Machida Katsuyuki 町田克之

… Alternative Names

MACHIDA Katsuyuki 町田克之

MACHIDA KATSUYUKI 町田克之

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Researcher Number	90597676
Other IDs
Affiliation (Current)	2025: 東京科学大学, 総合研究院, 特任教授
Affiliation (based on the past Project Information) *help	2017 – 2021: 東京工業大学, 科学技術創成研究院, 特任教授 2017: 東京工業大学, 大学院総合理工学研究科, 連携教授 2013: 東京工業大学, 総合理工学研究科, 連携教授 2012 – 2013: 東京工業大学, 総合理工学研究科(研究院), 連携教授 2011: 東京工業大学, 総合理工学研究科, 連携教授
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment Except Principal Investigator Electron device/Electronic equipment / Basic Section 21060:Electron device and electronic equipment-related / Nano/Microsystems
Keywords	Principal Investigator 異種機能集積化 / 人体検知 / 異種機能集積 / CMOS-MEMS / センサ回路 / 加速度センサ / MEMS / CMOS / 統合設計 Except Principal Investigator MEMS … More / 蛍光 / レジオネラ / 細菌 / レジオネラ属菌 / ストレス応答 / フォトゲート / 集積化MEMS / 細菌同定 / 細菌叢 / 細菌センサ / 反応化学 / Bio-MEMS / パルス金めっき / 電解金めっき / カンチレバー / ノイズ / 加速度センサ / 電解めっき / ナノ結晶 / 金めっき / 結晶 / 金合金 / 金 / ナノマイクロセンサ / 加速度 / ナノG / 行動学 / バイオ関連機器 / 生物化学 / バイオMEMS / 反応速度定数 / 葉酸 / PDMS / マイクロビーズ / マイクロ流路 Less

Dynamic Processes of Bacterial Stress Response: Development of Novel Bacterial Identification Method Inspired by Electronics
- Principal Investigator
  
  Ishii Hiromu
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Toyohashi University of Technology
Electronics Inspired Bacterial Ethology
- Principal Investigator
  
  Ishii Hiromu
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Toyohashi University of Technology
Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal Structure
- Principal Investigator
  
  Yamane Daisuke
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tokyo Institute of Technology
The study on human monitoring chip and multi-physics simulation technologyPrincipal Investigator
- Principal Investigator
  
  MACHIDA KATSUYUKI
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tokyo Institute of Technology
Fundamental Research on MEMS-based Bacterial Sensor
- Principal Investigator
  
  ISHII Hiromu
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Toyohashi University of Technology

All 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011

All Journal Article Presentation Book Patent

[Book] Advances in Microelectronics: Reviews, Vol. 1, "Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors"2018
- Author(s)
  Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Total Pages
  534
- Publisher
  IFSA Publishing
- ISBN
  9788469786338
- Data Source
  KAKENHI-PROJECT-15K17453
[Book] 異種機能デバイス集積化技術の基礎と応用2012
- Author(s)
  町田克之, 益一哉, 年吉洋, 監修
- Total Pages
  279
- Publisher
  株式会社シーエムシー出版
- Data Source
  KAKENHI-PROJECT-23360149
[Book] 異種機能デバイス集積化技術の基礎と応用2012
- Author(s)
  町田克之
- Total Pages
  279
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-23360149
[Journal Article] Detection system for Legionella bacteria using photogate-type optical sensor2022
- Author(s)
  Honda Yuto、Ichikawa Ryosuke、Choi Yong Joon、Murakami Kensuke、Takahashi Kazuhiro、Noda Toshihiko、Sawada Kazuaki、Ishii Hiromu、Machida Katsuyuki、Ito Hiroyuki、Miyahara Satoshi、Nikaido Yasuhiko、Saito Mitsumasa
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 61 Issue: SD Pages: SD1010-SD1010
- DOI
  10.35848/1347-4065/ac5a25
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K22942, KAKENHI-PROJECT-19H02196, KAKENHI-PROJECT-20K14790
[Journal Article] Sensing <i>Legionella</i> by Photogate-type Fluorescence Sensor2020
- Author(s)
  S. Tanaka., Y. J. Choi, M. Ishida, K. Sawada, H. Ishii, K. Machida, Y. Nikaido, M. Saito, S. Yoshida
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 140 Issue: 5 Pages: 103-108
- DOI
  10.1541/ieejsmas.140.103
- NAID
  130007839257
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2020-05-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02196
[Journal Article] Bacterial Identification by Using Photogate-Type Optical Sensor2019
- Author(s)
  Ishii Hiromu、Tanaka Sawako、Ishida Makoto、Sawada Kazuaki、Machida Katsuyuki、Nikaido Yasuhiko、Saito Mitsumasa、Yoshida Shinichi
- Journal Title
  
  ECS Transactions
  
  Volume: 92 Issue: 4 Pages: 155-162
- DOI
  10.1149/09204.0155ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02196
[Journal Article] Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide2018
- Author(s)
  Hao-Chun Tang, Ken Hashigata, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Elsevier Surface and Coatings Technology
  
  Volume: 印刷中 Pages: 1065-1070
- DOI
  10.1016/j.surfcoat.2018.02.041
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K17453, KAKENHI-PROJECT-26220907
[Journal Article] 蛍光センサによる細菌識別に向けたレジオネラ属菌の発光特性の検討2018
- Author(s)
  田中佐和子，澤田和明，石井仁，町田克之，二階堂靖彦，齋藤光正
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: 118 (No. 175, ED2018-22) Pages: 5-8
- Data Source
  KAKENHI-PROJECT-15H03992
[Journal Article] A 0.18-µm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers2018
- Author(s)
  Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu
- Journal Title
  
  IEICE Electron. Express
  
  Volume: 15 Issue: 2 Pages: 20171227-20171227
- DOI
  10.1587/elex.15.20171227
- NAID
  130006320958
- ISSN
  1349-2543
- Language
  English
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices2018
- Author(s)
  Tang Haochun、Chen Chun-Yi、Chang Tso-Fu Mark、Nagoshi Takashi、Yamane Daisuke、Konishi Toshifumi、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Journal of The Electrochemical Society
  
  Volume: 165 Issue: 2 Pages: D58-D63
- DOI
  10.1149/2.0441802jes
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer2018
- Author(s)
  Motohiro Takayasu, Ippei Tsuji, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
- Journal Title
  
  Sensors and Materials
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Enhancement in Structure Stability of Gold Micro-Cantilever by Constraints at the Fixed-End for Applications as Movable Structures of MEMS2018
- Author(s)
  Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Journal Title
  
  Microelectronics Engineering
  
  Volume: 187-188 Pages: 105-109
- DOI
  10.1016/j.mee.2017.11.015
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K17453, KAKENHI-PROJECT-26220907
[Journal Article] High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices2017
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  J. Electrochemical Society
  
  Volume: なし Issue: 4 Pages: 244-247
- DOI
  10.1149/2.141704jes
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing2017
- Author(s)
  S. Onishi, C. Y. Joon, M. Ishida, K. Sawada, H. Ishii, K. Machida, K. Masu, Y. Nikaido, M. Saito, and S. Yoshida
- Journal Title
  
  ECS Transactions
  
  Volume: 80 Pages: 157-164
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H03992
[Journal Article] Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices2017
- Author(s)
  Asano Keisuke、Tang Hao-Chun、Chen Chun-Yi、Nagoshi Takashi、Chang Tso-Fu Mark、Yamane Daisuke、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 180 Pages: 15-19
- DOI
  10.1016/j.mee.2017.05.044
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Deformation behavior of electroplated gold composed of nano-columnar grains embedded in micro-columnar textures2017
- Author(s)
  Yoshiba Masaharu、Chen Chun-Yi、Chang Tso-Fu Mark、Nagoshi Takashi、Yamane Daisuke、Machida Katsuyuki、Masu Kazuya、Sone Masato
- Journal Title
  
  Materials Letters
  
  Volume: 202 Pages: 82-85
- DOI
  10.1016/j.matlet.2017.05.066
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Tensile Tests of Micro-Specimens Made of Electroplated Gold2017
- Author(s)
  Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Microelectronics Engineering
  
  Volume: 174 Pages: 6-10
- DOI
  10.1016/j.mee.2016.12.004
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] A 1-mG MEMS Sensor2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  ECS Transactions
  
