Umemoto Hironobu 梅本宏信

… Alternative Names

UMEMOTO Hironobu 梅本宏信

梅本宏信

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Researcher Number	80167288
Other IDs
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Affiliation (based on the past Project Information) *help	2015 – 2017: 静岡大学, 工学部, 教授 2014: 静岡大学, 工学研究科, 教授 2013 – 2014: 静岡大学, 工学(系)研究科(研究院), 教授 2012: 静岡大学, 工学部, 教授 2006 – 2008: Shizuoka University, Faculty of Engineering, Professor, 工学部, 教授 … More 2005: 北陸先端科学技術大学院大学, 材料科学研究科, 助教授 2002 – 2003: 北陸先端科学技術大学院大学, 材料科学研究科, 助教授 1999 – 2000: 北陸先端科学技術大学院大学, 材料科学研究科, 助教授 1994 – 1997: JAIST ・ Mater.Sci. ・ Associate Professor, 材料科学研究科, 助教授 1996: 北陸先端科学技術大学院大学, 情報科学研究科, 助教授 1994: 北陸先端科学技術大学院大学, 材料科学, 助教授 1991 – 1993: 東京工業大学, 理学部, 助手 1986 – 1987: 東京工業大学, 理学部, 助手 Less
Review Section/Research Field	Principal Investigator Physical chemistry / Physical chemistry / 物理化学一般 Except Principal Investigator 物理化学一般 / Thin film/Surface and interfacial physical properties / Applied materials science/Crystal engineering
Keywords	Principal Investigator 同位体効果 / isotope effect / nitrous oxide / 一酸化二窒素 / Rotational Distribution / 初期振動状態分布 / 初期回転状態分布 / 項間交差 / 亜鉛原子 / 水素原子 … More / 化学気相堆積 / 初期状態分布 / メタン / 準安定状態 / 水素 / Polysilazane / Silica Coating / Transportation of Radicals / Remote Chemical Vapor Deposition / Mass Spectrometry / Organic Silicon / Silicon Nitride / Chemical Vapor Deposition / 質量分析 / 活性窒素 / 炭窒化シリコン薄膜 / ポリシラザン / 石英ガラスコート / ラジカル輸送 / リモート化学気相堆積法 / 質量分析法 / 有機窒化シリコン / 窒化シリコン薄膜 / intersystem crossing / two-photon excitation / quantum yield / atomic hydrogen / reactive process / metastable state / molecular nitrogen / 水分子 / 増幅自然放出 / キセノン原子 / 二光子励起 / 量子収率 / 反応過程 / 窒素分子 / atmospheric chemistry / photodissociation / 大気化学 / 光分解過程 / Doppler profile / action spectra / two-photon dissociation / nitric oxide / 亜酸化窒素 / 前期解離 / ドップラースペクトル / アクションスペクトル / 二光子光分解 / 一酸化窒素 / Nascent Vibrational Distribution / Zine / 脱励起過程 / Vibrational Distribution / Intersystem Crossing / Intramultiplet Mixing / Zinc / 非共鳴的光励起 / 同多重度内遷移 / 化学気相堆積過程 / 化学反応 / 単体ホウ素 / ボラザン / 不純物ドーピング / 触媒分解 / ホウ素原子 / ジボラン / タングステン触媒 / イリジウム触媒 / OHラジカル / 酸素原子 / 金属触媒 / 酸化性ガス / 窒素原子 / 分岐比 / 励起状態 / 半衝突過程 / ファンデアワールス錯体 / カドミウム … More Except Principal Investigator 薄膜 / Cd and Zn / close-coupling / quenching / intramultiplet mixing / energy pooling / NH radicals / 回転温度 / 初期状態分布 / レーザー誘起蛍光 / 波長可変色素レーザー / エキシマレーザー / NH(C^1Π)ラジカル / エキシマーレーザー / エネルギープーリング / 色素レーザー / 時間分解測定 / エキシマ-レ-ザ- / 量子力学的緊密結合法 / 遷移断面積 / 励起三重項状態 / カドミウムと亜鉛 / 緊密結合法 / 消光断面積 / 多重項内遷移 / エネルギ-プ-リング / NHラジカル / 酸化亜鉛 / 酸化亜鉛薄膜 / 触媒反応 / 化学気相堆積法 / 太陽電池 / 窒化シリコン / 微結晶シリコン / アモルファスシリコン / ホットワイアCVD / Cat-CVD / 触媒化学気相成長 Less

