MATSUDA Koichi 松田浩一

Researcher Number	80284537
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2006: Kyushu University, Faculty of Engineering, Research Associate, 大学院工学研究院, 助手 2005: 九州大学, 工学研究院, 助手 2004: Kyushu University, Graduate School, Faculty of Engineering Department of Intelligent Machinery and Systems, Research Associate, 大学院・工学研究院, 助手 2003: 九州大学, 工学研究院, 助手 2000 – 2002: 九州大学, 大学院・工学研究院, 助手 1999: Kyushu University, Department of Intelligent Machinery and Systems, Assistant, 工学研究科, 助手 1997 – 1998: 九州大学, 工学部, 助手
Review Section/Research Field	Principal Investigator Control engineering Except Principal Investigator Dynamics/Control / Dynamics/Control
Keywords	Principal Investigator 振動制御 / 電子ビーム / 電子顕微鏡 Except Principal Investigator 磁気軸受 / magnetic bearing / ロバスト制御 / 磁気浮上 / Stability margin distance / Stability / Magnetic bearing … More / Rotor / Measurement technology / Analysis and estimation / Control / Mechanical dynamics / 位相余裕 / 最大特異値 / 感度関数行列 / 感度関数 / 多入力多出力系 / 安定余裕評価 / 安定余裕距離 / 安定性 / 回転軸 / 計測工学 / 解析・評価 / 制御 / 機械力学 / phase angle control / variable bias control / without contamination / movement without contact / non contact levitation / magnetic levitation / clean robot / マイクロステップ駆動 / H-infinity制御 / 非接触 / Hinfinity 制御 / 位相角制御 / バイアス可変制御 / 無発塵 / 非接触移動 / 非接触浮上 / クリーンロボット / semi-conductor manufacture apparatus / electron beam control / robust control theory / election microscopy / vibration isolation / micro vibration / Magnetic levitation / 制振制御 / 半導体検査装置 / 半導体製造装置 / 電子ビーム制御 / 電子顕微鏡 / 防振 / 微振動 Less

Studies on Estimation Methods of Stability Criteria for Rotor Levitated by Active Magnetic Bearing Applied to Advanced Rotating Machinery
- Principal Investigator
  
  KANEMITSU Yoichi
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Dynamics/Control
- Research Institution
  KYUSHU UNIVERCITY
Trial production research of an super clean robot corresponding to a high vacuum, which is indispensable in a next-generation semiconductor manufacture process
- Principal Investigator
  
  KANEMITSU Yoichi
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Dynamics/Control
- Research Institution
  KYUSHU UNIVERSITY
電子ビームの制御を用いた電子顕微鏡の解像度向上Principal Investigator
- Principal Investigator
  
  松田浩一
- Project Period (FY)
  2000 – 2001
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Control engineering
- Research Institution
  Kyushu University
Isolation Control of Micro Vibration to Realize Micro and Fine Manufacture
- Principal Investigator
  
  KANEMITSU Yoichi
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Dynamics/Control
- Research Institution
  KYUSHU UNIVERSITY

All 2007 2006 2005 2004 2003 2002

All Journal Article

[Journal Article] Stability-Optimized Clearance Configuration of Fluid-Film Bearing2007
- Author(s)
  Koichi MATSUDA, Shinya KIJIMOTO, Yoichi KANEMITSU
- Journal Title
  
  Transactions of the ASME, Journal of Tribology Vol.129
  
  Pages: 106-111
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Self-Sensing three-Pole Magnetic Bearing Using a Kalman Filter2006
- Author(s)
  Koichi MATSUDA, Shinya KIJIMOTO, Yoichi KANEMITSU
- Journal Title
  
  Proceedings of SICE-ICASE International Joint Conference 2006
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Coupled Motion Control of Magnetically Levitated Linear Arm in Non-contact Clean Robot2006
- Author(s)
  Yoichi KANEMITSU, Eisuke YASUGI, Shinya KIJIMOTO, Koichi MATSUDA
- Journal Title
  
  Proceedings of The 8th International Conference on Motion and Vibration Control
  
  Pages: 119-124
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Self-Sensing Three-Pole Magnetic Bearing Using a Kalman Filter2006
- Author(s)
  Koichi MATSUDA, Shinya KIJIMOTO, Yoichi KANEMITSU
- Journal Title
  
  Proceedings of SICE-ICASE International Joint Conference 2006
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Self-Sensing Three-Pole Magnetic Bearing Using a Kalman Filter2006
- Author(s)
  Koichi MATSUDA, Shinya KIJIMOTO, Yoichi KANEMITSU
- Journal Title
  
  Proceedings of SICE-ICASE International Joint Conference
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Comparison of Stability Criteria for Rotor Levitated by Active Magnetic Bearing2006
- Author(s)
  Yoichi KANEMITSU, XianoBing YONG, Shinya KIJIMOTO, Koichi MATSUDA
- Journal Title
  