  Volume: 72 Issue: 3 Pages: 7-14
- DOI
  10.1149/07203.0007ecst
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide2016
- Author(s)
  Hao-chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Electrochemistry Communications
  
  Volume: 72 Pages: 126-130
- DOI
  10.1016/j.elecom.2016.09.019
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression2016
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  MATERIALS TRANSACTIONS
  
  Volume: 57 Issue: 8 Pages: 1257-1260
- DOI
  10.2320/matertrans.MG201612
- NAID
  130005165710
- ISSN
  1345-9678, 1347-5320
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers2016
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone,
- Journal Title
  
  Microelectronics Engineering
  
  Volume: 153 Pages: 90-93
- DOI
  10.1016/j.mee.2016.02.054
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Journal Title
  
  Electrochemistry Communications
  
  Volume: 67 Pages: 51-54
- DOI
  10.1016/j.elecom.2016.03.017
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26220907, KAKENHI-PROJECT-15K17453
[Journal Article] Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu and Katsuyuki Machida
- Journal Title
  
  Microelectronics Reliability
  
  Volume: 66 Pages: 78-84
- DOI
  10.1016/j.microrel.2016.09.018
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16H02337, KAKENHI-PROJECT-15K17453
[Journal Article] A Sub-1G MEMS Sensor2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  ECS Transactions
  
  Volume: 66 Issue: 5 Pages: 131-138
- DOI
  10.1149/06605.0131ecst
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] A 0.1G-to-20G Integrated MEMS Inertial Sensor2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 8 Pages: 1-4
- DOI
  10.7567/jjap.54.087202
- NAID
  210000145523
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K17453
[Journal Article] Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip2015
- Author(s)
  Y. Nishimura, M. Ishida, K. Sawada, H. Ishii, K. Machida, K. Masu, C. Wang, K. Iida, M. Saito, and S. Yoshida
- Journal Title
  
  ECS Trans. (Invited Review)
  
  Volume: 69 Pages: 259-267
- Data Source
  KAKENHI-PROJECT-15H03992
[Journal Article] A dual-axis MEMS capacitive inertial sensor with high-density proof mass2015
- Author(s)
  Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Journal Title
  
  Microsystem Technologies
  
  Volume: 印刷中 Issue: 3 Pages: 459-464
- DOI
  10.1007/s00542-015-2539-y
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25630138, KAKENHI-PROJECT-15K17453
[Journal Article] An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology2014
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, and Hiroshi Toshiyoshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: Vol. 53 Issue: 2 Pages: 27202-27202
- DOI
  10.7567/jjap.53.027202
- NAID
  210000143332
- Data Source
  KAKENHI-PROJECT-23360149
[Journal Article] A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology2014
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, and Hiroshi Toshiyoshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: vol. 53 Issue: 4S Pages: 04EE15-04EE15
- DOI
  10.7567/jjap.53.04ee15
- NAID
  210000143609
- Data Source
  KAKENHI-PROJECT-23360149
[Journal Article] Design of sub-1g microelectromechanical systems accelerometers2014
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi and Kazuya Masu
- Journal Title
  
  Applied Physics Letters
  
  Volume: Vol. 104, Issue 7 Issue: 7 Pages: 74102-74102
- DOI
  10.1063/1.4865377
- Data Source
  KAKENHI-PROJECT-23360149
[Journal Article] A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language2013
- Author(s)
  Toshifumi Konishi, Katsuyuki Machida, Satoshi Maruyama, Makoto Mita, Kazuya Masu, and Hiroshi Toshiyoshi
- Journal Title
  
  IEEE/ASME Journal of Microelectromechanical Systems
  
  Volume: vol. 22, no. 3 Issue: 3 Pages: 755-767
- DOI
  10.1109/jmems.2013.2243111
- Data Source
  KAKENHI-PROJECT-23360149
[Journal Article] Novel Sensor Structure and its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer2013
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Journal Title
  
  Japanese Journal of Applied Physics(special issue on MNC 2012)
  
  Volume: vol. 52, no. 6 Issue: 6S Pages: 06GL04-06GL04
- DOI
  10.7567/jjap.52.06gl04
- NAID
  210000142406
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360149
[Journal Article] Bio-MEMS Chip for Bacteria Detection -A Challenge of Si Technology to Biomedical Field-2013
- Author(s)
  Hiromu Ishii, Kazuaki Sawada, Makoto Ishida, Katsuyuki Machida, Ken-Ichiro Iida, Mitsumasa Saito, Shin-ichi Yoshida
- Journal Title
  
  ECS Trans.
  
