Onuki Teppei 小貫哲平

… Alternative Names

ONUKI Teppei 小貫哲平

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Researcher Number	70400447
Other IDs
Affiliation (Current)	2025: 茨城大学, 応用理工学野, 教授
Affiliation (based on the past Project Information) *help	2024: 茨城大学, 応用理工学野, 准教授 2018 – 2024: 茨城大学, 理工学研究科(工学野), 准教授 2010 – 2017: 茨城大学, 工学部, 准教授 2008: Tohoku University, 大学院工学研究科, 助教 2007 – 2008: Tohoku University, 大学院・工学研究科, 助教 2006: 東北大学, 大学院・工学研究科, 助手
Review Section/Research Field	Principal Investigator Basic Section 18020:Manufacturing and production engineering-related / Production engineering/Processing studies / Applied optics/Quantum optical engineering Except Principal Investigator Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Design engineering/Machine functional elements/Tribology / Basic Section 18040:Machine elements and tribology-related
Keywords	Principal Investigator 半導体ウエハ / 結晶構造 / 研削面 / 無機材料 / 顕微Raman断層イメージング計測 / 加工損傷 / 断層計測 / Ramanイメージング / 超解像 / 非破壊計測 … More / 断層イメージング / 顕微Raman分光 / 加工変質層 / 研削加工 / シリコンウェハ / 極薄ウェハ / 白色光反射分光計測 / 低コヒーレント干渉 / 近赤外分光 / 表面性状 / 分光イメージング / 測定精度 / 干渉 / 分光 / 干渉計 / 画像計測 / 厚さ計測 / ウェハ薄片化 / グレーティングカプラ / 顕微分光 / マイクロアレ / 局在プラズモンポラリトン / フォトニック結晶 / SPRセンサー / 表面プラズモンポラリトン / マイクロアレイ / 表面プラズモン共鳴 / センサーチップ … More Except Principal Investigator 切削 / 加工変質層 / 分子動力学 / 摩擦 / 機械工作・生産工学 / トライボロジー / 物理特性 / 機械特性 / 圧電効果 / 焦電効果 / 振動 / 結晶異方性 / ナノスクラッチ / 次世代半導体基板 / リアルタイム / 教師なし学習 / 異常検知 / スクラッチ / 環境 / 接触試験 / 原子間ポテンシャル / 摩耗 / 潤滑 / なじみ / 境界潤滑 / 振動援用切削 / きさげ / 表面テクスチャ / トライボロジ― / 硬質皮膜 / 付加加工 / 放電加工 / 材料加工・処理 / 表面粗さ / サファイヤ単結晶 / Defect free / ハイブリッド送り機構 / サファイア単結晶 / 加工変質法 / ハイブリッド化工法 / ハイブリッド加工法 / サファイ / 切削・研削加 / ハイブリッド加工 / サファイア / CMG / 切削・研削加工 / 機械強度 / 内部応力 / 自発分極 / 強誘電体 / 工具 / バリ / 静水圧 / 計算物理 / テクスチャ / ダイヤモンド工具 / レーザ加工 / ナノマイクロ加工 / 分級 / 除染・洗浄 / 砥粒加工 / 多重反射 / ツイン振動子 / 定在波 / 音響浮揚 / 分子動力学シミュレーション / インデンテーション実験 / "軟脆"材料 / "硬脆"材料 / “硬脆”材料 / “軟脆”材料 / 研削熱の影響 / 研削加工 / 機械化学融合加工 / 単結晶 / 硬脆材料 / 軟脆材料 / 陽極酸化 / 酸化チタン / 光触媒 / 引っかき / 掘起し / 色素増感太陽電池 / 転写 / 透明電極 / 表面微細構造 / 振動子 / MEMS・NEMS / エネルギー / MEMS / エレクトレット発電 / 圧電発電 / 振動発電 / 熱電発電 / バイオ発電 / マイクロ発電 / エナジー・ハーベスティング / 固体電解質 / マイクロ爆轟 / バイオ電池 / 燃料電池 / バイオテクノロジー / エネルギー・ハーベスティング / マイクロマシン / マイクロ・ナノデバイス Less

Development and Validation of Real-time Anomaly Detection AI Models to Revolutionize Smart Manufacturing
- Principal Investigator
  
  周立波
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
Clarification of Grinding Mechanism for Minimizing Damaged Layers of Next Generation Semiconductor Substrates Using Nanomachining and Metrology
- Principal Investigator
  
  清水淳
- Project Period (FY)
  2023 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
超解像Raman断層計測を用いた結晶損傷発生機構の解明と先端加工技術への応用Principal Investigator
- Principal Investigator
  
  小貫哲平
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
Overcoming weaknesses and elucidating tribological phenomena by a new trial of molecular dynamics analysis considering experimental results
- Principal Investigator
  
  Shimizu Jun
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18040:Machine elements and tribology-related
- Research Institution
  Ibaraki University
Examination of replaceability of scraping with texturing by micro-vibration assisted cutting
- Principal Investigator
  
  Takeyuki Yamamoto
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Ibaraki University
Development of hard film texture coated tool by scanning micro discharge additional processing in gas atmosphere
- Principal Investigator
  
  Takeyuki Yamamoto
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of a novel high-integrity cutting method by use of localized materials hardening due to tribo-compressive hydrostatic stress
- Principal Investigator
  
  Shimizu Jun
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  Ibaraki University
Feasibility study on effective use of material's physical properties in machining of functional crystal
- Principal Investigator
  
  Zhou Libo
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of mechanical + chemical hybrid manufacturing technology of sapphire crystal wafer
- Principal Investigator
  
  ZHOU LIBO
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Life elongation by texturing and edge formation of monocrystalline diamond tool using ps pulse laser
- Principal Investigator
  
  Yamamoto Takeyuki
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
On machine wide area thickness measurement technology for wafer thinning process developmentPrincipal Investigator
- Principal Investigator
  
  Onuki Teppei
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Feasibility study on in-tube decontamination system driven by non-contact acoustic levitation
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Study on the characterization and grinding technology of "soft-brittle" functional materials
- Principal Investigator
  
  ZHOU Libo
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Application of micro-transcription by using nano-cutting mold to development of high-functional dye-sensitized solar cell
- Principal Investigator
  
  YAMAMOTO Takeyuki
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Ibaraki University
Development of high-functional photocatalytic film using nano/micro double ploughing texture
- Principal Investigator
  
  SHIMIZU Jun
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  Ibaraki University
Dense-integrated surface plasmon resonance sensor chipPrincipal Investigator
- Principal Investigator
  
  ONUKI Teppei
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
Research of a nano-energy system creation
- Principal Investigator
  
  KUWANO Hiroki
- Project Period (FY)
  2006 – 2010
- Research Category
  
  Grant-in-Aid for Creative Scientific Research
- Research Institution
  Tohoku University

[Book] MEMSINEMS工学全集2009
- Author(s)
  小貫哲平(分担)
- Total Pages
  19
- Publisher
  テクノシステム
- Data Source
  KAKENHI-PROJECT-18686006
[Book] MEMS/NEMS工学全集2009
- Author(s)
  小貫哲平
- Publisher
  テクノシステム
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] 顕微ラマン断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測,2024
- Author(s)
  小貫哲平，柴教一郎，黒田隼乃介，茂垣有亮，尾嶌裕隆，清水淳，周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 68 Pages: 202-207
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] ロータリインフィード研削におけるウエハ温度の解析および評価2024
- Author(s)
  塩見山太郎, 髙橋清樹, 周立波，清水淳，小貫哲平，尾嶌裕隆, 金子和暉
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 68 Pages: 140-144
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K26006
[Journal Article] 顕微Raman断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測 -半導体ウエハ加工変質層の非破壊計測2024
- Author(s)
  小貫哲平
- Journal Title
  
  光アライアンス
  
  Volume: 35 Pages: 1-4
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] Modeling of chemical reaction in molecular dynamics simulation of chemical mechanical polishing of silicon wafer2023
- Author(s)
  金子和暉、橋村紀香、清水淳、周立波、小貫哲平、尾嶌裕隆
- Journal Title
  
  Journal of the Japan Society for Abrasive Technology
  
  Volume: 67 Issue: 8 Pages: 452-457
- DOI
  10.11420/jsat.67.452
- ISSN
  0914-2703, 1880-7534
- Year and Date
  2023-08-01
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-23K26006
[Journal Article] Abrasive wear damages observation in engineering ceramics using micro-Raman tomography2023
- Author(s)
  Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
- Journal Title
  
  JAMDSM
  
  Volume: 17 Issue: 1 Pages: JAMDSM0009-JAMDSM0009
- DOI
  10.1299/jamdsm.2023jamdsm0009
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] 振動援用切削でテクスチャ加工した圧痕状パターン周期配置型金属面の乾式すべり特性2023
- Author(s)
  清水　淳，山本武幸，金子和暉，周　立波，小貫哲平，尾嶌裕隆
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 67 Pages: 218-223
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04235
[Journal Article] Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope2022
- Author(s)
  Wangpiao Lin, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Precision Engineering
  