Decomposition processes of hydrides such as diborane on heated metal catalystsPrincipal Investigator
- Principal Investigator
  
  Umemoto Hironobu
- Project Period (FY)
  2014 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Physical chemistry
- Research Institution
  Shizuoka University
Creation of growth technique for high-quality zinc oxide thin films using catalytically generated high-energy H2O beam
- Principal Investigator
  
  YASUI Kanji
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Nagaoka University of Technology
Application of catalytic chemical vapor deposition technique to oxidizing gasesPrincipal Investigator
- Principal Investigator
  
  UMEMOTO Hironobu
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Physical chemistry
- Research Institution
  Shizuoka University
Chemical Vapor Deposition Processes to Prepare Silicon Nitride Films from Organic Silicon Materials Containing NitrogenPrincipal Investigator
- Principal Investigator
  
  UMEMOTO Hironobu
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Physical chemistry
- Research Institution
  Shizuoka University
  Japan Advanced Institute of Science and Technology
Selective Production and Kinetic Analysis of Singlet-state Metastable Molecular NitrogenPrincipal Investigator
- Principal Investigator
  
  UMEMOTO Hironobu
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Physical chemistry
- Research Institution
  Japan Advanced Institute of Science and Technology
触媒化学気相成長法によるシリコン系薄膜の成長プロセス
- Principal Investigator
  
  松村英樹
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Japan Advanced Institute of Science and Technology
Isotope effect in the photodissociation process of nitrous oxidePrincipal Investigator
- Principal Investigator
  
  UMEMOTO Hironobu
- Project Period (FY)
  1999 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Physical chemistry
- Research Institution
  Japan Advanced Institute of Science and Technology
励起窒素原子の全衝突反応過程と半衝突反応過程Principal Investigator
- Principal Investigator
  
  梅本宏信
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Japan Advanced Institute of Science and Technology
Two-photon dissociation of nitric oxidePrincipal Investigator
- Principal Investigator
  
  UMEMOTO Hironobu
- Project Period (FY)
  1996 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Physical chemistry
- Research Institution
  Japan Advanced Institute of Science and Technology
金属原子-水素分子錯体の光励起ダイナミクスPrincipal Investigator
- Principal Investigator
  
  梅本宏信
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Japan Advanced Institute of Science and Technology
Nascent distributions of ZnH and OH produced in the reactions of excited zinc and waterPrincipal Investigator
- Principal Investigator
  
  UMEMOTO Hironobu
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Physical chemistry
- Research Institution
  Japan Advanced Institute of Science and Technology
  Tokyo Institute of Technology
Reaction dynamics of excited Zn atoms by off-resonant photoexcitationPrincipal Investigator
- Principal Investigator
  
  UMEMOTO Hironobu
- Project Period (FY)
  1991 – 1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  物理化学一般
- Research Institution
  Tokyo Institute of Technology
Behavior of reactive intermediates in the gas phase reactions
- Principal Investigator
  
  SATO Shin
- Project Period (FY)
  1986 – 1989
- Research Category
  
  Grant-in-Aid for General Scientific Research (A)
- Research Field
  
  物理化学一般
- Research Institution
  Chiba University, College of Arts and Sciences
  Tokyo Institute of Technology

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All Journal Article Presentation Book Patent Other

