SHINOHARA Masanori 篠原正典

… Alternative Names

SHINOHARA MASANORI 篠原正典

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Researcher Number	80346931
Other IDs
External Links
Affiliation (Current)	2025: 福岡大学, 工学部, 教授
Affiliation (based on the past Project Information) *help	2020 – 2023: 福岡大学, 工学部, 教授 2017 – 2018: 佐世保工業高等専門学校, 電気電子工学科, 准教授 2016: 長崎大学, 工学研究科, 助教 2014: 長崎大学, 工学研究科, 助教 2011 – 2013: 長崎大学, 工学(系)研究科(研究院), 助教 … More 2012: 長崎大学, 大学院・工学研究科, 助教 2012: 長崎大学, 工学研究科, 助教 2010: 長崎大学, 大学院・工学研究科, 助教 2009 – 2010: Nagasaki University, 生産科学研究科, 助教 2007 – 2008: Nagasaki University, 工学部, 助教 2003 – 2006: 長崎大学, 工学部, 助手 Less
Review Section/Research Field	Principal Investigator Plasma science / Science and Engineering / Basic Section 14030:Applied plasma science-related / Plasma electronics / Thin film/Surface and interfacial physical properties Except Principal Investigator Plasma science / Science and Engineering / Plasma electronics
Keywords	Principal Investigator 赤外分光 / プラズマ / 多重内部反射 / アモルファス炭素膜 / 赤外吸収分光法 / 炭素膜 / 赤外吸収分光 / 反応過程 / 酸化 / 自己組織化膜 … More / 反応 / シリコン / 水素プラズマ / 多重内部反射赤外分光 / 付加反応 / プラズマ-固体表面相互作用 / ラジカル / 酸素プラズマ / 反応制御 / deposition / carbon films / carbon nanowall / graphene / decomposition / styrene / source molecules / pulse plasma / スパッタ膜 / 膜中の炭素の2重結合状態の生成と消滅 / プラズマ化学気相堆積法 / スパッタ法 / 多重内部反射赤外吸収分光法 / 膜中の炭素の２重結合 / 大電力インパルスマグネトロンスパッタリング / プラズマ気相化学堆積 / 成膜メカニズム / ラマン分光 / プラズマ化学気相堆積 / スパッタ堆積 / カーボン膜 / HPPS/HiPMS / グラフェン / 高電圧パルス / 結合状態 / PECVD / スパッタ成膜 / 原子レベル / 有機分子 / OHラジカル / テトラエトキシシラン / エーテル / 炭化水素分子 / 表面反応 / プラズマ酸化 / 水素化 / 官能基 / 反応解析 / 自己組織化単分子膜自己組織化単分子膜 / 堆積速度 / 原料分子 / ベンゼン環 / 高分子量 / 高次のラジカル・イオン / 成膜 / 高分子量のラジカル・イオン / 炭化水素プラズマ / 生体分子 / IV族元素 / 「その場・実時間」計測 / アミン基 / カーボン / 実時間 / その場 / 表面改質 / 炭素系膜 / 膜堆積 / 実時間計測 / バイオ応用 / 堆積物 / 溶液 / 反応計測 / 液中プラズマ / その場・実時間計測 / 赤外分光法 / 生成過程 / イオンエネルルギー / 欠陥 / アモルファス化 / アセチレン / 水素の役割 / 成長過程 / 水素の引き抜き / プラズマプロセス / プラズマプロセス制御 / プロセス診断 / 反応性プラズマ / 炭素薄膜 / 薄膜堆積 / 成長機構 / プラズマ診断 / 機能性有機分子薄膜 / 表面水素の引き抜き / マイグレ-ション / サブサーフェス / 多重内部反射赤外分光法 / 有機半導体 / 成長反応過程 / アモルファス状炭素膜 / 半導体表面 / 表面水素 … More Except Principal Investigator 小型化 / マイクロプラズマ / プラズマ / プラズマ加工 / マイクロマシン / マイクロ・ナノデバイス / 半導体超微細化 / プラズマ・核融合 / 磁性粒子 / ナノ材料 / プラズマ化学 / 親水化処理 / 液相反応 / 放電プラズマ / 表面処理 / 溶存酸素 / 磁性ナノ粒子 / ナノ粒子生成 / プラズマ誘起液相反応 / グロー放電電解 / プラズマ電気化学 / plasma processing / micro machine / micro devices / micro plasma / plasma / 細管 / コーティング / スパッタリング / SiOC薄膜 / 大気圧 / 医療応用 / 歯科治療 / 電離度 / 低気圧 / ナノ加工 Less

Deposition of carbon films due to decomposition of source molecules during pulse plasmas and elucidation of its reactionsPrincipal Investigator
- Principal Investigator
  
  篠原正典
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Fukuoka University
A Study on Deposition mechanisms of Amorphous Carbon films with in-situ Multiple-Internal-Reflection Infared SpectroscopyPrincipal Investigator
- Principal Investigator
  
  SHINOHARA MASANORI
- Project Period (FY)
  2020 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Fukuoka University
Study on control of plasma oxidation at an atomic levelPrincipal Investigator
- Principal Investigator
  
  SHINOHARA MASANORI
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma electronics
- Research Institution
  Sasebo National College of Technology
  Nagasaki University
Foundation of plasma electrochemistry and its application to material process in liquid
- Principal Investigator
  
  Tochikubo Fumiyoshi
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma electronics
- Research Institution
  Tokyo Metropolitan University
自己組織化膜とプラズマの反応解析・制御による自己組織化膜への機能付与Principal Investigator
- Principal Investigator
  
  篠原正典
- Project Period (FY)
  2013 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Nagasaki University
IV族元素を基盤とした膜とプラズマとの反応解析によるプラズマ応用プロセスの最適化Principal Investigator
- Principal Investigator
  
  篠原正典
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Nagasaki University
Study on the deposition of functionalized membrane with high-molecular-weight radicals and ions during hydroicarbon plasmaPrincipal Investigator
- Principal Investigator
  
  SHINOHARA Masanori
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
Establishment of a real time measurement method of carbon film deposition process and its surface modification process during plasma generated in liquid, and the clalification of these processesPrincipal Investigator
- Principal Investigator
  
  SHINOHARA Masanori
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
プラズマ－シリコン表面相互作用で誘起される欠陥生成メカニズムの解明Principal Investigator
- Principal Investigator
  
  篠原正典
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Nagasaki University
Development of the smart deposition process of amorphous carbon films due to the control of plasma processPrincipal Investigator
- Principal Investigator
  
  SHINOHARA Masanori
- Project Period (FY)
  2008 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
固体壁微小空間における高電離度マイクロプラズマの生成
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Nagasaki University
歯科治療用プラズマプロセスの開発
- Principal Investigator
  
  藤山寛
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
チューブの中のプラズマプロセス診断技術と膜堆積技術の創製によるチューブの高機能化Principal Investigator
- Principal Investigator
  
  篠原正典
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
磁界中マイクロ波による低気圧マイクロプラズマの生成と診断
- Principal Investigator
  
  FUJIYAMA Hiroshi
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Nagasaki University
Study on Narrow Tube Inner Coating Method by Harmonic ECR Plasma
- Principal Investigator
  
  FUJIYAMA Hiroshi
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Nagasaki University
プラズマによる表面水素反応の制御を利用した機能性有機分子薄膜の半導体表面での形成Principal Investigator
- Principal Investigator
  
  篠原正典
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Nagasaki University

[Book] プラズマCVDにおける成膜条件の最適化に向けた反応機構の理解とプロセス制御・成膜事例　(分担)2018
- Author(s)
  篠原正典，猪原武士，柳生義人，大島多美子，川崎仁晴
- Total Pages
  13
- Publisher
  サイエンス＆テクノロジー
- ISBN
  9784864281706
- Data Source
  KAKENHI-PROJECT-16K04994
[Journal Article] An Infrared Spectroscopic Study of Amorphous Carbon Film Deposition Process during Plasma Generated in Helium-Added Acetylene2023
- Author(s)
  KUWADA Atsuya、NAKAI Tatsuya、OOISHI Yuto、SASAMOTO Ryo、SHINOHARA Masanori、TANAKA Satoshi、MATSUMOTO Takashi
- Journal Title
  
  Vacuum and Surface Science
  
  Volume: 66 Issue: 8 Pages: 442-447
- DOI
  10.1380/vss.66.442
- ISSN
  2433-5835, 2433-5843
- Year and Date
  2023-08-10
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K03372, KAKENHI-PROJECT-20K03920
[Journal Article] Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction2018
- Author(s)
  篠原正典，冨永泰佑，下村勇登，猪原武士，柳生義人，大島多美子，川崎仁晴
- Journal Title
  
  IEEJ Transactions on Fundamentals and Materials
  
  Volume: 138 Issue: 11 Pages: 538-543
- DOI
  10.1541/ieejfms.138.538
- ISSN
  0385-4205, 1347-5533
- Year and Date
  2018-11-01
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K04994, KAKENHI-PROJECT-16K04999
[Journal Article] IR Absorption Spectroscopy of Deposition Process of Amorphous Carbon Film due to Ethylene Plasma2018
- Author(s)
  篠原正典，冨永泰佑，下村勇登，猪原武士，柳生義人，大島多美子，川崎仁晴
- Journal Title
  
  IEEJ Transactions on Fundamentals and Materials
  
  Volume: 138 Issue: 11 Pages: 544-550
- DOI
  10.1541/ieejfms.138.544
- ISSN
  0385-4205, 1347-5533
- Year and Date
  2018-11-01
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K04994, KAKENHI-PROJECT-16K04999
[Journal Article] 49.Infrared spectroscopic study on hydrogenation process of Si(100) surface during hydrogen plasma exposure2016
- Author(s)
  Masanori Shinohara, Naoki Maruno, Yoshiki Takami, Susumu Takabayashi, Yoshinobu Matsuda
- Journal Title
  
  IEEE Transactions of Plasma Science
  
  Volume: 44 Issue: 12 Pages: 3107-3111
- DOI
  10.1109/tps.2016.2595599
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K04994
[Journal Article] Infrared spectroscopic study on reactions of octadecyltrichlorosilane self-assembled monolayer with Plasmas2015
- Author(s)
  Masanori Shinohara, Naoki Maruno, Yuta Yoshida, Yujiro Taniguchi, Kazuki Ito, Yamato Nakano, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 1S Pages: 01AB04-01AB04
- DOI
  10.7567/jjap.54.01ab04
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] シリコン表面のSi-Hの結合の赤外分光解析2015
- Author(s)
  篠原正典，木村康男，庭野道夫，松田良信，藤山寛
- Journal Title
  
  プラズマ・核融合学会誌
  
  Volume: 91
- Open Access
- Data Source
  KAKENHI-PROJECT-24340144
[Journal Article] Infrared Absorption Spectroscopic Study on Reaction between Self-Assembled Monolayers and Atmospheric-Pressure Plasma2015
- Author(s)
  Masanori Shinohara, Katsuhiro Amano, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda and Hiroshi Fujiyama
- Journal Title
  
