KUBOTA Tomohiro 久保田智広

Researcher Number	70322683
Affiliation (based on the past Project Information) *help	2015 – 2016: 東北大学, 流体科学研究所, 准教授 2011 – 2013: 東北大学, 流体科学研究所, 准教授 2009: 東北大, 流体科学研究所, 助教 2007 – 2008: Tohoku University, 流体科学研究所, 助教 2005 – 2006: Tohoku University, Institute of Fluid Science, Research Associate, 流体科学研究所, 助手
Review Section/Research Field	Principal Investigator Applied physics, general / Plasma electronics / Electronic materials/Electric materials Except Principal Investigator Thin film/Surface and interfacial physical properties / Applied physics, general
Keywords	Principal Investigator 中性粒子ビーム / 第一原理計算 / 量子井戸 / バイオナノプロセス / 原子間力顕微鏡 / 量子ドット / ナノディスク / 結合次数解析 / 活性化エネルギー / 酸性度 … More / 密度汎関数法 / プラズマ・ビーム誘起錯体反応 / 第一原理理論計算 / 鉄 / 遷移金属錯体 / 遷移金属エッチング / 塩素 / 紫外光スペクトル / オージェ遷移 / 共鳴遷移 / 欠陥生成 / ワイヤレス測定 / イオンシース / 紫外光照射損傷 / オンウェハモニタリング / エッチング形状予測 / X線光電子分光法 / 積層ナノディスク / 導電性探針(プローブ) / 原子間力顕微鏡(AFM) / ケルビン力顕微鏡(KFM) / クーロン階段 / 自然酸化膜 / 電気特性 … More Except Principal Investigator エッチング / 中性粒子ビーム / nanocolumn / fin-type vertical MOSFET / low-k film / gate electrode etching / silicon oxynitride / negative ion / etching / neutral beam / 薄膜形成 / シリコン酸窒膜 / ナノ加工 / 半導体デバイス / エッチングダメージ / 起立ゲート型トランジスタ / 高誘電率膜 / 有機分子デバイス / カーボンナノチューブ / 表面改質 / ナノカラム / フィン型MOSFET / 低誘電率絶縁膜 / ゲート電極加工 / シリコン酸窒化膜 / 負イオン / マイクロマシンプローブ / Bow-tieアンテナ型 / 表面プラズモン / Bow-tieアンテナ / 近接場光 / Pbセンター / 低ダメージエッチング / フェリチン / 量子ドット Less

遷移金属の新しい低温化学反応エッチングメカニズムの提案Principal Investigator
- Principal Investigator
  
  久保田智広
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma electronics
- Research Institution
  Tohoku University
Modeling of plasma process surface reaction mechanism using energy-controllable particle beamsPrincipal Investigator
- Principal Investigator
  
  KUBOTA Tomohiro
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
単電子デバイスのための積層量子ナノディスク構造の精密作製と量子特性制御Principal Investigator
- Principal Investigator
  
  久保田智広
- Project Period (FY)
  2008
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tohoku University
単一サブ10nm微細構造のためのマルチ同時解析装置の開発Principal Investigator
- Principal Investigator
  
  久保田智広
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
サブ10nm量子ドットの超解像近接場分光
- Principal Investigator
  
  SAMUKAWA Seiji
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
Nanometer-scale processing and creation of novel functional materials using low energy high flux neutral beams
- Principal Investigator
  
  SAMUKAWA Seiji
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University

All 2016 2015 2014 2013 2012 2011 2008 2007 2006 2005 2004 Other

All Journal Article Presentation

[Journal Article] Proposal of High Current Gain Vibrating-Body Field-Effect Transistor2013
- Author(s)
  S.Ueki, Y.Nishimori, K.Miwa, S.Nakagawa, H.Imamoto, T.Kubota, M.Sugiyama, S.Samukawa, and G.Hashiguchi
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 133 Issue: 11 Pages: 332-336
- DOI
  10.1541/ieejsmas.133.332
- NAID
  130003382688
- ISSN
  1341-8939, 1347-5525
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Energy-loss Mechanism of Single-crystal Silicon Microcantilever due to Surface Defects G.erated during Plasma Processing2013
- Author(s)
  A.Wada, Y.Yanagisawa, B.Altansukh, T.Kubota, T.Ono, S.Yamasaki, and S.Samukawa
- Journal Title
  
