MURAKAMI Masanori 村上正紀

Researcher Number	70229970
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2000 – 2006: Kyoto Univ. Professor, 工学研究科, 教授 1999: 京都大学, 大学院・工学研究科, 教授 1995 – 1998: Kyoto Univ., Graduate School of Engineering, Professor, 工学研究科, 教授 1995: Kyoto Univ., Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 1991 – 1994: 京都大学, 工学部, 教授
Review Section/Research Field	Principal Investigator Structural/Functional materials / Composite materials/Physical properties / Physical properties of metals / Electronic materials/Electric materials / Applied materials science/Crystal engineering / 金属材料(含表面処理・腐食防食) Except Principal Investigator Structural/Functional materials / 表面界面物性 / Electronic materials/Electric materials
Keywords	Principal Investigator Ohmic contact / ZnSe / オーム性電極 / SiC / CdTe / 微細構造 / InGaAs / NiInGe / GaAs / コンタクト抵抗 … More / GaN / 半導体界面 / 金属 / オーミック・コンタクト / 低障壁中間層 / 薄膜 / In / Ohmic Contacts / Self-formation / Cu Interconnects / Thin Films / 表皮効果 / オーミックコンタクト / 自己組織化 / Cu配線 / Interfacial microstructure / Current transport / Potentiometry / Wide-gap semiconductor / STP解析 / 炭化シリコン / ポテンショメトリー / 走査トンネル顕微鏡 / オーム性電極材料 / 電流輸送 / STP解析法 / ワイドギャップ半導体 / contact materials / radiation detectors / ショットキー電極材 / 半導体放射線検出器 / Microstructure / Electrode / Contact resistance / Interface / FET / 拡散バリア材 / 電極 / 接触抵抗 / 界面 / Schottky Barrier / Coutact Resistance / Ohmic Contact / 窒化ガリウム / GuN / ショットキー障壁 / ZuSe / metal interface / Cd-based contact / annealing / deposition / Schottky barrier height / p-ZnSe / トンネル電流 / Au / 分子線エピタキシー / 窒素ラジカルドーピング / Cd基およびTe基 / Au,Nb,Cu,Ag,Ni / 仕事関数 / 自然酸化膜 / アニール / CdZnSe / 高濃度ドープ層 / Cd / Ni / 界面反応 / P型ZnSe / ELECTRONIC MATERIALS / FUMCTIONAL MATERIALS / THIN FILMS / INTERMETALLIC COMPOUNDS / 電子材料 / 機能材料 / 金属間化合物 / thermal strain / thin film / X線回析 / X線回折 / 薄膜応力 / 薄膜歪 … More Except Principal Investigator 界面 / 電極 / Impurity / Microvoid / Reliability / Copper Interconnect / ULSI / 水素脆性 / Si半導体デバイス / 不純物 / マイクロボイド / 配線信頼性 / Cu配線材 / ULSIデバイス / Tunnel current / Electron source / Display / Surface damage / Field emission / Diamond / 電子放出 / ダイヤモンド状カーボン / 安定性 / スパッタリング / 電気伝導 / 気相成長 / 電界電子放出 / トンネル電流 / 電子源 / ディスプレイ / 表面損傷 / 電解電子放出 / ダイヤモンド / 接触抵抗 / TaTi / オーミック・コンタクト / GaN / 電子材料 / 機能材料 / 薄膜 / 金属間化合物 Less

Developments of new complex materials using mime and interface diffusion of the supersaturated alloy elements in thin filmsPrincipal Investigator
- Principal Investigator
  
  ITO Kazuhiro, 村上正紀
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Composite materials/Physical properties
- Research Institution
  Kyoto University
Ohmic contact materials for wide-gap semiconductors : Fabrication and STP analysis.Principal Investigator
- Principal Investigator
  
  MURAKAMI Masanori
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Physical properties of metals
- Research Institution
  KYOTO UNIVERSITY
Development of highly reliable contacts on p-type CdTe for radiation detectorsPrincipal Investigator
- Principal Investigator
  
