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Shimizu Yuki  清水 裕樹

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SHIMIZU Yuki  清水 裕樹

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Researcher Number 70606384
Other IDs
Affiliation (Current) 2022: 北海道大学, 工学研究院, 教授
Affiliation (based on the past Project Information) *help 2021 – 2022: 北海道大学, 工学研究院, 教授
2015 – 2020: 東北大学, 工学研究科, 准教授
2012 – 2016: 東北大学, 工学(系)研究科(研究院), 准教授
2015: 東北大学, 大学院・工学研究科, 准教授
2013 – 2014: 東北大学, 大学院工学研究科, 准教授
2011 – 2012: 東北大学, 大学院・工学研究科, 准教授
Review Section/Research Field
Principal Investigator
Design engineering/Machine functional elements/Tribology / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Basic Section 18020:Manufacturing and production engineering-related / Production engineering/Processing studies
Except Principal Investigator
Production engineering/Processing studies / Production engineering/Processing studies / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
Keywords
Principal Investigator
精密計測 / 生産工学 / 加工学 / フェムト秒レーザ / 接触センサ / 摩擦熱 / 欠陥検出 / 熱検知素子 / 精密位置決め / 計測工学 … More / 超精密計測 / デフェクト / ウエハ検査 / FEM / 計測 / 欠陥検査 / 機械工学 / 加工計測 / トライボロジー / 熱収支場 / エンコーダ / マイクロパターン / 生産工学・加工学 / 角度センサ / サブサーフェス評価 / 熱検知センサ / 微細構造露光 / 干渉定在波 / 波面制御 … More
Except Principal Investigator
超精密計測 / 生産工学 / 加工学 / 計測 / 角度センサ / 分解能 / 形状 / 精度 / 多軸計測 / 微細格子 / 平面ステージ / 回折光 / 3軸レーザオートコリメータ / 多軸角度計測 / 回折格子 / 超精密位置決め / 角度 / 誤差 / ステージ / 超高感度 / 光 / センサ / アッベ誤差 / アッべ誤差 / レーザ / フォトダイオード / 感度 / 反射格子 / 静電気力 / プローブ顕微鏡 / 金型 / バイオオプティクス / 非接触 / 絶対距離 / マイクロ / 微細形状 / 微空間 / ナノメートル / ナノ計測 / マイクロエッジ / AFM / 反転エッジ / MDシミュレーション / アクチュエータ / 圧力センサ / FTS / ダイヤモンド工具 / 精密位置決め / 加工計測 / フェムト秒レーザ / 精密計測 / 光応用計測 / 光周波数コム / 自律校正 / 位置 / 絶対計測 Less
  • Research Projects

    (17 results)
  • Research Products

    (372 results)
  • Co-Researchers

    (9 People)
  •  その場波面制御で自在に操る干渉定在波によるサブμm級自由微細構造の大面積露光創成Principal Investigator

    • Principal Investigator
      清水 裕樹
    • Project Period (FY)
      2022 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Hokkaido University
  •  透過フェムト秒レーザ熱検知プローブによる非接触・非破壊サブサーフェス評価への挑戦Principal Investigator

    • Principal Investigator
      清水 裕樹
    • Project Period (FY)
      2020 – 2022
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      Hokkaido University
      Tohoku University
  •  光コム次元変換光学とその場自律校正法の創出によるサブアトム級3次元超精密計測

    • Principal Investigator
      高 偉
    • Project Period (FY)
      2020 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      Tohoku University
  •  A new method for precision displacement measurement based on the heat-flow detection by a micro thermal sensor combined with grating pattern structuresPrincipal Investigator

    • Principal Investigator
      Shimizu Yuki
    • Project Period (FY)
      2018 – 2019
    • Research Category
      Grant-in-Aid for Challenging Research (Exploratory)
    • Review Section
      Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
    • Research Institution
      Tohoku University
  •  Form measurement of the next-generation optical components by the dimension-conversion-type multi-beam optical angle sensor capable of detecting multiple informationPrincipal Investigator

    • Principal Investigator
      Shimizu Yuki
    • Project Period (FY)
      2018 – 2020
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      Tohoku University
  •  Nanometric surface defect inspection based on the heat flow detection and the collaborative development of a compact scale for measurement of a nanometric displacement(Fostering Joint International Research)Principal Investigator

    • Principal Investigator
      Shimizu Yuki
    • Project Period (FY)
      2017 – 2019
    • Research Category
      Fund for the Promotion of Joint International Research (Fostering Joint International Research)
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Tohoku University
  •  次世代の超精密ナノ計測を実現する光ナノグリッド基準の自律校正Host Researcher

    • Host Researcher
      清水 裕樹
    • Project Period (FY)
      2016 – 2018
    • Research Category
      Grant-in-Aid for JSPS Fellows
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  Development of an optical method for evaluation of three-dimensional tool edge form with a high resolution beyond the diffraction limitPrincipal Investigator

    • Principal Investigator
      Shimizu Yuki
    • Project Period (FY)
      2015 – 2016
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  Defect detection for next-generation smoothly finished substrates based on a heat balance generated at a tiny gapPrincipal Investigator

    • Principal Investigator
      Shimizu Yuki
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Tohoku University
  •  Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb

    • Principal Investigator
      Gao Wei
    • Project Period (FY)
      2015 – 2019
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  2軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出

    • Principal Investigator
      高 偉
    • Project Period (FY)
      2015 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond tool

    • Principal Investigator
      Gao Wei
    • Project Period (FY)
      2014 – 2015
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  Defect detection method utilizing micro-thermal balance at the nanometric gap for nanometric-smooth surface inspectionPrincipal Investigator

    • Principal Investigator
      SHIMIZU Yuki
    • Project Period (FY)
      2013 – 2014
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Tohoku University
  •  Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage

    • Principal Investigator
      GAO Wei
    • Project Period (FY)
      2012 – 2014
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-optics

    • Principal Investigator
      GAO WEI
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University
  •  Development of the thermal contact sensor for inspection of defects on wafer surfacePrincipal Investigator

    • Principal Investigator
      SHIMIZU Yuki
    • Project Period (FY)
      2011 – 2012
    • Research Category
      Grant-in-Aid for Research Activity Start-up
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Tohoku University
  •  XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beams

    • Principal Investigator
      GAO Wei
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      Tohoku University

All 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 Other

All Journal Article Presentation Book Patent

  • [Book] Unlicensed Published by De Gruyter 2022 Optical Metrology for Precision Engineering2021

    • Author(s)
      Wei Gao and Yuki Shimizu
    • Total Pages
      644
    • Publisher
      Walter de Gruyter GmbH 2022
    • ISBN
      9783110541090
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Book] (Book chapter)モード同期レーザを用いた共焦点プローブ-非走査測定と高分解能の両立-2020

    • Author(s)
      佐藤 遼,清水 裕樹,仲村 拓,松隈 啓,高 偉
    • Total Pages
      5
    • Publisher
      日本工業出版
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] 機械工学年鑑2020 (15. 加工学・加工機器 15.8 加工計測)2020

    • Author(s)
      清水裕樹
    • Publisher
      日本機械学会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Book] Metrology (Ch.18: Contact-type micro thermal sensor for surface defect detection)2019

    • Author(s)
      Yuki Shimizu
    • Total Pages
      24
    • Publisher
      Springer
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Book] 光技術コンタクト(Book chapter) 微細光学表面計測用プローブ顕微鏡技術2019

    • Author(s)
      松隈 啓,清水裕樹,高 偉
    • Total Pages
      5
    • Publisher
      一般社団法人日本オプトメカトロニクス協会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] Metrology (Book Chapter) Chapter 16 Contact-Type Micro Thermal Sensor for Surface Defect Detection2019

    • Author(s)
      Yuki Shimizu
    • Total Pages
      15
    • Publisher
      Springer Singapore
    • ISBN
      9789811049378
    • Data Source
      KAKENHI-PROJECT-18K18798
  • [Book] (Book chapter) Handbook of Manufacturing, "Chapter 10"2019

    • Author(s)
      Yuki Shimizu, So Ito, Jungchul Lee, Shigeaki Goto, Hiraku Matsukuma, and Wei Gao
    • Total Pages
      28
    • Publisher
      World Scientific
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] 高精度走査プローブ顕微鏡技術2018

    • Author(s)
      清水 裕樹,松隈 啓,高 偉
    • Total Pages
      3
    • Publisher
      先端加工機械技術振興協会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] (Book chapter) 機械の研究「長ストロークステージ向けの精密姿勢角センサの開発」2016

    • Author(s)
      清水裕樹, 石川龍弥, 片岡智史, 陳遠流, 伊東聡, 高偉
    • Total Pages
      7
    • Publisher
      養賢堂
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] (Book chapter) 機械技術「高機能高速工具サーボによる3次元微細形状加工技術のイノベーション」2016

    • Author(s)
      清水裕樹, 陳遠流, 盧泳辰, 伊東聡, 高偉
    • Total Pages
      5
    • Publisher
      日刊工業新聞社
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] (Book chapter) 機械設計「精密位置決めにおける多軸センサの活用」2016

    • Author(s)
      伊東聡,清水裕樹,高偉
    • Total Pages
      6
    • Publisher
      日刊工業新聞社
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] (Book chapter) 光学「精密測定機・加工機向け光学式エンコーダ―技術」2015

    • Author(s)
      李星輝, 清水裕樹, 高偉
    • Total Pages
      34
    • Publisher
      日本光学会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] (Book chapter) 自動化推進「光学式超精密多軸位置決めセンサ」2015

    • Author(s)
      高偉, 清水裕樹, 伊東聡, 陳遠流
    • Total Pages
      24
    • Publisher
      JAAA自動化推進協会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Book] (Chapter) 精密位置決めのための角度センサ活用2014

    • Author(s)
      清水裕樹,伊東聡,高偉
    • Total Pages
      7
    • Publisher
      日刊工業新聞
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] An insight on optical metrology in manufacturing2021

    • Author(s)
      Shimizu Yuki、Chen Liang Chia、Kim Dae Wook、Chen Xiuguo、Li Xinghui、Matsukuma Hiraku
    • Journal Title

      Measurement Science and Technology

      Volume: 32 Pages: 042003-042003

    • DOI

      10.1088/1361-6501/abc578

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01345, KAKENHI-PROJECT-20H00211
  • [Journal Article] A technique for measurement of a prism apex angle by optical angle sensors with a reference artefact2021

    • Author(s)
      Shimizu Yuki、Ma Xu、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Measurement Science and Technology

      Volume: 32 Pages: 054007-054007

    • DOI

      10.1088/1361-6501/abd8a6

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer2021

    • Author(s)
      Xiong Xin、Quan Lue、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Measurement Science and Technology

      Volume: 32 Pages: 064005-064005

    • DOI

      10.1088/1361-6501/abe9de

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor2021

    • Author(s)
      Quan Lue、Shimizu Yuki、Xiong Xin、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Precision Engineering

      Volume: 67 Pages: 1-13

    • DOI

      10.1016/j.precisioneng.2020.09.008

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021

    • Author(s)
      Shimizu Yuki、Quan Lue、Shin Dong Wook、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Measurement: Sensors

      Volume: 18 Pages: 100135-100135

    • DOI

      10.1016/j.measen.2021.100135

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source2021

    • Author(s)
      Matsukuma Hiraku、Department of Finemechanics, Tohoku University 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan、Sato Ryo、Shimizu Yuki、Gao Wei
    • Journal Title

      Int. J. Automation Technol.

