Particles in Magnetron Plasma2007

    • Author(s)
      Yusuke, Takagi, Hirotaka, Toyodaand, Hideo, Sugai
    • Journal Title

      Japanese Journal of Applied Physics 46(12)

      Pages: 7865-7869

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Suppression of Super High-Energy Species by VHF-DC Superimposed Magnetron Sputter Plasma2007

    • Author(s)
      Y. Sakashita, Y. Takagi, T. Kato, H. Toyoda, S. Iwata, S. Tsunashima, H. Sugai
    • Journal Title

      Transaction of Materials Research Society of Japan 32(2)

      Pages: 481-484

    • NAID

      130007922833

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Suppression of High-Energy Backscattered Particles in Magnetron Plasma2007

    • Author(s)
      Yusuke Takagi, Hirotaka Toyoda and Hideo Sugai
    • Journal Title

      Japanese Journal of Applied Physics 46(12)

      Pages: 7865-7869

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Suppression of Super High-Energy Species by VHF-DC Superimposed Magnetron Sputter Plasma2007

    • Author(s)
      Y. Sakashita, Y. Takagi, T. Kato, H. Toyoda, S. Iwata, S. Tsunashima and H. Sugai
    • Journal Title

      Transaction of Materials Research Society of Japan 32(2)

      Pages: 481-484

    • NAID

      130007922833

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Generation processes of super high energy atoms and ions in magnetron sputtering plasma2006

    • Author(s)
      Y. Takagi, Y. Sakashita, H. Toyoda, H. Sugai
    • Journal Title

      Vacuum 80

      Pages: 581-587

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Generation processes of super high energy atoms and ions in magnetron sputtering plasma2006

    • Author(s)
      Y.Takagi, Y.Sakashita, H.Toyoda, H.Sugai
    • Journal Title

      Vacuum 80

      Pages: 581-587

    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Slot-Excited Surface Wave Plasma for Giant Scale Processing2006

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, H.Toyoda
    • Journal Title

      Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

      Pages: 17-18

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Slot-Exited Surface Wave Plasma for Giant Scale Processing2006

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, H.Toyoda
    • Journal Title

      Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

      Pages: 17-18

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Numberical Simulation of Energetic Species in a VHF-DC Magnetron Plasma and Comparison with Experiments2006

    • Author(s)
      H.Toyoda, Y.Sakashita, Y.Takagi, H.Sugai
    • Journal Title

      Abstract of 6th International Conference on Reactive Plasmas, Matsushima, Japan

      Pages: 255-256

    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Dependence of GMR in Co/Cu Multilayers on Sputtering Conditions2006

    • Author(s)
      C.C.Chen, S.Iwata, S.Tsunashima, H.Toyoda, H.Sugai et al.
    • Journal Title

      Abstract of 6th International Conference on Reactive Plasmas, Matsushima, Japan

      Pages: 689-690

    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Energy Control of Backscattered Rare Gas Atoms by VHF-DC Superimposed Magnetron Sputtering (Invited)2006

    • Author(s)
      Hirotaka Toyoda, Hideo Sugai
    • Journal Title

      Proc. The 17th Symposium of The Materials Research Society of Japan, International Session, Tokyo, Japan

      Pages: 174-174

    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Energetic Particle Reduction on Substrate in Cylindrical Magnetron Sputter System2006

    • Author(s)
      Y.Takagi, Y.Sakashita, H.Toyoda, H.Sugai
    • Journal Title

      Abstract of 6th International Conference on Reactive Plasmas, Matsushima, Japan

      Pages: 767-768

    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Dependences of Giant Magnetoresistance in Co/Cu Multilayers on Sputtering Conditions2006

    • Author(s)
      C.C.Chen, S.Iwata, S.Tsunashima, H.Toyoda, H.Sugai et al.
    • Journal Title

      Japanese Journal of Applied Physics 45(10)

      Pages: 8466-8468

    • NAID

      10018340234

    • Data Source
      KAKENHI-PROJECT-18540489
  • [Journal Article] Evidence of Direct SiO_2 Etching by Fluorocarbon Molecules under Ion Bombardment2005

    • Author(s)
      N.Takada, H.Toyoda, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 97・1

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Gas Feed Position Control for High-Quality μc-Si Film Deposition at High Speed in Surface Wave Plasma2005

    • Author(s)
      Y.Hotta, T.Okayasu, Y.Takanishi, H.Toyoda, H.Sugai
    • Journal Title

      Proceedings of 5th International Symposium on Dry process

      Pages: 297-298

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Diagnostics of Surface Wave Plasmas for Giant Materials Processing2005

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, E.Stamatc, H.Toyoda
    • Journal Title

      Abstracts of 17th International Symposium on Plasma Chemistry

      Pages: 56-57

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Evidence of Direct SiO_2 Etching by Fluorocarbon Molecules under Ion Bombardment2005

    • Author(s)
      N.Takada, H.Toyoda, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 97・1

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Diagnostics of Surface Wave Plasmas for Giant Materials Processing2005

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, E.Stamate, H.Toyoda
    • Journal Title

      Abstracts of 17th International Symposium on Plasma Chemistry

      Pages: 56-57

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Beam Study on the Si and SiO_2 Etching Processes by Energetic Fluorocarbon Ions2004

    • Author(s)
      H.Toyoda, H.Morishima, R.Fukute, Y.Hod, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 95・5

      Pages: 5172-5179

    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Influence of Dielectric Window Material and Pumping Speed on Silicon Film Crystallinity Deposited by Surface Wave Plasma2004

    • Author(s)
      Y.Hotta, H.Toyoda, H.Sugai
    • Journal Title

      Proceedings of 4th International Symposium on Dry Process

      Pages: 63-66

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Experiment Evidence of SiO_2 Etching by Co-Incidence of Fluorocarbon Molecule and Energetic Ar Ion Beam2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Proc.International Symposium on Dry Process ‘04

      Pages: 47-50

    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] High Speed Deposition of μc-Si and Large Grain Poly-Si Films by Surface-Wave Excited H_2/SiH_4 Plasma2004

    • Author(s)
      T.Toyoda, Y.Hotta, H.Sugai
    • Journal Title

      Abstracts of 15th Symposium of Materials Research Society of Japan

      Pages: 138-138

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Experiment Evidence of SiO_2 Etching by Co-Incidence of Fluorocarbon Molecule and Energetic Ar Ion Beam2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Proc.International Symposium on Dry Process '04

      Pages: 47-50

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Chemical Reactivity of Fluorocarbon Molecules on SiO_2/Si Surface under Co-Incidence with Energetic Argon Ions2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Abstracts Asia Pacific Conference on Plasma Science and Technology/Symposium on Plasma Science for Materials

      Pages: 368-368

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Beam Study on the Si and SiO_2_Etching Processes by Energetic Fluorocarbon Ions2004

    • Author(s)
      H.Toyoda, H.Morishima, R.Fukute, Y.Hori, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 95・5

      Pages: 5172-5179

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Chemical Reactivity of Fluorocarbon Molecules on SiO_2/Si Surface under Co-Incidence with Energetic Argon Ions2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Abstracts Asia Pacific Conference on Plasma Science and Technology / Symposium on Plasma Science for Materials

