KIMURA Takashi 木村隆

Researcher Number	70370319
Affiliation (based on the past Project Information) *help	2012: 独立行政法人物質・材料研究機構, 主任研究員 2012: 独立行政法人物質・材料研究機構, その他部局等, 研究員 2008: 茨城大学, 物質・材料研究機構, 主任研究員 2007: 独立行政法人物質・材料研究機構, ナノ計測センター, 主任研究員 2006 – 2007: National Institute for Materials Science, Advanced Nano Characterization Center, Senior Researcher, ナノ計測センター, 主席研究員 2006: 独立行政法人物質・材料研究機構, ナノ計測センター, 主幹研究員 2004 – 2005: 独立行政法人物質・材料研究機構, 分析ステーション, 主幹研究員
Review Section/Research Field	Except Principal Investigator Metal making engineering / Physical properties of metals / Structural/Functional materials
Keywords	Except Principal Investigator Boundary / alumina / Iime / Wustite / In-situ observation / TEM / 試料作製技術 / 酸化鉄 / 化学反応 / その場解析 … More / 固体接触技術 / ヘマタイト / 酸化カルシウム / 炭素蒸着 / 二酸化ケイ素 / 酸化アルミニウム / 界面 / アルミナ / ライム / ウスタイト / その場観察 / 透過型電子顕微鏡 / skutterudites / silicides / superconductivity / スクッテルダイト / シリサイド / 超伝導 / 配線評価用TEG / パルスめっき技術 / 配線抵抗率 / 添加剤フリーめつき技術 / 超高純度めっき材料 / ULSI / 微細構造 / 微量不純物 / Cuの高純度化 / TEG / 分子動力学シミュレーション / 革新的高導電性 / 超高純度めっき材 / 添加剤フリー / Cu 配線 / 収差補正STEM / クレヴァス / Ru膜 / 添加剤フリーめっき / 収差補正TEM / 粒界不純物 / 抵抗率 / 超高純度硫酸銅 / Cu配線 / LSI / 情報材料 / 電子 Less

Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.
- Principal Investigator
  
  ONUKI Jin (OONUKI Jin)
- Project Period (FY)
  2008 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Structural/Functional materials
- Research Institution
  Ibaraki University
The Development for In-situ Observation of Chemical Reaction between Solid and Solid
- Principal Investigator
  
  ISHIKAWA Nobuhiro
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Metal making engineering
- Research Institution
  National Institute for Materials Science
Superconductivity in ternary C32-type silicides
- Principal Investigator
  
  IMAI Motoharu
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Physical properties of metals
- Research Institution
  National Institute for Materials Science

All 2010 2006 2005

All Journal Article

[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resistivity of Cu Wires for Future LSIs2010
- Author(s)
  J.Onuki, S.Tashiro, K. P. Khoo, N. Ishikawa, Y.Chonan, T.Kimura, H. Akahoshi
- Journal Title
  
  J.Electrochem.Soc.
  
  Volume: 157巻
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy2010
- Author(s)
  J.Onuki, K.P.Khoo, Y.Sasajima, Y.Chonan, T.Kimura
- Journal Title
  
  J.Appl.Phys.
  
  Volume: 108巻 Pages: 0443021-0443027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resitivity of Cu Wires for Future LSIs2010
- Author(s)
  J.Onuki, S.Tashiro, K.P.Khoo, N.Ishikawa, Y.Chonan, T.Kimura, H.Akahoshi
- Journal Title
  
  J.Electrochem.Soc 157
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy2010
- Author(s)
  J.Onuki, K.P.Khoo, Y.Sasajima, Y.Chonan, T.Kimura
- Journal Title
  
  J.Appl.Phys. 108
  
  Pages: 0443021-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resitivity of Cu Wires for Future LSIs2010
- Author(s)
  J.Onuki, S.Tashiro, K.P.Khoo, N.Ishikawa, Y.Chonan, T.Kimura, H.Akahoshi
- Journal Title
  
  J.Electrochem.Soc.
  
  Volume: 157
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate andshort time annealing utilizing misorientation energy2010
- Author(s)
  J.Onuki, K.P.Khoo, Y.SasajimaY.Chonan, T.Kimura
- Journal Title
  
  J.Appl.Phys.
  
  Volume: 108 Pages: 0443021-0443027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20226014
[Journal Article] Spatial resolution of a wavelength-dispersive EPMA equipped with a thermal field emission gun2006
- Author(s)
  T. Kimura
- Journal Title
  
  Microchimica Acta 55
  
  Pages: 175-178
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560656
[Journal Article] Spatial resolution of a wavelength-dispersive EPMA equipped with a thermal field emission gun2006
- Author(s)
  T.Kimura
- Journal Title
  
  Microchimica Acta 55
  
  Pages: 175-178
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17560656
[Journal Article] Sureface Modification of Gamma-Titanum Aluminides with L12-type Tri-Aluminides by Pack Cementation2005
- Author(s)
  T. Kimura
- Journal Title
  
  Mat. Trans. 46
  
  Pages: 820-826
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560656
[Journal Article] Surface Modification of Gamma-Titanum Aluminides with L12-type Tri-Aluminides by Pack Cementation2005
- Author(s)
  T.Kimura
- Journal Title
  
  Mat.Trans. 46
  
  Pages: 820-826
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17560656

1. ISHIKAWA Nobuhiro (00370312)

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results
2. INAMI Takashi (20091853)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. ONUKI Jin (70315612)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
4. MIMURA Koji (00091752)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. KONDO Kazuo (50250478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. CHONAN Yasunori (30363740)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
7. ITO Shinji (50370317)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. UCHIKOSHI Masahito (60447191)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. OHTA Hiromichi (70168946)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. NAGANO Takatoshi (70343621)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. SASAJIMA Yasushi (80187137)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
12. AOYAMA Takashi (80363737)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. TASHIRO Suguru (90272111)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
14. IMAI Motoharu (90354159)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. WATANABE Yoshimi (50231014)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 一色実 (20111247)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

KIMURA Takashi 木村 隆

Research Projects

Research Products

Co-Researchers

Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

The Development for In-situ Observation of Chemical Reaction between Solid and Solid

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Superconductivity in ternary C32-type silicides

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resistivity of Cu Wires for Future LSIs2010

Author(s)

Journal Title

Data Source

[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy2010

Author(s)

Journal Title

Data Source

[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resitivity of Cu Wires for Future LSIs2010

Author(s)

Journal Title

Data Source

[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy2010

Author(s)

Journal Title

Data Source

[Journal Article] Effect of the Purity of Plating Materials on the Reduction of Resitivity of Cu Wires for Future LSIs2010

Author(s)

Journal Title

Data Source

[Journal Article] Reduction in resistivity of 50nm wide Cu wire by high heating rate andshort time annealing utilizing misorientation energy2010

Author(s)

Journal Title

Data Source

[Journal Article] Spatial resolution of a wavelength-dispersive EPMA equipped with a thermal field emission gun2006

Author(s)

Journal Title

Description

Data Source

[Journal Article] Spatial resolution of a wavelength-dispersive EPMA equipped with a thermal field emission gun2006

Author(s)

Journal Title

Description

Data Source

[Journal Article] Sureface Modification of Gamma-Titanum Aluminides with L12-type Tri-Aluminides by Pack Cementation2005

Author(s)

Journal Title

Description

Data Source

[Journal Article] Surface Modification of Gamma-Titanum Aluminides with L12-type Tri-Aluminides by Pack Cementation2005

Author(s)

Journal Title

Description

Data Source

KIMURA Takashi 木村隆