Kumagai Shinya 熊谷慎也

… Alternative Names

KUMAGAI Shinya 熊谷慎也

熊谷慎也クマガイシンヤ

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Researcher Number	70333888
Other IDs
Affiliation (Current)	2025: 名城大学, 理工学部, 教授
Affiliation (based on the past Project Information) *help	2018 – 2021: 名城大学, 理工学部, 教授 2008 – 2015: 豊田工業大学, 工学部, 准教授 2014: 豊田工業大学 2010: Toyota Technological Institute, 大学院・工学研究科, 准教授 2004: 東北大学, 流体科学研究所, 助手 2004: 松下電器産業株式会社, 先端技術研究所, 研究員 2002 – 2003: 東北大学, 電気通信研究所, 助手
Review Section/Research Field	Principal Investigator Basic Section 90110:Biomedical engineering-related / Medium-sized Section 90:Biomedical engineering and related fields / Plasma electronics / Nanostructural science / Applied physics, general / Microdevices/Nanodevices / Thin film/Surface and interfacial physical properties Except Principal Investigator Thin film/Surface and interfacial physical properties / Sports science / Measurement engineering / Science and Engineering / Applied physics, general / Applied physics, general
Keywords	Principal Investigator 細胞 / マイクロ・ナノデバイス / マイクロマシン / プラズマ / 大気圧プラズマ / 遺伝子導入 / マイクロデバイス / プラズマオンチップ / 幹細胞 / 形質転換 … More / 細胞分化制御 / シングルセル / 低温大気圧プラズマ / プラズマ医療 / MEMS / セルフアセンブリ / ナノ材料 / MEMS/NEMS / ナノ・バイオ材料 / マイクロ流体デバイス / 流れ解析 / マイクロ流路デバイス / ナノバイオ / センサー / マイクロミラー / オンウェハモニタリング / 分光 / フォトダイオード / 光導波路 … More Except Principal Investigator マイクロ・ナノデバイス / エッチング / 中性粒子ビーム / マイクロマシン / nanocolumn / fin-type vertical MOSFET / low-k film / gate electrode etching / silicon oxynitride / negative ion / etching / neutral beam / 薄膜形成 / シリコン酸窒膜 / ナノ加工 / 半導体デバイス / エッチングダメージ / 起立ゲート型トランジスタ / 高誘電率膜 / 有機分子デバイス / カーボンナノチューブ / 表面改質 / ナノカラム / フィン型MOSFET / 低誘電率絶縁膜 / ゲート電極加工 / シリコン酸窒化膜 / 負イオン / 容量 / 容量検出 / スポーツ / 無拘束 / 長期安定性 / 皮膚 / 周波数特性 / 運動中の呼吸測定 / 締め付け無し / 容量計測 / 呼吸センサ / ウェアラブルセンサ / 温度特性 / Q値 / 感度 / 多結晶シリコン / 薄膜トーションバー / 張力 / 非線形バネ / 非線形効果 / 振動型 / 赤外線センサ / 計測工学 / 低電圧駆動 / 温度補償 / 静電駆動 / マイクロミラー / MEMSアクチュエータ / マイクロマシンプローブ / Bow-tieアンテナ型 / 表面プラズモン / Bow-tieアンテナ / 近接場光 / Pbセンター / 低ダメージエッチング / フェリチン / 量子ドット / 蓄積電荷量 / フォトン / イオンエネルギー / オンウエハーモニタリング / モニタリング / 薄膜堆積 / 微細加工 / 側壁導電性 / 電子エネルギー分布 / イオンエネルギー分布 / センサー / 光照射損傷 / プラズマプロセス / オンウエハモニタリング Less

A gene delivery microdevice utilizing atmospheric pressure plasma targeting for single cellsPrincipal Investigator
- Principal Investigator
  
  Kumagai Shinya
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 90110:Biomedical engineering-related
- Research Institution
  Meijo University
A gene delivery microdevice for single cellsPrincipal Investigator
- Principal Investigator
  
  Kumagai Shinya
- Project Period (FY)
  2018 – 2019
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 90:Biomedical engineering and related fields
- Research Institution
  Meijo University
Plasma-on-ChipPrincipal Investigator
- Principal Investigator
  
  Kumagai Shinya
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma electronics
- Research Institution
  Toyota Technological Institute
Development of Wearable Respiratory Sensor and Practical Application
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Sports science
- Research Institution
  Toyota Technological Institute
Making device functions on microtrench sidewall through three-dimensional photolithograpyPrincipal Investigator
- Principal Investigator
  
  KUMAGAI Shinya
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Toyota Technological Institute
Making micro-/nano-device structures by self-assembly using environmental-friendly in-solution processPrincipal Investigator
- Principal Investigator
  
  KUMAGAI Shinya
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Nanostructural science
- Research Institution
  Toyota Technological Institute
Highly sensitive infra-red sensor using non-linear vibration
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Measurement engineering
- Research Institution
  Toyota Technological Institute
Tension-controlled MEMS spatial light modulator by using bionano particlesPrincipal Investigator
- Principal Investigator
  
  KUMAGAI Shinya
- Project Period (FY)
  2009 – 2010
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Toyota Technological Institute
Stabilized Temperature Characteristics, High-Speed Response, and Low-Voltage Driving of Micromirror
- Principal Investigator
  