  Volume: Vol. 58, No.9 Pages: 125-133
- Data Source
  KAKENHI-PROJECT-23560394
[Patent] 微細素子とその製造方法2017
- Inventor(s)
  小西敏文, 佐布晃昭, 町田克之, 山根大輔, 益　一哉
- Industrial Property Rights Holder
  小西敏文, 佐布晃昭, 町田克之, 山根大輔, 益　一哉
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-055732
- Filing Date
  2017-03-22
- Data Source
  KAKENHI-PROJECT-15K17453
[Patent] 微細素子およびその製造方法2017
- Inventor(s)
  小西,佐布,町田,曽根,Chang,Chen,山根,益
- Industrial Property Rights Holder
  小西,佐布,町田,曽根,Chang,Chen,山根,益
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-055730
- Filing Date
  2017-03-22
- Data Source
  KAKENHI-PROJECT-15K17453
[Patent] "微細素子およびその製造方法2015
- Inventor(s)
  小西敏文，佐布晃昭，町田克之，益　一哉，伊藤浩之，山根大輔
- Industrial Property Rights Holder
  小西敏文，佐布晃昭，町田克之，益　一哉，伊藤浩之，山根大輔
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-256285
- Filing Date
  2015-12-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Patent] 半導体素子の構造解析装置および解析プログラム2015
- Inventor(s)
  小西敏文，佐布晃昭，町田克之，益　一哉，山根大輔
- Industrial Property Rights Holder
  小西敏文，佐布晃昭，町田克之，益　一哉，山根大輔
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-186382
- Filing Date
  2015-09-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Patent] 設計支援装置2012
- Inventor(s)
  小西敏文, 松島隆明, 町田克之, 年吉洋
- Industrial Property Rights Holder
  NTT-AT,国立大学法人東京大学
- Industrial Property Rights Type
  特許
- Filing Date
  2012-07-06
- Data Source
  KAKENHI-PROJECT-23360149
[Patent] 微細素子およびその製造方法2012
- Inventor(s)
  小西敏文, 松島隆明, 町田克之, 矢野正樹, 工藤和久, 益一哉, 石原昇
- Industrial Property Rights Holder
  NTT-AT,国立大学法人東京工業大学
- Industrial Property Rights Type
  特許
- Filing Date
  2012-02-06
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Detection system of bacteria, Legionella by photogate type optical sensor2021
- Author(s)
  Y. Honda, Y. Choi, K. Murakami, T. Noda, K. Takahashi, K. Sawada, H. Ishii, K. Machida, H. Ito, Y. Nikaido, M. Saito
- Organizer
  34th International Microprocesses and Nanotechnology Conference (MNC 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] レジオネラ菌の識別に向けたフォトゲート型蛍光センサによる計測システムの検討2021
- Author(s)
  本田優斗，田中佐和子，崔容俊，村上健介, 野田俊彦，高橋一浩，澤田和明，石井仁，町田克之，伊藤浩之, 二階堂靖彦，齋藤光正
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] フォトゲート型蛍光センサによるレジオネラ属菌検知システムの検討2021
- Author(s)
  本田優斗，崔容俊，村上健介，野田俊彦，高橋一浩，澤田和明，石井仁，町田克之，伊藤浩之，二階堂靖彦，齋藤光正
- Organizer
  第13回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] レジオネラ属菌の識別に向けたフォトゲート型蛍光センサによる計測手法の検討 ---- Legionella erythra の蛍光計測への応用----2020
- Author(s)
  本田優斗，田中佐和子，崔容俊，野田俊彦，高橋一浩，澤田和明，石井仁，町田克之，伊藤浩之, 二階堂靖彦，齋藤光正，吉田眞一
- Organizer
  集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討2020
- Author(s)
  本田優斗，田中佐和子，崔容俊，澤田和明，野田俊彦，高橋一浩，石井仁，町田克之，二階堂靖彦，齋藤光正，吉田眞一
- Organizer
  電気学会E部門総合研究会
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] Bacterial identification by using photogate-type optical sensor2019
- Author(s)
  H. Ishii, S. Tanaka, M. Ishida, K. Sawada, K. Machida, Y. Nikaido, M. Saito, S. Yoshida
- Organizer
  136th The Electrochemical Society Meeting, Atlanta, USA.
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] フォトゲート型蛍光センサによるレジオネラ属菌の菌種識別2019
- Author(s)
  田中佐和子, 崔容俊, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一
- Organizer
  第11回集積化MEMSシンポジウム, 応用物理学会
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] Identification of Legionella Species by Photogate-Type Optical Sensor2019
- Author(s)
  S. Tanaka, Y. J. Choi, T. Noda, M. Ishida, K. Sawada, H. Ishii, K.Machida, Y. Nikaido, M. Saito S. Yoshida
- Organizer
  IEEE Sensors, Montreal Canada
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] レジオネラ属菌の蛍光強度の励起光強度依存性2019
- Author(s)
  田中佐和子, 崔容俊, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一
- Organizer
  2019年第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Bacterial identification by using photogate-type optical sensor2019
- Author(s)
  Hiromu Ishii, Sawako Tanaka, Makoto Ishida, Kazuaki Sawada, Katsuyuki Machida, Yasuhiko Nikaido, Mitsumasa Saito, Shin-ichi Yoshida
- Organizer
  236th The Electrochemical Society Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] レジオネラ属菌の蛍光強度の励起光強度依存性 II2019
- Author(s)
  田中佐和子, 崔容俊, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一
- Organizer
  2019年第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] フォトゲート型光センサを用いたレジオネラ属菌のセンシング2019
- Author(s)
  田中佐和子, 崔容俊, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一
- Organizer
  バイオ・マイクロシステム研究会, 令和元年度E部門総合研究会，電気学会
- Data Source
  KAKENHI-PROJECT-19H02196
[Presentation] 電解めっき法によるMEMS用金銅合金の作製及び機械的特性評価2018
- Author(s)
  唐浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解めっき法によるTi/Au微小カンチレバーのヤング率評価2018
- Author(s)
  中島英亮, Tso-Fu Mark Chang, Chun-Yi Chen, 山根大輔, 小西敏文, 町田克之, 年吉洋, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Chemical Kinetic Analysis for Temporal Variation of Fluorescence from Legionella2018
- Author(s)
  S. Tanaka, S. Onishi, M. Ishida, K. Sawada, H. Ishii, K. Machida, Y. Nikaido, M. Saito, and S. Yoshida
- Organizer
  2nd Taiwan-Japan Joint Symp., Nano-engineering and Micro-system Technology Taiwan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] 電析制御による微小金カンチレバーの曲げ特性の改善2018
- Author(s)
  浅野啓介, 唐浩峻, Chun-Yi Chen, 名越貴志, Tso-Fu Mark Chang, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices2018
- Author(s)
  Kyoutarou Nitta, Koichiro Tachibana, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
- Organizer
  233rd ECS Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever For MEMS Accelerometers2018
- Author(s)
  Ken Hashigata, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 長期振動試験によるAu-Cu合金微小カンチレバーの構造安定性2018
- Author(s)
  新田京太朗, 橘航一朗, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film2018
- Author(s)
  Ken Hashigata, Hao-Chun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  22nd Topical Meeting of the International Society of Electrochemistry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)2018
- Author(s)
  古賀達也, 高安基大, 山根大輔, 伊藤浩之, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] レジオネラ属菌の蛍光の励起光照射時間依存性の反応化学的解析2018
- Author(s)
  田中佐和子，大西脩平，石田誠，澤田和明，石井仁，町田克之，益一哉，二階堂靖彦，齋藤光正，吉田眞一
- Organizer
  2018年第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] フォトゲート型蛍光センサによるレジオネラ属菌の識別可能性の検討2018
- Author(s)
  田中佐和子, 大西脩平, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一
- Organizer
  第10回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] 積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性2018
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 陳君怡, Chang Tso-Fu Mark, 伊藤浩之, 道正志郎, 石原昇, 曽根正人, 町田克之, 益一哉, 飯田慎一
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study on Tri-Axis Fully-Differential Electrodes for MEMS Accelerometer With Segmented Capacitance Detection2018
- Author(s)
  Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology2018
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Shin-ichi Iida, Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 集積化CMOS-MEMS技術による高感度慣性センサと応用システム2018
- Author(s)
  伊藤浩之, 山根大輔, 小西敏文, 道正志郎, 石原昇, 町田克之, 曽根正人, 三宅美博, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 単一Au錘3軸差動MEMS加速度センサの検討2018
- Author(s)
  新島宏文, 乙部翔太, 高安基大, 山根大輔, 伊藤浩之, 佐布晃昭, 小西敏文, 道正志郎, 飯田慎一, 石原昇, 町田克之, 益一哉
- Organizer
  平成30年電気学会全国大会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 傾斜を用いた1mG MEMS加速度センサの分解能評価の検討2018
- Author(s)
  高安基大, 古賀達也, 辻一平, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 飯田慎一, 石原昇, 町田克之, 益一哉
- Organizer
  平成30年電気学会全国大会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 高感度MEMS加速度センサのBrownian Noise評価に関する検討2018
- Author(s)
  新島宏文, 乙部翔太, 高安基大, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 年吉洋, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys2018
- Author(s)
  Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  22nd Topical Meeting of the International Society of Electrochemistry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] レジオネラ属菌の赤色蛍光の励起光照射時間依存性の検討2018
- Author(s)
  田中佐和子, 大西脩平, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一
- Organizer
  2018年第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] MEMS加速度センサ用高分解能容量検出回路2017
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉
- Organizer
  第78応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO22017
- Author(s)
  Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)2017
- Author(s)
  新島宏文, 高安基大, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 年吉洋, 町田克之, 益一哉
- Organizer
  第34回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Mechanical Property Evaluation of Electroplated Au/Cu Alloys toward Applications in MEMS Accelerometers2017
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21th International Conference on Solid State Ionics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions2017
- Author(s)
  Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes2017
- Author(s)
  Shota Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications2017
- Author(s)
  Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  RACI National Centenary Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology2017
- Author(s)
  Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2017 MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests2017
- Author(s)
  Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2017 MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 金めっきで形成したMEMS加速度センサの長期振動特性に関する検討2017
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 橘航一朗, 寺西美波, 陳君怡, Tso-Fu Mark Chang, 曽根正人, 町田克之, 益一哉
- Organizer
  第78応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS慣性センサ用弛張発振型容量検出回路2017
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討2017
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing2017
- Author(s)
  S. Onishi, C. Y. Joon, M. Ishida, K. Sawada, H. Ishii, K. Machida, K. Masu, Y. Nikaido, M. Saito, and S. Yoshida
- Organizer
  232nd The Electrochemical Society Fall Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever2017
- Author(s)
  Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition2017
- Author(s)
  Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価2017
- Author(s)
  曽根正人, Tso-Fu Mark Chang, Chun-Yi Chen, 山根大輔, 小西敏文, 町田克之, 益一哉
- Organizer
  第63回国立大学共同利用・共同研究拠点知の拠点セミナー
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology2017
- Author(s)
  Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating2017
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu, Shinichi Iida
- Organizer
