SAITO Yoji 齋藤洋司

… Alternative Names

齋藤洋司サイトウヨウジ

斎藤洋司サイトウヨウジ

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Researcher Number	90196022
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2005 – 2007: 成蹊大学, 理工学部, 教授 2002 – 2004: 成蹊大学, 工学部, 教授 1993 – 1995: 成蹊大学, 工学部, 助教授 1991: 豊橋技術科学大学, 工学部, 助手 1988: 豊橋技術科学大学, 工学部, 文部教官助手 1987 – 1988: 豊橋技術科学大学, 工学部, 助手
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Electronic materials/Electric materials Except Principal Investigator 電子材料工学
Keywords	Principal Investigator chlorine trifluoride / 三フッ化塩素 / オージェ分析 / リモートプラズマ / lifetime / passivation / reflectivity / texture / multicrvstalline / silicon solar cells … More / dry etching / 発電効率 / グループ構造 / ハニカム構造 / 反射スペクトル / 電子顕微鏡 / 反射損失 / 太陽光発電 / ライフタイム / パッシベーション / 反射率 / テクスチャー / 多結晶 / シリコン太陽電池 / ドライエッチング / hydrogen fluoride / micro-channel / texturing / biosensors / solar cells / infrared sensor / 光検出器 / ガラス状炭素 / 流路 / シリコン / マイクロマシニング / マイクロリアクタ / BST膜 / フッ化水素 / 微小流路 / テクスチャー構造 / バイオセンサ / 太陽電池 / 赤外線センサ / polysilicon films / hydrogen passivation / fluorine adsorbates / silicon surfaces / atomic hydrogen / remote plasma / thermal excitation / フッ素吸着物 / 反応カイネティクス / 多結晶シリコン膜 / 水素パッシベーション / 吸着フッ素 / シリコン表面 / 原子状水素 / 熱励起 / 不揮発性メモリ / シリコン窒化酸化膜 / 半導体表面 / 電子分光 / 準安定原子脱励起分光 / 表面電子状態 / 金属ー半導体界面 … More Except Principal Investigator シンクロトロン放射光 / 水素化アモルファスシリコン / マイクロ波励起水素放電管 / グロー放電分解 / vacuum ultra violet / hydrogenated amorphous silicon / hydrogenated amorphous carbon / Synchrotron radiation / 薄膜形成 / 光電離プロセス / アモルファスカーボン膜 / 真空紫外光 / 水素化アモルファスカーボン / 電子スピン共鳴 / 光誘起劣化 / 劣化現象 / 熱分解 / 光学定数測定 / エッチング液開発 / 混晶半導体 / ワイドギャップ半導体 / 窒化物系化合物半導体 / CuInSe_2薄膜 / 分子軌道法 / 光誘起欠陥 / 真空紫外光励起プロセス / 薄膜太陽電池材料 / アモルファスシリコン Less

Study on texturing process by plasamaless dry etching for multi-crystalline silicon solar cellsPrincipal Investigator
- Principal Investigator
  
  SAITO Yoji
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Seikei University
A study on plasmaless etchig process for fabrication of micro-systemsPrincipal Investigator
- Principal Investigator
  
  SAITO Yoji
- Project Period (FY)
  2002 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Seikei University
励起窒素酸素によるシリコン絶縁膜形成プロセスの研究Principal Investigator
- Principal Investigator
  
  齋藤洋司
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Seikei University
Passivation of semiconductor surfaces with low-energy hydrogenPrincipal Investigator
- Principal Investigator
  
  SAITO Yoji
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Seikei University
極端紫外光による高性能アモルファス材料の作製と高効率太陽電池への応用
- Principal Investigator
  
  YOSHIDA Akira
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Okazaki National Research Institutes
マイクロ波励起リモ-トプラズマを用いた新しい混晶半導体単結晶薄膜成長
- Principal Investigator
  
  吉田明
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Okazaki National Research Institutes
半導体ー金属接触構造のヘリウム準安定原子と吸着キセノン光電子による微視的研究Principal Investigator
- Principal Investigator
  
  斎藤洋司
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Toyohashi University of Technology
高効率多層アモルファス太陽電池の高エネルギ照射劣化現象
- Principal Investigator
  
  吉田明
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Toyohashi University of Technology
高効率アモルファス太陽電池のシンクロトロン放射光による劣化現象
- Principal Investigator
  