  SASAKI Minoru
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Toyota Technological Institute
サブ10nm量子ドットの超解像近接場分光
- Principal Investigator
  
  寒川誠二
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
オンウェハー・マイクロラジカル・イオン分析器による表面反応解析Principal Investigator
- Principal Investigator
  
  熊谷慎也
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University
Nanometer-scale processing and creation of novel functional materials using low energy high flux neutral beams
- Principal Investigator
  
  SAMUKAWA Seiji
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University
超高精度プラズマプロセス用オンウエハーモニタリングシステムの構築
- Principal Investigator
  
  SAMUKAWA Seiji
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University

All 2022 2021 2020 2019 2018 2016 2015 2014 2013 2012 2011 2010 2009 2008 Other

All Journal Article Presentation

[Journal Article] プラズマオンチップ：マイクロデバイスでプラズマが細胞に及ぼす作用の解明に挑む2021
- Author(s)
  熊谷慎也，小林未明，呉準席，友田紀一郎，清水鉄司，佐々木実
- Journal Title
  
  応用物理学会　プラズマエレクトロニクス分科会　会報
  
  Volume: 74 Pages: 15-20
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H04457
[Journal Article] プラズマオンチップ　ー低温大気圧プラズマで細胞を制御するマイクロデバイスー2021
- Author(s)
  熊谷慎也
- Journal Title
  
  名城大学総合研究所　紀要
  
  Volume: 26 Pages: 13-16
- Data Source
  KAKENHI-PROJECT-19H04457
[Journal Article] <i>Plasma-on-Chip</i>: Device for Non-thermal Atmospheric Pressure Plasma Irradiation to Single Cells2020
- Author(s)
  Shinya Kumagai, Mime Kobayashi, Tetsuji Shimizu, Minoru Sasaki
- Journal Title
  
  IEEJ Transactions on Electronics, Information and Systems
  
  Volume: 140 Issue: 4 Pages: 452-456
- DOI
  10.1541/ieejeiss.140.452
- NAID
  130007825179
- ISSN
  0385-4221, 1348-8155
- Year and Date
  2020-04-01
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H04457
[Journal Article] Measurement of hydroxyl radicals delivered into liquid through a micro gas-liquid interface2020
- Author(s)
  Koichi Ishikawa, Minoru Sasaki, Shinya Kumagai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 59 Issue: SA Pages: SAAC11-SAAC11
- DOI
  10.7567/1347-4065/ab5171
- NAID
  210000157438
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H04457, KAKENHI-PROJECT-18K19942
[Journal Article] Plasma-on-chip device for stable irradiation of cells cultured in media with a low-temperature atmospheric pressure plasma2016
- Author(s)
  T. Okada, C.-Y. Chang, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Journal Title
  
  Archives of Biochemistry and Biophysics
  
  Volume: in press Pages: 11-18
- DOI
  10.1016/j.abb.2016.04.001
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Journal Article] Development of plasma-on-chip: Plasma treatment for individual cells cultured in media2016
- Author(s)
  S. Kumagai, C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 1S Pages: 01AF01-01AF01
- DOI
  10.7567/jjap.55.01af01
- NAID
  210000145988
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Journal Article] A Wearable Capacitive Sensor to Monitor Human Respiratory Rate2013
- Author(s)
  Subrata Kumar Kundu, Shinya Kumagai, Minoru Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 4S Pages: 04CL05-04CL05
- DOI
  10.7567/jjap.52.04cl05
- Data Source
  KAKENHI-PROJECT-24650397
[Journal Article] Investigation of Optical Flatness of Stretched Membrane Drum-Type Micromirror2012
- Author(s)
  Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki
- Journal Title
  
  Journal of Lightwave Technology
  
  Volume: Vol.30 Issue: 10 Pages: 1377-1385
- DOI
  10.1109/jlt.2012.2186432
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21656105
[Journal Article] Multiple-Height Microstructure Fabricated by Deep Reactive IonEtchingd Selective Ashing of Resist Layer Cmbined with Ultraviolet Curing2012
- Author(s)
  Shinya Kumagai, Akiyoshi Hikita, Takuya Iwamoto, Takashi Tomikawa, Masaru Hori, Minoru Sasaki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Vol.51 Issue: 1S Pages: 01AB04-01AB04
- DOI
  10.1143/jjap.51.01ab04
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21656105
[Journal Article] Characteristics of Improved Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2009
- Author(s)
  Takuro AONUMA, Shinya KUMAGAI, Minoru SASAKI, Motoki TABATA, Kazuhiro HANE
- Journal Title
  
