• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Shikida Mitsuhiro  式田 光宏

ORCIDConnect your ORCID iD *help
… Alternative Names

式田 光宏  シキダ ミツヒロ

SHIKIDA Mitsuhiro  式田 光宏

Less
Researcher Number 80273291
Other IDs
External Links
Affiliation (Current) 2025: 広島市立大学, 情報科学研究科, 教授
Affiliation (based on the past Project Information) *help 2022 – 2023: 広島市立大学, 情報科学研究科, 教授
2014 – 2017: 広島市立大学, 情報科学研究科, 教授
2014 – 2015: 名古屋大学, 大学院工学研究科, 准教授
2012 – 2013: 名古屋大学, 工学(系)研究科(研究院), 准教授
2008 – 2011: 名古屋大学, 工学研究科, 准教授 … More
2007 – 2010: Nagoya University, Graduate School of Engineering, Associate Professor
2006: 名古屋大学, エコトピア科学研究所, 助教授
2004 – 2005: Nagoya University, Ecotopia Science Institute, Associate Professor, エコトピア科学研究機構, 助教授
2001 – 2003: 名古屋大学, 難処理人工物研究センター, 講師
1997 – 2000: Nagoya University, Graduate, School of Engineering, Asistant, 工学研究科, 助手
1998: 名古屋大学, 大学院・工学研究科, 助手
1998: 名古屋大学, 工業研究科, 助手
1996: 名古屋大学, 工学部, 助手 Less
Review Section/Research Field
Principal Investigator
Microdevices/Nanodevices / Intelligent mechanics/Mechanical systems / Nano/Microsystems / Basic Section 90110:Biomedical engineering-related
Except Principal Investigator
Applied physics, general / Biofunction/Bioprocess / Intelligent mechanics/Mechanical systems / Environmental technology/Environmental materials / Fluid engineering / Design engineering/Machine functional elements/Tribology / Microdevices/Nanodevices / Thin film/Surface and interfacial physical properties
Keywords
Principal Investigator
マイクロマシン / マイクロ・ナノデバイス / マイクロセンサ / MEMS / 医療・福祉 / 知能機械 / MEMS・NEMS / マイクロアクチュエータ / バルーンカテーテル / ピトー管 … More / 細径センサデバイス / 換気計測 / 呼吸計測 / Biotechnologies / Micromachine / Micro-Nano devices / バイオテクノロジー / Micro-actuator / Tactile sensor / Micro-sensor / マイクロコイル / 触覚センサ / マイクロニードル / マイクロデバイス / カテーテル流量センサ / カテーテル流用センサ / 触覚センサー / マイクロセンサー / フレキシブル配線 / 能動型触覚センサー / マイクロバルブ / マイクロ流体機械 / マイクロマシニング / 静電気力 / アクチュエータ … More
Except Principal Investigator
マイクロマシン / MEMS / TMAH / シリコン / KOH / Silicon / 異方性エッチング / 結晶異方性エッチング / Surface roughness / Etching rate / Tetramethyl-ammonium-hydroxide (TMAH) / Potassium-hydroxide (KOH) / Orientation-dependent etching / プロセスシミュレーション / エッチング速度 / 1細胞解析 / 結晶 / 結晶異方性 / 走査型プローブ顕微鏡 / 摩擦力顕微鏡 / MEMS / ドラッグデリバリーシステム / 先進機械デバイス / ソフトメカニクス / In-situ Plasma Decomposition / Alkaline Absorbent / Byproducts / Improvement of Decomposition / Hydrogen(H_2) / Oxygen(O_2) / Non-thermal Plasma / Halide Gases / 電子付着 / ハロゲン系副生成ガス / in-situ 吸収 / アルカリ吸収剤 / オゾン / 共存酸素 / ハロゲン系有機ガス / CH_4 / 結合エネルギー / C-Cl結合 / C-H結合 / H_2 / ハロゲン系化合物 / in-situプラズマ分解 / アルカリ固体吸収剤 / 副生成物 / 分解促進 / 水素(H_2) / 酸素(O_2) / 非平衡プラズマ / ハロゲンガス / Simulation / Surface morphology / Etching mechanism / Quartz / Chemical anisotropic etching / 結晶モフォロジー / シミュレーション / 表面モフォロジー / エッチングメカニズム / 水晶 / fatigue / size effect / single-crystal silicon / tensile testing / mechanical properties / thin films / micromachine / シリコン化合物 / 試験法 / 疲労 / 寸法効果 / 単結晶シリコン / 引張試験 / 機械的特性 / 薄膜 / Fractal / Model / シリコン単結晶 / 水酸化カリウム / モデリング / 粗さ / フラクタル / モデル / 表面粗さ / Process simulation / マイクロ加工 / 面粗さ / 水酸化カリウム(KOH) / 流体工学 / 壁面せん断応力 / MEMSセンサ / 流体計測 / 微細加工 / パターニング / 細胞アレイ / 磁性微粒子 / 細胞 / 遺伝子発現解析 / PCR / 磁性粒子 / 磁性搬送 / 液滴 / 一細胞解析 / バイオセンサ / ナノ計測 / プローブ顕微鏡 / トライボロジー / FTIR / 固液界面 / 界面活性剤 / 不純物イオン / 化学エッチング Less
  • Research Projects

    (21 results)
  • Research Products

    (232 results)
  • Co-Researchers

    (31 People)
  •  細径集積化センサデバイスによる肺内部での換気計測システム技術の開発Principal Investigator

    • Principal Investigator
      式田 光宏
    • Project Period (FY)
      2022 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 90110:Biomedical engineering-related
    • Research Institution
      Hiroshima City University
  •  MEMS sensor based in-situ measurements systems for detecting breathing and optical surface image characteristics at small airwaysPrincipal Investigator

    • Principal Investigator
      Shikida Mitsuhiro
    • Project Period (FY)
      2014 – 2017
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Nano/Microsystems
    • Research Institution
      Hiroshima City University
  •  Development of sharp tip-separable micro device for trans-dermal drug delivery systemsPrincipal Investigator

    • Principal Investigator
      Shikida Mitsuhiro
    • Project Period (FY)
      2014 – 2015
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Nano/Microsystems
    • Research Institution
      Hiroshima City University
  •  Pad type drug delivery system using soft material

    • Principal Investigator
      Hata Seiichi
    • Project Period (FY)
      2014 – 2015
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Nagoya University
  •  Investigation on the kinetics of turbulent shear flows by means of the measurements of spatio-temporal wall shear stresses

    • Principal Investigator
      KOUJI Nagata
    • Project Period (FY)
      2013 – 2014
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Fluid engineering
    • Research Institution
      Nagoya University
  •  Catheter Type of Flow Sensor for Measurement of Aspirated- and Inspired-air Characteristics in Bronchus RegionPrincipal Investigator

    • Principal Investigator
      SHIKIDA Mitsuhiro
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Nagoya University
  •  Research on single cell function analysis by magnetic force-based cell patterning

    • Principal Investigator
      HONDA Hiroyuki
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Biofunction/Bioprocess
    • Research Institution
      Nagoya University
  •  Dual-axis micro friction force miscroscopy pobe for dynamic measurements

    • Principal Investigator
      FUKUZAWA Kenji
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Design engineering/Machine functional elements/Tribology
    • Research Institution
      Nagoya University
  •  MAGNETIC FORCE-BASED-DROPLET-HANDLING SYSTEM FOR SINGLE CELL DIGITAL PCR ANALYSIS

    • Principal Investigator
      OKOCHI Mina
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Biofunction/Bioprocess
    • Research Institution
      Nagoya University
  •  Modeling of orientation-dependent etching of silicon and effects of ions in the solution

    • Principal Investigator
      SATO Kazuo
    • Project Period (FY)
      2007 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Nagoya University
  •  Development of palminp-sizedbiochemical analysis system based on magnetic beads handlingPrincipal Investigator

    • Principal Investigator
      SHIKIDA Mitsuhiro
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Nagoya University
  •  水平・鉛直力を定量測定可能な摩擦力顕微鏡用マイクロプローブ

    • Principal Investigator
      FUKUZAWA Kenji
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Nagoya University
  •  Detoxification of persistent organic compounds by a combination of plasma decomposition with in-situ halogen absorption

    • Principal Investigator
      MATSUDA Hitoki
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Environmental technology/Environmental materials
    • Research Institution
      Nagoya University
  •  Development of multifunctional active tactile sensor using magnetic micro-actuatorPrincipal Investigator

    • Principal Investigator
      SHIKIDA Mitsuhiro
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Nagoya University
  •  Mechanisms of chemical anisotropic etching of single crystals consistently applicable throughout Micro/Meso-scopic domains

    • Principal Investigator
      SATO Kazuo
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied physics, general
    • Research Institution
      Nagoya University
  •  フレキシブル微小機械システムの研究Principal Investigator

    • Principal Investigator
      式田 光宏
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Young Scientists (B)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Nagoya University
  •  マイクロ流体機械システムの研究Principal Investigator

    • Principal Investigator
      式田 光宏
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Nagoya University
  •  Process Modeling of Anisotropic Chemical Etching of Silicon

    • Principal Investigator
      SATO Kazuo
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      Applied physics, general
    • Research Institution
      Nagoya University
  •  Characterization of mechanical properties of MEMS materials

