TSUKAMOTO TAKASHIRO 塚本貴城

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Tsukamoto Takashiro 塚本貴城

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Researcher Number	70646413
Other IDs
Affiliation (Current)	2025: 東北大学, 工学研究科, 准教授
Affiliation (based on the past Project Information) *help	2018 – 2024: 東北大学, 工学研究科, 准教授
Review Section/Research Field	Principal Investigator Basic Section 28050:Nano/micro-systems-related Except Principal Investigator Basic Section 28050:Nano/micro-systems-related / Basic Section 20010:Mechanics and mechatronics-related
Keywords	Principal Investigator MEMS / 低熱膨張材料の微細加工 / MEMS振動子 / 熱弾性損失 / Q値 / 零熱膨張ガラス / 振動子 / 高分解能熱計測 / マイクロスケール伝熱 / 感温塗料 … More / 熱流束測定 / 熱ダイオード / 熱流束計測 / 微小領域熱計測 … More Except Principal Investigator MEMS / 非線形性 / ジャイロ / モード局在化 / センサー / 共振子 / センサ / アクチュエータ / SmドープPMN-PT / ピエゾ抵抗 / 圧電MEMS / PMN-PT / 信頼性 / エピタキシャル成長 / ピエゾ抵抗センサー / PZT / 圧電薄膜 Less

2+1マスMEMS共振子による新たなモード制御法の研究と高性能センサーへの適用
- Principal Investigator
  
  田中秀治
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tohoku University
Energy Dissipation Mechanism in Zero Thermal Expansion Glass and Its Device ApplicationsPrincipal Investigator
- Principal Investigator
  
  Tsukamoto Takashiro
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tohoku University
Investigation of thermal charactoristics of micro-scale phase chambe devicesPrincipal Investigator
- Principal Investigator
  
  Tsukamoto Takashiro
- Project Period (FY)
  2019 – 2020
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tohoku University
Stable / Reliable Sensing and Precise Control of Piezoelectric Thin Film Actuators
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 20010:Mechanics and mechatronics-related
- Research Institution
  Tohoku University

All 2024 2023 2022 2021 2020 2019

All Journal Article Presentation

[Journal Article] Two-axis multiple masses resonator with frequency and Q-factor matching2024
- Author(s)
  J. Chen, T. Tsukamoto, G. Langfelder and S. Tanaka
- Journal Title
  
  Sensors and Actuators A
  
  Volume: 366 Pages: 114938-114938
- DOI
  10.1016/j.sna.2023.114938
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Journal Article] A mechanically coupled three degree-of-freedom resonator with tunable stiffness sensitivity2022
- Author(s)
  Chen Jianlin、Tsukamoto Takashiro、Tanaka Shuji
- Journal Title
  
