HATTORI Tadashi 服部正

Researcher Number	70326297
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2014: 兵庫県立大学, 高度産業科学技術研究所, 教授 2008: University of Hyogo, 高度産業化学技術研究所, 教授 2004 – 2008: 兵庫県立大学, 高度産業科学技術研究所, 教授 2001 – 2003: 姫路工業大学, 高度産業科学技術研究所, 教授
Review Section/Research Field	Principal Investigator Material processing/treatments / Science and Engineering / Applied optics/Quantum optical engineering Except Principal Investigator Analytical chemistry / Biomedical engineering/Biological material science / Nanomaterials/Nanobioscience / Biofunction/Bioprocess / Science and Engineering / 設計工学・機械要素・トライボロジー
Keywords	Principal Investigator MEMS / LIGA / NEMS / X線マスク / 放射光 / マイクロシステム / マイクロマシン / Micro Mold / Microsystems / Microfabrication … More / X-ray mask / Micromachine / Synchrotron orbit radiation / マイクロ・ナノファブリケイション / ナノ・マイクロファブリケーション / ナノマイクロファブリケーション / 放射 / ナノマイクロファブリケーショ / 高アスペクト比加工 / 三次元構造体 / マイクロアクチュエータ / X線リソグラフィ / LIGAプロセス / マイクロファブリケーション / X線リソグラフィー / X線イメージング / ガス増幅 / X線検出器 … More Except Principal Investigator アクチュエータ / reaction flow / bio reactor / micro mechanics / bio analysis / on chip analysis / environmental analysis / 反応流 / バイオリアクター / マイクロメカトロニクス / 生体分析 / チップ分析 / 環境分析 / endothelial cell / scaffold / stent / 光化学 / 内皮前駆細胞 / 微細加工 / 生体適合化 / ステント / X線 / 細胞・組織 / 燃料電池 / ナノ材料 / 三次元 / イメージング / 位相 / 顕微鏡 / Ｘ線 / アルキルフェノール / 酵素免疫法 / 多検体分析 / ナノ加工 / 積層型マイクロリアクター / 酵素免疫測定 / Micro-TAS / 内分泌攪乱物質 / 環境ホルモン / ELISA / 前立腺特異抗原 / ノニルフェノール / 酵素免疫測定法 / 放射光マイクロ加工 / マイクロリアクター / リハビリテーション / 精密位置決め / ロボット / 機能性材料 / 特殊環境 / 人工筋肉 / MEMS / 超精密位置決め / モータ / 高分子アクチュエータ / 圧電アクチュエータ / 空気圧アクチュエータ / 静電モータ / 新原理アクチュエータ / マイクロアクチュエータ / 超音波モータ Less

Development of high-sensitivity nm-scale 3D X-ray microscope using a laboratory X-ray source
- Principal Investigator
  
  YASHIRO Wataru
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nanomaterials/Nanobioscience
- Research Institution
  Tohoku University
Next-Generation Actuators Leading Breakthroughs
- Principal Investigator
  
  HIGUCHI Toshiro
- Project Period (FY)
  2004 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokyo
Development of a New Micro-Nano Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro ActuatorsPrincipal Investigator
- Principal Investigator
  
  HATTORI Tadashi
- Project Period (FY)
  2004 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  University of Hyogo
積層型マイクロリアクターによる多検体・多項目同時分析システムの開発
- Principal Investigator
  
  NEGORO Seiji
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Biofunction/Bioprocess
- Research Institution
  University of Hyogo
Research on micro environmental analysis using stacked miniaturized 3D chemical system
- Principal Investigator
  
  UTSUMI Yuichi
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Analytical chemistry
- Research Institution
  University of Hyogo
High-performance Stent Technology
- Principal Investigator
  
  MATSUDA Takehisa
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Biomedical engineering/Biological material science
- Research Institution
  KYUSHU UNIVERSITY
次世代アクチュエータ技術の予測調査研究
- Principal Investigator
  