    • Principal Investigator
      SATO Kazuo
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (A).
    • Research Field
      Applied physics, general
    • Research Institution
      Nagoya University
  •  マイクロマシニング技術によるマイクロアクチュエータの開発Principal Investigator

    • Principal Investigator
      式田 光宏
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      Intelligent mechanics/Mechanical systems
    • Research Institution
      Nagoya University
  •  Fabirication Technology of Three-Dimentional Microstructures Made of Single-crystal Silicon

    • Principal Investigator
      SATO Kzuo
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied physics, general
    • Research Institution
      Nagoya University

All 2024 2023 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 2002 Other

All Journal Article Presentation Book Patent

  • [Book] 日本機械学会ニューズレター流れ2014

    • Author(s)
      沢田拓也,寺島修,酒井康彦,長田孝二,式田光宏,伊藤靖仁
    • Publisher
      日本機械学会
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Book] MEMS/NEMS工学全集2009

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      (株)テクノシステム
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Book] ドライ・ウエットエッチング技術全集2009

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      (株)技術情報協会
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Book] マイクロ・ナノデバイスのエッチング技術2009

    • Author(s)
      式田光宏(監修・分担執筆)
    • Publisher
      (株)シーエムシー出版
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Book] ウェットエッチングのメカニズムと処理パラメータの最適化2008

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      サイエンス&テクノロジー(株)
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Book] 薄膜ハンドブック第2版2008

    • Author(s)
      式田光宏(分担執筆)
    • Publisher
      (株)オーム社
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Book] Comprehensive Microsystems Vol. 1(Wet etching)2007

    • Author(s)
      K. Sato, M. Shikida (分担執筆)
    • Publisher
      Elsevier
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Book] Comprehensive Microsystems Uol.1, Wet etching2007

    • Author(s)
      K. Sato, M. Shikida(分担執筆)
    • Publisher
      Elsevier Ltd
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Book] マイクロ化学チップの技術と応用(北森・庄子・馬場・藤田編)2004

    • Author(s)
      佐藤一雄, 式田光宏(分担執筆)
    • Total Pages
      33
    • Publisher
      丸善株式会社
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Book] マイクロ化学チップの技術と応用(北森・庄子・馬場・藤田編)2004

    • Author(s)
      佐藤一雄, 式田光宏, 他(分担執筆)
    • Total Pages
      33
    • Publisher
      丸善株式会社
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Pitot Tube Sensor Probe System for Simultaneous Airflow and Pressure Measurement of Expiration Inside Pulmonary Airway2024

    • Author(s)
      A. Miyawaki, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering

      Volume: 19 Issue: 5 Pages: 807-813

    • DOI

      10.1002/tee.24039

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22K12770
  • [Journal Article] Catheter type thermal flow sensor with small footprint for measuring breathing function2018

    • Author(s)
      Hasegawa Y.、Kawaoka H.、Mitsunari Y.、Matsushima M.、Kawabe T.、Shikida M.
    • Journal Title

      Microsystem Technologies

      Volume: online Issue: 8 Pages: 3455-3465

    • DOI

      10.1007/s00542-018-3748-y

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-26286034, KAKENHI-PROJECT-17K00547
  • [Journal Article] Development of tube flow sensor by using film transfer technology and its application to in situ breathing and surface image evaluation in airways2018

    • Author(s)
      Okihara Chiaki、Hasegawa Yoshihiro、Matsushima Miyoko、Kawabe Tsutomu、Shikida Mitsuhiro
    • Journal Title

      Microsystem Technologies

      Volume: online Issue: 8 Pages: 3417-3424

    • DOI

      10.1007/s00542-018-3733-5

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-26286034, KAKENHI-PROJECT-17K00547
  • [Journal Article] Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor2017

    • Author(s)
      Shikida Mitsuhiro、Kim Pilyoung、Shibata Shunji
    • Journal Title

      Microsystem Technologies

      Volume: 23 Issue: 8 Pages: 3547-3558

    • DOI

      10.1007/s00542-016-3168-9

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Journal Article] Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway2017

    • Author(s)
      HARADA Naoaki, HASEGAWA Yoshihiro, ONO Ryota, MATSUSHIMA Miyoko, KAWABE Tsutomu, SHIKIDA Mitsuhiro
    • Journal Title

      Microsystem Technologies

      Volume: 23 Issue: 12 Pages: 5397-5406

    • DOI

      10.1007/s00542-016-3265-9

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17K00547, KAKENHI-PROJECT-26286034, KAKENHI-PROJECT-15K08228
  • [Journal Article] Heartbeat signal detection from analysis of airflow in rat airway under different depths of anesthesia conditions2017

    • Author(s)
      KAWAOKA Hidenori, YAMADA Takayuki, MATSUSHIMA Miyoko, KAWABE Tsutomu, HASEGAWA Yoshihiro, SHIKIDA Mitsuhiro
    • Journal Title

      IEEE Sensors Journal

      Volume: 17 Issue: 14 Pages: 4369-4377

    • DOI

      10.1109/jsen.2017.2707594

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17K00547, KAKENHI-PROJECT-26286034, KAKENHI-PROJECT-15K08228
  • [Journal Article] Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with tmeparature compensation function2017

    • Author(s)
      HASEGAWA Yoshihiro, KAWAOKA Hidenori, YAMADA Takayuki, MATSUSHIMA Miyoko, KAWABE Tsutomu, SHIKIDA Mitsuhiro
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 27 Issue: 12 Pages: 1-11

    • DOI

      10.1088/1361-6439/aa9595

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17K00547, KAKENHI-PROJECT-26286034, KAKENHI-PROJECT-15K08228
  • [Journal Article] Design and fabrication of differently shaped pyramids on Si {100} by anisotropic wet etching2015

    • Author(s)
      K. Imaeda, K. Bessho, M. Shikida
    • Journal Title

      Microsystem Technologies

      Volume: Online Issue: 12 Pages: 2801-2809

    • DOI

      10.1007/s00542-015-2590-8

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Journal Article] Development of implantable catheter flow sensor into inside of bronchi for laboratory animal2015

    • Author(s)
      M. Shikida, T. Matsuyama, T. Yamada, M. Matsushima, T. Kawabe
    • Journal Title

      Microsystem Technologies

      Volume: Online Issue: 12 Pages: 2239-2245

    • DOI

      10.1007/s00542-013-1924-7

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Journal Article] Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application2015

    • Author(s)
      M. Shikida, Y. Niimi, S. Shibata
    • Journal Title

      Microsystem Technologies

      Volume: Online Issue: 3 Pages: 677-685

    • DOI

      10.1007/s00542-015-2704-3

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Journal Article] 末梢気道内呼気吸気計測を目的とした 自己温度補償型カテーテル流量センサの開発2014

    • Author(s)
      松山拓矢,山﨑雄大,松島充代子,川部勤,式田光宏
    • Journal Title

      電気学会論文誌E

      Volume: 未定

    • NAID

      130004438735

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Journal Article] Measurement of Wall Shear Stress Fluctuation with the Micro-fabricated Hot-film Sensor in a Boundary Layer of a Wall Jet2014

    • Author(s)
      T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida and Y. Ito
    • Journal Title

      Journal of the Japanese Society for Experimental Mechanics

      Volume: 14 Issue: Special_Issue Pages: s13-s18

    • DOI

      10.11395/jjsem.14.s13

    • NAID

      130004687796

    • ISSN
      1346-4930, 1884-4219
    • Language
      English
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Journal Article] On the measurement of wall shear stress with a patch-type micro-fabricated hot-film sensor2014

    • Author(s)
      T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, Y. Ito and S. Muramatsu
    • Journal Title

      JFST

      Volume: 9 Issue: 3 Pages: JFST0029-JFST0029

    • DOI

      10.1299/jfst.2014jfst0029

    • NAID

      130004695298

    • ISSN
      1880-5558
    • Language
      English
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Journal Article] Measurement of Wall Shear Stress by Using Micro-Fabricated Hot Film and Floating-Element Sensors2013

    • Author(s)
      O. Terashima, T. Sawada, Y. Sakai, K. Nagata, H. Hida and M. Shikida
    • Journal Title

      Journal of the Japanese Society for Experimental Mechanics

      Volume: 3

    • NAID

      10031189783

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Journal Article] Droplet introduction into a pen-shaped portable reaction system by gravity and interfacial forces.2011

    • Author(s)
      Shikida M., Inagaki N., Okochi M.,Honda H., Sato K.
    • Journal Title

      Micro, Nano Letters 6

      Pages: 253-256

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Droplet-based gene expression analysis using a device with magnetic force-based droplethandling system2010

    • Author(s)
      Okochi M., Tsuchiya H., Kumazawa F., Shikida M., Honda H.
    • Journal Title

      J.Biosci.Bioeng. 109

      Pages: 193-197

    • NAID

      110007573253

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy2010

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Zhang, S.Itoh
    • Journal Title

      Tribology Online

      Volume: Vol.5 Pages: 144-149

    • NAID

      130000308509

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Journal Article] Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy2010

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Zhang, S.Itoh
    • Journal Title

      Tribology Online Vol.5

      Pages: 144-149

    • NAID

      130000308509

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Journal Article]2009

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      MEMS/NEMS工学全集((株)テクノシステム)

    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article]2009

    • Author(s)
      式田光宏(監修・分担執筆)
    • Journal Title

      マイクロ・ナノデバイスのエッチング技術((株)シーエムシー出版)

