Kometani Reo 米谷玲皇

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KOMETANI Reo 米谷玲皇

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Researcher Number	90466780
Other IDs
Affiliation (Current)	2025: 東京大学, 大学院新領域創成科学研究科, 准教授
Affiliation (based on the past Project Information) *help	2017 – 2024: 東京大学, 大学院新領域創成科学研究科, 准教授 2011 – 2017: 東京大学, 工学(系)研究科(研究院), 講師 2016: 東京大学, 大学院工学系研究科(工学部), 講師 2015: 東京大学, 新領域創成科学研究科, 特任研究員 2012: 東京大学, 工学系研究科, 講師 … More 2011 – 2012: 東京大学, 大学院・工学系研究科, 講師 2011: 東京大学, 工学(系)研究科(研究院), 助教 2008 – 2011: 東京大学, 大学院・工学系研究科, 助教 Less
Review Section/Research Field	Principal Investigator Science and Engineering / Basic Section 29020:Thin film/surface and interfacial physical properties-related / Intelligent mechanics/Mechanical systems / Materials/Mechanics of materials / Production engineering/Processing studies / Thin film/Surface and interfacial physical properties Except Principal Investigator Production engineering/Processing studies / Nano/Microsystems / Design engineering/Machine functional elements/Tribology
Keywords	Principal Investigator NEMS / ナノメカニカル振動子 / センシング / ナノメカニクス / フォトニック結晶 / プラズモニクス / 光圧 / マイクロ・ナノデバイス / 光物性 / 機械材料・材料力学 … More / 波長計測 / 情報科学 / ナノメカニカル素子 / フォトニックナノ構造 / 光計測 / 微小共振器 / スペクトロメーター / 位相分解計測 / 動ひずみ / ナノ振動子 / 先端増強ラマン分光 / 顕微ラマン分光 / ひずみ計測 / 顕微ラマン分光法 / ひずみ / 機械特性 / ナノメカニカル構造体 / 機械要素 / メカニカル振動子 / グラフェン / ＤＬＣ振動 / シリコン振動子 / DLC振動子 / 光検出 / 光通信 / ナノ機械振動子 / 集束イオンビーム / 超薄膜 … More Except Principal Investigator ナノメカニクス / メカニカル振動子 / 自己組織化 / ナノ加工・ナノ計測 / 電子ビーム・イオンビーム / 機械共振特性 / ナノ計測 / センシングデバイス / ナノ振動子 / 三次元ナノ構造 / プラズモニック構造 / ナノマイクロ光デバイス / 表面増強ラマン散乱 / 呼気ガス分析 / アセトン / 非線形振動特性 / 極低濃度ガスセンシング / 連結ナノ機械振動子 / ノイズ信号処理 / ブロック共重合体ナノ構造 / グラフェン / 酸化スズ / ガス弁別機能 / ガスセンシング / ハイブリッド構造 / グラファイト / フラーレン / TEM / 透過電子顕微鏡 / MEMS / 超潤滑 / トライボロジー / ナノ・マイクロデバイス / ナノメカニカル振動子 / ナノ計測・ナノ加工 / NEMS / ナノマイクロ加工 / 薄膜形成 / FIB-CVD / 基板処理 / 光学多層膜 / プラズモン共鳴 / 自由膜 / 多層膜 / テンプレート / 集束イオンビーム化学気相成長法 / ブロック共重合体 / ナノ・マイクロ加工 / 高Q値 / 機械特性評価 / 微小共振器 / 機械共振特性評価 / センシング / ナノレゾネータ / ナノ加工・計測 / マイクロ・ナノデバイス / 電子ビーム・イオンビーム加工 / 機械振動共振特性 / ナノ加工 Less

超高感度光圧センシングNEMS技術創出と光-ナノ構造の相互作用の解明Principal Investigator
- Principal Investigator
  
  米谷玲皇
- Project Period (FY)
  2022 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 29020:Thin film/surface and interfacial physical properties-related
- Research Institution
  The University of Tokyo
光圧計測知的ナノメカニカルシステムの創出Principal Investigator
- Principal Investigator
  
  米谷玲皇
- Project Period (FY)
  2019 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokyo
Nanooptoelectromechanical systems for the molecular sensingPrincipal Investigator
- Principal Investigator
  
  Kometani Reo
- Project Period (FY)
  2017 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Intelligent mechanics/Mechanical systems
- Research Institution
  The University of Tokyo
光路最適化したメタサーフェスを用いた表面増強ラマンデバイスの創製
- Principal Investigator
  
  前田悦男
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Nano/Microsystems
- Research Institution
  The University of Tokyo
Research on the high spatial resolution dynamic characteristics profiling technology using atomic force microscopePrincipal Investigator
- Principal Investigator
  
  Kometani Reo
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  The University of Tokyo
極軽量・原子層メカニカル構造の機能化Principal Investigator
- Principal Investigator
  
  米谷玲皇
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  The University of Tokyo
Fabrication of nanosystem for wavelength detectionPrincipal Investigator
- Principal Investigator
  
  Kometani Reo
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Development of a nano mechanical sensor for gas molecule detection at low density by hybrid structure fabrication technique
- Principal Investigator
  
  WARISAWA Shin'ichi
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Research on the ultra-thin film mechanical resonator for high resolution wavelength detectionPrincipal Investigator
- Principal Investigator
  
  KOMETANI Reo
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  The University of Tokyo
Understanding Mechanism of Super-Lubrication Driven by Graphite/Fullerene Composite using in-situ TEM
- Principal Investigator
  
  ISHIDA Tadashi
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Design engineering/Machine functional elements/Tribology
- Research Institution
  Tokyo Institute of Technology
  The University of Tokyo
Creation and Characterization of Nanomechanical Structures andits Applications to Devices
- Principal Investigator
  
  ISHIHARA Sunao
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Three dimensional nanostructure fabrication technology using self-assemble phenomena
- Principal Investigator
  
  WARISAWA Shinichi
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Nanostructure creation and its functionalization
- Principal Investigator
  
  ISHIHSRA Sunao
- Project Period (FY)
  2007 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo

[Book] ナノ・マイクロスケール機械工学(石原直, 加藤千幸, 光石衛, 渡邊聡[編])2014
- Author(s)
  米谷玲皇
- Publisher
  東京大学出版会
- Data Source
  KAKENHI-PROJECT-23760025
[Journal Article] Highly sensitive vibration measurement method of nanomechanical resonator using convolutional neural network2022
- Author(s)
  Kohei Tsumune, Shin'ichi Warisawa, Reo Kometani
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: -
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Journal Article] Highly sensitive vibration measurement method of nanomechanical resonator using convolutional neural network2022
- Author(s)
  Kohei Tsumune, Shin'ichi Warisawa, Reo Kometani
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: -
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H03198
[Journal Article] Operando Measurement of Dynamic Characteristics of Nanoelectromechanical Systems Using Scanning Electron Microscopy2021
- Author(s)
  米谷玲皇, 割澤伸一
- Journal Title
  
  Journal of The Society of Instrument and Control Engineers
  
  Volume: 60 Issue: 3 Pages: 213-216
- DOI
  10.11499/sicejl.60.213
- NAID
  130007999988
- ISSN
  0453-4662, 1883-8170
- Year and Date
  2021-03-10
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-19H04671, KAKENHI-PROJECT-17H03198
[Journal Article] Miniaturization process of three-dimensional nanostructures fabricated by focused-ion-beam chemical vapor deposition2021
- Author(s)
  Reo Kometani, Moe Katsuda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 60 Issue: 12 Pages: 1280021-4
- DOI
  10.35848/1347-4065/ac3525
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-19H04671, KAKENHI-PROJECT-17H03198
[Journal Article] Quantification method of stress depth-distribution by micro-Raman spectroscopy for thin film nanomechanical resonator2020
- Author(s)
  M. Saito, S. Warisawa and R. Kometani
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 59 Issue: SI Pages: SIII02-SIII02
- DOI
  10.35848/1347-4065/ab79ed
- Peer Reviewed
- Data Source
  KAKENHI-PUBLICLY-19H04671, KAKENHI-PROJECT-17H03198
[Journal Article] Ultra-thin Carbon Nanomechanical Resonator Fabrication and Its Dynamic Property Characterization2019
- Author(s)
  R. Kometani, M. Sekine and S. Warisawa
- Journal Title
  
  Sensors and Materials
  
  Volume: 31 Issue: 3 Pages: 673
- DOI
  10.18494/SAM.2019.2153
- ISSN
  0914-4935, 2435-0869
- Year and Date
  2019-03-08
- Language
  English
- Open Access
- Data Source
  KAKENHI-PROJECT-17H03198
[Journal Article] Triple-walled gold surfaces with small-gaps for nonresonance surface enhanced Raman scattering of rhodamine 6G molecules2016
- Author(s)
  Tatsuya Baba, Yaerim Lee, Ai Ueno, Ryo Takigawa, Reo Kometani, Etsuo Maeda
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 34 Issue: 1 Pages: 011802-011802
- DOI
  10.1116/1.4938483
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13317, KAKENHI-PROJECT-15K13827, KAKENHI-PROJECT-26709005, KAKENHI-PROJECT-14J09886
[Journal Article] グラフェンメカニカル構造の機能化2016
- Author(s)
  米谷玲皇
- Journal Title
  
  炭素
  
  Volume: 275 Issue: 275 Pages: 191-198
- DOI
  10.7209/tanso.2016.191
- NAID
  130005250239
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26709005
[Journal Article] Mechanical characteristics of ultra-long horizontal nanocantilevers grown by real-time feedback control on focused-ion-beam chemical vapour deposition2015
- Author(s)
  D. Guo, S. Warisawa, S. Ishihara, R. Kometani
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 25 Issue: 12 Pages: 125028-125028
- DOI
  10.1088/0960-1317/25/12/125028
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-26107513, KAKENHI-PROJECT-26709005
[Journal Article] Growth of ultra-long horizontal free-space-nanowire by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2013
- Author(s)
  D. Guo, R. Kometani, S. Warisawa, S. Ishihara
- Journal Title
  
  Journal of Vacuum Science & Technology B
  
  Volume: 31 Pages: 61601-61601
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23760025
[Journal Article] Growth of ultra-long horizontal free-space-nanowire by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2013
- Author(s)
  Dengji Guo, Reo Kometani, Shin'ichi Warisawa, Sunao Ishihara
- Journal Title
  
  Journal of Vacuum Science & Technology B
  
  Volume: 31 Issue: 6 Pages: 61601-61601
- DOI
  10.1116/1.4824170
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J04726, KAKENHI-PROJECT-23760025
[Journal Article] “Superconductivity in Tungsten-Carbide Nanowires Deposited from the Mixtures of W(CO)6 and C14H102013
- Author(s)
  Jun Dai, Koji Onomitsu, Reo Kometani, Yoshiharu Krockenberger, Hiroshi Yamaguchi, Sunao Ishihara, Shin’ichi Warisawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 7R Pages: 75001-75001
- DOI
  10.7567/jjap.52.075001
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23760025
[Journal Article] Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition2012
- Author(s)
  Hiroki Ashiba
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 30 Issue: 6
- DOI
  10.1116/1.4766315
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J08898, KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
[Journal Article] Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition2012
- Author(s)
  D. Guo, R. Kometani, S. Warisawa, and S.Ishihara
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: 51 Issue: 6R Pages: 65001-65001
- DOI
  10.1143/jjap.51.065001
- NAID
  40019317176
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
[Journal Article] High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain2012
- Author(s)
  Y. Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa, S. Ishihara
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 5 Issue: 11 Pages: 117201-117201
- DOI
  10.1143/apex.5.117201
- NAID
  10031126464
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-22656035, KAKENHI-PROJECT-23760025
[Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012
- Author(s)
  S. Warisawa, K. Kuroda, S. Chen, R.Kometani, S. Ishihara
- Journal Title
  
