石田 誠  ISHIDA Makoto

Small

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IEICE Electronics Express

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Applied Physics Letters

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Sens. Actuator B-Chem.

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10.1016/j.snb.2014.09.048

Microelectronics Reliability

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10.1016/j.microrel.2015.09.003

Advanced Healthcare Materials,

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Sensors

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IEEE Electron Device Lett.

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Sci. Rep.

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Jpn. J. Appl. Phys.

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応用物理学会誌

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Analog Integr. Circuits Signal Process.

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電気学会誌

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Analog Integr. Circuits Signal Process.

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Appl. Phys. Lett.

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Jpn. J. Appl. Phys.

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クリーンテクノロジー

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人工臓器

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IEEE Trans. Comp., Pack. & Manufac. Tech.

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Nanotechnology

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Jpn. J. Appl. Phys

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Solid-State Electron.

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IEEE Trans. Electrical & Electronic Eng.

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Microelectron. J.

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10.1016/j.mejo.2011.06.009

Biosensors & Bioelectron.

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10.1016/j.bios.2010.10.014

Biosensors and Bioelectronics Vol.26, No.5

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J. Micromech. & Microeng.

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IEEE Electron DeviceLett.

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10.1109/led.2011.2120590

Journal of Micromechanics and Microengineering Vol.21, No.3

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Biosensors and Bioelectronics

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Nanotechnology

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Nanotechnology

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Biosensors & Bioelectron.

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10.1016/j.bios.2009.12.037

Biomedical Microdevices

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Microdevices Vol.12, No.1

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Biosensors and Bioelectronics Vol.25, No.7

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Nanotechnology Vol.21, No.12

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Biomedical Microdevices

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10.1007/s10544-009-9356-y

Physics Letters Vol.95

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Appl. Phys. Lett.

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10.1063/1.3178556

Biomedical Microdevices

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10.1007/s10544-008-9259-3

Jpn. J. Appl. Phys (In press)

Biomedical Microdevices Vol.11, No.3

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Journal of Micromechanics and Microengineering Vol.18, No.3

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IEEE Sensors Journal Vol.8, No.5

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IEEE Sensors Journal 7

Jpn.J.Appl.Phys vol.47 No.1

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40015871584

The Japan Society of Applied Physics(The 55rd Spring Meeting) No.3

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IEEE Sensors Journal Vol.8, No.5

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Journal of Micromechanics and Microengineering Vol.18, No.3

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Biomedical Microdevices (Published online : 04 December08)

Journal of Micromechanics and Microengineering Vol.18, No.3

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Japanese Journal of Applied Physics 47

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40015871584

International Conference on Solid State Devices and Materials

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Engineering in Medicine and Biology Society, 2007. 29th Annual International Conference of the IEEE

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Sensors, 2007 IEEE

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Journal of Crystal Growth Vol.306, No.2

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Solid-State Sensors, Actuators and Microsystems Conference, 2007.TRANSDUCERS2007.International

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Journal of Crystal Growth Vol.306, No.2

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Sensors Vol.7

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Engineering in Medicine and Biology Society, 2007.29th Annual International Conference of the IEEE

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Sensors Vol.7

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Korea-Japna Joint Workshop on Bio-materials and Electronic Devices for the 60th Anniversary of Dankook University(lnvited talk)

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Technical Program & Abstracts of 10th International Conference on Advanced Materials(IUMRS-ICAM 2007)(lnvited talk)

2007 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

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Journal of Crystal Growth Vol.306, No.2

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International Conference on Solid State Devices and Materials

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Sensors Vol.7

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24th Sensor Symposium

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2007 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

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IEEE Sensors 2007

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The 24th Sensor Symposium on IEEJ

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計測と制御(社団法人 計測自動制御学会) Vol.46, No.2

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10018544052

Solid-State Sensors, Actuators and Microsystems Conference 2007(TRANSDUCERS 2007)

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Semiconductor Science and Technology Vol.21

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映情学技報 30(59)

