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KOKAI H.
小海 秀樹
Connect your ORCID iD
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Alternative Names
KOKAI Hideki 小海 秀樹
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Researcher Number
80058099
External Links
Affiliation (based on the past Project Information)
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1992: Fac. Engin. Toyo Univ., 工学部, 助教授
1991: 東洋大学, 工学部,電気電子工学科, 講師
1989: Faculty of Engineering, Electrical Eng. Lecturer, 工学部・電気工学科, 講師
1988 – 1989: 東洋大学, 工学部, 講師
Review Section/Research Field
Except Principal Investigator
プラズマ理工学
/
Applied materials
Keywords
Except Principal Investigator
反応性プラズマ / ECRプラズマ / 高周波プラズマ / 分光計測 / エネルギ-注入 / プラズマプロセシング / プラズマ発光分光分析 / マイクロ波 / 真空シール窓 / 真空シール密
…
More
/ 高電力高周波窓 / 耐腐蝕性窓 / Microwave window / Reactive plasma / Chemical stability / 発光分光分析法 / 複合膜 / プラズマ発光分析 / 反応性イオンプレーティング / InN膜 / optical emission analysis / hybrid thin film
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Research Projects
(
4
results)
Co-Researchers
(
5
People)
Project Start Year (Newest)
Project Start Year (Oldest)
High power high frequency window for reactive plasma.
Principal Investigator
SAKAMOTO.YUICHI
Project Period (FY)
1991 – 1992
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
プラズマ理工学
Research Institution
Toyo University
オプトスペクトロスコピ-によるプラズマ反応機構の研究
Principal Investigator
SAKAMOTO.YUICHI
Project Period (FY)
1989
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Toyo University
オプトスペクトロスコピイによるプラズマ反応機構の基礎的研究
Principal Investigator
森川 滝太郎
Project Period (FY)
1988
Research Category
Grant-in-Aid for Scientific Research on Priority Areas
Research Institution
Toyo University
Basic research on functional hybrid thin film growth processes by optical emission analysis
Principal Investigator
MURAYAMA Yoichi
Project Period (FY)
1988 – 1989
Research Category
Grant-in-Aid for General Scientific Research (C)
Research Field
Applied materials
Research Institution
TOYO University
# of Projects (Dsc)
# of Projects (Asc)
1.
SAKAMOTO.YUICHI
(70167427)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
2.
MURAYAMA Yoichi
(40057956)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
3.
MORIKAWA Takitaro
(80191013)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
4.
KASIWAGI Kunihiro
(30058094)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
5.
KOMURO Syuji
(90120336)
# of Collaborated Projects:
3 results
# of Collaborated Products:
0 results
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