    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Magnetic force-based lab-on-a-chip for single cell analysis in a droplet.2009

    • Author(s)
      Okochi M,, Tsuchiya H., Kumazawa F., Shikida M., Honda H.
    • Journal Title

      ECS Transactions 16(17)

      Pages: 15-20

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article]2009

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      ドライ・ウエットエッチング技術全集((株)技術情報協会)

      Pages: 159-175

    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Agitation of magnetic beads by multi-layered flat coils.2009

    • Author(s)
      Shikida M., Koyama M., Nagao N., Imai R., Honda H., Okochi M,, Tsuchiya H., Kazuo Sato.
    • Journal Title

      Sens.Actuat-B : Chemical 137

      Pages: 774-780

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

    • Author(s)
      Prem Pal, K.Sato, M.Shikida, M.A.Gosalvez
    • Journal Title

      Sensors and Actuators A, Physical 154-2

      Pages: 192-203

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

    • Author(s)
      B.Tang, Prem Pal, M.A.Gosalvez, M.Shikida, K.Sato, et al.
    • Journal Title

      Sensors and Actuators A, Physical 156-2

      Pages: 334-341

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

    • Author(s)
      Prem Pal, K. Sato, M. Shikida, M.A. Gosalvez
    • Journal Title

      Sensors and Actuators A 154-2(Physical)

      Pages: 192-203

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Agitation of magnetic beads by multi-layered flat coils2009

    • Author(s)
      Mitsuhiro Shikida, et al.
    • Journal Title

      Sens. Actuat-B : Chemical 137

      Pages: 774-780

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

    • Author(s)
      B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, et. al.
    • Journal Title

      Sensors and Actuators A 156-2(Physical)

      Pages: 334-341

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article]2008

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      薄膜ハンドブック第2版((株)オーム社)

      Pages: 1089-1091

    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Cell culture arrays using magnetic force-based cell patterning force-based cell patterning for dynamic single cell analytysis.2008

    • Author(s)
      Ino K., Okochi M., Konishi N., Nakatochi M., Imai R., Shikida M., Ito A., Honda H.
    • Journal Title

      Lab.Chip. 8

      Pages: 134-142

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Fabrication of a Quartz Tuning-Fork Probe with a Sharp Tip for AFM Systems2008

    • Author(s)
      H.Hida, M.Shikida, K.Fukuzawa, S.Murakami, et al.
    • Journal Title

      Sensors and Actuators A, Physical 148-1

      Pages: 311-318

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] palmtop-sized rotary-drive-type biochemical analysis system by magnetic bead handling.2008

    • Author(s)
      Shikida M., Nagao N., Imai R., Honda H., Okochi M., Ito H., Sato K. A
    • Journal Title

      J.Micromech.Microeng. 18

      Pages: 35034-35042

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, K.Sato, M.Shikida
    • Journal Title

      ECS Transactions 16-8

      Pages: 133-140

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Palmtop-sized Rotary-drive-type Biochemical Analysis System by Magnetic Beads Handling2008

    • Author(s)
      M. Shikida, N. Nagao, R. Imai, H. Honda, M. Okochi, 他2名
    • Journal Title

      Journal of Micromechnics and Microengineering 18

      Pages: 501-508

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18310093
  • [Journal Article] Fabrication of a Quartz Tuning-Fork Probe with a Sharp Tip for AFM Systems2008

    • Author(s)
      H. Hida, M. Shikida, K. Fukuzawa, S. Murakami, Ke. Sato, K. Asaumi, Y. Iriye, Ka. Sato
    • Journal Title

      Sensors and Actuators A 148-1(Physical)

      Pages: 311-318

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M. Shikida
    • Journal Title

      ECS Transactions 40771

      Pages: 133-140

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope2008

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Zhang, S.Itoh
    • Journal Title

      Tribology Online Vol.3

      Pages: 356-360

    • NAID

      130000453664

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Journal Article]2008

    • Author(s)
      式田光宏(分担執筆)
    • Journal Title

      ウェットエッチングのメカニズムと処理パラメータの最適化(サイエンス&テクノロジー(株))

      Pages: 67-91

    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] On-chip polymerase chain reaction microdevice employing a magnetic dropletmanipulation system.2008

    • Author(s)
      Tsuchiya H., Okochi M., Nagao N., Shikida M., Honda H.
    • Journal Title

      Sens.Actuator B-Chem. 130

      Pages: 583-588

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope2008

    • Author(s)
      H. Amakawa, K. Fukuzawa, M. Shikida, H. Zhang, S. Itoh
    • Journal Title

      Tribology Online 3

      Pages: 356-360

    • NAID

      130000453664

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Journal Title

      Journal of Micromechanics and Microengineering vol.17

      Pages: 2299-2307

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Portable Rotary-drive-type Biochemical-Analysis System based on Magnetic bead-droplet Handling2007

    • Author(s)
      N.Nagao, M.Shikida, K.Takayanagi, H.Honda, M.Okochi, 他2名
    • Journal Title

      Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference

      Pages: 457-459

    • Data Source
      KAKENHI-PROJECT-18310093
  • [Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Journal Title

      J. Micromechanics and Microengineering 40864

      Pages: 2299-2307

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Journal Article] Magnetic bead-droplet handling for biochemical reaction in Micro-TAS2006

    • Author(s)
      N.Nagao, M.Shikida, K.Takayanagi, H.Honda, M.Okochi, 他2名
    • Journal Title

      Tech. Dig. the 23rd Sensor Symposium

      Pages: 104-107

    • Data Source
      KAKENHI-PROJECT-18310093
  • [Journal Article] Development of enzymatic reaction device by using magnetic beads-cluster handling2006

    • Author(s)
      M.Shikida, K.Takayanagi, H.Honda, H.Ito, K.Sato
    • Journal Title

      Journal of Micromechnics and Microengineering 16・9

      Pages: 1875-1883

    • Data Source
      KAKENHI-PROJECT-18310093
  • [Journal Article] Development of enzymatic reaction device by using magnetic beads-cluster handling2006

    • Author(s)
      M, Shikida, K, Takayanagi, H, Honda, H, Ito, K, Sato
    • Journal Title

      J. Micromechnics and Microengineering 16

      Pages: 1875-1883

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18310093
  • [Journal Article] 二軸独立検出可能な摩擦力顕微鏡用マイクロ・メカニカルプローブ2006

    • Author(s)
      寺田, 福澤, 式田, 雨川, 張, 三矢
    • Journal Title

      第53回応用物理学関係連合講演会講演予稿集 No.2

      Pages: 718-718

    • Data Source
      KAKENHI-PROJECT-16656015
  • [Journal Article] Development of enzymatic reaction device by using magnetic beads-cluster handling2006

    • Author(s)
      M. Shikida, K. Takayanagi, H. Honda, H. Ito, K. Sato
    • Journal Title

      Journal of Micromechnics and Microengineering 16

      Pages: 1875-1883

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18310093
  • [Journal Article] Multifunctional active tactile sensor using magnetic micro actuator2005

    • Author(s)
      Y.Hasegawa, H.Sasaki, M.Shikida, K.Sato, K.Itoigawa
    • Journal Title

      Tech.Dig.of IEEE Micro Electro Mechanical Systems Conference

      Pages: 275-278

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15310104
  • [Journal Article] Through-wafer interconnect technology for silicon2004

    • Author(s)
      V.G.Kutchoukov, M.Shikida, J.R.Mollinger, A.Bossche
    • Journal Title

      J.Micromechanics and Microengineering 14

      Pages: 1029-1036

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Non-photolithographic pattern transfer for fabricating arrayed three-dimensional microstructures by chemical anisotropic etching2004

    • Author(s)
      M.Shikida, M.Odagaki, N.Todoroki, M.Ando, Y.Ishihara, T.Ando, K.Sato
    • Journal Title

      Sensors and Actuators A116

      Pages: 264-271

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Characterization of anisotropic etching properties of single crystal silicon : Effects of ppb-level of Cu and Pb in KOH solution2004

    • Author(s)
      H.Tanaka, D.Cheng, M.Shikida, K.Sato
    • Journal Title

      Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #5

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Effect of Magnesium in KOH solution on anisotropic wet etching of silicon2004

    • Author(s)
      H.Tanaka, D.Cheng, K.Inoue, M.Shikida, K.Sato
    • Journal Title

      Proc.2004 MHS/Micro-Nano COE International Symposium, Oct.31-Nov.2,Nagoya 1

      Pages: 121-125

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Magnetically driven active tactile sensor for hardness detection2004

    • Author(s)
      Y.Hasegawa, H.Sasaki, M.Shikida, S.Kuriyama, 他2名
    • Journal Title

      Tech.Dig.the 21st Sensor Symposium

      Pages: 453-456

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15310104
  • [Journal Article] Difference in activated atomic steps on (111) silicon surface during KOH and TMAH etching2004

    • Author(s)
      K.Sato.T.Masuda, M.Shikida
    • Journal Title

      Sensors and Materials 15-2

      Pages: 93-99

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Magnetic actuation of a micro-diaphragm structure for an active tactile sensor2004

    • Author(s)
      Y.Hasegawa, H.Sasaki, M.Shikida, K.Sato, K.Itoigawa
    • Journal Title

      Proceedings of the 2004 International Symposium on Micro Machine and Human Science