  MURAKAMI Masanori
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Structural/Functional materials
- Research Institution
  KYOTO UNIVERSITY
Formation Mechanism of Unique Voids in Cu Interconnects for ULSI
- Principal Investigator
  
  MORIYAMA Miki
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Structural/Functional materials
- Research Institution
  KYOTO UNIVERSITY
水素吸蔵金属とGaN半導体の接合界面における水素の挙動
- Principal Investigator
  
  小出康夫
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Structural/Functional materials
- Research Institution
  Kyoto University
ガリウム・ヒ素化合物半導体用の超新機能電極材料の研究Principal Investigator
- Principal Investigator
  
  MURAKAMI Mosanori
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (A).
- Research Field
  
  Structural/Functional materials
- Research Institution
  KYOTO UNIVERSITY
Physics of contact interface of electron emission devices for display
- Principal Investigator
  
  KOIDE Yasuo
- Project Period (FY)
  1997 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  表面界面物性
- Research Institution
  KYOTO UNIVERSITY
Development of High Performance Ohmic Contact Materials for Full Color Light Enitting Devices.Principal Investigator
- Principal Investigator
  
  MURAKAMI Masanori
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  KYOTO UNIVERSITY
金属／化合物半導体界面における電気特性及び微細構造に関する研究
- Principal Investigator
  
  OKU Takeo
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Kyoto University
APPLICATION OF INTERMETALLIC COMPOUNDS TO FUNCTIONAL ELECTRONIC MATERIALSPrincipal Investigator
- Principal Investigator
  
  MURAKAMI Masanori
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  Structural/Functional materials
- Research Institution
  KYOTO UNIVERSITY
Development of Ohmic contact materials for ZnSe-based blue light emitting devicesPrincipal Investigator
- Principal Investigator
  
  MURAKAMI Masanori
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  KYOTO UNIVERSITY
Thermal Strain of In films deposited onto Si and GaAs SubstratesPrincipal Investigator
- Principal Investigator
  
  MURAKAMI Masanori
- Project Period (FY)
  1991 – 1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  金属材料(含表面処理・腐食防食)
- Research Institution
  KYOTO UNIVERSITY

All 2008 2007 2006 2005 2004

All Journal Article Presentation Patent

[Journal Article] Self-formation of Ti-rich interfacial layers at Cu(Ti)/low-k interfaces2008
- Author(s)
  K. Kohama, K. Ito, S. Tsukimoto, K. Mori, K. Maekawa and M. Murakami
- Journal Title
  
  MRS Proceedings (in press)
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Self-formation of Ti-rich interfacial layers at Cu(Ti)/low-k interfaces2008
- Author(s)
  K., Kohama, K., Ito, S., Tsukimoto, K., Mori, K., Maekawa, M., Murakami
- Journal Title
  
  MRS Proceedings (in press)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Simultaneous formation of n-and p-type ohmic contacts to 4H-SiC using the binary Ni/Al system2008
- Author(s)
  K. Ito, T. Onishi, H. Takeda, S. Tsukimoto, M. Konno, Y. Suzuki and M. Murakami
- Journal Title
  
  MRS Proceedings (in press)
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Resistivity reduction of Cu interconnects2007
- Author(s)
  K., Ito, S., Tsukimoto, M., Moriyama, M., Murakami
- Journal Title
  
  AIP Conference Proceedings 945
  
  Pages: 1-10
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Effect of annealing ambient on self-formation mechanism of diffusion barrier layers used in Cu(Ti)interconnects2007
- Author(s)
  S. Tsukimoto, T. Kabe, K. Ito and M. Murakami
- Journal Title
  
  Journal of Electronic Materials 36
  
  Pages: 258-265
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Fabrication of Cu(Ti)alloy interconnects with self-formation of thin barrier metal layers using a high-pressure annealing process2007
- Author(s)
  S. Tsukimoto, T. Onishi, K. Ito, M. Konno, T. Yaguchi, T. Kamino and M. Murakami
- Journal Title
  
