Toh Daisetsu 藤大雪

Researcher Number	70910678
Other IDs
Affiliation (Current)	2025: 大阪大学, 大学院工学研究科, 助教
Affiliation (based on the past Project Information) *help	2021 – 2025: 大阪大学, 大学院工学研究科, 助教
Review Section/Research Field	Principal Investigator Basic Section 18020:Manufacturing and production engineering-related Except Principal Investigator Broad Section C
Keywords	Principal Investigator Ru / Cu / 金属配線付き基板 / 超精密表面研磨加工 Except Principal Investigator X線顕微鏡 / X線自由電子レーザー / X線ミラー / 精密加工 / 精密計測

大気圧プラズマと金属拡散接合を利用した接着剤フリーの形状可変ミラーの作製Principal Investigator
- Principal Investigator
  
  藤大雪
- Project Period (FY)
  2025 – 2026
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  The University of Osaka
金属配線付き基板を段差導入なく平坦にする純水を用いた持続可能な精密研磨技術の開発Principal Investigator
- Principal Investigator
  
  藤大雪
- Project Period (FY)
  2023 – 2024
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 18020:Manufacturing and production engineering-related
- Research Institution
  Osaka University
Development of X-ray nanobeam optics by precision wavefront control
- Principal Investigator
  
  山内和人
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Review Section
  
  Broad Section C
- Research Institution
  Osaka University

All 2024 2023 2022 2021

All Journal Article Presentation

[Journal Article] High-Efficiency Polishing of Polymer Surface Using Catalyst-Referred Etching2024
- Author(s)
  Toh Daisetsu、Takeda Kodai、Kayao Kiyoto、Ohkubo Yuji、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  International Journal of Automation Technology
  
  Volume: 18 Issue: 2 Pages: 240-247
- DOI
  10.20965/ijat.2024.p0240
- ISSN
  1881-7629, 1883-8022
- Year and Date
  2024-03-05
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-23K13234, KAKENHI-PROJECT-21H05004
[Journal Article] Bias-assisted photoelectrochemical planarization of GaN (0001) with impurity concentration distribution2023
- Author(s)
  Toh D.、Kayao K.、Ohnishi R.、Osaka A. I.、Yamauchi K.、Sano Y.
- Journal Title
  
  AIP Advances
  
  Volume: 13 Issue: 9
- DOI
  10.1063/5.0151387
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H05004
[Journal Article] Fabrication of YAG ceramics surface without damage and grain boundary steps using catalyzed chemical wet etching2023
- Author(s)
  Toh Daisetsu、Kayao Kiyoto、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  CIRP Journal of Manufacturing Science and Technology
  
  Volume: 47 Pages: 1-6
- DOI
  10.1016/j.cirpj.2023.09.001
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H05004
[Journal Article] Catalyst enhancement approach for improving the removal rate and stability of silica glass polishing via catalyzed chemical etching in pure water2023
- Author(s)
  Toh Daisetsu、Kayao Kiyoto、Bui Pho Van、Inagaki Kouji、Morikawa Yoshitada、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  Precision Engineering
  
  Volume: 84 Pages: 21-27
- DOI
  10.1016/j.precisioneng.2023.07.003
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Journal Article] Role of Photoelectrochemical Oxidation in Enabling High-Efficiency Polishing of Gallium Nitride2023
- Author(s)
  Kayao Kiyoto、Toh Daisetsu、Yamauchi Kazuto、Sano Yasuhisa
- Journal Title
  
