Makimura Tetsuya 牧村哲也

… Alternative Names

MAKIMURA Tetsuya 牧村哲也

牧村哲也マキムラテツヤ

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Researcher Number	80261783
Other IDs
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Affiliation (Current)	2025: 筑波大学, 数理物質系, 准教授
Affiliation (based on the past Project Information) *help	2016 – 2023: 筑波大学, 数理物質系, 准教授 2015: 筑波大学, 数理物質科学研究科(系), 准教授 2011 – 2013: 筑波大学, 数理物質系, 准教授 2010: 筑波大学, 大学院・数理物質科学研究科, 准教授 2007: University of Tsukuba, Graduate School of Pure and Applied Sciences, Associate Professor … More 2006: 筑波大学, 大学院数理物質科学研究科, 講師 2004 – 2005: 筑波大学, 大学院・数理物質科学研究科, 講師 2003: 筑波大学, 物理工学系, 講師 1999 – 2001: 筑波大学, 物理工学系, 講師 1999 – 2001: 筑波大学, 物質工学系, 講師 1997: 筑波大学, 物質工学系, 講師 1995 – 1996: 筑波大学, 物質工学系, 助手 1995: 筑波大学, 物質工学科, 助手 Less
Review Section/Research Field	Principal Investigator Basic Section 26050:Material processing and microstructure control-related / Material processing/treatments / Applied materials science/Crystal engineering / Thin film/Surface and interfacial physical properties Except Principal Investigator Optical engineering, Photon science / Applied materials science/Crystal engineering / Science and Engineering
Keywords	Principal Investigator レーザープラズマ / 極端紫外光 / マイクロ加工 / シリカガラス / 光直接加工 / レーザープラズマ軟X線 / 生体適合性材料 / マイクロ・ナノ加工 / 精密加工 / シリコーンエラストマ … More / シリコーンエラストマー / ポリジメチルシロキサン / 微細加工 / 無機材料 / 透明材料 / ナノ加工 / レーザーアブレーション / 高アスペクト加工 / 生体適合性ポリマー / アブレーション / 波動光学 / アブレーション過程 / アブレーション加工 / レーザー生成プラズマ / 高アスペクト比 / X-ray optics / silica glass / optical direct machining / nanomachining / inorganic materials / transparent materials / lader plasma soft X-ray / 精密部品加工 / 光源技術 / 軟X線 / 軟X線光学系 / 軟 X 線光学系 / PDMS / シリコーンゴム / シリコー,エラストマー / 光加工 / エキシトン / レーザー加工 / シリコン酸化膜 / 可視発光シリコン / シリコン微結晶 / シリコン微粒子 / 軟X線吸収分光法 / シリコンナノクラスター … More Except Principal Investigator レーザープラズマ軟X線吸収分光 / レーザーアブレーション / シリコン / 水素 / 可視発光 / スペクトル / 顕微鏡 / 重元素 / 多価イオン / 水の窓 / 軟X線 / 生物細胞 / 軟X線顕微鏡 / 重元素多価イオン / レーザー生成プラズマ / バイオイメージング / X線顕微鏡 / レーザー生成プラズマ光源 / 水の窓軟X線 / Si-H-B Complexes / Multivacancies / Raman Scattering / Hydrogen Molecule / Hydrogen Passivation / Poly-silicon / Amorphous Si / Silicon / 水素複合体中心 / ポリシリコン化 / レーザーアニール / ポリシリコン / Si-H結合 / ドーパントのパッシベーション / Si-H-B複合体 / 多原子空孔 / ラマン散乱 / 水素分子 / 水素パッシベーション / ポリ化シリコン / アモルファスシリコン / 半導体 / 欠陥 / STM / TOF-ESD / 電子励起脱離 / 表面 / 電子線 / 二次元分布 / 原子操作 / 酸素 / 水素検出顕微鏡 / トンネル顕微鏡 / 複合欠陥 / 電子励起 / 水素顕微鏡 / 原始操作 / 電子 / 光ルミネッセンス / 時間分解構造測定 / シリコン超微粒子 / シリコンクラスター / Siナノクラスター表面反応 / Siナノクラスター / 時間分解分光測定 / 動的機構 / クラスター化 / 酸化反応 / ナノクラスター Less

レーザープラズマ極端紫外光による生体適合性材料の3次元高アスペクトマイクロ加工Principal Investigator
- Principal Investigator
  
  牧村哲也
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 26050:Material processing and microstructure control-related
- Research Institution
  University of Tsukuba
Micromachining using extreme ultraviolet radiation from laser-produced plasmaPrincipal Investigator
- Principal Investigator
  
  Makimura Tetsuya
- Project Period (FY)
  2018 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 26050:Material processing and microstructure control-related
- Research Institution
  University of Tsukuba
High power water-window soft x-ray source driven by mid-IR laser and single-shot imaging
- Principal Investigator
  
  Higashiguchi Takeshi
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Utsunomiya University
Direct micromachining of polydimethylsiloxane using laser plasma soft X-raysPrincipal Investigator
- Principal Investigator
  
  MAKIMURA Tetsuya
- Project Period (FY)
  2010 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  University of Tsukuba
Nanomachining and Nano-Synthesis of Transparent Materials using Laser Plasma Soft X-RaysPrincipal Investigator
- Principal Investigator
  
  MAKIMURA Tetsuya
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  University of Tsukuba
無機透明材料のナノ加工のためのX線エキシトン空間閉じ込めPrincipal Investigator
- Principal Investigator
  
  牧村哲也
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Material processing/treatments
- Research Institution
  University of Tsukuba
電子線による原子操作
- Principal Investigator
  
  吉村雅満
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas (B)
- Review Section
  
  Science and Engineering
- Research Institution
  Toyota Technological Institute
Control of Hydrogen in Si and its Application to Thin Film Transistor
- Principal Investigator
  
  MURAKAMI Kouichi
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  University of Tsukuba
時間分解測定によるシリコンクラスターの表面反応と光ルミネッセンス
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1997
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究
- Principal Investigator
  
  村上浩一
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
レーザーアブレーション法により作成したSi微粒子からの可視発光の機構の研究Principal Investigator
- Principal Investigator
  
  牧村哲也
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  University of Tsukuba
時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究
- Principal Investigator
  
  MURAKAMI Kouichi
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  University of Tsukuba
レーザーアブレーション・Si超微粒子生成過程の時間分解X線吸収分光法による研究Principal Investigator
- Principal Investigator
  
  牧村哲也
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  University of Tsukuba

[Book] 「最新レーザプロセッシングの基礎と産業応用」のうち第2.3章「レーザ励起の特徴」2007
- Author(s)
  牧村哲也(分担執筆)
- Total Pages
  286
- Publisher
  電気学会
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Book] 「2006年度光技術動向調査報告書]のうち第6.4.3章「ガラスの微細加工」2007
- Author(s)
  牧村哲也(分担執筆)
- Total Pages
  533
- Publisher
  光産業技術振興協会
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Book] レーザーマイクロ・ナノプロセッシング2004
- Author(s)
  牧村哲也
- Total Pages
  380
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Soft X-ray emission from molybdenum plasmas generated by dual laser pulses2016
- Author(s)
  Ragava Lokasani, Goki Arai, Yoshiki Kondo, Hiroyuki Hara, Thanh-Hung Dinh, Takeo Ejima, Tadashi Hatano, Weihua Jiang, Tetsuya Makimura, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Takeshi Higashiguchi, and Jiri Limpouch
- Journal Title
  