  Journal of Electronic Materials 36
  
  Pages: 1658-1661
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Effect of annealing ambient on self-formation mechanism of diffusion barrier layers used in Cu(Ti) interconnects2007
- Author(s)
  S.Tsukimoto, T.Kabe, K.Ito, M.Murakami
- Journal Title
  
  Journal of Electronic Materials
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Self-formation of Ti-rich Interfacial Layers in Cu(Ti) Alloy Film2007
- Author(s)
  K.Ito, S.Tsukimoto, M.Murakami
- Journal Title
  
  Japanese Journal of Applied Physics 46
- NAID
  10022547534
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Effects of substrate materials on self-formation of Ti-rich interface layers in Cu(Ti) alloy films2007
- Author(s)
  K., Ito, S., Tsukimoto, T., Kabe, K., Tada, M., Murakami
- Journal Title
  
  Journal of Electronic Materials 36
  
  Pages: 606-613
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Effects of substrate materials on self-formation of Ti-rich interface layers in Cu(Ti)alloy films2007
- Author(s)
  K. Ito, S. Tsukimoto, T. Kabe, K. Tada and M. Murakami
- Journal Title
  
  Journal of Electronic Materials 36
  
  Pages: 606-613
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Self-formation of Ti-rich interface layers in Cu(Ti) alloy films on various substrates2007
- Author(s)
  K.Ito, S.Tsukimoto, T.Kabe, K.Tada, M.Murakami
- Journal Title
  
  Journal of Electronic Materials
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Reduction of Electrical Resistivity of Cu Interconnects2007
- Author(s)
  M.Murakami, M.Moriyama, S.Tsukimoto, K.Ito, T.Onichi
- Journal Title
  
  Extraction, Processing, Structure and Properties Proceedings on Electronic. Maenetic and Photonic Materials Division Symposium
  
  Pages: 1-9
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Effect of annealing ambient on self-formation mechanism of diffusion barrier layers used in Cu(Ti) interconnects2007
- Author(s)
  S., Tsukimoto, T., Kabe, K., Ito, M., Murakami
- Journal Title
  
  Journal of Electronic Materials 36
  
  Pages: 258-265
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Resistivity reduction of Cu interconnects2007
- Author(s)
  K., Ito, S. Tsukimoto, M. Moriyama and M. Murakami
- Journal Title
  
  Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945
  
  Pages: 1-10
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Resistivity reduction of Cu interconnects2007
- Author(s)
  K. Ito, S. Tsukimoto, M. Moriyama and M. Murakami
- Journal Title
  
  Stress-Induced Phenomena in Metallization, AIP Conference Proceedings 945
  
  Pages: 1-10
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Cu(Ti)合金微細配線における極薄バリア層の自己組織形成2006
- Author(s)
  着本享、大西隆、伊藤和博、村上正紀、今野充、矢口紀恵、上野武志
- Journal Title
  
  日本金属学会会報(まてりあ) 45
  
  Pages: 879-879
- NAID
  10018421961
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] Cu(Ti)合金微細配線における極薄バリア層の自己組織形成2006
- Author(s)
  着本享, 大西隆, 伊藤和博, 村上正紀, 今野充, 矢口紀恵, 上野
- Journal Title
  
  日本金属学会会報(まてりあ) 45
  
  Pages: 879-879
- NAID
  10018421961
- Data Source
  KAKENHI-PROJECT-18360324
[Journal Article] ナノ制御による電子デバイス材料の開発2005
- Author(s)
  村上正紀
- Journal Title
  
  M & E 10
  
  Pages: 136-142
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Simultaneous formation of p- and n-type ohmic contacts to 4H-SiC using the ternary Ni/Ti/Al system2005
- Author(s)
  S.Tsukimoto, T.Sakai, T.Onishi, Kazuhiro Ito, Masanori Murakami
- Journal Title
  
  Journal of Electronic Materials 34
  
  Pages: 1310-1312
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Development of electrode materials for semiconductor devices2005
- Author(s)
  Masanori Murakami, Y.Koide, M.Moriyama, S.Tsukimoto
- Journal Title
  