  J. Micromech. Microeng.
  
  Volume: Vol.23 Issue: 6 Pages: 065020-065020
- DOI
  10.1088/0960-1317/23/6/065020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Prediction of etching-shape anomaly due to distortion of ion sheath around a large-scale three-dimensional structure by means of on-wafer monitoring technique and computer simulation2013
- Author(s)
  T.Kubota, H.Ohtake, R.Araki, Y.Yanagisawa, T.Iwasaki, K.Ono, K.Miwa, and S.Samukawa
- Journal Title
  
  J. Phys. D: Appl. Phys.
  
  Volume: Vol.46 Issue: 41 Pages: 415203-415203
- DOI
  10.1088/0022-3727/46/41/415203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Highly Selective Silicon Nitride Etching to Si and SiO_2 for Gate Sidewall Spacer Using CF_3I/O_2/H_2 Neutral Beam2013
- Author(s)
  D.Nakayama, A.Wada, T.Kubota, R.Bruce, R.M.Martin, M.Haass, N.Fuller, and S.Samukawa
- Journal Title
  
  Phys. D: Appl. Phys.
  
  Volume: Vol.46 Issue: 20 Pages: 205203-205203
- DOI
  10.1088/0022-3727/46/20/205203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Low-damage silicon etching using a neutral beam2013
- Author(s)
  K.Miwa, Y.Nishimori, S.Ueki, M.Sugiyama, T.Kubota, and S.Samukawa
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: Vol.31 Issue: 5
- DOI
  10.1116/1.4819973
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Numerical study on electron transfer mechanism by collision of ions at graphite surface in highly efficient neutral beam generation2012
- Author(s)
  T.Kubota, N.Watanabe, S.Ohtsuka, T.Iwasaki, K.Ono, Y.Iriye, and S.Samukawa
- Journal Title
  
  J. Physics D : Appl. Phys.
  
  Volume: Vol.45 Issue: 9 Pages: 095202-095202
- DOI
  10.1088/0022-3727/45/9/095202
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Coulomb-staircase observed in silicon-nanodisk structures fabricated by low-energy chlorine neutral beams2007
- Author(s)
  Tomohiro Kubota
- Journal Title
  
  Journal of Applied Physics 101
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18760049
[Journal Article] Low-damage fabrication of high aspect nanocolumns by using neutral beams and ferritin-iron-core mask2007
- Author(s)
  Tomohiro Kubota
- Journal Title
  
  Journal of Vacuum Science and Technology B 25
  
  Pages: 760-766
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18760049
[Journal Article] Charging and Coulomb staircase effects in silicon nanodisk structures fabricated by defect-free Cl neutral beam etching process2006
- Author(s)
  Tomohiro Kubota
- Journal Title
  
  Applied Physics Letters 89・23
  
  Pages: 233127-233127
- Data Source
  KAKENHI-PROJECT-18760049
[Journal Article] Study of neutral-beam etching conditions for the fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005
- Author(s)
  Tomohiro Kubota
- Journal Title
  
  Journal of Vacuum Science and Technology B23(2)
  
  Pages: 534-539
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Study of neutral-beam etching conditions for the fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005
- Author(s)
  久保田智広
- Journal Title
  
  Journal of Vacuum Science and Technology B23・2
  
  Pages: 534-539
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams2004
- Author(s)
  Tomohiro Kubota
- Journal Title
  
  Applied Physics Letters 84(9)
  
  Pages: 1555-1557
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams2004
- Author(s)
  久保田智広
- Journal Title
  