  Journal of Spectroscopy
  
  Volume: 2015 Pages: 1-7
- DOI
  10.1155/2015/417024
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Reactions of Plasma with Self-Assemble Monolayer for plasma-bio application2014
- Author(s)
  Naoki Maruno, Yuta Yoshida, Yujiro Taniguchi, Shohei Yagi, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Proceedings of 8th International conference on reactive plasmas
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Effects of carbon sources on deposition process of amorphous carbon film with plasma enhanced chemical vapor deposition, investigated with infrared spectroscopy: benzene and naphthalene2014
- Author(s)
  Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Proceedoings of 8th International conference on reactive plasmas
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24340144
[Journal Article] Reactions of Surface Hydrogen on Amorphous Carbon Films with Hydrogen Plasma2014
- Author(s)
  Masanori Shinohara, Taka-aki Kawakami, Ko-jiro Hara, Shohei Yagi, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 1 Pages: 10204-10204
- DOI
  10.7567/jjap.53.010204
- NAID
  210000143216
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Infrared spectroscopy of hydrogenation of Si surface exposed to hydrogen plasm2014
- Author(s)
  Masanori Shinohara1, Naoki Maruno, Shohei Yagi, Yujiro Taniguchi, Takayoshi Tsumura, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Proceedings of 8th International conference on reactive plasma
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-25104720
[Journal Article] Development of an in-situ infrared spectroscopic measurement of plasma-induced reactions in ethanol2014
- Author(s)
  M. Shinohara, A. Fuakae, K. Amano, Y. Yoshida, Y. Matsuda, H. Fujiyama
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol. 52, No.11 Issue: 11S Pages: 11NC06-11NC06
- DOI
  10.7567/jjap.52.11nc06
- NAID
  210000143109
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Reactions of Plasma with Self-Assemble Monolayer for plasma-bio application2014
- Author(s)
  Naoki Maruno, Yuta Yoshida, Yujiro Taniguchi, Shohei Yagi, Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Proceedings of 8th International conference on reactive plasmas
  
  Volume: １
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-25104720
[Journal Article] Recent Trends of Plasma Engineering2014
- Author(s)
  篠原正典, 金載浩
- Journal Title
  
  IEEJ Transactions on Fundamentals and Materials
  
  Volume: 134 Issue: 1 Pages: 41-46
- DOI
  10.1541/ieejfms.134.41
- NAID
  130003382669
- ISSN
  0385-4205, 1347-5533
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Infrared spectroscopic study on deposition process of the amorphous carbon film with benzene molecule as a source in plasma enhanced chemical vapor deposition2014
- Author(s)
  Masanori Shinohara, Yujiro Taniguchi, Yuya Takaki, Shohei Yagi, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  JPS Conference. Proceedings
  
  Volume: 1 Pages: 15081-15081
- DOI
  10.7566/jpscp.1.015081
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-25104720
[Journal Article] シリコン表面のSi-Hの結合の赤外分光解析2014
- Author(s)
  篠原正典，木村康男，庭野道夫，松田良信，藤山寛
- Journal Title
  
  プラズマ・核融合学会誌
  
  Volume: 91 Pages: 329-335
- Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PUBLICLY-25104720
[Journal Article] Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy2014
- Author(s)
  Masanori Shinohara, Yujiro Taniguchi, Yuya Takaki, Yoshinobu Matsuda, Hiroshi Fujiyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 9 Pages: 096202-096202
- DOI
  10.7567/jjap.53.096202
- NAID
  210000144458
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] 吉田裕太,丸野尚紀,篠原正典,松田良信,藤山寛2013
- Author(s)
  吉田裕太,丸野尚紀,篠原正典,松田良信,藤山寛自己組織化膜と液中プラズマとの反応の赤外分光解
- Journal Title
  
  電気学会プラズマ研究会資料
  
  Volume: PST-13-086～103 Pages: 91-94
- Data Source
  KAKENHI-PUBLICLY-24110716
[Journal Article] 自己組織化膜と液中プラズマとの反応の赤外分光解析2013
- Author(s)
  吉田裕太，丸野尚紀，篠原正典，松田良信，藤山寛
- Journal Title
  
  電気学会プラズマ研究会資料
  
  Volume: PST-13-103 Pages: 91-94
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry2013
- Author(s)
  M. Shinohara, Y. Takami, S. Takabayashi, A. Oda, Y. Matsuda, H. Fujiyama
- Journal Title
  
  IEEE Trans. Plasma Sci.
  
  Volume: 41 Issue: 8 Pages: 1878-1883
- DOI
  10.1109/tps.2013.2263850
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560325, KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144, KAKENHI-PUBLICLY-25104720
[Journal Article] Effects of the surface bond states in as-deposited DLC films on the incorporation of nitrogen and oxygen atoms into the DLC films2012
- Author(s)
  Y. Nitta, K. Okamoto, T. Nakatani, M. Shinohara
- Journal Title
  
  IEEE Transactions of Plasma Science
  
  Volume: 40 Issue: 8 Pages: 2073-2078
- DOI
  10.1109/tps.2012.2203613
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027, KAKENHI-PUBLICLY-22110511, KAKENHI-PROJECT-23654203, KAKENHI-PROJECT-24340144
[Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析～気相プラズマから液中プラズマ～2012
- Author(s)
  篠原正典，松田良信，藤山　寛
- Journal Title
  
  化学工業
  
  Volume: 63 Pages: 942-946
- Data Source
  KAKENHI-PUBLICLY-22110511
[Journal Article] Investigation on Reactions of Hydrogen Plasma with Si surface, using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS)2012
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyama
- Journal Title
  
  Proceeding of IC－PLANTS2012
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析～気相プラズマから液中プラズマ～2012
- Author(s)
  篠原正典,松田良信,藤山寛
- Journal Title
  
  化学工業
  
  Volume: 63 Pages: 942-946
- Data Source
  KAKENHI-PROJECT-24340144
[Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析～気相プラズマから液中プラズマ～2012
- Author(s)
  篠原正典，松田良信，藤山　寛
- Journal Title
  
  化学工業
  
  Volume: 63 Pages: 942-946
- Data Source
  KAKENHI-PUBLICLY-24110716
[Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析～気相プラズマから液中プラズマ～2012
- Author(s)
  篠原正典，松田良信，藤山　寛
- Journal Title
  
  化学工業
  
  Volume: 63 Pages: 942-946
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Surface modification of DLC film due to oxygen plasma exposure, observed by IR absorption spectroscopy in multipleinternal- reflection geometry2012
- Author(s)
  M. Shinohara, Y. Takaki, Y. Takami, Y. Matuda, and H. Fujiyama
- Journal Title
  
  IEEE Trans. of Plasma Science
  
  Volume: Vo l . 40, No. 10 Issue: 10 Pages: 2756-2761
- DOI
  10.1109/tps.2012.2208766
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027, KAKENHI-PUBLICLY-22110511, KAKENHI-PROJECT-23654203, KAKENHI-PUBLICLY-24110716, KAKENHI-PROJECT-24340144
[Journal Article] 多重内部反射赤外吸収分光法を用いたプラズマが誘起する表面反応の解析～気相プラズマから液中プラズマ～2012
- Author(s)
  篠原正典，松田良信，藤山　寛
- Journal Title
  
  化学工業
  
  Volume: 63 Pages: 942-946
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Development of In-situ MIR-IRAS monitoring systm for reactions induced by so lution plasma generation2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Journal Title
  
  ICRERA 2012 Proceedings
  
  Volume: CD-ROM
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Hydrogenation of Si(110) Surface due to Hydrogen Plasma Exposure, investigated with In-situ MIR-IRAS2012
- Author(s)
  Y. Takmi, Y. Takaki, M. Shinohara, Y. Matsuda, H. Fujiyama
- Journal Title
  
  Proceedings of ICRERA 2012
  
  Volume: 1
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110511
[Journal Article] プラズマプロセスの赤外分光診断2011
- Author(s)
  篠原正典，高木雄也，原幸治郎，高見佳生，天野勝裕，深江陽大，松田良信，藤山寛
- Journal Title
  
  電気学会プラズマ　パルスパワー　合同研究会資料
  
  Volume: PST-11-093, PPT-11-094 Pages: 11-14
- NAID
  10030330356
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
- Journal Title
  
  Proceeding of The 8th Asian-European Internationala Conference on Plasma Surface Engineering (AEPSE-2011)
  
  Volume: 1 Pages: 345-345
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Infrared Spectroscopic Study on a Reaction of Hydrogen Plasma with Si(110) surface2011
- Author(s)
  Masanori Shinohara, 他5名
- Journal Title
  
  Transactions of MRS-Japan
  
  Volume: (in press)
- NAID
  130003399004
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110511
[Journal Article] プラズマが誘起する表面反応の赤外分光解析2011
- Author(s)
  篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山　寛
- Journal Title
  
  電気学会プラズマ研究会資料
  
  Volume: PST-11-069, Pages: 31-34
- NAID
  10029502639
- Data Source
  KAKENHI-PROJECT-23654203
[Journal Article] Infrared Spectroscopic Study on a Reaction of Hydrogen Plasma with Si(110) surface2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyama,
- Journal Title
  
  Transactions of MRS-Japan
  
  Volume: 36 Pages: 491-494
- NAID
  130003399004
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110511
[Journal Article] Difference of deposition process of an amorphous carbon film due to source gases2010
- Author(s)
  Masanori Shinohara, 他
- Journal Title
  
  Thin Solid Films 518
  
  Pages: 3497-3501
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] 重水素プラズマとアモルファス炭素薄膜の表面反応の「その場」「実時間」計測2010
- Author(s)
  河上貴聡、原幸治郎、篠原正典、藤山寛、松田良信
- Journal Title
  
  プラズマ・核融合学会九州・山口・沖縄支部支部会論文集
  
  Volume: 1 Pages: 11-12
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy2010
- Author(s)
  M. Shinohara, H. Kawazoe, T. Kawakami, T. Inayoshi, Y. Matuda, and H. Fujiyama, Y. Nitta, and T. Nakatani
- Journal Title
  
  Trans. of MRS-Japan
  
  Volume: Vol. 35, No. 3 Pages: 563-566
- NAID
  130004676329
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Difference of deposition process of an amorphous carbon film due to source gases2010
- Author(s)
  M.Shinohara, 他7名(1番目)
- Journal Title
  
  Thin Solid Films Vol.518
  
  Pages: 3497-3501
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] 酸素プラズマによるアモルファス炭素膜の酸化過程における基板温度依存性2010
- Author(s)
  河上貴聡、原幸治郎、篠原正典、松田良信、藤山寛
- Journal Title
  
  応用物理学会九州支部学術講演会予稿集
  
  Volume: 1 Pages: 96-96
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma Investigated with Infrared Spectroscopy2010
- Author(s)
  M.Shinohara, 他7名(1番目)
- Journal Title
  
  Trans.of MRS-Japan vol.35
  
  Pages: 563-566
- NAID
  130004676329
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Difference of deposition process of an amorphous carbon film due to source gases2010
- Author(s)
  M.Shinohara, 他
- Journal Title
  
  Thin Solid Films
  
  Volume: 518 Pages: 3497-350
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] アモルファス炭素膜のプラズマ気相化学堆積過程の観察2010
- Author(s)
  篠原正典
- Journal Title
  
  表面科学 31
  
  Pages: 156-161
- NAID
  10026319645
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Reaction of Oxygen Plasma with Amorphous Carbon Films2010
- Author(s)
  M.Shinohara, et al.
- Journal Title
  
  日本MRS学術シンポジウム予稿集
  
  Volume: 1
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Difference of deposition process of an amorphous carbon film due to source gases2010
- Author(s)
  M. Shinohara, H. Kawazoe, T. Inayoshi, T. Kawakami, Y. Matsuda, H. Fujiyama, Y. Nitta, and T. Nakatani
- Journal Title
  
  Thin Solid Films
  
  Volume: Vol. 518, No. 13 Issue: 13 Pages: 3497-3501
- DOI
  10.1016/j.tsf.2009.11.033
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] アセチレンプラズマを用いたアモルファス炭素膜の成膜過程の赤外分光解析2010
- Author(s)
  篠原正典, 他
- Journal Title
  
  表面科学
  
  Volume: 31 Pages: 400-404
- NAID
  10026546055
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy2010
- Author(s)
  M.Shinohara, 他
- Journal Title
  
  Transactions of MRS-Japan
  
  Volume: 35 Pages: 563-566
- NAID
  130004676329
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Infrared Spectroscopic Study on Hydrogen Plasma Induced Surface Reaction2010
- Author(s)
  Masanori Shinohara, 他7名
- Journal Title
  
