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Onuki Teppei  小貫 哲平

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ONUKI Teppei  小貫 哲平

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Researcher Number 70400447
Other IDs
Affiliation (Current) 2025: 茨城大学, 応用理工学野, 教授
Affiliation (based on the past Project Information) *help 2024: 茨城大学, 応用理工学野, 准教授
2018 – 2024: 茨城大学, 理工学研究科(工学野), 准教授
2010 – 2017: 茨城大学, 工学部, 准教授
2008: Tohoku University, 大学院工学研究科, 助教
2007 – 2008: Tohoku University, 大学院・工学研究科, 助教
2006: 東北大学, 大学院・工学研究科, 助手
Review Section/Research Field
Principal Investigator
Basic Section 18020:Manufacturing and production engineering-related / Production engineering/Processing studies / Applied optics/Quantum optical engineering
Except Principal Investigator
Production engineering/Processing studies / Basic Section 18020:Manufacturing and production engineering-related / Design engineering/Machine functional elements/Tribology / Basic Section 18040:Machine elements and tribology-related
Keywords
Principal Investigator
半導体ウエハ / 結晶構造 / 研削面 / 無機材料 / 顕微Raman断層イメージング計測 / 加工損傷 / 断層計測 / Ramanイメージング / 超解像 / 非破壊計測 … More / 断層イメージング / 顕微Raman分光 / 加工変質層 / 研削加工 / シリコンウェハ / 極薄ウェハ / 白色光反射分光計測 / 低コヒーレント干渉 / 近赤外分光 / 表面性状 / 分光イメージング / 測定精度 / 干渉 / 分光 / 干渉計 / 画像計測 / 厚さ計測 / ウェハ薄片化 / グレーティングカプラ / 顕微分光 / マイクロアレ / 局在プラズモンポラリトン / フォトニック結晶 / SPRセンサー / 表面プラズモンポラリトン / マイクロアレイ / 表面プラズモン共鳴 / センサーチップ … More
Except Principal Investigator
切削 / 加工変質層 / 分子動力学 / 摩擦 / 機械工作・生産工学 / トライボロジー / 物理特性 / 機械特性 / 圧電効果 / 焦電効果 / 振動 / 結晶異方性 / ナノスクラッチ / 次世代半導体基板 / リアルタイム / 教師なし学習 / 異常検知 / スクラッチ / 環境 / 接触試験 / 原子間ポテンシャル / 摩耗 / 潤滑 / なじみ / 境界潤滑 / 振動援用切削 / きさげ / 表面テクスチャ / トライボロジ― / 硬質皮膜 / 付加加工 / 放電加工 / 材料加工・処理 / 表面粗さ / サファイヤ単結晶 / Defect free / ハイブリッド送り機構 / サファイア単結晶 / 加工変質法 / ハイブリッド化工法 / ハイブリッド加工法 / サファイ / 切削・研削加 / ハイブリッド加工 / サファイア / CMG / 切削・研削加工 / 機械強度 / 内部応力 / 自発分極 / 強誘電体 / 工具 / バリ / 静水圧 / 計算物理 / テクスチャ / ダイヤモンド工具 / レーザ加工 / ナノマイクロ加工 / 分級 / 除染・洗浄 / 砥粒加工 / 多重反射 / ツイン振動子 / 定在波 / 音響浮揚 / 分子動力学シミュレーション / インデンテーション実験 / "軟脆"材料 / "硬脆"材料 / “硬脆”材料 / “軟脆”材料 / 研削熱の影響 / 研削加工 / 機械化学融合加工 / 単結晶 / 硬脆材料 / 軟脆材料 / 陽極酸化 / 酸化チタン / 光触媒 / 引っかき / 掘起し / 色素増感太陽電池 / 転写 / 透明電極 / 表面微細構造 / 振動子 / MEMS・NEMS / エネルギー / MEMS / エレクトレット発電 / 圧電発電 / 振動発電 / 熱電発電 / バイオ発電 / マイクロ発電 / エナジー・ハーベスティング / 固体電解質 / マイクロ爆轟 / バイオ電池 / 燃料電池 / バイオテクノロジー / エネルギー・ハーベスティング / マイクロマシン / マイクロ・ナノデバイス Less
  • Research Projects

    (17 results)
  • Research Products

    (292 results)
  • Co-Researchers

    (17 People)
  •  Development and Validation of Real-time Anomaly Detection AI Models to Revolutionize Smart Manufacturing

    • Principal Investigator
      周 立波
    • Project Period (FY)
      2024 – 2026
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Ibaraki University
  •  Clarification of Grinding Mechanism for Minimizing Damaged Layers of Next Generation Semiconductor Substrates Using Nanomachining and Metrology

    • Principal Investigator
      清水 淳
    • Project Period (FY)
      2023 – 2026
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Ibaraki University
  •  超解像Raman断層計測を用いた結晶損傷発生機構の解明と先端加工技術への応用Principal Investigator

    • Principal Investigator
      小貫 哲平
    • Project Period (FY)
      2021 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Ibaraki University
  •  Overcoming weaknesses and elucidating tribological phenomena by a new trial of molecular dynamics analysis considering experimental results

    • Principal Investigator
      Shimizu Jun
    • Project Period (FY)
      2020 – 2022
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 18040:Machine elements and tribology-related
    • Research Institution
      Ibaraki University
  •  Examination of replaceability of scraping with texturing by micro-vibration assisted cutting

    • Principal Investigator
      Takeyuki Yamamoto
    • Project Period (FY)
      2019 – 2021
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Ibaraki University
  •  Development of hard film texture coated tool by scanning micro discharge additional processing in gas atmosphere

    • Principal Investigator
      Takeyuki Yamamoto
    • Project Period (FY)
      2016 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  Development of a novel high-integrity cutting method by use of localized materials hardening due to tribo-compressive hydrostatic stress

    • Principal Investigator
      Shimizu Jun
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Ibaraki University
  •  Feasibility study on effective use of material's physical properties in machining of functional crystal

    • Principal Investigator
      Zhou Libo
    • Project Period (FY)
      2015 – 2016
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  Development of mechanical + chemical hybrid manufacturing technology of sapphire crystal wafer

    • Principal Investigator
      ZHOU LIBO
    • Project Period (FY)
      2015 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  Life elongation by texturing and edge formation of monocrystalline diamond tool using ps pulse laser

    • Principal Investigator
      Yamamoto Takeyuki
    • Project Period (FY)
      2013 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  On machine wide area thickness measurement technology for wafer thinning process developmentPrincipal Investigator

    • Principal Investigator
      Onuki Teppei
    • Project Period (FY)
      2013 – 2015
    • Research Category
      Grant-in-Aid for Young Scientists (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  Feasibility study on in-tube decontamination system driven by non-contact acoustic levitation

    • Principal Investigator
      ZHOU Libo
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  Study on the characterization and grinding technology of "soft-brittle" functional materials

    • Principal Investigator
      ZHOU Libo
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  Application of micro-transcription by using nano-cutting mold to development of high-functional dye-sensitized solar cell

    • Principal Investigator
      YAMAMOTO Takeyuki
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Ibaraki University
  •  Development of high-functional photocatalytic film using nano/micro double ploughing texture

    • Principal Investigator
      SHIMIZU Jun
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Ibaraki University
  •  Dense-integrated surface plasmon resonance sensor chipPrincipal Investigator

    • Principal Investigator
      ONUKI Teppei
    • Project Period (FY)
      2006 – 2008
    • Research Category
      Grant-in-Aid for Young Scientists (A)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Tohoku University
  •  Research of a nano-energy system creation

    • Principal Investigator
      KUWANO Hiroki
    • Project Period (FY)
      2006 – 2010
    • Research Category
      Grant-in-Aid for Creative Scientific Research
    • Research Institution
      Tohoku University

All 2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 Other

All Journal Article Presentation Book Patent

  • [Book] MEMSINEMS工学全集2009

    • Author(s)
      小貫哲平(分担)
    • Total Pages
      19
    • Publisher
      テクノシステム
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Book] MEMS/NEMS工学全集2009

    • Author(s)
      小貫哲平
    • Publisher
      テクノシステム
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] 顕微ラマン断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測,2024

    • Author(s)
      小貫哲平,柴教一郎,黒田隼乃介,茂垣有亮,尾嶌裕隆,清水淳,周立波
    • Journal Title

      砥粒加工学会誌

      Volume: 68 Pages: 202-207

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Journal Article] ロータリインフィード研削におけるウエハ温度の解析および評価2024

    • Author(s)
      塩見 山太郎, 髙橋 清樹, 周 立波,清水 淳,小貫 哲平,尾嶌 裕隆, 金子 和暉
    • Journal Title

      砥粒加工学会誌

      Volume: 68 Pages: 140-144

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K26006
  • [Journal Article] 顕微Raman断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測 -半導体ウエハ加工変質層の非破壊計測2024

    • Author(s)
      小貫哲平
    • Journal Title

      光アライアンス

      Volume: 35 Pages: 1-4

    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Journal Article] Modeling of chemical reaction in molecular dynamics simulation of chemical mechanical polishing of silicon wafer2023

    • Author(s)
      金子 和暉、橋村 紀香、清水 淳、周 立波、小貫 哲平、尾嶌 裕隆
    • Journal Title

      Journal of the Japan Society for Abrasive Technology

      Volume: 67 Issue: 8 Pages: 452-457

    • DOI

      10.11420/jsat.67.452

    • ISSN
      0914-2703, 1880-7534
    • Year and Date
      2023-08-01
    • Language
      Japanese
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-23K26006
  • [Journal Article] Abrasive wear damages observation in engineering ceramics using micro-Raman tomography2023

    • Author(s)
      Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
    • Journal Title

      JAMDSM

      Volume: 17 Issue: 1 Pages: JAMDSM0009-JAMDSM0009

    • DOI

      10.1299/jamdsm.2023jamdsm0009

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Journal Article] 振動援用切削でテクスチャ加工した圧痕状パターン周期配置型金属面の乾式すべり特性2023

    • Author(s)
      清水 淳,山本武幸,金子和暉,周 立波,小貫哲平,尾嶌裕隆
    • Journal Title

      砥粒加工学会誌

      Volume: 67 Pages: 218-223

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Journal Article] Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope2022

    • Author(s)
      Wangpiao Lin, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Precision Engineering

      Volume: 73 Pages: 51-62

    • DOI

      10.1016/j.precisioneng.2021.08.011

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20K04235, KAKENHI-PROJECT-23K20906
  • [Journal Article] Quality Inspection Technology for Grinding Surface of Electronic Materials and Ceramics by Micro Raman Tomographic Imaging2022

    • Author(s)
      小貫哲平
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 88 Issue: 7 Pages: 551-555