  Applied Physics Letters 84・9
  
  Pages: 1555-1557
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Presentation] 中性粒子ビーム励起錯体反応による遷移金属エッチングメカニズムのTight-binding量子分子動力学法を用いた検討2016
- Author(s)
  久保田智広, 伊藤寿, 久保百司, 寒川誠二
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] Transition Metal Complex Reaction Etching with Neutral Beam and Its Mechanism Investigated by First-Principles Calculation2016
- Author(s)
  Tomohiro Kubota, Yoshiyuki Kikuchi, and Seiji Samukawa
- Organizer
  IEEE 16th International Conference on Nanotechnology
- Place of Presentation
  Sendai International Center (宮城県仙台市)
- Year and Date
  2016-08-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] 中性粒子ビーム励起錯体反応を用いた遷移金属エッチングにおける吸着分子の影響2016
- Author(s)
  久保田智広、菊地良幸、伊藤寿、久保百司、寒川誠二
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス（東京都目黒区）
- Year and Date
  2016-03-21
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] 中性粒子ビーム励起錯体反応を用いたCoFeBエッチング2016
- Author(s)
  久保田智広、美山遼、菊地良幸、寒川誠二
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ (新潟県新潟市)
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] 中性粒子ビーム励起錯体反応を用いた Taエッチングのメカニズム2016
- Author(s)
  久保田智広、久保百司、寒川誠二
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ (新潟県新潟市)
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] First-Principles Theoretical Investigation on Mechanism of New Transition Metal Etching Process using Oxygen and argon Neutral Beams and Ethanol Gas2015
- Author(s)
  Tomohiro Kubota, Yoshiyuki Kikuchi, and Seiji Samukawa
- Organizer
  American Vacuum Society 62nd International Symposium & Exhibition
- Place of Presentation
  San Jose (USA)
- Year and Date
  2015-10-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] Transition Metal Complex Reaction Etching for MRAM Applications using Neutral Beam and Its Mechanism Investigated by First-Principles Calculation2015
- Author(s)
  Tomohiro Kubota, Yoshiyuki Kikuchi, Toshihisa Nozawa, and Seiji Samukawa
- Organizer
  2015 International Conference on Solid State Devices and Materials
- Place of Presentation
  札幌コンベンションセンター（北海道札幌市）
- Year and Date
  2015-09-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] 酸素中性粒子ビームによる酸化及び錯体反応を用いた遷移金属エッチングメカニズム(3)2015
- Author(s)
  久保田智広, 菊地良幸, 野沢俊久, 伊藤寿, 久保百司, 寒川誠二
- Organizer
  第72回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-15
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] A new metallic complex reaction etching for MRAM materials by a low-temperature neutral beam process2015
- Author(s)
  Tomohiro Kubota and Seiji Samukawa
- Organizer
  Plasma Etch and Strip in Microtechnology 2015
- Place of Presentation
  Leuven (Belgium)
- Year and Date
  2015-04-27
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] オンウェハモニタリングによるプラズマエッチング形状異常予測2014
- Author(s)
  久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  相模原
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Feature Profile Evolution in Plasma Processing using On-wafer Monitoring System2014
- Author(s)
  T.Kubota and S.Samukawa
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  福岡
- Year and Date
  2014-02-05
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析VII2013
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウェハモニタリングによるプラズマプロセスダメージ・形状予測2013
- Author(s)
  久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(4)2013
- Author(s)
  望月俊輔,渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Core Technology Consortium for Advanced Energy Devices2013
- Author(s)
  S.Samukawa and T.Kubota
- Organizer
  10th International Conference on Flow Dynamics
- Place of Presentation
  仙台
- Year and Date
  2013-11-26
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウェハモニタリングによるプラズマエッチング形状予測2013
- Author(s)
  久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京田辺
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Feature profile evolution in plasma processing using on-wafer monitoring system2013
- Author(s)
  T.Kubota, M.Sato, T.Iwasaki, K.Ono, and S.Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Long Beach
- Year and Date
  2013-10-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング(7)2013
- Author(s)
  久保田智広,三輪和弘,バトナサン・アルタンスック,大塚晋吾,渡辺尚貴,岩崎拓也,入江康郎,小野耕平,杉山正和,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] On-wafer monitoring technique for highly efficient fabrication process of nano energy devices2013
- Author(s)
  T.Kubota and S.Samukawa
- Organizer
  10th International Conference on Flow Dynamics
- Place of Presentation
  仙台
- Year and Date
  2013-11-26
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングプロセスの総合的シミュレーション2013
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,望月俊輔,久保田智広,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京田辺
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析(3)2013
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,三輪和弘,杉山正和,久保田智広,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Numerical simulation of total processes of neutral beam etching from G.eration of neutral beam by collision of ions against graphite sidewall to 3-dimensional etching profile2013
- Author(s)
  N.Watanabe, S.Ohtsuka, S.Mochizuki, T.Kubota, T.Iwasaki, Y.Iriye, K.Ono, and S.Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Long Beach
- Year and Date
  2013-10-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング(5)2012
- Author(s)
