Yamada Hideaki 山田英明

… Alternative Names

Hideaki Yamada 山田英明

YAMADA Hideaki 山田英明

山田英明ヤマダヒデアキ

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Researcher Number	90443233
Other IDs
Affiliation (Current)	2025: 国立研究開発法人産業技術総合研究所, エネルギー・環境領域, 研究チーム長
Affiliation (based on the past Project Information) *help	2021 – 2023: 国立研究開発法人産業技術総合研究所, エネルギー・環境領域, 研究チーム長 2017: 国立研究開発法人産業技術総合研究所, エネルギー・環境領域, 主任研究員 2017: 国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクス研究センター, 研究員 2016: 産業技術総合研究所, 先進パワーエレクトロニクス研究センターダイヤモンド材料チーム, 主任研究員 2015 – 2016: 国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクス研究センター, 主任研究員 … More 2013 – 2014: 独立行政法人産業技術総合研究所, ユビキタスエネルギー研究部門, 主任研究員 2009: 独立行政法人産業技術総合研究所, ダイヤモンド研究センター, 研究員 2007: 独立行政法人産業技術総合研究所, ダイヤモンド研究センター, 研究員 Less
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Basic Section 30010:Crystal engineering-related Except Principal Investigator Production engineering/Processing studies / Plasma science
Keywords	Principal Investigator ダイヤモンド / 結晶成長 / シミュレーション / マイクロ波プラズマ / インチサイズウェハ / 導電性エピ成長 / 熱流体シミュレーション / 不純物ドープ / 熱フィラメントCVD / 超ワイドバンドギャップ半導体材料 … More / 熱フィラメントＣＶＤ / 単結晶ダイヤモンド / 電子・電気材料 / マイクロストリップライン（ＭＳＬ）型プラズマ / マイクロストリップラインプラズマ / プラズマCVD / ダイヤモンドウェハ / バルク単結晶 / プラズマ … More Except Principal Investigator サファイア / スラリーレス / ダイヤモンド / GaN / SiC / ダメージフリー / ワイドギャップ半導体 / 研磨 / 表面改質 / 大気圧プラズマ / プラズマエッチング / プラズマCVD / 反応性ラジカル / 分子動力学 / 光物性 / プラズマ / 膜堆積 / プラズマプロセス / 反応性プラズマ Less

Mechanism of Crystal Growth of Single Crystalline Diamond on Inch-sized WafersPrincipal Investigator
- Principal Investigator
  
  Hideaki Yamada
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 30010:Crystal engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Efficient epitaxial growth of single crystalline diamond by production of high radicals and electronsPrincipal Investigator
- Principal Investigator
  
  Hideaki Yamada
- Project Period (FY)
  2016 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Development of frontier for growth of large single crystal diamond wafers to realize energy saving power electronic devicesPrincipal Investigator
- Principal Investigator
  
  Hideaki Yamada
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Development of highly efficient damage-free finishing technique for wide gap semiconductor substrate utilizing atmospheric pressure plasma
- Principal Investigator
  
  Yamamura Kazuya
- Project Period (FY)
  2013 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
Elementary processes of photon, radical, and electron irradiation and their synergetic effects for plasma-surface interaction
- Principal Investigator
  
  HAMAGUCHI Satoshi
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University

All 2023 2022 2017 2016 2015 2014 2013 Other

All Journal Article Presentation Patent

[Journal Article] Study of horizontal and vertical uniformity of B-doped layer on mosaic single crystal diamond wafers by using hot-filament chemical vapor deposition2022
- Author(s)
  Hideaki Yamada, Takehiro Shimaoka
- Journal Title
  
  Functional Diamond
  
  Volume: 2 Pages: 46-52
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21H01832
[Journal Article] The growth of single crystal diamonds using a nonthemal microwave-excited plasma jet2017
- Author(s)
  金載浩、山田英明、榊田創
- Journal Title
  
  Proceedings of The 10th EU-Japan Joint Symposium on Plasma Processing
  
  Volume: 1 Pages: 1-2
- Data Source
  KAKENHI-PROJECT-16K14237
[Journal Article] Factors to control uniformity of single crystal diamond growth by using microwave plasma CVD2016
- Author(s)
  山田英明、茶谷原昭義、大曲新矢、杢野由明
- Journal Title
  
