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Seike Yoshiyuki  清家 善之

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清家 善之  セイケ ヨシユキ

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Researcher Number 70584069
Affiliation (Current) 2025: 愛知工業大学, 工学部, 教授
Affiliation (based on the past Project Information) *help 2023: 愛知工業大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
Basic Section 18020:Manufacturing and production engineering-related
Keywords
Principal Investigator
スプレー / 二酸化炭素 / 深層学習 / 誘導帯電 / 洗浄 / 静電気障害 / 二流体スプレー / 半導体
  • Research Projects

    (1 results)
  • Research Products

    (12 results)
  • Co-Researchers

    (2 People)
  •  Creation of a new semiconductor device manufacturing process using inductive charging technology aimed at reducing CO2 emissionsPrincipal Investigator

    • Principal Investigator
      清家 善之
    • Project Period (FY)
      2023 – 2025
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Aichi Institute of Technology

All 2024 2023

All Journal Article Presentation

  • [Journal Article] 半導体デバイス製造に用いられる物理的なウェット洗浄2023

    • Author(s)
      清家善之
    • Journal Title

      砥粒加工学会誌

      Volume: 67 Pages: 389-392

    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Journal Article] 半導体デバイスの物理的ウエット洗浄技術2023

    • Author(s)
      清家善之
    • Journal Title

      混相流

      Volume: 32 Pages: 189-196

    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Journal Article] ESD Prevention Technology for Two-Fluid Pure Water Spray Cleaning with Controlled Electrostatic Charge2023

    • Author(s)
      Yoshiyuki Seike, Hiroharu Suzuki, Yusuke Ichino, Tatsuo Mori
    • Journal Title

      Solid State Phenomena

      Volume: 346 Pages: 244-249

    • DOI

      10.4028/p-xfxqv7

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] Control of Static Electricity Generated by Two-fluid Spray of Pure Water2024

    • Author(s)
      Yoshiyuki Seike, Hiroharu Suzuki, Yusuke Ichino, Noriyuki Taoka, Tatsuo Mori
    • Organizer
      The International Council on Electrical Engineering
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] Analysis of Charging Phenomena on Silicon Wafers with Oxide Films in Two-Fluid Spray2024

    • Author(s)
      Kousei Ito, Yuta Fukatu, Tatsuo Mori, Yusuke Ichino, Noriyuki Taoka, Yoshiyuki Seike
    • Organizer
      The International Council on Electrical Engineering
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] Electrostatic Characteristics at the Start of Two-Fluid Spray Cleaning for Semiconductors2024

    • Author(s)
      Ittetsu Watanabe, Riho Hirano, Tatsuo Mori, Yusuke Ichino, Noriyuki Taoka, Yoshiyuki Seike
    • Organizer
      The International Council on Electrical Engineering
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] 二流体スプレーの噴射開始時に発生する静電気特性2023

    • Author(s)
      渡部一哲, 一野 祐亮, 田岡 紀之, 森 竜雄, 清家 善之
    • Organizer
      応用物理学会界面ナノ電子化学研究会 第8回ポスター発表会
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] 二流体スプレー純水洗浄時に発生するシリコンウェハ表面電位の変化2023

    • Author(s)
      伊藤康生, 一野 祐亮, 田岡 紀之, 森 竜雄, 清家 善之
    • Organizer
      応用物理学会界面ナノ電子化学研究会 第8回ポスター発表会
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] 誘導帯電素子を用いた二流体スプレー時の発生電荷量の制御2023

    • Author(s)
      清家 善之, 鈴木 洋陽, 一野 祐亮, 田岡 紀之, 森 竜雄
    • Organizer
      第84回応用物理学会秋季大会
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] 深層学習を用いた純水スプレー時に発生する静電気量の推測手法の確立2023

    • Author(s)
      清家善之
    • Organizer
      第33回 RCJ信頼性シンポジウム
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] ESD Prevention Technology for Two-Fluid Pure Water Spray Cleaning with Controlled Electrostatic Charge2023

    • Author(s)
      Yoshiyuki Seike, Hiroharu Suzuki, Yusuke Ichino, Tatsuo Mori
    • Organizer
      16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K03627
  • [Presentation] Electrostatic Discharge Prevention technology in Pure Water Spray Cleaning of Semiconductor Cleaning Process Using Machine Learning2023

    • Author(s)
      Yoshiyuki Seike
    • Organizer
      The 9th Annual World Congress of Advanced Materials (WCAM-2023)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K03627
  • 1.  森 竜雄 (40230073)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 8 results
  • 2.  真田 俊之 (50403978)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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