  吉田明
- Project Period (FY)
  1987
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Toyohashi University of Technology
Synchrotron radiation assisted deposition of amorphous thin films
- Principal Investigator
  
  YOSHIDA Akira
- Project Period (FY)
  1987 – 1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電子材料工学
- Research Institution
  Toyohashi University of Technology

All 2008 2007 2006 2005 2004 2003 2002

All Journal Article Presentation

[Journal Article] Optical properties of groove-and honeycomb-textured silicon surfaces using chlorine trifluoride gas2007
- Author(s)
  S.Narita, H.Sano, T.Momma, Y.Saito
- Journal Title
  
  Proc.Int.Conf.on Elec.Eng.2007 1
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Electrical properties of silicon-related solar cells with groove-and honey comb-textured surfaces using chlorine trifluoride gas2007
- Author(s)
  Y.Saito
- Journal Title
  
  Proc.2007 Korea-Japan Joint Workshop on Advaneed Semiconductor Processes and Equipments 1
  
  Pages: 105-106
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] プラズマレスドライエッチングによるシリコン表面処理とその赤外線センサ作製への応用2007
- Author(s)
  齋藤洋司
- Journal Title
  
  日本赤外線学会第4回赤外放射の応用関連学会等年会 IR-07-03
  
  Pages: 21-25
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2007
- Author(s)
  Y., Saito, T., Kosuge
- Journal Title
  
  Solar Energy Materials and Solar Cells Vol. 91
  
  Pages: 1800-1804
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] texturing process by plasamaless dry etching for crystalline silicon solar cells2007
- Author(s)
  Y., Saito, T., Kosuge, T., Momma
- Journal Title
  
  The Journal of Science and Technology, Seikei Univ Vol. 44, No. 2
  
  Pages: 43-44
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] 結晶系半導体太陽電池のプラズマレスドライテクステヤー化プロセス2007
- Author(s)
  齋藤洋司, 門馬正, 小菅雄史
- Journal Title
  
  成蹊大学理工学研究報告 44
  
  Pages: 43-44
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2007
- Author(s)
  Y.Saito and T.Kosuge
- Journal Title
  
  Solar Energy Materials and Solar Cells 91
  
  Pages: 1800-1804
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Electrical properties of silicon-related solar cells with groove-and honeycomb-textured surfaces using chlorine trifluoride gas2007
- Author(s)
  Y., Saito
- Journal Title
  
  Proc. 2007 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments
  
  Pages: 105-106
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Optical properties of groove-and honeycomb-textured silicon surfaces using chlorine trifluoride gas2007
- Author(s)
  S., Narita, H., Sano, T., Momma, Y., Saito
- Journal Title
  
  Proc. Int. Conf. on Electrical Eng
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] 結晶系半導体太陽電池のプラズマレスドライテクステャー化プロセス2007
- Author(s)
  齋藤洋司, 門馬正, 小菅雄史
- Journal Title
  
  成蹊大学理工学研究報告 44
  
  Pages: 43-44
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] プラズマレスドライエッチングによるシリコン表面処理とその応用2006
- Author(s)
  齋藤洋司
- Journal Title
  
  電気学会フィジカルセンサ研究会資料 PHS-06-20
  
  Pages: 5-12
- NAID
  10018459522
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] 三フッ化塩素ガスを用いてハニカム構造にテクスチャ化したシリコン表面の光学的評価2006
- Author(s)
  小菅雄史, 土橋善之助, 門馬正, 齋藤洋司
- Journal Title
  
  第53回応用物理学関係連合講演会予稿集 III巻
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Optical properties of crystalline silicon surface textured by spontaneous dry etching with chlorine trifluoride gas2006
- Author(s)
  Y.Saito, H.Yamazaki, T.Kosuge
- Journal Title
  
  Abstracts of 2006 Material Research Society Spring Meeting
  
  Pages: 616-616
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Preparation of honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2006
- Author(s)
  Y.Saito and T.Kosuge
- Journal Title
  
  Proc.Int.Conf.on Electrical Eng.2006
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] 三フッ化塩素処理したシリコン基板表面の反射率に与える熱プロセスの影響の検討2006
- Author(s)
  成田, 山崎, 門馬, 齋藤
- Journal Title
  
  第67回応用物理学会学術講演会予稿集 III
  
  Pages: 718-718
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Preparation of honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneousdry etching with chlorine trifluoride gas2006
- Author(s)
  Y.Saito, T.Kosuge
- Journal Title
  