      Pages: 99-104

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15310104
  • [Journal Article] Change in etching properties of single crystal silicon caused by the difference of surfactants added to TMAH solutions2004

    • Author(s)
      D.Cheng, K.Sato, M.Shikida
    • Journal Title

      Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #4

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] A micro machined active tactile sensor for hardness detection2004

    • Author(s)
      Y.Hasegawa, T.Shimizu, T.Miyaji, M.Shikida, 他3名
    • Journal Title

      Sensors & Actuators : A 114

      Pages: 141-146

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15310104
  • [Journal Article] Characterization of the orientation-dependent etching properties of quartz ; Application to 3-D micromachining simulation system2004

    • Author(s)
      D.Cheng, Kazuo Sato, M.Shikida, A.Ono, Kenji Sato, K.Asaumi, Y.Iriye
    • Journal Title

      Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, Montreal #9

      Pages: 1-1

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Characterization of the orientation-dependent etching properties of quartz ; Application to 3-D micromachining simulation system2004

    • Author(s)
      D.Cheng, K.Sato, M.Shikida, A.Ono, K.Sato, K.Asaumi, Y.Iriye
    • Journal Title

      Proc. the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28, Montreal 1

    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Non-photolithographic pattern transfer for fabricating pen-shape microneedle structures2004

    • Author(s)
      M.Shikida, M.Ando, Y.Ishihara, T.Ando, K.Sato, K.Asaumi
    • Journal Title

      Journal of Micromechanics and Microengineering 14

      Pages: 1462-1467

    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Through-wafer interconnect technology for silicon2004

    • Author(s)
      V.G.Kutchoukov, M.Shikida, J.R.Mollinger, A.Bossche
    • Journal Title

      Journal of Micromechanics and Microengineering 14

      Pages: 1029-1036

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Fast etching of silicon with a smooth surface in high temperature ranges near the boilinig point of KOH solution2004

    • Author(s)
      H.Tanaka, S.Yamashita, Y.Abe, M.Shikida, K.Sato
    • Journal Title

      Sensors and Actuators A114

      Pages: 516-520

    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures2004

    • Author(s)
      M.Shikida, M.Ando, Y.Ishihara, T.Ando, K.Sato, K.Asaumi
    • Journal Title

      J.Micromechanics and Microengineering 14

      Pages: 1462-1467

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] A micro machined active tactile sensor for hardness detection2004

    • Author(s)
      Y.Hasegawa, T.Shimizu, T.Miyaji, M.Shikida, et al.
    • Journal Title

      Sensors & Actuators : A 114

      Pages: 141-146

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15310104
  • [Journal Article] Fast etching of silicon with a smooth surface in high temperature ranges near the boiling poing of KOH solution2004

    • Author(s)
      H.Tanaka, S.Yamashita, Y.Abe, M.Shikida, K.Sato
    • Journal Title

      Sensors and Actuators A114

      Pages: 516-520

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Characterization of the orientation-dependent etching properties of quartz : Application to 3-D micromachining simulation system2004

    • Author(s)
      D.Cheng, K.Sato, M.Shikida, A.Ono, K.Sato, K.Asaumi, Y.Iriye
    • Journal Title

      Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28,Montreal 1

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Non-photolithographic pattern transfer for fabricating arrayed three-dimensional microstructures by chemical anisotropic etching2004

    • Author(s)
      M.Shikida, M.Odagaki, N.Todoroki, M.Ando, Y.Ishihara, T.Ando, K.Sato
    • Journal Title

      Sensors and Actuators, A 116

      Pages: 264-271

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Difference in activated atomic steps on (111) silicon surface during KOH and TMAH etching2004

    • Author(s)
      K.Sato, T.Masuda, M.Shikida
    • Journal Title

      Sensors and Materials 15-2

      Pages: 93-99

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Magnetically driven active tactile sensor for hardness detection2004

    • Author(s)
      Y.Hasegawa, H.Sasaki, M.Shikida, S.Kuriyama, et al.
    • Journal Title

      Tech.Dig.the 21st Sensor Symposium

      Pages: 453-456

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15310104
  • [Journal Article] Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures2004

    • Author(s)
      M.Shikida, M.Ando, Y.Ishihara, T.Ando, K.Sato, K.Asaumi
    • Journal Title

      Journal of Micromechanics and Microengineering 14

      Pages: 1462-1467

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Change in etching properties of single crystal silicon caused by the difference of surfactants added to TMAH solutions2004

    • Author(s)
      D.Cheng, K.Sato, M.Shikida
    • Journal Title

      Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28,Montreal 1

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Characterization of anisotropic etching properties of single crystal silicon ; Effects of ppb-level of Cu and Pb in KOH solution2004

    • Author(s)
      H.Tanaka, D.Cheng, M.Shikida, K.Sato
    • Journal Title

      Proc.the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28,Montreal 1

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution2004

    • Author(s)
      H.Tanaka, S.Yamashita, Y.Abe, M.Shikida, K.Sato
    • Journal Title

      Sensors and Actuators, A 114

      Pages: 516-520

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Change in etching properties of single crystal silicon caused by the difference of surfactants added to TMAH solutions2004

    • Author(s)
      D.Cheng, K.Sato, M.Shikida
    • Journal Title

      Proc. the 4^<th> Workshop on Physical Chemistry of Wet Etching of Silicon, May 26-28, Montreal 1

    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Effect of Magnesium in KOH solution on anisotropic wet etching of silicon2004

    • Author(s)
      H.Tanaka, D.Cheng, K.Inoue, M.Shikida, K.Sato
    • Journal Title

      Proc. 2004 MHS/Micro-Nano COE International Symposium, Oct.31-Nov.2, Nagoya 1

      Pages: 121-125

    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon surface2003

    • Author(s)
      M.Shikida, K.Kawasaki, K.Sato, Y.Ishihara, H.Tanaka, A.Matsumuro
    • Journal Title

      Sensors and Materials 15-1

      Pages: 21-35

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Effects of ppb-level metal impurities in aqueous potassium hydroxide solution on the etching of Si{110} and {100}2003

    • Author(s)
      H.Tanaka, Y.Abe, K.Inoue, M.Shikida, K.Sato
    • Journal Title

      Sensors and Materials 15-1

      Pages: 43-51

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Characterization of MEMS materials : Micro-nano physics underlying MEMS2003

    • Author(s)
      K.Sato, M.Shikida, T.Ando
    • Journal Title

      Tech.Dig.of JSME ISMME 2003,Tsuchiura 1

      Pages: 446-454

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Non-photolithographic pattern transfer for fabricating arrayed 3-D microstructures by chemical anisotropic etching2003

    • Author(s)
      M.Shikida, M.Odagaki, N.Todoroki, M.Ando, Y.Ishihara, T.Ando, K.Sato
    • Journal Title

      Proc.IEEE the 16^<th> Intl.Conference on Micro Electro Mechanical Systems, Kyoto

      Pages: 562-565

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Nanometer physics in microsystem research : Reversed anisotropy observed in wet chemical etching of silicon2003

    • Author(s)
      K.Sato, M.Shikida
    • Journal Title

      Proc.the 2003 Intl.Symposium on Micromechatronics and Human Science, Nagoya 1

      Pages: 33-38

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Effects of ppb-level metal impurities in aqueous potassium hydroxide solution on the etching of Si {110} and {100}2003

    • Author(s)
      H.Tanaka, Y.Abe, K.Inoue, M.Shikida, K.Sato
    • Journal Title

      Sensors and Materials 15-1

      Pages: 43-51

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Non-photolithographic pattern transfer for fabricating arrayed 3-D microstructures by chemical anisotropic etching2003

    • Author(s)
      M.Shikida, M.Odagaki, N.Todoroki, M.Ando, Y.Ishihara, T.Ando, K.Sato
    • Journal Title

      Proc.IEEE the 16^<th> Intl.Conference on Micro Electro Mechanical Systems, Kyoto 1

      Pages: 562-565

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Differences in activated atomic steps on (111) silicon surface during KOH and TMAH etching2002

    • Author(s)
      K.Sato, T.Masuda, M.Shikida
    • Journal Title

      Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara

      Pages: 43-46

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon surface2002

    • Author(s)
      M.Shikida, K.Kawasaki, K.Sato, Y.Ishihara, H.Tanaka, A.Matsumuro
    • Journal Title

      Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara

      Pages: 78-81

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] A model explaining mask-corner undercut phenomena in anisotropic silicon etching ; A saddle point in the etching-rate diagram2002

    • Author(s)
      M.Shikida, K.Nanbara, T.Koizumi, H.Sasaki, M.Odagaki, K.Sato, M.Ando, S.Furuta, K.Asaumi
    • Journal Title

      Sensors and Actuators A97-98

      Pages: 43-46

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Differences in activated atomic steps on (111) silicon surface during KOH and TMAH etching2002

    • Author(s)
      K.Sato, T.Masuda, M.Shikida
    • Journal Title

      Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara 1

      Pages: 43-46

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] A model explaining mask-corner undercut phenomena in anisotropic silicon etching ; A saddle point in the etching-rate diagram2002

    • Author(s)
      M.Shikida, K.Nanbara, T.Koizumi, H.Sasaki, M.Odagaki, K.Sato, M.Ando, S.Furuta, K.Asaumi
    • Journal Title