      Volume: 15 Issue: 4 Pages: 529-536

    • DOI

      10.20965/ijat.2021.p0529

    • NAID

      130008062461

    • ISSN
      1881-7629, 1883-8022
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20H00211, KAKENHI-PROJECT-21J20652
  • [Journal Article] A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer2021

    • Author(s)
      Xiong Xin、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Sensors

      Volume: 21 Pages: 7412-7412

    • DOI

      10.3390/s21217412

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] An absolute surface encoder with a planar scale grating of variable periods2021

    • Author(s)
      Shimizu Yuki、Ishizuka Ryo、Mano Kazuki、Kanda Yuri、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Precision Engineering

      Volume: 67 Pages: 36-47

    • DOI

      10.1016/j.precisioneng.2020.09.007

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors2021

    • Author(s)
      Matsukuma Hiraku、Adachi Keisuke、Sugawara Takuma、Shimizu Yuki、Gao Wei、Niwa Eiji、Sasaki Yoshihiro
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 4 Pages: 53-66

    • DOI

      10.1007/s41871-020-00091-2

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology2021

    • Author(s)
      Shimizu Yuki
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 4 Pages: 3-27

    • DOI

      10.1007/s41871-020-00083-2

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20K20953, KAKENHI-PROJECT-20H00211
  • [Journal Article] An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope2021

    • Author(s)
      Zhang Kai、Shimizu Yuki、Matsukuma Hiraku、Cai Yindi、Gao Wei
    • Journal Title

      The International Journal of Advanced Manufacturing Technology

      Volume: 117 Pages: 2883-2893

    • DOI

      10.1007/s00170-021-07879-6

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool2021

    • Author(s)
      Wen Bo、Sekine Sho、Osawa Shinichi、Shimizu Yuki、Matsukuma Hiraku、Archenti Andreas、Gao Wei
    • Journal Title

      Machines

      Volume: 9 Pages: 271-271

    • DOI

      10.3390/machines9110271

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Measurement of the apex angle of a small prism by an oblique-incidence mode-locked femtosecond laser autocollimator2021

    • Author(s)
      Shimizu Yuki、Kanda Yuri、Ma Xu、Ikeda Kakeru、Matsukuma Hiraku、Nagaike Yasunari、Hojo Masaki、Tomita Keita、Gao Wei
    • Journal Title

      Precision Engineering

      Volume: 67 Pages: 339-349

    • DOI

      10.1016/j.precisioneng.2020.10.013

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation2021

    • Author(s)
      Dwi Astuti Wijayanti、Matsukuma Hiraku、Nakao Masaru、Li Kuangyi、Shimizu Yuki、Gao Wei
    • Journal Title

      Sensors

      Volume: 21 Pages: 670-670

    • DOI

      10.3390/s21020670

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] DEVELOPMENT OF AN OPTICAL ANGLE SENSOR WITH A MODE-LOCKED FEMTOSECOND LASER SOURCE FOR SURFACE PROFILE MEASUREMENT2020

    • Author(s)
      Yuki Shimizu, Shota Takazono, Hiraku Marsukuma, Hajime Inaba, Wei Gao
    • Journal Title

      Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing LEMP2020

      Volume: in press

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Journal Article] Optical Angle Sensor Technology Based on the Optical Frequency Comb Laser2020

    • Author(s)
      Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Pages: 4047-4047

    • DOI

      10.3390/app10114047

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] A differential strategy for measurement of a static force in a single point diamond cutting by a force‐controlled fast tool servo2020

    • Author(s)
      Bo Wen, Yuki Shimizu, Hiraku Matsukuma, Keisuke Tohyama, Haruki Kurita, Yuan-Liu Chen, Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: -

    • DOI

      10.1088/1361-6501/ab7d6f

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Fabrication of a Two-dimensional Diffraction Grating with Isolated Photoresist Pattern Structures2020

    • Author(s)
      Hiraku Matsukuma, Masanori Matsunaga, Kai Zhang, Yuki Shimizu and Wei Gao
    • Journal Title

      International Journal of Automation Technology

      Volume: -

    • NAID

      130007869728

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020

    • Author(s)
      Shimizu Yuki、Gao Wei、Matsukuma Hiraku、Szipka Karoly、Archenti Andreas
    • Journal Title

      CIRP Annals

      Volume: 69 Pages: 469-472

    • DOI

      10.1016/j.cirp.2020.03.011

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement2020

    • Author(s)
      Matsukuma Hiraku、Wen Bo、Osawa Shinichi、Sekine Sho、Shimizu Yuki、Gao Wei
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 3 Pages: 282-291

    • DOI

      10.1007/s41871-020-00084-1

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Measurement Uncertainty Analysis of a Stitching Linear-Scan Method for the Evaluation of Roundness of Small Cylinders2020

    • Author(s)
      Li Qiaolin、Shimizu Yuki、Saito Toshiki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Pages: 4750-4750

    • DOI

      10.3390/app10144750

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact2020

    • Author(s)
      Zhang Kai、Cai Yindi、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Pages: 4799-4799

    • DOI

      10.3390/app10144799

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer2020

    • Author(s)
      Xin Xiong, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: -

    • DOI

      10.1088/1361-6501/ab8b83

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Development of an Optical Angle Sensor With a Mode-Locked Femtosecond Laser Source for Surface Profile Measurement2020

    • Author(s)
      Shimizu Yuki、Takazono Shota、Kanda Yuri、Matsukuma Hiraku、Gao Wei、Inaba Hajime
    • Journal Title

      Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)

      Volume: -

    • DOI

      10.1115/lemp2020-8501

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Journal Article] A new signal processing method for a differential chromatic confocal probe with a modelocked femtosecond laser2020

    • Author(s)
      Ryo Sato, Chong Chen, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: -

    • DOI

      10.1088/1361-6501/ab8905

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] PROFILE MEASUREMENT BY USING A FEMTOSECOND LASER CHROMATIC CONFOCAL PROBE2020

    • Author(s)
      Ryo Sato, Yuki Shimizu, Hiraku Marsukuma, Wei Gao
    • Journal Title

      Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing LEMP2020

      Volume: -

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] An Off-Axis Differential Method for Improvement of a Femtosecond Laser Differential Chromatic Confocal Probe2020

    • Author(s)
      Chen Chong、Shimizu Yuki、Sato Ryo、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Pages: 7235-7235

    • DOI

      10.3390/app10207235

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit2020

    • Author(s)
      Bo Wen, Yuki Shimizu, Yu Watanabe, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Precision Engineering

      Volume: -

    • DOI

      10.1016/j.precisioneng.2020.03.014

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020

    • Author(s)
      Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)

      Volume: -

    • DOI

      10.1115/lemp2020-8626

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Journal Article] Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings2019

    • Author(s)
      Yuki Shimizu, Kazuki Mano, Hiroki Murakami, Shunsuke Hirota, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Precision Engineering

      Volume: 60 Pages: 280-290

    • DOI

      10.1016/j.precisioneng.2019.07.022

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] On-machine angle measurement of a precision V-groove on a ceramic workpiece2019

    • Author(s)
      Yuki Shimizu, Wei Gao, Hiraku Matsukuma, K?roly Szipka, Andreas Archenti
    • Journal Title

      CIRP Annals-Manufacturing Technology

      Volume: 69-1

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Integration of a CrN Thin Film Displacement Sensor into an XY Micro stage for Closed?Loop Nano positioning2019

    • Author(s)
      Keisuke Adachi, Hiraku Matsukuma, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: In press Pages: 131-139

    • DOI

      10.1007/s41871-019-00040-8

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors2019

    • Author(s)
      Yuki Shimizu,Hiraku Matsukuma,Wei Gao
    • Journal Title

      Sensors

      Volume: 19-23 Pages: 5289-5289

    • DOI

      10.3390/s19235289

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-16KK0119
  • [Journal Article] Analysis of temperature influence on a chromatic confocal probe with a mode-locked femtosecond laser2019

    • Author(s)
      Ryo Sato, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
    • Journal Title

      Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)

      Volume: 1

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Investigation and Improvement of Thermal Stability of a Chromatic Confocal Probe with a Mode-Locked Femtosecond Laser Source2019

    • Author(s)
      Ryo Sato,Yuki Shimizu,Chong Chen,Hiraku Matsukuma,Wei Gao
    • Journal Title

      Applied Sciences

      Volume: 9-19 Pages: 4084-4084

    • DOI

      10.3390/app9194084

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] An Optical Angle Sensor Based on the Laser Autocollimation employing a Mode-locked Femtosecond Laser Source and a Single Mode Fiber Detector2019

    • Author(s)
      Shota Takazono, Yuki Shimizu, Hiraku Matsukuma, Yuri Kanda, Hajime Inaba and Wei Gao
    • Journal Title

      Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)

      Volume: 1

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Journal Article] A New Optical Angle Measurement Method Based on Second Harmonic Generation with a Mode-Locked Femtosecond Laser2019

    • Author(s)
      Hiraku Matsukuma, Shuhei Madokoro, Wijayanti Dwi Astuti, Yuki Shimizu, and Wei Gao
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 2 Pages: 187-198

    • DOI

      10.1007/s41871-019-00052-4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19K14857, KAKENHI-PROJECT-15H05759
  • [Journal Article] Reduction in Cross Talk Errors in a Six Degree of Freedom Surface Encoder2019

    • Author(s)
      Hiraku Matsukuma, Ryo Ishizuka, Masaya Furuta, Xinghui Li, Yuki Shimizu, Wei Gao
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 2-2 Pages: 111-123

    • DOI

      10.1007/s41871-019-00039-1

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Accurate polarization control in nanorthogonal two-axis Lloyd's mirror interferometer for fabrication of two-dimensional scale gratings2019

    • Author(s)
      Yuki Shimizu, Kazuki Mano, Kai Zhang, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Optical Engineering

      Volume: 58-9 Pages: 92611-92611

    • DOI

      10.1117/1.oe.58.9.092611

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] A PD-edge method associated with the laser autocollimation for measurement of a focused laser beam diameter2018

    • Author(s)
      Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan-Liu Chen, Hiraku Matsukuma and Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: 29

    • DOI

      10.1088/1361-6501/aac0a6

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface2018

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Yuan-Liu Chen, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 1

    • DOI

      10.1007/s41871-018-0007-x

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Journal Article] Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings2018

    • Author(s)
      Yuki Shimizu, Ryo Aihara, Kazuki Mano, Chong Chen, Yuanliu Chen, Xiuguo Chen, Wei Gao
    • Journal Title

      Precision Engineering

      Volume: in press

    • DOI

      10.1016/j.precisioneng.2017.12.004

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration2018

    • Author(s)
      Xin Xiong, Yuki Shimizu, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
    • Journal Title

      Applied Sciences

      Volume: 9

    • DOI

      10.3390/app8122539

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions2018

    • Author(s)
      Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
    • Journal Title

      Sensors

      Volume: 18

    • DOI

      10.3390/s18020398

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Theoretical calculation of the reading output from a micro thermal sensors for precision positioning2018

    • Author(s)
      Yuki Shimizu, Ayaka Ishida, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

      Volume: - Pages: 24-25

    • Data Source
      KAKENHI-PROJECT-18K18798
  • [Journal Article] Error separation method for precision measurement of the Run-Out of a microdrill bit by using a laser scan micrometer measurement system2018

    • Author(s)
      Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu, Hiraku Matsukuma, and Wei Gao
    • Journal Title

      Journal of Manufacturing and Materials Processing

      Volume: 2

    • DOI

      10.3390/jmmp2010004

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Generalized method for probing ideal initial polarization states in multibeam Lloyd’s mirror interference lithography of 2D scale gratings2018

    • Author(s)
      Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Wei Gao
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 36

    • DOI

      10.1116/1.5016505

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement2018

    • Author(s)
      Yuan-Liu Chen, Yanhao Xu, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: 29

    • DOI

      10.1088/1361-6501/aab998

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam2018

    • Author(s)
      Yuki SHIMIZU, Kentaro UEHARA, Hiraku MATSUKUMA and Wei GAO
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 12(5) Issue: 5 Pages: JAMDSM0097-JAMDSM0097

    • DOI

      10.1299/jamdsm.2018jamdsm0097

    • NAID

      130007499852

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Laser autocollimation based on an optical frequency comb for absolute angular position measurement2018

    • Author(s)
      Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Kazuki Nakamura, Hiraku Matsukuma, Xiuguo Chen, and WeiGao
    • Journal Title

      Precision Engineering

      Volume: 54 Pages: 284-293

    • DOI

      10.1016/j.precisioneng.2018.06.005

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] An optical angle sensor based on chromatic dispersion with a mode-locked laser source2018

    • Author(s)
      Yuki SHIMIZU, Shuhei MADOKORO, Hiraku MATSUKUMA and Wei GAO
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 12(5) Issue: 5 Pages: JAMDSM0096-JAMDSM0096

    • DOI

      10.1299/jamdsm.2018jamdsm0096

    • NAID

      130007498573

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges2018

    • Author(s)
      Yindi Cai, Yuan-Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma and Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: 29

    • DOI

      10.1088/1361-6501/aaa913

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] A stitching linear-scan method for roundness measurement of small cylinders2018

    • Author(s)
      Yuan-Liu Chen, Yuki Machida, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Journal Title

      CIRP Annals-Manufacturing Technology

      Volume: 67(1) Pages: 535-538

    • DOI

      10.1016/j.cirp.2018.04.009

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe2018

    • Author(s)
      Chong Chen, Ryo Sato, Yuki Shimizu, Taku Nakamura, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Applied Sciences

      Volume: 9

    • DOI

      10.3390/app9030454

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] A chromatic confocal probe with a mode-locked femtosecond laser source2018

    • Author(s)
      Xiuguo Chen, Taku Nakamura, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Optics and Laser Technology

      Volume: 103 Pages: 359-366

    • DOI

      10.1016/j.optlastec.2018.01.051

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Feasibility study on a compact encoder system employing a micro thermal sensor head for precision positioning2018

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Ayaka Ishida, Hiraku Matsukuma, Wei Gao
    • Journal Title

      Proceedings of the 17th International Conference on Precision Engineering, ICPE2018

      Volume: -

    • Data Source
      KAKENHI-PROJECT-18K18798
  • [Journal Article] Optimal polarization modulation for orthogonal two-axis Lloyd's mirror interference lithography2017

    • Author(s)
      Xiuguo Chen, Zongwei Ren, Yuki Shimizu, Yuan-Liu Chen, and Wei Gao
    • Journal Title

      Optics Express

      Volume: 25 Pages: 22237-22252

    • DOI

      10.1364/oe.25.022237

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Non-contact detection of surface defects by using a micro thermal sensor2017

    • Author(s)
      Yuki Shimizu, Yuki Matsuno Yuan-Liu Chen and Wei Gao
    • Journal Title

      Proceedings of the 13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2017)