[Book] 触媒CVD(Cat-CVD)の新展開-ラジカルを用いる新プロセス技術-2008
- Author(s)
  梅本宏信
- Total Pages
  13
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-19550015
[Book] 「触媒CVD(Cat-CVD)の新展開-ラジカルを用いる新プロセス技術-」(中山弘(監修)第1章第2節)2008
- Author(s)
  梅本宏信
- Publisher
  シーエムシー出版(株)
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Decomposition processes of photoresist polymers by H atoms produced on hot wire surfaces2017
- Author(s)
  Umemoto Hironobu、Kato Teruto、Takiguchi Masayuki、Takagi Seiji、Horibe Hideo
- Journal Title
  
  Thin Solid Films
  
  Volume: 635 Pages: 27-31
- DOI
  10.1016/j.tsf.2016.12.013
- NAID
  120006534758
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26410010
[Journal Article] Hot Metal Wires as Sinks and Sources of B Atoms2017
- Author(s)
  H. Umemoto and A. Miyata
- Journal Title
  
  Thin Solid Films
  
  Volume: 印刷中 Pages: 78-81
- DOI
  10.1016/j.tsf.2016.11.054
- NAID
  120006534757
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26410010
[Journal Article] Decomposition Processes of H3NBH3 (borazane), (BH)3(NH)3 (borazine), and B(CH3)3 (trimethylboron) on Heated W Wire Surfaces2015
- Author(s)
  H. Umemoto, A. Miyata, and T. Nojima
- Journal Title
  
  Chem. Phys. Lett.
  
  Volume: 639 Pages: 7-10
- DOI
  10.1016/j.cplett.2015.08.071
- NAID
  120006342465
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26410010
[Journal Article] Gas-phase Diagnoses in Catalytic Chemical Vapor Deposition (Hot-Wire CVD) Processes2015
- Author(s)
  H. Umemoto
- Journal Title
  
  Thin Solid Films
  
  Volume: 575 Pages: 3-8
- DOI
  10.1016/j.tsf.2014.10.014
- NAID
  120005538023
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26410010
[Journal Article] Decomposition Processes of Diborane and Borazane (Ammonia-borane Complex) on Hot Wire Surfaces2015
- Author(s)
  H. Umemoto and A. Miyata
- Journal Title
  
  Thin Solid Films
  
  Volume: 595 Pages: 231-234
- DOI
  10.1016/j.tsf.2015.04.084
- NAID
  120006228209
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26410010
[Journal Article] Dependence of the Catalytic Decomposition of PH3 on Wire Material2015
- Author(s)
  H. Umemoto
- Journal Title
  
  Thin Solid Films
  
  Volume: 575 Pages: 9-11
- DOI
  10.1016/j.tsf.2014.10.015
- NAID
  120005538024
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26410010
[Journal Article] Production of B Atoms and BH Radicals from B2H6/He/H2 Mixtures Activated on Heated W Wires2014
- Author(s)
  H. Umemoto, T. Kanemitsu, and A. Tanaka,
- Journal Title
  
  J. Phys. Chem. A
  
  Volume: 118 Issue: 28 Pages: 5156-5163
- DOI
  10.1021/jp5046063
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26410010
[Journal Article] Electrical properties of ZnO thin films grown on a-plane sapphire substrates using catalytically generated high-energy H2O2013
- Author(s)
  N. Yamaguchi, T. Takeuchi, E. Nagatomi, T. Kato, H. Umemoto, Kanji Yasui
- Journal Title
  
  Thin Solid Films
  
  Volume: 549 Pages: 18-21
- DOI
  10.1016/j.tsf.2013.06.035
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360014
[Journal Article] Detection of Radical Species Produced by Catalytic Decomposition of H_2, 0_2 and their Mixtures on Heated Ir Surfaces2009
- Author(s)
  H. Umemoto, et al.
- Journal Title
  
  Thin Solid Films (In press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Detection of Radical Species Produced by Catalytic Decomposition of H_2, O_2 and their Mixtures on Heated Ir Surfaces2009
- Author(s)
  H. Umemoto, H. Kusanagi, K. Nishimura, and M. Ushijima
- Journal Title
  