  electrical wire (a) (b) Japanese Journal of Applied Physics Vol.48, No.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Uniformity of the Introduction of Substance into Cells by Plasma at hte Micro Air-Liquid Interface2022
- Author(s)
  Yuki Tsutsui, Motonari Suzuki, Shinya Kumagai
- Organizer
  ISPLASMA2022/IC-PLANTS2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] 筋芽細胞C2C12に対する大気圧プラズマの効果2022
- Author(s)
  熊谷慎也、牧野克俊、日比滉大
- Organizer
  プラズマプロセシング研究会(SPP)
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Non-Thermal Atmospheric Pressure Plasma Potentiates Mesodermal Differentiation of Human iPS Cells2022
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Tetsuji Shimizu, Michio Asahi, Shinya Kumagai
- Organizer
  ISPLASMA2022/IC-PLANTS2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Study on Dielectric Barrier Discharge Plasma Irradiation Conditions for the Measurement of Active Species Passing through Lipid Bilayers2022
- Author(s)
  Yuto Ando, Shinya Kumagai
- Organizer
  ISPLASMA2022/IC-PLANTS2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Analysis of Cells Directly Irradiated with Cold Atmospheric Pressure Plasma2022
- Author(s)
  Yuki Ogawa, Motonari Suzuki, Shinya Kumagai
- Organizer
  ISPLASMA2022/IC-PLANTS2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] 貫通孔上に展開した脂質二重膜へのプラズマ照射2021
- Author(s)
  安東優人、熊谷慎也
- Organizer
  2021年第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Plasma-on-Chip for Biological Application: A Microdevice for Stimulating Single Cell with Non-Thermal Atmospheric Pressure Plasma2021
- Author(s)
  Yuki Tsutsui, Motonari Suzuki, Shinya Kumagai
- Organizer
  Interfinish 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Analysis of plasma-generated hydroxyl radical delivered area in liquid using microdevice structure2021
- Author(s)
  Yuki Niwa, Yusaku Matsui, Shinya Kumagai
- Organizer
  13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 14th International Conference on Plasma-Nano Technology & Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Elucidation of cell surface topography with plasma irradiation by scanning probe microscopy2021
- Author(s)
  Nguyen Gia Han, Linhao Sun, Tatsuya Kitazaki, Shinya Kumagai, Shinji Watanabe
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] 大気圧プラズマがiPS細胞分化に与える影響の解析2021
- Author(s)
  小林未明、友田紀一郎、清水鉄司、朝日通雄、熊谷慎也
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Effects of non-thermal atmospheric pressure plasma on cell membrane for efficient substance intake2021
- Author(s)
  Tatsuya Kitazaki, Shinya Kumagai
- Organizer
  13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 14th International Conference on Plasma-Nano Technology & Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] プラズマオンチップ：細胞に直接プラズマを照射するマイクロデバイス2021
- Author(s)
  熊谷慎也
- Organizer
  第31回日本MRS年次大会
- Invited
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] プラズマオンチップ2021
- Author(s)
  熊谷慎也、小林未明、友田紀一郎、呉準席、清水鉄司、佐々木実
- Organizer
  第68回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] 大気圧プラズマによる細胞膜形状変化と遺伝子導入の相関2021
- Author(s)
  北崎竜也、小林未明、朝日通雄、熊谷慎也
- Organizer
  2022年第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] 高効率物質導入に向けたプラズマが与える細胞膜への影響の評価2021
- Author(s)
  北崎竜也、熊谷慎也
- Organizer
  2021年第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Gene expression changes in iPS cellscaused by non-thermal atmospheric pressure plasma irradiations2021
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Tetsuji Shimizu, Michio Asahi, Shinya Kumagai
- Organizer
  13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials 14th International Conference on Plasma-Nano Technology & Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] 高効率遺伝子導入に向けた細胞膜上の大気圧プラズマ誘起微細孔の評価2020
- Author(s)
  北崎竜也、熊谷慎也
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Effects of non-thermal atmospheric pressure plasma on iPS cell differentiation2020
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Michio Asahi, Shinya Kumagai
- Organizer
  The 67th JSAP Spring Meeting 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Measurement of time evolution of fluorescent reagent introduction rate into cells towards efficient plasma gen transfection2020
- Author(s)
  Tatsuya Kitazaki, Shinya Kumagai
- Organizer
  ISPlasma2020/IC-PLANTS2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Effects of non-thermal atmospheric pressure plasma on iPS cell differentiation2020
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Michio Asahi, Shinya Kumagai
- Organizer
  The 67th JSAP Spring Meeting 2020
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Measurement of time evolution of fluorescent reagent introduction rate into cells towards efficient plasma gen transfection2020
- Author(s)
  Tatsuya Kitazaki, Shinya Kumagai
- Organizer
  ISPlasma2020/IC-PLANTS2020
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Plasma-on-Chip: A micro device for irradiating single cells with non-thermal atmospheric pressure plasma2019
- Author(s)
  Shinya Kumagai, Mime Kobayashi, Jun-Seok Oh, Tetsuji Shimizu, Minoru Sasak
- Organizer
  3rd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP 2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Effects of non-thermal atmospheric pressure plasma on iPS cell differentiation2019
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Michio Asahi, Shinya Kumagai
- Organizer
  CiRA 2019 International Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Plasma-on-Chip for Biological Application: A Microdevice for Stimulating Single Cell with Non-Thermal Atmospheric Pressure Plasma2019