  Volume: 73 Pages: 51-62
- DOI
  10.1016/j.precisioneng.2021.08.011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K04235, KAKENHI-PROJECT-23K20906
[Journal Article] Quality Inspection Technology for Grinding Surface of Electronic Materials and Ceramics by Micro Raman Tomographic Imaging2022
- Author(s)
  小貫哲平
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 88 Issue: 7 Pages: 551-555
- DOI
  10.2493/jjspe.88.551
- ISSN
  0912-0289, 1882-675X
- Year and Date
  2022-07-05
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] Analysis of Nanoscratch Mechanism of C-Plane Sapphire with the Aid of Molecular Dynamics Simulation of Hcp Crystal2021
- Author(s)
  Wangpiao Lin, Naohiko Yano, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Nanomaterials
  
  Volume: 11 Issue: 7 Pages: 1739-1739
- DOI
  10.3390/nano11071739
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K04235, KAKENHI-PROJECT-23K20906
[Journal Article] Chemo-mechanical grinding by applying grain boundary cohesion fixed abrasive for monocrystal sapphire2021
- Author(s)
  Wu Ke、Touse Daichi、Zhou Libo、Lin Wangpiao、Shimizu Jun、Onuki Teppei、Yuan Julong
- Journal Title
  
  Precision Engineering
  
  Volume: 70 Pages: 110-116
- DOI
  10.1016/j.precisioneng.2021.01.015
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K20906
[Journal Article] Friction Characteristics of Mechanically Microtextured Metal Surface in Dry Sliding2020
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Kouta Watanabe, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Tribology International
  
  Volume: 149 Pages: 105634-105634
- DOI
  10.1016/j.triboint.2019.02.042
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K04102, KAKENHI-PROJECT-20K04235
[Journal Article] Study on mechanism of rotary in-feed face grinding2019
- Author(s)
  石橋憲，月井裕太，蛯名雄太郎，周立波，清水淳，小貫哲平，山本武幸, 尾嶌裕隆
- Journal Title
  
  Journal of the Japan Society for Abrasive Technology
  
  Volume: 63 Issue: 1 Pages: 31-35
- DOI
  10.11420/jsat.63.31
- NAID
  130007670937
- ISSN
  0914-2703, 1880-7534
- Year and Date
  2019-01-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Friction Characteristics of Mechanically Microtextured Metal Surface in Dry Sliding2019
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Kouta Watanabe, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Tribology International
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06000
[Journal Article] Investigation of the Effect of Grain Size Variation on Ground Wafer Surface by Grinding Experiment/Simulation2018
- Author(s)
  蛯名雄太郎, 前崎智博, 周立波, 清水淳, 小貫哲平, 尾嶌裕隆, 乾正知
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 84 Issue: 7 Pages: 640-645
- DOI
  10.2493/jjspe.84.640
- NAID
  130007393958
- ISSN
  0912-0289, 1882-675X
- Year and Date
  2018-07-05
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17K06075, KAKENHI-PROJECT-15H02213
[Journal Article] Study on the finishing capability and abrasives-sapphire interaction in dry chemo-mechanical-grinding (CMG) process2018
- Author(s)
  Wu Ke、Zhou Libo、Onuki Teppei、Shimizu Jun、Yamamoto Takeyuki、Yuan Julong
- Journal Title
  
  Precision Engineering
  
  Volume: 52 Pages: 451-457
- DOI
  10.1016/j.precisioneng.2018.02.007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Theoretical analysis on effects of grain size variation2017
- Author(s)
  Libo Zhou, Yutaro Ebina1, Ke Wu, Jun Shimizu, Teppei Onuki
- Journal Title
  
  Precision Engineering
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Study on the potential of chemo-mechanical-grinding (CMG) process of sapphire wafer2017
- Author(s)
  Ke Wu, Libo Zhou, Jun Shimizu, Teppei Onuki, Takeyuki Yamamoto, Hirotaka Ojima and Julong Yuan
- Journal Title
  
  The International Journal of Advanced Manufacturing Technology
  
  Volume: 90 Issue: 5-8 Pages: 1-8
- DOI
  10.1007/s00170-016-9836-1
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213, KAKENHI-PROJECT-15K13840
[Journal Article] Theoretical analysis on effects of grain size variation2017
- Author(s)
  Libo Zhou, Yutaro Ebina1, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Precision Engineering
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] Theoretical analysis on effects of grain size variation2017
- Author(s)
  Zhou Libo、Ebina Yutaro、Wu Ke、Shimizu Jun、Onuki Teppei、Ojima Hirotaka
- Journal Title
  
  Precision Engineering
  
  Volume: 50 Pages: 27-31
- DOI
  10.1016/j.precisioneng.2017.04.010
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2016
- Author(s)
  Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Advanced Materials Research
  
  Volume: 1136 Pages: 156-161
- DOI
  10.4028/www.scientific.net/amr.1136.156
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K05753, KAKENHI-PROJECT-25420043
[Journal Article] Development of Microtextured Titanium Dioxide Surface by using Microcutting Techniques2016
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Ceramics Transactions
  
  Volume: 257 Pages: 35-42
- DOI
  10.1002/9781119234463.ch4
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K05753, KAKENHI-PROJECT-16K06000
[Journal Article] ナノ接触実験結果と酸化膜の影響を考慮したすべり摩擦の分子動力学シミュレーション2016
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，三輪紘敬，南部俊和
- Journal Title
  
  トライボロジスト
  
  Volume: 61 Pages: 845-856
- NAID
  130005250169
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K06000
[Journal Article] Research on Development of On-Machine 3D Measuring System of Grinding Wheel Surface Topography by Stereo Images2016
- Author(s)
  尾嶌裕隆，長山拓矢，周立波，清水淳，小貫哲平
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 82 Issue: 2 Pages: 186-191
- DOI
  10.2493/jjspe.82.186
- NAID
  130005124397
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840, KAKENHI-PROJECT-15H02213
[Journal Article] ナノ接触実験結果と酸化膜の影響を考慮したすべり摩擦の分子動力学シミュレーション2016
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，三輪紘敬，南部俊和
- Journal Title
  
  トライボロジスト
  
  Volume: 61 Pages: 845-856
- NAID
  130005250169
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K05753
[Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectrum analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 806 Pages: 581-585
- DOI
  10.4028/www.scientific.net/amr.1136.581
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 581-585
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Yutaro Ebina, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takashi Fujiwara
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 311-316
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 581-585
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2015
- Author(s)
  Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 156-161
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2015
- Author(s)
  Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 156-161
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840
[Journal Article] Process study on large-size silicon wafer grinding by using a small-diameter wheel2015
- Author(s)
  Yutaro EBINA, Tomoya YOSHIMATSU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA
- Journal Title
  
  JAMDSM
  
  Volume: 9 Issue: 5 Pages: JAMDSM0073-JAMDSM0073
- DOI
  10.1299/jamdsm.2015jamdsm0073
- NAID
  130005130435
- ISSN
  1881-3054
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13840, KAKENHI-PROJECT-15H02213
[Journal Article] Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Yutaro Ebina, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takashi Fujiwara
- Journal Title
  
  Applied Mechanics and Materials
  
  Volume: 1136 Pages: 311-316
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15H02213
[Journal Article] Development of Microtextured Photocatalytic Surface by Vibration-assisted Scratching2014
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Journal Title
  
  Materials Science Forum
  
  Volume: 783-786 Pages: 1488-1493
- DOI
  10.4028/www.scientific.net/msf.783-786.1488
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Influence of surface integrity in silicon wafer thickness measurements by reflection spectroscopy2014
- Author(s)
  Teppei Onuki, Ryusuke Ono, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: 1017 Pages: 681-685
- DOI
  10.4028/www.scientific.net/amr.1017.681
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry2014
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Proceedings of 15th International conference on Precision Engineering (ICPE2014)
  
  Volume: 1 Pages: 836-837
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] Modeling of process mechanisms in pulsed laser micro machining on lithium niobate substrates2014
- Author(s)
  Teppei Onuki, Ippei Murayama, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 8 Pages: 896-902
- NAID
  130007674050
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] 近赤外分光器を用いた反射分光方式の薄シリコンウェハ厚さ計2014
- Author(s)
  小貫哲平、小野竜典、尾嶌裕隆、清水淳、周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 58 Pages: 515-519
- NAID
  130004835723
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] 日本縦断研究室巡り「茨城大学　Nano-Engineering Laboratory (nLab)」2014
- Author(s)
  周　立波，清水　淳，小貫哲平，尾嶌裕隆，山本武幸
- Journal Title
  
  レーザ協会誌
  
  Volume: 39 Pages: 33-35
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Mold Pattern Fabrication by Nanoscratching2013
- Author(s)
  Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Han Huang
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 7 Pages: 686-693
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] Fabrication of Surface Microtexture by Vibration Assisted Cutting2013
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Hirotaka Ojima, Teppei Onuki, Shun-ichi Nagaoka
- Journal Title
  
  Advanced Materials Research
  
  Volume: 797 Pages: 638-641
- DOI
  10.4028/www.scientific.net/amr.797.638
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420043
[Journal Article] A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer2013
- Author(s)
  Teppei Onuki, Ryusuke Ono, Akira Suzuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: 797 Pages: 549-554
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25709005
[Journal Article] A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer2013
- Author(s)
  Teppei Onuki, Ryusuke Ono, Akira Suzuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vol.797 Pages: 549-554
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Design of Digital Filters for Si Wafer Surface Profile Measurement2012
- Author(s)
  Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
- Journal Title
  