    • DOI

      10.2493/jjspe.88.551

    • ISSN
      0912-0289, 1882-675X
    • Year and Date
      2022-07-05
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Journal Article] Analysis of Nanoscratch Mechanism of C-Plane Sapphire with the Aid of Molecular Dynamics Simulation of Hcp Crystal2021

    • Author(s)
      Wangpiao Lin, Naohiko Yano, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Nanomaterials

      Volume: 11 Issue: 7 Pages: 1739-1739

    • DOI

      10.3390/nano11071739

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20K04235, KAKENHI-PROJECT-23K20906
  • [Journal Article] Chemo-mechanical grinding by applying grain boundary cohesion fixed abrasive for monocrystal sapphire2021

    • Author(s)
      Wu Ke、Touse Daichi、Zhou Libo、Lin Wangpiao、Shimizu Jun、Onuki Teppei、Yuan Julong
    • Journal Title

      Precision Engineering

      Volume: 70 Pages: 110-116

    • DOI

      10.1016/j.precisioneng.2021.01.015

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Journal Article] Friction Characteristics of Mechanically Microtextured Metal Surface in Dry Sliding2020

    • Author(s)
      Jun Shimizu, Tomotaka Nakayama, Kouta Watanabe, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
    • Journal Title

      Tribology International

      Volume: 149 Pages: 105634-105634

    • DOI

      10.1016/j.triboint.2019.02.042

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19K04102, KAKENHI-PROJECT-20K04235
  • [Journal Article] Study on mechanism of rotary in-feed face grinding2019

    • Author(s)
      石橋憲,月井裕太,蛯名雄太郎,周立波,清水淳,小貫哲平,山本武幸, 尾嶌裕隆
    • Journal Title

      Journal of the Japan Society for Abrasive Technology

      Volume: 63 Issue: 1 Pages: 31-35

    • DOI

      10.11420/jsat.63.31

    • NAID

      130007670937

    • ISSN
      0914-2703, 1880-7534
    • Year and Date
      2019-01-01
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Journal Article] Friction Characteristics of Mechanically Microtextured Metal Surface in Dry Sliding2019

    • Author(s)
      Jun Shimizu, Tomotaka Nakayama, Kouta Watanabe, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
    • Journal Title

      Tribology International

      Volume: 印刷中

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Journal Article] Investigation of the Effect of Grain Size Variation on Ground Wafer Surface by Grinding Experiment/Simulation2018

    • Author(s)
      蛯名 雄太郎, 前崎 智博, 周 立波, 清水 淳, 小貫 哲平, 尾嶌 裕隆, 乾 正知
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 84 Issue: 7 Pages: 640-645

    • DOI

      10.2493/jjspe.84.640

    • NAID

      130007393958

    • ISSN
      0912-0289, 1882-675X
    • Year and Date
      2018-07-05
    • Language
      Japanese
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-17K06075, KAKENHI-PROJECT-15H02213
  • [Journal Article] Study on the finishing capability and abrasives-sapphire interaction in dry chemo-mechanical-grinding (CMG) process2018

    • Author(s)
      Wu Ke、Zhou Libo、Onuki Teppei、Shimizu Jun、Yamamoto Takeyuki、Yuan Julong
    • Journal Title

      Precision Engineering

      Volume: 52 Pages: 451-457

    • DOI

      10.1016/j.precisioneng.2018.02.007

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Journal Article] Theoretical analysis on effects of grain size variation2017

    • Author(s)
      Libo Zhou, Yutaro Ebina1, Ke Wu, Jun Shimizu, Teppei Onuki
    • Journal Title

      Precision Engineering

      Volume: 印刷中

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Journal Article] Study on the potential of chemo-mechanical-grinding (CMG) process of sapphire wafer2017

    • Author(s)
      Ke Wu, Libo Zhou, Jun Shimizu, Teppei Onuki, Takeyuki Yamamoto, Hirotaka Ojima and Julong Yuan
    • Journal Title

      The International Journal of Advanced Manufacturing Technology

      Volume: 90 Issue: 5-8 Pages: 1-8

    • DOI

      10.1007/s00170-016-9836-1

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213, KAKENHI-PROJECT-15K13840
  • [Journal Article] Theoretical analysis on effects of grain size variation2017

    • Author(s)
      Libo Zhou, Yutaro Ebina1, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Precision Engineering

      Volume: 印刷中

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Journal Article] Theoretical analysis on effects of grain size variation2017

    • Author(s)
      Zhou Libo、Ebina Yutaro、Wu Ke、Shimizu Jun、Onuki Teppei、Ojima Hirotaka
    • Journal Title

      Precision Engineering

      Volume: 50 Pages: 27-31

    • DOI

      10.1016/j.precisioneng.2017.04.010

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2016

    • Author(s)
      Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Advanced Materials Research

      Volume: 1136 Pages: 156-161

    • DOI

      10.4028/www.scientific.net/amr.1136.156

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K05753, KAKENHI-PROJECT-25420043
  • [Journal Article] Development of Microtextured Titanium Dioxide Surface by using Microcutting Techniques2016

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Ceramics Transactions

      Volume: 257 Pages: 35-42

    • DOI

      10.1002/9781119234463.ch4

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K05753, KAKENHI-PROJECT-16K06000
  • [Journal Article] ナノ接触実験結果と酸化膜の影響を考慮したすべり摩擦の分子動力学シミュレーション2016

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,三輪紘敬,南部俊和
    • Journal Title

      トライボロジスト

      Volume: 61 Pages: 845-856

    • NAID

      130005250169

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Journal Article] Research on Development of On-Machine 3D Measuring System of Grinding Wheel Surface Topography by Stereo Images2016

    • Author(s)
      尾嶌裕隆,長山拓矢,周 立波,清水 淳,小貫哲平
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 82 Issue: 2 Pages: 186-191

    • DOI

      10.2493/jjspe.82.186

    • NAID

      130005124397

    • ISSN
      0912-0289, 1882-675X
    • Language
      Japanese
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K13840, KAKENHI-PROJECT-15H02213
  • [Journal Article] ナノ接触実験結果と酸化膜の影響を考慮したすべり摩擦の分子動力学シミュレーション2016

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,三輪紘敬,南部俊和
    • Journal Title

      トライボロジスト

      Volume: 61 Pages: 845-856

    • NAID

      130005250169

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectrum analyzer2015

    • Author(s)
      Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Journal Title

      Applied Mechanics and Materials

      Volume: 806 Pages: 581-585

    • DOI

      10.4028/www.scientific.net/amr.1136.581

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015

    • Author(s)
      Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Journal Title

      Applied Mechanics and Materials

      Volume: 1136 Pages: 581-585

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Journal Article] Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel2015

    • Author(s)
      Ke Wu, Naoki Yamazaki, Yutaro Ebina, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takashi Fujiwara
    • Journal Title

      Applied Mechanics and Materials

      Volume: 1136 Pages: 311-316

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Journal Article] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015

    • Author(s)
      Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Journal Title

      Applied Mechanics and Materials

      Volume: 1136 Pages: 581-585

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2015

    • Author(s)
      Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Applied Mechanics and Materials

      Volume: 1136 Pages: 156-161

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Journal Article] Molecular Dynamics Simulation of a Cutting Method by Making Use of Localized Hydrostatic Pressure2015

    • Author(s)
      Jun Shimizu, Keito Uezaki, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Applied Mechanics and Materials

      Volume: 1136 Pages: 156-161

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Journal Article] Process study on large-size silicon wafer grinding by using a small-diameter wheel2015

    • Author(s)
      Yutaro EBINA, Tomoya YOSHIMATSU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA
    • Journal Title

      JAMDSM

      Volume: 9 Issue: 5 Pages: JAMDSM0073-JAMDSM0073

    • DOI

      10.1299/jamdsm.2015jamdsm0073

    • NAID

      130005130435

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K13840, KAKENHI-PROJECT-15H02213
  • [Journal Article] Study on Sapphire Wafer Grinding by Chromium Oxide (Cr2O3) Wheel2015

    • Author(s)
      Ke Wu, Naoki Yamazaki, Yutaro Ebina, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takashi Fujiwara
    • Journal Title

      Applied Mechanics and Materials

      Volume: 1136 Pages: 311-316

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Journal Article] Development of Microtextured Photocatalytic Surface by Vibration-assisted Scratching2014

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Journal Title

      Materials Science Forum

      Volume: 783-786 Pages: 1488-1493

    • DOI

      10.4028/www.scientific.net/msf.783-786.1488

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Journal Article] Influence of surface integrity in silicon wafer thickness measurements by reflection spectroscopy2014

    • Author(s)
      Teppei Onuki, Ryusuke Ono, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: 1017 Pages: 681-685

    • DOI

      10.4028/www.scientific.net/amr.1017.681

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Journal Article] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry2014

    • Author(s)
      Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Journal Title

      Proceedings of 15th International conference on Precision Engineering (ICPE2014)

      Volume: 1 Pages: 836-837

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Journal Article] Modeling of process mechanisms in pulsed laser micro machining on lithium niobate substrates2014

    • Author(s)
      Teppei Onuki, Ippei Murayama, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Journal Title

      International Journal of Automation Technology

      Volume: 8 Pages: 896-902

    • NAID

      130007674050

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Journal Article] 近赤外分光器を用いた反射分光方式の薄シリコンウェハ厚さ計2014

    • Author(s)
      小貫哲平、小野竜典、尾嶌裕隆、清水淳、周立波
    • Journal Title

      砥粒加工学会誌

      Volume: 58 Pages: 515-519

    • NAID

      130004835723

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Journal Article] 日本縦断研究室巡り「茨城大学 Nano-Engineering Laboratory (nLab)」2014

    • Author(s)
      周 立波,清水 淳,小貫哲平,尾嶌裕隆,山本武幸
    • Journal Title

      レーザ協会誌

      Volume: 39 Pages: 33-35

    • Data Source
      KAKENHI-PROJECT-25420043
  • [Journal Article] Mold Pattern Fabrication by Nanoscratching2013

    • Author(s)
      Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Han Huang
    • Journal Title

      International Journal of Automation Technology

      Volume: 7 Pages: 686-693

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Journal Article] Fabrication of Surface Microtexture by Vibration Assisted Cutting2013

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Hirotaka Ojima, Teppei Onuki, Shun-ichi Nagaoka
    • Journal Title

      Advanced Materials Research

      Volume: 797 Pages: 638-641

    • DOI

      10.4028/www.scientific.net/amr.797.638

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Journal Article] A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer2013

    • Author(s)
      Teppei Onuki, Ryusuke Ono, Akira Suzuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: 797 Pages: 549-554

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Journal Article] A Thin Silicon Wafer Thickness Measurement System by Optical Reflectmetry Scheme Using Fourier Transform Near-Infrared Spectrometer2013

    • Author(s)
      Teppei Onuki, Ryusuke Ono, Akira Suzuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: Vol.797 Pages: 549-554