  Materials Science Forum 475-479巻
  
  Pages: 1705-1714
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Development of electrode materials for semiconductor devices.2005
- Author(s)
  Masanori Murakami, Y.Koide, M.Moriyama, S.Tsukimoto
- Journal Title
  
  Materials Science Forum 475-479
  
  Pages: 1705-1714
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Simultaneous formation of p- and n-type ohmic contacts to 4H-SiC using the ternary Ni/Ti/Al system2005
- Author(s)
  S.Tsukimoto, T.Sakai, T.Onishi, K.Ito, Masanori Murakami
- Journal Title
  
  Journal of Electronic Materials 34巻
  
  Pages: 1310-1312
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Simultaneous formation of p- and n-type ohmic contacts to 4H-SiC using the ternary Ni/Ti/Al system.2005
- Author(s)
  S.Tsukimoto, T.Sakai, T.Onishi, K.Ito, Masanori Murakami
- Journal Title
  
  Journal of Electronic Materials, 34
  
  Pages: 1310-1312
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Development of electrode materials for semiconductor devices2005
- Author(s)
  Masanori Murakami, Y.Koide, M.Moriyama, S.Tsukimoto
- Journal Title
  
  Materials Science Forum 475-479
  
  Pages: 1705-1714
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Ternary TiAlGe ohmic contacts for p-type 4H-SiC2004
- Author(s)
  T.Sakai, K.Nitta, S.Tsukimono, M.Moriyama, Masanori Murakami
- Journal Title
  
  JOURNAL OF APPLIED PHYSICS 95巻5号
  
  Pages: 2187-2189
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Correlation between the electrical properties and the interfacial microstructures of TiAl-based ohmic contacts to p-type 4H-SiC2004
- Author(s)
  S.Tsukimoto, K.Nitta, T.Sakai, M.Moriyama, M.Murakami
- Journal Title
  
  Journal of Electronic Materials 33巻
  
  Pages: 460-466
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Development of electrode materials for semiconductor devices.2004
- Author(s)
  Masanori Murakami, M.Moriyama, S.Tsukimoto
- Journal Title
  
  Transactions of the Materials Research Society of Japan 29
  
  Pages: 45-50
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Electrical properties and microstructure of ternary Ge/Ti/Al ohmic contacts to p-type 4H-SiC2004
- Author(s)
  S.Tsukimoto, T.Sakai, M.Murakami
- Journal Title
  
  Journal of Applied Physics 96巻
  
  Pages: 4976-4981
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Correlation between the electrical properties and the interfacial microstructures of TiAl-based ohmic contacts to p-type 4H-SiC.2004
- Author(s)
  S.Tsukimoto, K.Nitta, T.Sakai, M.Moriyama, M.Murakami
- Journal Title
  
  Journal of Electronic Materials, 33
  
  Pages: 460-466
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Electrical properties and microstructure of ternary Ge/Ti/Al ohmic contacts to p-type 4H-SiC.2004
- Author(s)
  S.Tsukimoto, T.Sakai, M.Murakami
- Journal Title
  
  Journal of Applied Physics 96巻
  
  Pages: 4976-4981
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Ternary TiAlGe ohmic contacts for p-type 4H-SiC.2004
- Author(s)
  T.Sakai, K.Nitta, S.Tsukimoto, M.Moriyama, Masanori Murakami
- Journal Title
  
  Journal of Applied Physics 95
  
  Pages: 2187-2189
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Development of electrode materials for semiconductor devices2004
- Author(s)
  M.Murakami, M.Moriyama, S.Tsukimoto
- Journal Title
  
  Transactions of the Materials Research Society of Japan 29巻
  
  Pages: 45-50
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Electrical properties and microstructure of ternary Ge/Ti/Al ohmic contacts to p-type 4H-SiC.2004
- Author(s)
  S.Tsukimoto, T.Sakai, M.Murakami
- Journal Title
  