  Proc. Int. Conf. on Electrical Eng. 2006
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Chlorine-trifluoride-textured crystalline silicone solar cells with antireflective nitride films2006
- Author(s)
  H.Yamazaki, T.Kosuge, T.Momma, Y.Saito
- Journal Title
  
  Proc. Int. Conf. on Electrical Eng. 2006
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Chlorine-trifluoride-textured crystalline silicon solar cells with antireflective nitride films2006
- Author(s)
  H., Yamazaki, T., Kosuge, T., Momma, Y., Saito
- Journal Title
  
  Proc. Int. Conf. on Electrical Eng
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Preparation of honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2006
- Author(s)
  Y., Saito, T., Kosuge
- Journal Title
  
  Proc. Int. Conf. on Electrical Eng
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] 酸窒化膜を有する三フッ化塩素テクスチャ結晶系シリコン太陽電池の光学特性2006
- Author(s)
  上戸隆行, 成田昌平, 山崎英雅, 門馬正, 齋藤洋司
- Journal Title
  
  第53回応用物理学関係連合講演会予稿集 III巻
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Chlorine-trifluoride-textured crystalline silicon solar cells with antireflective nitride films2006
- Author(s)
  H.Yamazaki, T.Kosuge, T.Momma, Y.Saito
- Journal Title
  
  Proc.Int.Conf.on Electrical Eng.2006
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Surface treatments of silicon by plasmaless etching and their applications2006
- Author(s)
  Y., Saito
- Journal Title
  
  The Papers of Tech. Meet. On Phys. Sensor, IEE Japan
  
  Pages: 5-12
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Optical properties of polycrystalline siliconsurfaces for solar cells treated with chlorine trifluoride gas2005
- Author(s)
  T.Kosuge, T.Momma, Y.Saito
- Journal Title
  
  Proc.International Conference on Electrical Engineering 2005 (in press)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] A Study on the reaction between chlorine trifluoride gas and glass-like carbon2005
- Author(s)
  Y.Saito, T.Nishizawa, M.Hamaguchi
- Journal Title
  
  Applied Surface Science Vol.240/1-4
  
  Pages: 381-387
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] A Study on the reaction between chlorine trifluoride gas and glass-like carbon2005
- Author(s)
  Y.Saito, T.Nishizawa, M.Hamaguchi
- Journal Title
  
  Applied Surface Science vol.240/1-4
  
  Pages: 381-387
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Maskless surface treatments of crystalline silicon by spontaneous dry etching with chlorine trifluoride gas for photovoltaic cells2005
- Author(s)
  Y. Saito
- Journal Title
  
  Proc. 2005 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments
  
  Pages: 179-182
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Maskless surface treatments of crystalline silicon by spontaneous dry etching with chlorine trifluoride gas for photovoltaic cells2005
- Author(s)
  Y., Saito
- Journal Title
  
  Proc. 2005 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments
  
  Pages: 179-182
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Maskless surface treatments of crystalline silicon by spontaneous dry etching with chlorine trifluoride gas for photovoltaic cells"2005
- Author(s)
  Y.Saito
- Journal Title
  
  Proc. 2005 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments
  
  Pages: 179-182
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Optical properties of polycrystalline silicon surfaces for solar cells treated with chlorine trifluoride gas"2005
- Author(s)
  T.Kosuge, T.Momma, Y.Saito
- Journal Title
  
  Proc.Int.Conf.on Elec.Eng.2005
- Data Source
  KAKENHI-PROJECT-17560291
[Journal Article] Bolometer-type infrared sensors fabricated by plasmaless dry etching2004
- Author(s)
  Y.Saito, H.Murotani
- Journal Title
  
  Sensors and Materials vol.16,No.4
  
  Pages: 191-198
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] スピオンシリコン酸化膜処理温度の無水フッ化水素エッチングへの影響2004
- Author(s)
  齋藤洋司, 中村信貴
- Journal Title
  
  材料の科学と工学 Vol.41,No.4
  
  Pages: 216-219
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Annealing effects on etching characteristics of spin-coated silicon oxide films with anhydrous hydrogen fluoride gas2004
- Author(s)
  Y.Saito, N.Nakamura
- Journal Title
  
  J.Mater.Sci.& Tech. vol.41,No.4
  
  Pages: 216-219
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Bolometer-type infrared sensors fabricated by plasmaless dry etching2004
- Author(s)
  Y.Saito, H.Murotani
- Journal Title
  