      Volume: -

    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Journal Article] Uncertainty analysis in the evaluation of pitch deviation and out-of-flatness of planar scale gratings by Fizeau interferometry2017

    • Author(s)
      Xiuguo Chen, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
    • Journal Title

      Proceedings of the 13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2017)

      Volume: -

    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16F16367
  • [Journal Article] An edge reversal method for precision measurement of cutting edge radius of single point diamond tools2017

    • Author(s)
      Yuan-Liu Chen, Yindi Cai, Malu Xu, Yuki Shimizu, So Ito and Wei Gao
    • Journal Title

      Precision Engineering

      Volume: 50 Pages: 380-387

    • DOI

      10.1016/j.precisioneng.2017.06.012

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Precision Measurement of Z -Slide Vertical Error Motion of an Ultra-Precision Lathe by Using Three-probe Method2017

    • Author(s)
      Zengyuan Niu, Yuan-Liu Chen, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeong Seok Oh and Chun Hong Park
    • Journal Title

      International Journal of Precision Engineering and Manufacturing

      Volume: 18 Pages: 651-660

    • DOI

      10.1007/s12541-017-0078-4

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high rigidity force controlled fast tool servo2017

    • Author(s)
      Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
    • Journal Title

      Precision Engineering

      Volume: In press

    • DOI

      10.1016/j.precisioneng.2017.02.014

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
  • [Journal Article] Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup2017

    • Author(s)
      Xiuguo Chen, Yuki Shimizu, Xin Xiong, Yuan-Liu Chen AND Wei Gao
    • Journal Title

      Optics Express

      Volume: 25 Pages: 21567-21582

    • DOI

      10.1364/oe.25.021567

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Design and testing of a micro thermal sensor for non-contact surface defect detection2017

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Yuan-Liu Chen and Wei Gao
    • Journal Title

      International Journal of Automation Technology

      Volume: -

    • NAID

      130007505955

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Journal Article] Implementation and verification of a four-probe motion error measurement system for a large-scale roll lathe used in hybrid manufacturing2017

    • Author(s)
      Yuan-Liu Chen, Zengyuan Niu, Daiki Matsuura, Jung Chul Lee, Yuki Shimizu, Wei Gao, Jeong Seok Oh and Chun Hong Park
    • Journal Title

      Measurement Science and Technology

      Volume: 28

    • DOI

      10.1088/1361-6501/aa7d33

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Optical frequency domain angle measurement in a femtosecond laser autocollimator2017

    • Author(s)
      Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura and Wei Gao
    • Journal Title

      Optics Express

      Volume: 25 Pages: 16725-16738

    • DOI

      10.1364/oe.25.016725

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Polarization ray-tracing model for orthogonal two-axis Lloyd’s mirror interference2017

    • Author(s)
      Xiuguo Chen, Zongwei Ren, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
    • Journal Title

      Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century

      Volume: -

    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16F16367
  • [Journal Article] EVALUATION OF A FOCUSED LASER SPOT DIAMETER FOR AN OPTICAL ANGLE SENSOR2017

    • Author(s)
      Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan-Liu Chen, Wei Gao
    • Journal Title

      Engineering for a Changing World

      Volume: 59

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Journal Article] An optical lever by using a mode-locked laser for angle measurement2017

    • Author(s)
      Yuki Shimizu, Yukitoshi Kudo, Yuan-Liu Chen, So Ito, Wei Gao
    • Journal Title

      Precision Engieering

      Volume: 47 Pages: 72-80

    • DOI

      10.1016/j.precisioneng.2016.07.006

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer2016

    • Author(s)
      YUKI SHIMIZU, RYO AIHARA, ZONGWEI REN, YUAN-LIU CHEN, SO ITO, AND WEI GAO
    • Journal Title

      Optics EXPRESS

      Volume: 24 Pages: 27521-27535

    • DOI

      10.1364/oe.24.027521

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact2016

    • Author(s)
      Y. L. Chen, Y. Cai, Y. Shimizu, S. Ito, W. Gao, B. F. Ju
    • Journal Title

      Precision Engineering

      Volume: 43 Pages: 462-467

    • DOI

      10.1016/j.precisioneng.2015.09.011

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
  • [Journal Article] Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting2016

    • Author(s)
      Y. Cai, Y. L. Chen, Y. Shimizu, S. Ito, W. Gao
    • Journal Title

      Applied Surface Science

      Volume: 369 Pages: 354-365

    • DOI

      10.1016/j.apsusc.2016.02.046

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
  • [Journal Article] Characterization of a micro thermal sensor for surface defect inspection2016

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Yuan-Liu Chen, Wei Gao
    • Journal Title

      Proceedings of the 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2016)

      Volume: In Press

    • Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Journal Article] Determination of the zero-position for an optical angle sensor2016

    • Author(s)
      Jun TAMADA, Yukitoshi KUDO, Yuan-Liu CHEN, Yuki SHIMIZU and Wei GAO
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 10 Issue: 5 Pages: 1-10

    • DOI

      10.1299/jamdsm.2016jamdsm0072

    • NAID

      130005266534

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-24226004
  • [Journal Article] 超精密形状計測加工システム-ダイヤモンド切削工具の機上ナノ計測-2016

    • Author(s)
      清水裕樹、陳遠流、張城豪、伊東聡、高偉
    • Journal Title

      機械技術

      Volume: In Press

    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Journal Article] Micro thermal sensor for nanometric surface defect inspection2016

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Yuan-Liu Chen, Wei Gao
    • Journal Title

      Proceedings of the 16th INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE NANO 2016)

      Volume: In Press

    • Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Journal Article] Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions2016

    • Author(s)
      Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan-Liu Chen, Wei Gao
    • Journal Title

      Optics Express

      Volume: 24 Pages: 2788-2805

    • DOI

      10.1364/oe.24.002788

    • Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Computer simulation on the optical configuration of an ultra-sensitive angle sensor based on laser autocollimation2016

    • Author(s)
      Yuki SHIMIZU, Taiji MARUYAMA, Yuan-Liu CHEN, So ITO and Wei GAO
    • Journal Title

      Proceedings of the 16th International Conference on Precision Engineering (ICPE2016)

      Volume: -

    • Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Journal Article] Development of a Non-contact-type Thermal Sensor for Surface Defect Inspection2016

    • Author(s)
      Yuki MATSUNO, Yuki SHIMIZU, Wei GAO
    • Journal Title

      Proceedings of the 7th International Conference on Positioning Technology (ICPT2016)

      Volume: -

    • Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Journal Article] Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer2016

    • Author(s)
      Yindi CAI, Xinghui LI, Ryo AIHARA, Ren ZONGWEI, Yuki SHIMIZU, So ITO and Wei GAO
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 10 Issue: 5 Pages: JAMDSM0080-JAMDSM0080

    • DOI

      10.1299/jamdsm.2016jamdsm0080

    • NAID

      130005266659

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] A highly stable noncontact SPM for surface profile measurement and its application to insulating samples2016

    • Author(s)
      Shigeaki GOTO, Minglei LI, So ITO, Yuki SHIMIZU and Wei GAO
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 10 Issue: 5 Pages: JAMDSM0081-JAMDSM0081

    • DOI

      10.1299/jamdsm.2016jamdsm0081

    • NAID

      130005266667

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Design and testing of an optical configuration for multi-dimensional measurement of a diamond cutting tool2016

    • Author(s)
      Yuki Shimizu, SungHo Jang, Wei Gao
    • Journal Title

      Measurement

      Volume: In Press

    • DOI

      10.1016/j.measurement.2015.11.040

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Journal Article] Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool2016

    • Author(s)
      Yuan-Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Ju
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 26 Pages: 025002-025002

    • DOI

      10.1088/0960-1317/26/2/025002

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
  • [Journal Article] Mode-locked laser autocollimator with an expanded measurement range2016

    • Author(s)
      Yuan-Liu Chen, Yuki Shimizu, Yukitoshi Kudo, So Ito and Wei Gao
    • Journal Title

      Optics EXPRESS

      Volume: 24 Pages: 15554-15569

    • DOI

      10.1364/oe.24.015554

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Journal Article] Multi-dimensional measurement of tool edge geometry with an optical probe2016

    • Author(s)
      Yuki Shimizu, Shota Nakagawa, SungHo Jang, Yuan-Liu Chen, So Ito, and Wei Gao
    • Journal Title

      Proceedings of The 5th International Conference on Nanomanufacturing

      Volume: 1

    • Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Journal Article] Molecular dynamics simulation of elastic-plastic deformation associated with tool-workpiece contact in force sensor-integrated fast tool servo2016

    • Author(s)
      Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito and Wei Gao
    • Journal Title

      Journal of Engineering Manufacture

      Volume: - Pages: 1-10

    • DOI

      10.1177/0954405416673116

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-15H05759, KAKENHI-PROJECT-15F15060
  • [Journal Article] An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor2015

    • Author(s)
      Yuan-Liu Chen, Shu Wang, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Jub
    • Journal Title

      Precision Engineering

      Volume: 39 Pages: 134-142

    • DOI

      10.1016/j.precisioneng.2014.08.001

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Journal Article] Design of a Laser Autocollimator-based Optical Sensor with a Rangefinder for Error Correction of Precision Slide Guideways2015

    • Author(s)
      Siew Leng Tan, Yuki Shimizu, Takayuki Meguro, So Ito, and Wei Gao
    • Journal Title

      INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING

      Volume: 16-3 Pages: 423-431

    • DOI

      10.1007/s12541-015-0058-5

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] Investigation on Sensitivity of a Contact-Type Thermal Sensor for Surface Defect Inspections2015

    • Author(s)
      Yuki Shimizu, Yuta Ohba, Wei Gao
    • Journal Title

      International Journal of Automation Technology

      Volume: 9-3 Pages: 1-6

    • NAID

      130007674118

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Journal Article] Self-evaluation of the cutting edge contour of a micro diamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe. International2015

    • Author(s)
      Y.L. Chen, S. Wang, Y. Shimizu, S. Ito, W. Gao, B.F. Ju
    • Journal Title

      Journal of Advanced Manufacturing Technology

      Volume: 77 Pages: 2257-2267

    • DOI

      10.1007/s00170-014-6580-2

    • Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15F15060, KAKENHI-PROJECT-26630015
  • [Journal Article] A two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional diffraction gratings2014

    • Author(s)
      Xinghui Li, Wei Gao, Yuki Shimizu, So Ito
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 63 Pages: 461-464

    • DOI

      10.1016/j.cirp.2014.02.001

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] Drift reduction in a scanning electrostatic force microscope for surface profile measurement2014

    • Author(s)
      Zhigang Jia, So Ito, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: (In press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] Feasibility study on the concept of thermal contact sensor for nanometre-level defectinspections on smooth surfaces2014

    • Author(s)
      Yuki Shimizu, Wenjian Lu, Yuta Ohba and Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: 25 Pages: 1-11

    • DOI

      10.1088/0957-0233/25/6/064006

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Journal Article] Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder2014

    • Author(s)
      Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, and Wei Gao
    • Journal Title

      Optical Engineering, 53(12), 122405.

      Volume: 53

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] Feasibility study on the concept of thermal contact sensor for nanometre-level defect inspections on smooth surfaces2014

    • Author(s)
      Yuki Shimizu, Wenjian Lu, Yuta Ohba and Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: 25

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Journal Article] Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating2014

    • Author(s)
      Yuki Shimizu, Takeshi Ito, Xinghui Li, WooJae Kim and Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: 25

    • DOI

      10.1088/0957-0233/25/9/094002

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] Design of fabrication process of a thermal contact sensor for surface defect inspection2014

    • Author(s)
      Yuki Shimizu, Yuta Ohba and Wei Gao
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 8-4 Issue: 4 Pages: 1-14

    • DOI

      10.1299/jamdsm.2014jamdsm0052

    • NAID

      130004705818

    • ISSN
      1881-3054
    • Language
      English
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Journal Article] A micro optical probe for edge contour evaluation of diamond cutting tools2014

    • Author(s)
      S.H. Jang, Y. Shimizu, S. Ito and W. Gao
    • Journal Title

      Journal of Sensors and Senosr Systems

      Volume: 3 Pages: 69-76

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] A measurement method of cutting tool position for relay fabrication of microstructured surface2014

    • Author(s)
      Yuan-Liu Chen, Wei Gao, Bing-Feng Ju, Yuki Shimizu, So Ito
    • Journal Title

      Measurement Science and Technology

      Volume: 25 Pages: 064018-064018

    • DOI

      10.1088/0957-0233/25/6/064018

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Journal Article] Three-axis vibration measurement by using a grating-interferometric vibrometer2014

    • Author(s)
      So Ito, Ryo Aihara, Woo Jae Kim, Yuki Shimizu and Wei Gao
    • Journal Title

      Advanced Optical Technologies

      Volume: 3 Pages: 435-440

    • DOI

      10.1515/aot-2014-0028

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] Drift reduction in a scanning electrostatic force microscope for surface profile measurement2014

    • Author(s)
      Zhigang Jia, So Ito, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizua, and Wei Gao
    • Journal Title

      Measurement Science and Technology

      Volume: 25

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface2013

    • Author(s)
      Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
    • Journal Title