  J. Photopolym. Sci. Technol
  
  Volume: 25 Pages: 37-37
- NAID
  130004464942
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012
- Author(s)
  S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 25 Issue: 1 Pages: 37-42
- DOI
  10.2494/photopolymer.25.37
- NAID
  130004464942
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-22656035, KAKENHI-PROJECT-23760025
[Journal Article] Nanoporous Structure Fabrication in Selective Areas by Block Copolymer Self-Assembly and Electron Beam Lithography2012
- Author(s)
  H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 25 Issue: 1 Pages: 33-36
- DOI
  10.2494/photopolymer.25.33
- NAID
  130004464941
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] Gradually shifting surface plasmon resonance by controlling the diameter of a nano-hole structure by self-assembly2011
- Author(s)
  T.Takagi, K.Kurihara, K.Awazu, R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 29 Issue: 6 Pages: 06FF03-06FF03
- DOI
  10.1116/1.3660387
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360059, KAKENHI-PROJECT-22226004
[Journal Article] Gradually shifting surface plasmon resonance by controlling the diameter of a nano-hole structure by self-assembly2011
- Author(s)
  T. Takagi, R. Kometani, S. Ishihara, S. Warisawa
- Journal Title
  
  J. Vac. Sci. Technolo. B
  
  Volume: 29
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360059
[Journal Article] Quality factor enhancement on nanomechanical resonators utilizing stiction phenomena2011
- Author(s)
  H. Ashiba, R. Kometani, S. Warisawa, and S.Ishihara
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 29 Issue: 6
- DOI
  10.1116/1.3660384
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] Carbon nano- mechanical resonator fabrication from PMMA by FIB/electron-beam dual-beam lithography2011
- Author(s)
  R. Kometani, T. Hatakeyama, K. Kuroda, S.Warisawa, and S. Ishihara
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 29 Issue: 6
- DOI
  10.1116/1.3662083
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
[Journal Article] Selective graphene growth from DLC thin film patterned by focused-ion-beam chemical vapor deposition2011
- Author(s)
  T. Hatakeyama, R. Kometani, S. Warisawa, and S. Ishihara
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 29 Issue: 6 Pages: 06FG04-06FG04
- DOI
  10.1116/1.3655581
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-22656035
[Journal Article] Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor depo- sition2011
- Author(s)
  R. Kometani, S. Nishi, S. Warisawa, and S.Ishihara
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 29 Issue: 6
- DOI
  10.1116/1.3662493
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
[Journal Article] Electromechanical Displacement Detection With an On-chip High Electron Mobility Transistor Amplifier2011
- Author(s)
  Y. Oda, K. Onomitsu, R. Kometani, S.Warisawa, S. Ishihara, and H. Yamaguchi
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: 50 Issue: 6S Pages: 06GJ01-06GJ01
- DOI
  10.1143/jjap.50.06gj01
- NAID
  210000070732
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] High-sensitivity charge detection using antisymmetric vibration in coupled micromechanical oscillators2011
- Author(s)
  H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
- Journal Title
  
  Applied Physics Letters
  
  Volume: 98
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] High-sensitivity charge detection using antisymmetric vibration in coupled micromechanical oscillators2011
- Author(s)
  H. Okamoto, N. Kitajima, K. Onomitsu, R.Kometani, S. Warisawa, S. Ishihara and H.Yamaguchi
- Journal Title
  
  Appl. Phys. Lett
  
  Volume: 98 Issue: 1 Pages: 14103-14103
- DOI
  10.1063/1.3541959
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] The 3D nanostructure growth evaluations by the real-time current monitoring on focused-ion-beam chemical vapor deposition2010
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 87 Pages: 1044-1048
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] Evaluation of Resonance Characteristics Change of Silicon Resonators Due to Surface Treatment2010
- Author(s)
  H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Jpn.J.Appl.Phys. 49
- NAID
  210000068736
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  J.Vac.Sci.Technol.B 28
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Non-Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical-Vapor-Deposition2010
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 49
- NAID
  210000068637
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2010
- Author(s)
  S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  J.Adv.Mech.Des.Sys.Man. 4
  
  Pages: 948-948
- NAID
  130000335368
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Evaluation of Resonance Characteristics Change of Silicon Resonators Due to Surface Treatment2010
- Author(s)
  H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 49
- NAID
  210000068736
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] Nanostructure fabrication by self-assembly of block copolymers on three-dimensional diamond-like carbon structures2010
- Author(s)
  H.Mino, R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Journal of Vaccum Science and Technology B
  
  Volume: 28(6)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] The 3D nanostructure growth evaluations by the real-time current monitoring on focusedion-beam chemical vapor deposition2010
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Microelectronic Eng. 87
  
  Pages: 1044-1048
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2010
- Author(s)
  S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Journal of Advanced Mechanical Design, Systems, and Manufacturing
  
  Volume: 4(5) Pages: 958-954
- NAID
  130000335368
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Journal Title
  
  Journal of Vaccum Science and Technology B
  
  Volume: 28(6)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226004
[Journal Article] Nanostructure fabrication by self-assembly of block copolymers on three-dimensional diamond-like carbon structures2010
- Author(s)
  H. Mino, R. Kometani, S. Warisawa, S. Ishihara
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 20
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21360059
[Journal Article] Evaluations of the hopping growth characteristics on 3-D nanostructure fabrication using focused-ion-beam2009
- Author(s)
  R. Kometani, S. Warisawa, S. Ishihara
- Journal Title
  
  J.Vac.Sci.Technol. B27
  
  Pages: 2698-2701
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Graphite Shell Film Formation Induced by Eduction Phenomenon of Ga Implanted by Focused Ion Beam2009
- Author(s)
  米谷玲皇, T.Ichihashi, 割澤伸一, 石原直
- Journal Title
  
  Japanese Journal of Applied Physics 48
- NAID
  210000066925
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Growth characteristics evaluations on the 3D nansotructure fabrication by the high accuracy control of focused-ion-beam2009
- Author(s)
  米谷玲皇, T.Hoshino, 割澤伸一, 石原直
- Journal Title
  
  Microelectronic Engineering 86
  
  Pages: 552-555
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams2009
- Author(s)
  R.Kometani, S.Ishihara
- Journal Title
  
  Sci.Technol.Adv.Mater. 10
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Evaluations of the hopping growth characteristics on 3-D nanostructure fabrication using focused-ion-beam2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Journal Title
  
  Journal of Vacuum Science and Technology B27
  
  Pages: 2698-2701
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Eduction Position Control of Incorporated Gallium in the Diamond-like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition2008
- Author(s)
  R. Kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito and S. Matsui
- Journal Title
  
  Japanese Journal of Applied Physics Vol. 47, No. 6
  
  Pages: 5032-5035
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] Resistivity change of the diamondlike carbon, deposited by focusedion-beam Chemical vapor deposition, induced by the annealing treatmen2008
- Author(s)
  R. Kometani, T. Ichihashi, K. Kanda, T. Suzuki, K, Niihara, S. Ishihara, T. Kaito and S. Matsui
- Journal Title
  
  Journal of Vacuum Science and Technology B26, 6
  
  Pages: 2628-2631
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206016
[Journal Article] In-Situ Observation of the Three-Dimensional Nano-Structure Growth on Focused-Ion-Beam Chemical Vapor Deposition by Scanning Electron Microscope2008
- Author(s)
  R. Kometani, S. Ishihara, T. Kaito and S. Matsui
- Journal Title
  
  Applied Physics Express Vol. 1
- NAID
  10025080476
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206016
[Patent] 微小機械振動構造の作製方法2014
- Inventor(s)
  米谷玲皇，山口浩司
- Industrial Property Rights Holder
  米谷玲皇，山口浩司
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2014-187324
- Filing Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-26709005
[Patent] 光検出振動子、光波長計測装置、光波長計測方法、および光検出振動子の作製方法2013
- Inventor(s)
  米谷玲皇,石原直,割澤伸一,劉琿,守屋和樹,山口浩司,岡本創
- Industrial Property Rights Holder
  東京大学,日本電信電話株式会社
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2013-171972
- Filing Date
  2013-08-22
- Data Source
  KAKENHI-PROJECT-23760025
[Patent] 超伝導回路の作製方法2012
- Inventor(s)
  米谷玲皇,代俊,割澤伸一,石原直,小野満恒二,山口浩司
- Industrial Property Rights Holder
  東京大学、日本電信電話株式会社
- Industrial Property Number
  2012-187329
- Filing Date
  2012-08-28
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小構造物の製造装置、及び製造方法2012
- Inventor(s)
  米谷玲皇, 郭登極,割澤伸一,石原直
- Industrial Property Rights Holder
  東京大学
- Industrial Property Number
  2012-018557
- Filing Date
  2012-10-01
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小構造物の製造装置、及び製造方法2012
- Inventor(s)
  米谷玲皇、郭登極、割澤伸一、石原直
- Industrial Property Rights Holder
  米谷玲皇、郭登極、割澤伸一、石原直
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2012-018557
- Filing Date
  2012-10-01
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 超伝導回路の作製方法2012
- Inventor(s)
  米谷玲皇、代俊、割澤伸一、石原直，小野満恒二，山口浩司
- Industrial Property Rights Holder
  米谷玲皇、代俊、割澤伸一、石原直，小野満恒二，山口浩司
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2012-187329
- Filing Date
  2012-08-28
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小機械振動子の製造方法および微小機械振動子2011
- Inventor(s)
  芦葉裕樹、米谷玲皇、石原直、割澤伸一、山口浩司
- Industrial Property Rights Holder
  芦葉裕樹、米谷玲皇、石原直、割澤伸一、山口浩司
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2011-111517
- Filing Date
  2011-05-18
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小機械振動子とその製造方法2011
- Inventor(s)
  西駿次郎、米谷玲皇、割澤伸一、石原直、山口浩司
- Industrial Property Rights Holder
  西駿次郎、米谷玲皇、割澤伸一、石原直、山口浩司
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2011-111521
- Filing Date
  2011-05-18
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小機械振動子の製造方法および微小機械振動子2011
- Inventor(s)
  芦葉裕樹,米谷玲皇,石原直,割澤伸一,山口浩司
- Industrial Property Rights Holder
  東京大学、日本電信電話株式会社
- Industrial Property Number
  2011-111517
- Filing Date
  2011-05-18
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小機械振動子とその製造方法2011
- Inventor(s)
  西駿次郎,米谷玲皇,割澤伸一,石原直,山口浩司
- Industrial Property Rights Holder
  東京大学,日本電信電話株式会社
- Industrial Property Number
  2011-111521
- Filing Date
  2011-05-18
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小構造体の作製方法2010
- Inventor(s)
  米谷玲呈,石原直, 割澤伸一, 遊佐幸樹, 山口浩司, 永瀬雅夫, 岡本創
- Industrial Property Rights Holder
  東京大学,日本電信電話(株)
- Filing Date
  2010-05-28
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小構造体の作製方法2010
- Inventor(s)
  米谷玲皇, 石原直, 割澤伸一, 遊佐幸樹, 山口浩司, 永瀬雅夫, 岡本創
- Industrial Property Rights Holder
  東京大学,日本電信電話(株)
- Industrial Property Number
  2010-122423
- Filing Date
  2010-05-28
- Data Source
  KAKENHI-PROJECT-19206016
[Patent] 微小構造体の製造方法2010
- Inventor(s)
  米谷玲呈,石原直, 割澤伸一, 黒田耕平, 山口浩司, 永瀬雅夫, 岡本創
- Industrial Property Rights Holder
  東京大学,日本電信電話(株)
- Filing Date
  2010-06-22
- Data Source
  KAKENHI-PROJECT-22226004
[Patent] 微小構造体の製造方法2010
- Inventor(s)
  米谷玲皇, 石原直, 割澤伸一, 黒田耕平, 山口浩司, 永瀬雅夫, 岡本創
- Industrial Property Rights Holder
  東京大学,日本電信電話(株)
- Industrial Property Number
  2010-141690
- Filing Date
  2010-06-22
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 畳み込みニューラルネットワークを利用した液中微小機械振動子の振動測定2023
- Author(s)
  別所和樹, 割澤伸一, 米谷玲皇
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K23219
[Presentation] Evaluation of highly sensitive vibration states of nanomechanical resonators in liquid using a convolutional neural network2023
- Author(s)
  K. Bessho, S. Warisawa, R. Kometani
- Organizer
  49th international conference on Micro and Nano Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23219
[Presentation] 液体金属FIB ～3次元ナノ造形技術，デバイス研究への利用～2022
- Author(s)
  米谷玲皇
- Organizer
  応用物理学会ナノ荷電粒子ビーム産学連携委員会　2022年ナノ荷電粒子ビームに関する研究会事業
- Invited
- Data Source
  KAKENHI-PROJECT-23K23219
[Presentation] 荷電粒子ビーム技術とナノメカニクス2021
- Author(s)
  米谷玲皇
- Organizer
  高分子学会印刷・情報・電子用材料研究会
- Invited
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] ナノメカニクスとNEMSセンシング2021
- Author(s)
  米谷玲皇
- Organizer
  科学技術交流財団新産業創出に向けたマイクロセンサデバイス研究会
- Invited
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] ナノメカニクスとNEMSセンシング2021
- Author(s)
  米谷玲皇
- Organizer
  科学技術交流財団新産業創出に向けたマイクロセンサデバイス研究会
- Invited
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 荷電粒子ビーム技術とNEMSセンシング2021
- Author(s)
  米谷玲皇
- Organizer
  電気学会北陸支部学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Optical force measurement by a nanomechanical resonator electrostatically coupled to a cantilever2021
- Author(s)
  Reo Kometani
- Organizer
  The 2021 International Chemical Congress of Pacific Basin Societies
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 荷電粒子ビーム技術とNEMSセンシング2021
- Author(s)
  米谷玲皇
- Organizer
  電気学会北陸支部学術講演会
- Invited
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 荷電粒子ビーム技術とナノメカニクス2021
- Author(s)
  米谷玲皇
- Organizer
  高分子学会印刷・情報・電子用材料研究会
- Invited
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 畳み込みニューラルネットワークを利用したナノメカニカル振動子の高感度振動計測2021
- Author(s)
  津旨航平, 割澤伸一, 米谷玲皇
- Organizer
  第13回集積化 MEMS シンポジウム
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 光圧計測知的ナノメカニカルシステムの創出2021
- Author(s)
  米谷玲皇
- Organizer
  新学術領域研究「光圧によるナノ物質操作と秩序の創生」, 第5回公開シンポジウム
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 畳み込みニューラルネットワークを利用したナノメカニカル振動子の高感度振動計測2021
- Author(s)
  津旨航平, 割澤伸一, 米谷玲皇
- Organizer
  第13回集積化 MEMS シンポジウム
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Highly Sensitive Vibration Measurement Method of Nanomechanical Resonator Using Convolutional Neural Network2021
- Author(s)
  Kohei Tsumune, Shin’ichi Warisawa, Reo Kometani
- Organizer
  34rd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Highly Sensitive Vibration Measurement Method of Nanomechanical Resonator Using Convolutional Neural Network2021
- Author(s)
  Kohei Tsumune, Shin’ichi Warisawa, Reo Kometani
- Organizer
  34rd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] Optical force measurement by a nanomechanical resonator electrostatically coupled to a cantilever2021
- Author(s)
  Reo Kometani
- Organizer
  The 2021 International Chemical Congress of Pacific Basin Societies
- Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] Fabrication of an optomechanical resonator with a spiral bull's eye antenna for the measurement of light wavelength2021
- Author(s)
  Reo Kometani, Penekwong Khemnat, Shin’ichi Warisawa
- Organizer
  34rd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 狭細な透過光スペクトルを有するブルズアイ構造実現のためのスパイラルブラッグリフレクタ2021
- Author(s)
  大岩達典, 割澤伸一, 米谷玲皇
- Organizer
  第13回集積化 MEMS シンポジウム
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Vibration Spectrum Measurement and Phase-Resolved Image Observation of Nanomechanical Resonators by Helium Ion Microscopy2020
- Author(s)
  Masaki Saito, Shinichi Ogawa, Yukinori Morita, Shin’ichi Warisawa, Reo Kometani
- Organizer
  33rd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] Evaluation method of vibration spectra of nanomechanical resonators using Helium Ion Microscope2020
- Author(s)
  Masaki Saito, Shinichi Ogawa, Yukinori Morita, Shin’ichi Warisawa, Reo Kometani
- Organizer
  The 81st JSAP Autumn Meeting 2020
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] ナノメカニクスと光センシング2020
- Author(s)
  米谷玲皇
- Organizer
  分子研研究会「ナノ空間で光が織りなす分子操作・化学反応制御の新展開」
- Invited
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 超高感度光計測に向けたナノメカニカル振動子の微小振動検出法に関する研究2020
- Author(s)
  米谷玲皇
- Organizer
  「光圧によるナノ物質操作と秩序の創生」, 第4回公開シンポジウム
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] ナノメカニクスと光センシング2020
- Author(s)
  米谷玲皇
- Organizer
  分子研研究会「ナノ空間で光が織りなす分子操作・化学反応制御の新展開」
- Invited
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Vibration Spectrum Measurement and Phase-Resolved Image Observation of Nanomechanical Resonators by Helium Ion Microscopy2020
- Author(s)
  Masaki Saito, Shinichi Ogawa, Yukinori Morita, Shin’ichi Warisawa, Reo Kometani
- Organizer
  33rd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Evaluation method of vibration spectra of nanomechanical resonators using Helium Ion Microscope2020
- Author(s)
  Masaki Saito, Shinichi Ogawa, Yukinori Morita, Shin’ichi Warisawa, Reo Kometani
- Organizer
  The 81st JSAP Autumn Meeting 2020
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] An optomechanical resonator with a plasmonic half bull’s eye antenna and an aperture for wavelength detection2019
- Author(s)
  R. Kometani, K. Tanaka, S. Warisawa
- Organizer
  45th International Conference on Micro & Nano Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Evaluation of etching characteristics on titanium-assisted chemical vapor etching of silicon dioxide2019
- Author(s)
  H. Nishida, S. Warisawa, R. Kometani
- Organizer
  45th International Conference on Micro & Nano Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 顕微ラマン分光法による薄膜メカニカル振動子の応力分布計測手法の構築2019
- Author(s)
  齊藤正樹、割澤伸一、米谷玲皇
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 酸化シリコンのチタン支援高速異方性化学エッチングの加工特性評価2019
- Author(s)
  西田裕信、割澤伸一、米谷玲皇
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] uantification Method of Stress Depth-Distribution by Micro-Raman Spectroscopy for Thin Film Nanomechanical Resonator2019
- Author(s)
  M. Saito, S. Warisawa, R. Kometani
- Organizer
  32nd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] 顕微ラマン分光法による薄膜メカニカル振動子の応力分布計測手法の構築2019
- Author(s)
  齊藤正樹、割澤伸一、米谷玲皇
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 荷電粒子ビーム技術と光ナノセンシング2019
- Author(s)
  米谷玲皇
- Organizer
  OCU先端光科学シンポジウム
- Invited
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] An optomechanical resonator with a plasmonic half bull’s eye antenna and an aperture for wavelength detection2019
- Author(s)
  R. Kometani, K. Tanaka, S. Warisawa
- Organizer
  45th International Conference on Micro & Nano Engineering
- Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-19H04671
[Presentation] Quantification Method of Stress Depth-Distribution by Micro-Raman Spectroscopy for Thin Film Nanomechanical Resonator2019
- Author(s)
  M. Saito, S. Warisawa and R. Kometani
- Organizer
  32nd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Wavelength Detection by optomechanical resonator with Spiral Bull’s Eye Antenna2018
- Author(s)
  K. Penekwong, S. Warisawa, T. Sugaya, S. Hashimoto, Y. Kawano and R. Kometani
- Organizer
  31st International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Fabrication of optomechanical nanoresonators elastically coupled in series by focused-ion-beam for wavelength measurement2018
- Author(s)
  K. Tanaka, S. Warisawa and R. Kometani
- Organizer
  The 79th JSAP Autumn Meeting
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 3次元ナノ構造造形技術とナノメカニクス研究2018
- Author(s)
  米谷玲皇
- Organizer
  2018年日本表面真空学会学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 光波長計測のためのスパイラル型ブルズアイアンテナを有する光機械振動子の作製2018
- Author(s)
  ペンエークウォンケーマナット, 割澤伸一, 菅谷俊夫, 橋本将太, 河野行雄, 米谷玲皇
- Organizer
  2018年第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 半円型ブルズアイ構造を有する直列連結型ナノメカニカル振動子によるQ値非依存波長計測2018
- Author(s)
  田中航大, 割澤伸一, 米谷玲皇
- Organizer
  第9回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] FIB/EB複合リソグラフィーによるナノ光共振器の作製2018
- Author(s)
  吉原健太, 割澤伸一, 米谷玲皇
- Organizer
  第9回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Fabrication of nanomechanical resonaotors elastically couppled in series for sensitive thermal stress detection2018
- Author(s)
  T. Tanaka, E. Maeda, S. Warisawa and R. Kometani
- Organizer
  62nd International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Ultra‐thin film carbon mechanical resonator fabrication and its characterization2018
- Author(s)
  R. Kometani, M. Sekine and S. Warisawa
- Organizer
  44th International Conference on Micro and Nanoengineering
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] 荷電粒子ビーム技術とナノメカニクス研究2018
- Author(s)
  米谷玲皇
- Organizer
  精密工学会 2018年度春季大会
- Invited
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] スパイラル型ブルズアイアンテナを有する光機械振動子の作製と光波長検出特性評価2018
- Author(s)
  ペンエークウォンケーマナット, 割澤伸一, 菅谷俊夫, 橋本将太, 河野行雄, 米谷玲皇
- Organizer
  第9回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Development of Optomechanical Nanoresonators Elastically Coupled in Series for Q Factor Independent Wavelength Measurement2018
- Author(s)
  K. Tanaka, S. Warisawa and R. Kometani
- Organizer
  31st International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] FIB/EB複合リソグラフィーによるNEB-22レジストからのカーボンナノメカニカル構造の作製2017
- Author(s)
  湯浅勇貴, 前田悦男, 米谷玲皇
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県　横浜市　パシフィコ横浜
- Year and Date
  2017-03-15
- Data Source
  KAKENHI-PROJECT-15K13827
[Presentation] Downsizing of the three-dimensional nanostructure fabricated by focused-ion-beam chemical vapor deposition2017
- Author(s)
  R. Kometani, K. Nishikawa, E. Maeda
- Organizer
  43rd International Conference on Micro and Nanoengineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] The Three-Dimensional Nano- and Microstructure Fabrications by Using Focused Ion Beam2017
- Author(s)
  R. Kometani
- Organizer
  2017 Materials Research Society (MRS) Fall Meeting & Exhibit
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Detection Characteristics of Strainof Ultra-thin Silicon Structure by Raman Spectroscopy2017
- Author(s)
  R. Kometani, K. Okada, E. Maeda
- Organizer
  30th International Microprocesses and Nanotechnology Conference (MNC2017)
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] The three-dimensional nanofabrication technology using foucusd-ion-beam2017
- Author(s)
  R. Kometani
- Organizer
  Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices
- Invited
- Data Source
  KAKENHI-PROJECT-17H03198
[Presentation] Fabrication of an optomechanical resonator with a two-interface surface plasmonic structure for the wavelength detection2016
- Author(s)
  R. Kometani, M. Goto, E. Maeda
- Organizer
  The 60th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication (EIPBN2016)
- Place of Presentation
  Wyndham Grand Hotel, Pittsburgh, US
- Year and Date
  2016-06-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] SiO2膜のAl触媒化学蒸気エッチングとその特性評価2016
- Author(s)
  米谷玲皇、村上剛浩、前田悦男
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] Control of upward growth on the three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition2016
- Author(s)
  M. Sekine, E. Maeda, R. Kometani
- Organizer
  42nd Micro and Nano Engineering 2016 (MNE2016)
- Place of Presentation
  Congress Center of Reed Messe Vienna, Vienna, Austria
- Year and Date
  2016-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13827
[Presentation] 集束イオンビーム励起表面反応における上方成長精密制御2016
- Author(s)
  関根瑞恵, 前田悦男, 米谷玲皇
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-16
- Data Source
  KAKENHI-PROJECT-15K13827
[Presentation] In-Plane Optical Power Flow Control with Nano-Fabricated Plasmonic Structures for Micro Total Analysis Systems2016
- Author(s)
  M. Okuno, R. Kometani, and E. Maeda
- Organizer
  THE 60TH INTERNATIONAL CONFERENCE ON ELECTRON, ION, AND PHOTON BEAM TECHNOLOGY AND NANOFABRICATION
- Place of Presentation
  Pittsburgh, PA, USA
- Year and Date
  2016-05-31
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13317
[Presentation] Aluminium-assisted anisotropic chemical vapor etching of silicon dioxide2016
- Author(s)
  R. Kometani, T. Murakami, E. Maeda
- Organizer
  42nd Micro and Nano Engineering 2016 (MNE2016)
- Place of Presentation
  Congress Center of Reed Messe Vienna, Vienna, Austria
- Year and Date
  2016-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] Gold-assisted chemical etching of silicon dioxide technique and application for micro-pattering2015
- Author(s)
  T. Murakami, E. Maeda, R. Kometani
- Organizer
  41th International Conference on Micro and Nano Engineering
- Place of Presentation
  World Forum, The Hauge, The Netherlands
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13827
[Presentation] A minimal optical Yagi-uda nanoantenna array for wavelength detection with optmechanical resonator2015
- Author(s)
  J. Oishi, M. Goto, H. Yamaguchi, E. Maeda, R. Kometani
- Organizer
  41th International Conference on Micro and Nano Engineering
- Place of Presentation
  World Forum, The Hauge, The Netherlands
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] 金属触媒を用いたシリコン酸化膜の化学エッチングとその特性評価2015
- Author(s)
  村上剛浩，前田悦男，米谷玲皇
- Organizer
  第7回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2015-10-30
- Data Source
  KAKENHI-PROJECT-15K13827
[Presentation] 荷電粒子ビーム技術のナノメカニクス研究応用2015
- Author(s)
  米谷玲皇
- Organizer
  エレクトロニクス・表面技術フォーラム
- Place of Presentation
  神奈川県, 神奈川県産業技術センター
- Year and Date
  2015-02-19
- Invited
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] 集束イオンビーム立体ナノ構造形成技術とその高精度化2015
- Author(s)
  米谷玲皇
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県, 東海大学
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] フッ素表面改質によるカーボンナノ機械振動子の高Q値化2015
- Author(s)
  米谷玲皇,　宮腰拓実,　前田悦男
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  愛知県名古屋市名古屋国際会議場
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PUBLICLY-26107513
[Presentation] Influence of Focused-Ion-Beam Process and Annealing Treatment on Resonance of Graphene Nanomechanical Resonator2015
- Author(s)
  R. Kometani, K. Kosugi, K. Tsushima, S. Chiashi, S. Maruyama, E. Maeda
- Organizer
  28th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  富山県富山市富山国際会議場
- Year and Date
  2015-11-12
- Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-26107513
[Presentation] Photonic Absorber with Nano-Fins for Wavelength Detection with Mechanical Resonator in Near-infrared Region2015
- Author(s)
  E. Maeda and R. Kometani
- Organizer
  28th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  富山県富山市富山国際会議場
- Year and Date
  2015-11-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] 光機械振動子を用いた波長測定のための金ナノフィン配列に関する研究2015
- Author(s)
  前田悦男，米谷玲皇
- Organizer
  第7回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2015-10-30
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] フッ化表面改質によるカーボンナノメカニカル振動子の高Q値化2015
- Author(s)
  米谷玲皇,　宮腰拓実,　前田悦男
- Organizer
  第7回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2015-10-29
- Data Source
  KAKENHI-PUBLICLY-26107513
[Presentation] Effect of fluorine surface modification on resonance of a carbon nanoresonator fabricated by FIB/EB dual-beam lithography2015
- Author(s)
  R. Kometani, T. Miyakoshi, E. Maeda
- Organizer
  41th International Conference on Micro and Nano Engineering
- Place of Presentation
  World Forum, The Hauge, The Netherlands
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] Coupled nanomechanical resonator with frequency tuning capability2014
- Author(s)
  Shin’ichi Warisawa, Hiroyuki Tsuno, Reo Kometani and Sunao Ishihara
- Organizer
  The 15th International Conference on Precision Engineering
- Place of Presentation
  Kanazawa, Ishikawa, Japan
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] High Q factor graphene mechanical resonator fabrication using the clamp-bending method2014
- Author(s)
  R. Kometani, Y. Oshidari, S. Ishihara, and S. Warisawa
- Organizer
  The 58th International Conference on Electron, Ion and Photon Beam Techonology & Nanofabrication
- Place of Presentation
  Omni Shoreham Hotel, Washington DC, US
- Year and Date
  2014-05-19
- Data Source
  KAKENHI-PUBLICLY-26107513
[Presentation] Q Factor Enhancement of Grapheme Mechanical Resonator by Fluorine Surface Modification2014
- Author(s)
  R. Kometani, M. Sato, X. Chen, T. Ono, E. Maeda, S. Chiashi, S. Maruyama
- Organizer
  The 40th Micro and Nano Engineering
- Place of Presentation
  The Swiss Tech Convention Center, Lausanne, Switzerland
- Year and Date
  2014-09-26
- Data Source
  KAKENHI-PUBLICLY-26107513
[Presentation] Homogeneous Ultra-Long Overhang Nanostructure Fabrication by Feedback Control of Blanking Time on Focused-Ion-Beam Chemical Vapor Deposition2014
- Author(s)
  R. Kometani and T. Aonuma
- Organizer
  27th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  福岡県, ヒルトン福岡シーホーク
- Year and Date
  2014-11-07
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] 集束イオンビーム技術とナノメカニクス研究2014
- Author(s)
  米谷　玲皇
- Organizer
  応用物理学会シングルナノパターニング研究グループ 2014年度第3回講演会
- Place of Presentation
  大阪府，大阪大学
- Year and Date
  2014-07-15
- Invited
- Data Source
  KAKENHI-PUBLICLY-26107513
[Presentation] 走査電子顕微鏡を利用した微小機械振動子の動特性プロファイリング2014
- Author(s)
  米谷玲皇,中野和洋,石原直,割澤伸一
- Organizer
  2014年第34回応用物理学会春季田学術講演会
- Place of Presentation
  青山学院大学,神奈川県
- Year and Date
  2014-03-18
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] 走査電子顕微鏡を利用した微小機械振動子の動特性プロファイリング2014
- Author(s)
  米谷玲皇，中野和洋，石原直，割澤伸一
- Organizer
  2014年度春季講演会応用物理学会
- Place of Presentation
  青山学院大学，神奈川
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] 集束イオンビーム化学気相成長法を用いた長尺オーバーハングナノ構造形成における材料組成の均質化2014
- Author(s)
  米谷玲皇，青沼正
- Organizer
  75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道, 北海道大学
- Year and Date
  2014-09-17
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] High Q factor graphene mechanical resonator fabrication using the clamp-bending method2014
- Author(s)
  Reo Kometani, Yuta Oshidari, Sunao Ishihara and Shin'ichi Warisawa
- Organizer
  The 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2014)
- Place of Presentation
  Washington DC, USA
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] 顕微鏡技術を応用した微小機械振動子の動特性評価2014
- Author(s)
  米谷玲皇,　中野和洋,　石原直,　割澤伸一
- Organizer
  第6回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  島根県，くにびきメッセ
- Year and Date
  2014-10-20
- Data Source
  KAKENHI-PUBLICLY-26107513
[Presentation] Source gas distribution measurement in focused-ion-beam chemical vapor deposition using graphene sensing device2014
- Author(s)
  Shin'ichi Warisawa, Si Chen, Takahito Ono, Ichiro Yamada, Sunao Ishihara and Reo Kometani
- Organizer
  The 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2014)
- Place of Presentation
  Washington DC, USA
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] 集束イオンビーム立体ナノ構造作製技術とナノメカニクス研究2014
- Author(s)
  米谷玲皇
- Organizer
  ＪＡＩＳＴグリーンデバイス研究センターシンポジウム
- Place of Presentation
  石川県, 北陸先端科学技術大学院大学
- Year and Date
  2014-06-25
- Invited
- Data Source
  KAKENHI-PROJECT-26709005
[Presentation] 走査電子顕微鏡を利用したナノメカニカル振動子の動特性評価2013
- Author(s)
  中野和洋，割澤伸一，石原直，米谷玲皇
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学，大阪
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] ナノメカニクスとその波長計測への応用2013
- Author(s)
  米谷玲皇
- Organizer
  2013年第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学,京都府
- Year and Date
  2013-09-16
- Invited
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] 光波長検出微小機械振動子の作製と特性評価2013
- Author(s)
  米谷玲皇，劉　琿，割澤伸一，石原直
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Characterizations of the carbon nanomechanical resonator fabricated from SU-8 by FIB/EB dual beam lithography2013
- Author(s)
  Yuto Miyata, Shin’ichi Warisawa, Sunao Ishihara, Reo Kometani
- Organizer
  39th International Conference on Micro and Nano Engineering (MNE2013)
- Place of Presentation
  London, UK
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] Partial patterning of periodic nanostructures using block copolymer lithography2013
- Author(s)
  H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
- Organizer
  SPIE Advanced Lithography 2013
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB 複合リソグラフィーにより作製したカーボンナノ振動子の特性評価2013
- Author(s)
  宮田雄斗，割澤伸一，石原直，米谷玲皇
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学，大阪
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection2013
- Author(s)
  Reo Kometani, Hui Liu, Shin'ichi Warisawa, Sunao Ishihara
- Organizer
  The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2013)
- Place of Presentation
  Oral, Nashville, US
- Year and Date
  2013-05-31
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] ynamic characteristics evaluation of nanomechanical resonators by the application of stroboscopic scanning electron microscope2013
- Author(s)
  Kazuhiro Nakano, Shinichi Warisawa, Sunao Ishihara, Reo Kometani
- Organizer
  26th International Microprocesses and Nanotechnology Conference (MNC2013)
- Place of Presentation
  Sapporo, Hokkaido, Japan
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] 光波長検出微小機械振動子の作製と特性評価2013
- Author(s)
  米谷玲皇,劉琿,割澤伸一,石原直
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学,神奈川県
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] 荷電粒子ビーム技術とナノメカニクス研究2013
- Author(s)
  米谷玲皇
- Organizer
  公益社団法人新化学技術推進協会電子情報技術部会MEMS分科会講演会
- Place of Presentation
  新化学技術推進協,東京都
- Year and Date
  2013-10-15
- Invited
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] The growth height correction on the three-dimensional nanostructure fabrication using focused-ion-beam chemical vapor deposition2013
- Author(s)
  R. Kometani, Y. Murao, S. Ishihara, S. Warisawa
- Organizer
  26th International Microprocesses and Nanotechnology Conference (MNC2013)
- Place of Presentation
  Oral, Royton Sapporo, Hokkaido, Japan
- Year and Date
  2013-11-07
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Light-coupled nanomechanical resonator fabrication and its characterization2013
- Author(s)
  Kazuki Moriya, Shin’ichi Warisawa, Sunao Ishihara, Reo Kometani
- Organizer
  39th International Conference on Micro and Nano Engineering(MNE2013)
- Place of Presentation
  London, UK
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] 光波長検出微小機械振動子の作製と特性評価2013
- Author(s)
  米谷玲皇、劉琿、割澤伸一、石原直
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学、厚木市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] ナノ機械振動子を用いた高感度光波長検出に関する研究2013
- Author(s)
  劉琿、米谷玲皇、割澤伸一、石原直
- Organizer
  2013年度精密工学会春季大会学術講演会
- Place of Presentation
  東京工業大学、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 光結合微小機械振動子の作製とその特性評価に関する研究2013
- Author(s)
  守屋　和樹，割澤伸一，石原直，米谷玲皇
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学，大阪
- Data Source
  KAKENHI-PROJECT-25289011
[Presentation] 集束イオンビーム実時間照射量制御によるオーバーハング微細構造の長尺作製2013
- Author(s)
  郭登極、米谷玲皇、割澤伸一、石原直
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学、厚木市
- Invited
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB-CVDを用いた3 次元ナノ構造形成における構造形成高さの補正2013
- Author(s)
  米谷玲皇,村尾裕規,石原直,割澤伸一
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学,大阪府
- Year and Date
  2013-09-13
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Nanomechanical Tuning Forks Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2012
- Author(s)
  H. Ashiba, R. Kometani, S. Warisawa and S. Ishihara
- Organizer
  The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
- Place of Presentation
  Waikoloa, Hawaii, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] EB/FIB Dual-beam Lithography2012
- Author(s)
  R. Kometani
- Organizer
  Next Generation Lithography Workshop 2012 (NGL2012)
- Place of Presentation
  蔵前会館、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Nanomechanical Tuning Forks Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2012
- Author(s)
  H. Ashiba, R. Kometani, S. Warisawa and S.Ishihar
- Organizer
  The 56th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2012)
- Place of Presentation
  Hawaii
- Year and Date
  2012-05-30
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012
- Author(s)
  R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
- Organizer
  25th International Microprocesses and Nanotechnology Conference (MNC2012)
- Place of Presentation
  Kobe, Japan
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] ブロック共重合体リソグラフィによる選択的金属ナノドットアレイの作製2012
- Author(s)
  鈴木裕之、米谷玲皇、石原直、割澤伸一
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学、松山市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 二次電子の角度依存性を利用した微小機械振動子の振動計測法2012
- Author(s)
  中野和洋、米谷玲皇、割澤伸一、石原直
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学、松山市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012
- Author(s)
  S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
- Organizer
  29th International Conference of Photopolymer Science and Technology (ICPST-29)
- Place of Presentation
  Chiba Univ., Chiba, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB-CVD による音叉型ナノメカニカル振動子作製とその振動特性評価2012
- Author(s)
  芦葉裕樹、米谷玲皇、割澤伸一、石原直
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 電子線リソグラフィを用いたジブロック共重合体ミクロ相分離膜の選択的パターニング2012
- Author(s)
  鈴木裕之，米谷玲皇，割澤伸一，石原直
- Organizer
  精密工学会 2012年度春季学術講演会
- Place of Presentation
  首都大学東京、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] The three-dimensional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2012)
- Place of Presentation
  Hawaii, USA(口頭)
- Year and Date
  2012-05-31
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Vibration Characteristics of DLC Nanomechanical Resonator under Parametric Excitation2012
- Author(s)
  K. Fuse, R. Kometani, S. Ishihara, S. Warisawa
- Organizer
  38th International Conference on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012
- Author(s)
  米谷玲皇，畠山大輝，黒田耕平，割澤伸一，石原　直
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Superconductivity of tungsten-containing carbon nanowires fabricated by focused-ion-beam chemical vapor deposition2012
- Author(s)
  代俊、小野満恒二、米谷玲皇、Yoshiharu Krockenberger，割澤伸一、山口浩司、石原直
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Direct Fabrication of WxCy SNS Josephson Junction by Using Focused- ion-beam Chemical Vapor Deposition2012
- Author(s)
  J. Dai, K. Onomitsu, R. Kometani, Y.Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa
- Organizer
  25th International Microprocesses and Nano- technology Conference (MNC2012)
- Place of Presentation
  Kobe, Japan
- Year and Date
  2012-10-31
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Quality factor improvement of grapheme resonator by SU-8 shrinkage-induced strain2012
- Author(s)
  Oshidari, T. Hatakeyama, R. Kometani, W. Warisawa and S. Ishihara
- Organizer
  The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
- Place of Presentation
  Waikoloa, Hawaii, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB 複合リソグラフィーによるHSQ からの３次元ナノ構造作製2012
- Author(s)
  米谷玲皇，黒田耕平，割澤伸一，石原直
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] FIB/EB 複合リソグラフィーによるHSQ からの３次元ナノ構造作製2012
- Author(s)
  米谷玲皇、黒田耕平、割澤伸一、石原直
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学、松山市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Nanoporous Structure Fabrication in Selective Areas by Block Copolymer Self-Assembly and Electron Beam Lithography2012
- Author(s)
  H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
- Organizer
  29th International Conference of Photopolymer Science and Technology (ICPST-29)
- Place of Presentation
  Chiba Univ., Chiba, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Superconductivity of tungsten-containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012
- Author(s)
  J. Dai, R. Kometani, S. Warisawa, S. Ishihara, K. Onomitsu, Y. Krockenberger and H. Yamaguchi
- Organizer
  The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
- Place of Presentation
  Waikoloa, Hawaii, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] SU-8の熱収縮を用いた歪印加によるグラフェン振動子の高Q値化2012
- Author(s)
  忍足優太、畠山大輝、米谷玲皇、割澤伸一、石原直
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] The three-dimentional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  The 56th EIPBN Conference
- Place of Presentation
  Waikoloa, Hawaii
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] 電子線リソグラフィを用いたジブロック共重合体ミクロ相分離膜の選択的パターニング2012
- Author(s)
  鈴木裕之, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  精密工学会2012年度春季大会
- Place of Presentation
  東京,日本
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012
- Author(s)
  R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
- Organizer
  25th International Microprocesses and Nanotechnology Conference (MNC2012)
- Place of Presentation
  Kobe, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Superconductivity of tungsten- containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012
- Author(s)
  Jun Dai, R. Kometani, S. Warisawa, S.Ishihara, K. Onomitsu, Y. Krockenberger, H. Yamaguchi
- Organizer
  The 56th Int. Conf. on Electron, Ion and Photon Beam Technol. and Nanofabrication (EIPBN2012)
- Place of Presentation
  Hawaii
- Year and Date
  2012-05-31
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Superconducting tungsten nanowire growth by focused-ionbeam chemical vapor deposition2012
- Author(s)
  代俊、小野満恒二、米谷玲皇、Y. Krockenberger、割澤伸一、山口浩司、石原直
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学、北九州市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012
- Author(s)
  R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
- Organizer
  25th International Microprocesses and Nanotechnology Conference (MNC2012)
- Place of Presentation
  Oriental Hotel, Kobe, Japan
- Year and Date
  2012-11-01
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012
- Author(s)
  米谷玲皇,畠山大輝,黒田耕平, 割澤伸一,石原直
- Organizer
  2012年第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学,東京都
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Height and Edge Shape Correction on the Nanostructure Fabrication by Focused-ionbeam Chemical Vapor Deposition2012
- Author(s)
  Y. Murao, R. Kometani, S. Warisawa and S. Ishihara
- Organizer
  25th International Microprocesses and Nanotechnology Conference (MNC2012)
- Place of Presentation
  Kobe, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB-CVDの下方成長を利用した三次元ナノ構造の作製2012
- Author(s)
  郭登極、米谷玲皇、割澤伸一、石原直
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB-CVD の実時間走査速度制御による空中水平ナノワイヤの長尺形成2012
- Author(s)
  郭登極、米谷玲皇、割澤伸一、石原直
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学、松山市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Height and Edge Shape Correction on the Nanostructure Fabrication by Focused- ion-beam Chemical Vapor Deposition2012
- Author(s)
  Y. Murao, R. Kometani, S. Warisawa and S.Ishihara
- Organizer
  25th Int. Microprocesses and Nanotechnology Conf. (MNC2012)
- Place of Presentation
  Kobe, Japan
- Year and Date
  2012-10-02
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  38th International Micro & Nano Engineering Conference (MNE 2012)
- Place of Presentation
  Toulouse, France(ポスター)
- Year and Date
  2012-09-17
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Ultra-long horizontal free-space-nanowire growth by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2012
- Author(s)
  D. Guo, R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  38th International Conference on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 自己組織化ジブロック共重合体薄膜をポジ型/ネガ型混合レジストとして用いた電子線リソグラフィ2012
- Author(s)
  鈴木裕之, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京,日本
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Partial Control of Nanoporous Structures Using Block Copolymer Self-Assembly and Electron Beam Lithography2012
- Author(s)
  H. Suzuki, R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  4th International Symposium on Global Center for Excellence for Mechanical Systems Innovation (GMSI)
- Place of Presentation
  The Univ. of Tokyo, Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB 複合リソグラフィーによるHSQ からの3 次元ナノ構造作製2012
- Author(s)
  米谷玲皇,黒田耕平,割澤伸一,石原直
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学,愛媛県
- Year and Date
  2012-09-12
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Direct Fabrication of WxCy SNS Josephson Junction by Using Focused-ion-beam Chemical Vapor Deposition2012
- Author(s)
  J. Dai, K. Onomitsu, R. Kometani, Y. Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa
- Organizer
  25th International Microprocesses and Nanotechnology Conference (MNC2012)
- Place of Presentation
  Kobe, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 集束イオンビーム化学気相成長法による空中水平長尺ナノ構造形成2012
- Author(s)
  郭登極、米谷玲皇、割澤伸一、石原直
- Organizer
  第４回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  北九州国際会議場、北九州市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  38th International Micro & Nano Engineering Conference (MNE 2012)
- Place of Presentation
  Toulouse-France
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] SU-8 の熱収縮を利用した高Q 値グラフェン振動子の作製2012
- Author(s)
  忍足優太、畠山大輝、米谷玲皇、割澤伸一、石原直
- Organizer
  2012年度精密工学会秋季大会学術講演会
- Place of Presentation
  九州工業大学、北九州市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Ultra-long horizontal free-space- nanowire growth by the real-time feedback control of the scanning speed on focused- ion-beam chemical vapor deposition2012
- Author(s)
  D. Guo, R. Kometani, S. Warisawa, S.Ishihara
- Organizer
  38th Int. Conf. on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Year and Date
  2012-09-20
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Vibration measurement technique of micro and nano mechanical resonators using tilt dependence of electron beam-induced secondary electron emission2012
- Author(s)
  K. Nakano, R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  38th International Conference on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] The three-dimentional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
- Place of Presentation
  Waikoloa, Hawaii, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] The three-dimensional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S.Ishihar
- Organizer
  The 56th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2012)
- Place of Presentation
  Hawaii
- Year and Date
  2012-05-31
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Quality factor improvement of grapheme resonator by SU-8 shrinkage-induced strain2012
- Author(s)
  Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa and S. Ishihara
- Organizer
  The 56th Int. Conf. on Electron, Ion and Photon Beam Technol. and Nanofabrication (EIPBN2012)
- Place of Presentation
  Hawaii
- Year and Date
  2012-06-01
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Electron Beam Lithography by Using Self-Assembled Block Copolymer Thin Films as Positive/Negative Tone Combined Resist2012
- Author(s)
  H. Suzuki, R. Kometani, S. Ishihara and S. Warisawa
- Organizer
  The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
- Place of Presentation
  Waikoloa, Hawaii, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Electron Beam Lithography on Block Copolymer Self-Assembled Thin Films2012
- Author(s)
  H. Suzuki, R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  Next Generation Lithography Workshop 2012 (NGL2012)
- Place of Presentation
  蔵前会館、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S.Ishihara
- Organizer
  38th Int. Conf. on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Year and Date
  2012-09-18
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  38th International Conference on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Vibration measurement technique of micro and nano mechanical resonators using tilt dependence of electron beam-induced secondary electron emission2012
- Author(s)
  K. Nakano, R. Kometani, S. Warisawa, S.Ishihara
- Organizer
  38th Int. Conf. on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Year and Date
  2012-09-18
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] EB/FIB Dual-beam Lithography2012
- Author(s)
  R. Kometani
- Organizer
  Next Generation Lithography Workshop 2012 (NGL2012)
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012
- Author(s)
  米谷玲皇、畠山大輝、黒田耕平、割澤伸一、石原直
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Selectively patterned metal nanodots fabrication by combining block copolymer self-assembly and electron beam lithography2012
- Author(s)
  H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
- Organizer
  SPIE Optics + Photonics 2012
- Place of Presentation
  San Diego, California, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Vibration Characteristics of DLC Nanomechanical Resonator under Parametric Excitation2012
- Author(s)
  K. Fuse, R. Kometani, S. Ishihara, S.Warisawa
- Organizer
  38th Int. Conf. on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulose, France
- Year and Date
  2012-09-18
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012
- Author(s)
  R. Kometani, S. Mifune, S. Warisawa and S.Ishihara
- Organizer
  25th Int. Microprocesses and Nanotechnology Conf. (MNC2012)
- Place of Presentation
  Kobe, Japan
- Year and Date
  2012-11-01
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] パラメトリック励振下におけるDLC ナノメカニカル振動子の振動特性2012
- Author(s)
  布施健太、米谷玲皇、石原直、割澤伸一
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学、松山市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Evaluations of the Downward Growth Characteristics on the 3-DNanostructure Fabrication using Focused-Ion-Beam Chemical Vapor Deposition2012
- Author(s)
  D.J. Guo, R. Kometani, S. Warisawa, and S. Ishihara
- Organizer
  4th International Symposium on Global Center for Excellence for Mechanical Systems Innovation (GMSI)
- Place of Presentation
  The Univ. of Tokyo, Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB Dual-beam Lithography2012
- Author(s)
  R. Kometani
- Organizer
  Next Generation Lithogtaphy Workshop 2012 (NGL2012)
- Place of Presentation
  東京工業大学,東京都
- Year and Date
  2012-07-20
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] リング型ナノメカニカル振動子の作製法とその振動特性評価2012
- Author(s)
  芦葉裕樹、米谷玲皇、割澤伸一、石原直
- Organizer
  第73回秋季応用物理学関係連合講演会
- Place of Presentation
  愛媛大学・松山大学、松山市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 真空・大気下における音叉型ナノメカニカル振動子の振動特性2012
- Author(s)
  芦葉裕樹、米谷玲皇、割澤伸一、石原直
- Organizer
  第４回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  北九州国際会議場、北九州市
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 自己組織化膜によるプラズモン共鳴波長連続変素子の開発2011
- Author(s)
  高木崇光, 栗原一真, 粟津浩一, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  2011年秋季第72回応用物理学会学術講演会
- Place of Presentation
  山形,日本
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] FIB-CVDによる三次元微細構造作製の高精度化に関する研究2011
- Author(s)
  村尾裕規, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  精密工学会2011年度春季大会学術講演会
- Place of Presentation
  埼玉大学,埼玉
- Year and Date
  2011-03-14
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB-CVD法により堆積させたDLCによるグラフェンの選択成長2011
- Author(s)
  畠山大輝, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  2011年春季第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学,神奈川
- Year and Date
  2011-03-27
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB複合リソグラフィによる歪印加振動子作製技術2011
- Author(s)
  黒田耕平, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  精密工学会2011年度春季大会学術講演会
- Place of Presentation
  埼玉大学,埼玉
- Year and Date
  2011-03-14
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] A gradually shifted surface plasmon resonance with a controlled diameter of a nano-hole structure by self-assembly technique2011
- Author(s)
  T. Takagi, K. Kurihara, K. Awazu, R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication(EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011
- Author(s)
  R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
- Place of Presentation
  Omiya Sonic City, Saitama, Japan(口頭)
- Year and Date
  2011-11-10
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011
- Author(s)
  R. Kometani, T. Hatakeyama, S. Warisawa, and S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Stressed Nanomechanical Resonator Fabrication Utilizing Stiction Phenomena2011
- Author(s)
  H. Ashiba, R. Kometani, S. Warisawa, and S. Ishihara
- Organizer
  IEEE International Conference on　Mechatronics and Automation (ICMA2011)
- Place of Presentation
  Beijing, China
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] スティクションを利用したナノ振動子の高Q値化2011
- Author(s)
  葉裕樹, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  2011年春季第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学,神奈川
- Year and Date
  2011-03-26
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] スティクションを利用した引張応力印加ナノ振動子の作製法2011
- Author(s)
  芦葉裕樹, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  精密工学会2011年度春季大会学術講演会
- Place of Presentation
  埼玉大学,埼玉
- Year and Date
  2011-03-14
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB デュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011
- Author(s)
  米谷玲皇,畠山大輝,黒田耕平, 割澤伸一,石原直
- Organizer
  2011年第3回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  タワーホール船橋,東京都
- Year and Date
  2011-09-26
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Selective Graphene Growth from DLC Thin Film Patterned by Focused-ion-beam Chemical Vapor Deposition2011
- Author(s)
  T. Hatakeyama, R. Kometani, S. Warisawa, and S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Patterning and Carbonization of Block Copolymer Self-assembled Structures by Focused-ion-beam2011
- Author(s)
  S. Warisawa, R. Mitsuhashi, R. Kometani and S. Ishihara
- Organizer
  24th International Microprocesses and Nanotechnology Conference(MNC2011)
- Place of Presentation
  ANA Hotel Kyoto, Kyoto, Japa
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] The 3-D Nanostructure Fabrication by controlling Downward Growth on Focused-ion-beam Chemical Vapor Deposition2011
- Author(s)
  D.J. Guo, R. Kometani, S. Warisawa and S. Ishihara
- Organizer
  24th International Microprocesses and Nanotechnology Conference (MNC2011)
- Place of Presentation
  ANA Hotel Kyoto, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Fabrication of Self-Assembled Cylindrical Structures within Free-Standing Block Copolymer Ultrathin Membranes2011
- Author(s)
  S. Warisawa, H. Mino, R. Kometani and S. Ishihara
- Organizer
  2011 MRS Fall Meeting & Exhibit, Hynes Convention Center
- Place of Presentation
  Boston, USA
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011
- Author(s)
  R. Kometani, T. Hatakeyama, K. Kuroda, S. Warisawa, S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA(口頭)
- Year and Date
  2011-06-02
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Quality Factor Enhancement on Nano Mechanical Resonators Utilizing Stiction Phenomena2011
- Author(s)
  H. Ashiba, R. Kometani, S. Warisawa and S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] In-situ TEM Observation and Force Measurement of Stick-slip Motion between DLC frictional surface2011
- Author(s)
  S. Nabeya, T. Sato, T. Ishida, R. Kometani and H. Fujita
- Organizer
  6th International Symposium on Surface Science
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2011-12-12
- Data Source
  KAKENHI-PROJECT-23760126
[Presentation] A wide-range frequency tunable nanomechanical resonator with parametric resonance characteristics2011
- Author(s)
  S. Warisawa, S. Nishi, R. Kometani, S. Ishihar
- Organizer
  37th International Conference on Micro and Nano Engineering (MNE2011)
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Selective Patterning of Self-Assembled Block Copolymer Thin Films by Electron Beam Lithography2011
- Author(s)
  H. Suzuki, R. Kometani, S. Warisawa and S. Ishihara
- Organizer
  2011 MRS Fall Meeting & Exhibit, Hynes Convention Center
- Place of Presentation
  Boston, USA
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Fabrication of Self-Assembled Cylindrical Structures within Free-Standing Block Copolymer Ultrathin Membranes2011
- Author(s)
  Shinichi Warisawa, Hiroyuki Mino, Reo Kometani, Sunao Ishihara
- Organizer
  2011 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, MA, USA
- Year and Date
  2011-11-29
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011
- Author(s)
  R. Kometani, S. Warisawa, and S. Ishihara
- Organizer
  The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
- Place of Presentation
  Omiya Sonic City, Saitama, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Patterning and Carbonization of Block Copolymer Self-assembled Structures by Focused-ion-beam2011
- Author(s)
  S.Warisawa, R.Mitsuhashi, R.Kometani, S.Ishihara
- Organizer
  24th International Micaroprocesses and Nanotechnology Conference (MNC2011)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2011-10-27
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  24th International Microprocesses and Nanotechnology Conference (MNC2011)
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011
- Author(s)
  R. Kometani, H. Shimizu, S. Warisawa, and S. Ishihara
- Organizer
  37th International Conference on Micro and Nano Engineering (MNE2011)
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  24th International Microprocesses and Nanotechnology Conference (MNC2011)
- Place of Presentation
  ANA Hotel Kyoto, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EBデュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011
- Author(s)
  米谷玲皇, 畠山大輝, 黒田耕平, 割澤伸一，石原　直
- Organizer
  第３回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] A gradually shifted surface plasmon resonance with a controlled diameter of a nano-hole structure by self-assembly technique2011
- Author(s)
  T. Takagi, R. Kometani, S. Warisawa and S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011
- Author(s)
  R. Kometani, S. Nishi, S. Warisawa and S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] A gradually shifted surface plasmon resonance with a controlled diameter of a nano-hole structure by self-assembly technique2011
- Author(s)
  T.Takagi, K.Kurihara, K.Awazu, R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Year and Date
  2011-06-01
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011
- Author(s)
  R. Kometani, H. Shimizu, S. Warisawa, S. Ishihara
- Organizer
  37th International Conference on Micro and Nano Engineering (MNE2011)
- Place of Presentation
  Berlin, Germany(ポスター)
- Year and Date
  2011-09-20
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011
- Author(s)
  R. Kometani, T. Hatakeyama, K. Kuroda, S. Warisawa, S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011
- Author(s)
  R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
- Organizer
  24th International Microprocesses and Nanotechnology Conference (MNC2011)
- Place of Presentation
  ANA Hotel Kyoto, Kyoto, Japan(口頭)
- Year and Date
  2011-10-27
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] FIB-CVD形成DLCナノ振動子のフッ素表面コーティングの効果2011
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  精密工学会2011年度春季大会学術講演会
- Place of Presentation
  埼玉大学,埼玉
- Year and Date
  2011-03-14
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EB 複合リソグラフィーによるHSQ3次元ナノ構造作製2011
- Author(s)
  黒田耕平、米谷玲皇、割澤伸一、石原直
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学、山形
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011
- Author(s)
  R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
- Place of Presentation
  埼玉
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011
- Author(s)
  R. Kometani, S. Nishi, S. Warisawa, S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] 照射ドーズ量制御によるFIB-CVD三次元微細構造形成の高精度化に関する研究2011
- Author(s)
  村尾裕規、米谷玲皇、割澤伸一、石原直
- Organizer
  2011年度精密工学会秋季大会学術講演会
- Place of Presentation
  金沢大学、金沢
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB-CVDの下方成長を利用した三次元ナノ構造の作製2011
- Author(s)
  郭登極、米谷玲皇、割澤伸一、石原直
- Organizer
  第３回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  船堀、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] FIB/EBデュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011
- Author(s)
  米谷玲皇、畠山大輝、黒田耕平、割澤伸一、石原直
- Organizer
  第３回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  船堀、東京
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] フッ素表面コーティングによるFIB-CVD形成DLC振動子の高Q値化2011
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  2011年春季第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学,神奈川
- Year and Date
  2011-03-26
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Effect of Annealing on Ultra-thin Silicon Nanomechanical Resonators Fabricated by Focused-Ion-Beam Implantation2011
- Author(s)
  H. Liu, R. Kometani, S. Warisawa, and S. Ishihara
- Organizer
  37th International Conference on Micro and Nano Engineering (MNE2011)
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Selective Patterning of Self-Assembled Block Copolymer Thin Films by Electron Beam Lithography2011
- Author(s)
  H. Suzuki, R. Kometani, S. Warisawa and S. Ishihara
- Organizer
  2011 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011
- Author(s)
  R. Kometani, H. Shimizu, S. Warisawa, S. Ishihara
- Organizer
  37th International Conference on Micro and Nano Engineering (MNE2011)
- Place of Presentation
  Berlin, Germany
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Selective Patterning of Self-Assembled Block Copolymer Thin Films by Electron Beam Lithography2011
- Author(s)
  H.Suzuki, R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  2011 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, MA, USA
- Year and Date
  2011-11-30
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Fabrication of Nanowire SQUID by means of FIB-CVD2011
- Author(s)
  J. Dai, R. Kometani, S. Warisawa, and S. Ishihara
- Organizer
  5th TU-SNU-UT Joint Symposium
- Place of Presentation
  Beijing, China
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011
- Author(s)
  R. Kometani, S. Nishi, S. Warisawa, S. Ishihara
- Organizer
  The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
- Place of Presentation
  Las Vegas, Nevada, USA(ポスター)
- Year and Date
  2011-06-01
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Fabrication of Self-Assembled Cylindrical Structures within Free-Standing Block Copolymer Ultrathin Membranes2011
- Author(s)
  S. Warisawa, H. Mino, R. Kometani and S. Ishihara
- Organizer
  2011 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, USA
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Sensitive charge detection using perfectly-tuned coupled nanomechanical oscillators2010
- Author(s)
  H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara H.Yamaguchi
- Organizer
  7th International Workshop on Nanomechanical Cantilever Sensors(NMC2010)
- Place of Presentation
  Bannif,Canada
- Year and Date
  2010-05-26
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Nanostructure Fabrication by Self-assembly of Block Copolymer on 3-D DLC Structure2010
- Author(s)
  H. Mino, R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  The 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication(EIPBN2010)
- Place of Presentation
  Anchorage, Alaska, USA
- Year and Date
  2010-07-02
- Data Source
  KAKENHI-PROJECT-21360059
[Presentation] Layer-by-layer Stacking Method for 3-D Nano Structure Fabrication Using Block Copolymer Self Assembly2010
- Author(s)
  S.Warisawa, R.Kanameda, R.Kometani, S.Ishihara
- Organizer
  2010 MRS Fall Meeting
- Place of Presentation
  Boston,USA
- Year and Date
  2010-12-02
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 3次元DLC構造へのブロック共重合体の自己組織化2010
- Author(s)
  三野宏之, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  次世代リソグラフィワークショップ(NGL2010)
- Place of Presentation
  蔵前会館,東京
- Year and Date
  2010-07-13
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 集束イオンビーム化学気相成長法により堆積したダイアモンドライクカーボンのピエゾ抵抗効果特性評価2010
- Author(s)
  米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
- Organizer
  2010年度精密工学会春季大会学術講演会
- Place of Presentation
  埼玉大学,埼玉
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 集束イオンビーム化学気相成長法を利用したピエゾ抵抗特性を有する3次元DLCナノ構造体の作製法2010
- Author(s)
  米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
- Organizer
  ナノ学会第8回大会
- Place of Presentation
  自然科学研究機構,岡崎
- Year and Date
  2010-05-14
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 表面プラズモンセンサーへ向けた連続変化自己組織化膜の作製法2010
- Author(s)
  高木崇光, 栗原一真, 粟津浩一, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  第71回応用物理学術講演会
- Place of Presentation
  長崎大学,長崎
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Effect of a Fluorine Surface Coating on Vibration Characteristics of Diamond-like Carbon Mechanical Resonator Fabricated by FIB-CVD2010
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
- Place of Presentation
  Fukuoka,Japan
- Year and Date
  2010-11-10
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] A Novel Fabrication Process for the Tensile Strained Resonators2010
- Author(s)
  K.Kuroda, R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
- Place of Presentation
  Fukuoka,Japan
- Year and Date
  2010-11-12
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 集束イオンビーム励起表面反応による超薄膜DLC機械振動子の作製とその特性2010
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  精密工学会2010年度秋季大会学術講演会
- Place of Presentation
  名古屋大学,名古屋
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010
- Author(s)
  T.Hatakeyama, R.Kometani, M.Nagase, S.Warisawa, S.Ishihara
- Organizer
  The 54^<th> Intn'l Conf.on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010).
- Place of Presentation
  Anchorage, Alaska
- Year and Date
  2010-06-03
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Ultra thin diamond-like carbon film mechanical resonator fabrication by a combined process of FIB-CVD and wet-etching2010
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  The 36th International Conference on Micro and Nano Engineering(MNE2010)
- Place of Presentation
  Genova,Italy
- Year and Date
  2010-09-21
