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WATANABE Yukio  渡辺 征夫

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… Alternative Names

YUKIO Watanabe  渡辺 征夫

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Researcher Number 80037902
Other IDs
External Links
Affiliation (based on the past Project Information) *help 2006: Kyushu University, Graduate school of information science and electrical engineering, Professor Emeritus, 大学院システム情報科学研究院, 名誉教授
2004: Kyushu University, Department of Electronics, Professor, 大学院・システム情報科学研究院・電子デバイス部門, 教授
2003 – 2004: Kyushu University, Grad.School of Info.Sci.and Electrical Eng., Prof., 大学院・システム情報科学研究院・電子デバイス工学部門, 教授
2002: 九州大学, システム情報科学研究院, 教授
2000: KYUSHU UNIVERSITY, Grad. School of Info. Sci. and Electrical Eng., Prof, システム情報科学研究院・電子デバイス工学部門, 教授 … More
2000: 九州大学, 大学院・システム情報科学研究院, 教授
1999 – 2000: 九州大学, システム情報科学研究科, 教授
1998: 九州大学, 大学院システム情報科学研究科, 教授
1996 – 1998: KYUSHU UNIVERSITY,GRADUATE SCHOOL OF INFORMATION SCIENCE AND ELECTRICAL ENGINEERING,PROFESSOR, 大学院・システム情報科学研究科, 教授
1996: Kyushu University, Dep. of Inf. Sci., Professor, システム情報科学研究科, 教授
1994 – 1996: 九州大学, 工学部, 教授
1987 – 1992: 九州大学, 工学部, 教授
1986: 九州大学, 工, 教授 Less
Review Section/Research Field
Principal Investigator
Applied physics, general / 電力工学 / Electronic materials/Electric materials / プラズマ理工学 / 応用物理学一般(含航海学) / Plasma science
Except Principal Investigator
Thin film/Surface and interfacial physical properties / 表面界面物性 / プラズマ理工学 / Applied physics, general
Keywords
Principal Investigator
シランプラズマ / アモルファスシリコン / 微粒子 / ダスト / silane plasma / 凝集 / 水素化アモルファスシリコン / プラズマCVD / 水素希釈 / 光劣化 … More / 微細構造パラメータ / amorphous silicon / cluster / dust / 高周波放電 / パーティクル / シリコン / 光電子放出 / 光電離 / クラスター / レーザ散乱法 / プラズマプロセス / 変調高周波放電法 / ラジカル / ミ-散乱 / ラジカル種の寿命 / 矩形波振幅変調高周波放電 / laser interferometry / arc / electrode boudary layer / MHD power generation / 温度測定 / レーザ干渉法 / アーク / 電極境界層 / MHD発電 / higher order silane / multi-hollow discharge / cluster eliminating filter / light induced degradation / thin film solar cell / silicon particle / clustering reaction control in plasma CVD / ショットキセル / 太陽電池 / Si-H_2結合 / Si-H結合 / 高次シラン / マルチホロー電極 / クラスタ除去フィルタ / 薄膜太陽電池 / シリコン微粒子 / クラスタ抑制プラズマCVD法 / fill factor / microstructure parameter / pulse discharges / gas viscous force / thermophoretic force / a-Si : H / 核形成 / 変調放電法 / Siクラスタ / 曲線因子 / パルス放電 / ガス粘性力 / 熱泳動力 / クラスタ / photo-detachment / photo-ionization / photoemission / particle / サブナノ微粒子 / 光脱離 / アモルファスシロコン / 光電子脱離 / plasma CVD / coagulation / high frequency plasma / discharge frequency dependence / particles / VHFプラズマ / 放電周波数 / 高周波プラズマ / 放電周波数依存性 / LASER SCATTERING METHOD / DUSTY PLASMA / RF DISCHARGE / AMORPHOUS SILICON / PARTICLE / POWDER / PARTICULATE / SILANE PLASMA / 負イオン / rf放電 / 散乱比法 / 水素化アモルファシスシリコン / 微粒子プラズマ / パウダー / シランガス / アモルファスシリコン膜 / 自己組織化 / 収率 / スパッタリング / カーボン微粒子 / ナノ構造制御 / プラズマスパッタリング / 結晶シリコンナノ微粒子 / 微重力 / 微結晶 / 超分子 / プラスマCVD / Si微粒子 / 走査型電子顕微鏡 / レーザ偏光散乱法 / プラズマCVD法 / 帯電凝集 / 反応制御 / 変調RF放電 / RF放電 / シラン … More
Except Principal Investigator
LSI / Sputtering / Plasma CVD / 埋め込み形状 / スパッタリング / プラズマCVD / 銅配線 / プラズマ / Inductive coupled plasma / Nano-structure / Ion-assisted CVD / Anisotropic deposition / Copper interconnects / 異法性製膜 / ルテニウム / 誘導結合型放電 / ナノ構造 / イオンアシスト製膜 / 異方性製膜 / Deposition Profile in Trench / Monte-Carlo Simulation / Ion-Assisted Deposition / Anisotropic Deposition / Cu Interconnects / イオン照射 / 水素原子 / モンテカルロシミュレーション / イオンアシスト成膜 / 異方性成膜 / Plasma Science / 核融合 / 地球・宇宙環境 / 材料プロセス / プラズマ科学 / ION / PROCESS / SPECTROSCOPY / MODELING / PARTICLES / LASER / PLASMA / FREE RADICAL / シリコン / イオン / プロセス / 分光 / モデリング / 微粒子 / レーザー / フリーラジカル / 電離不安定 / レーザ計測 / MHDアーク / 石炭スラグ / 燃焼ガスプラズマ / MHD発電 / プラズマ素子 / マイクロ材料プロセス / マイクロ化学分析 / プラズマ-表面相互作用 / ミクロ反応場 / 生成・診断・制御法 / マイクロプラズマ Less
  • Research Projects