  Applied Physics Letters
  
  Volume: 109 Issue: 19
- DOI
  10.1063/1.4967310
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-15H03759, KAKENHI-PROJECT-16H03902
[Journal Article] Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm2016
- Author(s)
  Thanh-Hung Dinh, Yoshiki Kondo, Toshiki Tamura, Yuichi Ono, Hiroyuki Hara, Hiroki Oikawa, Yoichi Yamamoto, Masahiko Ishino, Masaharu Nishikino, Tetsuya Makimura, Padraig Dunne, Gerry O’Sullivan, Shigeru Ohta, Ken Kitano, Takeo Ejima, Hatano Tadashi, and Takeshi Higashiguchi
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 87 Issue: 12 Pages: 123106-123106
- DOI
  10.1063/1.4971421
- NAID
  120007135053
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-15H03759, KAKENHI-PROJECT-16F16019, KAKENHI-PROJECT-16K04989, KAKENHI-PROJECT-16H03902
[Journal Article] Properties of the extreme ultraviolet emission from germanium and gallium plasmas2015
- Author(s)
  Bowen Li, Hiroyuki Hara, Yuhei Suzuki, Goki Arai, Takeshi Higashiguchi, Hayato Ohashi, Weihua Jiang, Tetsuya Makimura, Hiroyuki A. Sakaue, Chihiro Suzuki, Daiji Kato, Izumi Murakami, Padraig Dunne, Elaine Long, Paul Sheridan, Ximeng Chen, and Gerry O’Sullivan
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 118 Issue: 7
- DOI
  10.1063/1.4928673
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570, KAKENHI-PROJECT-15H03759
[Journal Article] 軟X線による物質アブレーション2014
- Author(s)
  牧村哲也, 錦野将元, 河内哲哉
- Journal Title
  
  レーザー研究
  
  Volume: vol.42 Pages: 45-49
- NAID
  130007897464
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas2013
- Author(s)
  Tetsuya Makimura, Shuichi Torii, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 8777 Pages: 877706-877706
- DOI
  10.1117/12.2019048
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Absorption mechanism of the second pulse in double-pulse femtosecond laser glass microwelding2013
- Author(s)
  Tetsuya Makimura, 他6名
- Journal Title
  
  Optics Express
  
  Volume: vol.21 Issue: 20 Pages: 24049-24059
- DOI
  10.1364/oe.21.024049
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas2013
- Author(s)
  T. Makimura, 他14名
- Journal Title
  
  Optics Express
  
  Volume: vol.21 Issue: 26 Pages: 31837-31845
- DOI
  10.1364/oe.21.031837
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016, KAKENHI-PROJECT-24560038
[Journal Article] Characterization and mechanism of glass microwelding by double-pulse ultrafast laser irradiation2012
- Author(s)
  Tetsuya Makimura, 他8名
- Journal Title
  
  Optics Express
  
  Volume: vol.20 Issue: 27 Pages: 28893-28905
- DOI
  10.1364/oe.20.028893
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Sub-wavelength micromachining of silica glass by irradiation of CO_2 laser with Fresnel diffraction2011
- Author(s)
  Tetsuya Makimura, Tatsuo Okda, 他6名
- Journal Title
  
  Applied Physics
  
  Volume: vol.104 Issue: 2 Pages: 593-599
- DOI
  10.1007/s00339-011-6364-6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Micromachining of Polymethylmethacrylate and Polydimethylsiloxane Using Laser Plasma Soft X-rays2011
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他5名
- Journal Title
  
  Journal of Laser Micro / Nanoengineering
  
  Volume: vol.6 Pages: 235-238
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Direct etching of poly (methyl methacrylate) using laser plasma soft X-rays Applied2010
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他6名
- Journal Title
  
  Physics Express
  
  Volume: vol.3 Issue: 6 Pages: 66502-66502
- DOI
  10.1143/apex.3.066502
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Nano-and micromachining using laser plasma soft X-rays2010
- Author(s)
  Makimura, 他3名
- Journal Title
  
  Journal of Nanophotonics
  
  Volume: 4 Pages: 40305-40305
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] XUV～X線による材料加工2010
- Author(s)
  牧村哲也, 他3名
- Journal Title
  
  レーザー研究
  
  Volume: vol.38 Pages: 957-962
- NAID
  10027617764
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Micromachining of Transparent Materials with Fresnel Diffraction of Infrared Radiation2010
- Author(s)
  T. Makimura, T.Okada, 他6名
- Journal Title
  
  Journal of Laser Micro/Nanoengineering
  
  Volume: vol.5 Pages: 269-272
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360016
[Journal Article] Micromachining of lnorganic Materials using Laser Plasma Soft X-Rays2008
- Author(s)
  Tetsuya, Makimura・Satoshi, Uchida・Takashige, Fujimori・Hiroyuki, Niino・Kouichi, Murakami,
- Journal Title
  
  Electrical Engineering in Japan (印刷中)
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による無機透明材料のアブレーション加工2007
- Author(s)
  牧村哲也
- Journal Title
  
  電気学会論文誌 127
  
  Pages: 179-184
- NAID
  10018480450
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of inorganic materials using laser plasma soft X-rays,2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Satoshi Uchida, Kouichi Mu-rakami, Hiroyuki Niino
- Journal Title
  
  Proceedings of SPIE Optics and Optoelecteonics 2007, refreed 6586
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of inorganic materials using laser plasma Soft X-rays2007
- Author(s)
  Tetsuya, Makimura・Takashige, Fujimori・Satoshi, Uchida・Kouichi, Murakami・Hiroyuki, Niino
- Journal Title
  
  Proceedings of SPIE 6586
  
  Pages: 6586091-15
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Properties of Laser Excitations in Most Recent Fundamentals and Industrial Applicatioins of Laser Pro-cessing2007
- Author(s)
  Tetsuya Makimura, Section 2. 3
- Journal Title
  
  The Institute of Electrical Engineers of Japan
  
  Pages: 286-286
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] 1.5μm Light Emission of Er3+ Ions Doped in SiO2 Films Including Si Nanocrystallites and in SiOx Films2007
- Author(s)
  T. Makimura, H. Uematsu, Y. Okada, K. Murakami
- Journal Title
  
  Journal of Physics 59
  
  Pages: 466-469
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of inorganic transparent materilas by ablation using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takeshige Fujimori, Hiroyuki Ni-ino, Kouichi Murakami
- Journal Title
  
  The transactions of the Institute of Electrical Engineers of Japan 127
  
  Pages: 179-184
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays,2007
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Hiroyuki, Niino・ Kouichi, Murakami,
- Journal Title
  
  Journal of Physics: Conference Series 59
  
  Pages: 279-284
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による無機透明材料の微細加工2007
- Author(s)
  牧村哲也・村上浩一
- Journal Title
  