      International Journal of Precision Engineering and Manufacturing

      Volume: Vol. 14 Pages: 1543-1549

    • DOI

      10.1007/s12541-013-0208-6

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093, KAKENHI-PROJECT-24760097
  • [Journal Article] An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition2013

    • Author(s)
      So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He, Wei Gao
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol. 7 Pages: 714-719

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage2013

    • Author(s)
      Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, So Ito, Songyi Dian
    • Journal Title

      Precision Engineering,

      Volume: 37 Pages: 771-781

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface2013

    • Author(s)
      Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
    • Journal Title

      INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING

      Volume: 14 Pages: 1543-1549

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] Fabrication of Scale Gratings for Surface Encoders by Using Laser Interference Lithography with 405 nm Laser Diodes2013

    • Author(s)
      Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
    • Journal Title

      INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,

      Volume: 14 Pages: 1979-1988

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition2013

    • Author(s)
      So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He, Wei Gao
    • Journal Title

      Int. J. of Automation Technology

      Volume: 7 Pages: 714-719

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] Development of a Micro-Sized Thermal Contact Sensor2013

    • Author(s)
      Yuki Shimizu, Wenjian Lu, Yuta Ohba, and Wei Gao
    • Journal Title

      International Journal of Automation Technology

      Volume: 7 Pages: 708-713

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Journal Article] Precision tool setting for fabrication of a microstructure array2013

    • Author(s)
      Wei Gao, Yuan-Liu Chen, Kang-Won Lee, Young-Jin-Noh, Yuki Shimizu, So Ito
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 62 Pages: 523-526

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2012

    • Author(s)
      WooJae Kim, Yuki Shimizu, Akihide Kimura and Wei Gao
    • Journal Title

      International Journal of Precision Engineering and Manufacturing

      Volume: (In press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement2012

    • Author(s)
      Akihide Kimura, Wei Gao, WooJae Kim, Koji Hosono, Yuki Shimizu, Lei Shi, Lijiang Zeng
    • Journal Title

      Precision Engineering

      Volume: 36 Pages: 576-589

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Journal Article] New Measurement Concept of Nanometer-level Defects on Si Wafer Surface by using Micro Contact Sensor2012

    • Author(s)
      W.Lu, Y.Shimizu, W.Gao
    • Journal Title

      Advanced Material Research

      Volume: (未定)(accepted)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Journal Article] Design and Experiment of Thermal Contact Sensor Detecting Defects on Si Wafer Surface2012

    • Author(s)
      Wenjian Lu, Yuki Shimizu, Wei Gao
    • Journal Title

      Key Engineering Materials

      Volume: Vols. 523-524 Pages: 826-831

    • DOI

      10.4028/www.scientific.net/kem.523-524.826

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Journal Article] New Measurement Concept of Nanometer-Level Defects on Si Wafer Surface by Using Micro Contact Sensor2012

    • Author(s)
      Wenjian Lu, Yuki Shimizu, Wei Gao
    • Journal Title

      Advanced Materials Research

      Volume: Vol. 497 Pages: 137-141

    • DOI

      10.4028/www.scientific.net/amr.497.137

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Journal Article] A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement2012

    • Author(s)
      Akihide Kimura, Wei Gao, WooJae Kim, Koji Hosono, Yuki Shimizu, Lei Shi, Lijiang Zeng
    • Journal Title

      Precision Engineering

      Volume: (In press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] A noncontact scanning electrostatic force microscope for surface profile measurement2012

    • Author(s)
      Wei Gao, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu
    • Journal Title

      CIRP Annals–Manufacturing Technology

      Volume: Vol. 61 Pages: 471-474

    • DOI

      10.1117/12.2014460

    • URL

      http://dx.doi.org/10.1016/j.cirp.2012.03.097

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] A noncontact scanning electrostatic force microscope for surface profile2012

    • Author(s)
      Wei Gao, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 61 Pages: 471-474

    • DOI

      10.1016/j.cirp.2012.03.097

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] Modeling and Analysis of a Scanning Electrostatic Force Microscope for Surface Profile Measurement2012

    • Author(s)
      Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
    • Journal Title

      Proceedings of SPIE

      Volume: 2012, Vol. 8759 Pages: 875914-875918

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Journal Article] ウエハ表面のナノレベル欠陥検出向け接触型マイクロ熱検知センサの原理検討2012

    • Author(s)
      清水裕樹, 盧文剣, 東豊大, 高偉
    • Journal Title

      精密工学会春季大会論文集

      Volume: (CD-R)

    • NAID

      130005031256

    • Data Source
      KAKENHI-PROJECT-23860005
  • [Journal Article] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2012

    • Author(s)
      WooJae Kim, Yuki Shimizu, Akihide Kimura, Wei Gao
    • Journal Title

      International Journal of precision Engineering and Manufacturing

      Volume: (未定)(印刷中)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] A two-degree-of-freedom linear encoder with a mosaic scale grating2011

    • Author(s)
      Akihide Kimura, Koji Hosono, WooJae Kim, Yuki Shimizu and Wei Gao
    • Journal Title

      International Journal of Nanomanufacturing

      Volume: Vol.7 Pages: 73-91

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] A two-degree-of-freedom linear encoder with a mosaic scale grating2011

    • Author(s)
      Akihide Kimura, Koji Hosono, WooJae Kim, Yuki Shimizu, Wei Gao
    • Journal Title

      International Journal of Nanomanufacturing

      Volume: 7 Pages: 73-90

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] Multi-axis grating encoders for stage motion measurement2011

    • Author(s)
      WooJae KIM, Akihide Kimura, Koji Hosono, Yuki Shimizu and Wei Gao
    • Journal Title

      International Journal of Nanomanufacturing

      Volume: Vol.7 Pages: 409-426

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] Multi-axis grating encoders for stage motion measurement2011

    • Author(s)
      WooJae KIM, Akihide Kimura, Koji Hosono, Yuki Shimizu, Wei Gao
    • Journal Title

      International Journal of Nanomanufacturing

      Volume: 7 Pages: 409-426

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] Surface Encoders for a Mosaic Scale Grating2011

    • Author(s)
      Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
    • Journal Title

      International Journal of Automation Technology

      Volume: 5 Pages: 91-96

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] 熱検知型接触センサによる半導体ウエハ上の微小欠陥検出手法の提案2011

    • Author(s)
      清水裕樹, 盧文剣, 高偉
    • Journal Title

      2011年度精密工学会東北支部講演会論文集

      Pages: 37-38

    • Data Source
      KAKENHI-PROJECT-23860005
  • [Journal Article] Surface Encoders for a Mosaic Scale Grating2011

    • Author(s)
      Koji Hosono, WooJae Kim, Akihide Kimura, Yuki Shimizu and Wei Gao
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol.5 Pages: 91-96

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Journal Article] New Measurement Concept of Nanometer-level Defects on Si Wafer Surface by using Micro Contact Sensor2011

    • Author(s)
      W.Lu, Y.Shimizu, W.Gao
    • Journal Title

      Proceedings of the 8th China-Japan International Coference on Ultra-precision machining (CJUPM 2011)

      Pages: 26-26

    • Data Source
      KAKENHI-PROJECT-23860005
  • [Patent] 特許出願2021

    • Inventor(s)
      清水裕樹,高偉,松隈啓,洪一帆
    • Industrial Property Rights Holder
      清水裕樹,高偉,松隈啓,洪一帆
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Patent] 回折格子ピッチ偏差測定装置2020

    • Inventor(s)
      清水裕樹,高偉,松隈啓,権略,木村彰秀,青木敏彦
    • Industrial Property Rights Holder
      清水裕樹,高偉,松隈啓,権略,木村彰秀,青木敏彦
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2020-036006
    • Filing Date
      2020
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Patent] 絶対位置測定装置および絶対位置測定方法2019

    • Inventor(s)
      清水 裕樹,高 偉,松隈 啓,石塚 稜
    • Industrial Property Rights Holder
      清水 裕樹,高 偉,松隈 啓,石塚 稜
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2019-057305
    • Filing Date
      2019
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Patent] 回転角度検出装置および回転角度検出方法2016

    • Inventor(s)
      清水裕樹,高偉,伊東聡,陳遠流,丸山泰司
    • Industrial Property Rights Holder
      清水裕樹,高偉,伊東聡,陳遠流,丸山泰司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-012697
    • Filing Date
      2016-01-26
    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Patent] 変位測定装置および変位測定方法2016

    • Inventor(s)
      清水裕樹,高偉,仲村拓
    • Industrial Property Rights Holder
      清水裕樹,高偉,仲村拓
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-067247
    • Filing Date
      2016-03-30
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Patent] 絶対角測定装置及び絶対角測定方法2014

    • Inventor(s)
      清水裕樹,高偉,伊東聡,工藤幸利
    • Industrial Property Rights Holder
      清水裕樹,高偉,伊東聡,工藤幸利
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-09-22
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Patent] 平滑面検査装置2012

    • Inventor(s)
      清水裕樹,高偉,盧文剣
    • Industrial Property Rights Holder
      清水裕樹,高偉,盧文剣
    • Industrial Property Number
      2012-097818
    • Filing Date
      2012-04-23
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Patent] 平滑面検査装置2012

    • Inventor(s)
      清水裕樹,高偉,盧文剣
    • Industrial Property Rights Holder
      清水裕樹,高偉,盧文剣
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-097818
    • Filing Date
      2012-04-23
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Patent] ステージ機構およびその駆動方法2011

    • Inventor(s)
      清水裕樹, 他
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2011-256202
    • Filing Date
      2011-11-24
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Patent] ステージ機構およびその駆動方法2011

    • Inventor(s)
      清水裕樹,高偉,盧文剣
    • Industrial Property Rights Holder
      清水裕樹,高偉,盧文剣
    • Industrial Property Number
      2011-256202
    • Filing Date
      2011-11-24
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] 熱収支場式リニアエンコーダの開発に関する研究2022

    • Author(s)
      清水 裕樹, 石田 彩華, 高 偉
    • Organizer
      日本機械学会IIP2022 情報・知能・精密機器部門(IIP部門)講演会
    • Data Source
      KAKENHI-PROJECT-20K20953
  • [Presentation] Calibration of grating periods based on laser diffraction method using optical frequency comb2021

    • Author(s)
      Dong Wook Shin, Lue Quan, Hiraku Matsukuma, Yuki Shimizu, Wei Gao and Eberhard Manske
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Fabrication of a variable-line-spacing grating based on the non-othogonal Lloyd's interferometer2021

    • Author(s)
      Shusaku Endo, Kai Zhang, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Angular Measurement Method Utilizing Second Harmonic Generation2021

    • Author(s)
      Wijayanti Dwi Astuti, Hiraku Matsukuma, Li Kuangyi, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] 熱収支場式エンコーダの開発に関する研究-試作ヘッドの基礎特性評価2021

    • Author(s)
      清水裕樹, 石田彩華, 松隈啓, 高偉
    • Organizer
      2020年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-20K20953
  • [Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2021

    • Author(s)
      Qiaolin Li, Hiraku Matukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Fabrication of a two-dimensional diffraction grating with reduction of the effect of thermal expansion2021

    • Author(s)
      Hiraku Matsukuma, Masanori Matsunaga, Yuki Shimizu, Wei Gao
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] An absolute surface encoder with a femtosecond laser and a planar scale grating of variable periods2021

    • Author(s)
      Satoru Maehara, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] 短ピッチ格子を用いた平面ステージ計測用小型サーフェスエンコーダの設計2021

    • Author(s)
      洪 一帆,清水 裕樹,松隈 啓,松岡 良太,高 偉
    • Organizer
      2021年度砥粒加工学会学術講演会論文集(C14) 2021/9/1
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Measurement of the angle of a small prism by a mode-locked femtosecond laser autocollimator2021

    • Author(s)
      Kakeru Ikeda, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Design of a small-sized surface encoder with short-period planar gratings for stage motion measurement2021

    • Author(s)
      Yifan Hong, Yuki Shimizu, Hiraku Matsukuma, Ryota Matsuoka, Wei Gao, Eberhard Manske
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] 3D profile measurement of a diamond tool without the effect of AFM probe tip radius2021

    • Author(s)
      Kai ZHANG, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] モード同期フェムト秒レーザを用いた「つながる」高精度角度計測2021

    • Author(s)
      清水 裕樹
    • Organizer
      日本機械学会 IIP2021 情報・知能・精密機器部門(IIP部門)講演会 若手研究者招待講演
    • Invited
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] モード同期フェムト秒レーザを用いた「つながる」高精度角度計測2021

    • Author(s)
      清水裕樹
    • Organizer
      日本機械学会 IIP2021 情報・知能・精密機器部門(IIP部門)講演会 若手研究者招待講演
    • Invited
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] モード同期フェムト秒レーザを利用した回折格子の校正方法2021

    • Author(s)
      Shin Dong Wook,Quan Lue,松隈 啓,清水 裕樹,高 偉,Manske Eberhard
    • Organizer
      2021年度砥粒加工学会学術講演会論文集 2021/9/1
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] モード同期フェムト秒レーザ共焦点プローブに関する研究-極小点追跡法を用いた合焦波長検出に関する検討-2021

    • Author(s)
      佐藤 遼,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会秋季大会学術講演会講演論文集(講演番号 H31) 2021/9/21-23
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] マイクロ光学素子の角度計測に関する研究2021