  HIGUCHI Toshiro
- Project Period (FY)
  2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  設計工学・機械要素・トライボロジー
- Research Institution
  The University of Tokyo
ガス増幅型X線イメージング検出器の原理検証Principal Investigator
- Principal Investigator
  
  服部正
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Himeji Institute of Technology
Research of the fabrication for arbitrary 3D structure devices using synchrotron radiation (SR)Principal Investigator
- Principal Investigator
  
  HATTORI Tadashi
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Himeji Institute of Technology

All 2014 2013 2009 2008 2007 2006 2005 2004 Other

All Journal Article Presentation Book

[Book] "アクチュエータ工学",アクチュエータシステム技術企画委員会編集2004
- Author(s)
  服部正(分担執筆)
- Publisher
  株式会社養賢堂発行
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] A metallic glass grating for X-ray grating interferometers fabricated by imprinting2014
- Author(s)
  W. Yashiro, D. Noda, T. Hattori, K. Hayashi, A. Momose, and H. Kato
- Journal Title
  
  Appl. Phys. Exp.
  
  Volume: 7 Issue: 3 Pages: 32501-32501
- DOI
  10.7567/apex.7.032501
- NAID
  210000137015
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24310087, KAKENHI-PROJECT-24656004, KAKENHI-PROJECT-25286040, KAKENHI-PROJECT-26630341
[Journal Article] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2009
- Author(s)
  野田大二,服部正
- Journal Title
  
  日本AEM学会誌 Vol.17
  
  Pages: 162-167
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators2008
- Author(s)
  M. Setomoto, Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Journal Title
  
  Journal of Advanced Mechanical Design, Systems, and Manufacturing Vol.2
  
  Pages: 238-245
- NAID
  130000080773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2008
- Author(s)
  D. Noda, M. Setomoto, Y. Kobayashi, and T. Hattori
- Journal Title
  
  Proceedings of the Society of Photo- Optical Instrumentation Engineering Vol.7268
  
  Pages: 7268021-7268028
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of High Aspect Ratio Microcoil Using Dipping Method2008
- Author(s)
  D. Noda, S. Yamashita, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the 2007 IEEE International Symposium on Micro-Nano Mecha- tronics and Human Science Vol.2
  
  Pages: 174-179
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008
- Author(s)
  D. Noda, M. Setomoto, and T. Hattori,
- Journal Title
  
  Proceed ings of the 2008 IEEE International Symposium on Micro-Nano Mecha- tronics and Human Science
  
  Pages: 219-224
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Microcoils Using X-ray Lithography and Metallization2008
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  IEEJ Transaction on Sensors and Micromachines Vol.128
  
  Pages: 181-185
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Cylindrical Coils Created with 3D X-ray Lithography and Metallization for Electromagnetic Actuators2008
- Author(s)
  Y. Matsumoto, M. Setomoto, D. Noda, and T. Hattori
- Journal Title
  
  Microsystem Technologies Vol.14
  
  Pages: 1371-1379
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正,野田大二
- Journal Title
  
  日本設備管理会 Vol.19
  
  Pages: 9-14
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication and Estimation of Microcoils Using LIGA Process2007
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the 24th Sensor Symposium on Sensors, Micromach- ines, and Applied Systems
  
  Pages: 161-164
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正,野田大二
- Journal Title
  
  電気学会誌 Vol.127
  
  Pages: 288-290
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators2007
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the 2007 IEEE International Symposium on Micro-Nano Mecha- tronics and Human Science
  
  Pages: 436-441
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Design of Solenoidal Electromagnetic Micro- actuator Utilizing 3D X-ray Lithography and Metallization2007
- Author(s)
  H. Mochizuki, H. Mekaru, S. Kusumi, N. Sato, M. Shimizu, M. Yamashita, O. Shiada, and T. Hattori
- Journal Title
  
  Microsystem Technologies Vol.13
  
  Pages: 547-550
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of a Spiral Microcoil Using a 3D-LIGA Process2007
- Author(s)
  H. Mekaru, S. Kusumi, N. Sato, M. Shimizu, M. Yamashita, O. Shimada, and T. Hattori
- Journal Title
  