  The 30th International Microprocesses and Nanotechnology Conference (MNC 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] ビーズを用いたPDMS製細菌捕獲チップの検討Ⅴ -フィルタフリー蛍光センサの適用-2017
- Author(s)
  大西脩平, 崔容俊, 石田誠, 澤田和明, 石井仁, 町田克之, 益一哉, 二階堂靖彦, 齋藤光正, 吉田眞一
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components2017
- Author(s)
  Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  TACT2017 International Thin Films Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS 加速度センサ用高分解能容量検出回路の評価2017
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉
- Organizer
  第8回集積化MEMS技術研究ワークショップ
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討2017
- Author(s)
  橘航一朗, Tso-Fu Mark Chang, Chun-Yi Chen, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Strategies of Mechanical Strengthening in Electroplated Au Materials2017
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auめっき構造体のヤング率評価（２）2017
- Author(s)
  中島英亮, Tso-Fu Mark Chang, Chun-Yi Chen, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術による3軸MEMS加速度センサのばね定数設計方法2017
- Author(s)
  佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1mG Inertial Sensors by Multi-layer Metal Technology2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers2017
- Author(s)
  Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討2017
- Author(s)
  乙部翔太, 高安基大, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第34回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer2017
- Author(s)
  Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
- Organizer
  21st Topical Meeting of the International Society of Electrochemistry
- Place of Presentation
  Szeged, Hungary
- Year and Date
  2017-04-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Capacitive Sensor Circuit Based on Relaxation Oscillator for Sub-1mG MEMS Inertial Sensors2017
- Author(s)
  Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu
- Organizer
  2017 Int'l Conference on Solid State Devices and Materials (SSDM 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices2017
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21th International Conference on Solid State Ionics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technolog2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- Place of Presentation
  Kaohsiung Exhibition Center, Kaohsiung, Taiwan
- Year and Date
  2017-06-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology2017
- Author(s)
  Takuma Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2017 MRS Fall Meeting
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] ビーズを用いたPDMS製細菌捕獲チップの検討Ⅴ- レジオネラ蛍光の減衰過程の解析 -2017
- Author(s)
  大西脩平, 崔容俊, 石田誠，澤田和明，石井仁，町田克之，益一哉，二階堂靖彦，齋藤光正，吉田眞一
- Organizer
  2017年第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer2017
- Author(s)
  Chun-Yi Chen, Tang Hao-Chun, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21st Topical Meeting of the International Society of Electrochemistry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討2017
- Author(s)
  古賀達也, 辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討2017
- Author(s)
  折原恒祐, 高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第34回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] フォトゲート型蛍光センサを用いたレジオネラの蛍光観測2017
- Author(s)
  大西脩平, 崔容俊, 石田誠，澤田和明，石井仁，町田克之，益一哉，二階堂靖彦，齋藤光正，吉田眞一
- Organizer
  第９回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices2017
- Author(s)
  Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Masato Sone, Kazuya Masu
- Organizer
  12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components2017
- Author(s)
  Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  IUMRS International Conference in Asia (IUMRS-ICA) 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタルMEMS慣性センサの長期振動特性評価2017
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 橘航一朗, 寺西美波, 陳君怡, Tso-Fu Mark Chang, 曽根正人, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End2017
- Author(s)
  Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  43rd Micro and Nano Engineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 移動体制御による慣性センサ評価系の構築2017
- Author(s)
  權田惇晟, 高安基大, 山根大輔, 伊藤浩之, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes2017
- Author(s)
  Hirofumi Niijima, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu
- Organizer
  The 30th International Microprocesses and Nanotechnology Conference (MNC 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討2017
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討2017
- Author(s)
  古賀達也, 辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS inertial sensors for biomedical applications2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu
- Organizer
  12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test2017
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  43rd Micro and Nano Engineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）2017
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 中島英亮, 寺西美波, 陳君怡, Tso-Fu Mark Chang, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components2017
- Author(s)
  Chun-Yi Chen, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  21th International Conference on Solid State Ionics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology2017
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
- Organizer
  The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討2017
- Author(s)
  辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第9回集積化MEMSシンポジウム
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討2017
- Author(s)
  辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉
- Organizer
  第78応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討2017
- Author(s)
  鈴木拓真, Tso-Fu Mark Chang, Chun-Yi Chen, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術で作製したMEMS慣性センサのモジュール化の検討2017
- Author(s)
  高安基大, 權田惇晟, 山根大輔, 伊藤浩之, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices2017
- Author(s)
  Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  43rd Micro and Nano Engineering (MNE2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術を用いた高感度MEMS 傾斜計の検討2017
- Author(s)
  辻一平, 高安基大, 伊藤浩之, 山根大輔, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第8回集積化MEMS技術研究ワークショップ
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide2016
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討2016
- Author(s)
  小西敏文, 山根大輔, 佐布晃昭, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 微小引張試験片を用いたMEMS 用金めっき材料の機械的特性の評価2016
- Author(s)
  柳田佐理, Chang Tso-Fu Mark, Chen Chu-Yi, 名越貴志, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide2016
- Author(s)
  Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte2016
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] CMOS-MEMS慣性センサにおける機械的ノイズの解析手法2016
- Author(s)
  小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 年吉洋, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 1mG以下検出へ向けた積層メタルMEMS加速度センサの基礎検討2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討2016
- Author(s)
  山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之
- Organizer
  電子情報通信学会2016年総合大会
- Place of Presentation
  九州大学伊都キャンパス、福岡県福岡市
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer2016
- Author(s)
  Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 微小電子機械システムのための超臨界流体を用いた金属皮膜形成技術2016
- Author(s)
  曽根正人, Tso-Fu Mark Chang, Chun-yi Chen, 山根大輔, 益一哉, 町田克之
- Organizer
  第6回CSJ化学フェスタ
- Place of Presentation
  タワーホール船堀, 東京
- Invited
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study of Railroad Vehicle Control by Inertial Sensors2016
- Author(s)
  Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Masakazu Sonobe, Takumi Kobayashi, Yamato Fukuta, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Katsuyuki Machida
- Organizer
  11th World Congress on Railway Research
- Place of Presentation
  Milan, Italy
- Year and Date
  2016-05-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価2016
- Author(s)
  浅野啓介, 唐浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 名越貴志, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] RC発振器型高感度容量検出回路2016
- Author(s)
  高安基大, 道正志郎, 伊藤浩之, 石原昇, 山根大輔, 小西敏文, 町田克之, 益一哉
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサのばね定数設計方法2016
- Author(s)
  佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 高感度MEMS 加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価2016
- Author(s)
  葭葉将治, Chen Chun-Yi, 名越貴志, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ曲げ試験による電析金薄膜の機械的特性評価2016
- Author(s)
  浅野啓介, 唐浩峻, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer2016
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル差動型MEMS加速度センサの基礎検討2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 道正志郎, 石原昇, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure2016
- Author(s)
  Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 差動型積層メタルMEMS加速度センサの検討2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Comparison of Bacterial Stress Responses between Legionella pneumophila and Legionella dumoffii Trapped in a MEMS Microfluidic Chip2016
- Author(s)
  Y. Nishimura, S. Onishi, M. Ishid, K. Sawada, H. Ishii, K. Machida, K. Masu, C. Wang, K. Iida, M. Saito, S. Yoshida
- Organizer
  Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016
- Place of Presentation
  金沢
- Year and Date
  2016-06-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications2016
- Author(s)
  Masato Sone, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu
- Organizer
  Integrative Biology-2016
- Place of Presentation
  Berlin, Germany
- Year and Date
  2016-07-18
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE NEMS 2016
- Place of Presentation
  Matsushima Bay and Sendai, Miyagi, Japan
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解金めっきで作製した Ti/Au 微小カンチレバーの構造安定性2016
- Author(s)
  寺西美波, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System2016
- Author(s)
  Toshifumi Konishi,Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba, Japan
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer2016
- Author(s)
  Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology
- Place of Presentation
  Kaohsiung, Taiwan
- Year and Date
  2016-09-08
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法2016
- Author(s)
  小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 年吉洋, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ流路チップを用いたレジオネラ・ニューモフィラとレジオネラ・デュモフィのストレス応答の観測2016
- Author(s)