  セラミックス 42
  
  Pages: 64-64
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of silica glass by laser plasma soft X-rays and discussion on mechanism2007
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Takehiko Inoue, Kouichi Mu-rakami, Hiroyuki Niino
- Journal Title
  
  Meeting of the Institute of Electrical Engineers of Japan, unrefreed OQD-07
  
  Pages: 41-44
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Report on Laser Precision Microfabrication(LPM) 20072007
- Author(s)
  Yoshiki Nakata, Yuusaku Izawa, Tetsuya Makimura
- Journal Title
  
  Journal of the Japan Laser Processing Society, unrefreed 14
  
  Pages: 245-249
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による無機透明材料の微細加工2007
- Author(s)
  牧村哲也
- Journal Title
  
  セラミックス 42
  
  Pages: 64-64
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Laser Precision Microfabrication(LPM)2007報告2007
- Author(s)
  事田芳樹・井津友策・牧村哲也
- Journal Title
  
  レーザー加工学会誌 14
  
  Pages: 245-249
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による無機透明材料のアブレーション加工2007
- Author(s)
  牧村哲也・内田智・藤森隆成・新納弘之・村上浩一
- Journal Title
  
  電気学会論文誌 127
  
  Pages: 179-184
- NAID
  10018480450
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Glass Micromachining in Report on Trend Survey of Optoelectronic Technology 20062007
- Author(s)
  Tetsuya Makimura, Section 6. 4. 3
- Journal Title
  
  Optoelectronic Industry and Technology Development Association
  
  Pages: 533-533
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays,2007
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino and Kouichi Murakami
- Journal Title
  
  Journal of Physics : Conference Series, refreed 59
  
  Pages: 279-284
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線によるシリカガラスのアブレーションとそのメカニズムの検討2007
- Author(s)
  藤森隆成・牧村哲也・井上毅彦・村上浩一・新納弘之
- Journal Title
  
  電気学会量子・電子デバイス研究会 OQD-07
  
  Pages: 41-44
- NAID
  10018897616
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] 1.5um light emission of Er^<3+> ions doped in SiO_2 films including Si nanocrystallites and in SiO_x films,2007
- Author(s)
  Tetsuya Makimura, Hiroshi Uematsu, Yuuki Okada and Kouichi Mu-rakami
- Journal Title
  
  Journal of Physics : Conference Series, refreed 59
  
  Pages: 466-469
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2007
- Author(s)
  T. Makimura, H. Miyamoto, S. Uchida, H. Niino, K. Murakami
- Journal Title
  
  Journal of Physics 59
  
  Pages: 279-284
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of inorganic transparent materials using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Kouichi Murakami
- Journal Title
  
  Ceramics, unrefreed 42
  
  Pages: 64-64
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] 1・5μm light emission of Er3+ions doped in SiO2 films including Sinanocrystallites and in SiOxfilms,2007
- Author(s)
  Tetsuya, Makimura・Hiroshi, Uematsu・Yuuki, Okada・Kouichi, Murakami
- Journal Title
  
  Journal of Physics: Conference Series 59
  
  Pages: 466-469
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct micromachining of inorganic transparent materials using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Conference proceeding series of institute of Pure and Applied Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Ablation of inorganic transparent materials in gases using laser plasma soft X-rays2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Satoshi Uchida, Kouichi Mu-rakami, Hiroyuki.Niino
- Journal Title
  
  Meeting of the Institute of Electrical Engineering of japan, unrefreed OQD-06
  
  Pages: 53-56
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] 1.5 μm light emission of Era^<3+>ions in SiO_2 including Si nanocrystallites and SiO_X films2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Journal of Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Direct nanomachining of inorganic transparent materials using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Journal of Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Micromachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays,2006
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino, and Kouichi Murakarni
- Journal Title
  
  Conference Senries of The institute of Pure and Applied Physics 7
  
  Pages: 137-139
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Silica nanomachining using laser plasma soft x rays,2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Kouichi Murakami, and Hiroyuki Niino
- Journal Title
  
  Applied Physics Letters, refreed 89
- NAID
  120007131283
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ultra-fine micromachining of silica glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takeshige Fujimori, Hiroyuki Ni-ino, Kouichi Murakami
- Journal Title
  
  Report on the Laser Society of Japan Meeting #352, unrefreed RTM-06
  
  Pages: 21-25
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] 1.5μm light emission of Er3+ ions in SiO_2 films including Si nanocrystallites and SiO_x films2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Journal of Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザーブラズマ軟X線によるガス中での無機透明材料のアブレーション2006
- Author(s)
  牧村哲也・内田智・藤森隆成・新納弘之・村上浩一
- Journal Title
  
  電気学会量子・電子デバイス研究会 OQD-06
  
  Pages: 53-56
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nano-ablation of inorganic materials using laser plasma soft X-rays at around 10 nm2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Japanese Journal of Applied Physics 45
  
  Pages: 5545-5547
- NAID
  10017998993
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Silica nanomachining using laser plasma soft x rays2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Applied Physics Letters 89
  
  Pages: 101118-101118
- NAID
  120007131283
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nano-ablation of inorganic transparent materials using laser plasma soft X-rays at around 10 nm2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Japanese Journal of Applied Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] レーザープラズマ軟X線によるシリカガラスの極微細加工2006
- Author(s)
  牧村哲也・内田智・藤森隆成・新納弘之・村上浩一
- Journal Title
  
  レーザー学会第 352回研究会報告 RTM-06
  
  Pages: 21-25
- NAID
  10020611506
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nano-Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays at around 10 nm,2006
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fuji-mori, Hiroyuki Niino and Kouichi Murakami
- Journal Title
  
  Japan Journal of Applied Physics, refreed 45
  
  Pages: 5545-5547
- NAID
  10017998993
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Silica nanomachjning using laser plasma soft x rays2006
- Author(s)
  Tetsuya, Makimura・Satoshi, Uchida・Kouichi, Murakami・Hiroyuki, Niino,
- Journal Title
  
  Applied Physics Letters 89
  
  Pages: 1011181-3
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nano-Ablation of lnorganic Materials Using Laser Plasma Soft X-Rays at around 10 nm2006
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Takashige, Fujimori・ Hiroyuki, Niino・Kouichi, Murakami
- Journal Title
  
  Japanese Journal of Applied Physics 45
  
  Pages: 5545-5547
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct micromachining of inorganic transparent materials using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Conference series of Institute of Pure and Applied Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct Micromachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2006
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Hiroyuki, Niino・Kouichi, Murakami,
- Journal Title
  
  Conference Series of The Institute of Pure and Applied Physic 7
  
  Pages: 137-139
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザープラズマ軟X線による石英ガラスのナノ加工2006
- Author(s)
  内田智・藤森隆成・牧村哲也・村上浩一・新納弘之
- Journal Title
  
  電気学会量子・電子デバイス研究会 OQD-06
  
  Pages: 49-52
- NAID
  10019203795
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of silica glass using pulsed plasma soft X rays2006
- Author(s)
  Tdsuya, Makimura・Youichi, Kenmotsu・Hisao, Miyamoto・Hiroyuki, Niino・Koujchi, Murakami,
- Journal Title
  
