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TSUKAMOTO TAKASHIRO  塚本 貴城

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Tsukamoto Takashiro  塚本 貴城

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Researcher Number 70646413
Other IDs
Affiliation (Current) 2025: 東北大学, 工学研究科, 准教授
Affiliation (based on the past Project Information) *help 2018 – 2024: 東北大学, 工学研究科, 准教授
Review Section/Research Field
Principal Investigator
Basic Section 28050:Nano/micro-systems-related
Except Principal Investigator
Basic Section 28050:Nano/micro-systems-related / Basic Section 20010:Mechanics and mechatronics-related
Keywords
Principal Investigator
MEMS / 低熱膨張材料の微細加工 / MEMS振動子 / 熱弾性損失 / Q値 / 零熱膨張ガラス / 振動子 / 高分解能熱計測 / マイクロスケール伝熱 / 感温塗料 … More / 熱流束測定 / 熱ダイオード / 熱流束計測 / 微小領域熱計測 … More
Except Principal Investigator
MEMS / 非線形性 / ジャイロ / モード局在化 / センサー / 共振子 / センサ / アクチュエータ / SmドープPMN-PT / ピエゾ抵抗 / 圧電MEMS / PMN-PT / 信頼性 / エピタキシャル成長 / ピエゾ抵抗センサー / PZT / 圧電薄膜 Less
  • Research Projects

    (4 results)
  • Research Products

    (14 results)
  • Co-Researchers

    (2 People)
  •  2+1マスMEMS共振子による新たなモード制御法の研究と高性能センサーへの適用

    • Principal Investigator
      田中 秀治
    • Project Period (FY)
      2022 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 28050:Nano/micro-systems-related
    • Research Institution
      Tohoku University
  •  Energy Dissipation Mechanism in Zero Thermal Expansion Glass and Its Device ApplicationsPrincipal Investigator

    • Principal Investigator
      Tsukamoto Takashiro
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 28050:Nano/micro-systems-related
    • Research Institution
      Tohoku University
  •  Investigation of thermal charactoristics of micro-scale phase chambe devicesPrincipal Investigator

    • Principal Investigator
      Tsukamoto Takashiro
    • Project Period (FY)
      2019 – 2020
    • Research Category
      Grant-in-Aid for Early-Career Scientists
    • Review Section
      Basic Section 28050:Nano/micro-systems-related
    • Research Institution
      Tohoku University
  •  Stable / Reliable Sensing and Precise Control of Piezoelectric Thin Film Actuators

    • Principal Investigator
      Tanaka Shuji
    • Project Period (FY)
      2018 – 2020
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 20010:Mechanics and mechatronics-related
    • Research Institution
      Tohoku University

All 2024 2023 2022 2021 2020 2019

All Journal Article Presentation

  • [Journal Article] Two-axis multiple masses resonator with frequency and Q-factor matching2024

    • Author(s)
      J. Chen, T. Tsukamoto, G. Langfelder and S. Tanaka
    • Journal Title

      Sensors and Actuators A

      Volume: 366 Pages: 114938-114938

    • DOI

      10.1016/j.sna.2023.114938

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K23192
  • [Journal Article] A mechanically coupled three degree-of-freedom resonator with tunable stiffness sensitivity2022

    • Author(s)
      Chen Jianlin、Tsukamoto Takashiro、Tanaka Shuji
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: 344 Pages: 113713-113713

    • DOI

      10.1016/j.sna.2022.113713

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21J11628, KAKENHI-PROJECT-23K23192
  • [Journal Article] Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator2020

    • Author(s)
      Andrea Vergara, Takashiro Tsukamoto, Weileun Fang and Shuji Tanaka
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 30 Issue: 11 Pages: 115020-115020

    • DOI

      10.1088/1361-6439/abb756

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01390
  • [Presentation] MODE LOCALIZATION AND FREQUENCY MODULATION SENSINGUSING SUPERPOSED IN-PHASE AND ANTI-PHASE OSCILLATIONS2024

    • Author(s)
      T. Tsukamoto, R. Forke, S. Weidlich, D. Buelz, A. Shaporin, K. Hiller, and S. Tanaka
    • Organizer
      IEEE MEMS 2024
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K23192
  • [Presentation] Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning2023

    • Author(s)
      J. Chen, T. Tsukamoto, G. Langfelder and S. Tanaka
    • Organizer
      IEEE INERTIAL 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K23192
  • [Presentation] Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation2023

    • Author(s)
      J. Chen, H. Zhang, T. Tsukamoto, M. Kraft and S. Tanaka
    • Organizer
      2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K23192
  • [Presentation] 直交2軸振動子を用いた感度可変モード局在センシング2023

    • Author(s)
      長坂悠汰, Alessia Baronchelli, 塚本貴城, 田中秀治
    • Organizer
      日本機械学会 第14回マイクロ・ナノ工学シンポジウム
    • Data Source
      KAKENHI-PROJECT-23K23192
  • [Presentation] 零熱膨張率ガラスを用いたカンチレバー型振動子の作製2022

    • Author(s)
      小代洸太, 内海太一, 塚本貴城, 田中秀治
    • Organizer
      日本機械学会第13回マイクロ・ナノ工学シンポジウム
    • Data Source
      KAKENHI-PROJECT-21H01776
  • [Presentation] MEMS 振動子のための零熱膨張率ガラスの反応性イオンエッチング2022

    • Author(s)
      小代洸太, 塚本貴城, 田中秀治
    • Organizer
      日本機械学会2022年度年次大会予稿集
    • Data Source
      KAKENHI-PROJECT-21H01776
  • [Presentation] 零熱膨張ガラスを用いた MEMS 半球振動子の作製2022

    • Author(s)
      内海太一, 小代洸太, 塚本貴城, 田中秀治
    • Organizer
      日本機械学会第13回マイクロ・ナノ工学シンポジウム
    • Data Source
      KAKENHI-PROJECT-21H01776
  • [Presentation] PZT MEMS ACTUATOR WITH INTEGRATED BURIED PIEZORESISTORS FOR POSITION CONTROL2021

    • Author(s)
      Andrea Vergara, Takashiro Tsukamoto, Weileun Fang and Shuji Tanaka
    • Organizer
      34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-18H01390
  • [Presentation] PZT THIN FILM ACTUATOR WITH INTEGRATED BURIED PIEZORESISTOR FOR HIGH STABILITY POSITION CONTROL2020

    • Author(s)
      Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
    • Organizer
      日本機械学会東北支部第55期総会・講演会
    • Data Source
      KAKENHI-PROJECT-18H01390
  • [Presentation] PZT thin film actuator with integrated buried piezoresistive sensors for high precision and stability2019

    • Author(s)
      Vergara Andrea, 塚本貴城, Fang Weileun, 田中秀治
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-18H01390
  • [Presentation] ntegration of buried piezoresistive sensors and PZT thin film for highly stable MEMS actuators2019

    • Author(s)
      Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Data Source
      KAKENHI-PROJECT-18H01390
  • 1.  Tanaka Shuji (00312611)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 10 results
  • 2.  吉田 慎哉 (30509691)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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