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10018458891

Jpn.J.Appl.Phys (Publish)

The Japan Society of Applied Physics (The 53rd Spring Meeting) No.3

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International Forum on Micro-Nano Hetero System Integration in Sendai(MHSI-'06)and The 2nd Fraunhofer Symposium in Sendai(Invited talk)

The Japan Neuroscience Society (The 29^<th> Annual Meeting) Vol.55, Sub.1

2007年春季 第54回応用物理学関係連合講演会 3分冊

Japanese Journal of Applied Physics Vol.45, No.6A(in press)

IEEE Sensors 2006 Conference

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The Japan Society of Applied Physics(The 67th Autumn Meeting) No.3

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Japanese Journal of Applied Physics Vol.45, No.4

10018158776

Korea and Japan Joint Seminar on Semiconductor Manufacturing Process(Invited talk)

Semiconductor Science and Technology Vol.21

ページ: 1364-1368

IEEE Transactions on Electron Devices 53(3)

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International Symposium on LifeChips 2006(Invited talk)

The Japan Society of Applied Physics (The 67th Autumn Meeting) No.3

ページ: 1186-1186

Japanese Journal of Applied Physics Vol.45, No.4

10018158776

2006 International Meeting The 210th Meeting of The Electrochemical Society

ページ: 1252-1252

The Japan Society of Applied Physics(The 53rd Spring Meeting) No.3

ページ: 1384-1384

Semiconductor Science and Technology Vol.21

ページ: 1364-1368

The Japan Society of Applied Physics (The 53rd Spring Meeting) No.3

ページ: 1384-1384

The Japan Neuroscience Society(The 29th Annual Meeting) Vol.55, Sub.1

Joint Seminar on Sensor and MEMS between NECTEC and IEEJ Society E(Invited talk)

The Japan Society of Applied Physics(The 53rd Spring Meeting) No.3

ページ: 1383-1383

IEEE Sensors 2006

ページ: 34-36

第23回「センサ・マイクロマシンと応用システム」シンポジウム

Japanese Journal of Applied Physics vol.45, No.4

The Japan Society of Applied Physics (The 53rd Spring Meeting) No.3

ページ: 1383-1383

Japanese Journal of Applied Physics Vol.45, No.6A (in press)

10018148817

SENSORS AND ACTUATORS A (PHYSICAL) 128

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International semiconductor Device Research symposium

IEICE Technical Report Vol.105,No.184

ページ: 83-87

110003318329

Journal of Vacuum Science & technology B Vol.23, No.2

ページ: 864-867

日本生理学会大会 (印刷中)

130005447564

IEICE Technical Report Vol.105, No.184

ページ: 83-87

110003318329

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'05), Seoul, Korea, 05-09, June

ページ: 581-584

Applied Physics Letters Vol.86, No.20

Journal of Vacuum Science & Technology B Vol.23, No.2

ページ: 864-867

The 22nd Sensor Symposium on IEEJ

ページ: 265-269

第52回応用物理学関係連合講演会

Solid-State Sensors, Actuators and Microsystems Conference 2005(TRANSDUCERS 2005), Vol.2

ページ: 1222-1225

Japanese Journal of Physiology Vol.55

130005447564

The 44th Annual Conference of Japanese Society for Medical and Biological Engineering(Invited talk) Vol.43, Suppl.1

ページ: 218-218

The 22nd Sensor Symposium on IEEJ

ページ: 265-269

Journal of Vacuum Science & Technology B Vol.23, No.2

ページ: 864-867

Joint Workshop On Future Semiconductor Sensors(Invited talk)

The Japan Society of Applied Physics (The 66rd Fall meeting) No.2

第2回赤外放射の応用関連学会

10015516999

International Semiconductor Device Research Symposium

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'05)

ページ: 581-584

Technical Digest of The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05) Vol.2

ページ: 1222-1225

International Symposium for Advanced Sensor Technology(Invited talk)