  Microsystem Technologies Vol.13
  
  Pages: 393-402
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正, 野田大二
- Journal Title
  
  日本設備管理学会誌 19
  
  Pages: 9-14
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] LIGAプロセスの三次元化とスパイラル型マイクロコイルの作製2007
- Author(s)
  銘苅春隆,久住真治,佐藤憲昭,清水正巳,山下満,嶋田修,服部正
- Journal Title
  
  電気学会論文誌C電子・情報・システム部門誌 Vol.127
  
  Pages: 160-166
- NAID
  10018480428
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正, 野田大二
- Journal Title
  
  電気学会誌 127
  
  Pages: 288-290
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロアクチュエータの製造技術2006
- Author(s)
  服部正他
- Journal Title
  
  日本AEM学会誌 14
  
  Pages: 174-179
- NAID
  110004862755
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロアクチュエータの超微細三次元加工技術2006
- Author(s)
  服部正
- Journal Title
  
  月刊 MATERIAL STAGE Vol.5
  
  Pages: 43-48
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロ3次元構造体の加工と今後の展開2006
- Author(s)
  服部正
- Journal Title
  
  電気学会論文誌Eセンサ・マイクロマシン準部門誌 Vol.126
  
  Pages: 211-215
- NAID
  10017582236
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] An Electromagnetic Actuators Using a Cylindrical Coil Created with 3D X-ray Lithography and Metallization Techniques2006
- Author(s)
  Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Journal Title
  
  Proceedings of the 2006 IEEE International Symposium on Micro-Nano Mechatro- nics and Human Science
  
  Pages: 143-148
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabri- cation of High Aspect Ratio Coil for Microactuators using LIGA Process2006
- Author(s)
  D. Noda, Y. Matsumoto, S. Yamashita, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the Society of Photo- Optical Instrumentation Engineering Vol.6414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロ3次元構造体の加工と今後の展開2006
- Author(s)
  服部正
- Journal Title
  
  電気学会論文誌Eセンサ・マイクロマシン準部門誌 126
  
  Pages: 211-215
- NAID
  10017582236
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロアクチュエータの超微細三次元加工技術2006
- Author(s)
  服部正
- Journal Title
  
  月刊MATERIAL STAGE 5
  
  Pages: 43-48
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロアクチュエータの製造技術2006
- Author(s)
  服部正,野田大二
- Journal Title
  
  日本AEM学会誌 Vol.14
  
  Pages: 174-179
- NAID
  110004862755
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Spiral Micro- Coil Utilizing LIGA Process2006
- Author(s)
  O. Shimada, S. Kusumi, H. Mekaru, N. Sato, M. Shimizu, M. Yamashita, and T. Hattori
- Journal Title
  
  JSME International Journal Vol.49
  
  Pages: 74-78
- NAID
  110004082848
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 次世代マイクロアクチュエータと超微細3次元加工技術2005
- Author(s)
  服部正
- Journal Title
  
  機械の研究 57
  
  Pages: 527-534
- NAID
  40006737021
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロコイルの製作2005
- Author(s)
  服部正他
- Journal Title
  
  日本設備管理学会17年度秋季大会
  
  Pages: 90-91
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 世代マイクロアクチュエータと超微細3次元加工技術2005
- Author(s)
  服部正
- Journal Title
  
  機械の研究 Vol.57
  
  Pages: 527-534
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Development of Three Dimensional LIGA Process to Fabricate Spiral Micro- coil2005
- Author(s)
  H. Mekaru, S. Kusumi, N. Sato, M. Yamashita, O. Shimada, and T. Hattori
- Journal Title
  
  Japanese Journal of Applied Physics Vol.44
  
  Pages: 5749-5754
- NAID
  10016678043
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation2004
- Author(s)
  H. Mekaru, S. Kusumi, N. Sato, M. Yamashita, O. Shimada, and T. Hattori
- Journal Title
  