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Design of Digital Filters for Si Wafer Surface Profile Measurement2012

    • Author(s)
      Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
    • Journal Title

      Key Engineering Materials

      Volume: 615 Pages: 332-336

    • DOI

      10.4028/www.scientific.net/kem.516.332

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Study on grinding process ing of sapphire wafer2012

    • Author(s)
      Yutaro Ebina, Wei Hang, Libo Zhou, Jun S himizu, Onuki Teppei, Hirotaka Ojima and Yoshiaki Tashiro
    • Journal Title

      Advanced Materials Research

      Volume: Vol.565 Pages: 22-27

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Research on digital filters for Si wafer surface profile measurement2012

    • Author(s)
      Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu and Teppei Onuki
    • Journal Title

      Advanced Materials Research

      Volume: Vol.565 Pages: 656-661

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Study on grinding processing of sapphire wafer2012

    • Author(s)
      Yutaro Ebina, Wei Hang, Libo Zhou, Jun Shimizu, Onuki Teppei, Hirotaka Ojima and Yoshiaki Tashiro
    • Journal Title

      Advanced Materials Research

      Volume: 565 Pages: 22-27

    • DOI

      10.4028/www.scientific.net/amr.565.22

    • NAID

      130005031327

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2012

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
    • Journal Title

      砥粒加工学会誌

      Volume: 55巻 Pages: 662-667

    • URL

      https://www.jstage.jst.go.jp/article/jsat/55/11/55_662/_pdf

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560134
  • [Journal Article] Molecular Dynamics Simulation of Metal Cutting with Local Hydrostatic Pressure Field Formation2012

    • Author(s)
      K. Uezaki, J. Shimizu, L. Zhou, T. Onuki, H. Ojima
    • Journal Title

      Key Engineering Materials

      Volume: Vols.523-524 Pages: 67-172

    • DOI

      10.4028/www.scientific.net/kem.523-524.167

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
  • [Journal Article] Influence of Surface Micro Texture on Photocatalitic Function of Titanium Dioxide Film2012

    • Author(s)
      J. Shimizu, G. Kobayashi, N. Hasegawa, T. Yamamoto, H. Ojima, T. Onuki, L. Zhou
    • Journal Title

      Materials Science Forum

      Volume: Vols.706-709 Pages: 2646-2651

    • DOI

      10.4028/www.scientific.net/msf.706-709.2646

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
  • [Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011

    • Author(s)
      清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 鈴木直紀
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 662-667

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560102
  • [Journal Article] 近赤外分光計測を用いた薄片シリコンウェハの厚さ計測法2011

    • Author(s)
      小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 729-732

    • NAID

      10030194515

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011

    • Author(s)
      清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 鈴木直紀
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 662-667

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560134
  • [Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011

    • Author(s)
      小貫哲平,小野龍典,尾嶌隆裕,清水淳,周立波
    • Journal Title

      砥粒加工学会誌

      Volume: Vol.55, 12 Pages: 729-732

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Spectroscopic Measurements of Silicon Wafer Thickness for Backgrinding Process2011

    • Author(s)
      Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: 325 Pages: 672-677

    • DOI

      10.4028/www.scientific.net/amr.325.672

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134, KAKENHI-PROJECT-23360062
  • [Journal Article] Spectroscopic measurements of silicon wafer thickness for backgrinding process2011

    • Author(s)
      Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
    • Journal Title

      Advanced Material Research

      Volume: Vol.325 Pages: 672-677

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011

    • Author(s)
      小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 729-732

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560134
  • [Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011

    • Author(s)
      小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 729-732

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560102
  • [Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011

    • Author(s)
      清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
    • Journal Title

      砥粒加工学会

      Volume: Vol.55, 11 Pages: 662-667

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Siウェハ仕上げ加工に及ぼす加工変質層の影響の解析2011

    • Author(s)
      清水淳, 周立波, 小貫哲平,尾嶌裕隆, 山本武幸, 鈴木直紀
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 662-667

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Journal Article] Mold Fabricated by Nanoscratching for Nanoimprint Lithography2010

    • Author(s)
      W. Ohsone, J. Shimizu, L. Zhou, H. Ojima, T. Onuki, T. Yamamoto, H. Huang
    • Journal Title

      Advanced Materials Research

      Volume: Vols.126-128 Pages: 843-848

    • DOI

      10.4028/www.scientific.net/amr.126-128.843

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560102, KAKENHI-PROJECT-22560134
  • [Journal Article] 表面微細構造による幅射場操作を用いた放熱技術の検討2010

    • Author(s)
      小貫哲平
    • Journal Title

      日本機械学会論文集(C編)

      Volume: 76 Pages: 1917-1919

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] Improvement in Oxide-pattern Sizes Controllability on Scanning Probe Nanolithography2010

    • Author(s)
      Teppei Onuki, Takashi Tokizaki, Ojima Hirotaka, Jun Shimizu, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: Vols.126-128 Pages: 701-706

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560134
  • [Journal Article] Improvement in Oxide-pattern Sizes Controllability on Scanning Probe Nanolithography2010

    • Author(s)
      Teppei Onuki, Takashi Tokizaki, Ojima Hirotaka, Jun Shimizu, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: Vols.126-128 Pages: 701-706

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22560102
  • [Journal Article] Efficient Energy Harvesting from Irregular Mechanical Vibrations by Active Motion Control2009

    • Author(s)
      Hiroshi Okamoto, Teppei Onuki, Sumito Nagasawa, Hiroki Kuwano
    • Journal Title

      J. MICROELECTROMECHANICAL SYSTEMS

      Volume: Vol.18 Pages: 1420-1431

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] Micro blender and separator using inner-vortex of droplet induced by surface acoustic wave2009

    • Author(s)
      Takuya Sano, Teppei Onuki, Yuichirou Hamate, Maki Hohjo, Sumito Nagasawa and Hiroki Kuwano
    • Journal Title

      Digest of technical papers of International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009) 15

      Pages: 370-373

    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Low resistive copper films deposited using ion beam sputtering method with ultra-high purity target2009

    • Author(s)
      Teppei Onuki
    • Journal Title

      Journal of Micromechanics and Microengineering 119

      Pages: 0940176-0940176

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] Low resistive copper films deposited using ion beam sputtering method with ultra-high purity target2009

    • Author(s)
      Teppei Onuki, Hiroki Kuwano
    • Journal Title

      Journal of Micromechanics and Micro engineering (accepted)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] O plus E 特集, バイオと光技術, フォトニック結晶型分光フィルターとその生体計測への応用2008

    • Author(s)
      大寺康夫, 小貫哲平, 井上喜彦, 川上彰二郎
    • Journal Title

      vol.30, 4月号

      Pages: 375-379

    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] 微細構造化された無機・金属材料による光・電磁材料特性の制御技術-フォトニック結晶・電磁メタマテリアル2008

    • Author(s)
      小貫哲平
    • Journal Title

      Journal of the society of Inorganic Materials Japan 15

      Pages: 459-465

    • NAID

      10021865509

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Improving an electret transducer by fully utilizing the implanted charge2008

    • Author(s)
      H. Okamoto, T. Onuki, and H. Kuwano
    • Journal Title

      Applied Physics Letters 93

      Pages: 1-3

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] Study on surface plasmon polariton near photonic-bandgap for inter-photonicband switching devices2008

    • Author(s)
      Teppei Onuki
    • Journal Title

      Journal of Microscopy 229

      Pages: 447-451

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] Study of surface plasmon polariton near the photonic-bandgap for inter-photonic band switching devices2008

    • Author(s)
      Teppei Onuki, Yasuo Ohtera, and Takashi Tokizaki
    • Journal Title

      Journal of Microscopy vol.229, 3

      Pages: 447-451

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Improving an electret transducer by fully utilizing the implanted charge2008

    • Author(s)
      Hiroshi Okamoto, Teppei Onuki, and Hiroki Kuwano
    • Journal Title

      Appl. Phys. Lett.

      Volume: 93 Pages: 1-3

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008

    • Author(s)
      Teppei Onuki, Hiroki Kuwano
    • Journal Title

      Proceedings of 8th PowerMEMS+μEMS2008

      Pages: 493-496

    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam snutterin22008

    • Author(s)
      Teppei Onuki, Hiroki Kuwano
    • Journal Title

      Proceedings of PowerMEMS2008-FREMS2008 8

      Pages: 493-496

    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Micro blender and separator using inner-vortex of droplet induced by surface acoustic wave2008

    • Author(s)
      Takuya Sano, Teppei Onuki, Yuichirou Hamate, Maki Hohjo, Sumito Nagasawa and Hiroki Kuwan
    • Journal Title

      IEEE proceedings of Transducers 09 15

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Study of surface plasmon polaritons near the photonic-bandgap edge for interphotonic band switching devices2008

    • Author(s)
      Teppei Onuki
    • Journal Title

      Journal of Microscopy 229

      Pages: 447-451

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] 微細構造化された無機・金属材料による光・電磁材料特性の制御技術-フォトニック結晶・電磁メタマテリアル2008

    • Author(s)
      小貫哲平
    • Journal Title

      Journal of the society of Inorganic Materials vol.15 (No.337) 11月号

      Pages: 459-465

    • NAID

      10021865509

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008

    • Author(s)
      T. Onuki
    • Journal Title

      Technical Digest of PowerMEMS 2008+mEMS2008 8

      Pages: 493-496

    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] フォトニック結晶型分光フィルターとその生体計測への応用2008

    • Author(s)
      大寺康夫、小貫哲平、井上喜彦、川彰二郎
    • Journal Title

      0 plus E 30

      Pages: 375-379

    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] Multi-channel photonic crystal wavelength filter array for near-infrared wavelengths2007

    • Author(s)
      Yasuo Ohtera, Teppei Onuki, Yoshihiko Inoue, and Shojirou Kawakami
    • Journal Title

      IEEE/OSA Journal of Lightwave Technology 25, 2

      Pages: 499-503

    • NAID

      120002070242

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Journal Article] 微細構造修飾によるエネルギー回生増強技術の開発2007

    • Author(s)
      小貫哲平
    • Journal Title

      Micro Environmental Machine Systems 2007

      Pages: 55-55

    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Journal Article] 分光計測用フォトニック結晶型波長フィルターの開発2006

    • Author(s)
      大寺康夫, 小貫哲平, 井上喜彦, 川上彰二郎
    • Journal Title

      光波センシング技術研究会論文集 38-28

      Pages: 193-199

    • Data Source
      KAKENHI-PROJECT-18686006
  • [Patent] 微小撹拌分離装置2009

    • Inventor(s)
      小貫哲平
    • Industrial Property Rights Holder
      東北大学
    • Filing Date
      2009-05-21
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Patent] 表面プラズモン共鳴現象測定器2008