    • Author(s)
      池田 翔,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会東北支部学術講演会講演論文集(A05) 2021/11/6
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Evaluation of pitch deviation of a scale linear grating based on the laser autocollimation2021

    • Author(s)
      Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Wei Gao, Eberhard Manske
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Development of a probe type profiler for measurement of a micro cutting edge2021

    • Author(s)
      Wen Bo, Hiraku Matsukuma, Yuki Shimizu, Andreas Archenti, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Investigation of Measurement Range of a Differential Chromatic Confocal Probe employing a Mode-Locked Femtosecond Laser2021

    • Author(s)
      Ryo SATO, Hiraku MATSUKUMA, Yuki SHIMIZU, Wei GAO, Andreas FISCHER
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] 非直交型ロイドミラー干渉計によるVLS格子の製作に関する研究2021

    • Author(s)
      遠藤 秀作,村上 裕記,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会東北支部学術講演会講演論文集(A06) 2021/11/6
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] フェムト秒レーザを用いた絶対位置計測に関する研究2021

    • Author(s)
      前原 智,佐藤 遼,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会東北支部学術講演会講演論文集(A03) 2021/11/6
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021

    • Author(s)
      Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao
    • Organizer
      XXIII IMEKO World Congress
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Optical Angle Measurement with a Mode-Locked Femtosecond Laser2020

    • Author(s)
      Yuki Shimizu
    • Organizer
      International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM 2020)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] フェムト秒レーザ光源を用いた角度センサによる形状計測に関する研究-マルチビーム角度センサの設計と基礎特性評価-2020

    • Author(s)
      清水裕樹, 高園翔太, 神田悠利, 松隈啓, 稲場肇, 高偉
    • Organizer
      2020年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020

    • Author(s)
      Yuki Shimizu, Wei Gao, Hiraku Matsukuma, Karoly Szipka, Andreas Archenti
    • Organizer
      CIRP Video paper sessions 2020
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Three-dimensional profile measurement of a single point diamond tool without the influence of the tip radius of an AFM probe2020

    • Author(s)
      Kai Zhang, Yindi Cai, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Design of a small-sized surface encoder for stage motion measurement2020

    • Author(s)
      洪一帆, 清水裕樹, 松隈啓, 松岡良太, 高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2020

    • Author(s)
      李橋林, 齋藤俊樹, 町田裕貴, 松隈啓, 清水裕樹, 高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Optical Metrology with a Mode-Locked Femtosecond Laser and Grating Reflectors2020

    • Author(s)
      Yuki Shimizu
    • Organizer
      International High-level Forum on High-end Measurement Instruments & The 11th International Symposium on Precision Engineering Measurements and Instrumentation
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] ロイドミラー干渉計による微細格子製作に関する研究2020

    • Author(s)
      村上裕記, 張凱, 松隈啓, 清水裕樹, 高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020

    • Author(s)
      Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      The International Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] Development of an optical angle sensor unit for the evaluation of pitch deviations2020

    • Author(s)
      権略,松隈啓,清水裕樹,高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-20H00211
  • [Presentation] 高感度光学式角度センサに関する研究2019

    • Author(s)
      馬 旭,神田 悠利,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] Study on the stitching techinque for fast evaluation of the linear scale using a Fizeau interferometer2019

    • Author(s)
      熊昕, 松隈啓, 清水裕樹, 高偉
    • Organizer
      日本機械学会東北支部 第54期総会・講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] フェムト秒レーザを用いた光学式角度センサによる表面形状計測に関する研究2019

    • Author(s)
      高園翔大,清水裕樹,松隈 啓,神田悠利,稲場肇,高偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] 切削力制御加工のための高安定な切削力検出に関する研究2019

    • Author(s)
      栗田悠生,文博,松隈啓,清水裕樹,高偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Design and verification of a measurement system for a micro tool cutting edge with a low measuring force2019

    • Author(s)
      Bo WEN,Yu WATANABE,Hiraku MATSUKUMA,Yuki SHIMIZU,Wei GAO
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Analysis of temperature influence on a chromatic confocal probe with a mode-locked femtosecond laser2019

    • Author(s)
      Ryo Sato, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
    • Organizer
      The 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] フェムト秒レーザ光源を用いた角度センサによる形状計測に関する研究 -マルチビーム角度センサの設計-2019

    • Author(s)
      清水 裕樹,高園 翔太,神田 悠利,松隈 啓,稲場 肇,高 偉
    • Organizer
      2020年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-16KK0119
  • [Presentation] An Optical Angle Sensor Based on the Laser Autocollimation employing a Mode-locked Femtosecond Laser Source and a Single Mode Fiber Detector2019

    • Author(s)
      Shota Takazono, Yuki Shimizu, Hiraku Matsukuma, Yuri Kanda, Hajime Inaba and Wei Gao
    • Organizer
      The 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2019

    • Author(s)
      李橋林,齋藤俊樹,町田裕貴,松隈啓,清水裕樹,高偉
    • Organizer
      2019年度砥粒加工学会学術講演会(ABTEC2019)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Self-calibration of Fizeau interferometer and linear scale in Littrow configuration2019

    • Author(s)
      Xin XIONG, Hiraku MATSUKUMA, Yuki SHIMIZU, Wei GAO
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] フェムト秒レーザを用いた共焦点顕微鏡における光軸変位計測高安定化に関する研究2019

    • Author(s)
      佐藤遼,松隈啓,清水裕樹,高偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Experimental research on measurement range of a chromatic pinhole illumination confocal probe by utilizing side-lobes of axial response2019

    • Author(s)
      陳衝,松隈啓,佐藤遼,清水裕樹,高偉
    • Organizer
      日本機械学会東北支部 第54期総会・講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Theoretical investigation of the lateral resolution of a chromatic confocal microscopy with a mode-locked femtosecond laser source2019

    • Author(s)
      Chong CHEN,Ryo SATO,Hiraku MATSUKUMA,Yuki SHIMIZU,Wei GAO
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A nano-indentation system for precision measurement of a single point diamond tool2019

    • Author(s)
      張凱,XuMalu,CaiYindi,松隈啓,清水裕樹,高偉
    • Organizer
      2019年度砥粒加工学会学術講演会(ABTEC2019)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 非直交型2 軸ロイドミラー干渉計の高精度化に関する研究 -ビームシェイパによるコリメート光強度分布の平坦化-2019

    • Author(s)
      村上裕記,石塚稜,松永 雅教,松隈啓,清水裕樹,高偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 熱収支場式エンコーダの開発に関する研究 -試作エンコーダを用いた基礎特性評価-2019

    • Author(s)
      石田彩華,清水裕樹,松隈啓,高偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-18K18798
  • [Presentation] 国家標準にトレーサブルな精密ナノ計測の実現に向けて2019

    • Author(s)
      清水 裕樹
    • Organizer
      (公社)精密工学会「ナノ精度機械加工専門委員会」第48回委員会
    • Invited
    • Data Source
      KAKENHI-PROJECT-16KK0119
  • [Presentation] On-machine Surface Metrology by a Force-Sensor Integrated Fast Tool Servo2019

    • Author(s)
      文博,余建平,松隈啓,清水裕樹,高偉
    • Organizer
      日本機械学会東北支部 第54期総会・講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 2軸微細格子製作のための小型露光装置の開発2019

    • Author(s)
      松永雅教,真野和樹,松隈啓,清水裕樹,高偉
    • Organizer
      日本機械学会東北支部 第54期総会・講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 精密測定のためのファイバ型光周波数コムの開発2019

    • Author(s)
      神田悠利, 松隈啓, 清水裕樹, 稲場肇,高偉
    • Organizer
      日本機械学会東北支部 第54期総会・講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 光周波数コムを用いた角度センサの研究2019

    • Author(s)
      中村一貴,松隈啓,清水裕樹,高偉
    • Organizer
      日本機械学会東北支部 第54期総会・講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 光周波数コムを用いた絶対変位測定に関する研究2019

    • Author(s)
      廣田駿介,安達圭祐,石塚稜,松隈啓,清水裕樹,高偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 非直交型2軸ロイドミラー干渉計による2軸スケール回折格子パターニング -偏光制御ユニット改良によるパターン高精度化-2019

    • Author(s)
      清水 裕樹,真野 和樹,松永 雅教,村上 佑記,松隈 啓,高 偉
    • Organizer
      2019年度精密工学会秋季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] 熱収支場式エンコーダの開発に関する研究-利用可能なパターン検討シミュレーション-2018

    • Author(s)
      石田 彩華,清水 裕樹,松隈 啓,高 偉
    • Organizer
      精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-18K18798
  • [Presentation] Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage2018

    • Author(s)
      Ryo Ishizuka, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      IEEE International conference on advanced manufacturing, ICAM 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] An optical frequency comb operating in the mid-infrared region for wide-range and high-precision optical sensor2018

    • Author(s)
      Yun Asumi, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      IEEE International conference on advanced manufacturing, ICAM 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Feasibility study on a compact encoder system employing a micro thermal sensor head for precision positioning2018

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Ayaka Ishida, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 17th International Conference on Precision Engineering, ICPE2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18798
  • [Presentation] フェムト秒レーザを用いた共焦点顕微鏡の温度安定性に関する研究2018

    • Author(s)
      佐藤 遼,松隈 啓,陳 衝,清水 裕樹,高 偉
    • Organizer
      2018年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Theoretical investigation of a femtosecond laser chromatic confocal probe with fiber illumination and pinhole illumination2018

    • Author(s)
      CHONG CHEN, Xiuguo CHEN, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 17th International Conference on Precision Engineering, ICPE2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response2018

    • Author(s)
      Chong Chen, Hiraku Matsukuma, Ryo Sato, Xiuguo Chen, Yuki Shimizu and Wei Gao
    • Organizer
      IEEE International conference on advanced manufacturing, ICAM 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 微細光学素子形状測定のための走査型プローブ顕微鏡に関する研究2018

    • Author(s)
      長岡 将史,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2018年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] フェムト秒レーザ光源を用いた角度センサに関する研究-シングルモードファイバの適用-2018

    • Author(s)
      清水 裕樹,高園 翔太,中村 一貴,松隈 啓,高 偉
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] 広帯域光周波数コムのための中赤外超短パルスレーザの開発2018

    • Author(s)
      阿隅 結夢,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2018年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A new method to evaluate pitch deviations of diffraction gratings by using optical angle sensor2018

    • Author(s)
      権 略,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2018年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 光学式角度センサを用いた表面形状計測に関する研究-光ファイバを受光部に用いた角度センサに関する検討-2018

    • Author(s)
      高園 翔太,清水 裕樹,松隈 啓,高 偉
    • Organizer
      精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-18H01345
  • [Presentation] 平面ステージ精密制御用多軸サーフェスエンコーダの高精度化に関する研究2018

    • Author(s)
      石塚 稜,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2018年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Theoretical calculation of the reading output from a micro thermal sensors for precision positioning2018

    • Author(s)
      Yuki Shimizu, Ayaka Ishida, Hiraku Matsukuma, Wei Gao
    • Organizer
      2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18K18798
  • [Presentation] 微空間での熱収支を利用した平滑面欠陥検出に関する研究 -熱検知センサプローブの構築と基礎特性評価-2018

    • Author(s)
      清水 裕樹,松野 優紀,陳 遠流,松隈 啓,高 偉
    • Organizer
      2018年度精密工学会春季大会学術講演会
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] Fast evaluation of variable line spacing gratings by using a Fizeau Interferometer2018

    • Author(s)
      Xin XIONG, Xiuguo CHEN, Yuki SHIMIZU, Hiraku MATSUKUMA, and Wei GAO
    • Organizer
      The 17th International Conference on Precision Engineering, ICPE2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] An Ultra-Sensitive Optical Angle Sensor for Pitch Deviations Measurement of Diffraction Gratings2018

    • Author(s)
      Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu and Wei Gao
    • Organizer
      IEEE International conference on advanced manufacturing, ICAM 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Development of a fiber-laser-based frequency comb for precision dimensional metrology2018

    • Author(s)
      Yuri KANDA, Hiraku MATSUKUMA, Shaoqing YANG, Yuki SHIMIZU, Hajime INABA, and Wei GAO
    • Organizer
      IEEE International conference on advanced manufacturing, ICAM 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Fast evaluation of a linear scale by using a Fizeau interferometer and stitching technique2018

    • Author(s)
      Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu and Wei Gao
    • Organizer
      IEEE International conference on advanced manufacturing, ICAM 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A differential compensation strategy based piezoelectric force sensor system for force controlled ultra-precision diamond cutting2018

    • Author(s)
      Yuan-Liu Chen, Keisuke Tohyama, Yuki Shimizu, Hiraku Matsukuma and Wei Gao
    • Organizer
      The 6th International Conference on Nanomanufacturing, nanoMan20188
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 力センサを組み込んだ高速工具サーボによる切削力制御加工2018

    • Author(s)
      栗田 悠生,松隈 啓,遠山 佳祐,清水 裕樹,高 偉
    • Organizer
      2018年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] On-machine Measurement of Workpiece Inclination for Double-face Turning2017

    • Author(s)
      Bo Wen, Yuan-Liu Chen, Shu Wang, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 7th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 回折格子の校正に関する研究2017