  ＤIAMOND AND RELATED MATERIALS
  
  Volume: 63 Pages: 17-20
- DOI
  10.1016/j.diamond.2015.09.016
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25820129
[Journal Article] Dielectric properties of single crystalline diamond wafers with large area at microwave wavelengths2015
- Author(s)
  山田英明、Andreas Meier、Francesco Mazzocchi、Sabine Schreck、Theo A. Scherer
- Journal Title
  
  ＤIAMOND AND RELATED MATERIALS
  
  Volume: 58 Pages: 1-4
- DOI
  10.1016/j.diamond.2015.05.004
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25820129
[Journal Article] Effects of intentionally introduced nitrogen and substrate temperature on growth of diamond bulk single-crystalｓ2015
- Author(s)
  山田英明、茶谷原昭義、杢野由明
- Journal Title
  
  JAPANESE JOURNAL OF APPLIED PHYSIＣＳ
  
  Volume: 55 Issue: 1S Pages: 01AC07-01AC07
- DOI
  10.7567/jjap.55.01ac07
- NAID
  210000145955
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25820129
[Journal Article] Unintentional tungsten incorporation in diamond during hot-filament chemical vapor deposition2015
- Author(s)
  大曲新矢、Srimongkon Kridsanapan、Vittaya Amornkitbamrung、山田英明、茶谷原昭義、鹿田真一
- Journal Title
  
  Transactions of the Materials Research Society of Japan
  
  Volume: 40 Issue: 1 Pages: 47-50
- DOI
  10.14723/tmrsj.40.47
- NAID
  130005068870
- ISSN
  1382-3469, 2188-1650
- Language
  Japanese
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25820129
[Journal Article] Effects of crystallographic orientation on the homoepitaxial overgrowth on tiled single crystal diamond clones2015
- Author(s)
  山田英明、茶谷原昭義、杢野由明、加藤有香子、鹿田真一
- Journal Title
  
  DIAMOND AND RELATED MATERIALS
  
  Volume: 印刷中 Pages: 17-21
- DOI
  10.1016/j.diamond.2015.01.007
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25820129
[Journal Article] Numerical microwave plasma discharge study for the growth of large single-crystal diamond2015
- Author(s)
  山田英明、茶谷原昭義、杢野由明、鹿田真一
- Journal Title
  
  DIAMOND AND RELATED MATERIALS
  
  Volume: 54 Pages: 9-14
- DOI
  10.1016/j.diamond.2014.11.005
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25820129
[Journal Article] A 2-in. mosaic wafer made of a single-crystal diamond2014
- Author(s)
  H. Yamada, A. Chayahara, Y. Mokuno, Y. Kato and S. Shikata
- Journal Title
  
  Applied Physics Letters
  
  Volume: 104 Issue: 10 Pages: 102110-102110
- DOI
  10.1063/1.4868720
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25820128, KAKENHI-PROJECT-25820129
[Journal Article] デバイス用ダイヤモンドウェハのUVアシスト研磨に関する研究2014
- Author(s)
  田川智彦, 峠睦, 坂本武司, 鹿田真一, 山田英明, 加藤有香子
- Journal Title
  
  精密工学会誌
  
  Volume: 80 Pages: 587-591
- NAID
  130004745482
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25820129
[Journal Article] Characterization of free-standing single-crystal diamond prepared by hot-filament chemical vapor deposition2014
- Author(s)
  S.Ohmagari, H.Yamada, H.Umezawa,A.Chayahara,T.Teraji and S.Shikata
- Journal Title
  