    • Inventor(s)
      小貫哲平
    • Industrial Property Rights Holder
      国立大学法人東北大学
    • Patent Publication Number
      2008-014732
    • Filing Date
      2008-01-24
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Patent] 【特許】可調節機能付き弾性表面波機器2008

    • Inventor(s)
      小貫哲平
    • Industrial Property Rights Holder
      東北大
    • Industrial Property Number
      2008-024469
    • Filing Date
      2008-01-07
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Patent] 【特許】微小機械-電気構造用振動変位計測装置2007

    • Inventor(s)
      小貫哲平
    • Industrial Property Rights Holder
      東北大
    • Industrial Property Number
      2007-234205
    • Filing Date
      2007-09-10
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Patent] 表面プラズモン共鳴現象測定器2006

    • Inventor(s)
      小貫哲平
    • Industrial Property Rights Holder
      国立大学法人東北大学
    • Industrial Property Number
      2006-184983
    • Filing Date
      2006-07-04
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] マグネシウムシリサイドウエハ表層の顕微Raman3D 断層イメージング2024

    • Author(s)
      渡邉和馬,小貫哲平,尾嶌裕隆,清水淳,周立波,鵜殿治彦
    • Organizer
      応用物理学会学術講演会
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] C面サファイア基板のナノスクラッチ特性(第3報)-シングルとマルチ・スクラッチにおける現象の相違-2024

    • Author(s)
      清水 淳,三枝 剣悟,林 旺票,金子 和暉,周 立波,小貫 哲平,尾嶌 裕隆,山本 武幸
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-23K26006
  • [Presentation] Observation of potential failures in ceramic cutting tools using microscopic Raman imaging2024

    • Author(s)
      Teppei Onuki, Ryohei Tazawa, Shuo Liu, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Organizer
      Optical Technology and Measurement for Industrial Applications (OPTM)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] 3D Micro-Raman Tomographic Measurement on Subsurface of Magnesium Silicide Wafer2024

    • Author(s)
      Kazuma Watanabe, Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou and Haruhiko Udono
    • Organizer
      The 13th Advanced Lasers and Photon Sources Conference (ALPS2024)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] C面サファイア基板のナノスクラッチ特性(第2報)-nmオーダ送りにおけるスクラッチ異方性の考察-2023

    • Author(s)
      清水 淳,林 旺票,矢野直彦,三枝剣悟,金子和暉,周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 顕微Raman イメージング非破壊検査技術の工業分野での応用2023

    • Author(s)
      小貫哲平
    • Organizer
      サーモフィッシャーサイエンティフィック FT-IR・ラマン バーチャル・ユーザーズフォーラム 2023
    • Invited
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] Study on Machining Anisotropy of C-plane Sapphire Wafer by Nanoscratching Experiments2023

    • Author(s)
      Kengo Saegusa, Wangpiao Lin, Jun Shimizu, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      The 25th International Symposium on Advances in Abrasive Technology (ISAAT 2023)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K26006
  • [Presentation] 顕微ラマン断層イメージングによるワイドバンドギャップ半導体ウエハ加工変質層観測2023

    • Author(s)
      柴教一郎,小貫哲平,黒田隼乃介,茂垣有亮,尾嶌裕隆,清水淳,周立波
    • Organizer
      砥粒加工学会学術講演会(ABTEC)
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] 環境調和半導体マグネシウムシリサイドウエハ表面への顕微Raman断層イメージング計測2023

    • Author(s)
      小貫 哲平, 渡邉 和馬, 尾嶌 裕隆, 清水 淳, 周 立波, 鵜殿 治彦
    • Organizer
      茨城講演会
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] ポテンシャル制御を用いたシリコンCMPの分子動力学解析における砥粒強度の影響2023

    • Author(s)
      橋村 紀香,金子 和暉,清水 淳,周 立波,小貫 哲平,尾嶌 裕隆
    • Organizer
      砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-23K26006
  • [Presentation] Characterization of Subsurface Damaged Layers in Wide-bandgap Semiconductor Wafers Using High-resolution Depth Slice Raman Imaging2023

    • Author(s)
      Kyo-ichiro Shiba, Teppei Onuki, Jun-nosuke Kuroda, Yusuke Mogaki, Hirotaka Ojima, Jun Shimizu and Libo Zhou,
    • Organizer
      The 25th International Symposium on Advances in Abrasive Technology (ISAAT 2023)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] ロータリインフィード研削におけるウェハ温度の解析及び評価2023

    • Author(s)
      塩見 山太郎, 髙橋 清樹, 周 立波,清水 淳,小貫 哲平,尾嶌 裕隆, 金子 和暉
    • Organizer
      砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-23K26006
  • [Presentation] Molecular Dynamics Simulation of Abrasive Wear of Hcp Crystal to Clarify Nanoscratch Phenomena of C-plane Sapphire Wafer2023

    • Author(s)
      Jun Shimizu, Wangpiao Lin, Naohiko Yano, Kengo Saegusa, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
    • Organizer
      International Tribology Conference (ITC 2023), Fukuoka
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K26006
  • [Presentation] 顕微Raman イメージング非破壊検査技術の工具品質計測への応用2023

    • Author(s)
      劉爍, 小貫哲平, 黒田隼乃介, 柴教一郎, 金子和暉, 尾嶌裕隆, 清水淳, 周立波
    • Organizer
      精密工学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] シリコンCMPの分子動力学シミュレーション 第1報:ポテンシャル制御に基づく化学的作用のモデル化2022

    • Author(s)
      金子和暉,橋村紀香,清水 淳,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] ナノスクラッチによるC面単結晶サファイア基板の加工特性の検討(単溝スクラッチにおける加工異方性)2022

    • Author(s)
      清水 淳,林 旺票,矢野直彦,金子和暉,周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      日本機械学会第14回生産加工・工作機械部門講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 顕微Raman断層イメージング計測における測定データ品質指標の検討2022

    • Author(s)
      小貫哲平,黒田隼乃介,劉爍,柴教一郎,金子和暉,尾嶌裕隆,清水淳
    • Organizer
      砥粒加工学会学術講演会(ABTEC)
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] First-principles electronic structure calculation for analyzation of crystallographic damage states in Raman spectral data2022

    • Author(s)
      Jun-nosuke KURODA, Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
    • Organizer
      The 19th International Conference on Precision Engineering (ICPE 2022)
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] 振動援用切削による表面テクスチャの摩擦特性(第7報)-テクスチャ表面の摩耗挙動-2022

    • Author(s)
      大矢一輝,山本武幸,清水 淳,周 立波,小貫哲平,尾嶌裕隆,金子和暉,深堀良彬
    • Organizer
      精密工学会春季大会
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] C面サファイア基板のナノスクラッチ特性-nmオーダ送りにおけるスクラッチ異方性-2022

    • Author(s)
      三枝剣悟,林 王票,矢野直彦,清水 淳,金子和暉,周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 微小振動援用切削でテクスチャ加工した圧痕状パターンの周期的配置による金属表面の乾式すべり特性2022

    • Author(s)
      清水 淳,山本武幸,金子和暉,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] Study on Brittle-Ductile Transition in Grinding Process on Sapphire Wafer Using Micro-Raman Tomographic Imaging2022

    • Author(s)
      Teppei ONUKI, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
    • Organizer
      The 24th International Symposium on Advances in Abrasive Technology (ISAAT2022)
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] Molecular Dynamics Simulation of Chemical Mechanical Polishing of Si Wafer using Potential Control2022

    • Author(s)
      Norika Hashimura, Jun Shimizu, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      International conference on Precision Engineering (ICPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析(第4報)-hcp 結晶のアブレシブ摩耗異方性-2022

    • Author(s)
      清水 淳,林 旺票,矢野直彦,周 立波,小貫哲平,尾嶌裕隆,山本武幸,金子和暉
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] Micro Raman Tomographic Imaging on Laser Beam Internal Damage into Sapphire for Laser Cleaving Process2022

    • Author(s)
      Teppei ONUKI, Junnosuke KURODA, Kazuki KANEKO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
    • Organizer
      The 15th Pacific Rim Conference on Lasers and Electro-Optics (CLEO Pacific Rim, CLEO-PR 2022)
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] Boundary Lubricity of Metal Surfaces Textured by Vibration-assisted Cuttin2022

    • Author(s)
      Jun Shimizu, Kazuki Ohya, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Kazuki Kaneko, Yoshiaki Fukahori
    • Organizer
      International conference on Precision Engineering (ICPE 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] Study on Abrasive Wear Mechanism of C-plane Sapphire Using Nanoscratch Test and Molecular Dynamics Simulation of HCP Crystal2022

    • Author(s)
      Jun Shimizu, Wangpiao Lin, Naohiko Yano, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Kengo Saegusa
    • Organizer
      The 24th International Symposium on Advances in Abrasive Technology (ISAAT 2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 第一原理電子構造計算によるRamanスペクトルシミュレーションを用いた結晶格子損傷状態の解析法の検討2022

    • Author(s)
      黒田隼乃介, 小貫哲平, 金子和暉, 尾嶌裕隆, 清水淳, 周立波
    • Organizer
      精密工学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] hcp結晶の分子動力学解析結果を利用したc面サファイアのアブレシブ摩耗特性の評価2022

    • Author(s)
      清水 淳,林 旺票,矢野直彦,周 立波,小貫哲平,尾嶌裕隆,金子和暉,山本武幸
    • Organizer
      日本トライボロジー学会トライボロジー会議2022春
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 工学的計測データ分析のための深層学習モデル開発の研究2021

    • Author(s)
      木戸浦建吾、小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      精密工学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] 局所静水圧が切削現象に及ぼす効果の分子動力学シミュレーション―転がり要素の適用―2021

    • Author(s)
      清水 淳,山本武幸,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 振動援用切削によるテクスチャ表面の潤滑特性の評価2021

    • Author(s)
      萩尾大輝,山本武幸,清水 淳,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 振動援用切削による表面テクスチャの摩擦特性(第5報)-境界潤滑における油量の影響-2021

    • Author(s)
      菊池晃太,山本武幸,清水 淳,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] Friction and Wear Behaviors of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2021

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 振動援用切削による表面テクスチャの摩擦特性(第5報)-境界潤滑における油量の影響-2021

    • Author(s)
      菊池晃太,山本武幸,清水 淳,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] Friction Characteristics of Metal Surfaces Textured by Vibrationassisted Cutting under Lubricated Environment2021

    • Author(s)
      Daiki Hagio, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析(第2報)-スライダの強度による影響に関する検討-2021

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 振動援用切削による表面テクスチャの摩擦特性(第6報)-境界潤滑におけるすべり速度の影響-2021

    • Author(s)
      山本武幸,清水 淳,周 立波,小貫哲平,尾嶌裕隆,金子和暉
    • Organizer
      精密工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] Crystallographic subsurface damages observations using super-resolution Raman tomographic imagingin advanced semiconductor and ceramics materials2021