  Sensors and Materials Vol.16, No.4
  
  Pages: 191-198
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Thermal-type-infrared sensors prepared by plasmaless etching process2004
- Author(s)
  H.Murotani, R.Okada, Y.Saito
- Journal Title
  
  Proc.Asia-Pacific Conf.of Transducers and Micro-Nano Technology 2004 Vol.3-2
  
  Pages: 790-793
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Bolometer-type infrared sensors fabricated by plasmaless dry etching2004
- Author(s)
  Y.Saito, H.Murotani
- Journal Title
  
  Sensors and Materials Vol.16,No.4
  
  Pages: 191-198
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] A Study on the reaction between chlorine trifluoride gas and glass-like carbon2004
- Author(s)
  Y.Saito, T.Nishizawa, M Hamaguchi
- Journal Title
  
  Applied Surface Science Vol.240/1-4
  
  Pages: 381-387
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] スピンオンシリコン酸化膜熱処理温度の無水フッ化水素エッチングへの影饗2004
- Author(s)
  齋藤洋司, 中村信貴
- Journal Title
  
  材料の科学と工学 Vol.41, No.4
  
  Pages: 216-219
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Highly-sensitive infrared sensors using undoped polycrystalline silicon films2003
- Author(s)
  H.Murotani, Y.Saito
- Journal Title
  
  Proc.Int.Conf.on Electrical Eng.2003 070
  
  Pages: 1-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Helium addition effect on the remote-plasma-enhanced etching of silicon-related materials using anhydrous hydrogen fluoride gas2003
- Author(s)
  N.Nakamura, Y.Saito
- Journal Title
  
  Proc.International Conference on Electrical Engineering 2003 067
  
  Pages: 1-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] Characteristics of plasmaless dry etching of silicon-related materials using chlorine trifluoride gas2002
- Author(s)
  Yoji Saito
- Journal Title
  
  Sensors and Materials vol.14,no.5
  
  Pages: 231-237
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Journal Article] A study on the reaction between chlorine trifluoride gas and carbon-related materials for semiconductor equipments2002
- Author(s)
  Y.Saito, H.Takaoka, T.Nishizawa, M.Hamaguchi
- Journal Title
  