  Diamond and Related Materials
  
  Volume: 48 Pages: 19-23
- DOI
  10.1016/j.diamond.2014.06.001
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25249036, KAKENHI-PROJECT-25820129
[Patent] ダイヤモンドのエッチング方法、ダイヤモンドの結晶欠陥の検出方法、およびダイヤモンド結晶の結晶成長方法2014
- Inventor(s)
  姚永昭、石川由加里、山田英明、茶谷原昭義
- Industrial Property Rights Holder
  姚永昭、石川由加里、山田英明、茶谷原昭義
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2014-259658
- Filing Date
  2014-12-24
- Data Source
  KAKENHI-PROJECT-25820129
[Patent] モザイク状ダイヤモンドの製造方法2014
- Inventor(s)
  山田英明、茶谷原昭義、杢野由明、鹿田真一
- Industrial Property Rights Holder
  山田英明、茶谷原昭義、杢野由明、鹿田真一
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2014-096700
- Filing Date
  2014-05-08
- Data Source
  KAKENHI-PROJECT-25820129
[Patent] 単結晶ダイヤモンドの製造方法2013
- Inventor(s)
  山田英明、茶谷原昭義、杢野由明
- Industrial Property Rights Holder
  山田英明、茶谷原昭義、杢野由明
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2013-205154
- Filing Date
  2013-09-30
- Data Source
  KAKENHI-PROJECT-25820129
[Patent] 単結晶ダイヤモンドの製造方法2013
- Inventor(s)
  山田英明、茶谷原昭義、杢野由明
- Industrial Property Rights Holder
  山田英明、茶谷原昭義、杢野由明
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2013-205146
- Filing Date
  2013-09-30
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Plasma and Related Processing for Diamond Wafers2023
- Author(s)
  山田英明
- Organizer
  Grobal Plasma Forum in Aomori
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21H01832
[Presentation] 単結晶ダイヤモンドの産業応用を目指すウェハ作製技術における現状と課題2023
- Author(s)
  山田英明
- Organizer
  第４２回電子材料シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-21H01832
[Presentation] The growth of single crystal diamonds using a nonthemal microwave-excited plasma jet2017
- Author(s)
  金載浩、山田英明、榊田創
- Organizer
  The 10th EU-Japan Joint Symposium on Plasma Processing
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14237
[Presentation] 電子励起高密度ラジカル供給によるダイヤモンド成長2017
- Author(s)
  金載浩、榊田創、板垣宏知、山田英明
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K14237
[Presentation] Development of an advanced microwave plasma source and its applications2017
- Author(s)
  金載浩、榊田創、板垣宏知、山田英明
- Organizer
  9th International Workshop on Plasma Scientech for All Something (PLASAS-9)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14237
[Presentation] プラズマを援用した砥粒を用いない単結晶ダイヤモンドウエハの高能率研磨2017
- Author(s)
  江守健, 道上久也, 遠藤勝義, 山田英明, 茶谷原昭義, 杢野由明, 山村和也
- Organizer
  日本機械学会関西学生会平成28年度学生員卒業研究発表講演会
- Place of Presentation
  大阪大学吹田キャンパス（大阪府・吹田市）
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] 大気圧プラズマプロセスをベースとした単結晶ダイヤモンド基板の高能率ダメージフリー平坦化・平滑化（第７報）-プラズマエッチング反応領域の制限によるエッチピット成長の抑制-2016
- Author(s)
  道上久也, 遠藤勝義, 山田英明, 茶谷原昭義, 杢野由明, 山村和也
- Organizer
  2016年度精密工学会春季大会学術講演会
- Place of Presentation
  東京理科大学野田キャンパス（千葉県野田市）
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] Planarization of CVD grown single crystal diamond wafer by numerically controlled plasma chemical vaporization machining2016
- Author(s)
  H. Dojo, K. Endo, H. Yamada, A. Chayahara, Y. Mokuno, K. Yamamura
- Organizer
  16th International Conference of the European Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Nottingham, UK
- Year and Date
  2016-05-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] 大面積ダイヤモンド基板上への合成におけるAr導入効果2016
- Author(s)
  山田英明、茶谷原昭義、杢野由明
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学(東京）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Investigation of determining factor of etching rate of single crystal diamond in plasma chemical vaporization machining2016
- Author(s)
  H. Dojo, K. Endo, H. Yamada, A. Chayahara, Y. Mokuno, K. Yamamura
- Organizer
  16th International Conference on Precision Engineering (ICPE2016)
- Place of Presentation
  アクトシティ浜松（静岡県・浜松市）
- Year and Date