  Thin Solid Films 517, [12]
  
  Pages: 3446-3448
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Photoresist Removal Using Atomic Hydrogen Generated by Hot-Wire Catalyzer and Effects on Si-wafer Surface2009
- Author(s)
  M. Yamamoto, H. Horibe, H. Umemoto, K. Takao, E. Kusano, M. Kase, S. Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 48[2]026503
  
  Pages: 7-7
- NAID
  40016464779
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Catalytic Decomposition of O_2, NO, N_2O and N0_2 on a Heated Ir Filament to Produce Atomic Oxygen2008
- Author(s)
  H. Umemoto, et al.
- Journal Title
  
  J. Phys. D : Appl. Phys. 41
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Future Prospect of Remote Cat-CVD on the Basis of Gas-phase Diagnoses2008
- Author(s)
  H.Umemoto, et, al.
- Journal Title
  
  Thin Solid Films 516
  
  Pages: 500-502
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Catalytic Decomposition of O_2, NO, N_2O and NO_2 on a Heated Ir Filament to Produce Atomic Oxygen2008
- Author(s)
  H. Umemoto and H. Kusanagi
- Journal Title
  
  J.Phys.D : Appl.Phys. 41[22]225505
  
  Pages: 5-5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Production and Detection of Reducing and Oxidizing Radicals in the Catalytic Decomposition of H_2/O_2 Mixtures on Heated Tungsten Surfaces2008
- Author(s)
  H. Umemoto and M. Moridera
- Journal Title
  
  J.Appl.Phys. 103, [3]034905
  
  Pages: 6-6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Production and Detection of Reducing and Oxidizing Radicals in the Catalytic Decomposition of H_2/O_2 Mixtures on Heated Tungsten Surfaces2008
- Author(s)
  H.Umemoto, et. al.
- Journal Title
  
  J.Appl.Phys. 103
  
  Pages: 34905-34905
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Coverage Properties of SiN_x Films Prepared by Catalytic Chemical Vapor Deposition on Trenched Substrates below 80℃2008
- Author(s)
  A. Heya, T. Minamikawa, T. Niki, S. Minami, A. Masuda, H. Umemoto, N. Matsuo,and H. Matsumura
- Journal Title
  
  Thin Solid Films 516, [10]
  
  Pages: 3000-3004
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Coating Techniques of Metal Chambers for Remote Catalytic Chemical Vapor Deposition Applications2008
- Author(s)
  H.Umemoto, et. al.
- Journal Title
  
  J.Vac.Sci.Tech.A 26
  
  Pages: 309-311
- NAID
  120000796463
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Future Prospect of Remote Cat-CVD on the Basis of Gas-phase Diagnoses2008
- Author(s)
  H. Umemoto and H. Matsumura
- Journal Title
  
  Thin Solid Films 516, [5]
  
  Pages: 500-502
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Cat-CVD SiN Passivation Films for OLEDs and Packaging2008
- Author(s)
  A. Heya, T. Minamikawa, T. Niki, S. Minami, A. Masuda, H. Umemoto, N. Matsuo,and H. Matsumura
- Journal Title
  
  Thin Solid Films 516, [5]
  
  Pages: 553-557
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Catalytic CVD Processes of Oxidizing Species and the Prevention of Oxidization of Heated Tungsten Filaments by H_22008
- Author(s)
  H. Umemoto, S.G. Ansari, T. Morimoto, S. Setoguchi, H. Uemura,and H. Matsumura
- Journal Title
  
  Thin Solid Films 516, [5]
  
  Pages: 829-831
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Catalytic CVD Processes of Oxidizing Species and the Prevention of Oxidization of Heated Tungsten Filaments by H_22008
- Author(s)
  H.Umemoto, et. al.
- Journal Title
  