  Proceedings of IEEE TENCON 2010
  
  Pages: 1948-1950
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-22110511
[Journal Article] Infrared Spectroscopic Study on Hydrogen Plasma Induced Surface Reaction2010
- Author(s)
  M.Shinohara, 他7名(1番目)
- Journal Title
  
  Proceedings of TENCON 2010
  
  Pages: 1948-1950
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] アセチレンプラズマを用いたアモルファス炭素膜の成膜過程の赤外分光解析2010
- Author(s)
  篠原正典, 他8名(1番目)
- Journal Title
  
  表面科学 Vol.31
  
  Pages: 400-404
- NAID
  10026546055
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] ubstrate temperature effects on amorphous carbon film growth, Investigated by infrared spectroscopy in multiple internal reflection geometry2009
- Author(s)
  M. Shinohara, K. Cho, Y. Matsuda, T. Inayoshi, H. Kawazoe, H. Fujiyama, Y. Nitta, and T. Nakatani
- Journal Title
  
  J. of Vac. Sci. and Technol. A
  
  Volume: Vol. 27, No. 4 Issue: 4 Pages: 813-817
- DOI
  10.1116/1.3077278
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Influence of amorphous carbon film deposition on source gases2009
- Author(s)
  Masanori Shinohara,(他6名)
- Journal Title
  
  プラズマ科学シンポジウム/第26回プラズマプロセス研究会プロシーデイングス 1
  
  Pages: 216-217
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry2009
- Author(s)
  Masanori Shinohara, 他
- Journal Title
  
  Journal of Vacuum Science and Technologies A 27
  
  Pages: 613-817
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry2009
- Author(s)
  M.Shinohara, 他7名(1番目)
- Journal Title
  
  J.Vac.Sci.and Technol.A Vol.27
  
  Pages: 813-817
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] アモルファス炭素膜の成膜機構2008
- Author(s)
  篠原正典、他3名
- Journal Title
  
  電気学会プラズマ研究会資料2008/7/4-5 PST-08-39
  
  Pages: 9-12
- NAID
  10025666837
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Plasma-Induced Subsurface Reactions in Plasma Processing for Bio-annlication2008
- Author(s)
  H. Fujiyama and M. Shinohara
- Journal Title
  
  Proceedings of the Symposium on the Application of Plasma to Bio-Medical Engineering 1
  
  Pages: 80-83
- Data Source
  KAKENHI-PROJECT-20684027
[Journal Article] Effects of hydrogen plasma treatment on amorphous carbon films2007
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Proceedings of the 24t^<th> Symposium on Plasma Processing
  
  Pages: 261-262
- Data Source
  KAKENHI-PROJECT-18740354
[Journal Article] Investigation of evolution hydrocarbon species on a Si surface during methane plasma with and without substrate bias, using infrared spectroscopy in multiple internal reflection geometry2007
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Applied Surface Science 253
  
  Pages: 6242-6247
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18740354
[Journal Article] Plasma-Induced Subsurface Reactions in Plasma Processing2007
- Author(s)
  H. Fujiyama and M. Shinohara
- Journal Title
  
  Proceedings of the 5th Asia-Pacific International Symposium on Basics and Applications of Plasma Technology (APSPT-5) vol.1
  
  Pages: 16-19
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030013
[Journal Article] Dependence of adsorption of hydrocarbon species generated in a methane plasma on substrate temperatures2007
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Proceedings of the 24^<th> Symposium on Plasma Processing
  
  Pages: 397-398
- Data Source
  KAKENHI-PROJECT-18740354
[Journal Article] Low-Pressure Micro Plasmas Generation using Microwave in a Mirror Magnetic Field2007
- Author(s)
  A. Yukishige, T. Nakatani, M. Shinohara and H. Fujiyama
- Journal Title
  
  Proc. of the 6th Asia-Europe International Symposium on Plasma Surface Engineering vol.1
  
  Pages: 156-156
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030013
[Journal Article] Interaction of hydrogen plasma with hydrogenated amorphous carbon film, investigated by infrared spectroscopy2007
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Thin Solid Films (In press)
- Data Source
  KAKENHI-PROJECT-18740354
[Journal Article] Low-Pressure Microplasmas and Their Application to Tube Inner Coating, (2007.10)2007
- Author(s)
  Fujiyama, T. Nakatani, Y. Nitta, M. Shinohara, F. Iza and J. K. Lee
- Journal Title
  
  Proc. of International Workshop on Microplasma Tainan, Taiwan vol.1
  
  Pages: 41-41
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18030013
[Journal Article] Effects of Substrate Temperatures on Adsorption of Hydrocarbon Species Generated in Methane Plasma2007
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Transaction of MRS-J (In press)
- NAID
  130007922828
- Data Source
  KAKENHI-PROJECT-18740354
[Journal Article] Effects of Substrate Temperatures on Adsorption of Hydrocarbon Species Generated in Methane Plasma2007
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Transaction of the Materials Research Society of Japan 32
  
  Pages: 473-476
- NAID
  130007922828
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18740354
[Journal Article] Effects of Substrate Temperatures on Adsorption of Hydrocarbon Species Generated in Methane Plasma2006
- Author(s)
  M.Shinohara
- Journal Title
  
  Proceedings of the 17^<th> symposium of the Materials Research Society of Japan
  
  Pages: 189-189
- NAID
  130007922828
- Data Source
  KAKENHI-PROJECT-18740354
[Journal Article] Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy2006
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Thin Solid Films (in press)
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] In-situ/real time観察によるプラズマ中の材料堆積2006
- Author(s)
  篠原正典
- Journal Title
  
  応物シンポジウム次世代半導体のための新材料デポジション&エッチングプロセス講演資料集
  
  Pages: 37-37
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Infrared spectroscopic study of thermal annealing effects of hydrocarbon species on a Si surface exposed to methane plasma2006
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Applied Surface Science (in press)
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Controllability of bonding configurations of hydrocarbon species in amorphous carbon films2006
- Author(s)
  M.Shinohara
- Journal Title
  
  Proceedings of International Conference on Reactive Plasma
  
  Pages: 615-616
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Plasma oxidation process of silicon surfaces investigated by infrared spectroscopy2005
- Author(s)
  Masanori Shinohara 他6名
- Journal Title
  
  Journal of Advanced Oxidation Technologies Vol.8 No.1
  
  Pages: 41-46
- NAID
  10018979750
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] The 2^<nd> Harmonic ECR Low Pressure Micro Plasmas"2005
- Author(s)
  H.Fujiyama, H.Inoue, D.Kurogi, Y.Furue, M.Shinohara, Y.Matsuda
- Journal Title
  
  Proc.of the 17th International Symposium on Plasma Chemistry proceeding,
  
  Pages: 453-454
- Data Source
  KAKENHI-PROJECT-16340184
[Journal Article] Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy2005
- Author(s)
  Masanori Shinohara 他5名
- Journal Title
  
  Thin Solid films (In press)
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Narrow Tube Inner Coating by Low Pressure Micro Plasma Sputtering,2005
- Author(s)
  H.Uchida, M.Kumamoto, H.Fujiyama, M.Shinohara, Y.Matsuda
- Journal Title
  
  Proc.of the 17^<th> International Symposium on Plasma Chemistry (ISPC-17)
  
  Pages: 581-582
- Data Source
  KAKENHI-PROJECT-16340184
[Journal Article] Growth mechanisms of carbon related films deposited by a plasma CVD method and application of the films to DNA identification2005
- Author(s)
  M.Shinohara
- Journal Title
  
  Proceedings of the 16^<th> symposium of the Materials Research Society of Japan
  
  Pages: 173-173
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Oxidation of the hydrogen terminated silicon surfaces by oxygen plasma investigated by in-situ infrared spectroscopy2005
- Author(s)
  Masanori Shinohara 他6名
- Journal Title
  
  Thin Solid films Vol.475 No.1-2
  
  Pages: 128-132
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Pulsed Sputter-Coating of Inside Wall of Narrow Tube by the 2nd Harmonic ECR Plasmas2005
- Author(s)
  H.Fujiyama, H.Uchida, M.Kumamoto, Y.Nitta, T.Nakatani, M.Shinohara, Y.Matsuda
- Journal Title
  
  Proc.5th Asian-European Int.Conf.on Plasma Surface Engineering
- Data Source
  KAKENHI-PROJECT-16340184
[Journal Article] 酸素プラズマ中でのSi表面水素の挙動2004
- Author(s)
  篠原正典, 他6名
- Journal Title
  
  表面科学 Vol.25 No.9
  
  Pages: 541-547
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Oxygen-plasma induced hydrogen desorption from hydrogen-terminated Si(100) and (111) surfaces investigated by infrared spectroscopy2004
- Author(s)
  Masanori Shinohara 他6名
- Journal Title
  
  Thin Solid films vol.464-465
  
  Pages: 14-17
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] メタンプラズマCVD法による薄膜形成過程の赤外分光解析2004
- Author(s)
  柴田泰充, 篠原正典, 他4名
- Journal Title
  
  電気学会研究会資料プラズマ研究会 PST-04-70.72-81
  
  Pages: 9-12
- Data Source
  KAKENHI-PROJECT-15760023
[Journal Article] Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy
- Author(s)
  Masanori Shinohara
- Journal Title
  