      Sensors and Actuators, A 97-98

      Pages: 758-763

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon surface2002

    • Author(s)
      M.Shikida, K.Kawasaki, K.Sato, Y.Ishihara, H.Tanaka, A.Matsumuro
    • Journal Title

      Proc.the 3^<rd> Workshop on Physical Chemistry of Wet Etching of Silicon, Nara 1

      Pages: 78-81

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Characterization of MEMS materials : Micro-nano physics underlying MEMS

    • Author(s)
      K.Sato, M.Shikida, T.Ando
    • Journal Title

      Tech.Dig.JSME ISMME 2003, Tsuchiura

      Pages: 446-454

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] Fabrication of a pen-shaped portable biochemical reaction system based on magnetic bead manipulation

    • Author(s)
      Shikida M., Inagaki N., Okochi M., Honda H., Sato K.
    • Journal Title

      J.Micromech.Microeng. in press

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Journal Article] Effect of Magnesium in KOH solution on anisotropic wet etching of silicon

    • Author(s)
      H.Tanaka, D.Cheng, K.Inoue, M.Shikida, K.Sato
    • Journal Title

      Proc.2004 MHS/Micro-Nano COE Intl.Symposium, Nagoya

      Pages: 121-125

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Journal Article] 末梢気道内呼気吸気計測を目的とした自己温度補償型カテーテル流量センサの開発

    • Author(s)
      松山拓矢,山﨑雄大,松島充代子,川部勤,式田光宏
    • Journal Title

      電気学会論文誌

      Volume: E(印刷中)

    • NAID

      130004438735

    • URL

      https://www.jstage.jst.go.jp/browse/ieejsmas/-char/ja/

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Journal Article] Nanometer physics in microsystem research : Reversed anisotropy observed in wet chemical etching of silicon

    • Author(s)
      K.Sato, M.Shikida
    • Journal Title

      Proc.the 2003 Intl.Symposium on Micromechatronics and Human Science, Nagoya

      Pages: 33-38

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Patent] 医療用流れ測定装置およびその製造方法2016

    • Inventor(s)
      川部勤,松島充代子,式田光宏,長谷川義大
    • Industrial Property Rights Holder
      国立大学法人名古屋大学,公立大学法人広島市立大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-212332
    • Filing Date
      2016-10-28
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Patent] 気道内気体流量測定装置2015

    • Inventor(s)
      川部勤,式田光宏,松島充代子
    • Industrial Property Rights Holder
      名古屋大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-019748
    • Filing Date
      2015-02-03
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Patent] 流量センサ付き気管内挿管チューブ2013

    • Inventor(s)
      式田光宏,川部勤,松島充代子
    • Industrial Property Rights Holder
      式田光宏,川部勤,松島充代子
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-01-11
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Patent] 気管内挿管チューブ装着器具及びその製作方法2013

    • Inventor(s)
      式田光宏,川部勤,松島充代子
    • Industrial Property Rights Holder
      国立大学法人名古屋大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-003749
    • Filing Date
      2013-01-11
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Patent] 測定プローブ,試料表面測定装置,及び試料表面測定方法2010

    • Inventor(s)
      福澤健二, 式田光宏, 寺田諭
    • Industrial Property Rights Holder
      科学技術振興機構
    • Acquisition Date
      2010-07-09
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Patent] 測定プローブ, 試料表面測定装置, 及び試料表面測定方法2009

    • Inventor(s)
      福澤健二, 式田光宏, 寺田諭
    • Industrial Property Rights Holder
      科学技術振興機構
    • Acquisition Date
      2009-07-07
    • Overseas
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Patent] 測定プローブ,試料表面測定装置,及び試料表面測定方法2009

    • Inventor(s)
      福澤健二, 式田光宏, 寺田諭
    • Industrial Property Rights Holder
      科学技術振興機構
    • Acquisition Date
      2009-07-07
    • Overseas
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Patent] 測定プローブ,試料表面測定装置,及び試料表面測定方法2006

    • Inventor(s)
      福澤, 式田, 寺田
    • Industrial Property Rights Holder
      科学技術振興機構
    • Industrial Property Number
      2006-037030
    • Filing Date
      2006-02-14
    • Data Source
      KAKENHI-PROJECT-16656015
  • [Patent] 針状構造体の作成方法2003

    • Inventor(s)
      佐藤 一雄, 式田 光宏, ほか
    • Industrial Property Rights Holder
      (株)三和化学, (財)名古屋産業科学研究所
    • Industrial Property Number
      2003-055406
    • Filing Date
      2003-03-03
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-14205016
  • [Presentation] 肺気管支でのその場計測を可能にするバルーンカテーテル型流量センサの開発2023

    • Author(s)
      イ スンヒョン, アル・ファリシィ ムハンマド・サルマン, 長谷川 義大, 松島 充代子, 川部 勤, 式田 光宏
    • Organizer
      第14回 マイクロ・ナノ工学シンポジウム
    • Data Source
      KAKENHI-PROJECT-22K12770
  • [Presentation] SIMULTANEOUS AIRFLOW AND PRESSURE MEASUREMENTS BASED ON PITOT TUBE FOR EVALUATION OF EXPIRED AIR INSIDE LUNG AIRWAY2023

    • Author(s)
      A. Miyawaki, M.S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K12770
  • [Presentation] Embedding Airflow Sensing Function in Balloon Catheter for Respiration Measurement in Bronchus Region Inside Lung2023

    • Author(s)
      S. H. Lee, M. S. Al Farisi, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      The 36th International Microprocesses and Nanotechnology Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-22K12770
  • [Presentation] ピトー管構造を用いた肺内部でのその場圧力流量同時計測システムに関する研究2023

    • Author(s)
      宮脇 葵, アル・ファリシィ ムハンマド・サルマン, 長谷川 義大, 松島 充代子, 川部 勤, 式田 光宏
    • Organizer
      第40回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-22K12770
  • [Presentation] MEMSセンサ付き気管内チューブの無線化に関する研究2017

    • Author(s)
      波田拓馬,谷口和弘,長谷川義大,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 気流検出機能付気管チューブシステムとそれによるその場呼吸計測法に関する研究2017

    • Author(s)
      渡辺瞬,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 乳幼児口元気流計測を目的とした熱式チューブ型マイクロ流量センサの開発2017

    • Author(s)
      光成勇樹,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Integration of flow sensor and optical fiberscope for in-situ breathing and surface image evaluations in small airway2017

    • Author(s)
      C. Okihara, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      19th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 経気管支的に肺機能計測が可能な気管支径対応カテーテル型流量センサの開発2017

    • Author(s)
      藤範知弘,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Micromachined tube type thermal flow sensor for adult-sized tracheal intubation tube2017

    • Author(s)
      S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Eurosensors2017
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 末梢気道におけるその場観察と呼吸量計測を可能とする光ファイバースコープ搭載型流量センサの開発2017

    • Author(s)
      沖原千明,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Development of small-footprint thermal sensor detecting airflow at mouth in baby2017

    • Author(s)
      Y. Mitsunari, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Eurosensors2017
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Development of catheter flow sensor for breathing measurements at different levels of tracheobronchial airway2017

    • Author(s)
      T. Fujinori, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Eurosensors2017
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 呼吸心拍測定を目指した温度補償機能付き熱式カテーテル型センサの開発2016

    • Author(s)
      光成勇樹, 長谷川義大, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第39回日本生体医工学会中国四国支部大会
    • Place of Presentation
      徳島大学
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] マルチ計測モードが可能なMEMS流量センサの開発2016

    • Author(s)
      藤範知弘, 長谷川義大, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第39回日本生体医工学会中国四国支部大会
    • Place of Presentation
      徳島大学
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Response time shortening in thermal catheter flow sensor2016

    • Author(s)
      S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Asia-Paciific Conference on Transducers and Micro-Nano Technology
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2016-06-26
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Effect of guide tube length on sensor output in inspired airflow measurement2016

    • Author(s)
      Y. Hasegawa, N. Harada, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      29th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Fabrication of smooth-surfaced flexible thermal sensor for detecting wall shear stress2016

    • Author(s)
      Y. Hasegawa, T. Yamada, M. Shikida
    • Organizer
      IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2016-01-24
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Insertion of Tip-separable Microneedle Device for Trans-dermal Drug Delivery Systems2016

    • Author(s)
      Y. Nabekura, K. Imaeda, Y. Hasegawa, M. Shikida
    • Organizer
      Asia-Pacific Conference of Transducers and Micro-Nano Technology
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2016-06-26
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Presentation] Breathing signal analysis of mouse during drug inhalation2016

    • Author(s)
      H. Kawaoka, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      29th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-11-08
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 肺機能計測用カテーテル型流量センサの高速応答化に関する研究2016

    • Author(s)
      渡辺瞬, 長谷川義大, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸
    • Year and Date
      2016-10-24
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Detection of kinetic heartbeat signals from airflow at mouth by catheter flow sensor with temperature compensation2016

    • Author(s)
      H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida
    • Organizer
      IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2016-01-24
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Micro flow sensor integration onto basket forceps for pulmonary function evaluation2016

    • Author(s)
      N. Harada, R. Ono, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida
    • Organizer
      11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2016-04-17
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Development of cylinder hollow structure with flow sensor by film transfer technology2016