  Journal of Applied Physics 96
  
  Pages: 4976-4981
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] p型SiC半導体/TiAl系オーミック・コンタクト材の界面構造2004
- Author(s)
  着本享, 伊藤和博, 村上正紀
- Journal Title
  
  日本金属学会会報"まてりあ" 43巻
  
  Pages: 992-992
- NAID
  10014238911
- Data Source
  KAKENHI-PROJECT-15206069
[Journal Article] Development of electrode materials for semiconductor devices2004
- Author(s)
  M.Murakami, M.Moriyama, S.Tsukimoto
- Journal Title
  
  Trans. the Materials Research Society of Japan 29巻
  
  Pages: 45-50
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15206069
[Patent] 半導体配線の製造方法2006
- Inventor(s)
  大西隆、武田実佳子、水野雅夫、着本享、可部達也、森田敏文、守山実希、伊藤和博、村上正紀
- Industrial Property Rights Holder
  神戸製鋼所・京都大学
- Industrial Property Number
  2006-192153
- Filing Date
  2006-07-12
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Self-formation of Ti-rich layers at Cu (Ti)/low-k interfaces2008
- Author(s)
  K. Kohama, K. Ito, S. Tsukimoto, K. Mori. K. Maekawa and M. Murakami
- Organizer
  Materials Science Society
- Place of Presentation
  Moscone West and San Francisco Marriott
- Year and Date
  2008-03-26
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Simultaneous formation of n-and p-type ohmic contacts to 4H-SiC using the binary Ni/Al system2008
- Author(s)
  K. Ito, T. Onishi, H. Takeda, S. Tsukimoto, M. Konno, Y. Suzuki and M. Murakami
- Organizer
  2008 Materials Research Society Spring Meeting
- Place of Presentation
  Moscone West and San Francisco Marriott
- Year and Date
  2008-03-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Self-formation of Ti-rich layers at Cu(TO/low-k interfaces2008
- Author(s)
  K., Kohama, K., Ito, S., Thukimoto, K., Mori, K., Maekawa, M., Murakami
- Organizer
  2008 MRS Spring Meeting
- Place of Presentation
  Moscone West and San Francisco Marriott
- Year and Date
  2008-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Self-formation of Ti-rich layers at Cu(Ti)/low-k interfaces2008
- Author(s)
  K. Kohama, K. Ito, S. Tsukimoto, K. Mori, K. Maekawa and M. Murakami
- Organizer
  2008 Materials Research Society Spring Meeting
- Place of Presentation
  Moscone West and San Francisco Marriott
- Year and Date
  2008-03-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Reduction of electrical resistivity of Cu interconnects2007
- Author(s)
  M. Murakami, M. Moriyama, S. Tsukimoto, K. Ito, and T. Onichi
- Organizer
  Advanced Metallizations and Interconnect Technologies, in Honor of Prof. K. N. Tu's 70th Birthday(TMS 2007)
- Place of Presentation
  オーランド(アメリカ)
- Year and Date
  2007-02-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Resistivity reduction of Cu interconnects2007
- Author(s)
  K., Ito, S., Tsukimoto, M., Moriyama, M., Murakami
- Organizer
  9th International Workshop on Stress -Induced Phenomena in Metallization
- Place of Presentation
  PaRuRu Plaza Kyoto
- Year and Date
  2007-04-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Simultaneous formation of n- and p-type Ni-Al ohmic contacts to 4H-SiC2007
- Author(s)
  H., Takeda, T., Onishi, K., Ito, S., Tsukimoto, M., Murakami
- Organizer
  Japan Institute of Metals 2007 Anneal, Meeting
- Place of Presentation
  Gifu Univ
- Year and Date
  2007-09-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Resistivity reduction of Cu interconnects2007
- Author(s)
  K. Ito, S. Tsukimoto, M. Moriyama and M. Murakami
- Organizer
  9th International Workshop on Stress-Induced Phenomena in Metallization
- Place of Presentation
  ぱるるプラザ京都
- Year and Date
  2007-04-05
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Resistivity reduction of Cuinterconnects2007
- Author(s)
  K. Ito, S. Tsukimoto, M. Moriyama and M. Murakami
- Organizer
  9th International Workshop on Stress-Induced Phenomena in Metallization
- Place of Presentation
  ぱるるプラザ京都
- Year and Date
  2007-04-05
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] p,n-SiC両伝導型にオーミック性を示すNi-A1コンタクト材の伝導機構2007
- Author(s)
  武田英久, 大西利武, 伊藤和博, 着本享, 村上正紀
- Organizer
  日本金属学会
- Place of Presentation
  岐阜大学
- Year and Date
  2007-09-20
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] p,n-SiC両伝導型にオーミック性を示すNi-Alコンタクト材の伝導機構2007
- Author(s)
  武田英久, 大西利武, 伊藤和博, 着本享, 村上正紀
- Organizer
  日本金属学会
- Place of Presentation
  岐阜大学
- Year and Date
  2007-09-20
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] Fabrication of Cu(Ti) alloy interconnects with self-formation of thin barrier metal layers using a high-pressure annealing process2006
- Author(s)
  S., Tsukimoto, T., Onishi, K., Ito, M., Murakami
- Organizer
  Japan Institute of Metals 2006 Anneal Meeting
- Place of Presentation
  Niigata Univ
- Year and Date
  2006-09-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18360324
[Presentation] 高圧アニールによるスパッタCu(Ti)合金薄膜材の微細配線化2006
- Author(s)
  着本享, 大西隆, 伊藤和博, 村上正紀
- Organizer
  日本金属学会
- Place of Presentation
  新潟大学五十嵐キャンパス
- Year and Date
  2006-09-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18360324