  Thin Solid Films 516
  
  Pages: 829-831
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] 有機ELの保護膜形成技術2008
- Author(s)
  部家彰、松尾直人、南川俊治、仁木敏一、南茂平、増田淳、梅本宏信、松村英樹
- Journal Title
  
  月間ディスプレイ Vol.14, No.9
  
  Pages: 49-56
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Coating Techniques of Metal Chambers for Remote Catalytic Chemical Vapor Deposition Applications2008
- Author(s)
  H. Umemoto, S. Setoguchi, H. Uemura,and H. Matsumura
- Journal Title
  
  J.Vac.Sci.Tech.A 26, [2]
  
  Pages: 309-311
- NAID
  120000796463
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Future Prospect of Remote Cat-CVD on the basis of gas-phase diagnoses2007
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  Thin Solid Films (In press)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] Future Prospect of Remote Cat-CVD on the basis of gas-phase diagnoses2007
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  Thin Solid Films (in press.)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] Catalytic CVD Processes of Oxidizing Species and the Prevention of Oxidization of Heated Tungsten Filaments by H_22007
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  Thin Solid Films (In press)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] Production Yields of H(D)Atoms in the Reactions of N_2 (A^3Σ_u^+) with C_2H_4,C_2H_2 and their Deuterated Variants2007
- Author(s)
  H.Umemoto
- Journal Title
  
  J.Chem.Phys. 127
  
  Pages: 14307-14307
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Production Yields of H(D) Atoms in the Reactions of N_2(A ^3Σ_u^+)with C_2H_4, C_2H_2 and their Deuterated Variants2007
- Author(s)
  H. Umemoto
- Journal Title
  
  J.Chem.Phys. 127, [1]014304
  
  Pages: 7-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19550015
[Journal Article] Catalytic CVD Processes of Oxidizing Species and the Prevention of Oxidization of Heated Tungsten Filaments by H22007
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  Thin Solid Films (in press.)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] H(D)-atom Yields in the Quenching of Xe(6s [3/2]_1) by Methane, Ethane, Ethene, Ethyne, and their Isotopologues2006
- Author(s)
  H.Umemoto
- Journal Title
  
  J. Chem. Phys. 125,[3]
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] Rotational and Vibrational State Distributions of H_2 Activated on a Heated Tungsten Filament2006
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  J. Appl. Phys. 99, [4]
- NAID
  120000861413
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] Rotational and Vibrational State Distributions of H_2 Activated on a Heated Tungsten Filament2006
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  J. Appl. Phys. 99,[4]
- NAID
  120000861413
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] H(D)-atom Yields in the Quenching of Xe(6s[3/2]_1) by Methane, Ethane, Ethene, Ethyne, and their Isotopologues2006
- Author(s)
  H.Umemoto
- Journal Title
  
  J. Chem. Phys. 125, [3]
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] Rotational and Vibrational State Distributions of H_2 Activated on a Heated Tungsten Filament2006
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  J.Appl.Phys. 99,[4]
  
  Pages: 43510-43510
- NAID
  120000861413
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] H(D)-atom Yields in the Quenching of <Xe(6s[3/2]i)> by Methane, Ethane, Ethene, Ethyne, and their Isotopologues2006
- Author(s)
  H.Umemoto
- Journal Title
  
  J. Chem. Phys. 125, [3] 034306
  
  Pages: 7-7
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Journal Article] Rotational and Vibrational State Distributions of H2 Activated on a Heated Tungsten Filamen2006
- Author(s)
  H.Umemoto et al.
- Journal Title
  
