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Takeuchi Masaya  竹内 雅耶

ORCIDConnect your ORCID iD *help
Researcher Number 70889683
Other IDs
Affiliation (Current) 2025: 兵庫県立大学, 工学研究科, 助教
Affiliation (based on the past Project Information) *help 2022 – 2024: 兵庫県立大学, 工学研究科, 助教
Review Section/Research Field
Principal Investigator
Basic Section 18020:Manufacturing and production engineering-related
Except Principal Investigator
Basic Section 18020:Manufacturing and production engineering-related
Keywords
Principal Investigator
原子層エッチング / X線光電子顕微鏡 / X線光電子分光 / 窒化シリコン / ガスクラスターイオンビーム
Except Principal Investigator
位置制御 / ガスクラスターイオン / 高精度加工 / 原子層エッチング / クラスタービーム
  • Research Projects

    (2 results)
  • Research Products

    (24 results)
  • Co-Researchers

    (2 People)
  •  ジケトン分子吸着過程およびガスクラスターイオンビーム照射による表面反応過程の解明Principal Investigator

    • Principal Investigator
      竹内 雅耶
    • Project Period (FY)
      2023 – 2025
    • Research Category
      Grant-in-Aid for Early-Career Scientists
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      University of Hyogo
  •  Ultra-precise fabrication technology by location specific atomic layer etching with cluster beam

    • Principal Investigator
      豊田 紀章
    • Project Period (FY)
      2022 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 18020:Manufacturing and production engineering-related
    • Research Institution
      University of Hyogo

All 2024 2023 2022

All Journal Article Presentation

  • [Journal Article] Atomic layer etching of silicon nitride film by oxygen gas cluster ion beam with acetylacetone2023

    • Author(s)
      Takeuchi Masaya、Fujiwara Reki、Toyoda Noriaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SG Pages: SG1051-SG1051

    • DOI

      10.35848/1347-4065/acd065

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K13236, KAKENHI-PROJECT-23K22649
  • [Journal Article] Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu?Cu bonding2022

    • Author(s)
      S. Hanahara、M. Takeuchi、N. Toyoda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SF Pages: SF1004-SF1004

    • DOI

      10.35848/1347-4065/ac5424

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] 反応性ガス吸着とGCIB照射を用いたエッチングにおける基板冷却効果2024

    • Author(s)
      伊藤汰一,作田昂大,竹内雅耶,豊田紀章
    • Organizer
      2024年応用物理学会春季講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] GCIB照射で極薄化した電子線透過窓を用いた液体セルによるSEM/EDS検出の高感度化2024

    • Author(s)
      竹内 雅耶, 鈴木 哲, 豊田 紀章
    • Organizer
      第71回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K13236
  • [Presentation] 中性ガスクラスタービームを用いたCu膜のドライALE2024

    • Author(s)
      池田 圭佑, 田中 秀幸, 竹内 雅耶, 豊田 紀章
    • Organizer
      2024年応用物理学会春季講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] GCIB照射で極薄化した電子線透過窓を用いた 液体セルによるSEM/EDS検出の高感度化2024

    • Author(s)
      竹内雅耶,鈴木哲,豊田紀章
    • Organizer
      2024年応用物理学会春季講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] Imaging and spectroscopy of liquid-water using X-ray PEEM2023

    • Author(s)
      Masaya Takeuchi, Noriaki Toyoda, Satoru Suzuki
    • Organizer
      Frontier of Soft X-ray Spectroscopy for Chemical Processes in Solutions
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K13236
  • [Presentation] Reactive etching and pressure resistance evaluation of SiNx film by O2-GCIB for electron transmission window of liquid cell2023

    • Author(s)
      Masaya Takeuchi, Satoru Suzuki, Masaki Nakamura, Takashi Hata, Yusuke Nishiuchi, Kaori Tada, Noriaki Toyoda
    • Organizer
      MNC2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K13236
  • [Presentation] Evaluation of mechanical property of ultra-thin SiNx membranes irradiated by gas cluster ion beam2023

    • Author(s)
      M. Takeuchi, N. Toyoda
    • Organizer
      21st International Conference on Radiation Effects in Insulators
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K13236
  • [Presentation] Evaluation of mechanical property of ultra-thin SiNx membranes irradiated by gas cluster ion beam2023

    • Author(s)
      M. Takeuchi, N. Toyoda
    • Organizer
      Radiation Effects in Insulator 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] Surface Modification with Neutral Gas Cluster Beams and Its Application to Atomic Layer Etching2023

    • Author(s)
      N. Toyoda, H. Tanaka, M. Takeuchi
    • Organizer
      Atomic Layer Etching Symposium 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] GCIBを用いた電子透過窓極薄化による液中試料検出の高感度化2023

    • Author(s)
      竹内雅耶,鈴木哲,豊田紀章
    • Organizer
      2023年応用物理学会秋季講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] 反応性ガス吸着とO 2 -GCIBを用いたNiパターンエッチング2023

    • Author(s)
      作田昂大、竹内雅耶、豊田紀章
    • Organizer
      2023年第70回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] 2023年中性クラスタービーム照射による金属膜のエッチング2023

    • Author(s)
      田中秀幸、竹内雅耶、豊田紀章
    • Organizer
      応用物理学会秋季講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] GCIBを用いた電子透過窓極薄化による液中試料検出の 高感度化2023

    • Author(s)
      竹内雅耶, 鈴木哲, 豊田紀章
    • Organizer
      第84回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K13236
  • [Presentation] 反応性ガス吸着とO2-GCIB照射を用いた金属エッチングの基板冷却効果2023

    • Author(s)
      作田昂大、竹内雅耶、豊田紀章
    • Organizer
      2023年応用物理学会秋季講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] Surface modification and etching of metal films by neutral cluster beam irradiation2023

    • Author(s)
      H. Tanaka, M. Takeuchi, N.Toyoda
    • Organizer
      Dry Process Symposium 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] Temperature dependence on metal etching using reactive gas adsorption and GCIB2023

    • Author(s)
      K. Sakuta, M. Takeuchi, N. Toyoda
    • Organizer
      Dry Process Symposium 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] O 2 -GCIBとアセチルアセトンによるSiNx膜原子層エッチングプロセスの反応機構の検討2023

    • Author(s)
      竹内雅耶、藤原怜輝、山下大晴、豊田紀章
    • Organizer
      2023年第70回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] Reactive etching and pressure resistance evaluation of SiNx film by O2-GCIB for electron transmission window of liquid cell2023

    • Author(s)
      M. Takeuchi, S. Suzuki, M. Nakamura, T. Hata, N. Toyoda
    • Organizer
      MNC 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] O2-GCIBとacac吸着によるNiパターンのエッチング2022

    • Author(s)
      作田昂大、竹内雅耶、豊田紀章
    • Organizer
      2022年第83回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] 位置制御とGCIB-ALEを用いた高精度形状加工技術の検討2022

    • Author(s)
      藤原怜輝、竹内雅耶、豊田紀章
    • Organizer
      2022年第83回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] 窒化シリコン膜へのGCIB照射による低損傷照射効果の検討2022

    • Author(s)
      竹内雅耶、藤原怜輝、豊田紀章
    • Organizer
      2022年第83回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • [Presentation] 窒化シリコン膜の低損傷かつ原子層制御を実現するGCIBエッチングプロセスの検討2022

    • Author(s)
      竹内雅耶、藤原怜輝、豊田紀章
    • Organizer
      2022年第83回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-23K22649
  • 1.  豊田 紀章 (00382276)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 18 results
  • 2.  寺岡 有殿 (10343922)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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