  ECS Journal of Solid State Science and Technology
  
  Volume: 12 Issue: 6 Pages: 063005-063005
- DOI
  10.1149/2162-8777/acde61
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 触媒表面基準エッチング法を用いたSi基板の原子オーダー平滑化およびエッチング機構の解明2023
- Author(s)
  藤大雪，板垣果歩，山﨑博人，萱尾澄人，山内和人，佐野泰久
- Organizer
  2023年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-23K13234
[Presentation] Characteristics of Photoelectrochemical Oxidation Enabling High-efficiency Polishing of Gallium Nitride2023
- Author(s)
  K. Kayao, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  International Conference on Silicon Carbide and Related Materials (ICSCRM2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] High-speed planarization of GaN (0001) substrate using catalyst-referred etching enhanced with positive-biased photoelectrochemical oxidation2023
- Author(s)
  D. Toh, K. Kayao, K. Yamauchi and Y. Sano
- Organizer
  International Conference on Silicon Carbide and Related Materials (ICSCRM2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 触媒表面基準エッチング法を用いたダメージレスかつ原子レベルに平滑なSi(100)表面の作製2023
- Author(s)
  藤大雪，萱尾澄人，山内和人，佐野泰久
- Organizer
  2023年度砥粒加工学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K13234
[Presentation] 触媒表面基準エッチング法を用いた金属配線付き基板の高精度平坦化－配線金属のエッチング特性評価－2023
- Author(s)
  山﨑博人，萱尾澄人，藤大雪，山内和人，佐野泰久
- Organizer
  2023年度精密工学会関西地方定期学術講演会
- Data Source
  KAKENHI-PROJECT-23K13234
[Presentation] Surface Planarization of YAG Ceramics Using Catalyst-Referred Etching2023
- Author(s)
  Y. Yoshida, K. Kayao, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  American Society for Precision Engineering (ASPE) 2023 Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 触媒表面基準エッチング法を用いたRuのエッチング特性2023
- Author(s)
  山﨑博人，萱尾澄人，藤大雪，山内和人，佐野泰久
- Organizer
  2023年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-23K13234
[Presentation] 形状可変ミラーを用いたX線sub-5 nm集光システムの開発2022
- Author(s)
  井上陽登，松山智至，田中優人，伊藤篤輝，一井愛雄，山田純平，佐野泰久，香村芳樹，矢橋牧名，石川哲也，山内和人
- Organizer
  第35回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Fabrication of an atomically smooth polycrystalline surface without grain boundary steps using catalyst-referred etching2022
- Author(s)
  D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
- Organizer
  Euspen's 22nd International Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Planarization of polymer materials using catalytic reaction in pure water2022
- Author(s)
  K. Takeda, D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
- Organizer
  Euspen's 22nd International Conference
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] dvanced KBミラーに基づく硬X線自由電子レーザー sub-10 nm 集光システム2022
- Author(s)
  山田純平，松山智至，井上陽登，伊藤篤輝，田中優人，大坂泰斗，井上伊知郎，犬伏雄一，小山貴久，湯本博勝，大橋治彦，山内和人，矢橋牧名
- Organizer
  第35回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] High-Speed Catalyst-Referred Etching of Gallium Nitride Assisted by Ultraviolet Light Irradiation" American Society for Precision Engineering (ASPE) 2022 Annual Meeting2022
- Author(s)
  K. Kayao, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  American Society for Precision Engineering (ASPE) 2022 Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Surface planarization of polycrystalline silicon carbide by catalyst-referred etching2022
- Author(s)
  K. Futamura, D. Toh, K. Yamauchi and Y. Sano
- Organizer
  American Society for Precision Engineering (ASPE) 2022 Annual Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] Preparation of highly planarized optical surface on Si substrate via catalyst-referred etching2022
- Author(s)
  K. Itagaki, D. Toh, P. V. Bui, S. Matsuyama, K. Yamauchi and Y. Sano
- Organizer
  Euspen's 22nd International Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H05004
[Presentation] 触媒表面基準エッチング法を用いた粒界段差フリーな超平滑多結晶材料表面の作製2021
- Author(s)
  藤大雪，Bui Van Pho，松山智至，佐野泰久，山内和人
- Organizer
  2021年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-21H05004

1. 山内和人 (10174575)

# of Collaborated Projects: 1 results

# of Collaborated Products: 15 results
2. 山田純平 (10845027)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
3. 佐野泰久 (40252598)

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results
4. 松山智至 (10423196)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results

Toh Daisetsu 藤 大雪

Research Projects

Research Products

Co-Researchers

大気圧プラズマと金属拡散接合を利用した接着剤フリーの形状可変ミラーの作製Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

金属配線付き基板を段差導入なく平坦にする純水を用いた持続可能な精密研磨技術の開発Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of X-ray nanobeam optics by precision wavefront control

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] High-Efficiency Polishing of Polymer Surface Using Catalyst-Referred Etching2024

Author(s)

Journal Title

DOI

ISSN

Year and Date

Language

Data Source

[Journal Article] Bias-assisted photoelectrochemical planarization of GaN (0001) with impurity concentration distribution2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Fabrication of YAG ceramics surface without damage and grain boundary steps using catalyzed chemical wet etching2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Catalyst enhancement approach for improving the removal rate and stability of silica glass polishing via catalyzed chemical etching in pure water2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Role of Photoelectrochemical Oxidation in Enabling High-Efficiency Polishing of Gallium Nitride2023

Author(s)

Journal Title

DOI

Data Source

[Presentation] 触媒表面基準エッチング法を用いたSi基板の原子オーダー平滑化およびエッチング機構の解明2023

Author(s)

Organizer

Data Source

[Presentation] Characteristics of Photoelectrochemical Oxidation Enabling High-efficiency Polishing of Gallium Nitride2023

Author(s)

Organizer

Data Source

[Presentation] High-speed planarization of GaN (0001) substrate using catalyst-referred etching enhanced with positive-biased photoelectrochemical oxidation2023

Author(s)

Organizer

Data Source

[Presentation] 触媒表面基準エッチング法を用いたダメージレスかつ原子レベルに平滑なSi(100)表面の作製2023

Author(s)

Organizer

Data Source

[Presentation] 触媒表面基準エッチング法を用いた金属配線付き基板の高精度平坦化－配線金属のエッチング特性評価－2023

Author(s)

Organizer

Data Source

[Presentation] Surface Planarization of YAG Ceramics Using Catalyst-Referred Etching2023

Author(s)

Organizer

Data Source

[Presentation] 触媒表面基準エッチング法を用いたRuのエッチング特性2023

Author(s)

Organizer

Data Source

[Presentation] 形状可変ミラーを用いたX線sub-5 nm集光システムの開発2022

Author(s)

Toh Daisetsu 藤大雪

[Presentation] 触媒表面基準エッチング法を用いた粒界段差フリーな超平滑多結晶材料表面の作製2021