  大西脩平，西村祐典，石田誠，澤田和明，石井仁，町田克之，益一哉，王常楽，飯田健一郎，齋藤光正，吉田眞一
- Organizer
  第8回応用物理学会集積化MEMS シンポジウム
- Place of Presentation
  平戸
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] 小型高感度MEMS慣性センサモジュールの試作評価2016
- Author(s)
  高安基大, 權田惇晟, 山根大輔, 小西敏文, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  LSIとシステムのワークショップ
- Place of Presentation
  東京大学生産技術研究所総合研究実験棟(An棟) 2階コンベンションホール
- Year and Date
  2016-05-16
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ圧縮試験による MEMS 用金電気めっきの機械的特性の評価2016
- Author(s)
  葭葉将治, Chen Chun-Yi, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications2016
- Author(s)
  Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating2016
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices2016
- Author(s)
  Haochun Tang,Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価2016
- Author(s)
  曽根正人, Tso-Fu Mark Chang, 陳君怡, 山根大輔, 益一哉, 町田克之
- Organizer
  日本学術振興会・第172委員会
- Place of Presentation
  物質・材料研究機構, 茨城県つくば市
- Invited
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討2016
- Author(s)
  權田惇晟, 高安基大, 山根大輔, 小西敏文, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1mG検出へ向けた積層メタルMEMS慣性センサ2016
- Author(s)
  山根大輔, 小西敏文, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之
- Organizer
  第8回集積化MEMSシンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討2016
- Author(s)
  山根大輔, 小西敏文, 伊藤浩之, 年吉洋, 益一哉, 町田克之
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  The 2016 PRiME Meeting
- Place of Presentation
  Hawaii, USA
- Year and Date
  2016-10-02
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A 1-mG MEMS Sensor2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  229th ECS Meeting
- Place of Presentation
  San Diego, CA, USA
- Year and Date
  2016-05-29
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology2016
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE Sensors 2016
- Place of Presentation
  Orland, FL, USA
- Year and Date
  2016-10-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyohi, Kazuya Masu, Katsuyuki Machida
- Organizer
  Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016)
- Place of Presentation
  Kanazawa, Japan
- Year and Date
  2016-06-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
- Organizer
  2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba, Japan
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）2016
- Author(s)
  佐布晃昭, 小西敏文, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ圧縮試験による金 / チタン積層構造の機械的特性評価2016
- Author(s)
  石塚陽大, 柳田佐理, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス、東京都目黒区
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices2016
- Author(s)
  Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  the Reed Messe Wien Exhibition & Congress Center, Vienna, Austria
- Year and Date
  2016-09-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hideaki Nakajima, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  29th International Microprocesses and Nanotechnology Conference (MNC 2016)
- Place of Presentation
  ANA Crowne Plaza Kyoto, Kyoto, Japan
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology2016
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE Inertial Sensors 2016
- Place of Presentation
  Laguna Beach, California, USA
- Year and Date
  2016-02-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Pulse Electroplating of Au Films with Ultra High Strength2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  229th ECS Meeting
- Place of Presentation
  San Diego, CA, USA
- Year and Date
  2016-05-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease2016
- Author(s)
  Kazuya Masu, Daisuke Yamane, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake
- Organizer
  the 46th European Solid-State Device Re-search Conference (ESSDERC)
- Place of Presentation
  Swisstech Convention Centre, Lausanne, Switzerland
- Year and Date
  2016-09-12
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] CMOS低雑音オペアンプ設計法の検討2016
- Author(s)
  劉安琪, 小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉
- Organizer
  電子情報通信学会2016年総合大会
- Place of Presentation
  九州大学伊都キャンパス、福岡県福岡市
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers2016
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,
- Organizer
  2nd International Conference and Expo on Separation Techniques
- Place of Presentation
  Valencia, Spain
- Year and Date
  2016-09-26
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Struct2016
- Author(s)
  Yota Ishizuka, Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  ISE - Topical Meeting
- Place of Presentation
  Auckland, New Zealand
- Year and Date
  2016-04-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価2016
- Author(s)
  寺西美波, Chang Tso-Fu Mark, Chen Chun-Yi, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人
- Organizer
  第33回センサ・マイクロマシンと応用シンポジウム
- Place of Presentation
  平戸文化センター, 長崎県平戸市
- Year and Date
  2016-10-24
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating2015
- Author(s)
  Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip2015
- Author(s)
  Y. Nishimura, M. Ishida, K. Sawada, H. Ishii, K. Machida, K. Masu, C. Wang, K. Iida, M. Saito, and S. Yoshida
- Organizer
  The 228th Electrochemical Society Fall Meeting
- Place of Presentation
  Phoenix、USA
- Year and Date
  2015-10-14
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] 電解金めっきで作製した微小カンチレバーの形状安定性評価2015
- Author(s)
  寺西美波, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 松島隆明, 伊藤浩之, 年吉洋, 町田克之, 益一哉, 曽根正人
- Organizer
  平成27年電気学会センサ・マイクロマシン部門総合研究会
- Place of Presentation
  九州大学医学部百年講堂、福岡県福岡市
- Year and Date
  2015-07-02
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] ゲイン制御型CMOS-MEMS加速度センサ回路の検討2015
- Author(s)
  小西敏文, 山根大輔, 高安基大, 伊藤浩之, 道正志郎, 石原昇, 益一哉, 年吉洋, 町田克之
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場愛知県名古屋市
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Compression Deformation of Micro-components Fabricated by FIB from Gold Electrodeposited Films2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  International Symposium for Advanced Materials Research (ISAMR 2015)
- Place of Presentation
  Sun Moon Lake, Taiwan
- Year and Date
  2015-08-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Micro-Mechanical Properties of Electrodeposited Gold Thin Films2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  TACT 2015 International Thin Films Conference
- Place of Presentation
  Tainan, Taiwan
- Year and Date
  2015-11-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G～20G集積化MEMS加速度センサの基本評価2015
- Author(s)
  山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場愛知県名古屋市
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Sub-1G MEMS Inertial Sensor2015
- Author(s)
  Daisuke Yamane, Kazuya Masu, Katsuyuki Machida
- Organizer
  International Symposium for Advanced Materials Research (ISAMR 2015)
- Place of Presentation
  Sun Moon Lake, Taiwan
- Year and Date
  2015-08-16
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Sub-1G～20G集積化MEMS慣性センサ2015
- Author(s)
  山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之
- Organizer
  第7回集積化MEMSシンポジウム
- Place of Presentation
  新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Sub-1G MEMS Sensor2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  the 227th ECS Meeting
- Place of Presentation
  Chicago, Illinois, USA
- Year and Date
  2015-05-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] 電解金めっきで作製したMEMSデバイスにおける動作構造安定性2015
- Author(s)
  寺西美波, Chang Tso-Fu Mark, 小西敏文, 松島隆明, 町田克之, 年吉洋, 山根大輔, 伊藤浩之, 益一哉, 曽根正人
- Organizer
  第6回集積化MEMS技術研究ワークショップ
- Place of Presentation
  NHK放送技術研究所、東京都世田谷区
- Year and Date
  2015-07-31
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Sub-1G CMOS-MEMS Accelerometer2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  IEEE Sensors 2015
- Place of Presentation
  Busan, South Korea
- Year and Date
  2015-11-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] ビーズを用いたPDMS製細菌捕獲チップの検討Ⅳ – 紫外光照射によるレジオネラの光応答の観測 -2015
- Author(s)
  西村祐典，石田誠，澤田和明，石井仁，町田克之，益一哉，王常楽，飯田健一郎，齋藤光正，吉田眞一
- Organizer
  応用物理学会秋季学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Nano-G metrology system and its biomedical applications by CMOS-MEMS technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu
- Organizer
  3rd International Conference on Integrative Biology
- Place of Presentation
  Valencia, Spain
- Year and Date
  2015-08-04
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-2015
- Author(s)
  Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu
- Organizer
  2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2015-04-14
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices2015
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ流路内でのレジオネラ属菌のストレス応答2015
- Author(s)
  西村祐典，石田誠，澤田和明，石井仁，町田克之，益一哉，王常楽，飯田健一郎，齋藤光正，吉田眞一
- Organizer
  電気学会E部門総合研究会
- Place of Presentation
  福岡
- Year and Date
  2015-07-02
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tsu-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer2015
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Hiroshi Toshiyoshi, Katsuyuki Machida
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS加速度センサのための金属構造体の密着力評価2015
- Author(s)
  佐布晃昭, 小西敏文, 松島隆明, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場愛知県名古屋市
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Stress Responses of Bacteria, Legionella, Confined in MEMS Microfluidic Chip2015
- Author(s)
  Y. Nishimura, M. Ishida, K. Sawada, H. Ishii, K. Machida, K. Masu, C. Wang, K. Iida, M. Saito, and S. Yoshida
- Organizer
  9th Int’l Symp. on Nanomedicine (ISNM2015)
- Place of Presentation
  津
- Year and Date
  2015-12-11
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] Stability of Movable Structure Formed by Au Electroplating for MEMS Devices2015
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone
- Organizer
  8th Int. Conf. on Materials for Advanced Technologies (ICMAT 2015)
- Place of Presentation
  SUNTEC, Singapore
- Year and Date
  2015-06-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] マイクロ流路内でのレジオネラ属菌のストレス応答2015
- Author(s)
  西村祐典，石田誠，澤田和明，石井仁，町田克之，益一哉，王常楽，飯田健一郎，齋藤光正，吉田眞一
- Organizer
  集積化MEMSシンポジウム
- Place of Presentation
  新潟
- Year and Date
  2015-10-30
- Data Source
  KAKENHI-PROJECT-15H03992
[Presentation] マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討2015
- Author(s)
  小西敏文, 山根大輔, 高安基大, 伊藤浩之, 道正志郎, 石原昇, 益一哉, 年吉洋, 町田克之