    • Author(s)
      C. Okihara, Y. Hasegawa, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      IEEE Sensors 2016
    • Place of Presentation
      Orland, USA
    • Year and Date
      2016-10-30
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Measurement of heartbeat signals from airflow at mouth in rat by catheter flow sensor2016

    • Author(s)
      H. Kawaoka, Y. Hasegawa, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      IEEE Sensors 2016
    • Place of Presentation
      Orland, USA
    • Year and Date
      2016-10-30
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 心拍信号検出を目的とした温度補償機能付カテーテル型流量センサの開発2016

    • Author(s)
      河岡秀宜, 山田貴之, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸
    • Year and Date
      2016-10-24
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 肺機能評価を目的としたバスケット鉗子搭載型MEMS流量センサの開発2016

    • Author(s)
      長谷川義大, 原田直明, 小野良太, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸
    • Year and Date
      2016-10-24
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 二段構造型マイクロニードルの作製・評価2015

    • Author(s)
      今枝航大, 三宅力, 式田光宏
    • Organizer
      日本機械学会, 第1回イノベーション講演会
    • Place of Presentation
      広島大学,広島
    • Year and Date
      2015-11-14
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Presentation] 呼吸器系疾患の精密診断を目的としたバスケット鉗子実装型MEMSセンサの開発2015

    • Author(s)
      原田直明, 小野良太, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      第38回日本生体医工学会中国四国支部大会
    • Place of Presentation
      広島市立大学,広島
    • Year and Date
      2015-11-28
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Responsible time shorting of flexible thermal flow sensor for medical applications2015

    • Author(s)
      K. Imaeda, S. Shibata, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2015
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-11-01
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Extraction of heartbeat signal from airflow at mouth by flow sensor2015

    • Author(s)
      H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2015
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-11-01
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Development of micro-needles based on MEMS technologies for trans-dermal drug delivery system2015

    • Author(s)
      M. Shikida
    • Organizer
      The 9th IEEE International Conference on Nano/Molecular Medicine and Engineering
    • Place of Presentation
      Waikiki, Hawaii, USA
    • Year and Date
      2015-11-15
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Presentation] マイクロニードルを用いた薬剤投与における定量性向上に関する研究2015

    • Author(s)
      今枝航大, 石岡稜司, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第7回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2015-10-28
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Presentation] 呼吸心拍検出を目的とした温度補償機能付MEMS流量センサの開発2015

    • Author(s)
      河岡秀宜, 山田貴之, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      第38回日本生体医工学会中国四国支部大会
    • Place of Presentation
      広島市立大学,広島
    • Year and Date
      2015-11-28
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Detection of both heartbeat and respiration signals from airflow at mouth using catheter flow sensor2015

    • Author(s)
      H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      The 18th International Conference on Solid-State Sensors and Actuators
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2015-06-21
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Basket forceps with flow sensor for evaluating breathing characteristics in small airway2015

    • Author(s)
      N. Harada, R. Ono, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      The 18th International Conference on Solid-State Sensors and Actuators
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2015-06-21
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 気道内固定機能付きMEMS流量センサの開発2015

    • Author(s)
      原田直明, 小野良太, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第7回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2015-10-28
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] MEMSカテーテル型流量センサを用いた呼吸心拍機能検出2015

    • Author(s)
      河岡秀宜, 山田貴之, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第7回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2015-10-28
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Sharp tip-separable microneedle device for trans-dermal drug delivery systems2015

    • Author(s)
      K. Imaeda, K. Bessho, M. Shikida
    • Organizer
      The 18th International Conference on Solid-State Sensors and Actuators
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2015-06-21
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Presentation] 次世代経皮吸収製剤を目指した先端分離型マイクロニードルの開発2015

    • Author(s)
      今枝航大, 別所克彦, 三宅力, 式田光宏
    • Organizer
      日本機械学会, 2015年度年次大会
    • Place of Presentation
      北海道大学,北海道
    • Year and Date
      2015-09-13
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Presentation] Micromachined catheter flow sensor for measurement of breathing characteristics in a bronchial region2014

    • Author(s)
      T. Yamada, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Tech. Dig. of Asia-Paciific Conference on Transducers and Micro-Nano Technology
    • Place of Presentation
      Daegu, Korea
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] MEMS 技術による熱式マイクロセンサの開発およびそれを用いた壁面せん断応力計測に関する研究2014

    • Author(s)
      沢田拓也,寺島修,酒井康彦,長田孝二,式田光宏,伊藤靖仁
    • Organizer
      日本機械学会東海支部 第63期総会・講演会
    • Place of Presentation
      大同大学
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Presentation] MICROMACHINED CATHETER FLOW SENSOR FOR MEASUREMENT OF BREATHING CHARACTERISTICS IN A BRONCHIAL REGION2014

    • Author(s)
      T. Yamada, T. Matsuyama, M. Matsushima, T. Kawabe, and M. Shikida
    • Organizer
      7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Polymer micromachini8ng based on Cu on polyimide substrate and its application to flexible MEMS sensor2014

    • Author(s)
      Y. Niimi S. Shibata M. Shikida
    • Organizer
      Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      San Francisco, USA
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Polymer micromachini8ng based on Cu on polyimide substrate and its application to flexible MEMS sensor, pp.528-5312014

    • Author(s)
      Y. Niimi, S. Shibata, M. Shikida
    • Organizer
      Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      San Francisco, USA
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Temperature-compensated catheter flow sensor and its application to breathing measurement in mouse2013

    • Author(s)
      T. Yamada Y. Yamazaki T. Matsuyama M. Shikida M. Matsushima T. Kawabe
    • Organizer
      Proccedings of IEEE Sensors 2013
    • Place of Presentation
      Baltimore, USA
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] 熱式マイクロセンサによる壁面せん断応力変動計測に関する研究2013

    • Author(s)
      沢田拓也,寺島修,酒井康彦,長田孝二,式田光宏,肥田博隆,伊藤靖仁
    • Organizer
      日本実験力学会 2013年度年次講演会
    • Place of Presentation
      由利本荘市文化交流館,秋田
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Presentation] パリレン微細加工を用いた高速熱式流量センサの開発2013

    • Author(s)
      小野良太 松山拓矢 山崎雄大 式田光宏 松島充代子 川部勤
    • Organizer
      日本機械学会, 2013年度年次大会
    • Place of Presentation
      岡山,日本
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Integration of catheter flow sensor onto tracheal intubation tube system2013

    • Author(s)
      T. Matsuyama, K. Yoshikawa, Y. Yamazaki, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      IEEE MEMS
    • Place of Presentation
      Taiwan
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] 壁面噴流中のせん断応力変動計測の試み2013

    • Author(s)
      沢田拓也,寺島修,酒井康彦,長田孝二,式田光宏,伊藤靖仁
    • Organizer
      日本機械学会 第91期流体工学部門講演会
    • Place of Presentation
      九州大学
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Presentation] Measurements of Wall Shear Stress Fluctuation with the Micro-Fabricated Hot-Film Sensor in a Boundary Layer of Wall Jet2013

    • Author(s)
      T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, H. Hida and Y. Ito
    • Organizer
      8th International Symposium on Advanced Science and Technology in Experimental Mechanics
    • Place of Presentation
      仙台市戦災復興記念館
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Presentation] On the Measurement of Wall Shear Stress with a Micro-Fabricated Hot-Film Sensor2013

    • Author(s)
      T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida. H. Hida, K. Onishi and Y. Ito
    • Organizer
      4th International Conference on Jets, Wakes and Separated Flows
    • Place of Presentation
      名古屋大学
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Presentation] A Technique for the Measurement of Wall Shear Stress Based on Micro Fabricated Hot-Film Sensor2013

    • Author(s)
      T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, H. Hida, K. Onishi and Y. Ito
    • Organizer
      ASME 2013 International Mechanical Engineering Congress & Exposition
    • Place of Presentation
      Manchester Grand Hyatt San Diego, San Diego, USA
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Presentation] 呼気吸気計測を目的とした自己温度補償型カテーテル流量センサの開発, 5AM2-A-52013

    • Author(s)
      松山拓矢,山﨑雄大,松島充代子,川部勤,式田光宏
    • Organizer
      電気学会,センサ・マイクロマシン部門大会,第30回センサ・マイクロマシンと応用システム
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Integration of catheter flow sensor onto tracheal intubation tube system, pp.567-5702013

    • Author(s)
      T. Matsuyama, K. Yoshikawa, Y. Yamazaki, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Taipei, Taiwan
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] 呼気吸気計測を目的とした 自己温度補償型カテーテル流量センサの開発2013

    • Author(s)
      松山 拓矢 山﨑 雄大 松島 充代子 川部 勤 式田 光宏
    • Organizer
      電気学会, センサ・マイクロマシン部門大会, 第30回センサ・マイクロマシンと応用システム
    • Place of Presentation
      仙台,日本
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] パリレン微細加工を用いた高速熱式流量センサの開発2013

    • Author(s)
      小野良太,松山拓矢,山崎雄大,式田光宏,松島充代子,川部勤
    • Organizer
      日本機械学会, 2013年度年次大会
    • Place of Presentation
      岡山
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Temperature-compensated catheter flow sensor and its application to breathing measurement in mouse, pp.1614-16172013

    • Author(s)
      T. Yamada, Y. Yamazaki, T. Matsuyama, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      Proccedings of IEEE Sensors 2013
    • Place of Presentation
      Baltimore, USA
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Measurement of breathing characteristic in mouse during inhaling drug, pp.969-9722012