  J. Appl. Phys. 99, [4] 043510
  
  Pages: 6-6
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17550009
[Patent] ホウ素を含む化学的活性種の発生方法、及び表面処理方法2015
- Inventor(s)
  梅本宏信
- Industrial Property Rights Holder
  梅本宏信
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-208012
- Filing Date
  2015-10-22
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] 水素ラジカルを用いたレジスト除去における酸素添加効果2017
- Author(s)
  滝智洋，山本雅史，長岡史郎、梅本宏信、大平圭介、西山聖、堀邊英夫
- Organizer
  第１４回Ｃａｔ－ＣＶＤ研究会
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] ラジカル発生とその反応2017
- Author(s)
  梅本宏信
- Organizer
  第１４回Ｃａｔ－ＣＶＤ研究会
- Invited
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] B-atom release from metal wires boronized by non-explosive boron compounds2017
- Author(s)
  Hironobu Umemoto
- Organizer
  82nd Annual Meeting of the Society of Chemical Engineers, Japan
- Place of Presentation
  Shibaura Institute of Technology, Toyosu, Koto, Tokyo
- Year and Date
  2017-03-07
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] 水素ラジカルを用いたレジスト除去における除去速度の圧力依存性2017
- Author(s)
  城井智弘，山本雅史，長岡史郎，梅本宏信，大平圭介，西山聖，堀邊英夫
- Organizer
  第１４回Ｃａｔ－ＣＶＤ研究会
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] A clean source of B atoms without using explosive boron compounds2016
- Author(s)
  Atsushi Miyata and Hironobu Umemoto
- Organizer
  32nd Symposium on Chemical Kinetics and Dynamics
- Place of Presentation
  Omiya Sonic City, Saitama City, Saitama
- Year and Date
  2016-06-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] ボラザンによりホウ素化したタングステンワイヤからのホウ素原子放出2016
- Author(s)
  梅本宏信、宮田篤
- Organizer
  第１３回Ｃａｔ－ＣＶＤ研究会
- Place of Presentation
  北見工業大学、北見市、北海道
- Year and Date
  2016-07-08
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] Hot metal wires as sinks and sources of B atoms2016
- Author(s)
  Hironobu Umemoto and Atsushi Miyata
- Organizer
  9th Hot-Wire Chemical Vapor Deposition Conference
- Place of Presentation
  Philadelphia, USA
- Year and Date
  2016-09-06
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] 加熱タングステン触媒体上でのホウ素化合物からのＢ原子生成過程2015
- Author(s)
  梅本宏信、宮田篤、野島拓翔
- Organizer
  第７６回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場、名古屋
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] Catalytic decomposition processes of borazane and borazine on heated W wire surfaces2015
- Author(s)
  Atsushi Miyata and Hironobu Umemoto
- Organizer
  31st Symposium on Chemical Kinetics and Dynamics
- Place of Presentation
  Hokkaido Univ., Sapporo
- Year and Date
  2015-06-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] 加熱タングステンワイヤ表面でのホウ素化合物分解過程2015
- Author(s)
  梅本宏信、宮田篤、野島拓翔
- Organizer
  第１２回Ｃａｔ－ＣＶＤ研究会
- Place of Presentation
  名古屋大学、名古屋
- Year and Date
  2015-07-03
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] アンモニアの加熱金属触媒による分解過程と後続気相反応過程2015
- Author(s)
  梅本宏信
- Organizer
  化学工学会反応工学部会 CVD反応分科会主催第23回シンポジウム
- Place of Presentation
  早稲田大学、東京
- Year and Date
  2015-05-22
- Invited
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] Decomposition processes of diborane and borazane (ammonia-borane complex) on hot W wire surfaces2014
- Author(s)
  H. Umemoto, T. Kanemitsu, and A. Miyata
- Organizer
  8th Hot-Wire Chemical Vapor Deposition Conference
- Place of Presentation
  Braunschweig, Germany
- Year and Date
  2014-10-14
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] Production of B atoms from B2H6/He/H2 mixtures activated on heated W wires2014
- Author(s)
  Taijiro Kanemitsu, Akihito Tanaka, and Hironobu Umemoto
- Organizer
  30th Symposium on Chemical Kinetics and Dynamics
- Place of Presentation
  Egret Himeji, Himeji, Hyogo, Japan
- Year and Date
  2014-06-05
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] 加熱タングステンワイヤで活性化されたジボラン／水素混合物からのＢ原子およびＢＨラジカルの生成過程2014
- Author(s)
  梅本宏信、金光泰二郎、田中晃人
- Organizer
  第１１回Ｃａｔ－ＣＶＤ研究会
- Place of Presentation
  東北大学、仙台、宮城
- Year and Date
  2014-07-11
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] アンモニア－ボラン錯体の加熱タングステンワイヤ上での触媒分解2014
- Author(s)
  梅本宏信、宮田篤
- Organizer
  第１１回Ｃａｔ－ＣＶＤ研究会
- Place of Presentation
  東北大学、仙台、宮城