    • Author(s)
      Teppei Onuki
    • Organizer
      6th International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM2021)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] Micro Raman Tomographic Imaging on Laser Beam Internal Machining into Sapphire2021

    • Author(s)
      Teppei Onuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Organizer
      the 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析(第3報)-hcp結晶の加工異方性に関する検討-2021

    • Author(s)
      清水 淳,林 旺票,矢野直彦,周 立波,小貫哲平,尾嶌裕隆,山本武幸,金子和暉
    • Organizer
      精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] hcp 結晶の分子動力学解析を用いたc 面サファイアのアブレシブ摩耗特性の考察2021

    • Author(s)
      清水 淳,林 旺票,矢野直彦,周 立波,小貫哲平,尾嶌裕隆,金子和暉,山本武幸
    • Organizer
      日本トライボロジー学会トライボロジー会議2021秋
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討(第5報)-境界潤滑における初歩的な検討-2021

    • Author(s)
      清水 淳,山本武幸,菊池晃太,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      日本トライボロジ―学会トライボロジー会議2021春
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] Molecular Dynamics Simulation of Localized Hydrostatic Pressure-Assisted Cutting with a Rolling Element2021

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
    • Organizer
      The 23rd International Symposium on Advances in Abrasive Technology (ISAAT2021)
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 顕微Ramanマッピング計測による珪化マグネシウム半導体表面品質評価2021

    • Author(s)
      小貫哲平、中村陸人、鵜殿治彦
    • Organizer
      茨城講演会
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] Fundamental learning characteristics of deep neural network models for the analysis of engineering data2021

    • Author(s)
      Kengo Kidoura, Teppei Onuki
    • Organizer
      6th International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] Observation on abrasive wear damages on engineering ceramics using micro-Raman tomography2021

    • Author(s)
      Teppei ONUKI, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
    • Organizer
      Proceedings of 11st International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K20906
  • [Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討(第4報)-容積と面積密度の影響-2020

    • Author(s)
      清水 淳, 中山智隆, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      日本トライボロジー学会トライボロジー会議 秋 別府
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] Friction Characteristics of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2020

    • Author(s)
      Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
    • Organizer
      18th International conference on Precision Engineering (ICPE2020)
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 振動援用切削による表面テクスチャの摩擦特性(第4報)-境界潤滑条件下における検討-2020

    • Author(s)
      山本武幸, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆, 菊池晃太
    • Organizer
      精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] ポテンシャル関数制御を用いたすべり摩擦現象の分子動力学解析(第1報)-酸化膜による影響に関する検討-2020

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] Friction Characteristics of Textured Metal Surfaces by Vibration-assisted Microcutting in Dry Sliding2020

    • Author(s)
      Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
    • Organizer
      18th International conference on Precision Engineering (ICPE2020)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 分子動力学シミュレーションによるhcp 結晶の変形・摩耗挙動の解析2020

    • Author(s)
      矢野直彦, 林 旺票, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆, 山本武幸
    • Organizer
      砥粒加工学会学術講演会(ABTEC2020)
    • Data Source
      KAKENHI-PROJECT-20K04235
  • [Presentation] 振動援用切削による表面テクスチャの摩擦特性(第3報)ー塑性盛上りの除去による効果ー2020

    • Author(s)
      清水 淳, 山本武幸, 中山智隆, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会春季大会
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 振動援用切削によるテクスチャ表面の乾式すべり特性2020

    • Author(s)
      清水 淳, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆, 菊池晃太
    • Organizer
      砥粒加工学会学術講演会(ABTEC2020)
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 振動援用切削による表面テクスチャの摩擦特性(第2報)ーテクスチャ面積密度の影響ー2019

    • Author(s)
      山本武幸, 中山智隆, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会秋季大会
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 顕微Raman断層計測によるサファイア研削面損傷の評価2019

    • Author(s)
      管駿輔, 小貫哲平, 尾嶌裕隆, 清水淳, 周立波
    • Organizer
      先進テクノフェアATF(Advanced Technology Fair)2019
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] 放電付加加工による表面テクスチャの創成(第1報)―直線走査による単純テクスチャの創成―2019

    • Author(s)
      小井沼陽希, 石井雅人, 川尻淳裕, 山本武幸, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Friction Characteristics of Textured Surfaces by Vibration-Assisted Microcutting in Dry Sliding2019

    • Author(s)
      Jun Shimizu, Tomotaka Nakayama, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      International Tribology Conference (ITC 2019), Sendai
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討(第3報)-塑性盛上り除去と被覆率の効果-2019

    • Author(s)
      清水 淳, 中山智隆, 渡辺康太, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      日本トライボロジ―学会トライボロジー会議2019春
    • Data Source
      KAKENHI-PROJECT-19K04102
  • [Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による切削性能への効果―2019

    • Author(s)
      清水 淳, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆, 小松崎一気
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討2018

    • Author(s)
      清水 淳, 中山智隆, 渡辺康太, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      日本トライボロジー学会トライボロジー会議 春 東京
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による検討―2018

    • Author(s)
      清水 淳, 芦野洸人, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Running-in Behavior of Mechanically Microtextured Metal Surfaces in Dry Sliding2018

    • Author(s)
      Tomotaka Nakayama, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Kouta Watanabe
    • Organizer
      The 17th International Conference on Precision Engineering (ICPE2018), Kamakura
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Comparative investigation of subsurface damages induced on sapphire with different machining methods using micro Raman spectroscopy2018

    • Author(s)
      Teppei Onuki, Ke Wu, Kazuki Kamoshida, Piao Lin, Nao Sugano, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Organizer
      The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] ロータリー型インフィード平面研削メカニズムに関する研究-無線式動力計の開発と研削抵抗の評価-2018

    • Author(s)
      石橋 憲, 月井裕太, 蛯名雄太郎, 周 立波, 清水 淳, 山本武幸, 小貫哲平, 尾嶌裕隆
    • Organizer
      2018年度砥粒加工学会学術講演会(ABTEC2018)
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] マイクロ切削による表面テクスチャがすべり時のなじみ過程に及ぼす影響―慣用および振動援用切削の比較―2018

    • Author(s)
      中山智隆, 渡辺康太, 山本武幸, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] サファイアへの深部レーザ加工の検討2018

    • Author(s)
      小貫哲平, 尾嶌裕隆, 清水 淳, 周 立波
    • Organizer
      2018年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] 単結晶サファイアウエハの湿式・乾式研削の比較2018

    • Author(s)
      前崎智博, Wang Jianbin, 周 立波, 清水 淳, 小貫哲平, 尾嶌裕隆
    • Organizer
      2018年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] サファイアウエハの研削メカニズムに関する研究―盛り上がり係数が除去モードに及ぼす影響―2018

    • Author(s)
      長谷川滉輔, 菅野直, 周立波, 清水淳, 小貫哲平, 尾嶌裕隆
    • Organizer
      第26回茨城講演会
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Cu-W細電極による微小放電堆積過程の検討2018

    • Author(s)
      山本武幸, 石井雅人, 小井沼陽希, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting using Rolling Element2018

    • Author(s)
      Jun Shimizu, Hiroto Ashino, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Kazuki Komatsuzaki
    • Organizer
      International Conference on Precision Engineering (ICPE2018), Kamakura
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting using Sliding Element2018

    • Author(s)
      Jun Shimizu, Hiroto Ashino, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
    • Organizer
      The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018), Toronto, Canada
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] 局所圧縮静水圧援用切削の開発―すべりおよび転がり式冶具による検討―2018

    • Author(s)
      清水 淳, 芦野洸人, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] 微小振動援用切削テクスチャ表面のなじみ特性に関する検討(第2報)― 被覆率による影響 ―2018

    • Author(s)
      清水 淳, 中山智隆, 渡辺康太, 山本武幸, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      日本トライボロジー学会トライボロジー会議 秋 伊勢
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Cross-sectional measurement of laser damage in sapphire using confocal micro Raman spectrometer2018

    • Author(s)
      Teppei Onuki, Kazuki Kamoshida, Takeyuki Yamamoto, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Organizer
      The 17th International Conference on Precision Engineering (ICPE2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Development of high efficiency CMG pellets for finishing mono-crystal sapphire2018

    • Author(s)
      Jianbin Wang, Tomohito Maezaki, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou
    • Organizer
      The 21st International Symposium on Advances in Abrasive Technology (ISAAT2018)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] C面サファイア基板のナノ引っかきに関する研究-hcp金属のナノ引っかきシミュレーションによる変形挙動の解析-2018

    • Author(s)
      林旺票, 清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 矢野直彦
    • Organizer
      2018年度砥粒加工学会学術講演会(ABTEC2018)
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Examination of Micro EDM Deposition Mechanism using Thin Cu-W Electrode2017

    • Author(s)
      Masato Ishii, Itaru Takahama, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] 局所圧縮静水圧援用切削の開発-微小切削実験と分子動力学解析-2017

    • Author(s)
      清水 淳,山本武幸,尾嶌裕隆,小貫哲平,周 立波,市村浩貴
    • Organizer
      精密工学会春季大会学術講演会
    • Place of Presentation
      慶應義塾大学(矢上)
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Study on the Effect of Grain Size Variation on Ground Surface Roughness2017

    • Author(s)
      Tomohiro Maezaki, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Masatomo Inui, Yutaro Ebina and Libo Zhou
    • Organizer
      7th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Study on Nanoscratching of C-plane Sapphire Wafer2017

    • Author(s)
      Wangpiao Lin, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima and Takeyuki Yamamoto
    • Organizer
      20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Development of localized compressive hydrostatic stress-assisted cutting method: Examination by molecular dynamics simulation and microcutting experiment2017

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Keito Uezaki
    • Organizer
      euspen's 17th International Conference & Exhibition
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Development of wireless dynamometer for rotary infeed surface grinding2017

    • Author(s)
      Yuta Tsukii, Libo Zhou, Hirotaka Ojima, Jun Shimizu and Teppei Onuki
    • Organizer
      20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting Method2017

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Hiroto Ashino
    • Organizer
      The 20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討―ナノインデント試験結果と酸化膜の影響を考慮したモデルによる検討―2017

    • Author(s)
      清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆, 三輪紘敬, 南部俊和
    • Organizer
      日本トライボロジー学会 トライボロジー会議2017春 東京
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] 局所圧縮静水圧援用切削の開発―すべり式冶具を用いた旋削実験―2017

    • Author(s)
      清水 淳, 山本武幸, 尾嶌裕隆, 小貫哲平, 周 立波, 芦野洸人
    • Organizer
      精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Development of Localized Compressive Hydrostatic Pressure-assisted Cutting Method2017

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou, Hiroto Ashino
    • Organizer
      The 20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討―FFMによる摩擦・摩耗実験とシミュレーションとの比較―2017