  Surface Science 53
  
  Pages: 248-251
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nanomachining of quartz glass using laser plasma soft X-rays2006
- Author(s)
  Satoshi Uchida, Takashige Fujimori, Tetsuya Makimura, Kouichi Mu-rakami, Hiroyuki Niino
- Journal Title
  
  Meeting of the Institute of Electrical Engineers of Japan, unrefreed OQD-06
  
  Pages: 49-52
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct nanomachining of inorganic transparent materials using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Journal of Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays2005
- Author(s)
  S., Uchida・T., Makimura・H., Miyamoto・K., Murakami,
- Journal Title
  
  Materials Processing for Properties and Performance 4
  
  Pages: 261-263
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays,2005
- Author(s)
  Hisao Miyamoto, Tetsuya Makimura, Satoshi Uchida, Kouichi Mu-rakami, and Hiroyuki Niino
- Journal Title
  
  Materials Processing for Properties and Per-formance, unrefreed 4
  
  Pages: 264-266
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of silica glass using pulsed laser plasma soft X rays2005
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Surface Science (印刷中)
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Ablation of silica glass using laser plasma soft X-rays at around 10 nm and ablation dynamics2005
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Materials Processing for Properties and Performance 4巻
  
  Pages: 267-269
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm,2005
- Author(s)
  Tetsuya Makimura, Youichi Kenmotsu, Hisao Miyamoto, Satoshi Uchida, Niroyuki Niino, and Kouichi Murakami
- Journal Title
  
  Proceedings of SPIE Lasers and Applica-tions in Science and Engineering, unrefreed 5713
  
  Pages: 9-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays,2005
- Author(s)
  S. Uchida, T. Makimura, H. Miyamoto, K. Murakami
- Journal Title
  
  Materials Processing for Properties and Per-formance, unrefreed 4
  
  Pages: 261-263
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Micromachining of lnorganic transparent materials using laser plasma soft x-Rays at 10 nm2005
- Author(s)
  Tetsuya, Makimura・Youichi, Kenmotsu・Hisao, Miyamoto・Satoshi, Uchida・Niroyuki, Niino・Kouichi, Murakami
- Journal Title
  
  Proceedings of SPIE 5713
  
  Pages: 9-20
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] "Hydrogen Passivation of Er and Si Nanocrystallites in Er-doped SiO2-Increase in Photoluminescence-2005
- Author(s)
  N., Fukata・C., Li・H., Uematsu・T., Arai・T., Makimura・K., Murakami,
- Journal Title
  
  Materials Research Society Symposium Proceeding 832
  
  Pages: 379-384
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of Silica Glass Using Laser Plasma Soft X-Rays at around 10nm and Ablation Dynamics2005
- Author(s)
  Tetsuya, Makimura・Hisao, Miyamoto・Satoshi, Uchida・Kouichi, Murakami,
- Journal Title
  
  Materials Processing for Properties and Performance 4
  
  Pages: 267-269
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] レーザーとナノ物性ーレーザーアブレーションで創製したSi ナノ構造の物性-2005
- Author(s)
  村上浩一・牧村哲也・深田直樹
- Journal Title
  
  レーザー研究 33
  
  Pages: 5-11
- NAID
  10014278760
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Hydrogen Passivation of Er and Si Nanocrystallites in Erdoped SiO_2 - Increase in Photoluminescence-2005
- Author(s)
  N. Fukata, C. Li, H. Uematsu, T. Arai, T. Makimura, and K. Mu-rakami
- Journal Title
  
  Material Research Society Symposium Pro-ceeding, refreed 832
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of silica glass using pulsed laser plasma soft X rays,2005
- Author(s)
  Tetsuya Makimura, Youichi Kenmotsu, Hisao Miyamoto, Hiroyuki Ni-ino, and Kouichi Murakami
- Journal Title
  
  Surface Science, redreed 593
  
  Pages: 248-251
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of Silica Glass Using Laser Plasma Soft X-Rays at around 10 nm and Ablation Dynamics,2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, and Kouichi Mu-rakami
- Journal Title
  
  Materials Processing for Properties and Per-formance, unrefreed 4
  
  Pages: 267-269
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Laser and nano-properties -Properties of nano-structured Si fabricated by laser ablation-2005
- Author(s)
  Kouichi Murakami, Tetsuya Makimura, Naoki Fukata
- Journal Title
  
  The Review of Laser Engineering, refreed 33
  
  Pages: 5-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays2005
- Author(s)
  Hisao, Miyamoto・Tetsuya, Makimura・Satoshi, Uchida・Kouichi, Murabmi・Hiroyuki, Niino
- Journal Title
  
  Materials Processing for Properties and Performance 4
  
  Pages: 264-266
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Ablation of silica glass using laser plasma soft X-rays at around 10 nm and ablation dynamics2005
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Materials Processing for Properties and Performance 4
  
  Pages: 267-269
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays,2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Youichi Kenmotsu, Kouichi Mu-rakami, and Hiroyuki Niino
- Journal Title
  
  Applied Physics Letters refreed 86
- NAID
  120007131276
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays2005
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Applied Physics Letters 3月(印刷中)
- NAID
  120007131276
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Ablation of silica glass using pulsed laser plasma soft X-rays2005
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Surface Science 593巻
  
  Pages: 248-251
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm (INVITED PAPER)2005
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Proceedings of SPIE, Lasers and Applications in Science and Engineering 2005 (印刷中)
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Nanomachining of Inorganic Transparent Materials Using an X-ray Exciton Method2004
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Proceedings of SPIE, Fifth international symposium on Laser Precision Microfabrication 5662
  
  Pages: 107-112
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Excitation of Er atoms by energy transfer from Si nanocrystallites embedded in SiO_22004
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Applied Physics A 79
  
  Pages: 799-802
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] In situ size measurements of Si nanoparticles and formation dynamics after laser ablation2004
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Applied Physics A 79
  
  Pages: 819-821
- Data Source
  KAKENHI-PROJECT-15656183
[Journal Article] Micromachining of Inorganic Materials using Laser Plasma Soft X-Rays
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Hiroyuki Ni-ino, Kouichi Murakami
- Journal Title
  
  Electrical Engineering in Japan, refreed, to be published
- NAID
  10018480450
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Journal Article] Nano-ablation of inorganic transparent materials using laser plasma soft X-rays at around 10 nm
- Author(s)
  Tetsuya Makimura
- Journal Title
  