  Proc.Int.Conf.on Electrical Engineering 2002 vol.3
  
  Pages: 1356-1359
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-14550305
[Presentation] Effects of bias voltage on hydrogen passivation in multicrystalline silicon solar cell2008
- Author(s)
  H., Sano, S., Tomita, H., Kohata, T., Momma, Y., Saito
- Organizer
  The 55th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
- Place of Presentation
  Funabashi
- Year and Date
  2008-03-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 多結晶Si太陽電池の水素パッシベーションにおけるバイアス電圧の効果2008
- Author(s)
  佐野英之, 富田誠一, 幸畑隼人, 門馬正, 齋藤洋司
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学
- Year and Date
  2008-03-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Optical properties of groove- and honeycomb-textured silicon surfaces using chlorine trifluoride gas2007
- Author(s)
  S., Narita, H., Sano, T., Momma, Y., Saito
- Organizer
  The 54th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
- Place of Presentation
  Sagamihara
- Year and Date
  2007-03-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Heat treatment effects on surface reflection of chlorine-trifloride-textured single crystalline silicon2007
- Author(s)
  H., Sano, S., Narita, T., Momma, Y., Saito
- Organizer
  The 68th Autumn Meet., The Jpn. Soc. of Appl. Phys
- Place of Presentation
  Sapporo
- Year and Date
  2007-09-06
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] CIF_3テクスチャ処理したシリコン基板表面の反射率に与える熱プロセスの影響2007
- Author(s)
  佐野英之, 成田昌平, 門馬正, 齋藤洋司
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学
- Year and Date
  2007-09-06
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 三フッ化塩素ガスを用いてグループ状テクスチャ処理を行った結晶シリコン太陽電池の特性2007
- Author(s)
  佐野英之, 成田昌平, 門馬正, 齋藤洋司
- Organizer
  日本材料科学会平成19年度学術大会講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2007-05-25
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] プラズマレスドライエッチングによるシリコン表面処理とその赤外線センサ作製への応用2007
- Author(s)
  齋藤洋司
- Organizer
  日本赤外線学会第4回赤外放射の応用関連学会等年会
- Place of Presentation
  東京大学
- Year and Date
  2007-02-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 三フッ化塩素ガスを用いてハニカム状テクスチャ処理を行った結晶シリコン太陽電池の特性2007
- Author(s)
  成田昌平, 佐野英之, 門馬正, 齋藤洋司
- Organizer
  日本材料科学会平成19年度学術大会講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2007-05-25
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Electrical properties of honeycomb-, textured solar cells using C1F3 gas2007
- Author(s)
  S., Narita, H., Sano, T., Momma, Y., Saito
- Organizer
  2007 Annual Meet. Mat. Sci. Soc. Japan
- Place of Presentation
  Tokyo
- Year and Date
  2007-05-25
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Electrical properties of groove-textured solar, cells using C1F3 gas2007
- Author(s)
  H., Sano, S., Narita, T., Momma, Y., Saito
- Organizer
  2007 Annual Meet. Mat. Sci. Soc. Japan
- Place of Presentation
  Tokyo
- Year and Date
  2007-05-25
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Surface treatments of silicon and their application to fabrication process of photo-electroric devices by plasmaless dry etching2007
- Author(s)
  Y., Saito
- Organizer
  The 4th annual meeting of the Societies Related to Infrared Radiation
- Place of Presentation
  Tokyo
- Year and Date
  2007-02-07
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 銀粒子触媒を用いた単結晶シリコンへの逆ピラミッド構造形成と太陽電池への応用2007
- Author(s)
  津留親佑, 圓山洋介, 松村道雄, 成田昌平, 齋藤洋司
- Organizer
  2007年電気化学秋季大会
- Place of Presentation
  東京工業大学
- Year and Date
  2007-09-19
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Optical properties of crystalline silicon surfaces textured by spontaneous dry etching with chlorine trifluoride gas2006
- Author(s)
  Y., Saito, H., Yamazaki, T., Kosuge
- Organizer
  2006 Material Research Society Spring Meeting
- Place of Presentation
  San Francisco
- Year and Date
  2006-04-19
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 高周波スパッタにより結晶系シリコン上に堆積させた酸窒化反射防止膜の評価2006
- Author(s)
  上戸隆行, 山崎英雅, 門馬正, 齋藤洋司
- Organizer
  日本材料科学会平成18年度学術大会講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2006-05-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] A Study on oxynitride anti-reflection films deposited onto crystalline silicon by a high frequency sputtering method2006
- Author(s)
  T., Uendo, H., Yamazaki, S., Narita, T., Momma, Y., Saito
- Organizer
  2006 Annual Meet. Mat. Sci. Soc. Japan
- Place of Presentation
  Tokyo
- Year and Date
  2006-05-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Fabrication of fine honeycomb-textured solar cells using C1F3 gas2006
- Author(s)
  H., Yamazaki, T., Kosuge, Y., Tsuchihashi, T., Momma, Y., Saito
- Organizer
  2006 Annual Meet. Mat. Sci. Soc. Japan
- Place of Presentation
  Tokyo
- Year and Date
  2006-05-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 三フッ化塩素処理したシリコン基板表面の反射率に与える熱プロセスの影響の検討2006
- Author(s)
  成田昌平, 山崎英雅, 門馬正, 齋藤洋司
- Organizer
  日本材料科学会平成18年度学術大会講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2006-05-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Optical properties of textured solar cells with silicon oxynitride films2006
- Author(s)
  T., Uendo, H., Yamazaki, S., Narita, T., Momma, Y., Saito
- Organizer
  The 53th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
- Place of Presentation
  Tokyo
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Optical properties of honeycomb-textured silicon surfaces using chlorine trifluoride gas2006
- Author(s)
  T., Kosuge, Y., Tsuchihashi, T., Momma, Y., Saito
- Organizer
  The 53th Spring Meet., The Jpn. Soc. of Appl. Phys. and Rel. Soc
- Place of Presentation
  Tokyo
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Optical properties of crystalline silicon surfaces textured by spontaneous dry etching with chlorine trifluoride gas2006
- Author(s)
  Y.Saito, H.Yamazaki, T.Kosuge
- Organizer
  2006 Material Research Society Spring Meeting
- Place of Presentation
  San Francisco,USA
- Year and Date
  2006-04-19
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Influence of heat treatments on reflectance of textured surfaces of silicon substrates2006
- Author(s)
  S., Narita, H., Yamazaki, T., Momma, Y., Saito
- Organizer
  The 67th Autumn Meet., The Jpn. Soc. of Appl. Phys
- Place of Presentation
  Kusatsu
- Year and Date
  2006-09-01
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 酸窒化膜を有する三フッ化塩素テクスチャ結晶系シリコン太陽電池の光学特性2006
- Author(s)
  上戸隆行, 成田昌平, 山崎英雅, 門馬正, 齋藤洋司
- Organizer
  第53回応用物理学関係連合講演会
- Place of Presentation
  武蔵工業大学
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 三フッ化塩素処理したシリコン基板表面の反射率に与える熱プロセスの影響の検討2006
- Author(s)
  成田, 山崎, 門馬, 齋藤
- Organizer
  第67回応用物理学会学術講演会
- Place of Presentation
  立命館大学
- Year and Date
  2006-09-01
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 三フッ化塩素ガスを用いた微小ハニカム状テクスチャ処理結晶系シリコン太陽電池の作製2006
- Author(s)
  山崎英雅, 小菅雄史, 土橋善之助, 門馬正, 齋藤洋司
- Organizer
  日本材料科学会平成18年度学術大会講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2006-05-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] 三フッ化塩素ガスを用いてハニカム構造にテクスチャ化したシリコン表面の光学的評価2006
- Author(s)
  小菅雄史, 土橋善之助, 門馬正, 齋藤洋司
- Organizer
  第53回応用物理学関係連合講演会
- Place of Presentation
  武蔵工業大学
- Year and Date
  2006-03-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560291
[Presentation] Influence of annealing on reflectance of textured surfaces of silicon substrates2006
- Author(s)
  S., Narita, H., Yamazaki, T., Momma, Y., Saito
- Organizer
  2006 Annual Meet. Mat. Sci. Soc. Japan
- Place of Presentation
  Tokyo
- Year and Date
  2006-05-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560291