1. KOIDE Yasuo (70195650)

# of Collaborated Projects: 7 results

# of Collaborated Products: 0 results
2. MORIYAMA Miki (70303857)

# of Collaborated Projects: 5 results

# of Collaborated Products: 10 results
3. OKU Takeo (30221849)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
4. OTSUKI Akira (10026148)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
5. MORI Hidetsugu (60283644)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
6. ITO Kazuhiro (60303856)

# of Collaborated Projects: 3 results

# of Collaborated Products: 34 results
7. TSUKIMOTO Susumu (50346087)

# of Collaborated Projects: 2 results

# of Collaborated Products: 45 results
8. MATSUBARA Eiichiro (90173864)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. SAKAI Akira (80143543)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
10. KUROKAWA Shu (90303859)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. SUZUKI Akira

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. SAKURAI Takeshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

MURAKAMI Masanori 村上 正紀

Research Projects

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Co-Researchers

Developments of new complex materials using mime and interface diffusion of the supersaturated alloy elements in thin filmsPrincipal Investigator

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Ohmic contact materials for wide-gap semiconductors : Fabrication and STP analysis.Principal Investigator

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Development of highly reliable contacts on p-type CdTe for radiation detectorsPrincipal Investigator

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Formation Mechanism of Unique Voids in Cu Interconnects for ULSI

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水素吸蔵金属とGaN半導体の接合界面における水素の挙動

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ガリウム・ヒ素化合物半導体用の超新機能電極材料の研究Principal Investigator

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Physics of contact interface of electron emission devices for display

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Development of High Performance Ohmic Contact Materials for Full Color Light Enitting Devices.Principal Investigator

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金属／化合物半導体界面における電気特性及び微細構造に関する研究

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APPLICATION OF INTERMETALLIC COMPOUNDS TO FUNCTIONAL ELECTRONIC MATERIALSPrincipal Investigator

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Development of Ohmic contact materials for ZnSe-based blue light emitting devicesPrincipal Investigator

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Thermal Strain of In films deposited onto Si and GaAs SubstratesPrincipal Investigator

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[Journal Article] Self-formation of Ti-rich interfacial layers at Cu(Ti)/low-k interfaces2008

Author(s)

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Description

MURAKAMI Masanori 村上正紀