  Proceedings of 10^<th> International Symposium on magnetic bearings, CR-ROM
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Analytical Comparison of Stability Criteria for Rotor Levitated by Active Magnetic Bearing2005
- Author(s)
  Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA
- Journal Title
  
  Proceedings of 11^<th> Asia-Pacific Vibration Conference
  
  Pages: 337-343
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Stability-Optimized Clearance Configuration of Fluid-Film Journal Bearings2005
- Author(s)
  Koichi MATSUDA, Yoichi KANEMITSU, Shinya KIJIMOTO
- Journal Title
  
  Proce. of ASME 2005 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (CD-ROM)
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Angular Vibration Control of Rotary Actuator in Clean Robot without any Mechanical Contact2005
- Author(s)
  Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA, Toshihiro SOFUE
- Journal Title
  
  Proc.of the 8^<th> International Symposium on Magnetic Suspension Technology
  
  Pages: 172-176
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Angular Vibration Control of Rotary Actuator in Clean Robot without any Mechanical Contact2005
- Author(s)
  Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA, Toshihiro SOFUE
- Journal Title
  
  Proc. of the 8^<th> International Symposium on Magnetic Suspension Technology
  
  Pages: 172-176
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Angular Vibration Control of Rotary Actuator in Clean Robot without any Mechanical Contact2005
- Author(s)
  Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA, Toshihiro SOFUE
- Journal Title
  
  Proc. of the 8^<th> International Symposium on Magnetic Suspension Technology,
  
  Pages: 172-176
- Data Source
  KAKENHI-PROJECT-17560210
[Journal Article] Image-Processing Approach to Vibration Isolation of a Scanning Electron Microscop2004
- Author(s)
  K.MATSUDA, Y.KANEMITSU, S.KIJIMOTO, R.TANAKA
- Journal Title
  
  The SPIE Journal of Microlithography, Microfabrication and Microsystems
  
  Pages: 186-193
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Image-Processing Approach to Vibration Isolation of a Scanning Electron Microscope2004
- Author(s)
  K.MATSUDA, Y.KANEMITSU, S.KIJIMOTO, R.TANAKA
- Journal Title
  
  The SPIE Journal of Microlithography, Microfabrication and Microsystems Vol.3 No.1
  
  Pages: 186-193
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Levitation and Travel Control of Magnetically Levitated Linear Arm in Non-Contact Clean Robot2004
- Author(s)
  KANEMITSU Yoichi, KIJIMOTO Shinya, MATSUDA Koichi
- Journal Title
  
  Proc.of International Conference on Intelligent Manipulation and Grasping
  
  Pages: 302-307
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Identification of Unbalance and Sensor Runout on Rigid Rotor Supported by Magnetic Bearings (2^<nd> report Identification Method and Experiment by the Weighted-incremental Least Square On-line Mehtod)2004
- Author(s)
  Tea-Jin PARK, Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA
- Journal Title
  
  Transaction of the Japan Society of Mechanical Engineers, Series C Vol.70, No.691
  
  Pages: 656-663
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] 磁気軸受支持回転体の不つりあいとセンサーランナウトの同定(第2報重み付き逐次最小法を適用した同定法と実験)2004
- Author(s)
  朴泰〓, 金光陽一, 雉本信哉, 松田浩一
- Journal Title
  
  日本機械学会論文集 C編 70-691
  
  Pages: 656-663
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Levitation and Travel Control of Magnetically Levitated Linear Arm in Non-Contact Clean Robot2004
- Author(s)
  KANEMITSU Yoichi, KIJIMOTO Shinya, MATSUDA Koichi
- Journal Title
  
  Proc.of International Conference on Intelligent Manipulation and Grasping 1
  
  Pages: 302-307
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Levitation Control of Linear Arm in Non-contact Clean Robot (Stable travel by changing bias current of AMB)2003
- Author(s)
  Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA, Akihiro MATSUSHITA, Hidetaka NISHIMURA
- Journal Title
  
  Proc.8^<th> Symposium on Motion and Vibration Control
  
  Pages: 159-162
- NAID
  110002502055
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] 非接触クリーンロボットのリニアアームの浮上制御2003
- Author(s)
  金光陽一, 雉本信哉, 松田浩一, 松下晃洋, 西村英高
- Journal Title
  
  第8回「運動と振動の制御」シンポジウム講演論文集
  
  Pages: 159-162
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Control of Non-contact Clean Robot (Levitation Control of Linear Actuator)2003
- Author(s)
  Akihiro MATSUSHITA, Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA, Hidetaka NISHIMURA
- Journal Title
  
  Proc.JSME NO.03-7(CD-ROM)
- NAID
  110002483158
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Robust Controller Design of Rotary Actuator of Contact-free Clean Robot Using Magnetic Bearings2002
- Author(s)
  Y.Kanemitsu, K.Fujii, S.kijimoto, K.Matsudam, K.Watanabe
- Journal Title
  