    • Author(s)
      清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆, 三輪紘敬, 南部俊和
    • Organizer
      日本トライボロジー学会 トライボロジー会議2017秋 香川
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] The development of hybrid-feed system and technology of CFRP machining2017

    • Author(s)
      Daisuke Takenouchi, Hirotaka Ojima, Libo Zhou, Teppei Onuki, Jun Shimizu
    • Organizer
      9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Analysis of variance in optical inspections of wafer thickness2017

    • Author(s)
      Teppei Onuki, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Organizer
      9th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Cu-W細電極による微小放電堆積加工メカニズム2017

    • Author(s)
      山本武幸, 石井雅人, 高濱 到, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Raman analysis of machining qualities on ground surfaces of sapphire wafers2017

    • Author(s)
      Teppei Onuki, Ke Wu, Nao Sugano, Hirotaka Ojima, Jun Shimizu1 and Libo Zhou
    • Organizer
      20th International Symposium on Advances in Abrasive Technology (ISAAT2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Study on micro EDM deposition in Ar atmosphere2016

    • Author(s)
      Itaru Takahama, Takeyuki Yamamoto, Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      16th International Conference on Precision Engineering (ICPE2016)
    • Place of Presentation
      アクトシティ浜松
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] 実すべり現象と分子動力学シミュレーションの歩み寄りに関する検討 ―ナノインデント試験を用いた二固体間ポテンシャル関数の導出―2016

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,三輪紘敬,南部俊和
    • Organizer
      日本トライボロジ―学会トライボロジー会議(新潟 2016-10)
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Theoretical analysis on effects of grain size variation2016

    • Author(s)
      Libo Zhou, Yutaro Ebina, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
    • Organizer
      19th International Symposium on Advances in Abrasive Technology (ISAAT2016)
    • Place of Presentation
      Stockholm/Sweden
    • Year and Date
      2016-10-02
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Theoretical analysis on effects of grain size variation2016

    • Author(s)
      Libo Zhou, Yutaro Ebina, Ke Wu, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
    • Organizer
      19th Int’l Symposium on Advances in Abrasive Technology (ISAAT2016)
    • Place of Presentation
      Stockholm/Sweden
    • Year and Date
      2016-10-02
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] 振動援用切削によるサブミクロンスケールの表面テクスチャ加工2016

    • Author(s)
      小島純弥,渡辺康太, 山本武幸, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      日本機械学会関東支部・精密工学会 茨城講演会
    • Place of Presentation
      茨城大学(日立)
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Stress analysis of LT wafer during grinding process2016

    • Author(s)
      Wentong LU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA, Takeyuki YAMAMOTO
    • Organizer
      16th International Conference on Precision Engineering (ICPE2016)
    • Place of Presentation
      Hamamatsu/Japan
    • Year and Date
      2016-11-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] 幾何光学と波動光学の連成解析によるウェハ厚さ計測の誤差特性2016

    • Author(s)
      小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] Texturing of metal surface by using vibration-assisted microcutting2016

    • Author(s)
      Jun Shimizu, Kouta Watanabe, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
    • Organizer
      euspen's 16th International Conference & Exhibition
    • Place of Presentation
      East Midlands Conference Centre, Nottingham, UK
    • Year and Date
      2016-06-01
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] 研削シリコンウエハのナノ引っかき2016

    • Author(s)
      清水 淳,林 旺票, 周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      砥粒加工学会学術講演会
    • Place of Presentation
      兵庫県立大学(姫路)
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Cu-W電極を用いた微小放電堆積加工2016

    • Author(s)
      高濱 到,石井雅人,山本武幸,清水 淳,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      茨城大学(水戸)
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Error characteristics analyses in optical wafer-thickness measurements2016

    • Author(s)
      Teppei ONUKI, Yuki NEMOTO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
    • Organizer
      16th International Conference on Precision Engineering (ICPE2016)
    • Place of Presentation
      Hamamatsu/Japan
    • Year and Date
      2016-11-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] アルゴンガス中におけるマイクロ放電堆積に関する研究2016

    • Author(s)
      高濱 到, 山本武幸, 清水 淳, 周 立波, 小貫哲平, 尾嶌裕隆
    • Organizer
      第17回高エネ研メカ・ワークショップ
    • Place of Presentation
      高エネルギー加速器研究機構(つくば)
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Texturing of metal surface by using vibration-assisted microcutting2016

    • Author(s)
      Jun Shimizu, Kouta Watanabe, Takeyuki Yamamoto, Hirotaka Ojima, Teppei Onuki, Libo Zhou
    • Organizer
      euspen's 16th International Conference & Exhibition
    • Place of Presentation
      East Midlands Conference Centre, Nottingham, UK
    • Year and Date
      2016-06-01
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16K06000
  • [Presentation] Stress analysis of LT wafer during grinding process2016

    • Author(s)
      Wentong LU, Libo ZHOU, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA, Takeyuki YAMAMOTO
    • Organizer
      Int’l Conference on Precision Engineering (ICPE2016)
    • Place of Presentation
      Hamamatsu/Japan
    • Year and Date
      2016-11-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] Error characteristics analyses in optical wafer-thickness measurements2016

    • Author(s)
      Teppei ONUKI, Yuki NEMOTO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU
    • Organizer
      Int’l Conference on Precision Engineering (ICPE2016)
    • Place of Presentation
      Hamamatsu/Japan
    • Year and Date
      2016-11-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] 光学式ウェハ厚さ計測における測定精度特性に関する研究‐第一報‐2016

    • Author(s)
      根本祐気,小貫哲平,蛯名雄太郎,尾嶌裕隆,清水淳,周立波
    • Organizer
      精密工学会春季大会学術講演会
    • Place of Presentation
      東京理科大学野田キャンパス
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] 微小テクスチャ金型の開発とその応用(第4報) - 振動援用引っかき条件の微小化 -2016

    • Author(s)
      渡辺康太,山本武幸,清水 淳,周 立波,尾嶌裕隆,小貫哲平
    • Organizer
      精密工学会春季大会学術講演会
    • Place of Presentation
      東京理科大学(野田)
    • Year and Date
      2016-03-17
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] 振動援用引っかきによる表面微小テクスチャリング2015

    • Author(s)
      清水 淳,山本武幸,周 立波,小貫哲平,尾嶌裕隆,岡山幸洋
    • Organizer
      日本トライボロジー学会トライボロジー会議(春)
    • Place of Presentation
      姫路商工会議所
    • Year and Date
      2015-05-29
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      The 11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications (CMCEE)
    • Place of Presentation
      Vancouver, Canada
    • Year and Date
      2015-06-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Molecular dynamics simulation of relationship between friction anisotropy and atomic-scale stick-slip phenomenon2015

    • Author(s)
      Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
    • Organizer
      International Tribology Conference (ITC) 2015
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-06-16
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
    • Organizer
      International Tribology Conference 2015
    • Place of Presentation
      東京理科大学(葛飾)
    • Year and Date
      2015-09-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] イメージングウェハ厚さ全面計測技術の開発2015

    • Author(s)
      小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      第16回高エネ研メカ・ワークショップ
    • Place of Presentation
      高エネルギー加速器研究機構 つくば
    • Year and Date
      2015-04-10
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] Study on the Effects of Chemical Agents and Environment on Material Removal Rate in Sapphire Polishing2015

    • Author(s)
      Ke Wu, Naoki Yamazaki, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] Machining quality controls in ultrashort pulse laser micromachining on lithium Niobate substrates2015

    • Author(s)
      Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou, Itaru Takahama, Kazuki Kamoshida
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] ピコ秒レーザによる単結晶ダイヤモンドの精密加工 - 簡単な表面テクスチャの創成 -2015

    • Author(s)
      山本武幸,薄憲司朗,小貫哲平,尾嶌裕隆,清水 淳,周 立波
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(川内北)
    • Year and Date
      2015-09-06
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      The 11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications
    • Place of Presentation
      Vancouver, Canada
    • Year and Date
      2015-06-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] Wide range and accurate measurement of wafer thickness gauge using optical spectral analyzer2015

    • Author(s)
      Teppei Onuki, Yutaro Ebina, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Organizer
      The 18th International Symposium on Advances in Abrasive Technology (ISAAT2015)
    • Place of Presentation
      Jeju island, Korea
    • Year and Date
      2015-10-04
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015

    • Author(s)
      Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
    • Organizer
      International Tribology Conference 2015
    • Place of Presentation
      東京理科大学(葛飾)
    • Year and Date
      2015-09-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Development of Microtextured Titanium Dioxide Surface by Using Microcutting Techniques2015

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      11th International Conference on Ceramic Materials and Components for Energy and Environmental Applications
    • Place of Presentation
      Hyatt Regency, Vancouver, Canada
    • Year and Date
      2015-06-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015

    • Author(s)
      Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
    • Organizer
      International Tribology Conference (ITC) 2015
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-09-16
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] 局所圧縮静水圧場の生成を伴う切削過程の分子動力学シミュレーション - 工具形状の改良 -2015

    • Author(s)
      清水 淳,植崎圭人,馬 海東,宮田翔哉,小貫哲平,尾嶌裕隆,山本武幸,周 立波
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(川内北)
    • Year and Date
      2015-09-05
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Molecular dynamics simulation of relationship between friction anisotropy and atomic-scale stick-slip phenomenon2015

    • Author(s)
      Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] 光学式ウェハ厚さ計測における測定精度特性に関する研究‐第一報‐2015

    • Author(s)
      小貫哲平,根本祐気,蛯名雄太郎,尾嶌裕隆,清水淳,周立波
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] 光スペクトラムアナライザを用いたウェハ厚さ計測2015

    • Author(s)
      小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] Surface Texturing by Using Vibration-assisted Microscratching2015

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima, Libo Zhou
    • Organizer
      International Tribology Conference (ITC) 2015
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-09-16
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] Molecular Dynamics Simulation of Cutting Process Accompanied by a Localized Compressive Hydrostatic Stress Field Formation2015

    • Author(s)
      Keito Uezaki, Jun Shimizu, Libo Zhou, Takeyuki Yamamoto, Teppei Onuki, Hirotaka Ojima
    • Organizer
      International Tribology Conference (ITC) 2015
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2015-06-16
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] 研削シリコンウエハ加工変質層のナノインデンテーション2015

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      砥粒加工学会学術講演会
    • Place of Presentation
      慶應義塾大学(日吉)
    • Year and Date
      2015-09-10
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] Molecular Dynamics Simulation of Relationship between Friction Anisotropy and Atomic-scale Stick-slip Phenomenon2015

    • Author(s)
      Jun Shimizu, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      京都リサーチパーク
    • Year and Date
      2015-10-20
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05753
  • [Presentation] Study on the Effects of Chemical Agents and Environment on Material Removal Rate in Sapphire Polishing2015