    • Author(s)
      T. Shikano, M. Shikida, M. Matsushima, T. Kawabe, K. Sato
    • Organizer
      Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Paris, France
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] 吸気呼気計測を目的とした温度補償機能付きカテーテル型流量センサの開発2012

    • Author(s)
      山﨑雄大, 吉川和宏, 式田光宏, 松島充代子, 川部 勤
    • Organizer
      電気学会第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Integration of temperature detection onto catheter flow sensor for bronchoscope, pp.542-5452012

    • Author(s)
      Y. Yamazaki, K. Yoshikawa, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      Proccedings of IEEE Sensors 2012
    • Place of Presentation
      Taipei, Taiwan
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Catheter flow sensor system and breathing measurements in rabbit, pp.616-6192012

    • Author(s)
      M. Matsushima, M. Shikida, Yuki Yamamoto, T. Shikano, K. Yoshikawa, T. Kawabe
    • Organizer
      Proccedings of IEEE Sensors 2012
    • Place of Presentation
      Taipei, Taiwan
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Measurement of breathing characteristic in mouse during inhaling drug2012

    • Author(s)
      4.T.Shikano, M.Shikida, M.Matsushima, T.Kawabe, K.Sato
    • Organizer
      The 25th Intl.Conf.Micro Electro Mechanical Systems
    • Place of Presentation
      Marriott Paris Rive Gauche Hotel (Paris)
    • Year and Date
      2012-02-01
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] 吸気呼気計測を目的とした温度補償機能付きカテーテル型流量センサの開発, pp.676-6792012

    • Author(s)
      山﨑雄大,吉川和宏,式田光宏,松島充代子,川部勤
    • Organizer
      電気学会センサ・マイクロマシン部門大会,第29回「センサ・マイクロマシンと応用システム」シンポジウム論文集
    • Place of Presentation
      北九州
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Catheter flow sensor system and breathing measurements in rabbit2012

    • Author(s)
      T. Matsuyama, Y. Yamazaki, T. Shikano, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      IEEE Sensors 2012
    • Place of Presentation
      Taiwan
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] Integration of temperature detection onto catheter flow sensor for bronchoscope2012

    • Author(s)
      Y. Yamazaki, K. Yoshikawa, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      IEEE Sensors 2012
    • Place of Presentation
      Taiwan
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] カテーテル型流量センサを用いた呼気吸気計測技術の開発,pp.215-2192011

    • Author(s)
      鹿野嵩瑛,岩井聡,式田光宏,松島充代子,川部勤,佐藤一雄
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      船堀
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] カテーテル型流量センサを用いた呼気吸気計測技術の開発2011

    • Author(s)
      鹿野嵩瑛, 岩井聡, 式田光宏, 松島充代子, 川部勤, 佐藤一雄
    • Organizer
      第28回「センサ・マイクロマシンと応用シスアム」シンポジウム
    • Place of Presentation
      タワーホール船堀(東京都)
    • Year and Date
      2011-09-27
    • Data Source
      KAKENHI-PROJECT-23310091
  • [Presentation] 高感度な摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブ2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      日本機械学会東海支部第59期総会講演会講演論文集No. 103-1, pp. 335-336
    • Place of Presentation
      名古屋 名城大学
    • Year and Date
      2010-03-10
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブの高精度化2010

    • Author(s)
      福澤健二, 雨川洋章, 辻弘明, 式田光宏, 伊藤伸太郎, 張賀東
    • Organizer
      第2回マイクロ・ナノ工学シンポジウム(pp.119-120)
    • Place of Presentation
      松江市くびきにメッセ
    • Year and Date
      2010-10-14
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Development of driving structure with dual-axis micro-mechanical probe for fricion forcemictoscope2010

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Tsuji, H.Zhang, S.Itoh
    • Organizer
      トライボロジー会議予稿集 福井 2010-9
    • Place of Presentation
      福井大学(福井市)
    • Year and Date
      2010-09-16
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブの高精度化2010

    • Author(s)
      福澤健二, 雨川洋章, 辻弘明, 式田光宏, 伊藤伸太郎, 張賀東
    • Organizer
      第2回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      くにびきメッセ(松江市)
    • Year and Date
      2010-10-14
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブの摩擦力・鉛直力の検出におけるクロストーク効果2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      日本機械学会IIP2011情報・知能・精密機器部門講演会講演論文集, pp. 40-43
    • Place of Presentation
      東京 電機大学
    • Year and Date
      2010-03-16
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブの摩擦力・鉛直力の検出におけるクロストーク効果2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      日本機械学会情報・知能・精密機器部門講演会講演論文集(pp.40-43)
    • Place of Presentation
      東京電機大学
    • Year and Date
      2010-03-16
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 高感度な摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブ2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      第59期総会講演会講演論文集(No.103-1, pp.335-336)
    • Place of Presentation
      名古屋市名城大学
    • Year and Date
      2010-03-10
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Development of driving structure with dual-axis micro-mechanical probe for fricion forcemictoscope2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 辻弘明, 張賀東, 伊藤伸太郎
    • Organizer
      トライボロジー会議予稿集(2010-9, pp.495-496)
    • Place of Presentation
      福井
    • Year and Date
      2010-09-16
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブを用いた紫外線照射による潤滑膜の摩擦特性の変化の測定2010

    • Author(s)
      雨川洋章, 板倉誠史, 張賀東, 福澤健二, 式田光宏, 伊藤伸太郎
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学(名古屋市)
    • Year and Date
      2010-09-07
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブを用いた紫外線照射による潤滑膜の摩擦特性の変化の測定2010

    • Author(s)
      雨川洋章, 板倉誠史, 張賀東, 福澤健二, 式田光宏, 伊藤伸太郎
    • Organizer
      日本機械学会2010年度年次大会講演論文集(Vol.8, pp.227-228)
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2010-09-07
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Selective removal of micro-corrugation by anisotropic wet etching2009

    • Author(s)
      稲垣徳幸, 佐々木光, 式田光宏, 佐藤一雄
    • Organizer
      15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-21
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Dual-Axis Micro-Mechanical Probe for Highly Sensitive Friction Force Microscope2009

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      Proceedings of World Tribology Congress 2009 (WTC2009), p. 261
    • Place of Presentation
      Kyoto Internationl Conference Center
    • Year and Date
      2009-09-08
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Anisotropic nature of Si surface during wet alkaline etching ; Effects of cations and surfactants2009

    • Author(s)
      K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal, Y.Kimura
    • Organizer
      The 5th International Colloquium, Micro-Tribology
    • Place of Presentation
      Milowka, Poland
    • Year and Date
      2009-09-20
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Selective removal of micro-corrugation by anisotropic wet etching2009

    • Author(s)
      N. Inagaki, H. Sasaki, M. Shikida, K. Sato
    • Organizer
      15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
    • Place of Presentation
      Denver, USA(Transducers)
    • Year and Date
      2009-06-21
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures(invited)2009

    • Author(s)
      K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal
    • Organizer
      Intl.Conf.on Materials for Advanced Technologies
    • Place of Presentation
      Singapore
    • Year and Date
      2009-06-28
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Dual-Axis Micro-Mechanical Probe for Highly Sensitive Friction Force Microscope2009

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      Proceedings of World Tribology Congress 2009(WTC2009)261
    • Place of Presentation
      Kyoto International Conference Center
    • Year and Date
      2009-09-08
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] 磁性微粒子を用いた液滴ハンドリングシステムによる-細胞RT-PCR2009

    • Author(s)
      熊澤史貴、大河内美奈、土屋裕義、式田光宏、本多裕之
    • Organizer
      日本化学会第89年会
    • Place of Presentation
      日本大学
    • Year and Date
      2009-03-29
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Presentation] 磁力を用いた液滴送液システムによる1細胞遺伝子発現解析デバイスの開発2009

    • Author(s)
      熊澤史貴、大河内美奈、式田光宏、本多裕之
    • Organizer
      日本生物工学会2009年度大会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-09-23
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Presentation] Quantification of Friction Force for Dual-Axis Probe Friction Force Microscope2009

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      Proceedings of the ASME/STLE International Joint Tribology Conference(IJTC2009-15241)
    • Place of Presentation
      Memphis (USA)(CD-ROM)
    • Year and Date
      2009-10-20
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures2009

    • Author(s)
      K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal
    • Organizer
      Intl. Conf. on Materials for Advanced Technologies
    • Place of Presentation
      Singapore
    • Year and Date
      2009-06-28
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] 磁性微粒子を用いた液滴搬送システムによるイノムアッセイチップの開発2009

    • Author(s)
      大河内美奈、熊澤史貴、シャムスーディンヌルヒダヤ、式田光宏、本多裕之
    • Organizer
      化学工学会第41回秋季大会
    • Place of Presentation
      広島大学
    • Year and Date
      2009-09-16
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009

    • Author(s)
      B.Tang, M.A.Gosalvez, Prem Pal, S.Itoh, H.Hida, M.Shikida, K.Sato
    • Organizer
      Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-08
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Anisotropic nature of Si surface during wet alkaline etching; Effects of cations and surfactants2009

    • Author(s)
      K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal, Y. Kimura
    • Organizer
      The 5th International Colloquium, Micro-Tribology
    • Place of Presentation
      Milowka, Poland
    • Year and Date
      2009-09-20
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009