  Key Engineering Materials
  
  Volume: 615 Pages: 332-336
- DOI
  10.4028/www.scientific.net/kem.516.332
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Study on grinding process ing of sapphire wafer2012
- Author(s)
  Yutaro Ebina, Wei Hang, Libo Zhou, Jun S himizu, Onuki Teppei, Hirotaka Ojima and Yoshiaki Tashiro
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vol.565 Pages: 22-27
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Research on digital filters for Si wafer surface profile measurement2012
- Author(s)
  Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vol.565 Pages: 656-661
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Study on grinding processing of sapphire wafer2012
- Author(s)
  Yutaro Ebina, Wei Hang, Libo Zhou, Jun Shimizu, Onuki Teppei, Hirotaka Ojima and Yoshiaki Tashiro
- Journal Title
  
  Advanced Materials Research
  
  Volume: 565 Pages: 22-27
- DOI
  10.4028/www.scientific.net/amr.565.22
- NAID
  130005031327
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2012
- Author(s)
  清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55巻 Pages: 662-667
- URL
  https://www.jstage.jst.go.jp/article/jsat/55/11/55_662/_pdf
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Molecular Dynamics Simulation of Metal Cutting with Local Hydrostatic Pressure Field Formation2012
- Author(s)
  K. Uezaki, J. Shimizu, L. Zhou, T. Onuki, H. Ojima
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols.523-524 Pages: 67-172
- DOI
  10.4028/www.scientific.net/kem.523-524.167
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] Influence of Surface Micro Texture on Photocatalitic Function of Titanium Dioxide Film2012
- Author(s)
  J. Shimizu, G. Kobayashi, N. Hasegawa, T. Yamamoto, H. Ojima, T. Onuki, L. Zhou
- Journal Title
  
  Materials Science Forum
  
  Volume: Vols.706-709 Pages: 2646-2651
- DOI
  10.4028/www.scientific.net/msf.706-709.2646
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] 近赤外分光計測を用いた薄片シリコンウェハの厚さ計測法2011
- Author(s)
  小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 729-732
- NAID
  10030194515
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011
- Author(s)
  小貫哲平,小野龍典,尾嶌隆裕,清水淳,周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: Vol.55, 12 Pages: 729-732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Spectroscopic Measurements of Silicon Wafer Thickness for Backgrinding Process2011
- Author(s)
  Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: 325 Pages: 672-677
- DOI
  10.4028/www.scientific.net/amr.325.672
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
[Journal Article] Spectroscopic measurements of silicon wafer thickness for backgrinding process2011
- Author(s)
  Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
- Journal Title
  
  Advanced Material Research
  
  Volume: Vol.325 Pages: 672-677
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011
- Author(s)
  小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 729-732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011
- Author(s)
  小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 729-732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
- Journal Title
  
  砥粒加工学会
  
  Volume: Vol.55, 11 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Siウェハ仕上げ加工に及ぼす加工変質層の影響の解析2011
- Author(s)
  清水淳, 周立波, 小貫哲平,尾嶌裕隆, 山本武幸, 鈴木直紀
- Journal Title
  
  砥粒加工学会誌
  
  Volume: 55 Pages: 662-667
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360062
[Journal Article] Mold Fabricated by Nanoscratching for Nanoimprint Lithography2010
- Author(s)
  W. Ohsone, J. Shimizu, L. Zhou, H. Ojima, T. Onuki, T. Yamamoto, H. Huang
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 843-848
- DOI
  10.4028/www.scientific.net/amr.126-128.843
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
[Journal Article] 表面微細構造による幅射場操作を用いた放熱技術の検討2010
- Author(s)
  小貫哲平
- Journal Title
  
  日本機械学会論文集(C編)
  
  Volume: 76 Pages: 1917-1919
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Improvement in Oxide-pattern Sizes Controllability on Scanning Probe Nanolithography2010
- Author(s)
  Teppei Onuki, Takashi Tokizaki, Ojima Hirotaka, Jun Shimizu, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 701-706
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560134
[Journal Article] Improvement in Oxide-pattern Sizes Controllability on Scanning Probe Nanolithography2010
- Author(s)
  Teppei Onuki, Takashi Tokizaki, Ojima Hirotaka, Jun Shimizu, Libo Zhou
- Journal Title
  
  Advanced Materials Research
  
  Volume: Vols.126-128 Pages: 701-706
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560102
[Journal Article] Efficient Energy Harvesting from Irregular Mechanical Vibrations by Active Motion Control2009
- Author(s)
  Hiroshi Okamoto, Teppei Onuki, Sumito Nagasawa, Hiroki Kuwano
- Journal Title
  
  J. MICROELECTROMECHANICAL SYSTEMS
  
  Volume: Vol.18 Pages: 1420-1431
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Micro blender and separator using inner-vortex of droplet induced by surface acoustic wave2009
- Author(s)
  Takuya Sano, Teppei Onuki, Yuichirou Hamate, Maki Hohjo, Sumito Nagasawa and Hiroki Kuwano
- Journal Title
  
  Digest of technical papers of International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009) 15
  
  Pages: 370-373
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Low resistive copper films deposited using ion beam sputtering method with ultra-high purity target2009
- Author(s)
  Teppei Onuki
- Journal Title
  
  Journal of Micromechanics and Microengineering 119
  
  Pages: 0940176-0940176
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Low resistive copper films deposited using ion beam sputtering method with ultra-high purity target2009
- Author(s)
  Teppei Onuki, Hiroki Kuwano
- Journal Title
  
  Journal of Micromechanics and Micro engineering (accepted)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] O plus E 特集, バイオと光技術, フォトニック結晶型分光フィルターとその生体計測への応用2008
- Author(s)
  大寺康夫, 小貫哲平, 井上喜彦, 川上彰二郎
- Journal Title
  
  vol.30, 4月号
  
  Pages: 375-379
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] 微細構造化された無機・金属材料による光・電磁材料特性の制御技術-フォトニック結晶・電磁メタマテリアル2008
- Author(s)
  小貫哲平
- Journal Title
  
  Journal of the society of Inorganic Materials Japan 15
  
  Pages: 459-465
- NAID
  10021865509
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Improving an electret transducer by fully utilizing the implanted charge2008
- Author(s)
  H. Okamoto, T. Onuki, and H. Kuwano
- Journal Title
  
  Applied Physics Letters 93
  
  Pages: 1-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Study on surface plasmon polariton near photonic-bandgap for inter-photonicband switching devices2008
- Author(s)
  Teppei Onuki
- Journal Title
  
  Journal of Microscopy 229
  
  Pages: 447-451
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Study of surface plasmon polariton near the photonic-bandgap for inter-photonic band switching devices2008
- Author(s)
  Teppei Onuki, Yasuo Ohtera, and Takashi Tokizaki
- Journal Title
  
  Journal of Microscopy vol.229, 3
  
  Pages: 447-451
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Improving an electret transducer by fully utilizing the implanted charge2008
- Author(s)
  Hiroshi Okamoto, Teppei Onuki, and Hiroki Kuwano
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 93 Pages: 1-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008
- Author(s)
  Teppei Onuki, Hiroki Kuwano
- Journal Title
  
  Proceedings of 8th PowerMEMS+μEMS2008
  
  Pages: 493-496
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam snutterin22008
- Author(s)
  Teppei Onuki, Hiroki Kuwano
- Journal Title
  
  Proceedings of PowerMEMS2008-FREMS2008 8
  
  Pages: 493-496
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Micro blender and separator using inner-vortex of droplet induced by surface acoustic wave2008
- Author(s)
  Takuya Sano, Teppei Onuki, Yuichirou Hamate, Maki Hohjo, Sumito Nagasawa and Hiroki Kuwan
- Journal Title
  
  IEEE proceedings of Transducers 09 15
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Study of surface plasmon polaritons near the photonic-bandgap edge for interphotonic band switching devices2008
- Author(s)
  Teppei Onuki
- Journal Title
  
  Journal of Microscopy 229
  
  Pages: 447-451
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] 微細構造化された無機・金属材料による光・電磁材料特性の制御技術-フォトニック結晶・電磁メタマテリアル2008
- Author(s)
  小貫哲平
- Journal Title
  
  Journal of the society of Inorganic Materials vol.15 (No.337) 11月号
  
  Pages: 459-465
- NAID
  10021865509
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008
- Author(s)
  T. Onuki
- Journal Title
  
  Technical Digest of PowerMEMS 2008+mEMS2008 8
  
  Pages: 493-496
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] フォトニック結晶型分光フィルターとその生体計測への応用2008
- Author(s)
  大寺康夫、小貫哲平、井上喜彦、川彰二郎
- Journal Title
  
  0 plus E 30
  
  Pages: 375-379
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] Multi-channel photonic crystal wavelength filter array for near-infrared wavelengths2007
- Author(s)
  Yasuo Ohtera, Teppei Onuki, Yoshihiko Inoue, and Shojirou Kawakami
- Journal Title
  
  IEEE/OSA Journal of Lightwave Technology 25, 2
  
  Pages: 499-503
- NAID
  120002070242
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18686006
[Journal Article] 微細構造修飾によるエネルギー回生増強技術の開発2007
- Author(s)
  小貫哲平
- Journal Title
  
  Micro Environmental Machine Systems 2007
  
  Pages: 55-55
- Data Source
  KAKENHI-PROJECT-18GS0203
[Journal Article] 分光計測用フォトニック結晶型波長フィルターの開発2006
- Author(s)
  大寺康夫, 小貫哲平, 井上喜彦, 川上彰二郎
- Journal Title
  
