Urabe Keiichiro 占部継一郎

… Alternative Names

占部継一郎ウラベケイイチロウ

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Researcher Number	80725250
Other IDs
Affiliation (Current)	2025: 京都大学, 工学研究科, 准教授
Affiliation (based on the past Project Information) *help	2024: 京都大学, 工学研究科, 准教授 2018 – 2022: 京都大学, 工学研究科, 助教 2014: 東京大学, 新領域創成科学研究科, 特別研究員
Review Section/Research Field	Principal Investigator Basic Section 14030:Applied plasma science-related / Medium-sized Section 14:Plasma science and related fields / 0202:Condensed matter physics, plasma science, nuclear engineering, earth resources engineering, energy engineering, and related fields / Plasma science Except Principal Investigator Transformative Research Areas, Section (II)
Keywords	Principal Investigator プラズマ / プラズマ診断 / 高調波分光法 / 表面改質 / プラズマ・材料相互作用 / イオン流れ計測 / 電気推進器 / プラズマプロセス / レーザー誘起蛍光法 / イオンシース … More / 時空間速度分布 / レーザー分光 / イオン / 励起粒子密度計測 / 磁気強度計測 / 光ポンピング / 流れの可視化 / 分光計測 / 分光診断 / 電子密度 / レーザー干渉計 / 量子カスケードレーザー … More Except Principal Investigator ガス不純物高度制御 / ミクロ反応場制御 / マルチスケール時間電界制御 / 種子表面への活性種高選択・局所供給 / 高反応性活性種合成 Less

Diagnostics of plasma-material interaction by harmonic spectroscopy methodPrincipal Investigator
- Principal Investigator
  
  占部継一郎
- Project Period (FY)
  2024 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Kyoto University
Super-selective and local supply of short-lived reactive species by advanced plasma control
- Principal Investigator
  
  金子俊郎
- Project Period (FY)
  2024 – 2028
- Research Category
  
  Grant-in-Aid for Transformative Research Areas (A)
- Review Section
  
  Transformative Research Areas, Section (II)
- Research Institution
  Tohoku University
Absolute-density measurement and precision magnetometry using quantum-state control of plasma excited speciesPrincipal Investigator
- Principal Investigator
  
  Urabe Keiichiro
- Project Period (FY)
  2019 – 2020
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 14:Plasma science and related fields
- Research Institution
  Kyoto University
Development of Laser-Induced Fluorescence Spectroscopy for the Measurement of Dynamic Bahaviors of Ion Flow from PlasmasPrincipal Investigator
- Principal Investigator
  
  Urabe Keiichiro
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 14030:Applied plasma science-related
- Research Institution
  Kyoto University
Visualization of flow dynamics of gas and excited species generated by small thermal non-equilibrium plasmasPrincipal Investigator
- Principal Investigator
  
  占部継一郎
- Project Period (FY)
  2018 – 2019
- Research Category
  
  Grant-in-Aid for Research Activity Start-up
- Review Section
  
  0202:Condensed matter physics, plasma science, nuclear engineering, earth resources engineering, energy engineering, and related fields
- Research Institution
  Kyoto University
量子カスケードレーザ干渉イメージングによる高気圧プラズマ密度の高速3次元計測Principal Investigator
- Principal Investigator
  
  占部継一郎
- Project Period (FY)
  2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Plasma science
- Research Institution
  The University of Tokyo

All 2022 2021 2020 2019 2018

All Journal Article Presentation

[Journal Article] Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas2022
- Author(s)
  Seiya Kito, Keiichiro Urabe, and Koji Eriguchi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: 10 Pages: 106002-106002
- DOI
  10.35848/1347-4065/ac87e1
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H01886
[Journal Article] Recent Progress on dispersion interferometers for nuclear fusion and low-temperature plasmas2020
- Author(s)
  T. Akiyama, M.A. Van Zeeland, T.N. Carlstrom, R.L. Boivin, K.J. Brunner, J. Knauer, R. Yasuhara, K. Tanaka, H.Q. Liu, Y. Zhou, N. Oyama, A. Sirinelli, K. Urabe, N. Shirai
- Journal Title
  
  Journal of Instrumentation
  
  Volume: 15 Issue: 01 Pages: C01004-C01004
- DOI
  10.1088/1748-0221/15/01/c01004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01886
[Journal Article] Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure2020
- Author(s)
  F.P. Sainct, K. Urabe, E. Pannier, D.A. Lacoste, C.O. Laux
- Journal Title
  
  Plasma Sources Science and Technology
  
  Volume: 29 Issue: 2 Pages: 025017-025017
- DOI
  10.1088/1361-6595/ab681b
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01886
[Journal Article] Characterization of the distribution of defects introduced by plasma exposure in Si substrate2019
- Author(s)
  Sato Yoshihiro、Shibata Satoshi、Uedono Akira、Urabe Keiichiro、Eriguchi Koji
- Journal Title
  
  Journal of Vacuum Science & Technology A
  
  Volume: 37 Issue: 1 Pages: 011304-011304
- DOI
  10.1116/1.5048027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H05849, KAKENHI-PLANNED-16H06424
[Journal Article] 先端CMOS/メモリデバイスにおけるプラズマ加工技術の現状と課題2018
- Author(s)
  江利口　浩二，占部　継一郎
- Journal Title
  