    (19 results)
  • Research Products

    (42 results)
  • Co-Researchers

    (26 People)
  •  Plasma anisotropic CVD as a novel method for constructing nano-structures

    • Principal Investigator
      SHIRATANI Masaharu
    • Project Period (FY)
      2004 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      KYUSHU UNIVERCITY
  •  微重力反応性プラズマ中の微粒子成長Principal Investigator

    • Principal Investigator
      渡辺 征夫
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Plasma science
    • Research Institution
      Kyushu University
  •  Clustering reaction control in plasma CVD for fabricating high efficiency solar cellsPrincipal Investigator

    • Principal Investigator
      YUKIO Watanabe
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      KYUSHU UNIVERSITY
  •  Plasma Anisotropic CVD for Cu Interconnects in LSI

    • Principal Investigator
      SHIRATANI Masaharu
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      表面界面物性
    • Research Institution
      Kyushu University
  •  プラズマを用いたミクロ反応場の創成と応用の新展開に関する総合的研究

    • Principal Investigator
      TACHIBANA Kunihide
    • Project Period (FY)
      2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Applied physics, general
    • Research Institution
      Kyoto University
  •  Study on growth kinetics of Si clusters in silane plasmasPrincipal Investigator

    • Principal Investigator
      WATANABE Yukio
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      Applied physics, general
    • Research Institution
      KYUSHU UNIVERSITY
  •  シリコン系超分子の作製と構造抑制に関する研究Principal Investigator

    • Principal Investigator
      渡辺 征夫
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Applied physics, general
    • Research Institution
      Kyushu University
  •  Development of in-situ measurement method of sub-nm size particles in processing plasmasPrincipal Investigator

    • Principal Investigator
      WATANABE Yukio
    • Project Period (FY)
      1996 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied physics, general
    • Research Institution
      KYUSHU UNIVERSITY
  •  シランプラズマ中Si微粒子の凝集過程に関する研究Principal Investigator

    • Principal Investigator
      渡辺 征夫
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyushu University
  •  Plasma Science

    • Principal Investigator
      SATO Noriyoshi
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Tohoku University
  •  Study on effect of discharge frequency on particle growth in high frequency plasma.Principal Investigator

    • Principal Investigator
      WATANABE Yukio
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      KYUSHU UNIVERSITY
  •  シランプラズマ中Si微粒子の凝集過程に関する研究Principal Investigator

    • Principal Investigator
      渡辺 征夫
    • Project Period (FY)
      1994
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyushu University
  •  STUDIES ON MEASUREMENTS OF RADICALS IN GAS PHASE USING SPECTROSCOPY TECHNIQUES

    • Principal Investigator
      GOTO Toshio
    • Project Period (FY)
      1993 – 1995
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Nagoya University
  •  OBSERVATION OF GROWING KINETICS OF SILICON PARTICULATES IN SILNAE PLASMASPrincipal Investigator

    • Principal Investigator
      WATANABE Yukio
    • Project Period (FY)
      1991 – 1992
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      応用物理学一般(含航海学)
    • Research Institution
      KYUSHU UNIVERSITY
  •  高周波電圧矩形波変調法によるシランプラズマの反応制御Principal Investigator