    • Author(s)
      Ke Wu, Naoki Yamazaki, Libo Zhou, Jun Shimizu, Teppei Onuki, Hirotaka Ojima
    • Organizer
      he 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13840
  • [Presentation] 振動援用切削による表面微小テクスチャ加工2015

    • Author(s)
      渡辺康太,山本武幸,清水 淳,周 立波,小貫哲平,尾嶌裕隆
    • Organizer
      日本機械学会関東支部主催「茨城講演会」
    • Place of Presentation
      茨城大学工学部
    • Year and Date
      2015-08-28
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] Machining quality controls in ultrashort pulse laser micromachining on lithium Niobate substrates2015

    • Author(s)
      Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou, Itaru Takahama, Kazuki Kamoshida
    • Organizer
      he 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H02213
  • [Presentation] ピコ秒レーザによる単結晶ダイヤモンドの精密加工- マイクロ溝加工の検討 -2014

    • Author(s)
      山本武幸,植崎圭人,岩井俊樹,小貫哲平,清水 淳,周 立波,尾嶌裕隆
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取大学(鳥取)
    • Year and Date
      2014-09-16
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] ウェハ極薄化加工におけるオンサイト厚さ計測技術2014

    • Author(s)
      小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      第15回高エネ研メカ・ワークショップ
    • Place of Presentation
      高エネルギー加速器研究機構
    • Year and Date
      2014-04-11
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] 振動援用引っかきによる掘起しを利用した表面微小テクスチャリング2014

    • Author(s)
      清水 淳,山本武幸,周 立波,尾嶌裕隆,小貫哲平,岡山幸洋
    • Organizer
      日本トライボロジー学会トライボロジー会議(秋岩手)
    • Place of Presentation
      アイーナいわて
    • Year and Date
      2014-11-07
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry2014

    • Author(s)
      Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Organizer
      15th International Conference on Precision Engineering (ICPE2014)
    • Place of Presentation
      ホテル日航金沢
    • Year and Date
      2014-07-24
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] 薄シリコンウェハ検査における白色光干渉断層計と白色光分光厚さ計の比較検討2014

    • Author(s)
      小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] 分子動力学によるシリコンウエハ加工変質層のナノインデンテーションの解析2014

    • Author(s)
      古牧允彦,清水 淳,周 立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      砥粒加工学会学術講演会
    • Place of Presentation
      岩手大学工学部
    • Year and Date
      2014-09-11
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] 固定砥粒ダイヤモンド砥石構造のモデル化2014

    • Author(s)
      蛯名雄太郎, 周 立波, 清水 淳, 小貫哲平, 尾嶌裕隆
    • Organizer
      2014年度精密工学会春季大会
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates2013

    • Author(s)
      Teppei ONUKI, Ippei MURAYAMA, Takeyuki YAMAMOTO, Hirotaka OJIMA, Jun SHIMIZU and Libo ZHOU
    • Organizer
      Proceedings of 7th LEM21
    • Place of Presentation
      Sendai/Japan (査読有,67-70)
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] 音響浮揚の保持力の向上に関する研究2013

    • Author(s)
      稲田智広,周立波,尾嶌裕隆,小貫哲平
    • Organizer
      日本機械学会第21回茨城講演会論文集
    • Place of Presentation
      茨城大学 (181-182)
    • Year and Date
      2013-09-06
    • Data Source
      KAKENHI-PROJECT-24656094
  • [Presentation] 薄ウェハデバイス加工・検査工程の研究開発‐反射分光計測技術をベースとした検査技術‐2013

    • Author(s)
      小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      STARCワークショップ
    • Place of Presentation
      新横浜国際ホテル
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] 音響浮揚の保持能力向上に関する研究2013

    • Author(s)
      稲田智広,周立波,尾嶌裕隆,小貫哲平
    • Organizer
      第21回茨城講演会
    • Place of Presentation
      茨城大学・日立キャンパス
    • Data Source
      KAKENHI-PROJECT-24656094
  • [Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013

    • Author(s)
      蛯名雄太郎,杭偉,周立波,清水淳,小貫哲平,尾嶌裕隆,山本武幸,渡辺拓也
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Development of Areal Wavelet Transform applying to 2D image2013

    • Author(s)
      鈴木泰樹,尾嶌裕隆,周立波,清水淳,小貫哲平
    • Organizer
      2013年度精密工学会春季学術講演会国際フォーラム
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Development of Microtextured Photocatalytic Surface by Vibration-assisted Scratching2013

    • Author(s)
      Jun Shimizu, Takeyuki Yamamoto, Libo Zhou, Teppei Onuki, Hirotaka Ojima
    • Organizer
      THERMEC 2013
    • Place of Presentation
      Rio Hotel, Las Vegas, USA
    • Invited
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] 微小テクスチャ金型の開発とその応用(第3報)- 圧子の稜を用いた微小切削によるテクスチャパターンの複雑化 -2013

    • Author(s)
      山本武幸,清水 淳,周 立波,尾嶌裕隆,小貫哲平
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学(千里山)
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] 脆性強誘電体材料(LiNbO3)への非熱的レーザアブレーション微細加工技術2013

    • Author(s)
      村山一平, 小貫哲平, 尾嶌裕隆, 清水 淳, 周 立波
    • Organizer
      第14回高エネ研メカ・ワークショップ
    • Place of Presentation
      筑波
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013

    • Author(s)
      Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
    • Organizer
      Proceedings of 6th LEM21
    • Place of Presentation
      Sendai/Japan (査読有,79-84)
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] 脆性強誘電材料(LiNbO_3)への非熱的レーザアブレーション微細加工技術2013

    • Author(s)
      村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
    • Organizer
      第14回高エネ研メカ・ワークショップ
    • Place of Presentation
      筑波
    • Year and Date
      2013-04-12
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013

    • Author(s)
      村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Development of Areal Wavelet Transform applying to 2D image2013

    • Author(s)
      鈴木泰樹,尾嶌裕隆,周立波,清水淳,小貫哲平
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013

    • Author(s)
      Libo ZHOU, Yutaro EBINA, Jun SHIMIZU, Teppei ONUKI, Hirotaka OJIMA and Takeyuki YAMAMOTO
    • Organizer
      日本機械学会,6th Int’l Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Three-dimensional cutting edge distribution of abrasives on diamond grinding wheel working surface2013

    • Author(s)
      Libo Zhou, Yutaro Ebina, Jun Shimizu, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
    • Organizer
      7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      ホテル松島大観荘(宮城県)
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] ダイヤモンド砥石における砥粒切れ刃の3次元分布2013

    • Author(s)
      蛯名雄太郎,杭偉,周立波,清水淳小貫哲平,尾嶌裕隆,山本武幸,渡辺拓也
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] 化学作用援用研削の分子動力学シミュレーション-シリコンウエハ-砥粒間の凝着の影響-2013

    • Author(s)
      清水 淳, 周 立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
    • Organizer
      砥粒加工学会、ABTEC2013
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] 化学作用援用研削の分子動力学シミュレーション-シリコンウエハ/砥粒間の凝着の影響-2013

    • Author(s)
      清水淳, 周立波, 山本武幸, 尾嶌裕隆, 小貫哲平, 古牧允彦
    • Organizer
      砥粒加工学会,ABTEC2013
    • Place of Presentation
      日本大学
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] レーザアブレーション微細加工における材料除去と変質・損傷発生機構解明と制御2013

    • Author(s)
      村山一平,小貫哲平,尾嶌裕隆,清水淳,周立波
    • Organizer
      2013年度精密工学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] 反射分光式シリコンウェハ厚さ計で用いる短波長近赤外帯(SWIR)光学定数分散の検討2013

    • Author(s)
      小貫哲平、小野竜典、鈴木晃、尾嶌裕隆、清水淳、周立波
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates2013

    • Author(s)
      Teppei Onuki, Ippei Murayama, Takeyuki Yamamoto, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Organizer
      7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      ホテル松島大観荘(宮城県)
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] 掘起しの有効活用による表面微小テクスチャの創成2013

    • Author(s)
      清水 淳,山本武幸,周 立波, 尾嶌裕隆,小貫哲平
    • Organizer
      日本トライボロジー学会トライボロジー会議(秋福岡)
    • Place of Presentation
      アクロス福岡(福岡県)
    • Data Source
      KAKENHI-PROJECT-25420043
  • [Presentation] 定在音場における微粒子分級の一考案2012

    • Author(s)
      伊藤拓哉,稲田智広,牛腸広人,周立波,清水淳,小貫哲平,尾嶌裕隆
    • Organizer
      日本機械学会第9回生産加工・工作機械分門講演会
    • Place of Presentation
      秋田県立大学
    • Data Source
      KAKENHI-PROJECT-24656094
  • [Presentation] 固定砥粒によるシリコンウエハの薄片化に関する加工技術2012

    • Author(s)
      谷口博則,周立波,清水淳,小貫哲平,尾嶌裕隆,呉天旭
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県立大学
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響2012

    • Author(s)
      清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸,高野巧一郎
    • Organizer
      2012年度砥粒加工学会(ABTEC2012)
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] 音響浮揚を用いた微粒子分級法に関する研究2012

    • Author(s)
      牛腸広人,伊藤拓哉,稲田智広,周立波,清水淳,小貫哲平,尾嶌裕隆
    • Organizer
      日本機械学会第20回茨城講演会論文集
    • Place of Presentation
      茨城大学 (11-114)
    • Year and Date
      2012-08-24
    • Data Source
      KAKENHI-PROJECT-24656094
  • [Presentation] 定在音場における微粒子分級の一考案2012

    • Author(s)
      伊藤拓哉,稲田智広,牛腸広人,周立波,清水淳,小貫哲平,尾嶌裕隆
    • Organizer
      日本機械学会第9回生産加工・工作機械分門講演会論文集
    • Place of Presentation
      秋田県立大学 (265-266)
    • Year and Date
      2012-10-26
    • Data Source
      KAKENHI-PROJECT-24656094
  • [Presentation] 音響浮揚を用いた微粒子分級法に関する研究2012

    • Author(s)
      牛腸広人,伊藤拓哉,稲田智広,周立波,清水淳,小貫哲平,尾嶌裕隆
    • Organizer
      日本機械学会第20回茨城講演会
    • Place of Presentation
      茨城大学日立キャンパス
    • Data Source
      KAKENHI-PROJECT-24656094
  • [Presentation] Si ウエハ仕上げ加工に及ぼす加工変質層の影響2012

    • Author(s)
      清水淳,周立波,小貫哲平,尾嶌裕隆,山本武幸
    • Organizer
      砥粒加工学会,ABTEC2012
    • Place of Presentation
      同志社大学
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011

