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Anggraini SriAyu  Anggraini SriAyu

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Anggraini Sri Ayu  Anggraini SriAyu

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Researcher Number 80784123
Other IDs
Affiliation (Current) 2025: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
Affiliation (based on the past Project Information) *help 2023 – 2025: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
2021 – 2022: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員
Review Section/Research Field
Principal Investigator
Basic Section 21050:Electric and electronic materials-related
Except Principal Investigator
Basic Section 36010:Inorganic compounds and inorganic materials chemistry-related
Keywords
Principal Investigator
thin film / scandium / aluminum nitride / Piezoelectricity / vacancy / defect / polarity / AlN / ScAlN / nitride … More / sputtering / thin films / polarity inversion / piezoelectric … More
Except Principal Investigator
薄膜 / 圧電体 / 窒化物 Less
  • Research Projects

    (3 results)
  • Research Products

    (7 results)
  • Co-Researchers

    (3 People)
  •  Engineering high conductivity in wurtzite nitride via strategic cations co-dopingPrincipal Investigator

    • Principal Investigator
      Anggraini SriAyu
    • Project Period (FY)
      2025 – 2027
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 21050:Electric and electronic materials-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology
  •  窒化物圧電薄膜におけるミクロ組織の設計ストラテジーの確立

    • Principal Investigator
      平田 研二
    • Project Period (FY)
      2024 – 2026
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 36010:Inorganic compounds and inorganic materials chemistry-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology
  •  Controlling the polarity of ScAlN via formation of cation/anion vacancyPrincipal Investigator

    • Principal Investigator
      Anggraini Sri Ayu
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Review Section
      Basic Section 21050:Electric and electronic materials-related
    • Research Institution
      National Institute of Advanced Industrial Science and Technology

All 2023 2022 2021

All Presentation Patent

  • [Patent] 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたMEMSデバイス、トランジスタ、インバーター、トランスデューサー、SAWデバイスおよび強誘電体メモリ2021

    • Inventor(s)
      S.A. Anggraini et al
    • Industrial Property Rights Holder
      国立研究開発法人産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Overseas
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Effect of addition of elements in group IVB (C, Si, Ge, Sn) on polarity inversion of Scandium Aluminum Nitride (ScAlN) piezoelectric thin films2023

    • Author(s)
      Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
    • Organizer
      JSAP Spring 2023
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Polarity Inversion of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films via Addition of Elements in Group IVB (C, Si, Ge or Sn)2023

    • Author(s)
      Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
    • Organizer
      MRS Fall Meeting 2023
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Effect of addition of elements in group IVB (C, Si, Ge, Sn) on polarity inversion of Scandium Aluminum Nitride (ScAlN) piezoelectric thin films2023

    • Author(s)
      Sri Ayu Anggraini
    • Organizer
      JSAP Spring Meeting 2023
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Controlling the Polarity of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films by Using Ge Addition2022

    • Author(s)
      Sri Ayu Anggraini
    • Organizer
      MRS Fall Meeting 2022
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Inversing the polarity of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Si addition2021

    • Author(s)
      Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
    • Organizer
      MRS Fall Meeting 2021
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-21K04168
  • [Presentation] Polarity inversion of scandium aluminum nitride (ScAlN) piezoelectric thin films by using Ge addition2021

    • Author(s)
      Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
    • Organizer
      The 82rd JSAP Autumn Meeting 2021
    • Data Source
      KAKENHI-PROJECT-21K04168
  • 1.  平田 研二 (40828282)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  上原 雅人 (10304742)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  新津 甲大 (90733890)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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