  Japanese Journal of Applied Physics Vol.43
  
  Pages: 4036-4040
- NAID
  10013276590
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Spiral Micro-Coil Utiliz- ing LIGA Process2004
- Author(s)
  O. Shimada, S. Kusumi, H. Mekaru, N. Sato, M. Yamashita, and T. Hattori
- Journal Title
  
  Proceedings of the International Conference on Electrical Engineering 2004
  
  Pages: 553-556
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Ｘ線Talbot干渉計のための透過型金属ガラス回折格子の作製2014
- Author(s)
  矢代航、百生敦、野田大二、服部正、林好一、加藤秀実
- Organizer
  日本金属学会2014春期講演大会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-24310087
[Presentation] Ｘ線Talbot干渉計のための金属ガラス回折格子の作製2013
- Author(s)
  矢代航，野田大二，服部正，林好一，百生敦，加藤秀実
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京田辺
- Data Source
  KAKENHI-PROJECT-24310087
[Presentation] マイクロコイルの作製と電磁型アクチュエータへの展開2009
- Author(s)
  野田大二,瀬戸本勝,小林雄貴,服部正
- Organizer
  先端技術セミナー2009
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 無電解めっき法によるマイクロコイル用シード層の検討2009
- Author(s)
  小林雄貴,瀬戸本勝,山下健治,野田大二,服部正
- Organizer
  日本設備管理学会2008年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 次世代アクチュエータ研究の成果2009
- Author(s)
  野田大二,服部正
- Organizer
  先端技術セミナー2009
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2008
- Author(s)
  D. Noda, M. Setemoto, Y. Kobayashi, and T. Hattori
- Organizer
  SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems
- Place of Presentation
  RMIT University, Melbourne, Australia, 7268-01
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 二層ニッケル電鋳による高強度マイクロ金型の作製2008
- Author(s)
  木村太郎,佐和吉敬,山下健治,北谷武,山下満,野田大二,服部正
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学,3-119
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  第20回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  別府ビーコンプラザ,23B3-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] マイクロコイルの作製と電磁型アクチュエータへの展開2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  横浜国立大学,3203
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] ディッピング法を用いた立体マイクロコイルラインの形成2008
- Author(s)
  瀬戸本勝,松本吉史,越智大介,野田大二,服部正
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学,3-117
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 大面積電鋳装置の開発と大面積金型作製技術2008
- Author(s)
  木村太郎,山下健治,西田諭史,北谷武,佐和吉敬,野田大二,服部正
- Organizer
  日本設備管理学会2007年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型マイクロコイルを用いた電磁駆動型アクチュエータの作製2008
- Author(s)
  松本吉史,瀬戸本勝,越智大介,野田大二,服部正
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  明治大学,H19
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro Actua- tors2008
- Author(s)
  D. Noda and T. Hattori
- Organizer
  The 2nd International Sympo- sium on Next-Generation Actuators Leading Breakthroughs
- Place of Presentation
  APA Hotel & Resort Tokyo Bay Makuhari, Chiba, Japan, B3-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Spiral Micro Coil Lines for Micro Actuators Using X-ray Lithography and Metallization2008
- Author(s)
  M. Setomoto, Y. Matsumoto, D. Noda, and T. Hattori
- Organizer
  1th International Conference on New Actuators and 5th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P066
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型マイクロコイルを用いた電磁ソレノイドの作製2008
- Author(s)
  松本吉史,瀬戸本勝,越智大介,野田大二,服部正
- Organizer
  日本設備管理学会2007年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Narrow Pitch and High Aspect Ratio Microcoil for Electromagnetic Micro- actuators2008
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, D. Ochi, and T. Hattori
- Organizer
  11th International Conf- erence on New Actuators and 5th International Exhibition on Smart Actuators and Drive Systems (Actuator 2008)
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P065
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる電磁アクチュエータの作製2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  日本機械学会第8回機素潤滑設計部門講演会
- Place of Presentation
  倉敷アイビースクエア,1301
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] マイクロコイルを用いた電磁型アクチュエータの作製2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,越智大介,服部正
- Organizer
  先端技術セミナー2008
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 無電解ニッケル-ホウ素めっき法を用いた高硬度金型の作製2008
- Author(s)
  佐和吉敬,山下健治,北谷武,野田大二,服部正
- Organizer