  Japanese Journal of Applied Physics (印刷中)
- Data Source
  KAKENHI-PROJECT-17360348
[Patent] 軟X線加工装置及び軟X線加工法2005
- Inventor(s)
  牧村哲也, 村上浩一
- Industrial Property Rights Holder
  独立行政法人科学技術辰興機構
- Industrial Property Number
  2004-034343
- Filing Date
  2005
- Data Source
  KAKENHI-PROJECT-15656183
[Presentation] EUV ablation of polydimethylsiloxane elastmor2023
- Author(s)
  Kotaro Oguchi, Yuhao Wang, Tetsuya Makimura
- Organizer
  SPIE Photonics West 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04755
[Presentation] Micrometer-scale high-aspect machining of PDMS elastomer using laser plasma EUV radiation2023
- Author(s)
  Kotaro Oguchi, Yuhao Wang, Tetsuya Makimura
- Organizer
  The 23th International Symposium on Laser Precision Microfabrication
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04755
[Presentation] EUV ablation of polydimethylsiloxane elastomer2023
- Author(s)
  Kotaro Oguchi, Yuhao Wang, Tetsuya Makimura
- Organizer
  SPIE Photonics West 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K04770
[Presentation] Ablation of polydimethylsiloxane elastomer using laser-plasma EUV radiation2022
- Author(s)
  Kotaro Oguchi, Erika Kira, Hikari Urai, Tetsuya Makimura
- Organizer
  16th International Conference on Laser Ablation
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04755
[Presentation] Ablation of polydimethylsiloxane elastomer using laser-plasma EUV radiation2022
- Author(s)
  Kotaro Oguchi, Erika Kira, Hikari Urai, Tetsuya Makimura
- Organizer
  16th International Conference on Laser Ablation
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K04770
[Presentation] Ablation of polydimethylsiloxane elastmer using laser-plasma EUV radiation2022
- Author(s)
  Kotaro Oguchi, Erika Kira, Hikari Urai, Tetsuya Makimura
- Organizer
  16th International Conference on Laser Ablation
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K04770
[Presentation] High-aspect micromachining of PDMS sheets using laser plasma EUV radiation2021
- Author(s)
  Jiang Yuan, Kotaro Oguchi, Tetsuya Makimura
- Organizer
  The 22nd International Symposium on Laser Precision Microfabrication
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K04770
[Presentation] Silica ablation process induced by nanosecond EUV irradiation2019
- Author(s)
  Makimura Tetsuya; Torii Shuichi; Niino Hiroyuki
- Organizer
  SPIE Optics + Optoelectronics 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K04770
[Presentation] Silica nano-ablation mechanism under irradiation with nanosecond EUV radiation2019
- Author(s)
  Tetsuya Makimura, Shuichi Torii, Hiroyuki Niino
- Organizer
  SPIE Photonics West
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K04770
[Presentation] Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma2019
- Author(s)
  Makimura Tetsuya; Urai Hikari; Kira Eriko; Niino Hiroyuki
- Organizer
  The 8th International Congress on Laser Advanced Materials Processing/
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K04770
[Presentation] 多価イオンプラズマ計測用軟X 線射入射分光器の絶対較正2016
- Author(s)
  ヂンタンフン，近藤芳希，田村賢紀，荒居剛己，牧村哲也，太田茂，北野謙，山本洋一，石野雅彦，錦野将元，江島丈雄，羽多野忠，東口武史
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ (新潟県新潟市)
- Data Source
  KAKENHI-PROJECT-15H03570
[Presentation] Unresolved transition arrays from laser-produced high-Z plasmas for microscopy in the water window soft x-ray region2015
- Author(s)
  Thanh-Hung Dinh, Yoshiki Kondo, Goki Arai, Taisuke Miura, Akira Endo, Tetsuya Makimura, Padraig Dunne, Gerry O’Sullivan, Tadashi Hatano, Takeio Eijima, and Takeshi Higashiguchi
- Organizer
  The 13th Symposium on X-ray Imaging Optics
- Place of Presentation
  Noyori Conference Hall, Nagoya University (Higashiyama campus), Nagoya, Japan
- Year and Date
  2015-11-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570
[Presentation] Development of a 10-Hz short pulse CO2 laser for short wavelength light sources2015
- Author(s)
  Reiho Amano, Atsushi Sasanuma, Thanh-Hung Dinh, Goki Arai, Yusuke Fujii, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Tetsuya Makimura, Taisuke Miura, Akira Endo, Tomas Mocek, Padraig Dunne, Gerry O’Sullivan, and Takeshi Higashiguchi
- Organizer
  SPIE/OSJ Biophotonics Japan 2015
- Place of Presentation
  Univesity of Tsukuba (Tokyo campus), Tokyo, Japan
- Year and Date
  2015-10-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570
[Presentation] Multiply charged ion plasma sources for compact x-ray microscopy in the water window spectral region2015
- Author(s)
  T. H. Dinh, Y. Kondo, G. Arai, T. Miura, A. Endo, T. Makimura, P. Dunne, G. O’Sullivan, T. Hatano, T. Ejima, and T. Higashiguchi
- Organizer
  SPIE/OSJ Biophotonics Japan 2015
- Place of Presentation
  Univesity of Tsukuba (Tokyo campus), Tokyo, Japan
- Year and Date
  2015-10-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570
[Presentation] Development of a compact water window soft x-ray source based on multiply charged ion plasmas2015
- Author(s)
  Thanh-Hung Dinh, Yoshiki Kondo, Goki Arai, Taisuke Miura, Akira Endo, Tetsuya Makimura, Tadashi Hatano, Takeo Ejima, Takeshi Higashiguchi
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場 (愛知県名古屋市)
- Year and Date
  2015-09-16
- Data Source
  KAKENHI-PROJECT-15H03570
[Presentation] Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources2015
- Author(s)
  R. Amano, T. H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, K. Nanto, A. Takahashi, D. Nakamura, T. Okada, T. Makimura, T. Miura, A. Endo, T. Mocek, P. Dunne, G. O’Sullivan, and T. Higashiguchi
- Organizer
  2015 IEEE Photonics Conference, 28th Annual Conference of The IEEE Photonics Society
- Place of Presentation
  Hyatt Regency Reston, Reston, Virginia USA
- Year and Date
  2015-10-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570
[Presentation] Efficient extreme ultraviolet emission in highly ionized high-Z laser-produced plasmas2015
- Author(s)
  Takeshi Higashiguchi, Reiho Amano, Thanh-Hung Dinh, Takanori Miyazaki, Yuhei Suzuki, Masato Kawasaki, Atsushi Sasanuma, Goki Arai, Hiroyuki Hara, Yusuke Fujii, Kenichiro Nanto, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Tetsuya Makimura, Taisuke Miura, Akira Endo, Bowen Li, Padraig Dunne, and Gerry O’Sulliban
- Organizer
  The 4th Advanced Lasers and Photon Sources (ALPS’15)
- Place of Presentation
  PACIFICO Yokohama, Yokohama Japan
- Year and Date
  2015-04-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03570
[Presentation] レーザープラズマ軟X線によるシリカガラスのアブレーション2014
- Author(s)
  鳥居周一, 牧村哲也, 新納弘之, 村上浩一
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス, 東京
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] レーザープラズマ軟X線によるシリカガラスのアブレーション2014
- Author(s)
  鳥居周一, 牧村哲也, 新納弘之, 村上浩一
- Organizer
  2014年第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス, 東京
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas, SPIE Europe 20132013
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他5名
- Organizer
  Optics+Optoelectronics
- Place of Presentation
  プラハ, チェコ
- Year and Date
  2013-04-15
- Invited
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] 光照射した無機材料の緩和過程2013
- Author(s)
  牧村哲也
- Organizer
  光産業技術振興協会第 2 回研究交流会
- Place of Presentation
  産業技術総合研究所臨海副都心センター別館, 東京
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Direct micromachining of polydimethylsiloxane using laser plasma soft X-rays2013
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他6名
- Organizer
  5th International Symposium on Nanomedicine
- Place of Presentation
  Nagoya University, Aichi
- Year and Date
  2013-03-26
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Ablation Process of PMMA Induced by Irradiation with Laser Plasma EUV Light2013
- Author(s)
  Nobuhiko Sugiura, Shuichi Torii, Tetsuya Makimura, Yoshiyuki Ichinosawa, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The 10th Conference on Lasers and Electo-Optics Pacific Rim 2013
- Place of Presentation
  Kyoto International Confernce Center, Kyoto
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Micromachining of polydimethylsiloxane using laser plasma soft X-rays2013
- Author(s)
  Shintaro Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Koichi Murakami
- Organizer
  The 14th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Toki Messe Niigata Convention Center, Toki
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Micromachining of Polydimethylsiloxane using EUV light2013
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他7名
- Organizer
  The 10th Conference on Lasers and Electo-Optics Pacific Rim 2013
- Place of Presentation
  Kyoto International Confernce Center, Kyoto
- Year and Date
  2013-07-03
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Micromachining of PMMA using laser plasma soft X-rays for fabrication of 3D molds in a micrometer scale2013
- Author(s)
  Nobuhiko Sugiura, Shuichi Torii, Tetsuya Makimura, Yoshiyuki Ichinosawa, Kouta Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The 14th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Toki Messe Niigata Convention Center, Niigata
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Micromachining of polydimethylsiloxane using laser plasma soft X-rays2013
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他7名
- Organizer
  The 14th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Toki Messe Niigata Convention Center, Niigata
- Year and Date
  2013-07-24
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] inorganic and organic2013
- Author(s)
  Tetsuya Makimura
- Organizer
  SPIE Europe 2013, Optics+Optoelectronics
- Place of Presentation
  プラハ, チェコ
- Invited
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] レーザープラズマ放射極端紫外光による微細加工2013
- Author(s)
  鳥居周一, 小森隆幸, 高橋翔大, 小川端生, 藤枝隆一郎, 深見慎太郎, 杉浦信彦, 牧村哲也, 中村大輔, 高橋昭彦, 岡田龍雄, 新納弘之, 村上浩一
- Organizer
  レーザー学会第450回研究会
- Place of Presentation