  久保田智広,三輪和弘,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,杉山正和,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析2012
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 3-Dimensional and Defect-free Etching by Neutral Beam for MEMS Applications2012
- Author(s)
  T.Kubota, A.Wada, Y.Yanagisawa, B.Altansukh, K.Miwa, T.Ono, and S.Samukawa
- Organizer
  2012 International Conference on Solid State Devices and Materials
- Place of Presentation
  京都
- Year and Date
  2012-09-25
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウエハーモニタリングとシミュレーションの融合によるプラズマプロセス中の表面イオンシース形状と入射イオン軌道予測2012
- Author(s)
  荒木良亮,久保田智広,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(3)2012
- Author(s)
  望月俊輔,渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析(2)2012
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Numerical study on electron transfer mechanism by collision of ions at graphite surface in highly-efficient neutral beam Generation2012
- Author(s)
  N.Watanabe, T.Kubota, and S.Samukawa
- Organizer
  The 8th EU-Japan Joint Symposium on Plasma Processing
- Place of Presentation
  奈良
- Year and Date
  2012-01-17
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(2)2012
- Author(s)
  望月俊輔,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,久保田智広,杉山正和,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析2012
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
- Organizer
  第29回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  北九州
- Year and Date
  2012-10-23
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Prediction of ion sheath shape and ion trajectory during plasma etching processing using on-wafer monitoring technique and simulation2012
- Author(s)
  R.Araki, T.Kubota, and S.Samukawa
- Organizer
  The 8th EU-Japan Joint Symposium on Plasma Processing
- Place of Presentation
  奈良
- Year and Date
  2012-01-16
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Theoretical calculation of neutralization efficiency of positive and negative chlorine ions with consideration of excited states2012
- Author(s)
  S.Ohtsuka, N.Watanabe, T.Kubota, T.Iwasaki, Y.Iriye, K.Ono, and S.Samukawa
- Organizer
  AVS 59th International Symposium and Exhibition
- Place of Presentation
  アメリカ・Tampa
- Year and Date
  2012-11-01
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング(6)2012
- Author(s)
  久保田智広,三輪和弘,バトナサン・アルタンスック,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,杉山正和,寒川誠二
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Feature Profile Evolution in Plasma Processing Using Wireless On-Wafer Monitoring System2012
- Author(s)
  T.Kubota and S.Samukawa
- Organizer
  Ninth International Conference on Flow Dynamics
- Place of Presentation
  仙台
- Year and Date
  2012-09-19
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 形状シミュレーションによる塩素中性粒子ビームエッチングの加工形状の検討2012
- Author(s)
  望月俊輔,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
- Organizer
  第29回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  北九州
- Year and Date
  2012-10-23
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビーム生成におけるアパーチャ構造とエッチング特性解析2011
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Damage-free silicon etching using large diameter neutral beam source2011
- Author(s)
  久保田智広
- Organizer
  International Conference on Electronics Packaging
- Place of Presentation
  奈良
- Year and Date
  2011-04-14
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Energy and Angular Distribution Analysis for Neutral Beam and Application for Etching Simulation2011
- Author(s)
  S.Ohtsuka, N.Watanabe, T.Iwasaki, K.Ono, Y.Iriye, Osamu Nukaga, S.Ueki, T.Kubota, M.Sugiyama, and S.Samukawa
- Organizer
  AVS 58th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Nashville
- Year and Date
  2011-11-03
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング(4)2011
- Author(s)
  久保田智広,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,杉山正和,大竹浩人,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] High-aspect-ratio silicon etching using large-diameter neutral beam source2011
- Author(s)
  T.Kubota, N.Watanabe, S.Ohtsuka, K.Ono, H.Ohtake, S.Ueki, Y.Nishimori, G.Hashiguchi, and S.Samukawa
- Organizer
  AVS 58th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Nashville
- Year and Date
  2011-11-03
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウエハーモニタリングとシミュレーションの融合による立体形状エッチングにおけるシース形状およびイオン軌道予測2011
- Author(s)
  荒木良亮,久保田智広,三輪和弘,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるエッチングの加工形状シミュレーション2011
- Author(s)
  望月俊輔,久保田智広,大塚晋吾,小野耕平,岩崎拓也,渡辺尚貴,入江康郎,杉山正和,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析V2011
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Silicon etching using large-diameter neutral beam source2011
- Author(s)
  久保田智広
- Organizer
  The 3rd International Conference on Microelectronics and Plasma Technology
- Place of Presentation
  大連、中国
- Year and Date
  2011-07-05
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] High-aspect-ratio silicon etching using large-diameter neutral beam source2011
- Author(s)
  久保田智広
- Organizer
  American Vacuum Society 58th International Symposium & Exhibition
- Place of Presentation
  Nashville、米国
- Year and Date
  2011-11-03
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Theoretical analysis of electron transfer during the process of neutral beam G.eration2011
- Author(s)
  N.Watanabe, S.Ohtsuka, T.Iwasaki, K.Ono, Yasuro Iriye, S.Ueki, Osamu Nukaga, T.Kubota, M.Sugiyama, and S.Samukawa