  日本設備管理学会平成20年度創立20周年記念大会
- Place of Presentation
  パシフィコ横浜,OS2-4
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] X線リソグラフィによるマイクロコイルの製作2008
- Author(s)
  越智大介,瀬戸本勝,松本吉史,野田大二,服部正
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学,3-118
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro Actuators2008
- Author(s)
  Daiji Noda and Tadashi Hattori
- Organizer
  The 2^<nd> International Symposium on Next-Generation Actuators Leading Breakthroughs
- Place of Presentation
  Chiba, Japan
- Year and Date
  2008-04-17
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008
- Author(s)
  D. Noda, M. Setomoto, and T. Hattori
- Organizer
  2008 Inter- national Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya University, Nagoya, Japan, SA2-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Cylindrical Coils Created with 3D X-ray Lithography and Metallization for Electromagnetic Actuators2007
- Author(s)
  Y. Matsumoto, M. Setomoto, D. Noda, and T. Hattori
- Organizer
  7th International Workshop on High-Aspect-Ratio Micro-Structure Technology
- Place of Presentation
  CCI Doubs, Besancon, France
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 電磁駆動アクチュエータ用立体コイルラインの形成2007
- Author(s)
  瀬戸本勝,松本吉史,山下修平,野田大二,服部正
- Organizer
  平成19年電気学会全国大会
- Place of Presentation
  富山大学,3-125
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型マイクロコイルラインの高アスペクト比化とソレノイドアクチュエータへの応用2007
- Author(s)
  山下修平,松本吉史,瀬戸本勝,奥田孝一,野田大二,服部正
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  芝浦工業大学,L76
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 二層ニッケル電鋳法による高強度マイクロ金型の作製2007
- Author(s)
  佐和吉敬,木村太郎,山下健治,北谷武,山下満,野田大二,服部正
- Organizer
  日本設備管理学会平成19年度秋季研究発表大会
- Place of Presentation
  神戸市産業振興センタ-,A3.2
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators2007
- Author(s)
  M. Setomoto, Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Organizer
  2nd International Conference on Machine Design and Tribology
- Place of Presentation
  Hokkaido University, Sapporo, Japan, B02
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators2007
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Organizer
  2007 Inter- national Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya University, Nagoya, Japan, TA2-2-4
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比コイルを用いた電磁型アクチュエータ2007
- Author(s)
  松本吉史,瀬戸本勝,野田大二,山下修平,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  関西大学,2902
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによるマイクロコイルの作製と評価2007
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  第24回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  タワーホール船掘,Po-04
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 多層ニッケル電鋳による高強度金型の作製2007
- Author(s)
  木村太郎,佐和吉敬,山下健治,北谷武,山下満,野田大二,服部正
- Organizer
  第15回機械材料・材料加工技術講演会
- Place of Presentation
  長岡技術科学大学,117
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 電磁型アクチュエータ用高アスペクト比コイルの作製2007
- Author(s)
  松本吉史,瀬戸本勝,山下修平,野田大二,服部正
- Organizer
  先端技術セミナー2007
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルおよびアクチュエータの作製2007
- Author(s)
  山下修平,野田大二,服部正
- Organizer
  日本設備管理学会2006年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] マイクロコイルの製作2007
- Author(s)
  服部正,佐藤憲昭,山下満,島田修
- Organizer
  日本設備管理学会平成17年度秋季研究発表大会
- Place of Presentation
  四国電力(株)総合研修所,C1.1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比コイルを用いた電磁型アクチュエータ2007
- Author(s)
  野田大二,山下修平,松本吉史,瀬戸本勝,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  関西大学,2901
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabri- cation of High Aspect Ratio Microcoil Using by Dipping Method2007
- Author(s)
  D. Noda, S. Yamashita, Y. Matsumoto, M. Setomoto, and T. Hattori
- Organizer
  2nd International Conference on Machine Design and Tribology
- Place of Presentation
  Hokkaido University, Sapporo, Japan, B01
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2007
- Author(s)
  野田大二,山下修平,松本吉史,瀬戸本勝,服部正
- Organizer
  第19回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  早稲田大学,B324
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる微細ラインマイクロコイルの作製2007
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  第15回機械材料・材料加工技術講演会