- Author(s)
  Shinya Kumagai
- Organizer
  2019 International Conference on Solid State Devices and Materials, Satellite Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Low temperature plasma for controlling iPS cell differentiation2019
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Michio Asahi, Shinya Kumagai
- Organizer
  The 72nd Annual Gaseous Electronics Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Plasma-on-Chip: An innocative microdevice targeting for cell fate control using non-thermal atmospheric pressure plasma2019
- Author(s)
  Shinya Kumagai, Mime Kobayashi, Tetsuji Shimizu, Minoru Sasaki
- Organizer
  CiRA 2019 International Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Improving substance intake efficiency using non-thermal atmospheric pressure plasma towards single cell gene transfection2019
- Author(s)
  Atsuki Hobo, Mime Kobayashi, Shinya Kumagai
- Organizer
  The 80 th JSAP Autumn Meeting 2019
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Irradiating single cells with cold atmospheric pressure plasma using a microdevice2019
- Author(s)
  Shinya Kumagai, Mime Kobayashi, Tetsuji Shimizu, Minoru Sasaki
- Organizer
  Asian-Europian International Conference on Plasma Surface Engineering (AEPSE 2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Low temperature plasma for controlling iPS cell differentiation2019
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Michio Asahi, Shinya Kumagai
- Organizer
  The 72nd Annual Gaseous Electronics Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Plasma-on-Chip: An innocative microdevice targeting for cell fate control using non-thermal atmospheric pressure plasma2019
- Author(s)
  Shinya Kumagai, Mime Kobayashi, Tetsuji Shimizu, Minoru Sasaki
- Organizer
  CiRA 2019 International Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Irradiating single cells with cold atmospheric pressure plasma using a microdevice2019
- Author(s)
  Shinya Kumagai
- Organizer
  Asian-Europian International Conference on Plasma Surface Engineering (AEPSE 2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Plasma-on-Chip: A micro device for irradiating single cells with non-thermal atmospheric pressure plasma2019
- Author(s)
  Shinya Kumagai
- Organizer
  3rd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP 2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Plasma-on-Chip for Biological Application: A Microdevice for Stimulating Single Cell with Non-Thermal Atmospheric Pressure Plasma2019
- Author(s)
  Shinya Kumagai
- Organizer
  2019 International Conference on Solid State Devices and Materials, Satellite Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H04457
[Presentation] Effects of non-thermal atmospheric pressure plasma on iPS cell differentiation2019
- Author(s)
  Mime Kobayashi, Kiichiro Tomoda, Michio Asahi, Shinya Kumagai
- Organizer
  CiRA 2019 International Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Improving substance intake efficiency using non-thermal atmospheric pressure plasma towards single cell gene transfection2019
- Author(s)
  Atsuki Hobo, Mime Kobayashi, Shinya Kumagai
- Organizer
  The 80 th JSAP Autumn Meeting 2019
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] 【2018年度応用物理学会優秀論文賞受賞記念講演】Development of plasma-on-chip: Plasma treatment for individual cells　cultured in media2018
- Author(s)
  Shinya Kumagai, Chun-Yao Chang, Jonghyeon Jeong, Mime Kobayashi, Tetsuji Shimizu, Minoru Sasaki
- Organizer
  2018年第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19942
[Presentation] Plasma-on-chip: Plasma-on-Chip: Evidence of Reactive Species Through Through-Holes2016
- Author(s)
  J.-S. Oh, S. Kojima, A. Hatta, M. Sasaki, S. Kumagai
- Organizer
  ISPlasma 2016/IC-PLANTS 2016
- Place of Presentation
  Nagoya University, Nagoya, Japan
- Year and Date
  2016-03-06
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Measurement of Reactive Species for the Development of Plasma-on-Chip2016
- Author(s)
  J.-S. Oh, S. Kojima, A. Hatta, M. Sasaki, S. Kumagai
- Organizer
  2016年春季応用物理学会
- Place of Presentation
  東京工業大学　大岡山キャンパス（東京都・目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Plasma-on-Chip for Treatment of Individual Cells Cultured in Medium2015
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  2015年秋季応用物理学会
- Place of Presentation
  名古屋国際会議場　（愛知県・名古屋市）
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Plasma-on-chip device for analyzing interactions between plasma gas and individual cells2015
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  The International Chemical Congress of Pacific Basin Societies 2015 (Pacifichem 2015)
- Place of Presentation
  Honolulu, Hawaii, USA
- Year and Date
  2015-12-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] 容量計測型呼吸センサのための衣服組み込み電極2015
- Author(s)
  寺澤槙恵、熊谷慎也、佐々木実
- Organizer
  第62回　応用物理学会　春季学術講演会　11p-A29-9
- Place of Presentation
  東海大学
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] Irradiating cells cultured in microwells with low-temperature atmospheric pressure plasma2015
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  he 10th Asian-Europian International Conference on Plasma Surface Engineering (AEPSE2015)
- Place of Presentation
  Jeju, Korea
- Year and Date
  2015-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] DESINGING POSITIONS OF GRAIN BOUNDARIES IN SI THIN-FILM FOR LOW-ENERGY-LOSS OPTICAL MEMS/NEMS DEVICES2014
- Author(s)
  T. Tomikawa, J.-H. Jeong, S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki
- Organizer
  IEEE Optical MEMS and Nanophotonics 2014
- Place of Presentation
  Glasgow, Scotland
- Data Source
  KAKENHI-PROJECT-24681020
[Presentation] 容量計測による衣服型呼吸センサ2014
- Author(s)
  クンドウスブラタクマル，熊谷慎也，佐々木実
- Organizer
  第31回「センサ・マイクロマシンと応用システム」シンポジウム 21pm3-PS082
- Place of Presentation
  松江
- Year and Date
  2014-10-21
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] 着衣可能な容量型呼吸センサ2013
- Author(s)
  クンドウスブラタクマル，熊谷慎也，佐々木実
- Organizer
  第60回応用物理学会春季学術講演会, 29p-PA4-9, p.22-020
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] A microfluidics device with thermocouples fabricated on sidewall2013
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  JSAP-MRS Joint Symposia
- Place of Presentation
  (18a-M3-5)
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] A Thermocouple Device Fabricated on Trench Sidewall for Measuring Accurate Temperature of Microfluid2013
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials, Fukuoka
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] Self-Assembly Patterning of Nanomaterials using Electrostatic Interaction in Solution2012
- Author(s)
  Shinya Kumagai, Shigeo Yoshii, Naofumi Okamoto, Kazuaki Nishio, Ichiro Yamashita
- Organizer
  2012 IEEE Nanotechnology Materials and Devices Conference
- Place of Presentation
  Hawaii, USA
- Year and Date
  2012-10-19
- Data Source
  KAKENHI-PROJECT-24681020
[Presentation] Analysis of Hard Sring Effect of Tense Poly-Si Torsion Bar of Micromirror Proc2012
- Author(s)
  Subrata Kumar Kundu, Shouhei Ogawa, Shinya Kumagai, Masayuki Fujishima, Kazuhiro Hane, Minoru Sasaki
- Organizer
  2011 IEEE Int. Conf. on Optical MEMS and Nanophotonics
- Place of Presentation
  Banff, Canada in schedule
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] 張力を持つ薄膜MEMSねじり振動子を利用したセンサ2012
- Author(s)
  山崎辰也, 佐々木実, 熊谷慎也
- Organizer
  日本機械学会東海学生会第43回学生員卒業研究発表講演会,1003
- Place of Presentation
  名古屋工業大学
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] 張力を持つ簿膜MEMSねじり振動子を利用したセンサ2012
- Author(s)
  山崎辰山, 佐々木実, 熊谷慎也
- Organizer
  日本機械学会,東海学生会,第43回学生員卒業研究発表講演会
- Place of Presentation
  名古屋工業大学
- Year and Date
  2012-03-14
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] マイクロミラー用薄膜トーションバーにおけるハードスプリング効果の評価2012
- Author(s)
  小川翔平, 熊谷慎也, 佐々木実
- Organizer
  第59回応用物理学関係連合講演会講演予稿集15p-GP3-21,p.22-021
- Place of Presentation
  早稲田大
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Self-Assembly Patterning of Nanomaterialsusing Electrostatic Interaction2012
- Author(s)
  Shinya Kumagai, Shigeo Yoshii, Naofiimi Okamoto, Kazuaki Nishio, Ichiro Yamashita
- Organizer
  International Union of Materials Research Societies - International Conference on Electronic Materials 2012 (IUMRS-ICEM 2012)
- Place of Presentation
  Pacifico Yohokama
- Year and Date
  2012-09-24
- Data Source
  KAKENHI-PROJECT-24681020
[Presentation] マイクロミラー用簿膜トーションバーにおけるハードスプリング効果の評価2012
- Author(s)
  小川翔平, 熊谷慎
- Organizer
  第59回応用物理学関係連合講演会,講演予稿集
- Place of Presentation
  早稲田大
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Wearable Capacitive Breathing Sensor2012
- Author(s)
  Subrata Kumar Kundu, Shinya Kumagai, Minoru Sasaki
- Organizer
  Extended Abstracts of the 2012 International Conference on Solid State Devices and Materials, Late News, PS-11-14L, pp.386-387
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-24650397
[Presentation] Photoresist Spray Coating For 3D MEMS/NEMS2012
- Author(s)
  Shinya Kumagai, Taichi Yamamoto, Hironori Kubo, Minoru Sasaki
- Organizer
  2012 IEEE Nanotechnology Materials and Devices Conference
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] Dynamic Deformation of Stretched Membrane in Drum-Type Micromirror2011
- Author(s)
  Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of 2011 International Symposium on Micro-NanoMechatronics and Human Science pp.255-260
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Multiple-height Microstructure Fabricated by ICP-RIE and Masking Layers Using Only Photoresists2011
- Author(s)
  A.HIKITA, T.IWAMOTO, S.KUMAGAI, M.SASAKI
- Organizer
  Proc.3rd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, P2-009A, p.101
- Place of Presentation
  名古屋
- Year and Date
  2011-03-08
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] UVキュアによるレジスト硬化を利用した多段階立体構造のエッチング加工2011
- Author(s)
  熊谷慎也, 疋田晃義, 岩本拓也, 佐々木実
- Organizer
  第58回応用物理学関係連合講演会講演予稿集
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Nonlinear spring characteristics analyzed by a macro model of an electrostatically driven micromirror device2011
- Author(s)
  Shinya Kumagai, Gyu II Shim, Ryoichi Mimoto, Minoru Sasaki
- Organizer
  Proceedings of the 4th international conference on manufacturing, machine design and tribology, pp.237-238
- Place of Presentation
  Gamagori, Aichi
- Year and Date
  2011-04-26
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] マイクロミラー用薄膜トーションバーの精密計測とハードスプリング効果に関する考察2011
- Author(s)
  小川翔平, 熊谷慎也, 佐々木実
- Organizer
  日本機械学会東海支部第60期総会講演会講演論文集609
- Place of Presentation
  豊橋技術科学大学
- Year and Date
  2011-03-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] マイクロミラー用簿膜トーションバーの精密計測とハードスプリング効果に関する考察2011
- Author(s)
  小川翔平, 熊谷慎也, 佐々木実
- Organizer
  日本機械学会東海支部第60期総会講演会講演論文集
- Place of Presentation
  豊橋技術科学大学
- Year and Date
  2011-03-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Nonlinear spring characteristics analyzed b y a macro model of an electrostatically driven micromirror device2011
- Author(s)
  Shinya Kumagai, Gyu I1 Shim, Ryoichi Mimoto, Minoru Sasaki
- Organizer