- Organizer
  第7回集積化MEMSシンポジウム
- Place of Presentation
  新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Mechanical Properties of Electrodeposited Gold for MEMS Device2015
- Author(s)
  Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone
- Organizer
  2015 International Conference on Solid State Devices and Materials (SSDM 2015)
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2015-09-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida
- Organizer
  5th Advanced Metallization Conference Asian Session (ADMETAplus2015)
- Place of Presentation
  Seoul, Korea
- Year and Date
  2015-09-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers2015
- Author(s)
  Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone
- Organizer
  41st Micro and Nano Engineering (MNE2015)
- Place of Presentation
  Hague, Netherlands
- Year and Date
  2015-09-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology2015
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida
- Organizer
  32nd Advanced Metallization Conference (AMC2015)
- Place of Presentation
  Austin, Texas, US
- Year and Date
  2015-09-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] MEMS加速度センサのための金属構造体の密着力評価2015
- Author(s)
  佐布晃昭, 小西敏文, 松島隆明, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之
- Organizer
  第7回集積化MEMSシンポジウム
- Place of Presentation
  新潟コンベンションセンター（朱鷺メッセ）、新潟県新潟市
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15K17453
[Presentation] Bacterial diagnostic microfluidic chip for detecting Legionella pneumophila2014
- Author(s)
  Hiromu Ishii, Makoto Ishida, Kazuaki Sawada, Katsuyuki Machida, Kazuya Masu, Ken-ichiro Iida, Mitsumasa Saito, and Shin-ichi Yoshida
- Organizer
  IEEE INEC2014
- Place of Presentation
  Sapporo, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] Bacterial diagnostic microfluidic chip for detecting Legionella pneumophila2014
- Author(s)
  Hiromu Ishii, Makoto Ishida, Kazuaki Sawada, Katsuyuki Machida, Kazuya Masu, Ken-ichiro Iida, Mitsumasa Saito, and Shin-ichi Yoshida
- Organizer
  The 6th IEEE International Nanoelectronics Conference　(INEC 2014), IEEE
- Place of Presentation
  北海道大学　札幌
- Invited
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer2014
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  Proc. 2014 IEEE International Interconnect Technology Conference (IITC)
- Place of Presentation
  San Jose, CA, USA
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] エネルギーハーベスティングデバイスの検討(2)2014
- Author(s)
  加賀谷賢, 小西敏文, 山根大輔, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパ
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers2014
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014)
- Place of Presentation
  EXCO, Daegu, Korea
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] PDMS-BASED MICROFLUIDIC CHIP FOR DETECTION OF LEGIONELLA PNEUMOPHILA BY MIXING WITH MICROBEADS2014
- Author(s)
  R. Hayashi, Y. Nishimura, H. Nakazawa, M. Ishida, K. Sawada, H. Ishii, K. Machida, N. Ishihara, K. Masu, C. Wang, K. Iida, M. Saito, and S. Yoshida
- Organizer
  The 7th　Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014)
- Place of Presentation
  Daegu Korea
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] Sub-1G MEMS 加速度センサの検討2014
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer2014
- Author(s)
  Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  Proc. Symp. On Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014)
- Place of Presentation
  Cannes, Cote d'Azur, France
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] エネルギーハーベスティングデバイスの検討(3)2014
- Author(s)
  小西敏文, 加賀谷賢, 山根大輔, 松島隆明, 伊藤浩之, 石原昇, 益一哉, 町田克之, 年吉洋
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Integrated CMOS-MEMS Technology and its Application2014
- Author(s)
  Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu
- Organizer
  The 2nd Int. Symp. on More-than-Moore, the 225th Meeting of the Electrochemical Society
- Place of Presentation
  Orland, Florida, US
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型MEMS 加速度センサ-2 軸MEMS 加速度センサの検討2014
- Author(s)
  松島隆明, 小西敏文, 山根大輔, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] ビーズを用いたPDMS製細菌捕獲チップの検討2014
- Author(s)
  林隆平，中澤寛一，西村祐典，石田誠，澤田和明，石井仁，町田克之，益一哉，飯田健一郎，齋藤光正，吉田眞一
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学　淵野辺
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] MEMS 加速度センサによるSub-1G 検出の基礎検討2014
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 年吉洋, 町田克之, 益一哉
- Organizer
  平成26年電気学会全国大会
- Place of Presentation
  於愛媛大学城北キャンパス
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] PDMS-BASED MICROFLUIDIC CHIP FOR DETECTION OF LEGIONELLA PNEUMOPHILA BY MIXING WITH MICROBEAD2014
- Author(s)
  R. Hayashi, Y. Nishimura, H. Nakazawa, Ishida, K. Sawada, H.Ishii, K.Machida, Ishihara, K. Masu, C. Wang, K. Iida, M. Saito, S. Yoshida
- Organizer
  The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT)
- Place of Presentation
  Daegu, Korea(accepted for presentation)
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] Bacterial Diagnostic Chip by the Detection of Fluorescence from Legionella pneumophila in a Microbeads Suspension2014
- Author(s)
  R. Hayashi, H. Nakazawa, K. Sawada, M. Ishida, H. Ishii, K. Machida, C. Wang, K. Iida, M. Saito, and S. Yoshida
- Organizer
  225ｔｈ ECS Meeting, The Electrochemical Sciety
- Place of Presentation
  Orland　USA
- Invited
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] エネルギーハーベストデバイスの検討(1)2013
- Author(s)
  加賀谷賢, 小西敏文, 山根大輔, 松島隆明, 佃真文, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型MEMS 加速度センサの設計2013
- Author(s)
  小西敏文, 山根大輔, 本橋剛, 加賀谷賢, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第60回応用物理学会春季学術講演会・合同セッションL
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Challenges in Integration of Diverse Functionalities on CMOS2013
- Author(s)
  Kazuya Masu, Noboru Ishihara, Toshifumi Konishi, Katsuyuki Machida, and Hiroshi Toshiyoshi
- Organizer
  18th Asia and South Pacific Design Automation Conference (ASP-DAC 2013)
- Place of Presentation
  Yokohama City Japan
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] CMOS とMEMS 集積のためのシミュレーション解析 -集積化CMOS-MEMS デバイス実現に向けて2013
- Author(s)
  小西敏文, 山根大輔, 松島隆明, 町田克之, 益一哉, 年吉洋
- Organizer
  電子情報通信学会シリコン・フォトニクス研究会
- Place of Presentation
  東京工業大学
- Year and Date
  2013-10-18
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Bacterial Diagnostic Chip by the Detection of Fluorescence from Legionella pneumophila in a Microbeads Suspension2013
- Author(s)
  R. Hayashi, H. Nakazawa, K. Sawada, M. Ishida, H. Ishii, K. Machida, C. Wang, K. Iida, M. Saito, S. Yoshida
- Organizer
  Abs. Q2-1485, The 225th Electrochemical Society Spring Meeting
- Place of Presentation
  Orland USA
- Invited
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] アレイ型CMOS-MEMS 加速度センサのためのデバイスの評価2013
- Author(s)
  加賀谷賢, 小西敏文, 山根大輔, 本橋剛, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第60回応用物理学会春季学術講演会・合同セッションL
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] エネルギーハーベストデバイスの小型化の検討2013
- Author(s)
  加賀谷賢, 小西敏文, 山根大輔, 松島隆明, 佃真文, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第5回集積化MEMS シンポジウム
- Place of Presentation
  仙台国際センター
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS 技術のためのセンサ回路の検討2013
- Author(s)
  小西敏文, 山根大輔, 松島隆明, 丸山智史, 加賀谷賢, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第5回集積化MEMS シンポジウム
- Place of Presentation
  仙台国際センター
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 細菌迅速検出用マイクロチップV ‐培養条件と蛍光特性‐2013
- Author(s)
  林隆平，中澤寛一，石田誠，澤田和明，石井仁，町田克之，石原昇，益一哉，王常楽，飯田健一郎，齋藤光正，藤井潤，吉田眞一
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学　京都
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] Sub-1G MEMS Accelerometer2013
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  Proc. IEEE SENSORS 2013
- Place of Presentation
  USA
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology2013
- Author(s)
  Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Satoshi Maruyama, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013)
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型MEMS 加速度センサの基本特性評価2013
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 加賀谷賢, 佃真文, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型MEMS 加速度センサの検討2013
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 本橋剛, 加賀谷賢, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第60回応用物理学会春季学術講演会・合同セッションL
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 集積化CMOS-MEMS技術の検討2013
- Author(s)
  町田克之
- Organizer
  電気学会全国大会・シンポジウム
- Place of Presentation
  名古屋大学(愛知県）
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化2013
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 加賀谷賢, 佃真文, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第4回集積化MEMS 技術研究ワークショップ
- Place of Presentation
  大阪府立大学
- Year and Date
  2013-07-26
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型MEMS 加速度センサの特性評価2013
- Author(s)
  山根大輔, 小西敏文, 松島隆明, 加賀谷賢, 佃真文, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第5回集積化MEMS シンポジウム
- Place of Presentation
  仙台国際センター
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] MEMS型細菌チップに捕獲されたレジオネラの蛍光スペクトルと培養条件2013
- Author(s)
  林隆平, 中澤寛一, 石田誠, 澤田和明, 石井仁, 町田克之, 石原昇, 益一哉, 王上楽, 飯田健一郎, 齋藤光正, 藤井潤, 吉田眞一
- Organizer
  第30回センサ・マイクロマシンとその応用システム, 電気学会
- Place of Presentation
  仙台国際センター　仙台
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION2013
- Author(s)
  Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)
- Place of Presentation
  Barcelona, Spain
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 回路シミュレータを用いた集積化CMOS-MEMS のための統合設計環境の構築2013
- Author(s)
  小西敏文, 丸山智史, 山根大輔, 松島隆明, 町田克之, 益一哉, 年吉洋
- Organizer
  応用物理学会第4回集積化MEMS技術研究ワークショップ
- Place of Presentation
  大阪府立大学
- Year and Date
  2013-07-26
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] SPICE 環境下でのMEMS 設計MEMS Design in SPICE Environment2013
- Author(s)
  年吉洋, 小西敏文, 町田克之, 益一哉
- Organizer
  2013年春季応用物理学会合同セッションL, 27p-G9-5
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-27
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL2013
- Author(s)
  Hiroshi Toshiyoshi, Toshifumi Konishi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  Proc. 20th Int. Con. Mixed Design of Integrated Circuits and Systems (MIXDES 2013)
- Place of Presentation
  Poland
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 集積化CMOS-MEMS 加速度センサ回路の検討2013
