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KIMURA Takayasu  木邑 隆保

ORCIDConnect your ORCID iD *help
Researcher Number 90052711
External Links
Affiliation (based on the past Project Information) *help 1998 – 2002: 芝浦工業大学, 工学部, 教授
Review Section/Research Field
Except Principal Investigator
機械工作・生産工学
Keywords
Except Principal Investigator
CMP / シリカ / pH / 研磨剤 / SILICA / LAPPING SLURRY / LAPPING MACHINE / ROUNDNESS / CENTRIFUGAL FORCE / GLASS BALL … More / SMALL BALL / POLISHING / カップ研磨方式 / シリカ粒子 / 真球度 / 球研磨 / ゾルゲル法 / 研磨スラリー / 研磨加工 / ラップ盤 / 真円度 / 遠心力 / ガラス球 / 微小ボール / 研磨 / silica / pad / Si water / slurry / sol-gel method / planerization / 研磨布 / Siウエハー / ゾル・ゲル法 / プラナリゼーション Less
  • Research Projects

    (2 results)
  • Co-Researchers

    (3 People)
  •  PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORS

    • Principal Investigator
      SHIBATA Junji
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  •  A basic study on CMP mechanism and production of CMP slurry

    • Principal Investigator
      SHIBATA Junii
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      機械工作・生産工学
    • Research Institution
      SHIBAURA INSTITUTE OF TECHNOLOGY
  • 1.  SHIBATA Junii (30052822)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 2.  OHTA Masato (50052874)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 3.  UEKI Tadahiro (50052890)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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