  Thin Solid Films (In press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18740354
[Patent] ダイヤモンド様薄膜、その製造方法及び製造装置2012
- Inventor(s)
  篠原正典,松田良信,藤山寛,中谷達行,岡本圭司
- Industrial Property Rights Holder
  国立大学法人長崎大学トーヨーエイテック株式会社
- Filing Date
  2012-09-24
- Data Source
  KAKENHI-PROJECT-20684027
[Patent] ダイヤモンド様薄膜、その製造方法及び製造装置2012
- Inventor(s)
  篠原正典　他4名
- Industrial Property Rights Holder
  篠原正典　他4名
- Filing Date
  2012
- Data Source
  KAKENHI-PROJECT-23654203
[Patent] ダイヤモンド様薄膜2012
- Inventor(s)
  篠原正典，仲谷達行，他
- Industrial Property Rights Holder
  長崎大学，(株)トーヨーエイテック
- Industrial Property Rights Type
  特許
- Filing Date
  2012-03-24
- Acquisition Date
  2012-09-28
- Data Source
  KAKENHI-PUBLICLY-22110511
[Patent] ダイヤモンド様薄膜長崎大学，(株)トーヨーエイテック2012
- Inventor(s)
  篠原正典，仲谷達行，他
- Industrial Property Rights Holder
  長崎大学，(株)トーヨーエイテック
- Industrial Property Rights Type
  特許
- Filing Date
  2012-03-07
- Acquisition Date
  2012-09-24
- Data Source
  KAKENHI-PROJECT-20684027
[Patent] 親水性炭素質膜の製造方法及び製造装置2010
- Inventor(s)
  中谷達行,新田祐樹,篠原正典,藤山寛
- Industrial Property Rights Holder
  国立大学法人長崎大学トーヨーエイテック株式会社
- Industrial Property Number
  2009-115707
- Filing Date
  2010-05-12
- Data Source
  KAKENHI-PROJECT-20684027
[Patent] 親水性炭素質膜の製造方法及び製造装置2009
- Inventor(s)
  中谷達之、新田祐樹、篠原正典、藤山寛
- Industrial Property Rights Holder
  長崎大学、トーヨーエイテック(株)
- Industrial Property Number
  2009-115707
- Filing Date
  2009-05-12
- Data Source
  KAKENHI-PROJECT-20684027
[Patent] 親水性炭素質膜の製造方法及び製造装置2009
- Inventor(s)
  篠原正典, 他
- Industrial Property Rights Holder
  篠原正典, 他
- Industrial Property Number
  2009-115707
- Filing Date
  2009-05-12
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] スチレン添加大電力パルススパッタリング(HPPS)プラズマで堆積させた炭素膜の解析2024
- Author(s)
  大石侑叶、桒田篤哉、東田遼平、篠原正典、前田文彦、田中諭志、松本　貴士
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] スチレン添加大電力パルススパッタリング(HPPS)プラズマで堆積させた炭素膜の解析2024
- Author(s)
  大石侑叶、桒田篤哉、東田遼平、篠原正典、前田文彦、田中諭志、松本　貴士
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] テトラメチルシランプラズマを用いた膜堆積過程の赤外分光解析2024
- Author(s)
  桒田篤哉、大石侑叶、東田遼平、篠原正典
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] テトラメチルシランプラズマを用いた膜堆積過程の赤外分光解析2024
- Author(s)
  桒田篤哉、大石侑叶、東田遼平、篠原正典
- Organizer
  第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Si含有炭化水素分子を用いたプラズマ膜堆積の反応解析2023
- Author(s)
  桒田篤哉、大石侑叶、東田遼平、篠原正典
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Graphene Deposition with High Power Pulse Sputtering (HPPS) Plasma2023
- Author(s)
  Yuto Ooishi, Atsuya Kuwada, Fumihiko Maeda, Masanori Shinohara, Satoshi Tanaka, and Takashi Matsumoto
- Organizer
  Advanced Metallization Conference 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] プラズマが誘起する表面反応と成膜2023
- Author(s)
  篠原正典、桒田篤哉、大石侑叶
- Organizer
  第39回九州・山口プラズマ研究会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Comparison of Graphene on Si(110) with Styrene plasma Generated by High-Power Pulsed Sputtering Plasma, with that on Si(100)2023
- Author(s)
  Yuto Ooishi, Atuya Kuwada, Fumihiko Maeda, and Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Si含有炭化水素分子を用いたプラズマ膜堆積の反応解析2023
- Author(s)
  桒田篤哉、大石侑叶、東田遼平、篠原正典
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Deposition process of He-added Acetylene plasma, Investigated with Infrared Spectroscopy2023
- Author(s)
  Atsuya Kuwada, Tatuo Nakai, Yuto Ooishi, Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Graphene Deposition with High Power Pulse Sputtering (HPPS) Plasma2023
- Author(s)
  Yuto Ooishi, Atsuya Kuwada, Fumihiko Maeda, Masanori Shinohara, Satoshi Tanaka, and Takashi Matsumoto
- Organizer
  Advanced Metallization Conference 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Effects of He dilution on chemical states in amorphous carbon films deposited by acetylene plasma2023
- Author(s)
  A. Kuwada, Y. Ooishi, M. Shinohara, T. Matsumoto and S. Tanaka
- Organizer
  The 44th International Symposium on Dry Process (DPS2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Infrared Spectroscopic Study on Amorphous carbon Deposition Process during Acetylene Plasma2023
- Author(s)
  Atsuya Kuwada, Tatuo Nakai, Yuto Ooishi, and Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] HPPSプラズマによるSi基板へのグラフェンの直接成膜2023
- Author(s)
  大石侑叶、桒田篤哉、前田文彦、篠原正典、田中諭志、松本貴士
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] He添加アセチレンプラズマ中でのアモルファス炭素膜の堆積過程の検討2023
- Author(s)
  桒田篤哉、大石侑叶、篠原正典、田中諭、松本貴士
- Organizer
  日本表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] メチルアセチレンプラズマにおけるアモルファス炭素の成膜過程の赤外分光計測2023
- Author(s)
  桒田篤哉、大石侑叶、篠原正典、田中諭志、松本貴士
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] He添加アセチレンプラズマ中でのアモルファス炭素膜の堆積過程の検討2023
- Author(s)
  桒田篤哉、大石侑叶、篠原正典、田中諭、松本貴士
- Organizer
  日本表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] 大電力パルススパッタリング(HPPS)を用いたグラフェン堆積のプラズマ供給電圧依存性2023
- Author(s)
  大石侑叶、桒田篤哉、篠原正典、前田文彦、田中諭志、松本貴士
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Deposition Process with Methyl-acetylene plasma, Investigated with Infrared Spectroscopy2023
- Author(s)
  A. Kuwada, Y. Ooishi, M. Shinohara, T. Matsumoto and S. Tanaka
- Organizer
  The 44th International Symposium on Dry Process (DPS2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Deposition of amorphous oxidized carbon films with PECVD using ether molecules as source molecules.2023
- Author(s)
  Atsuya Kuwada, Tasuo Nakai, Yuya Ooishi, Masanori Shinohara
- Organizer
  2023年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] 大電力パルススパッタリング(HPPS)を用いたグラフェン堆積2023
- Author(s)
  大石侑叶、桒田篤哉、篠原正典、前田文彦、田中諭、松本貴士
- Organizer
  日本表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] 大電力パルススパッタリング(HPPS)を用いたグラフェン堆積2023
- Author(s)
  大石侑叶、桒田篤哉、篠原正典、前田文彦、田中諭、松本貴士
- Organizer
  日本表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Deposition Process with Methyl-acetylene plasma, Investigated with Infrared Spectroscopy2023
- Author(s)
  A. Kuwada, Y. Ooishi, M. Shinohara, T. Matsumoto and S. Tanaka
- Organizer
  The 44th International Symposium on Dry Process (DPS2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Infrared Spectroscopic Study on Plasma Deposition with Dimethyl-adamantane as a Source, and Its Substrate Bias Effects2023
- Author(s)
  Atsuya Kuwada, Tatuo Nakai, Yuto Ooishi, Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Deposition of Graphene on Si with HPPS Plasma, using di-isopropyl-ether as carbon source2023
- Author(s)
  Yuto Ooishi, Atuya Kuwada, Fumihiko Maeda, and Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] HPPSプラズマによるSi基板へのグラフェンの直接成膜2023
- Author(s)
  大石侑叶、桒田篤哉、前田文彦、篠原正典、田中諭志、松本貴士
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第27回支部大会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Infrared Spectroscopic Study on Amorphous carbon Deposition Process during Acetylene Plasma2023
- Author(s)
  Atsuya Kuwada, Tatuo Nakai, Yuto Ooishi, and Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Deposition process of He-added Acetylene plasma, Investigated with Infrared Spectroscopy2023
- Author(s)
  Atsuya Kuwada, Tatuo Nakai, Yuto Ooishi, Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] プラズマが誘起する表面反応と成膜2023
- Author(s)
  篠原正典、桒田篤哉、大石侑叶
- Organizer
  第39回九州・山口プラズマ研究会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] 大電力パルススパッタリング(HPPS)を用いたグラフェン堆積のプラズマ供給電圧依存性2023
- Author(s)
  大石侑叶、桒田篤哉、篠原正典、前田文彦、田中諭志、松本貴士
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Infrared Spectroscopic Study on Plasma Deposition with Dimethyl-adamantane as a Source, and Its Substrate Bias Effects2023
- Author(s)
  Atsuya Kuwada, Tatuo Nakai, Yuto Ooishi, Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Deposition of Graphene on Si with HPPS Plasma, using di-isopropyl-ether as carbon source2023
- Author(s)
  Yuto Ooishi, Atuya Kuwada, Fumihiko Maeda, and Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Comparison of Graphene on Si(110) with Styrene plasma Generated by High-Power Pulsed Sputtering Plasma, with that on Si(100)2023
- Author(s)
  Yuto Ooishi, Atuya Kuwada, Fumihiko Maeda, and Masanori Shinohara, Takashi Matsumoto, and Satoshi Tanaka
- Organizer
  13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] メチルアセチレンプラズマにおけるアモルファス炭素の成膜過程の赤外分光計測2023
- Author(s)
  桒田篤哉、大石侑叶、篠原正典、田中諭志、松本貴士
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] Effects of He dilution on chemical states in amorphous carbon films deposited by acetylene plasma2023
- Author(s)
  A. Kuwada, Y. Ooishi, M. Shinohara, T. Matsumoto and S. Tanaka
- Organizer
  The 44th International Symposium on Dry Process (DPS2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K03372
[Presentation] アセチレンプラズマを用いた膜堆積におけるプラズマ供給電力の効果2023
- Author(s)
  中居辰也、桒田篤哉、大石侑叶、佐々本凌、篠原正典、田中諭志、松本貴士
- Organizer
  応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] アセチレンプラズマにより堆積した膜の化学結合状態のプラズマ供給電力依存2022
- Author(s)
  中居辰夫, 大石侑叶, 桒田篤哉, 佐々本凌, 篠原正典, 田中諭志, 松本貴士
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] アセチレンプラズマ中での基板バイアス効果の赤外分光計測2022
- Author(s)
  中居辰夫，桑田篤哉，佐々本凌，篠原正典，松本貴士，田中諭志
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] プラズマ化学気相体積中の体積位置による膜中の化学結合状態の変化2022
- Author(s)
  石侑叶, 桒田篤哉, 中居辰夫, 佐々本凌, 篠原正典, 田中諭志, 松本貴士
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Effect of substrate position on chemical states of the deposited films with benzene as a source during plasma CVD2022
- Author(s)
  篠原正典, 中居辰夫, 桒田篤哉, 佐々本凌
- Organizer
  The 22nd International Vacuum Congress (IVC-22)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] アセチレンプラズマ中でのアモルファス炭素膜堆積過程の赤外分光解析：基板バイアス効果2022
- Author(s)
  中居辰夫、桒田篤哉、佐々本凌、篠原正典、田中諭志、松本貴士
- Organizer
  表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Effect of helium as diluting gas on film deposition process during acetylene plasma2022
- Author(s)
  桒田篤哉, 中居辰夫, 佐々本凌, 篠原正典, 松本貴士, 田中諭志
- Organizer
  The 22nd International Vacuum Congress (IVC-22)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] IR spectroscopic study of film deposition process during acetylene plasma2022
- Author(s)
  中居辰夫, 桒田篤哉, 佐々本凌, 篠原正典, 松本貴士, 田中諭志
- Organizer
  The 22nd International Vacuum Congress (IVC-22)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] He 添加アセチレンプラズマ中でのアモルファス炭素膜堆積の赤外分光解析：He の添加効果2022
- Author(s)
  桒田篤哉、中居辰夫、佐々本凌、篠原正典、田中諭志、松本貴士
- Organizer
  表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Decomposition of Benzene Molecules during Plasma2022
- Author(s)
  T. Nakai, A. Kuwada, R. Sasamoto, M. Shinohara
- Organizer
  6.IUMRS-ICYRAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] ヘリウム添加アセチレンプラズマにおけるヘリウム/アセチレン比による堆積膜の化学結合状態の変化2022
- Author(s)
  桒田篤哉, 中居辰夫, 大石侑叶, 佐々本凌, 篠原正典, 田中諭志, 松本貴士
- Organizer
  プラズマ・核融合学会九州・沖縄・山口支部第26回支部大会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Analysis of Amorphous carbon film deposition process with FTIR2021
- Author(s)
  T. Nakai, A. Kuwada, R. Sasamoto, M. Shinohara
- Organizer
  The Material Research Meeting 2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] アセチレンプラズマ中でのアモルファス炭素膜の成膜メカニズムの検討2021
- Author(s)
  中居辰夫，桑田篤哉，佐々本凌，篠原正典
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] 炭化水素プラズマにより放電管内に堆積されたアモルファス状の炭素膜のFTIR 計測とプロセス予想2021
- Author(s)
  桑田篤哉，中居辰夫，白水暁大，佐々本凌，篠原正典
- Organizer
  日本表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] 赤外分光法によるプロセス計測2021
- Author(s)
  篠原正典
- Organizer
  トライボロジー研究会
- Invited
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] アセチレンプラズマを用いたアモルファス炭素膜の堆積過程2021
- Author(s)
  中居辰夫，桑田篤哉，白水暁大，佐々本凌，篠原正典
- Organizer
  日本表面真空学会九州支部学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] ベンゼンプラズマにより堆積されたアモルファス炭素膜の化学結合状態に及ぼす基板と原料供給位置の効果2021
- Author(s)
  篠原正典，仲居辰夫，佐々本凌，田中諭志，松本貴士
- Organizer
  第68回応用学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] ベンゼンプラズマによる膜堆積反応の基板温度依存性2020
- Author(s)
  篠原正典，佐々本凌，猪原武士，柳生義人，大島多美子，川崎　仁晴
- Organizer
  第81回応用学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] Infrared spectroscopic study of control of plasma induced surface reactions during plasma chemical vapor deposition with ether molecules as source molecules2020
- Author(s)
  Masanori Shinohara, Ryo Sasamoto, Takeshi Ihara, Yoshihito Yagyu, Tamiko Ohshima, Hiroharu Kawasaki
- Organizer
  4th Asia-Pacific Conference on Plasma Physics,
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K03920
[Presentation] 炭化水素プラズマによるアモルファス炭素膜の堆積反応2018
- Author(s)
  篠原正典，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  第35回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Hydrophilic hydrocarbon film deposited with one-step process2018
- Author(s)
  Masanori Shinohara, Takeshi Ihara, Yoshihito Yagyu, Tamiko Ohshima, Hiroharu Kawasaki
- Organizer
  2nd Asian-PacificConference on Plasma Physics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] エチレンプラズマ中でのアモルファス炭素膜の堆積反応の赤外分光計測，他の炭化水素プラズマとの反応との比較2018
- Author(s)
  篠原正典，冨永泰佑，下村勇登，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Consideration of peeling-off of amorphous carbon film, from changes in chemical states of the film during its deposition2018
- Author(s)
  M. Shinohara, T. Ihara, Y. Yagyu, T. Ohshima and H. Kawasaki
- Organizer
  4th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Deposition of hydrophilic amorphous carbon film, with ether molecules as a source2018