- Year and Date
  2014-07-11
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] 加熱タングステンワイヤ上でのジボランからのＢ原子およびＢＨラジカルの発生機構2014
- Author(s)
  梅本宏信、金光泰二郎
- Organizer
  第７５回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学、札幌、北海道
- Year and Date
  2014-09-20
- Data Source
  KAKENHI-PROJECT-26410010
[Presentation] Electrical properties of the ZnO thin films grown on a-plane sapphire substrates using catalytically generated high-energy H2O2013
- Author(s)
  N. Yamaguchi, T. Takeuchi, E. Nagatomi, T. Kato, H. Umemoto, K. Yasui
- Organizer
  40th Int. Conf. on Metallurgical Coatings & Thin Films
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-24360014
[Presentation] 触媒反応生成高エネルギーH_2Oを用いて成長したZnO/a-Al_2O_3膜の電気伝導特性(二層モデルによる解析)2012
- Author(s)
  永冨瑛智, 山口直也, 加藤孝弘, 梅本宏信, 安井寛治
- Organizer
  電子情報通信学会エレクトロニクスソサイエティ材料デバイスサマーミーティング
- Place of Presentation
  機械振興会館、東京
- Year and Date
  2012-06-22
- Data Source
  KAKENHI-PROJECT-24360014
[Presentation] H_2-O_2触媒反応生成高エネルギーH_2Oを用いて堆積したZnO/a-Al_2O_3の電気伝導特性の解析2012
- Author(s)
  永冨瑛智,山口直也,清水英彦,梅本宏信,加藤孝弘,安井寛治
- Organizer
  2012年秋季第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学、松山大学
- Year and Date
  2012-09-14
- Data Source
  KAKENHI-PROJECT-24360014
[Presentation] 加熱イリジウム触媒体上における水蒸気分子分解過程2009
- Author(s)
  梅本宏信、草薙弘樹
- Organizer
  春季第56回応用物理学関係連合講演会
- Place of Presentation
  つくば
- Year and Date
  2009-03-30
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 化学気相堆積過程における気相、表面反応2008
- Author(s)
  梅本宏信
- Organizer
  第5回Cat-CVD研究会
- Place of Presentation
  相模原
- Year and Date
  2008-06-20
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 加熱イリジウム触媒体上における酸化性分子分解過程2008
- Author(s)
  梅本宏信、草薙弘樹、西村和晃、牛島満
- Organizer
  第5回Cat-CVD研究会
- Place of Presentation
  相模原
- Year and Date
  2008-06-20
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 原子状水素原子の濃度とレジスト除去速度との関係2008
- Author(s)
  山本雅史、梅本宏信、堀邊英夫、三浦敏特、田川精一
- Organizer
  春季第55回応用物理学関係連合講演会
- Place of Presentation
  船橋
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] Detection of radical species produced by catalytic decomposition of H_2, O_2 and their mixtures on heated Ir surfaces2008
- Author(s)
  H. Umemoto, et al.
- Organizer
  5th International Conference on Hot-Wire CVD (Cat-CVD) Process
- Place of Presentation
  Cambridge, MA(USA)
- Year and Date
  2008-08-20
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] Detection of radical species produced by catalytic decomposition of H_2, O_2 and their mixtures on heated Ir surfaces2008
- Author(s)
  H. Umemoto, H. Kusanagi, K. Nishimura,and M. Ushijima
- Organizer
  5th International Conference on Hot-Wire CVD(Cat-CVD)Process
- Place of Presentation
  Cambridge
- Year and Date
  2008-08-20
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 加熱イリジウム触媒体上における水素分子、酸素分子の分解過程2008
- Author(s)
  梅本宏信、草薙弘樹、西村和晃、牛島満
- Organizer
  春季第55回応用物理学関係連合講演会
- Place of Presentation
  船橋
- Year and Date
  2008-03-30
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 加熱金属触媒体による酸化性および還元性ラジカルの生成2008
- Author(s)
  梅本宏信、草薙弘樹
- Organizer
  第24回化学反応討論会
- Place of Presentation
  札幌
- Year and Date
  2008-06-02
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] Resist removal and evaluation of Si-wafer by atomic hydrogen2008
- Author(s)
  M. Yamamoto, H. Horibe, H. Umemoto, E. Kusano,and S. Tagawa
- Organizer
  30th International Symposium on Dry Process
- Place of Presentation
  東京
- Year and Date
  2008-11-27
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 酸素/水素混合系触媒分解過程における酸化性および還元性ラジカルの検出2007
- Author(s)
  梅本宏信、森寺真司
- Organizer
  秋季第68回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2007-09-04
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 酸素/水素混合系触媒分解過程における水素原子の検出2007
- Author(s)
  梅本宏信
- Organizer
  第4回Cat-CVD研究会
- Place of Presentation
  北九州
- Year and Date
  2007-06-29
- Data Source
  KAKENHI-PROJECT-19550015
[Presentation] 最低励起三重項状態の窒素分子とC_2H_2(C_2D_2)との反応におけるH(D)原子の収率2007
- Author(s)
  梅本宏信
- Organizer
  第23回化学反応討論会
- Place of Presentation
  神戸
- Year and Date
  2007-06-14
- Data Source
  KAKENHI-PROJECT-19550015
[]