  Proceedings of the 4th intnational conference on manufacturing, machine design and tribology
- Place of Presentation
  蒲郡
- Year and Date
  2011-04-26
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] BIONANO CRYSTALLIZED POLY-SI FILM FOR INCREASING TENSILE STRESS IN MEMS/NEMS DEVICE STRUCTURES2011
- Author(s)
  S.Kumagai, S.Miyachi, I.Yamashita, Y.Uraoka, M.Sasaki
- Organizer
  Proc.Transducers 2011 1733
- Place of Presentation
  Beijing, China.
- Year and Date
  2011-01-07
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Light-Weighted Micromirror Fabricated Using Stacked Photoresist Masks Reaized by UV Curing2011
- Author(s)
  A. Hikita, T. Iwamoto, S. Kumagai, M. Sasaki
- Organizer
  Proceedings of the 4th International Conference on PLAsma-Nano Technology and Science
- Place of Presentation
  高山
- Year and Date
  2011-03-11
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Light-Weighted Micromirror Fabricated Using Stacked Photoresist Masks Realized by UV Curing2011
- Author(s)
  A.Hikita, T.Iwamoto, S.Kumagai, M.Sasaki
- Organizer
  Proceedings of the 4th International Conference on PLAsma-Nano Technology and Science, O-06
- Place of Presentation
  高山
- Year and Date
  2011-03-11
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] UVキュアによるレジスト硬化を利用した多段階立体構造のエッチング加工2011
- Author(s)
  熊谷慎也, 疋田晃義, 岩本拓也, 佐々木実
- Organizer
  第58回応用物理学関係連合講演会講演予稿集,25a-KU-15,03-039
- Place of Presentation
  神奈川工科大学(大震災のため、予稿集による発表扱い)
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Dynamic Deformation of Stretched Membrane in Drum-Type Micromirror2011
- Author(s)
  Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of 2011 International Symposium on Micro-NanoMechatronics and Human Science
- Place of Presentation
  名古屋
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Multiple-height Microstructure Fabricated by ICP-RIE and Masking Layers Using Only Photoresists2011
- Author(s)
  A. HIKITA, T. IWAMOTO, S. KUMAGAI, M. SASAKI
- Organizer
  Proc. 3rd Int. Symp. Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  名古屋
- Year and Date
  2011-03-08
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Increasing tensile stress in poly-Si film structure by metal-induced lateral crystallization using ferritin supramolecules with Ni nanoparticles2010
- Author(s)
  S.Kumagai, S.Miyachi, I.Yamashita, Y.Uraoka, M.Sasaki
- Organizer
  The International Chemical Congress of Pacific Basin Societies
- Place of Presentation
  Honolulu, Hawaii, USA
- Year and Date
  2010-12-15
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Increasing tensile stress in poly-Si film structure by metal-induced lateral crystallization using ferritin supramolecules with Ni nanoparticles2010
- Author(s)
  S.Kumagai, S.Miyachi, I.Yamashita, Y.Uraoka, M.Sasaki
- Organizer
  The International Chemical Congress of Pacific Basin Societies #226 46
- Place of Presentation
  Honolulu, Hawaii, USA
- Year and Date
  2010-10-15
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Metal-Induced Lateral Crystallization using Ni Nanoparticles for Increasing Tensile Stress in Si Thin Film(招待講演)2010
- Author(s)
  熊谷慎也
- Organizer
  The Second International Symposium of Experiment-Integrated Computational Chemistry on Multiscale Fluidics(ECCMF2)
- Place of Presentation
  Sendai, Japan
- Year and Date
  2010-02-23
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2010
- Author(s)
  Shouhei Ogawa, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of the 17th International Display Workshops
- Place of Presentation
  博多
- Year and Date
  2010-12-02
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Metal-Induced Lateral Crystallization using Ni Nanoparticles for Increasing Tensile Stress in Si Thin Film2010
- Author(s)
  Shinya Kumagai
- Organizer
  Proc.The Second International Symposium of Experiment-Integrated Computational Chemistry on Multiscale Fluidics(ECCMF2) 2010 22
- Place of Presentation
  Sendai,Japan(招待講演)
- Year and Date
  2010-02-23
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Niフェリチンを用いた金属誘起横方向結晶成長によるSi薄膜内応力の増強2010
- Author(s)
  宮地修輔, 熊谷慎也, 山下一郎, 浦岡行治, 佐々木実
- Organizer
  第57回応用物理学関係連合講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2010-03-20
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2010
- Author(s)
  Shouhei Ogawa, Shinya Kumagai, Minoru Sasaki
- Organizer
  Proceedings of the 17th International Display Workshops, MEET2-3, pp.1581-1584.
- Place of Presentation
  博多(invited)
- Year and Date
  2010-12-02
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Niフェリチンを用いた金属誘起横方向結晶成長によるSi薄膜内応力の増強2010
- Author(s)
  宮地修輔, 熊谷慎也, 山下一郎, 浦岡行治, 佐々木実
- Organizer
  第57回応用物理学関係連合講演会,講演予稿集03-035
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2010-03-20
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Larger Grain Size of Poly Si Confirmed by MEMS Strain Gauge2010
- Author(s)
  Shinya Kumagai
- Organizer
  Proc.The Seventeenth International Workshop on Active-Matrix Flatpanel Displays and Devices 57
- Place of Presentation
  Tokyo Institute of Technology, Tokyo,Japan(招待講演)
- Year and Date
  2010-07-06
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Larger Grain Size of Poly Si Confirmed by MEMS Strain Gauge2010
- Author(s)
  Shinya Kumagai
- Organizer
  The Seventeenth International Workshop on Active-Matrix Flatpanel Displays and Devices
- Place of Presentation
  Tokyo Institute of Technology, Tokyo, Japan(招待講演)
- Year and Date
  2010-07-06
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] MEMS用Si薄膜材料の内部応力増強に向けたNiフェリチンを用いた金属誘起横方向結晶成長2010
- Author(s)