  2016-11-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] 大気圧プラズマプロセスをベースとした単結晶ダイヤモンド基板の高能率ダメージフリー平坦化・平滑化（第8報）－エッチングレートの基板温度依存性の調査－2016
- Author(s)
  道上久也, 遠藤勝義, 山田英明, 茶谷原昭義, 杢野由明, 山村和也
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学水戸キャンパス（茨城県・水戸市）
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] Progress and current status of single crystal diamond wafers for high power electronics2015
- Author(s)
  山田英明
- Organizer
  The 3rd French Japanese workshop on diamond power devices
- Place of Presentation
  Nｉmes, FRANCE
- Year and Date
  2015-07-07
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] プラズマ援用研磨によるダイヤモンドウエハの研磨における砥石材質と研磨特性の相関2015
- Author(s)
  道上久也, 田畑雄壮, 鄧輝, 遠藤勝義, 山村和也, 山田英明, 茶谷原昭義, 杢野由明
- Organizer
  精密工学会2015年度関西地方定期学術講演会
- Place of Presentation
  京都工芸繊維大学松ヶ崎キャンパス（京都府京都市左京区）
- Year and Date
  2015-06-23
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] ダイヤモンドウェハ・バルクの作製技術開発2015
- Author(s)
  山田英明
- Organizer
  第３回放電・プラズマ気相シミュレーション技法調査専門委員会
- Place of Presentation
  金沢大学（石川）
- Year and Date
  2015-09-18
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] ダイヤモンド単結晶基板の作製とパワーデバイス応用2015
- Author(s)
  山田英明
- Organizer
  平成２６年度第３回ナノ理工学情報交流会
- Place of Presentation
  大阪大学
- Year and Date
  2015-01-14
- Invited
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 単結晶ダイヤモンドウェハ作製技術開発2015
- Author(s)
  山田英明、茶谷原昭義、杢野由明
- Organizer
  先進パワー半導体分科会第２回講演会
- Place of Presentation
  大阪国際交流センター(大阪）
- Year and Date
  2015-11-09
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] マイクロ波プラズマジェットの数値制御走査による単結晶 CVD ダイヤモンドウエハの平坦化2015
- Author(s)
  道上久也, 田畑雄壮, 遠藤勝義, 山田英明, 茶谷原昭義, 杢野由明, 山村和也
- Organizer
  日本機械学会関西学生会平成26年度学生員卒業研究発表講演会
- Place of Presentation
  京都大学・桂キャンパス
- Year and Date
  2015-03-14
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] プラズマCVDを用いたダイヤモンド単結晶成長における基板温度変化と窒素添加効果2015
- Author(s)
  山田英明
- Organizer
  応用物理学会春季学術講演会
- Place of Presentation
  東海大学
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Single-crystal diamond growth with sub-millisecond-pulsed discharge of microwave plasma2015
- Author(s)
  山田英明、茶谷原昭義、杢野由明
- Organizer
  CRP-9/GEC-68/SPP-3
- Place of Presentation
  Honolulu, USA
- Year and Date
  2015-10-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Study of growth mechanism for uniform CVD of single-crystal diamond2015
- Author(s)
  山田英明、茶谷原昭義、大曲新矢、杢野由明
- Organizer
  ＮＤＮＣ2015
- Place of Presentation
  静岡グランシップ（静岡）
- Year and Date
  2015-05-25
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 次世代型の省エネパワーデバイスを指向した単結晶ダイヤモンドウェハ作製技術【キーノート講演】2015
- Author(s)
  山田英明
- Organizer
  精密加工学会
- Place of Presentation
  東洋大学
- Year and Date
  2015-03-19
- Invited
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 大気圧プラズマをベースとした単結晶CVDダイヤモンドウエハの平坦化・平滑化2015
- Author(s)
  道上久也, 田畑雄壮, 遠藤勝義, 山村和也, 山田英明, 茶谷原昭義, 杢野由明
- Organizer
  精密工学会第22回学生会員卒業研究発表講演会
- Place of Presentation
  東洋大学・白山キャンパス
- Year and Date
  2015-03-17
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] ダイヤモンド合成用のマイクロ波のパルス化による効果2015
- Author(s)
  山田英明、茶谷原昭義、杢野由明
- Organizer
  第32回プラズマ・核融合学会年会
- Place of Presentation
  名古屋大学（愛知）
- Year and Date
  2015-11-24
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 大気圧プラズマプロセスをベースとした単結晶ダイヤモンド基板の高能率ダメージフリー平坦化・平滑化（第 5 報） -XPSとFTIR-ATR法を用いた表面終端構造の解析による平滑化モデルの提唱-2015
- Author(s)
  田畑雄壮, 道上久也, 遠藤勝義, 山田英明, 茶谷原昭義, 杢野由明, 山村和也
- Organizer
  2015年度精密工学会春季大会学術講演会
- Place of Presentation
  東洋大学・白山キャンパス
- Year and Date
  2015-03-19
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] Effects of inpurity and substrate temperature on diamond growth2015
- Author(s)
  山田英明
- Organizer
  ISPlasma2015/IC-PLANTS2015
- Place of Presentation
  Nagoya Univ.
- Year and Date
  2015-03-26
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Planarization and Smoothing of CVD Grown Diamond Wafer by Atmospheric Pressure Plasma Based Process2015
- Author(s)
  H. Dojo, T. Tabata, K. Endo, H. Yamada, A. Chayayahara, Y. Mokuno, K. Yamamura
- Organizer
  The 6th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Place of Presentation
  Harbin, China
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] 大気圧プラズマプロセスをベースとした単結晶ダイヤモンド基板の高能率ダメージフリー平坦化・平滑化（第6報）-ラマン分光法を用いた表面構造の解析によるダイヤモンド除去モデルの提唱-2015
- Author(s)
  道上久也, 田畑雄壮, 鄧輝, 遠藤勝義, 山村和也, 山田英明, 茶谷原昭義, 杢野由明
- Organizer
  2015年度精密工学会秋季大会学術講演会
- Place of Presentation
  東北大学川内北キャンパス（宮城県仙台市青葉区）
- Year and Date
  2015-09-03
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] Planarization and Smoothing of CVD Grown Diamond Wafer by Atmospheric Pressure Plasma Based Process2015
- Author(s)
  道上久也、田畑雄壮、遠藤勝義、山田英明、茶谷原昭義、杢野由明、山村和也
- Organizer
  ASPEN2015
- Place of Presentation
  ハルピン,中国
- Year and Date
  2015-08-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Processing to fabricate mosaic wafers of single-crystal diamond with 2 inch size2014
- Author(s)
  山田英明
- Organizer
  International Conference on Diamond and Carbon Materials
- Place of Presentation
  Ｍａｄｒｉｄ，　Ｓｐａｉｎ
- Year and Date
  2014-09-17
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Current status of techniques to fabricate single-crystal diamond wafers2014
- Author(s)
  山田英明
- Organizer
  15th IUMRS-ICA
- Place of Presentation
  Fukuoka Univ
- Year and Date
  2014-08-24
- Invited
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 熱フィラメントCVD法で成長した単結晶ダイヤモンド膜の構造評価2014
- Author(s)
  大曲新矢、山田英明、茶谷原昭義、鹿田真一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学(神奈川)
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 結晶ダイヤモンドウェハ作製技術開発の現状－合成・加工及び関連技術－2014
- Author(s)
  山田英明
- Organizer
  第2回「表面創成工学の新展開」研究会
- Place of Presentation
  田沢湖芸術村(秋田県)
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 2インチ大の接合型単結晶ダイヤモンドウェハの試作2014
- Author(s)
  山田英明、茶谷原昭義、杢野由明、加藤有香子、鹿田真一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学(神奈川)
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] マイクロ波プラズマＣＶＤを用いたダイヤモンド単結晶成長速度およびその分布解析2014
- Author(s)
  山田英明
- Organizer
  Plasma Conference 2014
- Place of Presentation
  朱鷺メッセ
- Year and Date
  2014-09-14
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] マイクロ波プラズマCVDによるダイヤモンドの合成速度の制御2013
- Author(s)
  山田英明、茶谷原昭義、杢野由明
- Organizer
  第27回ダイヤモンドシンポジウム
- Place of Presentation
  日本工業大学(埼玉)
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] 熱フィラメントCVD法によるホモエピタキシャルダイヤモンド膜合成2013
- Author(s)
  大曲新矢、山田英明、茶谷原昭義、鹿田真一
- Organizer
  第27回ダイヤモンドシンポジウム
- Place of Presentation
  日本工業大学(埼玉)
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] パワーデバイス応用を目指したウェハ・デバイスの開発課題2013
- Author(s)
  鹿田真一、梅澤仁、加藤有香子、大曲新矢、山田英明、坪内信輝、杢野由明、茶谷原昭義
- Organizer
  第27回ダイヤモンドシンポジウム
- Place of Presentation
  日本工業大学(埼玉)
- Data Source
  KAKENHI-PROJECT-25820129
[Presentation] Highly efficient planarization of CVD-grown single-crystal diamond substrate by atmospheric-pressure microwave plasma jet figuring
- Author(s)
  K. Yamamura, S. Makiyama, T. Tabata, H. Yamada, A. Cyayahara, Y. Mokuno, S. Shikata, K. Endo
- Organizer
  International Conference on Diamond and Carbon Materials 2014
- Place of Presentation
  Madrid, Spain
- Year and Date
  2014-09-07 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-25249006
[Presentation] Effect of plasma irradiation in removal rate of single crystal diamond in plasma assisted polishing with quartz glass tool
- Author(s)
  T. Tabata, K. Monna, Y. Yamamoto, S. Makiyama, H. Deng, K. Endo, H. Yamada, A. Chayahara, Y. Mokuno, S. Shikata, K. Yamamura
- Organizer
  The 15th International Conference on Precision Engineering (ICPE2014)
- Place of Presentation
  Kanazawa, Japan
- Year and Date
  2014-07-23 – 2014-07-25
- Data Source
  KAKENHI-PROJECT-25249006