- Organizer
  AVS 58th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Nashville
- Year and Date
  2011-11-03
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析2011
- Author(s)
  渡辺尚貴, 大塚晋吾, 岩崎拓也, 小野耕平,入江康郎, 額賀理, 植木真治, 杉山正和,久保田智広, 寒川誠二
- Organizer
  第28回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京
- Year and Date
  2011-09-26
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビーム生成におけるアパーチャ構造とエッチング特性解析2011
- Author(s)
  大塚晋吾, 渡辺尚貴, 岩崎拓也, 小野耕平,入江康郎, 額賀理, 植木真治, 杉山正和,久保田智広, 寒川誠二
- Organizer
  第28回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京
- Year and Date
  2011-09-27
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Fabrication of Diameter- And Thickness-Controlled Nanodisk by using Defect-Free Neutral Beam And Its Quantum Effect2008
- Author(s)
  久保田智広
- Organizer
  8th International Symposium on Advanced Fluid Information and Transdiscinlinary Fluid Integration
- Place of Presentation
  東北大学
- Year and Date
  2008-12-20
- Data Source
  KAKENHI-PROJECT-20560288
[Presentation] Coulomb-staircase Effect in Silicon-nanodisk Structures Fabricated Using Damage-free Cl Neutral Beam Etching2007
- Author(s)
  Tomohiro Kubota
- Organizer
  The 2007 Silicon Nanoelectronics Workshop
- Place of Presentation
  リーガロイヤルホテル京都(京都府京都市)
- Year and Date
  2007-06-10
- Data Source
  KAKENHI-PROJECT-18760049
[Presentation] Fabrication of defect-free and diameter-controlled silicon nanodisks for future quantum devices by using neutral beam etching2007
- Author(s)
  Tomohiro Kubota
- Organizer
  American Vacuum Society 54th International Symposium and Exhibition
- Place of Presentation
  Washington State Conventi on Center(米国シアトル)
- Year and Date
  2007-10-17
- Data Source
  KAKENHI-PROJECT-18760049
[Presentation] Feature Profile Evolution in Plasma Processing using On-wafer Monitoring System
- Author(s)
  Tomohiro Kubota and Seiji Samukawa
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka Convention Center
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology
- Author(s)
  Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa, and Takahito Ono
- Organizer
  The 9th International Conference on Nano/Micro Engineered and Molecular Systems
- Place of Presentation
  Hyatt Regency Waikiki,アメリカ
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] On-wafer monitoring technique for highly efficient fabrication process of nano energy devices
- Author(s)
  Tomohiro Kubota and Seiji Samukawa
- Organizer
  10th International Conference on Flow Dynamics
- Place of Presentation
  Sendai International Center
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング（６）
- Author(s)
  久保田智広
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Silicon micromechanical resonator with high quality factor fabricated by damage-free neutral beametching process
- Author(s)
  Halubai Sekhar，久保田智広，Van Toan Nguyen，小野崇人，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl2 Neutral Beam
- Author(s)
  Halubai Sekhar ，久保田智広，岡田　健，太田実雄，藤岡　洋，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウェハモニタリングによるプラズマエッチング形状異常予測
- Author(s)
  久保田智広，佐藤充男，岩崎拓也，小野耕平，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 3-Dimensional and Defect-free Etching by Neutral Beam for MEMS Applications
- Author(s)
  久保田智広
- Organizer
  2012 International Conference on Solid State Devices and Materials
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Numerical simulation of total processes of neutral beam etching from generation of neutral beam by collision of ions against graphite sidewall to 3-dimensional etching profile
- Author(s)
  Naoki Watanabe, Shingo Ohtsuka, Shunsuke Mochizuki, Tomohiro Kubota, Takuya Iwasaki, Yasuroh Iriye, Kohei Ono, and Seiji Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  Long Beach Convention Center,アメリカ
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 塩素中性粒子ビームを用いた窒化物薄膜のエッチング特性
- Author(s)
  太田実雄，Halubai Sekhar，久保田智広，岡田健，寒川誠二，藤岡洋
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] アンペロメトリックバイオイメージングプラットフォーム「バイオLSI」
- Author(s)
  井上久美、松平昌昭、伊野浩介、中野将識、菅野佑介、須田篤史、國方亮太、吉田慎哉、早坂丈、菊地良幸、Xijiang Chang、久保田智広、珠玖仁、田中秀治、寒川誠二、末永智一
- Organizer
  第74回分析化学討論会
- Place of Presentation
  日本大学工学部
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング（７）
- Author(s)
  久保田智広
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウェハモニタリングによるプラズマエッチング形状予測
- Author(s)
  久保田智広,佐藤充男, 岩崎拓也,小野耕平,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl2 Neutral Beam for High-Performance HEMTs
- Author(s)
  Halubai Sekhar, Tomohiro Kubota, Takeru Okada, Yosuke Tamura, ChangYong Lee, Jitsuo Ohta, Hiroshi Fujioka, and Seiji Samukawa
- Organizer
  The 3rd International Symposiumon Next-Generation Electronics
- Place of Presentation
  Chang Gung University,台湾
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウェハモニタリングによるプラズマプロセスダメージ・形状予測
- Author(s)
  久保田智広
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Feature profile evolution in plasma processing using on-wafer monitoring system
- Author(s)
  Tomohiro Kubota, Michio Sato, Takuya Iwasaki, Kohei Ono, and Seiji Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  Long Beach Convention Center,アメリカ
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングプロセスの総合的シミュレーション
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,望月俊輔,久保田智広,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-23360040