- Place of Presentation
  長岡技術科学大学,116
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 電磁型マイクロアクチュエータ用マイクロコイルの製作2006
- Author(s)
  服部正,野田大二,嶋田修,佐藤憲昭,清水正己,山下満,銘苅春隆
- Organizer
  平成18年電気学会産業応用部門大会
- Place of Presentation
  名古屋工業大学,3-03-3
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Cylindrical Microcoil Line Through Surface Modification for Microactuators2006
- Author(s)
  S. Yamashita, S. Kusumi, O. Shimada, K. Okuda, D. Noda, and T. Hattori
- Organizer
  10th International Conference on New Actuators and 4th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P065
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generatic Micro Actuator2006
- Author(s)
  T. Hattori, D. Noda, and H. Ishigaki
- Organizer
  The 1st International Symposium on Next-Generation Actua- tors Leading Breakthroughs
- Place of Presentation
  Makuhari Prince Hotel, Chiba, Japan, A02-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる電磁アクチュエータの作製2006
- Author(s)
  野田大二,松本吉史,服部正
- Organizer
  日本機械学会第6回機素潤滑設計部門講演会
- Place of Presentation
  ホテル松島大観荘,2305
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] イオン照射によるPTFEとCu薄膜の密着力向上2006
- Author(s)
  山下修平,植田寛康,糸魚川貢一,野田大二,奥田孝一,服部正
- Organizer
  平成18年電気学会全国大会
- Place of Presentation
  横浜国立大学,3-128
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 電鋳によるマイクロ金型作製2006
- Author(s)
  山下健治,北谷武,服部正
- Organizer
  日本設備管理学会2005年度第3回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] An Electromagnetic Actuators Using a Cylindrical Coil Created with 3D X-ray Lithography and Metallization Techniques2006
- Author(s)
  Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Organizer
  2006 Inter- national Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya University, Nagoya, Japan, MP1-2-5
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of High Aspect Ratio Micro Coil for Microactuators using Three- Dimensional X-Ray Lithography Tech- nique2006
- Author(s)
  D. Noda, H. Mochizuki, Y. Matsumoto, S. Kusumi, N. Sato, M. Shimizu, M. Yamashita, O. Shimada, and T. Hattori
- Organizer
  10th International Conference on New Actuators and 4th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P061
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒コイルを用いた電磁型アクチュエータ2006
- Author(s)
  望月浩晃,久住真治,佐藤憲昭,清水正己,山下満,嶋田修,野田大二,服部正
- Organizer
  第19回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  名古屋大学,8P127M
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比を有する円筒型電磁アクチュエータの作製2006
- Author(s)
  野田大二,松本吉史,服部正
- Organizer
  第18回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  神戸国際会館,B2A14
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒コイルを用いた電磁型アクチュエータ2006
- Author(s)
  望月浩晃,野田大二,服部正
- Organizer
  ニュースバルセミナー2006
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabri- cation of High Aspect Ratio Coil for Microactuators Using LIGA Process2006
- Author(s)
  D. Noda, Y. Matsumoto, S. Yamashita, M. Setemoto, and T. Hattori
- Organizer
  SPIE International Symposium on Smart Materials, Nano- and Micro- Smart Systems
- Place of Presentation
  University of Adelaide, Adelaide, Australia, 6414-63
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 3次元X線リソグラフィ及びメタライズによる円筒型コイル作製2006
- Author(s)
  松本吉史,野田大二,山下修平,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  熊本大学,4102
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒コイルを用いた電磁型アクチュエータ2006
- Author(s)
  望月浩晃,松本吉史,野田大二,服部正
- Organizer
  平成18年電気学会全国大会
- Place of Presentation
  横浜国立大学,3-139
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比コイルを用いた電磁型アクチュエータ2006
- Author(s)
  野田大二,松本吉史,山下修平,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  熊本大学,4101
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Measurement of Friction Characteristics by an Inertia Drive System and Optimum Design of Piezoelectric Impact Drive Mechanism2006
- Author(s)
  N. Shibano, Y. Konishi, H. Ishigaki, and T. Hattori
- Organizer
  10th International Conference on New Actuators and 4th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P072
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Ni電鋳法によるマイクロ金型の製作2005
- Author(s)
  木村太郎,中郷直樹,竹田博昭,服部正
- Organizer
  平成17年電気学会全国大会