1. SHIKATA Shinichi (00415689)

# of Collaborated Projects: 2 results

# of Collaborated Products: 1 results
2. SAKAKITA HAJIME (90357088)

# of Collaborated Projects: 2 results

# of Collaborated Products: 4 results
3. HAMAGUCHI Satoshi (60301826)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. YOSHIMURA Satoru (40294029)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. KITANO Katsuhisa (20379118)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. Yamamura Kazuya (60240074)

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
7. 金載浩 (30376595)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
8. 大曲新矢 (40712211)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 嶋岡毅紘 (80650241)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
10. 加藤有香子

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
11. 梅沢仁

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
12. 茶谷原昭義

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Yamada Hideaki 山田 英明

Hideaki Yamada 山田 英明

YAMADA Hideaki 山田 英明

山田 英明 ヤマダ ヒデアキ

Research Projects

Research Products

Co-Researchers

Mechanism of Crystal Growth of Single Crystalline Diamond on Inch-sized WafersPrincipal Investigator

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Efficient epitaxial growth of single crystalline diamond by production of high radicals and electronsPrincipal Investigator

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Development of frontier for growth of large single crystal diamond wafers to realize energy saving power electronic devicesPrincipal Investigator

Principal Investigator

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Research Institution

Development of highly efficient damage-free finishing technique for wide gap semiconductor substrate utilizing atmospheric pressure plasma

Principal Investigator

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Elementary processes of photon, radical, and electron irradiation and their synergetic effects for plasma-surface interaction

Principal Investigator

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[Journal Article] Study of horizontal and vertical uniformity of B-doped layer on mosaic single crystal diamond wafers by using hot-filament chemical vapor deposition2022

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[Journal Article] The growth of single crystal diamonds using a nonthemal microwave-excited plasma jet2017

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[Journal Article] Factors to control uniformity of single crystal diamond growth by using microwave plasma CVD2016

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[Journal Article] Dielectric properties of single crystalline diamond wafers with large area at microwave wavelengths2015

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[Journal Article] Effects of intentionally introduced nitrogen and substrate temperature on growth of diamond bulk single-crystalｓ2015

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NAID

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[Journal Article] Unintentional tungsten incorporation in diamond during hot-filament chemical vapor deposition2015

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[Journal Article] Effects of crystallographic orientation on the homoepitaxial overgrowth on tiled single crystal diamond clones2015

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[Journal Article] Numerical microwave plasma discharge study for the growth of large single-crystal diamond2015

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[Journal Article] A 2-in. mosaic wafer made of a single-crystal diamond2014

Yamada Hideaki 山田英明

Hideaki Yamada 山田英明

YAMADA Hideaki 山田英明

山田英明ヤマダヒデアキ