    • Author(s)
      上原 健太郎,陳 遠流,清水 裕樹,陳 修国,松隈 啓,高 偉
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Evaluation of grating periods by using pulsed laser source2017

    • Author(s)
      Kentaro Uehara, Yuki Shimizu, Yuan-Liu Chen, Wei Gao
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 平面ステージ精密制御用多自由度光センサのクロストーク誤差低減に関する研究2017

    • Author(s)
      石塚 稜,古田 雅也,清水 裕樹,陳 遠流,陳 修国,松隈 啓,高 偉
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 超精密角度センサに関する研究2017

    • Author(s)
      間所 周平,陳 遠流,清水 裕樹,松隈 啓,高 偉
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Uncertainty analysis in the evaluation of pitch deviation and out-of-flatness of planar scale gratings by Fizeau interferometry2017

    • Author(s)
      Xiuguo Chen, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
    • Organizer
      The 13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2017)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Design and Verification of an XYZ Three-axis Micro Stage2017

    • Author(s)
      Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan-Liu Chen, Wei Gao, Eiji Niwa and Yoshihiro Sasaki
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Polarization ray-tracing model for orthogonal two-axis Lloyd’s mirror interference lithography2017

    • Author(s)
      Xiuguo Chen, Zongwei Ren, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 2軸ロイドミラー干渉計による回折格子製作に関する研究―コリメート光強度分布の評価―2017

    • Author(s)
      真野 和樹,相原 涼,李 星輝,清水 裕樹,陳 遠流,陳 修国,松隈 啓,高 偉
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Evaluation of a Focused Laser Spot Diameter for an Optical Angle Sensor2017

    • Author(s)
      Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan-Liu Chen, Wei Gao
    • Organizer
      59th ILMENAU SCIENTIFIC COLLOQUIUM
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] Force-controlled Diamond Cutting on Brittle Materials by Utilizing a Force Sensor Integrated Fast Tool Servo2017

    • Author(s)
      Bo Wen, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
    • Organizer
      The 13th China-Japan International Conference on Ultra-Precision Machining Process(CJUMP2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Optical Instruments for Measurement of the next-generation Stage Systems for Dimensional Metrology2017

    • Author(s)
      Yuki Shimizu, Yuan-Liu Chen, Wei Gao
    • Organizer
      Optical Society of Korea Summer Meeting 2017
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Measurement of Workpiece Inclination by Using FS-FTS on a Diamond Turning Machine2017

    • Author(s)
      Bo Wen, Yuan-Liu Chen, Shu Wang, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Precision measurement of microoptics with double steep sidewalls by an atomic force microscopy with a linear-rotary scanning strategy2017

    • Author(s)
      Yuan-Liu Chen, Bo Wen, Minglei Li, Yuki Shimizu and Wei Gao
    • Organizer
      The 13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2017)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Surface form measurement of a small roll workpiece2017

    • Author(s)
      Toshiki Saito, Yuki Machida, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] エッジ反転法によるダイヤモンド工具刃先丸み半径の精密測定に関する研究2017

    • Author(s)
      徐 馬禄,陳 遠流,蔡 引※(※は女偏に弟),清水 裕樹,松隈 啓,高 偉
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Evaluation of relative vertical error motions of a bench center by using an optical micrometer2017

    • Author(s)
      Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer2017

    • Author(s)
      Kazuki Mano, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Non-contact detection of surface defects by using a micro thermal sensor2017

    • Author(s)
      Yuki Shimizu, Yuki Matsuno Yuan-Liu Chen and Wei Gao
    • Organizer
      13th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] 微空間での熱収支を利用した平滑面欠陥検出に関する研究 -生成熱収支場による欠陥検出可能性の実験的検討-2017

    • Author(s)
      清水 裕樹,松野 優紀,陳 遠流,高 偉
    • Organizer
      2017年度精密工学会春季大会学術講演会
    • Place of Presentation
      慶応義塾大学(神奈川県横浜市)
    • Year and Date
      2017-03-13
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] 小型円筒ワークの精密表面形状測定に関する研究2017

    • Author(s)
      齋藤 俊樹,町田 祐貴,清水 裕樹,陳 遠流,松隈 啓,高 偉
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A confocal microscope with a mode-locked laser source2017

    • Author(s)
      Yuki Shimizu, Taku Nakamura, Yuan-Liu Chen and Wei Gao
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] XYZ3軸マイクロステージに関する研究2017

    • Author(s)
      安達 圭祐,菅原 拓馬,清水 裕樹,陳 遠流,高 偉,丹羽 英二,佐々木 祥弘
    • Organizer
      2017年度精密工学会東北支部学術講演会
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Ultra-precision Angle Sensor with a Mode-locked Laser Source2017

    • Author(s)
      Shuhei Madokoro, Yuki Shimizu, Yuan-Liu Chen and Wei Gao
    • Organizer
      The 9th International Conference on Leading Edge Manufacturing in 21st Century
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Diamond cutting of brittle materials on inclined surfaces based on a thrust force controlled cutting strategy2016

    • Author(s)
      Yuan-Liu Chen, K. Tohyama, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 5th International Conference on Nanomanufacturing (nanoMan2016)
    • Place of Presentation
      University of Macau, Macau, China
    • Year and Date
      2016-08-16
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Measurement of the Optical Frequency Stability of a Mode-Locked Laser2016

    • Author(s)
      Shaoqing YANG, Yuan-liu CHEN, So ITO, Yuki SHIMIZU, Wei GAO
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel, Seoul, Korea
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 2軸ロイドミラー干渉計による回折格子製作に関する研究2016

    • Author(s)
      真野和樹,相原涼,李星輝,伊東聡,清水裕樹,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] An optical configuration for the Lloyd’s mirror interferometer for fabrication of gratings having symmetrical profiles2016

    • Author(s)
      任宗偉,相原涼,清水裕樹,伊東聡,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Precision On-machine Measurement of Error Motion of Carriage Slide on a Drum Roll Lathe2016

    • Author(s)
      Zengyuan NIU, Yuan-LIU CHEN, Daiki MATSUURA, Yuki SHIMIZU, So ITO, Wei GAO, Jeongseok OH, Chunhong Park
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel, Seoul, Korea
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A Design Study of an XYZ Micro-stage2016

    • Author(s)
      Yuki SHIMIZU, Takuma SUGAWARA, Keisuke ADACHI, So ITO, Wei GAO
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel, Seoul, Korea
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 低測定力測定機を用いた工具刃先の形状測定に関する研究2016

    • Author(s)
      渡邉佑,高偉,清水裕樹,伊東聡,山本泰河,金山利彦
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Molecular dynamics simulation of scanning process in Atomic Force Microscope form measurement2016

    • Author(s)
      Y.D. Cai, Y.L. Chen, Yuki Shimizu, So Ito and W. Gao
    • Organizer
      The 5th International Conference on Nanomanufacturing (nanoMan2016)
    • Place of Presentation
      University of Macau, Macau, China
    • Year and Date
      2016-08-16
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Micro thermal sensor for nanometric surface defect inspection2016

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Yuta Ohba, and Wei Gao
    • Organizer
      The 16th International Conference on Nanotechnology (NANO 2016)
    • Place of Presentation
      仙台国際センター(宮城県仙台市)
    • Year and Date
      2016-08-22
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] Optical Analysis of a Confocal Microscope2016

    • Author(s)
      Taku NAKAMURA, Yuki SHIMIZU, So ITO, Yuan-liu CHEN, Wei GAO
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel, Seoul, Korea
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Development of an orthogonal two-axis Lloyd’s mirror interferometer for fabrication of two-axis scale grating2016

    • Author(s)
      Zongwei Ren, Yuki Shimizu, Ryo Aihara, Yuan-Liu Chen, So Ito, Wei Gao
    • Organizer
      The 12th China-Japan International Conferences on Ultra-Precision Machining Processes (CJUMP2016)
    • Place of Presentation
      Hunan Fenglin Hotel, Hunan, China
    • Year and Date
      2016-11-04
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 微空間での熱収支を利用した平滑面欠陥検出に関する研究 -非接触欠陥検出の原理検討-2016

    • Author(s)
      清水裕樹,松野優紀,大場優太,高偉
    • Organizer
      2016年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京理科大学(千葉県野田市)
    • Year and Date
      2016-03-15
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] Profile Measurement of a Micro Cutting Edge by using a Contact-type Stylus Probe with Low Measuring Force2016

    • Author(s)
      Yu WATANABE, Sho SEKINE, So ITO, Yuki SHIMIZU, Wei GAO, Taiga YAMAMOTO, Toshihiko KANAYAMA
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel, Seoul, Korea
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Development of a Non-contact-type Thermal Sensor for Surface Defect Inspection2016

    • Author(s)
      Yuki MATSUNO, Yuki SHIMIZU, Wei GAO
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel (Seoul, Korea)
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] A sensitivity-improved micro thermal sensor for surface defect inspection2016

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Yuan-Liu Chen and Wei Gao
    • Organizer
      The 12th China-Japan International Conference on Ultra-Precision Machining Processes (CJUMP2016)
    • Place of Presentation
      Hunan Fenglin Hotel (Hunan, China)
    • Year and Date
      2016-11-04
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] Profile measurement of a steep slope surface by using a long stroke scanning probe microscope2016

    • Author(s)
      徐延昊,陳遠流,伊東総,清水裕樹,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] In-process Tilt Measurement of a Brittle Material Workpiece by using a Force-sensor Integrated Diamond Cutting Tool2016

    • Author(s)
      Keisuke TOHYAMA, Yuan-liu CHEN, So ITO, Yuki SHIMIZU, Wei GAO
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel, Seoul, Korea
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 水平走査型測定法による小型円筒試料の精密形状測定2016

    • Author(s)
      齋藤俊樹,町田裕貴,清水裕樹,伊東聡,高偉,山崎宏,柴本裕輔,花岡浩毅
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope2016

    • Author(s)
      Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito, and Wei Gao
    • Organizer
      IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2016)
    • Place of Presentation
      ホテル松島大観荘(宮城県宮城郡松島町)
    • Year and Date
      2016-04-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 力センサ搭載型ダイヤモンド切削工具を用いた脆性材料ワークのインプロセスチルト測定2016

    • Author(s)
      遠山佳祐,陳遠流,清水裕樹,伊東聡,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Measurement of the Repetition Rate Stability of a Mode-Locked Laser2016

    • Author(s)
      楊紹青,陳遠流,伊東総,清水裕樹,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A Long Stroke Atomic Force Microscope for Surface Profile Measurement of Micro-optics2016

    • Author(s)
      So ITO, Minglei LI, Yuanliu CHEN, Yanhao XU, Zengyuan NIU, Masaya FURUTA, Yuki SHIMIZU, Wei GAO
    • Organizer
      The 7th International Conference on Positioning Technology (ICPT2016)
    • Place of Presentation
      Seoul Garden Hotel, Seoul, Korea
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] シングルセル受光素子を用いた光学式角度センサの高感度化に関する研究2016

    • Author(s)
      間所周平,丸山泰司,清水裕樹,伊東聡,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Multi-dimensional measurement of tool edge geometry with an optical probe2016

    • Author(s)
      Yuki Shimizu, Shota Nakagawa, SungHo Jang, Yuan-Liu Chen, So Ito, and Wei Gao
    • Organizer
      The 5th International Conference on Nanomanufacturing (nanoMan2016)
    • Place of Presentation
      University of Macau (マカオ, 中国)
    • Year and Date
      2016-08-15
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Presentation] Computer simulation on the optical configuration of an ultra-sensitive angle sensor based on laser autocollimation2016

    • Author(s)
      Yuki SHIMIZU, Taiji MARUYAMA, Yuan-Liu CHEN, So ITO and Wei GAO
    • Organizer
      The 16th International Conference on Precision Engineering (ICPE2016)
    • Place of Presentation
      アクトシティ浜松 (静岡県浜松市)
    • Year and Date
      2016-11-14
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Presentation] 光周波数コム光源を用いた光学式センサに関する研究2016

    • Author(s)
      上原健太郎,工藤幸利,陳遠流,清水裕樹,伊東聡,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings2016

    • Author(s)
      Zongwei REN, Ryo AIHARA, Yuki SHIMIZU, So ITO, Yuan-Liu Chen, Wei GAO
    • Organizer
      IEEE 16th International Conference on Nanotechnology (IEEE NANO 2016)
    • Place of Presentation
      仙台国際センター (宮城県仙台市)
    • Year and Date
      2016-08-22
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Characterization of a micro thermal sensor for surface defect inspection2016

    • Author(s)
      Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Yuan-Liu Chen, and Wei Gao
    • Organizer
      The 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
    • Place of Presentation
      ホテル松島大観荘(宮城県宮城郡松島町)
    • Year and Date
      2016-04-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] 白色共焦点顕微鏡の光学系設計に関する研究2016

    • Author(s)
      仲村拓,清水裕樹,伊東聡,陳遠流,高偉
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] XYZマイクロステージに関する研究2016

    • Author(s)
      安達圭祐,清水裕樹,伊東聡,高偉,丹羽英二,佐々木祥弘
    • Organizer
      2016年度精密工学会東北支部学術講演会
    • Place of Presentation
      一関高専(岩手県一関市)
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Investigation on the sensitivity of an optical angle sensor based on laser autocollimation2016