Japanese Journal of Applied Physics Vol.44, No.4B

ページ: 2161-2165

10015703596

Japanese Journal of Applied Physics Vol.44, No.4B

ページ: 2161-2165

10015703596

第52回応用物理学関係連合講演会

The Japan Society of Applied Physics (The 66rd Fall meeting) No.2

カーボンナノチューブ-FED プロジェクト公開シンポジウム, 第2回真空ナノエレクトロニクスシンポジウム[招待講演]

Applied Physics Letters Vol.86, No.20

第52回応用物理学関係連合講演会

The 44th Annual Conference of Japanese Society for Medical and Biological Engineering Vol.43, Suppl.1

ページ: 218-218

The Japan Society of Applied Physics (The 66th Autumn Meeting) No.3

ページ: 1138-1138

The Japan Society of Applied Physics(The 66th Autumn Meeting) No.3

ページ: 1138-1138

International Semiconductor Device Research Symposium, Maryland, USA, 7-9 December

Japanese Journal of Applied Physics Vol.44, No.4B

ページ: 2161-2165

10015703596

2004 International Electron Devices Meeting (IEDM 2004). San Francisco, CA, USA. December 13-15

ページ: 1013-1016

第52回応用物理学関係連合講演会

The Japan Society of Applied Physics (The 52nd Spring meeting) No.3

ページ: 1467-1467

映像情報メディア学会 情報センシング研究会

10014032874

Journal of Vacuum Science & Technology B Vol.22, No.3

ページ: 1396-1401

17th International Vacuum Nanoelectronics Conference

ページ: 292-293

17th International Vacuum Nanoelectronics Conference, Ray and Maria Stata Center, Massachusetts Institute of Technology, Cambridge, MA, USA, 11-16 July

ページ: 292-293

平成16年度電気関係学会東海支部連合大会

Superlattices and Microstructures 34

ページ: 567-575

The Japan Society of Applied Physics (The 52nd Spring meeting) (Invited) No.0

ページ: 37-37

Technocal Digest of the 17th International Vacuum Nanoelectronics Conference (Cambridge, MA,)

ページ: 292-293

26th Annual International Conference IEEE Engineering in Medicine and Biology Society (EMBS2004)

ページ: 2066-2069

IEEJ Transactions on Sensors and Micromachines Vol.123,No.9

ページ: 363-367

10011752127

26th Annual International Conference IEEE Engineering in Medicine and Biology Society (EMBS 2004)

ページ: 2066-2069

Journal of Crystal Growth Vol.264, No.1-3

ページ: 463-467

SENSORS AND ACTUATORS A 114

ページ: 230-235

第43回エム・イー学会大会

ページ: 428-428

The Japan Society of Applied Physics (The 65th Fall meeting) (Invited) No.0

ページ: 11-11

Abstracts of the International Conference on SOLID STATE DEVICES AND MATERIALS, Tokyo, Japan, September 15-17

ページ: 176-177

10022538124

Abstracts of the International Conference on SOLID STATE DEVICES AND MATERIALS

ページ: 176-177

10022538124

Journal of Vacuum Science & Technology B 22(3)

ページ: 1358-1361

The Japan Society of Applied Physics (The 52nd Spring meeting) No.3

ページ: 1467-1467

IEEE Trans.Electron Device 51

ページ: 415-420

平成16年度 電気関係学会東海支部 連合大会

Journal of Crystal Growth 264(1-3)

ページ: 463-467

Journal of Vacuum Science & Technology B 22(3)

ページ: 1396-1401

26th Annual International Conference IEEE Engineering in Medicine and Biology Society (EMBS 2004), San Francisco, CA, USA, September 1-5

ページ: 2066-2069

The 5th Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipment

ページ: 133-138

The Japan Society of Applied Physics (The 51st Spring meeting) No.3

ページ: 1438-1438

The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2004)

ページ: 520-523

2004 International Electron Devices Meeting (IEDM 2004)

ページ: 1013-1016

第43回エム・イー学会大会

ページ: 225-225

The Brain & Neural Networks Vol.11, No.3

ページ: 125-132

10013665995

PROCEEDINGS OF THE 21_ST SENSOR SYMPOSIUM

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The Japan Society of Applied Physics (The 51st Spring meeting) No.3

ページ: 1438-1438

SENSORS AND ACTUATORS A 114

ページ: 230-235

IEEE Transactions on Electron Device Vol.51, No.3

ページ: 415-420

2004 MRS Fall Meeting, Boston, MA, USA

IEEE Trans.Electron Device 51

ページ: 415-420

Proceeding of the IEEE International Electron Devices Meeting

ページ: 1013-1016

Journal of Crystal Growth 264

ページ: 463-467

IEEE Transactions on Electron Devices Vol.51, No.3

ページ: 415-420

The 5th Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipment, Unzen, Japan, November 18-20

ページ: 133-138

The Japan Society of Applied Physics (The 52nd Spring meeting) No.3

ページ: 1467-1467

IEEJ Transactions on Sensors and Micromachines Vol.123, No.9

ページ: 363-367

10011752127

電子情報通信学会技術研究報告 103

ページ: 71-76

110003232532

Superlattices and Microstructures 34

ページ: 567-575

The Japan Society of Applied Physics (The 51st Spring meeting) No.2

IEEE Transactions on Electron Devices Vol.51,No.3

ページ: 415-420

Journal of Vacuum Science & Technology B Vol.22, No.3

ページ: 1358-1361

Abstracts of the International Conference on SOLID STATE DEVICES AND MATERIALS

ページ: 176-177

10022538124

日本神経回路学会誌 Vol.11, No.3

ページ: 125-132

10013665995

IEEE Trans.Electron Device Vol.51

ページ: 415-420

The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2004), Maastricht, Holland, January 25-29

ページ: 520-523

日本神経回路学会誌 Vol.11,No.3

ページ: 125-132

10013665995

The 16th International Vacuum Microelectronics Conference (IVMC2003)

ページ: 69-70

The 12th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'03) No.2

ページ: 1622-1625

The Japan Society of Applied Physics (The 50th Spring meeting) No.3

ページ: 1393-1393

The 12th International Conference on Solid-State Sensors and Actuators (Transducers'03), Boston Massachusetts, USA, June 8-12 Vol.2

ページ: 1682-1690

Technical Report of Information and Communication Engineering

ページ: 73-78

The 12th International Conference on Solid-State Sensors and Actuators (Transducers'03) Vol.2

ページ: 1679-1682

Japanese Journal of Applied Physics Vol.42, Part.1, No.4B

ページ: 2473-2477

Twelfth International Workshop on The Physics of Semiconductor Device (Invited) Vol.2

ページ: 661-666

Technical Report of Information and Communication Engineering

ページ: 1-6

10012554327

International Sensor Conference 2003 [ISC 2003] (Invited), Daegu EXCO, Korea, 14-15 November

ページ: 90-91

Japanese Journal of Applied Vol.42 Part.1, No.9A

ページ: 5741-5746

10011614898

IEICE Transactions on Electronics Vol.E86-C, No.9

ページ: 1805-1809

110003214736

Second Joint Congress -KENSA 2003- The 43rd Annual Meeting of the Japan Society of Clinical Chemistry (JSCC), The 50th National Congress of the Japanese Society of Laboratory Medicine (JSLM) (Invited)

ページ: 51-51

2003 RCIQE International Seminar on "Quantum Nanoelectronics for Meme-Media-Based Information Technologies"(Invited), Hokkaido, Japan, February 12-14

ページ: 92-99

International Sensor Conference 2003 [ISC 2003] (Invited)

ページ: 90-91

IEICE Transactions on Electronics Vol.E86-C, No.9

ページ: 1805-1809

110003214736

Journal of Crystal Growth 259

ページ: 90-94

The 12th International Conference on Solid-State Sensors and Actuators (Transducers'03), Boston Massachusetts, USA, June 8-12 Vol.2

ページ: 1679-1682

IEEJ Trans.Sensors and Micromachines Vol.123

ページ: 363-367

10011752127

Japanese Journal of Applied Physics Vol.42 Part.1, No.9A

ページ: 5741-5746

10011614898

The 16th International Vacuum Microelectronics Conference (IVMC2003)

ページ: 269-270

The Japan Society of Applied Physics (The 64th Fall meeting) No.3

ページ: 1191-1191

The 12th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'03), Boston Massachusetts, USA, 8-12 June No.2

ページ: 1622-1625

Sixth International Conference on New Phenomena in mesoscopic Structures-Fourth International Conference on Surfaces and interfaces of mesoscopic Devices (NPMS-6/SIMD-4), Maui, Hawaii, USA, November 30-December 5

ページ: 141-142

The 12th International Conference on Solid-State Sensors and Actuators (Transducers'03) Vol.2

ページ: 1682-1690

The 20th Sensor Symposium on the IEEJ

ページ: 339-342

Second International Conference on Molecular Electronics and Bioelectronics (M & BE2)(Invited), Tokyo. Japan, March 5-7

ページ: 139-139

The Japan Society of Applied Physics (The 64th Fall Meeting)

The 16th International Vacuum Microelectronics Conference (IVMC2003), Osaka, Japan, 7-11 July

ページ: 269-270

The 16th International Vacuum Microelectronics Conference (IVMC2003), Osaka, Japan, 7-11 July

ページ: 69-70

電子情報通信学会技術研究報告

10019078431

Japanese Journal of Applied Physics Vol.42

ページ: 2473-2477

2003 RCIQE International Seminar on "Quantum Nanoelectronics for Meme-Media-Based Information Technologies" (Invited)

ページ: 92-99

Second International Conference on Molecular Electronics and Bioelectronics (M&BE2) (Invited)

ページ: 139-139

Journal of Crystal Growth 259

ページ: 90-94

The Japan Society of Applied Physics (The 50th Spring meeting) No.3

ページ: 1393-1393

Twelfth International Workshop on The Physics of Semiconductor Device (Invited), Chennai, India, December 16-20 Vol.2

ページ: 661-666

The 18th Symposium on Biological and Physiological Engineering 【BPES 2003】(Invited)

ページ: 181-184

The Japan Society of Applied Physics (The 50th Spring meeting) No.3

ページ: 1393-1393

Japanese Journal of Applied Physics Vol.42,Part.1,No.4B

ページ: 2473-2477

Sixth International Conference on New Phenomena in mesoscopic Structures-Fourth International Conference on Surfaces and interfaces of mesoscopic Devices (NPMS-6/SIMD-4)

ページ: 141-142

The Japan Society of Applied Physics (The 63rd Spring meeting) No.3

ページ: 1154-1154

The Japan Society of Applied Physics (The 63rd Spring meeting) No.3

ページ: 1153-1153

PACIFIC RIM WORKSHOP ON TRANSDUCERS AND MICRO/NANO TECHNOLOGIES (Invited), Xiamen, China, July 21-23

ページ: 295-298

The International Conference on Electrical Engineering, Jeju Island, Korea, July 7-11

ページ: 1311-1314

PACIFIC RIM WORKSHOP ON TRANSDUCERS AND MICRO/NANO TECHNOLOGIES (Invited)

ページ: 295-298

The 19th Sensor Symposium on the IEEJ

ページ: 487-490

International Conference on Smart Materials, Structures and Systems ISSS-SPIE 2002 (Invited)

ページ: 302-309

International Conference on Smart Materials, Structures and Systems ISSS-SPIE 2002 (Invited), Bangalore, India, November 10-12

ページ: 302-309

The 19th Sensor Symposium on the IEEJ

ページ: 421-424

The International Conference on Electrical Engineering

ページ: 1311-1314

Sensors and Actuators A 97-98

ページ: 709-715

The Japan Society of Applied Physics (The 63rd Spring meeting) No.3

ページ: 1153-1153

Jpn.J.Appl.Phys (in press)

40016627226

IEEE Electron Device Letters (accepted)