1. YOSHIDA Akira (20023145)

# of Collaborated Projects: 5 results

# of Collaborated Products: 0 results
2. 加藤久雄

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. SUZUKI Seiichi (40235958)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. UEHARA Shingo (40232780)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. OGAWA Hiroshi (10039290)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. NAMIKI Akira (40126941)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

SAITO Yoji 齋藤 洋司

齋藤 洋司 サイトウ ヨウジ

斎藤 洋司 サイトウ ヨウジ

Research Projects

Research Products

Co-Researchers

Study on texturing process by plasamaless dry etching for multi-crystalline silicon solar cellsPrincipal Investigator

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A study on plasmaless etchig process for fabrication of micro-systemsPrincipal Investigator

Principal Investigator

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励起窒素酸素によるシリコン絶縁膜形成プロセスの研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Passivation of semiconductor surfaces with low-energy hydrogenPrincipal Investigator

Principal Investigator

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Research Institution

極端紫外光による高性能アモルファス材料の作製と高効率太陽電池への応用

Principal Investigator

Project Period (FY)

Research Category

Research Institution

マイクロ波励起リモ-トプラズマを用いた新しい混晶半導体単結晶薄膜成長

Principal Investigator

Project Period (FY)

Research Category

Research Institution

半導体ー金属接触構造のヘリウム準安定原子と吸着キセノン光電子による微視的研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Institution

高効率多層アモルファス太陽電池の高エネルギ照射劣化現象

Principal Investigator

Project Period (FY)

Research Category

Research Institution

高効率アモルファス太陽電池のシンクロトロン放射光による劣化現象

Principal Investigator

Project Period (FY)

Research Category

Research Institution

Synchrotron radiation assisted deposition of amorphous thin films

Principal Investigator

Project Period (FY)

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Research Institution

[Journal Article] Optical properties of groove-and honeycomb-textured silicon surfaces using chlorine trifluoride gas2007

Author(s)

Journal Title

Description

Data Source

[Journal Article] Electrical properties of silicon-related solar cells with groove-and honey comb-textured surfaces using chlorine trifluoride gas2007

Author(s)

Journal Title

Description

Data Source

[Journal Article] プラズマレスドライエッチングによるシリコン表面処理とその赤外線センサ作製への応用2007

Author(s)

Journal Title

Data Source

[Journal Article] Honeycomb-textured structures on crystalline silicon surfaces for solar cells by spontaneous dry etching with chlorine trifluoride gas2007

Author(s)

Journal Title

Description

Data Source

SAITO Yoji 齋藤洋司

齋藤洋司サイトウヨウジ

斎藤洋司サイトウヨウジ