2020 年 62 巻 1 号 p. 17-25
Recently, the atomic arrangement analysis of dopants in crystal using atomic resolution holography, such as photoelectron holography, X-ray fluorescence holography and neutron holography become possible. The equation for converting an atomic arrangement to an atomic resolution hologram is given. In order to obtain an atomic arrangement from a measured hologram, it is necessary to perform inverse conversion, which is an underdetermined system. L1 regression used for machine learning is effective to solve it. Taking photoelectron holography as an example, the principle of the atomic resolution holography, algorithm to a tree-dimensional atom image, and the analysis of atomic arrangement of the phosphorus dopant in diamond by photoelectron holography are shown.