- Author(s)
  M. Shinohara, T. Ihara, Y. Yagyu, T. Ohshima and H. Kawasaki,
- Organizer
  14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] 原料分子による膜中の化学結合状態の制御2018
- Author(s)
  篠原正典,猪原武士,柳生義人,大島多美子,川崎仁晴
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Carbon Related Film Deposition with Unbalanced Magnetron Sputtering2018
- Author(s)
  M. Shinohara, K. Azuma, T. Ihara, Y. Yagyu, T. Ohshima and H. Kawasaki
- Organizer
  14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Hydrocarbon plasma induced surface reaction, considered with multiple-internal-reflection infrared absorption spectroscopy2018
- Author(s)
  Masanori Shinohara, Takeshi Ihara, Yoshihito Yagyu, Tamiko Ohshima, Hiroharu Kawasaki
- Organizer
  2nd Asian-PacificConference on Plasma Physics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] 原料分子によるプラズマプロセスの制御について2018
- Author(s)
  篠原正典，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  プラズマ・核融合学会　九州・沖縄・山口支部第22回支部大会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] エーテルを用いたプラズマ化学気相堆積過程の赤外分光計測2018
- Author(s)
  篠原正典，冨永泰佑，下村勇登，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] 赤外分光法によるプラズマ反応解析2018
- Author(s)
  篠原正典，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  第35回プラズマ・核融合学会年会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Deposition Process of Amorphous Carbon Film during Ethylene Plasma, Compared with the Process during Methane Plasma2018
- Author(s)
  M. Shinohara, T. Tominaga, H. Shimomura, T. Ihara, Y. Yagyu, T. Ohshima, H. Kawasaki
- Organizer
  International Symposium on Dry Process
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] 炭素化水素プラズマによる堆積反応の赤外吸収分光計測2017
- Author(s)
  篠原正典，猪原武士,柳生義人，大島多美子，川崎仁晴
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] エタノール中でのプラズマ生成による膜堆積の反応初期の赤外分光計測2017
- Author(s)
  末永尚己，川田千春，篠原正典，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  プラズマ・各融合学会　九州・沖縄・山口支部　第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] プラズマ照射表面の ATR 分光2017
- Author(s)
  篠原正典
- Organizer
  第 27 回応用物理学会プラズマエレクトロニス分科会新領域研究会
- Invited
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] 赤外分光計測によるエチレンプラズマとメタンプラズマの堆積過程の比較2017
- Author(s)
  冨永泰佑，下村勇登，篠原正典，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  プラズマ・各融合学会　九州・沖縄・山口支部　第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] 分子量の大きい有機分子を原料としたプラズマCVD過程の赤外分光計測2017
- Author(s)
  下村勇登，冨永泰佑，篠原正典，猪原武士，柳生義人，大島多美子，川崎仁晴
- Organizer
  プラズマ・各融合学会　九州・沖縄・山口支部　第21回支部大会
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Infrared spectroscopic study on interaction of plasma with Amyloid beta protein2016
- Author(s)
  M. Shinohara, T. Imada, Y. Nakano and Y. Matsuda
- Organizer
  日本MRS
- Place of Presentation
  横浜情報文化センター　()神奈川県横浜市
- Year and Date
  2016-12-19
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] 多重内部反射赤外吸収分光法を用いたプラズマ－表面相互作用の解析2016
- Author(s)
  篠原正典、筑紫康弘、松田良信
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  対馬市交流センター　(長崎県対馬市)
- Year and Date
  2016-12-03
- Data Source
  KAKENHI-PROJECT-16K04994
[Presentation] Infrared spectroscopy of hydrogenation of Si surface exposed to hydrogen plasma2014
- Author(s)
  M. Shinohara, N. Maruno, S. Yagi, Y. Taniguchi, T. Tsumura, Y. Matsuda, H. Fujiyama
- Organizer
  8th International Conference on Reactive Plasmas
- Place of Presentation
  福岡国際会議場 (福岡県福岡市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] 自己組織化膜とプラズマの反応過程の赤外分光解析2014
- Author(s)
  丸野尚紀，吉田裕太，谷口雄二郎，伊東和樹，中野大和，篠原正典，松田良信，藤山寛
- Organizer
  九州薄膜・表面研究会
- Place of Presentation
  福岡教育大学 (宗像市)
- Year and Date
  2014-06-07
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] プラズマ－シリコン表面相互作用で誘起される欠陥生成メカニズムの解明,Ⅳ族元素を基盤とした膜とプラズマとの反応解析によるプラズマ応用プロセスの最適化2014
- Author(s)
  篠原正典，丸野　尚紀，吉田　裕太，堺　廣治，谷口　雄二郎，伊東和樹，中野　大和，松田　良信
- Organizer
  第18回応用物理学会プラズマエレクトロニクス分科会プラズマ新領域研究会
- Place of Presentation
  名古屋大学東山キャンパス (名古屋市)
- Year and Date
  2014-06-14
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 液中プラズマが誘起する自己組織化膜の構造変化の赤外分光解析2014
- Author(s)
  吉田裕太　丸野尚紀　篠原正典　松田良信　藤山寛
- Organizer
  九州薄膜・表面研究会
- Place of Presentation
  福岡教育大学 (宗像市)
- Year and Date
  2014-06-07
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] 自己組織化単分子膜とプラズマの反応の赤外分光解析2013
- Author(s)
  丸野尚紀，谷口雄二郎，吉田裕太，八木翔平，篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  長崎大学 (長崎県長崎市)
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] Carbon-related particle formation with plasma generated in liquid phase2013
- Author(s)
  Musab Timan , M. Shinohara, Y. Yoshida, Y. Matsuda and H. Fujiyama
- Organizer
  日本MRSシンポジウム
- Place of Presentation
  横浜市開港記念会館 (神奈川県横浜市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Hydrogenation process of Si substrate due to hydrogen plasma exposure, investigated with infrared spectroscopy2013
- Author(s)
  Naoki Maruno, Yujiro Taniguchi, Takayoshi Tsumura, Masanori Shinohara, Yoshinobu Matsuda and Hiroshi Fujiyama
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering
- Place of Presentation
  ラマダホテル済州 (韓国済州市)
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] Infared spectroscopic study on changes of chemical states of SAM films due to plasma exposure2013
- Author(s)
  Naoki Maruno, Yuta Yoshida, Masanori Shinohara, Yoshinobu, Matsuda and Hiroshi Fujiyama
- Organizer
  2013 JSAP-MRSジョイントシンポジウム
- Place of Presentation
  同志社大学 (京都府京都市)
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] An infrared spectroscopic study on deposition process　of amorphous carbon films using Benzene as a source molecule2013
- Author(s)
  Y. Taniguchi, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  The 12th Asia Pacific Physics Conference
- Place of Presentation
  幕張メッセ (千葉県千葉市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Reaction of plasmas with a self-assembly monolayer film, investigated with infrared spectroscopy2013
- Author(s)
  Yuta Yoshida, Noaki Maruno, Yujiro Taniguchi, Masanori Shinohara, Yoshinobu Matsuda and Hiroshi Fujiyama
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering
- Place of Presentation
  ラマダホテル済州 (韓国済州市)
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] Infrared　spectroscopy of reactions induced by plasma2013
- Author(s)
  Masanori Shinohara, Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda, Hiroshi Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所 (岐阜県土岐市)
- Invited
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Development of MIR-IRAS monitoring system for solution plasmas2013
- Author(s)
  A. Fukae, K. Amano, Y. Takaki, Y. Takami, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  ISPLASMA2013
- Place of Presentation
  Nagoya-Japan
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Infrared　spectroscopy of reactions induced by plasma2013
- Author(s)
  Masanori Shinohara, Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda, Hiroshi Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所 (岐阜県土岐市)
- Invited
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] 自己組織化膜と液中プラズマとの反応の赤外分光解析2013
- Author(s)
  吉田裕太，丸野尚紀，篠原正典，松田良信，藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  長崎大学 (長崎県長崎市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Carbon-related particle formation with plasma generated in liquid phas2013
- Author(s)
  Musab Timan , M. Shinohara, Y. Yoshida, Y. Matsuda and H. Fujiyama
- Organizer
  Symposium of MTS-Japan
- Place of Presentation
  横浜市開港記念会館，神奈川県横浜市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Infrared Spectroscopic Study on Reaction Process during Plasma Enhanced Chemical Vapor Deposition with Hydrocarbon Molecules as Source Gases2013
- Author(s)
  S. Yagi, Y. Takaki, Y. Taniguchi, M. Shinohara, Y.Matsuda and H. Fujiyama
- Organizer
  the 12th Joint Symposium of Jeju National University and Nagasaki University on Science and Technology
- Place of Presentation
  ラマダホテル済州 (韓国済州市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared　spectroscopy of reactions induced by plasma2013
- Author(s)
  M. Shinohara, S. Yagi, Y. Taniguchi, N. Maruno, Y. Yoshida, Y. Matsuda, H. Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所 (岐阜県土岐市)
- Invited
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Development of MIR-IRAS monitoring system for solution plasmas2013
- Author(s)
  A. Fukae, K. Amano, Y. Takaki, Y. Takami, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  IS Plasma 2013
- Place of Presentation
  名古屋大学 (愛知県名古屋市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Infrared spectroscopic study of the reaction between bio related molecules and air-pressureplasma2013
- Author(s)
  Naoki Maruno, Yuta Yoshida, Masanori Shinohara, Yoshinobu Matsuda,and Hiroshi Fujiyama
- Organizer
  The 26th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS
- Place of Presentation
  九州大学医学部百年講堂，福岡県福岡市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 自己組織化膜と液中プラズマとの反応の赤外分光解析2013
- Author(s)
  吉田裕太，丸野尚紀，篠原正典，松田良信，藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  長崎大学，長崎県長崎市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Reaction of plasmas with a self-assembly monolayer film, investigated with infrared spectroscopy2013
- Author(s)
  Y. Yoshida, N. Maruno, Y. Taniguchi, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  9th Asian-European International Conference on Plasma Surface Engineering
- Place of Presentation
  ラマダホテル (韓国済州市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Infrared　spectroscopy of reactions induced by plasma2013
- Author(s)
  Masanori Shinohara, Shohei Yagi, Yujiro Taniguchi, Naoki Maruno, Yuta Yoshida, Yoshinobu Matsuda, Hiroshi Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所，岐阜県土岐市
- Invited
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Diagnostics for Plasma-Induced Surface Reactions with Infrared Spectroscopy2013
- Author(s)
  Masanori Shinohara, Yoshinobu Matsuda, and Hiroshi Fujiyama
- Organizer
  5rd International Workshop on Plasma Scientech for All Something (June 21-22, 2013, )
- Place of Presentation
  東京工業大学 (東京都目黒区))
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared spectroscopic study of the reaction between NH-terminated self-assembled monomerand solution plasma2013
- Author(s)
  Yuta Yoshida, Naoki Maruno, Masanori Shinohara, Yoshinobu Matsuda,and Hiroshi Fujiyama
- Organizer
  The 26th SYMPOSIUM ON PLASMA SCIENCE FOR MATERIALS
- Place of Presentation
  九州大学医学部百年講堂，福岡県福岡市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] ベンゼンを原料としたアモルファス状炭素膜の成膜反応の赤外分光解析2013
- Author(s)
  高木雄也,高見佳生,津村高成,八木翔平,谷口雄二郎,丸野尚紀,篠原正典,松田良信,藤山寛
- Organizer
  応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared spectroscopy of reactions induced by plasma2013
- Author(s)
  M. Shinohara, S. Yagi, Y. Taniguchi, N. Maruno, Y. Yoshida, Y. Matsuda, H. Fujiyama
- Organizer
  原子分子データのフォーラム
- Place of Presentation
  核融合科学研究所
- Invited
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Deposition and surface modification process of amorphous carbon film, investigated with infrared spectroscopy2013
- Author(s)
  Yujiro Taniguchi, Naoki Maruno, Shouhei Yagi, Masanori Shinohara, Yoshinobu Matsuda and Hiroshi Fujiyama
- Organizer
  The 9th Asian-European International Conference on Plasma Surface Engineering
- Place of Presentation
  ラマダホテル済州 (韓国済州市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] ベンゼンを原料として用いたアモルファス炭素膜の堆積過程の赤外分光解析2013
- Author(s)
  谷口　雄二郎，八木翔平，篠原正典，松田良信，藤山寛(
- Organizer
  電気学会プラズマ研究会　　9月5－7日
- Place of Presentation
  長崎大学 (長崎県長崎市)
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 燃料電池・有機デバイス材料およびバイオ応用にむけたプラズマプロセスの開発と診断2013
- Author(s)
  篠原正典，八木翔平，谷口雄二郎，丸野尚紀，吉田裕太，松田良信，藤山寛
- Organizer
  第29回九州・山口プラズマ研究会
- Place of Presentation
  クレド臼杵ホテル (大分県臼杵市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] 多重内部反射赤外吸収分光法を用いたプラズマプロセシング診断2013
- Author(s)
  天野勝裕, 八木翔平, 高木雄也, 深江陽大, 高見佳生, 津村高成, 篠原正典, 松田良信, 藤山寛
- Organizer
  第30回プラズマプロセシング研究会
- Place of Presentation
  アクトシティ浜松・研修交流センター (静岡県浜松市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Infrared spectroscopic study on plasma induced reaction on Si surface2013
- Author(s)
  Y. Takami, Y. Takaki, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  IS Plasma 2013
- Place of Presentation
  名古屋大学 (愛知県名古屋市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] エチレンを原料としたプラズマ化学気相堆積の反応計測2012
- Author(s)
  高木雄也、高見佳生、篠原正典、松田良信、藤山寛
- Organizer
  表面科学会全国大会
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 多重内部反射赤外分光法を用いた液中プラズマの反応計測法の開発2012
- Author(s)
  深江陽大、天野勝裕、篠原正典、松田良信、藤山　寛
- Organizer
  九州表面・真空研究会2012(第17回九州薄膜表面研究会)
- Place of Presentation
  佐賀放射光センター
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Development of IR monitoring system of solution plasma2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asia Pacific Conference on Plasma Science and Technology 2012
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Development of In-situ MIR-IRAS monitoring system for reactions induced by solution plasma generation2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  International Conference on Renewable Energy Researches and Applications 2012
- Place of Presentation