    • Author(s)
      Yuki SHIMIZU, Taiji MARUYAMA, Yuan-Liu CHEN, So ITO and Wei GAO
    • Organizer
      Optical Measurement Technology and Instrument (OTA2016)
    • Place of Presentation
      China National Convention Center, Beijing China
    • Year and Date
      2016-05-09
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Determination of the origin position for an angle sensor with a femtosecond laser2015

    • Author(s)
      Jun Tamada,Yukitoshi Kudo,Yuan-Liu Chen,Yuki Shimizu,So Ito,Wei Gao
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2015)
    • Place of Presentation
      京都リサーチパーク(京都府京都市)
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 微空間での熱収支を利用した平滑面欠陥検出に関する研究 -10 nm級サイズ欠陥との接触検知シミュレーション実験-2015

    • Author(s)
      松野優紀,大場優太,清水裕樹,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15H03907
  • [Presentation] Ductile cutting of a microstructure array on silicon surface by using a diamond tool with a negative rake angle2015

    • Author(s)
      Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      京都リサーチパーク,京都府京都市
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] 光周波数コムを用いた角度スケールコムに関する研究2015

    • Author(s)
      清水裕樹,玉田純,工藤幸利,陳遠流,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Detection and repair of micro defects in the process of diamond cutting of a microstructure array2015

    • Author(s)
      陳遠流,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学,宮城県仙台市
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] Molecular dynamics simulation on nanoindentation response of a copper workpiece2015

    • Author(s)
      蔡引テイ,陳遠流,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学,宮城県仙台市
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] 3ビームロイドミラー干渉計による2軸回折格子加工に関する研究2015

    • Author(s)
      相原涼,李星輝,Yindi Cai,伊東聡,清水裕樹,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Laser interference lithography with a modified two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional micro patterns2015

    • Author(s)
      Yindi Cai, Xinghui Li,Ryo Aihara,Yuki Shimizu,So Ito,Wei Gao
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2015)
    • Place of Presentation
      京都リサーチパーク(京都府京都市)
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 2次元格子とフィゾー干渉計の一括自律校正に関する研究-自律校正法の提案-2015

    • Author(s)
      大野敦子,金于載,Yindi Cai,陳遠流,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 超高感度角度センサに関する研究2015

    • Author(s)
      丸山泰司,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] 平面ステージ精密制御用多自由度光センサに関する研究2015

    • Author(s)
      古田雅也,李星輝,Yindi Cai,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A three-axis angle sensor with a linear encoder scale reflector2015

    • Author(s)
      Yuki Shimizu, Taiji Maruyama, So Ito, Wei Gao
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
    • Place of Presentation
      National Taiwan University, Taipei, Taiwan
    • Year and Date
      2015-09-22
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] A New Fast Tool Servo with Integrated Functions for In-process Measurement and Fabrication of Microstructured Surfaces2015

    • Author(s)
      Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 11th China-Japan International Conference on Ultra-Precision Machining Process
    • Place of Presentation
      板橋区立グリーンホール,東京都板橋区
    • Year and Date
      2015-11-25
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] Surface Profile Measurement of Micro-optics by Using a Long Stroke AFM2015

    • Author(s)
      Minglei Li, So Ito, Zhigang Jia, Yuki Shimizu, Wei Gao
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
    • Place of Presentation
      National Taiwan University, Taipei, Taiwan
    • Year and Date
      2015-09-22
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H05759
  • [Presentation] Investigation of the deformation mechanism of a copper workpiece during nanoindentation by using molecular dynamics2015

    • Author(s)
      Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 11st Chain-Japan International Conference on Ultra-Precision machining process
    • Place of Presentation
      板橋区立グリーンホール,東京都板橋区
    • Year and Date
      2015-11-25
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] Molecular dynamics simulation on nano-contact between a diamond cutting tool and a copper surface2015

    • Author(s)
      Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao, Ying Chen
    • Organizer
      The 8th International Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      京都リサーチパーク,京都府京都市
    • Year and Date
      2015-10-18
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] A two-axis Lloyd's mirror interferometer for fabrication of two dimensional diffraction gratings2015

    • Author(s)
      Xinghui Li, Wei Gao, Yuki Shimizu, So Ito
    • Organizer
      2014 CIRP Winter meetings
    • Place of Presentation
      Nantes, France
    • Year and Date
      2015-01-23
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究 -切削工具切れ刃輪郭形状の測定-2015

    • Author(s)
      中川翔太,張城豪,清水裕樹,伊東聡,高偉
    • Organizer
      2015年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県仙台市)
    • Year and Date
      2015-09-04
    • Data Source
      KAKENHI-PROJECT-15K13839
  • [Presentation] On-machine edge contour measurement of a micro cutting tool by using a diamond edge artifact2015

    • Author(s)
      Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 12th International Symposium on Measurement Technology and Intelligent Instruments
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2015-09-22
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] 光学式3軸角度センサの小型化に関する研究2014

    • Author(s)
      丸山泰司,清水裕樹,Siew-Leng TAN, 村田大,伊東聡,高偉
    • Organizer
      2014年度精密工学会東北支部学術講演会
    • Place of Presentation
      青森県弘前市 弘前大学
    • Year and Date
      2014-11-29
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] 微細形状測定のための非接触静電気力顕微鏡に関する研究―形状測定の拘束・高精度化のための走査方式の検討―2014

    • Author(s)
      細渕啓一郎,賈志剛,伊東聡,清水裕樹,高偉
    • Organizer
      精密工学会2014年度春季大会学術講演会
    • Place of Presentation
      東京大学(東京)
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] 超高感度角度センサに関する研究2014

    • Author(s)
      村田大,清水裕樹,伊東聡,高偉
    • Organizer
      精密工学会学術講演会
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] 微細形状測定のための非接触静電気力顕微鏡に関する研究-形状測定の高速・高精度化のための走査方式の検討-2014

    • Author(s)
      細渕啓一郎,賈志剛,伊東聡,清水裕樹,高偉
    • Organizer
      精密工学会2014年度春季大会学術講演会
    • Place of Presentation
      東京
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] XYZ三軸振動センサに関する研究-第二報 信号処理系の最適化と微小振動計測について-2014

    • Author(s)
      相原涼,伊藤武志,伊東聡,清水裕樹,高偉
    • Organizer
      2014年度精密工学会東北支部学術講演会
    • Place of Presentation
      青森県弘前市 弘前大学
    • Year and Date
      2014-11-29
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Investigation on the contact detection sensitivity of thermal contact sensor for surface defect inspections2014

    • Author(s)
      Yuki SHIMIZU, Yuta OHBA and Wei GAO
    • Organizer
      The 15th International Conference on Precision Engineering (ICPE2014)
    • Place of Presentation
      Kanazawa, Japan
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] 形状測定用静電気力顕微鏡の周波数ドリフトの補正に関する研究2014

    • Author(s)
      賈 志剛, 細渕 啓一郎, 伊東 聡, 清水 裕樹, 高 偉
    • Organizer
      日本機械学会東北支部 第49期総会・講演会
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] 形状測定用静電気力顕微鏡の周波数ドリフトの補正に関する研究2014

    • Author(s)
      賈志剛,細渕啓一郎,伊東聡,清水裕樹,高偉
    • Organizer
      日本機械学会東北支部第49期総会・講演会
    • Place of Presentation
      東北大学(仙台)
    • Year and Date
      2014-03-14
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric2013

    • Author(s)
      Gaofa HE, Zhigang JIA, So ITO, Yuki SHIMIZU, Wei GAO
    • Organizer
      LEM21
    • Place of Presentation
      Sendai, Japan
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] 三次元微細形状測定のための静電気力顕微鏡に関する研究2013

    • Author(s)
      細渕啓一郎,賈志剛,伊東聡,清水裕樹,何高法,高偉
    • Organizer
      日本機械学会東北支部第48期総会・講演会
    • Place of Presentation
      東北大学(仙台)
    • Year and Date
      2013-03-15
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric2013

    • Author(s)
      Gaofa HE, Zhigang JIA, So ITO, Yuki SHIMIZU, Wei GAO
    • Organizer
      ISPMM 2014
    • Place of Presentation
      Guizhou, China
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Feasibility study on the concept of thermal contact sensor for nanometer-level defect inspections on smooth surfaces2013

    • Author(s)
      Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao
    • Organizer
      The 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013)
    • Place of Presentation
      Aachen and Braunschweig (Germany)
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] Characterization of a Prototype Thermal Contact Sensor for Surface Defect Inspections2013

    • Author(s)
      Yuki Shimizu, Wenjian Lu, Yuta Ohba and Wei Gao
    • Organizer
      5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013)
    • Place of Presentation
      Taipei, Taiwan
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] 接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究2013

    • Author(s)
      清水 裕樹,大場 裕太,盧 文剣,高 偉
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学(大阪府吹田市)
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] Measurement of contact potential difference and material distribution by using an SEFM2013

    • Author(s)
      Keiichiro HOSOBUCHI, Zhigang JIA, So ITO, Yuki SHIMIZU, Wei GAO
    • Organizer
      LEM21
    • Place of Presentation
      Sendai, Japan
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] 表面欠陥検出向け接触型熱検知素子の試作2013

    • Author(s)
      盧文剣,清水裕樹,大場裕太,高偉 (清水裕樹)
    • Organizer
      日本機械学会 東北支部第48期総会・講演会
    • Place of Presentation
      宮城県仙台市
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] Surface Profile Measurement of Micro-optics by using a Scanning Electrostatic Force Microscope2013

    • Author(s)
      So Ito, Zhigang Jia, Shigeaki Goto, Gaofa He, Keiichiro Hosobuchi, Yuki Shimizu, Wei Gao
    • Organizer
      5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013)
    • Place of Presentation
      Taipei, Taiwan
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Precision Positioning of a Longstroke Scanning Electrostatic Force Probe for Profile Measurement of Large Amplitude Micro-structured Surface2013

    • Author(s)
      Zhigang JIA, Gaofa HE, Shigeaki GOTO, Keiichiro HOSOBUCHI, So ITO, Yuki SHIMIZU and Wei GAO
    • Organizer
      LEM21
    • Place of Presentation
      Sendai, Japan
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric2013

    • Author(s)
      Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      6th International Symposium of Precision Mechanical Measurement (ISPMM2013)
    • Place of Presentation
      Guizhou, China
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric2013

    • Author(s)
      Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Matsushima, Japan
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Investigation of a femtosecond laser for measurement of angular displacement2013

    • Author(s)
      Yukitoshi KUDO, Siew-Leng TAN, Yuki SHIMIZU, So ITO, and Wei GAO
    • Organizer
      LEM21
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Feasibility study on the concept of thermal contact sensor for nanometer-level defect inspections on smooth surfaces2013

    • Author(s)
      Yuki Shimizu, Lu Wenjian, Yuta Ohba and Wei Gao
    • Organizer
      11th International Symposium of Measurent Technology and Intelligent Instruments (ISMTII2013), Aachen, Germany.
    • Place of Presentation
      Aachen, Germany
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] Precision Positioning of a Long-stroke Scanning Electrostatic Force Probe for Profile Measurement of Large Amplitude Micro-structured Surface2013

    • Author(s)
      Zhigang Jia, Gaofa He, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Matsushima, Japan
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] 超高感度角度センサに関する研究2013

    • Author(s)
      村田大,清水裕樹,伊東聡,高偉
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学(東京都)
    • Year and Date
      2013-03-14
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Design of fabrication process of thermal contact sensor for surface defect inspections2013

    • Author(s)
      Yuta OHBA, Yuki SHIMIZU, Wenjian LU and Wei GAO
    • Organizer
      The 7th International Coference on Leading Edge Manufacturing In 21st Century (LEM21)
    • Place of Presentation
      Matsushima, Japan
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] Measurement of contact potential difference and material distribution by using an SEFM2013

    • Author(s)
      Keiichiro Hosobuchi, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Matsushima, Japan
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Surface profile measurement of large amplitude micro-optics by using a scanning electrostatic force microscope2013

    • Author(s)
      Zhigang Jia, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      精密工学会東北支部講演会
    • Place of Presentation
      たざわこ芸術村(秋田)
    • Year and Date
      2013-12-07
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Surface profile measurement of large amplitude micro-optics by using a scanning electrostatic force microscope2013

    • Author(s)
      Zhigang Jia, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      精密工学会東北支部学術講演会
    • Place of Presentation
      秋田
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] An ultra-sensitive angle sensor based on laser autocollimation for stage motion measurement2013

    • Author(s)
      Dai MURATA, Siew-Leng TAN, Yuki SHIMIZU, So ITO, and Wei GAO
    • Organizer
      LEM21
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] ウエハ表面のナノレベル欠陥検出向け接触型マイクロ熱検知センサの原理検討2012

    • Author(s)
      清水裕樹,盧文剣,東豊大,高偉
    • Organizer
      精密工学会2012年度春季大会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-14
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術2012