- Place of Presentation
  徳島大学,3-135
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒マイクロコイルのマイクロコイルライン作製2005
- Author(s)
  山下修平,服部正
- Organizer
  日本設備管理学会2005年度第2回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Ni電鋳法によるマイクロ金型の製作2005
- Author(s)
  木村太郎,中郷直樹,竹田博昭,服部正
- Organizer
  日本設備管理学会2004年度第5回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県立先端科学技術支援センター
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Ni電鋳によるマイクロ金型の作製2005
- Author(s)
  木村太郎,服部正
- Organizer
  日本設備管理学会2005年度第2回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型コイルを利用した電磁駆動ソレノイド型マイクロアクチュエータの製作2005
- Author(s)
  望月浩晃,銘苅春隆,服部正,久住真治,嶋田修,佐藤憲昭,山下満
- Organizer
  平成17年電気学会全国大会
- Place of Presentation
  徳島大学,3-121
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Design of Solenoidal Electromagnetic Microactuator utilizing 3D X-ray Lithography and Metal- lization, PD012005
- Author(s)
  H. Mochizuki, H. Mekaru, S. Kusumi, N. Sato, M. Yamashita, O. Shimada, and T. Hattori
- Organizer
  6th International Workshop on High-Aspect-Ratio Micro-Structure Technology
- Place of Presentation
  Hotel Hyundai, Gyeongju, Korea, PD03
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] H2Oイオンによる照射によるフッ素樹脂の表面改質2005
- Author(s)
  山下修平,瀬戸本豊,植田寛康,糸魚川貢一,奥田孝一,服部正
- Organizer
  日本設備管理学会2004年度第5回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県立先端科学技術支援センター
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Spiral Micro- Coil Utilizing LIGA Process2005
- Author(s)
  O. Shimada, S. Kusumi, H. Mekaru, N. Sato, M. Shimizu, M. Yamashita, and T. Hattori
- Organizer
  The 2nd JSME/ASME International Conference on Materials and Processing 2005
- Place of Presentation
  Seattle, Washington, USA, NTM-03
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒コイルを用いた電磁型アクチュエータ2005
- Author(s)
  望月浩晃,服部正
- Organizer
  日本設備管理学会2005年度第2回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型コイルを利用した電磁駆動ソレノイド型マイクロアクチュエータの製作2005
- Author(s)
  望月浩晃,銘苅春隆,服部正,久住真治,嶋田修,佐藤憲昭,山下満
- Organizer
  日本設備管理学会2004年度第5回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県立先端科学技術支援センター
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 3DLIGAプロセスによるスパイラル型マイクロコイルの作製2005
- Author(s)
  銘苅春隆,久住真治,佐藤憲昭,清水正巳,山下満,嶋田修,服部正
- Organizer
  第18回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  サンメッセ鳥栖,9C10
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Spiral Microcoil Utilizing 3D-LIGA Process2005
- Author(s)
  H. Mekaru, S. Kusumi, N. Sato, M. Shimizu, M. Yamashita, O. Shimada, and T. Hattori
- Organizer
  6th International Workshop on High- Aspect-Ratio Micro-Structure Technol- ogy
- Place of Presentation
  Hotel Hyundai, Gyeongju, Korea
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによるスパイラル型マイクロコイルの試作2005
- Author(s)
  銘苅春隆,久住真治,佐藤憲昭,清水正巳,山下満,嶋田修,服部正
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学,A76
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Development of 3D- LIGA Process to Fabricate Spiral Microcoil2004
- Author(s)
  H. Mekaru, S. Kusumi, N. Sato, M. Shimizu, M. Yamashita, O. Shimada, and T. Hattori
- Organizer
  2004 International Micro processes and Nanotechnology Conference
- Place of Presentation
  Hotel Hankyu Expo Park, Osaka, Japan, 29A-11-3
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] ソレノイド型マイクロアクチュエータの製作2004
- Author(s)
  望月浩晃,服部正
- Organizer
  日本設備管理学会2004年度第2回ナノマイクロ加工研究会
- Place of Presentation
  (独)産業技術総合研究所つくば東事業所
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] ウォーム成形技術のLIGAプロセスへの応用2004
- Author(s)
  佐藤憲昭,清水正巳,銘苅春隆,久住真治,山下満,嶋田修,服部正
- Organizer
  日本機械学会第4回機素潤滑設計部門講演会
- Place of Presentation
  ホテル大観,201
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Spiral Micro-Coil Utilizing LIGA Process2004
- Author(s)
  O. Shimada, S. Kusumi, H. Mekaru, N. Sato, M. Yamashita, and T. Hattori
- Organizer
  The International Conference on Electrical Engineering 2004
- Place of Presentation
  Sapporo Convention Center, Sapporo, Japan, OH4-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] シミュレーションによるマイクロ電磁弁の吸引力向上
- Author(s)
  松本吉史,望月浩晃,野田大二,服部正
- Organizer
  平成18年電気学会全国大会
- Place of Presentation
  横浜国立大学,3-138
- Data Source
  KAKENHI-PROJECT-16078212