  長崎
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Development of In-situ MIR-IRAS monitoring systm for reactions induced by solution plasma generation2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  International Conference Renewable Energy and Related Applications
- Place of Presentation
  ベストウェスタンプレミアムホテル長崎 (長崎県長崎市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Plasma exposure effects on the behavior of hydrogen on amorphous carbon film2012
- Author(s)
  Y. Takaki, S. Yagi, Y. Takami, T. Tsumura, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asia Pacific Conference on Plasma Science and Technology
- Place of Presentation
  京都大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] エチレンプラズマを用いた炭素膜形成過程の赤外分光計測2012
- Author(s)
  高木雄也、八木翔平、高見佳生、津村高成、篠原正典、松田良信、藤山寛
- Organizer
  九州薄膜表面研究会
- Place of Presentation
  佐賀
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマの「その場」「実時間」反応計測法の開発2012
- Author(s)
  深江陽大・天野勝裕・篠原正典・松田良信・藤山　寛
- Organizer
  電気関係学会九州支部学術講演会
- Place of Presentation
  長崎大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Investigation on Reactions of Hydrogen Plasma with Si surface, using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS)2012
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyama
- Organizer
  IC－PLANTS 2012
- Place of Presentation
  Inuyama-Japan
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] 水素プラズマ-シリコンの反応の赤外分光計測2012
- Author(s)
  高見　佳生，高木　雄也，篠原　正典，松田良信，藤山　寛
- Organizer
  表面科学会全国大会
- Place of Presentation
  SendaiJapan
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] 赤外吸収分光法計測を用いたプラズマが誘起する表面反応の解析・解明2012
- Author(s)
  篠原正典, 高木雄也, 高見佳生, 深江陽大, 天野勝裕, 八木翔平, 津村高成, 松田良信, 藤山寛
- Organizer
  九州山口プラズマ研究会
- Place of Presentation
  由布院倶楽部. ( 大分県由布市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] 赤外吸収分光法を用いた液中プラズマの反応解析2012
- Author(s)
  深江陽大，天野勝裕，高木雄也，篠原正典，松田良信，藤山　寛
- Organizer
  プラズマ・核融合学会山口九州沖縄支部　第16回支部会
- Place of Presentation
  九州大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] エチレンプラズマを使ったアモルファス炭素膜堆積反応の赤外分光解析2012
- Author(s)
  高木雄也,高見佳生,八木翔平,津村高成,篠原正典,松田良信,藤山寛
- Organizer
  応用物理学会秋季学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 多重内部反射赤外吸収分光法を用いたプラズマプロセスの計測2012
- Author(s)
  篠原正典，深江陽大，天野勝裕，高見佳生，高木雄也，八木翔平，津村高成，松田良信，藤山寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  岩手大学 (岩手県盛岡市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマ誘起反応の計測2012
- Author(s)
  深江陽大、天野勝裕、高木雄也、篠原正典、松田良信、藤山　寛
- Organizer
  表面科学会全国大会
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] プラズマが誘起する表面反応の赤外分光解析2012
- Author(s)
  篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山　寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  Osaka-Japan
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Investigation on Reactions of Hydrogen Plasma with Si surface, using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS)2012
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, Y. Matsuda, and H. Fujiyam
- Organizer
  IC－PLANTS2012
- Place of Presentation
  愛知県犬山市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Plasma exposure effects on the behavior of hydrogen on amorphous carbon film2012
- Author(s)
  Y. Takaki, S. Yagi, Y. Takami, T. Tsumura, M. Shinohara, Y. Matsuda, H. Fujiyama,
- Organizer
  Asian Pacific Conference Plasma Science and Technology 2012
- Place of Presentation
  京都大学桂キャンパス (京都府京都市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Plasma exposure effects on the behavior of hydrogen on amorphous carbon film2012
- Author(s)
  Y. Takaki, S. Yagi, Y. Takami, T. Tsumura, M. Shinohara, Y. Matsuda, Hiroshi Fujiyama
- Organizer
  Asia Pscific Conference Plasma Science and Technology 2012
- Place of Presentation
  Kyoto-Japan
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 多重内部反射赤外吸収分光法を用いたプラズマプロセスの計測2012
- Author(s)
  篠原正典, 深江陽大, 天野勝裕, 高見佳生, 高木雄也, 八木翔平, 津村高成, 松田良信, 藤山寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  岩手大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] エチレンを原料としたプラズマ化学気相堆積の反応計測2012
- Author(s)
  高木雄也、高見佳生、篠原正典、松田良信、藤山寛
- Organizer
  表面科学会全国大会
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Infrared spectroscopic study of interaction of hydrogen plasma with Si surfaces2012
- Author(s)
  Y. Takami, T. Tsumura, Y. Takaki, S. Yagi, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asia Pscific Conference Plasma Science and Technology 2012
- Place of Presentation
  Kyoto-Japan
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] 赤外吸収分光法計測を用いたプラズマが誘起する表面反応の解析・解明2012
- Author(s)
  篠原正典, 高木雄也, 高見佳生, 深江陽大, 天野勝裕, 八木翔平, 津村高成, 松田良信, 藤山寛
- Organizer
  九州山口プラズマ研究会
- Place of Presentation
  由布院倶楽部
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Development of IR monitoring system of solution plasma2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asian Pacific Conference Plasma Science and Technology 2012
- Place of Presentation
  京都大学桂キャンパス (京都府京都市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Development of IR monitoring system of solution plasm2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Asia Pacific Conference on Plasma Science and Technology
- Place of Presentation
  Kyoto-Japan
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Hydrogenation of Si(110) Surface due to Hydrogen Plasma Exposure, investigated with In-situ MIR-IRAS2012
- Author(s)
  Y. Takmi, Y. Takaki, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  International Conference Renewable Energy and Related Applications
- Place of Presentation
  ベストウェスタンプレミアムホテル長崎 (長崎県長崎市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] アモルファス炭素膜と軽元素プラズマとの表面反応の赤外分光解析2012
- Author(s)
  高木　雄也，高見　佳生，篠原　正典，松田良信，藤山　寛
- Organizer
  表面科学会全国大会
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 炭化水素を原料としたプラズマ化学気相堆積の赤外分光解析2012
- Author(s)
  高木雄也,高見佳生,八木翔平,津村高成,篠原正典,松田良信,藤山寛
- Organizer
  プラズマ・核融合学会山口九州沖縄支部第16回支部会
- Place of Presentation
  九州大学
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Development of In-situ MIR-IRAS monitoring systm for reactions induced by solution plasma generation2012
- Author(s)
  A. Fukae, K. Amano, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  nternational Conference on Renewable Energy Research and Applications (ICRERA) 2012
- Place of Presentation
  Nagasaki-Japan
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] 多重内部反射赤外吸収分光法を用いた液中プラズマの診断法の開発2012
- Author(s)
  深江陽大，天野勝裕，篠原正典，松田良信，藤山　寛
- Organizer
  応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Infrared spectroscopic study of interaction of hydrogen plasma with Si surfaces2012
- Author(s)
  Y. Takami, T. Tsumura, Y. Takaki, S. Yagi, M. Shinohara, Y. Matsuda, H. Fujiyama,
- Organizer
  Asian Pacific Conference Plasma Science and Technology 2012
- Place of Presentation
  京都大学桂キャンパス (京都府京都市)
- Data Source
  KAKENHI-PUBLICLY-24110716
[Presentation] Hydrogenation of Si(110) Surface due to Hydrogen Plasma Exposure, investigated with In-situ MIR-IRAS2012
- Author(s)
  K. Hara, Y. Takami, Y. Takaki, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Ineternational Conference Renewable Energy Research and Applications
- Place of Presentation
  Nagasaki-Japan
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Substrate Temperature Effect in the Interaction of Hydrogen Plasma with a Silicon Surface2011
- Author(s)
  K. Hara, Y. Takami, Y. Takaki, M. Shinohara, Y. Matsuda, H. Fujiyama
- Organizer
  Plasma Conference
- Place of Presentation
  Kanazawa-Japan
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] In-situ Monitoring of Plasma-induced Reactions with Infrared Spectroscopy2011
- Author(s)
  Masanori Shinohara
- Organizer
  3rd International Workshop on Plasma Scientech for All Something
- Place of Presentation
  Beijin-China
- Invited
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Infrared Spectroscopic Study on Reaction of Hydrogen Plasma with Si surface2011
- Author(s)
  M.Shinohara, 他
- Organizer
  International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  名古屋工業大学
- Year and Date
  2011-03-07
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Infrared Spectroscopic Study on Effects of Substrate Temperatures on Oxidation of Amorphous Carbon Films2011
- Author(s)
  Y. Takaki, K. Hara, Y. Takami, M. Shinohara, Y. Matsuda, and H. Fujiyama
- Organizer
  Plasma Conference
- Place of Presentation
  Kanazawa-Japan
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] プラズマプロセスの赤外分光解析2011
- Author(s)
  篠原正典
- Organizer
  「原子分子光の素過程とプラズマ分光の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会
- Place of Presentation
  岐阜県核融合科学研究所(招待講演)
- Year and Date
  2011-02-04
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] シリコン基板への水素プラズマ処理効果の赤外分光計測2011
- Author(s)
  原幸治郎, 河上貴聡, 高見佳生, 高木雄也, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-23
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama,
- Organizer
  The 8th Asian-European Internationala Conference on Plasma Surface Engineering (AEPSE-2011)(招待講演)
- Place of Presentation
  Dlian- China
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
- Organizer
  Asian-European International Conference of Plasma Surface Engineering
- Place of Presentation
  Dalian-China
- Invited
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Bias Dependent Reactions of a Si(110) Substrate on Irradiation of Hydrogen Plasma2011
- Author(s)
  Y. Takami, K. Hara, Y. Takaki, M. Shinohara, Y. Matsuda and H. Fujiyama
- Organizer
  Plasma Conference
- Place of Presentation
  Kanazawa-Japan
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
- Organizer
  The 8th Asian-European International Conference on Plasma Surface Engineering
- Place of Presentation
  大連・中国
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] In-situ infrared spectroscopy of oxidation process of amorphous carbon film, depending on substrate temperatures2011
- Author(s)
  M. Shinohara, Y. Takaki, K. Hara, Y. Takami, Y. Matsuda and H. Fujiyama,
- Organizer
  International Symposium of American Vacuum Society
- Place of Presentation
  Nashville-USA
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Substrate Temperature Effects on Behavior of Surface Hydrogen during Plasma, Investigated with Infrared Spectroscopy2011
- Author(s)
  M. Shinohara, Y. Takaki, K. Hara, Y. Takami, Y. Matsuda and H. Fujiyama
- Organizer
  Symposium of Plasma Science for Materials
- Place of Presentation
  Osaka-Japan
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] プラズマ-シリコン表面相互作用で誘起される欠陥生成メカニズムの解明22011
- Author(s)
  篠原正典
- Organizer
  新学術領域新学術全体会議
- Place of Presentation
  九州大学西新プラザ
- Year and Date
  2011-01-07
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] プラズマが誘起する表面反応の赤外分光解析2011
- Author(s)
  篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山　寛
- Organizer
  電気学会プラズマ研究会 2011年8月7-9日
- Place of Presentation
  大阪
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Reaction process of Si surfaces with hydrogen plasma2011
- Author(s)
  K. Hara, M. Shinohara, Y. Takami, Y. Takaki, Y. Matsuda and H. Fujiyama
- Organizer
  58th International Symposium of American Vacuum Society
- Place of Presentation
  Nashville USA
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] In-situ Monitoring of Plasma-induced Reactions with Infrared Spectroscopy2011
- Author(s)
  M. Shinohara
- Organizer
  3rd International Workshop on Plasma Scientech for All Something
- Place of Presentation
  北京/中国
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] In-situ Monitoring of Plasma-induced Reactions with Infrared Spectroscopy2011
- Author(s)
  Masanori Shinohara
- Organizer
  3rd International Workshop on Plasma Scientech for All Something
- Place of Presentation
  Beijin-China
- Invited
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactionｓ2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
- Organizer
  Asian European Coneference on Ploasma Surface Engineering 2011
- Place of Presentation
  Darlian-Chian
- Invited
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] In-situ Monitoring of Plasma-induced Reactions with Infrared Spectroscop2011
- Author(s)
  Masanori Shinohara
- Organizer
  3rd International Workshop on Plasma Scientech for All Something(招待講演)
- Place of Presentation
  Beijin-China
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Infrared Study on an Interaction of Hydrogen Plasma with a Si Surface2011
- Author(s)
  M.Shinohara, 他
- Organizer
  Japan-Taiwan 4 Universities Joint Symposium on Material Science for Next Generation Energy and Nano Science
- Place of Presentation
  長崎大学文教キャンパス
- Year and Date
  2011-01-20
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] プラズマプロセスの赤外分光診断2011
- Author(s)
  篠原正典，高木雄也，原幸治郎，高見佳生，天野勝裕，深江陽大，松田良信，藤山寛
- Organizer
  電気学会プラズマ　パルスパワー　合同研究会
- Place of Presentation
  神奈川県長津田市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] In-situ Infrared Spectroscopy of Plasma Induced Surface Reactions2011
- Author(s)
  M. Shinohara, K. Hara, Y. Takami, Y. Takaki, A. Fukae, K. Amano, Y. Matsuda, and H. Fujiyama
- Organizer
  The 8thAsian-European International Conference on Plasma Surface Engineering (AEPSE 2011)
- Place of Presentation
  大連/中国
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] プラズマプロセスの赤外分光解析2011
- Author(s)
  篠原正典
- Organizer
  原子分子光の素過程とプラズマ分光の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会
- Place of Presentation
  核融合科学研究所(招待講演)
- Year and Date
  2011-02-04
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] プラズマプロセスの赤外分光解析2011
- Author(s)
  篠原正典, 他
- Organizer
  原子分子光の素過程とプラズマ分光の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会
- Place of Presentation
  核融合科学研究所(招待講演)
- Year and Date
  2011-02-04
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] プラズマが誘起する表面反応の赤外分光解析2011
- Author(s)
  篠原正典,原幸治郎,高見佳生,高木雄也,深江陽大,天野勝裕,松田良信,藤山　寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  大阪府大阪市
- Data Source
  KAKENHI-PROJECT-23654203
[Presentation] Investigation of amorphous carbon film deposition process2010
- Author(s)
  M.Shinohara
- Organizer
  1st International Workshop on Plasma Scientech for All Something
- Place of Presentation
  Beijin-China(招待講演)
- Year and Date
  2010-05-15
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] プラズマーシリコン表面相互作用で誘起される欠陥生成メカニズムの解明2010
- Author(s)
  篠原正典
- Organizer
  プラズマーシリコン表面相互作用で誘起される欠陥生成メカニズムの解明
- Place of Presentation
  京都大学時計台会議室III
- Year and Date
  2010-08-21
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Infrared Spectroscopic Study on Hydrogen Plasma Induced Surface Reaction2010
- Author(s)
  Masanori Shinohara, 他
- Organizer
  IEEE TENCON2010
- Place of Presentation
  Fukuoka International Convention Center
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Infrared spectroscopic study on substrate bias effects on amorphous carbon deposition process during acetylene plasma2010
- Author(s)
  M.Shinohara
- Organizer
  7th International Conference on Reactive Plasma, 28th Symposium on Plasma Processing, and 63rd Gaseous Electronics Conference
- Place of Presentation
  Paris-France
- Year and Date
  2010-10-06
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 水素プラズマ照射によるシリコンの欠陥生成に及ぼす基板バイアス依存性2010
- Author(s)
  原幸治郎、河上貴聡、篠原正典、藤山寛、松田良信
- Organizer
  プラズマ・核融合学会九州・山口・沖縄支部支部会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2010-12-18
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] アモルファス炭素薄膜の成長過程の基板温度依存牲2010
- Author(s)
  原幸治郎, 河上貴聡, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Interactions between Hydrogen Plasma and Amorphous Carbon Films2010
- Author(s)
  H.Kawazoe, T.Inayoshi, T.Kawakami, K.Hara, M.Shinohara, 他
- Organizer
  The 27^<th> Symposium on Plasma Processing
- Place of Presentation
  横浜市横浜開港記念会館
- Year and Date
  2010-02-01
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] プラズマプロセスにおける「その場・実時間」反応過程解析2010
- Author(s)
  河上貴聡, 原幸治郎, 川副大樹, 稲吉孝紀, 篠原正典, 松田良信, 藤山寛, 新田祐樹, 中谷達行
- Organizer
  応用物理学会学術講演会
- Place of Presentation
  長崎大学(講演奨励賞記念講演(招待講演))
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Infrared Study on an Interaction of Hydrogen Plasma with a Si Surface2010
- Author(s)
  M.Shinohara, 他
- Organizer
  日本MRS学術シンポジウム
- Place of Presentation
  横浜情報文化センター
- Year and Date
  2010-12-20
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] プラズマプロセスにおける「その場・実時間」表面反応解析2010
- Author(s)
  河上貴聡、原幸治郎、川副大樹、稲吉孝紀、篠原正典、田良信、藤山寛、新田祐樹、中谷達行
- Organizer
  九州山口プラズマ研究会
- Place of Presentation
  日田ひなの里
- Year and Date
  2010-11-05
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Investigation of amorphous carbon film deposition process2010
- Author(s)
  M. Shinohara
- Organizer
  1st International Workshopon Plasma Scientech for All Something
- Place of Presentation
  北京/中国
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Si基板に対するHプラズマ処理効果2010
- Author(s)
  原幸治郎、河上貴聡、篠原正典、松田良信、藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2010-11-27
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Interaction of hydrogen plasma with amorphous carbon films deposited using acetylene plasma2010
- Author(s)
  H.Kawazoe, T.Kawakami, T.Inayoshi, M.Shinohara, 他
- Organizer
  19^<th> Academic Symposium of MRS-Japan 2009
- Place of Presentation
  横浜市横浜情報文化センター
- Year and Date
  2010-12-08
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 多重内部反射赤外分光法を用いたプラズマ誘起表面反応の観察2010
- Author(s)
  篠原正典, 他
- Organizer
  第15回九州薄膜表面研究会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2010-06-12
- Data Source
  KAKENHI-PUBLICLY-22110511
[Presentation] Substrate Bias Effects on Amorphous Carbon Film Deposition2010
- Author(s)
  Masanori Shinohara, 他
- Organizer
  19^<th> Academic Symposium of MRS-Japan 2009
- Place of Presentation
  横浜市開港記念会館
- Year and Date
  2010-12-08
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 酸素プラズマによるアモルファス炭素膜の酸化過程における基板温度依存性2010
- Author(s)
  河上貴聡、原幸治郎、篠原正典、松田良信、藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2010-11-27
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 重水素プラズマとアモルファス炭素薄膜の表面反応の「その場」「実時間」計測2010
- Author(s)
  河上貴聡、原幸治郎、篠原正典、藤山寛、松田良信
- Organizer
  プラズマ・核融合学会九州・山口・沖縄支部支部会
- Place of Presentation
  九州大学伊都キャンパス
- Year and Date
  2010-12-18
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Investigation of Deposition Process of Amorphous carbon film using acetylene plasma2010
- Author(s)
  H.Kawazoe, T.Kawakami, T.Inayoshi, M.Shinohara, 他
- Organizer
  19^<th> Academic Symposium of MRS-Japan 2009
- Place of Presentation
  横浜市横浜情報文化センター
- Year and Date
  2010-12-08
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Difference of deposition process of an amorphous carbon film due to source gases2009
- Author(s)
  Masanori Shinohara, 他
- Organizer
  22nd Symposium on Plasma Science for Materials
- Place of Presentation
  東京大学
- Year and Date
  2009-06-16
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] 酸素分子・酸素プラズマによるアモルファス炭素膜の酸化反応2009
- Author(s)
  篠原正典, 他
- Organizer
  表面科学会講演大会
- Place of Presentation
  タワーホール船越
- Year and Date
  2009-10-28
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Substrate Bias Effect on Deposition Process of Amorphous Carbon Films2009
- Author(s)
  T. Inayoshi, H. Kawazoe, M. Shinohara、他4名
- Organizer
  Nagasaki Symposium on Nano-Dynamics 2009
- Place of Presentation
  長崎市長崎大学
- Year and Date
  2009-01-27
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] アセチレンを原料として用いたプラズマCVD法によるアモルファス炭素膜の成膜反応2009
- Author(s)
  篠原正典, 他
- Organizer
  表面科学会講演大会
- Place of Presentation
  タワーホール船越
- Year and Date
  2009-10-29
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Difference of deposition process of an amorphous carbon film due to source gases2009
- Author(s)
  M.Shinohara
- Organizer
  22nd Symposium on Plasma Science for Materials
- Place of Presentation
  東京大学山上会館
- Year and Date
  2009-06-16
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Dependences of growth process of amorphous carbon films on the different source gases : methane and acetylene2009
- Author(s)
  Masanori Shinohara, 他
- Organizer
  International Symposium on Plasma Chemistry 19
- Place of Presentation
  ドイツ・ボーフム
- Year and Date
  2009-07-27
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] アモルファス炭素膜堆積の基板温度依存性2008
- Author(s)
  篠原正典、他3名
- Organizer
  表面技術協会第118回(近畿大学)講演大会
- Place of Presentation
  大阪府東大阪市近畿大学本部キャンパス
- Year and Date
  2008-09-01
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Investigation of Growth Mechanism of Diamond-like Carbon film2008
- Author(s)
  M. Shinohara, 他3名
- Organizer
  The 55^<th> Symposium of American Vacuum Society
- Place of Presentation
  アメリカ合衆国ボストン市ハインズコンベンションセンター
- Year and Date
  2008-10-21
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Investigation of Growth Process Amorphous Carbon Film during Plasma Enhanced Chemical Vapor Deposition2008
- Author(s)
  M. Shinohara, 他3名
- Organizer
  International Congress on Plasma Physics 2008
- Place of Presentation
  福岡市国際会議センター
- Year and Date
  2008-09-11
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] アモルファス炭素膜の成長の赤外分光解析2008
- Author(s)
  篠原正典、他3名
- Organizer
  九州薄膜表面研究会
- Place of Presentation
  福岡市九州大学筑紫キャンパス
- Year and Date
  2008-06-21
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Investigation of growth mechanism of diamond-like carbon film2008
- Author(s)
  M.Shinohara
- Organizer
  55^<th> International symposium of American Vacuum society
- Place of Presentation
  Boston-USA
- Year and Date
  2008-10-21
- Data Source
  KAKENHI-PROJECT-20684027
[Presentation] Investigation of Interaction between Hydrogen Plasma and Amorphous Carbon Films2007
- Author(s)
  Masanori Shinohara
- Organizer
  International Conference of Advanced Materials and Devices
- Place of Presentation
  Ramada Plaza Jeju Hotel, Jeju, Korea
- Year and Date
  2007-12-14
- Data Source
  KAKENHI-PROJECT-18740354
[Presentation] 炭化水素プラズマによる膜堆積過程の赤外分光反応解析
- Author(s)
  篠原正典，高木雄也，谷口雄二郎，伊東和樹，丸野尚紀，吉田裕太，中野大和，松田良信，藤山寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  大阪府立大学 (羽曳野市)
- Year and Date
  2014-09-08 – 2014-09-10
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared Absorption Spectroscopic Study on Deposition Process Induced by Benzene Plasma Exposure
- Author(s)
  Masanori Shinohara, Yujiro Taniguchi, Kazuki Ito, Naoki Maruno, Yoshinobu Matsuda, and Hiroshi Fujiyama
- Organizer
  International Conference on Microelectronics and Plasma Technology 2014
- Place of Presentation
  Gunsan, Korea
- Year and Date
  2014-07-08 – 2014-07-11
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] アミノ基を有する自己組織化単分子膜とプラズマの反応の赤外分光
- Author(s)
  丸野尚紀, 谷口雄二郎, 吉田裕太, 中野大和, 伊東和樹, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 液中プラズマと生体モデル分子の反応の赤外分光計測
- Author(s)
  吉田裕太，中野大和，谷口雄二郎，丸野尚紀，伊東和樹，篠原正典，松田良信，藤山寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  大阪府立大学 (羽曳野市)
- Year and Date
  2014-09-08 – 2014-09-10
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] 生体モデル物質としての自己組織化膜と液中プラズマの反応の赤外分光解析
- Author(s)
  篠原正典，丸野尚紀，吉田　裕太，伊東和樹，中野　大和，谷口　雄二郎，松田良信，藤山寛
- Organizer
  応用物理学会秋季講演会
- Place of Presentation
  北海道大学 (札幌市)
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] 自己組織化単分子膜とプラズマの相互作用の赤外分光解析
- Author(s)
  篠原正典,吉田裕太,丸野尚紀,中野大和,谷口雄二郎,伊東和樹,松田良信,藤山　寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  大分市コンパルホール (大分市)
- Year and Date
  2014-10-24 – 2014-10-26
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] チオール基を有する自己組織化単分子膜とプラズマの反応の赤外分光解析
- Author(s)
  中野大和, 丸野尚紀, 谷口雄二郎, 吉田裕太, 伊東和樹, 篠原正典, 松田良信, 藤山寛 6Fp-2 (p.137)
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] 自己組織化単分子膜のプラズマによる反応の赤外分光解析
- Author(s)
  篠原正典, 吉田裕太，丸野尚紀，谷口雄二郎，伊東和樹，中野大和，松田良信，藤山寛
- Organizer
  第8回物性科学領域横断研究会
- Place of Presentation
  大阪大学 (豊中市)
- Year and Date
  2014-11-21 – 2014-11-22
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] アミノ基を有する自己組織化単分子膜とプラズマの反応の赤外分光
- Author(s)
  丸野尚紀, 谷口雄二郎, 吉田裕太, 中野大和, 伊東和樹, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] アモルファス炭素膜とプラズマの反応の赤外分光解析
- Author(s)
  篠原　正典，谷口　雄二郎，丸野　尚紀，松田　良信，藤山　寛
- Organizer
  電気学会A部門大会
- Place of Presentation
  信州大学 (長野市)
- Year and Date
  2014-08-21 – 2014-08-22
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Hydrogen Plasma Induced Hydrogen Insertion into Si Subsurface, Investigated with Infrared Absorption Spectroscopy
- Author(s)
  Masanori Shinohara, Naoki Maruno, Yoshinobu Matsuda, and Hiroshi Fujiyama
- Organizer
  International Conference on Microelectronics and Plasma Technology
- Place of Presentation
  Gunsan, Korea
- Year and Date
  2014-07-08 – 2014-07-11
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] チオール基を有する自己組織化単分子膜とプラズマの反応の赤外分光解析
- Author(s)
  中野大和, 丸野尚紀, 谷口雄二郎, 吉田裕太, 伊東和樹, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] プラズマ曝露による自己組織化膜の化学結合状態の変化
- Author(s)
  篠原正典，丸野尚紀，吉田裕太，谷口雄二郎，松田良信，藤山寛
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  足利工業大学 (足利市)
- Year and Date
  2014-05-09 – 2014-05-10
- Data Source
  KAKENHI-PUBLICLY-25104720
[Presentation] ベンゼンを用いたプラズマ化学的気相堆積過程の赤外吸収分光解析
- Author(s)
  伊東和樹, 谷口雄二郎, 篠原正典, 松田良信, 藤山寛
- Organizer
  応用物理学会九州支部学術講演会
- Place of Presentation
  大分大学 (大分市)
- Year and Date
  2014-12-06 – 2014-12-07
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Infrared Spectroscopic study on interaction between plasma and solid surface
- Author(s)
  Masanori Shinohara, Yuta Yoshida, Naoki Maruno, Yujiro Taniguchi, Kazuki Ito, Yamato Nakano, Yoshinobu Matsuda and Hiroshi Fujiyama
- Organizer
  Plasma Conference
- Place of Presentation
  Toki Messe, Niigata, Japan
- Year and Date
  2014-11-18 – 2014-11-21
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] 炭化水素プラズマによる膜形成初期過程の赤外分光解析
- Author(s)
  篠原正典，谷口雄二郎，伊東和樹，丸野尚紀，中野大和，吉田裕太，松田良信，藤山寛
- Organizer
  表面科学学術講演会
- Place of Presentation
  くにびきメッセ，(松江市)
- Year and Date
  2014-11-06 – 2014-11-08
- Data Source
  KAKENHI-PROJECT-24340144
[Presentation] Consideration of Adsorption Process of Benzene Plasma with Isotope Effect
- Author(s)
  M. Shinohara, K. Ito, Y. Taniguchi, Y. Matsuda and H. Fujiyam
- Organizer
  The 7th International Symposium on Surface Science
- Place of Presentation
  Kunibiki Messe, Matsue, Shimane, Japan
- Year and Date
  2014-11-02 – 2014-11-06
- Data Source
  KAKENHI-PROJECT-24340144

1. MATSUDA Yoshinobu (60199817)

# of Collaborated Projects: 5 results

# of Collaborated Products: 64 results
2. FUJIYAMA Hiroshi (20112310)

# of Collaborated Projects: 4 results

# of Collaborated Products: 6 results
3. Tochikubo Fumiyoshi (90244417)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. SHIRAI NAOKI (80552281)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. KAWASAKI Hiroharu

# of Collaborated Projects: 1 results

# of Collaborated Products: 17 results
6. 小田昭紀

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

SHINOHARA Masanori 篠原 正典

SHINOHARA MASANORI 篠原 正典

Research Projects

Research Products

Co-Researchers

Deposition of carbon films due to decomposition of source molecules during pulse plasmas and elucidation of its reactionsPrincipal Investigator

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A Study on Deposition mechanisms of Amorphous Carbon films with in-situ Multiple-Internal-Reflection Infared SpectroscopyPrincipal Investigator

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Study on control of plasma oxidation at an atomic levelPrincipal Investigator

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Foundation of plasma electrochemistry and its application to material process in liquid

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自己組織化膜とプラズマの反応解析・制御による自己組織化膜への機能付与Principal Investigator

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IV族元素を基盤とした膜とプラズマとの反応解析によるプラズマ応用プロセスの最適化Principal Investigator

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Study on the deposition of functionalized membrane with high-molecular-weight radicals and ions during hydroicarbon plasmaPrincipal Investigator

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Establishment of a real time measurement method of carbon film deposition process and its surface modification process during plasma generated in liquid, and the clalification of these processesPrincipal Investigator

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プラズマ－シリコン表面相互作用で誘起される欠陥生成メカニズムの解明Principal Investigator

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Development of the smart deposition process of amorphous carbon films due to the control of plasma processPrincipal Investigator

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固体壁微小空間における高電離度マイクロプラズマの生成

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歯科治療用プラズマプロセスの開発

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チューブの中のプラズマプロセス診断技術と膜堆積技術の創製によるチューブの高機能化Principal Investigator

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SHINOHARA Masanori 篠原正典

SHINOHARA MASANORI 篠原正典

[Book] プラズマCVDにおける成膜条件の最適化に向けた反応機構の理解とプロセス制御・成膜事例　(分担)2018