1. YASUI Kanji (70126481)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
2. SHIMIZU Hidehiko (00313502)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
3. SATO Shin (30016042)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. TSUNASHIMA Shigeru (20016108)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. 松村英樹 (90111682)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 増田淳 (30283154)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 和泉亮 (30223043)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 野々村修一 (80164721)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 小長井誠 (40111653)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. KATO Takahiro

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results

Umemoto Hironobu 梅本 宏信

UMEMOTO Hironobu 梅本 宏信

梅本 宏信

Research Projects

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Co-Researchers

Decomposition processes of hydrides such as diborane on heated metal catalystsPrincipal Investigator

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Creation of growth technique for high-quality zinc oxide thin films using catalytically generated high-energy H2O beam

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Application of catalytic chemical vapor deposition technique to oxidizing gasesPrincipal Investigator

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Chemical Vapor Deposition Processes to Prepare Silicon Nitride Films from Organic Silicon Materials Containing NitrogenPrincipal Investigator

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Selective Production and Kinetic Analysis of Singlet-state Metastable Molecular NitrogenPrincipal Investigator

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触媒化学気相成長法によるシリコン系薄膜の成長プロセス

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Isotope effect in the photodissociation process of nitrous oxidePrincipal Investigator

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励起窒素原子の全衝突反応過程と半衝突反応過程Principal Investigator

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Two-photon dissociation of nitric oxidePrincipal Investigator

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金属原子-水素分子錯体の光励起ダイナミクスPrincipal Investigator

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Nascent distributions of ZnH and OH produced in the reactions of excited zinc and waterPrincipal Investigator

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Reaction dynamics of excited Zn atoms by off-resonant photoexcitationPrincipal Investigator

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Behavior of reactive intermediates in the gas phase reactions

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Umemoto Hironobu 梅本宏信

UMEMOTO Hironobu 梅本宏信

梅本宏信