1. UTSUMI Yuichi (80326298)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
2. MEKARU Harutaka (30321681)

# of Collaborated Projects: 3 results

# of Collaborated Products: 18 results
3. YOKOTA Shinichi (10092579)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. HIGUCHI Toshiro (10111569)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. SUZUMORI Kouichi (00333451)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. KUROSAWA Minoru (70170090)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. NORITSUGU Toshiro (70043726)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. NEGORO Seiji (90156159)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
9. TAKEO Masahiro (40236443)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
10. YOSHIDA Kazuhiro (00220632)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. YAMAMOTO Akio (40313035)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. KANDA Takefumi (30346449)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. ISHIGAKI Hiroyuki (40081244)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. NODA Daiji (00378267)

# of Collaborated Projects: 1 results

# of Collaborated Products: 66 results
15. YASHIRO Wataru (10401233)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
16. MIKI Kazushi (30354335)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. MIZUTANI Haruo (40444103)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. MATSUDA Takehisa (60142189)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. KIDOAKI Satoru (10336018)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. SHIMOKAWA Hiroaki (00235681)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 白石昌武 (10091860)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. 中田毅 (50256632)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. 石垣博行

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results

HATTORI Tadashi 服部 正

Research Projects

Research Products

Co-Researchers

Development of high-sensitivity nm-scale 3D X-ray microscope using a laboratory X-ray source

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Next-Generation Actuators Leading Breakthroughs

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Development of a New Micro-Nano Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro ActuatorsPrincipal Investigator

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積層型マイクロリアクターによる多検体・多項目同時分析システムの開発

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Research on micro environmental analysis using stacked miniaturized 3D chemical system

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High-performance Stent Technology

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次世代アクチュエータ技術の予測調査研究

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ガス増幅型X線イメージング検出器の原理検証Principal Investigator

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Research of the fabrication for arbitrary 3D structure devices using synchrotron radiation (SR)Principal Investigator

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[Book] "アクチュエータ工学",アクチュエータシステム技術企画委員会編集2004

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[Journal Article] A metallic glass grating for X-ray grating interferometers fabricated by imprinting2014

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[Journal Article] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2009

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[Journal Article] Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators2008

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NAID

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[Journal Article] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2008

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HATTORI Tadashi 服部正