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NAKAMURA Yoshiharu  中村 義春

ORCIDConnect your ORCID iD *help
Researcher Number 90051763
Affiliation (based on the past Project Information) *help 1994: Keio Univ., Dept.of Elec.Eng., Asso.Prof., 理工学部, 教授
1994: 慶應義塾大学, 理工学部, 教授
1993: 慶応義塾大学, 理工学部, 助教授
1993: 慶応義塾大学, 理工学部, 教授
1989 – 1990: 慶応大学, 理工学部, 助教授 … More
1988: 慶應義塾大学, 理工学部, 助教授
1988: KEIO UNIVERSITY, 理工学部, 助教授
1987 – 1988: 慶応義塾大学, 理工学部, 助教授 Less
Review Section/Research Field
Except Principal Investigator
電子機器工学 / 表面界面物性 / 応用物理学一般
Keywords
Principal Investigator
電子輸送係数 / モノシラン / 電子スオーム研究
Except Principal Investigator
衝突断面積 / プラズマプロセス / モンテカルロ法 / 電子スオーム / プラズマ診断 / プラズマモデリング / 反応性RFプラズマ … More / VACUUM ULTRVIOLET LIGHT SOURCE / ULTRVIOLET LIGHT SOURCE / MICROWAVE DISCHARGE / EXCIMER / マイクロ波放電 / パルス放電 / フラッシュランプ / エキシマ / 真空紫外光源 / 紫外光源 / RF plasma / Particle growth / Modeling / Non-equilibrium plasma / VHF plasma / Narrow gap RIE / Plasma processing / Dry etching / 狭ギャップRIE / VHFプラズマ / rfプラズマ / 微粒子成長 / モデリング / 非平衡プラズマ / VHPプラズマ / 狭ギャップ・RIE / ドライエッチング / Electron Energy Distribution / ICP Plasma / Plasma Display / Dissociation / Collision Crosssection / Ion swarm / Electron Swarm / Swarm / 緩和特性 / 過渡特性 / 電子-電子衝突 / 運動量移行断面積 / 原子衝突 / 電子衝突 / 電子衝突断面積 / rf非平衡プラズマ / 緩和現象 / クーロン相互作用 / イオンスオーム / 気体エレクトロニクス / プラズマディスプレイ / 誘導結合プラズマ / 電子エネルギー分布 / 解離 / イオンスゥオーム / 電子スゥオーム / スゥオーム / 電子スオ-ム / プラズマシミュレ-ション / プラズマシミュレーション Less
  • Research Projects

    (6 results)
  • Co-Researchers

    (15 People)
  •  Physics and Optimum Control of the Next Stage VHF Narrow gap Reactive Ion Etcher

    • Principal Investigator
      MAKABE Toshihaki
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      表面界面物性
    • Research Institution
      Keio University
  •  MECHANISM OF ELECTRON AND ION SWARMS AND ITS APPLICATIONS

    • Principal Investigator
      TAGASHIRA Hiroaki
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for Co-operative Research (A)
    • Research Field
      応用物理学一般
    • Research Institution
      HOKKAIDO UNIVERSITY
  •  反応性非平衡プラズマのモデリング

    • Principal Investigator
      田頭 博昭
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hokkaido University
  •  反応性非平衝プラズマのモデリング

    • Principal Investigator
      TAGASHIRA Hiroaki
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hokkaido University
  •  電子スオーム法による半導体製造ガス分子の電子衝突断面積の決定Principal Investigator

    • Principal Investigator
      中村 義春
    • Project Period (FY)
      1988
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Keio University
  •  DEVELOPMENT OF A NOVEL HIGH-EFFICIENCY HIGH-BRIGHTNESS ULTRAVIOLET AND VACUUM-ULTRAVIOLET LIGHT SOURCE (EXCIMER FLASH LAMP)

    • Principal Investigator
      OBARA Minoru
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子機器工学
    • Research Institution
      KEIO UNIVERSITY
  • 1.  MAKABE Toshiaki (60095651)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 2.  TAGASHIRA Hiroaki (10001174)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 3.  生田 信皓 (30035802)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 4.  OBARA Minoru (90101998)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 5.  北守 一隆 (40153134)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 6.  佐藤 信安 (20001290)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 7.  FUJIMOTO Takashi (90026203)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  TACHIBANA Kunihide (40027925)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  HATANO Yoshihiko (90016121)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  TAKEBE Masahiro (30005392)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  KANNARI Fumihiko (40204804)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  NOGUCHI Akira (90051648)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  林 眞 (40024179)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  近藤 敬一 (10043978)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  YAMAGUCHI Yukio
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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