    • Author(s)
      J.Shimizu, W.Ohsone, H.Ojima, T.Onuki, L.Zhou, T.Yamamoto
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      Saitama, Japan
    • Year and Date
      2011-11-09
    • Data Source
      KAKENHI-PROJECT-22560134
  • [Presentation] SPMによるナノ構造の創成に関する研究-機械および電気的手法による検討-2011

    • Author(s)
      清水淳, 高野巧一郎, 尾嶌裕隆, 小貫哲平, 山本武幸, 周立波
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(角間)
    • Year and Date
      2011-09-21
    • Data Source
      KAKENHI-PROJECT-22560134
  • [Presentation] Image based defect detection Algorithm by use of wavelet transformation2011

    • Author(s)
      Kaoru TAKAMORI, Hirotaka OJIMA, Libo ZHOU, Teppei ONUKI, Jun SHIMIZU and Takeyuki YAMAMOTO
    • Organizer
      Proceedings of 6thLEM21
    • Place of Presentation
      Saitama/Japan (CD-ROM)
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] 微小切削テクスチャによる光触媒機能の向上に関する研究2011

    • Author(s)
      山本武幸, 小林剛, 清水淳, 尾嶌裕隆, 小貫哲平, 周立波
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(角間)
    • Year and Date
      2011-09-21
    • Data Source
      KAKENHI-PROJECT-22560102
  • [Presentation] Image based defect detection Algorithm by use of wavelet transformation2011

    • Author(s)
      K.TAKAMORI, H.OJIMA, L.ZHOU, T.ONUKI, J.SHIMIZU, T.YAMAMOTO
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      Saitama, Japan
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011

    • Author(s)
      J.Shimizu, W.Ohsone, H.Ojima, T.Onuki, L.Zhou, T.Yamamoto
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      Saitama, Japan
    • Year and Date
      2011-11-09
    • Data Source
      KAKENHI-PROJECT-22560102
  • [Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011

    • Author(s)
      J.SHIMIZU, W.OHSONE, H.OJIMA, T.ONUKI, L.ZHOU, T.YAMAMOTO
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      Saitama, Japan
    • Data Source
      KAKENHI-PROJECT-23360062
  • [Presentation] Radiation Cooling using Plasmon Resonant Nanostrips2010

    • Author(s)
      Teppei Onuki
    • Organizer
      5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems(IEEE-NEMS 2010)
    • Place of Presentation
      Xiamen, China
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Presentation] Rapid and Nondestructive Evaluations of Conductivity by Spectroscopic Measurements at the Plasma Edge2010

    • Author(s)
      Teppei Onuki
    • Organizer
      5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems(IEEE-NEMS 2010)
    • Place of Presentation
      Xiamen, China
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Presentation] 輻射局在成分操作による熱流制御技術の検討2009

    • Author(s)
      小貫哲平
    • Organizer
      日本機械学会マイクロ・ナノ工学専門会議主催第1回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      タワーホール船橋・東京
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Presentation] Micro blender and separator using inner-vortex of droplet induced by surface acoustic wave2009

    • Author(s)
      Takuya Sano, Teppei Onuki, Yuichirou Hamate, Maki Hohjo, Sumito Nagasawa and Hiroki Kuwano
    • Organizer
      The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 09)
    • Place of Presentation
      Denver USA
    • Year and Date
      2009-06-22
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] Controlling activated wavelength of plasmonic material2008

    • Author(s)
      Teppei Onuki
    • Organizer
      10th international conference on near-field optics, nano-photonics and related techniques (NFO10)
    • Place of Presentation
      Salguero plaza, Buenos Aires , Argentina
    • Year and Date
      2008-09-02
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 波長550nm帯用多並列フォトニック結晶波長フィルターの作製2008

    • Author(s)
      小貫哲平
    • Organizer
      応用物理学会 応用物理学関係連合講演会
    • Place of Presentation
      日本大学船橋キャンパス
    • Year and Date
      2008-03-27
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] Surface plasmon resonance sensor for microarray analyzer2008

    • Author(s)
      Teppei Onuki
    • Organizer
      The 10^<th> international conference on near-field optics, nano-photonics and related techniques (NF010)
    • Place of Presentation
      Salguero plaza, Buenos Aires .Argentina
    • Year and Date
      2008-09-04
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 多層膜型フォトニック結晶による波長フィルター2008

    • Author(s)
      大寺康夫, 小貫哲平, 川嶋貴之, 川上彰二郎
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      北九州市立大学
    • Year and Date
      2008-03-21
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] Surface plasmon resonance sensor for microarray analyzer2008

    • Author(s)
      Teppei Onuki
    • Organizer
      10th international conference on near-field optics, nano-photonics and related techniques (NFO10)
    • Place of Presentation
      Salguero plaza, Buenos Aires , Argentina
    • Year and Date
      2008-09-04
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008

    • Author(s)
      Teppei Onuki, Hiroki Kuwano
    • Organizer
      The 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications & 2nd Micro Environmental Machine Systems symposium (PowerMEMS+μEMS2008)
    • Place of Presentation
      Mediatheque Sendai
    • Year and Date
      2008-11-11
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 波長550nm帯用多並列フォトニック結晶波長フィルターの作製2008

    • Author(s)
      大寺康夫, 小貫哲平, 川嶋貴之, 川上彰二郎
    • Organizer
      応用物理学会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-27
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] Low resistive copper thin film deposited with ultra-high purity target and ECR-ion beam sputtering2008

    • Author(s)
      Teppei Onuki
    • Organizer
      The 8^<th> International Workshop onMicro and Nanotech-nology for Power Generation and Energy Conversion Applications & T^<nd> Micro Environmental Machine Systems symposium (PowerMEMS-1-gEMS2008)
    • Place of Presentation
      Mediatheque Sendai
    • Year and Date
      2008-11-11
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] MEMSスイッチによる表面弾性波制御機構の開発2008

    • Author(s)
      小貫哲平
    • Organizer
      電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-18GS0203
  • [Presentation] Controlling activated wavelength of plasmonic material2008

    • Author(s)
      Teppei Onuki
    • Organizer
      The 10^<th> international conference on near-field optics, nano-nhotonics and related techniaues (NF010)
    • Place of Presentation
      Salguero plaza, Buenos Aires, Argentina
    • Year and Date
      2008-09-02
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 自己クローニング法によるフォトニック結晶を用いた動的光学フィルター2007

    • Author(s)
      小貫哲平
    • Organizer
      電気学会 マイクロマシン・センサシステム研究会
    • Place of Presentation
      筑波大学
    • Year and Date
      2007-07-03
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 周期構造における垂直入射光線と表面プラズモンポラリトンの結合特性2007

    • Author(s)
      小貫哲平, 大寺康夫, 桑野博喜, 時崎高志
    • Organizer
      応用物理学会
    • Place of Presentation
      青山学院大学大学
    • Year and Date
      2007-03-28
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 自己クローニング法によるフォトニック結晶を用いた動的光学フィルタ2007

    • Author(s)
      長澤純人, 小貫哲平, 桑野博喜
    • Organizer
      電気学会マイクロマシン・センサシステム研究会
    • Place of Presentation
      筑波大学
    • Year and Date
      2007-07-03
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 表面弾性波を利用したマイクロ流体制御2007

    • Author(s)
      佐野拓也, 佐藤誠人, 桑野博喜, 長澤純人, 小貫哲平
    • Organizer
      マイクロマシン・センサシステム研究会
    • Place of Presentation
      筑波大学
    • Year and Date
      2007-07-03
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 分光計測用フォトニック結晶型波長フィルターの開発2006

    • Author(s)
      大寺康夫, 小貫哲平, 井上喜彦, 川上彰二郎
    • Organizer
      第38回光波センシング技術研究会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2006-12-12
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] Surface plasmon polariton around photonic bandgap for inter- photonicband swiching devices2006

    • Author(s)
      Teppei Onuki, Yasuo Ohtera, and Takashi Tokizaki
    • Organizer
      9th international conference on near-field optics, nano-photonics and related techniques (NFO9)
    • Place of Presentation
      Swiss Federal Institute of Technology Lausanne (EPFL), Switzerland
    • Year and Date
      2006-09-14
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] 格子型表面プラズモンセンサーの開発2006

    • Author(s)
      小貫哲平, 大寺康夫, 時崎高志
    • Organizer
      応用物理学会
    • Place of Presentation
      立命館大学
    • Year and Date
      2006-08-30
    • Data Source
      KAKENHI-PROJECT-18686006
  • [Presentation] Comparative Investigations of Analysis Methods in Thickness Inspections of Ultra Thin Semiconductor Wafers by Means of White Light Reflectmetry

    • Author(s)
      Teppei Onuki, Hirotaka Ojima, Jun Shimizu, Libo Zhou
    • Organizer
      15th International conference on Precision Engineering (ICPE2014)
    • Place of Presentation
      ホテル日航金沢
    • Year and Date
      2014-07-22 – 2014-07-24
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] Influence of surface integrity in silicon wafer thickness measurements by reflection spectroscopy

    • Author(s)
      Teppei Onuki, Ryusuke Ono, Hirotaka Ojima, Jun Shimizu and Libo Zhou
    • Organizer
      The 17th International Symposium on Advances in Abrasive Technology (ISAAT2014)
    • Place of Presentation
      Courtyard by Marriott King Kamehameha's Kona Beach Hotel, Kona, Hawaii Island, USA
    • Year and Date
      2014-09-22 – 2014-09-25
    • Data Source
      KAKENHI-PROJECT-25709005
  • [Presentation] 白色反射光計測によるウェハ厚さ測定における表面性状の影響

    • Author(s)
      小貫哲平、尾嶌裕隆、清水淳、周立波
    • Organizer
      第75回応用物理学会学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17 – 2014-09-20
    • Data Source
      KAKENHI-PROJECT-25709005
  • 1.  ZHOU Libo (90235705)
    # of Collaborated Projects: 15 results
    # of Collaborated Products: 230 results
  • 2.  SHIMIZU Jun (40292479)
    # of Collaborated Projects: 15 results
    # of Collaborated Products: 228 results
  • 3.  OJIMA Hirotaka (90375361)
    # of Collaborated Projects: 15 results
    # of Collaborated Products: 228 results
  • 4.  YAMAMOTO Takeyuki (40396594)
    # of Collaborated Projects: 12 results
    # of Collaborated Products: 126 results
  • 5.  KUWANO Hiroki (50361118)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 6.  NISHIZAWA Matsuhiko (20273592)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  ONO Takahito (90282095)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  ORIMO Shinichi (40284129)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  TANAKA Shuji (00312611)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  NAGASAWA Sumito (30400279)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 11.  ANBE Takashi (00333857)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  OKAMOTO Hiroshi (70455799)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 13.  CAO Ziping (90552406)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  HAMATE Yuichiro (10455800)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  OGUCHI Hiroyuki (40570908)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  金子 和暉 (60909216)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results
  • 17.  LU Wentong
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results

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