- Author(s)
  小西敏文, 山根大輔, 松島隆明, 丸山智史, 加賀谷賢, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Bio-MEMS Chip for Bacteria Detection -A Challenge of Si Technology to Biomedical Field-2013
- Author(s)
  Hiromu Ishii, Makoto Ishida, Kazuaki Sawada, Katsuyuki Machida, Ken-ichiro Iida, Mitsumasa Saito, and Shin-ichi Yoshida
- Organizer
  224ｔｈ ECS Meeting, The Electrochemical Sciety
- Place of Presentation
  San　Francisco　USA
- Invited
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] 集積化CMOS-MEMS 技術の検討2013
- Author(s)
  町田克之, 小西敏文, 山根大輔, 年吉洋, 益一哉
- Organizer
  平成25年度電気学会全国大会・シンポジウムS24 ワイヤレス通信応用RF-MEMS 技術
- Place of Presentation
  名古屋大学
- Year and Date
  2013-03-22
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Bio-MEMS Chip for Bacteria Detection–A Challenge of Si Technology to Biomedical Field-2013
- Author(s)
  Hiromu Ishii, Makoto Ishida, Kazuaki Sawada, Katsuyuki Machida, Ken-ichiro Iida, Mitsumasa Saito, Shin-ichi Yoshida
- Organizer
  Abs. E12-2222, The 224th Electrochemical Society Fall Meeting
- Place of Presentation
  San Francisco, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] アレイ型MEMS 加速度センサの基礎検討2013
- Author(s)
  佃真文, 山根大輔, 小西敏文, 松島隆明, 加賀谷賢, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  平成25年度電気学会総合研究会
- Place of Presentation
  東京工科大学
- Year and Date
  2013-08-08
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 集積化CMOS-MEMS技術の検討2012
- Author(s)
  町田克之
- Organizer
  第5回マイクロシステム融合研究会
- Place of Presentation
  東北大学(招待講演)
- Year and Date
  2012-03-08
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Fabrication of Bio-MEMS Device for on-chip Testing of the Bacteria Behavior2012
- Author(s)
  Youngshik Shin, Kyohei Katsube, Kazuaki Sawada, Makoto Ishida, Hiromu Ishii, Katsuyuki Machida, Kazuya Masu, Ken-ichiro Iida, Mitsumasa Saito, and Shin-ichi Yoshida
- Organizer
  2012 MRS Spring Meeting, JSAP-MRS
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] アレイ型CMOS-MEMS 加速度センサの検討(1)2012
- Author(s)
  本橋剛, 小西敏文, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators2012
- Author(s)
  Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Hiroshi Toshiyoshi
- Organizer
  The 1st Int. Symp. on More-than-Moore, the 222nd Meeting of the Electrochemical Society / The 2012 Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME)
- Place of Presentation
  Hawaii, US
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 細菌迅速検出用マイクロチップ IV ‐蛍光色素を用いた細菌検出条件の検討‐2012
- Author(s)
  林　隆平，勝部恭平，中澤寛一，石田　誠，澤田和明，石井　仁，町田克之，石原　昇，益　一哉，飯田健一郎，齋藤光正，藤井　潤，吉田眞一
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] How can we bridge the gap between photonics and Si CMOS LSI?2012
- Author(s)
  Kazuya Masu, Toshifumi Konishi, Katsuyuki Machida, and Hiroshi Toshiyoshi
- Organizer
  The 2nd International Symposium on Photonics and Electronics Convergence-Advanced Nanophotonics and Silicon Device Systems-(ISPEC 2012)
- Place of Presentation
  Tokyo, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Fabrication of Bio-MEMS Device for on-chip Testing of the Bacteria Behavior2012
- Author(s)
  Youngshik Shin, Kyohei Katsube, Kazuaki Sawada, Makoto Ishida, Hiromu Ishii, Katsuyuki Machida, Kazuya Masu, Ken-ichiro Iida, Mitsumasa Saito, Shin-ichi Yoshida
- Organizer
  Abstract No. B 5.3, Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI, Symp. B, 2012 MRS Spring Meeting, JSAP-MRS
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] ハードウェハ記述言語を用いた集積化CMOS-MEMS 統合設計技術2012
- Author(s)
  小西敏文, 丸山智史, 三田信, 山根大輔, 伊藤浩之, 町田克之, 石原昇, 益一哉, 藤田博之, 年吉洋
- Organizer
  応用物理学会第4回集積化MEMS シンポジウム, IM1-4
- Place of Presentation
  北九州国際会議場
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 細菌迅速検出用マイクロチップIII　‐細菌の捕獲状態と蛍光強度‐2012
- Author(s)
  勝部恭平，林隆平，辛永式，中澤寛一，石田誠，澤田和明，石井仁，町田克之，石原昇，益一哉，飯田健一郎，齋藤光正，藤井潤，吉田眞一
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] A Multi-Physics Simulation Technique for Integrated MEMS2012
- Author(s)
  Hiroshi Toshiyoshi, Toshifumi Konishi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  2012 IEEE International Electron Devices Meeting (IEDM 2012)
- Place of Presentation
  San Francisco, CA, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型CMOS-MEMS 加速度センサのためのデバイスの検討2012
- Author(s)
  山根大輔, 本橋剛, 小西敏文, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第4回集積化MEMS シンポジウム, IM3-4
- Place of Presentation
  北九州国際会議場
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型CMOS-MEMS 加速度センサの検討42012
- Author(s)
  本橋剛, 小西敏文, 松島隆明, 山根大輔, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  2012年秋期第73 会応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language2012
- Author(s)
  Toshifumi Konishi, Satoshi Maruyama, Makoto Mita, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu, Hiroyuki Fujita, and Hiroshi Toshiyoshi
- Organizer
  2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)
- Place of Presentation
  Kyoto Int. Conf. Center, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer2012
- Author(s)
  Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)
- Place of Presentation
  Kyoto Int. Conf. Center, Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Bio-MEMES Chip for Trapping Bacteria by Si-pillar Structure and Its Application to Legionella2012
- Author(s)
  K. Katsube, R. Hayashi, Y. Shin, H. Nakazawa, M. Ishida, K. Sawada, H. Ishii, K. Machida, N. Ishihara, K. Masu, Y. Takekawa, C. Wang, K. Iida, M. Saito, J. Fujii, S. Yoshida
- Organizer
  The 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT), IEEE
- Place of Presentation
  南京、中国
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] MEMS型細菌捕獲チップの製作とレジオネラを用いた評価2012
- Author(s)
  林隆平，勝部恭平，辛永式，中澤寛一，石田誠，澤田和明，石井仁，町田克之，石原昇，益一哉，飯田健一郎，齋藤光正，藤井潤，吉田眞一
- Organizer
  第29回センサ・マイクロマシンとその応用システム，電気学会
- Place of Presentation
  小倉
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] Bio-MEMES Chip for Trapping Bacteria by Si-pillar Structure and Its Application to Legionella2012
- Author(s)
  Kyohei Katsube, Ryuhei Hayashi, Youngshik Shin, Hirokazu Nakazawa, Makoto Ishida, Kazuaki Sawada, Hiromu Ishii, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu, Yuta Takekawa, Changle Wang, Ken-ichiro Iida, Mitsumasa Saito, Jun Fujii, Shin-ichi Yoshida
- Organizer
  Abstract No. ac12000224, The 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT)
- Place of Presentation
  Nanjing, China
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] 0.35μmCMOS-LSI によるMEMS センサ用VCO 回路の検討2012
- Author(s)
  本橋剛, 小西敏文, 松島隆明, 山根大輔, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第4回集積化MEMS シンポジウム, IM3-5
- Place of Presentation
  北九州国際会議場
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Fabrication of microfluidic device for the bacteria observation2012
- Author(s)
  Youngshik Shin，Kyohei Katsube，Makoto Ishida，Kazuaki Sawada，Hiromu Ishii，Katsuyuki Machida，Noboru Ishihara，Kazuya Masu，Ken-ichiro Iida，Mistumasa Saito，Jun Fujii，Shin-ichi Yoshida
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] アレイ型CMOS-MEMS 加速度センサの検討2012
- Author(s)
  山根大輔, 本橋剛, 小西敏文, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第3回集積化MEMS 技術研究ワークショップ
- Place of Presentation
  岩手県雫石
- Year and Date
  2012-07-20
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Fabrication of Microfluidic Device for On-chip Observation of Bacterial Behavior2012
- Author(s)
  Youngshik Shin, Kyohei Katsube, Makoto Ishida, Kazuaki Sawada, Hiromu Ishii, Katsuyuki Machida, Kazuya Masu, Ken-ichiro Iida, Mitsumasa Saito, and Shin-ichi Yoshida
- Organizer
  第29回センサ・マイクロマシンとその応用システム，電気学会
- Place of Presentation
  小倉
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] 統合設計技術のためのMEMS 加速度センサのモデルの検討2012
- Author(s)
  加賀谷賢, 小西敏文, 山根大輔, 伊藤浩之,石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  応用物理学会第4回集積化MEMS シンポジウム
- Place of Presentation
  北九州国際会議場
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型CMOS-MEMS 加速度センサの検討32012
- Author(s)
  松島隆明, 小西敏文, 本橋剛, 山根大輔, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  2012年秋期第73 会応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] アレイ型CMOS-MEMS 加速度センサの検討(2)2012
- Author(s)
  小西敏文, 本橋剛, 松島隆明, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-15
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers2012
- Author(s)
  Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu
- Organizer
  25th Int. Microprocesses and Nanotechnology Conference (MNC 2012)
- Place of Presentation
  Kobe, Japan
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Integrated CMOS-MEMS Technology and its application2011
- Author(s)
  K.Machida
- Organizer
  Nano Korea 2011
- Place of Presentation
  Seoul, Korea(招待講演)
- Year and Date
  2011-08-24
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Integrated CMOS-MEMS Technology and its application2011
- Author(s)
  K.Machida
- Organizer
  IITC2011
- Place of Presentation
  Dresden, Germany(招待講演)
- Year and Date
  2011-05-08
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 集積化CMOS-MEMS技術とシミュレーションへの期待2011
- Author(s)
  町田克之
- Organizer
  第4回MemsOne技術交流会
- Place of Presentation
  東京(招待講演)
- Year and Date
  2011-12-16
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 集積化 CMOS-MEMS のための統合設計技術の検討 (2)2011
- Author(s)
  小西敏文, 丸山智史, 松島隆明, 三田信, 町田克之, 伊藤浩之, 石原昇, 益一哉, 藤田博之, 年吉洋
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 細菌迅速検出用マイクロチップII　‐蛍光強度の細菌濃度依存性‐2011
- Author(s)
  勝部恭平，辛永式，石田誠，澤田和明，石井仁，町田克之，石原昇，益一哉，飯田健一郎，齋藤光正，藤井潤，吉田眞一
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Data Source
  KAKENHI-PROJECT-23560394
[Presentation] Integrated CMOS-MEMS Technology and its Application2011
- Author(s)
  Katsuyuki Machida, Hiroki Morimura, and Kazuya Masu
- Organizer
  2011 IEEE International Interconnect Technology Conference for Advanced Metallization
- Place of Presentation
  Dresden, Germany
- Year and Date
  2011-05-08
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] Integrated CMOS-MEMS Technology and its Application2011
- Author(s)
  Katsuyuki Machida, Hiroki Morimura, and Kazuya Masu
- Organizer
  The 9th International Symposium & Exhibition in Korea
- Place of Presentation
  Korea
- Year and Date
  2011-08-24
- Invited
- Data Source
  KAKENHI-PROJECT-23360149
[Presentation] 集積化CMOS-MEMS 技術とシミュレーションへの期待2011
- Author(s)
  町田克之
- Organizer
  第4回MemsOne 技術交流会,マイクロマシンセンタ主催
- Place of Presentation
  東京
- Year and Date
  2011-12-16
- Invited
- Data Source
  KAKENHI-PROJECT-23360149