    • Author(s)
      B. Tang, M.A. Gosalvez, Prem Pal, S. Itoh, H. Hida, M. Shikida, K. Sato
    • Organizer
      ntl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
    • Place of Presentation
      名古屋市
    • Year and Date
      2009-11-08
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Gosalvez and M. Shikida, Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      SPIE MOEMS-MEMS (Proc. SPIE Vol. 6882)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2008-01-19
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] 磁性微粒子を用いた電気化学検出による小型簡易分析装置の開発2008

    • Author(s)
      熊澤史貴、大河内美奈、式田光宏、本多裕之
    • Organizer
      第39回中部化学関係学協会支部連合秋季大会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2008-11-09
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Presentation] 結晶異方性ウェットエッチングによるスキャロッピングの選択除去に関する研究2008

    • Author(s)
      稲垣徳幸, 佐々木光, Prem Pal, 式田光宏, 佐藤一雄
    • Organizer
      電気学会センサ・マイクロマシン部門研究会
    • Place of Presentation
      仙台市 戦災復興記念館
    • Year and Date
      2008-06-12
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope2008

    • Author(s)
      H. Amakawa, K. Fukuzawa, M. Shikida, H. Zhang, S. Itoh
    • Organizer
      トライボロジー会議予稿集名古屋2008-9(国際セッション)
    • Place of Presentation
      名古屋
    • Year and Date
      2008-09-17
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, 佐藤一雄, 式田光宏
    • Organizer
      PRiME'08 214th ECS Meeting
    • Place of Presentation
      Honolulu, Hawaii
    • Year and Date
      2008-10-12
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      IEEE Intl. Conf. MEMS08, p327-330
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Improved sensitivity of dual-axis micro-mechanical probe for friction force microscope2008

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      トライボロジー会議予稿集名古屋(2008-9, pp.493-494)
    • Place of Presentation
      名古屋
    • Year and Date
      2008-09-17
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Magnetic force-based droplet manipulation system for gene expression analysis.2008

    • Author(s)
      Okochi M., Tsuchiya H., Kumazawa F., Shikida M., Honda H.
    • Organizer
      The 14th Symposium of Young Asian Biochemical Engineers' Community
    • Place of Presentation
      Shibaura Institute of Technology
    • Year and Date
      2008-11-30
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Presentation] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M. Shikida
    • Organizer
      PRiME'08 214th ECS Meeting
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-10-12
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] 結晶異方性ウェットエッチングによるスキャロッピングの選択除去に関する研究2008

    • Author(s)
      稲垣徳幸, 佐々木光, Prem Pal, 式田光宏, 佐藤一雄
    • Organizer
      電気学会センサ・マイクロマシン部門研究会
    • Place of Presentation
      仙台市
    • Year and Date
      2008-06-12
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      IEEE Intl. Conf. MEMS08
    • Place of Presentation
      Tucson, USA
    • Year and Date
      2008-01-14
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Magnetic Force-based lab-on-a-chip for single cell analysis in a droplet.2008

    • Author(s)
      Okochi M, Tsuchiya H., Kumazawa F., Shikida M., Honda H.
    • Organizer
      Pacific Rim Meeting on Electrochemical and Solid-state Science 2008
    • Place of Presentation
      Honolulu, Hawaii
    • Data Source
      KAKENHI-PROJECT-20360371
  • [Presentation] 高精度な摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブの開発2008

    • Author(s)
      雨川洋章, 福澤健二, 張賀東, 伊藤伸太郎, 式田光宏
    • Organizer
      日本機械学会2008年度年次大会講演論文集(vol.8, pp.3-4)
    • Place of Presentation
      横浜国立大学
    • Year and Date
      2008-08-04
    • Data Source
      KAKENHI-PROJECT-20360077
  • [Presentation] Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      SPIE MOEMS-MEMS(Proc. SPIE Vol.6882)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2008-01-19
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Novel wet anisotropic etching process for the realization of new shapesof silicon MEMS structures2007

    • Author(s)
      Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
    • Organizer
      IEEE Intl. Conf. MHS07 & Micro-Nano COE, p499-504
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-11-13
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Novel wet anisotropic etching process for the realization of new shapes of silicon MEMS structures2007

    • Author(s)
      Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
    • Organizer
      IEEE Intl. Conf. MHS07 & Micro-Nano COE
    • Place of Presentation
      Nagoya
    • Year and Date
      2007-11-13
    • Data Source
      KAKENHI-PROJECT-19201026
  • [Presentation] Evaluation of Magnetic Beads Agitation Performance Operated by Multi-layered Flat Coil2007

    • Author(s)
      M. Koyama, N. Nagao, R. Imai, M. Shikida, H. Honda, 他3名
    • Organizer
      The 14th International Conference on Solid-State Sensors and Actuators
    • Place of Presentation
      Lyon, France
    • Year and Date
      2007-06-13
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18310093
  • [Presentation] 樹脂製フィルムデバイスへのMEMS応用

    • Author(s)
      式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第6回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2014-10-20 – 2014-10-22
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Vacuum cavity formation for high thermal isolation in flexible thermal sensor

    • Author(s)
      P. Kim, S. Shibata, M. Shikida
    • Organizer
      Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Estoril, Portugal
    • Year and Date
      2015-01-18 – 2015-01-22
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Sharp needle tip formation based on triangular pyramidal structure

    • Author(s)
      K. Imaeda, K. Bessho, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-02 – 2014-11-06
    • Data Source
      KAKENHI-PROJECT-26600060
  • [Presentation] 銅張積層板を用いた熱式フレキシブルセンサに関する研究

    • Author(s)
      柴田峻志, 新美洋介, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第6回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2014-10-20 – 2014-10-22
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 動物実験における呼吸機能評価を目的とした気道内固定機構付き流量センサの開発

    • Author(s)
      山田貴之, 松山拓矢, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第23回日本コンピュータ外科学会大会
    • Place of Presentation
      大阪大学コンベンションセンター
    • Year and Date
      2014-11-08 – 2014-11-09
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Flexible thermal MEMS flow sensor based on Cu on polyimide substrate

    • Author(s)
      S. Shibata, Y. Niimi, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-02 – 2014-11-06
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] パッチタイプ型熱式フィルムセンサを用いた壁面せん断応力の計測

    • Author(s)
      村松空,酒井康彦,長田孝二,伊藤靖仁,式田光宏
    • Organizer
      2014年度日本機械学会年次大会
    • Place of Presentation
      東京電機大学
    • Year and Date
      2014-09-07 – 2014-09-10
    • Data Source
      KAKENHI-PROJECT-25630051
  • [Presentation] Implantable catheter flow sensor with legs in air passage for laboratory animal

    • Author(s)
      T. Yamada, R. Ono, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-02 – 2014-11-06
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] Wearable displacement sensor system based on elevating tube for measuring breathing pattern

    • Author(s)
      R. Ono, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-02 – 2014-11-06
    • Data Source
      KAKENHI-PROJECT-26286034
  • [Presentation] 結晶異方性エッチングを用いた三角錐構造体作製方法に関する研究

    • Author(s)
      今枝航大, 別所克彦, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第6回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2014-10-20 – 2014-10-22
    • Data Source
      KAKENHI-PROJECT-26600060
  • 1.  SATO Kazuo (30262851)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 67 results
  • 2.  HONDA Hiroyuki (70209328)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 21 results
  • 3.  KAWABE Tsutomu (20378219)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 64 results
  • 4.  ANDO Taek (70335074)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 11 results
  • 5.  FUKUZAWA Kenji (60324448)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 21 results
  • 6.  GOSALVEZ Miguel (10377814)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 36 results
  • 7.  OKOCHI Mina (70313301)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 14 results
  • 8.  KATO Ryuji (50377884)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 1 results
  • 9.  MIZOSHIRI Mizue (70586594)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 10.  PREM Pal (20444416)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 24 results
  • 11.  KIMURA Yasuo (40312673)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 12.  ITOH Shintaro (50377826)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 20 results
  • 13.  MIZUTANI Takashi (70273290)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  KOUJI Nagata (50274501)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 9 results
  • 15.  SAKAI Yasuhiko (20162274)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 9 results
  • 16.  ITO Yasumasa (40346078)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 8 results
  • 17.  HIDA Hirotaka (60402509)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 5 results
  • 18.  HASEGAWA Yoshihiro (40402507)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 29 results
  • 19.  MATSUDA Hitoki (80115633)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  KOJIMA Yoshihiro (80345933)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  Hata Seiichi (50293056)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  ARAI Fumito (90221051)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 23.  三矢 保永 (10200065)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 24.  寺島 修 (50570751)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 8 results
  • 25.  HYNNINEN Teemu
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 26.  FERRANDO Nestor
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 27.  MOKTADIR Zak
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 28.  CAMON Henri
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 29.  VAN Suchtele
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 30.  ELWENSPOEK M
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 31.  MATSUSHIMA Miyoko
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 3 results

URL: 

Are you sure that you want to link your ORCID iD to your KAKEN Researcher profile?
* This action can be performed only by the researcher himself/herself who is listed on the KAKEN Researcher’s page. Are you sure that this KAKEN Researcher’s page is your page?

この研究者とORCID iDの連携を行いますか?
※ この処理は、研究者本人だけが実行できます。

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi