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AOYAMA Takashi  青山 隆

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… Alternative Names

AOYAMA Takasi  青山 隆

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Researcher Number 80363737
Other IDs
Affiliation (based on the past Project Information) *help 2012: 秋田県立大学, システム科学技術学部, 教授
2005 – 2007: 秋田県立大学, システム科学技術学部, 教授
Review Section/Research Field
Except Principal Investigator
Structural/Functional materials
Keywords
Except Principal Investigator
LSI / 配線抵抗率 / TEG / 抵抗率 / Cu配線 / Oxygen / Cu Plating / High-purity Plating Material / Cu Interconnects / Grain Size … More / Low Resistivity / 配線の密着性向上 / 配線の低抵抗化 / 技術ノード35nm / エレクトロマイグレーション / ナノスクラッチ試験 / 標準偏差 / 平均結晶粒径 / 硫酸銅純度 / Cu配線形成 / LSI用Cu配線 / 耐エレクトロマイグレーション性 / 密着性 / 結晶粒径 / 分子動力学法 / めっき材料 / 酸素濃度 / 高純度プロセス / 均一・大粒径 / 高純度めっき材 / 模擬デバイス / 配線評価用TEG / パルスめっき技術 / 添加剤フリーめつき技術 / 超高純度めっき材料 / ULSI / 微細構造 / 微量不純物 / Cuの高純度化 / 分子動力学シミュレーション / 革新的高導電性 / 超高純度めっき材 / 添加剤フリー / Cu 配線 / 収差補正STEM / クレヴァス / Ru膜 / 添加剤フリーめっき / 収差補正TEM / 粒界不純物 / 超高純度硫酸銅 / 情報材料 / 電子 Less
  • Research Projects

    (2 results)
  • Research Products

    (3 results)
  • Co-Researchers

    (15 People)
  •  Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.

    • Principal Investigator
      ONUKI Jin (OONUKI Jin)
    • Project Period (FY)
      2008 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Structural/Functional materials
    • Research Institution
      Ibaraki University
  •  Development of Cu Interconnects for 20nm Technology Node LSI

    • Principal Investigator
      ONUKI Jin
    • Project Period (FY)
      2005 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Structural/Functional materials
    • Research Institution
      Ibaraki University

All 2006 Other

All Journal Article

  • [Journal Article] Filling 80nm-ide and High-Aspect-Ratio-Trench with Pulse Wave Copper Electroplating and Observation of Microstructure2006

    • Author(s)
      Y. Chonan, J. Onuki, T. Nagano, K. P. Khoo, T. Aoyama, H. Akahoshi, T. Haba and T. Saitou
    • Journal Title

      Jpn. J. Appl. Phys. Vol.45

      Pages: 8604-8607

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17206071
  • [Journal Article] Filling 80nm-ide and High-Aspect-Ratio-Trench with Pulse Wave Copper Electroplating and Observation of Microstructure2006

    • Author(s)
      Y., Chonan・J., Onuki・T., Nagano・K.P., Khoo・T., Aoyama・H., Akahoshi・T., Haba・T., Saitou
    • Journal Title

      Jpn.J.Appl.Phys. 45

      Pages: 8604-8607

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17206071
  • [Journal Article] Filling 80nm wide and high aspect-ration trench by pulse wave electro-Cu plating and observation of microstructure

    • Author(s)
      Y.Chonan, J.Onuki, T.Nagano, H.Akahoshi, K.P.Khoo, T.Aoyama, H.Akahoshi
    • Journal Title

      Jpn.J.Appl.Phys. (掲載決定)

    • Data Source
      KAKENHI-PROJECT-17206071
  • 1.  ONUKI Jin (70315612)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 3 results
  • 2.  SASAJIMA Yasushi (80187137)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 3.  MIMURA Koji (00091752)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  ISHIKAWA Nobuhiro (00370312)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  KONDO Kazuo (50250478)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  INAMI Takashi (20091853)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  CHONAN Yasunori (30363740)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  ITO Shinji (50370317)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  UCHIKOSHI Masahito (60447191)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  OHTA Hiromichi (70168946)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  NAGANO Takatoshi (70343621)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  KIMURA Takashi (70370319)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  TASHIRO Suguru (90272111)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  TOMOTA Yo (90007782)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  一色 実 (20111247)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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