    • Author(s)
      清水裕樹,徐鈞国,小平英一 (清水裕樹)
    • Organizer
      日本トライボロジー学会 トライボロジー会議2012 春 東京
    • Place of Presentation
      東京都代々木区
    • Invited
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] Low-cost and compact interference lithography of grating fabrication for surface encoder2012

    • Author(s)
      Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      2012年度精密工学会東北支部学術講演会
    • Place of Presentation
      山形大学工学部(米沢市)
    • Year and Date
      2012-12-01
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Fabrication of diffraction gratings for surface encoders by using a Lloyd's mirror interferometer with a 405 nm laser diode2012

    • Author(s)
      Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng
    • Organizer
      8th International Symposium on Precision Engineering Measurements and Instrumentation
    • Place of Presentation
      Chengdu, China
    • Year and Date
      2012-08-10
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Design and experiment of thermal contact sensor detecting defects on Si wafer surface2012

    • Author(s)
      Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      The 14th International Conference on Precision Engineering (ICPE2012)
    • Place of Presentation
      Awaji-shi (Hyogo)
    • Year and Date
      2012-11-08
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects2012

    • Author(s)
      Yuki Shimizu, Wenjian Lu, Wei Gao (Yuki Shimizu)
    • Organizer
      The 3rd International Conference on Nanomanufacturing (nanoMan2012)
    • Place of Presentation
      Wako-shi (Saitama, Japan)
    • Invited
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] A scanning electrostatic force microscope for surface profile measurement2012

    • Author(s)
      Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      2012年度精密工学会東北支部学術講演会
    • Place of Presentation
      山形大学(山形)
    • Year and Date
      2012-12-01
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects2012

    • Author(s)
      Yuki Shimizu, Wenjian Lu, Wei Gao
    • Organizer
      The 3rd International Conference on Nanomanufacturing (nanoMan2012)
    • Place of Presentation
      Wako-shi (Saitama)
    • Year and Date
      2012-07-26
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] 接触型熱検知センサによる平滑面欠陥検出の実験的原理検討2012

    • Author(s)
      盧文剣,清水裕樹,大場裕太,高偉
    • Organizer
      日本機械学会 第9回生産加工・工作機械部門講演会
    • Place of Presentation
      秋田
    • Year and Date
      2012-10-27
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] 光学式3軸角度センサの高精度化に関する研究2012

    • Author(s)
      村田大,清水裕樹,伊東聡,高偉
    • Organizer
      2012年度精密工学会東北支部学術講演会
    • Place of Presentation
      山形大学工学部(米沢市)
    • Year and Date
      2012-12-01
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Design and experiment of thermal contact sensor detecting defects on Si wafer surface2012

    • Author(s)
      Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao (Yuki Shimizu)
    • Organizer
      The 14th International Conference on Precision Engineering
    • Place of Presentation
      Awaji-shi (Hyogo, Japan)
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] Fast calibration of XY gratings2012

    • Author(s)
      WooJae Kim, Yuki Shimizu, So Ito, Wei Gao
    • Organizer
      第47回日本機械学会東北支部講演会
    • Place of Presentation
      東北大学(仙台)
    • Year and Date
      2012-03-13
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] モザイク格子サーフェスエンコーダに関する研究-マルチプローブセンサヘッドの開発2012

    • Author(s)
      細野幸治, 金于載, 清水裕樹, 伊東聡, 高偉
    • Organizer
      精密工学会2012春季大会
    • Place of Presentation
      首都大学東京(東京)
    • Year and Date
      2012-03-14
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] 接触型熱検知センサによる平滑面欠陥検出の実験的原理検討2012

    • Author(s)
      盧文剣,清水裕樹,大場裕太,高偉 (清水裕樹)
    • Organizer
      日本機械学会 第9回生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県由利本荘市
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] モザイク格子サーフェスエンコーダに関する研究マルチプローブセンサヘッドの開発2012

    • Author(s)
      細野幸治, 金于載, 清水裕樹, 伊東聡, 高偉
    • Organizer
      精密工学会2012春季大会
    • Place of Presentation
      首都大学東京南大沢キャンパス(東京)
    • Year and Date
      2012-03-14
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] Industry-Oriented Precision Nanometrology2011

    • Author(s)
      Wei Gao, Kang-Won Lee, Yuki Shimizu, So Ito
    • Organizer
      APMP.TCL Workshop-Collaboration and Support for Industry in Dimensional Metrology
    • Place of Presentation
      大阪国際交流センター(大阪市)(招待講演)
    • Year and Date
      2011-12-03
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] Evaluation of the linear scale for a linear encoder2011

    • Author(s)
      WooJae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
    • Organizer
      2011年度精密工学会東北支部学術講演会
    • Place of Presentation
      ウェスティンホテル仙台(仙台)
    • Year and Date
      2011-10-21
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] Industry Oriented Precision Nanometrology, APMP. TCL Workshop2011

    • Author(s)
      Kang-Won Lee, Wei Gao, Yuki Shimizu, So Ito
    • Organizer
      Collaboration and Support for Industry in Dimensional Metrology
    • Place of Presentation
      Osaka
    • Year and Date
      2011-12-03
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] Surface Encoders for Precision Measurement of Multi-axis Motions2011

    • Author(s)
      Yuki Shimizu, Wei Gao, So Ito, Woojae Kim, Akihide Kimura, Kouji Hosono
    • Organizer
      the 4th International Conference of Asia Society for Precision Engineering and Nanotechnology (ASPEN2011)
    • Place of Presentation
      Hong Kong
    • Year and Date
      2011-11-11
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] Surface Encoders for Precision Measurement of Multi-axis Motions2011

    • Author(s)
      Wei Gao, Yuki Shimizu, So Ito, Woojae Kim, Akihide Kimura, Kouji Hosono
    • Organizer
      the 4th International Conference of Asia Society for Precision Engineering and Nanotechnology (ASPEN-2011)
    • Place of Presentation
      Langham Place Hong Kong Hotel (Hong Kong, China)(招待講演)
    • Year and Date
      2011-11-16
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] 熱検知型接触センサによる半導体ウエハ上の微小欠陥検出手法の提案2011

    • Author(s)
      盧文剣, 清水裕樹, 高偉
    • Organizer
      2011年度精密工学会東北支部講演会
    • Place of Presentation
      仙台
    • Year and Date
      2011-10-21
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] New Measurement Concept of Nanometer-level Defects on Si Wafer Surface by using Micro Contact Sensor2011

    • Author(s)
      W.Lu, Y.Shimizu, W.Gao
    • Organizer
      The 8^<th> China-Japan International Conference on Ultra-Precision Machining
    • Place of Presentation
      Hangzhou, China
    • Year and Date
      2011-11-20
    • Data Source
      KAKENHI-PROJECT-23860005
  • [Presentation] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2011

    • Author(s)
      Wooujae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
    • Organizer
      the 10th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII-2011)
    • Place of Presentation
      KATST(韓国テジョン市)
    • Year and Date
      2011-06-30
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer2011

    • Author(s)
      Woojae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
    • Organizer
      The 10th International Symposium on Measurement Technology and Intelligent Instruments(ISMTII2011)
    • Place of Presentation
      KAIST (Korae)
    • Year and Date
      2011-06-30
    • Data Source
      KAKENHI-PROJECT-21360057
  • [Presentation] A six degree-of-freedom surface motor-driven stage with aerostatic bearings

    • Author(s)
      Masaya Furuta, Yuki Shimizu, So Ito and Wei Gao
    • Organizer
      The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
    • Place of Presentation
      福岡県北九州市 北九州国際会議場
    • Year and Date
      2014-11-19 – 2014-11-20
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] 三次元微細形状測定のための静電気力顕微鏡に関する研究

    • Author(s)
      細渕啓一郎, 賈志剛, 伊東聡, 清水裕樹, 何高法, 高偉
    • Organizer
      日本機械学会東北支部 第48期総会・講演会
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] 光学式3軸角度センサの小型化に関する研究

    • Author(s)
      丸山 泰司,清水 裕樹, 伊東 聡, 高 偉
    • Organizer
      2015年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京都文京区 東洋大学白山キャンパス
    • Year and Date
      2015-03-17 – 2015-03-19
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Investigation on the contact detection sensitivity of thermal contact sensor for surface defect inspections

    • Author(s)
      Yuki Shimizu, Yuta Ohba, Wei Gao
    • Organizer
      15th International Conference on Precision Engineering (ICPE2014)
    • Place of Presentation
      石川県金沢市 ホテルニッコー金沢
    • Year and Date
      2014-07-24 – 2014-07-25
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] On-machine edge contour measurement of a micro cutting tool by using a diamond edge artifact

    • Author(s)
      YuanLiu Chen, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      12th International Symposium on Measurement Technology and Intelligent Instruments
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2015-09-22 – 2015-09-25
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] A miniaturized three-axis angle sensor

    • Author(s)
      Taiji Maruyama, Siew-Leng Tan, Yuki Shimizu, Dai Murata, So Ito, and Wei Gao
    • Organizer
      The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
    • Place of Presentation
      福岡県北九州市 北九州国際会議場
    • Year and Date
      2014-11-19 – 2014-11-20
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] A multi-probe surface encoder for multi-degree-of-freedom position measurement

    • Author(s)
      Yuki Shimizu, Ryo Aihara, Yingdi Cai, Xinghui Li, So Ito and Wei Gao
    • Organizer
      The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
    • Place of Presentation
      福岡県北九州市 北九州国際会議場
    • Year and Date
      2014-11-19 – 2014-11-20
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Cutting tool positioning by utilizing a force sensor-integrated fast tool servo

    • Author(s)
      Shu Wang, Yuan-Liu Chen, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      International Conference on Positioning Technology
    • Place of Presentation
      北九州国際会議場,福岡県
    • Year and Date
      2014-11-18 – 2014-11-21
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] Investigation of surface damages in contact and form measurement with a force sensor-integrated fast tool servo

    • Author(s)
      Y.D Cai, Y.L. Chen, S. Ito, Y. Shimizu, W. Gao
    • Organizer
      38th International MATADOR Conference
    • Place of Presentation
      Huwei, Taiwan
    • Year and Date
      2015-03-28 – 2015-03-30
    • Data Source
      KAKENHI-PROJECT-26630015
  • [Presentation] 接触型マイクロ熱検知センサによるナノ平滑面微小欠陥検出に関する研究-素子プロファイル改善と接触検知感度の検討-

    • Author(s)
      清水裕樹,大場裕太,高偉
    • Organizer
      精密工学会2014年度秋季大会
    • Place of Presentation
      鳥取県鳥取市 鳥取大学
    • Year and Date
      2014-09-16 – 2014-09-18
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] A scanning electrostatic force microscope for surface profile measurement

    • Author(s)
      Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
    • Organizer
      2012年度精密工学会東北支部学術講演会
    • Place of Presentation
      山形
    • Data Source
      KAKENHI-PROJECT-24656093
  • [Presentation] Development of a six-degree-of-freedom surface encoder

    • Author(s)
      Yindi Cai, Yuki Shimizu, Xinghui Li, So Ito and Wei Gao
    • Organizer
      The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
    • Place of Presentation
      福岡県北九州市 北九州国際会議場
    • Year and Date
      2014-11-19 – 2014-11-20
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Design and testing of a contact-type micro thermal sensor for defect inspection on nanometric smooth surfaces

    • Author(s)
      Y. Shimizu, Y. Ohba, W. Gao
    • Organizer
      38th International MATADOR Conference on Advanced Manufacturing (MATADOR2015)
    • Place of Presentation
      台湾 台北市 虎尾科技大学
    • Year and Date
      2015-03-28 – 2015-03-30
    • Data Source
      KAKENHI-PROJECT-25820030
  • [Presentation] Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography

    • Author(s)
      Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito and Wei Gao
    • Organizer
      3rd International Conference on Optical and Photonic ENgineering (icOPEN2015)
    • Place of Presentation
      Singapore, Singapore
    • Year and Date
      2015-04-14 – 2015-04-16
    • Invited
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Optical sensors for precision measurement of multi-axis motions

    • Author(s)
      Yuki Shimizu
    • Organizer
      International Symposium on Optoelectronic Technology and Application (IPTA2014)
    • Place of Presentation
      Beijing, China
    • Year and Date
      2014-05-13 – 2014-05-15
    • Invited
    • Data Source
      KAKENHI-PROJECT-24360050
  • [Presentation] Measurement of three-axis vibration of an air-bearing stage

    • Author(s)
      Ryo Aihara, Takeshi Ito, So Ito, Yuki Shimizu and Wei Gao
    • Organizer
      The 6th International Conference on Positioning Technology: Mechatronics and Measurement in Precision Technology (ICPT2014)
    • Place of Presentation
      福岡県北九州市 北九州国際会議場
    • Year and Date
      2014-11-19 – 2014-11-20
    • Data Source
      KAKENHI-PROJECT-24360050
  • 1.  GAO Wei (70270816)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 280 results
  • 2.  ITO So (00624818)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 83 results
  • 3.  松隈 啓 (90728370)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 112 results
  • 4.  荒井 義和 (20455801)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  陳 遠流 (90794058)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 19 results
  • 6.  CHEN XIUGUO
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results
  • 7.  CHEN YUANLIU
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 12 results
  • 8.  新野 秀憲
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 1 results
  • 9.  吉岡 勇人
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 1 results

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