  早稲田大学西早稲田キャンパス, 東京
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Process of Silica Ablation Induced by Soft X-Ray Irradiation2012
- Author(s)
  Tetsuya Makimura, Tasuo Okada, 他6名
- Organizer
  International Conference on Electronic Materials 2012
- Place of Presentation
  Pacifico Yokohama, Kanagawa
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Responses of polymers to laser plasma EWV light beyond ablation threshold and micromachuung2011
- Author(s)
  牧村哲也, 他7名
- Organizer
  SPIE Europe Optics+Optoelectronics
- Place of Presentation
  Prague(Czech Republic) Invited
- Year and Date
  2011-04-19
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Micromachining of polymethylmethacrylate and polydimethylsiloxane using laser plasma soft X-rays2011
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他6名
- Organizer
  The 12th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Kagawa Interntional Conference Hall, Kagawa
- Year and Date
  2011-06-07
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Micromachining of Polydimethylsiloxane induced by laser plasma EUV light2011
- Author(s)
  T. Makimura, T. Okada, 他6名
- Organizer
  SPIE Optics + Optoelectronics 2011
- Place of Presentation
  Prague Congress Centre. Prague, Czech
- Year and Date
  2011-04-20
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Silica ablation process induced by focused laser plasma soft x-rays2011
- Author(s)
  T.Makimura
- Organizer
  2011 Pcific-Rim Laser Damage
- Place of Presentation
  Shanghi, China(招待講演)
- Year and Date
  2011-11-07
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining2011
- Author(s)
  T.Makimura
- Organizer
  SPIE Optics+Optoelectronics 2011
- Place of Presentation
  Prague Congress Centre. Prague, Czech(招待講演)
- Year and Date
  2011-04-19
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining2011
- Author(s)
  Tetsuya Makimura, Tatsuo Okada, 他6名
- Organizer
  SPIE Optics + Optoelectronics 2011
- Place of Presentation
  Prague Congress Centre. Prague, Czech
- Year and Date
  2011-04-19
- Invited
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Silica ablation process induced by focused laser plasma soft x-rays2011
- Author(s)
  Tetsuya Makimura, 他3名
- Organizer
  2011 Pcific-Rim Laser Damage
- Place of Presentation
  Shanghi, China
- Year and Date
  2011-11-07
- Invited
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] レーザープラズマ軟x線によるsio2, PMMA, PDMsのマイクロ・ナノ加工2010
- Author(s)
  牧村哲也, 他10名
- Organizer
  ナノ学会第8回大会
- Place of Presentation
  分子科学研究所(岡崎市)
- Year and Date
  2010-05-14
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] レーザープラズマ軟X線によるシリコーンゴムのアブレーション加工2010
- Author(s)
  牧村哲也, 岡田龍雄, 他6名
- Organizer
  2010年秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学文京キャンパス, 長崎
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] Micromachining of transparent materialswith Fresnel diffraction of infrared radiation2010
- Author(s)
  T. Makimura, T. Okada, 他6名
- Organizer
  11th International Symposium on Laser Precision Microfabrication
- Place of Presentation
  Stuttgart, Germany
- Year and Date
  2010-06-07
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] レーザー励起EUV光によるアブレーションと微細加工2010
- Author(s)
  牧村哲也, 他3名
- Organizer
  平成22年度レーザープラズマ粒子加速研究会
- Place of Presentation
  光産業創成大学院大学
- Year and Date
  2010-12-07
- Data Source
  KAKENHI-PROJECT-22360016
[Presentation] EUV材料プロセス2008
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  2008年春季第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学船橋キャンパス
- Year and Date
  2008-03-28
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Materials Processing using EUV light2008
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  Symposium in The Japan Society of Applied Physics2008 Spring Meeting
- Place of Presentation
  Nihon Unviersity
- Year and Date
  2008-05-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] EUVアブレーション2008
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学
- Year and Date
  2008-03-21
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Researches of EUV processing2008
- Author(s)
  Tetsuya Makimura
- Organizer
  Meeting of The Laser Society of Japan
- Place of Presentation
  Unvisristy of Osaka
- Year and Date
  2008-02-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] EUV ablation2008
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  Symposium in the Insitute of Electrical Engineers of Japan 2008
- Place of Presentation
  Fukuoka Kogyo University
- Year and Date
  2008-03-21
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of transparent materials using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  Special Meeting of Kyushu Devision of The Japan Society of Applied Physics
- Place of Presentation
  Kyushu Uvniversity
- Year and Date
  2007-11-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic ma-terials using laser plasma soft X-rays2007
- Author(s)
  (Invited Paper) Tetsuya Makimura, Takashige Fujimori, Satoshi Uchida, Kouichi Murakami, Hiroyuki Niino
- Organizer
  Optics and Optoelectronics 2007 Prague Czech Republic
- Year and Date
  2007-04-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Nanomachining Using Laser Plasma Soft X-Rays2007
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Niroyuki Niino, and Kouichi Murakami
- Organizer
  The 8th International ternational Conference on Laser Precision Microfabrication, Vienna, Austria
- Year and Date
  2007-04-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation process of silica glass using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2007 Fall Meeting
- Place of Presentation
  Hokkaido Kogyou University
- Year and Date
  2007-09-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] レーザープラズマ軟X線によるシリカガラスのアブレーションプロセス2007
- Author(s)
  藤森隆成, 牧村哲也, 新納弘之, 村上浩一
- Organizer
  2007年(平成19年)秋季第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of silica glass using laser plasma soft X-rays and discussion on mechanism2007
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Takehiko Inoue, Kouichi Murakami, Hiroyuki Niino
- Organizer
  The Institute of Electrical Engineers of Japan Meeting
- Place of Presentation
  Hirosaki University
- Year and Date
  2007-03-02
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica nanomachining using laser plasma soft X-rays2007
- Author(s)
  T. Makimura, S. Uchida, T. Fujimori, H. Niino, K. Murakami
- Organizer
  The 8th International Conference on Laser Precision Microfabrication
- Place of Presentation
  ウィーン
- Year and Date
  2007-04-28
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of SiO_2 and Si using laser plasma soft X-rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2007 Fall Meeting
- Place of Presentation
  Hokkaido Kogyou University
- Year and Date
  2007-09-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Process of silica nano-ablation using laser plasma soft X-rays2007
- Author(s)
  T. Makimura, T. Fujimori, S. Uchida, K. Murakami, H. Niino
- Organizer
  9th Conference on Laser Ablation 2007
- Place of Presentation
  テネリフェ,スペイン
- Year and Date
  2007-09-28
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] レーザープラズマ軟X線による透明材料のアブレーション2007
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  応用物理学会九州支部特別講演会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2007-11-22
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Process of Silica Nano-Ablation Using Laser Plasma Soft X-Rays2007
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Satoshi Uchida, Kouichi Murakami, Hiroyuki Niino
- Organizer
  9th International Conference on Laser lation Tenerife, Spain
- Year and Date
  2007-09-25
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nano-ablation of quartz glass by laser plasma soft X-ray technique2007
- Author(s)
  Satoshi Uchida, Kengo Yofu, Takashige Fujimori, Takehiko Inoue, Tetsuya Makimura, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2007 Spring Meeting
- Place of Presentation
  Aoyama Gakuin University
- Year and Date
  2007-03-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Nanomachining Using Laser Plasma Soft X-Rays2007
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Niroyuki Niino, and Kouichi Murakami
- Organizer
  International Conference on Nanoelectronics, Nanostructures on Interactions, NTT Atsugi R&D Center
- Year and Date
  2007-02-22
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] レーザープラズマ軟X線によるSiO2およびSiのアブレーション2007
- Author(s)
  牧村哲也, 藤森隆成, 新納弘之, 村上浩一
- Organizer
  2007年(平成19年)秋季第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablated species generated by irradiation of silica glass with laser plasma soft X-rays2007
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Takehiko Inoue, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  2007 Spring Meeting
- Place of Presentation
  Aoyama Gakuin University
- Year and Date
  2007-03-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials using laser plasma soft X-rays(招待講演)2007
- Author(s)
  T. Makimura, T. Fujimori, S. Uchida, K. Murakami, H. Niino
- Organizer
  Optics and Optoelectronics 2007
- Place of Presentation
  プラハ,チェコ
- Year and Date
  2007-04-18
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Design and development of synchrotron beam line for rapid etching using XeF_2 gas2006
- Author(s)
  N. Nakai, H. Uno, S. Cho, R. Teruo, M. Suzui, Y. Teraoka, A. Yoshikoshi, Tetsuya Makimura, Kouichi Murakami, T. Urisu
- Organizer
  Joint Symposium of The 19th The Japan Society of Synchrotron Radiation Research and Synchrotron Radiation Science
- Place of Presentation
  Nagoya University
- Year and Date
  2006-01-09
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Nanomachining Using Pulsed Laser Plasma Soft X-Rays2006
- Author(s)
