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TSUJI Teruo  辻 輝生

ORCIDConnect your ORCID iD *help
Researcher Number 90039090
Other IDs
External Links
Affiliation (based on the past Project Information) *help 2002 – 2004: 九州工業大学, 大学院・生命体工学研究科, 教授
Review Section/Research Field
Principal Investigator
Dynamics/Control
Keywords
Principal Investigator
ball screw / two-degree-of-freedom control / filter / Taguchi method / acceleration control / robust / IC production equipment / predictive control / 剛体系 / 2慣性系 … More / 加速度フィードバック / 同期誤差 / 予測制御 / 位置決め / 共振 / サーボ系 / 動特性 / リニアモータ / 同期制御 / 半導体露光装置 / ボールねじ / 2自由度制御 / フィルタ / タグチメソッド / 加速度制御 / ロバスト性 / 露光装置 / 二重予測制御 Less
  • Research Projects

    (1 results)
  • Co-Researchers

    (4 People)
  •  High-speed nanometer synchronous position control of semiconductor exposure apparatus by new control methodPrincipal Investigator

    • Principal Investigator
      TSUJI Teruo
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Dynamics/Control
    • Research Institution
      Kyushu Institute of Technology
  • 1.  HAMAMATSU Hiroshi (70390531)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  FUTAMI Shigeru
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  MAKINOUCHI Susumu
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  中村 裕司
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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