      Pages: 368-368

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Impurity Release and Suppression in Deposition of Nano-Micro and Poly-crystalline Sillicon Films by a Surface-Wave Excited Plasma2004

    • Author(s)
      H.Toyoda, S.Somiya, Y.Hotta, H.Sugai
    • Journal Title

      Proceedings of International Workshop on Plasma Nano-Technology and Its Future Vision

      Pages: 17-17

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Beam Study on the Si and SiO_2 Etching Processes by Energetic Fluorocarbon Ions2004

    • Author(s)
      H.Toyoda, H.Morishima, R.Fukute, Y.Hori, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 95・5

      Pages: 5172-5179

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Suppression and Oxygen Impurity Incorporationinto Silicon Films Prepared from Surface-Wave Excited H_2/SiH_4 Plasma2004

    • Author(s)
      S.Somiya, H.Toyoda, Y.Hotta, H.Sugai
    • Journal Title

      Japanese Journal of Applied Physics Vol.43, No.11A

      Pages: 7696-7700

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Suppression and Oxygen Impurity Incorporation into Silicon Films Prepared from Surface-Wave Excited H_2/SiH_4 Plasma2004

    • Author(s)
      S.Somiya, H.Toyoda, Y.Hotta, H.Sugai
    • Journal Title

      Japanese Journal of Applied Physics 43・11A

      Pages: 7696-7700

    • NAID

      10014030844

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Observation of SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecules and Energetic Argon Ions2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Proc.Int.COE Forum on Plasma Science and Technology

      Pages: 209-210

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Observation of SiO_2 Surface Irradiated by Fluorocarbon Neutrals and Energetic Ion Beam2003

    • Author(s)
      H.Toyoda, N.Takada, H.Sugai
    • Journal Title

      Proc.Int.Sympo.Dry Process '03

      Pages: 259-264

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Observation of Etching Reactions on SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecule and Ion Beam (Invited)2003

    • Author(s)
      H.Toyoda
    • Journal Title

      26th Int.Conf.on Phenomena in Ionized Gases

      Pages: 137-138

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Patent] スパッタ成膜装置2013

    • Inventor(s)
      笹井建典、豊田浩孝
    • Industrial Property Rights Holder
      東海ゴム工業株式会社、名古屋大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-015453
    • Filing Date
      2013-01-30
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Swirl flow introduction for stabilized discharge in a liquid-flow plasma system2024

    • Author(s)
      Kengo Yunoki, Haruka Suzuki, Kensuke Sasai, Suguru Masuzaki, Hiromi Hayashi, Takanori Murase, Sho Nakagawa, Yuto Yanagihara, and Hirotaka Toyoda
    • Organizer
      Abstract of ISPlasma2024/IC-PLANTS2024
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] 気体流による減圧形成を応用した放電易化におけるノズル電極の構造検討2023

    • Author(s)
      小川泰那, 中林賢二, 鈴木陽香, 豊田浩孝
    • Organizer
      プラズマ・核融合学会年会
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] 高速ガス流を用いた弱減圧マイクロ波プラズマ生成にむけた減圧形成シミュレーション2023

    • Author(s)
      中林 賢二,小川 泰那,鈴木 陽香, 豊田 浩孝
    • Organizer
      電気・電子情報関係学会東海支部連合講演会
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] 流動液体プラズマ処理装置を用いたAgナノ粒子合成における生成性能評価2023

    • Author(s)
      柚木健吾, 鈴木陽香, 豊田浩孝
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] Production and Application of High-density Microwave Plasma in Contact with Flowing Liquid2023

    • Author(s)
      Haruka Suzuki, Hirotaka Toyoda
    • Organizer
      13th Asia European International Conference on Plasma Surface Engineering
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] Microwave plasma production under air-flow-induced reduced pressure2023

    • Author(s)
      Taina Ogawa, Yuki Iwata, Haruka Suzuki and Hirotaka Toyoda
    • Organizer
      ISPlasma2023/IC-PLANTS2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] Microwave plasma source development and applications from low pressure to atmospheric pressure2022

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      6th Asia-Pacific Conference on Plasma Physics
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] マイクロ波プラズマ技術による大気圧プラズマ生成と液体処理2022

    • Author(s)
      豊田浩孝
    • Organizer
      第16回日本電磁波エネルギー応用学会
    • Invited
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] Continuous liquid treatment by high-density microwave plasma in flowing liquid2022

    • Author(s)
      Haruka Suzuki, Hirotaka Toyoda
    • Organizer
      11th International Conference on Reactive Plasmas/75th Annual Gaseous Electronics Conference
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22481
  • [Presentation] メートル級長尺スロット型プラズマ源における 大気圧マイクロ波プラズマの顕微計測2019

    • Author(s)
      小間 浩嗣、 小池 洋右、 鈴木 陽香、 豊田 浩孝、
    • Organizer
      SPP-36/SPMS-32、 第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] シミュレーションを援用した大気圧マイクロ波プラズマ源の非対称断面導波管内電磁界分布の解析 A Systematic Analysis of Modified Waveguide Structure for Atmospheric-Pressure Microwave Plasma Source via Simulations2019

    • Author(s)
      チュー マン・フン、鈴木 陽香、 豊田 浩孝
    • Organizer
      SPP-36/SPMS-32、 第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Time-resolved Measurement of Cross-Sectional Structure of a Narrow Gap Plasma Produced by an Atmospheric Pressure Microwave Discharge2019

    • Author(s)
      Yoshiki Baba, Haruka Suzuki and Hirotaka Toyoda
    • Organizer
      ISPlasma/IC-PLANTS2019,Nagoya Institute of Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Optimized waveguide structure for atmospheric pressure microwave plasma2019

    • Author(s)
      Manh Hung Chu,Haruka Suzuki ,Hirotaka Toyoda
    • Organizer
      ISPlasma/IC-PLANTS2019,Nagoya Institute of Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Microscopic Measurement of Long Microwave Plasma at Atmospheric Pressure2019

    • Author(s)
      Hirotsugu Koma, Yosuke Koike, Haruka Suzuki,Hirotaka Toyoda
    • Organizer
      ISPlasma/IC-PLANTS2019,Nagoya Institute of Technolog
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Oxygen Radical Measurement of Atmospheric Pressure Microwavw Line Plasma by Vacuum Ultraviolet Absorption Spectroscop2019

    • Author(s)
      Hansin Bae, Koike Yosuke, Hirotsugu Koma, Haruka Suzuki Hirotaka Toyoda
    • Organizer
      第66回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] スロット型大気圧マイクロ波プラズマの時空間分解計測2019

    • Author(s)
      馬場 賀己,鈴木陽香,豊田 浩孝
    • Organizer
      第66回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Time-resolved microscopic measurement of cross-sectional structure of slot excited atmospheric pressure microwave plasma スロット励起大気圧マイクロ波プラズマの断面構造の時分解顕微観測2019

    • Author(s)
      Yoshiki Baba, Haruka Suzuki, Hirotaka Toyoda 馬場賀己, 鈴木陽香, 豊田浩孝
    • Organizer
      SPP-36/SPMS-32、 第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 長尺大気圧マイクロ波プラズマ生成と表面処理の応用2019

    • Author(s)
      豊田浩孝
    • Organizer
      表面技術協会 第139回講演大会
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Oxygen radical measurement of atmospheric pressure microwave plasma employing vacuum ultraviolet absorption spectroscopy2019

    • Author(s)
      Hansin Bae, Koike Yosuke, Hirotsugu Koma, Haruka Suzuki Hirotaka Toyoda
    • Organizer
      ISPlasma/IC-PLANTS2019,Nagoya Institute of Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 大気圧長尺マイクロ波プラズマによる大面積高速表面処理2019

    • Author(s)
      小間 浩嗣 ,杉山 敦士 ,鈴木 陽香,本田 剛 ,豊田 浩
    • Organizer
      第66回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] メートル級長尺大気圧マイクロ波プラズマの顕微計測2018

    • Author(s)
      鈴木 陽香、小池 洋右、小間 浩嗣、馬場 賀己、豊田 浩孝
    • Organizer
      応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Long-scale atmospheric-pressure microwave plasma -production mechanism and its application-2018

    • Author(s)
      H. Toyoda, H. Suzuki Y. Koike, H. Koma, Y. Baba, J.H. Qiu, M.H. Chu, A. Sugiyama
    • Organizer
      JAPAN-RUB Workshop on Plasma Science
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] スロット励起大気圧マイクロ波プラズマにおけるスロット断面構造の顕微観測2018

    • Author(s)
      馬場賀己, 鈴木陽香,豊田浩孝
    • Organizer
      平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] スロット励起マイクロ波プラズマを用いた水蒸気プラズマ処理プロセス/Water Vapor Plasma Treatment Process using Slot-Excited Microwave Plasma2018

    • Author(s)
      鈴木陽香、豊田浩孝
    • Organizer
      第28回 日本MRS年次大会, 28th Annual Meeting of MRS-Japan 2018
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 大気圧長尺マイクロ波プラズマにおける電力吸収の空間分布2018

    • Author(s)
      小池 洋右,田村 宥人,鈴木 陽香,豊田 浩孝
    • Organizer
      第65回応用物理学会春季学術講演会講演
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 大気圧下でのメートル級マイクロ波プラズマの生成と応用2018

    • Author(s)
      鈴木陽香、豊田浩孝
    • Organizer
      プラズマ核融合学会 第35回年会
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Meter-scale atmospheric-pressure microwave plasma for molecular gas processes2018

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      19th International Congress on Plasma Physics
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Meter-scale atmospheric pressure microwave line plasma and its applications.2018

    • Author(s)
      H. Toyoda
    • Organizer
      Xth INTERNATIONAL WORKSHOP on MICROWAVE DISCHARGES: Fundamentals and Applications
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Scaling of Microwave Absorption in Atmospheric Pressure Microwave Line Plasma2018

    • Author(s)
      Ivan Ganachev, Haruka Suzuki, and Hirotaka Toyoda
    • Organizer
      The Eighteenth Biennial IEEE Conference on Electromagnetic Field Computation (CEFC2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Ring-shaped microwave plasma production in liquid flow environment for nanoparticle synthesis2018

    • Author(s)
      S. Fujimura, S. Yang, K. Sasai, H. Suzuki and H. Toyoda
    • Organizer
      The 40th International Symposium on Dry Process
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] A coaxial-waveguide microwave plasma source for in-line treatment of large volume liquid2018

    • Author(s)
      Shohei Fujimura, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda
    • Organizer
      ISPlasma2018 / IC-PLANTS2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] 大気圧マイクロ波ラインプラズマにおける酸素原子の紫外吸収分光計測2018

    • Author(s)
      BAE Hansin,小池洋右,小間浩嗣,鈴木陽香,豊田浩孝
    • Organizer
      プラズマ核融合学会 第35回年会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 同軸導波管の外部導体ギャップ間におけるマイクロ波プラズマ生成2018

    • Author(s)
      藤村 昇平, 鈴木 陽香, 笹井 建典, 豊田 浩孝
    • Organizer
      第65回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] Observation of cross sectional plasma structure in a gap of an atmospheric pressure microwave discharge2018

    • Author(s)
      Hirotaka Toyoda Yoshiki Baba Haruka Suzuki
    • Organizer
      71st Annual Gaseous Electronics Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Power Absorption Mechanism of Atmospheric-Pressure Microwave Line Plasma2018

    • Author(s)
      Haruka Suzuki, Yosuke Koike, Yuto Tamura, Yoshiki Baba and Hirotaka Toyoda
    • Organizer
      ISPlasma2018 / IC-PLANTS2018
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] High speed photoresist removal using slot-excited atmospheric-pressure microwave O2/CF4 plasma2018

    • Author(s)
      Shota Ishikaw, Haruka Suzuki, Tsuyoshi Honda and Hirotaka Toyoda
    • Organizer
      The 40th International Symposium on Dry Process
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 大気圧メートル級長尺マイクロ波ラインプラズマの顕微計測2018

    • Author(s)
      小間 浩嗣、小池 洋右、鈴木 陽香、豊田 浩孝
    • Organizer
      平成30年度電気・電子・情報関係学会東海支部連合大会講演論文集
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 電磁界シミュレーションを用いた大気圧長尺マイクロ波プラズマにおける定在波抑制2018

    • Author(s)
      小池 洋右、小間 浩嗣、鈴木 陽香、豊田 浩孝
    • Organizer
      応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Space-Resolved Measurement of Microwave Power along Waveguide in Atmospheric Pressure Microwave Line Plasma2018

    • Author(s)
      Yosuke Koike, Haruka Suzuki, Yuto Tamura, Yoshiki Baba and Hirotaka Toyoda
    • Organizer
      ISPlasma2018 / IC-PLANTS2018
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] マイクロ波インライン液体処理における反応領域の空間分布計測2017

    • Author(s)
      堤和紀,滝藤奨,藤村昇平, 鈴木陽香,豊田浩孝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜 (神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] Development of Microwave Plasma Sources and its Application to Materials Processing2017

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      27th Annual Meeting of MRS-Japan 2017
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 改良導波管および連続発振マイクロ波電力によるメートル級長尺大気圧ラインプラズマの効率的生成2017

    • Author(s)
      鈴木 陽香,田村 宥人,猪俣 弥雄起, 伊藤 仁,関根 誠,堀 勝,豊田 浩孝
    • Organizer
      第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2017-01-17
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] インラインマイクロ波プラズマ処理の高流速化による有機物分解効率の向上2017

    • Author(s)
      堤和紀,滝藤奨,藤村昇平, 伊藤美智子,高島成剛,鈴木陽香,豊田浩孝
    • Organizer
      第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2017-01-16
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] Long-scale N2 line plasma production under atmospheric pressure2017

    • Author(s)
      Haruka Suzuki, Yuto Tamura, Yaoki Inomata, Hitoshi Itoh, Makoto Sekine, Masaru Hori, and Hirotaka Toyoda
    • Organizer
      9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      中部大学(愛知県・春日井市)
    • Year and Date
      2017-03-02
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 大気圧マイクロ波プラズマCVDによるSiO2膜形成及び膜評価2017

    • Author(s)
      石川 翔太、鈴木 陽香、豊田 浩孝
    • Organizer
      Plasma Conference 2017
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 長尺ラインプラズマ生成のための改良型導波管の電磁界シミュレーション2017

    • Author(s)
      田村 宥人,鈴木 陽香,猪俣 弥雄起, 伊藤 仁,関根 誠,堀 勝,豊田 浩孝
    • Organizer
      第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2017-01-16
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Power Absorption Mechanism of Atmospheric Microwave Line Plasma2017

    • Author(s)
      H. Suzuki, Y. Koike, Y. Tamura, Y. Baba, and H. Toyoda
    • Organizer
      DPS2017
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Shielding of plasma jets from ambient air by water flow certain2017

    • Author(s)
      Hikaru Senba, Yosuke Koike, Haruka Suzuki and Hirotaka Toyoda
    • Organizer
      9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      中部大学(愛知県・名古屋市)
    • Year and Date
      2017-03-02
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] Improvement of SiO2 film properties synthesized by plasma-enhanced chemical vapor deposition using slot-type microwave plasma with O 2/TEOS2017

    • Author(s)
      S. Ishikawa , M. Yamamoto, H. Suzuki, and H. Toyoda
    • Organizer
      IUMRS-ICAM 2017
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Microwave plasma production inside the micro-gap with metergap with meter -scale length2017

    • Author(s)
      H. Suzuki and H. Toyoda
    • Organizer
      IWM 2017
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] マイクロ波励起長尺大気圧プラズマにおけるプラズマ維持機構の検討2017

    • Author(s)
      田村 宥人 ,猪俣 弥雄起 , 鈴木 陽香 , 豊田 浩孝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜 (神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] スロット励起大気圧マイクロ波プラズの電力消費に関する電磁界シミュレーョン2017

    • Author(s)
      鈴木 陽香 ,小池 洋右 , 田村 宥人 , 馬場 賀己 , 豊田 浩孝
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 水流により遮蔽された空間での大気圧プラズマジェット生成2017

    • Author(s)
      仙波 輝 , 小池 洋右 , 鈴木 陽香 , 豊田 浩孝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜 (神奈川県・横浜市)
    • Year and Date
      2017-03-14
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Meter -scale microwave plasma production with various discharge gases for large-area surface treatment under atmospheric pressure2017

    • Author(s)
      H. Suzuki, Y. Tamura, Y. Inomata, and H. Toyoda
    • Organizer
      IUMRS-ICAM 2017
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Introduction to Plasma Production - from Breakdown to Plasma Sustainment -2017

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      中部大学(愛知県・春日井市)
    • Year and Date
      2017-03-01
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 電磁界シミュレーションを用いた大気圧マイクロ波ラインプラズマの均一性向上の検討2017

    • Author(s)
      小池 洋右、田村 宥人、鈴木 陽香、豊田 浩孝
    • Organizer
      Plasma Conference 2017
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Film quality improvement in slot-type microwave plasma CVD of SiO22017

    • Author(s)
      Masaki Yamamoto, Shota Ishikawa, Haruka Suzuki, and Hirotaka Toyoda
    • Organizer
      9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      中部大学(愛知県・春日井市)
    • Year and Date
      2017-03-04
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Development of atmospheric pressure microwave plasma source for large-area surface treatment2017

    • Author(s)
      H. Suzuki and H. Toyoda
    • Organizer
      The 22th KJ workshop
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] マイクロ波インライン液体処理における反応領域のその場計測2017

    • Author(s)
      堤 和紀 ,藤村 昇平, 鈴木 陽香,豊田 浩孝
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] 大気圧マイクロ波ラインプラズマにおける電力吸収機構2017

    • Author(s)
      田村 宥人, 小池 洋右 , 鈴木 陽香 , 豊田 浩孝
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] マイクロ波励起メートル級大気圧プラズマの生成とその特性2017

    • Author(s)
      鈴木陽香 ,田村宥人 ,猪俣弥雄起 ,関根誠 ,堀勝 ,豊田浩孝
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜 (神奈川県・横浜市)
    • Year and Date
      2017-03-17
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] ギャップ型マイクロ波プラズマ源の改良による液体処理能力向上2017

    • Author(s)
      藤村 昇平、堤 和紀、鈴木 陽香、豊田 浩孝
    • Organizer
      Plasma Conference 2017
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] Production of long-scale atmospheric pressure microwave plasma2017

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      AAPPS-DPP2017
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Power absorption of atmospheric-pressure microwave-line-plasma2017

    • Author(s)
      HIROTAKA TOYODA, HARUKA SUZUKI, YUTO TAMURA, YOSUKE KOIKE, YOSHIKI BABA
    • Organizer
      GEC2017
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 空間分解型吸収分光装置を用いたプラズマによる有機溶質分解過程の調査2017

    • Author(s)
      藤村 昇平, 堤 和紀, 鈴木 陽香, 豊田 浩孝
    • Organizer
      平成29年度電気・電子・情報関係学会東海支部連合大会
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] スロット励起大気圧マイクロ波プラズマCVDによるSiO2薄膜形成2017

    • Author(s)
      石川 翔太,鈴木 陽香,豊田 浩孝
    • Organizer
      平成29年度電気・電子・情報関係学会東海支部連合大会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Introduction to Plasma Production - from Breakdown to Plasma Sustainment -2017

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/10th International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      中部大学(愛知県・名古屋市)
    • Year and Date
      2017-03-01
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] スロット励起大気圧マイクロ波プラズマにおける消費電力シミュレーション2017

    • Author(s)
      小池 洋右,田村 宥人,馬場 賀己,鈴木 陽香,豊田 浩孝
    • Organizer
      平成29年度電気・電子・情報関係学会東海支部連合大会
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Optical measurement of meter-scale microwave line plasma under atmospheric pressure2017

    • Author(s)
      H. Suzuki, Y. Tamura, Y. Inomata, and H. Toyoda
    • Organizer
      ICPIG 2017
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Two-Dimensional Atomic Absorption Spectroscopy of Plasma-Stimulated Zn Atom Desorption from ZnSO4 Solution2016

    • Author(s)
      H. Toyoda, T. Takaba, H. Suzuki
    • Organizer
      7th International Workshop on Plasma Spectroscopy
    • Place of Presentation
      名鉄犬山ホテル(愛知県・犬山市)
    • Year and Date
      2016-06-27
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] Development of microwave plasma sources and its applications2016

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      The 6th International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Gyeongju (Korea)
    • Year and Date
      2016-09-28
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 窒素ガスを用いたマイクロ波大気圧ラインプラズマの生成2016

    • Author(s)
      田村 宥人,鈴木 陽香,伊藤 仁,関根 誠,堀 勝,豊田 浩孝
    • Organizer
      平成28年度電気・電子・情報関係学会東海支部連合大会
    • Place of Presentation
      豊田工業高等専門学校
    • Year and Date
      2016-09-03
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] High speed deposition of SiO2 lm by slot-type microwave CVD system2016

    • Author(s)
      HIROTAKA TOYODA, MASAKI YAMAMOTO, HARUKA SUZUKI
    • Organizer
      69th Annual Gaseous Electronics Conference
    • Place of Presentation
      Bochum (Germany)
    • Year and Date
      2016-10-12
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 大気圧高密度マイクロ波プラズマの生成とその応用2016

    • Author(s)
      豊田 浩孝
    • Organizer
      2016年真空・表面科学合同講演会
    • Place of Presentation
      名古屋国際会議場(愛知県・名古屋市)
    • Year and Date
      2016-11-29
    • Invited
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] High-speed -camera observation of plasma behavior in atmospheric-pressure microwave line plasma2016

    • Author(s)
      H. Suzuki, H. Ito, M. Sekine, M. Hori, H. Toyoda
    • Organizer
      7th International Workshop on Plasma Spectroscopy
    • Place of Presentation
      名鉄犬山ホテル(愛知県・犬山市)
    • Year and Date
      2016-06-27
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path2016

    • Author(s)
      Haruka Suzuki, Sho Takitou, Hirotaka Toyoda
    • Organizer
      The 6th International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Gyeongju (Korea)
    • Year and Date
      2016-09-28
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] 改良型導波管構造によるマイクロ波励起純窒素大気圧ラインプラズマの生成2016

    • Author(s)
      鈴木陽香 ,田村宥人 ,伊藤仁 ,関根誠 ,堀勝 ,豊田浩孝
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-15
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] O2/TEOS スロット型マイクロ波プラズマCVD によるSiO2 膜形成2016

    • Author(s)
      山本 匡毅、鈴木 陽香、豊田 浩孝
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-16
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] インラインマイクロ波プラズマの流路狭小化による液体処理性能向上2016

    • Author(s)
      滝藤 奨、伊藤 美智子 、高島 成剛、野村 記生、北川 富則、豊田 浩孝
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県・新潟市)
    • Year and Date
      2016-09-16
    • Data Source
      KAKENHI-PROJECT-16K13710
  • [Presentation] スロット内生成マイクロ波プラズマを用いた高速プラズマCVD2016

    • Author(s)
      山本 匡毅、鈴木 陽香、豊田 浩孝
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学 (東京都目黒区)
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] 100% N2 atmospheric-pressure microwave-line-plasma production with a modi ed waveguide structure2016

    • Author(s)
      HARUKA SUZUKI, YUTO TAMURA, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI, HIROTAKA TOYODA
    • Organizer
      69th Annual Gaseous Electronics Conference
    • Place of Presentation
      Bochum (Germany)
    • Year and Date
      2016-10-12
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] 大気圧高密度マイクロ波プラズマの生成とその応用2016

    • Author(s)
      豊田 浩孝
    • Organizer
      2016年真空・表面科学合同講演会
    • Place of Presentation
      名古屋国際会議場(愛知県・名古屋市)
    • Year and Date
      2016-11-29
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Plasma -enhanced chemical vapor deposition of SiO2 films by slot type microwave plasma with O2/TEOS2016

    • Author(s)
      Haruka Suzuki, Masaki Yamamoto, and Hirotaka Toyoda
    • Organizer
      The 38th International Symposium on Dry Process
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2016-11-22
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03893
  • [Presentation] Application of Atmospheric-Pressure Microwave Line Plasma for Low Temperature Process2015

    • Author(s)
      HARUKA SUZUKI, SUGURU NAKANO, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI, HIROTAKA TOYODA
    • Organizer
      9th International Conference on Reactive Plasmas / 68rd Gaseous Electronics Conference / 33th Symposium on Plasma Processing
    • Place of Presentation
      Hawaii Convention Center, Honolulu, Hawaii (U.S.A.)
    • Year and Date
      2015-10-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Gas Temperature Measurement in Atmospheric-Pressure Microwave Line Plasmas2015

    • Author(s)
      HARUKA SUZUKI, SUGURU NAKANO, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
    • Organizer
      ISPlasma2015/IC-PLANTS2015
    • Place of Presentation
      Nagoya University (Nagoya, Japan)
    • Year and Date
      2015-03-30
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] 大気圧マイクロ波ラインプラズマにおけるプラズマ挙動シミュレーション2015

    • Author(s)
      鈴木 陽香,中野 優,伊藤 仁,関根誠,堀 勝,豊田 浩孝
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学 湘南キャンパス (神奈川県平塚市)
    • Year and Date
      2015-03-12
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] 大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性2015

    • Author(s)
      鈴木陽香, 中野優, 伊藤仁, 関根誠, 堀勝, 豊田浩孝
    • Organizer
      第32回プラズマ・核融合学会 年会
    • Place of Presentation
      名古屋大学(愛知県・名古屋市)
    • Year and Date
      2015-11-26
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma2015

    • Author(s)
      Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県・名古屋市)
    • Year and Date
      2015-09-15
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] スロット内生成マイクロ波プラズマの基礎的検討2015

    • Author(s)
      山本 匡毅,鈴木 陽香,豊田 浩孝
    • Organizer
      平成27年度電気・電子・情報関係学会東海支部連合大会
    • Place of Presentation
      名古屋工業大学(愛知県・名古屋市)
    • Year and Date
      2015-09-29
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Development of Magnet-Free Uniform Sputtering System by RF and Microwave Power Superposition2014

    • Author(s)
      Hagihara, T. Noda and H. Toyoda
    • Organizer
      8^<th> Int. Conf. on Reactive Plasmas
    • Place of Presentation
      Fukuoka, Japan
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Plasma movement mechanism in pseudo-continuous meter-scale atmospheric-pressure line plasma2014

    • Author(s)
      Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道・札幌市)
    • Year and Date
      2014-09-17
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] プラズマ技術とその産業応用2014

    • Author(s)
      豊田 浩孝
    • Organizer
      プラズマ技術講演会 第51回プラズマが拓くものづくり研究会
    • Place of Presentation
      ポートメッセなごや(愛知県・名古屋市)
    • Year and Date
      2014-10-23
    • Invited
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Magnet-Free Sputtering System Using Surface Wave Plasma2014

    • Author(s)
      T. Hagihara, T. Noda and H. Toyoda
    • Organizer
      2014 Int. Sympo. on Plasma and Its Application to Nitride and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Pseudo-continuous meter-scale microwave plasma production under atmospheric pressure2014

    • Author(s)
      Hirotaka Toyoda, Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine and Masaru Hori
    • Organizer
      67th Annual Gaseous Electronics Conference
    • Place of Presentation
      Marriott City Center and Raleigh Convention Center (Raleigh, North Carolina, USA)
    • Year and Date
      2014-11-07
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Plasma Science for Future Nanotechnology2014

    • Author(s)
      Hirotaka Toyoda
    • Organizer
      The GRDC Symposium 2014
    • Place of Presentation
      Konkuk University (Seoul, Korea)
    • Year and Date
      2014-11-11
    • Invited
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] 狭ギャップスロットアンテナを用いた大気圧ラインプラズマ生成2014

    • Author(s)
      中野優, 鈴木陽香, 伊藤仁, 関根誠, 堀勝, 豊田浩孝
    • Organizer
      Plasma Conference 2014
    • Place of Presentation
      Toki Messe (Niigata, Japan)
    • Year and Date
      2014-11-19
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Development of Magnet-Free Sputtering System for Dielectric Film Deposition2013

    • Author(s)
      T. Noda and H. Toyoda
    • Organizer
      35^<th> Int. Sympo. Dry Process
    • Place of Presentation
      Jeju, Korea
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Development of Magnet-Free Sputtering System for Dielectric Film Deposition with Surface-wave Excited Plasma2013

    • Author(s)
      Noda and H. Toyoda
    • Organizer
      66^<th> Gaseous Electronics Conference
    • Place of Presentation
      Princeton, USA
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] シュタルク分光を用いた大気圧パルスマイクロ波プラズマの時空間分解計測2012

    • Author(s)
      村瀬卓也,石島達夫,豊田浩孝
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京)
    • Year and Date
      2012-03-18
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Eemporal-Spatial Measurement of Electric Field Using Stark Spectroscopy in Atmospheric-pressure Pulsed Slot-antenna Microwave Plasma2012

    • Author(s)
      T. Murase, T. Ishijima and H. Toyoda
    • Organizer
      The 5th International Conference on Plasma-Nanotechnology & Science
    • Place of Presentation
      犬山国際観光センター(愛知)
    • Year and Date
      2012-03-12
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Temporal-Spatial Measurement of Electric Field Using Stark Spectroscopy in Atmospheric-pressure Pulsed Slot-antenna Microwave Plasma2012

    • Author(s)
      T.Murase, T.Ishijima, H.Toyoda
    • Organizer
      The 5th International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      犬山国際観光センター(愛知県)
    • Year and Date
      2012-03-12
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Spatio-temporal Variation of Microwave Electric Field in an Atmospheric Pressure Slot-antenna Microwave Plasma2012

    • Author(s)
      TAKUYA MURASE, TATSUO ISHIJIMA HIROTAKA TOYODA
    • Organizer
      4th International Symposium On Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      中部大学(愛知県)
    • Year and Date
      2012-03-06
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Spatio-temporal Variation of Microwave Electric Field in an Atmospheric Pressure Slot-antenna Microwave Plasma2012

    • Author(s)
      T. Murase, T. Ishijima and H. Toyoda
    • Organizer
      4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      中部大学(愛知)
    • Year and Date
      2012-03-06
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] シュタルク分光を用いた大気圧パルスマイクロ波プラズマの時空間分解計測2012

    • Author(s)
      村瀬卓也, 石島達夫, 豊田浩孝
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-18
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 時空間発光分光によるスロットアンテナ励起大気圧マイクロ波プラズマの診断2011

    • Author(s)
      村瀬卓也, 石島達夫, 豊田浩孝
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      石川音楽堂(石川県)
    • Year and Date
      2011-11-22
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 大気圧パルスマイクロ波プラズマの時空間発光分光計測2011

    • Author(s)
      村瀬卓也,石島達夫,豊田浩孝
    • Organizer
      応用物理学会プラズマエレクトロニクス分科会20周年記念特別シンポジウム
    • Place of Presentation
      名古屋大学(愛知)
    • Year and Date
      2011-10-22
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Influence of microwave electric field on Hβbroadening in atmospheric pressure microwave plasma2011

    • Author(s)
      H. Toyoda, T. Murase and T. Ishijima
    • Organizer
      64th Annual Gaseous Electronics Conference
    • Place of Presentation
      Utah(USA)
    • Year and Date
      2011-11-15
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Time and Space Resolved Measrement of Microwave Electric Field in Atmospheric Pressure Plasma2011

    • Author(s)
      H Toyoda, A Kamata, T Murase, T Ishijima.
    • Organizer
      The 12th International Workshop of Advanced Plasma Processing and Diagnostics
    • Place of Presentation
      九州大学(福岡県)
    • Year and Date
      2011-01-05
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Space and Time Resolved Measurement of Electric Fleld in Atmospheric-pressure Pulsed Microwave Plasma2011

    • Author(s)
      T.Murase, A Kamata, T Ishijima, H Toyoda.
    • Organizer
      The 4th International Conference on Plasma Nano Technology & Science
    • Place of Presentation
      高山文化会館(岐阜県)
    • Year and Date
      2011-03-11
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Space-and Time-Resolved Measurement of Electric Field in Atmospheric-pressure Pulsed Microwave Plasma2011

    • Author(s)
      T. Murase, A. Kamata, T. Ishijima and H. Toyoda
    • Organizer
      The 4th International Conference on Plasma-Nanotechnology & Science
    • Place of Presentation
      高山文化会館(岐阜)
    • Year and Date
      2011-03-11
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Influence of microwave electric field on H_β broadening in atmospheric pressure microwave plasma2011

    • Author(s)
      H.Toyoda, T.Murase, T.Ishijima
    • Organizer
      64th Annual Gaseous Electronics Conference
    • Place of Presentation
      Utah (USA)
    • Year and Date
      2011-11-15
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Spatiotemporal measurement of microwave electric field in an atmospheric pressure microwave plasma2011

    • Author(s)
      H. Toyoda, T. Murase, T. Ishijima
    • Organizer
      The 13th International Workshop on Advanced Plasma Processing and Diagnostics(招待講演)
    • Place of Presentation
      Deajeon(Korea)
    • Year and Date
      2011-07-27
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 時空間発光分光によるスロットアンテナ励起大気圧マイクロ波プラズマの診断2011

    • Author(s)
      村瀬卓也,石島達夫,豊田浩孝
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      石川音楽堂(石川)
    • Year and Date
      2011-11-22
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Time-and Space-Resolved Characteristics of Ozone Concentration in Atmospheric Pressure Plasma using Ultra Short Pulses2011

    • Author(s)
      T. Murase, A. Kamata, T. Ishijima, Y Kinoshita, H. Kawauchi, K. Yoshida, and H. Toyoda
    • Place of Presentation
      Dalian(China)
    • Year and Date
      2011-07-06
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 時空間発光分光計測を用いた大気圧パルスマイクロ波ププズマ生成過程の観察2011

    • Author(s)
      村瀬卓也, 石島達夫, 豊田浩孝
    • Organizer
      平成23年度電気関係学会東海支部連合大会
    • Place of Presentation
      三重大学(三重県)
    • Year and Date
      2011-09-27
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Time and Space Resolved Measurement of Microwave Electric Field in Atmospheric Pressure Plasma2011

    • Author(s)
      H. Toyoda, A. Kamata, T. Murase, T. Ishijima
    • Organizer
      The 12th International Workshop of Advanced Plasma Processing and Diagnostics
    • Place of Presentation
      九州大学(福岡)
    • Year and Date
      2011-01-05
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 大気圧パルスマイクロ波プラズマの時空間発光分光計測2011

    • Author(s)
      村瀬卓也, 石島達夫, 豊田浩孝
    • Organizer
      応用物理学会プラズマエレクトロニクス分科会20周年記念特別シンポジウム
    • Place of Presentation
      名古屋大学(愛知県)
    • Year and Date
      2011-10-22
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Influence of Microwave Electric Field on Spatial and Time-Variation of H_β Spectra in Pulsed-Microwave Atmospheric Pressure Plasma2011

    • Author(s)
      T.Murase, A.Kamata, T.Ishijima, H.Toyoda
    • Organizer
      The XXX International Conference on Phenomena in Ionized Gases
    • Place of Presentation
      Belfast (Northern Ireland)
    • Year and Date
      2011-09-01
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Time-and Space-Resolved Characteristics of Ozone Concentration in Atmospheric Pressure Plasma using Ultra Short Pulses2011

    • Author(s)
      T.Murase, A.Kamata, T.Ishijima, Y.Kinoshita, H.Kawauchi, K.Yoshida, H.Toyoda
    • Organizer
      The 3rd International Conference on Microelectronics and Plasma Technology
    • Place of Presentation
      Dalian (China)
    • Year and Date
      2011-07-06
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Influence of Microwave Electric Field on Spatial and Time-Variation of HυSpectra in Pulsed-Microwave Atmospheric Pressure Plasma2011

    • Author(s)
      T. Murase, A. Kamata, T. Ishijima, H. Toyoda
    • Organizer
      The XXX International Conference on Phenomena in Ionized Gases
    • Place of Presentation
      Belfast(Northern Ireland)
    • Year and Date
      2011-09-01
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 時空間発光分光計測を用いた大気圧パルスマイクロ波プラズマ生成過程の観察2011

    • Author(s)
      村瀬卓也,石島達夫,豊田浩孝
    • Organizer
      平成23年度電気関係学会東海支部連合大会
    • Place of Presentation
      三重大学(三重)
    • Year and Date
      2011-09-27
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Spatiotemporal measurement of microwave electric field in an atmospheric pressure microwave plasma2011

    • Author(s)
      Hirotaka Toyoda, Takuya Murase, Tasuo Ishijima
    • Organizer
      The 13th International Workshop on Advanced Plasma Processing and Diagnostics
    • Place of Presentation
      Deajeon (Korea)(招待講演)
    • Year and Date
      2011-07-27
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 大気圧パルスマイクロ波プラズマにおける時空間発光分光計測2010

    • Author(s)
      鎌田安住, 石島達夫, 豊田浩孝
    • Organizer
      平成22年度電気関係学会東海支部連合大会
    • Place of Presentation
      中部大学(愛知県)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 水素原子偏光スペクトル計測を用いた大気圧パルスプラズマの外部印加電界強度の検討2010

    • Author(s)
      鎌田安住,楊海鵬,石島達夫,豊田浩孝
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川)
    • Year and Date
      2010-03-17
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 大気圧パルスマイクロ波プラズマの時分解発光分光計測2010

    • Author(s)
      鎌田安住,楊海鵬,石島達夫,豊田浩孝
    • Organizer
      第27回プラズマプロセシング研究会
    • Place of Presentation
      横浜市開港記念会館(神奈川)
    • Year and Date
      2010-02-03
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Diagnostics of atmospheric pressure plasma by space and time-resolved Stark broadening2010

    • Author(s)
      H Toyoda, A Kamata, T Murase, T.Ishijima.
    • Organizer
      The 2nd International Plasma Nanoscience Symposium
    • Place of Presentation
      New South Wales(Australia)
    • Year and Date
      2010-12-13
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 大気圧パルスマイクロ波プラズマの時分解発光分光計測2010

    • Author(s)
      鎌田安住, 楊海鵬, 石島達夫, 豊田浩孝
    • Organizer
      第27回プラズマプロセシング研究会
    • Place of Presentation
      横浜市開港記念会館(神奈川県)
    • Year and Date
      2010-02-03
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 水素原子偏光スペクトル計測を用いた大気圧パルスプラズマの外部印加電界強度の検討2010

    • Author(s)
      鎌田安住, 楊海鵬, 石島達天 豊田浩孝
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川県)
    • Year and Date
      2010-03-17
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Diagnostics of atmospheric pressure plasma by space and time-resolved Stark broadening2010

    • Author(s)
      H. Toyoda, A. Kamata, T. Murase, and T. Ishijima
    • Organizer
      The 2nd International Plasma Nanoscience Symposium
    • Place of Presentation
      New SouthWales(Australia)
    • Year and Date
      2010-12-13
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Time Resolved Measurement of HβEmission from Atmospheric-Pressure Pulsed Microwave Plasma2010

    • Author(s)
      A. Kamata, H. Yang, T. Ishijima, H. Toyoda
    • Organizer
      The 3rd International Conference on Plasma-Nanotechnology & Science
    • Place of Presentation
      名城大学(愛知)
    • Year and Date
      2010-03-11
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] 大気圧パルスマイクロ波プラズマにおける時空間発光分光計測2010

    • Author(s)
      鎌田安住,石島達夫,豊田浩孝
    • Organizer
      平成22年度電気関係学会東海支部連合大会
    • Place of Presentation
      中部大学(愛知)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Time Resolved Measurement of H_β Emission from Atmospheric-Pressure Pulsed Microwave Plasma2010

    • Author(s)
      A.Kamata, H.Yang, T.Ishijima, H.Toyoda
    • Organizer
      The 3rd International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      名城大学(名古屋市)
    • Year and Date
      2010-03-11
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Temporal variation of plasma density in atmosphericpressure pulsed-microwave plasma2009

    • Author(s)
      H.Toyoda, H.Yang, T.Ishijima
    • Organizer
      62nd Annual Gaseous Electronics Conference
    • Place of Presentation
      Saratoga Springs(NY, USA)
    • Year and Date
      2009-10-20
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Temporal variation of plasma density in atmospheric pressure pulsed-microwave plasma2009

    • Author(s)
      H. Toyoda, H. Yang, T. Ishijima
    • Organizer
      62nd Annual Gaseous Electronics Conference
    • Place of Presentation
      Saratoga Springs(NY, USA)
    • Year and Date
      2009-10-20
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] シュタルク拡がりを用いたプラズマ密度計測における外部電界の影響2009

    • Author(s)
      楊海鵬、石島達夫、豊田浩孝
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Temporal Variation of Hydrogen Atom Spectrum Emitted from Pulsed Microwave Plasma under Atmospheric Pressure2009

    • Author(s)
      H. Yang, T. Ishijima, H. Toyoda
    • Organizer
      The 31th International Symposium on Dry Process
    • Place of Presentation
      Busan Exhibition & Convention Center(Busan, Korea)
    • Year and Date
      2009-09-24
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Temporal Variation of Hydrogen Atom Spectrum Emitted from Pulsed Microwave Plasma under Atmospheric Pressure2009

    • Author(s)
      H.Yang, T.Ishijima, H.Toyoda
    • Organizer
      The 31th International Symposium on Dry Process
    • Place of Presentation
      Busan Exhibition & Convention Center(Susan, Korea)
    • Year and Date
      2009-09-24
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] シュタルク拡がりを用いたプラズマ密度計測における外部電界の影響2009

    • Author(s)
      楊海鵬、石島達失、豊田浩孝
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-21540509
  • [Presentation] Suppression of High-Energy Backscattered Species in Magnetron Sputter Plasma with Cylindrical Cathode2007

    • Author(s)
      Hirotaka, Toyoda, Yusuke, Takagiand, Hideo, Sugai
    • Organizer
      60th Annual Gaseous Electronics Conference
    • Place of Presentation
      Arlington, USA
    • Year and Date
      2007-10-04
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Presentation] Suppression of High-Energy Backscattered Species in Magnetron Sputter Plasma with Cylindrical Cathode2007

    • Author(s)
      Hirotaka Toyoda, Yusuke Takagi and Hideo Sugai
    • Organizer
      60th Annual Gaseous Electronics Conference
    • Place of Presentation
      Arlington, Virginia, USA
    • Year and Date
      2007-10-04
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18540489
  • [Presentation] 低圧環境下における無磁場マイクロ波プラズマ生成と応用

    • Author(s)
      野田 智紀,中坊 将人,豊田 浩孝
    • Organizer
      第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Electromagnetic Simulation of Long-Slotted Waveguide Antenna for Production of Meter-Scale Plasma under Atmospheric Pressure

    • Author(s)
      H. Suzuki, S. Nakano, H. Itoh, M. Sekine, M. Hori, H. Toyoda
    • Organizer
      66th Annual Gaseous Electronics Conference
    • Place of Presentation
      Westin Hotel (Princeton, New Jersey, USA)
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] 低圧環境下における高密度マイクロ波プラズマの生成

    • Author(s)
      野田 智紀,中坊 将人,豊田 浩孝
    • Organizer
      平成24年度電気関係学会東海支部連合大会
    • Place of Presentation
      豊橋技術科学大学(愛知県)
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Meter-Scale Atmospheric-Pressure Microwave Plasma Using Sub-Millimeter-Gap Slot

    • Author(s)
      HIROTAKA TOYODA
    • Organizer
      66th Annual Gaseous Electronics Conference
    • Place of Presentation
      Westin Hotel (Princeton, New Jersey, USA)
    • Invited
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Spatiotemporal Resolved Investigations of Atmospheric Pressure Line Plasma

    • Author(s)
      SUGURU NAKANO, HARUKA SUZUKI, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
    • Organizer
      ISPlasma2014/IC-PLANTS2014
    • Place of Presentation
      Meijo University (Nagoya, Japan)
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Surface-Wave Excited Plasma Produced in Low Pressures

    • Author(s)
      T. Noda, M. Nakabo and H. Toyoda
    • Organizer
      6th International Conference on Plasma-Nano Technology & Science
    • Place of Presentation
      下呂交流会館(岐阜県)
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Magnet-Free Sputtering System Using Surface Wave Plasma

    • Author(s)
      Toshiya Hagihara, Tomonori Noda and Hirotaka Toyoda
    • Organizer
      ISPlasma2014/IC-PLANTS2014
    • Place of Presentation
      Meijo University (Nagoya, Japan)
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Meter -Scale Production of Atmospheric Pressure Microwave Plasma by Travelling Waveby

    • Author(s)
      Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
    • Organizer
      ICRP-8/SPP-3
    • Place of Presentation
      Fukuoka Convention Center (Fukuoka, Japan)
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Development of Magnet-Free Uniform Sputtering System for Dielectric Film Deposition

    • Author(s)
      Tomonori Noda, and Hirotaka Toyoda
    • Organizer
      35th International Symposium on Dry Process
    • Place of Presentation
      Ramada Plaza Jeju Hotel (Jeju, Korea)
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Production of High-Uniform Microwave Line Plasma at Atmospheric Pressure

    • Author(s)
      HARUKA SUZUKI, SUGURU NAKANO,HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
    • Organizer
      ISPlasma2014/IC-PLANTS2014
    • Place of Presentation
      Meijo University (Nagoya, Japan)
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Design of Meter-Scale Compact Microwave Antenna Structure by Electromagnetic Simulation

    • Author(s)
      SHOGO KONDO, KENSUKE SASAI, NORIHARU TAKADA AND HIROTAKA TOYODA
    • Organizer
      ISPlasma2014/IC-PLANTS2014
    • Place of Presentation
      Meijo University (Nagoya, Japan)
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Development of Magnet-Free Uniform Sputtering System by RF and Microwave Power Superposition

    • Author(s)
      Toshiya Hagihara, Tomonori Noda, Hirotaka Toyoda
    • Organizer
      ICRP-8/SPP-3
    • Place of Presentation
      Fukuoka Convention Center (Fukuoka, Japan)
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Absorption Spectroscopy of Atomic Metal in Atmospheric-pressure Plasma with Electrolyte Solution Electrode

    • Author(s)
      H. Suzuki, T. Takaba, N. Takada and H. Toyoda
    • Organizer
      Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials
    • Place of Presentation
      Sungkyunkwan University (Suwon, Korea)
    • Data Source
      KAKENHI-PROJECT-25286079
  • [Presentation] Development of Magnet-Free Sputtering System for Dielectric Film Deposition with Surface-Wave Excited Plasma

    • Author(s)
      T. Noda,T. Hagihara, H. Toyoda
    • Organizer
      66th Annual Gaseous Electronics Conference
    • Place of Presentation
      Westin Hotel ( Princeton, New Jersey, USA)
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Production of Surface-Wave Excited Plasma in Low Pressures

    • Author(s)
      T.Noda, M. Nakabo and H. Toyoda
    • Organizer
      5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      名古屋大学(愛知県)
    • Data Source
      KAKENHI-PROJECT-24654189
  • [Presentation] Production of high-density meter-length plasma with metal-covered slot antenna

    • Author(s)
      N. Takada, S. Kondo, S. Nakano, K. Sasai and H. Toyoda
    • Organizer
      ICRP-8/SPP-3
    • Place of Presentation
      Fukuoka Convention Center (Fukuoka, Japan)
    • Data Source
      KAKENHI-PROJECT-25286079
  • 1.  SUGAI Hideo (40005517)
    # of Collaborated Projects: 15 results
    # of Collaborated Products: 21 results
  • 2.  NAKAMURA Keiji (20227888)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 0 results
  • 3.  ISHIJIMA Tatsuo (00324450)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 44 results
  • 4.  鈴木 陽香 (80779356)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 63 results
  • 5.  TAKASUKA Seiichi
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 6.  SASAKI Kohichi (50235248)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  MATSUOKA Ryosuke (10308819)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  IKEZAWA Shunjiro (60065282)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  KONDO Michio (30195911)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  永津 雅章 (20155948)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  KITAGAWA Masatoshi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  Tamura Yuto
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 19 results
  • 13.  Yamamoto Masaki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 5 results
  • 14.  Inomata Yaoki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 7 results
  • 15.  Koike Yusuke
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 19 results
  • 16.  Baba Hiroki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 13 results
  • 17.  Ishikawa Shota
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 4 results
  • 18.  TOYODA Naoki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  GHANASHEV Ivan
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  IVAN Ghanashev
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  西谷 幹彦
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  神田 稔
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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