  Proc.6^<th> Internationl Conference on Motion and Vibration Control
  
  Pages: 1110-1115
- NAID
  110002490117
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Controller Design of an Electromagnetically Levitated Vibration Isolation System2002
- Author(s)
  M.Suzuki, Y.Kanemitsu, S.Kijimoto, K.Matsuda
- Journal Title
  
  Proc.8^<th> International Conference on Magnetic Bearings
  
  Pages: 133-138
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Levitation Control of Linear Arm in Non-Contact Clean2002
- Author(s)
  Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA
- Journal Title
  
  Proc.7^<th> International symposium on magnetic suspension technology(ISMST7)
  
  Pages: 296-301
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Identification of Unbalance and High Order Sensor Runout on Rigid Rotor Supported by Magnetic Bearing2002
- Author(s)
  T.J.Park, Y.Kanemitsu, S.Kijimoto, K.Matsuda, Y.Koba
- Journal Title
  
  Proc.8^<th> International Conference on Magnetic Bearings
  
  Pages: 355-360
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Inentification of Unbalance and High Order Sensor Runouton Rigid Rotor Supported by Magnetic Bearings2002
- Author(s)
  Park, T.J., Kanemitsu, Y., Kijimoto, S., Matsuda, K., Koba, Y.
- Journal Title
  
  Proc.8^<th> International Symposium on Magnetic Bearings
  
  Pages: 355-360
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Robust Robust Controller Design of Rotary Actuator of Contact-free Clean Robot Using Magnetic Bearings2002
- Author(s)
  Kanemitsu, Y., Fujii, K., Kijimoto, S., Matsuda, K., Watanabe, K.
- Journal Title
  
  Proc.6^<th> International Conference on Motion and Vibration Control
  
  Pages: 1110-1115
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] クリーンロボットの磁気浮上系の制御に関する研究2002
- Author(s)
  松田浩一
- Journal Title
  
  ネスレ科学振興年報 9
  
  Pages: 1-6
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550218
[Journal Article] Controller Design of an Electromagnetically Levitated Vibration Isolation System2002
- Author(s)
  Suzuki, M., Kanemitsu, Y., Kijimoto, S., Matsuda, K.
- Journal Title
  
  Proc.8^<th> International Symposium on Magnetic Bearings
  
  Pages: 133-138
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550218

1. KANEMITSU Yoichi (00274514)

# of Collaborated Projects: 3 results

# of Collaborated Products: 27 results
2. KIJIMOTO Shinya (30204861)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

MATSUDA Koichi 松田 浩一

Research Projects

Research Products

Co-Researchers

Studies on Estimation Methods of Stability Criteria for Rotor Levitated by Active Magnetic Bearing Applied to Advanced Rotating Machinery

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Trial production research of an super clean robot corresponding to a high vacuum, which is indispensable in a next-generation semiconductor manufacture process

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

電子ビームの制御を用いた電子顕微鏡の解像度向上Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Isolation Control of Micro Vibration to Realize Micro and Fine Manufacture

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Stability-Optimized Clearance Configuration of Fluid-Film Bearing2007

Author(s)

Journal Title

Description

Data Source

[Journal Article] Self-Sensing three-Pole Magnetic Bearing Using a Kalman Filter2006

Author(s)

Journal Title

Data Source

[Journal Article] Coupled Motion Control of Magnetically Levitated Linear Arm in Non-contact Clean Robot2006

Author(s)

Journal Title

Description

Data Source

[Journal Article] Self-Sensing Three-Pole Magnetic Bearing Using a Kalman Filter2006

Author(s)

Journal Title

Description

Data Source

[Journal Article] Self-Sensing Three-Pole Magnetic Bearing Using a Kalman Filter2006

Author(s)

Journal Title

Description

Data Source

[Journal Article] Comparison of Stability Criteria for Rotor Levitated by Active Magnetic Bearing2006

Author(s)

Journal Title

Data Source

[Journal Article] Analytical Comparison of Stability Criteria for Rotor Levitated by Active Magnetic Bearing2005

Author(s)

Journal Title

Description

Data Source

[Journal Article] Stability-Optimized Clearance Configuration of Fluid-Film Journal Bearings2005

Author(s)

Journal Title

Data Source

[Journal Article] Angular Vibration Control of Rotary Actuator in Clean Robot without any Mechanical Contact2005

Author(s)

Journal Title

Description

Data Source

[Journal Article] Angular Vibration Control of Rotary Actuator in Clean Robot without any Mechanical Contact2005

Author(s)

Journal Title

Description

Data Source

[Journal Article] Angular Vibration Control of Rotary Actuator in Clean Robot without any Mechanical Contact2005

Author(s)

Journal Title

Data Source

[Journal Article] Image-Processing Approach to Vibration Isolation of a Scanning Electron Microscop2004

MATSUDA Koichi 松田浩一

[Journal Article] 磁気軸受支持回転体の不つりあいとセンサーランナウトの同定(第2報重み付き逐次最小法を適用した同定法と実験)2004