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Nanostructure Fabrication by Self-assembly of Block Copolymer on 3-D DLC Structure2010
- Author(s)
  H.Mino, R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
- Place of Presentation
  Anchorage,USA
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 集束イオンビーム化学気相成長法における非コアシェルナノ構造の堆積法2010
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  2010年春季第57回応用物理関係連合講演会
- Place of Presentation
  東海大学,神奈川
- Year and Date
  2010-03-19
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010
- Author(s)
  T.Hatakeyama, R.Kometani, M.Nagase, S.Warisawa, S.Ishihara
- Organizer
  The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
- Place of Presentation
  Anchorage,USA
- Year and Date
  2010-06-03
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] The piezoresistive effect in the 3-D diamond-like carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010
- Author(s)
  R.Kometani, K.Yusa, S.Warisawa, S.Ishihara
- Organizer
  The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
- Place of Presentation
  Anchorage,USA
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 集束イオンビーム化学気相成長法により作製した3次元DLCナノ構造の機能化2010
- Author(s)
  米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
- Organizer
  2010年春季第57回応用物理関係連合講演会
- Place of Presentation
  東海大学,神奈川
- Year and Date
  2010-03-19
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly2010
- Author(s)
  S.Warisawa, H.Mino, R.Kometani, S.Ishihara
- Organizer
  2010 MRS Fall Meeting
- Place of Presentation
  Boston,USA
- Year and Date
  2010-12-02
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] AFM振動励起法による単層グラフェンの振動特性評価2010
- Author(s)
  畠山大輝, 米谷玲皇, 永瀬雅夫, 割澤伸一, 石原直
- Organizer
  2010年春季第57回応用物理関係連合講演会
- Place of Presentation
  東海大学,神奈川
- Year and Date
  2010-03-19
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 集束イオンビーム化学気相成長法による超薄膜DLC機械振動子の作製2010
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  第71回応用物理学術講演会
- Place of Presentation
  長崎大学,長崎
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 集束イオンビーム化学気相成長法における非コアシェルナノ構造の堆積法2010
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  2010年度精密工学会春季大会学術講演会
- Place of Presentation
  埼玉大学,埼玉
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] A new displacement detection system using a HEMT amplifier2010
- Author(s)
  Y.Oda, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
- Organizer
  The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
- Place of Presentation
  Fukuoka,Japan
- Year and Date
  2010-11-11
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] 架橋グラフェンの振動特性評価2010
- Author(s)
  畠山大輝, 米谷玲皇, 永瀬雅夫, 割澤伸一, 石原直
- Organizer
  ナノ学会第8回大会
- Place of Presentation
  自然科学研究機構,岡崎
- Year and Date
  2010-05-13
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] Frequency Tunable Coupled Nanomechanical Resonators and their Sensing Applications2010
- Author(s)
  H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
- Organizer
  International Conference on Quantum Nanostructures and Spin-related Phenomena(QNSP)
- Place of Presentation
  Tokyo,Japan
- Year and Date
  2010-03-09
- Data Source
  KAKENHI-PROJECT-22226004
[Presentation] The piezoresistive effect in the 3-D diamond-like carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010
- Author(s)
  R.Kometani, K.Yusa, S.Warisawa, S.Ishihara
- Organizer
  The 54^<th> Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010)
- Place of Presentation
  Anchorage, Alaska
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Dynamic characterization method of GaAs membrane resonator by direct excitation using scanning probe microscopy2009
- Author(s)
  K.Tamaru, K.Nonaka, M.Nagnse, H.Yamaguchi, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  The 35th International Conference on Micro & Nano Engineering (MNE2009)
- Place of Presentation
  Ghent, Belgium
- Year and Date
  2009-09-30
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Improvement of Vibration Characteristics of Silicon Resonators by Means of Surface Treatment2009
- Author(s)
  H.Shimizu, J.-J.Delaunay, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
- Place of Presentation
  Osaka University Convention Center, Osaka, Japan
- Year and Date
  2009-12-04
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 走査プローブによるGaAsメンブレンマイクロレゾネ一夕の動的特性評価2009
- Author(s)
  田丸耕二郎, 野中啓一郎, 永瀬雅夫, 山口浩司, 割澤伸一, 米谷玲皇, 石原直
- Organizer
  2009年春季第56回応用物理関係連合講演会
- Place of Presentation
  筑波大学,茨城
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] The 3-D nanostructure growth evaluations by the real-time current monitoring on focused-ionbeam chemical vapor deposition2009
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  The 35th International Conference on Micro & Nano Engineering (MNE2009)
- Place of Presentation
  Ghent, BelgiumS
- Year and Date
  2009-09-30
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 表面改質によるシリコンレゾネータのQ値変化の評価2009
- Author(s)
  清水宏樹, Jean-Jacques Delaunay, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  2009年度秋季第70回応用物理学関係連合講演会
- Place of Presentation
  富山大学,富山
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Homogeneous Material Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  International Symposium on the Physics of Excitation-assisted Nano-processes (ISPEN2009)
- Place of Presentation
  Diwa Roynet Hotel Wakayama, Wakayama, Japan
- Year and Date
  2009-11-20
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] FIB-CVDナノ機械デバイス動特性評価のための解析モデル構築法2009
- Author(s)
  西駿次郎, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  ナノ学会第7回大会
- Place of Presentation
  東京大学,東京
- Year and Date
  2009-05-10
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Evaluations of The Hopping Growth Characteristics On 3-D Nanostructure Fabrication Using Focused-Ion-Beam2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  The 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2009)
- Place of Presentation
  Marco Island, Florida, USA
- Year and Date
  2009-05-28
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 集束イオンビーム3次元ナノ構造形成における成長モード評価2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  2009年春季第56回応用物理関係連合講演会
- Place of Presentation
  筑波大学,茨城
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] その場プローブ電流計測による集束イオンビーム3次元ナノ構造成長特性評価2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  2009年度秋季第70回応用物理学関係連合講演会
- Place of Presentation
  富山大学,富山
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 集束イオンビーム化学気相成長法により堆積したDLCからのGa誘起グラファイト薄膜形成2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  ナノ学会第7回大会
- Place of Presentation
  東京大学,東京
- Year and Date
  2009-05-10
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Nanomanufacturing Tool Fabrications by Focused-Ion-Beam Chemical Vapor Deposition2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
- Place of Presentation
  Osaka University Convention Center, Osaka, Japan
- Year and Date
  2009-12-02
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment2009
- Author(s)
  H.Shimizu, J.-J.Delaunay, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  22nd International Microprocesses and Nanotechnology Conference (MNC2009)
- Place of Presentation
  Sheraton Sapporo Hotel, Sapporo, Japan
- Year and Date
  2009-11-18
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2009
- Author(s)
  西駿次郎, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
- Place of Presentation
  Osaka University Convention Center, Osaka, Japan
- Year and Date
  2009-12-02
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] FIB-CVDによる振動特性可変レゾネータの作製2009
- Author(s)
  西駿次郎, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  2009年度秋季第70回応用物理学関係連合講演会
- Place of Presentation
  富山大学,富山
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] The 3-D nanostructure growth evaluations by the real-time current monitoring on focused-ionbeam chemical vapor deposition2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  The 35th International Conference on Micro & Nano Engineering (MNE2009)
- Place of Presentation
  Ghent, Belgium
- Year and Date
  2009-09-30
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment2009
- Author(s)
  H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  22nd Intn'l Microprocesses and Nanotechnology Conf. (MNC2009)
- Place of Presentation
  Sapporo
- Year and Date
  2009-11-18
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 表面状態に起因するシリコンレゾネータの振動特性2009
- Author(s)
  清水宏樹, Jean-Jacques Delaunay, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  ナノ学会第7回大会
- Place of Presentation
  東京大学,東京
- Year and Date
  2009-05-10
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Dynamic Characteristics Analysis Method on a Nanomechanical Device Fabrication Using FIB-CVD2009
- Author(s)
  西駿次郎, 米谷玲皇, 割澤伸一, 石原直
- Organizer
  第1回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  東京大学,東京
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Evaluations of The Hopping Growth Characteristics on 3-D Nanostructure Fabrication Using Focused-Ion-Beam2009
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  The 53rd Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2009)
- Place of Presentation
  Marco Island, Florida, USA
- Year and Date
  2009-05-25
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] The Three-Dimensional Nanostructure Growth Characteristics Evaluations for a Development of Computer Pattern Generator on Focused-Ion-Beam Chemical Vapor Deposition2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  第1回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  東京大学,東京
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Vibration Characteristics-Tunable Resonator Fabrication by Focused-Ion-Beam Chemical Vapor Deposition2009
- Author(s)
  西駿次郎, 米谷玲皇, 割澤伸一, S.Inhihara
- Organizer
  22nd International Microprocesses and Nanotechnology Conference (MNC2009)
- Place of Presentation
  Sheraton Sapporo Hotel, Sapporo, Japan
- Year and Date
  2009-11-18
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Piezoresistance Effect of Diamond-Like Carbon Deposited by FIB2009
- Author(s)
  遊佐幸樹, 米谷玲皇, 石原直, 割澤伸一
- Organizer
  19th Academic Symposium of MRS-Japan 2009
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2009-12-08
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Vibration Characteristics-Tunable Resonator Fabrication by Focused-Ion -Beam Chemical Vapor Deposition2009
- Author(s)
  S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  the 22nd Intn'l Microprocesses and Nano- technology Conf. (MNC2009)
- Place of Presentation
  Sapporo
- Year and Date
  2009-11-18
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Non Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009
- Author(s)
  R.Kometani, S.Warisawa, S.Ishihara
- Organizer
  22nd International Microprocesses and Nanotechnology Conf.(MNC2009)
- Place of Presentation
  Sapporo
- Year and Date
  2009-11-19
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Non Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009
- Author(s)
  米谷玲皇, 割澤伸一, 石原直
- Organizer
  22nd International Microprocesses and Nanotechnology Conference (MNC2009)
- Place of Presentation
  Sheraton Sapporo Hotel, Sapporo, Japan
- Year and Date
  2009-11-19
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] The Three-Dimensional Nano-Electromechanical Tool Fabrications by FIB-CVD for the Nono-Factory Creation2008
- Author(s)
  R. Kometani and S. Ishihara
- Organizer
  The Fouth International Nanotechnoligy Conference on Communication and Cooperation(INC4)
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Nano electro-mechanical device fabrication by 3-D nanotechnoligy using focused-ion-beam2008
- Author(s)
  R. Kometani, S. Warisawa, S. Ishihara
- Organizer
  International Symposium on Novel Nano-Electro-Mechanical 3D Structures: Fabrication and Properties(NT2008)
- Place of Presentation
  Ishikawa, Japan
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Resistivity change of the diamondlike carbon, deposited by focusedion-beam chemical vapor deposition, induced by the annealing treatment2008
- Author(s)
  R. Kometani, T. Ichihashi, K. Kanda, T. Suzuk, K. Niihara, S. Ishihara, T. Kaito, S. Matsui
- Organizer
  The 52nd International Conference on Electron, Ion and Photon Beam technoligy and Nanoabrication(EIPBN2008)
- Place of Presentation
  Portland, USA
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 集束イオンビーム注入Gaの析出現象により引起されるグラファイト薄膜の形成2008
- Author(s)
  米谷玲皇, 市橋鋭也, 割澤伸一, 石原直
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学, 愛知
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] Graphite Shell Film Fromation induced by Eduction Phenomenon of Ga Implanted by Focused-ion-beam2008
- Author(s)
  R. Kometani, T. Ichihashi, S. Warisawa and S. Ishihara
- Organizer
  20th International Mocroprocesses and Nanotechnology Conference(MNC2008)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-19206016
[Presentation] 走査電子顕微鏡を利用した微小機械振動子の動特性プロファイリング
- Author(s)
  米谷玲皇，中野和洋，石原直，割澤伸一
- Organizer
  2014年第34回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学，神奈川県
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] The growth height correction on the three-dimensional nanostructure fabrication using focused-ion-beam chemical vapor deposition
- Author(s)
  Reo Kometani, Yuuki Murao, Sunao Ishihara, Shin’ichi Warisawa
- Organizer
  26th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  ロイトン札幌，北海道
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] 荷電粒子ビーム技術とナノメカニクス研究
- Author(s)
  米谷玲皇
- Organizer
  公益社団法人新化学技術推進協会電子情報技術部会 MEMS分科会講演会
- Place of Presentation
  新化学技術推進協会，東京都
- Invited
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] FIB-CVD を用いた3次元ナノ構造形成における構造形成高さの補正
- Author(s)
  米谷玲皇，村尾裕規，石原直，割澤伸一
- Organizer
  2013年度精密工学会秋季大会学術講演会
- Place of Presentation
  関西大学，大阪府
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection
- Author(s)
  Reo Kometani, Hui Liu, Shin'ichi Warisawa, Sunao Ishihara
- Organizer
  The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Gaylord Opryland Resort and Convention Center, Nashville, Tennesee, US
- Data Source
  KAKENHI-PROJECT-23760025
[Presentation] ナノメカニクスとその波長計測への応用
- Author(s)
  米谷玲皇
- Organizer
  2013年第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学，京都府
- Invited
- Data Source
  KAKENHI-PROJECT-23760025