    • Principal Investigator
      渡辺 征夫
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyushu University
  •  パルス放電希ガス希釈プロセシングプラズマの反応促進機構の解明と応用に関する研究Principal Investigator

    • Principal Investigator
      渡辺 征夫
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyushu University
  •  パルス放電希ガス希釈プロセシングプラズマの反応促進機構の解明と応用に関する研究Principal Investigator

    • Principal Investigator
      渡辺 征夫
    • Project Period (FY)
      1988
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyushu University
  •  STUDY ON ARC DISCHARGE PHENOMENA IN BOUNDARY LAYER OF MHD CHANNEL ELECTRODE USING LASER TECHNIQUEPrincipal Investigator

    • Principal Investigator
      WATANABE Yukio
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      電力工学
    • Research Institution
      KYUSHU UNIVERSITY
  •  高温熱エネルギーによる直接発電

    • Principal Investigator
      赤崎 正則
    • Project Period (FY)
      1986
    • Research Category
      Grant-in-Aid for Energy Research
    • Research Institution
      Kyushu University

All 2006 2005 2004

All Journal Article Book Patent

  • [Book] 「プラズマの生成と診断-応用への道-」7.2節ダストプラズマ2004

    • Author(s)
      渡辺征夫
    • Publisher
      コロナ社
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Mechanism of Cu deposition from Cu(EDMDD)_2 using H-assisted plasma CVD2006

    • Author(s)
      Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Toshiya Shingen
    • Journal Title

      Thin Solid Films (in press)

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Substrate temperature dependence of deposition rate in anisotropic plasma CVD of Cu2006

    • Author(s)
      Masaharu Shiratani, Kosuke Takenaka, Takao Kaji, Kazunori Koga, Yukio Watanabe
    • Journal Title

      Thin Solid Films (in press)

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Mechanism of Cu deposition from Cu(EDMDD)_2 using H-assisted plasma CVD2006

    • Author(s)
      Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Toshiya Shingen
    • Journal Title

      Thin Solid Films 506-507

      Pages: 197-201

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Plasma anisotropic CVD of high purity Cu using Cu(hfac)_22006

    • Author(s)
      Masaharu Shiratani, Takao Kaji, Kazunori Koga, Yukio Wtanabe, Tomohiro Kubota, Seiji Samukawa
    • Journal Title

      Proceedings of the 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

      Pages: 119-120

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Mechanism of Cu deposition from Cu (EDMDD)_2 using H-assisted plasma CVD2006

    • Author(s)
      K.Takenaka, K.Koga, M.Shiratani, Y.Watanabe, T.Shingen
    • Journal Title

      Thin Solid Films 506-507

      Pages: 197-201

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Plasma anisotropic CVD of high purity Cu using Cu(hfac)_22005

    • Author(s)
      Masaharu Shiratani, Takao Kaji, Kazunori Koga, Yukio Watanabe, Tomohiro Kubota, Seiji Samukawa
    • Journal Title

      Proc.of the 6 th International Conference on Reactive Plasmas and 23 rd Symposium on Plasma Processing

      Pages: 119-120

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Effects of ion irradiation on plasma anisotropic CVD2005

    • Author(s)
      Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Novel Materials Processing by Advanced Electromagnetic Energy Sources

      Pages: 75-78

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Production of crystalline Si nano-clusters using pulsed H_2+SiH_4 VHF discharges2005

    • Author(s)
      Tomohide Kakeya, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Michio Kondo
    • Journal Title

      Thin Solid Films (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Production of crystalline Si nano-clusters using pulsed H_2+SiH_4 VHF discharges2005

    • Author(s)
      Tomohide Kakeya, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Michio Kondo
    • Journal Title

      Thin Solid Films (in oress)

    • Data Source
      KAKENHI-PROJECT-15654082
  • [Journal Article] Mechanism of Cu deposition from Cu(EDMDD)_2 using H-assisted plasma CVD2005

    • Author(s)
      Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Toshiya Shingenn
    • Journal Title

      Thin Solid Films (in press)

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Measruement of H density in Cu CVD discharges using VUV absorption spectroscopy2005

    • Author(s)
      Kosuke Takenaka, Takao Kaji, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proc.of Plasma Science Sympoium-2005 and 22nd Symposium on Plasma Processing

      Pages: 639-640

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Evaluation of contribution of higher-order silane radicals in silane discharges to Si-H_2 bond formation in a-Si:H films2005

    • Author(s)
      Kazunori Koga, Naoto Kaguchi, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Control of deposition profile of Cu for LSI interconnects by plasma chemical vapor deposition2005