  熊谷慎也, 宮地修輔, 山下一郎, 浦岡行治, 佐々木実
- Organizer
  日本機械学会2010年度年次大会
- Place of Presentation
  名古屋工業大学
- Year and Date
  2010-09-08
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] MEMS 用Si 薄膜材料の内部応力増強に向けたNi フェリチンを用いた金属誘起横方向結晶成長2010
- Author(s)
  熊谷慎也, 宮地修輔, 山下一郎, 浦岡行治, 佐々木実
- Organizer
  日本機械学会2010年度年次大会講演論文集(8) 235
- Place of Presentation
  名古屋工業大学
- Year and Date
  2010-09-08
- Data Source
  KAKENHI-PROJECT-21710128
[Presentation] Extending Rotation Range Confirmed by Macro Model of Gap-closing Type Electrostatic Micromirror Controlling Non-linearity of Torsion Bar2009
- Author(s)
  G. Il Shim, R. Mimoto, S. Kumagai, M. Sasaki
- Organizer
  Proceedings ofThe 16th International Display Workshops
- Place of Presentation
  宮崎
- Year and Date
  2009-12-10
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2009
- Author(s)
  M.Sasaki, S.Kumagai, M.Fujishima, K.Hane, H.Miura
- Organizer
  Extended Abstracts of the 2009 Int. Conf. on Solid State Devices and Materials, pp.1328-1329.
- Place of Presentation
  Sendai
- Year and Date
  2009-10-09
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] 張力の加わったトーションバーを持つマイクロミラーのマクロモデルによる解析2009
- Author(s)
  沈規一, 味元良一, 熊谷慎也, 佐々木実
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム論文集
- Place of Presentation
  船堀
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Extending Rotation Range Confirmed by Macro Model of Gap-closing Type Electrostatic Micromirror Controlling Non-linearity of Torsion Bar2009
- Author(s)
  G.Il Shim, R.Mimoto, S.Kumagai, M.Sasaki
- Organizer
  Proceedings of The 16th International Display Workshops, MEMS5-3, pp.1501-1504.
- Place of Presentation
  Miyazaki
- Year and Date
  2009-12-10
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Micromirror realized by combined surface and bulk micromachining using isotropic and anisotropic Si etching2009
- Author(s)
  MINORU SASAKI, SHINYA KUMAGAI, KAZUHIRO HANE
- Organizer
  First International Symposium on Advanced Plasma Science and its Applications
- Place of Presentation
  名古屋
- Year and Date
  2009-03-09
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] ギャップクロージング型静電マクロミラーのマクロモデルよるpull-in現象解析2009
- Author(s)
  味元良一,佐々木実,熊谷慎也
- Organizer
  日本機械学会東海学生会、第40回学生員卒業研究発表講演会講演前刷集
- Place of Presentation
  岐阜大学
- Year and Date
  2009-03-16
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror2009
- Author(s)
  M. Sasaki, S. Kumagai, M. Fujishima, K. Hane, H. Miura
- Organizer
  Extended Abstracts of the 2009 Int. Conf. on Solid State Devices and Materials
- Place of Presentation
  仙台
- Year and Date
  2009-10-09
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] 張力の加わったトーションバーを持つマイクロミラーのマクロモデルによる解析2009
- Author(s)
  沈規一, 味元良一, 熊谷慎也, 佐々木実
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム論文集,pp.187～190
- Place of Presentation
  船堀(東京)
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-21656105
[Presentation] Piezoresistive Rotation Angle Sensor Integrated in Micromirror Device2008
- Author(s)
  Takuro Aonuma, Shinya Kumagai, Minoru Sasaki, Motoki Tabata, Kazuhiro Hane
- Organizer
  Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials, Tsukuba
- Place of Presentation
  Tukuba, Japan
- Year and Date
  2008-09-26
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Piezoresistive Rotation Angle Sensor in Micromirror for Feedback Control2008
- Author(s)
  Takuro Aonuma, Minoru Sasaki, Shinya Kumagai, Motoki Tabata, Kazuhiro Hane
- Organizer
  Proceedings of the 7th International Conference on Machine Automation
- Place of Presentation
  Awaji, Japan
- Year and Date
  2008-09-26
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror2008
- Author(s)
  M. Sasaki, S. Kumagai, K. Hane
- Organizer
  2008 International Symposium on Micro-NanoMechatronics and Human Science, Organized Session : SA-2 : Actuators
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19016003
[Presentation] A microfluidics device with thermocouples fabricated on sidewall
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  2013 JSAP-MRS Joint Symposia
- Place of Presentation
  Doshisha University, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-24656066
[Presentation] Plasma-on-Chip for Controlling Bioreaction of an Individual Cell
- Author(s)
  CHUN-YAO CHANG, JONGHYEON JEONG, MIME KOBAYASHI, TETSUJI SHIMIZU, MINORU SASAKI, SHINYA KUMAGAI
- Organizer
  ISPlasma 2015 / IC-PLANTS 2015
- Place of Presentation
  Nagoya University
- Year and Date
  2015-03-26 – 2015-03-31
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Development of Plasma-on-Chip: Plasma Treatment of Individual Cells using Gas-Liquid Interface
- Author(s)
  C.-Y. Chang, J.-H. Jeong, M. Kobayashi, T. Shimizu, M. Sasaki, S. Kumagai
- Organizer
  2015年　春季応用物理学会
- Place of Presentation
  東海大学
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26600130
[Presentation] Bio-Nano Crystallization of Amorphous Si Thin-Film for MEMS Devices
- Author(s)
  S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki
- Organizer
  The 2015 International Meeting on Information Display
- Place of Presentation
  Daegu, Korea
- Year and Date
  2015-08-18 – 2015-08-21
- Invited
- Data Source
  KAKENHI-PROJECT-24681020
[Presentation] A Thermocouple Device Fabricated on Trench Sidewall for Measuring Accurate Temperature　of Microfluid
- Author(s)
  T. Yamaguchi, S. Kumagai, M. Sasaki
- Organizer
  2013 International Conference on Solid State Devices and Materials
- Place of Presentation
  Hilton Fukuoka, Sea Hawk, Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-24656066

1. SASAKI Minoru (70282100)

# of Collaborated Projects: 5 results

# of Collaborated Products: 51 results
2. HANE Kazuhiro (50164893)

# of Collaborated Projects: 4 results

# of Collaborated Products: 5 results
3. SAMUKAWA Seiji (30323108)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. ONO Takahito (90282095)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. KUBOTA Tomohiro (70322683)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. 小林未明 (60393807)

# of Collaborated Projects: 2 results

# of Collaborated Products: 19 results
7. MIURA Hideo (90361112)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KUNDU Subrata (00621327)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
9. JEONG Jonghyon (90728114)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. KONDO Michio (30195911)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 小柳光正 (60205531)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 齊藤満 (80126862)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 朝日通雄 (10397614)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
14. 清水鉄司 (70803881)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
15. 友田紀一郎 (50362843)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
16. JEONG JongHyeon

# of Collaborated Projects: 0 results

# of Collaborated Products: 6 results

Kumagai Shinya 熊谷 慎也

KUMAGAI Shinya 熊谷 慎也

熊谷 慎也 クマガイ シンヤ

Research Projects

Research Products

Co-Researchers

A gene delivery microdevice utilizing atmospheric pressure plasma targeting for single cellsPrincipal Investigator

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A gene delivery microdevice for single cellsPrincipal Investigator

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Plasma-on-ChipPrincipal Investigator

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Development of Wearable Respiratory Sensor and Practical Application

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Making device functions on microtrench sidewall through three-dimensional photolithograpyPrincipal Investigator

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Making micro-/nano-device structures by self-assembly using environmental-friendly in-solution processPrincipal Investigator

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Highly sensitive infra-red sensor using non-linear vibration

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Tension-controlled MEMS spatial light modulator by using bionano particlesPrincipal Investigator

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Stabilized Temperature Characteristics, High-Speed Response, and Low-Voltage Driving of Micromirror

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サブ10nm量子ドットの超解像近接場分光

Principal Investigator

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オンウェハー・マイクロラジカル・イオン分析器による表面反応解析Principal Investigator

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Nanometer-scale processing and creation of novel functional materials using low energy high flux neutral beams

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超高精度プラズマプロセス用オンウエハーモニタリングシステムの構築

Principal Investigator

Kumagai Shinya 熊谷慎也

KUMAGAI Shinya 熊谷慎也

熊谷慎也クマガイシンヤ

[Journal Article] プラズマオンチップ　ー低温大気圧プラズマで細胞を制御するマイクロデバイスー2021