  応用物理
  
  Volume: 87 Pages: 895-901
- NAID
  130007715671
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H05849
[Presentation] プラズマに曝露されている誘電体薄膜特性のin-situインピーダンス分光計測2022
- Author(s)
  占部継一郎, 両角潤樹, 久山智弘, 江利口浩二
- Organizer
  第32回日本MRS年次大会
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] Production of metastable-state argon ions in an electron cyclotron resonance plasma investigated by laser-induced fluorescence spectroscopy2022
- Author(s)
  Ryosuke Takahashi, Seiya Kito, Koji Eriguchi, and Keiichiro Urabe
- Organizer
  75th Annual Gaseous Electronics Conference / 11th International Conference on Reactive Plasmas
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] 高調波プローブ法を用いたプラズマ曝露環境下の材料表面状態モニタリング2022
- Author(s)
  両角潤樹, 江利口浩二, 占部継一郎
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] マイクロプラズマ研究が創出した連携研究の機会と可能性2021
- Author(s)
  占部継一郎
- Organizer
  第68回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] マイクロプラズマ研究が創出した連携研究の機会と可能性2021
- Author(s)
  占部継一郎
- Organizer
  第68回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-19K21864
[Presentation] フローティング高調波プローブ法によるプラズマパラメータ計測における浮遊容量とプローブポテンシャルの影響2021
- Author(s)
  鬼頭聖弥, 佐藤幹夫, 江利口浩二, 占部継一郎
- Organizer
  第38回プラズマプロセッシング研究会 / 第33回プラズマ材料科学シンポジウム
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] Behaviors of metastable-state argon ion density in an electron cyclotron resonance plasma source measured by laser-induced fluorescence spectroscopy2021
- Author(s)
  S. Kito, K. Eriguchi, and K. Urabe
- Organizer
  42nd International Symposium on Dryp Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] Influence of Gas-Refractive-Index Dispersion on Measurement of Electron Density Using Dispersion Interferometry2020
- Author(s)
  Keiichiro URABE
- Organizer
  The 29th International Toki Conference on Plasma and Fusion Research
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] 高調波干渉計を用いたプラズマ電子密度診断の現状と課題2020
- Author(s)
  占部継一郎
- Organizer
  第146回日本学術振興会プラズマ材料科学第153委員会研究会
- Invited
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] 高調波干渉計を用いたプラズマ電子密度診断の現状と課題2020
- Author(s)
  占部継一郎
- Organizer
  第146回日本学術振興会プラズマ材料科学第153委員会研究会
- Invited
- Data Source
  KAKENHI-PROJECT-19K21864
[Presentation] 大気圧プラズマの航空宇宙関連応用と分光計測2019
- Author(s)
  占部　継一郎
- Organizer
  第472回　航空宇宙懇談会
- Invited
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] プラズマ診断・計測（プラズマの診断とモニタリング）2019
- Author(s)
  占部　継一郎
- Organizer
  第13回　プラズマエレクトロニクスインキュベーションホール
- Invited
- Data Source
  KAKENHI-PROJECT-19H01886
[Presentation] Current and future outlook of laser interferometer for high-pressure plasma density diagnostics2018
- Author(s)
  Keiichiro URABE
- Organizer
  RUB Japan Science Days 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H05849
[Presentation] First-principles study on electronic structure modifications of Si substrtae with the Cl-terminated surface2018
- Author(s)
  Y. Yoshikawa, K. Urabe, and K. Eriguch
- Organizer
  40th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H05849
[Presentation] 電気特性解析を用いた高エネルギーイオン照射による電極腐食過程の研究2018
- Author(s)
  中村浩大，占部継一郎, 江利口浩二
- Organizer
  ,第62回宇宙科学技術連合講演会
- Data Source
  KAKENHI-PROJECT-18H05849
[Presentation] Effects of Microwave Annealing on the Recovery of Microscopic Defects in Silicon Nitride Films2018
- Author(s)
  T. Kuyama, Y. Sato, K. Urabe, and K. Eriguchi
- Organizer
  40th International Symposium on Dry Process (DPS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H05849
[Presentation] Comparative characterization of gas species dependence of transient behaviors in plasma-induced Si damage2018
- Author(s)
  T. Hamano, K. Urabe, and K. Eriguchi
- Organizer
  40th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H05849

1. 伊藤陽介 (20589189)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
2. 金子俊郎 (30312599)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. 野崎智洋 (90283283)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Urabe Keiichiro 占部 継一郎

占部 継一郎 ウラベ ケイイチロウ

Research Projects

Research Products

Co-Researchers

Diagnostics of plasma-material interaction by harmonic spectroscopy methodPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Super-selective and local supply of short-lived reactive species by advanced plasma control

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Absolute-density measurement and precision magnetometry using quantum-state control of plasma excited speciesPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of Laser-Induced Fluorescence Spectroscopy for the Measurement of Dynamic Bahaviors of Ion Flow from PlasmasPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Visualization of flow dynamics of gas and excited species generated by small thermal non-equilibrium plasmasPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

量子カスケードレーザ干渉イメージングによる高気圧プラズマ密度の高速3次元計測Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas2022

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Recent Progress on dispersion interferometers for nuclear fusion and low-temperature plasmas2020

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure2020

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Characterization of the distribution of defects introduced by plasma exposure in Si substrate2019

Author(s)

Journal Title

DOI

Data Source

[Journal Article] 先端CMOS/メモリデバイスにおけるプラズマ加工技術の現状と課題2018

Author(s)

Journal Title

NAID

Data Source

[Presentation] プラズマに曝露されている誘電体薄膜特性のin-situインピーダンス分光計測2022

Author(s)

Organizer

Data Source

[Presentation] Production of metastable-state argon ions in an electron cyclotron resonance plasma investigated by laser-induced fluorescence spectroscopy2022

Author(s)

Organizer

Data Source

[Presentation] 高調波プローブ法を用いたプラズマ曝露環境下の材料表面状態モニタリング2022

Author(s)

Organizer

Data Source

[Presentation] マイクロプラズマ研究が創出した連携研究の機会と可能性2021

Author(s)

Urabe Keiichiro 占部継一郎

占部継一郎ウラベケイイチロウ