    • Author(s)
      Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga, Yukio Watanabe
    • Journal Title

      Pure Appl.Chem. 77, 2

      Pages: 391-398

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Deposition of highly stable a-Si : H films using cluster-eliminating filter2005

    • Author(s)
      Kazunori Koga, Naoto Kaguchi, Kouki Bando, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing

      Pages: 157-158

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Deposition of highly stable a-Si:H films using cluster-eliminating filter2005

    • Author(s)
      Kazunori Koga, Naoto Kaguchi, Kouki Bando, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing

      Pages: 157-158

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Production of Crystalline Si Nano-particles Using Pulse VHF discharges and Their Stability2005

    • Author(s)
      Tomohide Kakeya, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing

      Pages: 643-644

    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Nano-particle formation due to interaction between H_2 plasma and carbon wall2005

    • Author(s)
      Kazunori Koga, Yasuhiro Kitamura, Masaharu SHiratani, Yukio Watanabe, Akio Komori
    • Journal Title

      Thin Solid Films (in press)

    • Data Source
      KAKENHI-PROJECT-15654082
  • [Journal Article] Production of crystalline Si nano-clusters using pulsed H_2+SiH_4 VHF discharge2005

    • Author(s)
      Tomohide Kakeya, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Michio Kondo
    • Journal Title

      Thin Solid Films (in press)

    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Control of deposition profile of Cu for LSI interconnects by plasma chemical vapor deposition2005

    • Author(s)
      Kosuke Takenaka, Masaharu Shiratani, Manabu Takeshita, Makoto Kita, Kazunori Koga, Yukio Watanabe
    • Journal Title

      Pure Appl. Chem. 77

      Pages: 391-398

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Deposition of highly stable a Si:H films using cluster-eliminating filter2005

    • Author(s)
      Kazunori Koga, Naoto Kaguchi, Kouki Bando, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing

      Pages: 157-158

    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Measruement of H density in Cu CVD discharges using VUV absorption spectroscopy2005

    • Author(s)
      Kosuke Takenaka, Takao Kaji, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proc. of Plasma Science Sympoium-2005 and 22nd Symposium on Plasma Processing

      Pages: 639-640

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Species responsible for Si-H_2 bond formation in a-Si:H films deposited using silane high frequency discharges2005

    • Author(s)
      Masaharu Shiratani, Kazunori Koga, Naoto Kaguchi, Kouki Bando, Yukio Watanabe
    • Journal Title

      Thin Solid Films (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Effects of sputtering due to ion irradiation on plasma anisotoropiv CVD of Cu2005

    • Author(s)
      Kosuke Takenaka Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Novel Materials Processing by Advanced Electromagnetic Energy Sources

      Pages: 75-78

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Study on ion irradiation effects on plasma anisotropic Cu CVD using triode discharge2005

    • Author(s)
      Takao Kaji, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proc.of Plasma Science Sympoium-2005 and 22nd Symposium on Plasma Processing

      Pages: 641-642

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Productin of Crystalline Si Nano-particles Using Pulse VHF discharges and Their Stability2005

    • Author(s)
      Tomohide Kakeya, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing

      Pages: 643-644

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Study on ion irradiation effects on plasma anisotropic Cu CVD using triode discharge2005

    • Author(s)
      Takao Kaji, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proc. of Plasma Science Sympoium-2005 and 22nd Symposium on Plasma Processing

      Pages: 391-398

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Correlation between volume fraction of clusters incorporated into a-Si:H films and hydrogen content associated with Si-H_2 bonds in the films2004

    • Author(s)
      Kazunori Koga, Naoto Kaguchi, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Journal of Vacuum Science and Technology A 22・4

      Pages: 1536-1539

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Correlation between volume fraction of clusters incorporated into a-Si : H films and hydrogen content associated with Si-H_2 bonds in the films2004

    • Author(s)
      Kazunori Koga, Naoto Kaguchi, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Journal of Vacuum Science and Technology A 22-4

      Pages: 1536-1539

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Dissociative ionization of Cu(EDMDD)_2 by electron impact2004

    • Author(s)
      Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of International COE Forum on Plasma Science and Technology

      Pages: 171-172

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Anisotropic deposition of Cu using plasma CVD2004

    • Author(s)
      Masaharu Shiratani, Kosuke Takenaka, Kazunori Koga, Yukio Watanabe
    • Journal Title

      Proceedings of International COE Forum on Plasma Science and Technology

      Pages: 33-34

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Anisotropic Deposition of Cu in trenches by H-assisted Plasma Chemical Vapor Deposition2004