  光波センシング技術研究会論文集 38-28
  
  Pages: 193-199
- Data Source
  KAKENHI-PROJECT-18686006
[Patent] 微小撹拌分離装置2009
- Inventor(s)
  小貫哲平
- Industrial Property Rights Holder
  東北大学
- Filing Date
  2009-05-21
- Data Source
  KAKENHI-PROJECT-18GS0203
[Patent] 表面プラズモン共鳴現象測定器2008
- Inventor(s)
  小貫哲平
- Industrial Property Rights Holder
  国立大学法人東北大学
- Patent Publication Number
  2008-014732
- Filing Date
  2008-01-24
- Data Source
  KAKENHI-PROJECT-18686006
[Patent] 【特許】可調節機能付き弾性表面波機器2008
- Inventor(s)
  小貫哲平
- Industrial Property Rights Holder
  東北大
- Industrial Property Number
  2008-024469
- Filing Date
  2008-01-07
- Data Source
  KAKENHI-PROJECT-18GS0203
[Patent] 【特許】微小機械-電気構造用振動変位計測装置2007
- Inventor(s)
  小貫哲平
- Industrial Property Rights Holder
  東北大
- Industrial Property Number
  2007-234205
- Filing Date
  2007-09-10
- Data Source
  KAKENHI-PROJECT-18GS0203
[Patent] 表面プラズモン共鳴現象測定器2006
- Inventor(s)
  小貫哲平
- Industrial Property Rights Holder
  国立大学法人東北大学
- Industrial Property Number
  2006-184983
- Filing Date
  2006-07-04
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] マグネシウムシリサイドウエハ表層の顕微Raman3D 断層イメージング2024
- Author(s)
  渡邉和馬，小貫哲平，尾嶌裕隆，清水淳，周立波，鵜殿治彦
- Organizer
  応用物理学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] C面サファイア基板のナノスクラッチ特性（第3報）－シングルとマルチ・スクラッチにおける現象の相違－2024
- Author(s)
  清水淳，三枝剣悟，林旺票，金子和暉，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] Observation of potential failures in ceramic cutting tools using microscopic Raman imaging2024
- Author(s)
  Teppei Onuki, Ryohei Tazawa, Shuo Liu, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  Optical Technology and Measurement for Industrial Applications (OPTM)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 3D Micro-Raman Tomographic Measurement on Subsurface of Magnesium Silicide Wafer2024
- Author(s)
  Kazuma Watanabe, Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou and Haruhiko Udono
- Organizer
  The 13th Advanced Lasers and Photon Sources Conference (ALPS2024)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] C面サファイア基板のナノスクラッチ特性（第2報）－nmオーダ送りにおけるスクラッチ異方性の考察－2023
- Author(s)
  清水淳，林旺票，矢野直彦，三枝剣悟，金子和暉，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 顕微Raman イメージング非破壊検査技術の工業分野での応用2023
- Author(s)
  小貫哲平
- Organizer
  サーモフィッシャーサイエンティフィック FT-IR・ラマンバーチャル・ユーザーズフォーラム 2023
- Invited
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Study on Machining Anisotropy of C-plane Sapphire Wafer by Nanoscratching Experiments2023
- Author(s)
  Kengo Saegusa, Wangpiao Lin, Jun Shimizu, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 25th International Symposium on Advances in Abrasive Technology (ISAAT 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] 顕微ラマン断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測2023
- Author(s)
  柴教一郎，小貫哲平，黒田隼乃介，茂垣有亮，尾嶌裕隆，清水淳，周立波
- Organizer
  砥粒加工学会学術講演会(ABTEC)
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 環境調和半導体マグネシウムシリサイドウエハ表面への顕微Raman断層イメージング計測2023
- Author(s)
  小貫哲平, 渡邉和馬, 尾嶌裕隆, 清水淳, 周立波, 鵜殿治彦
- Organizer
  茨城講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] ポテンシャル制御を用いたシリコンCMPの分子動力学解析における砥粒強度の影響2023
- Author(s)
  橋村紀香，金子和暉，清水淳，周立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] Characterization of Subsurface Damaged Layers in Wide-bandgap Semiconductor Wafers Using High-resolution Depth Slice Raman Imaging2023
- Author(s)
  Kyo-ichiro Shiba, Teppei Onuki, Jun-nosuke Kuroda, Yusuke Mogaki, Hirotaka Ojima, Jun Shimizu and Libo Zhou,
- Organizer
  The 25th International Symposium on Advances in Abrasive Technology (ISAAT 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] ロータリインフィード研削におけるウェハ温度の解析及び評価2023
- Author(s)
  塩見山太郎, 髙橋清樹, 周立波，清水淳，小貫哲平，尾嶌裕隆, 金子和暉
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] Molecular Dynamics Simulation of Abrasive Wear of Hcp Crystal to Clarify Nanoscratch Phenomena of C-plane Sapphire Wafer2023
- Author(s)
  Jun Shimizu, Wangpiao Lin, Naohiko Yano, Kengo Saegusa, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  International Tribology Conference (ITC 2023), Fukuoka
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26006
[Presentation] 顕微Raman イメージング非破壊検査技術の工具品質計測への応用2023
- Author(s)
  劉爍, 小貫哲平, 黒田隼乃介, 柴教一郎, 金子和暉, 尾嶌裕隆, 清水淳, 周立波
- Organizer
  精密工学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] シリコンCMPの分子動力学シミュレーション第１報：ポテンシャル制御に基づく化学的作用のモデル化2022
- Author(s)
  金子和暉，橋村紀香，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] ナノスクラッチによるC面単結晶サファイア基板の加工特性の検討（単溝スクラッチにおける加工異方性）2022
- Author(s)
  清水　淳，林　旺票，矢野直彦，金子和暉，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  日本機械学会第14回生産加工・工作機械部門講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 顕微Raman断層イメージング計測における測定データ品質指標の検討2022
- Author(s)
  小貫哲平，黒田隼乃介，劉爍，柴教一郎，金子和暉，尾嶌裕隆，清水淳
- Organizer
  砥粒加工学会学術講演会（ABTEC）
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] First-principles electronic structure calculation for analyzation of crystallographic damage states in Raman spectral data2022
- Author(s)
  Jun-nosuke KURODA, Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
- Organizer
  The 19th International Conference on Precision Engineering (ICPE 2022)
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第７報）－テクスチャ表面の摩耗挙動－2022
- Author(s)
  大矢一輝，山本武幸，清水淳，周立波，小貫哲平，尾嶌裕隆，金子和暉，深堀良彬
- Organizer
  精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] C面サファイア基板のナノスクラッチ特性－nmオーダ送りにおけるスクラッチ異方性－2022
- Author(s)
  三枝剣悟，林　王票，矢野直彦，清水　淳，金子和暉，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 微小振動援用切削でテクスチャ加工した圧痕状パターンの周期的配置による金属表面の乾式すべり特性2022
- Author(s)
  清水　淳，山本武幸，金子和暉，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Study on Brittle-Ductile Transition in Grinding Process on Sapphire Wafer Using Micro-Raman Tomographic Imaging2022
- Author(s)
  Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  The 24th International Symposium on Advances in Abrasive Technology (ISAAT2022)
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Molecular Dynamics Simulation of Chemical Mechanical Polishing of Si Wafer using Potential Control2022
- Author(s)
  Norika Hashimura, Jun Shimizu, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  International conference on Precision Engineering (ICPE 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第４報）－hcp 結晶のアブレシブ摩耗異方性－2022
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，山本武幸，金子和暉
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Micro Raman Tomographic Imaging on Laser Beam Internal Damage into Sapphire for Laser Cleaving Process2022
- Author(s)
  Teppei ONUKI, Junnosuke KURODA, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  The 15th Pacific Rim Conference on Lasers and Electro-Optics (CLEO Pacific Rim, CLEO-PR 2022）
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Boundary Lubricity of Metal Surfaces Textured by Vibration-assisted Cuttin2022
- Author(s)
  Jun Shimizu, Kazuki Ohya, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Kazuki Kaneko, Yoshiaki Fukahori
- Organizer
  International conference on Precision Engineering (ICPE 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Study on Abrasive Wear Mechanism of C-plane Sapphire Using Nanoscratch Test and Molecular Dynamics Simulation of HCP Crystal2022
- Author(s)
  Jun Shimizu, Wangpiao Lin, Naohiko Yano, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Kengo Saegusa
- Organizer
  The 24th International Symposium on Advances in Abrasive Technology (ISAAT 2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 第一原理電子構造計算によるRamanスペクトルシミュレーションを用いた結晶格子損傷状態の解析法の検討2022
- Author(s)
  黒田隼乃介, 小貫哲平, 金子和暉, 尾嶌裕隆, 清水淳, 周立波
- Organizer
  精密工学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] hcp結晶の分子動力学解析結果を利用したc面サファイアのアブレシブ摩耗特性の評価2022
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，金子和暉，山本武幸
- Organizer
  日本トライボロジー学会トライボロジー会議2022春
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 工学的計測データ分析のための深層学習モデル開発の研究2021
- Author(s)
  木戸浦建吾、小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  精密工学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 局所静水圧が切削現象に及ぼす効果の分子動力学シミュレーション―転がり要素の適用―2021
- Author(s)
  清水　淳，山本武幸，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削によるテクスチャ表面の潤滑特性の評価2021
- Author(s)
  萩尾大輝，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第5報）－境界潤滑における油量の影響－2021
- Author(s)
  菊池晃太，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Friction and Wear Behaviors of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2021
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  The 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第5報）－境界潤滑における油量の影響－2021
- Author(s)
  菊池晃太，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Friction Characteristics of Metal Surfaces Textured by Vibrationassisted Cutting under Lubricated Environment2021
- Author(s)
  Daiki Hagio, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第２報）－スライダの強度による影響に関する検討－2021
- Author(s)
  清水淳，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第６報）－境界潤滑におけるすべり速度の影響－2021
- Author(s)
  山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆，金子和暉
- Organizer
  精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Crystallographic subsurface damages observations using super-resolution Raman tomographic imagingin advanced semiconductor and ceramics materials2021
- Author(s)
  Teppei Onuki
- Organizer
  6th International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM2021)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Micro Raman Tomographic Imaging on Laser Beam Internal Machining into Sapphire2021
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  the 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第３報）－hcp結晶の加工異方性に関する検討－2021
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，山本武幸，金子和暉
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] hcp 結晶の分子動力学解析を用いたc 面サファイアのアブレシブ摩耗特性の考察2021
- Author(s)
  清水　淳，林　旺票，矢野直彦，周　立波，小貫哲平，尾嶌裕隆，金子和暉，山本武幸
- Organizer
  日本トライボロジー学会トライボロジー会議2021秋
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第５報）－境界潤滑における初歩的な検討－2021
- Author(s)
  清水淳，山本武幸，菊池晃太，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  日本トライボロジ―学会トライボロジー会議2021春
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Molecular Dynamics Simulation of Localized Hydrostatic Pressure-Assisted Cutting with a Rolling Element2021
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 顕微Ramanマッピング計測による珪化マグネシウム半導体表面品質評価2021
- Author(s)
  小貫哲平、中村陸人、鵜殿治彦
- Organizer
  茨城講演会
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Fundamental learning characteristics of deep neural network models for the analysis of engineering data2021
- Author(s)
  Kengo Kidoura, Teppei Onuki
- Organizer
  6th International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] Observation on abrasive wear damages on engineering ceramics using micro-Raman tomography2021
- Author(s)
  Teppei ONUKI, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  Proceedings of 11st International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K20906
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第４報）－容積と面積密度の影響－2020
- Author(s)
  清水　淳, 中山智隆, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジー学会トライボロジー会議秋別府
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] Friction Characteristics of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2020
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  18th International conference on Precision Engineering (ICPE2020)
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第4報）－境界潤滑条件下における検討－2020
- Author(s)
  山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 菊池晃太
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析（第１報）－酸化膜による影響に関する検討－2020
- Author(s)
  清水淳，周立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] Friction Characteristics of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2020
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  18th International conference on Precision Engineering (ICPE2020)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 分子動力学シミュレーションによるhcp 結晶の変形・摩耗挙動の解析2020
- Author(s)
  矢野直彦, 林　旺票, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 山本武幸
- Organizer
  砥粒加工学会学術講演会(ABTEC2020)
- Data Source
  KAKENHI-PROJECT-20K04235
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第３報）ー塑性盛上りの除去による効果ー2020
- Author(s)
  清水　淳, 山本武幸, 中山智隆, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削によるテクスチャ表面の乾式すべり特性2020
- Author(s)
  清水　淳, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆, 菊池晃太
- Organizer
  砥粒加工学会学術講演会(ABTEC2020)
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 振動援用切削による表面テクスチャの摩擦特性（第2報）ーテクスチャ面積密度の影響ー2019
- Author(s)
  山本武幸, 中山智隆, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 顕微Raman断層計測によるサファイア研削面損傷の評価2019
- Author(s)
  管駿輔, 小貫哲平, 尾嶌裕隆, 清水淳, 周立波
- Organizer
  先進テクノフェアATF（Advanced Technology Fair）2019
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 放電付加加工による表面テクスチャの創成（第1報）―直線走査による単純テクスチャの創成―2019
- Author(s)
  小井沼陽希, 石井雅人, 川尻淳裕, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Friction Characteristics of Textured Surfaces by Vibration-Assisted Microcutting in Dry Sliding2019
- Author(s)
  Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference (ITC 2019), Sendai
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第３報）－塑性盛上り除去と被覆率の効果－2019
- Author(s)
  清水　淳, 中山智隆, 渡辺康太, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジ―学会トライボロジー会議2019春
- Data Source
  KAKENHI-PROJECT-19K04102
[Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による切削性能への効果―2019
- Author(s)
  清水　淳, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆, 小松崎一気
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討2018
- Author(s)
  清水　淳, 中山智隆, 渡辺康太, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジー学会トライボロジー会議春東京
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による検討―2018
- Author(s)
  清水　淳, 芦野洸人, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Running-in Behavior of Mechanically Microtextured Metal Surfaces in Dry Sliding2018
- Author(s)
  Tomotaka Nakayama, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Kouta Watanabe
- Organizer
  The 17th International Conference on Precision Engineering (ICPE2018), Kamakura
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Comparative investigation of subsurface damages induced on sapphire with different machining methods using micro Raman spectroscopy2018
- Author(s)
  Teppei Onuki, Ke Wu, Kazuki Kamoshida, Piao Lin, Nao Sugano, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] ロータリー型インフィード平面研削メカニズムに関する研究－無線式動力計の開発と研削抵抗の評価－2018
- Author(s)
  石橋　憲, 月井裕太, 蛯名雄太郎, 周　立波, 清水　淳, 山本武幸, 小貫哲平, 尾嶌裕隆
- Organizer
  2018年度砥粒加工学会学術講演会(ABTEC2018)
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] マイクロ切削による表面テクスチャがすべり時のなじみ過程に及ぼす影響―慣用および振動援用切削の比較―2018
- Author(s)
  中山智隆, 渡辺康太, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] サファイアへの深部レーザ加工の検討2018
- Author(s)
  小貫哲平, 尾嶌裕隆, 清水　淳, 周　立波
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 単結晶サファイアウエハの湿式・乾式研削の比較2018
- Author(s)
  前崎智博, Wang Jianbin, 周　立波, 清水　淳, 小貫哲平, 尾嶌裕隆
- Organizer
  2018年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] サファイアウエハの研削メカニズムに関する研究―盛り上がり係数が除去モードに及ぼす影響―2018
- Author(s)
  長谷川滉輔, 菅野直, 周立波, 清水淳, 小貫哲平, 尾嶌裕隆
- Organizer
  第26回茨城講演会
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Cu-W細電極による微小放電堆積過程の検討2018
- Author(s)
  山本武幸, 石井雅人, 小井沼陽希, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting using Rolling Element2018
- Author(s)
  Jun Shimizu, Hiroto Ashino, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Kazuki Komatsuzaki
- Organizer
  International Conference on Precision Engineering (ICPE2018), Kamakura
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting using Sliding Element2018
- Author(s)
  Jun Shimizu, Hiroto Ashino, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018), Toronto, Canada
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による検討―2018
- Author(s)
  清水　淳, 芦野洸人, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討（第2報）― 被覆率による影響 ―2018
- Author(s)
  清水　淳, 中山智隆, 渡辺康太, 山本武幸, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本トライボロジー学会トライボロジー会議秋伊勢
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Cross-sectional measurement of laser damage in sapphire using confocal micro Raman spectrometer2018
- Author(s)
  Teppei Onuki, Kazuki Kamoshida, Takeyuki Yamamoto, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  The 17th International Conference on Precision Engineering (ICPE2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Development of high efficiency CMG pellets for finishing mono-crystal sapphire2018
- Author(s)
  Jianbin Wang, Tomohito Maezaki, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou
- Organizer
  The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] C面サファイア基板のナノ引っかきに関する研究－hcp金属のナノ引っかきシミュレーションによる変形挙動の解析－2018
- Author(s)
  林旺票, 清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 矢野直彦
- Organizer
  2018年度砥粒加工学会学術講演会(ABTEC2018)
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Examination of Micro EDM Deposition Mechanism using Thin Cu-W Electrode2017
- Author(s)
  Masato Ishii, Itaru Takahama, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 局所圧縮静水圧援用切削の開発－微小切削実験と分子動力学解析－2017
- Author(s)
  清水淳，山本武幸，尾嶌裕隆，小貫哲平，周立波，市村浩貴
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学（矢上）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Study on the Effect of Grain Size Variation on Ground Surface Roughness2017
- Author(s)
  Tomohiro Maezaki, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Masatomo Inui, Yutaro Ebina and Libo Zhou
- Organizer
  7th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Study on Nanoscratching of C-plane Sapphire Wafer2017
- Author(s)
  Wangpiao Lin, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima and Takeyuki Yamamoto
- Organizer
  20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Development of localized compressive hydrostatic stress-assisted cutting method: Examination by molecular dynamics simulation and microcutting experiment2017
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Keito Uezaki
- Organizer
  euspen's 17th International Conference & Exhibition
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Development of wireless dynamometer for rotary infeed surface grinding2017
- Author(s)
  Yuta Tsukii, Libo Zhou, Hirotaka Ojima, Jun Shimizu and Teppei Onuki
- Organizer
  20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting Method2017
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Hiroto Ashino
- Organizer
  The 20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討―ナノインデント試験結果と酸化膜の影響を考慮したモデルによる検討―2017
- Author(s)
  清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 三輪紘敬, 南部俊和
- Organizer
  日本トライボロジー学会　トライボロジー会議2017春東京
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 局所圧縮静水圧援用切削の開発―すべり式冶具を用いた旋削実験―2017
- Author(s)
  清水　淳, 山本武幸, 尾嶌裕隆, 小貫哲平, 周　立波, 芦野洸人
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting Method2017
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Hiroto Ashino
- Organizer
  The 20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討―FFMによる摩擦・摩耗実験とシミュレーションとの比較―2017
- Author(s)
  清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆, 三輪紘敬, 南部俊和
- Organizer
  日本トライボロジー学会　トライボロジー会議2017秋香川
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] The development of hybrid-feed system and technology of CFRP machining2017
- Author(s)
  Daisuke Takenouchi, Hirotaka Ojima, Libo Zhou, Teppei Onuki, Jun Shimizu
- Organizer
  9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Analysis of variance in optical inspections of wafer thickness2017
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Cu-W細電極による微小放電堆積加工メカニズム2017
- Author(s)
  山本武幸, 石井雅人, 高濱　到, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Raman analysis of machining qualities on ground surfaces of sapphire wafers2017
- Author(s)
  Teppei Onuki, Ke Wu, Nao Sugano, Hirotaka Ojima, Jun Shimizu1 and Libo Zhou
- Organizer
  20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Study on micro EDM deposition in Ar atmosphere2016
- Author(s)
  Itaru Takahama, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  アクトシティ浜松
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討 ―ナノインデント試験を用いた二固体間ポテンシャル関数の導出―2016
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，三輪紘敬，南部俊和
- Organizer
  日本トライボロジ―学会トライボロジー会議(新潟 2016-10)
- Place of Presentation
  朱鷺メッセ（新潟）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Theoretical analysis on effects of grain size variation2016
- Author(s)
  Libo Zhou, Yutaro Ebina, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  19th International Symposium on Advances in Abrasive Technology (ISAAT2016)
- Place of Presentation
  Stockholm/Sweden
- Year and Date
  2016-10-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Theoretical analysis on effects of grain size variation2016
- Author(s)
  Libo Zhou, Yutaro Ebina, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  19th Int’l Symposium on Advances in Abrasive Technology (ISAAT2016)
- Place of Presentation
  Stockholm/Sweden
- Year and Date
  2016-10-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 振動援用切削によるサブミクロンスケールの表面テクスチャ加工2016
- Author(s)
  小島純弥，渡辺康太, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  日本機械学会関東支部・精密工学会　茨城講演会
- Place of Presentation
  茨城大学（日立）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Stress analysis of LT wafer during grinding process2016
- Author(s)
  Wentong LU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA, Takeyuki YAMAMOTO
- Organizer
  16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 幾何光学と波動光学の連成解析によるウェハ厚さ計測の誤差特性2016
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Texturing of metal surface by using vibration-assisted microcutting2016
- Author(s)
  Jun Shimizu, Kouta Watanabe, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  euspen's 16th International Conference & Exhibition
- Place of Presentation
  East Midlands Conference Centre, Nottingham, UK
- Year and Date
  2016-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 研削シリコンウエハのナノ引っかき2016
- Author(s)
  清水　淳，林　旺票, 周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  兵庫県立大学（姫路）
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Cu-W電極を用いた微小放電堆積加工2016
- Author(s)
  高濱　到，石井雅人，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学（水戸）
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Error characteristics analyses in optical wafer-thickness measurements2016
- Author(s)
  Teppei ONUKI, Yuki NEMOTO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] アルゴンガス中におけるマイクロ放電堆積に関する研究2016
- Author(s)
  高濱　到, 山本武幸, 清水　淳, 周　立波, 小貫哲平, 尾嶌裕隆
- Organizer
  第17回高エネ研メカ・ワークショップ
- Place of Presentation
  高エネルギー加速器研究機構（つくば）
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Texturing of metal surface by using vibration-assisted microcutting2016
- Author(s)
  Jun Shimizu, Kouta Watanabe, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
- Organizer
  euspen's 16th International Conference & Exhibition
- Place of Presentation
  East Midlands Conference Centre, Nottingham, UK
- Year and Date
  2016-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06000
[Presentation] Stress analysis of LT wafer during grinding process2016
- Author(s)
  Wentong LU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA, Takeyuki YAMAMOTO
- Organizer
  Int’l Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] Error characteristics analyses in optical wafer-thickness measurements2016
- Author(s)
  Teppei ONUKI, Yuki NEMOTO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
- Organizer
  Int’l Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  Hamamatsu/Japan
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 光学式ウェハ厚さ計測における測定精度特性に関する研究‐第一報‐2016
- Author(s)
  根本祐気，小貫哲平，蛯名雄太郎，尾嶌裕隆，清水淳，周立波
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学野田キャンパス
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 微小テクスチャ金型の開発とその応用（第４報）－振動援用引っかき条件の微小化－2016
- Author(s)
  渡辺康太，山本武幸，清水　淳，周　立波，尾嶌裕隆，小貫哲平
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学（野田）
- Year and Date
  2016-03-17
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] 振動援用引っかきによる表面微小テクスチャリング2015
- Author(s)
  清水　淳，山本武幸，周　立波，小貫哲平，尾嶌裕隆，岡山幸洋
- Organizer
  日本トライボロジー学会トライボロジー会議（春）
- Place of Presentation
  姫路商工会議所
- Year and Date
  2015-05-29
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications (CMCEE)
- Place of Presentation
  Vancouver, Canada
- Year and Date
  2015-06-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Molecular dynamics simulation of relationship between friction anisotropy and atomic-scale stick-slip phenomenon2015
- Author(s)
  Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-06-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Organizer
  International Tribology Conference 2015
- Place of Presentation
  東京理科大学（葛飾）
- Year and Date
  2015-09-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] イメージングウェハ厚さ全面計測技術の開発2015
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第16回高エネ研メカ・ワークショップ
- Place of Presentation
  高エネルギー加速器研究機構　つくば
- Year and Date
  2015-04-10
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Study on the Effects of Chemical Agents and Environment on Material Removal Rate in Sapphire Polishing2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] Machining quality controls in ultrashort pulse laser micromachining on lithium Niobate substrates2015
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou, Itaru Takahama, Kazuki Kamoshida
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] ピコ秒レーザによる単結晶ダイヤモンドの精密加工－簡単な表面テクスチャの創成－2015
- Author(s)
  山本武幸，薄憲司朗，小貫哲平，尾嶌裕隆，清水　淳，周　立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（川内北）
- Year and Date
  2015-09-06
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  The 11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications
- Place of Presentation
  Vancouver, Canada
- Year and Date
  2015-06-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015
- Author(s)
  Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  The 18th International Symposium on Advances in Abrasive Technology (ISAAT2015)
- Place of Presentation
  Jeju island, Korea
- Year and Date
  2015-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015
- Author(s)
  Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference 2015
- Place of Presentation
  東京理科大学（葛飾）
- Year and Date
  2015-09-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications
- Place of Presentation
  Hyatt Regency, Vancouver, Canada
- Year and Date
  2015-06-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015
- Author(s)
  Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-09-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 局所圧縮静水圧場の生成を伴う切削過程の分子動力学シミュレーション－工具形状の改良－2015
- Author(s)
  清水淳，植崎圭人，馬海東，宮田翔哉，小貫哲平，尾嶌裕隆，山本武幸，周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学（川内北）
- Year and Date
  2015-09-05
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Molecular dynamics simulation of relationship between friction anisotropy and atomic-scale stick-slip phenomenon2015
- Author(s)
  Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 光学式ウェハ厚さ計測における測定精度特性に関する研究‐第一報‐2015
- Author(s)
  小貫哲平，根本祐気，蛯名雄太郎，尾嶌裕隆，清水淳，周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 光スペクトラムアナライザを用いたウェハ厚さ計測2015
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-09-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015
- Author(s)
  Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
- Organizer
  International Tribology Conference (ITC) 2015
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2015-06-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] 研削シリコンウエハ加工変質層のナノインデンテーション2015
- Author(s)
  清水　淳，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  慶應義塾大学（日吉）
- Year and Date
  2015-09-10
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Molecular Dynamics Simulation of Relationship between Friction Anisotropy and Atomic-scale Stick-slip Phenomenon2015
- Author(s)
  Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  The 8th International Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  京都リサーチパーク
- Year and Date
  2015-10-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K05753
[Presentation] Study on the Effects of Chemical Agents and Environment on Material Removal Rate in Sapphire Polishing2015
- Author(s)
  Ke Wu, Naoki Yamazaki, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
- Organizer
  he 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13840
[Presentation] 振動援用切削による表面微小テクスチャ加工2015
- Author(s)
  渡辺康太，山本武幸，清水　淳，周　立波，小貫哲平，尾嶌裕隆
- Organizer
  日本機械学会関東支部主催「茨城講演会」
- Place of Presentation
  茨城大学工学部
- Year and Date
  2015-08-28
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Machining quality controls in ultrashort pulse laser micromachining on lithium Niobate substrates2015
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou, Itaru Takahama, Kazuki Kamoshida
- Organizer
  he 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-10-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02213
[Presentation] ピコ秒レーザによる単結晶ダイヤモンドの精密加工－マイクロ溝加工の検討－2014
- Author(s)
  山本武幸，植崎圭人，岩井俊樹，小貫哲平，清水　淳，周　立波，尾嶌裕隆
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学（鳥取）
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] ウェハ極薄化加工におけるオンサイト厚さ計測技術2014
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第15回高エネ研メカ・ワークショップ
- Place of Presentation
  高エネルギー加速器研究機構
- Year and Date
  2014-04-11
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 振動援用引っかきによる掘起しを利用した表面微小テクスチャリング2014
- Author(s)
  清水　淳，山本武幸，周　立波，尾嶌裕隆，小貫哲平，岡山幸洋
- Organizer
  日本トライボロジー学会トライボロジー会議（秋岩手）
- Place of Presentation
  アイーナいわて
- Year and Date
  2014-11-07
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry2014
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  15th International Conference on Precision Engineering (ICPE2014)
- Place of Presentation
  ホテル日航金沢
- Year and Date
  2014-07-24
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 薄シリコンウェハ検査における白色光干渉断層計と白色光分光厚さ計の比較検討2014
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第61回応用物理学関係連合講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 分子動力学によるシリコンウエハ加工変質層のナノインデンテーションの解析2014
- Author(s)
  古牧允彦，清水　淳，周　立波，小貫哲平，尾嶌裕隆，山本武幸
- Organizer
  砥粒加工学会学術講演会
- Place of Presentation
  岩手大学工学部
- Year and Date
  2014-09-11
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 固定砥粒ダイヤモンド砥石構造のモデル化2014
- Author(s)
  蛯名雄太郎, 周　立波, 清水　淳, 小貫哲平, 尾嶌裕隆
- Organizer
  2014年度精密工学会春季大会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates2013
- Author(s)
  Teppei ONUKI, Ippei MURAYAMA, Takeyuki YAMAMOTO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
- Organizer
  Proceedings of 7th LEM21
- Place of Presentation
  Sendai/Japan (査読有,67-70)
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 音響浮揚の保持力の向上に関する研究2013
- Author(s)
  稲田智広,周立波,尾嶌裕隆,小貫哲平
- Organizer
  日本機械学会第21回茨城講演会論文集
- Place of Presentation
  茨城大学 (181-182)
- Year and Date
  2013-09-06
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] 薄ウェハデバイス加工・検査工程の研究開発‐反射分光計測技術をベースとした検査技術‐2013
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  STARCワークショップ
- Place of Presentation
  新横浜国際ホテル
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 音響浮揚の保持能力向上に関する研究2013
- Author(s)
  稲田智広，周立波，尾嶌裕隆，小貫哲平
- Organizer
  第21回茨城講演会
- Place of Presentation
  茨城大学・日立キャンパス
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013
- Author(s)
  蛯名雄太郎,杭偉,周立波,清水淳,小貫哲平,尾嶌裕隆,山本武幸,渡辺拓也
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Development of Areal Wavelet Transform applying to 2D image2013
- Author(s)
  鈴木泰樹，尾嶌裕隆，周立波，清水淳，小貫哲平
- Organizer
  2013年度精密工学会春季学術講演会国際フォーラム
- Place of Presentation
  東京工業大学大岡山キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Development of Microtextured Photocatalytic Surface by Vibration-assisted Scratching2013
- Author(s)
  Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
- Organizer
  THERMEC 2013
- Place of Presentation
  Rio Hotel, Las Vegas, USA
- Invited
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 微小テクスチャ金型の開発とその応用（第３報）－圧子の稜を用いた微小切削によるテクスチャパターンの複雑化－2013
- Author(s)
  山本武幸，清水　淳，周　立波，尾嶌裕隆，小貫哲平
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学（千里山）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 脆性強誘電体材料(LiNbO3)への非熱的レーザアブレーション微細加工技術2013
- Author(s)
  村山一平, 小貫哲平, 尾嶌裕隆, 清水　淳, 周　立波
- Organizer
  第14回高エネ研メカ・ワークショップ
- Place of Presentation
  筑波
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013
- Author(s)
  Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
- Organizer
  Proceedings of 6th LEM21
- Place of Presentation
  Sendai/Japan (査読有,79-84)
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 脆性強誘電材料(LiNbO_3)への非熱的レーザアブレーション微細加工技術2013
- Author(s)
  村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
- Organizer
  第14回高エネ研メカ・ワークショップ
- Place of Presentation
  筑波
- Year and Date
  2013-04-12
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013
- Author(s)
  村山一平，小貫哲平，尾嶌裕隆，清水淳，周立波
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Development of Areal Wavelet Transform applying to 2D image2013
- Author(s)
  鈴木泰樹,尾嶌裕隆,周立波,清水淳,小貫哲平
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013
- Author(s)
  Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
- Organizer
  日本機械学会，6th Int’l Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013
- Author(s)
  Libo Zhou, Yutaro Ebina, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
- Organizer
  7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  ホテル松島大観荘（宮城県）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013
- Author(s)
  蛯名雄太郎，杭偉，周立波，清水淳小貫哲平，尾嶌裕隆，山本武幸，渡辺拓也
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 化学作用援用研削の分子動力学シミュレーション－シリコンウエハ-砥粒間の凝着の影響－2013
- Author(s)
  清水　淳, 周　立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
- Organizer
  砥粒加工学会、ABTEC2013
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 化学作用援用研削の分子動力学シミュレーション-シリコンウエハ/砥粒間の凝着の影響-2013
- Author(s)
  清水淳, 周立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
- Organizer
  砥粒加工学会,ABTEC2013
- Place of Presentation
  日本大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013
- Author(s)
  村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
- Organizer
  2013年度精密工学会春季学術講演会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 反射分光式シリコンウェハ厚さ計で用いる短波長近赤外帯(SWIR)光学定数分散の検討2013
- Author(s)
  小貫哲平、小野竜典、鈴木晃、尾嶌裕隆、清水淳、周立波
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates2013
- Author(s)
  Teppei Onuki, Ippei Murayama, Takeyuki Yamamoto, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
- Place of Presentation
  ホテル松島大観荘（宮城県）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 掘起しの有効活用による表面微小テクスチャの創成2013
- Author(s)
  清水　淳，山本武幸，周　立波，尾嶌裕隆，小貫哲平
- Organizer
  日本トライボロジー学会トライボロジー会議（秋福岡）
- Place of Presentation
  アクロス福岡（福岡県）
- Data Source
  KAKENHI-PROJECT-25420043
[Presentation] 定在音場における微粒子分級の一考案2012
- Author(s)
  伊藤拓哉，稲田智広，牛腸広人，周立波，清水淳，小貫哲平，尾嶌裕隆
- Organizer
  日本機械学会第9回生産加工・工作機械分門講演会
- Place of Presentation
  秋田県立大学
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] 固定砥粒によるシリコンウエハの薄片化に関する加工技術2012
- Author(s)
  谷口博則,周立波,清水淳,小貫哲平,尾嶌裕隆,呉天旭
- Organizer
  日本機械学会第9回生産加工・工作機械部門講演会
- Place of Presentation
  秋田県立大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響2012
- Author(s)
  清水淳，周立波，小貫哲平，尾嶌裕隆，山本武幸，高野巧一郎
- Organizer
  2012年度砥粒加工学会（ABTEC2012）
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 音響浮揚を用いた微粒子分級法に関する研究2012
- Author(s)
  牛腸広人,伊藤拓哉,稲田智広,周立波,清水淳,小貫哲平,尾嶌裕隆
- Organizer
  日本機械学会第20回茨城講演会論文集
- Place of Presentation
  茨城大学 (11-114)
- Year and Date
  2012-08-24
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] 定在音場における微粒子分級の一考案2012
- Author(s)
  伊藤拓哉,稲田智広,牛腸広人,周立波,清水淳,小貫哲平,尾嶌裕隆
- Organizer
  日本機械学会第9回生産加工・工作機械分門講演会論文集
- Place of Presentation
  秋田県立大学 (265-266)
- Year and Date
  2012-10-26
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] 音響浮揚を用いた微粒子分級法に関する研究2012
- Author(s)
  牛腸広人，伊藤拓哉，稲田智広，周立波，清水淳，小貫哲平，尾嶌裕隆
- Organizer
  日本機械学会第20回茨城講演会
- Place of Presentation
  茨城大学日立キャンパス
- Data Source
  KAKENHI-PROJECT-24656094
[Presentation] Si ウエハ仕上げ加工に及ぼす加工変質層の影響2012
- Author(s)
  清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸
- Organizer
  砥粒加工学会,ABTEC2012
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J.Shimizu, W.Ohsone, H.Ojima, T.Onuki, L.Zhou, T.Yamamoto
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Year and Date
  2011-11-09
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] SPMによるナノ構造の創成に関する研究-機械および電気的手法による検討-2011
- Author(s)
  清水淳, 高野巧一郎, 尾嶌裕隆, 小貫哲平, 山本武幸, 周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学(角間)
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-22560134
[Presentation] Image based defect detection Algorithm by use of wavelet transformation2011
- Author(s)
  Kaoru TAKAMORI, Hirotaka OJIMA, Libo ZHOU, Teppei ONUKI, Jun SHIMIZU and Takeyuki YAMAMOTO
- Organizer
  Proceedings of 6thLEM21
- Place of Presentation
  Saitama/Japan (CD-ROM)
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] 微小切削テクスチャによる光触媒機能の向上に関する研究2011
- Author(s)
  山本武幸, 小林剛, 清水淳, 尾嶌裕隆, 小貫哲平, 周立波
- Organizer
  精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学(角間)
- Year and Date
  2011-09-21
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Image based defect detection Algorithm by use of wavelet transformation2011
- Author(s)
  K.TAKAMORI, H.OJIMA, L.ZHOU, T.ONUKI, J.SHIMIZU, T.YAMAMOTO
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J.Shimizu, W.Ohsone, H.Ojima, T.Onuki, L.Zhou, T.Yamamoto
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Year and Date
  2011-11-09
- Data Source
  KAKENHI-PROJECT-22560102
[Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011
- Author(s)
  J.SHIMIZU, W.OHSONE, H.OJIMA, T.ONUKI, L.ZHOU, T.YAMAMOTO
- Organizer
  6th Int'l Conference on Leading Edge Manufacturing in 21st Century
- Place of Presentation
  Saitama, Japan
- Data Source
  KAKENHI-PROJECT-23360062
[Presentation] Radiation Cooling using Plasmon Resonant Nanostrips2010
- Author(s)
  Teppei Onuki
- Organizer
  5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems(IEEE-NEMS 2010)
- Place of Presentation
  Xiamen, China
- Data Source
  KAKENHI-PROJECT-18GS0203
[Presentation] Rapid and Nondestructive Evaluations of Conductivity by Spectroscopic Measurements at the Plasma Edge2010
- Author(s)
  Teppei Onuki
- Organizer
  5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems(IEEE-NEMS 2010)
- Place of Presentation
  Xiamen, China
- Data Source
  KAKENHI-PROJECT-18GS0203
[Presentation] 輻射局在成分操作による熱流制御技術の検討2009
- Author(s)
  小貫哲平
- Organizer
  日本機械学会マイクロ・ナノ工学専門会議主催第1回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  タワーホール船橋・東京
- Data Source
  KAKENHI-PROJECT-18GS0203
[Presentation] Micro blender and separator using inner-vortex of droplet induced by surface acoustic wave2009
- Author(s)
  Takuya Sano, Teppei Onuki, Yuichirou Hamate, Maki Hohjo, Sumito Nagasawa and Hiroki Kuwano
- Organizer
  The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 09)
- Place of Presentation
  Denver USA
- Year and Date
  2009-06-22
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] Controlling activated wavelength of plasmonic material2008
- Author(s)
  Teppei Onuki
- Organizer
  10th international conference on near-field optics, nano-photonics and related techniques (NFO10)
- Place of Presentation
  Salguero plaza, Buenos Aires , Argentina
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 波長550nm帯用多並列フォトニック結晶波長フィルターの作製2008
- Author(s)
  小貫哲平
- Organizer
  応用物理学会応用物理学関係連合講演会
- Place of Presentation
  日本大学船橋キャンパス
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] Surface plasmon resonance sensor for microarray analyzer2008
- Author(s)
  Teppei Onuki
- Organizer
  The 10^<th> international conference on near-field optics, nano-photonics and related techniques (NF010)
- Place of Presentation
  Salguero plaza, Buenos Aires .Argentina
- Year and Date
  2008-09-04
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 多層膜型フォトニック結晶による波長フィルター2008
- Author(s)
  大寺康夫, 小貫哲平, 川嶋貴之, 川上彰二郎
- Organizer
  電子情報通信学会総合大会
- Place of Presentation
  北九州市立大学
- Year and Date
  2008-03-21
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] Surface plasmon resonance sensor for microarray analyzer2008
- Author(s)
  Teppei Onuki
- Organizer
  10th international conference on near-field optics, nano-photonics and related techniques (NFO10)
- Place of Presentation
  Salguero plaza, Buenos Aires , Argentina
- Year and Date
  2008-09-04
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008
- Author(s)
  Teppei Onuki, Hiroki Kuwano
- Organizer
  The 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications & 2nd Micro Environmental Machine Systems symposium (PowerMEMS+μEMS2008)
- Place of Presentation
  Mediatheque Sendai
- Year and Date
  2008-11-11
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 波長550nm帯用多並列フォトニック結晶波長フィルターの作製2008
- Author(s)
  大寺康夫, 小貫哲平, 川嶋貴之, 川上彰二郎
- Organizer
  応用物理学会
- Place of Presentation
  日本大学
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008
- Author(s)
  Teppei Onuki
- Organizer
  The 8^<th> International Workshop onMicro and Nanotech-nology for Power Generation and Energy Conversion Applications & T^<nd> Micro Environmental Machine Systems symposium (PowerMEMS-1-gEMS2008)
- Place of Presentation
  Mediatheque Sendai
- Year and Date
  2008-11-11
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] MEMSスイッチによる表面弾性波制御機構の開発2008
- Author(s)
  小貫哲平
- Organizer
  電気学会センサ・マイクロマシン部門総合研究会
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-18GS0203
[Presentation] Controlling activated wavelength of plasmonic material2008
- Author(s)
  Teppei Onuki
- Organizer
  The 10^<th> international conference on near-field optics, nano-nhotonics and related techniaues (NF010)
- Place of Presentation
  Salguero plaza, Buenos Aires, Argentina
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 自己クローニング法によるフォトニック結晶を用いた動的光学フィルター2007
- Author(s)
  小貫哲平
- Organizer
  電気学会マイクロマシン・センサシステム研究会
- Place of Presentation
  筑波大学
- Year and Date
  2007-07-03
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 周期構造における垂直入射光線と表面プラズモンポラリトンの結合特性2007
- Author(s)
  小貫哲平, 大寺康夫, 桑野博喜, 時崎高志
- Organizer
  応用物理学会
- Place of Presentation
  青山学院大学大学
- Year and Date
  2007-03-28
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 自己クローニング法によるフォトニック結晶を用いた動的光学フィルタ2007
- Author(s)
  長澤純人, 小貫哲平, 桑野博喜
- Organizer
  電気学会マイクロマシン・センサシステム研究会
- Place of Presentation
  筑波大学
- Year and Date
  2007-07-03
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 表面弾性波を利用したマイクロ流体制御2007
- Author(s)
  佐野拓也, 佐藤誠人, 桑野博喜, 長澤純人, 小貫哲平
- Organizer
  マイクロマシン・センサシステム研究会
- Place of Presentation
  筑波大学
- Year and Date
  2007-07-03
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 分光計測用フォトニック結晶型波長フィルターの開発2006
- Author(s)
  大寺康夫, 小貫哲平, 井上喜彦, 川上彰二郎
- Organizer
  第38回光波センシング技術研究会
- Place of Presentation
  東京理科大学
- Year and Date
  2006-12-12
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] Surface plasmon polariton around photonic bandgap for inter- photonicband swiching devices2006
- Author(s)
  Teppei Onuki, Yasuo Ohtera, and Takashi Tokizaki
- Organizer
  9th international conference on near-field optics, nano-photonics and related techniques (NFO9)
- Place of Presentation
  Swiss Federal Institute of Technology Lausanne (EPFL), Switzerland
- Year and Date
  2006-09-14
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] 格子型表面プラズモンセンサーの開発2006
- Author(s)
  小貫哲平, 大寺康夫, 時崎高志
- Organizer
  応用物理学会
- Place of Presentation
  立命館大学
- Year and Date
  2006-08-30
- Data Source
  KAKENHI-PROJECT-18686006
[Presentation] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry
- Author(s)
  Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
- Organizer
  15th International conference on Precision Engineering (ICPE2014)
- Place of Presentation
  ホテル日航金沢
- Year and Date
  2014-07-22 – 2014-07-24
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] Influence of surface integrity in silicon wafer thickness measurements by reflection spectroscopy
- Author(s)
  Teppei Onuki, Ryusuke Ono, Hirotaka Ojima, Jun Shimizu and Libo Zhou
- Organizer
  The 17th International Symposium on Advances in Abrasive Technology (ISAAT2014)
- Place of Presentation
  Courtyard by Marriott King Kamehameha's Kona Beach Hotel, Kona, Hawaii Island, USA
- Year and Date
  2014-09-22 – 2014-09-25
- Data Source
  KAKENHI-PROJECT-25709005
[Presentation] 白色反射光計測によるウェハ厚さ測定における表面性状の影響
- Author(s)
  小貫哲平、尾嶌裕隆、清水淳、周立波
- Organizer
  第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25709005

1. ZHOU Libo (90235705)

# of Collaborated Projects: 15 results

# of Collaborated Products: 230 results
2. SHIMIZU Jun (40292479)

# of Collaborated Projects: 15 results

# of Collaborated Products: 228 results
3. OJIMA Hirotaka (90375361)

# of Collaborated Projects: 15 results

# of Collaborated Products: 228 results
4. YAMAMOTO Takeyuki (40396594)

# of Collaborated Projects: 12 results

# of Collaborated Products: 126 results
5. KUWANO Hiroki (50361118)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
6. NISHIZAWA Matsuhiko (20273592)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. ONO Takahito (90282095)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. ORIMO Shinichi (40284129)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. TANAKA Shuji (00312611)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. NAGASAWA Sumito (30400279)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
11. ANBE Takashi (00333857)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. OKAMOTO Hiroshi (70455799)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
13. CAO Ziping (90552406)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. HAMATE Yuichiro (10455800)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. OGUCHI Hiroyuki (40570908)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 金子和暉 (60909216)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
17. LU Wentong

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results

Onuki Teppei 小貫 哲平

ONUKI Teppei 小貫 哲平

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超解像Raman断層計測を用いた結晶損傷発生機構の解明と先端加工技術への応用Principal Investigator

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On machine wide area thickness measurement technology for wafer thinning process developmentPrincipal Investigator

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Onuki Teppei 小貫哲平

ONUKI Teppei 小貫哲平