  Satoshi Uchida, Tetsuya Makimura, Hisao Miyamoto, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 7th AIST International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba
- Year and Date
  2006-01-17
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of quartz glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Institute of Electrical Engineers of JapanC Devision Annual Meeting 2006
- Place of Presentation
  KantoGakuin University
- Year and Date
  2006-09-06
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining dynamics of synthesized quartz glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Spring Meeting
- Place of Presentation
  Musashino Kougyou University
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Micromachining of optical materials by ablation using High-energy laser plasma soft X-rays2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Spring Meeting
- Place of Presentation
  Musashino Kougyou University
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Dynamics of silica glass nano-ablation using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Spring Meeting
- Place of Presentation
  Musashino Kougyou University
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Direct nanomachining of inorganic transparent materials using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Kouichi Murakami, and Hiroyuki Niino
- Organizer
  The 4th International Conference on Laser Advanced Materials Processing Kyoto Research Park, Kyoto
- Year and Date
  2006-05-16
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ultra-fine micromachining of silica glass using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Laser_Society of Japan #352 Meeting
- Place of Presentation
  Miyazaki University
- Year and Date
  2006-09-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of silica glass using laser plasma soft X-rays at around 10 nm and ablation dynamics2006
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Kouichi Murakam, and Hiroyuki Niino
- Organizer
  Laser Applications in Microelectronics and Optoelectronics Manufacturing XI, San Jose
- Year and Date
  2006-01-21
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Silica Ablation Using Pulsed Laser Plasma Soft X-Rays in Various Gases2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Satoshi Uchida, Hisao Miyamoto, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 7th AIST International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba
- Year and Date
  2006-01-17
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Design and development of synchrotron beam line for rapid etching using XeF_2 gas2006
- Author(s)
  Naofumi Nakai, S. Zheng, H. Uno, R. Teruo, K. Suzui, Y. Teraoka, A. Yoshikoshi, Tetsuya Makimura, Kouichi Murakami, T. Urisu
- Organizer
  The Japan Society of Applied Physics2006 Fall Meeting
- Place of Presentation
  Ritsumeikan University
- Year and Date
  2006-08-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays2006
- Author(s)
  Hisao Miyamoto, Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 7th AIST International Symposium on Photoreaction Control and Photofunctional Materials, Tsukuba
- Year and Date
  2006-01-17
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic transparent materials in gases using laser plasma soft X-rays2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Satoshi Uchida, Kouichi Murakami, Hiroyuki Niino
- Organizer
  The Institute of Electrical Engineers of JapanMeeting
- Place of Presentation
  Nagasaki University
- Year and Date
  2006-03-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Composition of silica glass after ablation using laser plasma soft X-rays2006
- Author(s)
  Takashige Fujimori, Tetsuya Makimura, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2006 Fall Meeting
- Place of Presentation
  Ritsumeikan University
- Year and Date
  2006-08-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of quartz glass using laser plasma soft X-rays2006
- Author(s)
  Satoshi Uchida, Takashige Fujimori, Tetsuya Makimura, Kouichi Murakami, Hiroyuki Niino
- Organizer
  The Institute of Electrical Engineers of JapanMeeting
- Place of Presentation
  Nagasaki University
- Year and Date
  2006-03-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of inorganic transparent maeteri-als using laser plsama soft X-rays2006
- Author(s)
  Tetsuya Makimura
- Organizer
  Inovation Japan 2006
- Place of Presentation
  Tokyo International Forun
- Year and Date
  2006-09-13
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials in gases using laser plasma soft X-rays2006
- Author(s)
  Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Laser Society of JapanAnnual Meeting 2006
- Place of Presentation
  Ohmiya Sonic City
- Year and Date
  2006-02-10
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of Silica Glass Using Laser Plasma Soft X-Rays at around 10 nm and Ablation Dynamics2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, and Kouichi Murakami
- Organizer
  4th International Conference on Materials Processing for Properties and Performance
- Place of Presentation
  Tsukuba Science City
- Year and Date
  2005-11-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of inorganic transparent materials using laserr plsma soft X-rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The 8th Synposium on X-ray Microscopy
- Place of Presentation
  Kobe
- Year and Date
  2005-12-13
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Development of a technique for nanomachining of inorganic transparent materials by X-ray exciton method2005
- Author(s)
  Tetsuya Makimura, Kouichi Murakami
- Organizer
  Inovation Japan 2005
- Place of Presentation
  Tokyo International Forum
- Year and Date
  2005-09-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials using laser plasma soft X-rays2005
- Author(s)
  Hisao Miyamoto, Tetsuya Makimura, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2005 Fall Meeting
- Place of Presentation
  Tokushima University
- Year and Date
  2005-09-08
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nano-Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays at around 10 nm2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino and Kouichi Murakami
- Organizer
  International Microprocesses and Nanotechnology Conference 2005,
- Place of Presentation
  Tokyo
- Year and Date
  2005-10-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ultra-fine micromachining of inorganic materials using laser plasma soft X-rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The 65th Annual Meeting of Japan Laser Processing Society
- Place of Presentation
  Sophia University
- Year and Date
  2005-12-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of Quartz Glass Plates Using Pulsed Laser Plasma Soft X-Rays2005
- Author(s)
  S. Uchida, T. Makimura, H. Miyamoto, K. Murakami
- Organizer
  4th International Conference on Materials Processing for Properties and Performance
- Place of Presentation
  Tsukuba Science City
- Year and Date
  2005-11-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of inorganic materials using laser plasma soft X-rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Plasma Science and Nuclear Fusion Reserch Meeting
- Place of Presentation
  Kyushu University
- Year and Date
  2005-12-19
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of quartz glass using laser plasma soft X-rays2005
- Author(s)
  Satoshi Uchida, Hisao Miyamoto, Tetsuya Makimura, Hiroyuki Niino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2005 Fall Meeting
- Place of Presentation
  Tokushima University
- Year and Date
  2005-09-08
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation process of quartz glass using laser plasma sfot X-rays2005
- Author(s)
  Tetsuya Makimura, Satoshi Uchida, Hosao Miyamoto, Hiroyuki Miino, Kouichi Murakami
- Organizer
  The Japan Society of Applied Physics2005 Fall Meeting
- Place of Presentation
  Tokyshima University
- Year and Date
  2005-09-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] 1.5〓 light emission of E〓 ions doped in SiO_2 films including Si nanocrystallites and in SiO_x films2005
- Author(s)
  Tetsuya Makimura, Hiroshi Uematsu, Yuuki Okada and Kouichi Murakami
- Organizer
  The 8th Conference on Laser Ablation
- Place of Presentation
  Banff, Canada
- Year and Date
  2005-09-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Nanomachining of inorganic materials using laser plasma soft X-rays2005
- Author(s)
  Tetsuya Makimura
- Organizer
  NEDO Meeting for Seeds for the Next Generation
- Place of Presentation
  Kawasaki
- Year and Date
  2005-09-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Direct Nanomachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2005
- Author(s)
  (Invited Paser) Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino and Kouichi Murakami
- Organizer
  The 8th Conference on Laser Ablation
- Place of Presentation
  Banff, Canada
- Year and Date
  2005-09-13
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Ablation of Inorganic Materials Using Laser Plasma Soft X-Rays2005
- Author(s)
  Hisao Miyamoto, Tetsuya Makimura, Satoshi Uchida, Kouichi Murakami, and Hiroyuki Niino
- Organizer
  4th International Conference on Materials Processing for Properties and Performance
- Place of Presentation
  Tsukuba Science City
- Year and Date
  2005-11-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348
[Presentation] Direct Micromachining of Inorganic Transparent Materials Using Laser Plasma Soft X-Rays2005
- Author(s)
  Tetsuya Makimura, Hisao Miyamoto, Satoshi Uchida, Hiroyuki Niino, and Kouichi Murakami
- Organizer
  The 8th International Conference on X-ray Microscopy
- Place of Presentation
  Egret Himeji
- Year and Date
  2005-07-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360348