1. WARISAWA ShinーIchi (20262321)

# of Collaborated Projects: 4 results

# of Collaborated Products: 177 results
2. ISHIHSRA Sunao (00422329)

# of Collaborated Projects: 3 results

# of Collaborated Products: 169 results
3. DELAUNEY JeanーJacques (80376516)

# of Collaborated Projects: 2 results

# of Collaborated Products: 7 results
4. YAMAGUCHI Hiroshi (60374071)

# of Collaborated Projects: 2 results

# of Collaborated Products: 14 results
5. 前田悦男 (60644599)

# of Collaborated Projects: 2 results

# of Collaborated Products: 5 results
6. ISHIDA Tadashi (80517607)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
7. ITAMURA Noriaki (90433854)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. YAMADA Ichiro (70345081)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results

Kometani Reo 米谷 玲皇

KOMETANI Reo 米谷 玲皇

Research Projects

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超高感度光圧センシングNEMS技術創出と光-ナノ構造の相互作用の解明Principal Investigator

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光圧計測知的ナノメカニカルシステムの創出Principal Investigator

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Nanooptoelectromechanical systems for the molecular sensingPrincipal Investigator

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光路最適化したメタサーフェスを用いた表面増強ラマンデバイスの創製

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Research on the high spatial resolution dynamic characteristics profiling technology using atomic force microscopePrincipal Investigator

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極軽量・原子層メカニカル構造の機能化Principal Investigator

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Fabrication of nanosystem for wavelength detectionPrincipal Investigator

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Development of a nano mechanical sensor for gas molecule detection at low density by hybrid structure fabrication technique

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Research on the ultra-thin film mechanical resonator for high resolution wavelength detectionPrincipal Investigator

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Understanding Mechanism of Super-Lubrication Driven by Graphite/Fullerene Composite using in-situ TEM

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Creation and Characterization of Nanomechanical Structures andits Applications to Devices

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Three dimensional nanostructure fabrication technology using self-assemble phenomena

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Nanostructure creation and its functionalization

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Kometani Reo 米谷玲皇

KOMETANI Reo 米谷玲皇