  Sensors and Actuators A: Physical
  
  Volume: 344 Pages: 113713-113713
- DOI
  10.1016/j.sna.2022.113713
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21J11628, KAKENHI-PROJECT-23K23192
[Journal Article] Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator2020
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang and Shuji Tanaka
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 30 Issue: 11 Pages: 115020-115020
- DOI
  10.1088/1361-6439/abb756
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] MODE LOCALIZATION AND FREQUENCY MODULATION SENSINGUSING SUPERPOSED IN-PHASE AND ANTI-PHASE OSCILLATIONS2024
- Author(s)
  T. Tsukamoto, R. Forke, S. Weidlich, D. Buelz, A. Shaporin, K. Hiller, and S. Tanaka
- Organizer
  IEEE MEMS 2024
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning2023
- Author(s)
  J. Chen, T. Tsukamoto, G. Langfelder and S. Tanaka
- Organizer
  IEEE INERTIAL 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation2023
- Author(s)
  J. Chen, H. Zhang, T. Tsukamoto, M. Kraft and S. Tanaka
- Organizer
  2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] 直交2軸振動子を用いた感度可変モード局在センシング2023
- Author(s)
  長坂悠汰, Alessia Baronchelli, 塚本貴城, 田中秀治
- Organizer
  日本機械学会第14回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-23K23192
[Presentation] 零熱膨張率ガラスを用いたカンチレバー型振動子の作製2022
- Author(s)
  小代洸太, 内海太一, 塚本貴城, 田中秀治
- Organizer
  日本機械学会第13回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-21H01776
[Presentation] MEMS 振動子のための零熱膨張率ガラスの反応性イオンエッチング2022
- Author(s)
  小代洸太, 塚本貴城, 田中秀治
- Organizer
  日本機械学会2022年度年次大会予稿集
- Data Source
  KAKENHI-PROJECT-21H01776
[Presentation] 零熱膨張ガラスを用いた MEMS 半球振動子の作製2022
- Author(s)
  内海太一, 小代洸太, 塚本貴城, 田中秀治
- Organizer
  日本機械学会第13回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-21H01776
[Presentation] PZT MEMS ACTUATOR WITH INTEGRATED BURIED PIEZORESISTORS FOR POSITION CONTROL2021
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang and Shuji Tanaka
- Organizer
  34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] PZT THIN FILM ACTUATOR WITH INTEGRATED BURIED PIEZORESISTOR FOR HIGH STABILITY POSITION CONTROL2020
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
- Organizer
  日本機械学会東北支部第55期総会・講演会
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] PZT thin film actuator with integrated buried piezoresistive sensors for high precision and stability2019
- Author(s)
  Vergara Andrea, 塚本貴城, Fang Weileun, 田中秀治
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] ntegration of buried piezoresistive sensors and PZT thin film for highly stable MEMS actuators2019
- Author(s)
  Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18H01390

1. Tanaka Shuji (00312611)

# of Collaborated Projects: 2 results

# of Collaborated Products: 10 results
2. 吉田慎哉 (30509691)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

TSUKAMOTO TAKASHIRO 塚本 貴城

Tsukamoto Takashiro 塚本 貴城

Research Projects

Research Products

Co-Researchers

2+1マスMEMS共振子による新たなモード制御法の研究と高性能センサーへの適用

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Energy Dissipation Mechanism in Zero Thermal Expansion Glass and Its Device ApplicationsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Investigation of thermal charactoristics of micro-scale phase chambe devicesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Stable / Reliable Sensing and Precise Control of Piezoelectric Thin Film Actuators

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] Two-axis multiple masses resonator with frequency and Q-factor matching2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] A mechanically coupled three degree-of-freedom resonator with tunable stiffness sensitivity2022

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator2020

Author(s)

Journal Title

DOI

Data Source

[Presentation] MODE LOCALIZATION AND FREQUENCY MODULATION SENSINGUSING SUPERPOSED IN-PHASE AND ANTI-PHASE OSCILLATIONS2024

Author(s)

Organizer

Data Source

[Presentation] Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning2023

Author(s)

Organizer

Data Source

[Presentation] Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation2023

Author(s)

Organizer

Data Source

[Presentation] 直交2軸振動子を用いた感度可変モード局在センシング2023

Author(s)

Organizer

Data Source

[Presentation] 零熱膨張率ガラスを用いたカンチレバー型振動子の作製2022

Author(s)

Organizer

Data Source

[Presentation] MEMS 振動子のための零熱膨張率ガラスの反応性イオンエッチング2022

Author(s)

Organizer

Data Source

[Presentation] 零熱膨張ガラスを用いた MEMS 半球振動子の作製2022

Author(s)

Organizer

Data Source

[Presentation] PZT MEMS ACTUATOR WITH INTEGRATED BURIED PIEZORESISTORS FOR POSITION CONTROL2021

Author(s)

Organizer

Data Source

[Presentation] PZT THIN FILM ACTUATOR WITH INTEGRATED BURIED PIEZORESISTOR FOR HIGH STABILITY POSITION CONTROL2020

Author(s)

Organizer

Data Source

TSUKAMOTO TAKASHIRO 塚本貴城

Tsukamoto Takashiro 塚本貴城