1. MURAKAMI Kouichi (10116113)

# of Collaborated Projects: 6 results

# of Collaborated Products: 81 results
2. OKADA Tatsuo (90127994)

# of Collaborated Projects: 1 results

# of Collaborated Products: 18 results
3. Higashiguchi Takeshi (80336289)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
4. 吉村雅満 (40220743)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. 上田一之 (60029212)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. SUZUKI Kenkichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. KITAJIMA Masahiro

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 金山敏彦

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 金山俊彦

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Makimura Tetsuya 牧村 哲也

MAKIMURA Tetsuya 牧村 哲也

牧村 哲也 マキムラ テツヤ

Research Projects

Research Products

Co-Researchers

レーザープラズマ極端紫外光による生体適合性材料の3次元高アスペクトマイクロ加工Principal Investigator

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Micromachining using extreme ultraviolet radiation from laser-produced plasmaPrincipal Investigator

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High power water-window soft x-ray source driven by mid-IR laser and single-shot imaging

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Direct micromachining of polydimethylsiloxane using laser plasma soft X-raysPrincipal Investigator

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Nanomachining and Nano-Synthesis of Transparent Materials using Laser Plasma Soft X-RaysPrincipal Investigator

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無機透明材料のナノ加工のためのX線エキシトン空間閉じ込めPrincipal Investigator

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電子線による原子操作

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Control of Hydrogen in Si and its Application to Thin Film Transistor

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時間分解測定によるシリコンクラスターの表面反応と光ルミネッセンス

Principal Investigator

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時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究

Principal Investigator

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レーザーアブレーション法により作成したSi微粒子からの可視発光の機構の研究Principal Investigator

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時間分解分光測定によるIV族元素クラスターの表面反応と相転移の研究

Principal Investigator

Project Period (FY)

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Research Institution

レーザーアブレーション・Si超微粒子生成過程の時間分解X線吸収分光法による研究Principal Investigator

Principal Investigator

Project Period (FY)

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Makimura Tetsuya 牧村哲也

MAKIMURA Tetsuya 牧村哲也

牧村哲也マキムラテツヤ