1. SAMUKAWA Seiji (30323108)

# of Collaborated Projects: 5 results

# of Collaborated Products: 64 results
2. HANE Kazuhiro (50164893)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. ONO Takahito (90282095)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. 熊谷慎也 (70333888)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. KONDO Michio (30195911)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

KUBOTA Tomohiro 久保田 智広

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遷移金属の新しい低温化学反応エッチングメカニズムの提案Principal Investigator

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Modeling of plasma process surface reaction mechanism using energy-controllable particle beamsPrincipal Investigator

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単電子デバイスのための積層量子ナノディスク構造の精密作製と量子特性制御Principal Investigator

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単一サブ10nm微細構造のためのマルチ同時解析装置の開発Principal Investigator

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サブ10nm量子ドットの超解像近接場分光

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Nanometer-scale processing and creation of novel functional materials using low energy high flux neutral beams

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[Journal Article] Proposal of High Current Gain Vibrating-Body Field-Effect Transistor2013

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[Journal Article] Energy-loss Mechanism of Single-crystal Silicon Microcantilever due to Surface Defects G.erated during Plasma Processing2013

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[Journal Article] Prediction of etching-shape anomaly due to distortion of ion sheath around a large-scale three-dimensional structure by means of on-wafer monitoring technique and computer simulation2013

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[Journal Article] Highly Selective Silicon Nitride Etching to Si and SiO_2 for Gate Sidewall Spacer Using CF_3I/O_2/H_2 Neutral Beam2013

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[Journal Article] Low-damage silicon etching using a neutral beam2013

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[Journal Article] Numerical study on electron transfer mechanism by collision of ions at graphite surface in highly efficient neutral beam generation2012

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[Journal Article] Coulomb-staircase observed in silicon-nanodisk structures fabricated by low-energy chlorine neutral beams2007

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[Journal Article] Low-damage fabrication of high aspect nanocolumns by using neutral beams and ferritin-iron-core mask2007

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KUBOTA Tomohiro 久保田智広