1. ISHII Hiromu (20506175)

# of Collaborated Projects: 3 results

# of Collaborated Products: 53 results
2. MASU Kazuya (20157192)

# of Collaborated Projects: 2 results

# of Collaborated Products: 208 results
3. 齋藤光正 (00315087)

# of Collaborated Projects: 2 results

# of Collaborated Products: 31 results
4. TOSHIYOSHI Hiroshi (50282603)

# of Collaborated Projects: 1 results

# of Collaborated Products: 51 results
5. ISHIHARA Noboru (20396641)

# of Collaborated Projects: 1 results

# of Collaborated Products: 33 results
6. SHIN-ICHI Yoshida (60128113)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. Yamane Daisuke (70634096)

# of Collaborated Projects: 1 results

# of Collaborated Products: 155 results
8. SONE Masato (30323752)

# of Collaborated Projects: 1 results

# of Collaborated Products: 110 results
9. CHANG tsu-fu mark

# of Collaborated Projects: 0 results

# of Collaborated Products: 8 results
10. 吉田真一

# of Collaborated Projects: 0 results

# of Collaborated Products: 22 results
11. 宮原敏

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Machida Katsuyuki 町田 克之

MACHIDA Katsuyuki 町田 克之

MACHIDA KATSUYUKI 町田 克之

Research Projects

Research Products

Co-Researchers

Dynamic Processes of Bacterial Stress Response: Development of Novel Bacterial Identification Method Inspired by Electronics

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Electronics Inspired Bacterial Ethology

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Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal Structure

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The study on human monitoring chip and multi-physics simulation technologyPrincipal Investigator

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Fundamental Research on MEMS-based Bacterial Sensor

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[Book] Advances in Microelectronics: Reviews, Vol. 1, "Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors"2018

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[Book] 異種機能デバイス集積化技術の基礎と応用2012

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[Book] 異種機能デバイス集積化技術の基礎と応用2012

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[Journal Article] Detection system for Legionella bacteria using photogate-type optical sensor2022

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[Journal Article] Sensing <i>Legionella</i> by Photogate-type Fluorescence Sensor2020

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[Journal Article] Bacterial Identification by Using Photogate-Type Optical Sensor2019

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[Journal Article] Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide2018

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[Journal Article] 蛍光センサによる細菌識別に向けたレジオネラ属菌の発光特性の検討2018

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Machida Katsuyuki 町田克之

MACHIDA Katsuyuki 町田克之

MACHIDA KATSUYUKI 町田克之