    • Author(s)
      Kosuke Takenaka, Makoto Kita, Toshio Kinoshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Journal of Vacuum Science and Technology A 22, 4

      Pages: 1903-1907

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Anisotropic Deposition of Cu in trenches by H-assisted Plasma Chemical Vapor Deposition2004

    • Author(s)
      K.Takenaka, M.Kita, T.Kinoshita, K.Koga, M.Shiratani, Y.Watanabe
    • Journal Title

      Journal of Vacuum Science and Technology A 22・4

      Pages: 1903-1907

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Anisotropic Deposition of Cu in trenches by H-assisted Plasma Chemical Vapor Deposition2004

    • Author(s)
      Kosuke Takenaka, Makoto Kita, Toshio Kinoshita, hazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Journal of Vacuum Science and Technology A 22

      Pages: 1903-1907

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Anisotropic deposition of Cu using plasma CVD2004

    • Author(s)
      Masaharu Shiratani, Kosuke Takenaka, Kazunori Koga, Yukio Watanabe
    • Journal Title

      Proceedings of International COR Forum on Plasma Science and Technology

      Pages: 33-34

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Evaluation of contribution of higher-order silane radicals in silane discharges to Si-H_2 bond formation in a-Si:H films2004

    • Author(s)
      Kazunori Koga, Naoto Kaguchi, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources (in press)

    • Data Source
      KAKENHI-PROJECT-14205047
  • [Journal Article] Si Nano-Particles Formed in Plasmas under Microgravity and One G Conditions2004

    • Author(s)
      Masaharu Shiratani, T.Kakeya, K.Koga, Yukio Watanabe
    • Journal Title

      Proc.of International Workshop on Plasma Nano-Technology and Its Future Vision

    • Data Source
      KAKENHI-PROJECT-15654082
  • [Journal Article] Dissociative ionization of Cu(EDMDD)_2 by electron impact2004

    • Author(s)
      Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of International COR Forum on Plasma Science and Technology

      Pages: 171-172

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Effects of solvent on properties of Cu films prepared by HAPCVD using Cu (EDMDD)_22004

    • Author(s)
      Kosuke Takenaka, Takao Kaji, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of 26th International Symposium on Dry Process

      Pages: 347-352

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Effects of solvent on properties of Cu films prepared by HAPCVD using Cu(EDMDD)_22004

    • Author(s)
      Kosuke Takenaka, Takao Kaji, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of 26th International Symposium on Dry Process

      Pages: 347-352

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-16360020
  • [Journal Article] Effects of ion irradiation on plasma anisotropic CVD2004

    • Author(s)
      Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe
    • Journal Title

      Proceedings of International Symposium on Novel Materials Processing by Adbanced Electromagnetic Energy Sources (in press)

    • Data Source
      KAKENHI-PROJECT-16360020
  • [Patent] クラスタフリーアモルファスシリコン膜とそれを製造する方法及び装置2004

    • Inventor(s)
      渡辺 征夫, 白谷 正治, 古閑 一憲
    • Industrial Property Rights Holder
      九州大学
    • Industrial Property Number
      2004-244333
    • Filing Date
      2004-08-31
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205047
  • 1.  SHIRATANI Masaharu (90206293)
    # of Collaborated Projects: 12 results
    # of Collaborated Products: 40 results
  • 2.  FUKUZAWA Tsuyoshi (70243904)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 0 results
  • 3.  KOGA Kazunori (90315127)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 40 results
  • 4.  KAWASAKI Hiroharu (10253494)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 5.  TACHIBANA Kunihide (40027925)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 6.  MURAOKA Katsunori (80038546)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 7.  小城 左臣 (80108654)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 8.  GOTO Toshio (50023255)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  MAKABE Toshiaki (60095651)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  SUGAI Hideo (40005517)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  SATO Noriyoshi (40005252)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  INUTAKE Masaaki (90023738)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  KATO Yoshiaki (30093397)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  SATO Tetsuya (80025395)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  AMAGISHI Yoshimitsu (10042409)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  MASUDA Mitsuharu (40038097)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  IKEGAMI Tomoaki (20136518)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  寺嶋 和夫 (30176911)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  石井 彰三 (40016655)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  矢部 孝 (60016665)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  赤崎 正則 (30037676)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  粥川 尚之 (50001780)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 23.  原 武久 (20026214)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 24.  佐賀井 武 (70008423)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 25.  大竹 一友 (80016427)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 26.  中島 寛 (70172301)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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